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US8251347B2 - High pressure diaphragm valve with exchangeable seat assembly - Google Patents

High pressure diaphragm valve with exchangeable seat assembly Download PDF

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Publication number
US8251347B2
US8251347B2 US12/664,407 US66440708A US8251347B2 US 8251347 B2 US8251347 B2 US 8251347B2 US 66440708 A US66440708 A US 66440708A US 8251347 B2 US8251347 B2 US 8251347B2
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US
United States
Prior art keywords
ring
seat
nozzle
valve
central
Prior art date
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Expired - Fee Related, expires
Application number
US12/664,407
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English (en)
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US20110140014A1 (en
Inventor
Jeannot Schmit
Paul Kremer
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Rotarex SA
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Luxembourg Patent Co SA
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Assigned to LUXEMBOURG PATENT COMPANY S.A. reassignment LUXEMBOURG PATENT COMPANY S.A. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KREMER, PAUL, SCHMIT, JEANNOT
Publication of US20110140014A1 publication Critical patent/US20110140014A1/en
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Assigned to ROTAREX S.A. reassignment ROTAREX S.A. MERGER (SEE DOCUMENT FOR DETAILS). Assignors: LUXEMBOURG PATENT COMPANY S.A.
Expired - Fee Related legal-status Critical Current
Adjusted expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam

Definitions

  • the present invention generally relates to a high pressure diaphragm gas valve with an exchangeable seat assembly.
  • High pressure diaphragm valves with an exchangeable seat assembly are e.g. used as gas cylinder valves or as shut-off valves for high pressure toxic, corrosive, highly oxidizing or highly flammable gases, but also for high pressure inert gases. They show an excellent gas tightness and resistance to such high pressure gases.
  • Such a high pressure diaphragm valve with an exchangeable seat assembly is e.g. disclosed in U.S. Pat. No. 5,215,286. It comprises a valve body having therein a valve chamber of a generally cylindrical configuration. This valve chamber has at one end a flat bottom surface with a central gas inlet port and a lateral gas outlet port therein. A flexible multi-layer diaphragm seals the opposite end of the valve chamber.
  • a seat assembly including a metal mounting ring and synthetic seat ring, is removably fitted in the valve chamber.
  • the mounting ring has a central, cylindrical seat hole, an outer ring flange and a plurality of circumferentially spaced through openings arranged between the seat hole and the outer ring flange.
  • the synthetic seat ring is fitted in the central seat hole of the mounting ring. It is a cylindrical body with a ring flange at its foot end and a central through hole. The foot end with the ring flange forms a seat ring foot surface that is pressed by the mounting ring onto the flat bottom surface around the central gas inlet port, wherein an inner flange of the mounting ring overlies the ring flange of the synthetic seat ring and compresses the latter.
  • the other end of the synthetic seat ring forms a funnel-shaped seat surface in the valve chamber.
  • a thin-walled rigid metal sleeve is closely received within the seat ring and rests with one end on the bottom surface of the valve chamber, wherein the funnel-shaped seat surface protrudes over the other end of the metal sleeve.
  • the rigid metal sleeve and the mounting ring closely engage about the interior and exterior of the seat ring to prevent radial deformation and axial deflection of the latter when the seat surface is engaged by the diaphragm.
  • the outer rim of the diaphragm is clamped about its periphery to an upwardly extending sealing bead on the outer ring flange of the mounting ring, whereby the outer ring flange of the mounting ring is simultaneously pressed with a downwardly extending sealing bead onto the bottom surface of the valve chamber.
  • an annular gas collecting space that is radially delimited by the ring flange of the synthetic seat ring and the downwardly extending sealing bead of the mounting ring.
  • valve When the valve is open, gas flows through the central gas inlet port, traverses the seat ring through the metal sleeve, flows over the seat surface of the seat ring, enters through the through openings in the mounting ring into the annular gas collecting space, to finally enter into the lateral outlet port, which opens into this annular gas collecting space.
  • Actuating means including a push rod and an actuator button, allow to selectively deflect the diaphragm into engagement with the seat surface, so as to close the valve.
  • the valve disclosed in EP-A-1281898 still has e.g. the following drawbacks.
  • Third, the ring flange of the seat ring is easily damaged during assembly of the valve and when the valve is subjected to excessive closure forces. Fourth, the seat ring too risks to be damaged when the valve is subjected to excessive closure forces.
  • Fifth, the design of the valve seat is not really adapted for withstanding adiabatic shock tests with high pressure oxygen.
  • a high pressure diaphragm gas valve with a removable seat assembly that is easier to manufacture and in which the risk of damaging the removable seat assembly during assembly of the valve is reduced.
  • the disclosure further provides a high pressure diaphragm gas valve with a removable seat assembly, in which the latter risks less being damaged, when the valve is subjected to excessive closure forces.
  • the disclosure additionally provides a high pressure diaphragm gas valve with a removable seat assembly that warrants a better gas tightness, in particular at higher gas pressures.
  • a high pressure diaphragm gas valve concerned by the present invention generally comprises a valve body, an exchangeable seat assembly, a diaphragm and means for pressing a central sealing surface of the diaphragm onto a seat surface of the seat assembly.
  • the valve body has therein a valve chamber of generally cylindrical configuration, with a first end and a second end that is axially spaced from the first end.
  • a nozzle axially protrudes from the first end into the valve chamber, wherein a first gas port is arranged in a front face of this nozzle and a second gas port is arranged in the first end laterally of the nozzle.
  • a seat assembly including a mounting ring and a synthetic seat ring, is removably fitted in the first end of the valve chamber.
  • the mounting ring has a central seat hole, an inner flange, a main ring body with at least one peripheral gas passage therein and an outer ring flange.
  • the synthetic seat ring is fitted in the central seat hole of the mounting ring and has a central through hole therein.
  • a front face of the seat ring forms a seat surface in the valve chamber around the first gas port.
  • the nozzle penetrates in a sealed way into the central through hole of the synthetic seat ring.
  • the latter has, at the opposite side of the seat surface, a seat ring foot surface that is pressed by the mounting ring onto the nozzle shoulder surface.
  • Peripheral sealing means are provided along the outer ring flange of the mounting ring.
  • the diaphragm seals off the second end of the valve chamber and has an outer rim in sealing engagement with the peripheral sealing means of the seat assembly.
  • the second gas port is formed by an ring channel incorporated into the valve body, wherein it surrounds the nozzle shoulder surface and is itself surrounded by an outer shoulder surface, the mounting ring being supported with its inner ring flange on the nozzle shoulder surface and with its outer ring flange on the outer shoulder surface, so that the at least one peripheral gas passage opens into the ring channel.
  • the gas collecting channel is no longer incorporated into the mounting ring, but into the valve body, wherein the mounting ring bridges this channel, bearing with its outer and inner flanges on the external and internal borders of the latter. It will be appreciated that this modification results in many advantages.
  • the manufacturing and assembly of the valve body and mounting ring gets easier; a better seating of the mounting ring in the valve body is achieved, thereby also achieving a better gas tightness; the mounting ring is less exposed to deformations, when the valve is assembled or when it is subjected to excessive closure forces; and, last but not least, a gas collecting ring channel with a bigger cross-section, i.e. a bigger volume, may be easily provided without weakening the mounting ring.
  • Such bigger volume gas collecting ring channel surrounding the base of the nozzle in the valve body has a positive effect on the behavior of the valve in adiabatic shock tests with high pressure oxygen, because it reduces the risk that the nozzle overheats to an extent which may damage the synthetic seat ring in direct contact with the nozzle.
  • the front face of the nozzle is normally only slightly recessed with regard to the seat surface so as to provide an abutment surface for the central sealing surface of the diaphragm close to the seat surface.
  • Such an abutment surface close to the deformable seat surface protects the synthetic seat ring and the diaphragm against over-deformation and damages in case an excessive closer torque is applied to the valve.
  • the thin rim portion disclosed in EP-A-1281898 would be far too weak to provide such a mechanical stop for the diaphragm.
  • the thin rim portion disclosed in EP-A-1281898 even risks to damage the diaphragm in case an excessive closer torque is applied to the valve.
  • the synthetic seat ring is a tubular body comprising a conical outer tube surface and an inner tube surface.
  • the central seat hole of the compatible mounting ring has therein a conical surface engaging the conical outer tube surface, to press the synthetic seat ring with its foot surface axially onto the nozzle shoulder surface and with its inner tube surface radially onto an outer nozzle surface.
  • This conical fit between the synthetic seat ring and the mounting ring results in a substantially improved gas tightness, by a combination of a radial and axial sealing forces. Furthermore, this conical fit also reduces the risk of damaging the synthetic seat ring when the valve is subjected to excessive closure forces. It will be appreciated that gas tightness is still further improved, if the conical outer tube surface has a cone apex angle that is slightly bigger than the cone apex angle of the central seat hole of the mounting ring.
  • the inner ring flange of the mounting ring may bear on a shoulder surface of the seat ring, whereby this inner ring flange applies an axial force onto the seat ring to press the latter onto the nozzle shoulder surface.
  • the inner ring flange of the mounting ring bears directly on the nozzle shoulder surface.
  • the inner ring flange of the mounting ring which bears directly on the nozzle shoulder surface, advantageously defines a wedge-shaped annular gap with the outer surface of the nozzle, wherein the synthetic seat ring is radially and axially compressed in this wedge-shaped annular gap.
  • the nozzle shoulder surface is advantageously a stepped surface including a first ring shaped shoulder surface forming a support surface for the inner ring flange and a second ring shaped shoulder surface against which the seat ring foot surface is pressed, wherein the second ring shaped shoulder surface lies closer to the front face of the nozzle than the first ring shaped shoulder surface.
  • the mounting ring comprises: a main ring body with several gas passages therein; an inner ring flange in which the synthetic seat ring is mounted; and an outer ring flange supporting the peripheral sealing means.
  • the peripheral sealing means advantageously comprises: a ring-shaped sealing bead protruding from the outer ring flange into the valve chamber; and a peripheral synthetic seal ring located radially between the sealing bead and a cylindrical valve chamber wall surface; wherein the outer rim of the diaphragm is in sealing engagement with the ring-shaped sealing bead and the peripheral synthetic seal ring.
  • the front face of the nozzle is slightly recessed with regard to the seat surface. If “s” is the axial distance between the front face and the seat surface and “t” is the radial wall thickness of the nozzle, then following relation between should advantageously be fulfilled between s and t: 0.1 ⁇ s/t ⁇ 1.
  • seat surface has an annular width “w”, and “t” is the radial wall thickness of the nozzle, then following relation should advantageously be fulfilled between w and t: 0.8 ⁇ w/t ⁇ 1.1.
  • a valve in accordance with the present invention is advantageously used as a gas cylinder valve or as a shut-off valve for high pressure toxic or corrosive gases, including high pressure oxygen.
  • FIG. 1 is a cross sectional of a first embodiment of a valve in accordance with the invention
  • FIG. 2 is an enlarged detail of the cross sectional view of FIG. 1 ;
  • FIG. 3 is a perspective view showing a section through the valve of FIG. 1 ;
  • FIG. 4 is an enlarged detail of the cross sectional view of FIG. 2 ;
  • FIG. 5 is a cross sectional view of a seat assembly in a second embodiment of a valve in accordance with the invention.
  • FIG. 6 is a perspective view of the embodiment shown in FIG. 5 .
  • the valve 10 described—by way of example—with reference to the accompanying drawings, is a high pressure diaphragm shut off valve for equipping e.g. a gas cylinder containing toxic or corrosive gases at high pressures, i.e. pressures higher than 200 bar. It comprises a valve body 12 , generally a brass or stainless steel body, with a socket 14 to be screwed into the gas cylinder. This screwed socket 14 has therein a gas inlet channel 16 .
  • a gas outlet channel 18 is arranged in a lateral branch 19 of the valve body 12 . Both the inlet channel 16 and the outlet channel 18 open into a valve chamber 20 within the valve body 12 .
  • the valve chamber 20 is a substantially cylindrical chamber having a first end (see arrow 22 in FIG. 2 ), a second end (see arrow 24 in FIG. 2 ), which is axially spaced from the first end 22 , and a cylindrical valve chamber wall surface 26 .
  • the gas inlet channel 16 forms a first gas port 28 , which is centrally arranged in the first end 22 of the valve chamber 20 .
  • the gas outlet channel 18 is connected to a gas collecting ring channel 30 , which is incorporated into the valve body 12 to form an annular second gas port in the first end 22 of the valve chamber 20 , between the first gas port 28 and the cylindrical valve chamber wall 26 .
  • Arrow 32 globally identifies a seat assembly that is removably fitted in the first end 22 of the valve chamber 20 .
  • This removable seat assembly 32 comprises a ring shaped mounting ring 34 with a central seat hole, a synthetic seat ring 36 and peripheral sealing means 42 .
  • the synthetic seat ring 36 which has a central through hole 38 therein, is mounted into the central seat hole of the ring shaped mounting ring 34 , to form a seat surface 40 in the valve chamber 20 .
  • the material of the synthetic seat ring 36 is advantageously, but not necessarily, a thermoplastic polymer, preferably of the group of polyamides or polychlorotrifluoroethylenes.
  • the mounting ring 34 is a rigid, generally a metallic body, e.g. a stainless steel or brass body.
  • the peripheral sealing means which will be described later on, is arranged along an outer rim of the ring shaped mounting ring 34 .
  • Reference number 44 identifies a resilient diaphragm, which seals off said second end 24 of the valve chamber 20 .
  • This diaphragm 44 is preferably, but not necessarily, a multilayer diaphragm comprising a plurality of sandwiched flexible metal sheets. It has a central sealing surface 48 adjacent to the seat surface 40 and an outer rim 46 in sealing engagement with the peripheral sealing means 42 of the seat assembly 32 .
  • a sleeve 50 is e.g. screwed into the valve body 12 so as to press the outer rim 46 of the diaphragm 44 onto the peripheral sealing means 42 of the seat assembly 32 .
  • an actuator button 52 is mounted into a frontal cavity 54 of the sleeve 50 in axial alignment with the central axis of seat surface 40 in the valve chamber 20 .
  • This actuator button 52 is axially guided within the frontal cavity 54 and has a front face 56 that can be brought in contact with the rear side of the diaphragm 44 (see FIG. 2 and FIG. 4 ).
  • a valve stem 58 which is screwed into the sleeve 50 , allows to axially press the actuator button 52 —in a manner known per se—in the direction of the seat assembly 32 .
  • the diaphragm 44 which has initially the form of a concave calotte shell spanning over the seat assembly 32 , is resiliently deformed, whereby its central sealing surface 48 is pressed onto the seat surface 40 of the seat assembly 32 , thereby sealing off the gas inlet channel 16 from the valve chamber 20 and, consequently, from the gas outlet channel 18 .
  • the central sealing surface 48 is close to the seat surface 40 of the seat assembly 32 , but not yet in contact with the latter.
  • the valve body 12 has, at the first end 22 of the valve chamber 20 , a nozzle 60 axially protruding into the valve chamber 20 .
  • This nozzle 60 penetrates in a sealed way into the central through hole of the synthetic seat ring 36 .
  • the first gas port 28 of the gas inlet channel 16 is arranged in a front face 62 of the nozzle 60 .
  • This front face 62 is slightly recessed with regard to the seat surface 40 .
  • the nozzle 60 has a nozzle shoulder surface 64 at its base, which is surrounded by the ring channel 30 .
  • the synthetic seat ring 36 has, at the axially opposite side of its seat surface 40 , a seat ring foot surface 66 that is pressed by the mounting ring 34 onto the nozzle shoulder surface 64 , so as to provide a sealing function between both surfaces 64 and 66 .
  • the synthetic seat ring 36 comprises a tubular body 68 with an outer tube surface 70 , an inner tube surface 72 delimiting the through hole 38 and a first end forming the seat surface 40 .
  • the inner tube surface 72 is a cylindrical surface, which is conceived to be in sealing contact with a cylindrical outer surface 92 of the nozzle 60 .
  • the outer tube surface 70 is a conical surface with a cone apex angle of about 30°.
  • An opposite second end of the tubular body 68 is equipped with a radially extending ring shaped seat ring flange 74 , which has a seat ring flange shoulder surface 76 thereon.
  • the mounting ring 34 comprises a main ring body 80 , a inner ring flange 82 and a outer ring flange 84 .
  • the main ring body 80 penetrates into the ring channel 30 and has several gas passages 86 therein, through which gas may flow from the inner valve chamber 20 into the gas collecting ring channel 30 .
  • the synthetic seat ring 36 is mounted into a central seat hole in the inner ring flange 82 , so that its conical outer tube surface 70 is in sealing contact with a lateral conical surface 88 of the inner ring flange 82 , and so that its seat ring flange shoulder surface 76 is in sealing contact with a shoulder surface 90 of the inner ring flange 82 . Looking at FIG. 2 and FIG.
  • the synthetic seat ring 36 is confined within a seat ring chamber delimited radially to the inside by the cylindrical outer surface 92 of the nozzle 60 , radially to the outside by the lateral conical surface 88 of inner ring flange 82 and by the main body 80 of the mounting ring 34 penetrating into the ring channel 30 , and axially by the nozzle shoulder surface 64 . Only the first end of the tubular body 68 protrudes out of this seat ring chamber. As shown in FIGS. 1 to 4 , the main body 80 of the mounting ring 34 may have an axial extension slightly penetrating into the ring channel 30 .
  • This axial extension first covers the seat ring flange 74 and forms thereafter a very narrow annular air gap 94 with a cylindrical inner wall surface 96 of the ring channel 30 .
  • all surfaces of the synthetic seat ring 36 are well protected against deformation and against direct contact with a high velocity gas stream flowing through the open valve 10 .
  • the nozzle 60 forms a relatively thick metallic protecting rim 98 with a rounded outlet edge 100 close to the seat surface 40 .
  • the space “s” between the front face 62 of the nozzle 60 and the seat surface 40 is less than the wall thickness “t” of the nozzle 60 at the first gas port 28 (in the valve 10 , s/t ⁇ 0.3); and the wall thickness “t” of the nozzle 60 is about equal to the width “w” of the seat surface 40 .
  • this metallic protecting rim 98 deviates the high velocity gas stream streaming out of the gas inlet channel 16 in such a way that a direct contact of this “sharp” stream with the synthetic sealing surface 40 is largely avoided. It will be appreciated that this feature is particularly important if the valve 10 is used e.g. with high pressure oxygen, i.e. if there is a risk of so called adiabatic shocks in the seat area.
  • the mounting ring 34 rests with its outer ring flange 84 on an outer shoulder surface 102 , which surrounds the ring channel 30 .
  • This outer ring flange 84 supports the aforementioned peripheral sealing means 42 , which comprises more particularly a ring-shaped sealing bead 104 and a peripheral synthetic seal ring 106 .
  • the ring-shaped sealing bead 104 protrudes from the outer ring flange 84 into the valve chamber 20 .
  • the peripheral synthetic seal ring 106 is located radially between the sealing bead 104 and the cylindrical valve chamber wall surface 26 .
  • the material of the synthetic seat ring 106 is advantageously, but not necessarily, a thermoplastic polymer, preferably of the group of polyamides or polychlorotrifluoroethylenes.
  • the sleeve 50 presses the outer rim 46 of the diaphragm 44 onto the ring-shaped sealing bead 104 , whereby the peripheral synthetic seal ring 106 is axially compressed. Due to this axial compression, the synthetic seal ring 106 is also radially pressed on one side against sealing bead 104 and on the other side against the cylindrical valve chamber wall surface 26 . Consequently, the synthetic seal ring 106 provides not only an improved sealing function between the diaphragm 44 and the mounting ring 34 , but also an additional sealing function between the outer ring flange 84 of the mounting ring 34 and the valve chamber wall surface 26 . It remains to be noted that the outer shoulder surface 102 forms a kind of axial stop face for the mounting ring 34 .
  • This axial stop face is dimensioned so that the inner ring flange 82 of the mounting ring 34 slightly compresses the synthetic seat ring flange 74 when the sleeve 50 presses the outer ring flange 84 of the mounting ring 34 firmly onto the outer shoulder surface 102 .
  • the inner ring flange 82 of the mounting ring 34 has a front face 108 lying in a first plane, which contains the front face 62 of the nozzle 60 .
  • the ring-shaped sealing bead 104 has a annular crest surface 110 lying in a second plane, which contains the seat surface 40 ; wherein said first plane lies behind said second plane, when viewed in the direction the central sealing surface 48 of the diaphragm 44 is pressed onto the seat surface 40 of the seat assembly 32 .
  • the synthetic seat ring 36 ′ does not comprise a seat ring flange. It is a tubular body with a conical outer tube surface 70 ′ that forms a conical fit with the lateral conical surface 88 ′ of the inner ring flange 82 ′ of the mounting ring 34 ′. As described already hereinbefore, the cone apex angle of the outer tube surface 70 ′ is preferably slightly bigger than the cone apex angle of the lateral conical surface 88 ′ of the inner ring flange 82 ′.
  • the equivalent of nozzle shoulder surface 64 in FIG. 2 is in FIG.
  • a stepped surface 64 ′, 64 ′′ including a first ring shaped shoulder surface 64 ′, which forms a seat for the inner ring flange 82 ′, and a second ring shaped shoulder surface 64 ′′, against which the seat ring foot surface 66 ′ is pressed by the mounting ring 34 ′.
  • the required contact pressure between the seat ring foot surface 66 ′ and the second ring shaped shoulder surface 64 ′′ is, in this embodiment, solely generated by the conical fit of the seat ring 36 ′ in the central seat hole of the mounting ring 34 ′, when the sleeve 50 presses the mounting ring 34 ′ into the valve chamber 20 .
  • the outer shoulder surface 102 ′ on which the outer ring flange 84 ′ of the mounting ring 34 ′ bears, is separated from the cylindrical valve chamber wall surface 26 by a deeper annular groove 112 .
  • the ring flange 84 ′ of the mounting ring 34 ′ has along its outer border a protruding rim 114 , which is received in the annular groove 112 . Normally, there is a small axial clearance between the protruding rim 114 and the bottom surface of the annular groove 112 , as shown in FIG. 5 .

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lift Valve (AREA)
  • Valve Housings (AREA)
  • Feeding And Controlling Fuel (AREA)
  • Control Of Fluid Pressure (AREA)
US12/664,407 2007-06-12 2008-06-12 High pressure diaphragm valve with exchangeable seat assembly Expired - Fee Related US8251347B2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP07110131 2007-06-12
EP07110131.5 2007-06-12
EP07110131A EP2003379A1 (en) 2007-06-12 2007-06-12 High pressure diaphragm valve with exchangeable seat assembly
PCT/EP2008/057424 WO2008152110A1 (en) 2007-06-12 2008-06-12 High pressure diaphragm valve with exchangeable seat assembly

Publications (2)

Publication Number Publication Date
US20110140014A1 US20110140014A1 (en) 2011-06-16
US8251347B2 true US8251347B2 (en) 2012-08-28

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ID=38669576

Family Applications (1)

Application Number Title Priority Date Filing Date
US12/664,407 Expired - Fee Related US8251347B2 (en) 2007-06-12 2008-06-12 High pressure diaphragm valve with exchangeable seat assembly

Country Status (7)

Country Link
US (1) US8251347B2 (da)
EP (2) EP2003379A1 (da)
KR (1) KR101537266B1 (da)
AT (1) ATE540249T1 (da)
DK (1) DK2167853T3 (da)
ES (1) ES2379931T3 (da)
WO (1) WO2008152110A1 (da)

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US11054045B2 (en) 2013-12-10 2021-07-06 Semba Biosciences, Inc. High-flow fluid valve block
US11402029B2 (en) * 2018-04-06 2022-08-02 Fujikin Incorporated Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method
US20230175598A1 (en) * 2020-03-26 2023-06-08 Fujikin Incorporated Valve device
US11761547B1 (en) * 2022-04-07 2023-09-19 Horiba Stec, Co., Ltd. Valve orifice insert
US11796077B2 (en) 2020-11-06 2023-10-24 Swagelok Company Valve cavity cap arrangements
US11808381B2 (en) 2020-11-04 2023-11-07 Swagelok Company Valves with integrated orifice restrictions

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JP5802532B2 (ja) * 2011-12-05 2015-10-28 株式会社フジキン ダイヤフラム弁およびダイヤフラム弁用シートホルダユニット
JP2013119877A (ja) * 2011-12-06 2013-06-17 Fujikin Inc ダイヤフラム弁
JP6914044B2 (ja) * 2017-01-31 2021-08-04 株式会社キッツエスシーティー ダイヤフラムバルブ
CN111828836B (zh) * 2020-07-22 2022-06-24 宁波麦实科技有限公司 一种防拆卸的液化石油气瓶阀
JP7426149B2 (ja) * 2020-10-20 2024-02-01 株式会社フジキン ダイヤフラムバルブ
CN214946629U (zh) * 2021-07-05 2021-11-30 丹阳市飞轮气体阀门有限公司 一种具有保压功能的气瓶阀
WO2024151793A1 (en) * 2023-01-13 2024-07-18 Swagelok Company Diaphragm valve with actuator bearing element

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Publication number Priority date Publication date Assignee Title
GB712856A (en) 1952-02-08 1954-08-04 Vickers Electrical Co Ltd Improvements relating to diaphragm valves for controlling small gas flows
GB2078344A (en) 1980-06-13 1982-01-06 Weber Spa Pressure-controller for injection systems of controlled ignition internal combustion engines
US4867201A (en) * 1989-03-06 1989-09-19 Harsco Corporation Parallel-motion dual-diaphragm valve
US5108069A (en) * 1991-08-09 1992-04-28 Benkan Corporation Metal diaphragm valve
US5215286A (en) 1992-05-26 1993-06-01 Nupro Company High pressure diaphragm valve
US6105933A (en) * 1994-06-29 2000-08-22 Kabushiki-Kaisha Motoyama Seisakusho Diaphragm valve structure
EP1281898A2 (en) 2001-07-31 2003-02-05 Fujikin Incorporated Diaphragm valve
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US6786471B2 (en) * 2001-07-31 2004-09-07 Fujikin Incorporated Diaphragm valve
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US12129935B2 (en) 2013-12-10 2024-10-29 Tosoh Bioscience Llc High-flow fluid valve block
US11174952B2 (en) * 2013-12-10 2021-11-16 Semba Biosciences, Inc. High-flow fluid valve block
US11054045B2 (en) 2013-12-10 2021-07-06 Semba Biosciences, Inc. High-flow fluid valve block
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US12264756B2 (en) 2013-12-10 2025-04-01 Tosoh Bioscience Llc High-flow fluid valve block
US11773989B2 (en) 2013-12-10 2023-10-03 Tosoh Bioscience Llc High-flow fluid valve block
US11402029B2 (en) * 2018-04-06 2022-08-02 Fujikin Incorporated Valve device, fluid control system, fluid control method, semiconductor manufacturing system, and semiconductor manufacturing method
US20230175598A1 (en) * 2020-03-26 2023-06-08 Fujikin Incorporated Valve device
US11808381B2 (en) 2020-11-04 2023-11-07 Swagelok Company Valves with integrated orifice restrictions
US12203568B2 (en) 2020-11-04 2025-01-21 Swagelok Company Valves with integrated orifice restrictions
US11796077B2 (en) 2020-11-06 2023-10-24 Swagelok Company Valve cavity cap arrangements
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US11761547B1 (en) * 2022-04-07 2023-09-19 Horiba Stec, Co., Ltd. Valve orifice insert

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DK2167853T3 (da) 2012-04-10
WO2008152110A1 (en) 2008-12-18
EP2167853A1 (en) 2010-03-31
US20110140014A1 (en) 2011-06-16
KR101537266B1 (ko) 2015-07-16
EP2167853B1 (en) 2012-01-04
KR20100058448A (ko) 2010-06-03
ES2379931T3 (es) 2012-05-07
EP2003379A1 (en) 2008-12-17
ATE540249T1 (de) 2012-01-15

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