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US8134124B2 - Method for creating S/tem sample and sample structure - Google Patents

Method for creating S/tem sample and sample structure Download PDF

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US8134124B2
US8134124B2 US12/446,420 US44642007A US8134124B2 US 8134124 B2 US8134124 B2 US 8134124B2 US 44642007 A US44642007 A US 44642007A US 8134124 B2 US8134124 B2 US 8134124B2
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sample
fiducial
location
milling
site
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US20100300873A1 (en
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Jeff Blackwood
Stacey Stone
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FEI Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/04—Devices for withdrawing samples in the solid state, e.g. by cutting
    • G01N1/06—Devices for withdrawing samples in the solid state, e.g. by cutting providing a thin slice, e.g. microtome
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/04—Devices for withdrawing samples in the solid state, e.g. by cutting
    • G01N1/08—Devices for withdrawing samples in the solid state, e.g. by cutting involving an extracting tool, e.g. core bit
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/32—Polishing; Etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • H01J37/3056—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching for microworking, e. g. etching of gratings or trimming of electrical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/182—Obtaining or maintaining desired pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/204—Means for introducing and/or outputting objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3174—Etching microareas
    • H01J2237/31745—Etching microareas for preparing specimen to be viewed in microscopes or analyzed in microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31749—Focused ion beam

Definitions

  • the present invention relates to preparation of samples and methods of analysis for transmission electron microscopes and scanning transmission electron microscopes.
  • a semiconductor substrate on which circuits are being formed usually a silicon wafer, is coated with a material, such as a photoresist, that changes solubility when exposed to radiation.
  • a lithography tool such as a mask or reticle, positioned between the radiation source and the semiconductor substrate casts a shadow to control which areas of the substrate are exposed to the radiation. After the exposure, the photoresist is removed from either the exposed or the unexposed areas, leaving a patterned layer of photoresist on the wafer that protects parts of the wafer during a subsequent etching or diffusion process.
  • the photolithography process allows multiple integrated circuit devices or electromechanical devices, often referred to as “chips,” to be formed on each wafer.
  • the wafer is then cut up into individual dies, each including a single integrated circuit device or electromechanical device.
  • these dies are subjected to additional operations and packaged into individual integrated circuit chips or electromechanical devices.
  • CD measurements are made using instruments such as a scanning electron microscope (SEM).
  • SEM scanning electron microscope
  • a primary electron beam is focused to a fine spot that scans the surface to be observed.
  • Secondary electrons are emitted from the surface as it is impacted by the primary beam.
  • the secondary electrons are detected, and an image is formed, with the brightness at each point of the image being determined by the number of secondary electrons detected when the beam impacts a corresponding spot on the surface.
  • TEMs Transmission electron microscopes
  • SEMs which only image the surface of a material
  • TEM also allows analysis of the internal structure of a sample.
  • a broad beam impacts the sample and electrons that are transmitted through the sample are focused to form an image of the sample.
  • the sample must be sufficiently thin to allow many of the electrons in the primary beam to travel though the sample and exit on the opposite site.
  • Samples also referred to as lamellae, are typically less than 100 nm thick.
  • a primary electron beam is focused to a fine spot, and the spot is scanned across the sample surface. Electrons that are transmitted through the work piece are collected by an electron detector on the far side of the sample, and the intensity of each point on the image corresponds to the number of electrons collected as the primary beam impacts a corresponding point on the surface.
  • STEM scanning transmission electron microscope
  • TEM refers to a TEM or an STEM and references to preparing a sample for a TEM are to be understood to also include preparing a sample for viewing on an STEM.
  • S/TEM refers to both TEM and STEM.
  • lift-out techniques use focused ion beams to cut the sample from a substrate or bulk sample without destroying or damaging surrounding parts of the substrate. Such techniques are useful in analyzing the results of processes used in the fabrication of integrated circuits, as well as materials general to the physical or biological sciences. These techniques can be used to analyze samples in any orientation (e.g., either in cross-section or in plan view). Some techniques extract a sample sufficiently thin for use directly in a TEM; other techniques extract a “chunk” or large sample that requires additional thinning before observation. In addition, these “lift-out” specimens may also be directly analyzed by other analytical tools, other than TEM.
  • in-situ techniques sample removal outside the vacuum chamber (as when the entire wafer is transferred to another tool for sample removal) are call “ex-situ” techniques.
  • FIG. 1A shows a sample mounted onto a prior art TEM grid 10 .
  • a typical TEM grid 10 is made of copper, nickel, or gold. Although dimensions can vary, a typical grid might have, for example, a diameter of 3.05 mm and have a middle portion 12 consisting of cells 14 of size 90 ⁇ 90 ⁇ m 2 and bars 13 with a width of 35 ⁇ m. The electrons in an impinging electron beam will be able to pass through the cells 14 , but will be blocked by the bars 13 .
  • the middle portion 12 is surrounded by an edge portion 16 .
  • the width of the edge portion is 0.225 mm.
  • the edge portion 16 has no cells, with the exception of the orientation mark 18 .
  • the thickness 15 of the thin electron transparent support film is uniform across the entire sample carrier, with a value of approximately 20 nm.
  • TEM specimens to be analyzed are placed or mounted within cells 14 .
  • a protective layer 22 of a material such as tungsten is deposited over the area of interest on a sample surface 21 as shown in FIG. 2 using electron beam or ion beam deposition.
  • a focused ion beam using a high beam current with a correspondingly large beam size is used to mill large amounts of material away from the front and back portion of the region of interest.
  • the trench 25 milled on the back side of the region of interest is smaller than the front trench 24 .
  • the smaller back trench is primarily to save time, but the smaller trench also prevents the finished sample from falling over flat into larger milled trenches which may make it difficult to remove the specimen during the micromanipulation operation.
  • the stage is tilted and a U-shaped cut 26 is made at an angle partially along the perimeter of the sample section 20 , leaving the sample hanging by tabs 28 at either side at the top of the sample.
  • the small tabs 28 allow the least amount of material to be milled free after the sample is completely FIB polished, reducing the possibility of redeposition artifacts accumulating on the thin specimen.
  • the sample section is then further thinned using progressively finer beam sizes. Finally, the tabs 28 are cut to completely free the thinned lamella 27 . Once the final tabs of material are cut free lamella 27 may be observed to move or fall over slightly in the trench. A completed and separated lamella 27 is shown in FIG. 6 .
  • the wafer containing the completed lamella 27 is then removed from the FIB and placed under an optical microscope equipped with a micromanipulator.
  • a probe attached to the micromanipulator is positioned over the lamella and carefully lowered to contact it. Electrostatic forces will attract lamella 27 to the probe tip 29 as shown in FIG. 7 .
  • the tip 29 with attached lamella is then typically moved to a TEM grid 10 as shown in FIG. 8 and lowered until lamella is placed on the grid in one of the cells 14 between bars 13 .
  • FIB methods in sample preparation has reduced the time required to prepare samples for TEM analysis down to only a few hours.
  • CD metrology often requires multiple samples from different locations on a wafer to sufficiently characterize and qualify a specific process. In some circumstances, for example, it will be desirable to analyze from 15 to 50 TEM samples from a given wafer. When so many samples must be extracted and measured, using known methods the total time to process the samples from one wafer can be days or even weeks. Even though the information that can be discovered by TEM analysis can be very valuable, the entire process of creating and measuring TEM samples has historically been so labor intensive and time consuming that it has not been practical to use this type of analysis for manufacturing process control.
  • TEM sample structures are not robust enough to survive automated extraction and mounting. Additionally, TEM structures created using prior art methods often suffer from bending or bowing when thinned to 100 nm or below. In the prior art, manual thinning of TEM sample is halted when bowing observed by the operator. Such manually observation would not be desirable in an automated system.
  • What is needed is a method to more completely automate the TEM sample extraction and measurement and to increase throughput and reproducibility so that TEM measurement can be incorporated into integrated or in situ metrology for process control. What is also needed is a method of creating a TEM sample that will not suffer from bowing phenomenon when thinned to 100 nm or less and that is robust enough to survive automated extraction and mounting.
  • An object of the invention is to provide an improved method for TEM sample analysis.
  • Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry ( ⁇ 100 nm thick) TEM lamellae.
  • Some preferred embodiments of the present invention provide methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis.
  • FIG. 1 shows a typical prior art TEM grid.
  • FIGS. 2-5 illustrate the steps in an ex-situ sample preparation technique according to the prior art.
  • FIG. 6 is a micrograph of a completed and separated lamella according to the prior art.
  • FIGS. 7-8 illustrate the transfer of a lamella using a probe and electrostatic attraction according to the prior art.
  • FIG. 9 is a flowchart showing the steps of creating one or more lamellae according to a preferred embodiment of the present invention.
  • FIG. 10 shows a lamella site according to the process of FIG. 11 after high precision fiducials have been milled and a protective layer deposited over the lamella location.
  • FIG. 11 shows a lamella site according to the process of FIG. 11 after low precision fiducials have been milled.
  • FIG. 12 shows a lamella site according to the process of FIG. 11 after bulk milling has been completed.
  • FIG. 13 shows a high resolution micrograph of a lamella sample according to the present invention after bulk milling has been completed.
  • FIG. 14 shows a lamella created according to the process of FIG. 11 .
  • FIG. 15 shows a lamella created according to the process of FIG. 11 .
  • FIG. 16 shows a high resolution micrograph of a lamella according to the present invention.
  • FIG. 17A shows a graphical representation of a dual beam system where one beam is used to thin the lamella while the other beam images the lamella to endpoint milling.
  • FIG. 17B shows a graphical representation of a single beam system where the sample must be rotated to allow one beam to mill and image for endpointing.
  • FIG. 17C shows a lamella site during the milling process which could be imaged and the image processed according to the present invention to endpoint milling.
  • FIG. 18 show a graphical illustration of a milling pattern according to the present invention that is used to thin the TEM sample
  • FIGS. 19A through 19C show steps in the milling process of FIG. 18 on a cross section view of a TEM sample.
  • FIG. 20 is a high resolution micrograph of a lamella sample with a thinner central “window” prepared according to the present invention.
  • Preferred embodiments of the present invention provide improved methods for lamella creation.
  • a preferred embodiment can create S/TEM samples with a thickness in the 50-100 nm range for the purposes of S/TEM metrology with minimal site-to-site variation.
  • the process can produce a 10 ⁇ m wide ⁇ ⁇ 5 ⁇ m deep ⁇ ⁇ 500 nm thick lamella with a final-thinned window of 3 ⁇ m ⁇ 3 ⁇ m at the targeted final thickness (50-100 nm).
  • S/TEM samples produced according to the present invention will not suffer from bowing phenomenon when thinned to 100 nm or less and are robust enough to survive automated extraction and mounting.
  • a preferred method or apparatus of the present invention has many novel aspects, and because the invention can be embodied in different methods or apparatuses for different purposes, not every aspect need be present in every embodiment. Moreover, many of the aspects of the described embodiments may be separately patentable.
  • FIG. 9 is a flowchart showing the steps of creating one or more lamellae according to a preferred embodiment of the present invention.
  • machine-vision based metrology and image recognition, high-precision fiducial marks, and automatic fiducial placement are used to significantly improve lamella placement accuracy and precision.
  • Various steps in the process are shown in FIGS. 10 through 16 .
  • a wafer is loaded into a FIB system, such as a Certus Dual Beam System, commercially available from FEI Company of Hillsboro, Oreg., the assignee of the present invention.
  • lamella sites on the wafer surface are located automatically using image recognition software. Suitable image recognition software is available, for example, from Cognex Corporation of Natick, Mass. Image recognition software can be “trained” to locate the desired lamella locations by using sample images of similar features or by using geometric information from CAD data. Automated FIB or SEM metrology can also be used to identify or help identify the lamella site. Metrology may consist of image-based pattern recognition, edge finding, ADR, center-of-mass calculations, blobs, etc.
  • the lamella site is given a protective 5 kV FIB tungsten deposition 15 ⁇ m wide by 3 ⁇ m tall for 1:20. This provides sufficient tungsten on the site surface to prevent damage during the 30 kV FIB site alignment and deposition steps.
  • This protective layer may be directly placed if the 5 kV180pA FIB aperture to SEM coincidence is less than 4 ⁇ m, otherwise a process of site alignment may be used to refine placement of this deposition.
  • step 406 the precise locations of any desired fiducial marks with respect to each desired lamella location are specified.
  • a fiducial location could be specified by an operator using a mouse to drag a virtual box around the desired fiducial location.
  • Automated metrology software could then precisely measure the location of the fiducial with respect to identifiable features at the sample location (for example 15 nm from the right edge of the feature).
  • a fiducial can then be automatically milled at each lamella site at the precise location specified so that the spatial relationship between each fiducial and each lamella location will be identical.
  • a fiducial location could also be specified using CAD data to specify the location of the fiducial with respect to a particular structure on the wafer surface.
  • precise fiducial placement is accomplished through the use of the IC3DTM software's vision tools.
  • a specified pattern can be located by image recognition software and used to locate a target structure.
  • Extensive use of IC3D's shape linking capabilities allows robust placement of site fiducials based on direct measurement of each site.
  • a combination of high precision (fine) fiducials and low precision (bulk) fiducials are used to optimize lamella placement precision and accuracy.
  • fiducials used for lamella location and milling consist only of low-precision features such as an “X” formed by the intersection of two milled lines. At the resolutions necessary for adequate lamella production, however, each milled line will be several nanometers wide. Edge detection software must be used to determine the centerline of each milled line and then the intersection of the two mathematically determined centerlines used to determine a particular reference point. There is typically too much error in this type of determination to use the fiducial to accurately determine a lamella location within the margin of error needed for many small-geometry lamella applications.
  • a combination of typical low-precision fiducial marks and higher precision marks are used.
  • High-precision fiducials such as the rectangles 506 shown in FIG. 10 allow the lamella location to be much more accurately determined.
  • the rectangular fiducials 506 shown in FIG. 10 are located at either end of the desired lamella location. High-precision fiducial are smaller than the low-precision fiducials discussed below. For this reason, the high-precision fiducials are not identifiable with the large FIB beams used for bulk milling, and are only used for final placement of the lamella with smaller FIB beams.
  • the rectangular fiducials in FIG. 10 are located using image analysis to determine the Y position of their top and bottom edges.
  • Edge detection software only has to identify the top and bottom edges to precisely locate the top and bottom edges of the lamella. Pattern recognition for these rectangular fiducials is based on a two-measurement strategy—the top and bottom edges of the fiducial are measured. Once the edge positions are located, a central line or axis can be determined which is parallel to the top and bottom edges of the lamella. As the sample is imaged with the FIB, the top surface is progressively sputtered away.
  • the high precision fiducial described above is very tolerant of this FIB damage because both measured edges will be altered at nearly the same rate, so the overall error in lamella placement will be very low.
  • Low-precision fiducials such as the large circles 504 in FIG. 11
  • Suitable low-precision fiducials can be easily identified when the sample is imaged with a low resolution (higher beam size) ion beam suitable for rapid bulk material removal.
  • Multiple fiducials and combinations of low and high precision fiducials and different fiducial shapes can be used for even more accurate orientation.
  • step 408 high precision fiducials are milled at the desired locations.
  • a small rectangular feature 506 is milled at each end of the lamella site (which is indicated by dashed line 507 ) with the 1 nA 30 kV FIB for vertical placement of the lamella during the final thinning process.
  • a suitable fiducial pattern will allow the final lamella placement to be accurate within 10 nm.
  • the size and shape of the fiducial can be varied depending on the size, width, or location of the desired lamella.
  • a bulk protective layer 508 composed of, for example, tungsten or platinum is deposited over the lamella site to protect the sample from damage during the milling process.
  • FIG. 11 shows a lamella site 502 with a protective layer 508 deposited over the desired lamella location on a wafer surface 503 .
  • FIB ⁇ 5 keV
  • the high precision fiducials 506 are also preferably lightly backfilled with the protective material to protect them during future processing.
  • step 412 after the bulk protective deposition, large circular fiducials 504 as shown in FIG. 11 are milled around the fine fiducials. These low-precision fiducials are used for gross-structure pattern recognition, such as quickly re-finding the approximate lamella location and determining the location for bulk milling of the lamella. Because a larger beam size will be used for the bulk milling, a suitable low precision fiducial should be easily identified by pattern recognition software even in lower resolution images. The system can then readily relocate each desired lamella site by locating the fiducial and knowing that the lamella site is positioned at a fixed offset from the fiducial.
  • step 414 the FIB system navigates to the coordinates of the next lamella site in step 415 . The process then returns to step 402 and steps 402 to 414 are repeated for all remaining lamella sites before the lamella milling process is started.
  • step 416 the FIB system navigates to an unmilled lamella site.
  • step 418 bulk substrate milling is used to roughly shape the lamella. FIG. 12 shows a lamella site after the bulk milling of step 418 has been completed. A larger ion beam size will be suitable for bulk material removal.
  • each lamella will be formed by using a FIB to cut two adjacent rectangles 524 , 525 on a substrate, the remaining material between the two rectangles forming a thin vertical sample section 527 that includes an area of interest.
  • an ion beam will be directed at the substrate at a substantially normal angle with respect to the substrate surface. The beam will be scanned in a rectangular area adjacent to the sample section to be extracted, thus forming a rectangular hole 524 having a predetermined depth. The milled hole should be sufficiently deep to include the feature of interest in the extracted sample.
  • the milled hole is also deep enough to allow for bulk material to remain at the bottom of the thinned sample (beneath the feature of interest) to increase the mechanical rigidity of the sample as discussed below.
  • the beam will be scanned in a rectangular area 525 adjacent to the sample section to be extracted, but on the opposite side of said sample section from the first rectangular hole.
  • the remaining material between the two rectangular holes will preferably form a thin vertical sample section that includes the lamella to be extracted.
  • Low-precision fiducials 504 can be used to control the beam location for bulk milling of the lamella (using a larger beam diameter for more rapid sample removal).
  • a typical cross-section mill pattern can be used coming in from both sides of the lamella, leaving a coarse lamella approximately 2 ⁇ m thick.
  • the lamella is then further thinned to approximately 800 nm with a cleaning cross-section mill on both sides in preparation for the undercut step.
  • FIG. 13 shows a high resolution micrograph of a lamella sample after bulk milling has been completed.
  • the lamella undergoes an undercutting process.
  • the FIB column is preferably tilted to approximately 4.5 degrees and the lamella bottom undercut with a cleaning cross-section at 1 nA.
  • the sample stage could be tilted.
  • the precise location for the undercut can be located using vision tools to locate and measure the fine fiducials.
  • a greater FIB tilt could be employed (subject to hardware constraints) a shallow incidence angle undercutting provides two benefits to the TEM sample preparation process.
  • the lamella face is not imaged at a high incidence angle, thus reducing Ga+ implantation and damage; and second, the undercutting process serves as an intermediate thinning step that has been shown to reduce the lamella thickness to a reasonably narrow range of widths for a number of different substrates (TI SiGe, TI STI, MetroCal, IFX DTMO, Fujitsu contact).
  • the undercut 602 and side cuts 604 for a lamella sample 527 are shown in FIG. 14 .
  • step 422 the sample is then rotated 180 degrees and the process repeated on the top edge of the lamella in order to cut the bottom free. This results in a rough lamella that is roughly 500 nm thick centered around the target structure.
  • step 424 two cuts are made from the bottom of the lamella up to near the top surface in order to cut the sides of the lamella free, but leaving the lamella hanging by a tab 606 (shown in FIG. 14 ) on either side at the top of lamella.
  • a probe can be attached to the lamella and the tabs or hinges severed so that the lamella can be extracted.
  • a probe can be used to break the lamella hinges as described in co-pending PCT App. No. PCT/US07/82030, filed on Oct. 20, 2007, which is hereby incorporated by reference.
  • IC3D vision tools can be used to locate the fine fiducials and remove any redeposition from the bulk milling process as well as the protective tungsten layer deposited during the fiducial milling process.
  • the lamella formed by the first two rectangular bulk-milling cuts and the undercutting will preferably be roughly 500 nm thick.
  • the center of the lamella (containing the area of interest) is thinned from both sides, preferably using a 30 pA beam at 1.2 degrees of FIB tilt with the mill pattern described below.
  • the typical cleaning mill pattern commonly used for lamella milling causes very thin lamellae ( ⁇ 100 nm) to bend or bow.
  • Applicants have discovered that using a mill pattern resulting in multiple passes of the beam on the sample face prevents the sample from bowing. This mill pattern, along with other embodiments of a method for eliminating lamella bowing during the thinning process, is discussed in greater detail below.
  • the final thinning cuts can be placed using calipers (with image recognition) to find the lamella edges, with the final lamella thickness being determined by an offset in the milling position from the lamella face. For example, for each lamella to be extracted from a sample, the exact location of the lamella can be determined from the fiducial location. The first cut is milled at half the desired lamella thickness away from the center of the desired sample. Viewing the sample from the top down, using either FIB or SEM imaging, automated metrology software can then measure the edge of the first cut and the fiducial location and precisely determine the location of the second cut. Using the location of the high precision fiducials to precisely control beam location, the lamella can then be thinned using a finely focused FIB to a thickness of 100 nm or less in a process that is also highly repeatable.
  • real time pattern recognition can be used to position the FIB.
  • a suitable FIB system providing real time pattern recognition and metrology is the Certus 3D Dual Beam System available from FEI Company, the assignee of the present invention.
  • step 430 low-kV cleaning is performed on the final thinned window with a 180 pA 5 kV FIB at 4.5 degrees of tilt. Applicants have discovered that a 10 second cleaning mill on each face of the lamella produces a significant improvement in TEM imaging conditions.
  • step 432 the FIB system navigates to the coordinates of the next unmilled lamella site. The process then returns to step 416 and steps 416 to 432 are repeated for all remaining unmilled lamella sites.
  • FIGS. 14-16 The final lamella structure produced by the method of discussed in reference to FIG. 9 is shown in FIGS. 14-16 .
  • a center lamella “window” 610 can be thinned to a thickness of 100 nm or less, leaving thicker surrounding material to provide the sample with increased mechanical strength.
  • the center window is approximately 3 ⁇ m wide, 4 ⁇ m deep, and 50-70 nm thick.
  • the thicker material surrounding window 610 indicated by reference numeral 612 in FIG. 15 , also helps prevent the lamella from bowing during the milling process.
  • the increased mechanical strength of this “windowed” lamella structure is also very desirable when using an ex-situ lamella extraction device as described in co-pending PCT App. No. PCT/US07/82030, filed on Oct. 20, 2007, which is incorporated by reference.
  • FIG. 16 shows a high resolution micrograph of a lamella created using the process described above.
  • FIB milling is carried out in a dual beam FIB/SEM system, as shown schematically in FIG. 17A (not to scale) with vertically mounted FIB column 720 used to mill substrate 503 to create lamella 727 and the SEM column 722 used to image the lamella 727 so that automated metrology software can determine whether the lamella has been thinned to the desired thickness.
  • a dual FIB system could be used with one beam used to mill and the other used to image. As shown schematically in FIG.
  • a system with a single FIB column 720 could also be used and the sample tilted and rotated so that the same beam could be used to mill and image (as is known in the prior art). Skilled persons will recognize that there is a danger of damage to the lamella if a FIB is used to image the sample.
  • the endpoint of the second bulk mill 725 can be controlled by monitoring the width of the lamella in the same fashion that cross-sections for sub-100 nm features are measured by a CD-SEM.
  • a SEM is used in conjunction with automatic metrology software. As the electron beam is scanned across the exposed cross-section, whether secondary or backscattered detection is employed, there will typically be a change in electron intensity at the edges of the structure. An algorithm is used to assign an edge position based upon the contrast at the edges of the structure and to determine the distance between those edges.
  • a preferred embodiment of the present invention makes a novel application of these known techniques for cross-section metrology.
  • the final lamella position and thickness would be based on a mill and image technique similar to known slice and view techniques where the FIB in a dual beam system is used to expose a sample cross section and the SEM is used to image the sample for automated metrology analysis.
  • Image processing tools such as pattern recognition and edge finding tools can thus be used to precisely control lamella thickness.
  • thinning would first be completed on one side of the lamella.
  • the location of the initial milling would be controlled using fiducial location or other metrology as discussed above.
  • the sample would then be imaged from the top down with either a focused ion beam or scanning electron microscope.
  • a CD-SEM when either the ion beam or the electron beam strikes the surface of substrate, secondary electrons and backscattered electrons are emitted.
  • these electrons will be detected by a secondary electron detector or backscattered electron detector as is known in the art.
  • the analog signal produced either by secondary electron detector or backscattered electron detector is converted into a digital brightness values.
  • an algorithm is used to assign an edge position based upon the difference in brightness values or contrast at either of the edges of the structure and to determine the distance between those edges. If analysis of the image determines that certain specified criteria are not met (such as, for example, a minimum desired lamella/sample width) then the mill and image processing steps are repeated.
  • CD-SEM metrology techniques can thus provide levels of reliability and repeatability that are sufficient to allow the use of TEM samples for in-line process control.
  • This type of automated process control has not been practical in the prior art because of the problems with sample bowing discussed above.
  • sample bowing at or below 100 nm can be greatly minimized. This allows the use of automation of the end-pointing process and eliminates the time consuming manual thinning of the prior art, thus enabling higher volume automated lamella creation for specific structures.
  • a suitable dual beam FIB/SEM for practicing a preferred embodiment of the present invention would be the CLM-3D Dual Beam System available from FEI Company, the assignee of the present invention.
  • Suitable software to implement fully or partially automated image processing, metrology, and machine control according to the present invention should provide pattern recognition and edge detection tools, along with “do while” looping capabilities, such as the IC3DTM software also available from FEI Company.
  • the bending or bowing commonly associated with thin (less than 100 nm thick) TEM samples can be minimized by using a novel milling pattern to thin the center window of the lamella.
  • Final thinning of lamellae typically makes use of a milling pattern, often referred to as a clean up cut or cleaning cross section, where the ion beam is scanned one line at a time toward a feature of interest. With this cutting pattern, the beam executes a set of line cuts in serial mode. The idea is to gradually step the line cuts into the exposed surface to clean it. All lines are milled consecutively; milling is completed for each line before moving to the next. The beam is then stepped (in the y-direction) toward the desired sample face and the process is repeated. Milling is completed in one pass, largely to prevent redeposition of sputtered material on the lamella sample face.
  • the pattern may be varied slightly, the beam is essentially in contact with the cut face almost continuously. Although the exact mechanism is unclear, the end result is that the sample will begin to bow or warp away from the beam when the sample gets thinner than about 70 nm. Sample warping is a significant problem because accurate metrology on a warped sample is very difficult. Further, the region of interest can be damaged so that it becomes unusable for further analysis.
  • the TEM sample 527 is thinned by using a FIB milling pattern that repeatedly steps into the sample cut face in the y-direction (as shown by arrow 820 ) with a decreasing scan speed in (and thus a longer/increasing dwell time as the beam steps into the sample).
  • a FIB milling pattern that repeatedly steps into the sample cut face in the y-direction (as shown by arrow 820 ) with a decreasing scan speed in (and thus a longer/increasing dwell time as the beam steps into the sample).
  • Mill boxes 810 are not intended to show the exact number of steps or the distance between steps, but rather the line gradient is intended to illustrate the decreasing scan speed and the increasing dwell time as the beam moves toward the final sample face.
  • Similar raster patterns are known in the prior art, they have typically been used to rapidly mill deep holes in a substrate. Applicants have discovered, however, that this pattern can be used to precisely thin a lamella without causing sample bowing. This type of raster pattern is typically not used for precise milling of very small structures, primarily because of concerns over redeposition of sputtered material. When used to mill deep holes, the process is often stopped to evaluate the milling progress. By using the pattern on an automated tool and letting the milling finish without stopping, redeposition is greatly minimized.
  • FIGS. 19A to 19C shows a cross-section of the sample 527 taken along line 19 in FIG. 18 at various times during the milling process. As shown in FIG. 19B , the depth of the milled trench 840 slopes toward the sample face 850 (getting deeper as the sample face is approached). Milling throughput is thus increased (because areas away from the sample face do not need to be milled as deeply).
  • the preservation of sample bulk material 860 at the bottom of the lamella window 610 also increases the mechanical rigidity of the sample and improves its handling characteristics.
  • the ion beam is not kept in constant contact with the sample face. For example, five or six passes could be used to mill final TEM sample 527 . Each pass only mills a fraction of the desired depth from initial y-coordinate 822 to final y-coordinate 824 .
  • all cuts can be performed using a single beam current, for example, a 20 nA beam current using beam energies that are readily available with many commercial FIB instruments (e.g., 10 s of keV), with a dwell time and step size that is typically used for FIB milling of Si. While preferred process parameters are described, skilled persons will understand that the preferred process parameters will vary with the size and shape of the sample and the material of the substrate. Skilled persons will be able to readily determine suitable process parameters for extracting samples in different applications.
  • FIGS. 14-16 the process described above can be used to further thin a center lamella “window” 610 to a thickness of 100 nm or less, preferably using the milling pattern discussed above, leaving thicker surrounding material to provide the sample with increased mechanical strength.
  • the center window is approximately 3 ⁇ m wide, 4 ⁇ m deep, and 50-70 nm thick.
  • the thicker material surrounding window 610 indicated by reference numeral 612 in FIG. 15 , also helps prevent the lamella from bowing during the milling process.
  • the increased mechanical strength of this “windowed” lamella structure is also very desirable when using an ex-situ lamella extraction device as described in co-pending PCT App. No. PCT/US07/82030, filed on Oct. 20, 2007, which is incorporated by reference.
  • FIG. 20 is a high resolution micrograph of a lamella sample with a thinner central “window” prepared according to the present invention using the mill pattern described above.
  • the present invention provides a number of significant advantages over the prior art. Using typical methods for TEM sample preparation, it takes highly trained and experienced operators approximately 3 hours to create and extract one sample lamella suitable for TEM analysis. For current in-line metrology techniques like top-down SEM or CD-SEM analysis, as many as 20 different sites across a wafer might be need to be measured. Using prior art methods of TEM sample preparation, it would take about 60 hours just to prepare suitable TEM samples from 20 different sites.
  • Using the present invention results in a significant improvement in the TEM sample preparation process.
  • preferred embodiments of the present invention have been used to create and extract S/TEM samples with a thickness in the 50-100 nm range with very minimal site-to-site variation.
  • the process produces a lamella in roughly 18 minutes, with a site-to-site 3-sigma final lamella thickness variation of roughly 20 nm.
  • the time required to sample 20 different sites on a wafer surface drops to about 6 hours (as opposed to 60 hours for current methods).
  • the process is also much less labor intensive and does not require operators with as high a degree of training or experience. Because more of the process is automated, variation between lamella samples is also minimized.
  • TEM analysis will allow TEM based metrology on objects such as integrated circuits on semiconductor wafer to be used for in-line process control.
  • TEM analysis according to the present invention could be utilized in a wafer fabrication facility to provide rapid feedback to process engineers to troubleshoot or improve processes. This kind of process control for the very small features that can only be measured by TEM is not possible using prior art TEM sample preparation methods.
  • TEM lamella samples are created using a gallium liquid metal ion source to produce a beam of gallium ions focused to a sub-micrometer spot.
  • Such focused ion beam systems are commercially available, for example, from FEI Company, the assignee of the present application.
  • the milling beam used to process the desired TEM samples could comprise, for example, an electron beam, a laser beam, or a focused or shaped ion beam, for example, from a liquid metal ion source or a plasma ion source, or any other charged particle beam.
  • the invention described above could be used with automatic defect reviewing (ADR) techniques, which could identify defects via die-to-die or cell-to-cell ADR.
  • a lamella containing the defect could be created and removed with or without milling fiducials.

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JP2013033066A (ja) 2013-02-14
JP5628882B2 (ja) 2014-11-19
US8890064B2 (en) 2014-11-18
US20100308219A1 (en) 2010-12-09
US9336985B2 (en) 2016-05-10
WO2008049133A3 (fr) 2009-08-20
EP2104864A4 (fr) 2014-05-07
JP2010507781A (ja) 2010-03-11
EP2106555A2 (fr) 2009-10-07
EP2104946A4 (fr) 2012-09-26
US20100300873A1 (en) 2010-12-02
US20130341505A1 (en) 2013-12-26
EP2104864A2 (fr) 2009-09-30
US20160163506A1 (en) 2016-06-09
JP5410286B2 (ja) 2014-02-05
WO2008049134A3 (fr) 2009-08-20
JP5959139B2 (ja) 2016-08-02
JP2010507783A (ja) 2010-03-11
WO2008051937A3 (fr) 2009-08-27
US9275831B2 (en) 2016-03-01
WO2008049133A2 (fr) 2008-04-24
EP2104946A2 (fr) 2009-09-30
US8536525B2 (en) 2013-09-17
WO2008051937A2 (fr) 2008-05-02
EP2104946B1 (fr) 2015-08-12
US9006651B2 (en) 2015-04-14
US20150206707A1 (en) 2015-07-23
US8525137B2 (en) 2013-09-03
US8455821B2 (en) 2013-06-04
US20150323429A1 (en) 2015-11-12
US20120152731A1 (en) 2012-06-21
US9581526B2 (en) 2017-02-28
US20110006207A1 (en) 2011-01-13
EP2106555A4 (fr) 2011-09-21
EP2104864B1 (fr) 2015-03-04
JP2010507782A (ja) 2010-03-11
US20140116873A1 (en) 2014-05-01
JP5270558B2 (ja) 2013-08-21
EP2106555B1 (fr) 2015-01-07

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