US7580388B2 - Method and apparatus for providing enhanced messages on common control channel in wireless communication system - Google Patents
Method and apparatus for providing enhanced messages on common control channel in wireless communication system Download PDFInfo
- Publication number
- US7580388B2 US7580388B2 US11/065,872 US6587205A US7580388B2 US 7580388 B2 US7580388 B2 US 7580388B2 US 6587205 A US6587205 A US 6587205A US 7580388 B2 US7580388 B2 US 7580388B2
- Authority
- US
- United States
- Prior art keywords
- message
- channel
- configuration
- information
- new
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active, expires
Links
Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04W—WIRELESS COMMUNICATION NETWORKS
- H04W28/00—Network traffic management; Network resource management
- H04W28/02—Traffic management, e.g. flow control or congestion control
- H04W28/06—Optimizing the usage of the radio link, e.g. header compression, information sizing, discarding information
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04W—WIRELESS COMMUNICATION NETWORKS
- H04W74/00—Wireless channel access
- H04W74/002—Transmission of channel access control information
- H04W74/004—Transmission of channel access control information in the uplink, i.e. towards network
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04W—WIRELESS COMMUNICATION NETWORKS
- H04W74/00—Wireless channel access
- H04W74/08—Non-scheduled access, e.g. ALOHA
- H04W74/0866—Non-scheduled access, e.g. ALOHA using a dedicated channel for access
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04W—WIRELESS COMMUNICATION NETWORKS
- H04W28/00—Network traffic management; Network resource management
- H04W28/16—Central resource management; Negotiation of resources or communication parameters, e.g. negotiating bandwidth or QoS [Quality of Service]
- H04W28/18—Negotiating wireless communication parameters
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04W—WIRELESS COMMUNICATION NETWORKS
- H04W4/00—Services specially adapted for wireless communication networks; Facilities therefor
- H04W4/12—Messaging; Mailboxes; Announcements
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04W—WIRELESS COMMUNICATION NETWORKS
- H04W74/00—Wireless channel access
- H04W74/08—Non-scheduled access, e.g. ALOHA
- H04W74/0833—Random access procedures, e.g. with 4-step access
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04W—WIRELESS COMMUNICATION NETWORKS
- H04W76/00—Connection management
- H04W76/10—Connection setup
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04W—WIRELESS COMMUNICATION NETWORKS
- H04W8/00—Network data management
- H04W8/22—Processing or transfer of terminal data, e.g. status or physical capabilities
- H04W8/24—Transfer of terminal data
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04W—WIRELESS COMMUNICATION NETWORKS
- H04W80/00—Wireless network protocols or protocol adaptations to wireless operation
- H04W80/02—Data link layer protocols
Definitions
- the present invention relates to a method and apparatus for enhancing the signaling between a mobile communication device and a network. Specifically, the present invention is directed to a method and apparatus for providing new configurations for transmitting control information between a mobile terminal, for example user equipment (UE), and a radio network controller (RNC) using a common control channel (CCCH) logical channel/transport channel.
- a mobile terminal for example user equipment (UE), and a radio network controller (RNC) using a common control channel (CCCH) logical channel/transport channel.
- CCCH common control channel
- the universal mobile telecommunications system is a European-type, third generation IMT-2000 mobile communication system that has evolved from a European standard known as Global System for Mobile communications (GSM).
- GSM Global System for Mobile communications
- UMTS is intended to provide an improved mobile communication service based upon a GSM core network and wideband code division multiple access (W-CDMA) wireless connection technology.
- W-CDMA wideband code division multiple access
- the 3GPP creates detailed specifications of UMTS technology.
- TSG technical specification groups
- RAN radio access network
- UTRAN UMTS terrestrial radio access network
- FIG. 1 A conventional UMTS network structure 1 is illustrated in FIG. 1 .
- One mobile terminal 2 or user equipment (UE) is connected to a core network 4 through a UMTS terrestrial radio access network (UTRAN) 6 .
- the UTRAN 6 configures, maintains, and manages a radio access bearer for communications between the UE 2 and core network 4 to meet end-to-end quality-of-service requirements.
- the UTRAN 6 consists of at least one radio network subsystem 8 , including one RNC 10 acting as an access point to the core network 4 , and at least one Node B 12 managed by a corresponding RNC.
- the RNCs 10 are logically classified as controlling RNCs, which allocate and manage common radio resources for a plurality of UEs 2 of a cell, and serving RNCs, which allocate and manage dedicated radio resources for a specific UE 2 of a cell.
- Each Node B 12 manages at least one cell.
- the core network 4 may be divided according to the type of service provided, namely, a circuit-switched (CS) domain and a packet-switched (PS) domain.
- a general voice conversation service is a circuit switched (CS) service
- a Web browsing service via an Internet connection is classified as a packet switched (PS) service.
- the CS domain includes a mobile switching center (MSC) 14 acting as an access point to the UTRAN 6 and a gateway mobile switching center (GMSC) 16 acting as an access point to an external network.
- the PS domain includes a serving GPRS support node (SGSN) 18 acting as an access point to the UTRAN 6 and a gateway GPRS support node (GGSN) 20 acting as an access point to the external network.
- SGSN serving GPRS support node
- GGSN gateway GPRS support node
- a visitor location register (VLR) 22 and a home location register (HLR) 24 manage user registration information.
- the access point of the core network 4 is the MSC 14 via an lu-CS interface.
- the RNCs 10 are connected to the MSC 14 of the core network 4 and the MSC is connected to the GMSC 16 that manages the connection with other networks.
- the access point of the core network 4 is the SGSN 18 via an lu-PS interface.
- the RNCs 10 are connected to the SGSN 18 and the GGSN 20 of the core network 4 .
- the SGSN 18 supports the packet communications with the RNCs 10 and the GGSN 20 manages the connection with other packet switched networks, such as the Internet.
- the interface between the UE 2 and UTRAN 6 is realized through a radio interface protocol established in accordance with 3GPP radio access network specifications.
- the conventional architecture of the radio interface protocol is illustrated in FIG. 2 .
- the conventional radio interface protocol has horizontal layers comprising a physical layer (L 1 ), a data link layer (L 2 ), and a network layer (L 3 ), and has vertical planes comprising a user plane (U-plane) for transmitting user data and a control plane (C-plane) for transmitting control information.
- the user plane is a region that handles traffic information with the user, such as voice or Internet protocol (IP) packets.
- the control plane is a region that handles control information for an interface with a network and maintenance and management of a call.
- the protocol layers may be divided into a first layer (L 1 ), a second layer (L 2 ), and a third layer (L 3 ) based on the three lower layers of an open system interconnection (OSI) standard model.
- the first layer (L 1 ) is the physical layer.
- the second layer (L 2 ) includes a medium access control (MAC) layer, a radio link control (RLC) layer, a broadcast/ multicast control (BMC) layer, and a packet data convergence protocol (PDCP) layer.
- MAC medium access control
- RLC radio link control
- BMC broadcast/ multicast control
- PDCP packet data convergence protocol
- the physical (PHY) layer provides information transfer service to a higher layer by using various radio transfer techniques.
- the physical layer is linked via transport channels to a medium access control (MAC) layer.
- MAC medium access control
- the MAC layer handles mapping between logical channels and transport channels and provides allocation of the MAC parameters for allocation and re-allocation of radio resources.
- the MAC layer is connected to the physical layer by transport channels and may be divided into a MAC-b sub-layer, a MAC-d sub-layer, a MAC-c/sh sub-layer, and a MAC-hs sub-layer according to the type of transport channel being managed.
- the MAC layer is connected to an upper layer called the radio link control (RLC) layer, via a logical channel.
- RLC radio link control
- Various logical channels are provided according to the type of information transmitted. In general, a control channel is used to transmit information of the control plane and a traffic channel is used to transmit information of the user plane.
- a logical channel may be a common channel or a dedicated channel depending on whether the logical channel is shared.
- Logical channels include a dedicated traffic channel (DTCH), a dedicated control channel (DCCH), a common traffic channel (CTCH), a common control channel (CCCH), a broadcast control channel (BCCH), and a paging control channel (PCCH), or a Shared Channel Control Channel.
- the BCCH provides information including information utilized by a UE 2 to access the core network 4 .
- the PCCH is used by the UTRAN 6 to access a UE 2 .
- the different logical channels are listed in FIG. 3 .
- the MAC-b sub-layer manages a BCH (Broadcast Channel), which is a transport channel handling the broadcasting of system information.
- BCH Broadcast Channel
- the MAC-c/sh sub-layer manages a common transport channel, such as a forward access channel (FACH) or a downlink shared channel (DSCH), which is shared by a plurality of terminals.
- FACH forward access channel
- DSCH downlink shared channel
- RACH Radio Access Channel
- FIG. 4 The possible mapping between the logical channels and the transport channels from the perspective of a UE 2 is illustrated in FIG. 4 .
- FIG. 5 The possible mapping between the logical channels and the transport channels from the perspective of a UTRAN 6 is illustrated in FIG. 5 .
- the MAC-d sub-layer manages a dedicated channel (DCH), which is a dedicated transport channel for a UE 2 .
- DCH dedicated channel
- the MAC-d sublayer is located in a serving RNC 10 (SRNC) that manages a corresponding UE 2 , and one MAC-d sublayer also exists in each UE 2 .
- SRNC serving RNC 10
- the RLC layer depending of the RLC mode of operation, supports reliable data transmissions and performs segmentation and concatenation on a plurality of RLC service data units (SDUs) delivered from an upper layer.
- SDUs RLC service data units
- the RLC layer adjusts the size of each RLC SDU in an appropriate manner based upon processing capacity and then creates data units by adding header information thereto.
- the data units are transferred to the MAC layer via a logical channel.
- the RLC layer includes a RLC buffer for storing the RLC SDUs and/or the RLC PDUs.
- the RLC services are used by service-specific protocol layers on the user plane, namely a broadcast/multicast control (BMC) protocol and a packet data convergence protocol (PDCP), and are used by a radio resource control (RRC) layer for signaling transport on the control plane.
- BMC broadcast/multicast control
- PDCP packet data convergence protocol
- RRC radio resource control
- the BMC layer schedules a cell broadcast (CB) message delivered from the core network 4 and enables the CB message to be broadcast to the corresponding UEs 2 in the appropriate cell.
- Header information such as a message identifier, a serial number, and a coding scheme, is added to the CB message to generate a BMC message for delivery to the RLC layer.
- the RLC layer appends RLC header information and transmits the thus-formed message to the MAC layer via a common traffic channel as a logical channel.
- the MAC layer maps the common traffic channel to a forward access channel (FACH) as a transport channel.
- FACH forward access channel
- the transport channel is mapped to a secondary common control physical channel as a physical channel.
- the PDCP layer is located above the RLC layer.
- the PDCP layer is used to transmit network protocol data, such as the IPv4 or IPv6, effectively on a radio interface with a relatively small bandwidth.
- the PDCP layer reduces unnecessary control information used in a wired network, a function called header compression.
- the radio resource control (RRC) layer located at the lowest portion of the third layer (L 3 ) is only defined in the control plane.
- the RRC layer handles the control plane signaling of the network layer (L 3 ) between the UEs 2 and the UTRAN 6 and controls the transport and physical channels for the establishment, reconfiguration, and release of radio bearers.
- a radio bearer is a service provided by a lower layer, such as the RLC layer or MAC layer, for data transfer between the UE 2 and UTRAN 6 .
- the air interface (Uu) between the UE 2 and the UTRAN 6 includes the RRC layer for the establishment, reconfiguration, and release of radio bearers, for example a service providing data transfer between the UE and an RNC 10 of the UTRAN.
- Establishment of a radio bearer determines the regulating characteristics of the protocol layer and channel needed to provide a specific service, thereby establishing the parameters and operational methods of the service.
- a UE 2 is said to be in the RRC-connected mode when the RRC layer of a UE and the RRC layer of a corresponding RNC 10 are connected, thereby providing for bi-directional transfer of RRC messages. If there is no RRC connection, the UE 2 is said to be in the RRC-idle mode.
- a UE 2 Upon power-up, a UE 2 is in the RRC-idle mode by default. When necessary, an RRC-idle UE 2 transitions to the RRC-connected mode through an RRC connection procedure.
- An RRC connection is established, for example, when uplink data transfer is needed to make a call or to respond to a paging message from the RNC 10 .
- the RRC connection connects the UE 2 to the RNC 10 of the UTRAN 6 .
- the different possibilities that exist for the mapping between the radio bearers and the transport channels are not all possible all the time.
- the UE 2 and UTRAN 6 deduce the possible mapping depending on the UE state and the procedure that the UE and UTRAN are executing.
- the different transport channels are mapped onto different physical channels.
- the RACH transport channel is mapped on a given PRACH
- the DCH may be mapped on the DPCH
- the FACH and the PCH may be mapped on the S-CCPCH
- the DSCH is mapped on the PDSCH.
- the configuration of the physical channels is determined by RRC signaling exchange between the RNC 10 and the UE 2 .
- the UTRAN 6 can determine the existence of a particular UE within the unit of cells, for example in which cell or set of cells the RRC connected mode UE resides, and which physical channel the UE is monitoring. Therefore, the UE 2 can be effectively controlled.
- the UTRAN 6 cannot determine the existence of a UE 2 in idle mode.
- the existence of idle UEs 2 can only be determined by the core network 4 to be within a region that is larger than a cell, for example a location or a routing area. Therefore, the existence of idle mode UEs 2 is determined within large regions, and, in order to receive mobile communication services such as voice or data, the idle mode UE must transition into the RRC connected mode. The possible transitions between modes and states are illustrated in FIG. 6 .
- a UE 2 in RRC connected mode may be in different states, for example CELL_FACH state, CELL_PCH state, CELL_DCH state or URA_PCH state. Depending on the state, the UE 2 performs different actions and monitors different channels.
- a UE 2 in CELL_DCH state will attempt to monitor, among others, a DCH type of transport channel that is mapped to a certain DPCH.
- a UE 2 in CELL_FACH state will monitor several FACH transport channels that are mapped to a certain S-CCPCH.
- a UE 2 in CELL_PCH state will monitor the PICH channel and the PCH channel that is mapped to a certain S-CCPCH physical channel.
- a UE 2 is in CELL_FACH state whenever it moves from one cell into another cell and, depending on different conditions, the UE will start the CELL Update procedure by transmitting a Cell Update message to the Node B 12 to indicate that the UE has changed location and will begin monitoring the FACH channel.
- This procedure is also performed when the UE 2 transitions from any other state to CELL_FACH state and the UE has no C-RNTI available, for example when transitioning from CELL_PCH state or CELL_DCH state, or when a UE in CELL_FACH state was previously out of a coverage area.
- the MAC includes a header in the transmissions.
- the logical channel type determines the type of MAC header that the UE 2 uses to transmit the message, the UMTS mode (FDD or TDD) and the transport channel to which the logical channel is mapped.
- This header may contain an identifier that identifies a specific UE 2 .
- the RNC 10 allocates the different identifiers.
- C-RNTI is used to identify a given UE 2 in a given cell.
- U-RNTI is used to identify a UE 2 in a given UTRAN 6 system.
- S-RNTI identifies the UE 2 on a DSCH transport channel.
- H-RNTI identifies the UE 2 on a given HSDPA transport channel.
- the fields that are contained in the MAC header for all transport channels except the HS-DSCH transport channel are illustrated in FIG. 7 .
- the TCTF (Target Channel Type Field) field indicates the type of logical channel that is mapped on the given transport channel in the event different logical channels may be mapped on the transport channel.
- the UE-Id type is the UE 2 identifier.
- the C/T field indicates the radio bearer that was established.
- the TCTF is utilized to distinguish between the different logical channels. Distinguishing between logical channels determines the exact format of the rest of the MAC header. For example, If the CCCH is mapped on RACH /FACH, the MAC header contains only the TCTF field that carries the information that the rest of the MAC PDU contains a message from a CCCH type transport channel.
- the UMTS standard indicates that only the signaling radio bearer 0 (SRB 0 ) may use the CCCH logical channel. Therefore there is no need for the C/T field when the CCCH logical channel is used.
- not all transport channels are available depending upon the state of the UE 2 .
- the UE cannot use a DCH transport channel, but may use, for example, a RACH transport channel.
- the UE 2 For the mapping of DCCH on RACH, for example, the UE 2 must have a valid C-RNTI. However, if the UE 2 has just moved into a new cell and desires to start the Cell Update procedure, the UE does not have a valid C-RNTI. Therefore, the UE 2 may only map the CCCH logical channel on the RACH. In coding the CCCH message, an “initial Identity,” which is either fixed or allocated to the UE 2 by the core network 4 , or the U-RNTI is included in the message to distinguish the UE 2 .
- the UE 2 may only use CCCH logical channel mapped on the RACH transport channel to transmit the RRC Connection Request message.
- the RLC layer may use either transparent mode (TM), unacknowledged mode (UM) or acknowledged mode (AM).
- TM transparent mode
- UM unacknowledged mode
- AM acknowledged mode
- the size of the RLC PDUs may change after each transmission of a transport block.
- TM and UM mode the size of the RLC PDUs may change after each transmission.
- AM the PDU size may not be changed dynamically, but only through a reconfiguration by the RNC 10 , because the PDUs might be retransmitted.
- the transport channels may handle RLC PDUs of predefined sizes.
- the transport block size of the physical layer is defined by the RLC PDU size and the MAC header size.
- Different transport channels allow different transport block sizes and a given transport channel may also allow different sizes.
- the transport block sizes a UE 2 is allowed to use for a specific radio bearer are determined by the RNC 10 or fixed by the UMTS standard.
- a transport channel is defined by its type, for example RACH, FACH, DCH, DSCH or USCH, and by its attributes. Some attributes are dynamic and some attributes are semi-static.
- Dynamic attributes include the transport block size, which is the size of the MAC PDU; the transport block set size, which is the size of the MAC PDU multiplied by the number of MAC PDUs that can be transported in one transmission time interval (TTI); and the transmission time interval, which is an optional dynamic attribute for TDD only.
- Semi-static attributes include the transmission time interval, which is mandatory for FDD and optional for the dynamic part of TDD NRT bearers; the error protection scheme applied; the type of error protection; the turbo code; the convolutional code; no channel coding, which is semi-static for TDD only; the coding rate; the static rate matching parameter; and the size of CRC.
- the semi static part of an attribute may only be changed when the RRC layer changes the configuration.
- the dynamic part of an attribute provides several alternatives, for example that there may be one, two or three transport blocks transmitted in one TTI. Furthermore, the transport block size may be changed during each TTI.
- a set of values of the dynamic and the semi-static parts is called a transport format (TF).
- TF transport format
- Each transport channel may use one or more transport formats. For example, only one transport channel may be mapped on the Physical Random Access Channel (PRACH), the channel to which the present invention is directed.
- PRACH Physical Random Access Channel
- the PRACH message includes a data portion that is generated out of the transport block set received by the MAC layer and includes control information that is generated in the Physical layer.
- the control information includes the transport format combination indicator (TFCI) that is used to determine the coding and the transport format that is used for the transmission.
- FIG. 8 illustrates the RACH message structure.
- the allowable transport format combinations are determined by the RRC protocol, as indicated by the RB mapping information.
- the UMTS standard indicates that signaling radio bearer number 0 (SRB 0 ) is always mapped via a CCCH logical channel on the RACH transport channel.
- the UMTS standard also indicates that a UE 2 is only allowed to use the first transport format that is listed for the selected RACH for transmission of messages via CCCH.
- the first transport format of a RACH may carry only one transport block of 168 bits.
- the messages that are transmitted via the CCCH may be large and, in some situations, it may be beneficial to use also other transport block sizes.
- the CCCH is fixed to always use TM mode in the uplink.
- TM mode does not support segmentation and padding.
- the MAC header always includes only the TCTF header, which consists of 2 bits. Therefore, the RRC message that is carried in the MAC SDU must be adapted to meet the required size of the MAC SDU.
- RRC messages are generated using a special coding known as ASN.1 coding.
- FIG. 9 illustrates ASN.1 coding of an RRC message for CCCH.
- the different information elements that form the R99 part and the extension part are encoded by the means of the ASN.1 to create the basic production.
- the encoder adds padding bits to ensure that the number of bits is a multiple of 8.
- the RRC layer adds additional padding.
- the CCCH logical channel is used to transmit Cell Update messages, RRC connection request messages and URA update messages in the uplink.
- the messages have different sizes depending upon the information that is added to the message.
- the messages also contain information on the measured results of neighboring cells, for example quality and timing information such as measured results on RACH.
- information regarding the existing PRACH configurations is transmitted to a UE 2 (S 10 ).
- the UE 2 selects the PRACH according to an algorithm (S 12 ).
- the UE 2 generates a message including all information elements for transmission over the PRACH (S 14 ).
- the UE 2 compares the message size with the transport block size of the first transport format of the corresponding RACH and adapts the message size by deleting measurement information until the message fits within the transport block size (S 16 ).
- the UE 2 then transmits the adapted message via the PRACH (S 18 ).
- PRACHs may be configured in a cell.
- a UE 2 in RRC-idle or RRC-connected mode reads a list of PRACH channels from the system information blocks.
- Each PRACH channel may have a list of available transport formats.
- TDD Time Division Duplex
- TTI Transmission Time Interval
- duration of the transmission of a transport block of a PRACH may be different depending on the transport format.
- the UE 2 In 1.28 MCPS TDD mode, the UE 2 always selects the largest TTI of the transport formats that are suitable for transmission of the transport block set.
- each PRACH channel has a fixed TTI.
- Each transport format is characterized, among other characteristics, by a transport block size and the number of transport blocks that may be transmitted during one TTI.
- the UE 2 In order to select the PRACH, the UE 2 first must select the TTI to be applied. Once the TTI is selected, the UE 2 selects one PRACH channel randomly from the PRACHs that exist that use the selected TTI length. If PRACHs with different TTI lengths exist, the TTI length is selected according to the method 50 illustrated in FIG. 11 . Otherwise, the TTI of the configured PRACHs is utilized.
- the UE 2 selects a transport format with 10 msec. TTI based on the available transport formats in step S 52 . From the transport formats supported by all RACHs, those formats that have a TTI of 10 msec. and correspond to a single transport block of all configured RLC sizes are kept.
- the RLC size applicable for RBO is kept in RRC-idle mode and the RLC sizes configured with explicit RB mapping information are kept in RRC-connected mode. If more than a single transport format is applicable, the UE 2 may select any of the available formats.
- the UE 2 selects the transport format that is intended for use by the next transmission. If such information is not available, the transport format corresponding to the largest configured RLC size is selected.
- step S 54 the UE 2 calculates the power margin by estimating the transmit power necessary to transmit a transport block set on the RACH with a given transport format.
- the algorithm used for this calculation is specified by the 3GPP standard and uses, among other input parameters, the TTI, the transport block size and the number of transport blocks to be transmitted.
- step S 56 the calculated power margin is compared to 6 dB. If the power margin is greater than 6 dB, the 10 msec. TTI is selected in step S 58 . If the calculated power margin is not greater than 6 db, the 20 msec. TTI is selected in step S 60 .
- a UE 2 might completely delete the information on the measured results of neighboring cells, for example measured results on RACH, even though the quality and timing information might be needed in the RNC 10 . Without the quality and timing information, a connection may not be established with the RNC 10 when a UE 2 moves to another cell. The UE 2 may not be able to transmit data and a current call may be interrupted or a new call may not be initiated.
- the UMTS standard restricts a UE 2 to always use the first transport block size of the selected PRACH, there is only one transport block size available for SRB 0 . Therefore, the size of the messages is limited to the size of the transport block.
- the present invention is directed to a method and apparatus for enhancing the signaling between a mobile communication device and a network. Specifically, the invention is directed to a method and apparatus for providing new configurations for transmitting control information between a mobile and a network using a common control channel logical channel /transport channel such that the operation of mobile terminals that do not support the new configurations is not impacted.
- the present invention is embodied in a method and apparatus that enhances the signaling between a mobile communication device and a network. Specifically, new configurations for transmitting control information between a mobile and a network using a common control channel (CCCH) logical channel /transport channel are provided and an indication is provided from a network regarding which of the new configurations are available for use such that previously available configurations are still available for mobile terminals that do not support the new configurations.
- CCCH common control channel
- a method for transmitting control information to a network.
- the method includes receiving an information message indicating one or more available configurations for transmitting a message, selecting one of available configurations and transmitting a message utilizing the selected configuration.
- the available configurations may include a legacy configuration mode and legacy configuration identity.
- the legacy configuration mode is a configuration mode for transmitting a message that may be utilized by mobile terminals that do not support the new configurations provided by the present invention.
- the available configurations may include a predefined configuration mode and predefined configuration identity.
- the predefined configuration mode is a new configuration for transmitting a message that is provided by the present invention.
- the new configurations provided by the present invention may include an additional channel, an increased message block size for an existing channel, a new channel mapping configuration, and /or a new message format.
- the selection of one of the available configurations is based on the size of a message to be transmitted.
- a new logical channel and /or a new physical channel may be provided. It is further contemplated that an increased message size may be provided for an existing channel, preferably a logical channel and /or a physical channel. Moreover, it is contemplated that a new channel mapping configuration may be associated with mapping a logical channel to a physical channel.
- the information message indicating the available configurations for transmitting a message may be received via a common channel.
- the information indicating the available configurations is included in an extension portion of the information message.
- the information message indicating the available configurations for transmitting a message may be received via a dedicated channel.
- the information message is an RRC connection setup message.
- a method for transmitting control information between at least one mobile communication device and a network.
- the method includes providing new configurations for transmitting a message in one or more mobile communication devices, the new configurations including an additional channel, an increased message block size for an existing channel, a new channel mapping configuration, and /or a new message format, transmitting an information message indicating the new configurations from the network to one or more mobile communication devices, selecting one of the new configurations in the mobile communication devices and transmitting a message utilizing the selected configuration from the mobile communication devices to the network.
- a new logical channel and /or a new physical channel may be provided. It is further contemplated that an increased message size may be provided for an existing channel, preferably a logical channel and /or a physical channel. Moreover, it is contemplated that a new channel mapping configuration may be associated with mapping a logical channel to a physical channel. Preferably the selection of one of the new configurations is based on the size of a message to be transmitted.
- the information message indicating the new configurations for transmitting a message may be transmitted via a common channel to a plurality of mobile communication devices.
- the information indicating the available configurations is included in an extension portion of the information message such that mobile communication devices that do not incorporate the new configurations do not interpret the information.
- the information message indicating the new configurations for transmitting a message may be transmitted via a dedicated channel to a specific mobile communication device.
- the information message is an RRC connection setup message.
- a method for transmitting control information to a network.
- the method includes transmitting an information message indicating one or more available configurations for transmitting a message and receiving a message transmitted utilizing one of the available configurations.
- the available configurations may include a legacy configuration mode and legacy configuration identity.
- the legacy configuration mode is a configuration mode for transmitting a message that may be utilized by mobile terminals that do not support the new configurations provided by the present invention.
- the available configurations may include a predefined configuration mode and predefined configuration identity.
- the predefined configuration mode is a new configuration for transmitting a message that is provided by the present invention.
- the new configurations provided by the present invention may include an additional channel, an increased message block size for an existing channel, a new channel mapping configuration, and /or a new message format.
- the information message is an RRC connection setup message.
- a new logical channel and /or a new physical channel may be provided. It is further contemplated that an increased message size may be provided for an existing channel, preferably a logical channel and /or a physical channel. Moreover, it is contemplated that a new channel mapping configuration may be associated with mapping a logical channel to a physical channel.
- the information message indicating the available configurations for transmitting a message may be transmitted via a common channel to a plurality of mobile terminals.
- the information indicating the available configurations is included in an extension portion of the information message.
- the information message indicating the available configurations for transmitting a message may be transmitted via a dedicated channel to a specific mobile terminal.
- the information message is an RRC connection setup message.
- a mobile communication device for transmitting control information to a network.
- the mobile communication device includes an RF module, an antenna, a keypad, a display, a storage unit, and a processing unit.
- the antenna and RF module receive an information message from the network and transmit a message to the network.
- the keypad allows a user to enter information.
- the display conveys information to a user.
- the storage unit stores information associated with one or more configurations.
- the processing unit performs the methods of the present invention to process an information message indicating available configurations for transmitting a message, select one of the available configurations and transmit a message utilizing the selected configuration.
- a network for transmitting control information to one or more mobile terminals.
- the network includes a transmitter, a receiver and a controller.
- the transmitter transmits an information message to one or more mobile terminals.
- the receiver receives a message from one or more mobile terminals.
- the controller performs the methods of the present invention to generate an information message indicating one or more available configurations for transmitting a message and to process messages transmitted from one or more mobile terminals utilizing one of the available configurations.
- FIG. 1 illustrates a block diagram of a conventional UMTS network structure.
- FIG. 2 illustrates a conventional radio interface protocol
- FIG. 3 illustrates different logical channels in a conventional radio interface protocol.
- FIG. 4 illustrates possible mapping between the logical channels and the transport channels from the perspective of a mobile terminal in a conventional radio interface protocol.
- FIG. 5 illustrates possible mapping between the logical channels and the transport channels from the perspective of a core network in a conventional radio interface protocol.
- FIG. 6 illustrates possible transitions between modes and states of a conventional mobile terminal.
- FIG. 7 illustrates the fields contained in the MAC header in a conventional radio interface protocol for all transport channels except the HS-DSCH transport channel.
- FIG. 8 illustrates the conventional RACH message structure.
- FIG. 9 illustrates the conventional ASN.1 coding of an RRC message for CCCH.
- FIG. 10 illustrates a conventional method for transmitting messages on the CCCH logical channel.
- FIG. 11 illustrates a conventional method for selecting the TTI length in order to select the PRACH for transmission of messages in FDD (Frequency Division Duplex) mode.
- FDD Frequency Division Duplex
- FIG. 12 illustrates a method for transmitting messages on the CCCH logical channel according to one embodiment of the present invention.
- FIG. 13 illustrates a method for selecting the TTI length in order to select the PRACH for transmission of messages in FDD (Frequency Division Duplex) mode according to one embodiment of the present invention.
- FIG. 14 illustrates a method for transmitting an indication of available PRACH configurations utilizing a message transmitted to a plurality of mobile terminals according to one embodiment of the present invention.
- FIG. 15 illustrates a method for transmitting an indication of available PRACH configurations utilizing a message transmitted to a specific mobile terminal according to one embodiment of the present invention.
- FIG. 16 illustrates a mobile communication device according to one embodiment of the present invention.
- FIG. 17 illustrates a network according to one embodiment of the present invention.
- the present invention relates to a method and apparatus for providing new configurations for transmitting control information between a mobile terminal, for example user equipment (UE), and a radio network controller (RNC) using a common control channel (CCCH) logical channel /transport channel such that the operation of mobile terminals that do not support the new configurations is not impacted.
- a mobile terminal for example user equipment (UE), and a radio network controller (RNC) using a common control channel (CCCH) logical channel /transport channel such that the operation of mobile terminals that do not support the new configurations is not impacted.
- CCCH common control channel
- the invention proposes to use a new configuration for the transmission of the RRC messages of SRB 0 .
- the new configuration is intended to enable messages to be transmitted over the CCCH that are larger than those currently allowed for transmission. Enabling larger messages, for example messages containing additional information, to be transmitted over the CCCH may prevent essential quality and timing information, for example measured results on RACH, from being deleted from the messages sent over the CCCH.
- a first embodiment of the new configuration provides a new physical RACH channel (PRACH) which would be used only by UEs 2 that support the use of the additional PRACH.
- the new PRACH may be indicated utilizing the existing system information messages such that only UEs 2 that support the use of the new PRACH would utilize the new channel to transmit messages via the CCCH on the new PRACH.
- a second embodiment of the new configuration allows a UE 2 to use a different transport format on the same RACH that is presently utilized to transmit messages via the CCCH.
- a new logical channel may be implemented, for example an enhanced common control channel (ECCCH), which may be mapped on any transport format combination of the available RACH channels.
- ECCH enhanced common control channel
- the RNC 10 would indicate whether a UE 2 is allowed to use the enhanced CCCH, for example in an existing system information message, RRC messages or any other messages transmitted from the RNC to the UE 2 .
- a third embodiment allows the mapping of the CCCH channel on other transport block sizes of the existing RACH. There would be no need to change the architecture of the UE 2 or core network 4 , as only the mapping of the PRACH would be changed.
- the RNC 10 may signal whether the UE 2 is allowed to map the CCCH on any PRACH and whether any PRACH transport block size or only certain PRACH transport block sizes are allowed.
- the RNC 10 may indicate the numbers of the entries in the list of PRACH transport block sizes that are allowed. Alternately, the mapping of the CCCH channel on any PRACH may be allowed without any indication from the RNC 10 .
- a fourth embodiment allows a new message format to be utilized.
- the new message format may be adapted to include only the most necessary data.
- the START values may be omitted in an RRC Connection Request message since the START values are also transmitted in the Initial Direct transfer message.
- FIG. 12 illustrates a method 100 for selecting a configuration for transmitting a message via the PRACH according to one embodiment of the present invention.
- the method 100 includes transmitting information indicating the available PRACH configurations to a UE 2 (S 102 ), selecting one of the available PRACH configurations (S 104 ), generating a message to be transmitted using the selected PRACH configuration (S 106 ), adapting the generated message to the transport block size if necessary (S 108 ) and transmitting the message via the PRACH (S 110 ).
- the RNC 10 transmits information to a UE 2 indicating the available PRACH configurations.
- the available PRACH configurations may include existing, or legacy configurations that are supported by all UEs 2 and /or predefined new, or extended, configurations that may not be supported by all UEs.
- the extended PRACH configurations may incorporate one or more of the four embodiments previously defined; a new physical RACH channel, a new logical channel such as an enhanced common control channel (ECCCH), mapping of the CCCH channel on other transport block sizes of the existing RACH, and/or a new message format.
- the indication of the available PRACH configurations may include a configuration mode and configuration identity for each available legacy configuration and each available predefined configuration.
- step S 104 the UE 2 selects one of the available PRACH configurations, for example by performing an algorithm that includes the existing PRACH configuration and the extended PRACH configurations.
- the selection between the existing PRACH configuration and the one or more extended PRACH configurations is based on the size of the message that is to be transmitted in order to select the PRACH configuration that allows a transport block size that accommodates all message data while adding a minimum amount of overhead.
- the UE 2 first determines if the transport block size of the existing PRACH configurations allow inclusion of all information regarding measured results of neighboring cells, for example quality and timing information such as measured results on RACH, in the message. If the transport block sizes of the existing PRACH configurations are insufficient to allow inclusion of all information regarding measured results of neighboring cells in the message, the UE 2 selects one of the extended PRACH configurations.
- the UE 2 then generates a message to be transmitted including all information elements by utilizing the selected PRACH configuration in step S 106 . If the transport block size of the selected PRACH configuration is still insufficient to allow inclusion of all information regarding measured results of neighboring cells in the message, the UE 2 reduces the amount of information regarding measured results of neighboring cells that is included in the message in order to adapt the message size to the transport block size of the selected PRACH configuration in step S 108 .
- the algorithm to determine the TTI of the available PRACHs is impacted.
- the TTI may be selected according to the method 150 in FIG. 13 .
- the UE 2 selects a transport format with 10 msec. TTI based on the available transport formats in step S 152 . From the transport formats supported by all extension PRACHs, those formats that have a TTI of 10 msec. and correspond to a single transport block are kept. If more than a single transport format is applicable, the UE 2 may select any of the available formats.
- the UE 2 selects the transport format that is intended for use by the next transmission. For example, for RB 0 /CCCH, the smallest available RLC size that allows the next message to be transmitted is selected. If such information is not available or, if the largest RLC size is not large enough to accommodate the next message, the transport format corresponding to the largest configured RLC size is selected.
- step S 154 the UE 2 calculates the power margin by estimating the transmit power necessary to transmit a transport block set on the RACH with a given transport format.
- the algorithm used for this calculation is specified by the 3GPP standard and uses, among other input parameters, the TTI, the transport block size and the number of transport blocks to be transmitted.
- step S 156 the calculated power margin is compared to 6 dB. If the power margin is greater than 6 dB the 10 msec. TTI is selected in step S 158 . If the calculated power margin is not larger than 6 db, the 20 msec. TTI is selected in step S 160 .
- the transport format for which the power margin is calculated should then be selected to be the transport format with a TTI of 10 msec. that allows transmission of the RB 0 /CCCH message. If several transport formats with a TTI of 10 msec. that allow transmission of the RB 0 /CCCH message exist, the format with the smallest transport block size is selected. If no such transport format exists, the transport format with the largest transport block size with 10 msec. TTI is selected.
- the UE 2 may select the transport format with a transport block size that is configured by explicit signaling. For SRB 0 /CCCH the UE 2 may select a transport format that allows transmission of the next message for SRB 0 . If no such transport format exists, the transport format with the biggest size should be selected, or if several transport formats are available, the transport format with the smallest transport block size should be chosen. If several transport formats with this transport block size exist, the UE 2 should select the largest TTI from those transport formats.
- the method of transmitting information indicating the available PRACH configurations to a UE 2 must be performed in a manner such that UEs that do not support the new configurations are not impacted.
- the information indicating the available PRACH configurations may be transmitted to a UE 2 as an extension of the system information transmitted to a plurality of UEs 2 , for example as part of a broadcast message on a common channel, as illustrated in FIG. 14 .
- the information indicating the available PRACH configurations may be transmitted by dedicated RRC signaling on a dedicated channel as illustrated in FIG. 15 .
- the portion of the message that contains information available according to the current 3GPP standard may be understood by both new UEs 2 that support the new configurations and legacy UEs that do not support the new configurations.
- the indication of extension information is read by new UEs 2 and ignored by legacy UEs.
- the extension information indicating the available PRACH configurations is understood only by new UEs 2 that support the new configurations.
- the information indicating the available PRACH configurations is transmitted to a specific new UE 2 that supports the new configurations when a connection between a UTRAN 6 and the UE is established.
- the existing RRC connection setup message is utilized to indicate the available PRACH configurations.
- the UE 2 requests an RRC connection by transmitting an RRC connection request message to the UTRAN 6 . If the RRC connection can be accomplished, the UTRAN 6 transmits an RRC connection setup message to the UE 2 .
- the RRC connection setup message includes an indication of the available PRACH configurations if the UE supports the new configurations.
- the indicated available PRACH configurations may include a legacy configuration, for example the existing PRACH configuration, and one or more predefined new PRACH configurations, for example any the extended PRACH configurations incorporating the four embodiments previously defined. If the UE 2 is a legacy UE that does not support the new configurations, no indication of the available PRACH configurations is included in the RRC connection setup message.
- the UE 2 upon receiving the RRC connection setup message, selects one of the available PRACH configurations and transmits an RRC connection setup complete message to the UTRAN 6 . The UE 2 may then transmit messages via the PRACH by utilizing the selected PRACH configuration.
- the mobile communication device 200 includes a processing unit 210 such as a microprocessor or digital signal processor, an RF module 235 , a power management module 205 , an antenna 240 , a battery 255 , a display 215 , a keypad 220 , a storage unit 230 such as flash memory, ROM or SRAM, a speaker 245 and a microphone 250 .
- a user enters instructional information, such as a telephone number, for example, by pushing the buttons of the keypad 220 or by voice activation using the microphone 250 .
- the processing unit 210 receives and processes the instructional information to perform the appropriate function, such as to dial the telephone number. Operational data may be retrieved from the memory unit 230 to perform the function. Furthermore, the processing unit 210 may display the instructional and operational information on the display 215 for the user's reference and convenience.
- the processing unit 210 issues instructional information to the RF module 235 , to initiate communication, for example, by transmitting radio signals comprising voice communication data.
- the RF module 235 includes a receiver and a transmitter to receive and transmit radio signals.
- the antenna 240 facilitates the transmission and reception of radio signals.
- the RF module 235 may forward and convert the signals to baseband frequency for processing by the processing unit 210 .
- the processed signals may be transformed into audible or readable information output, for example, via the speaker 245 .
- the RF module 235 and antenna 240 are adapted to receive an information message from the network 4 and to transmit a message to the network and the storage unit 230 is adapted to store information associated with one or more configurations.
- the processing unit 210 is adapted to process an information message indicating one or more available configurations for transmitting a message, select one of the available configurations and transmit a message utilizing the selected configuration.
- FIG. 17 illustrates a block diagram of a UTRAN 320 according to one embodiment of the present invention.
- the UTRAN 320 includes one or more radio network sub-systems (RNS) 325 .
- Each RNS 325 includes a radio network controller (RNC) 323 and a plurality of Node-Bs 321 , or base stations, managed by the RNC.
- the RNC 323 handles the assignment and management of radio resources and operates as an access point with respect to the core network 4 .
- the RNC 323 is adapted to perform the methods of the present invention.
- the Node-Bs 321 receive information sent by the physical layer of a mobile terminal 200 through an uplink and transmit data to the mobile terminal through a downlink.
- the Node-Bs 321 operate as access points, or as a transmitter and receiver, of the UTRAN 320 for a mobile terminal 200 .
- the Node-Bs 321 are adapted to transmit an information message to one or more mobile terminals 200 and to receive a message from one or more mobile terminals.
- the RNC 323 is adapted to generate an information message, the information message indicating one or more available configurations for transmitting a message, and process a message from one or more mobile terminals 200 , the message transmitted utilizing one of the available configurations.
- the present invention enables a mobile terminal to transmit messages to a network via a CCCH that have a larger transport block size than is currently supported by providing extended PRACH configurations.
- a mobile terminal By utilizing existing messages transmitted by the network to the mobile terminal to indicate the available PRACH configurations, those mobile terminals that support the extended PRACH configurations may utilize the extended configurations while mobile terminals that do not support the extended PRACH configurations may utilize the existing configurations.
- the present invention is described in the context of mobile communication, the present invention may also be used in any wireless communication systems using mobile devices, such as PDAs and laptop computers equipped with wireless communication capabilities. Moreover, the use of certain terms to describe the present invention should not limit the scope of the present invention to certain type of wireless communication system, such as UMTS. The present invention is also applicable to other wireless communication systems using different air interfaces and/or physical layers, for example, TDMA, CDMA, FDMA, WCDMA, etc.
- the preferred embodiments may be implemented as a method, apparatus or article of manufacture using standard programming and /or engineering techniques to produce software, firmware, hardware, or any combination thereof.
- article of manufacture refers to code or logic implemented in hardware logic (e.g., an integrated circuit chip, Field Programmable Gate Array (FPGA), Application Specific Integrated Circuit (ASIC), etc.) or a computer readable medium (e.g., magnetic storage medium (e.g., hard disk drives, floppy disks, tape, etc.), optical storage (CD-ROMs, optical disks, etc.), volatile and non-volatile memory devices (e.g., EEPROMs, ROMs, PROMs, RAMs, DRAMs, SRAMs, firmware, programmable logic, etc.).
- FPGA Field Programmable Gate Array
- ASIC Application Specific Integrated Circuit
- Code in the computer readable medium is accessed and executed by a processor.
- the code in which preferred embodiments are implemented may further be accessible through a transmission media or from a file server over a network.
- the article of manufacture in which the code is implemented may comprise a transmission media, such as a network transmission line, wireless transmission media, signals propagating through space, radio waves, infrared signals, etc.
- a transmission media such as a network transmission line, wireless transmission media, signals propagating through space, radio waves, infrared signals, etc.
Landscapes
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Mobile Radio Communication Systems (AREA)
- Small-Scale Networks (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/065,872 US7580388B2 (en) | 2004-06-01 | 2005-02-25 | Method and apparatus for providing enhanced messages on common control channel in wireless communication system |
| US12/465,578 US7660281B2 (en) | 2004-06-01 | 2009-05-13 | Method and apparatus for providing enhanced messages on common control channel in wireless communication system |
| US12/567,680 US7715344B2 (en) | 2004-06-01 | 2009-09-25 | Method and apparatus for providing enhanced messages on common control channel in wireless communicaton system |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US57621404P | 2004-06-01 | 2004-06-01 | |
| US58963004P | 2004-07-20 | 2004-07-20 | |
| US11/065,872 US7580388B2 (en) | 2004-06-01 | 2005-02-25 | Method and apparatus for providing enhanced messages on common control channel in wireless communication system |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US12/465,578 Continuation US7660281B2 (en) | 2004-06-01 | 2009-05-13 | Method and apparatus for providing enhanced messages on common control channel in wireless communication system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| US20050266846A1 US20050266846A1 (en) | 2005-12-01 |
| US7580388B2 true US7580388B2 (en) | 2009-08-25 |
Family
ID=35463174
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US11/065,872 Active 2027-03-16 US7580388B2 (en) | 2004-06-01 | 2005-02-25 | Method and apparatus for providing enhanced messages on common control channel in wireless communication system |
| US12/465,578 Expired - Lifetime US7660281B2 (en) | 2004-06-01 | 2009-05-13 | Method and apparatus for providing enhanced messages on common control channel in wireless communication system |
| US12/567,680 Expired - Lifetime US7715344B2 (en) | 2004-06-01 | 2009-09-25 | Method and apparatus for providing enhanced messages on common control channel in wireless communicaton system |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US12/465,578 Expired - Lifetime US7660281B2 (en) | 2004-06-01 | 2009-05-13 | Method and apparatus for providing enhanced messages on common control channel in wireless communication system |
| US12/567,680 Expired - Lifetime US7715344B2 (en) | 2004-06-01 | 2009-09-25 | Method and apparatus for providing enhanced messages on common control channel in wireless communicaton system |
Country Status (10)
| Country | Link |
|---|---|
| US (3) | US7580388B2 (fr) |
| EP (1) | EP1751893B1 (fr) |
| JP (1) | JP4920581B2 (fr) |
| CN (2) | CN102833784B (fr) |
| AT (1) | ATE551871T1 (fr) |
| AU (1) | AU2005249137B2 (fr) |
| BR (1) | BRPI0510557A (fr) |
| MX (1) | MXPA06012751A (fr) |
| RU (1) | RU2346392C2 (fr) |
| WO (1) | WO2005119941A1 (fr) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080298340A1 (en) * | 2007-05-31 | 2008-12-04 | Li-Chih Tseng | Method and Apparatus for Improving Transmission of Downlink Shared Channel in a Wireless Communications System |
| US20090219906A1 (en) * | 2005-06-17 | 2009-09-03 | Ntt Docomo, Inc. | Channel transmission apparatus and channel transmission method |
| US20100111206A1 (en) * | 2008-11-05 | 2010-05-06 | Chih-Hsiang Wu | Method of constructing and transmitting packets with mimo configuration in a wireless communication system and related communication device |
| US20100296467A1 (en) * | 2009-04-23 | 2010-11-25 | Interdigital Patent Holdings, Inc. | Method and apparatus for random access in multicarrier wireless communications |
| US20110002262A1 (en) * | 2008-08-08 | 2011-01-06 | Interdigital Patent Holdings, Inc. | Mac reset and reconfiguration |
| US20120275381A1 (en) * | 2009-12-11 | 2012-11-01 | Samsung Electronics Co. Ltd. | Method and apparatus for performing contention-based access in a mobile communication system |
| US8923873B2 (en) | 2011-11-14 | 2014-12-30 | T-Mobile Usa, Inc. | Device triggered channel selection |
| US9020508B2 (en) | 2009-08-12 | 2015-04-28 | Nec Corporation | Mobile communication system, base station, higher-order apparatus, gateway apparatus, communication method, and program |
| US20150163727A1 (en) * | 2012-07-20 | 2015-06-11 | Ntt Docomo, Inc. | Mobile station |
Families Citing this family (520)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1610492B1 (fr) * | 2004-06-21 | 2007-04-11 | Matsushita Electric Industrial Co., Ltd. | Architecture de QoS adaptative et scalaire pour des services de Multicast/Broadcast à porteuses multiples |
| US7463602B2 (en) * | 2004-09-13 | 2008-12-09 | Research In Motion Limited | Configuring signaling radio bearer information in a user equipment protocol stack |
| CN101124841A (zh) * | 2004-09-29 | 2008-02-13 | 诺基亚公司 | 具有高速下行链路共享信道(hs-dsch)信息的激活集更新(asu) |
| US7742444B2 (en) | 2005-03-15 | 2010-06-22 | Qualcomm Incorporated | Multiple other sector information combining for power control in a wireless communication system |
| US8320923B2 (en) * | 2005-04-01 | 2012-11-27 | Interdigital Technology Corporation | Method and apparatus for validating radio resource control messages |
| US7701922B2 (en) | 2005-04-29 | 2010-04-20 | Interdigital Technology Corporation | MAC multiplexing and TFC selection procedure for enhanced uplink |
| US8116292B2 (en) * | 2005-04-29 | 2012-02-14 | Interdigital Technology Corporation | MAC multiplexing and TFC selection procedure for enhanced uplink |
| US9055552B2 (en) | 2005-06-16 | 2015-06-09 | Qualcomm Incorporated | Quick paging channel with reduced probability of missed page |
| US8750908B2 (en) | 2005-06-16 | 2014-06-10 | Qualcomm Incorporated | Quick paging channel with reduced probability of missed page |
| CN100559905C (zh) * | 2005-07-20 | 2009-11-11 | 大唐移动通信设备有限公司 | 基带芯片 |
| US8594252B2 (en) * | 2005-08-22 | 2013-11-26 | Qualcomm Incorporated | Interference cancellation for wireless communications |
| KR101087188B1 (ko) * | 2005-09-29 | 2011-11-25 | 노키아 코포레이션 | 적어도 하나 이상의 선택된 데이터 유닛의 송신 가능성에 기반하여 데이터율의 증가를 요청하는 장치, 방법, 및 컴퓨터 프로그램 생성물 |
| US20090207790A1 (en) | 2005-10-27 | 2009-08-20 | Qualcomm Incorporated | Method and apparatus for settingtuneawaystatus in an open state in wireless communication system |
| US7855976B2 (en) | 2005-10-27 | 2010-12-21 | Qualcomm Incorporated | Method and apparatus for reporting CQI in a wireless communication system |
| US20070117563A1 (en) * | 2005-10-28 | 2007-05-24 | Interdigital Technology Corporation | Call setup procedure in an evolved third generation radio access network |
| EP2247146B1 (fr) | 2005-12-14 | 2011-11-16 | Research In Motion Limited | Procédé et appareil pour la gestion des ressources radio à partir d'un équipement d'abonné dans un réseau UMTS |
| EP1969738B1 (fr) | 2006-01-05 | 2014-03-12 | LG Electronics Inc. | Transmission d'information dans un systeme de communication mobile |
| BRPI0706841A8 (pt) | 2006-01-05 | 2018-04-17 | Lg Electronics Inc | transmissão de dados em um sistema e comunicação móvel |
| BRPI0707464A2 (pt) | 2006-01-05 | 2011-05-03 | Nokia Corp | esquema de segmentação flexìvel para sistemas de comunicação |
| KR101187076B1 (ko) | 2006-01-05 | 2012-09-27 | 엘지전자 주식회사 | 이동 통신 시스템에 있어서 신호 전송 방법 |
| KR101211807B1 (ko) | 2006-01-05 | 2012-12-12 | 엘지전자 주식회사 | 이동통신 시스템에서 무선단말의 동기상태 관리방법 |
| KR101319870B1 (ko) | 2006-01-05 | 2013-10-18 | 엘지전자 주식회사 | 이동 통신 시스템에서의 핸드오버 방법 |
| KR101268200B1 (ko) | 2006-01-05 | 2013-05-27 | 엘지전자 주식회사 | 이동통신 시스템에서의 무선자원 할당방법 |
| KR101203841B1 (ko) | 2006-01-05 | 2012-11-21 | 엘지전자 주식회사 | 무선 통신 시스템에서의 페이징 메시지 전송 및 수신 방법 |
| CN101682557A (zh) | 2006-01-05 | 2010-03-24 | Lg电子株式会社 | 在移动通信系统中发送数据 |
| WO2007078171A2 (fr) | 2006-01-05 | 2007-07-12 | Lg Electronics Inc. | Procede de transmission d'informations en retour dans un systeme de communication sans fil |
| KR100912784B1 (ko) | 2006-01-05 | 2009-08-18 | 엘지전자 주식회사 | 데이터 송신 방법 및 데이터 재전송 방법 |
| US20070189304A1 (en) * | 2006-01-27 | 2007-08-16 | Nokia Corporation | MAC-driven transport block size selection at a physical layer |
| KR101221150B1 (ko) | 2006-02-06 | 2013-01-18 | 삼성전자주식회사 | 직교 주파수 분할 다중 접속 방식 시스템에서 페이징 정보 송수신 방법 및 장치 |
| KR101216751B1 (ko) * | 2006-02-07 | 2012-12-28 | 엘지전자 주식회사 | 이동 통신 시스템에서 식별자를 이용한 충돌 회피 방법 |
| US8493854B2 (en) | 2006-02-07 | 2013-07-23 | Lg Electronics Inc. | Method for avoiding collision using identifier in mobile network |
| KR101358469B1 (ko) | 2006-02-07 | 2014-02-06 | 엘지전자 주식회사 | 무선 네트워크(network) 안에서 상향(uplink)및 하향(downlink) 대역폭(bandwidth)의선택 및 신호 방법 |
| KR101387475B1 (ko) | 2006-03-22 | 2014-04-22 | 엘지전자 주식회사 | 복수의 네트워크 엔터티를 포함하는 이동 통신시스템에서의 데이터 처리 방법 |
| US8920343B2 (en) | 2006-03-23 | 2014-12-30 | Michael Edward Sabatino | Apparatus for acquiring and processing of physiological auditory signals |
| CN101064728B (zh) * | 2006-04-30 | 2010-06-23 | 中兴通讯股份有限公司 | 一种基于td-scdma系统的随机接入控制方法 |
| US8682357B2 (en) | 2006-05-02 | 2014-03-25 | Intellectual Ventures Holding 81 Llc | Paging in a wireless network |
| CA2589373C (fr) * | 2006-05-17 | 2016-01-05 | Research In Motion Limited | Methode et systeme pemettant de traiter les indications de cause des autorisations de signalisation dans un reseau de systeme universel de telecommunications mobiles (umts) |
| US8265034B2 (en) * | 2006-05-17 | 2012-09-11 | Research In Motion Limited | Method and system for a signaling connection release indication |
| US8644829B2 (en) | 2006-05-17 | 2014-02-04 | Blackberry Limited | Method and system for signaling release cause indication in a UMTS network |
| EP2044789B1 (fr) | 2006-06-16 | 2018-08-08 | LG Electronics Inc. | Procédé de transmission partielle de charge utile sur des canaux en conflit d'accès |
| CN101473565B (zh) | 2006-06-21 | 2012-11-07 | Lg电子株式会社 | 在无线移动通信系统中使用消息分离发送和接收无线电接入信息的方法 |
| EP2618517B1 (fr) | 2006-06-21 | 2023-08-02 | LG Electronics Inc. | Procédé de prise en charge de retransmission de données dans un système de communication mobile |
| KR101369135B1 (ko) | 2006-06-21 | 2014-03-05 | 엘지전자 주식회사 | 이동통신 시스템에서의 멀티미디어 및 방송서비스의 품질보장 방법 및 그 단말 |
| KR20070121505A (ko) | 2006-06-21 | 2007-12-27 | 엘지전자 주식회사 | 무선링크 재설정 방법 |
| KR20070121513A (ko) | 2006-06-21 | 2007-12-27 | 엘지전자 주식회사 | 이동통신 시스템의 상향 접속 방법 |
| WO2007148932A1 (fr) * | 2006-06-21 | 2007-12-27 | Electronics And Telecommunications Research Institute | Procédé pour téléavertir un terminal d'un état connecté rrc dans un système lte |
| CN102801510B (zh) | 2006-07-06 | 2013-08-07 | 广东新岸线计算机系统芯片有限公司 | 一种用于选择增强型上行链路传输格式组合的方法及装置 |
| DK2052558T3 (en) * | 2006-08-18 | 2014-12-08 | Ericsson Telefon Ab L M | REDUCTION OF STATE TRANSIT TIME |
| AU2007288318A1 (en) | 2006-08-21 | 2008-02-28 | Interdigital Technology Corporation | Resource allocation, scheduling, and signaling for grouping real time services |
| WO2008024064A2 (fr) * | 2006-08-25 | 2008-02-28 | Telefonaktiebolaget Lm Ericsson (Publ.) | Procédé, noeud de réseau et équipement utilisateur dans un système de télécommunication |
| EP2074857A1 (fr) * | 2006-09-15 | 2009-07-01 | Interdigital Technology Corporation | Procédé et dispositif de mise à jour dynamique de paramètres d'accès aléatoire |
| KR101172520B1 (ko) | 2006-10-16 | 2012-08-10 | 노키아 코포레이션 | 무선 액세스 네트워크에서의 프로토콜 데이터 유닛 통신 |
| US8014359B2 (en) * | 2006-10-27 | 2011-09-06 | Interdigital Technology Corporation | Method and apparatus for assigning radio resources and controlling transmission parameters on a random access channel |
| KR100983278B1 (ko) | 2006-11-01 | 2010-09-24 | 엘지전자 주식회사 | 무선 통신 시스템에서의 하향링크 데이터 전송 제어 방법, 데이터 수신 방법, 측정 결과 보고 방법 및 그 단말 |
| US8923236B2 (en) | 2006-11-01 | 2014-12-30 | Lg Electronics Inc. | Method of transmitting and receiving paging messages in a wireless communication system |
| WO2008054159A2 (fr) | 2006-11-01 | 2008-05-08 | Lg Electronics Inc. | Procédé d'émission et de réception de messages de radiomessagerie dans un système de communication hertzienne |
| EP1942584A1 (fr) * | 2007-01-04 | 2008-07-09 | Nokia Siemens Networks Gmbh & Co. Kg | Lien amélioré et adaptation de budget de puissance pour un état CELL_FACH amélioré |
| KR101364802B1 (ko) | 2007-01-08 | 2014-02-26 | 엘지전자 주식회사 | 무선 통신의 공통채널 수신 방법 및 그 단말 |
| US8059606B2 (en) | 2007-01-09 | 2011-11-15 | Lg Electronics Inc. | Method for reporting channel quality through uplink common channel in wireless communication |
| EP2119082A4 (fr) | 2007-01-09 | 2013-07-31 | Lg Electronics Inc | Précédé de commande d'une retransmission de données dans un système de communication sans fil |
| WO2008084986A2 (fr) | 2007-01-09 | 2008-07-17 | Lg Electronics Inc. | Procédé de transmission et de réception d'informations de planification dans un système de communication sans fil |
| CN101578783A (zh) | 2007-01-10 | 2009-11-11 | Lg电子株式会社 | 用于在移动通信中构造数据格式的方法及其终端 |
| MX2009007466A (es) | 2007-01-10 | 2009-07-22 | Lg Electronics Inc | Metodo para construir formato de datos en comunicacion movil y su terminal. |
| KR101211758B1 (ko) | 2007-01-10 | 2012-12-12 | 엘지전자 주식회사 | 무선 통신 시스템의 블록 데이터 생성 방법 |
| CN101601208B (zh) | 2007-01-31 | 2014-04-16 | Lg电子株式会社 | 用于发送和接收系统信息的方法 |
| KR101461938B1 (ko) | 2007-01-31 | 2014-11-14 | 엘지전자 주식회사 | 시스템 정보의 전송 및 수신 방법 |
| EP2116087B1 (fr) | 2007-02-02 | 2013-01-02 | Interdigital Technology Corporation | Resélection/actualisation de cellule à l'état amélioré cell_fach |
| KR101426958B1 (ko) | 2007-02-06 | 2014-08-06 | 엘지전자 주식회사 | 무선통신 시스템에서 데이터 송수신 방법 |
| TWI368419B (en) * | 2007-02-12 | 2012-07-11 | Innovative Sonic Ltd | Method for improving high-speed downlink operation in cell_fach state for a wireless communications system and related apparatus |
| CN101262279B (zh) * | 2007-03-07 | 2012-09-26 | 中兴通讯股份有限公司 | 一种时分同步码分多址接入系统的上行调度接入控制方法 |
| US8724634B2 (en) * | 2007-03-15 | 2014-05-13 | Interdigital Technology Corporation | Methods and apparatus for reordering data in an evolved high speed packet access system |
| WO2008115023A1 (fr) * | 2007-03-21 | 2008-09-25 | Electronics And Telecommunications Research Institute | Transmission et réception de données mbms dans un système de communication mobile par paquets |
| JP4801696B2 (ja) * | 2007-05-06 | 2011-10-26 | イノヴァティヴ ソニック リミテッド | 無線通信システムにおいてページング情報を送信する方法及び装置 |
| KR101454482B1 (ko) | 2007-05-17 | 2014-10-27 | 삼성전자주식회사 | 무선 통신 시스템에서 공통 제어 정보 송수신 시스템 및방법 |
| ATE510441T1 (de) * | 2007-08-09 | 2011-06-15 | Nokia Siemens Networks Oy | Mobiles kommunikationsendgerät, kommunikationsstation, kommunikationsnetzwerk und kommunikationsverfahren |
| WO2009055577A1 (fr) * | 2007-10-25 | 2009-04-30 | Interdigital Patent Holdings, Inc. | Sélection de paramètres de transmission pour un accès basé sur une contention dans des systèmes sans fil |
| EP2061192B1 (fr) | 2007-11-13 | 2012-04-11 | Research In Motion Limited | Procédé et appareil pour la transition d'état/de mode |
| KR101623680B1 (ko) * | 2008-02-06 | 2016-05-23 | 아이디티피 홀딩스, 인크. | 강화된 업링크 fach를 위한 네트워크 제어 처리율 |
| US7885212B2 (en) * | 2008-02-06 | 2011-02-08 | Telefonaktiebolaget L M Ericsson (Publ) | Network controlled throughput for enhanced uplink FACH |
| ES2618152T3 (es) * | 2008-02-11 | 2017-06-21 | Nokia Corporation | Respuesta de preámbulo RACH con asignación de enlace ascendente flexible |
| KR101050258B1 (ko) | 2008-03-20 | 2011-07-19 | 이노베이티브 소닉 리미티드 | Rrc 연결 프로시저를 향상시키기 위한 방법 및 장치 |
| US8078184B2 (en) * | 2008-05-08 | 2011-12-13 | Research In Motion Limited | Method and apparatus having improved handling of state transitions |
| US9225481B2 (en) * | 2008-08-11 | 2015-12-29 | Qualcomm Incorporated | Downlink grants in a multicarrier wireless communication system |
| US8670376B2 (en) | 2008-08-12 | 2014-03-11 | Qualcomm Incorporated | Multi-carrier grant design |
| KR101549022B1 (ko) * | 2008-11-03 | 2015-09-01 | 엘지전자 주식회사 | 상향링크 및 하향링크 멀티 캐리어를 지원하는 무선통신 시스템에 있어서, 사용자 기기의 기지국에의 임의 접속방법 |
| CN102210190B (zh) | 2008-11-10 | 2015-05-06 | 黑莓有限公司 | 针对承载类型选择是否发送请求更节约能量的状态或模式的指示信息的方法和装置 |
| US10378106B2 (en) | 2008-11-14 | 2019-08-13 | Asm Ip Holding B.V. | Method of forming insulation film by modified PEALD |
| KR101129315B1 (ko) * | 2008-12-18 | 2012-03-26 | 한국전자통신연구원 | 라우팅 확장성과 이동성을 지원하는 터널 포인트의 동작 방법 |
| US8665570B2 (en) | 2009-03-13 | 2014-03-04 | Qualcomm Incorporated | Diode having a pocket implant blocked and circuits and methods employing same |
| US8531805B2 (en) * | 2009-03-13 | 2013-09-10 | Qualcomm Incorporated | Gated diode having at least one lightly-doped drain (LDD) implant blocked and circuits and methods employing same |
| US9394608B2 (en) | 2009-04-06 | 2016-07-19 | Asm America, Inc. | Semiconductor processing reactor and components thereof |
| EP2439993B1 (fr) | 2009-06-05 | 2016-03-16 | Fujitsu Limited | Dispositif de station de base, dispositif de terminal et système de communication |
| WO2010143846A2 (fr) * | 2009-06-07 | 2010-12-16 | 엘지전자 주식회사 | Procédé permettant à un équipement utilisateur d'effectuer un accès aléatoire dans un système de communication mobile avec regroupement de porteuses |
| US9497616B2 (en) | 2009-06-18 | 2016-11-15 | Telefonaktiebolaget Lm Ericsson (Publ) | Methods and apparatus in a telecommunications network |
| CN101932101B (zh) * | 2009-06-19 | 2015-03-11 | 华为技术有限公司 | 传输时间间隔的调整方法和网络设备 |
| US8718659B2 (en) * | 2009-06-19 | 2014-05-06 | Htc Corporation | Method of random access channel optimization and related communication device |
| US8452297B2 (en) * | 2009-06-29 | 2013-05-28 | Htc Corporation | Method of random access channel optimization and related communication device |
| US20110002298A1 (en) * | 2009-07-06 | 2011-01-06 | Muthaiah Venkatachalam | Reducing Overhead in Wireless Communications |
| US8802201B2 (en) | 2009-08-14 | 2014-08-12 | Asm America, Inc. | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
| US8923218B2 (en) * | 2009-11-02 | 2014-12-30 | Qualcomm Incorporated | Apparatus and method for random access signaling in a wireless communication system |
| CN102754517B (zh) | 2009-11-23 | 2015-12-16 | 黑莓有限公司 | 用于状态/模式转换的方法和设备 |
| SG191601A1 (en) | 2009-11-23 | 2013-07-31 | Research In Motion Ltd | Method and apparatus for state/mode transitioning |
| HUE049498T2 (hu) | 2009-11-23 | 2020-09-28 | Blackberry Ltd | Jelzéskapcsolat-bontás jelzõ, SCRI, üzenet átvitelen alapuló állapot vagy üzemmód átváltás kiváltása |
| US8983532B2 (en) | 2009-12-30 | 2015-03-17 | Blackberry Limited | Method and system for a wireless communication device to adopt varied functionalities based on different communication systems by specific protocol messages |
| US9178648B2 (en) * | 2010-01-06 | 2015-11-03 | Alcatel Lucent | Method to improve voice over IP capacity for user equipment employing variable rate vocoders |
| CN102149200A (zh) * | 2010-02-04 | 2011-08-10 | 电信科学技术研究院 | 一种配置prach信息的方法和基站 |
| US9496972B2 (en) * | 2010-03-08 | 2016-11-15 | Htc Corporation | Communication devices and methods thereof |
| US8666398B2 (en) | 2010-04-13 | 2014-03-04 | Qualcomm Incorporated | Random access procedure enhancements for heterogeneous networks |
| US8099091B2 (en) * | 2010-05-13 | 2012-01-17 | Apple Inc. | Method to control configuration change times in a wireless device |
| US8891356B2 (en) * | 2010-06-28 | 2014-11-18 | Qualcomm Incorporated | System and method for multi-point HSDPA communication utilizing a multi-link RLC sublayer |
| US8989140B2 (en) | 2010-06-28 | 2015-03-24 | Qualcomm Incorporated | System and method for mobility in a multi-point HSDPA communication network |
| KR20120041932A (ko) * | 2010-10-22 | 2012-05-03 | 한국전자통신연구원 | 랜덤 액세스 자원 할당을 위한 기지국의 통신 방법 및 랜덤 액세스 자원 할당을 이용한 단말의 통신 방법 및 그 장치 |
| US8989004B2 (en) | 2010-11-08 | 2015-03-24 | Qualcomm Incorporated | System and method for multi-point HSDPA communication utilizing a multi-link PDCP sublayer |
| CN102740468A (zh) * | 2011-04-02 | 2012-10-17 | 华为技术有限公司 | 分配信道资源的方法、基站设备、终端设备和通信系统 |
| US9312155B2 (en) | 2011-06-06 | 2016-04-12 | Asm Japan K.K. | High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules |
| US9793148B2 (en) | 2011-06-22 | 2017-10-17 | Asm Japan K.K. | Method for positioning wafers in multiple wafer transport |
| US10364496B2 (en) | 2011-06-27 | 2019-07-30 | Asm Ip Holding B.V. | Dual section module having shared and unshared mass flow controllers |
| US10854498B2 (en) | 2011-07-15 | 2020-12-01 | Asm Ip Holding B.V. | Wafer-supporting device and method for producing same |
| US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
| KR101883425B1 (ko) | 2011-08-01 | 2018-07-31 | 삼성전자주식회사 | 휴대 단말기를 이용하는 위폐 감별법 |
| US9125098B2 (en) | 2011-08-03 | 2015-09-01 | Qualcomm Incorporated | Method and apparatus for flow congestion control in multiflow networks |
| US8737211B2 (en) | 2011-08-03 | 2014-05-27 | Qualcomm Incorporated | Methods and apparatuses for network configuration of user equipment communication modes in multiflow systems |
| CA2844901C (fr) * | 2011-08-11 | 2017-01-17 | Interdigital Patent Holdings, Inc. | Repli sur prach r99 |
| US9017481B1 (en) | 2011-10-28 | 2015-04-28 | Asm America, Inc. | Process feed management for semiconductor substrate processing |
| CA2823789C (fr) | 2011-11-11 | 2016-08-16 | Research In Motion Limited | Procede et appareil pour executer une transition d'etat d'un equipement d'utilisateur |
| US9585156B2 (en) | 2011-11-14 | 2017-02-28 | Qualcomm Incorporated | Supporting different LTE-TDD configurations in neighboring regions and/or adjacent carriers |
| US20130224964A1 (en) * | 2012-02-28 | 2013-08-29 | Asm Ip Holding B.V. | Method for Forming Dielectric Film Containing Si-C bonds by Atomic Layer Deposition Using Precursor Containing Si-C-Si bond |
| US8946830B2 (en) | 2012-04-04 | 2015-02-03 | Asm Ip Holdings B.V. | Metal oxide protective layer for a semiconductor device |
| GB201208389D0 (en) | 2012-05-10 | 2012-06-27 | Samsung Electronics Co Ltd | Integrated circuit, communication unit, wireless communication system and methods therefor |
| US8938551B2 (en) * | 2012-04-10 | 2015-01-20 | Intel Mobile Communications GmbH | Data processing device |
| DE102013103582B4 (de) | 2012-04-10 | 2019-12-05 | Intel Deutschland Gmbh | Datenverarbeitungsvorrichtung |
| US9930678B2 (en) * | 2012-07-19 | 2018-03-27 | Qualcomm Incorporated | Multiplexing UEs with different TDD configurations and some techniques to mitigate UE-to-UE and base station-to-base station interference |
| US9294958B2 (en) * | 2012-07-20 | 2016-03-22 | Qualcomm Incorporated | Method and apparatus for dynamically configuring a cell update message |
| US9558931B2 (en) | 2012-07-27 | 2017-01-31 | Asm Ip Holding B.V. | System and method for gas-phase sulfur passivation of a semiconductor surface |
| WO2014025303A2 (fr) * | 2012-08-07 | 2014-02-13 | Telefonaktiebolaget L M Ericsson (Publ) | Procédés et dispositifs de sélection d'un canal d'accès aléatoire |
| US9659799B2 (en) | 2012-08-28 | 2017-05-23 | Asm Ip Holding B.V. | Systems and methods for dynamic semiconductor process scheduling |
| US9021985B2 (en) | 2012-09-12 | 2015-05-05 | Asm Ip Holdings B.V. | Process gas management for an inductively-coupled plasma deposition reactor |
| US9324811B2 (en) | 2012-09-26 | 2016-04-26 | Asm Ip Holding B.V. | Structures and devices including a tensile-stressed silicon arsenic layer and methods of forming same |
| US10714315B2 (en) | 2012-10-12 | 2020-07-14 | Asm Ip Holdings B.V. | Semiconductor reaction chamber showerhead |
| US9640416B2 (en) | 2012-12-26 | 2017-05-02 | Asm Ip Holding B.V. | Single-and dual-chamber module-attachable wafer-handling chamber |
| US20160376700A1 (en) | 2013-02-01 | 2016-12-29 | Asm Ip Holding B.V. | System for treatment of deposition reactor |
| US9589770B2 (en) | 2013-03-08 | 2017-03-07 | Asm Ip Holding B.V. | Method and systems for in-situ formation of intermediate reactive species |
| US9484191B2 (en) | 2013-03-08 | 2016-11-01 | Asm Ip Holding B.V. | Pulsed remote plasma method and system |
| US8993054B2 (en) | 2013-07-12 | 2015-03-31 | Asm Ip Holding B.V. | Method and system to reduce outgassing in a reaction chamber |
| US9018111B2 (en) | 2013-07-22 | 2015-04-28 | Asm Ip Holding B.V. | Semiconductor reaction chamber with plasma capabilities |
| US9793115B2 (en) | 2013-08-14 | 2017-10-17 | Asm Ip Holding B.V. | Structures and devices including germanium-tin films and methods of forming same |
| US9240412B2 (en) | 2013-09-27 | 2016-01-19 | Asm Ip Holding B.V. | Semiconductor structure and device and methods of forming same using selective epitaxial process |
| US9556516B2 (en) | 2013-10-09 | 2017-01-31 | ASM IP Holding B.V | Method for forming Ti-containing film by PEALD using TDMAT or TDEAT |
| US10179947B2 (en) | 2013-11-26 | 2019-01-15 | Asm Ip Holding B.V. | Method for forming conformal nitrided, oxidized, or carbonized dielectric film by atomic layer deposition |
| US10200137B2 (en) * | 2013-12-27 | 2019-02-05 | Huawei Technologies Co., Ltd. | System and method for adaptive TTI coexistence with LTE |
| US11012939B2 (en) | 2014-01-08 | 2021-05-18 | Huawei Technologies Co., Ltd. | System and method for always on connections in wireless communications system |
| US10683571B2 (en) | 2014-02-25 | 2020-06-16 | Asm Ip Holding B.V. | Gas supply manifold and method of supplying gases to chamber using same |
| US10167557B2 (en) | 2014-03-18 | 2019-01-01 | Asm Ip Holding B.V. | Gas distribution system, reactor including the system, and methods of using the same |
| US9447498B2 (en) | 2014-03-18 | 2016-09-20 | Asm Ip Holding B.V. | Method for performing uniform processing in gas system-sharing multiple reaction chambers |
| US11015245B2 (en) | 2014-03-19 | 2021-05-25 | Asm Ip Holding B.V. | Gas-phase reactor and system having exhaust plenum and components thereof |
| US9404587B2 (en) | 2014-04-24 | 2016-08-02 | ASM IP Holding B.V | Lockout tagout for semiconductor vacuum valve |
| US10858737B2 (en) | 2014-07-28 | 2020-12-08 | Asm Ip Holding B.V. | Showerhead assembly and components thereof |
| US9543180B2 (en) | 2014-08-01 | 2017-01-10 | Asm Ip Holding B.V. | Apparatus and method for transporting wafers between wafer carrier and process tool under vacuum |
| US9890456B2 (en) | 2014-08-21 | 2018-02-13 | Asm Ip Holding B.V. | Method and system for in situ formation of gas-phase compounds |
| US9657845B2 (en) | 2014-10-07 | 2017-05-23 | Asm Ip Holding B.V. | Variable conductance gas distribution apparatus and method |
| US10941490B2 (en) | 2014-10-07 | 2021-03-09 | Asm Ip Holding B.V. | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
| KR102300403B1 (ko) | 2014-11-19 | 2021-09-09 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 |
| KR102263121B1 (ko) | 2014-12-22 | 2021-06-09 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자 및 그 제조 방법 |
| US9478415B2 (en) | 2015-02-13 | 2016-10-25 | Asm Ip Holding B.V. | Method for forming film having low resistance and shallow junction depth |
| US10529542B2 (en) | 2015-03-11 | 2020-01-07 | Asm Ip Holdings B.V. | Cross-flow reactor and method |
| US10276355B2 (en) | 2015-03-12 | 2019-04-30 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
| US10458018B2 (en) | 2015-06-26 | 2019-10-29 | Asm Ip Holding B.V. | Structures including metal carbide material, devices including the structures, and methods of forming same |
| CN115474245B (zh) * | 2015-06-30 | 2025-06-13 | 华为技术有限公司 | 一种数据传输方法、无线网络节点和通信系统 |
| US10148326B2 (en) * | 2015-07-06 | 2018-12-04 | Qualcomm Incorporated | Methods and apparatus for extended receiver processing time |
| US10600673B2 (en) | 2015-07-07 | 2020-03-24 | Asm Ip Holding B.V. | Magnetic susceptor to baseplate seal |
| US9899291B2 (en) | 2015-07-13 | 2018-02-20 | Asm Ip Holding B.V. | Method for protecting layer by forming hydrocarbon-based extremely thin film |
| US10043661B2 (en) | 2015-07-13 | 2018-08-07 | Asm Ip Holding B.V. | Method for protecting layer by forming hydrocarbon-based extremely thin film |
| US10083836B2 (en) | 2015-07-24 | 2018-09-25 | Asm Ip Holding B.V. | Formation of boron-doped titanium metal films with high work function |
| US10087525B2 (en) | 2015-08-04 | 2018-10-02 | Asm Ip Holding B.V. | Variable gap hard stop design |
| US9647114B2 (en) | 2015-08-14 | 2017-05-09 | Asm Ip Holding B.V. | Methods of forming highly p-type doped germanium tin films and structures and devices including the films |
| US9711345B2 (en) | 2015-08-25 | 2017-07-18 | Asm Ip Holding B.V. | Method for forming aluminum nitride-based film by PEALD |
| CN106559890B (zh) * | 2015-09-29 | 2021-08-31 | 华为技术有限公司 | 传输控制信令的方法和装置 |
| US9960072B2 (en) | 2015-09-29 | 2018-05-01 | Asm Ip Holding B.V. | Variable adjustment for precise matching of multiple chamber cavity housings |
| US9909214B2 (en) | 2015-10-15 | 2018-03-06 | Asm Ip Holding B.V. | Method for depositing dielectric film in trenches by PEALD |
| US10211308B2 (en) | 2015-10-21 | 2019-02-19 | Asm Ip Holding B.V. | NbMC layers |
| US10322384B2 (en) | 2015-11-09 | 2019-06-18 | Asm Ip Holding B.V. | Counter flow mixer for process chamber |
| US9455138B1 (en) | 2015-11-10 | 2016-09-27 | Asm Ip Holding B.V. | Method for forming dielectric film in trenches by PEALD using H-containing gas |
| US9905420B2 (en) | 2015-12-01 | 2018-02-27 | Asm Ip Holding B.V. | Methods of forming silicon germanium tin films and structures and devices including the films |
| US9607837B1 (en) | 2015-12-21 | 2017-03-28 | Asm Ip Holding B.V. | Method for forming silicon oxide cap layer for solid state diffusion process |
| US9627221B1 (en) | 2015-12-28 | 2017-04-18 | Asm Ip Holding B.V. | Continuous process incorporating atomic layer etching |
| US9735024B2 (en) | 2015-12-28 | 2017-08-15 | Asm Ip Holding B.V. | Method of atomic layer etching using functional group-containing fluorocarbon |
| US11139308B2 (en) | 2015-12-29 | 2021-10-05 | Asm Ip Holding B.V. | Atomic layer deposition of III-V compounds to form V-NAND devices |
| US9754779B1 (en) | 2016-02-19 | 2017-09-05 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
| US10468251B2 (en) | 2016-02-19 | 2019-11-05 | Asm Ip Holding B.V. | Method for forming spacers using silicon nitride film for spacer-defined multiple patterning |
| US10529554B2 (en) | 2016-02-19 | 2020-01-07 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
| US10501866B2 (en) | 2016-03-09 | 2019-12-10 | Asm Ip Holding B.V. | Gas distribution apparatus for improved film uniformity in an epitaxial system |
| US10343920B2 (en) | 2016-03-18 | 2019-07-09 | Asm Ip Holding B.V. | Aligned carbon nanotubes |
| US9892913B2 (en) | 2016-03-24 | 2018-02-13 | Asm Ip Holding B.V. | Radial and thickness control via biased multi-port injection settings |
| US10865475B2 (en) | 2016-04-21 | 2020-12-15 | Asm Ip Holding B.V. | Deposition of metal borides and silicides |
| US10087522B2 (en) | 2016-04-21 | 2018-10-02 | Asm Ip Holding B.V. | Deposition of metal borides |
| US10190213B2 (en) | 2016-04-21 | 2019-01-29 | Asm Ip Holding B.V. | Deposition of metal borides |
| US10032628B2 (en) | 2016-05-02 | 2018-07-24 | Asm Ip Holding B.V. | Source/drain performance through conformal solid state doping |
| US10367080B2 (en) | 2016-05-02 | 2019-07-30 | Asm Ip Holding B.V. | Method of forming a germanium oxynitride film |
| KR102592471B1 (ko) | 2016-05-17 | 2023-10-20 | 에이에스엠 아이피 홀딩 비.브이. | 금속 배선 형성 방법 및 이를 이용한 반도체 장치의 제조 방법 |
| US11453943B2 (en) | 2016-05-25 | 2022-09-27 | Asm Ip Holding B.V. | Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
| US10388509B2 (en) | 2016-06-28 | 2019-08-20 | Asm Ip Holding B.V. | Formation of epitaxial layers via dislocation filtering |
| US9859151B1 (en) | 2016-07-08 | 2018-01-02 | Asm Ip Holding B.V. | Selective film deposition method to form air gaps |
| US10612137B2 (en) | 2016-07-08 | 2020-04-07 | Asm Ip Holdings B.V. | Organic reactants for atomic layer deposition |
| US9793135B1 (en) | 2016-07-14 | 2017-10-17 | ASM IP Holding B.V | Method of cyclic dry etching using etchant film |
| US10714385B2 (en) | 2016-07-19 | 2020-07-14 | Asm Ip Holding B.V. | Selective deposition of tungsten |
| US10381226B2 (en) | 2016-07-27 | 2019-08-13 | Asm Ip Holding B.V. | Method of processing substrate |
| US10177025B2 (en) | 2016-07-28 | 2019-01-08 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| US9812320B1 (en) | 2016-07-28 | 2017-11-07 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| US9887082B1 (en) | 2016-07-28 | 2018-02-06 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| KR102532607B1 (ko) | 2016-07-28 | 2023-05-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 가공 장치 및 그 동작 방법 |
| US10395919B2 (en) | 2016-07-28 | 2019-08-27 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| US10090316B2 (en) | 2016-09-01 | 2018-10-02 | Asm Ip Holding B.V. | 3D stacked multilayer semiconductor memory using doped select transistor channel |
| CN113225784B (zh) * | 2016-09-30 | 2022-08-09 | 华为技术有限公司 | 消息的识别方法和装置 |
| US10410943B2 (en) | 2016-10-13 | 2019-09-10 | Asm Ip Holding B.V. | Method for passivating a surface of a semiconductor and related systems |
| US10643826B2 (en) | 2016-10-26 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for thermally calibrating reaction chambers |
| US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
| US10229833B2 (en) | 2016-11-01 | 2019-03-12 | Asm Ip Holding B.V. | Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
| US10714350B2 (en) | 2016-11-01 | 2020-07-14 | ASM IP Holdings, B.V. | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
| US10643904B2 (en) | 2016-11-01 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for forming a semiconductor device and related semiconductor device structures |
| US10435790B2 (en) | 2016-11-01 | 2019-10-08 | Asm Ip Holding B.V. | Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap |
| US10134757B2 (en) | 2016-11-07 | 2018-11-20 | Asm Ip Holding B.V. | Method of processing a substrate and a device manufactured by using the method |
| KR102546317B1 (ko) | 2016-11-15 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기체 공급 유닛 및 이를 포함하는 기판 처리 장치 |
| US10340135B2 (en) | 2016-11-28 | 2019-07-02 | Asm Ip Holding B.V. | Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride |
| KR102762543B1 (ko) | 2016-12-14 | 2025-02-05 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| US9916980B1 (en) | 2016-12-15 | 2018-03-13 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
| US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
| US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| KR102700194B1 (ko) | 2016-12-19 | 2024-08-28 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| US10269558B2 (en) | 2016-12-22 | 2019-04-23 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
| US10867788B2 (en) | 2016-12-28 | 2020-12-15 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
| US11390950B2 (en) | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
| US10655221B2 (en) | 2017-02-09 | 2020-05-19 | Asm Ip Holding B.V. | Method for depositing oxide film by thermal ALD and PEALD |
| US10468261B2 (en) | 2017-02-15 | 2019-11-05 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
| US10529563B2 (en) | 2017-03-29 | 2020-01-07 | Asm Ip Holdings B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
| US10283353B2 (en) | 2017-03-29 | 2019-05-07 | Asm Ip Holding B.V. | Method of reforming insulating film deposited on substrate with recess pattern |
| US10103040B1 (en) | 2017-03-31 | 2018-10-16 | Asm Ip Holding B.V. | Apparatus and method for manufacturing a semiconductor device |
| USD830981S1 (en) | 2017-04-07 | 2018-10-16 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate processing apparatus |
| KR102457289B1 (ko) | 2017-04-25 | 2022-10-21 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 및 반도체 장치의 제조 방법 |
| US10892156B2 (en) | 2017-05-08 | 2021-01-12 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film on a substrate and related semiconductor device structures |
| US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
| US10446393B2 (en) | 2017-05-08 | 2019-10-15 | Asm Ip Holding B.V. | Methods for forming silicon-containing epitaxial layers and related semiconductor device structures |
| US10504742B2 (en) | 2017-05-31 | 2019-12-10 | Asm Ip Holding B.V. | Method of atomic layer etching using hydrogen plasma |
| US10886123B2 (en) | 2017-06-02 | 2021-01-05 | Asm Ip Holding B.V. | Methods for forming low temperature semiconductor layers and related semiconductor device structures |
| US12040200B2 (en) | 2017-06-20 | 2024-07-16 | Asm Ip Holding B.V. | Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus |
| US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
| US10685834B2 (en) | 2017-07-05 | 2020-06-16 | Asm Ip Holdings B.V. | Methods for forming a silicon germanium tin layer and related semiconductor device structures |
| KR20190009245A (ko) | 2017-07-18 | 2019-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자 구조물 형성 방법 및 관련된 반도체 소자 구조물 |
| US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
| US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
| US10541333B2 (en) | 2017-07-19 | 2020-01-21 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
| US10605530B2 (en) | 2017-07-26 | 2020-03-31 | Asm Ip Holding B.V. | Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace |
| US10312055B2 (en) | 2017-07-26 | 2019-06-04 | Asm Ip Holding B.V. | Method of depositing film by PEALD using negative bias |
| US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
| TWI815813B (zh) | 2017-08-04 | 2023-09-21 | 荷蘭商Asm智慧財產控股公司 | 用於分配反應腔內氣體的噴頭總成 |
| US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
| US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
| US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| US10249524B2 (en) | 2017-08-09 | 2019-04-02 | Asm Ip Holding B.V. | Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
| US10236177B1 (en) | 2017-08-22 | 2019-03-19 | ASM IP Holding B.V.. | Methods for depositing a doped germanium tin semiconductor and related semiconductor device structures |
| USD900036S1 (en) | 2017-08-24 | 2020-10-27 | Asm Ip Holding B.V. | Heater electrical connector and adapter |
| US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
| KR102491945B1 (ko) | 2017-08-30 | 2023-01-26 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
| US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
| KR102401446B1 (ko) | 2017-08-31 | 2022-05-24 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| US10607895B2 (en) | 2017-09-18 | 2020-03-31 | Asm Ip Holdings B.V. | Method for forming a semiconductor device structure comprising a gate fill metal |
| KR102630301B1 (ko) | 2017-09-21 | 2024-01-29 | 에이에스엠 아이피 홀딩 비.브이. | 침투성 재료의 순차 침투 합성 방법 처리 및 이를 이용하여 형성된 구조물 및 장치 |
| US10844484B2 (en) | 2017-09-22 | 2020-11-24 | Asm Ip Holding B.V. | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
| US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
| US10403504B2 (en) | 2017-10-05 | 2019-09-03 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
| US10319588B2 (en) | 2017-10-10 | 2019-06-11 | Asm Ip Holding B.V. | Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
| US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
| US10910262B2 (en) | 2017-11-16 | 2021-02-02 | Asm Ip Holding B.V. | Method of selectively depositing a capping layer structure on a semiconductor device structure |
| KR102443047B1 (ko) | 2017-11-16 | 2022-09-14 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 방법 및 그에 의해 제조된 장치 |
| US11022879B2 (en) | 2017-11-24 | 2021-06-01 | Asm Ip Holding B.V. | Method of forming an enhanced unexposed photoresist layer |
| US11639811B2 (en) | 2017-11-27 | 2023-05-02 | Asm Ip Holding B.V. | Apparatus including a clean mini environment |
| WO2019103613A1 (fr) | 2017-11-27 | 2019-05-31 | Asm Ip Holding B.V. | Dispositif de stockage pour stocker des cassettes de tranches destiné à être utilisé avec un four discontinu |
| US10290508B1 (en) | 2017-12-05 | 2019-05-14 | Asm Ip Holding B.V. | Method for forming vertical spacers for spacer-defined patterning |
| US10872771B2 (en) | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
| TWI852426B (zh) | 2018-01-19 | 2024-08-11 | 荷蘭商Asm Ip私人控股有限公司 | 沈積方法 |
| CN111630203A (zh) | 2018-01-19 | 2020-09-04 | Asm Ip私人控股有限公司 | 通过等离子体辅助沉积来沉积间隙填充层的方法 |
| USD903477S1 (en) | 2018-01-24 | 2020-12-01 | Asm Ip Holdings B.V. | Metal clamp |
| US11018047B2 (en) | 2018-01-25 | 2021-05-25 | Asm Ip Holding B.V. | Hybrid lift pin |
| US10535516B2 (en) | 2018-02-01 | 2020-01-14 | Asm Ip Holdings B.V. | Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures |
| USD880437S1 (en) | 2018-02-01 | 2020-04-07 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
| US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
| US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| EP3737779A1 (fr) | 2018-02-14 | 2020-11-18 | ASM IP Holding B.V. | Procédé de dépôt d'un film contenant du ruthénium sur un substrat par un processus de dépôt cyclique |
| US10731249B2 (en) | 2018-02-15 | 2020-08-04 | Asm Ip Holding B.V. | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
| KR102636427B1 (ko) | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 장치 |
| US10658181B2 (en) | 2018-02-20 | 2020-05-19 | Asm Ip Holding B.V. | Method of spacer-defined direct patterning in semiconductor fabrication |
| US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
| US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
| US11629406B2 (en) | 2018-03-09 | 2023-04-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
| US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
| KR102646467B1 (ko) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 전극을 형성하는 방법 및 전극을 포함하는 반도체 소자 구조 |
| US10510536B2 (en) | 2018-03-29 | 2019-12-17 | Asm Ip Holding B.V. | Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber |
| US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
| US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| KR102501472B1 (ko) | 2018-03-30 | 2023-02-20 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
| KR102600229B1 (ko) | 2018-04-09 | 2023-11-10 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 장치, 이를 포함하는 기판 처리 장치 및 기판 처리 방법 |
| US12025484B2 (en) | 2018-05-08 | 2024-07-02 | Asm Ip Holding B.V. | Thin film forming method |
| TWI811348B (zh) | 2018-05-08 | 2023-08-11 | 荷蘭商Asm 智慧財產控股公司 | 藉由循環沉積製程於基板上沉積氧化物膜之方法及相關裝置結構 |
| US12272527B2 (en) | 2018-05-09 | 2025-04-08 | Asm Ip Holding B.V. | Apparatus for use with hydrogen radicals and method of using same |
| TWI816783B (zh) | 2018-05-11 | 2023-10-01 | 荷蘭商Asm 智慧財產控股公司 | 用於基板上形成摻雜金屬碳化物薄膜之方法及相關半導體元件結構 |
| KR102596988B1 (ko) | 2018-05-28 | 2023-10-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 그에 의해 제조된 장치 |
| TWI840362B (zh) | 2018-06-04 | 2024-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 水氣降低的晶圓處置腔室 |
| US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
| US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
| US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
| KR102568797B1 (ko) | 2018-06-21 | 2023-08-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 시스템 |
| CN120591748A (zh) | 2018-06-27 | 2025-09-05 | Asm Ip私人控股有限公司 | 用于形成含金属的材料的循环沉积方法及膜和结构 |
| CN112292478A (zh) | 2018-06-27 | 2021-01-29 | Asm Ip私人控股有限公司 | 用于形成含金属的材料的循环沉积方法及包含含金属的材料的膜和结构 |
| US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
| KR102686758B1 (ko) | 2018-06-29 | 2024-07-18 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 및 반도체 장치의 제조 방법 |
| US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US10767789B2 (en) | 2018-07-16 | 2020-09-08 | Asm Ip Holding B.V. | Diaphragm valves, valve components, and methods for forming valve components |
| US10483099B1 (en) | 2018-07-26 | 2019-11-19 | Asm Ip Holding B.V. | Method for forming thermally stable organosilicon polymer film |
| US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
| US10883175B2 (en) | 2018-08-09 | 2021-01-05 | Asm Ip Holding B.V. | Vertical furnace for processing substrates and a liner for use therein |
| US10829852B2 (en) | 2018-08-16 | 2020-11-10 | Asm Ip Holding B.V. | Gas distribution device for a wafer processing apparatus |
| US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
| US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| KR102707956B1 (ko) | 2018-09-11 | 2024-09-19 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 |
| US11049751B2 (en) | 2018-09-14 | 2021-06-29 | Asm Ip Holding B.V. | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
| WO2020058920A1 (fr) * | 2018-09-21 | 2020-03-26 | Nokia Technologies Oy | Traitement de signal d'activation amélioré |
| CN110970344B (zh) | 2018-10-01 | 2024-10-25 | Asmip控股有限公司 | 衬底保持设备、包含所述设备的系统及其使用方法 |
| US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| KR102592699B1 (ko) | 2018-10-08 | 2023-10-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 박막 증착 장치와 기판 처리 장치 |
| US10847365B2 (en) | 2018-10-11 | 2020-11-24 | Asm Ip Holding B.V. | Method of forming conformal silicon carbide film by cyclic CVD |
| US10811256B2 (en) | 2018-10-16 | 2020-10-20 | Asm Ip Holding B.V. | Method for etching a carbon-containing feature |
| KR102605121B1 (ko) | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
| KR102546322B1 (ko) | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
| USD948463S1 (en) | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
| US10381219B1 (en) | 2018-10-25 | 2019-08-13 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film |
| US12378665B2 (en) | 2018-10-26 | 2025-08-05 | Asm Ip Holding B.V. | High temperature coatings for a preclean and etch apparatus and related methods |
| US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| KR102748291B1 (ko) | 2018-11-02 | 2024-12-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 기판 처리 장치 |
| US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
| US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
| US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
| US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| US10559458B1 (en) | 2018-11-26 | 2020-02-11 | Asm Ip Holding B.V. | Method of forming oxynitride film |
| US12040199B2 (en) | 2018-11-28 | 2024-07-16 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
| KR102636428B1 (ko) | 2018-12-04 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치를 세정하는 방법 |
| US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
| TWI874340B (zh) | 2018-12-14 | 2025-03-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成裝置結構之方法、其所形成之結構及施行其之系統 |
| TWI819180B (zh) | 2019-01-17 | 2023-10-21 | 荷蘭商Asm 智慧財產控股公司 | 藉由循環沈積製程於基板上形成含過渡金屬膜之方法 |
| KR102727227B1 (ko) | 2019-01-22 | 2024-11-07 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| CN111524788B (zh) | 2019-02-01 | 2023-11-24 | Asm Ip私人控股有限公司 | 氧化硅的拓扑选择性膜形成的方法 |
| KR102626263B1 (ko) | 2019-02-20 | 2024-01-16 | 에이에스엠 아이피 홀딩 비.브이. | 처리 단계를 포함하는 주기적 증착 방법 및 이를 위한 장치 |
| TWI873122B (zh) | 2019-02-20 | 2025-02-21 | 荷蘭商Asm Ip私人控股有限公司 | 填充一基板之一表面內所形成的一凹槽的方法、根據其所形成之半導體結構、及半導體處理設備 |
| TWI845607B (zh) | 2019-02-20 | 2024-06-21 | 荷蘭商Asm Ip私人控股有限公司 | 用來填充形成於基材表面內之凹部的循環沉積方法及設備 |
| TWI838458B (zh) | 2019-02-20 | 2024-04-11 | 荷蘭商Asm Ip私人控股有限公司 | 用於3d nand應用中之插塞填充沉積之設備及方法 |
| TWI842826B (zh) | 2019-02-22 | 2024-05-21 | 荷蘭商Asm Ip私人控股有限公司 | 基材處理設備及處理基材之方法 |
| KR102782593B1 (ko) | 2019-03-08 | 2025-03-14 | 에이에스엠 아이피 홀딩 비.브이. | SiOC 층을 포함한 구조체 및 이의 형성 방법 |
| KR102858005B1 (ko) | 2019-03-08 | 2025-09-09 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 질화물 층을 선택적으로 증착하는 방법, 및 선택적으로 증착된 실리콘 질화물 층을 포함하는 구조체 |
| US11742198B2 (en) | 2019-03-08 | 2023-08-29 | Asm Ip Holding B.V. | Structure including SiOCN layer and method of forming same |
| KR20200116033A (ko) | 2019-03-28 | 2020-10-08 | 에이에스엠 아이피 홀딩 비.브이. | 도어 개방기 및 이를 구비한 기판 처리 장치 |
| KR102809999B1 (ko) | 2019-04-01 | 2025-05-19 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자를 제조하는 방법 |
| KR20200123380A (ko) | 2019-04-19 | 2020-10-29 | 에이에스엠 아이피 홀딩 비.브이. | 층 형성 방법 및 장치 |
| KR20200125453A (ko) | 2019-04-24 | 2020-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 기상 반응기 시스템 및 이를 사용하는 방법 |
| KR20200130121A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 딥 튜브가 있는 화학물질 공급원 용기 |
| KR102869364B1 (ko) | 2019-05-07 | 2025-10-10 | 에이에스엠 아이피 홀딩 비.브이. | 비정질 탄소 중합체 막을 개질하는 방법 |
| KR20200130652A (ko) | 2019-05-10 | 2020-11-19 | 에이에스엠 아이피 홀딩 비.브이. | 표면 상에 재료를 증착하는 방법 및 본 방법에 따라 형성된 구조 |
| JP7598201B2 (ja) | 2019-05-16 | 2024-12-11 | エーエスエム・アイピー・ホールディング・ベー・フェー | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
| JP7612342B2 (ja) | 2019-05-16 | 2025-01-14 | エーエスエム・アイピー・ホールディング・ベー・フェー | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
| USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
| USD947913S1 (en) | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
| USD935572S1 (en) | 2019-05-24 | 2021-11-09 | Asm Ip Holding B.V. | Gas channel plate |
| USD922229S1 (en) | 2019-06-05 | 2021-06-15 | Asm Ip Holding B.V. | Device for controlling a temperature of a gas supply unit |
| KR20200141002A (ko) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | 배기 가스 분석을 포함한 기상 반응기 시스템을 사용하는 방법 |
| KR20200141931A (ko) | 2019-06-10 | 2020-12-21 | 에이에스엠 아이피 홀딩 비.브이. | 석영 에피택셜 챔버를 세정하는 방법 |
| KR20200143254A (ko) | 2019-06-11 | 2020-12-23 | 에이에스엠 아이피 홀딩 비.브이. | 개질 가스를 사용하여 전자 구조를 형성하는 방법, 상기 방법을 수행하기 위한 시스템, 및 상기 방법을 사용하여 형성되는 구조 |
| USD944946S1 (en) | 2019-06-14 | 2022-03-01 | Asm Ip Holding B.V. | Shower plate |
| USD931978S1 (en) | 2019-06-27 | 2021-09-28 | Asm Ip Holding B.V. | Showerhead vacuum transport |
| KR20210005515A (ko) | 2019-07-03 | 2021-01-14 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치용 온도 제어 조립체 및 이를 사용하는 방법 |
| JP7499079B2 (ja) | 2019-07-09 | 2024-06-13 | エーエスエム・アイピー・ホールディング・ベー・フェー | 同軸導波管を用いたプラズマ装置、基板処理方法 |
| CN112216646A (zh) | 2019-07-10 | 2021-01-12 | Asm Ip私人控股有限公司 | 基板支撑组件及包括其的基板处理装置 |
| CN112242318A (zh) | 2019-07-16 | 2021-01-19 | Asm Ip私人控股有限公司 | 基板处理装置 |
| KR102860110B1 (ko) | 2019-07-17 | 2025-09-16 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 게르마늄 구조를 형성하는 방법 |
| KR20210010816A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 라디칼 보조 점화 플라즈마 시스템 및 방법 |
| US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
| KR20210010817A (ko) | 2019-07-19 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 토폴로지-제어된 비정질 탄소 중합체 막을 형성하는 방법 |
| TWI839544B (zh) | 2019-07-19 | 2024-04-21 | 荷蘭商Asm Ip私人控股有限公司 | 形成形貌受控的非晶碳聚合物膜之方法 |
| TWI851767B (zh) | 2019-07-29 | 2024-08-11 | 荷蘭商Asm Ip私人控股有限公司 | 用於利用n型摻雜物及/或替代摻雜物選擇性沉積以達成高摻雜物併入之方法 |
| CN112309900B (zh) | 2019-07-30 | 2025-11-04 | Asmip私人控股有限公司 | 基板处理设备 |
| CN112309899B (zh) | 2019-07-30 | 2025-11-14 | Asmip私人控股有限公司 | 基板处理设备 |
| US12169361B2 (en) | 2019-07-30 | 2024-12-17 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| US11227782B2 (en) | 2019-07-31 | 2022-01-18 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| KR20210018759A (ko) | 2019-08-05 | 2021-02-18 | 에이에스엠 아이피 홀딩 비.브이. | 화학물질 공급원 용기를 위한 액체 레벨 센서 |
| CN112342526A (zh) | 2019-08-09 | 2021-02-09 | Asm Ip私人控股有限公司 | 包括冷却装置的加热器组件及其使用方法 |
| USD965524S1 (en) | 2019-08-19 | 2022-10-04 | Asm Ip Holding B.V. | Susceptor support |
| USD965044S1 (en) | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
| JP2021031769A (ja) | 2019-08-21 | 2021-03-01 | エーエスエム アイピー ホールディング ビー.ブイ. | 成膜原料混合ガス生成装置及び成膜装置 |
| USD949319S1 (en) | 2019-08-22 | 2022-04-19 | Asm Ip Holding B.V. | Exhaust duct |
| USD930782S1 (en) | 2019-08-22 | 2021-09-14 | Asm Ip Holding B.V. | Gas distributor |
| USD940837S1 (en) | 2019-08-22 | 2022-01-11 | Asm Ip Holding B.V. | Electrode |
| KR20210024423A (ko) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 홀을 구비한 구조체를 형성하기 위한 방법 |
| USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
| KR20210024420A (ko) | 2019-08-23 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 비스(디에틸아미노)실란을 사용하여 peald에 의해 개선된 품질을 갖는 실리콘 산화물 막을 증착하기 위한 방법 |
| US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
| KR102806450B1 (ko) | 2019-09-04 | 2025-05-12 | 에이에스엠 아이피 홀딩 비.브이. | 희생 캡핑 층을 이용한 선택적 증착 방법 |
| KR102733104B1 (ko) | 2019-09-05 | 2024-11-22 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| US12469693B2 (en) | 2019-09-17 | 2025-11-11 | Asm Ip Holding B.V. | Method of forming a carbon-containing layer and structure including the layer |
| US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
| CN112593212B (zh) | 2019-10-02 | 2023-12-22 | Asm Ip私人控股有限公司 | 通过循环等离子体增强沉积工艺形成拓扑选择性氧化硅膜的方法 |
| KR20210042810A (ko) | 2019-10-08 | 2021-04-20 | 에이에스엠 아이피 홀딩 비.브이. | 활성 종을 이용하기 위한 가스 분배 어셈블리를 포함한 반응기 시스템 및 이를 사용하는 방법 |
| TWI846953B (zh) | 2019-10-08 | 2024-07-01 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理裝置 |
| TW202128273A (zh) | 2019-10-08 | 2021-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 氣體注入系統、及將材料沉積於反應室內之基板表面上的方法 |
| TWI846966B (zh) | 2019-10-10 | 2024-07-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成光阻底層之方法及包括光阻底層之結構 |
| US12009241B2 (en) | 2019-10-14 | 2024-06-11 | Asm Ip Holding B.V. | Vertical batch furnace assembly with detector to detect cassette |
| TWI834919B (zh) | 2019-10-16 | 2024-03-11 | 荷蘭商Asm Ip私人控股有限公司 | 氧化矽之拓撲選擇性膜形成之方法 |
| US11637014B2 (en) | 2019-10-17 | 2023-04-25 | Asm Ip Holding B.V. | Methods for selective deposition of doped semiconductor material |
| KR102845724B1 (ko) | 2019-10-21 | 2025-08-13 | 에이에스엠 아이피 홀딩 비.브이. | 막을 선택적으로 에칭하기 위한 장치 및 방법 |
| KR20210050453A (ko) | 2019-10-25 | 2021-05-07 | 에이에스엠 아이피 홀딩 비.브이. | 기판 표면 상의 갭 피처를 충진하는 방법 및 이와 관련된 반도체 소자 구조 |
| US11646205B2 (en) | 2019-10-29 | 2023-05-09 | Asm Ip Holding B.V. | Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
| TWI869475B (zh) | 2019-11-05 | 2025-01-11 | 荷蘭商Asm Ip私人控股有限公司 | 具有經摻雜半導體層之結構及用於形成上述結構之方法及系統 |
| US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
| KR102861314B1 (ko) | 2019-11-20 | 2025-09-17 | 에이에스엠 아이피 홀딩 비.브이. | 기판의 표면 상에 탄소 함유 물질을 증착하는 방법, 상기 방법을 사용하여 형성된 구조물, 및 상기 구조물을 형성하기 위한 시스템 |
| US11450529B2 (en) | 2019-11-26 | 2022-09-20 | Asm Ip Holding B.V. | Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
| CN112951697B (zh) | 2019-11-26 | 2025-07-29 | Asmip私人控股有限公司 | 基板处理设备 |
| CN120432376A (zh) | 2019-11-29 | 2025-08-05 | Asm Ip私人控股有限公司 | 基板处理设备 |
| CN112885692B (zh) | 2019-11-29 | 2025-08-15 | Asmip私人控股有限公司 | 基板处理设备 |
| JP7527928B2 (ja) | 2019-12-02 | 2024-08-05 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基板処理装置、基板処理方法 |
| KR20210070898A (ko) | 2019-12-04 | 2021-06-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| US11885013B2 (en) | 2019-12-17 | 2024-01-30 | Asm Ip Holding B.V. | Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
| KR20210080214A (ko) | 2019-12-19 | 2021-06-30 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상의 갭 피처를 충진하는 방법 및 이와 관련된 반도체 소자 구조 |
| KR20210089079A (ko) | 2020-01-06 | 2021-07-15 | 에이에스엠 아이피 홀딩 비.브이. | 채널형 리프트 핀 |
| KR20210089077A (ko) | 2020-01-06 | 2021-07-15 | 에이에스엠 아이피 홀딩 비.브이. | 가스 공급 어셈블리, 이의 구성 요소, 및 이를 포함하는 반응기 시스템 |
| US11993847B2 (en) | 2020-01-08 | 2024-05-28 | Asm Ip Holding B.V. | Injector |
| KR102882467B1 (ko) | 2020-01-16 | 2025-11-05 | 에이에스엠 아이피 홀딩 비.브이. | 고 종횡비 피처를 형성하는 방법 |
| KR102675856B1 (ko) | 2020-01-20 | 2024-06-17 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 및 박막 표면 개질 방법 |
| TWI889744B (zh) | 2020-01-29 | 2025-07-11 | 荷蘭商Asm Ip私人控股有限公司 | 污染物捕集系統、及擋板堆疊 |
| TW202513845A (zh) | 2020-02-03 | 2025-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 半導體裝置結構及其形成方法 |
| TW202146882A (zh) | 2020-02-04 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 驗證一物品之方法、用於驗證一物品之設備、及用於驗證一反應室之系統 |
| US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
| KR20210103956A (ko) | 2020-02-13 | 2021-08-24 | 에이에스엠 아이피 홀딩 비.브이. | 수광 장치를 포함하는 기판 처리 장치 및 수광 장치의 교정 방법 |
| TW202146691A (zh) | 2020-02-13 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 氣體分配總成、噴淋板總成、及調整至反應室之氣體的傳導率之方法 |
| US11781243B2 (en) | 2020-02-17 | 2023-10-10 | Asm Ip Holding B.V. | Method for depositing low temperature phosphorous-doped silicon |
| CN113410160A (zh) | 2020-02-28 | 2021-09-17 | Asm Ip私人控股有限公司 | 专用于零件清洁的系统 |
| KR20210113043A (ko) | 2020-03-04 | 2021-09-15 | 에이에스엠 아이피 홀딩 비.브이. | 반응기 시스템용 정렬 고정구 |
| KR20210116249A (ko) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | 록아웃 태그아웃 어셈블리 및 시스템 그리고 이의 사용 방법 |
| KR20210116240A (ko) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | 조절성 접합부를 갖는 기판 핸들링 장치 |
| CN113394086A (zh) | 2020-03-12 | 2021-09-14 | Asm Ip私人控股有限公司 | 用于制造具有目标拓扑轮廓的层结构的方法 |
| US12173404B2 (en) | 2020-03-17 | 2024-12-24 | Asm Ip Holding B.V. | Method of depositing epitaxial material, structure formed using the method, and system for performing the method |
| KR102755229B1 (ko) | 2020-04-02 | 2025-01-14 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 |
| TWI887376B (zh) | 2020-04-03 | 2025-06-21 | 荷蘭商Asm Ip私人控股有限公司 | 半導體裝置的製造方法 |
| TWI888525B (zh) | 2020-04-08 | 2025-07-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於選擇性蝕刻氧化矽膜之設備及方法 |
| US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
| KR20210128343A (ko) | 2020-04-15 | 2021-10-26 | 에이에스엠 아이피 홀딩 비.브이. | 크롬 나이트라이드 층을 형성하는 방법 및 크롬 나이트라이드 층을 포함하는 구조 |
| US11996289B2 (en) | 2020-04-16 | 2024-05-28 | Asm Ip Holding B.V. | Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods |
| KR20210130646A (ko) | 2020-04-21 | 2021-11-01 | 에이에스엠 아이피 홀딩 비.브이. | 기판을 처리하기 위한 방법 |
| TW202208671A (zh) | 2020-04-24 | 2022-03-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成包括硼化釩及磷化釩層的結構之方法 |
| KR20210132612A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐 화합물들을 안정화하기 위한 방법들 및 장치 |
| KR20210132576A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐 나이트라이드 함유 층을 형성하는 방법 및 이를 포함하는 구조 |
| TW202146831A (zh) | 2020-04-24 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 垂直批式熔爐總成、及用於冷卻垂直批式熔爐之方法 |
| KR20210132600A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐, 질소 및 추가 원소를 포함한 층을 증착하기 위한 방법 및 시스템 |
| KR102783898B1 (ko) | 2020-04-29 | 2025-03-18 | 에이에스엠 아이피 홀딩 비.브이. | 고체 소스 전구체 용기 |
| KR20210134869A (ko) | 2020-05-01 | 2021-11-11 | 에이에스엠 아이피 홀딩 비.브이. | Foup 핸들러를 이용한 foup의 빠른 교환 |
| JP7726664B2 (ja) | 2020-05-04 | 2025-08-20 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基板を処理するための基板処理システム |
| JP7736446B2 (ja) | 2020-05-07 | 2025-09-09 | エーエスエム・アイピー・ホールディング・ベー・フェー | 同調回路を備える反応器システム |
| KR102788543B1 (ko) | 2020-05-13 | 2025-03-27 | 에이에스엠 아이피 홀딩 비.브이. | 반응기 시스템용 레이저 정렬 고정구 |
| TW202146699A (zh) | 2020-05-15 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 形成矽鍺層之方法、半導體結構、半導體裝置、形成沉積層之方法、及沉積系統 |
| TW202147383A (zh) | 2020-05-19 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 基材處理設備 |
| KR20210145079A (ko) | 2020-05-21 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | 기판을 처리하기 위한 플랜지 및 장치 |
| KR102795476B1 (ko) | 2020-05-21 | 2025-04-11 | 에이에스엠 아이피 홀딩 비.브이. | 다수의 탄소 층을 포함한 구조체 및 이를 형성하고 사용하는 방법 |
| KR102702526B1 (ko) | 2020-05-22 | 2024-09-03 | 에이에스엠 아이피 홀딩 비.브이. | 과산화수소를 사용하여 박막을 증착하기 위한 장치 |
| TW202212650A (zh) | 2020-05-26 | 2022-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 沉積含硼及鎵的矽鍺層之方法 |
| TWI876048B (zh) | 2020-05-29 | 2025-03-11 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
| TW202212620A (zh) | 2020-06-02 | 2022-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 處理基板之設備、形成膜之方法、及控制用於處理基板之設備之方法 |
| TW202208659A (zh) | 2020-06-16 | 2022-03-01 | 荷蘭商Asm Ip私人控股有限公司 | 沉積含硼之矽鍺層的方法 |
| TW202218133A (zh) | 2020-06-24 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成含矽層之方法 |
| TWI873359B (zh) | 2020-06-30 | 2025-02-21 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
| US12431354B2 (en) | 2020-07-01 | 2025-09-30 | Asm Ip Holding B.V. | Silicon nitride and silicon oxide deposition methods using fluorine inhibitor |
| KR102707957B1 (ko) | 2020-07-08 | 2024-09-19 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
| TWI864307B (zh) | 2020-07-17 | 2024-12-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於光微影之結構、方法與系統 |
| TWI878570B (zh) | 2020-07-20 | 2025-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於沉積鉬層之方法及系統 |
| KR20220011092A (ko) | 2020-07-20 | 2022-01-27 | 에이에스엠 아이피 홀딩 비.브이. | 전이 금속층을 포함하는 구조체를 형성하기 위한 방법 및 시스템 |
| US12322591B2 (en) | 2020-07-27 | 2025-06-03 | Asm Ip Holding B.V. | Thin film deposition process |
| KR20220021863A (ko) | 2020-08-14 | 2022-02-22 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
| US12040177B2 (en) | 2020-08-18 | 2024-07-16 | Asm Ip Holding B.V. | Methods for forming a laminate film by cyclical plasma-enhanced deposition processes |
| TW202228863A (zh) | 2020-08-25 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 清潔基板的方法、選擇性沉積的方法、及反應器系統 |
| KR102855073B1 (ko) | 2020-08-26 | 2025-09-03 | 에이에스엠 아이피 홀딩 비.브이. | 금속 실리콘 산화물 및 금속 실리콘 산질화물 층을 형성하기 위한 방법 및 시스템 |
| TW202229601A (zh) | 2020-08-27 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成圖案化結構的方法、操控機械特性的方法、裝置結構、及基板處理系統 |
| KR20220033997A (ko) | 2020-09-10 | 2022-03-17 | 에이에스엠 아이피 홀딩 비.브이. | 갭 충진 유체를 증착하기 위한 방법 그리고 이와 관련된 시스템 및 장치 |
| USD990534S1 (en) | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
| KR20220036866A (ko) | 2020-09-16 | 2022-03-23 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 산화물 증착 방법 |
| USD1012873S1 (en) | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
| TWI889903B (zh) | 2020-09-25 | 2025-07-11 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
| US12009224B2 (en) | 2020-09-29 | 2024-06-11 | Asm Ip Holding B.V. | Apparatus and method for etching metal nitrides |
| KR20220045900A (ko) | 2020-10-06 | 2022-04-13 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 함유 재료를 증착하기 위한 증착 방법 및 장치 |
| CN114293174A (zh) | 2020-10-07 | 2022-04-08 | Asm Ip私人控股有限公司 | 气体供应单元和包括气体供应单元的衬底处理设备 |
| TW202229613A (zh) | 2020-10-14 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 於階梯式結構上沉積材料的方法 |
| KR102873665B1 (ko) | 2020-10-15 | 2025-10-17 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자의 제조 방법, 및 ether-cat을 사용하는 기판 처리 장치 |
| TW202217037A (zh) | 2020-10-22 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 沉積釩金屬的方法、結構、裝置及沉積總成 |
| TW202223136A (zh) | 2020-10-28 | 2022-06-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於在基板上形成層之方法、及半導體處理系統 |
| TW202229620A (zh) | 2020-11-12 | 2022-08-01 | 特文特大學 | 沉積系統、用於控制反應條件之方法、沉積方法 |
| TW202229795A (zh) | 2020-11-23 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 具注入器之基板處理設備 |
| TW202235649A (zh) | 2020-11-24 | 2022-09-16 | 荷蘭商Asm Ip私人控股有限公司 | 填充間隙之方法與相關之系統及裝置 |
| TW202235675A (zh) | 2020-11-30 | 2022-09-16 | 荷蘭商Asm Ip私人控股有限公司 | 注入器、及基板處理設備 |
| US12255053B2 (en) | 2020-12-10 | 2025-03-18 | Asm Ip Holding B.V. | Methods and systems for depositing a layer |
| TW202233884A (zh) | 2020-12-14 | 2022-09-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成臨限電壓控制用之結構的方法 |
| US11946137B2 (en) | 2020-12-16 | 2024-04-02 | Asm Ip Holding B.V. | Runout and wobble measurement fixtures |
| TW202232639A (zh) | 2020-12-18 | 2022-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 具有可旋轉台的晶圓處理設備 |
| TW202231903A (zh) | 2020-12-22 | 2022-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 過渡金屬沉積方法、過渡金屬層、用於沉積過渡金屬於基板上的沉積總成 |
| TW202242184A (zh) | 2020-12-22 | 2022-11-01 | 荷蘭商Asm Ip私人控股有限公司 | 前驅物膠囊、前驅物容器、氣相沉積總成、及將固態前驅物裝載至前驅物容器中之方法 |
| TW202226899A (zh) | 2020-12-22 | 2022-07-01 | 荷蘭商Asm Ip私人控股有限公司 | 具匹配器的電漿處理裝置 |
| USD980813S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
| USD980814S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
| USD1023959S1 (en) | 2021-05-11 | 2024-04-23 | Asm Ip Holding B.V. | Electrode for substrate processing apparatus |
| USD981973S1 (en) | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
| USD990441S1 (en) | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
| USD1099184S1 (en) | 2021-11-29 | 2025-10-21 | Asm Ip Holding B.V. | Weighted lift pin |
| USD1060598S1 (en) | 2021-12-03 | 2025-02-04 | Asm Ip Holding B.V. | Split showerhead cover |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2145775C1 (ru) | 1993-09-08 | 2000-02-20 | Квэлкомм Инкорпорейтед | Способ и устройство задания скорости передачи данных в многопользовательской системе связи |
| US20020041578A1 (en) * | 2000-06-02 | 2002-04-11 | Samsung Electronics Co., Ltd. | Method for selecting RACH in a CDMA mobile communication system |
| US20020128035A1 (en) | 2000-10-30 | 2002-09-12 | Nokia Corporation | Method and apparatus for transmitting and receiving dynamic configuration parameters in a third generation cellular telephone network |
| US6463504B1 (en) * | 1999-11-08 | 2002-10-08 | International Business Machines Corporation | Method and system for dynamically reassigning unused logical volumes from a storage subsystem to an open systems host |
| US6473410B1 (en) | 1997-09-22 | 2002-10-29 | Sony Corporation | Communication method and apparatus in which first and second control channels operate as an initial acquisition channel and a broadcast channel, respectively |
| US20030156558A1 (en) * | 2002-02-01 | 2003-08-21 | International Business Machines Corporation | Extending an allowable transmission distance between a wireless device and an access point by communication with intermediate wireless devices |
| US6628946B1 (en) | 1999-05-20 | 2003-09-30 | Telefonaktiebolaget Lm Ericsson (Publ) | Method and apparatus for broadcasting system information in a cellular communications network |
| US20030207696A1 (en) * | 2002-05-06 | 2003-11-06 | Serge Willenegger | Multi-media broadcast and multicast service (MBMS) in a wireless communications system |
| US6684081B2 (en) | 2002-05-10 | 2004-01-27 | Nokia Corporation | Method and system for separating control information and user data from multicast and broadcast services |
| US20040224688A1 (en) * | 2003-05-07 | 2004-11-11 | Evolium S.A.S. | Method of setting up connections in a mobile radio system |
| US6956832B1 (en) * | 1998-06-15 | 2005-10-18 | Nokia Networks Oy | Method for delivering messages in a wireless communications system using the same protocol for all types of messages |
| US7199608B1 (en) * | 2005-02-17 | 2007-04-03 | Xilinx, Inc. | Programmable logic device and method of configuration |
| US7301926B1 (en) * | 2003-04-04 | 2007-11-27 | Airespace, Inc. | Automatic coverage hole detection in computer network environments |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2340698B (en) * | 1995-04-18 | 2000-07-19 | Mitsubishi Electric Corp | Radio data transmission system |
| SE515588C2 (sv) * | 1996-01-25 | 2001-09-03 | Ericsson Telefon Ab L M | Miniceller med variabel för storlek på nyttolasten i ett mobiltelefonnät |
| KR19990088235A (ko) * | 1998-05-13 | 1999-12-27 | 윤종용 | 이동통신시스템의시간스위칭송신다이버시티장치및그제어방법 |
| US6587696B1 (en) * | 1998-07-31 | 2003-07-01 | Nokia Mobile Phones Limited | Power control technique utilizing forward pilot channel |
| JP3196747B2 (ja) * | 1998-12-18 | 2001-08-06 | 三菱マテリアル株式会社 | 移動無線機、基地局無線機、及び、その記録媒体 |
| FI106901B (fi) * | 1999-02-23 | 2001-04-30 | Nokia Mobile Phones Ltd | Menetelmä ja järjestely pakettidatan siirron hallitsemiseksi solukkojärjestelmässä |
| EP1104966A4 (fr) * | 1999-05-25 | 2008-03-12 | Sony Corp | Procede, dispositif et systeme de transmission |
| SG158743A1 (en) * | 2000-01-14 | 2010-02-26 | Interdigital Tech Corp | Wireless communication system with selectively sized data transport blocks |
| US6778835B2 (en) * | 2000-03-18 | 2004-08-17 | Lg Electronics Inc. | Method for allocating physical channel of mobile communication system and communication method using the same |
| DE10039429A1 (de) * | 2000-08-11 | 2002-03-07 | Siemens Ag | Verfahren zur Signalübertragung in einem Funk-Kommunikationssystem |
| US7283502B1 (en) * | 2000-09-21 | 2007-10-16 | Lucent Technologies Inc. | Enhancement of framing protocol frame format to support quality of service |
| US6701151B2 (en) * | 2001-03-27 | 2004-03-02 | Ericsson Inc. | Short access for realizing a signaling radio bearer in geran |
| KR100387040B1 (ko) * | 2001-04-03 | 2003-06-12 | 삼성전자주식회사 | 이동통신 시스템에서 패킷 데이터 송수신 방법 |
| US7013146B2 (en) * | 2001-06-27 | 2006-03-14 | Nokia Corporation | Method for adaptively setting transmission parameters for a random access channel transmission uplink procedure in a wireless communication system |
| KR100765123B1 (ko) * | 2002-02-16 | 2007-10-11 | 엘지전자 주식회사 | Srns 재할당 방법 |
| KR100886537B1 (ko) * | 2002-03-15 | 2009-03-02 | 삼성전자주식회사 | 부호분할다중접속 이동통신시스템에서 멀티캐스트멀티미디어 방송 서비스를 위한 데이터 패킷 제어장치 및방법 |
| FR2843670B1 (fr) * | 2002-08-14 | 2005-01-14 | Evolium Sas | Procede pour l'allocation de ressources en mode paquet dans un systeme de radiocommunications mobiles |
| CN100452674C (zh) * | 2002-09-30 | 2009-01-14 | Ut斯达康(中国)有限公司 | 码分多址系统中下行链路公共信道开环功率控制方法 |
| CN1937449A (zh) * | 2005-09-20 | 2007-03-28 | 展讯通信(上海)有限公司 | 一种可变长度的prach帧结构及其实现方法 |
| US8014359B2 (en) * | 2006-10-27 | 2011-09-06 | Interdigital Technology Corporation | Method and apparatus for assigning radio resources and controlling transmission parameters on a random access channel |
-
2005
- 2005-02-25 US US11/065,872 patent/US7580388B2/en active Active
- 2005-05-11 WO PCT/KR2005/001378 patent/WO2005119941A1/fr not_active Ceased
- 2005-05-11 AT AT05764806T patent/ATE551871T1/de active
- 2005-05-11 BR BRPI0510557-9A patent/BRPI0510557A/pt not_active IP Right Cessation
- 2005-05-11 MX MXPA06012751A patent/MXPA06012751A/es active IP Right Grant
- 2005-05-11 CN CN201210270300.2A patent/CN102833784B/zh not_active Ceased
- 2005-05-11 EP EP05764806A patent/EP1751893B1/fr not_active Expired - Lifetime
- 2005-05-11 AU AU2005249137A patent/AU2005249137B2/en not_active Expired
- 2005-05-11 CN CN2009102250123A patent/CN101860907B/zh not_active Expired - Lifetime
- 2005-05-11 JP JP2007514891A patent/JP4920581B2/ja not_active Expired - Fee Related
- 2005-05-11 RU RU2006137475/09A patent/RU2346392C2/ru active
-
2009
- 2009-05-13 US US12/465,578 patent/US7660281B2/en not_active Expired - Lifetime
- 2009-09-25 US US12/567,680 patent/US7715344B2/en not_active Expired - Lifetime
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2145775C1 (ru) | 1993-09-08 | 2000-02-20 | Квэлкомм Инкорпорейтед | Способ и устройство задания скорости передачи данных в многопользовательской системе связи |
| US6473410B1 (en) | 1997-09-22 | 2002-10-29 | Sony Corporation | Communication method and apparatus in which first and second control channels operate as an initial acquisition channel and a broadcast channel, respectively |
| US6956832B1 (en) * | 1998-06-15 | 2005-10-18 | Nokia Networks Oy | Method for delivering messages in a wireless communications system using the same protocol for all types of messages |
| US6628946B1 (en) | 1999-05-20 | 2003-09-30 | Telefonaktiebolaget Lm Ericsson (Publ) | Method and apparatus for broadcasting system information in a cellular communications network |
| US6463504B1 (en) * | 1999-11-08 | 2002-10-08 | International Business Machines Corporation | Method and system for dynamically reassigning unused logical volumes from a storage subsystem to an open systems host |
| US20020041578A1 (en) * | 2000-06-02 | 2002-04-11 | Samsung Electronics Co., Ltd. | Method for selecting RACH in a CDMA mobile communication system |
| US20020128035A1 (en) | 2000-10-30 | 2002-09-12 | Nokia Corporation | Method and apparatus for transmitting and receiving dynamic configuration parameters in a third generation cellular telephone network |
| US20030156558A1 (en) * | 2002-02-01 | 2003-08-21 | International Business Machines Corporation | Extending an allowable transmission distance between a wireless device and an access point by communication with intermediate wireless devices |
| US20030207696A1 (en) * | 2002-05-06 | 2003-11-06 | Serge Willenegger | Multi-media broadcast and multicast service (MBMS) in a wireless communications system |
| US6684081B2 (en) | 2002-05-10 | 2004-01-27 | Nokia Corporation | Method and system for separating control information and user data from multicast and broadcast services |
| US7301926B1 (en) * | 2003-04-04 | 2007-11-27 | Airespace, Inc. | Automatic coverage hole detection in computer network environments |
| US20040224688A1 (en) * | 2003-05-07 | 2004-11-11 | Evolium S.A.S. | Method of setting up connections in a mobile radio system |
| US7199608B1 (en) * | 2005-02-17 | 2007-04-03 | Xilinx, Inc. | Programmable logic device and method of configuration |
Cited By (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090219906A1 (en) * | 2005-06-17 | 2009-09-03 | Ntt Docomo, Inc. | Channel transmission apparatus and channel transmission method |
| US8130740B2 (en) * | 2005-06-17 | 2012-03-06 | Ntt Docomo, Inc. | Apparatus and method for channel transmission |
| US20080298340A1 (en) * | 2007-05-31 | 2008-12-04 | Li-Chih Tseng | Method and Apparatus for Improving Transmission of Downlink Shared Channel in a Wireless Communications System |
| US9674874B2 (en) | 2008-08-08 | 2017-06-06 | Interdigital Patent Holdings, Inc. | MAC reset and reconfiguration |
| US9155111B2 (en) | 2008-08-08 | 2015-10-06 | Interdigital Patent Holdings, Inc. | MAC reset and reconfiguration |
| US20110002262A1 (en) * | 2008-08-08 | 2011-01-06 | Interdigital Patent Holdings, Inc. | Mac reset and reconfiguration |
| US8625486B2 (en) * | 2008-08-08 | 2014-01-07 | Interdigital Patent Holdings, Inc. | MAC reset and reconfiguration |
| US8306059B2 (en) * | 2008-11-05 | 2012-11-06 | Htc Corporation | Method of constructing and transmitting packets with MIMO configuration in a wireless communication system and related communication device |
| US20100111206A1 (en) * | 2008-11-05 | 2010-05-06 | Chih-Hsiang Wu | Method of constructing and transmitting packets with mimo configuration in a wireless communication system and related communication device |
| US9750053B2 (en) | 2009-04-23 | 2017-08-29 | Interdigital Patent Holdings, Inc. | Method and apparatus for random access in multicarrier wireless communications |
| KR101378108B1 (ko) * | 2009-04-23 | 2014-04-01 | 인터디지탈 패튼 홀딩스, 인크 | 멀티캐리어 무선 통신에서의 임의 접속을 위한 방법 및 장치 |
| US8767585B2 (en) * | 2009-04-23 | 2014-07-01 | Interdigital Patent Holdings, Inc. | Method and apparatus for random access in multicarrier wireless communications |
| US12035370B2 (en) | 2009-04-23 | 2024-07-09 | Interdigital Patent Holdings, Inc. | Method and apparatus for random access in multicarrier wireless communications |
| US11083020B2 (en) | 2009-04-23 | 2021-08-03 | Interdigital Patent Holdings, Inc. | Method and apparatus for random access in multicarrier wireless communications |
| US20100296467A1 (en) * | 2009-04-23 | 2010-11-25 | Interdigital Patent Holdings, Inc. | Method and apparatus for random access in multicarrier wireless communications |
| US9253802B2 (en) | 2009-04-23 | 2016-02-02 | Interdigital Patent Holdings, Inc. | Method and apparatus for random access in multicarrier wireless communications |
| US9020508B2 (en) | 2009-08-12 | 2015-04-28 | Nec Corporation | Mobile communication system, base station, higher-order apparatus, gateway apparatus, communication method, and program |
| US9503937B2 (en) | 2009-08-12 | 2016-11-22 | Nec Corporation | Mobile communication system, base station, higher-order apparatus, gateway apparatus, communication method, and program |
| US10172046B2 (en) | 2009-08-12 | 2019-01-01 | Nec Corporation | Mobile communication system, base station, higher-order apparatus, gateway apparatus, communication method, and program |
| US10694544B2 (en) | 2009-12-11 | 2020-06-23 | Samsung Electronics Co., Ltd. | Method and apparatus for performing contention-based access in a mobile communication system |
| US9967901B2 (en) * | 2009-12-11 | 2018-05-08 | Samsung Electronics Co., Ltd. | Method and apparatus for performing contention-based access in a mobile communication system |
| US10251195B2 (en) | 2009-12-11 | 2019-04-02 | Samsung Electronics Co., Ltd. | Method and apparatus for performing contention-based access in a mobile communication system |
| US20120275381A1 (en) * | 2009-12-11 | 2012-11-01 | Samsung Electronics Co. Ltd. | Method and apparatus for performing contention-based access in a mobile communication system |
| US11102813B2 (en) | 2009-12-11 | 2021-08-24 | Samsung Electronics Co., Ltd. | Method and apparatus for performing contention-based access in a mobile communication system |
| US11723066B2 (en) | 2009-12-11 | 2023-08-08 | Samsung Electronics Co., Ltd. | Method and apparatus for performing contention-based access in a mobile communication system |
| US8923873B2 (en) | 2011-11-14 | 2014-12-30 | T-Mobile Usa, Inc. | Device triggered channel selection |
| US9560578B2 (en) * | 2012-07-20 | 2017-01-31 | Ntt Docomo, Inc. | Mobile station |
| US20150163727A1 (en) * | 2012-07-20 | 2015-06-11 | Ntt Docomo, Inc. | Mobile station |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1751893B1 (fr) | 2012-03-28 |
| CN102833784A (zh) | 2012-12-19 |
| EP1751893A1 (fr) | 2007-02-14 |
| CN101860907A (zh) | 2010-10-13 |
| RU2006137475A (ru) | 2008-07-20 |
| CN102833784B (zh) | 2015-03-25 |
| US20100014479A1 (en) | 2010-01-21 |
| JP4920581B2 (ja) | 2012-04-18 |
| AU2005249137A1 (en) | 2005-12-15 |
| WO2005119941A1 (fr) | 2005-12-15 |
| EP1751893A4 (fr) | 2010-05-05 |
| US7715344B2 (en) | 2010-05-11 |
| ATE551871T1 (de) | 2012-04-15 |
| US20050266846A1 (en) | 2005-12-01 |
| US7660281B2 (en) | 2010-02-09 |
| US20090219881A1 (en) | 2009-09-03 |
| CN101860907B (zh) | 2013-11-06 |
| RU2346392C2 (ru) | 2009-02-10 |
| MXPA06012751A (es) | 2007-01-16 |
| BRPI0510557A (pt) | 2007-11-20 |
| JP2008501281A (ja) | 2008-01-17 |
| AU2005249137B2 (en) | 2008-03-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7580388B2 (en) | Method and apparatus for providing enhanced messages on common control channel in wireless communication system | |
| AU2005301494B2 (en) | Mobile power handling method and apparatus | |
| EP1969737B1 (fr) | Methode pour lire des blocs d'informations de systeme dynamique | |
| US7463891B2 (en) | RRC connection request method and apparatus for mobile communications | |
| US7613473B2 (en) | RRC group reject method and apparatus for mobile communications | |
| JP4696161B2 (ja) | 効果的な無線リソース管理方法 | |
| US9167565B2 (en) | Method of transmitting and receiving downlink data in wireless communication system | |
| US20040224698A1 (en) | Apparatus and method for establishing feedback in a broadcast or multicast service | |
| ZA200609137B (en) | Method and apparatus for providing enhanced messages on common control channel in wireless communication system | |
| KR101141326B1 (ko) | 무선통신 시스템에서 공통제어채널 상의 개선된 메시지제공 방법 및 장치 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AS | Assignment |
Owner name: LG ELECTRONICS INC., KOREA, REPUBLIC OF Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:KIM, MYEONG CHEOL;REEL/FRAME:016601/0303 Effective date: 20050222 |
|
| FEPP | Fee payment procedure |
Free format text: PAYER NUMBER DE-ASSIGNED (ORIGINAL EVENT CODE: RMPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
| STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
| FEPP | Fee payment procedure |
Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
| FPAY | Fee payment |
Year of fee payment: 4 |
|
| FPAY | Fee payment |
Year of fee payment: 8 |
|
| AS | Assignment |
Owner name: 3G LICENSING S.A., LUXEMBOURG Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:LG ELECTRONICS INC.;REEL/FRAME:052192/0667 Effective date: 20200210 |
|
| MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 12TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1553); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 12 |
|
| IPR | Aia trial proceeding filed before the patent and appeal board: inter partes review |
Free format text: TRIAL NO: IPR2021-00906 Opponent name: THALES DIS AIS DEUTSCHLAND GMBH,DELL INC.,HONEYWELL INTERNATIONAL, INC.,SIERRA WIRELESS, INC.,TCL COMMUNICATION TECHNOLOGY HOLDINGS LIMITED,TCT MOBILE INTERNATIONAL LIMITED,TCT MOBILE, INC.,TCT MOBILE (US) INC.,TCT MOBILE (US) HOLDINGS INC.,ZTE (USA) INC.,ZTE CORPORATION,CRADLEPOINT, INC.,DELL MARKETING L.P.,DELL PRODUCTS L.P.,DELL TECHNOLOGIES INC.,DENALI INTERMEDIATE INC.,SIERRA WIRELESS AMERICA, INC.,THALES DIS AIS USA, LLC,TELEFONAKTIEBOLAGET LM ERICSSON, ANDERICSSON INC. Effective date: 20210527 |
|
| IPRC | Trial and appeal board: inter partes review certificate |
Kind code of ref document: K1 Free format text: INTER PARTES REVIEW CERTIFICATE; TRIAL NO. IPR2021-00906, MAY 27, 2021 INTER PARTES REVIEW CERTIFICATE FOR PATENT 7,580,388, ISSUED AUG. 25, 2009, APPL. NO. 11/065,872, FEB. 25, 2005 INTER PARTES REVIEW CERTIFICATE ISSUED JUL. 24, 2025 Effective date: 20250724 |