US7443746B1 - Memory array tester information processing system - Google Patents
Memory array tester information processing system Download PDFInfo
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- US7443746B1 US7443746B1 US11/253,521 US25352105A US7443746B1 US 7443746 B1 US7443746 B1 US 7443746B1 US 25352105 A US25352105 A US 25352105A US 7443746 B1 US7443746 B1 US 7443746B1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
- G11C29/56008—Error analysis, representation of errors
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/04—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals
- G11C2029/0403—Detection or location of defective memory elements, e.g. cell constructio details, timing of test signals during or with feedback to manufacture
Definitions
- the present invention relates generally to semiconductor technology and more specifically to semiconductor research and development.
- Modern consumer electronics such as cellular phones, digital cameras, and music players, are packing more integrated circuits into an ever-shrinking physical space with the expectations of decreasing cost. Numerous technologies have been developed to meet these requirements.
- One cornerstone for consumer electronics to continue proliferation into everyday life is the non-volatile storage of information such as cellular phone numbers, and digital pictures, music files.
- Integrated circuits including non-volatile memories are made in and on wafers by extremely complex systems that require the coordination of hundreds or even thousands of precisely controlled processes to produce a finished semiconductor wafer.
- Each finished semiconductor wafer has hundreds to tens of thousands of integrated circuits, each worth hundreds or thousands of dollars.
- yield is the measure of how many “good” integrated circuits there are on a wafer divided by the total number of integrated circuits formed on the wafer divided by the maximum number of possible good integrated circuits on the wafer.
- a 100% yield is extremely difficult to obtain because minor variations, due to such factors as timing, temperature, and materials, substantially affect a process. Further, one process often affects a number of other processes, often in unpredictable ways.
- the learning cycle for the improvement of systems and processes requires coming up with an idea, formulating a test(s) of the idea, testing the idea to obtain data, studying the data to determine the correctness of the idea, and developing new ideas based on the correctness of the first idea.
- the manufacturing environment provides a slow learning cycle because of manufacturing time and cost.
- the problems include, but are not limited to, memory manufacturing, test, sort, verification failure analysis, and process improvements in both embedded and stand-alone applications. As the demand for memory increases, especially for non-volatile memory, improvements are required to reliably and efficiently provide the memory solutions.
- the present invention provides a memory array tester information processing system including executing a generation block to gather drain currents and gate voltages information for a memory array, utilizing an extraction block to obtain the drain currents and the gate voltages a portion of the memory array and an entire memory array from the generation block or stored information, and executing an analysis block to operate on the drain currents and the gate voltages from the extraction block to correlate operations on the portion of the memory array and the entire memory array.
- the system includes utilizing a presentation block to format the information used in the analysis block and the results of the analysis block to compute a peak threshold voltage for the memory array.
- FIG. 1 shows a block diagram of a memory array test system according to the present invention
- FIG. 2 shows more details of the analysis block according to the present invention.
- FIG. 3 shows more details of the presentation block according to the present invention.
- horizontal as used herein is defined as a plane parallel to the conventional plane or surface of the invention, regardless of its orientation.
- vertical refers to a direction perpendicular to the horizontal as just defined. Terms, such as “on”, “above”, “below”, “bottom”, “top”, “side” (as in “sidewall”), “higher”, “lower”, “upper”, “over”, and “under”, are defined with respect to the horizontal plane.
- a Flash cell is basically a floating-gate MOS transistor, such as a transistor with a gate completely surrounded by dielectric materials to form the floating gate (FG).
- the FG is electrically governed by a capacitively coupled control gate (CG). Being electrically isolated, the FG acts as the storing electrode for the memory cell device with charge injected in the FG and maintained there.
- the “trapped” charge in the FG allows for the modulation of the “apparent” threshold voltage as seen from the CG of the memory cell transistor.
- the quality of the dielectric materials provides the nonvolatility property, while the thickness allows the possibility to program or erase the cell by electrical pulses.
- the gate dielectric material is between the transistor channel and the FG, wherein the gate dielectric material may be an oxide and is called “tunnel oxide” since FN electron tunneling occurs through it.
- a triple layer of oxide-nitride-oxide (ONO) is formed on a silicon substrate, with nitride acting as a charge-trapping layer, capacitively coupled to the CG.
- a threshold voltage may be defined as the minimum voltage required on the gate, also referred to as the control gate, of a transistor for current to flow between the transistor's drain and source. This definition is further qualified by specifying a drain-to-source current.
- the threshold voltage of a cell is proportional to the charge stored on the floating gate or the charge-trapping layer of the cell.
- a threshold voltage distribution of Flash memories is a key parameter to provide information about the memory cells capability to store data. Threshold voltage shifts and distribution are routinely monitored, especially in the early stages of product development to find design and process problems. Leakage of charge from the floating gate would result in a lower threshold voltage and eventually result in wrong data being read from the memory cell. In fact changes in V th with time, temperature, Program-Erase Cycles, and with Read cycles provides an indication of the endurance of the Flash device.
- FIG. 1 therein is shown a block diagram of a memory array tester information processing system 100 according to the present invention.
- the memory array tester information processing system 100 is the result of the discovery that at times a single fundamental block can solve the problems presented but often there are four fundamental blocks to solving the problems presented.
- the four fundamental blocks are a generation block 101 , an extraction block 102 , an analysis block 103 , and a presentation block 104 .
- Each of the blocks can stand independently in the memory array tester information processing system 100 , and within these blocks are various commercially available techniques, methodologies, processes, and approaches as well as the invention disclosed herein.
- the four fundamental blocks are discussed in the approximate chronology that the blocks are used in the memory array tester information processing system 100 .
- the goal of the four fundamental blocks is the support of a production block 107 .
- the memory array tester information processing system 100 includes various pieces of commercially available production, test, research, and development semiconductor equipment, which operate on and manipulate information and/or data, which are generically defined herein as “information”.
- the memory array tester information processing system 100 receives information from a tester 105 , which is connected to a system-under-test 106 .
- the tester 105 may be any number of test systems, such as a semiconductor test equipment for testing wafers or die, test bench instrumentations, compute devices, system diagnostic boards and firmware, circuitry, or any combination thereof.
- the interface from the tester 105 to the system-under-test 106 may be any number interconnects, such as wires, wireless, direct connections, or network connections.
- the system-under-test 106 may be a complete wafer, a memory die, packaged memory devices, integrated circuits with embedded memory, system boards with memory devices, or a combination thereof.
- the system-under test 106 may be mounted on any number of structures, such as a wafer carrier, a semiconductor test equipment board, a test bench board, or a system board.
- information is generated looking at new and old memory products, new and old processes, product and process problems, unexpected or unpredictable results and variations, etc.
- Generation of the information may be obtained in any number of ways, such as utilizing the tester 105 to retrieve information from the system-under-test 106 , stored test information, a compute device, or information over a network. It may also require new equipment and/or methods, which are described herein when required.
- the generation block 101 may generate a number of information types for the memory array, such as an amount of electric current or voltage levels.
- the generated information may be gathered from any part of the system-under-test 106 , such as from the entire wafer, the entire memory array, a portion of the memory array, or a test structure.
- the generation block 101 may be implemented in any number of ways, such as with software or circuitry.
- usable information is extracted from the generated information from the generation block 101 .
- the generated information is translated into more useful forms; e.g., broken apart so it can be reassembled in different forms to show different inter-relationships.
- test files For example, most testing equipment provides raw data in massive test files. Sometimes, millions of measurements provide millions of pieces of information, which must be digested and understood. The test files seldom have user-friendly tabular and/or graphical outputs of parameters and values of interest. Even where somewhat user-friendly outputs are provided, there are problems with the proper schema for storing the usable data and for formatting the data for subsequent analysis.
- Extraction of the usable information may also require new equipment and/or methods. Sometimes, extraction includes storing the information for long duration experiments or for different experiments, which are described herein when required.
- the extraction block 102 for memory arrays may include extracting the appropriate information, such as the amount of electric current or voltage levels, from the generation block 101 .
- the extraction block 102 may extract current or past information of various categories, such as between wafer lines, in a wafer line, at a wafer level, of an entire memory array, a part of a memory array, a test structure, from past data, from process data, or for reliability information.
- the extraction block 102 may be implemented in any number of ways, such as with software or circuitry.
- the usable information from the extraction block 102 is analyzed. Unlike previous systems where a few experiments were performed and/or a relatively few data points determined, the sheer volume of experiments and data precludes easy analysis of trends in the data or the ability to make predictions based on the data. Analysis of the extracted information may also require new equipment and/or methods, which are described herein when required.
- the analysis block 103 may utilize representative portions of the information from the extraction block 102 and perform operations balancing the need to provide the reliable representative analysis results while minimizing the amount of information needed for analysis.
- the analysis block 103 may be implemented in any number of ways, such as with software or circuitry.
- the analysis block 103 may utilize a portion of a memory array (not shown), test structures (not shown), or modeling of an equivalence-based memory from the extracted data.
- the analyzed information from the analysis block 103 is manipulated and presented in a comprehensible form to assist others in understanding the significance of the analyzed data.
- the huge amount of analyzed information often leads to esoteric presentations, which are not useful per se, misleading, or boring.
- Proper presentation often is an essential ingredient for making informed decisions on how to proceed to achieve yield and processing improvements.
- the presentation block 104 may be implemented in any number of ways, such as with software or circuitry. In some cases, problems cannot even be recognized unless the information is presented in an easily understood and digested form, and this often requires new methods of presentation, which are described herein when required.
- the presentation block 104 for memory array may present the extracted data and the analysis in any number of ways, such as comparing memory array or wafer information and comparing fit with the selected portions or test structures. Correlation information may be presented to validate memory array architecture as well as analysis fit.
- FIG. 2 therein are shown more details of the analysis block 103 according to the present invention.
- Many measurements are used during the characterization of memory arrays requiring the value of the memory array peak threshold voltage. Often, there is not a direct method to measure this voltage either due to structural or time limitations.
- the analysis block 103 according to the present invention allows quick determination of the memory array peak threshold voltage.
- the analysis block 103 provides a method to find peak threshold voltage in any memory array without requiring separate access to all the word lines and bit lines.
- the memory array peak threshold voltage may be determined by measuring only one drain current and gate voltage, I d ⁇ V g , curve of a whole memory array or a part of the memory array.
- the analysis to determine the memory array peak threshold voltage utilizes single cell or partial characteristics, such as values of threshold voltages, subthreshold swing (STS), threshold distribution width ( ⁇ ), and variance ( ⁇ 2 ).
- the drain current (I d ) of a single memory cell may be expressed as a function of the gate voltage (V g ) and threshold voltage (V t ) as shown by equation 1.
- the “S” is a parameter independent of the threshold voltage, such as subthreshold swing.
- I d ⁇ ( V g , V t ) e S ⁇ ( V g - V t ) ( 1 )
- the distribution of the threshold voltage of the memory array may be represented as a Gaussian distribution as shown by equation 2.
- integration have linear properties such that the memory array drain current (I d,tot ) of N instances of single memory cells may be determined by integrating the single memory cell drain current, I d of equation 1, with the Gaussian distribution, P(V t ) of equation 2, as shown by equation 3.
- I d , tot N ⁇ ⁇ V t , min V t , max ⁇ P ⁇ ( V t ) ⁇ I d ⁇ ( V g , V t ⁇ ) ⁇ ⁇ d V t ( 3 )
- equation 1 and equation 2 forms the memory array drain current (I d,tot ) in the form shown in equation 4.
- I d , tot e SV g ⁇ N 2 ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ V t , min V t , max ⁇ e ( V t - V p ) 2 2 ⁇ ⁇ ⁇ 2 ⁇ e - SV t ⁇ d V t ( 4 )
- the memory array drain current (I d,tot ) can be found in the form shown in equation 5.
- I d , tot e S ⁇ ( V g - V p ) ⁇ N ⁇ ⁇ e S 2 ⁇ ⁇ 2 2 2 ⁇ 2 ⁇ ⁇ ⁇ [ 2 ⁇ ⁇ ⁇ V t , min - V p + S ⁇ ⁇ ⁇ 2 2 ⁇ ⁇ V t , max - V p + S ⁇ ⁇ ⁇ 2 2 ⁇ ⁇ ⁇ e - u 2 ⁇ d u ] ( 5 )
- the memory array drain current (I d,tot ) can be found in the form shown in equation 6.
- I d , tot e S ⁇ ( V g - V p ) ⁇ N ⁇ ⁇ e S 2 ⁇ ⁇ 2 2 2 ⁇ 2 ⁇ ⁇ ⁇ [ erf ⁇ ( ⁇ 2 + S ⁇ ⁇ ⁇ 2 2 ⁇ ⁇ ) - erf ⁇ ( - - ⁇ 2 + S ⁇ ⁇ ⁇ 2 2 ⁇ ⁇ ) ] ( 6 )
- the width ( ⁇ ) of the threshold voltage distribution P(V t ), which has a peak subthreshold voltage (V p ) with a minimum threshold voltage (V t,min ) and a maximum threshold voltage (V t,max ), is defined as shown by equation 7.
- the “S” and “ ⁇ ” parameters are measured values with “ ⁇ ” as a fitting parameter for the Gaussian distribution.
- the number of memory cell instances N is a known parameter.
- a function K(N,S,A, ⁇ ) may be determined such that I d,tot may be expressed as shown by equation 8.
- I d,tot e S(V g ⁇ V p ) K ( N,S , ⁇ , ⁇ ) (8)
- the parameter V g1 such that log of I d,tot (V g1 ) equals to zero, is provided from a graphical analysis of the gate voltage (V g ) with the natural log of I d,tot .
- the function K(N,S,A, ⁇ ) may be determined earlier such that the subthreshold voltage peak, V p , may be determined as shown by equation 9.
- V p V g ⁇ ⁇ 1 + ln ⁇ ⁇ K ⁇ ( N , S , ⁇ , ⁇ ) S ( 9 )
- an entire memory array peak threshold value at 1 ⁇ A, V t (1 ⁇ A) may be determined using the single memory cell offset, ⁇ V p,1 ⁇ A , between the X-intercept of the natural log of I d and 1 ⁇ A V t as shown in equation 10.
- V t (1 ⁇ A) V p + ⁇ V p,1 ⁇ A (10)
- the memory array peak threshold value at 1 ⁇ A, V t (1 ⁇ A), may be utilized to decrease test time and increase throughput of the production block 107 .
- the details of the analysis block 103 are depicted as fundament blocks from the block 202 to the block 212 , although it is understood the details of the analysis block 103 may be partitioned differently or in different chronology.
- the presentation block 104 graphically depicts the key parameters, results, and information from the analysis block 103 .
- the gate voltage (V g ) is on an x-axis 302 and a number of the drain currents I d are graphed, such as a single memory cell I-V graph 304 , a part of the memory array I-V graph 306 , and a memory array I-V graph 308 , with the values of the drain currents I d on a left y-axis 310 .
- a derivative or a change of a natural log of the drain currents I d over the change of the gate voltage (V g ) are graphed with the natural log of the drain currents I d is on a right y-axis 312 and the gate voltage (V g ) on the x-axis 302 , such as a single memory cell gm-V graph 314 , a part of the memory array gm-V graph 316 , and a memory array gm-V graph 318 .
- the presentation block 104 provides a comparison of a single memory cell, a part of the memory array, and the entire memory array to graphically depict the parameters, results, and information from the analysis block 103 .
- the presentation block 104 depicts a graphical format of some of the information from the analysis block 103 , although it is understood that other formats may be used to express information from the analysis block 103 or a combination thereof, as well. More information may be also formatted from the presentation block 104 .
- Threshold voltage especially peak threshold voltage
- the memory array tester information processing system efficiently and reliably verifies key parameters of the memory arrays without extensive device overhead or extensive data collection. The cost and time savings becomes more apparent as the memory array size increases and the utilization of memory arrays increases.
- An aspect is that the present invention utilizes measurements of a portion of the memory array or an entire memory array to correlate the needed values to minimize future measurements to a smaller subset.
- mathematical expressions may be manipulated and with appropriate measured information, the desired peak threshold voltage may be obtained with less data collection required.
- the subset of memory array measurements may be used to expedite other processes in memory array manufacturing and test.
- the state or charge-loss level of the portion of the memory array used, or also referred to as reference cells in the array, may be monitored with the results of the peak threshold voltage.
- Memory erase (ER) or program read (PR) functions may be performed through verifying by array peak location without erase verify (EV) or program verify (PV) level determinations.
- the memory system method and apparatus of the present invention furnish important and heretofore unknown and unavailable solutions, capabilities, and functional aspects for memory systems.
- the resulting processes and configurations are straightforward, cost-effective, uncomplicated, highly versatile, accurate, sensitive, and effective, and can be implemented by adapting known components for ready, efficient, and economical manufacturing, application, and utilization.
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Abstract
Description
I d,tot =e S(V
V t(1 μA)=V p +ΔV p,1 μA (10)
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| US6914817B2 (en) | 1988-06-08 | 2005-07-05 | Sandisk Corporation | Highly compact EPROM and flash EEPROM devices |
| US6917542B2 (en) | 2003-07-29 | 2005-07-12 | Sandisk Corporation | Detecting over programmed memory |
| US7184336B2 (en) * | 2004-08-18 | 2007-02-27 | Winbond Electronics Corp. | Method and test structure for evaluating threshold voltage distribution in a memory array |
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- 2005-10-18 US US11/253,521 patent/US7443746B1/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6914817B2 (en) | 1988-06-08 | 2005-07-05 | Sandisk Corporation | Highly compact EPROM and flash EEPROM devices |
| US6560568B1 (en) | 1999-04-12 | 2003-05-06 | Agere Systems, Inc. | Deriving statistical device models from electrical test data |
| US6819596B2 (en) | 2000-10-03 | 2004-11-16 | Kabushikia Kaisha Toshiba | Semiconductor memory device with test mode |
| US6815231B2 (en) | 2001-06-11 | 2004-11-09 | Hitachi, Ltd. | Method of testing and manufacturing nonvolatile semiconductor memory |
| US6917542B2 (en) | 2003-07-29 | 2005-07-12 | Sandisk Corporation | Detecting over programmed memory |
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