US6922051B2 - Displacement and/or angle sensor with a meander-shaped measuring winding - Google Patents
Displacement and/or angle sensor with a meander-shaped measuring winding Download PDFInfo
- Publication number
- US6922051B2 US6922051B2 US09/890,823 US89082301A US6922051B2 US 6922051 B2 US6922051 B2 US 6922051B2 US 89082301 A US89082301 A US 89082301A US 6922051 B2 US6922051 B2 US 6922051B2
- Authority
- US
- United States
- Prior art keywords
- flux
- measurement length
- return line
- fixed housing
- loop
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000006073 displacement reaction Methods 0.000 title description 14
- 238000004804 winding Methods 0.000 title description 9
- 230000004907 flux Effects 0.000 claims abstract description 65
- 238000005259 measurement Methods 0.000 claims abstract description 54
- 239000004020 conductor Substances 0.000 claims abstract description 46
- 230000001939 inductive effect Effects 0.000 claims abstract description 36
- 230000005540 biological transmission Effects 0.000 claims abstract description 14
- 230000006698 induction Effects 0.000 claims description 11
- 230000000630 rising effect Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 2
- 230000035699 permeability Effects 0.000 claims 2
- 239000000654 additive Substances 0.000 claims 1
- 230000000996 additive effect Effects 0.000 claims 1
- 239000011295 pitch Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000012466 permeate Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000001419 dependent effect Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
- G01D5/2073—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by movement of a single coil with respect to two or more coils
Definitions
- the invention pertains to a displacement sensor with a meander-shaped measuring winding.
- a process for measuring displacements and/or angles is described in patent application PCT/DE98/03,753.
- This process uses a measuring loop, in which a movable measuring head induces a voltage, which is divided by circuit devices in such a way that a displacement-dependent alternating voltage can be tapped at a measuring output.
- the division is preferably accomplished with the use of resistance networks or a distributed resistance.
- the characteristic curve of an arrangement such as this extends in only one direction over the measuring distance. In many applications, however, it is desirable to simulate nonlinear characteristics with a reversal of direction, e.g., a sine curve, over the displacement or angle.
- the present invention pertains to a displacement or angle sensor, in which there is no need to divide the value; on the contrary, the induction loop is designed in such a way that the voltage induced in it depends on the position of the measuring head and can be tapped at the end of the measuring loop.
- the integral over the alternating field passing through it must also be displacement-dependent. This is accomplished by having the measuring head generate a constant alternating field and by designing the measuring loop so that the component of the measuring head-generated flux permeating the loop is proportional to the anticipated position-dependent signal.
- this is achieved by providing turns, the number of which increases with the distance from the zero point, on a surface permeated by the flux; in addition, the individual turns run at an angle into the surface.
- the use of a measuring loop with several turns suffers from the disadvantage that, when a relatively large number of turns is required, the winding becomes very wide, especially when the design includes a printed circuit, as is preferably done for reasons of economy and production efficiency. So that a continuous increase in the measuring voltage with increasing position is achieved, another turn must be provided at a distance as close as possible in value to the width of the measuring core.
- the measuring core must extend around one side of the coil in such a way that the flux passes through all the turns.
- the measuring loop with only one or with relatively few turns, which have the form of a meander.
- the meander has the same pitch over the entire measurement distance, but the width of the individual segments changes with the position in the measurement direction.
- the segments of the meander which project into the area of the measuring core are permeated by the magnetic field, whereas the other parts remain outside the magnetic field.
- the ratio of the width of the meander segments which project into the core area to the pitch of the meander is proportional to the desired characteristic curve, the characteristic curve thus obtained approximates the desired characteristic curve.
- the advantage of this design is that it is possible to provide almost any desired number of turn segments crosswise to the measuring direction without causing an extreme increase in the width of the measuring coil or high inductance and high distributed capacitance of the measuring winding. This means that a narrow, short measuring core can be used. If a sufficient number of turns is present, it is possible to arrange the winding perpendicular to the measuring direction. As a result, the dependence on the course of the magnetic field crosswise to the measuring direction is considerably reduced.
- FIG. 1 a shows a schematic diagram of an embodiment of a sensor according to the invention
- FIG. 1 b is an end view of FIG. 1 a;
- FIG. 2 shows a schematic diagram of the voltage which can be tapped from the sensor illustrated in FIG. 1 a and of the magnetic induction;
- FIG. 3 shows a schematic diagram of the induction occurring in the sensor shown in FIG. 1 a;
- FIG. 4 a shows a different embodiment of an inductive sensor making use of the invention
- FIG. 4 b is a section view taken on the line A-B in FIG. 4 a;
- FIG. 5 a shows a schematic diagram of an exemplary embodiment of a sensor
- FIGS. 5 b and 5 c shown the induction course in directions x and y, respectively.
- FIG. 5 a shows an arrangement consisting of a core 31 with an air gap, in which a printed-circuit board 30 is present.
- a coil through which current passes, generates an alternating field in the core, which permeates the printed-circuit board 30 .
- the broken lines represent lines of equal induction.
- the diagrams ( FIGS. 5 b and 5 c ) next to and below these lines show the course of the induction in the direction of motion of the measuring head (x direction) and crosswise to that (the y direction). The physical circumstances make it impossible to arrive at a perfectly linear course. In contrast, it is possible to achieve a curve with good symmetry in the x direction but not in the y direction.
- the induction loop is designed so that it consists of conducting tracks 32 which extend in the direction of motion of the measuring core and also perpendicular to the direction of motion; they thus form rectangles, which project deeply into the air gap of the measuring core and thus absorb practically all of the magnetic flux in this area.
- FIGS. 1 a and 1 b show a design of this type.
- a meander-shaped conducting track 2 On the printed-circuit board 1 is a meander-shaped conducting track 2 , one end of which is connected to an electrical connecting terminal 4 by the conducting track 3 , whereas the other end is connected to connecting terminal 5 .
- the measuring core 6 has a winding 7 , through which an alternating current flows. The production of this alternating current is not described in detail here. It can be derived from, for example, DE 197-57,689.3-52 and from PCT/DE98/03,753, to which reference is made here.
- the current I v in the primary loop 10 induces a voltage in the winding 7 , which, along with a capacitor 11 , forms a resonant circuit.
- the excitation current can also be generated elsewhere, e.g., by direct feed.
- the limbs of the core encompass the printed-circuit board 1 , so that the magnetic flux of the measuring core permeates the measuring loop where it projects into the core area (shown on the right).
- the pitch of this meander corresponds to the magnetically effective width of the measuring core 6 or a whole-number fraction thereof.
- a voltage U m1 is thus obtained as a function of the position of the measuring core, as shown in FIG. 2 .
- the field extends only over the width of the measuring core and remains uniform there over the entire width.
- the voltage U m1 which starts at 0 at the beginning of the measurement distance, increases in a linear manner by an amount of 1/n as the first, narrow segment of the meander extends into the core; the voltage then remains constant until the next segment is reached.
- the measuring loop occupies the entire field of the measuring core and thus provides full voltage.
- the transition between the individual segments is not quite the same as illustrated in FIG. 2 , in which the magnetic flux is assumed to proceed as illustrated in FIG. 3 ; instead, the field changes as illustrated in FIG. 5 .
- the magnetic flux will also emerge laterally into the edge areas. This leads to the course shown in broken line in FIG. 3 .
- the solid line represents the idealized course, the broken line the actual course.
- the characteristic curve shown in FIG. 2 becomes “blurred”, which leads to an approximation to a continuous course or, in the example above, to a linear course.
- a sufficiently close approximation of the characteristic to the desired course can also be achieved by designing the air gap and/or the cross section of the core in the air gap in an appropriate manner.
- a further improvement is obtained by the use of a second measuring loop, e.g., on the rear surface of the printed-circuit board 1 .
- a second measuring loop e.g., on the rear surface of the printed-circuit board 1 .
- a conducting track 9 of this type is shown in broken line. It is connected at one end to the common connecting terminal 4 via the conducting track 3 ; at the other end, it is connected to a test connector 8 .
- the voltage U m2 is induced, as shown in FIG. 2 . From the difference between the two voltages U m1 and U m2 , the voltage U m is formed, which has twice the number of transitions and twice the output voltage. The error associated with the transitions is thus cut in half. The same result is obtained when the two measuring loops are connected in series. In this case, the pitches of the two measuring loops must be the same.
- the method of the meander-shaped induction loop can, of course, also be combined with a distributed resistance so that, for example, the sensor can be checked to see that it is functioning properly or so that additional control data can be obtained. It is possible to generate, for example, a curve of reference input values versus the displacement measured with the resistance element, an additional end-point signal, or the like. It is advantageous here that it is also possible to provide pitches in different directions over the entire distance, which is difficult to achieve with a distributed resistance.
- Neither the measuring distance nor the measuring process using a resistance element is limited to straight stretches.
- the arrangement can also be easily used for curves. These are preferably arcs of a circle, such those which occur when angles are measured.
- the area ratio of the meander can be varied over the distance in any way desired, it is possible to generate any desired function over the measuring distance, as long as the pitch does not exceed a value predetermined by the width of the core.
- the maximum possible pitch is thus U max /b, where U max is the maximum obtainable measurement voltage and b is the width of the measuring core.
- FIGS. 4 a and 4 b show a schematic diagram of an angle sensor for measuring angles over a range of 360° and a section view through the sensor.
- a measuring core 16 On a rotatably supported shaft 17 , a measuring core 16 is mounted by a holder 16 a in such a way that a stationary, ring-shaped printed-circuit board 15 , which is concentric to the shaft, lies in the air gap of the measuring core 16 .
- the measuring core 16 passes over the conducting tracks 18 , 19 .
- the two conducting tracks 18 , 19 are applied to opposite sides of the printed-circuit board 15 . Both have the same geometry but are offset 90° from each other.
- the conducting track 18 is shown on the top.
- the conducting track 18 is designed in such a way that each of the two conducting tracks 27 , 18 forms a loop. Some, all, or none of the magnetic flux of the measuring core permeates this loop as a function of the angular position. A voltage is induced accordingly.
- the voltage at the connecting terminals 21 , 22 have a course which approximates a sine curve over 180°.
- the corresponding measuring loops on the rear provide a sine curve offset by 90°, which corresponds to a cosine function. Appropriate evaluation in a circuit (not described in detail) then leads to a clear identification of the angle.
- a suitably finer grid and/or an appropriately shaped measuring core and/or electronic linearization can be provided.
- electronic linearization a continuously rising measurement value is required, which is achieved by the use of a sufficiently fine grid and/or a suitably shaped measuring core.
- Each conductor loop 2 , 9 has a feed line, e.g., feed line 3 of conductor loop 2 and a return line such as return line 2 R of conductor loop 2 . It is the return line of these conductor loops which at regular intervals alternate into and out of the flux path area. The locations at which the return lines are for each return line spaced one from another at a uniform pitch.
- Conductor loop 2 can be arranged at one side of the housing, and the conductor loop 9 arranged on an opposite housing side.
- the conductor loop layout 9 can be offset relative to that of conductor loop 2 by, e.g., a half pitch as is the arrangement depicted in FIG. 1 a. It will be understood that the FIGS. 4 a, 4 b sensor includes a flux path area on housing 15 which will be defined by respective inner and outer concentric circular boundaries corresponding with the reach of the measuring core air gap.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19904689 | 1999-02-05 | ||
| DE19904689.1 | 1999-02-05 | ||
| DE19905847.4 | 1999-02-12 | ||
| DE19905847A DE19905847C2 (de) | 1999-02-05 | 1999-02-12 | Weg- und/oder Winkelaufnehmer mit mäanderförmiger Meßwicklung |
| DEPCT/DE99/04126 | 1999-12-29 | ||
| PCT/DE1999/004126 WO2000046574A1 (fr) | 1999-02-05 | 1999-12-29 | Capteur de deplacements et/ou d'angles pourvu d'un enroulement de mesure en meandre |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| US20020030485A1 US20020030485A1 (en) | 2002-03-14 |
| US6922051B2 true US6922051B2 (en) | 2005-07-26 |
Family
ID=26051689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US09/890,823 Expired - Fee Related US6922051B2 (en) | 1999-02-05 | 1999-12-29 | Displacement and/or angle sensor with a meander-shaped measuring winding |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6922051B2 (fr) |
| EP (1) | EP1151248B1 (fr) |
| AT (1) | ATE264496T1 (fr) |
| WO (1) | WO2000046574A1 (fr) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2367902C1 (ru) * | 2008-03-18 | 2009-09-20 | Маргарита Сергеевна Пристромская | Индуктивный датчик перемещений |
| US20100123302A1 (en) * | 2008-11-18 | 2010-05-20 | Ford Global Technologies, Llc | Inductive vehicle seat position sensor assembly |
| US20120280864A1 (en) * | 2011-05-04 | 2012-11-08 | Polycontact Ag | Position sensor |
| US20200200568A1 (en) * | 2018-12-21 | 2020-06-25 | Industrial Technology Research Institute | Magnetic position sensing device and method |
| CN111351420A (zh) * | 2018-12-21 | 2020-06-30 | 财团法人工业技术研究院 | 磁性位置感知装置与方法 |
| RU210943U1 (ru) * | 2022-02-09 | 2022-05-13 | Открытое акционерное общество "Авангард" | Индукционный датчик положения |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4172918B2 (ja) * | 2001-01-22 | 2008-10-29 | 株式会社ミツトヨ | 電磁誘導型絶対位置トランスデューサ |
| CN101806575B (zh) * | 2010-04-24 | 2012-04-25 | 上海交通大学 | 组合编码式涡流栅绝对位置传感器 |
| GB201117201D0 (en) * | 2011-10-04 | 2011-11-16 | Howard Mark A | Detector |
| US10612943B2 (en) * | 2016-08-24 | 2020-04-07 | Mitutoyo Corporation | Winding and scale configuration for inductive position encoder |
| US10775199B2 (en) * | 2016-08-24 | 2020-09-15 | Mitutoyo Corporation | Winding and scale configuration for inductive position encoder |
| US10520335B2 (en) * | 2016-08-24 | 2019-12-31 | Mitutoyo Corporation | Winding configuration for inductive position encoder |
| US11181395B2 (en) | 2020-03-23 | 2021-11-23 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
| US11067414B1 (en) | 2020-03-23 | 2021-07-20 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
| US11169008B2 (en) | 2020-03-23 | 2021-11-09 | Mitutoyo Corporation | Transmitter and receiver configuration for inductive position encoder |
| US11713983B2 (en) | 2021-06-30 | 2023-08-01 | Mitutoyo Corporation | Sensing winding configuration for inductive position encoder |
| US12072212B2 (en) | 2022-08-31 | 2024-08-27 | Mitutoyo Corporation | Inductive position encoder utilizing transmissive configuration |
| US12072213B2 (en) | 2022-08-31 | 2024-08-27 | Mitutoyo Corporation | Inductive position encoder utilizing slanted scale pattern |
| US12385764B2 (en) | 2022-12-30 | 2025-08-12 | Mitutoyo Corporation | Absolute position encoder utilizing single track configuration |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1638199A1 (de) | 1967-03-21 | 1971-06-24 | Ducellier & Cie | Elektrische Maschine,insbesondere Wechselstromgenerator fuer Kraftfahrzeuge |
| US3906436A (en) | 1973-02-08 | 1975-09-16 | Sumitomo Electric Industries | Detection system for the location of moving objects |
| DE2511683A1 (de) | 1975-03-18 | 1976-09-30 | Metrawatt Gmbh | Induktiver stellungsgeber |
| US4005396A (en) * | 1973-11-16 | 1977-01-25 | Hitachi, Ltd. | Digital displacement sensor with zigzag coils |
| DE2817544A1 (de) | 1977-05-18 | 1978-11-23 | Selca Spa | Absoluter genauigkeitstransduktor zum messen von linien- oder winkelstellungen |
| DE3913861A1 (de) | 1988-05-19 | 1989-11-30 | Ohkura Electric Co | Verlagerungs-detektor |
| FR2682760A1 (fr) | 1991-10-22 | 1993-04-23 | Prototype Mecanique Ind | Capteurs de deplacements lineaires ou angulaires sans contact. |
| WO1995031696A1 (fr) | 1994-05-14 | 1995-11-23 | Scientific Generics Limited | Codeur de position |
| DE19719905A1 (de) | 1996-05-13 | 1997-11-20 | Mitutoyo Corp | Elektronische Schieblehre mit einem induktiven Niederleistungs-Positionswandler |
-
1999
- 1999-12-29 WO PCT/DE1999/004126 patent/WO2000046574A1/fr not_active Ceased
- 1999-12-29 US US09/890,823 patent/US6922051B2/en not_active Expired - Fee Related
- 1999-12-29 AT AT99964472T patent/ATE264496T1/de not_active IP Right Cessation
- 1999-12-29 EP EP99964472A patent/EP1151248B1/fr not_active Expired - Lifetime
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1638199A1 (de) | 1967-03-21 | 1971-06-24 | Ducellier & Cie | Elektrische Maschine,insbesondere Wechselstromgenerator fuer Kraftfahrzeuge |
| US3906436A (en) | 1973-02-08 | 1975-09-16 | Sumitomo Electric Industries | Detection system for the location of moving objects |
| US4005396A (en) * | 1973-11-16 | 1977-01-25 | Hitachi, Ltd. | Digital displacement sensor with zigzag coils |
| DE2511683A1 (de) | 1975-03-18 | 1976-09-30 | Metrawatt Gmbh | Induktiver stellungsgeber |
| GB1502697A (en) | 1975-03-18 | 1978-03-01 | Metrawatt Gmbh | Position transducer |
| US4504832A (en) | 1977-05-18 | 1985-03-12 | Selca S.P.A. | Absolute precision transducer for linear or angular position measurements |
| DE2817544A1 (de) | 1977-05-18 | 1978-11-23 | Selca Spa | Absoluter genauigkeitstransduktor zum messen von linien- oder winkelstellungen |
| DE3913861A1 (de) | 1988-05-19 | 1989-11-30 | Ohkura Electric Co | Verlagerungs-detektor |
| US5055814A (en) | 1988-05-19 | 1991-10-08 | Ohkura Electric Co., Ltd. | Displacement detector |
| FR2682760A1 (fr) | 1991-10-22 | 1993-04-23 | Prototype Mecanique Ind | Capteurs de deplacements lineaires ou angulaires sans contact. |
| WO1995031696A1 (fr) | 1994-05-14 | 1995-11-23 | Scientific Generics Limited | Codeur de position |
| DE19719905A1 (de) | 1996-05-13 | 1997-11-20 | Mitutoyo Corp | Elektronische Schieblehre mit einem induktiven Niederleistungs-Positionswandler |
| US5973494A (en) | 1996-05-13 | 1999-10-26 | Mitutoyo Corporation | Electronic caliper using a self-contained, low power inductive position transducer |
Non-Patent Citations (1)
| Title |
|---|
| Article entitled "Einrichtung zur Lagebestimmung" dated Dec. 15, 1973 No. XP-002137356 (no translation). |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2367902C1 (ru) * | 2008-03-18 | 2009-09-20 | Маргарита Сергеевна Пристромская | Индуктивный датчик перемещений |
| US20100123302A1 (en) * | 2008-11-18 | 2010-05-20 | Ford Global Technologies, Llc | Inductive vehicle seat position sensor assembly |
| CN101738209B (zh) * | 2008-11-18 | 2014-03-12 | 福特全球技术公司 | 感应车辆座椅位置传感器组件 |
| US20120280864A1 (en) * | 2011-05-04 | 2012-11-08 | Polycontact Ag | Position sensor |
| US20200200568A1 (en) * | 2018-12-21 | 2020-06-25 | Industrial Technology Research Institute | Magnetic position sensing device and method |
| CN111351420A (zh) * | 2018-12-21 | 2020-06-30 | 财团法人工业技术研究院 | 磁性位置感知装置与方法 |
| US10948315B2 (en) * | 2018-12-21 | 2021-03-16 | Industrial Technology Research Institute | Magnetic position detecting device and method |
| RU210943U1 (ru) * | 2022-02-09 | 2022-05-13 | Открытое акционерное общество "Авангард" | Индукционный датчик положения |
| RU2817313C1 (ru) * | 2023-10-12 | 2024-04-15 | Акционерное общество "Конструкторское бюро приборостроения им. академика А.Г. Шипунова" | Индукционный датчик положения |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1151248A1 (fr) | 2001-11-07 |
| US20020030485A1 (en) | 2002-03-14 |
| ATE264496T1 (de) | 2004-04-15 |
| EP1151248B1 (fr) | 2004-04-14 |
| WO2000046574A1 (fr) | 2000-08-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AS | Assignment |
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