[go: up one dir, main page]

US3710266A - Ion source device for ion microanalyzer and the like - Google Patents

Ion source device for ion microanalyzer and the like Download PDF

Info

Publication number
US3710266A
US3710266A US00175219A US3710266DA US3710266A US 3710266 A US3710266 A US 3710266A US 00175219 A US00175219 A US 00175219A US 3710266D A US3710266D A US 3710266DA US 3710266 A US3710266 A US 3710266A
Authority
US
United States
Prior art keywords
intermediate electrode
voltage
ion
filament
pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00175219A
Inventor
T Kondo
H Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of US3710266A publication Critical patent/US3710266A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/35—Generators characterised by the type of circuit or by the means used for producing pulses by the use, as active elements, of bipolar semiconductor devices with more than two PN junctions, or more than three electrodes, or more than one electrode connected to the same conductivity region
    • H03K3/352—Generators characterised by the type of circuit or by the means used for producing pulses by the use, as active elements, of bipolar semiconductor devices with more than two PN junctions, or more than three electrodes, or more than one electrode connected to the same conductivity region the devices being thyristors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/53—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
    • H03K3/57—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback the switching device being a semiconductor device

Definitions

  • FIG. 1 A first figure.
  • This invention relates to an ion source device for an ion microanalyzer and the like and, more particularly, to an ion source device of the Duoplasmatron type provided with means for efficiently starting the same.
  • an additional power source for generating for generating.
  • the discharge starting voltage as well as accelerating voltage sources for supplying operation voltages to the intermediate electrode and an anode, must be provided in the conventional devices.
  • An object of this invention is to provide means for supplying a high discharge starting voltage to theinter.
  • Another object of this invention isto provide anion source device which can be started without any additional power source.
  • the invention is characterized by provision thereto.
  • FIG. 1 is a schematic diagram indicating a conventional device of the Duoplasmatron type
  • FIG. 2 shows the relationshipbetween the ion current or electrode current and resistance value of the ins termediate electrode resistor
  • FIG. 3 shows the relationshipbetween the discharge.
  • FIG. 4 is a schematic diagram indicating an embodiment of this invention.
  • a magnet 5 made of ferrite is disposed between said intermediate electrode 2 and an anode 3 so as to insulate these elements from each other and to concentrate the electrons in the space therebetween.
  • a gas of a constant quantity is supplied into a space enclosed by said and an extractor 4 so that the ions are extracted downwardly from said extractor 4 and further are introduced. into an ion microanalyzer (not shown), whereby the ions are directed to a specimen (not shown) in a known manner.
  • each factor shown in FIGS. 2 and 3 depends'upon a gas pressure and other operational conditions and the sizes of the ion source device.
  • curves a, b, and 0 show an anode current, an intermediate electrode current and an ion current for various resistance values of the intermediate electrode resistor, respectively.
  • the ion current as well as the anode current increase in response to increase in the resistancevalue of said resistor 7 so that the discharge efficiency is improved, but in this case, the dischargestarting voltage becomes high.
  • said resistance value is decreased to make said voltage low, the ion current decreases. Therefore,it is apparent that defects are inherent in the conventional device for the above" reasons.
  • the heating power source 8 comprises a rectifying circuit 14 and a smoothing circuit 14' composed of a choke coil 17, and condensers I5 and 16.
  • the electron accelerating voltage source 9 comprises a rectifying circuit 18 and a smoothingcircuit 18' composed of a choke coil 21 and condensers 19 and 20.
  • the AC power is supplied from an .AC power source 11 to both the rectifying circuits l4.and 18 through transformers 12 and 13.
  • the output of thesmoothing circuit 18' of said voltage source9- is connected to the intermediate electrode 2 through an intermediate electrode resistor 22 and a diode 23.
  • a pulse voltage, generating circuit 31 which comprises: a triggering circuit composed of a resistor 26, a condenser 27, and a discharge tube 28; a switching element, such as; for example, a silicon controlled rectifier SCR having a gate g, which is triggered by said triggering circuit; a condenser 30 connected to the output of said voltage source 9 through a resistor 24 whose dischargeoperation is controlled by said ele-' ment SCR; and a transformer 25 whose primary winding is connected inseries withthe switching element SCR across the condenser 30 and whose secondary winding is connected in series with. a condenser 29 and inserted between the intermediate electrode 2 and the filament l.
  • a switching element such as; for example, a silicon controlled rectifier SCR having a gate g, which is triggered by said triggering circuit
  • a condenser 30 connected to the output of said voltage source 9 through a resistor 24 whose dischargeoperation is controlled by said ele-' ment SCR
  • the condenser 30 is charged by the output of the smoothing circuit 18' through the resistor 24 and the condenser 27 is charged through resistors 22 and 26, to thereby increase the terminal voltages thereacross, respectively.
  • the voltage across the condenser 27 reaches at a certain level which is large enough to cause the discharge tube 28 to discharge, it discharges, so that'a trigger current is supplied to the gate electrode of said switching element SCR and thus it becomes conductive, i.e., it is switched to its ON state.
  • the pulse voltage is predetermined to have a value equal to that of said discharge starting voltage, discharge can be started and the ion source device begins to operate. In this case, application of the pulse voltage having, a high voltage value to the smoothing circuit 18 is prevented by the diode 23.
  • the intermediate electrode current flows into the intermediate electrode 2 through the resistor 22, so that the voltage applied to the condenser 27 drops and the terminal voltage thereacross does not reach said certain level. Therefore, since the switching element SCR is not triggered, no pulse voltage is applied to the intermediate electrode 2 during normal operation of the ion source device.
  • the discharge efficiency of said ion source device can be greatly improved.
  • the amplitude of the pulse voltage serving as said discharge starting voltage can be varied freely by changing the turn ratio of the transformer 25.
  • an ion source device for an ion microanalyzer and the like comprising a filament for emitting electrons when energized, a heating power source connected to said filament for energizing said filament, an intermediate electrode for accelerating said electrons, an electron accelerating voltage source connected between said filament and said intermediate electrode for supplying therebetween an electron accelerating voltage, an intermediate electrode resistor connected between said electron accelerating voltage source and said intermediate electrode, means for supplying a gas into a space adjacent to said intermediate electrode, an anode for accelerating ions produced in said space, a magnet disposed between said intermediate electrode and said anode for insulating said elements from one another and for concentrating said ions, an extractor for extracting said ions, and an ion accelerating voltage source connected between said anode and said extractor, the improvement which comprises pulse voltage generating means connected in series circuit with said. intermediate electrode and said electron accelerating voltage source for supplying a pulse voltage between said intermediate electrode and said filament only to start discharge in said ion source device.
  • said pulse voltage generating means includes a triggering circuit, means for supplying said triggering circuit with a potential obtained by subtraction of the voltage drop across said intermediate electrode resistor from the voltage of the electron accelerating voltage source for operatively generating a trigger voltage when the supplied potential exceeds the discharge starting voltage of said ion source device, a switching element having a gate triggered by the trigger voltage of said triggering circuit, a pulse transformer having primary and secondary coils, and a first condenser connected in parallel with a series circuit of the primary coil of said pulse transformer and said switching element.
  • the triggering circuit includes a second condenser connected to the intermediate electrode resistor and a discharge tube connected between said second condenser and the gate of said switching element for initiating its discharge when the voltage across said

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)

Abstract

A pulse voltage generating circuit incorporated in an ion source device of the type so as to supply a pulse voltage to an intermediate electrode of the device thereby to allow discharge to occur in said device with high efficiency.

Description

United States Patent 11 1 Kondo et al.
1111 3,710,266 Jan. 9,1973
54] ION SOURCE DEVICE FOR ION MICROANALYZER AND THE LIKE [75] Inventors: Toshio Kondo, Kokubunji; Hifunii Tamura, Hachioji, both of Japan 731 Assignee: 111mm, 1,111., Tokyo, Japan 22 Filed: Aug.26, 1971 21 Appl.No.: 175,219
[30] Foreign Application Priority Data Aug. 26,1970 Japan ..45 s4401 52 U.S.Cl. ..328/233,250/49.5R,313/63,
5s FieldofSearch ..313/63;'315/111;328/253;
[56] References Cited UNITED STATES PATENTS 3,178,578 4/1965 Gale ..250/49.5 R X 3,290,552 12/1966 Van Ornum 1 ..3 15/1 11 3,458,743 7/1969 Cleland et al.... ..328/233 X 3,494,852 2/1970 Doctoroff ..313/63 X 3,513,351 5/1970 Kelley ..313/63 X Primary Examiner-Alfred L. Brody Attorney-Craig", Antonelli & Hill 57 ABSTRACT A pulse voltage generating circuit incorporated in an ion source device of the type so as to supply a pulse voltage to an intermediate electrode of the device thereby to allow discharge to occur in said device with high efficiency.
5 Claims, 4 Drawing Figures PATENTEDJAH 9197s wzwmmnozg M A i ,m 4 2 OM W 2 Mwm V o m F am am OR \I 2 A m M Q 0 .Emmmno M50585 m F Mm w 01% mwmaiomfi 022.15%
FIG.
ION ACCEL- ERATING SCR ION ACCELER- ATING VOLT- AGE SOURCE QRNEYS ION SOURCE DEVICE FOR ION MICROANALYZER AND THE LIKE BACKGROUND OF THE INVENTION 1 Field of the Invention This invention relates to an ion source device for an ion microanalyzer and the like and, more particularly, to an ion source device of the Duoplasmatron type provided with means for efficiently starting the same.
2. Description of the Prior Art As is well-known, an ion source device of the Duoplasmatron type is used in an ion microanalyzer.
Hitherto, such an ion source device has been so con structed that a discharge starting voltage is applied to an intermediate electrode thereof through an inter.- mediate electrode resistor so as to startthedischarge which occurs therein. In order to increase the discharge efficiency of said device, the resistance value of saidresistor must be increased so that the discharge starting voltage becomes high. However, in such conventional devices, sincethe resistance value ofthe resistor must be decreased to make the discharge starting voltage low, the discharge efficiency thereof decreases.
Moreover, an additional power source for generating.
the discharge starting voltage, as well as accelerating voltage sources for supplying operation voltages to the intermediate electrode and an anode, must be provided in the conventional devices.
SUMMARY OF THE INVENTION An object of this invention is to provide means for supplying a high discharge starting voltage to theinter.
mediate electrode to which the resistor having ahigh resistance value is normally connected so as to increase the discharge efficiency.
Another object of this invention isto provide anion source device which can be started without any additional power source.
The invention is characterized by provision thereto.
of pulse voltage generating means for supplying a pulse voltage as said discharge starting voltage to the intermediate electrode so as to start the discharge of electrons in said ion source devices a BRIEF DESCRIPTION OFTHE DRAWINGS FIG. 1 is a schematic diagram indicating a conventional device of the Duoplasmatron type;
FIG. 2 shows the relationshipbetween the ion current or electrode current and resistance value of the ins termediate electrode resistor;
FIG. 3 shows the relationshipbetween the discharge.
starting voltage and said resistance value; and
FIG. 4 is a schematic diagram indicating an embodiment of this invention.
DESCRIPTION OF A PREFERRED EMBODIMENT emitted from said filament.
A magnet 5 made of ferrite is disposed between said intermediate electrode 2 and an anode 3 so as to insulate these elements from each other and to concentrate the electrons in the space therebetween. A gas of a constant quantity is supplied into a space enclosed by said and an extractor 4 so that the ions are extracted downwardly from said extractor 4 and further are introduced. into an ion microanalyzer (not shown), whereby the ions are directed to a specimen (not shown) in a known manner.
In the above device, each factor shown in FIGS. 2 and 3 depends'upon a gas pressure and other operational conditions and the sizes of the ion source device. In FIG. 2, curves a, b, and 0 show an anode current, an intermediate electrode current and an ion current for various resistance values of the intermediate electrode resistor, respectively. As is apparent from said figures, the ion current as well as the anode current increase in response to increase in the resistancevalue of said resistor 7 so that the discharge efficiency is improved, but in this case, the dischargestarting voltage becomes high. On: the other hand, if said resistance value is decreased to make said voltage low, the ion current decreases. Therefore,it is apparent that defects are inherent in the conventional device for the above" reasons.
According to the invention, the above defects can be eliminated by employment of pulse voltage generating means, as shownin FIG. 4, wherein numerals 8 and 9 show said heating power source and said electron accelerating voltage source, respectively. The heating power source 8 comprises a rectifying circuit 14 and a smoothing circuit 14' composed of a choke coil 17, and condensers I5 and 16. The electron accelerating voltage source 9 comprises a rectifying circuit 18 and a smoothingcircuit 18' composed of a choke coil 21 and condensers 19 and 20. The AC power is supplied from an .AC power source 11 to both the rectifying circuits l4.and 18 through transformers 12 and 13.
The output of thesmoothing circuit 18' of said voltage source9-is connected to the intermediate electrode 2 through an intermediate electrode resistor 22 and a diode 23.
There is a pulse voltage, generating circuit 31 which comprises: a triggering circuit composed of a resistor 26, a condenser 27, and a discharge tube 28; a switching element, such as; for example, a silicon controlled rectifier SCR having a gate g, which is triggered by said triggering circuit; a condenser 30 connected to the output of said voltage source 9 through a resistor 24 whose dischargeoperation is controlled by said ele-' ment SCR; and a transformer 25 whose primary winding is connected inseries withthe switching element SCR across the condenser 30 and whose secondary winding is connected in series with. a condenser 29 and inserted between the intermediate electrode 2 and the filament l.
Now, supposing that discharge does not occur in the ion source device and thus the intermediate current does not flow into the intermediate electrode 2, the condenser 30 is charged by the output of the smoothing circuit 18' through the resistor 24 and the condenser 27 is charged through resistors 22 and 26, to thereby increase the terminal voltages thereacross, respectively. When the voltage across the condenser 27 reaches at a certain level which is large enough to cause the discharge tube 28 to discharge, it discharges, so that'a trigger current is supplied to the gate electrode of said switching element SCR and thus it becomes conductive, i.e., it is switched to its ON state. As a result of this, a pulse current flows through the primary winding of the transformer 25 and said element SCR from said condenser 30 due to its discharging. At this time, a pulse high voltage is induced in the secondary winding of the transformer 25 and is applied to the intermediate electrode 2 through a condenser 29.
Therefore, if the pulse voltage is predetermined to have a value equal to that of said discharge starting voltage, discharge can be started and the ion source device begins to operate. In this case, application of the pulse voltage having, a high voltage value to the smoothing circuit 18 is prevented by the diode 23.
When discharge starts in the above manner, the intermediate electrode current flows into the intermediate electrode 2 through the resistor 22, so that the voltage applied to the condenser 27 drops and the terminal voltage thereacross does not reach said certain level. Therefore, since the switching element SCR is not triggered, no pulse voltage is applied to the intermediate electrode 2 during normal operation of the ion source device.
In the device described above, by causing the intermediate electrode resistor 22 to have a sufficient resistance value, the discharge efficiency of said ion source device can be greatly improved. Moreover, the amplitude of the pulse voltage serving as said discharge starting voltage can be varied freely by changing the turn ratio of the transformer 25.
We claim:
1. In an ion source device for an ion microanalyzer and the like comprising a filament for emitting electrons when energized, a heating power source connected to said filament for energizing said filament, an intermediate electrode for accelerating said electrons, an electron accelerating voltage source connected between said filament and said intermediate electrode for supplying therebetween an electron accelerating voltage, an intermediate electrode resistor connected between said electron accelerating voltage source and said intermediate electrode, means for supplying a gas into a space adjacent to said intermediate electrode, an anode for accelerating ions produced in said space, a magnet disposed between said intermediate electrode and said anode for insulating said elements from one another and for concentrating said ions, an extractor for extracting said ions, and an ion accelerating voltage source connected between said anode and said extractor, the improvement which comprises pulse voltage generating means connected in series circuit with said. intermediate electrode and said electron accelerating voltage source for supplying a pulse voltage between said intermediate electrode and said filament only to start discharge in said ion source device. l
. The combination defined in claim 1, wherein said pulse voltage generating means includes a triggering circuit, means for supplying said triggering circuit with a potential obtained by subtraction of the voltage drop across said intermediate electrode resistor from the voltage of the electron accelerating voltage source for operatively generating a trigger voltage when the supplied potential exceeds the discharge starting voltage of said ion source device, a switching element having a gate triggered by the trigger voltage of said triggering circuit, a pulse transformer having primary and secondary coils, and a first condenser connected in parallel with a series circuit of the primary coil of said pulse transformer and said switching element.
3. The combination defined in claim 2, wherein the triggering circuit includes a second condenser connected to the intermediate electrode resistor and a discharge tube connected between said second condenser and the gate of said switching element for initiating its discharge when the voltage across said

Claims (5)

1. In an ion source device for an ion microanalyzer and the like comprising a filament for emitting electrons when energized, a heating power source connected to said filament for energizing said filament, an intermediate electrode for accelerating said electrons, an electron accelerating voltage source connected between said filament and said intermediate electrode for supplying therebetween an electron accelerating voltage, an intermediate electrode resistor connected between said electron accelerating voltage source and said intermediate electrode, means for supplying a gas into a space adjacent to said intermediate electrode, an anode for accelerating ions produced in said space, a magnet disposed between said intermediate electrode and said anode for insulating said elements from one another and for concentrating said ions, an extractor for extracting said ions, and an ion accelerating voltage source connected between said anode and said extractor, the improvement which comprises pulse voltage generating means connected in series circuit with said intermediate electrode and said electron accelerating voltage source for supplying a pulse voltage between said intermediate electrode and said filament only to start discharge in said ion source device.
2. The combination defined in claim 1, wherein said pulse voltage generating means includes a triggering circuit, means for supplying said triggering circuit with a potential obtained by subtraction of the voltage drop across said intermediate electrode resistor from the voltage of the electron accelerating voltage source for operatively generating a trigger voltage when the supplied potential exceeds the discharge starting voltage of said ion source device, a switching element having a gate triggered by the trigger voltage of said triggering circuit, a pulse transformer having primary and secondary coils, and a first condenser connected in parallel with a series circuit of the primary coil of said pulse transformer and said switching element.
3. The combination defined in claim 2, wherein the triggering circuit includes a second condenser connected to the intermediate electrode resistor and a discharge tube connected between said second condenser and the gate of said switching element for initiating its discharge when the voltage across said second condenser exceeds the discharge starting voltage.
4. The combination defined in claim 2, wherein the secondary coil of said pulse transformer is connected between the intermediate electrode and the filament.
5. The combination defined in claim 1, wherein a diode is connected between said intermediate electrode and said intermediate electrode resistor for preventing application of the pulse voltage from said puLse voltage generating means to said electron accelerating voltage source.
US00175219A 1970-08-26 1971-08-26 Ion source device for ion microanalyzer and the like Expired - Lifetime US3710266A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1970084401U JPS5035280Y1 (en) 1970-08-26 1970-08-26

Publications (1)

Publication Number Publication Date
US3710266A true US3710266A (en) 1973-01-09

Family

ID=33069845

Family Applications (1)

Application Number Title Priority Date Filing Date
US00175219A Expired - Lifetime US3710266A (en) 1970-08-26 1971-08-26 Ion source device for ion microanalyzer and the like

Country Status (2)

Country Link
US (1) US3710266A (en)
JP (1) JPS5035280Y1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4642518A (en) * 1984-03-23 1987-02-10 Sciaky S.A. Installation of electron beam metalworking
RU2173033C2 (en) * 1999-08-27 2001-08-27 Российский Федеральный Ядерный Центр - Всероссийский Научно-Исследовательский Институт Экспериментальной Физики Generator-former of electromagnetic pulse ( versions )
RU2242849C2 (en) * 2003-01-10 2004-12-20 Самарский государственный аэрокосмический университет им. академика С.П. Королева Charged dust particle source
RU2398350C1 (en) * 2009-04-13 2010-08-27 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Method of generating current pulse for liner acceleration with pulsed source magnetic field
US20110220810A1 (en) * 2010-03-10 2011-09-15 Samsung Mobile Display Co., Ltd. Ion doping apparatus and doping method thereof
RU2532688C1 (en) * 2013-05-07 2014-11-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Самарский государственный аэрокосмический университет имени академика С.П. Королева (национальный исследовательский университет)" (СГАУ) Charged dust particle injector

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3178578A (en) * 1961-03-03 1965-04-13 High Voltage Engineering Corp Electron pulser for an x-ray tube to produce a pulsed beam of x-rays
US3290552A (en) * 1964-04-21 1966-12-06 Giannini Scient Corp Apparatus for generating high-intensity light with high temperature particulate material
US3458743A (en) * 1966-12-19 1969-07-29 Radiation Dynamics Positive ion source for use with a duoplasmatron
US3494852A (en) * 1966-03-14 1970-02-10 Whittaker Corp Collimated duoplasmatron-powered deposition apparatus
US3513351A (en) * 1968-06-26 1970-05-19 Atomic Energy Commission Duoplasmatron-type ion source including a gas reservoir

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3178578A (en) * 1961-03-03 1965-04-13 High Voltage Engineering Corp Electron pulser for an x-ray tube to produce a pulsed beam of x-rays
US3290552A (en) * 1964-04-21 1966-12-06 Giannini Scient Corp Apparatus for generating high-intensity light with high temperature particulate material
US3494852A (en) * 1966-03-14 1970-02-10 Whittaker Corp Collimated duoplasmatron-powered deposition apparatus
US3458743A (en) * 1966-12-19 1969-07-29 Radiation Dynamics Positive ion source for use with a duoplasmatron
US3513351A (en) * 1968-06-26 1970-05-19 Atomic Energy Commission Duoplasmatron-type ion source including a gas reservoir

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4642518A (en) * 1984-03-23 1987-02-10 Sciaky S.A. Installation of electron beam metalworking
RU2173033C2 (en) * 1999-08-27 2001-08-27 Российский Федеральный Ядерный Центр - Всероссийский Научно-Исследовательский Институт Экспериментальной Физики Generator-former of electromagnetic pulse ( versions )
RU2242849C2 (en) * 2003-01-10 2004-12-20 Самарский государственный аэрокосмический университет им. академика С.П. Королева Charged dust particle source
RU2398350C1 (en) * 2009-04-13 2010-08-27 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Method of generating current pulse for liner acceleration with pulsed source magnetic field
US20110220810A1 (en) * 2010-03-10 2011-09-15 Samsung Mobile Display Co., Ltd. Ion doping apparatus and doping method thereof
RU2532688C1 (en) * 2013-05-07 2014-11-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Самарский государственный аэрокосмический университет имени академика С.П. Королева (национальный исследовательский университет)" (СГАУ) Charged dust particle injector

Also Published As

Publication number Publication date
JPS5035280Y1 (en) 1975-10-14

Similar Documents

Publication Publication Date Title
US4061986A (en) Soft power supply for pulsed laser
US2478907A (en) Flash-producing device
US2292835A (en) Electronic generator
US3310723A (en) High voltage power supply for photographic flash apparatus
US3710266A (en) Ion source device for ion microanalyzer and the like
US3072822A (en) Emission current regulator
US3320477A (en) Power supply having over-voltage and over-current protection means
US3912968A (en) Flash tube discharge-producing circuit
US3275883A (en) Emission current regulator for ion gauge
US2499484A (en) Voltage rectifying circuit
US2443100A (en) Electronic device
US3328703A (en) High efficiency pulse modulator
US2896124A (en) Gaseous glow tube circuits
US3263125A (en) Current limiting circuits and apparatus for operating electric discharge devices and other loads
US3678289A (en) Magnetic field control circuit for crossed field switching devices
US3611027A (en) Magnetron operating circuit
US3189789A (en) Ignition circuit for a discharge lamp
US3354322A (en) Turn-off arrangement for a direct current switching device which is rendered non-conducting by the application of a reverse voltage
US3766433A (en) Crowbar circuit responsive to decrease in the power supply
US3238390A (en) Bidirectional switch with particular slave control means including pair of serially-connected oppositely poled diodes
US3497768A (en) One shot operation circuit for a gas discharge lamp
US2728886A (en) Electric control circuit
US2291864A (en) Electric discharge device
US3098947A (en) Electrical systems including capacitors
US2591825A (en) Gas tube circuit