US3628125A - Direct current high-voltage generator - Google Patents
Direct current high-voltage generator Download PDFInfo
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- US3628125A US3628125A US107181A US3628125DA US3628125A US 3628125 A US3628125 A US 3628125A US 107181 A US107181 A US 107181A US 3628125D A US3628125D A US 3628125DA US 3628125 A US3628125 A US 3628125A
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- secondary winding
- voltage generator
- direct current
- multiplier
- transformer
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- 239000003990 capacitor Substances 0.000 claims abstract description 17
- 230000003071 parasitic effect Effects 0.000 claims abstract description 9
- 238000004804 winding Methods 0.000 claims description 62
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000006842 Henry reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of AC power input into DC power output; Conversion of DC power input into AC power output
- H02M7/02—Conversion of AC power input into DC power output without possibility of reversal
- H02M7/04—Conversion of AC power input into DC power output without possibility of reversal by static converters
- H02M7/06—Conversion of AC power input into DC power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode
- H02M7/10—Conversion of AC power input into DC power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode arranged for operation in series, e.g. for multiplication of voltage
- H02M7/103—Containing passive elements (capacitively coupled) which are ordered in cascade on one source
Definitions
- the present invention relates to a direct current high-voltage generator, and more particularly to a'power supply including a regulatory transformer for a voltage multiplier of the Cockroft-Walton type.
- a multiplier comprising a column of capacitors which are supplied by means of rectifiers with a charging voltage so that the voltages are added up to the extend of the number of stages in the column.
- Two bases of the column connected to respective capacitor lines are supplied from the secondary winding of a step-up voltage transformer, and the central point of this secondary winding is connected to the base of the rectifier line ofthe column.
- the highest possible voltage which may be obtained from a standard generator; for example, a supply voltage provided by a high-frequency high-voltage generator.
- the direct current voltage that is furnished must have a high degree of precision and should contain only a minimum of alternating components.
- the generator according to the present invention makes it possible to obviate these drawbacks.
- the generator proposed by the present invention comprises an alternating current source and a multiplier of the Cockroft- Walton type consisting of a capacitor column, referred to as a power output column, which is supplied symmetricallyfrom two so-called capacitor feed or supply lines, the bases of the capacitor lines in the column being fed or supplied from the alternating current source, one median terminal of this secondary winding being connected to the base of the rectifier line of the column.
- the present invention is characterized in that each of the bases of the column connected to the two supply lines is connected to ground by means of a variable capacitor, and a regulating inductance is connected across the secondary winding supplying voltage to the column via these supply lines.
- the invention includes a conventional low-frequency generator of IO kHz. consisting for example of two triode tubes 1 and 2 mounted in a push-pull fashion and to whose grids 3 and 4 are applied voltages in phase opposition.
- the tubes 1 and 2 operate in class B.
- the generator may produce 10 kw. of power and a maximum voltage between peaks of H5 kv.
- the transformer 8 steps the voltage from the transformer 6 up to I75 kv. Since the primary winding 9 ofthe transformer 8 is a single winding, the same sinusoidal current flows through the entire winding because all of the turns thereof are traversed by the same flux. An electrostatic screen (not shown) connected to ground prevents any capacitive coupling between the two windings 7 and 9.
- the secondary winding 10 of the step-up voltage transformer 8 is connected at the ends thereof to the bases 11 and 12 of two capacitor lines of the column forming the voltage multiplier 13 of the Cockroft-Walton type.
- the reactive energy which is produced by the parasitic capacitances of the transformer 8 is compensated for by the reactive energy that is absorbed by a tuning inductance 17 connected across the terminals of the secondary winding 10.
- a regulatable coil 14 connected to selected intermediate terminals of the secondary winding 10 is equipped with a slide contact !5 which is connected to the base 16 of the rectifier line of the multiplier 13. An adequate displacement of the slide contact l5 and adjustment of the position of the coil 14 on the intermediate terminals of the secondary winding 10 makes it possible to obtain a reduction of the undulation to l0 kHz.
- two regulatable capacitive compensators l8 and 19 make it possible to obtain a symmetry of the parasitic capacitances with respect to the secondary winding 10 of the transformer 8 and those parasitic capacitances fed back to the input terminals 11 and 12 from the multiplier 13. Furthermore, these compensators allow for a more perfect tuning of the inductance 17.
- the output of the transformer 8 is thus rendered perfectly symmetrical in both amplitude and phase, which makes it possible to reduce to a minimum the portion of the residual undulation at the supply frequency in the multiplier l3.
- the tuning inductance 17 may be two henrys; while the capacitive compensators l8 and 19 are in the order of 5 picofarads. It is understood that the actual tuning of the resonant circuit is obtained form the balance of the parasitic capacitances originating in the inductance of the secondary winding [0, from the tuning inductance l7 and from the circuits linked with the multiplier 13.
- the slide contactlS receives from a regulation amplifier 20 a counter-reaction voltage which may increase up to 40 kv.
- This counter-reaction voltage is amplified in accordance with the variations in the very high voltage furnished by the voltage multiplier 13. However, the variations obtained do not exceed the 5 millionth part of the very high voltage, which may be 3 million volts.
- the generator with which the present invention is concerned may be used in all cases where a high and stable voltage may be assured with a great deal of precision.
- One application of the present invention which is of particular interest is the acceleration of electrons in an electron microscope.
- a direct current high-voltage generator comprising a voltage multiplier of the Cockroft-Walton type having first and second capacitor lines and a central rectifier line forming a plural stage multiplier column.
- an alternating current source a principal supply transformer having a primary winding connected to said alternating current source and a secondary winding connected at respective ends to said first and second capacitor lines of said multiplier column, a regulating inductor connected across said secondary winding of said principal supply transformer, and a pair of variable capacitors connecting respective ends of said secondary winding of said principal supply transformer to ground, at least one tap of said secondary winding being connected to said central rectifier line of said multiplier column.
- a direct current high-voltage generator comprising a voltage multiplier of the Cockroft-Walton type, an alternating current source. a principle supply transformer having a primary winding connected to said alternating current source and a secondary winding connected to said voltage multiplier, and a pair of variable capacitors connecting respective ends of said secondary winding to ground, for reducing the residual alternating components at the supply frequency.
- said alternating current source includes an auxiliary transformer having a pair of primary windings connected in push-pull to a voltage generator and a secondary winding having a grounded center tap and being connected to the primary winding of said principle supply transformer.
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Rectifiers (AREA)
- Control Of Eletrric Generators (AREA)
Abstract
A direct current voltage generator which makes it possible to reduce the residual undulations originating from the alternating current source therein, including a first and a second transformer connected to a generator of the Cockroft-Walton type, two variable capacitors, and a coil with a slide contact connected to the secondary circuit of the second transformer for reducing the residual undulations at the supply frequency and an inductance for tuning the parasitic capacitances of the secondary circuit.
Description
United States Patent Inventor Paul Dedleu Bourg-la-Relne, France App]. No. 107,181
Filed Jan. 18, 1971 Patented Dec. 14, 1971 v Assignee Soclete Alsacienne de Constructions Atomiques, de Telecommunications et dElectronique (Alcatel) Paris, France Priority Jan. 16, 1970 France 7001609 DIRECT CURRENT HIGH-VOLTAGE GENERATOR 8 Claims, 1 Drawlng Fig.
U.S. Cl 321/15 Int. Cl H0211] 7/00 Field ofScarch 307/110;
[56] References Cited UNITED STATES PATENTS 2,619,602 ll/1952 Walker etal. 321/15 X 3,320,513 5/1967 Cleland 321/15 3,484,866 12/1969 Nakamura et al. 321/15 3,539,903 11/1970 Goebel 321/15 Primary Examiner-William M. Shoop, .lr. AtwrneyCraig, Antonelli and Hill ABSTRACT: A direct current voltage generator which makes it possible to reduce the residual undulations originating from the alternating current source therein, including a first and a second transformer connected to a generator of the Cockroft- Walton type. two variable capacitors, and a coil with a slide contact connected to the secondary circuit of the second transformer for reducing the residual undulations at the supply frequency and an inductance for tuning the parasitic capacitances ofthe secondary circuit.
Patented Dec. 14, 1971 3,628,125
BY: (lung ,qmhuf'w RTTORNEYS DIRECT CURRENT HIGH-VOLTAGE GENERATOR The present invention relates to a direct current high-voltage generator, and more particularly to a'power supply including a regulatory transformer for a voltage multiplier of the Cockroft-Walton type.
It is known in the art that it is possible to obtain very high direct current voltages by virtue of a multiplier comprising a column of capacitors which are supplied by means of rectifiers with a charging voltage so that the voltages are added up to the extend of the number of stages in the column. The greater the number of stages in the column, the higher is the voltage generated. Two bases of the column connected to respective capacitor lines are supplied from the secondary winding of a step-up voltage transformer, and the central point of this secondary winding is connected to the base of the rectifier line ofthe column. At the primary winding of this transformer, there is provided the highest possible voltage which may be obtained from a standard generator; for example, a supply voltage provided by a high-frequency high-voltage generator.
When the voltage multiplier supplies an electron beam accelerator, as in the case of an electron microscope, the direct current voltage that is furnished must have a high degree of precision and should contain only a minimum of alternating components. a
The transformers which have been utilized to date in conjunction with voltage multipliers of the Cockroft-Walton type have the drawback that dissymmetry of the stray or leakage inductances and of the parasitic capacitances cannot be avoided therein, since these quantities are never equal in the two windings, which increases the residual undulations at the operating frequency. It is known in fact that this spurious frequency is always present at the output of a Cockroft-Walton generator.
The generator according to the present invention makes it possible to obviate these drawbacks. By virtue of the present invention, it is possible, in fact, to reduce the residual undulations by means which perfect the symmetry of the elements of the transformer connected to the voltage multiplier and by employing resonant circuits which are tuned to the operating frequency of the generator.
The generator proposed by the present invention comprises an alternating current source and a multiplier of the Cockroft- Walton type consisting of a capacitor column, referred to as a power output column, which is supplied symmetricallyfrom two so-called capacitor feed or supply lines, the bases of the capacitor lines in the column being fed or supplied from the alternating current source, one median terminal of this secondary winding being connected to the base of the rectifier line of the column. The present invention is characterized in that each of the bases of the column connected to the two supply lines is connected to ground by means of a variable capacitor, and a regulating inductance is connected across the secondary winding supplying voltage to the column via these supply lines.
One embodiment of the present invention, which is dis closed solely for purposes of illustration and is by no means intended to be a limit on the scope of the invention, will now be further described hereinafter. taken in connection with the accompanying drawing, the single FIGURE of which represents schematically one embodiment of the present invention.
As illustrated in the FIGURE, the invention includes a conventional low-frequency generator of IO kHz. consisting for example of two triode tubes 1 and 2 mounted in a push-pull fashion and to whose grids 3 and 4 are applied voltages in phase opposition. The tubes 1 and 2 operate in class B. On the very tightly coupled windings of the primary 5 at the central point of a transformer 6, there appear currents originating from the plates of tubes 1' and 2, each of these currents forming half of a sinusoidal curve, as is well known in push-pull circuits. On the symmetrical secondary winding 7 of the transformer 6, there appears a sine curve which is produced due to the combination of the two half cycles. This symmetry of the two half cycles is particularly advantageous in order to reduce the degree or ratio of residual waveform variations or undulations. The generator may produce 10 kw. of power and a maximum voltage between peaks of H5 kv.
The transformer 8 steps the voltage from the transformer 6 up to I75 kv. Since the primary winding 9 ofthe transformer 8 is a single winding, the same sinusoidal current flows through the entire winding because all of the turns thereof are traversed by the same flux. An electrostatic screen (not shown) connected to ground prevents any capacitive coupling between the two windings 7 and 9.
The secondary winding 10 of the step-up voltage transformer 8 is connected at the ends thereof to the bases 11 and 12 of two capacitor lines of the column forming the voltage multiplier 13 of the Cockroft-Walton type. According to this invention, the reactive energy which is produced by the parasitic capacitances of the transformer 8 is compensated for by the reactive energy that is absorbed by a tuning inductance 17 connected across the terminals of the secondary winding 10. A regulatable coil 14 connected to selected intermediate terminals of the secondary winding 10 is equipped with a slide contact !5 which is connected to the base 16 of the rectifier line of the multiplier 13. An adequate displacement of the slide contact l5 and adjustment of the position of the coil 14 on the intermediate terminals of the secondary winding 10 makes it possible to obtain a reduction of the undulation to l0 kHz.
In addition, two regulatable capacitive compensators l8 and 19 make it possible to obtain a symmetry of the parasitic capacitances with respect to the secondary winding 10 of the transformer 8 and those parasitic capacitances fed back to the input terminals 11 and 12 from the multiplier 13. Furthermore, these compensators allow for a more perfect tuning of the inductance 17. The output of the transformer 8 is thus rendered perfectly symmetrical in both amplitude and phase, which makes it possible to reduce to a minimum the portion of the residual undulation at the supply frequency in the multiplier l3.
The tuning inductance 17 may be two henrys; while the capacitive compensators l8 and 19 are in the order of 5 picofarads. It is understood that the actual tuning of the resonant circuit is obtained form the balance of the parasitic capacitances originating in the inductance of the secondary winding [0, from the tuning inductance l7 and from the circuits linked with the multiplier 13.
The slide contactlS receives from a regulation amplifier 20 a counter-reaction voltage which may increase up to 40 kv. This counter-reaction voltage is amplified in accordance with the variations in the very high voltage furnished by the voltage multiplier 13. However, the variations obtained do not exceed the 5 millionth part of the very high voltage, which may be 3 million volts.
Although the device described herein appears to be the most advantageous one for the purpose of carrying out the present invention in a particular technical application, it is to be understood that various modifications may be applied thereto without departing from the spirit and scope of the invention, and that it is quite possible to replace certain elements by different ones that will assure the same technical function.
The generator with which the present invention is concerned may be used in all cases where a high and stable voltage may be assured with a great deal of precision. One application of the present invention which is of particular interest is the acceleration of electrons in an electron microscope.
What is claimed is:
l. A direct current high-voltage generator comprising a voltage multiplier of the Cockroft-Walton type having first and second capacitor lines and a central rectifier line forming a plural stage multiplier column. an alternating current source, a principal supply transformer having a primary winding connected to said alternating current source and a secondary winding connected at respective ends to said first and second capacitor lines of said multiplier column, a regulating inductor connected across said secondary winding of said principal supply transformer, and a pair of variable capacitors connecting respective ends of said secondary winding of said principal supply transformer to ground, at least one tap of said secondary winding being connected to said central rectifier line of said multiplier column.
2. A direct current high-voltage generator as defined in claim 1. wherein the secondary winding of said principal supply transformer is provided with a plurality of taps, an aux iliary winding selectively connectable to said taps and having a sliding contact thereon connected to said central rectifier line of said multiplier column.
3. A direct current high-voltage generator as defined in claim 1, wherein said alternating current source includes an auxiliary transformer having a pair of primary windings connected in push-pull to a voltage generator and a secondary winding having a grounded center tap and being connected to the primary winding of said principal supply transformer.
4. A direct current high-voltage generator as defined in claim 3, wherein the secondary winding of said principle supply transformer is provided with a plurality of taps, an auxiliary winding selectively connectable to said taps, and having a sliding contact thereon connected to said central rectifier line of said multiplier column.
5. A direct current high-voltage generator comprising a voltage multiplier of the Cockroft-Walton type, an alternating current source. a principle supply transformer having a primary winding connected to said alternating current source and a secondary winding connected to said voltage multiplier, and a pair of variable capacitors connecting respective ends of said secondary winding to ground, for reducing the residual alternating components at the supply frequency.
6. A direct current high-voltage generator as defined in claim 5, further including means for tuning the parasitic capacitances of the secondary winding of said principle supply transfonner consisting of an inductance connected across said secondary winding.
7. A direct current high-voltage generator as defined in claim 6. wherein the secondary winding of said principal supply transformer is provided with a plurality of taps, an auxiliary winding selectively connectable to said taps and having a sliding contact thereon connected to said multiplier column.
8. A direct current high voltage generator as defined in claim 7, wherein said alternating current source includes an auxiliary transformer having a pair of primary windings connected in push-pull to a voltage generator and a secondary winding having a grounded center tap and being connected to the primary winding of said principle supply transformer.
l l l t
Claims (8)
1. A direct current high-voltage generator comprising a voltage multiplier of the Cockroft-Walton type having first and second capacitor lines and a central rectifier line forming a plural stage multiplier column, an alternating current source, a principal supply transformer having a primary winding connected to said alternating current source and a secondary winding connected at respective ends to said first and second capacitor lines of said multiplier column, a regulating inductor connected across said secondary winding of said principal supply transformer, and a pair of variable capacitors connecting respective ends of said secondary winding of said principle supply transformer to ground, at least one tap of said secondary winding being connected to said central rectifier line of said multiplier column.
2. A direct current high-voltage generator as defined in claim 1, wherein the secondary winding of said principle supply transformer is provided with a plurality of taps, an auxiliary winding selectively connectable to said taps and having a sliding contact thereon connected to said central rectifier line of said multiplier column.
3. A direct current high-voltage generator as defined in claim 1, wherein said alternating current source includes an auxiliary transformer having a pair of primary windings connected in push-pull to a voltage generator and a secondary winding having a grounded center tap and being connected to the primary winding of said principle supply transformer.
4. A direct current high-voltage generator as defined in claim 3, wherein the secondary winding of said principle supply transformer is provided with a plurality of taps, an auxiliary winding selectively connectable to said taps, and having a sliding contact thereon connected to said central rectifier line of said multiplier column.
5. A direct current high-voltage generator comprising a voltage multiplier of the Cockroft-Walton type, an alternating current source, a principle supply transformer having a primary winding connected to said alternating current source and a secondary winding connected to said voltage multiplier, and a pair of variable capacitors connecting respective ends of said secondary winding to ground, for reducing the residual alternating components at the supply frequency.
6. A direct current high-voltage generator as defined in claim 5, further including means for tuning the parasitic capacitances of the secondary winding of said principle supply transformer consisting of an inductance connected across said secondary winding.
7. A direct current high-voltage generator as defined in claim 6, wherein the secondary winding of said principle supply transformer is provided with a plurality of taps, an auxiliary winding selectively connectable to said taps and having a sliding contact thereon connected to said multiplier column.
8. A direct current high voltage generator as defined in claim 7, wherein said alternating current source includes an auxiliary transformer having a pair of primary windings connected in push-pull to a voltage generator and a secondary winding having a grounded center tap and being connected to the primary winding of said principle supply transformer.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7001609A FR2085193B1 (en) | 1970-01-16 | 1970-01-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US3628125A true US3628125A (en) | 1971-12-14 |
Family
ID=9049165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US107181A Expired - Lifetime US3628125A (en) | 1970-01-16 | 1971-01-18 | Direct current high-voltage generator |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3628125A (en) |
| BE (1) | BE761565A (en) |
| CH (1) | CH530115A (en) |
| DE (1) | DE2101820A1 (en) |
| FR (1) | FR2085193B1 (en) |
| GB (1) | GB1302342A (en) |
| IT (1) | IT990496B (en) |
| NL (1) | NL7100421A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5353212A (en) * | 1992-04-20 | 1994-10-04 | At&T Bell Laboratories | Zero-voltage switching power converter with ripple current cancellation |
| WO2016045905A1 (en) * | 2014-09-26 | 2016-03-31 | Nikon Metrology Nv | High voltage generator |
| US20160156280A1 (en) * | 2013-07-11 | 2016-06-02 | Hitachi Medical Corporation | High-voltage generation device and x-ray generation device |
| US20230353056A1 (en) * | 2020-07-22 | 2023-11-02 | Hitachi High-Tech Corporation | DC High-Voltage Source Device and Charged Particle Beam Device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59172945A (en) * | 1983-03-22 | 1984-09-29 | Victor Co Of Japan Ltd | Dc high voltage generator |
| JP2006211744A (en) * | 2005-01-25 | 2006-08-10 | Sony Corp | Switching power supply circuit |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2619602A (en) * | 1947-11-28 | 1952-11-25 | Westinghouse Brake & Signal | Apparatus for the supply of highvoltage unidirectional currents from a relatively low-voltage alternating current source |
| US3320513A (en) * | 1964-04-02 | 1967-05-16 | Radiation Dynamics | Voltage multiplication apparatus |
| US3484866A (en) * | 1967-04-26 | 1969-12-16 | Nippon Electron Optics Lab | Direct current high voltage generator |
| US3539903A (en) * | 1966-11-09 | 1970-11-10 | Walter Goebel | Cascade rectifier voltage multiplier with resonance coil |
-
1970
- 1970-01-16 FR FR7001609A patent/FR2085193B1/fr not_active Expired
-
1971
- 1971-01-12 CH CH43071A patent/CH530115A/en not_active IP Right Cessation
- 1971-01-13 NL NL7100421A patent/NL7100421A/xx unknown
- 1971-01-14 BE BE761565A patent/BE761565A/en unknown
- 1971-01-15 GB GB215371A patent/GB1302342A/en not_active Expired
- 1971-01-15 IT IT67147/71A patent/IT990496B/en active
- 1971-01-15 DE DE19712101820 patent/DE2101820A1/en active Pending
- 1971-01-18 US US107181A patent/US3628125A/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2619602A (en) * | 1947-11-28 | 1952-11-25 | Westinghouse Brake & Signal | Apparatus for the supply of highvoltage unidirectional currents from a relatively low-voltage alternating current source |
| US3320513A (en) * | 1964-04-02 | 1967-05-16 | Radiation Dynamics | Voltage multiplication apparatus |
| US3539903A (en) * | 1966-11-09 | 1970-11-10 | Walter Goebel | Cascade rectifier voltage multiplier with resonance coil |
| US3484866A (en) * | 1967-04-26 | 1969-12-16 | Nippon Electron Optics Lab | Direct current high voltage generator |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5353212A (en) * | 1992-04-20 | 1994-10-04 | At&T Bell Laboratories | Zero-voltage switching power converter with ripple current cancellation |
| US20160156280A1 (en) * | 2013-07-11 | 2016-06-02 | Hitachi Medical Corporation | High-voltage generation device and x-ray generation device |
| US10050550B2 (en) * | 2013-07-11 | 2018-08-14 | Hitachi, Ltd. | High-voltage generation device and X-ray generation device |
| WO2016045905A1 (en) * | 2014-09-26 | 2016-03-31 | Nikon Metrology Nv | High voltage generator |
| CN107079571A (en) * | 2014-09-26 | 2017-08-18 | 尼康计量公众有限公司 | High-voltage generator |
| US20170245356A1 (en) * | 2014-09-26 | 2017-08-24 | Nikon Metrology Nv | High voltage generator |
| US10856398B2 (en) | 2014-09-26 | 2020-12-01 | Nikon Metrology Nv | High voltage generator |
| US20230353056A1 (en) * | 2020-07-22 | 2023-11-02 | Hitachi High-Tech Corporation | DC High-Voltage Source Device and Charged Particle Beam Device |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2085193A1 (en) | 1971-12-24 |
| BE761565A (en) | 1971-07-14 |
| FR2085193B1 (en) | 1974-09-20 |
| NL7100421A (en) | 1971-07-20 |
| CH530115A (en) | 1972-10-31 |
| GB1302342A (en) | 1973-01-10 |
| DE2101820A1 (en) | 1971-07-22 |
| IT990496B (en) | 1975-06-20 |
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