US20160298783A1 - Thermally actuated flow control valve - Google Patents
Thermally actuated flow control valve Download PDFInfo
- Publication number
- US20160298783A1 US20160298783A1 US14/682,174 US201514682174A US2016298783A1 US 20160298783 A1 US20160298783 A1 US 20160298783A1 US 201514682174 A US201514682174 A US 201514682174A US 2016298783 A1 US2016298783 A1 US 2016298783A1
- Authority
- US
- United States
- Prior art keywords
- valve
- control unit
- set forth
- thermal element
- operable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000003068 static effect Effects 0.000 claims abstract description 16
- 230000004044 response Effects 0.000 claims abstract description 10
- 239000012530 fluid Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 8
- 238000012360 testing method Methods 0.000 description 6
- 238000011144 upstream manufacturing Methods 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/0041—Electrical or magnetic means for measuring valve parameters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/002—Actuating devices; Operating means; Releasing devices actuated by temperature variation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/025—Actuating devices; Operating means; Releasing devices electric; magnetic actuated by thermo-electric means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0495—Vacuum locks; Valves
Definitions
- This disclosure relates to a valve that provides controlled movement of a valve pin relative to a valve seat through use of materials having distinct coefficients of thermal expansion and a control system to manipulate the temperature of the materials.
- Valves are used in many different applications to control the flow of fluids from one location to another.
- a valve seat receives a valve pin, and when the valve pin is seated in the seat, fluid flow is blocked from an upstream location to a downstream location. The valve pin is moved relative to the valve seat to allow fluid flow.
- an actuator is provided to move the valve pin.
- the use of an actuator requires additional components, and is somewhat expensive. Moreover, the actuator may not provide precise movement, or adequate sealing.
- This disclosure relates to a system including a valve, a control unit, and a thermal element.
- the thermal element is selectively operable in response to instructions from the control unit to control a position of the valve.
- the control unit is operable in a static mode and a dynamic mode. In the static mode, the valve position is held substantially constant. In the dynamic mode, the valve position is adjusted in response to a valve outlet condition.
- FIG. 1 shows an example system according to this disclosure.
- FIG. 2A shows a valve in an open position.
- FIG. 2B shows the valve in a closed position.
- FIG. 3 is a flowchart representative of an example method of controlling the valve.
- FIG. 4 is a flowchart representative of an example in which the disclosed valve is used with a mass spectrometer.
- FIG. 5 shows another embodiment of the example system in which a thermal element is positioned in the valve.
- a system 100 comprises a valve 20 , shown in FIG. 1 , having a valve pin 22 .
- Valve pin 22 has a head 24 that selectively seats in a valve seat 26 to control the flow of a fluid from an upstream location 35 , to an upstream port 36 , through the valve seat 26 , and to a downstream port 38 and a downstream connection 40 .
- the valve pin 22 is coupled at 28 to a support shell 30 .
- the support shell 30 is received within a bore 31 , and coupled at 32 to the housing 34 .
- the couplings at 28 and 32 may be performed by welding or other techniques known in the art.
- the support shell 30 is formed of a material having a differential coefficient of thermal expansion than the valve pin 22 .
- the difference in the coefficient of thermal expansion may be selected such that the coefficient of one of the materials may be at least twice the coefficient of the other. As will be explained, this will provide significant movement that can be achieved in a relatively short period of time to provide accurate control over the amount of a sample fluid which passes across the valve, as an example.
- the support shell 30 and the housing 34 are formed of a stainless steel.
- the valve pin 22 may be formed of a tungsten. With such materials, the stainless steel support shell 30 will expand with a coefficient of thermal expansion that is three or four times the coefficient of the tungsten valve pin 22 .
- support shell 30 is shown in FIG. 1 as a cylindrical element surrounding a cylindrical valve pin, other embodiments of the support shell 30 which support the valve pin 22 for movement relative to the valve seat 26 can be used. As an example, spaced legs, or even a single support leg may support the valve pin 22 and cause movement of the valve pin 22 relative to the valve seat 26 .
- the support shell 30 will expand more than the valve pin 22 when expanded to heat (and contract more if cooled). Since the two are connected together, this will cause the valve pin 22 to move to the left relative to its FIG. 1 position.
- head 24 moves to an open position such as that shown in FIG. 2A , wherein the valve 20 allows fluid flow.
- the valve pin 22 moves to the right relative to the FIG. 1 position, the head 24 moves towards a closed position as shown in FIG. 2B , in which fluid flow is restricted.
- a thermal element 42 may be provided to drive the expansion.
- the thermal element 42 is a heater.
- the thermal element 42 is a cooler.
- the thermal element 42 may be selectively operable as both a heater or a cooler.
- the coefficients of thermal expansion could be selected such that when the thermal element 42 causes a temperature decrease, the support shell 30 has a coefficient of expansion less than that of the valve pin 22 .
- the present disclosure is capable of achieving very precise movement of the valve pin 22 by means of a control unit 52 , such that variable amounts of fluid can be metered between ports 36 and 38 .
- the present disclosure is also capable of maintaining valve position (e.g., the relative position of the valve pin 22 and the valve seat 26 ) substantially constant.
- the control unit 52 may be any known type of controller including memory, hardware, and software.
- the control unit 52 is configured to store instructions, and to provide instructions to the various components of the system 100 .
- the control unit 52 may include one or more components in electronic communication with the valve 20 .
- the control unit 52 is operable to receive a signal from a valve sensor 50 (discussed below) and to provide instructions based on that signal.
- the control unit 52 selectively controls the movement of the valve pin 22 by controlling the valve temperature through the thermal element 42 .
- a valve sensor 50 is placed in the downstream connection 40 .
- the downstream connection 40 may be connected to different devices.
- the device may be a vacuum chamber 51 with an ion source.
- the valve sensor 50 detects an outlet condition of the fluid downstream of valve 20 .
- the condition at the valve outlet is an outlet pressure, in which case the valve sensor 50 is a known type of pressure sensor.
- the condition at the valve outlet is an outlet flow rate, in which case the valve sensor 50 is a known type of flow meter.
- the control unit 52 receives signals from the valve sensor 50 .
- the control unit 52 then provides instructions to the thermal element 42 consistent with the appropriate operational mode (discussed below).
- the control unit 52 is operable in at least two modes in this disclosure. With joint reference to FIGS. 1 and 3 (which shows an example flow chart, or a method of control 70 ), one of a dynamic mode and a static mode is selected at step 60 . If the static mode is selected at step 62 , the temperature of the valve 20 is held substantially constant by the thermal element 42 , at 64 . In that case, the control unit 52 provides instructions to the thermal element 42 to keep a constant temperature of the valve 20 . In order to do so, in one example, the control unit 52 is in communication with a temperature sensor 56 . In one example, the temperature sensor 56 is placed on the support shell 30 . In this way, a constant flow rate of the fluid is achieved regardless of ambient temperature of valve 20 .
- control unit 52 is operable in a dynamic mode.
- valve position is adjusted in response to the outlet condition from the valve sensor 50 , at 68 .
- the flow rate of the fluid can be varied by adjusting the temperature of the valve 20 and, in turn, adjusting the relative position of the valve pin 22 and the valve seat 26 .
- FIG. 4 is a flow chart 80 illustrating a method wherein the valve 20 is used to regulate the pressure within an ion source of a mass spectrometer, and then used to run tests with the mass spectrometer.
- the control unit 52 is operable in the dynamic mode to calibrate the mass spectrometer, at 82 .
- the valve sensor 50 would be a pressure sensor.
- the control unit 52 provides corresponding instructions to the thermal element 42 .
- Mass spectrometers operate within a particular pressure range. Thus, the instructions provided by the control unit 52 vary the gas pressure until it reaches an acceptable level, at 84 .
- the valve 20 is then operated in the static mode, at 86 , to conduct a sample test, for example.
- the goal is to achieve a substantially constant flow rate during the test.
- conditions external to the valve 20 are monitored at 88 .
- the control unit 52 monitors the temperature of the valve 20 for changes in temperature in response to a signal from the temperature sensor 56 . If, for example, the external conditions have changed (e.g., the air conditioning in the testing lab has turned on, a door to the testing lab has been opened, or the upstream pressure changes), then the control unit 52 instructs an appropriate adjustment to the thermal element 42 , at 90 , to maintain the substantially constant flow rate.
- the system 100 is capable of regulating the pressure within an ion source regulating the pressure within an ion source of a mass spectrometer (e.g., in the dynamic mode) and being used during a test (e.g., in the static mode).
- FIG. 5 shows a second example system 100 ′ which substantially corresponds to the system 100 of FIG. 1 .
- the system 100 ′ includes a thermal element 42 ′ positioned within the housing 34 ′ of the valve 20 ′, and in particular in the downstream connection 40 ′.
- This disclosure is not limited to any particular thermal element location, as long as the thermal element can effectively influence valve position.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
Abstract
Description
- This disclosure relates to a valve that provides controlled movement of a valve pin relative to a valve seat through use of materials having distinct coefficients of thermal expansion and a control system to manipulate the temperature of the materials.
- Valves are used in many different applications to control the flow of fluids from one location to another. In a typical valve, a valve seat receives a valve pin, and when the valve pin is seated in the seat, fluid flow is blocked from an upstream location to a downstream location. The valve pin is moved relative to the valve seat to allow fluid flow.
- Typically, an actuator is provided to move the valve pin. The use of an actuator requires additional components, and is somewhat expensive. Moreover, the actuator may not provide precise movement, or adequate sealing.
- This disclosure relates to a system including a valve, a control unit, and a thermal element. The thermal element is selectively operable in response to instructions from the control unit to control a position of the valve. The control unit is operable in a static mode and a dynamic mode. In the static mode, the valve position is held substantially constant. In the dynamic mode, the valve position is adjusted in response to a valve outlet condition.
- These and other features may be best understood from the following drawings and specification.
-
FIG. 1 shows an example system according to this disclosure. -
FIG. 2A shows a valve in an open position. -
FIG. 2B shows the valve in a closed position. -
FIG. 3 is a flowchart representative of an example method of controlling the valve. -
FIG. 4 is a flowchart representative of an example in which the disclosed valve is used with a mass spectrometer. -
FIG. 5 shows another embodiment of the example system in which a thermal element is positioned in the valve. - A
system 100 comprises avalve 20, shown inFIG. 1 , having avalve pin 22. Valvepin 22 has ahead 24 that selectively seats in avalve seat 26 to control the flow of a fluid from anupstream location 35, to anupstream port 36, through thevalve seat 26, and to adownstream port 38 and adownstream connection 40. - The
valve pin 22 is coupled at 28 to asupport shell 30. Thesupport shell 30 is received within abore 31, and coupled at 32 to thehousing 34. The couplings at 28 and 32 may be performed by welding or other techniques known in the art. Thesupport shell 30 is formed of a material having a differential coefficient of thermal expansion than thevalve pin 22. The difference in the coefficient of thermal expansion may be selected such that the coefficient of one of the materials may be at least twice the coefficient of the other. As will be explained, this will provide significant movement that can be achieved in a relatively short period of time to provide accurate control over the amount of a sample fluid which passes across the valve, as an example. - In one embodiment, the
support shell 30 and thehousing 34 are formed of a stainless steel. In that same embodiment, thevalve pin 22 may be formed of a tungsten. With such materials, the stainlesssteel support shell 30 will expand with a coefficient of thermal expansion that is three or four times the coefficient of thetungsten valve pin 22. - While the
support shell 30 is shown inFIG. 1 as a cylindrical element surrounding a cylindrical valve pin, other embodiments of thesupport shell 30 which support thevalve pin 22 for movement relative to thevalve seat 26 can be used. As an example, spaced legs, or even a single support leg may support thevalve pin 22 and cause movement of thevalve pin 22 relative to thevalve seat 26. - When the materials mentioned above (e.g., stainless steel and tungsten) are utilized, the
support shell 30 will expand more than thevalve pin 22 when expanded to heat (and contract more if cooled). Since the two are connected together, this will cause thevalve pin 22 to move to the left relative to itsFIG. 1 position. Thus,head 24 moves to an open position such as that shown inFIG. 2A , wherein thevalve 20 allows fluid flow. When thevalve pin 22 moves to the right relative to theFIG. 1 position, thehead 24 moves towards a closed position as shown inFIG. 2B , in which fluid flow is restricted. - A
thermal element 42 may be provided to drive the expansion. In one example, thethermal element 42 is a heater. In another example, thethermal element 42 is a cooler. Further, thethermal element 42 may be selectively operable as both a heater or a cooler. In the example where thethermal element 42 is a cooler, the coefficients of thermal expansion could be selected such that when thethermal element 42 causes a temperature decrease, thesupport shell 30 has a coefficient of expansion less than that of thevalve pin 22. - The present disclosure is capable of achieving very precise movement of the
valve pin 22 by means of acontrol unit 52, such that variable amounts of fluid can be metered between 36 and 38. The present disclosure is also capable of maintaining valve position (e.g., the relative position of theports valve pin 22 and the valve seat 26) substantially constant. - The
control unit 52 may be any known type of controller including memory, hardware, and software. Thecontrol unit 52 is configured to store instructions, and to provide instructions to the various components of thesystem 100. Thecontrol unit 52 may include one or more components in electronic communication with thevalve 20. Thecontrol unit 52 is operable to receive a signal from a valve sensor 50 (discussed below) and to provide instructions based on that signal. In particular, thecontrol unit 52 selectively controls the movement of thevalve pin 22 by controlling the valve temperature through thethermal element 42. - In an example of this disclosure, a
valve sensor 50 is placed in thedownstream connection 40. Thedownstream connection 40 may be connected to different devices. As one example, the device may be avacuum chamber 51 with an ion source. Thevalve sensor 50 detects an outlet condition of the fluid downstream ofvalve 20. In one example, the condition at the valve outlet is an outlet pressure, in which case thevalve sensor 50 is a known type of pressure sensor. In another example, the condition at the valve outlet is an outlet flow rate, in which case thevalve sensor 50 is a known type of flow meter. In either case, thecontrol unit 52 receives signals from thevalve sensor 50. Thecontrol unit 52 then provides instructions to thethermal element 42 consistent with the appropriate operational mode (discussed below). - The
control unit 52 is operable in at least two modes in this disclosure. With joint reference toFIGS. 1 and 3 (which shows an example flow chart, or a method of control 70), one of a dynamic mode and a static mode is selected atstep 60. If the static mode is selected atstep 62, the temperature of thevalve 20 is held substantially constant by thethermal element 42, at 64. In that case, thecontrol unit 52 provides instructions to thethermal element 42 to keep a constant temperature of thevalve 20. In order to do so, in one example, thecontrol unit 52 is in communication with atemperature sensor 56. In one example, thetemperature sensor 56 is placed on thesupport shell 30. In this way, a constant flow rate of the fluid is achieved regardless of ambient temperature ofvalve 20. - If the static mode is not selected at 62, the
control unit 52 is operable in a dynamic mode. In the dynamic mode, valve position is adjusted in response to the outlet condition from thevalve sensor 50, at 68. The flow rate of the fluid can be varied by adjusting the temperature of thevalve 20 and, in turn, adjusting the relative position of thevalve pin 22 and thevalve seat 26. - While the
system 100 has many applications, in one particular application thevalve 20 is used in connection with a mass spectrometer.FIG. 4 is aflow chart 80 illustrating a method wherein thevalve 20 is used to regulate the pressure within an ion source of a mass spectrometer, and then used to run tests with the mass spectrometer. In the method, thecontrol unit 52 is operable in the dynamic mode to calibrate the mass spectrometer, at 82. In that case, thevalve sensor 50 would be a pressure sensor. As the pressure of the fluid varies, thecontrol unit 52 provides corresponding instructions to thethermal element 42. Mass spectrometers operate within a particular pressure range. Thus, the instructions provided by thecontrol unit 52 vary the gas pressure until it reaches an acceptable level, at 84. - Continuing with the above example, once an acceptable pressure level is reached, the
valve 20 is then operated in the static mode, at 86, to conduct a sample test, for example. In the static mode, the goal is to achieve a substantially constant flow rate during the test. To achieve the substantially constant flow rate, conditions external to thevalve 20 are monitored at 88. In one example, thecontrol unit 52 monitors the temperature of thevalve 20 for changes in temperature in response to a signal from thetemperature sensor 56. If, for example, the external conditions have changed (e.g., the air conditioning in the testing lab has turned on, a door to the testing lab has been opened, or the upstream pressure changes), then thecontrol unit 52 instructs an appropriate adjustment to thethermal element 42, at 90, to maintain the substantially constant flow rate. In this way, thesystem 100 is capable of regulating the pressure within an ion source regulating the pressure within an ion source of a mass spectrometer (e.g., in the dynamic mode) and being used during a test (e.g., in the static mode). -
FIG. 5 shows asecond example system 100′ which substantially corresponds to thesystem 100 ofFIG. 1 . Thesystem 100′, however, includes athermal element 42′ positioned within thehousing 34′ of thevalve 20′, and in particular in thedownstream connection 40′. This disclosure is not limited to any particular thermal element location, as long as the thermal element can effectively influence valve position. - The term “substantially” is interpreted consistent with the definition “for the most part” and specification does not provide a standard for measuring the precise boundaries of that term of degree. However, the term should be interpreted in the way one skilled in the art would interpret the term.
- Although an embodiment of this invention has been disclosed, a worker of ordinary skill in this art would recognize that certain modifications would come within the scope of this invention. For that reason, the following claims should be studied to determine the true scope and content of this invention.
Claims (15)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/682,174 US20160298783A1 (en) | 2015-04-09 | 2015-04-09 | Thermally actuated flow control valve |
| US16/934,375 US11168805B2 (en) | 2015-04-09 | 2020-07-21 | Thermally actuated flow control valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/682,174 US20160298783A1 (en) | 2015-04-09 | 2015-04-09 | Thermally actuated flow control valve |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US16/934,375 Continuation US11168805B2 (en) | 2015-04-09 | 2020-07-21 | Thermally actuated flow control valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US20160298783A1 true US20160298783A1 (en) | 2016-10-13 |
Family
ID=57111713
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US14/682,174 Abandoned US20160298783A1 (en) | 2015-04-09 | 2015-04-09 | Thermally actuated flow control valve |
| US16/934,375 Active US11168805B2 (en) | 2015-04-09 | 2020-07-21 | Thermally actuated flow control valve |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US16/934,375 Active US11168805B2 (en) | 2015-04-09 | 2020-07-21 | Thermally actuated flow control valve |
Country Status (1)
| Country | Link |
|---|---|
| US (2) | US20160298783A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20160305867A1 (en) * | 2015-04-16 | 2016-10-20 | Heraeus Electro-Nite International N.V. | Spectrometer calibration method and reference material |
| US11646188B2 (en) * | 2017-07-21 | 2023-05-09 | Hitachi High-Tech Science Corporation | Apparatus and method for analyzing evolved gas |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3967781A (en) * | 1975-02-12 | 1976-07-06 | Emerson Electric Co. | Electrically operated expansion valve for refrigeration control |
| US4590371A (en) * | 1983-06-10 | 1986-05-20 | Prutec Limited | Inlet system for a mass spectrometer |
| US6854712B2 (en) * | 2000-03-25 | 2005-02-15 | Gsf - Forschungszentrum For Unwelt Und Gesundheit Gmbh | Capillary valve that can be pulsed |
| US20110209769A1 (en) * | 2010-03-01 | 2011-09-01 | Chun Richard K | Thermally operated valve |
| US8011390B2 (en) * | 2006-06-19 | 2011-09-06 | Alf Egil Stensen | Regulating device and methods of using same |
| US8205855B2 (en) * | 2008-08-13 | 2012-06-26 | Bejing HaiLin Auto Control Equipment Co., Ltd. | Electric control valve |
| US8680464B2 (en) * | 2010-04-19 | 2014-03-25 | Hitachi High-Technologies Corporation | Mass spectrometer |
| US8701702B2 (en) * | 2010-07-06 | 2014-04-22 | Commissariat A L'energie Atomique | Fluid delivery device including a thermoelectric module |
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| US3211414A (en) | 1963-08-07 | 1965-10-12 | James E Webb | Thermally operated valve |
| US3719322A (en) | 1971-04-08 | 1973-03-06 | Vernay Laboratories | Thermally responsive valve assembly |
| US3833171A (en) | 1973-07-18 | 1974-09-03 | Vernay Laboratories | Temperature responsive valve assembly |
| US5676309A (en) | 1994-12-06 | 1997-10-14 | The Lee Company | Thermally responsive flow control valve |
| US5879594A (en) | 1997-07-10 | 1999-03-09 | Holtzman; Barry L. | Temperature responsive pressure splitter |
| US6745794B2 (en) | 2002-06-07 | 2004-06-08 | Praxair Technology, Inc. | Flow control valve |
| US7707844B2 (en) | 2006-02-17 | 2010-05-04 | Emerson Electric Co. | Thermostatic expansion valve with bypass passage |
| US8549864B2 (en) | 2010-01-07 | 2013-10-08 | General Electric Company | Temperature activated valves for gas turbines |
| WO2012072076A2 (en) | 2010-11-30 | 2012-06-07 | Danfoss A/S | An expansion valve with variable opening degree |
| US8684660B2 (en) | 2011-06-20 | 2014-04-01 | General Electric Company | Pressure and temperature actuation system |
| US9181933B2 (en) | 2012-12-10 | 2015-11-10 | Alcatel Lucent | Temperature control device with a passive thermal feedback control valve |
-
2015
- 2015-04-09 US US14/682,174 patent/US20160298783A1/en not_active Abandoned
-
2020
- 2020-07-21 US US16/934,375 patent/US11168805B2/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3967781A (en) * | 1975-02-12 | 1976-07-06 | Emerson Electric Co. | Electrically operated expansion valve for refrigeration control |
| US4590371A (en) * | 1983-06-10 | 1986-05-20 | Prutec Limited | Inlet system for a mass spectrometer |
| US6854712B2 (en) * | 2000-03-25 | 2005-02-15 | Gsf - Forschungszentrum For Unwelt Und Gesundheit Gmbh | Capillary valve that can be pulsed |
| US8011390B2 (en) * | 2006-06-19 | 2011-09-06 | Alf Egil Stensen | Regulating device and methods of using same |
| US8205855B2 (en) * | 2008-08-13 | 2012-06-26 | Bejing HaiLin Auto Control Equipment Co., Ltd. | Electric control valve |
| US20110209769A1 (en) * | 2010-03-01 | 2011-09-01 | Chun Richard K | Thermally operated valve |
| US8680464B2 (en) * | 2010-04-19 | 2014-03-25 | Hitachi High-Technologies Corporation | Mass spectrometer |
| US8701702B2 (en) * | 2010-07-06 | 2014-04-22 | Commissariat A L'energie Atomique | Fluid delivery device including a thermoelectric module |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20160305867A1 (en) * | 2015-04-16 | 2016-10-20 | Heraeus Electro-Nite International N.V. | Spectrometer calibration method and reference material |
| US10416074B2 (en) * | 2015-04-16 | 2019-09-17 | Heraeus Electro-Nite International N.V. | Spectrometer calibration method and reference material |
| US11646188B2 (en) * | 2017-07-21 | 2023-05-09 | Hitachi High-Tech Science Corporation | Apparatus and method for analyzing evolved gas |
Also Published As
| Publication number | Publication date |
|---|---|
| US11168805B2 (en) | 2021-11-09 |
| US20200347951A1 (en) | 2020-11-05 |
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