US20120141925A1 - Photo-Mask and Method for Manufacturing Liquid Crystal Display Device Using the Same - Google Patents
Photo-Mask and Method for Manufacturing Liquid Crystal Display Device Using the Same Download PDFInfo
- Publication number
- US20120141925A1 US20120141925A1 US13/178,013 US201113178013A US2012141925A1 US 20120141925 A1 US20120141925 A1 US 20120141925A1 US 201113178013 A US201113178013 A US 201113178013A US 2012141925 A1 US2012141925 A1 US 2012141925A1
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- Prior art keywords
- ultraviolet light
- photo
- mask
- liquid crystal
- absorption layer
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133351—Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133796—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers having conducting property
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
- G02F1/13415—Drop filling process
Definitions
- the present invention relates to a method for manufacturing a display device, and more particularly, to a photo-mask which selectively blocks ultraviolet light and a display device adopting the same.
- a display device may include a liquid crystal between a plurality of substrates which face each other.
- the liquid crystal may be sealed between the substrates by a sealant.
- the sealant may be hardened by ultraviolet light after the substrates are bonded to each other. However, ultraviolet light may also radiate to the liquid crystal, causing stain defects.
- the present invention provides a photo-mask capable of controlling ultraviolet light and a method for fabricating a display device using the same.
- the present invention also provides a photo-mask capable of preventing stain defects and a method for fabricating a display device using the same.
- Embodiments of the present invention provide photo-masks which include a transparent substrate configured to transmit ultraviolet light and a light shielding layer configured to block ultraviolet light on a surface of the transparent substrate, wherein the light shielding layer includes an absorption layer configured to absorb ultraviolet light.
- the absorption layer may include polycrystal silicon or amorphous silicon.
- the polycrystal silicon may absorb ultraviolet light having a wavelength smaller than about 380 nm.
- the transparent substrate may include a transmissive region and a shelter region, wherein the polycrystal silicon or the amorphous silicon may be formed at the shelter region.
- the light shielding layer may further include a reflection layer on the absorption layer of the shelter region.
- the reflection layer may include chrome.
- the polycrystal silicon may be formed over the transparent substrate, including the transmissive region and the shelter region.
- methods for fabricating a liquid crystal display device comprise preparing a first substrate and a second substrate including cell regions, forming a sealant at a peripheral region of the cell regions of at least one of the first and second substrates, dispensing a liquid crystal within the cell regions, joining the first and second substrates, and selectively hardening the sealant by ultraviolet light using a photo-mask, wherein the photo-mask includes a transparent substrate configured to transmit ultraviolet light and a light shielding layer configured to block ultraviolet light on a surface of the transparent substrate, and wherein the light shielding layer includes an absorption layer configured to absorb ultraviolet light.
- the sealant may include a first reactive resin and a first photoinitiator.
- the first photoinitiator may be reactive to ultraviolet light having a wavelength range of from about 380 nm to about 400 nm.
- the first photoinitiator may include benzoin ether or benzophenone/amine.
- a layer of the liquid crystal may include a second reactive resin and a second photoinitiator.
- the second photoinitiator may be reactive to ultraviolet light having a wavelength smaller than about 380 nm.
- the photoinitiator may include thioxanthone.
- the absorption layer may include polycrystal silicon or amorphous silicon.
- the polycrystal silicon may absorb ultraviolet light having a wavelength smaller than about 380 nm.
- FIGS. 1 thru 7 are planar diagrams illustrating a method for fabricating a display device according to an embodiment of the present invention
- FIG. 8 is a graph illustrating transmittances of polycrystal silicon and amorphous silicon according to a wavelength change of light
- FIGS. 9 thru 12 are cross-sectional views illustrating photo-masks sectioned along a line IX-IX of FIG. 5 according to first thru fourth embodiments of the present invention.
- FIG. 13 is a graph illustrating a hardening rate of a sealant according to a wavelength change of light.
- FIGS. 14 thru 17 are cross-sectional views along a line XIV-XIV of FIG. 7 illustrating a method for aligning a liquid crystal.
- FIGS. 1 thru 7 are planar diagrams illustrating a method for fabricating a display device according to an embodiment of the present invention
- FIG. 8 is a graph illustrating transmittances of polycrystal silicon and amorphous silicon according to a wavelength change of light
- FIGS. 9 thru 12 are cross-sectional views illustrating photo-masks sectioned along a line IX-IX of FIG. 5 according to the first to fourth embodiments of the present invention
- FIG. 13 is a graph illustrating a hardening rate of a sealant according to a wavelength change of light.
- a thin film transistor substrate (not illustrated) and a color filter substrate 20 may be provided.
- the thin film transistor substrate and the color filter substrate 20 may respectively include cell regions 32 and peripheral regions 34 outside the cell regions 32 .
- the cell regions 32 may include a plurality of pixels (not illustrated) defined by a data line (not illustrated) and a gate line (not illustrated) of the thin film transistor substrate.
- the peripheral regions 34 may include an encapsulation region (not illustrated) and a cutting region (not illustrated).
- the thin film transistor substrate may be a first substrate including a thin film transistor (not illustrated).
- the thin film transistor substrate may include a storage electrode, a gate insulation layer, a passivation layer, a pixel electrode, and a first alignment layer.
- the color filter substrate 20 may be a second substrate including a color filter.
- the color filter substrate 20 may include a black matrix layer, a common electrode, and a second alignment layer.
- a sealant 36 may be formed on the color filter substrate 20 .
- the sealant 36 may surround the cell regions 32 at the peripheral regions 34 .
- the sealant 36 may be printed on the color filter substrate 20 in a liquid state.
- the sealant 36 may include an acrylate-based first reactive resin, such as epoxy acrylate and urethane acrylate.
- the sealant 36 may include a first photoinitiator which raises a hardening reaction of reactive resin.
- the first photoinitiator generates a radical by ultraviolet light, and may induce a hardening reaction of the first reactive resin.
- the first photoinitiator may include benzoin ether or benzophenone/amine having an excellent chemical resistance.
- the benzoin ether or benzophenone/amine may generate the radical by ultraviolet light having a wavelength range of from about 380 nm to about 400 nm.
- a liquid crystal 38 may be disposed on each of the cell regions 32 of the color filter substrate 20 .
- the liquid crystal 38 may be disposed on the center of each cell region 32 .
- the liquid crystal 38 may be disposed before formation of the sealant 36 , and may be disposed simultaneously with formation of the sealant 36 .
- the liquid crystal 38 may be disposed on the thin film transistor substrate 10 or the color filter substrate 20 where the sealant 36 is formed.
- the liquid crystal 38 may include a VA mode, an IPS mode, and a TN mode.
- the liquid crystal 38 may also include Reactive Mesogens (RM) for compensating a viewing angle.
- the RM may include an acrylate-based second reactive resin, such as polyester acrylate or silicon acrylate.
- the liquid crystal 38 may include a second photoinitiator.
- the second photoinitiator may include thioxanthone. For instance, the thioxanthone may generate a radical by ultraviolet light having a weak wavelength.
- the second photoinitiator may induce a reaction for connecting the RM to the first and second alignment layers by ultraviolet light having a wavelength smaller than about 360 nm.
- the thin film transistor substrate 10 may be joined to the color filter substrate 20 .
- the thin film transistor substrate 10 and the color filter substrate 20 may be joined together in a low vacuum state.
- the thin film transistor substrate 10 and the color filter substrate 20 may also be joined together in a chamber (not illustrated).
- the liquid crystal 38 may have lower viscosity than that of the sealant 36 .
- the liquid crystal 38 may gradually float from the centers of the cell regions 32 to edges between the thin film transistor substrate 10 and the color filter substrate 20 . Even though the thin film transistor substrate 10 and the color filter substrate 20 are exposed to atmospheric pressure from low vacuum, the liquid crystal 38 may be filled within the cell regions 32 in a certain time. For instance, the liquid crystal 38 may be completely filled within the cell regions 32 after about 1 hour has passed under atmospheric pressure outside the chamber.
- the sealant 36 may join the thin film transistor substrate 10 and the color filter substrate 20 at the peripheral region 34 .
- a photo-mask 40 for sheltering the cell regions 32 may be aligned on the thin film transistor substrate 10 and the color filter substrate 20 .
- Ultraviolet light 56 ( FIGS. 9 thru 12 ) may be made selectively incident on the sealant 36 using the photo-mask 40 .
- ultraviolet light 56 may be incident within from about 1 minute to about 2 minutes from the outside of the chamber after joining the thin film transistor substrate 10 and the color filter substrate 20 . This is because mismatching of the thin film transistor substrate 10 and the color filter substrate 20 may be minimized at a following process.
- Ultraviolet light 56 may be generated from a light source, such as a mercury discharge tube and a deuterium lamp.
- the light source may generate ultraviolet light having a wavelength range of from about 200 nm to about 400 nm.
- the liquid crystal 38 may be partially filled within the cell regions 32 . As described above, this is because the liquid crystal 38 is gradually filled within the cell regions 32 . For instance, the liquid crystal 38 may not be filled to edges of the cell regions 32 having square shapes.
- the photo-mask 40 may include a transmissive region 42 ( FIG. 5 ) and a shelter region 44 .
- the transmissive region 42 may expose the sealant 36
- the shelter region 44 may shelter the cell regions 32 .
- the shelter region 44 may shelter the peripheral region 34 , except for the sealant 36 .
- the photo-mask 40 may include a transparent substrate 46 ( FIGS. 9 thru 12 ) and a light shielding layer 50 .
- the light shielding layer 50 may include an absorption layer 52 .
- the absorption layer 52 may include polycrystal silicon (Si) ‘a’ or amorphous silicon (Si) ‘b’.
- the polycrystal silicon ‘a’ may be passed through by ultraviolet light 56 having a wavelength larger than about 380 nm.
- the photo-mask 40 including the absorption layer 52 of the polycrystal silicon ‘a’, may be passed through by ultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm.
- the absorption layer 52 of the polycrystal silicon ‘a’ may absorb ultraviolet light having a wavelength smaller than about 380 nm.
- the amorphous silicon ‘b’ may be passed through by visible light and infrared light having a wavelength larger than about 500 nm.
- the absorption layer 52 of the amorphous silicon ‘b’ may absorb light of all ultraviolet regions. Embodiments of the photo-mask 40 , including the absorption layer 52 composed of the polycrystal silicon ‘a’ or the amorphous silicon ‘b’, will be described.
- the photo-mask 40 may include the absorption layer 52 and a reflection layer 54 on the shelter region 44 of the transparent substrate 46 .
- the absorption layer 52 and the reflection layer 54 may be the light shielding layer 50 .
- the reflection layer 54 may include a chrome (Cr) layer.
- the absorption layer 52 may include the polycrystal silicon ‘a’ or the amorphous silicon ‘b’.
- Ultraviolet light 56 incident on the shelter region 44 may be reflected by the reflection layer 54 upward from the photo-mask 40 .
- the light 56 incident on the transmissive region 42 may be absorbed by the sealant 36 .
- the light 56 passing through the transmissive region 42 may include all ultraviolet regions of wavelength smaller than about 400 nm.
- the light 56 may be reflected toward the photo-mask 40 by an upper surface of the thin film transistor substrate 10 corresponding to the transmissive region 42 .
- Ultraviolet light 56 reflected by the upper surface of the thin film transistor substrate 10 , may be absorbed by the absorption layer 52 .
- the absorption layer 52 of the amorphous silicon ‘b’ may absorb light of all ultraviolet regions having a wavelength smaller than about 400 nm.
- the absorption layer 52 of the polycrystal silicon ‘a’ may absorb ultraviolet light 56 having a wavelength smaller than about 380 nm, and may be passed through by ultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm.
- Ultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm may be re-reflected by the reflection layer 54 toward the liquid crystal 38 of the cell regions 32 .
- the liquid crystal 38 may not be polymerized by ultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm. This is because the second photoinitiator of the liquid crystal 38 is polymerized by ultraviolet light 56 having a wavelength smaller than about 380 nm. Therefore, the photo-mask 40 according to the first embodiment of the present invention may prevent stain defects due to the polymerization of the liquid crystal 38 .
- the photo-mask 40 may include the absorption layer 52 on the shelter region 44 of the transparent substrate 46 .
- the absorption layer 52 may absorb ultraviolet light 56 having a wavelength smaller than about 380 nm which polymerizes the liquid crystal 38 at the shelter region 44 .
- the absorption layer 52 may include the polycrystal silicon ‘a’ or the amorphous silicon ‘b’.
- the absorption layer 52 of the polycrystal silicon ‘a’ may absorb ultraviolet light 56 having a wavelength smaller than about 380 nm.
- the absorption layer 52 of the polycrystal silicon ‘a’ may transmit ultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm to the liquid crystal 38 .
- the liquid crystal 38 may not be polymerized by ultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm.
- the absorption layer 52 of the amorphous silicon ‘b’ may absorb light of all ultraviolet regions having a wavelength smaller than about 400 nm. Therefore, the absorption layer 52 of the polycrystal silicon ‘a’ or the amorphous silicon ‘b’ may absorb ultraviolet light 56 having a wavelength smaller than about 380 nm, which polymerizes the liquid crystal 38 at the shelter region 44 .
- the light 56 transmitted to the transmissive region 42 of the transparent substrate 46 may include an ultraviolet region having a wavelength smaller than about 400 nm.
- the light 56 transmitted to the transmissive region 42 may be reflected toward the photo-mask 40 by an upper surface of the thin film transistor substrate 10 .
- the absorption layer 52 of the photo-mask 40 may absorb and transmit ultraviolet light 56 reflected by the upper surface of the thin film transistor substrate 10 .
- the absorption layer 52 of the polycrystal silicon ‘a’ may absorb ultraviolet light having a wavelength smaller than about 380 nm.
- the absorption layer 52 of the polycrystal silicon ‘a’ may transmit ultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm to an upper part of the photo-mask 40 .
- the absorption layer 52 of the amorphous silicon ‘b’ may absorb light of all ultraviolet regions having a wavelength smaller than about 400 nm. Therefore, the photo-mask 40 according to the second embodiment of the present invention may prevent stain defects due to the polymerization of the liquid crystal 38 .
- the photo-mask 40 may include the absorption layer 52 over the transparent substrate 46 and the reflection layer 54 on the transparent substrate 46 of the shelter region 44 .
- the reflection layer 54 may reflect light 56 of all ultraviolet regions having a wavelength smaller than about 400 nm upward from the photo-mask 40 toward the shelter region 44 .
- the absorption layer 52 may be exposed at the transmissive region 42 .
- the absorption layer 52 may include the polycrystal silicon ‘a’ which absorbs ultraviolet light 56 having a wavelength smaller than about 380 nm.
- the absorption layer 52 exposed at the transmissive region 42 may absorb ultraviolet light 56 having a wavelength smaller than about 380 nm, and may transmit ultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm.
- Ultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm may not induce the polymerization of the liquid crystal.
- Ultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm may selectively harden the sealant 36 . Therefore, the photo-mask 40 according to the third embodiment of the present invention may prevent stain defects due to the polymerization of the liquid crystal 38 .
- the photo-mask 40 according to the fourth embodiment of the present invention may include the absorption layer 52 over the transparent substrate 46 .
- the absorption layer 52 may include the polycrystal silicon ‘a’.
- the absorption layer 52 may absorb ultraviolet light 56 having a wavelength smaller than about 380 nm, and may transmit ultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm.
- Ultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm may selectively harden the sealant 36 . Therefore, the photo-mask 40 according to the fourth embodiment of the present invention may prevent stain defects due to the polymerization of the liquid crystal 38 .
- the sealant 36 may be reactive to ultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm so as to be hardened.
- the sealant 36 may include the first photoinitiator and the first reactive resin.
- the first photoinitiator may generate the radical by ultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm.
- the radical may induce a hardening reaction of the first reactive resin.
- the sealant 36 may be hardened by ultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm transmitted from the photo-mask 40 according to the first thru fourth embodiments of the present invention.
- the horizontal axis of FIG. 13 denotes a wavelength of light, and the vertical axis thereof denotes a hardening rate.
- the hardening rate may be measured by a Fourier Transform Spectroscopy (FT-IR) device.
- FT-IR Fourier Transform Spectroscopy
- the liquid crystal 38 may be completely filled within the cell regions 32 . As described above, if about one hour under the atmospheric pressure has passed, the liquid crystal 38 may be completely filled within the cell regions 32 .
- the liquid crystal may be aligned between the thin transistor film substrate 10 and the color filter substrate 20 by ultraviolet light having a wavelength smaller than about 380 nm as described below.
- FIGS. 14 thru 17 are cross-sectional views along a line XIV-XIV of FIG. 7 illustrating a method for aligning the liquid crystal.
- the liquid crystal 38 may include directors 37 , reactive mesogens 39 , and the second photoinitiator between the thin film transistor substrate 10 and the color filter substrate 20 .
- the directors 37 may include monomers having polarizations.
- the directors 37 may be arranged in a certain direction between a first alignment layer 12 of the thin film transistor substrate 10 and a second alignment layer 22 of the color filter substrate 20 .
- the directors 37 may be arranged vertically relative to the thin film transistor substrate 10 and the color filter substrate 20 by the polarizations.
- the directors 37 of the liquid crystal 38 may be rotated.
- the directors 37 of the liquid crystal 38 may be rotated along an electric field induced between the pixel electrode 14 and the common electrode 24 .
- the reactive mesogens 39 may be networked to surfaces of the first and second alignment layers 12 and 22 , respectively.
- the reactive mesogens 39 may be networked to the surfaces of the first and second alignment layers 12 and 22 , respectively, by the second photoinitiator which is polymerized by ultraviolet light 56 .
- the second photoinitiator may be polymerized by ultraviolet light 56 having a wavelength smaller than about 380 nm.
- the reactive mesogens 39 may be most stabilized on the surfaces of the first and second alignment layers 12 and 22 , respectively.
- the reactive mesogens 39 may be networked along the directors 37 on the surfaces of the first and second alignment layers 12 and 22 , respectively.
- the director 37 may be rotated or inclined by the electric field (not illustrated) induced between the pixel electrode 14 and the common electrode 24 . Accordingly, the reactive mesogens 39 may be networked at a certain pretilt angle on the surfaces of the first and second alignments layers 12 and 14 , respectively.
- the power source 60 applying a voltage to the pixel electrode and the common electrode may be removed.
- the directors 37 adjacent to the surfaces of the first and second alignment layers 12 and 22 , respectively, may be aligned at a pretilt angle by the reactive mesogens 39 .
- the reactive mesogens 39 may restrain the directors 37 on the surfaces of the first and second alignment layers 12 and 22 , respectively. That is, the reactive mesogens 39 may fix the pretilt angle of the directors 37 adjacent to the first and second alignment layers 12 and 22 , respectively.
- the directors 39 located at a center between the thin film transistor substrate 10 and the color filter substrate 20 may be vertically arranged by polarizations.
- the photo-mask according to the embodiments of the present invention may include an absorption layer of the polycrystal silicon which transmits ultraviolet light having a wavelength range of from about 380 nm to about 400 nm and absorbs ultraviolet light having a wavelength smaller than about 380 nm.
- the sealant may include the first photoinitiator which is polymerized by ultraviolet light having a wavelength range of from about 380 nm to about 400 nm.
- the liquid crystal may include the second photoinitiator which is polymerized by ultraviolet light having a wavelength smaller than 380 nm. Therefore, the sealant can be selectively hardened by ultraviolet light having a wavelength range of from about 380 nm to about 400 nm transmitted from the photo-mask.
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Abstract
Description
- This application makes reference to, incorporates the same herein, and claims all benefits accruing under 35 U.S.C. §119 from an application earlier filed in the Korean Intellectual Property Office on the Dec. 6, 2010 and there duly assigned Serial No. 10-2010-0123795.
- 1. Field of the Invention
- The present invention relates to a method for manufacturing a display device, and more particularly, to a photo-mask which selectively blocks ultraviolet light and a display device adopting the same.
- 2. Description of the Related Art
- Generally, a display device may include a liquid crystal between a plurality of substrates which face each other. The liquid crystal may be sealed between the substrates by a sealant. The sealant may be hardened by ultraviolet light after the substrates are bonded to each other. However, ultraviolet light may also radiate to the liquid crystal, causing stain defects.
- The present invention provides a photo-mask capable of controlling ultraviolet light and a method for fabricating a display device using the same.
- The present invention also provides a photo-mask capable of preventing stain defects and a method for fabricating a display device using the same.
- Embodiments of the present invention provide photo-masks which include a transparent substrate configured to transmit ultraviolet light and a light shielding layer configured to block ultraviolet light on a surface of the transparent substrate, wherein the light shielding layer includes an absorption layer configured to absorb ultraviolet light.
- In some embodiments, the absorption layer may include polycrystal silicon or amorphous silicon. The polycrystal silicon may absorb ultraviolet light having a wavelength smaller than about 380 nm.
- In other embodiments, the transparent substrate may include a transmissive region and a shelter region, wherein the polycrystal silicon or the amorphous silicon may be formed at the shelter region.
- In still other embodiments, the light shielding layer may further include a reflection layer on the absorption layer of the shelter region. The reflection layer may include chrome.
- In even other embodiments, the polycrystal silicon may be formed over the transparent substrate, including the transmissive region and the shelter region.
- In other embodiments of the present invention, methods for fabricating a liquid crystal display device comprise preparing a first substrate and a second substrate including cell regions, forming a sealant at a peripheral region of the cell regions of at least one of the first and second substrates, dispensing a liquid crystal within the cell regions, joining the first and second substrates, and selectively hardening the sealant by ultraviolet light using a photo-mask, wherein the photo-mask includes a transparent substrate configured to transmit ultraviolet light and a light shielding layer configured to block ultraviolet light on a surface of the transparent substrate, and wherein the light shielding layer includes an absorption layer configured to absorb ultraviolet light.
- In some embodiments, the sealant may include a first reactive resin and a first photoinitiator. The first photoinitiator may be reactive to ultraviolet light having a wavelength range of from about 380 nm to about 400 nm. The first photoinitiator may include benzoin ether or benzophenone/amine.
- In other embodiments, a layer of the liquid crystal may include a second reactive resin and a second photoinitiator. The second photoinitiator may be reactive to ultraviolet light having a wavelength smaller than about 380 nm. The photoinitiator may include thioxanthone.
- In still other embodiments, the absorption layer may include polycrystal silicon or amorphous silicon. The polycrystal silicon may absorb ultraviolet light having a wavelength smaller than about 380 nm.
- The accompanying drawings are included to provide a further understanding of the present invention, and are incorporated in and constitute a part of this specification. The drawings illustrate exemplary embodiments of the present invention and, together with the description, serve to explain principles of the present invention. In the drawings:
-
FIGS. 1 thru 7 are planar diagrams illustrating a method for fabricating a display device according to an embodiment of the present invention; -
FIG. 8 is a graph illustrating transmittances of polycrystal silicon and amorphous silicon according to a wavelength change of light; -
FIGS. 9 thru 12 are cross-sectional views illustrating photo-masks sectioned along a line IX-IX ofFIG. 5 according to first thru fourth embodiments of the present invention; -
FIG. 13 is a graph illustrating a hardening rate of a sealant according to a wavelength change of light; and -
FIGS. 14 thru 17 are cross-sectional views along a line XIV-XIV ofFIG. 7 illustrating a method for aligning a liquid crystal. - Preferred embodiments of the present invention will be described below in more detail with reference to the accompanying drawings. The present invention may, however, be embodied in different forms and should not be constructed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the present invention to those skilled in the art. Like reference numerals refer to like elements throughout.
- The terms used in the specification are not for limiting the present invention but are for describing the embodiments. The terms of a singular form may include plural forms unless otherwise specified. The meaning of the terms “include,” “comprise,” “including,” or “comprising,” specifies a property, a region, a fixed number, a step, a process, an element and/or a component but does not exclude other properties, regions, fixed numbers, steps, processes, elements and/or components. Also, the reference numerals given according to the sequence of description are not limited to the sequence.
-
FIGS. 1 thru 7 are planar diagrams illustrating a method for fabricating a display device according to an embodiment of the present invention,FIG. 8 is a graph illustrating transmittances of polycrystal silicon and amorphous silicon according to a wavelength change of light,FIGS. 9 thru 12 are cross-sectional views illustrating photo-masks sectioned along a line IX-IX ofFIG. 5 according to the first to fourth embodiments of the present invention, andFIG. 13 is a graph illustrating a hardening rate of a sealant according to a wavelength change of light. - Referring to
FIG. 1 , a thin film transistor substrate (not illustrated) and acolor filter substrate 20 may be provided. The thin film transistor substrate and thecolor filter substrate 20 may respectively includecell regions 32 andperipheral regions 34 outside thecell regions 32. Thecell regions 32 may include a plurality of pixels (not illustrated) defined by a data line (not illustrated) and a gate line (not illustrated) of the thin film transistor substrate. Theperipheral regions 34 may include an encapsulation region (not illustrated) and a cutting region (not illustrated). - Although not illustrated, the thin film transistor substrate may be a first substrate including a thin film transistor (not illustrated). The thin film transistor substrate may include a storage electrode, a gate insulation layer, a passivation layer, a pixel electrode, and a first alignment layer. Also, the
color filter substrate 20 may be a second substrate including a color filter. Thecolor filter substrate 20 may include a black matrix layer, a common electrode, and a second alignment layer. - Referring to
FIG. 2 , asealant 36 may be formed on thecolor filter substrate 20. Thesealant 36 may surround thecell regions 32 at theperipheral regions 34. Thesealant 36 may be printed on thecolor filter substrate 20 in a liquid state. For instance, thesealant 36 may include an acrylate-based first reactive resin, such as epoxy acrylate and urethane acrylate. Also, thesealant 36 may include a first photoinitiator which raises a hardening reaction of reactive resin. The first photoinitiator generates a radical by ultraviolet light, and may induce a hardening reaction of the first reactive resin. The first photoinitiator may include benzoin ether or benzophenone/amine having an excellent chemical resistance. For instance, the benzoin ether or benzophenone/amine may generate the radical by ultraviolet light having a wavelength range of from about 380 nm to about 400 nm. - Referring to
FIG. 3 , aliquid crystal 38 may be disposed on each of thecell regions 32 of thecolor filter substrate 20. Theliquid crystal 38 may be disposed on the center of eachcell region 32. Theliquid crystal 38 may be disposed before formation of thesealant 36, and may be disposed simultaneously with formation of thesealant 36. Theliquid crystal 38 may be disposed on the thinfilm transistor substrate 10 or thecolor filter substrate 20 where thesealant 36 is formed. - The
liquid crystal 38 may include a VA mode, an IPS mode, and a TN mode. Theliquid crystal 38 may also include Reactive Mesogens (RM) for compensating a viewing angle. The RM may include an acrylate-based second reactive resin, such as polyester acrylate or silicon acrylate. Also, theliquid crystal 38 may include a second photoinitiator. The second photoinitiator may include thioxanthone. For instance, the thioxanthone may generate a radical by ultraviolet light having a weak wavelength. The second photoinitiator may induce a reaction for connecting the RM to the first and second alignment layers by ultraviolet light having a wavelength smaller than about 360 nm. - Referring to
FIG. 4 , the thinfilm transistor substrate 10 may be joined to thecolor filter substrate 20. The thinfilm transistor substrate 10 and thecolor filter substrate 20 may be joined together in a low vacuum state. The thinfilm transistor substrate 10 and thecolor filter substrate 20 may also be joined together in a chamber (not illustrated). Theliquid crystal 38 may have lower viscosity than that of thesealant 36. Theliquid crystal 38 may gradually float from the centers of thecell regions 32 to edges between the thinfilm transistor substrate 10 and thecolor filter substrate 20. Even though the thinfilm transistor substrate 10 and thecolor filter substrate 20 are exposed to atmospheric pressure from low vacuum, theliquid crystal 38 may be filled within thecell regions 32 in a certain time. For instance, theliquid crystal 38 may be completely filled within thecell regions 32 after about 1 hour has passed under atmospheric pressure outside the chamber. Thesealant 36 may join the thinfilm transistor substrate 10 and thecolor filter substrate 20 at theperipheral region 34. - Referring to
FIGS. 5 and 8 thru 12, a photo-mask 40 for sheltering thecell regions 32 may be aligned on the thinfilm transistor substrate 10 and thecolor filter substrate 20. Ultraviolet light 56 (FIGS. 9 thru 12) may be made selectively incident on thesealant 36 using the photo-mask 40. For instance,ultraviolet light 56 may be incident within from about 1 minute to about 2 minutes from the outside of the chamber after joining the thinfilm transistor substrate 10 and thecolor filter substrate 20. This is because mismatching of the thinfilm transistor substrate 10 and thecolor filter substrate 20 may be minimized at a following process.Ultraviolet light 56 may be generated from a light source, such as a mercury discharge tube and a deuterium lamp. The light source may generate ultraviolet light having a wavelength range of from about 200 nm to about 400 nm. Theliquid crystal 38 may be partially filled within thecell regions 32. As described above, this is because theliquid crystal 38 is gradually filled within thecell regions 32. For instance, theliquid crystal 38 may not be filled to edges of thecell regions 32 having square shapes. - The photo-
mask 40 may include a transmissive region 42 (FIG. 5 ) and ashelter region 44. Thetransmissive region 42 may expose thesealant 36, and theshelter region 44 may shelter thecell regions 32. Theshelter region 44 may shelter theperipheral region 34, except for thesealant 36. The photo-mask 40 may include a transparent substrate 46 (FIGS. 9 thru 12) and alight shielding layer 50. Thelight shielding layer 50 may include anabsorption layer 52. Theabsorption layer 52 may include polycrystal silicon (Si) ‘a’ or amorphous silicon (Si) ‘b’. - Referring to
FIG. 8 , the polycrystal silicon ‘a’ may be passed through byultraviolet light 56 having a wavelength larger than about 380 nm. The photo-mask 40, including theabsorption layer 52 of the polycrystal silicon ‘a’, may be passed through byultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm. Also, theabsorption layer 52 of the polycrystal silicon ‘a’ may absorb ultraviolet light having a wavelength smaller than about 380 nm. The amorphous silicon ‘b’ may be passed through by visible light and infrared light having a wavelength larger than about 500 nm. Theabsorption layer 52 of the amorphous silicon ‘b’ may absorb light of all ultraviolet regions. Embodiments of the photo-mask 40, including theabsorption layer 52 composed of the polycrystal silicon ‘a’ or the amorphous silicon ‘b’, will be described. - Referring to
FIGS. 8 and 9 , the photo-mask 40 according to the first embodiment of the present invention may include theabsorption layer 52 and areflection layer 54 on theshelter region 44 of thetransparent substrate 46. Theabsorption layer 52 and thereflection layer 54 may be thelight shielding layer 50. Thereflection layer 54 may include a chrome (Cr) layer. Theabsorption layer 52 may include the polycrystal silicon ‘a’ or the amorphous silicon ‘b’.Ultraviolet light 56 incident on theshelter region 44 may be reflected by thereflection layer 54 upward from the photo-mask 40. The light 56 incident on thetransmissive region 42 may be absorbed by thesealant 36. The light 56 passing through thetransmissive region 42 may include all ultraviolet regions of wavelength smaller than about 400 nm. The light 56 may be reflected toward the photo-mask 40 by an upper surface of the thinfilm transistor substrate 10 corresponding to thetransmissive region 42. -
Ultraviolet light 56, reflected by the upper surface of the thinfilm transistor substrate 10, may be absorbed by theabsorption layer 52. For instance, theabsorption layer 52 of the amorphous silicon ‘b’ may absorb light of all ultraviolet regions having a wavelength smaller than about 400 nm. - The
absorption layer 52 of the polycrystal silicon ‘a’ may absorbultraviolet light 56 having a wavelength smaller than about 380 nm, and may be passed through byultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm.Ultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm may be re-reflected by thereflection layer 54 toward theliquid crystal 38 of thecell regions 32. Theliquid crystal 38 may not be polymerized byultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm. This is because the second photoinitiator of theliquid crystal 38 is polymerized byultraviolet light 56 having a wavelength smaller than about 380 nm. Therefore, the photo-mask 40 according to the first embodiment of the present invention may prevent stain defects due to the polymerization of theliquid crystal 38. - Referring to
FIGS. 8 and 10 , the photo-mask 40 according to the second embodiment of the present invention may include theabsorption layer 52 on theshelter region 44 of thetransparent substrate 46. Theabsorption layer 52 may absorbultraviolet light 56 having a wavelength smaller than about 380 nm which polymerizes theliquid crystal 38 at theshelter region 44. Theabsorption layer 52 may include the polycrystal silicon ‘a’ or the amorphous silicon ‘b’. - The
absorption layer 52 of the polycrystal silicon ‘a’ may absorbultraviolet light 56 having a wavelength smaller than about 380 nm. Theabsorption layer 52 of the polycrystal silicon ‘a’ may transmitultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm to theliquid crystal 38. Theliquid crystal 38 may not be polymerized byultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm. Theabsorption layer 52 of the amorphous silicon ‘b’ may absorb light of all ultraviolet regions having a wavelength smaller than about 400 nm. Therefore, theabsorption layer 52 of the polycrystal silicon ‘a’ or the amorphous silicon ‘b’ may absorbultraviolet light 56 having a wavelength smaller than about 380 nm, which polymerizes theliquid crystal 38 at theshelter region 44. - The light 56 transmitted to the
transmissive region 42 of thetransparent substrate 46 may include an ultraviolet region having a wavelength smaller than about 400 nm. The light 56 transmitted to thetransmissive region 42 may be reflected toward the photo-mask 40 by an upper surface of the thinfilm transistor substrate 10. Theabsorption layer 52 of the photo-mask 40 may absorb and transmitultraviolet light 56 reflected by the upper surface of the thinfilm transistor substrate 10. Theabsorption layer 52 of the polycrystal silicon ‘a’ may absorb ultraviolet light having a wavelength smaller than about 380 nm. Theabsorption layer 52 of the polycrystal silicon ‘a’ may transmitultraviolet light 56 having a wavelength range of from about 380 nm to about 400 nm to an upper part of the photo-mask 40. Theabsorption layer 52 of the amorphous silicon ‘b’ may absorb light of all ultraviolet regions having a wavelength smaller than about 400 nm. Therefore, the photo-mask 40 according to the second embodiment of the present invention may prevent stain defects due to the polymerization of theliquid crystal 38. - Referring to
FIGS. 8 and 11 , the photo-mask 40 according to the third embodiment of the present invention may include theabsorption layer 52 over thetransparent substrate 46 and thereflection layer 54 on thetransparent substrate 46 of theshelter region 44. Thereflection layer 54 may reflect light 56 of all ultraviolet regions having a wavelength smaller than about 400 nm upward from the photo-mask 40 toward theshelter region 44. Theabsorption layer 52 may be exposed at thetransmissive region 42. Theabsorption layer 52 may include the polycrystal silicon ‘a’ which absorbsultraviolet light 56 having a wavelength smaller than about 380 nm. Theabsorption layer 52 exposed at thetransmissive region 42 may absorbultraviolet light 56 having a wavelength smaller than about 380 nm, and may transmitultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm.Ultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm may not induce the polymerization of the liquid crystal.Ultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm may selectively harden thesealant 36. Therefore, the photo-mask 40 according to the third embodiment of the present invention may prevent stain defects due to the polymerization of theliquid crystal 38. - Referring to
FIGS. 8 and 12 , the photo-mask 40 according to the fourth embodiment of the present invention may include theabsorption layer 52 over thetransparent substrate 46. Theabsorption layer 52 may include the polycrystal silicon ‘a’. Theabsorption layer 52 may absorbultraviolet light 56 having a wavelength smaller than about 380 nm, and may transmitultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm.Ultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm may selectively harden thesealant 36. Therefore, the photo-mask 40 according to the fourth embodiment of the present invention may prevent stain defects due to the polymerization of theliquid crystal 38. - Referring to
FIGS. 6 thru 13, thesealant 36 may be reactive toultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm so as to be hardened. As described above, thesealant 36 may include the first photoinitiator and the first reactive resin. The first photoinitiator may generate the radical byultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm. Also, the radical may induce a hardening reaction of the first reactive resin. Accordingly, thesealant 36 may be hardened byultraviolet light 56 having a wavelength range of from about 380 nm to 400 nm transmitted from the photo-mask 40 according to the first thru fourth embodiments of the present invention. The horizontal axis ofFIG. 13 denotes a wavelength of light, and the vertical axis thereof denotes a hardening rate. The hardening rate may be measured by a Fourier Transform Spectroscopy (FT-IR) device. - Referring to
FIG. 7 , if a certain time has passed after thesealant 36 is hardened, theliquid crystal 38 may be completely filled within thecell regions 32. As described above, if about one hour under the atmospheric pressure has passed, theliquid crystal 38 may be completely filled within thecell regions 32. The liquid crystal may be aligned between the thintransistor film substrate 10 and thecolor filter substrate 20 by ultraviolet light having a wavelength smaller than about 380 nm as described below. -
FIGS. 14 thru 17 are cross-sectional views along a line XIV-XIV ofFIG. 7 illustrating a method for aligning the liquid crystal. - Referring to
FIG. 14 , theliquid crystal 38 may includedirectors 37,reactive mesogens 39, and the second photoinitiator between the thinfilm transistor substrate 10 and thecolor filter substrate 20. Thedirectors 37 may include monomers having polarizations. Thedirectors 37 may be arranged in a certain direction between afirst alignment layer 12 of the thinfilm transistor substrate 10 and asecond alignment layer 22 of thecolor filter substrate 20. For instance, thedirectors 37 may be arranged vertically relative to the thinfilm transistor substrate 10 and thecolor filter substrate 20 by the polarizations. - Referring to
FIG. 15 , by applying a voltage provided by apower source 60 to apixel electrode 14 of the thinfilm transistor substrate 10 and acommon electrode 24 of thecolor filter substrate 20, thedirectors 37 of theliquid crystal 38 may be rotated. Thedirectors 37 of theliquid crystal 38 may be rotated along an electric field induced between thepixel electrode 14 and thecommon electrode 24. - Referring to
FIG. 16 , by irradiatingultraviolet light 56 onto theliquid crystal 38, thereactive mesogens 39 may be networked to surfaces of the first and second alignment layers 12 and 22, respectively. Thereactive mesogens 39 may be networked to the surfaces of the first and second alignment layers 12 and 22, respectively, by the second photoinitiator which is polymerized byultraviolet light 56. The second photoinitiator may be polymerized byultraviolet light 56 having a wavelength smaller than about 380 nm. Thereactive mesogens 39 may be most stabilized on the surfaces of the first and second alignment layers 12 and 22, respectively. Thereactive mesogens 39 may be networked along thedirectors 37 on the surfaces of the first and second alignment layers 12 and 22, respectively. Thedirector 37 may be rotated or inclined by the electric field (not illustrated) induced between thepixel electrode 14 and thecommon electrode 24. Accordingly, thereactive mesogens 39 may be networked at a certain pretilt angle on the surfaces of the first and second alignments layers 12 and 14, respectively. - Referring to
FIG. 17 , thepower source 60 applying a voltage to the pixel electrode and the common electrode may be removed. Thedirectors 37 adjacent to the surfaces of the first and second alignment layers 12 and 22, respectively, may be aligned at a pretilt angle by thereactive mesogens 39. Thereactive mesogens 39 may restrain thedirectors 37 on the surfaces of the first and second alignment layers 12 and 22, respectively. That is, thereactive mesogens 39 may fix the pretilt angle of thedirectors 37 adjacent to the first and second alignment layers 12 and 22, respectively. Thedirectors 39 located at a center between the thinfilm transistor substrate 10 and thecolor filter substrate 20 may be vertically arranged by polarizations. - As described above, the photo-mask according to the embodiments of the present invention may include an absorption layer of the polycrystal silicon which transmits ultraviolet light having a wavelength range of from about 380 nm to about 400 nm and absorbs ultraviolet light having a wavelength smaller than about 380 nm. The sealant may include the first photoinitiator which is polymerized by ultraviolet light having a wavelength range of from about 380 nm to about 400 nm. The liquid crystal may include the second photoinitiator which is polymerized by ultraviolet light having a wavelength smaller than 380 nm. Therefore, the sealant can be selectively hardened by ultraviolet light having a wavelength range of from about 380 nm to about 400 nm transmitted from the photo-mask.
- The above-disclosed subject matter is to be considered illustrative, and not restrictive, and the appended claims are intended to cover all such modifications, enhancements and other embodiments which fall within the true spirit and scope of the present invention. Thus, to the maximum extent allowed by law, the scope of the present invention is to be determined by the broadest permissible interpretation of the following claims and their equivalents, and shall not be restricted or limited by the foregoing detailed description.
Claims (16)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020100123795A KR20120081652A (en) | 2010-12-06 | 2010-12-06 | Photo-mask and manufacturing method for liquid crystal display device used the same |
| KR10-2010-0123795 | 2010-12-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| US20120141925A1 true US20120141925A1 (en) | 2012-06-07 |
| US8852853B2 US8852853B2 (en) | 2014-10-07 |
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| US13/178,013 Active 2031-12-09 US8852853B2 (en) | 2010-12-06 | 2011-07-07 | Photo-mask and method for manufacturing liquid crystal display device using the same |
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| KR (1) | KR20120081652A (en) |
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| CN104330912A (en) * | 2014-11-24 | 2015-02-04 | 京东方科技集团股份有限公司 | Mother board, mother board after box pairing, corresponding manufacturing method and liquid crystal display panel |
| WO2015054905A1 (en) * | 2013-10-15 | 2015-04-23 | 深圳市华星光电技术有限公司 | Manufacturing method of light shield for curing frame adhesive |
| US20150132875A1 (en) * | 2013-11-14 | 2015-05-14 | Samsung Display Co., Ltd. | Mask for forming layer, forming method of layer, and manufacturing method of organic light-emitting diode (oled) display using the same |
| CN105911743A (en) * | 2016-06-21 | 2016-08-31 | 安徽今上显示玻璃有限公司 | Uv light shielding assembly |
| CN108255012A (en) * | 2018-03-26 | 2018-07-06 | 京东方科技集团股份有限公司 | The preparation method of optical mask plate and optical mask substrate based on optical mask plate |
| CN108628021A (en) * | 2018-06-22 | 2018-10-09 | 深圳市华星光电半导体显示技术有限公司 | Manufacturing method, liquid crystal display panel and the liquid crystal display of liquid crystal display panel |
| WO2019071669A1 (en) * | 2017-10-09 | 2019-04-18 | 深圳市华星光电半导体显示技术有限公司 | Pre-uv treating apparatus for evaporation |
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Also Published As
| Publication number | Publication date |
|---|---|
| US8852853B2 (en) | 2014-10-07 |
| KR20120081652A (en) | 2012-07-20 |
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