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US20090294955A1 - Cooling device with a preformed compliant interface - Google Patents

Cooling device with a preformed compliant interface Download PDF

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Publication number
US20090294955A1
US20090294955A1 US12/538,123 US53812309A US2009294955A1 US 20090294955 A1 US20090294955 A1 US 20090294955A1 US 53812309 A US53812309 A US 53812309A US 2009294955 A1 US2009294955 A1 US 2009294955A1
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United States
Prior art keywords
electronic circuit
topography
compliant
cooling device
package
Prior art date
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Abandoned
Application number
US12/538,123
Inventor
Bucknell C. Webb
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GlobalFoundries Inc
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to US12/538,123 priority Critical patent/US20090294955A1/en
Publication of US20090294955A1 publication Critical patent/US20090294955A1/en
Assigned to GLOBALFOUNDRIES U.S. 2 LLC reassignment GLOBALFOUNDRIES U.S. 2 LLC ASSIGNMENT OF ASSIGNOR'S INTEREST Assignors: INTERNATIONAL BUSINESS MACHINES CORPORATION
Assigned to GLOBALFOUNDRIES INC. reassignment GLOBALFOUNDRIES INC. ASSIGNMENT OF ASSIGNOR'S INTEREST Assignors: GLOBALFOUNDRIES U.S. 2 LLC, GLOBALFOUNDRIES U.S. INC.
Abandoned legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/433Auxiliary members in containers characterised by their shape, e.g. pistons
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2039Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body
    • H05K7/20436Inner thermal coupling elements in heat dissipating housings, e.g. protrusions or depressions integrally formed in the housing
    • H05K7/20445Inner thermal coupling elements in heat dissipating housings, e.g. protrusions or depressions integrally formed in the housing the coupling element being an additional piece, e.g. thermal standoff
    • H05K7/20472Sheet interfaces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing

Definitions

  • the invention disclosed broadly relates to the field of electronic devices and more particularly relates to the field of compliant interfaces for cooling electronic devices.
  • ICs integrated circuit devices
  • Cooling devices such as heat sinks
  • a passive heat sink in combination with a system fan has provided a relatively cost-effective cooling solution.
  • the power of ICs has increased exponentially, resulting in a significant increase in the amount of heat generated by these devices, thereby making it extremely difficult to extract heat from these devices in order to cool them.
  • Heat is typically extracted by coupling a heat spreader and a thermal cap to the electronic device as a heat sink.
  • Heat sinks operate by conducting heat from a processor to the heat sink and then radiating it into the ambient air. The better the transfer of heat between the two surfaces (the processor and the heat sink metal) the better the cooling.
  • Some processors come with heat sinks attached to them directly, or interfaced through a thin and soft layer of thermal paste, ensuring a good transfer of heat between the processor and the heat sink.
  • the thermal paste serves not only to transfer heat but to provide some degree of mechanical compliance to compensate for dimensional changes driven by the high operating temperatures of the devices. However, the paste is a weak link in the thermal path. Attempts to thin this layer have resulted in failure of the layer when it is exposed to dimensional changes. There are some known mechanically compliant solutions but these solutions still rely on paste film somewhere in the path.
  • Printed circuit boards are constructed of various components, some of which have varying coefficients of thermal expansion (CTE). When the components are heated, this can produce degradation such as cracking in some of the components. This is a common problem with solder balls. In addition to the problem of varying CTEs, the different components are usually of varying heights. This adds additional air gaps between current interfaces and circuits, in addition to the air gaps that exist between the components. Heat conduction across air gaps is generally poor, thereby lessening the effectiveness of the heat sink.
  • CTE coefficients of thermal expansion
  • an integrated circuit package includes: a substrate; an electronic circuit located on the substrate, the electronic circuit comprising a multi-level topography; a cooling device located over the electronic circuit; a compliant interface disposed between the electronic circuit and the cooling device; the compliant interface comprising a surface making contact with the electronic circuit, and preformed from a compliant material such that the surface substantially conforms to multi-level topography.
  • a method for cooling an electronic device comprises steps of placing an electronic circuit on a substrate, the electronic circuit comprising a multilevel topography; preforming a compliant interface from a compliant material such that a surface conforms to multi-level topography comprising a surface making contact with the electronic circuit; and loading the compliant interface over the electronic circuit.
  • FIG. 1 shows a cross section of an integrated circuit patent with a compliant interface according to an embodiment of the invention
  • FIG. 2 is a flowchart illustrating a method according to an alternate embodiment of the invention.
  • FIG. 3 is a flowchart of the steps of preforming the compliant interface from step 202 of FIG. 2 , according to an embodiment of the present invention
  • FIG. 4 is a flowchart of the steps for performing the compliant interface from step 202 of FIG. 2 , according to another embodiment of the present invention.
  • FIG. 5 a shows flexible supports embedded in a temporary support material, according to an embodiment of the present invention
  • FIG. 5 b shows the shaped flexible supports, according to an embodiment of the present invention
  • FIG. 5 c shows a compliant membrane attached to the surface, according to an embodiment of the present invention.
  • FIG. 5 d shows the addition of a permanent bottom and temporary supports, according to an embodiment of the present invention.
  • FIG. 6 a shows the flexible supports of another embodiment of the present invention.
  • FIG. 6 b shows a baseplate constructed to match the contours of a topography, according to an embodiment of the present invention
  • FIG. 6 c shows the temporary support plastically forced to conform to the baseplate, according to an embodiment of the present invention
  • FIG. 6 d shows the compliant membrane, according to an embodiment of the present invention.
  • FIG. 6 e shows the interface with the temporary support material removed, according to an embodiment of the present invention.
  • a first surface of the interface is preformed to match the contours of the printed circuit board to which it will be affixed. Preforming the interface to match the topography of the circuit board creates an effective thermal seal over any circuit shape, ranging from flat to multi-level. This reduces air gaps, thereby increasing heat conduction away from the chip or chips.
  • This interface may be constructed to fit over more than one chip and other structures as well.
  • a second surface of the interface can also be preformed.
  • the second surface is preformed to match the contours of a heat sink.
  • the interface may be preformed on only one surface, or on both the first and second surfaces.
  • FIG. 1 shows a cross sectional side view of a cooling structure 100 for an electronic circuit 102 .
  • the electronic circuit 102 is deposited on a substrate 104 .
  • the electronic circuit 102 comprises one or more chips and various components forming a multilevel topology.
  • a heat sink 106 is used to cool the electronic circuit 102 .
  • a compliant interface 108 is disposed between the circuit 102 and the heat sink 106 . The compliant interface 108 is preformed to the topography of the circuit 102 so that it interlocks with the circuit 102 , matching the contours of the circuit 102 , when it is placed over the circuit 102 .
  • FIG. 2 is a flowchart illustrating a method 200 according to an embodiment of the invention.
  • the method begins with step 202 : placing the electronic circuit on a substrate.
  • the electronic circuit 102 has a topography that can range from flat to multi-level.
  • Step 204 preforms a compliant interface from a compliant material such that a surface of the material conforms to the multi-level topography of the electronic circuit.
  • the steps for performing the interface 108 will be discussed in detail with respect to the discussion of the flow charts of FIGS. 3 and 4 .
  • Preforming the compliant surface to match the chip topography is feasible for many cooling manufacturing approaches, specifically where the fins, wires or springs that support and carry heat away from the interface are initially potted (encapsulated) in a material that is removed later, such as plastic, and the interface is deposited by plating.
  • the surface could be machined to match the expected topography, with tapers introduced to avoid load peaks, and then plated. The tapers are used for tapering the thickness change.
  • the solid plastic is removed after plating, leaving a relatively thin metal interface supported by the fins, wires or springs.
  • a baseplate matching the topography could be made and the entire sheet of plastic with its internal metal structure pressed to fit the baseplate.
  • Step 206 loads the compliant interface 108 over the electronic circuit 102 .
  • a thermal paste or thermal grease may be used in conjunction with this interface 108 .
  • the interface 108 may be affixed to the heat sink by conventional means or it may be part of the structure of the heat sink.
  • step 204 one embodiment for preforming the compliant interface 108 with a preformed multilevel topography as shown in FIG. 1 is detailed in the flowchart of FIG. 3 and illustrated in FIGS. 5 a - d.
  • step 302 flexible supports 302 for the compliant interface 108 are embedded in a temporary support material such as a plastic or metal 301 . This is shown in FIG. 5 a which shows the preformed surface (the surface in contact with the device).
  • step 304 the support material and flexible supports 302 are cut or machined to conform to the shape of the desired multilevel topography.
  • a compliant membrane 303 is attached or plated onto the surface of the temporary support material.
  • the compliant membrane 303 is important for contact surface area as described above.
  • a thermally conducting metal is the preferred material for this membrane 303 .
  • step 308 a permanent bottom 305 and surrounding 304 supports are attached or plated as shown in FIG. 5 c.
  • step 310 the structure is completed by removal of the temporary support material. This is done by either melting or chemical methods and in step 312 the addition of structures 306 to complete a heatsink, water manifold or vapor chamber structure is attached depending on the compliant membrane device type.
  • Materials for this compliant membrane 303 are preferably metal, such as copper, but could be partly or mostly nickel, gold, silver, or other metals with good thermal conductivity and malleability. Carbon film may also be used.
  • FIG. 4 there is shown a flow chart for another embodiment of a method for construction of a multilevel compliant interface device.
  • the process begins with step 402 wherein flexible supports 402 for the compliant interface are embedded in a temporary support material such as a plastic or metal 401 , as shown in FIG. 6 d (which shows both surfaces preformed).
  • a baseplate 404 is made conforming to the desired multilevel topography as shown in FIG. 6 b.
  • step 406 a mandrel (a device for the formation of cavities) matching the desired topography 403 or a compliant material are used to plastically force the temporary support to conform to the baseplate as shown in FIG. 6 c.
  • step 408 the compliant membrane 405 is plated or attached along with a bottom support which may also be a plated membrane attached to a baseplate 407 .
  • This baseplate 407 may or may not be the same as the baseplate 404 .
  • step 410 the temporary support material is removed by melting or chemical methods (see FIG. 6 e ).
  • step 412 the structure is completed by the addition of structure(s) 406 to complete a heatsink, water manifold or vapor chamber structure attached depending on the compliant membrane device type, also shown in FIG. 6 e.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Thermal Sciences (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

An integrated circuit package includes: a substrate; an electronic circuit located on the substrate, the electronic circuit comprising a topography of at least one level; a cooling device located over the electronic circuit; a compliant interface disposed between the electronic circuit and the cooling device, wherein the compliant interface comprises a first surface and a second surface and wherein the first surface is in thermal contact with the electronic circuit, and wherein the compliant interface is preformed from a compliant material such that the first surface substantially conforms to the topography of the electronic circuit.

Description

    CROSS-REFERENCE TO RELATED APPLICATIONS
  • This application is a division of, and claims priority from, commonly-owned, co-pending U.S. patent application Ser. No. 11/781,854, filed on July 23, 2007.
  • This application relates to technology similar to that discussed in U.S. patent application Ser. No. 11/151,905, “Cooling Structure Using Rigid Movable Elements;” U.S. patent application Ser. No. 11/151,830, “Compliant Thermal Interface Structure Utilizing Spring Elements;” U.S. patent application Ser. No. 11/151,843, “Compliant Thermal Interface Structure Utilizing Spring Elements and Fins;” and U.S. patent application Ser. No. 11/151,831, “Compliant Thermal Interface Structure with Vapor Chamber;” all of which are herein incorporated by reference.
  • STATEMENT REGARDING FEDERALLY SPONSORED-RESEARCH OR DEVELOPMENT
  • Not Applicable
  • INCORPORATION BY REFERENCE OF MATERIAL SUBMITTED ON A COMPACT DISC
  • Not Applicable
  • FIELD OF THE INVENTION
  • The invention disclosed broadly relates to the field of electronic devices and more particularly relates to the field of compliant interfaces for cooling electronic devices.
  • BACKGROUND OF THE INVENTION
  • During the normal operation of a computer, integrated circuit devices (ICs) generate significant amounts of heat. This heat must be continuously removed, or the integrated circuit device may overheat, resulting in damage to the device and/or a reduction in operating performance. Cooling devices, such as heat sinks, have been used in conjunction with ICs in order to avoid such overheating. Generally, a passive heat sink in combination with a system fan has provided a relatively cost-effective cooling solution. In recent years, however, the power of ICs has increased exponentially, resulting in a significant increase in the amount of heat generated by these devices, thereby making it extremely difficult to extract heat from these devices in order to cool them.
  • Heat is typically extracted by coupling a heat spreader and a thermal cap to the electronic device as a heat sink. Heat sinks operate by conducting heat from a processor to the heat sink and then radiating it into the ambient air. The better the transfer of heat between the two surfaces (the processor and the heat sink metal) the better the cooling. Some processors come with heat sinks attached to them directly, or interfaced through a thin and soft layer of thermal paste, ensuring a good transfer of heat between the processor and the heat sink. The thermal paste serves not only to transfer heat but to provide some degree of mechanical compliance to compensate for dimensional changes driven by the high operating temperatures of the devices. However, the paste is a weak link in the thermal path. Attempts to thin this layer have resulted in failure of the layer when it is exposed to dimensional changes. There are some known mechanically compliant solutions but these solutions still rely on paste film somewhere in the path.
  • Printed circuit boards are constructed of various components, some of which have varying coefficients of thermal expansion (CTE). When the components are heated, this can produce degradation such as cracking in some of the components. This is a common problem with solder balls. In addition to the problem of varying CTEs, the different components are usually of varying heights. This adds additional air gaps between current interfaces and circuits, in addition to the air gaps that exist between the components. Heat conduction across air gaps is generally poor, thereby lessening the effectiveness of the heat sink.
  • In some applications (silicon carrier, multichip modules), it would be desirable to cool several adjacent chips of different thicknesses and perhaps interspersed with capacitors and other components.
  • Thus, there is a need for a solution that overcomes these shortcomings.
  • SUMMARY OF THE INVENTION
  • Briefly, according to an embodiment of the present invention, an integrated circuit package includes: a substrate; an electronic circuit located on the substrate, the electronic circuit comprising a multi-level topography; a cooling device located over the electronic circuit; a compliant interface disposed between the electronic circuit and the cooling device; the compliant interface comprising a surface making contact with the electronic circuit, and preformed from a compliant material such that the surface substantially conforms to multi-level topography.
  • In yet another embodiment of the present invention, a method for cooling an electronic device comprises steps of placing an electronic circuit on a substrate, the electronic circuit comprising a multilevel topography; preforming a compliant interface from a compliant material such that a surface conforms to multi-level topography comprising a surface making contact with the electronic circuit; and loading the compliant interface over the electronic circuit.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • The subject matter, which is regarded as the invention, is particularly pointed out and distinctly claimed in the claims at the conclusion of the specification. The foregoing and other features and also the advantages of the invention will be apparent from the following detailed description taken in conjunction with the accompanying drawings. Additionally, the left-most digit of a reference number identifies the drawing in which the reference number first appears.
  • FIG. 1 shows a cross section of an integrated circuit patent with a compliant interface according to an embodiment of the invention;
  • FIG. 2 is a flowchart illustrating a method according to an alternate embodiment of the invention;
  • FIG. 3 is a flowchart of the steps of preforming the compliant interface from step 202 of FIG. 2, according to an embodiment of the present invention;
  • FIG. 4 is a flowchart of the steps for performing the compliant interface from step 202 of FIG. 2, according to another embodiment of the present invention;
  • FIG. 5 a shows flexible supports embedded in a temporary support material, according to an embodiment of the present invention;
  • FIG. 5 b shows the shaped flexible supports, according to an embodiment of the present invention;
  • FIG. 5 c shows a compliant membrane attached to the surface, according to an embodiment of the present invention;
  • FIG. 5 d shows the addition of a permanent bottom and temporary supports, according to an embodiment of the present invention;
  • FIG. 6 a shows the flexible supports of another embodiment of the present invention;
  • FIG. 6 b shows a baseplate constructed to match the contours of a topography, according to an embodiment of the present invention;
  • FIG. 6 c shows the temporary support plastically forced to conform to the baseplate, according to an embodiment of the present invention;
  • FIG. 6 d shows the compliant membrane, according to an embodiment of the present invention; and
  • FIG. 6 e shows the interface with the temporary support material removed, according to an embodiment of the present invention.
  • DETAILED DESCRIPTION
  • We describe a preformed, compliant thermal interface for cooling an electronic device to achieve low thermal resistance and high mechanical compliance. This interface is constructed with a material flexible enough to be shaped, yet robust enough to last many cycles without a degradation in performance. The compliant properties of the interface reduce mechanical stresses brought about by differences in the coefficient of thermal expansion (CTE) of different materials used in the construction of chips and cooling devices. This compliance also addresses the problem of cracked solder balls.
  • A first surface of the interface is preformed to match the contours of the printed circuit board to which it will be affixed. Preforming the interface to match the topography of the circuit board creates an effective thermal seal over any circuit shape, ranging from flat to multi-level. This reduces air gaps, thereby increasing heat conduction away from the chip or chips. This interface may be constructed to fit over more than one chip and other structures as well.
  • According to another embodiment of the present invention, a second surface of the interface can also be preformed. In this embodiment, the second surface is preformed to match the contours of a heat sink. The interface may be preformed on only one surface, or on both the first and second surfaces.
  • FIG. 1 shows a cross sectional side view of a cooling structure 100 for an electronic circuit 102. The electronic circuit 102 is deposited on a substrate 104. The electronic circuit 102 comprises one or more chips and various components forming a multilevel topology. A heat sink 106 is used to cool the electronic circuit 102. A compliant interface 108 is disposed between the circuit 102 and the heat sink 106. The compliant interface 108 is preformed to the topography of the circuit 102 so that it interlocks with the circuit 102, matching the contours of the circuit 102, when it is placed over the circuit 102.
  • FIG. 2 is a flowchart illustrating a method 200 according to an embodiment of the invention. The method begins with step 202: placing the electronic circuit on a substrate. The electronic circuit 102 has a topography that can range from flat to multi-level.
  • Step 204 preforms a compliant interface from a compliant material such that a surface of the material conforms to the multi-level topography of the electronic circuit. The steps for performing the interface 108 will be discussed in detail with respect to the discussion of the flow charts of FIGS. 3 and 4. Preforming the compliant surface to match the chip topography is feasible for many cooling manufacturing approaches, specifically where the fins, wires or springs that support and carry heat away from the interface are initially potted (encapsulated) in a material that is removed later, such as plastic, and the interface is deposited by plating. For such a structure the surface could be machined to match the expected topography, with tapers introduced to avoid load peaks, and then plated. The tapers are used for tapering the thickness change.
  • As illustrated in FIGS. 5 and 6, the solid plastic is removed after plating, leaving a relatively thin metal interface supported by the fins, wires or springs. Alternatively for malleable plastics, a baseplate matching the topography could be made and the entire sheet of plastic with its internal metal structure pressed to fit the baseplate.
  • Step 206 loads the compliant interface 108 over the electronic circuit 102. A thermal paste or thermal grease may be used in conjunction with this interface 108. The interface 108 may be affixed to the heat sink by conventional means or it may be part of the structure of the heat sink.
  • As stated in step 204, one embodiment for preforming the compliant interface 108 with a preformed multilevel topography as shown in FIG. 1 is detailed in the flowchart of FIG. 3 and illustrated in FIGS. 5 a-d.
  • In step 302, flexible supports 302 for the compliant interface 108 are embedded in a temporary support material such as a plastic or metal 301. This is shown in FIG. 5 a which shows the preformed surface (the surface in contact with the device).
  • Next, in step 304 (as shown in FIG. 5 b), the support material and flexible supports 302 are cut or machined to conform to the shape of the desired multilevel topography. Once cut, in step 306, a compliant membrane 303 is attached or plated onto the surface of the temporary support material. The compliant membrane 303 is important for contact surface area as described above. A thermally conducting metal is the preferred material for this membrane 303. In step 308 a permanent bottom 305 and surrounding 304 supports are attached or plated as shown in FIG. 5 c.
  • In step 310 (see FIG. 5 d) the structure is completed by removal of the temporary support material. This is done by either melting or chemical methods and in step 312 the addition of structures 306 to complete a heatsink, water manifold or vapor chamber structure is attached depending on the compliant membrane device type. Materials for this compliant membrane 303 are preferably metal, such as copper, but could be partly or mostly nickel, gold, silver, or other metals with good thermal conductivity and malleability. Carbon film may also be used.
  • Referring to FIG. 4 there is shown a flow chart for another embodiment of a method for construction of a multilevel compliant interface device. The process begins with step 402 wherein flexible supports 402 for the compliant interface are embedded in a temporary support material such as a plastic or metal 401, as shown in FIG. 6 d (which shows both surfaces preformed). Next, in step 404, a baseplate 404 is made conforming to the desired multilevel topography as shown in FIG. 6 b.
  • Following this, in step 406 a mandrel (a device for the formation of cavities) matching the desired topography 403 or a compliant material are used to plastically force the temporary support to conform to the baseplate as shown in FIG. 6 c.
  • In step 408 (see FIG. 6 d) the compliant membrane 405 is plated or attached along with a bottom support which may also be a plated membrane attached to a baseplate 407. This baseplate 407 may or may not be the same as the baseplate 404. Next in step 410 the temporary support material is removed by melting or chemical methods (see FIG. 6 e). In step 412 the structure is completed by the addition of structure(s) 406 to complete a heatsink, water manifold or vapor chamber structure attached depending on the compliant membrane device type, also shown in FIG. 6 e.
  • Therefore, while there have been described what are presently considered to be the preferred embodiments, it will be understood by those skilled in the art that other modifications can be made within the spirit of the invention.

Claims (11)

1. An integrated circuit package comprising:
a substrate;
an electronic circuit located on the substrate, the electronic circuit comprising a topography of at least one level;
a cooling device located over the electronic circuit, the cooling device comprising a topography of at least one level;
a compliant interface disposed between the electronic circuit and the cooling device, wherein the compliant interface comprises a first surface and a second surface and wherein the first surface is in thermal contact with the electronic circuit, and wherein the compliant interface is preformed from a compliant material such that the first surface substantially conforms to the topography of the electronic circuit.
2. The package of claim 1, wherein the cooling device comprises a heat sink.
3. The package of claim 1, wherein the compliant interface comprises a first material having high thermal conductivity and a second material comprising compliant properties.
4. The package of claim 3 wherein the first and second materials are one material.
5. The package of claim 1 wherein the second surface of the compliant interface is in thermal contact with the cooling device and wherein the second surface substantially conforms to the topography of the cooling device.
6. The package of claim 1 wherein the cooling device comprises a plurality of fins.
7. The package of claim 1 wherein the topography of the electronic circuit is a multi-level topography.
8. The package of claim 7 wherein the electronic circuit comprises a plurality of integrated circuits.
9. The package of claim 8 wherein the plurality of integrated circuits are of varying heights.
10. A component comprising:
a compliant material comprising a first surface wherein the first surface is constructed to match a topography of a printed circuit board in an interlocking manner,
wherein the component is disposed between the printed circuit board and a cooling device.
11. The component of claim 10 wherein the topography is a multi-level topography.
US12/538,123 2007-07-23 2009-08-08 Cooling device with a preformed compliant interface Abandoned US20090294955A1 (en)

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US11/781,854 US7645641B2 (en) 2007-07-23 2007-07-23 Cooling device with a preformed compliant interface
US12/538,123 US20090294955A1 (en) 2007-07-23 2009-08-08 Cooling device with a preformed compliant interface

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100019379A1 (en) * 2008-07-24 2010-01-28 Broadcom Corporation External heat sink for bare-die flip chip packages
WO2018125208A1 (en) * 2016-12-30 2018-07-05 Intel IP Corporation Contoured-on-heat-sink, wrapped printed wiring boards for system-in-package apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101583354B1 (en) * 2009-06-01 2016-01-07 삼성전자주식회사 Forming the semiconductor device package
US9204574B1 (en) 2013-12-28 2015-12-01 Advanced Cooling Technologies, Inc. Vapor chamber structure
US20240090185A1 (en) * 2021-01-21 2024-03-14 Ymer Technology AB A method for cooling an object, a cooling device and use of a cooling device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6212074B1 (en) * 2000-01-31 2001-04-03 Sun Microsystems, Inc. Apparatus for dissipating heat from a circuit board having a multilevel surface
US6665187B1 (en) * 2002-07-16 2003-12-16 International Business Machines Corporation Thermally enhanced lid for multichip modules
US20050161806A1 (en) * 2004-01-22 2005-07-28 Divakar Mysore P. Area array packages with overmolded pin-fin heat sinks
US20060077638A1 (en) * 2004-10-12 2006-04-13 Salmon Peter C Adaptive interface using flexible fingers
US7254024B2 (en) * 2004-05-11 2007-08-07 Salmon Peter C Cooling apparatus and method
US7291913B2 (en) * 2003-12-31 2007-11-06 Texas Instruments Incorporated System and method for high performance heat sink for multiple chip devices

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6281573B1 (en) * 1998-03-31 2001-08-28 International Business Machines Corporation Thermal enhancement approach using solder compositions in the liquid state
US6713151B1 (en) * 1998-06-24 2004-03-30 Honeywell International Inc. Compliant fibrous thermal interface
JP2001053205A (en) * 1999-08-05 2001-02-23 Hitachi Ltd Multi-chip module sealing cooling device
US6596139B2 (en) * 2000-05-31 2003-07-22 Honeywell International Inc. Discontinuous high-modulus fiber metal matrix composite for physical vapor deposition target backing plates and other thermal management applications
US7595017B2 (en) * 2002-01-31 2009-09-29 Stmicroelectronics, Inc. Method for using a pre-formed film in a transfer molding process for an integrated circuit
US7355855B2 (en) * 2005-06-14 2008-04-08 International Business Machines Corporation Compliant thermal interface structure utilizing spring elements

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6212074B1 (en) * 2000-01-31 2001-04-03 Sun Microsystems, Inc. Apparatus for dissipating heat from a circuit board having a multilevel surface
US6665187B1 (en) * 2002-07-16 2003-12-16 International Business Machines Corporation Thermally enhanced lid for multichip modules
US7291913B2 (en) * 2003-12-31 2007-11-06 Texas Instruments Incorporated System and method for high performance heat sink for multiple chip devices
US20050161806A1 (en) * 2004-01-22 2005-07-28 Divakar Mysore P. Area array packages with overmolded pin-fin heat sinks
US7254024B2 (en) * 2004-05-11 2007-08-07 Salmon Peter C Cooling apparatus and method
US20060077638A1 (en) * 2004-10-12 2006-04-13 Salmon Peter C Adaptive interface using flexible fingers

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100019379A1 (en) * 2008-07-24 2010-01-28 Broadcom Corporation External heat sink for bare-die flip chip packages
WO2018125208A1 (en) * 2016-12-30 2018-07-05 Intel IP Corporation Contoured-on-heat-sink, wrapped printed wiring boards for system-in-package apparatus
US11037855B2 (en) 2016-12-30 2021-06-15 Intel IP Corporation Contoured-on-heat-sink, wrapped printed wiring boards for system-in-package apparatus

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