US20090294955A1 - Cooling device with a preformed compliant interface - Google Patents
Cooling device with a preformed compliant interface Download PDFInfo
- Publication number
- US20090294955A1 US20090294955A1 US12/538,123 US53812309A US2009294955A1 US 20090294955 A1 US20090294955 A1 US 20090294955A1 US 53812309 A US53812309 A US 53812309A US 2009294955 A1 US2009294955 A1 US 2009294955A1
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- Prior art keywords
- electronic circuit
- topography
- compliant
- cooling device
- package
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/433—Auxiliary members in containers characterised by their shape, e.g. pistons
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2039—Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body
- H05K7/20436—Inner thermal coupling elements in heat dissipating housings, e.g. protrusions or depressions integrally formed in the housing
- H05K7/20445—Inner thermal coupling elements in heat dissipating housings, e.g. protrusions or depressions integrally formed in the housing the coupling element being an additional piece, e.g. thermal standoff
- H05K7/20472—Sheet interfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
Definitions
- the invention disclosed broadly relates to the field of electronic devices and more particularly relates to the field of compliant interfaces for cooling electronic devices.
- ICs integrated circuit devices
- Cooling devices such as heat sinks
- a passive heat sink in combination with a system fan has provided a relatively cost-effective cooling solution.
- the power of ICs has increased exponentially, resulting in a significant increase in the amount of heat generated by these devices, thereby making it extremely difficult to extract heat from these devices in order to cool them.
- Heat is typically extracted by coupling a heat spreader and a thermal cap to the electronic device as a heat sink.
- Heat sinks operate by conducting heat from a processor to the heat sink and then radiating it into the ambient air. The better the transfer of heat between the two surfaces (the processor and the heat sink metal) the better the cooling.
- Some processors come with heat sinks attached to them directly, or interfaced through a thin and soft layer of thermal paste, ensuring a good transfer of heat between the processor and the heat sink.
- the thermal paste serves not only to transfer heat but to provide some degree of mechanical compliance to compensate for dimensional changes driven by the high operating temperatures of the devices. However, the paste is a weak link in the thermal path. Attempts to thin this layer have resulted in failure of the layer when it is exposed to dimensional changes. There are some known mechanically compliant solutions but these solutions still rely on paste film somewhere in the path.
- Printed circuit boards are constructed of various components, some of which have varying coefficients of thermal expansion (CTE). When the components are heated, this can produce degradation such as cracking in some of the components. This is a common problem with solder balls. In addition to the problem of varying CTEs, the different components are usually of varying heights. This adds additional air gaps between current interfaces and circuits, in addition to the air gaps that exist between the components. Heat conduction across air gaps is generally poor, thereby lessening the effectiveness of the heat sink.
- CTE coefficients of thermal expansion
- an integrated circuit package includes: a substrate; an electronic circuit located on the substrate, the electronic circuit comprising a multi-level topography; a cooling device located over the electronic circuit; a compliant interface disposed between the electronic circuit and the cooling device; the compliant interface comprising a surface making contact with the electronic circuit, and preformed from a compliant material such that the surface substantially conforms to multi-level topography.
- a method for cooling an electronic device comprises steps of placing an electronic circuit on a substrate, the electronic circuit comprising a multilevel topography; preforming a compliant interface from a compliant material such that a surface conforms to multi-level topography comprising a surface making contact with the electronic circuit; and loading the compliant interface over the electronic circuit.
- FIG. 1 shows a cross section of an integrated circuit patent with a compliant interface according to an embodiment of the invention
- FIG. 2 is a flowchart illustrating a method according to an alternate embodiment of the invention.
- FIG. 3 is a flowchart of the steps of preforming the compliant interface from step 202 of FIG. 2 , according to an embodiment of the present invention
- FIG. 4 is a flowchart of the steps for performing the compliant interface from step 202 of FIG. 2 , according to another embodiment of the present invention.
- FIG. 5 a shows flexible supports embedded in a temporary support material, according to an embodiment of the present invention
- FIG. 5 b shows the shaped flexible supports, according to an embodiment of the present invention
- FIG. 5 c shows a compliant membrane attached to the surface, according to an embodiment of the present invention.
- FIG. 5 d shows the addition of a permanent bottom and temporary supports, according to an embodiment of the present invention.
- FIG. 6 a shows the flexible supports of another embodiment of the present invention.
- FIG. 6 b shows a baseplate constructed to match the contours of a topography, according to an embodiment of the present invention
- FIG. 6 c shows the temporary support plastically forced to conform to the baseplate, according to an embodiment of the present invention
- FIG. 6 d shows the compliant membrane, according to an embodiment of the present invention.
- FIG. 6 e shows the interface with the temporary support material removed, according to an embodiment of the present invention.
- a first surface of the interface is preformed to match the contours of the printed circuit board to which it will be affixed. Preforming the interface to match the topography of the circuit board creates an effective thermal seal over any circuit shape, ranging from flat to multi-level. This reduces air gaps, thereby increasing heat conduction away from the chip or chips.
- This interface may be constructed to fit over more than one chip and other structures as well.
- a second surface of the interface can also be preformed.
- the second surface is preformed to match the contours of a heat sink.
- the interface may be preformed on only one surface, or on both the first and second surfaces.
- FIG. 1 shows a cross sectional side view of a cooling structure 100 for an electronic circuit 102 .
- the electronic circuit 102 is deposited on a substrate 104 .
- the electronic circuit 102 comprises one or more chips and various components forming a multilevel topology.
- a heat sink 106 is used to cool the electronic circuit 102 .
- a compliant interface 108 is disposed between the circuit 102 and the heat sink 106 . The compliant interface 108 is preformed to the topography of the circuit 102 so that it interlocks with the circuit 102 , matching the contours of the circuit 102 , when it is placed over the circuit 102 .
- FIG. 2 is a flowchart illustrating a method 200 according to an embodiment of the invention.
- the method begins with step 202 : placing the electronic circuit on a substrate.
- the electronic circuit 102 has a topography that can range from flat to multi-level.
- Step 204 preforms a compliant interface from a compliant material such that a surface of the material conforms to the multi-level topography of the electronic circuit.
- the steps for performing the interface 108 will be discussed in detail with respect to the discussion of the flow charts of FIGS. 3 and 4 .
- Preforming the compliant surface to match the chip topography is feasible for many cooling manufacturing approaches, specifically where the fins, wires or springs that support and carry heat away from the interface are initially potted (encapsulated) in a material that is removed later, such as plastic, and the interface is deposited by plating.
- the surface could be machined to match the expected topography, with tapers introduced to avoid load peaks, and then plated. The tapers are used for tapering the thickness change.
- the solid plastic is removed after plating, leaving a relatively thin metal interface supported by the fins, wires or springs.
- a baseplate matching the topography could be made and the entire sheet of plastic with its internal metal structure pressed to fit the baseplate.
- Step 206 loads the compliant interface 108 over the electronic circuit 102 .
- a thermal paste or thermal grease may be used in conjunction with this interface 108 .
- the interface 108 may be affixed to the heat sink by conventional means or it may be part of the structure of the heat sink.
- step 204 one embodiment for preforming the compliant interface 108 with a preformed multilevel topography as shown in FIG. 1 is detailed in the flowchart of FIG. 3 and illustrated in FIGS. 5 a - d.
- step 302 flexible supports 302 for the compliant interface 108 are embedded in a temporary support material such as a plastic or metal 301 . This is shown in FIG. 5 a which shows the preformed surface (the surface in contact with the device).
- step 304 the support material and flexible supports 302 are cut or machined to conform to the shape of the desired multilevel topography.
- a compliant membrane 303 is attached or plated onto the surface of the temporary support material.
- the compliant membrane 303 is important for contact surface area as described above.
- a thermally conducting metal is the preferred material for this membrane 303 .
- step 308 a permanent bottom 305 and surrounding 304 supports are attached or plated as shown in FIG. 5 c.
- step 310 the structure is completed by removal of the temporary support material. This is done by either melting or chemical methods and in step 312 the addition of structures 306 to complete a heatsink, water manifold or vapor chamber structure is attached depending on the compliant membrane device type.
- Materials for this compliant membrane 303 are preferably metal, such as copper, but could be partly or mostly nickel, gold, silver, or other metals with good thermal conductivity and malleability. Carbon film may also be used.
- FIG. 4 there is shown a flow chart for another embodiment of a method for construction of a multilevel compliant interface device.
- the process begins with step 402 wherein flexible supports 402 for the compliant interface are embedded in a temporary support material such as a plastic or metal 401 , as shown in FIG. 6 d (which shows both surfaces preformed).
- a baseplate 404 is made conforming to the desired multilevel topography as shown in FIG. 6 b.
- step 406 a mandrel (a device for the formation of cavities) matching the desired topography 403 or a compliant material are used to plastically force the temporary support to conform to the baseplate as shown in FIG. 6 c.
- step 408 the compliant membrane 405 is plated or attached along with a bottom support which may also be a plated membrane attached to a baseplate 407 .
- This baseplate 407 may or may not be the same as the baseplate 404 .
- step 410 the temporary support material is removed by melting or chemical methods (see FIG. 6 e ).
- step 412 the structure is completed by the addition of structure(s) 406 to complete a heatsink, water manifold or vapor chamber structure attached depending on the compliant membrane device type, also shown in FIG. 6 e.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Thermal Sciences (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
Description
- This application is a division of, and claims priority from, commonly-owned, co-pending U.S. patent application Ser. No. 11/781,854, filed on July 23, 2007.
- This application relates to technology similar to that discussed in U.S. patent application Ser. No. 11/151,905, “Cooling Structure Using Rigid Movable Elements;” U.S. patent application Ser. No. 11/151,830, “Compliant Thermal Interface Structure Utilizing Spring Elements;” U.S. patent application Ser. No. 11/151,843, “Compliant Thermal Interface Structure Utilizing Spring Elements and Fins;” and U.S. patent application Ser. No. 11/151,831, “Compliant Thermal Interface Structure with Vapor Chamber;” all of which are herein incorporated by reference.
- Not Applicable
- Not Applicable
- The invention disclosed broadly relates to the field of electronic devices and more particularly relates to the field of compliant interfaces for cooling electronic devices.
- During the normal operation of a computer, integrated circuit devices (ICs) generate significant amounts of heat. This heat must be continuously removed, or the integrated circuit device may overheat, resulting in damage to the device and/or a reduction in operating performance. Cooling devices, such as heat sinks, have been used in conjunction with ICs in order to avoid such overheating. Generally, a passive heat sink in combination with a system fan has provided a relatively cost-effective cooling solution. In recent years, however, the power of ICs has increased exponentially, resulting in a significant increase in the amount of heat generated by these devices, thereby making it extremely difficult to extract heat from these devices in order to cool them.
- Heat is typically extracted by coupling a heat spreader and a thermal cap to the electronic device as a heat sink. Heat sinks operate by conducting heat from a processor to the heat sink and then radiating it into the ambient air. The better the transfer of heat between the two surfaces (the processor and the heat sink metal) the better the cooling. Some processors come with heat sinks attached to them directly, or interfaced through a thin and soft layer of thermal paste, ensuring a good transfer of heat between the processor and the heat sink. The thermal paste serves not only to transfer heat but to provide some degree of mechanical compliance to compensate for dimensional changes driven by the high operating temperatures of the devices. However, the paste is a weak link in the thermal path. Attempts to thin this layer have resulted in failure of the layer when it is exposed to dimensional changes. There are some known mechanically compliant solutions but these solutions still rely on paste film somewhere in the path.
- Printed circuit boards are constructed of various components, some of which have varying coefficients of thermal expansion (CTE). When the components are heated, this can produce degradation such as cracking in some of the components. This is a common problem with solder balls. In addition to the problem of varying CTEs, the different components are usually of varying heights. This adds additional air gaps between current interfaces and circuits, in addition to the air gaps that exist between the components. Heat conduction across air gaps is generally poor, thereby lessening the effectiveness of the heat sink.
- In some applications (silicon carrier, multichip modules), it would be desirable to cool several adjacent chips of different thicknesses and perhaps interspersed with capacitors and other components.
- Thus, there is a need for a solution that overcomes these shortcomings.
- Briefly, according to an embodiment of the present invention, an integrated circuit package includes: a substrate; an electronic circuit located on the substrate, the electronic circuit comprising a multi-level topography; a cooling device located over the electronic circuit; a compliant interface disposed between the electronic circuit and the cooling device; the compliant interface comprising a surface making contact with the electronic circuit, and preformed from a compliant material such that the surface substantially conforms to multi-level topography.
- In yet another embodiment of the present invention, a method for cooling an electronic device comprises steps of placing an electronic circuit on a substrate, the electronic circuit comprising a multilevel topography; preforming a compliant interface from a compliant material such that a surface conforms to multi-level topography comprising a surface making contact with the electronic circuit; and loading the compliant interface over the electronic circuit.
- The subject matter, which is regarded as the invention, is particularly pointed out and distinctly claimed in the claims at the conclusion of the specification. The foregoing and other features and also the advantages of the invention will be apparent from the following detailed description taken in conjunction with the accompanying drawings. Additionally, the left-most digit of a reference number identifies the drawing in which the reference number first appears.
-
FIG. 1 shows a cross section of an integrated circuit patent with a compliant interface according to an embodiment of the invention; -
FIG. 2 is a flowchart illustrating a method according to an alternate embodiment of the invention; -
FIG. 3 is a flowchart of the steps of preforming the compliant interface fromstep 202 ofFIG. 2 , according to an embodiment of the present invention; -
FIG. 4 is a flowchart of the steps for performing the compliant interface fromstep 202 ofFIG. 2 , according to another embodiment of the present invention; -
FIG. 5 a shows flexible supports embedded in a temporary support material, according to an embodiment of the present invention; -
FIG. 5 b shows the shaped flexible supports, according to an embodiment of the present invention; -
FIG. 5 c shows a compliant membrane attached to the surface, according to an embodiment of the present invention; -
FIG. 5 d shows the addition of a permanent bottom and temporary supports, according to an embodiment of the present invention; -
FIG. 6 a shows the flexible supports of another embodiment of the present invention; -
FIG. 6 b shows a baseplate constructed to match the contours of a topography, according to an embodiment of the present invention; -
FIG. 6 c shows the temporary support plastically forced to conform to the baseplate, according to an embodiment of the present invention; -
FIG. 6 d shows the compliant membrane, according to an embodiment of the present invention; and -
FIG. 6 e shows the interface with the temporary support material removed, according to an embodiment of the present invention. - We describe a preformed, compliant thermal interface for cooling an electronic device to achieve low thermal resistance and high mechanical compliance. This interface is constructed with a material flexible enough to be shaped, yet robust enough to last many cycles without a degradation in performance. The compliant properties of the interface reduce mechanical stresses brought about by differences in the coefficient of thermal expansion (CTE) of different materials used in the construction of chips and cooling devices. This compliance also addresses the problem of cracked solder balls.
- A first surface of the interface is preformed to match the contours of the printed circuit board to which it will be affixed. Preforming the interface to match the topography of the circuit board creates an effective thermal seal over any circuit shape, ranging from flat to multi-level. This reduces air gaps, thereby increasing heat conduction away from the chip or chips. This interface may be constructed to fit over more than one chip and other structures as well.
- According to another embodiment of the present invention, a second surface of the interface can also be preformed. In this embodiment, the second surface is preformed to match the contours of a heat sink. The interface may be preformed on only one surface, or on both the first and second surfaces.
-
FIG. 1 shows a cross sectional side view of acooling structure 100 for anelectronic circuit 102. Theelectronic circuit 102 is deposited on asubstrate 104. Theelectronic circuit 102 comprises one or more chips and various components forming a multilevel topology. Aheat sink 106 is used to cool theelectronic circuit 102. Acompliant interface 108 is disposed between thecircuit 102 and theheat sink 106. Thecompliant interface 108 is preformed to the topography of thecircuit 102 so that it interlocks with thecircuit 102, matching the contours of thecircuit 102, when it is placed over thecircuit 102. -
FIG. 2 is a flowchart illustrating amethod 200 according to an embodiment of the invention. The method begins with step 202: placing the electronic circuit on a substrate. Theelectronic circuit 102 has a topography that can range from flat to multi-level. - Step 204 preforms a compliant interface from a compliant material such that a surface of the material conforms to the multi-level topography of the electronic circuit. The steps for performing the
interface 108 will be discussed in detail with respect to the discussion of the flow charts ofFIGS. 3 and 4 . Preforming the compliant surface to match the chip topography is feasible for many cooling manufacturing approaches, specifically where the fins, wires or springs that support and carry heat away from the interface are initially potted (encapsulated) in a material that is removed later, such as plastic, and the interface is deposited by plating. For such a structure the surface could be machined to match the expected topography, with tapers introduced to avoid load peaks, and then plated. The tapers are used for tapering the thickness change. - As illustrated in
FIGS. 5 and 6 , the solid plastic is removed after plating, leaving a relatively thin metal interface supported by the fins, wires or springs. Alternatively for malleable plastics, a baseplate matching the topography could be made and the entire sheet of plastic with its internal metal structure pressed to fit the baseplate. - Step 206 loads the
compliant interface 108 over theelectronic circuit 102. A thermal paste or thermal grease may be used in conjunction with thisinterface 108. Theinterface 108 may be affixed to the heat sink by conventional means or it may be part of the structure of the heat sink. - As stated in
step 204, one embodiment for preforming thecompliant interface 108 with a preformed multilevel topography as shown inFIG. 1 is detailed in the flowchart ofFIG. 3 and illustrated inFIGS. 5 a-d. - In
step 302,flexible supports 302 for thecompliant interface 108 are embedded in a temporary support material such as a plastic or metal 301. This is shown inFIG. 5 a which shows the preformed surface (the surface in contact with the device). - Next, in step 304 (as shown in
FIG. 5 b), the support material andflexible supports 302 are cut or machined to conform to the shape of the desired multilevel topography. Once cut, instep 306, a compliant membrane 303 is attached or plated onto the surface of the temporary support material. The compliant membrane 303 is important for contact surface area as described above. A thermally conducting metal is the preferred material for this membrane 303. In step 308 a permanent bottom 305 and surrounding 304 supports are attached or plated as shown inFIG. 5 c. - In step 310 (see
FIG. 5 d) the structure is completed by removal of the temporary support material. This is done by either melting or chemical methods and instep 312 the addition ofstructures 306 to complete a heatsink, water manifold or vapor chamber structure is attached depending on the compliant membrane device type. Materials for this compliant membrane 303 are preferably metal, such as copper, but could be partly or mostly nickel, gold, silver, or other metals with good thermal conductivity and malleability. Carbon film may also be used. - Referring to
FIG. 4 there is shown a flow chart for another embodiment of a method for construction of a multilevel compliant interface device. The process begins withstep 402 whereinflexible supports 402 for the compliant interface are embedded in a temporary support material such as a plastic or metal 401, as shown inFIG. 6 d (which shows both surfaces preformed). Next, instep 404, abaseplate 404 is made conforming to the desired multilevel topography as shown inFIG. 6 b. - Following this, in step 406 a mandrel (a device for the formation of cavities) matching the desired topography 403 or a compliant material are used to plastically force the temporary support to conform to the baseplate as shown in
FIG. 6 c. - In step 408 (see
FIG. 6 d) the compliant membrane 405 is plated or attached along with a bottom support which may also be a plated membrane attached to a baseplate 407. This baseplate 407 may or may not be the same as thebaseplate 404. Next instep 410 the temporary support material is removed by melting or chemical methods (seeFIG. 6 e). Instep 412 the structure is completed by the addition of structure(s) 406 to complete a heatsink, water manifold or vapor chamber structure attached depending on the compliant membrane device type, also shown inFIG. 6 e. - Therefore, while there have been described what are presently considered to be the preferred embodiments, it will be understood by those skilled in the art that other modifications can be made within the spirit of the invention.
Claims (11)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/538,123 US20090294955A1 (en) | 2007-07-23 | 2009-08-08 | Cooling device with a preformed compliant interface |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/781,854 US7645641B2 (en) | 2007-07-23 | 2007-07-23 | Cooling device with a preformed compliant interface |
| US12/538,123 US20090294955A1 (en) | 2007-07-23 | 2009-08-08 | Cooling device with a preformed compliant interface |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US11/781,854 Division US7645641B2 (en) | 2007-07-23 | 2007-07-23 | Cooling device with a preformed compliant interface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US20090294955A1 true US20090294955A1 (en) | 2009-12-03 |
Family
ID=40295148
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US11/781,854 Expired - Fee Related US7645641B2 (en) | 2007-07-23 | 2007-07-23 | Cooling device with a preformed compliant interface |
| US12/538,123 Abandoned US20090294955A1 (en) | 2007-07-23 | 2009-08-08 | Cooling device with a preformed compliant interface |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US11/781,854 Expired - Fee Related US7645641B2 (en) | 2007-07-23 | 2007-07-23 | Cooling device with a preformed compliant interface |
Country Status (1)
| Country | Link |
|---|---|
| US (2) | US7645641B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100019379A1 (en) * | 2008-07-24 | 2010-01-28 | Broadcom Corporation | External heat sink for bare-die flip chip packages |
| WO2018125208A1 (en) * | 2016-12-30 | 2018-07-05 | Intel IP Corporation | Contoured-on-heat-sink, wrapped printed wiring boards for system-in-package apparatus |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101583354B1 (en) * | 2009-06-01 | 2016-01-07 | 삼성전자주식회사 | Forming the semiconductor device package |
| US9204574B1 (en) | 2013-12-28 | 2015-12-01 | Advanced Cooling Technologies, Inc. | Vapor chamber structure |
| US20240090185A1 (en) * | 2021-01-21 | 2024-03-14 | Ymer Technology AB | A method for cooling an object, a cooling device and use of a cooling device |
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| US6212074B1 (en) * | 2000-01-31 | 2001-04-03 | Sun Microsystems, Inc. | Apparatus for dissipating heat from a circuit board having a multilevel surface |
| US6665187B1 (en) * | 2002-07-16 | 2003-12-16 | International Business Machines Corporation | Thermally enhanced lid for multichip modules |
| US20050161806A1 (en) * | 2004-01-22 | 2005-07-28 | Divakar Mysore P. | Area array packages with overmolded pin-fin heat sinks |
| US20060077638A1 (en) * | 2004-10-12 | 2006-04-13 | Salmon Peter C | Adaptive interface using flexible fingers |
| US7254024B2 (en) * | 2004-05-11 | 2007-08-07 | Salmon Peter C | Cooling apparatus and method |
| US7291913B2 (en) * | 2003-12-31 | 2007-11-06 | Texas Instruments Incorporated | System and method for high performance heat sink for multiple chip devices |
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| US6281573B1 (en) * | 1998-03-31 | 2001-08-28 | International Business Machines Corporation | Thermal enhancement approach using solder compositions in the liquid state |
| US6713151B1 (en) * | 1998-06-24 | 2004-03-30 | Honeywell International Inc. | Compliant fibrous thermal interface |
| JP2001053205A (en) * | 1999-08-05 | 2001-02-23 | Hitachi Ltd | Multi-chip module sealing cooling device |
| US6596139B2 (en) * | 2000-05-31 | 2003-07-22 | Honeywell International Inc. | Discontinuous high-modulus fiber metal matrix composite for physical vapor deposition target backing plates and other thermal management applications |
| US7595017B2 (en) * | 2002-01-31 | 2009-09-29 | Stmicroelectronics, Inc. | Method for using a pre-formed film in a transfer molding process for an integrated circuit |
| US7355855B2 (en) * | 2005-06-14 | 2008-04-08 | International Business Machines Corporation | Compliant thermal interface structure utilizing spring elements |
-
2007
- 2007-07-23 US US11/781,854 patent/US7645641B2/en not_active Expired - Fee Related
-
2009
- 2009-08-08 US US12/538,123 patent/US20090294955A1/en not_active Abandoned
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6212074B1 (en) * | 2000-01-31 | 2001-04-03 | Sun Microsystems, Inc. | Apparatus for dissipating heat from a circuit board having a multilevel surface |
| US6665187B1 (en) * | 2002-07-16 | 2003-12-16 | International Business Machines Corporation | Thermally enhanced lid for multichip modules |
| US7291913B2 (en) * | 2003-12-31 | 2007-11-06 | Texas Instruments Incorporated | System and method for high performance heat sink for multiple chip devices |
| US20050161806A1 (en) * | 2004-01-22 | 2005-07-28 | Divakar Mysore P. | Area array packages with overmolded pin-fin heat sinks |
| US7254024B2 (en) * | 2004-05-11 | 2007-08-07 | Salmon Peter C | Cooling apparatus and method |
| US20060077638A1 (en) * | 2004-10-12 | 2006-04-13 | Salmon Peter C | Adaptive interface using flexible fingers |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100019379A1 (en) * | 2008-07-24 | 2010-01-28 | Broadcom Corporation | External heat sink for bare-die flip chip packages |
| WO2018125208A1 (en) * | 2016-12-30 | 2018-07-05 | Intel IP Corporation | Contoured-on-heat-sink, wrapped printed wiring boards for system-in-package apparatus |
| US11037855B2 (en) | 2016-12-30 | 2021-06-15 | Intel IP Corporation | Contoured-on-heat-sink, wrapped printed wiring boards for system-in-package apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| US20090027860A1 (en) | 2009-01-29 |
| US7645641B2 (en) | 2010-01-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO PAY ISSUE FEE |
|
| AS | Assignment |
Owner name: GLOBALFOUNDRIES U.S. 2 LLC, NEW YORK Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:INTERNATIONAL BUSINESS MACHINES CORPORATION;REEL/FRAME:036550/0001 Effective date: 20150629 |
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| AS | Assignment |
Owner name: GLOBALFOUNDRIES INC., CAYMAN ISLANDS Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:GLOBALFOUNDRIES U.S. 2 LLC;GLOBALFOUNDRIES U.S. INC.;REEL/FRAME:036779/0001 Effective date: 20150910 |