US12439190B2 - MEMS microphone with ingress protection - Google Patents
MEMS microphone with ingress protectionInfo
- Publication number
- US12439190B2 US12439190B2 US17/802,946 US202117802946A US12439190B2 US 12439190 B2 US12439190 B2 US 12439190B2 US 202117802946 A US202117802946 A US 202117802946A US 12439190 B2 US12439190 B2 US 12439190B2
- Authority
- US
- United States
- Prior art keywords
- microphone
- housing
- mems
- acoustic
- mems microphone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active, expires
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Classifications
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/02—Casings; Cabinets ; Supports therefor; Mountings therein
- H04R1/04—Structural association of microphone with electric circuitry therefor
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/08—Mouthpieces; Microphones; Attachments therefor
- H04R1/083—Special constructions of mouthpieces
- H04R1/086—Protective screens, e.g. all weather or wind screens
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
- H04R1/22—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only
- H04R1/222—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only for microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
Definitions
- the present description relates generally to micro-electro-mechanical systems (MEMS) microphones and more particularly to a MEMS microphone assembly with ingress protection.
- MEMS micro-electro-mechanical systems
- MEMS microphones there remains a strong desire for improved MEMS microphones, and more particularly for a more simplified and easily assembled, MEMS microphone complete with ingress protection that achieves class 2 response by adding different components around the MEMS microphone to form a special construction as disclosed herein.
- a microphone assembly comprises a microphone housing defining an acoustic cavity and comprising a sound inlet for transmitting a sound into the acoustic cavity.
- a micro-electro-mechanical (MEMS) microphone is operatively mounted at least partially within the microphone housing and comprising an aperture acoustically coupled with the acoustic cavity for receiving the sound.
- a MEMS microphone support is adjustably coupled to the microphone housing for supporting the MEMS microphone within the microphone housing, the MEMS microphone support being movable relative to the acoustic cavity to vary the acoustic characteristics of the microphone assembly.
- An acoustic vent is located between the acoustic cavity and the aperture to substantially allow the sound to pass through the acoustic vent while substantially preventing a foreign contaminant from entering the aperture.
- FIG. 1 is a side elevational view of an example MEMS microphone with ingress protection in accordance with an example of the teachings of the present disclosure.
- FIG. 2 is an exploded perspective view of the example MEMS microphone of FIG. 1 .
- FIG. 3 is a top plan view of the example MEMS microphone of FIG. 1 .
- FIG. 4 is a cross section view of the example MEMS microphone taken along line 4 - 4 of FIG. 1 .
- FIG. 5 is a graphical plot of a typical prior art MEMS microphone response.
- FIG. 6 is a graphical plot of the free field response of the example MEMS microphone of FIG. 1 .
- FIG. 7 is an exploded perspective view of another example MEMS microphone with ingress protection.
- FIG. 8 is a top plan view of the example microphone of FIG. 7 .
- FIG. 9 is a side elevational view of the example microphone of FIG. 7 .
- the example MEMS microphone assembly 10 generally comprises a stack built into a 0.5 inch microphone, although it will be appreciated by one of ordinary skill in the art that the size of the example MEMS microphone assembly 10 may vary as desired.
- the example MEMS microphone assembly 10 includes a microphone printed circuit board (PCB) 12 defining an aperture 13 and a MEMS microphone 15 as is known in the art to for detecting sound.
- the aperture 13 may be any suitable wave guide such as an acoustic wave guide.
- the MEMS microphone 15 may be top-ported (i.e., the hole is in a top cover) or bottom-ported (i.e., the hole is in the microphone PCB) as desired.
- the microphone PCB 12 is a 0.5 mm microphone PCB, although any suitable PCB and/or MEMS microphone may be utilized.
- the microphone PCB 12 is supported by a PCB support 14 , which in turn is housed within a microphone housing 16 .
- the space defined between the microphone housing 16 and the microphone PCB 12 is an acoustic cavity having acoustic characteristics that may be varied by any suitable means including varying the size of the acoustic cavity and/or the materials defining the acoustic cavity.
- an acoustic vent 24 is positioned over the aperture 13 in the microphone PCB 12 and sealingly mounted thereto.
- the acoustic vent 24 is a GORE® Portable Electronic Vent for Acoustic and Immersion applications available from W. L. Gore & Associates, Inc, Elkton, MD, USA, model GAW334.
- the provided acoustic vent comprises an expanded polytetrafluoroethylene (ePTFE) material that allows for the transmission of air and sound, while effectively repelling water, other fluids and particulates, thus substantially preventing and/or minimizing ingress of any foreign contaminant into the aperture 13 .
- ePTFE expanded polytetrafluoroethylene
- a porous material such as a foam disk 26 , which, in this example optionally defines another aperture 27 , is provided over the microphone PCB 12 and the acoustic vent 24 .
- a microphone front grill 28 having yet another aperture 29 (e.g., a sound inlet), and being mounted to the microphone housing 16 , such as by a screw thread, friction fit or other suitable closure.
- a ring 30 surrounding an upper portion of the microphone housing 16 and contacts an inner surface of the microphone front grill 28 to provide a spacing.
- the microphone front grill 28 may be slidably coupled to the microphone housing 16 such that the space defined between the microphone front grill 28 and the foam disk 26 may be varied, hence the defined cavity may be a bespoke design.
- the PCB support 14 may, therefore, support the microphone PCB 12 proximate the microphone front grill 28 such that the aperture 29 , acoustic cavity, and aperture 13 are acoustically coupled.
- the position of the lock ring 20 within the microphone housing 16 may allow for the formation of an upper air gap 37 a and a lower air gap 37 b . If the lock ring 20 is screwed in (direction arrow I), the lower air gap 37 b will close up and the MEMS microphone 15 will move closer to the microphone front grill 28 .
- the MEMS microphone assembly 10 may be tunable as desired.
- the MEMS microphone assembly 10 may also be tuned by selection of various microphone PCBs with a sufficient dynamic range.
- the acoustically transparent, acoustic vent 24 meanwhile, provides for ingress protection.
- the designed simple stack of different materials achieves acoustically tuned, sealed, resonance cavity, overcoming problems with repeatability and also resulting in ease of assembly.
- the construction of tuning cavities around the microphone PCB 12 is very simple when compared to known prior art assemblies.
- the MEMS microphone assembly 10 achieves the target Class 1&2 response.
- the present design provides a unique way of adjusting the microphone height to aid tuning of the resonant cavity.
- FIG. 5 illustrates a microphone response of a typical prior art MEMS microphone assembly. More precisely, the plot illustrates a normalized frequency response by plotting a sensitivity against a frequency.
- FIG. 6 meanwhile illustrates a plot of a measured response of the example MEMS microphone assembly 10 , as compared to Class 2 limits.
- the example MEMS microphone assembly 100 is constructed in a similar fashion as the example MEMS microphone assembly 10 .
- the MEMS microphone assembly 100 comprises a MEMS microphone PCB S/A 110 (Printed Circuit Board Sub-Assembly) comprising a microphone PCB 111 defining an aperture 113 located adjacent a microphone 115 .
- MEMS microphone PCB S/A 110 Print Circuit Board Sub-Assembly
- any suitable MEMS microphone e.g., microphone PCB 111 , aperture 113 , and/or microphone 115 .
- the MEMS microphone PCB S/A 110 is supported by a PCB support 114 , which in this instance is generally shaped as a hollow cylinder.
- the PCB support 114 is, in turn, located within a microphone housing 116 .
- the microphone housing 116 is generally shaped as an elongated hollow cylinder that is configured to fit over an outer surface of the PCB support 114 . More precisely, the microphone housing 116 comprises an open end sized, configured, and arranged to accept insertion of the PCB support 114 , and a closed end 116 a defining an aperture 117 .
- the aperture 117 may be any suitable size and configured to allow passage of sound therethrough. In the illustrated example, the aperture 117 is acoustically coupled to the aperture 113 .
- the microphone PCB 111 and/or microphone 115 may be at least partially or completely mounted within the microphone housing 116 .
- the aperture 117 may also allow ingress of various foreign contaminants, such as for instance, fluid, debris, or other similar containment.
- a first acoustic vent 124 is provided adjacent the aperture 117 .
- the first acoustic vent 124 may be any suitable acoustic vent material and in this example, the first acoustic vent 124 is a GORE® Portable Electronic Vent for Acoustic and Immersion applications available from W. L. Gore & Associates, Inc, Elkton, MD, USA, model GAW112.
- the first acoustic vent 124 is supported by a porous material 126 , such as an acoustic tuning material, for instance a foam disk. When assembled (see FIG. 10 ), the first acoustic vent 124 is located between the microphone housing 116 and the porous material 126 . In this example, the first acoustic vent 124 is adhered to the closed end 116 a (e.g. sealingly mounted) and it will be understood that any suitable method of locating the vent may be utilized, including for instance pressing the first acoustic vent 124 against the closed end 116 a by the porous material 126 .
- a porous material 126 such as an acoustic tuning material, for instance a foam disk.
- the porous material 126 meanwhile, is similarly supported by the PCB support 114 and is separated from the MEMS microphone PCB S/A 110 by a distance.
- a gasket seal 118 is located between the MEMS microphone PCB S/A 110 and the microphone housing 116 .
- the gasket seal 118 is an “O-ring” shaped resilient gasket.
- the MEMS microphone PCB S/A 110 may also comprise a second acoustic vent 125 located adjacent and sealingly mounted to the aperture 113 and further assisting in substantially preventing any foreign containments from entering the aperture 113 .
- the second acoustic vent 125 is a GORE® Portable Electronic Vent for Acoustic and Immersion applications available from W. L.
- first acoustic vent 124 or the second acoustic vent 125 may be omitted as desired.
- the example acoustic vents are disclosed as being specific models from a specific manufacture, one of ordinary skill in the art will appreciate that any suitable manufacturer or model may be utilized as desired.
- the PCB support 114 and all supported components may be secured within the microphone housing 116 by a lock ring 120 .
- the lock ring 120 is sized and arranged to be inserted into the microphone housing 116 and provide a securable fit between the lock ring 120 and the microphone housing 116 to securely retain the components within the microphone housing 116 .
- the lock ring 120 may include a screw thread for coupling with an inner surface of the microphone housing 116 .
- Other suitable methods of mounting the lock ring 120 may be employed as desired. As with the example of FIGS.
- the selection of materials and the adjustability of the securing location of the MEMS microphone PCB S/A 110 within the housing allows for tuning of the MEMS microphone assembly 100 and the achievement of various desired acoustical characteristics, including IEC 61672 Class 2 compliance.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Health & Medical Sciences (AREA)
- Otolaryngology (AREA)
- Details Of Audible-Bandwidth Transducers (AREA)
Abstract
Description
Claims (19)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17/802,946 US12439190B2 (en) | 2020-02-27 | 2021-02-24 | MEMS microphone with ingress protection |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202062982429P | 2020-02-27 | 2020-02-27 | |
| US17/802,946 US12439190B2 (en) | 2020-02-27 | 2021-02-24 | MEMS microphone with ingress protection |
| PCT/US2021/019437 WO2021173688A1 (en) | 2020-02-27 | 2021-02-24 | Mems microphone with ingress protection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| US20230146074A1 US20230146074A1 (en) | 2023-05-11 |
| US12439190B2 true US12439190B2 (en) | 2025-10-07 |
Family
ID=77491476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US17/802,946 Active 2041-11-17 US12439190B2 (en) | 2020-02-27 | 2021-02-24 | MEMS microphone with ingress protection |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12439190B2 (en) |
| EP (1) | EP4111702A4 (en) |
| CN (1) | CN115211137A (en) |
| WO (1) | WO2021173688A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12413887B1 (en) * | 2022-08-31 | 2025-09-09 | Waymo Llc | Sintered filter material and grill design to reduce and mitigate wind noise for perception |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7773762B2 (en) * | 2006-06-30 | 2010-08-10 | Kabushiki Kaisha Audio-Technica | Variable directional condenser microphone unit |
| US20130142358A1 (en) | 2011-12-06 | 2013-06-06 | Knowles Electronics, Llc | Variable Directivity MEMS Microphone |
| US20140044297A1 (en) | 2012-08-10 | 2014-02-13 | Knowles Electronics, Llc | Microphone Assembly With Barrier To Prevent Contaminant Infiltration |
| US20150043747A1 (en) * | 2012-03-12 | 2015-02-12 | The Secretary Of State For Business, Innovation & Skills Of Her Majesty's Britannic Government | Microphone System and Method |
| US20150139432A1 (en) | 2013-10-30 | 2015-05-21 | SVANTEK Sp. z o.o | Device for measuring sound level |
| US20180091881A1 (en) * | 2016-09-23 | 2018-03-29 | Apple Inc. | Shock mounted transducer assembly |
| US9936306B1 (en) | 2017-03-06 | 2018-04-03 | AAC Technologies Pte. Ltd. | MEMS microphone |
| WO2019246079A1 (en) | 2018-06-19 | 2019-12-26 | W.L. Gore & Associates, Inc. | Protection of integrated low power system designed to monitor the acoustic environment |
| JP6644965B2 (en) | 2015-12-03 | 2020-02-12 | 株式会社オーディオテクニカ | Narrow directional microphone |
-
2021
- 2021-02-24 US US17/802,946 patent/US12439190B2/en active Active
- 2021-02-24 WO PCT/US2021/019437 patent/WO2021173688A1/en not_active Ceased
- 2021-02-24 EP EP21760020.4A patent/EP4111702A4/en active Pending
- 2021-02-24 CN CN202180017824.8A patent/CN115211137A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7773762B2 (en) * | 2006-06-30 | 2010-08-10 | Kabushiki Kaisha Audio-Technica | Variable directional condenser microphone unit |
| US20130142358A1 (en) | 2011-12-06 | 2013-06-06 | Knowles Electronics, Llc | Variable Directivity MEMS Microphone |
| US20150043747A1 (en) * | 2012-03-12 | 2015-02-12 | The Secretary Of State For Business, Innovation & Skills Of Her Majesty's Britannic Government | Microphone System and Method |
| US20140044297A1 (en) | 2012-08-10 | 2014-02-13 | Knowles Electronics, Llc | Microphone Assembly With Barrier To Prevent Contaminant Infiltration |
| US20150139432A1 (en) | 2013-10-30 | 2015-05-21 | SVANTEK Sp. z o.o | Device for measuring sound level |
| JP6644965B2 (en) | 2015-12-03 | 2020-02-12 | 株式会社オーディオテクニカ | Narrow directional microphone |
| US20180091881A1 (en) * | 2016-09-23 | 2018-03-29 | Apple Inc. | Shock mounted transducer assembly |
| US9936306B1 (en) | 2017-03-06 | 2018-04-03 | AAC Technologies Pte. Ltd. | MEMS microphone |
| WO2019246079A1 (en) | 2018-06-19 | 2019-12-26 | W.L. Gore & Associates, Inc. | Protection of integrated low power system designed to monitor the acoustic environment |
Non-Patent Citations (2)
| Title |
|---|
| Extended European Search Report from EP application No. 21760020.4, dated Mar. 18, 2024, 10 pp. |
| ISA/US, Int. Search Report and Written Opinion issued for PCT application No. PCT/US21/19437, dated Jul. 15, 2021, 16 pages. |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021173688A1 (en) | 2021-09-02 |
| US20230146074A1 (en) | 2023-05-11 |
| EP4111702A1 (en) | 2023-01-04 |
| EP4111702A4 (en) | 2024-04-17 |
| CN115211137A (en) | 2022-10-18 |
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Owner name: CASELLA HOLDINGS LIMITED, UNITED KINGDOM Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:IDEAL INDUSTRIES, INC.;REEL/FRAME:061244/0685 Effective date: 20220922 Owner name: CASELLA HOLDINGS LIMITED, UNITED KINGDOM Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:IDEAL INDUSTRIES, INC.;REEL/FRAME:061244/0811 Effective date: 20220922 Owner name: CASELLA HOLDINGS LIMITED, UNITED KINGDOM Free format text: ASSIGNMENT OF ASSIGNOR'S INTEREST;ASSIGNOR:IDEAL INDUSTRIES, INC.;REEL/FRAME:061244/0685 Effective date: 20220922 |
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