US10497882B2 - Light emitting diode and method of fabricating the same - Google Patents
Light emitting diode and method of fabricating the same Download PDFInfo
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- US10497882B2 US10497882B2 US15/589,061 US201715589061A US10497882B2 US 10497882 B2 US10497882 B2 US 10497882B2 US 201715589061 A US201715589061 A US 201715589061A US 10497882 B2 US10497882 B2 US 10497882B2
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- transport layer
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- emitting diode
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- -1 amine compound Chemical class 0.000 claims abstract description 33
- 230000005525 hole transport Effects 0.000 claims abstract description 33
- 150000001875 compounds Chemical class 0.000 claims abstract description 25
- 150000003973 alkyl amines Chemical class 0.000 claims description 14
- 125000005263 alkylenediamine group Chemical group 0.000 claims description 12
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 8
- KLFKZIQAIPDJCW-GPOMZPHUSA-N 1,2-dihexadecanoyl-sn-glycero-3-phosphoserine Chemical compound CCCCCCCCCCCCCCCC(=O)OC[C@H](COP(O)(=O)OC[C@H](N)C(O)=O)OC(=O)CCCCCCCCCCCCCCC KLFKZIQAIPDJCW-GPOMZPHUSA-N 0.000 claims description 6
- 229910052745 lead Inorganic materials 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 4
- GNMQOUGYKPVJRR-UHFFFAOYSA-N nickel(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Ni+3].[Ni+3] GNMQOUGYKPVJRR-UHFFFAOYSA-N 0.000 claims description 4
- PZFKDUMHDHEBLD-UHFFFAOYSA-N oxo(oxonickeliooxy)nickel Chemical compound O=[Ni]O[Ni]=O PZFKDUMHDHEBLD-UHFFFAOYSA-N 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 83
- 239000007789 gas Substances 0.000 description 16
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 9
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 7
- 239000000843 powder Substances 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229920000144 PEDOT:PSS Polymers 0.000 description 3
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 3
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 2
- 229960001701 chloroform Drugs 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- GEQBRULPNIVQPP-UHFFFAOYSA-N 2-[3,5-bis(1-phenylbenzimidazol-2-yl)phenyl]-1-phenylbenzimidazole Chemical compound C1=CC=CC=C1N1C2=CC=CC=C2N=C1C1=CC(C=2N(C3=CC=CC=C3N=2)C=2C=CC=CC=2)=CC(C=2N(C3=CC=CC=C3N=2)C=2C=CC=CC=2)=C1 GEQBRULPNIVQPP-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- ZASWJUOMEGBQCQ-UHFFFAOYSA-L dibromolead Chemical compound Br[Pb]Br ZASWJUOMEGBQCQ-UHFFFAOYSA-L 0.000 description 1
- FZHSXDYFFIMBIB-UHFFFAOYSA-L diiodolead;methanamine Chemical compound NC.I[Pb]I FZHSXDYFFIMBIB-UHFFFAOYSA-L 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- SDKPSXWGRWWLKR-UHFFFAOYSA-M sodium;9,10-dioxoanthracene-1-sulfonate Chemical compound [Na+].O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2S(=O)(=O)[O-] SDKPSXWGRWWLKR-UHFFFAOYSA-M 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
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- H01L51/0077—
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- H01L51/0003—
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- H01L51/0008—
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- H01L51/0029—
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
- H10K50/115—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers comprising active inorganic nanostructures, e.g. luminescent quantum dots
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- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
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- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
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- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
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- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
- H10K85/113—Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
- H10K85/1135—Polyethylene dioxythiophene [PEDOT]; Derivatives thereof
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- H10K85/50—Organic perovskites; Hybrid organic-inorganic perovskites [HOIP], e.g. CH3NH3PbI3
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
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- H10K50/14—Carrier transporting layers
- H10K50/15—Hole transporting layers
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- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/14—Carrier transporting layers
- H10K50/16—Electron transporting layers
Definitions
- the present disclosure relates to a diode and a method of fabricating the same, and more particularly to a light emitting diode and a method of fabricating the same.
- DSSC dye-sensitized solar cells
- organic-inorganic hybrid perovskite crystalline material methylammonium lead iodide (CH 3 NH 3 Pbl 3 )
- organic polymers including (Poly (3,4-ethylenedioxythiophene): poly(styrene-sulfonate) (PEDOT: PSS) as a hole transport layer to prepare a solid state DSSC.
- PEDOT poly(styrene-sulfonate)
- a perovskite structure can also be used as an active layer of a light emitting diode for emitting a light.
- the conventional light emitting diode with the perovskite structure cannot achieve a satisfying requirement on a highest luminous intensity and a luminous efficiency.
- An object of the present disclosure is to provide a light emitting diode, which uses an active layer with a mesophase structure (also referred to as an intermediate structure) to improve a luminous intensity and a luminous efficiency of the light emitting diode.
- a mesophase structure also referred to as an intermediate structure
- Another object of the present disclosure is to provide a method of fabricating a light emitting diode, which uses an organic amine compound gas to perform a modifying step on a perovskite structure compound layer, so as to form an active layer with a mesophase structure of an organic amine compound and a perovskite structure compound. Therefore, a luminous intensity and a luminous efficiency of the resulting light emitting diode are improved.
- the present disclosure provides a light emitting diode, comprising: a hole transport layer, an active layer, and an electron transport layer.
- the active layer is disposed on the hole transport layer, wherein the active layer has a mesophase structure of an organic amine compound and a perovskite structure compound.
- the electron transport layer is disposed on the active layer.
- the hole transport layer is formed of nickel oxide.
- the electron transport layer is formed of TPBi, Bphen, BCP, TpPyPB, DPPS, or ZnO.
- the organic amine compound is selected from alkylamine or alkylenediamine.
- a structural formula of the perovskite structure compound is AMX 3 , wherein the A is selected from group IA metal, H, NH 4 , alkylamine, or alkylenediamine; the M is Pb, Sn, or Ge; and the X is Cl, Br, or I.
- the present disclosure provides a method of fabricating a light emitting diode, comprising steps of: providing a hole transport layer; forming a perovskite structure compound layer on the hole transport layer; performing a modifying step, by an organic amine compound gas, on the perovskite structure compound layer to form an active layer, wherein the active layer has a mesophase structure of an organic amine compound and a perovskite structure compound; and forming an electron transport layer on the active layer.
- the organic amine compound gas is selected from alkylamine gas or alkylenediamine gas.
- the hole transport layer is formed of nickel oxide, wherein the nickel oxide is NiO, Ni 2 O 3 or a complex thereof.
- the electron transport layer is formed of TPBi, Bphen, BCP, TpPyPB, DPPS, or ZnO.
- a structural formula of the perovskite structure compound is AMX 3 , wherein A is selected from group IA metal, H, NH 4 , alkylamine, or alkylenediamine; M is Pb, Sn, or Ge; and X is Cl, Br, or I.
- FIG. 1 is a cross-sectional schematic diagram of a light emitting diode according to one embodiment of the present disclosure.
- FIG. 2 is a flow chart of a method of fabricating a light emitting diode according to one embodiment of the present disclosure.
- FIG. 3A is an experimental data diagram of luminous intensity versus voltage, during the modifying step, which is performed using different times (20 seconds, 60 seconds, 80 seconds, and 100 seconds, respectively).
- FIG. 3B is an experimental data diagram of luminous efficiency versus current density, during the modifying step, which is performed using different times (20 seconds, 60 seconds, 80 seconds, and 100 seconds, respectively).
- FIG. 1 is a cross-sectional schematic diagram of a light emitting diode 10 according to one embodiment of the present disclosure.
- the light emitting diode 10 includes a hole transport layer 11 , an active layer 12 , and an electron transport layer 13 .
- the hole transport layer 11 can be disposed on a transparent conductive substrate 14 .
- the transparent conductive substrate 14 is formed by coating Indium tin oxide (ITO) on a glass substrate.
- ITO Indium tin oxide
- PEDOT:PSS poly(3,4-ethylenedioxythiophene)/poly(styrenesulfonate)
- PEDOT:PSS poly(3,4-ethylenedioxythiophene)/poly(styrenesulfonate)
- the hole transport layer cab be formed of nickel oxide (NiO x ), such as NiO, Ni 2 O 3 or a complex thereof.
- a thickness of the hole transport layer 11 is ranged from 0.1 nm to 5 nm (e.g., 1 nm).
- the active layer 12 is disposed on the hole transport layer 11 , wherein the active layer 12 has a mesophase structure of an organic amine compound and a perovskite structure compound.
- the active layer 12 is used to produce a light.
- the organic amine compound can be selected from alkylamine (R n NH 2 ) or alkylenediamine (R n (NH 2 ) 2 ).
- the alkylamine is, for example, Methylamine (MA; CH 3 NH 2 ).
- the perovskite structure compound includes methylamine lead halide (CH 3 NH 3 PbX 3 ), wherein X is Cl, Br, or I.
- a thickness of the active layer 12 is ranged from 380 nm to 400 nm (e.g., 390 nm).
- mesophase structure or “intermediate structure” means that a structure is formed after the perovskite structure compound is modified by an organic amine compound.
- a mesophase structure of CH 3 NH 2 /CH 3 NH 3 PbX 3 is obtained by using a methylamine gas to modify a methylamine lead halide.
- the electron transport layer 13 is disposed on the active layer 12 .
- the electron transport layer 13 can be formed of TPBi (1,3,5-tris(1-phenyl-1H-benzimidazol-2-yl)benzene), Bphen, BCP, TpPyPB, DPPS, or ZnO. It is to be noted that other materials commonly used in the electron transport layer 13 in the art may also be used.
- a thickness of the electron transport layer 13 is, for example, ranged from 1 to 1000 nm.
- the thickness can be 50 nm, 100 nm, 200 nm, 500 nm, or 750 nm.
- an electrode 15 can be disposed on the electron transport layer 13 .
- a lithium fluoride (LiF) layer 151 and an aluminum (Al) layer 152 is sequentially stacked on the electron transport layer 13 .
- a thickness of the lithium fluoride layer 151 is ranged from 0.8 to 1.2 nm (e.g., 0.9 nm, 1.0 nm, or 1.1 nm).
- a thickness of the aluminum layer 152 is ranged from 70 to 100 nm (e.g., 75 nm, 80 nm, 85 nm, 90 nm, or 95 nm).
- FIG. 2 is a flow chart of a method 20 of fabricating a light emitting diode according to one embodiment of the present disclosure.
- the method 20 of fabricating the light emitting diode 10 mainly includes the following steps 21 to 24 of: providing a hole transport layer 11 (step 21 ); forming a perovskite structure compound layer on the hole transport layer 11 (step 22 ); performing a modifying step, by an organic amine compound gas, on the perovskite structure compound layer to form an active layer 12 , wherein the active layer 12 has a mesophase structure of an organic amine compound and a perovskite structure compound (step 23 ); and forming an electron transport layer 13 on the active layer 12 (step 24 ).
- steps 21 to 24 of: providing a hole transport layer 11 (step 21 ); forming a perovskite structure compound layer on the hole transport layer 11 (step 22 ); performing a modifying step, by an organic amine compound gas, on the perovskite structure compound layer to form an active layer
- the method 20 of fabricating the light emitting diode 10 of one embodiment of the present disclosure has the step 21 of: providing a hole transport layer 11 .
- the hole transport layer 11 is formed on a transparent conductive substrate 14 .
- the transparent conductive substrate 14 is formed by coating Indium tin oxide (ITO) on a glass substrate.
- ITO Indium tin oxide
- a commercially available PEDOT:PSS poly(3,4-ethylenedioxythiophene)/poly(styrenesulfonate)
- the hole transport layer 11 can be formed of nickel oxide (NiO x ), such as NiO, Ni 2 O 3 or a complex thereof.
- a thickness of the hole transport layer 11 is ranged from 0.1 nm to 5 nm (e.g., 1 nm).
- a nickel dicarboxylate (Ni(HCOO) 2 ) powder (or other organic metal salt powders, such as an organic nickel salt powder, an organic copper salt powder or an organic gold salt powder) is put in a container, and ethylene glycol (or other alcohols), ethanolamine and ethylenediamine solvents are added into the container. After stirring and dissolving, an organic metal gel solution is formed. Thereafter, the organic metal gel solution is spin-coated on the transparent conductive substrate 14 at a rotation speed of 4500 RPM for 90 seconds.
- the coated transparent conductive substrate 14 is heated in an air atmosphere or an oxygen atmosphere at a temperature from 10 to 1000° C. (e.g., about 400° C.) for about 1 to 600 minutes (for example, about 10 minutes), so as to achieve the flat hole transport layer 11 .
- a thickness of the hole transport layer 11 is ranged from 0.1 nm to 5 nm (e.g., 1 nm).
- the method 20 of fabricating the light emitting diode 10 of one embodiment of the present disclosure has the step 22 of: forming a perovskite structure compound layer on the hole transport layer 11 .
- step 22 for example, CH 3 NH 3 Br powder and PbBr 2 powder can be mixed at a molar ration of 1.05:1 and added into a solvent (such as N,N-Dimethylmethanamide, Dimethyl sulfoxide(DMSO) or ⁇ -Butyrolactone), so as to prepare a mixed solution of 50% by weight. Thereafter, the mixed solution is spin-coated on the hole transport layer 11 and heated at a temperature from 50 to 500° C.
- a solvent such as N,N-Dimethylmethanamide, Dimethyl sulfoxide(DMSO) or ⁇ -Butyrolactone
- the spin-coated process can be divided into two stages. For example, a first stage has a rotation speed of 10-3000 RPM (e.g., 500 RPM) for 1-7 seconds (e.g., 7 seconds); and a second stage has a rotation speed of 3000-10000 RPM (e.g., 3000 RPM) for 1-1000 seconds (e.g., 90 seconds), wherein when the second stage is at 60 seconds, an organic solvent (chlorobenzene, benzene, toluene, diethyl ether, hexane, cyclohexane, chloroform, dichloromethane, or trichloromethane) can be added for washing the mixed solution spin-coated on the hole transport layer 11 , so as to improve a rapid precipitation of CH 3 NH 3 PbBr 2 .
- an organic solvent chlorobenzene, benzene, toluene, diethyl ether, hexane, cyclohexane, chlor
- the method 20 of fabricating the light emitting diode 10 of one embodiment of the present disclosure has the step 23 of: performing a modifying step, by an organic amine compound gas, on the perovskite structure compound layer to form an active layer 12 , wherein the active layer 12 has a mesophase structure of an organic amine compound and a perovskite structure compound.
- the organic amine compound gas is selected from alkylamine (R n NH 2 ) gas or alkylenediamine (Rn(NH 2 ) 2 ) gas.
- a solid-state strong alkali e.g., potassium hydroxide, sodium hydroxide
- a solid-state alkylamine halide e.g., CH 3 NH 2 Cl
- an alkylamine (R n NH 2 ) gas e.g., methylamine gas
- a solid-state strong alkali e.g., potassium hydroxide, sodium hydroxide
- a solid-state alkyl diamine halide can be reacted with a solid-state alkyl diamine halide to form an alkyl diamine (Rn(NH 2 ) 2 ) gas.
- a water-absorbing agent e.g., calcium oxide
- the above reaction of producing the alkylamine gas (or the alkylenediamine gas) and the modifying step can be performed in a closed environment.
- a thickness of the active layer 12 is such as ranged from 380 to 400 nm (e.g., 390 nm).
- the modifying step is performed for a time ranged from 0.1 to 1000 seconds.
- the method 20 of fabricating the light emitting diode 10 of one embodiment of the present disclosure has the step 24 of: forming an electron transport layer 13 on the active layer 12 .
- a material selected from TPBi, Bphen, BCP, TpPyPB, DPPS, or ZnO can be vapor-deposited on the active layer 12 by a commercially available vacuum thermal evaporator, so as to form the electron transport layer 13 .
- a thickness of the electron transport layer 13 is, for example, ranged from 1 to 1000 nm (e.g., 50 nm).
- an electrode 15 can be formed on the electron transport layer 13 by using a vapor-deposition method.
- a lithium fluoride layer 151 and an aluminum layer 152 is sequentially stacked on the electron transport layer 13 .
- a thickness of the lithium fluoride layer 151 is ranged from 0.8 to 1.2 nm
- a thickness of the aluminum layer 152 is ranged from 70 to 100 nm.
- FIG. 3A is an experimental data diagram of luminous intensity versus voltage, during the modifying step which is performed using different times (20 seconds, 60 seconds, 80 seconds, and 100 seconds, respectively); and FIG. 3B is an experimental data diagram of luminous efficiency versus current density, during the modifying step which is performed using different times (20 seconds, 60 seconds, 80 seconds, and 100 seconds, respectively). It is noted that, the experimental data in FIGS. 3A and 3B also includes an experimental data without performing the modifying step (i.e., 0 seconds) as a comparative example.
- a light turn-on voltage of the comparative example is about 5.8 V, and light turn-on voltages of the embodiments are all smaller than 4 V.
- the comparative example has a luminous efficiency of 0.07 cd/A and has a highest luminous intensity of 583.0 cd/m 2 upon a voltage being 9.0 V.
- a luminous efficiency is 3.1 cd/A and a highest luminous intensity is 6670.0 cd/m 2 upon a voltage being 9.0 V.
- a luminous efficiency is 3.14 cd/A, and a highest luminous intensity is 16900 cd/m 2 upon a voltage being 9.0 V.
- a luminous efficiency is 15.9 cd/A and a highest luminous intensity is 65300 cd/m 2 upon a voltage being 9.0 V.
- a luminous efficiency is 6.04 cd/A and a highest luminous intensity is 31900 cd/m 2 upon a voltage being 9.0 V.
- the highest luminous intensity and the luminous efficiency of the embodiment of the present disclosure are respectively far more than the highest luminous intensity (20000 cd/m 2 ) and the luminous efficiency (5 cd/A) of the conventional technology.
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| CN111063815A (en) | 2019-12-10 | 2020-04-24 | 深圳市华星光电半导体显示技术有限公司 | Light-emitting device and preparation method thereof |
| CN111584723B (en) * | 2020-05-11 | 2022-08-05 | 深圳市华星光电半导体显示技术有限公司 | Light emitting device and method of manufacturing the same |
| TWI803049B (en) * | 2021-11-11 | 2023-05-21 | 國立雲林科技大學 | Nano-structure-modified organic component manufacturing method and structure thereof |
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| TW201806186A (en) | 2018-02-16 |
| US20180033976A1 (en) | 2018-02-01 |
| TWI626768B (en) | 2018-06-11 |
| CN107681058A (en) | 2018-02-09 |
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