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UA102728C2 - Структура микро-электро-механической системы (mems) с гибкой мембраной и усовершенствованным управлением электрическими средствами - Google Patents

Структура микро-электро-механической системы (mems) с гибкой мембраной и усовершенствованным управлением электрическими средствами

Info

Publication number
UA102728C2
UA102728C2 UAA201111172A UAA201111172A UA102728C2 UA 102728 C2 UA102728 C2 UA 102728C2 UA A201111172 A UAA201111172 A UA A201111172A UA A201111172 A UAA201111172 A UA A201111172A UA 102728 C2 UA102728 C2 UA 102728C2
Authority
UA
Ukraine
Prior art keywords
actuation means
flexible membrane
mems structure
membrane
improved electric
Prior art date
Application number
UAA201111172A
Other languages
English (en)
Ukrainian (uk)
Inventor
Карим Сегюени
Николас Лорфелин
Original Assignee
Дельфмемс
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Дельфмемс filed Critical Дельфмемс
Publication of UA102728C2 publication Critical patent/UA102728C2/ru

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/018—Switches not provided for in B81B2201/014 - B81B2201/016

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Tents Or Canopies (AREA)

Abstract

МЭМС (MEMS)-структура, содержащая гибкую мембрану (6), которая состоит из основной продольной оси (6а), которая определяет продольное направление (X), по меньшей мере, одну опору (3, 3 ') под гибкой мембраной (6), электрический опускающий активационный механизм (7), способный сгибать гибкую мембрану (6) в нижнее форсированное положение, электрический поднимающий активационный механизм (8), способный сгибать мембрану (6) в верхнее форсированное положение. Электрический опускающий активационный механизм (7) или электрический поднимающий активационный механизм (8) содержат активационную область (7с или 8с), которая проходит под частью мембраны (6) и способна создавать силы натяжения, которые воздействуют на мембрану (6) одновременно по обе стороны от указанной, по крайней мере, одной опоры (3) в продольном направлении (X).
UAA201111172A 2009-03-20 2010-03-18 Структура микро-электро-механической системы (mems) с гибкой мембраной и усовершенствованным управлением электрическими средствами UA102728C2 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP09370007A EP2230679B1 (en) 2009-03-20 2009-03-20 Mems structure with a flexible membrane and improved electric actuation means
PCT/EP2010/001701 WO2010105827A1 (en) 2009-03-20 2010-03-18 Mems structure with a flexible membrane and improved electric actuation means

Publications (1)

Publication Number Publication Date
UA102728C2 true UA102728C2 (ru) 2013-08-12

Family

ID=40996556

Family Applications (1)

Application Number Title Priority Date Filing Date
UAA201111172A UA102728C2 (ru) 2009-03-20 2010-03-18 Структура микро-электро-механической системы (mems) с гибкой мембраной и усовершенствованным управлением электрическими средствами

Country Status (15)

Country Link
US (1) US8593239B2 (ru)
EP (1) EP2230679B1 (ru)
JP (1) JP5563057B2 (ru)
KR (1) KR20120006008A (ru)
CN (1) CN102362330B (ru)
AU (1) AU2010225137B2 (ru)
BR (1) BRPI1006447A2 (ru)
CA (1) CA2755052A1 (ru)
DK (1) DK2230679T3 (ru)
ES (1) ES2388126T3 (ru)
IL (1) IL215099A (ru)
RU (1) RU2011139816A (ru)
SG (1) SG173814A1 (ru)
UA (1) UA102728C2 (ru)
WO (1) WO2010105827A1 (ru)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10125008B2 (en) 2013-03-15 2018-11-13 Wispry, Inc. Actuator plate partitioning and control devices and methods
CN106536403B8 (zh) 2014-05-28 2019-08-20 3M创新有限公司 柔性基底上的微机电系统装置
EP3038125A1 (en) * 2014-12-22 2016-06-29 DelfMEMS SAS Mems structure with multilayer membrane
EP3038126A1 (en) 2014-12-22 2016-06-29 DelfMEMS SAS MEMS structure with thick movable membrane
FR3031098A1 (fr) 2014-12-26 2016-07-01 Delfmems Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane mobile en translation et une electrode d'actionnement isolee de la membrane par une couche dielectrique
FR3031096A1 (fr) 2014-12-26 2016-07-01 Delfmems Dispositif microelectromecanique ou nanoelectromecanique comportant une membrane qui est mobile en translation et est profilee pour reduire les courts-circuits et la formation d'arcs electriques
US11407634B2 (en) 2016-09-12 2022-08-09 MEMS Drive (Nanjing) Co., Ltd. MEMS actuation systems and methods
US11261081B2 (en) 2016-09-12 2022-03-01 MEMS Drive (Nanjing) Co., Ltd. MEMS actuation systems and methods
WO2018049181A1 (en) * 2016-09-12 2018-03-15 Mems Drive, Inc. Mems actuation systems and methods
CN116169446B (zh) * 2023-02-16 2025-09-09 北京京东方传感技术有限公司 移相器及其制备方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5638946A (en) 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
US5867302A (en) * 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US20040091203A1 (en) 2000-09-07 2004-05-13 Teraop (Usa) Inc. Ultra-fast RF MEMS switch and method for fast switching of RFsignals
US6504118B2 (en) * 2000-10-27 2003-01-07 Daniel J Hyman Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism
SE0101182D0 (sv) * 2001-04-02 2001-04-02 Ericsson Telefon Ab L M Micro electromechanical switches
WO2003028059A1 (en) * 2001-09-21 2003-04-03 Hrl Laboratories, Llc Mems switches and methods of making same
JP3818176B2 (ja) 2002-03-06 2006-09-06 株式会社村田製作所 Ｒｆｍｅｍｓ素子
US6701779B2 (en) * 2002-03-21 2004-03-09 International Business Machines Corporation Perpendicular torsion micro-electromechanical switch
US20040050674A1 (en) 2002-09-14 2004-03-18 Rubel Paul John Mechanically bi-stable mems relay device
US7034375B2 (en) 2003-02-21 2006-04-25 Honeywell International Inc. Micro electromechanical systems thermal switch
US6882256B1 (en) 2003-06-20 2005-04-19 Northrop Grumman Corporation Anchorless electrostatically activated micro electromechanical system switch
JP4364565B2 (ja) 2003-07-02 2009-11-18 シャープ株式会社 静電アクチュエーター，マイクロスイッチ，マイクロ光スイッチ，電子機器および静電アクチュエーターの製造方法
FR2858459B1 (fr) * 2003-08-01 2006-03-10 Commissariat Energie Atomique Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant
KR100661349B1 (ko) * 2004-12-17 2006-12-27 삼성전자주식회사 Ｍｅｍｓ 스위치 및 그 제조 방법
KR20060092424A (ko) * 2005-02-17 2006-08-23 삼성전자주식회사 스위치패드 및 그것을 구비한 마이크로 스위치
ES2296116T3 (es) 2005-03-21 2008-04-16 Delfmems Conmutador mems (sistema micro electro mecanico) de rf (radiofrecuencia) con una membrana de conmutacion flexible y libre.
KR100612893B1 (ko) * 2005-04-08 2006-08-14 삼성전자주식회사 트라이 스테이트 ｒｆ 스위치

Also Published As

Publication number Publication date
CN102362330A (zh) 2012-02-22
BRPI1006447A2 (pt) 2016-02-10
ES2388126T3 (es) 2012-10-09
WO2010105827A1 (en) 2010-09-23
CA2755052A1 (en) 2010-09-23
US8593239B2 (en) 2013-11-26
AU2010225137A1 (en) 2011-09-01
IL215099A0 (en) 2011-12-29
SG173814A1 (en) 2011-09-29
KR20120006008A (ko) 2012-01-17
DK2230679T3 (da) 2012-07-30
EP2230679A1 (en) 2010-09-22
JP2012521062A (ja) 2012-09-10
IL215099A (en) 2013-06-27
CN102362330B (zh) 2014-09-03
US20110315529A1 (en) 2011-12-29
JP5563057B2 (ja) 2014-07-30
AU2010225137B2 (en) 2014-07-10
EP2230679B1 (en) 2012-05-16
RU2011139816A (ru) 2013-04-27

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