TWM631148U - Reversal mechanism - Google Patents

Abstract

A turning mechanism includes a first driving device, a clamping jaw group and a second driving device. The clamping jaw group includes two clamping jaw units, and the two clamping jaw units are connected to a first driving device, and the first driving device can drive the two clamping jaw units to perform clamping and separating actions. The first driving device is connected to the second driving device, and the second driving device can drive the first driving device and the clamping jaw group to perform the overturning action. The frame that carries the wafer can be placed between the two jaw units of the jaw group, and the two jaw units are driven by the first driving device to clamp the frame, so that the frame is clamped and fixed, and then the second driving device is used to drive the frame. Flip 180 degrees. Thereby, the frame can be stably turned over.

Description

Flip mechanism

This creation relates to a flipping mechanism, especially a flipping mechanism that can be used to perform the flipping operation of a frame carrying wafers.

The existing wafer can be placed on a frame, and the frame is used to carry the wafer, so as to facilitate the transfer of the wafer. The wafer must be turned over according to the front-side process and the reverse-side process. When the wafer needs to be turned over, the robot arm is usually used to clamp the frame and turn the wafer 180 degrees. Since the frame and the wafer have a certain weight, it is easy to accidentally drop the frame and the wafer by turning it over with a robotic arm, thereby causing damage to the frame and the wafer.

The technical problem to be solved by this creation is to provide a turning mechanism for the deficiencies of the prior art, which can stably turn the frame and the wafer, so as to improve the safety of the operation.

In order to solve the above-mentioned technical problems, the present invention provides a turning mechanism, which can be used to turn a frame for carrying wafers, and the turning mechanism includes: a first driving device, and the first driving device has two driving parts, The two driving parts can be driven to move in the direction of approaching or moving away from each other; a clamping jaw group, the clamping jaw group includes two clamping jaw units, the two clamping jaw units are respectively connected to the two driving parts of the first driving device, The first driving device can drive the two clamping jaw units to perform clamping and separating actions, and the frame can be clamped and fixed when the two clamping jaw units are clamped; and a second driving device, the first driving device is connected to The second driving device, which can drive the first driving device and the clamping jaw group to turn over, so as to drive the frame to turn over.

The beneficial effect of the present invention is that the turning mechanism provided by the present invention includes a first driving device, a clamping jaw group and a second driving device. The clamping jaw group includes two clamping jaw units, and the two clamping jaw units are respectively connected to the two driving parts of the first driving device. The first driving device can drive the two clamping jaw units to perform clamping and separating actions. When the two clamping jaw units are clamped The frame can be firmly clamped and fixed. The first driving device is connected to the second driving device, and the second driving device can drive the first driving device and the gripper group to turn over, so that the frame and the wafer can be turned over stably, and the frame and the wafer will not fall off accident to improve the safety of the operation.

In order to further understand the features and technical content of this creation, please refer to the following detailed descriptions and drawings about this creation, however, the provided drawings are only for reference and description, and are not intended to limit this creation.

The following are specific specific examples to illustrate the embodiments disclosed in the present creation, and those skilled in the art can understand the advantages and effects of the present creation from the content disclosed in this specification. This creation can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this creation. In addition, the drawings in this creation are only for simple schematic illustration, and are not drawn according to the actual size, and are stated in advance. The following embodiments will further describe the related technical contents of the present creation in detail, but the disclosed contents are not intended to limit the protection scope of the present creation. In addition, the term "or", as used herein, should include any one or a combination of more of the associated listed items, as the case may be.

[Example]

Please refer to FIG. 1 to FIG. 4 , the present invention provides a turning mechanism, which can be used to turn a frame 100 , the frame 100 can carry a wafer 200 , and the wafer 200 can be adhered and supported on the frame 100 by an adhesive film (not shown). . The turning mechanism includes a first driving device 1 , a clamping jaw group 2 and a second driving device 3 .

The first driving device 1 can be an electric driving device, and the first driving device 1 has two driving parts 11 (as shown in FIG. 5 ), the two driving parts 11 can move linearly, and the two driving parts 11 can be driven to Move in the direction of approaching or moving away from each other, so as to drive the clamping jaw group 2 to perform the action of clamping and releasing.

Please refer to FIG. 6 and FIG. 7 , the clamping jaw set 2 includes two clamping jaw units 21 , and the two clamping jaw units 21 are respectively connected to the two driving parts 11 of the first driving device 1 , and the two driving parts 11 of the first driving device 1 are respectively connected. The two jaw units 21 can be driven to perform the operations of clamping and separating. In this embodiment, each clamping jaw unit 21 has a linkage arm 211 and a plurality of clamping jaw portions 212, the clamping jaw portions 212 are elongated, and one end (inner end) of the clamping jaw portions 212 is mutually connected to form an X-shaped structure, one end of the linkage arm 211 is connected to the connection of the jaw portions 212, and one end of the linkage arm 211 can be connected to the connection of the jaw portions 212 by means of screw locking or the like The other end of the linking arm 211 is connected to the driving part 11 of the first driving device 1 , that is, the other ends of the linking arms 211 of the two jaw units 21 are respectively connected to the two driving parts 11 of the first driving device 1 . The other end of the link arm 211 can be detachably connected to the driving part 11 of the first driving device 1 by means of screw locking, etc., so as to facilitate the assembly and replacement of the jaw group 2, so that the jaw group 2 can be molded. It can be replaced by the organization, so that it is suitable for 12-inch, 8-inch, 6-inch wafers, etc.

In this embodiment, each clamping claw unit 21 has four clamping claw parts 212 , and the four clamping claw parts 212 are respectively disposed on both sides of the link arm 211 , that is, two sides of the link arm 211 are respectively provided with two The clamping jaw portion 212, an included angle θ (as shown in FIG. 4) is formed between the two clamping jaw portions 212, the included angle θ is 30 degrees to 70 degrees, and the included angle θ can be 30 degrees, 40 degrees, 50 degrees, 60 degrees or 70 degrees, etc., the included angle θ is preferably 40 degrees to 60 degrees, and the best is 50 degrees, which can have a better clamping effect and facilitate the entry and exit of the frame 100, that is, the frame 100 can be easily moved by the linkage arm Enter and exit between the two jaw portions 212 in front of the 211 . In the present invention, each clamping jaw unit 21 has a plurality of clamping jaw portions 212 , which can form a plurality of clamping points and can firmly clamp the frame 100 .

In this embodiment, the other ends (outer ends) of the clamping jaws 212 are each formed with a clamping end 213 , and the clamping jaws 212 of the two clamping jaw units 21 extend toward each other in a direction close to each other, so that the clamping ends 213 protrudes from the other end of the jaw portion 212 . When the first driving device 1 drives the two clamping jaw units 21 to clamp together, the clamping ends 213 can be used to clamp the frame 100 to have a better clamping effect. In addition, a positioning pin 214 and a positioning hole 215 can be respectively provided on the clamping ends 213. When the two clamping jaw units 21 are clamped, the positioning pin 214 and the positioning hole 215 on the two clamping jaw units 21 can be inserted into each other. , so as to achieve the effect of positioning, and the positioning pin 214 can also abut against the outer edge of the frame 100 to limit the frame 100 . In the present invention, each clamping jaw unit 21 has a plurality of clamping jaw portions 212 , which can form a plurality of clamping points, and are clamped at the outer edge of the frame 100 , so that the frame 100 can be clamped more stably.

The first driving device 1 is connected to the second driving device 3 , the second driving device 3 is a rotating device, and the second driving device 3 can drive the first driving device 1 and the gripper group 2 to perform the overturning action. In this embodiment, the second driving device 3 includes a power source 31 , a transmission mechanism 32 and a deceleration mechanism 33 (as shown in FIG. 8 ). The power source 31 , the transmission mechanism 32 and the deceleration mechanism 33 can be arranged in a In the body 34, the transmission mechanism 32 can be a belt group (such as a timing belt group), the transmission mechanism 32 is connected between the power source 31 and the deceleration mechanism 33, and the deceleration mechanism 33 can be a harmonic reducer or the like. The power source 31 can be a motor or the like (such as a servo motor). The power output from the power source 31 can be transmitted to the deceleration mechanism 33 through the transmission mechanism 32, and then output after deceleration by the deceleration mechanism 33, so as to drive the first driving device 1 and the jaw group 2. Perform a flipping action.

When the inversion mechanism is in use, the frame 100 carrying the wafer 200 can be placed between the two jaw units 21 of the jaw group 2 first, and then the first driving device 1 drives the two jaw units 21 to be clamped, so that the two jaw units 21 are clamped together. The frame 100 is clamped and fixed, and then the second driving device 3 drives the jaw group 2 to drive the frame 100 to turn over 180 degrees, so that the frame 100 and the wafer 200 can be turned over.

In addition, two first sensors 4 (as shown in FIG. 1 to FIG. 3 ) can also be arranged on one side of the body 34 , and the two first sensors are arranged at the outer space of the jaw group 2 . The detector 4 can be a photoelectric sensor or the like. The two first sensors 4 are respectively arranged at the upper and lower positions, and a link seat 5 is arranged on one side of the first drive device 1 , and a sensor element is arranged on the link seat 5 6. When the second driving device 3 drives the frame 100 to turn over, the two first sensors 4 can be used to sense the sensing element 6 to detect the turning state of the frame 100 .

In addition, a second sensor 7 and a third sensor 8 (as shown in FIG. 3 ) can also be provided on the two jaw units 21 respectively. The second sensor 7 and the third sensor 8 can be For photoelectric sensors and the like, the second sensor 7 and the third sensor 8 can be used to transmit and receive sensing signals respectively, so as to detect whether the frame 100 is inserted between the two jaw units 21 .

[Advantageous effects of the embodiment]

The beneficial effect of the present invention is that the turning mechanism provided by the present invention includes a first driving device, a clamping jaw group and a second driving device. The clamping jaw group includes two clamping jaw units, and the two clamping jaw units are respectively connected to the two driving parts of the first driving device. The first driving device can drive the two clamping jaw units to perform clamping and separating actions. When the two clamping jaw units are clamped The frame can be clamped and fixed. The first driving device is connected to the second driving device, and the second driving device can drive the first driving device and the clamping claw group to perform a turning action, so as to drive the frame to turn over. In this invention, the first driving device can be used to drive the two clamping jaw units to clamp together, the frame can be firmly clamped and fixed, and then the second driving device can be used to drive the first driving device and the clamping jaw group to turn over, so that the frame and the crystal can be turned over. The circular and stable flipping prevents the accidental drop of the frame and the wafer to improve the safety of the operation.

The contents disclosed above are only the preferred and feasible embodiments of this creation, and are not intended to limit the scope of the patent application of this creation. Therefore, any equivalent technical changes made by using the descriptions and drawings of this creation are included in the application for this creation. within the scope of the patent.

1: The first drive device 11: Drive Department 2: Gripper set 21: Gripper unit 211: Link Arm 212: Gripper 213: clamping end 214: Locating pin 215: Positioning hole θ: included angle 3: The second drive 31: Power source 32: Transmission mechanism 33: Reduction mechanism 34: Body 4: The first sensor 5: Link seat 6: Sensors 7: Second sensor 8: The third sensor 100: Frame 200: Wafer

FIG. 1 is a perspective view of the creation turning mechanism.

FIG. 2 is a front view of the creative turning mechanism.

FIG. 3 is a side view of the creative turning mechanism.

FIG. 4 is a top view of the creation turning mechanism.

FIG. 5 is a perspective view of the first driving device of the creation.

FIG. 6 is a perspective view of the creation gripper group.

FIG. 7 is a perspective view of another angle of the creation gripper group.

FIG. 8 is a perspective view of the second driving device of the creation.

1: The first drive device

2: Gripper set

21: Gripper unit

211: Link Arm

212: Gripper

213: clamping end

214: Locating pin

215: Positioning hole

3: The second drive

34: Body

4: The first sensor

5: Link seat

100: Frame

200: Wafer

Claims (10)

A flipping mechanism capable of flipping a frame for carrying wafers, the flipping mechanism comprising: a first driving device, the first driving device has two driving parts, and the two driving parts can be driven to move in the direction of approaching or moving away from each other; A clamping jaw group, the clamping jaw group includes two clamping jaw units, the two clamping jaw units are respectively connected to two driving parts of the first driving device, and the first driving device can drive the two clamping jaw units to clamp and separate When the two jaw units are clamped, the frame can be clamped and fixed; and A second driving device, the first driving device is connected to the second driving device, and the second driving device can drive the first driving device and the clamping jaw group to perform a turning action, so as to drive the frame to turn over. The turning mechanism according to claim 1, wherein each of the jaw units has a linkage arm and a plurality of jaw parts, one end of the jaw parts is connected to each other, and one end of the linkage arm is connected to the jaws The other ends of the linkage arms of the two clamping jaw units are respectively connected to the two driving parts of the first driving device, and the clamping jaw parts can be used for clamping at the outer edge of the frame. The turning mechanism according to claim 2, wherein the other ends of the link arms of the two jaw units are respectively detachably connected to the two driving parts of the first driving device. The turning mechanism according to claim 2, wherein each of the gripping claw units has four gripping claw portions, two gripping claw portions are provided on both sides of the link arm, and the two gripping claw portions are An included angle is formed between the claws, and the included angle is 30 degrees to 70 degrees. The turning mechanism according to claim 4, wherein the included angle is 40 degrees to 60 degrees. The turning mechanism according to claim 2, wherein the other ends of the clamping jaws each form a clamping end, the clamping end protrudes from the other end of the clamping jaws, and the first driving device drives the two clamping jaws When the unit is clamped, the frame can be clamped with the clamp ends. The turning mechanism according to claim 6, wherein each of the clamping ends is provided with a positioning pin and a positioning hole, and when the two clamping jaw units are clamped, the positioning pins and the positioning holes on the two clamping jaw units can be mutually plugged, and the positioning pins can abut against the outer edge of the frame. The turning mechanism according to claim 1, wherein the second driving device comprises a power source, a transmission mechanism and a deceleration mechanism, the power source, the transmission mechanism and the deceleration mechanism are arranged in a body, and the transmission mechanism is connected to between the power source and the deceleration mechanism. The turning mechanism according to claim 1, wherein two first sensors are arranged at the outer space of the gripper group, the two first sensors are respectively arranged at the upper and lower positions, and one of the first driving device A linkage seat is arranged on the side, and a sensing element is arranged on the linkage seat. When the second driving device drives the frame to turn over, the sensing element can be sensed by the two first sensors to detect the turning of the frame. state. The turning mechanism according to claim 1, wherein a second sensor and a third sensor are respectively disposed on the two jaw units, and the second sensor and the third sensor are respectively used for transmitting and receiving the sensing signal, thereby detecting whether the frame is inserted between the two clamping jaw units.

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