TWM658306U - Cap rotating equipment - Google Patents

Abstract

A cap rotating equipment includes a power rotating shaft, a cap rotating housing and a cap fixing device. The cap rotating housing is connected to the power rotating shaft, and the cap rotating housing includes an opening. The cap fixing device is installed in the opening of the cap rotating housing and is used to clamp a cap of a bottle.

Description

Capping equipment

The invention relates to a capping device, in particular to a capping device for a sampling bottle.

As the domestic and international semiconductor markets have flourished in recent years due to the demand for computers and their peripheral product materials, the semiconductor industry has continued to expand, creating a large amount of foreign exchange income for the country.

The production process of semiconductor components is very complicated, and the technologies involved cover almost all the most important and key technologies and new technologies in the development of modern human science. Therefore, the production of semiconductor components is not only a cutting-edge technology industry, but also an industry that requires huge funds to maintain development.

However, as the design of semiconductor components becomes increasingly complex, the manufacturing technology of semiconductor components becomes more sophisticated and complex, and the potential occupational hazards and property losses are also becoming more complex. For example, chemical liquids are commonly used in process units such as epitaxy, diffusion, ion implantation, chemical vapor deposition, etching and lithography in the semiconductor manufacturing process.

In semiconductor factories, chemical liquids are stored in chemical storage containers and connected to the supply lines in the factory when used. In the current semiconductor production system, more than 30 kinds of chemical liquids may be supplied to the production line at the same time. In order to ensure the quality and yield of component production, various chemical liquids must be tested regularly.

However, the sampling process of the test product, whether opening or closing the sampling bottle cap, is not only inconvenient to operate, but also likely to cause contamination. How to conveniently open and close the sampling bottle cap to improve the inspection quality and reduce the contamination of the sample will help improve the quality and productivity of semiconductor production, which is the direction that relevant personnel in this field are actively working on.

The novel content is intended to provide a simplified summary of the present disclosure so that readers can have a basic understanding of the present disclosure. This novel content is not a complete overview of the present disclosure, and its purpose is not to point out the important/key elements of the present invention or to define the scope of the present invention.

One purpose of the present invention is to provide a cap screwing device that can conveniently detect and rotate the bottle cap to open or close the bottle cap of the bottle.

To achieve the above object, one technical aspect of the present invention is a capping device comprising a power shaft, a capping cover and a bottle cap holder. The capping cover is connected to the power shaft and comprises an opening. The bottle cap holder is installed in the opening of the capping cover to clamp a bottle cap.

In some embodiments, the bottle cap holder includes a gas pressure expansion ring that can tighten or loosen the bottle cap of the bottle according to the gas pressure.

In some embodiments, the bottle cap holder further includes a corrosion-resistant contact layer disposed on the inner side of the air pressure expansion ring.

In some embodiments, the corrosion resistant contact layer is a PFA contact layer.

In some embodiments, the surface of the corrosion-resistant contact layer is formed with concave-convex patterns, and the concave-convex patterns complement the side patterns of the bottle cap.

In some embodiments, the screw cap cover includes a bottle body accommodating area and a first guide portion connected to the bottle body accommodating area. The first guide portion is used to guide the bottle body of the bottle to enter the bottle body accommodating area.

In some embodiments, the screw cap cover further includes a bottle cap receiving area and a second guide portion connected to the bottle cap receiving area. The second guide portion is used to guide the bottle cap of the bottle to enter the bottle cap receiving area.

In some embodiments, the height of the bottle cap accommodating area plus the second guiding portion is greater than the height from the top of the bottle cap to the shoulder of the bottle body.

In some embodiments, the capping device further includes a bottle cap sensor disposed in a bottle cap receiving area of the capping cover to detect the bottle cap.

In some embodiments, the bottle cap sensor is a limit switch, a proximity switch, an optical sensor, a laser sensor, or an infrared sensor.

Therefore, the capping equipment can safely and conveniently open or close the bottle caps to facilitate the acquisition of samples of chemical liquids used in semiconductor production lines, reduce the probability of human or environmental contamination, and improve the efficiency and accuracy of sample extraction, improve the yield and output of semiconductor processes, and thus increase the revenue and profits of semiconductor production.

The following is a detailed description with reference to the embodiments and the attached drawings, but the embodiments provided are not intended to limit the scope of the disclosure, and the description of the structure and operation is not intended to limit the order of execution. Any device with equal functions produced by recombining the components is within the scope of the disclosure. In addition, the drawings are for illustration purposes only and are not drawn according to the original size. For ease of understanding, the same or similar components in the following description will be indicated by the same symbols.

In addition, the terms used throughout the specification and the patent application generally have the ordinary meaning of each term used in this field, in the context of this disclosure, and in the specific context, unless otherwise specified. Certain terms used to describe the present disclosure will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the present disclosure.

In the embodiments and patent applications, unless otherwise specified in the context, "a", "an" and "the" may refer to a single or multiple number. The numbers used in the steps are only used to mark the steps for the convenience of description, and are not used to limit the order and implementation methods.

Secondly, the terms "include", "including", "have", "contain", etc. used in this article are all open terms, which mean including but not limited to.

FIG. 1 is a schematic diagram of a capping device according to an embodiment of the present invention, and FIG. 2 is a schematic cross-sectional diagram thereof.

Referring to FIG. 1 and FIG. 2 at the same time, as shown in the figures, the capping device 100 includes a power shaft 110, a capping cover 120, and a bottle cap holder 160. The power shaft 110 is connected to the capping cover 120 to drive the capping cover 120 to rotate so as to open or close the bottle cap 220 of the bottle 200. In addition, the capping cover 120 includes an opening 130, and the bottle cap holder 160 is installed in the opening 130 of the capping cover 120 to clamp the bottle cap 220 of the bottle 200.

In some embodiments, the bottle cap holder 160 includes a gas pressure expansion ring 162, and the volume of the gas pressure expansion ring 162 can be changed according to the gas pressure to tighten or loosen the bottle cap 220 of the bottle 200. Then, the bottle cap 220 of the bottle 200 is rotated in conjunction with the power shaft 110 and the cap screw cover 120 to open or close the bottle cap 220 of the bottle 200.

In some embodiments, the bottle cap holder 160 further includes a corrosion-resistant contact layer 164 disposed on the inner side of the air pressure expansion ring 162. The corrosion-resistant contact layer 164 can be a perfluoroalkyl (PFA) contact layer to prevent the corrosive liquid from causing corrosion of the air pressure expansion ring 162, thereby improving the service life of the capping device 100.

In some embodiments, the PFA contact layer is a thermoplastic fluororesin with excellent chemical, electrical, and mechanical properties, and can avoid corrosion by most chemical liquids, and is a material with high chemical stability. In addition, the PFA contact layer is also suitable for continuous contact with highly active chemical liquids to increase the service life of the capping device 100.

In some embodiments, the surface of the corrosion-resistant contact layer 164 is formed with concave-convex textures to increase friction.

In some embodiments, the surface of the corrosion-resistant contact layer 164 is formed with concave-convex patterns, and the concave-convex patterns complement the side patterns of the bottle cap 220 to increase the torque of rotating the bottle cap 220.

In some embodiments, a first guide portion 140 , a bottle body receiving area 180 , a second guide portion 150 and a bottle cap receiving area 170 are sequentially disposed in the opening 130 of the screw cap cover 120 .

The first guide portion 140 is connected to the bottle body receiving area 180 to guide the bottle body 210 of the bottle 200 so that the bottle body 210 stably and correctly enters the bottle body receiving area 180. In addition, when the bottle cap 220 passes through the first guide portion 140, the first guide portion 140 can also effectively guide the position of the bottle 200 to guide the bottle body 210 and the bottle cap 220 of the bottle 200 to align with the center of the opening 130 of the screw cap cover 120.

In addition, the second guide portion 150 is connected to the bottle cap receiving area 170 to guide the bottle cap 220 of the bottle 200 to enter the bottle cap receiving area 170 correctly and stably. The bottle cap holder 160 is disposed in the bottle cap receiving area 170. When the bottle cap 220 enters the bottle cap receiving area 170 correctly, the air pressure expansion ring 162 is activated so that the air pressure expansion ring 162 and the corrosion-resistant contact layer 164 clamp the bottle cap 220. Then the power shaft 110 rotates the capping cover 120 to rotate the bottle cap 220 of the bottle 200, thereby opening the bottle cap 220 of the bottle 200. In addition, the bottle cap holder 160 can also hold the opened bottle cap 220 , and after the bottle 200 is injected with the required chemical liquid, the bottle cap 220 is rotated in the opposite direction to fit the bottle cap 220 tightly onto the bottle body 210 of the bottle 200 .

In some embodiments, the power shaft 110 further has the function of moving up and down, so as to move the screw capping cover 120 and the bottle cap 220 held therein up and down.

In some embodiments, the bottle body 210 has a bottle body shoulder 240, and the bottle cap 220 has a bottle cap top 250, and the bottle body shoulder 240 and the bottle cap top 250 preferably have arc edges, so that the first guide portion 140 and the second guide portion 150 can guide the bottle 200 to align with the center of the screw cap cover 120.

In some embodiments, the height 101 of the bottle cap receiving area 170 plus the second guiding portion 150 is preferably greater than or equal to the height 102 from the bottle cap top 250 of the bottle cap 220 to the bottle body shoulder 240 of the bottle body 210 to improve the stability and accuracy of the guidance.

In some embodiments, the capping device 100 further includes a bottle cap sensor 190 disposed in the bottle cap receiving area 170 of the capping cover 120 for detecting whether the bottle cap 220 of the bottle 200 is correctly positioned in the opening 130 of the capping cover 120 .

In some embodiments, the bottle cap sensor 190 can be a limit switch, a proximity switch, an optical sensor, a laser sensor and/or an infrared sensor to detect whether the bottle cap 220 of the bottle 200 is correctly positioned in the opening 130 of the screw cap cover 120, and can also detect the position of the bottle 200 in advance to improve the accuracy and stability of the process, all of which are within the spirit and scope of protection of the present invention.

In some embodiments, the bottle 200 can be used to contain hydrofluoric acid (HF) solution, nitric acid solution, phosphoric acid solution, acetic acid solution, hydrogen peroxide solution, deionized water (DI water) and/or sulfuric acid solution required for sampling, but the present invention is not limited thereto.

In summary, the capping equipment can safely and conveniently open or close the bottle caps to facilitate the acquisition of samples of chemical liquids used in semiconductor production lines, reduce the probability of human or environmental contamination, and improve the efficiency and accuracy of sample extraction, thereby improving the yield and output of semiconductor processes, and thereby increasing the revenue and profits of semiconductor production.

Although the present disclosure has been disclosed in the above implementation form, it is not intended to limit the present disclosure. Any person with ordinary knowledge in the field can make various changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be defined by the scope of the attached patent application.

100: Capping equipment 101: Height 102: Height 110: Power shaft 120: Capping cover 130: Opening 140: First guide 150: Second guide 160: Bottle cap holder 162: Air pressure expansion ring 164: Corrosion-resistant contact layer 170: Bottle cap receiving area 180: Bottle body receiving area 190: Bottle cap sensor 200: Bottle 210: Bottle body 220: Bottle cap 240: Bottle body shoulder 250: Bottle cap top

In order to make the above and other purposes, features, advantages and embodiments of the present disclosure more clearly understandable, the attached drawings are described as follows: Figure 1 is a schematic diagram of a capping device according to an embodiment of the present invention. Figure 2 is a cross-sectional schematic diagram of a capping device according to an embodiment of the present invention.

100: Capping equipment

101: Height

102: Height

110: Power shaft

120: Screw-on cover

130: Open mouth

140: First guide part

150: Second guide part

160: Bottle cap holder

170: Bottle cap storage area

180: Bottle storage area

190: Bottle cap sensor

200: Bottle

210: Bottle

220: Bottle cap

240: Bottle shoulder

250: Top of bottle cap

Claims (10)

A capping device comprises: a power shaft; a capping cover connected to the power shaft, wherein the capping cover comprises an opening; and a bottle cap holder installed in the opening of the capping cover for clamping a bottle cap of a bottle. The cap screwing device as described in claim 1, wherein the bottle cap holder comprises: A gas pressure expansion ring, which tightens or loosens the bottle cap of the bottle according to the gas pressure. The cap screwing device as described in claim 2, wherein the bottle cap holder further comprises: A corrosion-resistant contact layer disposed on the inner side of the air pressure expansion ring. The capping apparatus as described in claim 3, wherein the corrosion-resistant contact layer is a PFA contact layer. The capping device as described in claim 3, wherein the surface of the corrosion-resistant contact layer is formed with a concave-convex pattern, and the concave-convex pattern complements the side pattern of the bottle cap. The capping device as described in claim 3, wherein the capping cover comprises: a bottle body receiving area; and a first guide portion connected to the bottle body receiving area to guide a bottle body of the bottle into the bottle body receiving area. The capping device as described in claim 6, wherein the capping cover further comprises: a bottle cap receiving area; and a second guide portion connected to the bottle cap receiving area to guide the bottle cap of the bottle into the bottle cap receiving area. A cap screwing device as described in claim 7, wherein the height of the bottle cap accommodating area plus the second guiding portion is greater than the height from the top of the bottle cap to the shoulder of the bottle body. The capping device as described in claim 7 further includes a bottle cap sensor disposed in the bottle cap receiving area of the capping cover to detect the bottle cap of the bottle. A capping device as described in claim 9, wherein the bottle cap sensor is a limit switch, a proximity switch, an optical sensor, a laser sensor or an infrared sensor.

Images