TWM557778U - Pneumatic liquid delivery device - Google Patents

Abstract

A pneumatic liquid delivery device comprising a pneumatic rotary drive and a hydraulic pump. The pneumatic rotary drive includes a first outer casing segment, a rotating shaft and an actuating unit. The first outer casing segment defines an air inlet aperture and a venting aperture. The rotating shaft includes a first shaft segment and a second shaft segment. The first shaft segment is pivotally connected to the first outer casing segment, and the second shaft segment protrudes from the first outer casing segment. The actuating unit is driven by the gas to actuate the rotation of the shaft. The hydraulic pump includes a second outer casing section and a liquid transfer unit. The second outer casing segment defines a liquid inlet passage and a discharge passage. The second shaft segment is pivotally connected to the second outer casing segment, and the liquid transfer unit is disposed at the second axial segment. The second shaft section is configured to drive the liquid transfer unit to operate to suck the liquid flowing in through the liquid inlet passage and pressurize it to discharge to the drain passage.

Description

Pneumatic liquid delivery device

The utility model relates to a pneumatic liquid conveying device, in particular to a pneumatic liquid conveying device which uses gas as a power source and converts it into mechanical energy to work on a liquid.

The existing pumps for transporting liquids are mainly classified into reciprocating pumps and rotary pumps. The reciprocating pump mainly reciprocates pressure through a pneumatic cylinder to carry out liquid transportation. Since the pneumatic cylinder generates a pulse when it is reciprocally pressed, it is liable to cause pulsation when the liquid is discharged, and the discharge pressure is unstable. In some reciprocating pumps, in order to reduce the pulsation phenomenon when the liquid is discharged, an accumulator is additionally installed at the outlet end, which is easy to increase the manufacturing cost.

The rotary pump drives the rotary member to rotate the liquid by using an electric motor such as a variable frequency motor as a power source. However, when the humidity of the working environment is higher than a certain level or when the working environment is strictly prohibited, the electric motor is prone to leakage or sparking, which causes the safety of the use to be affected. Furthermore, when the system is stagnant and the liquid is temporarily stopped, the control valve on the drain pipe is switched to the closed state. At this time, since the electric motor is still in continuous operation, the rotary pump continuously outputs the pressurized liquid to the drain pipe. In the state of the liquid pipe, the load will continue to increase or even reach the overload state due to the liquid pressure. Therefore, the discharge pipe may be broken, and the electric motor may be overheated or even damaged.

Accordingly, it is an object of the present invention to provide a pneumatic liquid delivery device that stabilizes liquid discharge pressure and enhances safety in use.

Another object of the present invention is to provide a pneumatic liquid conveying device in which the rotational speed of the pneumatic rotary drive can be changed with the load, thereby avoiding damage to the pneumatic rotary drive and the generation of the discharge pipe due to excessive system load or overload. rupture.

Thus, the novel pneumatic liquid delivery device comprises a pneumatic rotary drive and a hydraulic pump.

The pneumatic rotary drive includes a first outer casing segment, a rotating shaft, and an actuating unit. The first outer casing segment defines an air inlet opening for a gas to flow in, and a venting opening for the gas to flow out. The shaft includes a first shaft segment, and a second shaft segment extending axially from one end of the first shaft portion, the first shaft portion being rotatably pivotally connected to the first outer casing segment and located at the first Within the outer casing segment, the second shaft segment projects out of the first outer casing segment. The actuating unit is disposed on the first shaft segment and is driven by the gas to actuate the rotating shaft. The hydraulic pump includes a second outer casing section and a liquid transfer unit. The second outer casing segment is disposed on one side of the first outer casing segment and defines a liquid inlet passage for a liquid to flow in, and a liquid discharge passage for discharging the liquid. The second shaft segment is rotatably pivotally connected to the second outer casing segment and located in the second outer casing segment, and the liquid transfer unit is located in the second outer casing segment and disposed on the second outer casing segment. The second shaft segment is configured to drive the liquid transport unit to operate, and the liquid transport unit sucks the liquid flowing in through the liquid inlet passage and pressurizes the liquid to be discharged to the drain passage.

In some embodiments, the liquid transport unit includes a swash plate, a rotating cylinder, and a plurality of pistons. The swash plate is sleeved on the second shaft segment, and the rotating cylinder is fixed to the second shaft segment and Located between the swash plate and the liquid inlet and drain passages and formed with a plurality of cylinder chambers surrounding the second shaft segment, one end of each piston slidably contacts the swash plate and the other end of which is movably disposed at Corresponding to the cylinder chamber, when the rotating cylinder is rotated by the second shaft segment, the rotating cylinder will drive each piston to rotate and each piston will reciprocate in the corresponding cylinder chamber to change its volume, so that The corresponding cylinder chamber can draw the liquid through the liquid inlet passage and discharge through the liquid discharge passage.

In some embodiments, each of the pistons includes an outer peripheral surface, and each of the cylinder chambers is defined by an inner circumferential surface of the rotating cylinder, and at least one of the outer circumferential surface and the inner circumferential surface is provided with a lubricating member. .

In some embodiments, at least one of each of the piston and the rotating cylinder is a lubricating member.

In some embodiments, the liquid transfer unit further includes a valve plate disposed between a side of the rotating cylinder opposite to the swash plate and the liquid inlet and drain passages, the valve plate being formed with a valve plate a suction slot, and a discharge slot, the suction slot is in communication with the liquid inlet passage and located in a rotation path of each of the cylinder chambers, and the liquid is sucked through the suction groove when any one of the cylinder chambers communicates with the suction groove The discharge groove communicates with the liquid discharge passage and is located in a rotation path of each of the cylinder chambers, and the liquid is discharged through the discharge groove when any one of the cylinder chambers communicates with the discharge tank.

In some embodiments, the liquid inlet channel has a liquid inlet port communicating with the suction groove, and a liquid inlet hole communicating with the liquid inlet channel, the liquid discharge channel having a connection with the discharge groove a draining tank and a draining hole communicating with the draining tank, the pore size of the inlet orifice being larger than the diameter of the draining orifice.

In some embodiments, the swash plate has a disk surface for sliding contact of one end of each of the pistons, the disk surface being at an angle with a radial surface perpendicular to the second shaft segment, the liquid transfer unit further comprising a An angle adjustment assembly disposed between the second outer casing segment and the swash plate for adjusting the angle.

In some implementations, the angle adjustment assembly can adjust the angle to any angle between 10 and 60 degrees.

In some embodiments, the first outer casing segment includes a cylinder block having the air inlet hole and the air venting hole, and the first shaft segment is eccentrically disposed in the cylinder block, the first shaft segment The outer surface is radially recessed to form a plurality of grooves, and the actuating unit comprises a plurality of blades respectively disposed at the radially spaced intervals of the grooves, each of the blades being radially along the first axis The telescopic movement moves in the corresponding groove.

In some embodiments, the second outer casing segment is integrally formed on one side of the first outer casing segment.

The utility model has the advantages that the pneumatic rotary motor can adopt the pneumatic motor to improve the safety in use. The rotational speed of the rotary rotary drive can be changed with the load, thereby avoiding damage to the pneumatic rotary drive and rupture of the discharge pipe due to excessive system load or overload, and using a swash plate type axial piston pump by hydraulic pump The method can reduce the pulsation generated when the liquid is discharged and stabilize the discharge pressure.

Referring to FIG. 1, a first embodiment of the present novel pneumatic liquid delivery device 100 is applied to a device such as a semiconductor wet processing process, and the pneumatic liquid delivery device 100 includes a pneumatic rotary actuator 1. And a hydraulic pump 2.

Referring to Figures 1, 2 and 3, the pneumatic rotary drive 1 includes a first outer casing segment 11, a rotating shaft 12, an actuating unit 13, and an engaging unit 14. The first outer casing segment 11 includes a cylinder block 110, a first sealing cover 111, and a second sealing cover 112. The cylinder block 110 defines a chamber 113, an intake hole 114 communicating with the chamber 113, and a vent hole 115 communicating with the chamber 113. The intake hole 114 is for supplying gas into the chamber 113, and the exhaust hole 115 is for discharging the gas in the chamber 113. In the present embodiment, the gas is exemplified by dry compressed air (CDA). The first sealing cover 111 is fixedly coupled to one end of the cylinder block 110 by, for example, a screw locking method, and the first sealing cover 111 is hermetically joined to the cylinder block 110 and closes one end of the chamber 113. The second sealing cover 112 is fixedly coupled to the other end of the cylinder block 110 by, for example, a screw locking method, and the second sealing cover 112 is hermetically coupled to the cylinder block 110 and closes the other end of the chamber 113.

The shaft 12 includes a first shaft section 121 and a second shaft section 122 extending axially from one end of the first shaft section 121. The first shaft segment 121 is rotatably pivotally connected to the first sealing cover 111 and the second sealing cover 112 of the first outer casing segment 11 and located in the chamber 113 of the cylinder block 110. The second shaft segment 122 projects out of the second sealing cover 112 of the first outer casing segment 11. The actuating unit 13 is disposed in the first shaft segment 121 and located in the chamber 113. The actuating unit 13 is driven by the gas to actuate the rotating shaft 12 to rotate.

In the present embodiment, the pneumatic rotary drive 1 is a vane type air motor. The intake hole 114 is disposed in the first seal cover 111, and the exhaust hole 115 is disposed in the cylinder block 110. The first shaft section 121 is eccentrically disposed in the chamber 113 of the cylinder block 110. The first shaft section 121 has a pivot portion 123 pivotally connected to the first sealing cover 111 and the second sealing cover 112, and a set of shafts And fixed to the sleeve 124 of the pivot portion 123. The outer surface of the sleeve 124 is radially recessed to form a plurality of grooves 125 spaced apart from each other. The actuating unit 13 includes a plurality of blades 131 respectively disposed in the radial direction of the grooves 125. The blades 131 are telescopically movable in the radial direction of the first shaft segment 121 in the corresponding grooves 125.

Referring to Figures 4 and 5, the hydraulic pump 2 includes a second outer casing section 21 and a liquid transfer unit 23. The second outer casing segment 21 is disposed on one side of the first outer casing segment 11 and includes a casing 210 and an end cover 211. The housing 210 is fixedly coupled to the cylinder block 110 of the first outer casing segment 11 through the joint unit 14, and the housing 210 defines a chamber 212. The end cap 211 can be fixedly coupled to the housing 210 opposite to the end of the cylinder block 110 and close the chamber 212 by, for example, screwing. The end cap 211 defines a liquid inlet passage 213 for the inflow of liquid, and a drain passage 214 for discharging the liquid. In this embodiment, the liquid is, for example, water or a treatment liquid required in the process. The second shaft segment 122 of the rotating shaft 12 is rotatably pivotally connected to the housing 210 of the second outer casing segment 21 and located in the chamber 212. The liquid transfer unit 22 is located within the chamber 212 of the second outer casing segment 21 and is disposed in the second shaft segment 122. The second shaft segment 122 is used to drive the liquid transport unit 22 to operate, so that the liquid transport unit 22 draws in the liquid flowing in through the liquid inlet passage 213 and pressurizes it to be discharged to the drain passage 214.

In the present embodiment, the hydraulic pump 2 is a swash plate type axial piston pump. The cylinder block 110 of the first outer casing segment 11 is formed with a plurality of first perforations 119, and the casing 210 of the second outer casing segment 21 is formed with a plurality of second perforations 215 respectively communicating with the first perforations 119. The joint unit 14 includes a plurality of bolts 141 and a plurality of nuts 142. Each of the bolts 141 is disposed through the first through hole 119 and the second through hole 215 that are corresponding in position and communicate with each other and screwed to the corresponding nut 142. Thereby, the engaging unit 14 can firmly join the cylinder block 110 and the housing 210 together.

Referring to FIGS. 4, 5 and 6, the end cap 211 also defines a receiving slot 216 that faces the chamber 212. The liquid inlet passage 213 has a liquid inlet groove 217 which communicates with the receiving groove 216 and has an arc shape, and a liquid inlet hole 218 which communicates with the liquid inlet groove 217. The liquid inlet hole 218 is connected to a liquid supply pipe (not shown), whereby the liquid supply source can transport the liquid into the liquid inlet passage 213 through the liquid supply pipe. The drain passage 214 has a draining groove 219 communicating with the receiving groove 216 and having an arc shape, and a drain hole 220 communicating with the draining groove 219. The drain hole 220 is connected to a drain pipe (not shown), whereby the liquid pressurized by the liquid transfer unit 22 can be discharged to the drain pipe via the drain passage 214.

In the present embodiment, a hole diameter D1 of the liquid inlet hole 218 is larger than a hole diameter D2 of the liquid discharge hole 220, whereby the discharge pressure of the liquid discharged through the liquid discharge hole 220 can be made larger than the input input through the liquid inlet hole 218. pressure.

Referring to Figures 4 and 7, the liquid transfer unit 23 includes a swash plate 24, a rotary cylinder 25, and a plurality of pistons 26. The swash plate 24 is sleeved on the second shaft portion 122 of the rotating shaft 12 and defines a through hole 241 through which the second shaft portion 122 is bored. The diameter of the through hole 241 is larger than the outer diameter of the second shaft portion 122, thereby making the slant The disk 24 can be sleeved on the second shaft segment 122 in an inclined manner and is not rotated by the second shaft segment 122. The swash plate 24 has a disk surface 242 that is angled A from a radial surface F that is perpendicular to the second shaft segment 122.

Referring to FIG. 4, FIG. 7 and FIG. 8, the rotary cylinder 25 is sleeved and fixed to the second shaft section 122 and located between the swash plate 24 and the liquid inlet and drain passages 213 and 214 of the end cover 211. In the present embodiment, the second shaft section 122 has a bolt groove portion 126, and the rotary cylinder block 25 forms a bolt hole 251 through which the bolt groove portion 126 is bored, whereby the rotary cylinder 25 can be driven by the second shaft. Segment 122 rotates and does not rotate relative to second shaft segment 122. The rotary cylinder 25 is further formed with a plurality of cylinder chambers 252 surrounding the bolt slots 251 and the second shaft segments 122. Each cylinder chamber 252 has a piston bore 253 and an opening 254 communicating with one end of the piston bore 253. The piston bore 253 has a circular shape and faces the swash plate 24, and the opening 254 has an arc shape and faces the end cap 211. The shape of the piston hole 253 and the opening 254 can be designed according to actual needs, and is not limited to the embodiment.

One end of each piston 26 slidably contacts the disk surface 242 of the swash plate 24, and the other end is movably disposed in the piston hole 253 of the corresponding cylinder chamber 252. Each piston 26 of this embodiment includes a slider 261 and a piston rod 262. The slider 261 is slidably contacted on the disk surface 242. The piston rod 262 is movably disposed in the piston hole 253 of the corresponding cylinder chamber 252, and one end of the piston rod 262 is rotatably pivotally connected to the slider 261. When the rotary cylinder 25 is rotated by the second shaft portion 122, the rotary cylinder 25 drives the pistons 26 to rotate and the pistons 26 reciprocate simultaneously in the piston bores 253 of the corresponding cylinder chambers 252 to change their volumes. The corresponding cylinder chamber 252 can draw liquid through the liquid inlet passage 213 and discharge the liquid through the liquid discharge passage 214.

The piston rod 262 of each piston 26 has an outer peripheral surface 263, and the piston bore 253 of each cylinder chamber 252 is defined by a corresponding inner peripheral surface 255 of the rotary cylinder 25. In order to reduce the friction between the piston rod 262 and the rotating cylinder 25, the piston rod 262 can smoothly move in the piston hole 253, and at least one of the outer circumferential surface 263 and the inner circumferential surface 255 is provided with a lubricating member 27, whereby The direct contact friction between the outer peripheral surface 263 and the inner peripheral surface 255 can be avoided, so that the piston rod 262 can smoothly move in the piston hole 253. Specifically, the lubricating member 27 of the present embodiment is fixed to the outer peripheral surface 263 and abuts against the inner peripheral surface 255 in a liquid-tight manner, and the lubricating member 27 may be made of a graphite material having good lubricity or wear resistance. Made of good copper material. Of course, the lubricating member 27 may be made of other materials with good lubricity or other materials with good wear resistance, and is not limited to the materials disclosed in the embodiment.

Referring to Figures 4, 5 and 9, in order to isolate a suction stroke of the suction cylinder of each cylinder chamber 252 of the rotary cylinder 25, and a discharge stroke of the discharge liquid, the liquid transfer unit 23 further includes a control unit for controlling each The opening 254 of the cylinder chamber 252 opens or closes the valve plate 28. The valve plate 28 is fixedly disposed in the receiving groove 216 of the end cover 211. The valve plate 28 is formed with an arc-shaped suction groove 281 and an arc-shaped discharge groove 282. The suction groove 281 communicates with the liquid inlet groove 217 of the liquid inlet passage 213 and is located in the rotation path of the opening 254 of each cylinder chamber 252, and the opening 254 of any one of the cylinder chambers 252 communicates with the suction groove 281 and is in the suction groove. When rotated within the angular range defined by 281, the cylinder chamber 252 draws a suction stroke of the liquid through the suction slot 281. The discharge groove 282 communicates with the liquid discharge groove 219 of the liquid discharge passage 214 and is located in the rotation path of the opening 254 of each cylinder chamber 252, and the opening 254 of any one of the cylinder chambers 252 communicates with the discharge groove 282 and is in the discharge groove. When the cylinder 252 is rotated within the angular range defined by 282, the cylinder chamber 252 is discharged through the discharge slot 282.

Referring to FIGS. 4 and 7, in order to adjust the angle A of the inclination of the swash plate 24 to change the stroke of the piston rod 262 of the piston 26 in the cylinder chamber 252, the liquid transfer unit 23 further includes a housing disposed on the second outer casing segment 21. An angle adjustment assembly 29 is used between the 210 and the swash plate 24 for adjusting the angle A. The swash plate 24 of the present embodiment is rotatably abutted against the housing 210. The angle adjusting assembly 29 includes a telescopic unit 291 disposed on the opposite side of the housing 210 of the second outer casing segment 21, and an elastic connecting unit 292. The telescopic unit 291 has a piston 293 and a pivoting member 294 pivotally connected between the piston 293 and one end of the swash plate 24. The elastic connecting unit 292 has a fixing rod 295, a movable rod 296, a compression spring 297 disposed between the fixed rod 295 and the movable rod 296, and a pivot pivotally connected between the movable rod 296 and the other end of the swash plate 24. Connector 298.

By transporting the gas into a plenum 290 and driving the piston 293 to move toward the chamber 212, the piston 293 pushes one end of the swash plate 24 through the pivoting member 294 to rotate relative to the housing 210, and the other end of the swash plate 24 is permeable. The pivoting member 298 and the movable lever 296 press the compression spring 297 to deform the compression spring 297 and accumulate the return elastic force. Thereby, the angle A can be made smaller.

On the contrary, by pumping the air chamber 290 to suck the piston 293 to move in the opposite direction to the chamber 212, the piston 293 pulls one end of the swash plate 24 through the pivoting member 294 to rotate relative to the housing 210, and the compression spring 297 The accumulated return spring force is applied to the other end of the swash plate 24 through the movable rod 296 and the pivoting member 298 and pushes the other end of the swash plate 24, by the pulling force generated when the piston 293 moves and the returning elastic force exerted by the compression spring 297. The thrust causes the swash plate 24 to smoothly rotate relative to the housing 210. Alternatively, the air chamber 290 is depressurized without venting the air chamber 290. At this time, the restoring elastic force accumulated by the compression spring 297 itself is applied to the other end of the swash plate 24 through the movable rod 296 and the pivoting member 298 and The rebound is caused to cause the swash plate 24 to rotate relative to the housing 210 and the swash plate 24 to urge the piston 293 in the opposite direction to the chamber 212 through the pivoting member 294. Thereby, the angle A can be increased.

By the cooperation of the telescopic unit 291 and the elastic connecting unit 292, the angle A can be adjusted to any angle between 10 and 60 degrees. The stroke of the movement of the piston rod 262 of the piston 26 in the cylinder chamber 252 is changed by adjusting the angle A, so that the flow rate or pressure of the liquid discharged from the hydraulic pump 2 can be changed.

The following describes the operation of the pneumatic liquid delivery device 100:

Referring to FIG. 2 and FIG. 3, when the gas flows into the chamber 113 through the air inlet hole 114, the gas is pressed to a position where the blade 131 protrudes out of the groove 125, so that the blade 131 generates a torque to drive the first shaft segment 121 along the edge. A rotation direction R rotates. Under the action of the thrust applied by the gas and the centrifugal force generated when the first shaft section 121 rotates, the blade 131 closely abuts against the inner wall surface of the cylinder block 110 during the rotation. The gas after the work of pressing the blade 131 is discharged by the vent hole 115.

Referring to FIG. 4, FIG. 5, FIG. 7 and FIG. 9, when the first shaft segment 121 rotates, the second shaft segment 122 rotates together, and the second shaft segment 122 drives the rotary cylinder 25 to rotate in the rotation direction R, and the rotary cylinder During the rotation of the body 25, all the pistons 26 are simultaneously rotated. When the disk surface 242 of the swash plate 24 is inclined so that the angle A is greater than 10 degrees and less than 60 degrees, the slider 261 of each piston 26 is guided by the disk surface 242 and a holding plate 30 and the piston is driven to drive the piston. The rod 262 creates an axial reciprocating movement within the piston bore 253 of the cylinder chamber 252 such that the volume within the cylinder chamber 252 changes. When the opening 254 of any one of the cylinder chambers 252 communicates with the suction groove 281 and rotates within the angular range defined by the suction groove 281, the piston rod 262 moves away from the hole 254, which sucks the liquid. At this time, the opening 254 of the cylinder chamber 252 sucks the liquid flowing into the liquid inlet passage 213 through the suction groove 281. Then, when the opening 254 of the cylinder chamber 252 moves away from the suction groove 281 and rotates between the bottom end of the suction groove 281 and the bottom end of the discharge groove 282, the opening 254 is in a state of being closed by the valve plate 28, at this time, The piston rod 262 will squeeze the liquid toward the opening 254, causing the cylinder chamber 252 to be in a compression stroke of the compressed liquid. Subsequently, when the opening 254 of the cylinder chamber 252 is in communication with the discharge slot 282 and is rotated within the angular range defined by the discharge slot 282, the cylinder chamber 252 is in the discharge stroke of the discharged liquid, at which point the piston rod 262 will continue to The liquid is squeezed in the direction of the opening 254, so that the liquid flows through the opening 254 and the discharge groove 282 to the discharge passage 214 in sequence. Thereby, the hydraulic pump 2 can output the pressurized liquid to the liquid discharge tube for use in the substrate processing apparatus in the semiconductor wet processing process.

Referring to FIG. 3 and FIG. 7, the liquid delivery device 100 adjusts the relevant parameters according to actual needs during use. The following describes the manner in which the three parameters are adjusted:

The first parameter adjustment method is: the pressure input by the fixed gas through the air inlet hole 114, and the angle A of the swash plate 24 is adjusted by controlling the angle adjustment assembly 29, and the pressure and flow rate of the liquid discharge can be changed. For example, when the angle A is larger, the pressure and flow rate of liquid discharge are larger, and as the angle A is smaller, the pressure and flow rate of liquid discharge are smaller.

The second parameter adjustment method: the angle A of the fixed swash plate 24 is, for example, 45 degrees, and the pressure and flow rate of the liquid discharge can be changed by controlling the pressure of the gas input through the air inlet hole 114. For example, when the gas input pressure is larger, the pressure and flow rate of the liquid discharge are larger, and as the gas input pressure is smaller, the pressure and flow rate of the liquid discharge are smaller.

The third parameter adjustment mode: the pressure input by the fixed liquid via the liquid inlet passage 213, and the angle A of the swash plate 24 is adjusted by controlling the angle adjustment assembly 29, and the gas input pressure can be changed. For example, when the angle A is larger, the demand pressure of the gas input is smaller, and as the angle A is smaller, the demand pressure of the gas input is larger.

By using the pneumatic rotary drive 1 to adopt a pneumatic motor, when the pneumatic liquid delivery device 100 is used in a working environment of a wet semiconductor wet processing process, the pneumatic rotary actuator 1 can operate normally without being affected by the working environment. When the humidity is too high and leakage occurs, the safety in use can be improved. In addition, the rotational speed of the rotating shaft 12 of the pneumatic rotary actuator 1 can be changed with the load until the system is overloaded and the pneumatic rotary drive 1 is not damaged. For example, the substrate processing apparatus temporarily stops using the liquid output by the pneumatic liquid transport apparatus 100 during the process, and controls whether the liquid discharge tube outputs liquid to the control valve of the substrate processing apparatus to be switched to the closed state, so that the liquid discharge tube cannot discharge the liquid. At this time, the gas can continue to be input into the chamber 113 through the air inlet hole 114, and the rotating shaft 12 of the pneumatic rotary actuator 1 can only reduce the rotation speed or stop the rotation, because the liquid pressure in the liquid discharge pipe continues to increase until When the overload state is approached, the gas will push the rotating shaft 12 or the gas to be discharged through the vent hole 115 to achieve a stable gas pressure in the chamber 113, thereby preventing damage to components inside the pneumatic rotary actuator 1 and causing malfunction. It also does not cause the discharge pipe to rupture, and can simultaneously protect the pneumatic rotary drive 1 and the discharge pipe. When the control valve is switched to the open state to discharge the liquid from the discharge pipe, the pneumatic rotary drive 1 can immediately resume normal operation.

On the other hand, the hydraulic pump 2 is a swash plate type axial piston pump, which can reduce the pulsation generated when the liquid is discharged and stabilize the discharge pressure. Therefore, the use of the accumulator can be omitted as compared with the prior art. Furthermore, the small hydraulic pump 2 can achieve the required high pressure ratio, and therefore, the overall volume of the pneumatic liquid delivery device 100 can be reduced to reduce the space it occupies.

Referring to Fig. 10, there is shown a second embodiment of the pneumatic fluid delivery device of the present invention. The overall structure and actuation mode are substantially the same as those of the first embodiment, except that the lubricating member 27 is disposed.

In the present embodiment, the lubricating member 27 is fixed to the inner peripheral surface 255 and abuts against the outer peripheral surface 263 of the piston rod 262 in a liquid-tight manner, whereby the piston rod 237 can be smoothly moved in the piston hole 253. efficacy.

Referring to Figure 11, there is shown a third embodiment of the pneumatic fluid delivery device of the present invention, the overall structure and actuation of which is substantially the same as that of the first embodiment, except for the manner in which the lubrication member 27 is disposed.

In the present embodiment, the outer peripheral surface 263 of each piston rod 262 and the inner peripheral surface 255 of the corresponding piston hole 253 are respectively provided with a lubricating member 27, and the two lubricating members 27 are respectively sleeved on the outer peripheral surface 263 and fixed on the inner peripheral surface 255. Further, they are brought into abutment with each other in a liquid-tight manner, whereby the effect of smoothly moving the piston rod 237 in the piston hole 253 can be achieved.

Referring to Figure 12, there is shown a fourth embodiment of the pneumatic fluid delivery device of the present invention. The overall structure and actuation mode are substantially the same as those of the first embodiment, except that the piston rod 262 and the rotary cylinder 25 of each piston 26 are at least One is a lubricating part.

The piston rod 262 of each piston 26 is a lubricating member, or the rotating cylinder 25 is a lubricating member, or both of the lubricating members are designed. The lubricating member may be made of a lubricious graphite material or It is made of a copper material having good wear resistance, so that the piston rod 262 of each piston 26 can also smoothly move in the piston hole 253. Thereby, the lubricating member 27 as shown in Fig. 7 can be omitted to reduce the structural design complexity.

Referring to Figure 13, a fifth embodiment of the present pneumatic fluid delivery device is generally constructed and operated in substantially the same manner as the first embodiment, except that the second outer casing segment 21 is disposed in the first outer casing segment 11.

In the present embodiment, the housing 210 of the second outer casing segment 21 is integrally formed on the side of the cylinder block 110 of the first outer casing segment 11, so that the two together form a single casing structure. In other embodiments, the arrangement or connection between the second outer casing segment 21 and the first outer casing segment 11 can also be designed according to actual needs, as long as the second outer casing segment 21 and the first outer casing segment 11 are The chamber 212 and the chamber 113 may be defined separately, and are not limited to the integral molding method exemplified above.

In summary, the pneumatic liquid conveying device 100 of each embodiment can improve the safety in use by using the pneumatic rotary motor 1 by using a pneumatic motor. Further, the rotational speed of the rotating shaft 12 of the pneumatic rotary actuator 1 can be changed with the load, whereby the damage of the pneumatic rotary actuator 1 and the rupture of the discharge pipe can be prevented from being excessively overloaded or overloaded. On the other hand, the hydraulic pump 2 adopts a swash plate type axial piston pump, which can reduce the pulsation generated when the liquid is discharged and stabilize the discharge pressure, and the small-sized hydraulic pump 2 can achieve the required high pressure increase. In comparison, the overall volume of the pneumatic liquid transport device 100 can be reduced to reduce the space occupied by it, so that the object of the present invention can be achieved.

However, the above is only the embodiment of the present invention, and when it is not possible to limit the scope of the present invention, all the simple equivalent changes and modifications according to the scope of the patent application and the contents of the patent specification are still This new patent covers the scope.

100‧‧‧Pneumatic liquid conveying device
1‧‧‧Pneumatic rotary drive
11‧‧‧First outer casing segment
110‧‧‧Cylinder block
111‧‧‧First sealing cover
112‧‧‧Second sealing cover
113‧‧‧ chamber
114‧‧‧Air intake
115‧‧‧ venting holes
116‧‧‧First perforation
12‧‧‧ shaft
121‧‧‧First shaft segment
122‧‧‧second shaft segment
123‧‧‧ pivot
124‧‧‧ sleeve
125‧‧‧ Groove
126‧‧‧Tie groove
13‧‧‧Activity unit
131‧‧‧ leaves
14‧‧‧joining unit
141‧‧‧ bolt
142‧‧‧ nuts
2‧‧‧Hydraulic pump
21‧‧‧Second outer casing
210‧‧‧Shell
211‧‧‧End cover
212‧‧ ‧ room
213‧‧‧Inlet channel
214‧‧‧Draining channel
215‧‧‧Second perforation
216‧‧‧ accommodating slots
217‧‧‧ into the tank
218‧‧‧ inlet hole
219‧‧‧Drain tank
220‧‧‧Drain hole
23‧‧‧Liquid transfer unit
24‧‧‧ swashplate
241‧‧‧through holes
242‧‧‧
25‧‧‧Spin cylinder
251‧‧‧Bolt hole
252‧‧‧Cylinder room
253‧‧‧Piston hole
254‧‧‧ openings
255‧‧‧ inner circumference
26‧‧‧Piston
261‧‧‧ Slider
262‧‧‧ piston rod
263‧‧‧ outer perimeter
27‧‧‧Lubricating parts
28‧‧‧Valve plate
281‧‧‧Inhalation tank
282‧‧‧Drainage trough
29‧‧‧ Angle adjustment assembly
290‧‧‧ air chamber
291‧‧‧Flexing unit
292‧‧‧Flexible connection unit
293‧‧‧Piston
294‧‧‧ pivotal parts
295‧‧‧ fixed rod
296‧‧‧ activity pole
297‧‧‧Compressed spring
298‧‧‧ pivotal parts
30‧‧‧Retaining plate
A‧‧‧ angle
D1‧‧‧ aperture
D2‧‧‧ aperture
F‧‧‧radial surface
R‧‧‧Rotation direction

Other features and effects of the present invention will be apparent from the following description of the drawings, wherein: Figure 1 is a front view of a first embodiment of the present pneumatic fluid delivery device illustrating a second outer casing segment A casing is coupled to a cylinder block of a first outer casing section through an engaging unit; FIG. 2 is an exploded perspective view showing the detailed structure of a pneumatic rotary actuator of the first embodiment; A cross-sectional view taken along the line S1-S1 in Fig. 1 illustrates that each blade is pressed by a gas to drive a first shaft segment to rotate; Fig. 4 is an incomplete partial cross-sectional view of the first embodiment, illustrating a hydraulic pump Figure 5 is an exploded perspective view showing the assembled relationship between the end cap and a valve plate of the hydraulic pump of the first embodiment; Figure 6 is taken along line S2-S2 of Figure 5 Figure 7 is an incomplete partial cross-sectional view of the first embodiment illustrating the detailed structure of the hydraulic pump; Figure 8 is a right side view of a rotary cylinder of the first embodiment; Figure 9 is the first One implementation The valve plate of the example is combined with a right side view of the rotary cylinder to illustrate the communication relationship between a suction slot and a discharge slot of the valve plate and the plurality of cylinder chambers of the rotary cylinder; FIG. 10 is a pneumatic type of the present invention. An incomplete partial cross-sectional view of a second embodiment of the liquid delivery device, wherein a lubricating member is fixed to an inner circumferential surface and abuts against an outer circumferential surface of a piston rod; FIG. 11 is a pneumatic liquid conveying method of the present invention. An incomplete partial cross-sectional view of the third embodiment of the device, illustrating that the outer circumferential surface and the inner circumferential surface of the piston rod are respectively provided with the lubricating member; FIG. 12 is a fourth embodiment of the pneumatic fluid conveying device of the present invention. An incomplete partial cross-sectional view showing that at least one of the piston rod and the rotating cylinder is a lubricating member; and FIG. 13 is a front view of the fifth embodiment of the pneumatic pneumatic conveying device of the present invention, illustrating the second The housing of the outer casing segment is integrally formed on the side of the cylinder block of the first outer casing segment.

Claims (10)

A pneumatic liquid conveying device comprising: a pneumatic rotary drive comprising a first outer casing segment, a rotating shaft, and an actuating unit, the first outer casing segment defining an air inlet hole for a gas to flow in, and a a venting hole for the gas to flow out, the rotating shaft includes a first shaft segment, and a second shaft segment extending axially from one end of the first shaft portion, the first shaft portion being rotatably pivoted In the first outer casing segment and in the first outer casing segment, the second shaft segment protrudes from the first outer casing segment, and the actuating unit is disposed on the first axial segment and is driven by the gas to actuate the rotating shaft And a hydraulic pump comprising a second outer casing segment and a liquid transfer unit, the second outer casing segment being disposed on a side of the first outer casing segment and defining a liquid inlet passage for a liquid to flow in, and a a drain passage for discharging the liquid, the second shaft segment is rotatably pivotally connected to the second outer casing segment and located in the second outer casing segment, the liquid transfer unit is located in the second outer casing segment and disposed on the a second shaft segment for driving the liquid Unit operation, the transmission unit draws the liquid flowing through the liquid inlet passage and discharges it to the pressurized fluid discharge passage. The pneumatic liquid transporting device of claim 1, wherein the liquid transporting unit comprises a swash plate, a rotating cylinder, and a plurality of pistons, the swash plate is sleeved on the second shaft segment, the rotating cylinder Fixed to the second shaft segment and located between the swash plate and the liquid inlet and drain passages and formed with a plurality of cylinder chambers surrounding the second shaft segment, one end of each piston slidably contacting the swash plate The other end is movably disposed in the corresponding cylinder chamber. When the rotating cylinder is rotated by the second shaft, the rotating cylinder drives the pistons to rotate and the pistons are simultaneously in the corresponding cylinder chamber. Reciprocating to change its volume so that the corresponding cylinder chamber can draw the liquid through the liquid inlet passage and discharge through the liquid discharge passage. The pneumatic liquid conveying device according to claim 2, wherein each of the pistons includes an outer peripheral surface, each of the cylinder chambers being defined by an inner circumferential surface of the rotating cylinder, the outer circumferential surface and the inner circumferential surface At least one of them is provided with a lubricating member. The pneumatic liquid delivery device of claim 2, wherein at least one of each of the piston and the rotary cylinder is a lubricating member. The pneumatic liquid delivery device of claim 2, wherein the liquid transfer unit further comprises a valve plate disposed on a side of the rotary cylinder opposite to the swash plate and the liquid inlet and drain passage The valve plate is formed with a suction groove and a discharge groove, and the suction groove communicates with the liquid inlet passage and is located in a rotation path of each of the cylinder chambers, and when any one of the cylinder chambers communicates with the suction groove The liquid is sucked through the suction groove, and the discharge groove communicates with the liquid discharge passage and is located in a rotation path of each of the cylinder chambers, and the liquid is discharged through the discharge groove when any one of the cylinder chambers communicates with the discharge tank. The pneumatic liquid delivery device according to claim 5, wherein the liquid inlet passage has a liquid inlet tank communicating with the suction tank, and a liquid inlet hole communicating with the liquid inlet tank, the liquid discharge passage The utility model has a liquid discharge tank communicating with the discharge tank, and a liquid discharge hole communicating with the liquid discharge tank, wherein the diameter of the liquid inlet hole is larger than the diameter of the liquid discharge hole. The pneumatic liquid delivery device of claim 2, wherein the swash plate has a disk surface for sliding contact of one end of each of the pistons, the disk surface being at an angle with a radial surface perpendicular to the second shaft segment The liquid transfer unit further includes an angle adjustment assembly disposed between the second outer casing segment and the swash plate for adjusting the angle. The pneumatic fluid delivery device of claim 7, wherein the angle adjustment assembly is capable of adjusting the angle to any angle between 10 and 60 degrees. The pneumatic fluid delivery device of claim 1, wherein the first outer casing segment comprises a cylinder block, the cylinder block has the air inlet hole and the air venting hole, and the first shaft segment is eccentrically disposed therein a plurality of grooves are formed in the cylinder body, the outer surface of the first shaft segment is radially recessed, and the actuating unit comprises a plurality of blades respectively disposed in the radial grooves and spaced apart from each other. The radial direction of the first shaft segment moves telescopically in the corresponding groove. The pneumatic liquid delivery device of claim 1, wherein the second outer casing segment is integrally formed on one side of the first outer casing segment.