TWI813555B - Method and apparatus for substrate transport - Google Patents

Abstract

A substrate processing apparatus includes a linearly elongated substantially hexahedron shaped substrate transport chamber having linearly elongated sides of the hexahedron and at least one end wall of the hexahedron substantially orthogonal to the linearly elongated sides. A plurality of process modules are linearly arrayed along the at least one of the linearly elongated sides. A substrate transport arm is pivotally mounted within the substrate transport chamber so that a pivot axis of the substrate transport arm is mounted, fixed relative to the substrate transport chamber. The substrate transport arm has a three link - three joint SCARA configuration, of which one link is an end effector with at least one substrate holder, that is articulate to transport the substrate, and held by the at least one substrate holder, in and out of the substrate transport chamber through the end and side substrate transport openings.

Description

Substrate transportation methods and equipment

[0002] Exemplary embodiments of the present invention relate generally to robotic systems, and more particularly to robotic delivery devices.

[0003] Productivity is one way to judge the efficiency of a semiconductor manufacturing plant, which is called a FAB. Improvements in FAB productivity have long been pursued and welcomed. Another way that FAB efficiency is judged is the flexibility of the FAB configuration (and the flexibility of the configuration of the processing tools and equipment within it). [0004] The main factors in FAB productivity are the productivity of the processing tool (the substrate is loaded into the processing tool, processed and removed from the processing tool after processing), and how efficiently the processing module can be installed on a given FAB space (i.e., how many processing tools can be installed in a given FAB space and have a configuration that optimizes productivity). On the other hand, the requirement for smaller transfer chambers has resulted in longer process times to implement treatment recipes within the treatment tool and correspondingly larger substrate sizes, such as 400mm and 450mm or even larger substrates , try to mitigate the impact of longer processing times on productivity by applying a scaling factor. Processing Substrate Size The effects of processing a substrate that increases significantly are, for example, larger processing tool components and longer processing times. For example, handling equipment with longer reach is needed to handle larger substrates. Larger processing chambers, transfer chambers and load lock chambers with larger footprints are also required to process larger substrates. An example of a conventional processing tool 100 having larger processing tool components is illustrated in FIG. 1 and includes a transfer chamber 114 , a substrate transfer arm 150 disposed within the transfer chamber 114 , coupled to the transfer chamber 114 load lock chambers 110, 112 and processing modules 120, 122, 124, 126, 128, 130 coupled to the transport chamber 114. Here, three processing modules are coupled to each side of the transport chamber, where the substrate transport arm 150 includes an upper arm link 152 , a forearm link 154 and end effectors 156 , 158 . Figure 1 shows a conventional transfer chamber 114 with a conventional transfer arm 150 having a three-link configuration (one of the links being an end effector 156) plus another end effector 158 and shown limitations of this traditional approach. For example, the conventional form shown in Figure 1 has a length and width ratio (or aspect ratio) that is substantially similar to the length and width ratio of the conventional hexahedral-shaped planform processing tool 100' shown in Figure 1A. There is a modest increase in processing module capacity and efficiency to compensate for processing time. [0005] Increases in the size of the processing modules and load lock chambers, for example, increase the processing time per substrate. An increase in the processing time of each substrate in one or more processing modules/load lock chambers will result in an increase in the idle time of other processing modules in the processing tool used to perform subsequent substrate processing on the substrate's processing recipe. As a result, this was clearly seen as having a negative impact on process tool productivity. This adverse effect can be naturally achieved by increasing the number of processing modules (which, as mentioned above, is not achievable with conventional transport chambers) and by increasing any load/unload operations on the processing tool. This is improved by the number of substrates within each processing tool at a given point in time. Therefore, a processing tool with a minimal footprint and a large number of processing modules (or a high density ratio of processing modules to processing tool footprint) and corresponding implementation component configurations, while having a desired A processing tool with better substrate positioning properties is desirable.

One aspect of the present invention provides a substrate processing apparatus, which includes: a linearly elongated substantially hexahedral-shaped substrate transport chamber having linearly elongated sides of the hexahedron and a linearly elongated At least one end wall of the hexahedron with sides that are substantially orthogonal; the at least one end wall has an end substrate transport opening, and at least one of the linear elongated sides has a linear array of side substrate transport openings, the At least one of the end and side substrate transport openings is arranged to allow a substrate to be transported in and out of the substrate transport chamber; a plurality of processing modules along at least one of the rectilinear elongated sides are linearly arranged and communicate with the substrate transport chamber respectively through corresponding side substrate transport openings; and a substrate transport arm, which is pivotably installed in the substrate transport chamber, so that the substrate The pivot axis of the transport arm is fixedly mounted relative to the substrate transport chamber. The substrate transport arm has a three-link-three-joint SCARA configuration, one of which is a distal end with at least one substrate holder. an actuator, which is articulated and used to transport the substrate held by the at least one substrate holder into and out of the substrate transport chamber through the end and side substrate transport openings, so that the end The actuator is common to each of the end and side substrate transport openings; wherein the hexahedron has an aspect ratio of side length to width, which is a large aspect ratio, and the width is relative to The substrate handling arm is compact in terms of footprint.

Referring to FIGS. 2A-2E , aspects of the disclosed embodiments provide a substrate processing tool 200 that has a linear processing tool configuration and that can be adjusted to increase the productivity and efficiency of the substrate processing tool. , wherein, compared to traditional substrate processing tools (such as those described above), the substrate processing tool 200 has a higher performance for a given space (such as the width W1 of the substrate processing tool 200 ). Handles module density. Aspects of the disclosed embodiments described herein provide a modular substrate processing tool 200 such that the number of processing modules PM coupled to the transport module 210 can be reduced simply by modularizing the transport chamber 210 This is achieved by increasing the length L of the transport chamber without increasing the width W of the transport chamber 210 . Additionally, the modular transport chamber 210 described herein may be accommodated within the existing space (eg, width) of a conventional substrate processing tool 100 shown in FIG. 1 that processes the One end of the tool has a twin load lock chamber pattern, which is similar to a conventional processing tool with a hexahedral-shaped planar/octahedral-shaped transport chamber, and the aspect ratio of its length to width is approximately 1:1 or less than 2 :1. [0021] In one aspect, the substrate processing tool 200 includes a front end 201, a back end 202, and any suitable controller 299 for controlling the operation of the substrate processing tool 200 in the manner described below. In one aspect, controller 299 may be part of any suitable control architecture (eg, clustered architecture control). The control system can be a closed loop controller with a master controller (which in one aspect can be controller 110), a cluster controller, and an autonomous remote control (for example, disclosed on March 8, 2011 No. 7,904,182, entitled "Scalable Motion Control System", the disclosure of which is incorporated herein by reference). In other aspects, any suitable controller and/or control system may be used. [0022] In one aspect, the front end 201 may be an atmospheric front end that includes an equipment front end module (EFEM) 290, load ports 292A-292C, and one or more load lock chambers LL1, LL2. In one aspect, the device front-end module 290 includes a transport chamber 291 to which the one or more load ports 292A-292C are coupled. The load ports 292A-292C are configured to hold a substrate cassette/carrier C within which a substrate S is held for loading therein via the load ports 292A-292C. The substrate processing tool 200 may be removed from the substrate processing tool 200 . The one or more load lock chambers LL1, LL2 are coupled to the transport chamber 291 for transporting the substrate S between the transport chamber 291 and the rear end 202. [0023] The backend 202 may be a vacuum backend. It should be noted that when used herein, the term vacuum may mean that the environment in which the substrate is processed is a high vacuum (eg, 10 ^-5 Torr or less). In one aspect, the rear end 202 includes a linearly elongated substantially hexahedral shaped transport chamber 210 having linearly elongated sides 210S1, 210S2 and end walls 210E1, 210E2 extending between the sides 210S1, 210S2. In one aspect, the side walls 210S1, 210S2 have a length L and the end walls 210E1, 210E2 have a width W, such that the hexahedron-shaped transport chamber 210 has an aspect ratio of the side length L to the width W (which is a large length-to-width ratio). width ratio), and the width W is relative to a coverage area FP of a substrate transport arm 250 disposed in the transport chamber 210 (ie, when the substrate transport arm is in a fully retracted state It is compact in terms of the minimum swing radius). The width W is compact relative to the footprint FP of the substrate handling arm 250 because only sufficient minimum clearance is provided between the sides 210S1, 210S2 and the footprint FP to allow the substrate handling arm 250 to operate as herein described Operate as described. In one aspect, the aspect ratio of the transport chamber 210 is greater than 2:1, and the footprint of the substrate transport arm is compact for a predetermined maximum reach of the substrate transport arm; and in In other aspects, the aspect ratio is about 3:1, and the footprint of the substrate transport arm is compact for a predetermined maximum reach of the substrate transport arm. In one aspect, a linear array from the side substrate transport openings 270A1-270A6, 270B1-270B6 (which is disposed between the hexahedral-shaped substrate transport chamber 210 and the at least one end wall 210E1 , 210E2 (opposite the other end wall 210E1, 210E2 adjacent) the side substrate transport openings 270A1-270A6, 270B1-270B6 are oriented such that a side substrate transport openings 270A1-270A6, 270B1-270B6 adjacent the opposite end wall 210E1, 210E2 The corresponding axes 270A1X-270A6X, 270B1X-270B6X (see Figure 6) of the substrate holder movement of the openings 270A1-270A6, 270B1-270B6 are substantially orthogonal to those passing through the at least one end wall 250E1, 250E2 Another axis of substrate holder movement 260AX, 260BX for the end substrate transport openings 260A, 260B. For example, the at least one end wall 210E1, 210E2 of the hexahedron-shaped substrate transport chamber 210 is substantially orthogonal to the linear elongated side surfaces 210S1, 210S2. The at least one end wall 210E1, 210E2 has at least one end substrate transport opening 260A, 260B. At least one of the linear elongated sides 210S1, 210S2 has a linear array of side substrate transport openings 270A1-270A6, 270B1-270B6. In one aspect, another linear elongated side 210S1, 210S2 opposite to the at least one linear elongated side 210S1, 210S2 of the substrate transport chamber 210 has at least one other side substrate transport opening 270A1-270A6, 270B1 -270B6, and the substrate transport arm 250 is configured to transport the substrate S (which is held by at least one substrate holder 250EH of the end effector 250E, 250E1, 250E2 of a substrate transport arm 250, 250A1, 250A2) The substrate transport openings 260A, 260B, 270A1-270A6, 270B1-270B6 are transported in and out of the substrate transport chamber through the end, side, and other side, so that the end effectors 250E, 250E1, and 250E2 are respectively disposed on the substrate. The end walls 210E1, 210E2 of the transport chamber 210 and the linear elongated side surfaces 210S1, 210S2 and the end, side and other side substrate transport openings 260A, 260B on the linear elongated opposite sides 210S1, 210S2 , 270A1-270A6, 270B1-270B6 are shared by each. In one aspect, each of the end substrate transfer openings 260A, 260B and the side substrate transfer openings 270A1-270A6, 270B1-270B6 is configured to transfer a substrate S in and out of the openings. Shipping room 210. In one aspect, a respective axis of substrate holder movement 270A1X-270A6X, 270B1X-270B6X passes through each side substrate transport opening 270A1-270A6, 270B1-270B6 and passes through each side substrate transport opening, respectively. The axes of movement of the substrate holders of 270A1-270A6 and 270B1-270B6 extend substantially parallel to each other. In one aspect, the substrate transport chamber 210 includes a buffer station BS adjacent to at least one of the openings 260A, 260B, 270A1-270A6, 270B1-270B6. During transport of substrates within the substrate transport chamber 210 is temporarily stored in this buffer station. In one aspect, at least one end wall 210E1, 210E2 is sized to receive two side-by-side load lock chambers LL1, LL2 or other processing modules PM (see Figures 7, 9A, 9B and 11), they are placed adjacent to each other on a common height or plane (such as the substrate transport plane TP1 shown in Figure 2F, which only shows the end openings for the purpose of illustration) and face their respective ends together. Walls 210E1, 210E2. It should be understood that although the substrate transport chamber 210 is shown in the drawings as having two end openings 260A, 260B on one or both of the end walls 210E1, 210E2, in other aspects, Only one end opening may be provided in one or both of the end walls 210E1, 210E2 such that only one load lock chamber or processing module is coupled to a respective end wall 210E1, 210E2. Similarly, sides 210S1, 210S2 are configured to receive side-by-side, two side-by-side processing modules PM or load lock chambers LL1, LL2 positioned adjacent to each other on a common height or plane (e.g., substrate transport Plane TP1) and jointly face the respective side surfaces 210S1, 210S2. In other aspects, load lock chambers LL1, LL2 and/or processing modules PM may be stacked one on top at different heights or planes on individual end walls 210E1, 210E2 or sides 210S1, 210S2 (e.g. , substrate transport planes TP1, TP2), any suitable grid (of any suitable size) for forming openings 260A, 260B, 260A', 260B', 270A, 270B (see Figure 2E, which Only the end openings are shown for illustrative purposes), used to connect the processing module PM or the load lock chambers LL1, LL2 to the transport chamber 210. In one aspect, the processing module PM is a tandem processing module TPM (e.g., substrate holding stations PMH1, PMH2 within a common housing and coupled to two side-by-side openings of the substrate transport chamber ); while in other aspects, the processing module may be a single processing module SPM (e.g., within a common housing and coupled to a single opening of the substrate transport chamber—see Figure 2A) or coupled to a A single module or a combination of serially connected modules of individual openings of a common substrate transport chamber 210 (see Figure 2A). In one aspect, the substrate processing tool 200 includes a configuration along at least one of the linear elongated sides 210S1, 210S2 and through corresponding side substrate transport openings 270A1-270A6, 270B1-270B6, respectively. A plurality of processing modules PM communicated with the substrate transport chamber 210 . In one aspect, the linear array of processing modules PM provides at least six processing module substrate holding stations PMH, PHM1, PMH2 distributed at substantially the same height along at least one linear elongated side 210S1, 210S2, and Each substrate holding station is accessed via a corresponding side substrate transport opening 270A1-270A6, 270B1-270B6 with a common end effector 250E, 250E1, 250E2 of the substrate transport arm 250, 250A, 250B. Although three processing modules PM are illustrated on each side 210S1, 210S2 of the substrate transport chamber 210 (with the exception of the single processing module SPM in FIG. 2A), there may be more than three processing modules PM on each side 210S1, 210S2. One processing module PM or less than three processing modules PM are used to provide any suitable substrate holding station on each side 210S1, 210S2. In one aspect, the side openings 270A1-270A6, 270B1-270B6 and the processing module PM may be disposed at different heights for use with the openings 260A, 260B described herein with reference to FIG. 2E and the end walls 210E1, 210E2. , 260A', 260B' are described in substantially similar manners to form openings and processing module grids (grids) (the transport device 245 includes a Z-axis drive for lifting the end effectors 250E, 250E1, 250E2 and Lowered to different heights TP1, TP2). In one aspect, the processing module PM can operate on the substrate through deposition, etching, or other types of processing to form electronic circuits or other desired structures on the substrate. Typical processes include, but are not limited to, thin film processes using vacuum, such as plasma etching or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation (e.g., ion implantation), Metrology, rapid thermal processing (RTP), dry exfoliation atomic layer deposition (ALD), oxidation/diffusion, nitride formation, vacuum lithography, epitaxy (EPI), wire bonder and evaporation or other uses of vacuum Thin film treatment of pressure. [0027] Referring to FIGS. 2A, 2B and 2C, as mentioned above, the substrate processing tool 200 has a modular form. In one aspect, front end 201 may be a module (eg, front end module 200M1) of the substrate processing tool 200 such that there is a transport chamber 291, load lock ports 292A-292C, and load lock chambers LL1, LL2. Any suitable front end may be coupled to the substrate transport chamber 210 via end openings 260A, 260B on one or more end walls 210E1, 210E2 of the substrate transport chamber 210. In one aspect, the substrate transport chamber 210 forms another module of the substrate processing tool, wherein the substrate transport chamber 210 includes a common or core module 200M2 and one or more chamber end modules or Insert modules 200M3, 200M4, 200M5, 200M6, 200M7, 200M8. In one aspect, the core module 200M2 includes a frame 200F2 and the at least one substrate transport device 245 is mounted to the frame 200F1 in any suitable manner. Each insert module 200M3, 200M4, 200M5, 200M6, 200M7, 200M8 also includes a respective frame 200F3, 200F4, 200F5, 200F6, 200F7, 200F8 which when combined to the frame 200F2 of the core module 200M2 forms the Frame 200F of substrate transport chamber 210 . In one aspect, each of the plug-in modules 200M3, 200M4, 200M5, 200M6, 200M7, and 200M8 has a different configuration such that they can be selected to connect to the core module 200M2. The linear elongated sides 210S1, 210S2 of the substrate transport chamber 210 are provided with a selectable variable length L, wherein the sides 210S1, 210S2 of the substrate transport chamber can be selected between different lengths and define the substrate. An optional convertible version of the material transfer chamber. For example, the insert module 200M3 includes sides 210M3S1, 210M3S2, each side 210M3S1, 210M3S2 having a length L1 and including, for example, two of the side openings 270A1-270A6, 270B1-270B6 (which are labeled in FIG. 2D openings 270A and 270B), and the end wall 210M3E1 of the insertion module 200M3 does not have any openings for the end effectors 250E, 250E1, 250E2 to pass through. Insert module 200M5 is substantially similar to insert module 200M3, but end wall 210M5E of insert module 200M5 includes openings 260A, 260B. Similarly, the insert module 200M6 includes sides 210M6S1, 210M6S2, each side 210M6S1, 210M6S2 having a length L2 and including, for example, one of the openings 270A and 270B, and the end wall 210M6E1 of the insert module 200M6 does not have any The opening through which end effectors 250E, 250E1, and 250E2 pass. Insert module 200M4 is substantially similar to insert module 200M6, but end wall 210M4E of insert module 200M4 includes openings 260A, 260B. The insert module 200M8 includes sides 210M8S1, 210M8S2. Each side 210M8S1, 210M8S2 has a length L3 and does not include any side openings, and the end wall 210M8E1 of the insert module 200M8 does not have anything for the end effectors 250E, 250E1, 250E2 to pass through. Passed the opening. Insert module 200M7 is substantially similar to insert module 200M8, but end wall 210M7E of insert module 200M7 includes openings 260A, 260B. Insert modules 200M3, 200M4, 200M5, 200M6, 200M7, 200M8 are coupled to the core module 200M2 by any suitable means (e.g., bolts BLT on the interface), and any suitable seal 200SL is provided on each insert module Between each end wall 200M2E1, 200M2E2 of group 200M3, 200M4, 200M5, 200M6, 200M7, 200M8 and core module 200M2. In this aspect, the length L1 of the insertion modules 200M3 and 200M5 is greater than the length L2 of the insertion modules 200M4 and 200M6; and the length L2 of the insertion modules 200M4 and 200M6 is greater than the length L3 of the insertion modules 200M7 and 200M8. Furthermore, although the insert module is shown without side openings, with one side opening 270A, 270B on each side, and with two side openings 270A, 270B on each side, with or without end openings 260A, 260B, In other aspects, the insert modules may have any suitable number of side openings 270A, 270B and any suitable length to provide a variable length of the substrate transport chamber 210 and any suitable number of side openings 270A, 270B and End openings 260A, 260B are provided on the end walls 210E1, 210E2 of the base material transport chamber 210. For example, referring to Figures 7, 8, 9A, 9B, 10, 11 and 12, the substrate transport chamber 210 is shown as having a selectable variable configuration, wherein the configuration can vary between the side length L and the width W. (See Figure 2A) Choose between structures in which the substrate is transported by changing the aspect ratio from a large aspect ratio (e.g., 3:1) to a unity aspect ratio (e.g., 1:1) Arm 250 is common to each alternative substrate transfer chamber 210 configuration. [0030] As can be seen in Figure 7, the substrate transport chamber 210 includes the core module 200M2 and two insert modules 200M5 coupled to each end 200M2E1, 200M2E2 of the core module 200M2. In this aspect, the insert modules 200M5 are selected to provide the substrate transport chamber 210 with an end opening 260A, 260B in each end wall 210E1, 210E2 while providing the substrate transport chamber 210 with a 3:1 The aspect ratio of length L to width W. The type of the substrate transport chamber 210 illustrated in FIG. 8 also includes the selected insertion modules 200M5, 200M6, so that the substrate transport chamber 210 has an aspect ratio of length L to width W of 3:1; but In this aspect, only one end wall 210E1 of the substrate transport chamber includes end openings 260A, 260B, while end wall 210E2 does not include any openings. In this aspect, plug-in module 200M5 is coupled to the first end 200ME1 of the core module 200M2 and plug-in module 200M6 is coupled to the second end 200M2E2 of the core module 200M2. As can be seen in Figures 9A and 9B, the substrate transport chamber 210 includes the core module 200M2 and two insert modules 200M4, which are selected to provide the substrate transport chamber 210 with a 2:1 The aspect ratio of length L to width W. Here, one of the plug-in modules 200M4 is coupled to the first end 200M2E1 of the core module 200M2 and the other plug-in module 200M4 is coupled to the second end 200M2E2 of the core module 200M2, with To provide the 2:1 aspect ratio, end openings 260A, 260B of the substrate transport chamber 210 are also provided on each end wall 210E1, 210E2 of the substrate transport chamber 210. Although not shown, the plug-in module 200M4 coupled to the second end 200M2E2 of the core module 200M2 may be replaced with the plug-in module 200M6 such that the end openings 260A, 260B are formed in a manner substantially similar to that shown in FIG. 8 is provided only on the end wall 210E1 of the substrate transport chamber 210 . The type of substrate transport chamber 210 illustrated in FIG. 10 also includes insert modules 200M3, 200M7, which are selected so that the substrate transport chamber 210 has a length L to width W of 2:1. aspect ratio; but in this aspect, only one end wall 210E2 of the substrate transport chamber includes end openings 260A, 260B, and end wall 210E2 does not include any openings. In this aspect, insert module 200M3 is coupled to second end 200M2E2 of core module 200M2 such that core module 200M2 and insert module 200M3 provide each side 210S1, 210S2 of substrate transport chamber 210 Four side openings 270A, 270B. The insert module 200M7 is coupled to the first end 200M2E1 of the core module 200M2 such that the load lock chambers LL1, LL2 of the front end module 200M1 can be coupled to the substrate transport chamber 210, wherein the insert module 200M7 only includes End openings 260A, 260B. Although not shown in the figures, the plug-in module 200M6 coupled to the second end 200M2E2 of the core module 200M2 may be replaced with the plug-in module 200M5 such that the end openings 260A, 260B are substantially similar to Figures 7, 9A, 9B The illustrated method is provided only on the two end walls 210E1, 210E2 of the substrate transport chamber 210. The type of substrate transport chamber 210 illustrated in Figure 11 includes two insert modules 200M7, which are selected such that the substrate transport chamber 210 has a length L to width W of a 1:1 length L to width W. Ratio (e.g., single aspect ratio). In this aspect, the two end walls 210E1, 210E2 of the transport chamber include end openings 260A, 260B. In this aspect, one of the plug-in modules 200M7 is coupled to the second end 200M2E2 of the core module 200M2, and the other plug-in module 200M7 is coupled to the first end of the core module 200M2 200M2E1, so that only the core module 200M2 provides two side openings 270A, 270B on each side 210S1, 210S2 of the substrate transport chamber 210. In this aspect, the insert modules 200M7 are coupled to the core module 200M2 such that the load lock chambers LL1, LL2 of the front end module 200M1 can be coupled to the substrate transport chamber 210 and the processing module PM can Coupled to the second end 200E2 of the substrate transport chamber 210, the insert modules 200M7 include only end openings 260A, 260B. In an aspect as shown in Figure 12, the plug-in module 200M7 coupled to the second end 200M2E2 of the core module 200M2 can be replaced by plug-in module 200M8, which is used for the third end of the core module 200M2. The two ends 200M2E2 are capped without providing any side openings or end openings, so that the substrate transport chamber 210 can maintain the end openings 260A, 260B while only providing end openings 260A, 260B on the end wall 210E1 of the substrate transport chamber 210 The 1:1 aspect ratio of length L to width W. In an aspect as shown in FIG. 12A , insert module 200M7 may be coupled to ends 200M2E1 , 200M2E2 of core module 200M2 , wherein a processing module PM may be disposed in a portion of substrate transport chamber 210 or sides 210S1, 210S2 and/or second end 210E2 (one or more load lock chambers are coupled to the first end 210E1 of the substrate transport chamber 210). Although exemplary forms of substrate transport chamber 210 have been shown in Figures 7, 8, 9A, 9B, 10, 11, and 12, it should be understood that any number of core modules 200M2 and any number of inserts The modules 200M may be combined in any suitable pattern to provide the substrate transport chamber 210 with any suitable length L to width W aspect ratio having any suitable number of side openings 270A, 70B and end openings 260A, 260B. [0034] Referring again to FIGS. 2A and 2E, in one aspect, at least one substrate transport device 245 is at least partially disposed within the transport chamber 210. In one aspect, each substrate transport device 245 includes a substrate transport arm 250 that is pivotably mounted within the transport chamber 210 such that a pivot axis (eg, shoulder) of the substrate transport arm 250 The pivot axis SX is fixedly mounted relative to the transport chamber 210 so that the pivot axis SX does not traverse the length L or width W of the substrate transport chamber 210 . In one aspect, fixed mounting of the pivot axis SX is advantageous compared to mounting the substrate transport arm 250 to a linear translator because the fixed mounting of the pivot axis SX will occur at the Particulates within the transport chamber 210 are minimized and any sealing interface isolating the slip features used to implement the positioning of the pivot joint SX is limited or eliminated. Furthermore, the articulated transport arm 250 described herein provides a compact footprint, as opposed to a conventional articulated arm constructed with a pivoting link upon which the transport arm is mounted. A long reach to enable one end wall 210E1 (e.g., the load lock chamber LL1, LL2 connected thereto), the other end wall 210E1 (e.g., the load lock chamber or processing module connected thereto) and along the The side surfaces 210S1 and 210S2 of the transport chamber 210 with a large aspect ratio are disposed between the processing modules PM between the end walls to solve the droop effect (exhibited by traditional arms); providing the substrate transport arm 250 substantially unrestricted arm mobility corresponding to such long reach (as will be described below); and provision for long reach (e.g., in side openings 270A1, 270A6, 270B1, 270B6 and end Pivotal rigidity for high-precision substrate positioning of openings 260A, 260B). [0035] In one aspect, the substrate transport arm 250 has a three-link-three-joint SCARA (Selected Compliance Articulated Robot Arm) type. For example, the substrate transport arm 250 includes a first arm link or upper arm 250UA, a second arm link or forearm 250FA, and at least a third arm link or at least one end effector 250E, 250E1, 250E2, in which at least one end The actuators 250E, 250E1, 250E2 include at least one substrate holder 250EH (the motion control of which implements the complete transport movement of the substrate holder 250EH within the entire range of motion of the substrate transport arm 250). In one aspect with reference to Figure 2A, the substrate transport arm 250 includes a single end effector 250E having a single substrate holder 250EH. In one aspect with reference to FIG. 5 , the substrate transport arm 250A includes a single end effector 250E1 with more than one substrate holder 250EH. In the aspect referred to in FIG. 5 , the end effector 250E1 is provided with two substrate holders 250EH, but in other aspects any suitable number of substrate holders may be provided such that they are provided in a side-by-side configuration. The substrates can be picked and placed substantially simultaneously from the side-by-side substrate holding stations PMH1, PMH2. For example, the substrate holder 250EH of the end effector 250E1 is configured such that the end effector 250E1 uses a common end effector motion to substantially simultaneously extend or retract the more than one substrate holder 250EH therethrough. Linearly arranged side substrate transport openings 270A1-270A6, 270B1-270B6 (or linearly arranged openings 260A, 260B on one or more of the end walls 210E1, 210E2). In one aspect, the substrate transport arm 250B includes a plurality of end effectors, such as end effectors 250E, 250E2, wherein the end effectors 250E, 250E2 are attached to a common forearm link of the substrate transport arm 250B. 250FA, such that the end effectors 250E, 250E2 pivot about a common axis of rotation (e.g., wrist axis WX) relative to the forearm 250FA, and the two end effectors 250E, 250E2 are each end and side substrate transport Openings 260A, 260B, 270A1-270A2, and 270B1-270B2 are shared. When the substrate transport arm 250B includes more than one end effector 250E, 250E2, the end effectors 250E, 250E2 provide the substrate transport arm 250B with one for each end and side substrate transport opening 260A, 260B, Quick exchange end effector shared by 270A1-270A2 and 270B1-270B2. In one aspect, each end effector 250E, 250E2 is rotationally driven independently by the respective degrees of freedom of the drive sections 300A, 300B, 300C, 300D, while in other aspects, the end effector 250E, 250E2 is A manner substantially similar to that described in U.S. Patent No. 9,401,294, issued July 26, 2016 (the contents of which are hereby incorporated by reference) (for example, one of the end effectors 250E, 250E2 is any Suitable reverse gear drives) are differentially driven by a common degree of freedom of the drive sections 300A, 300B, 300C, 300D. Referring to Figure 4, in one aspect, the end effectors 250E, 250E1, 250E2 and each of the upper arm 250UA and the forearm 250FA may be driven by any suitable drive section 300A, 300B of any suitable actuator, 300C, 300D (which is described below, drive section 300A is illustrated in Figure 4 as an example) drives. For example, in one aspect, the substrate transport arms 250, 250A, 250B include the same information as US Patent Publication No. 2015/0128749, published on May 14, 2015, and US Patent No. 5,682,795, issued on November 4, 1997. No. 5,778,730, granted on July 14, 1998; U.S. Patent No. 5,794,487, granted on August 18, 1998; U.S. Patent No. 5,908,281, granted on June 1, 1999; and U.S. Patent No. 5,908,281, granted on August 6, 2002 The split band transmission in US Patent No. 6,428,266 granted in Japan is substantially similar to the split band transmission. For example, referring to the drive actuator 400 for the forearm 250FA (it should be understood that the drive actuator for the end effector is substantially similar), a shoulder pulley 410 may be mounted to the drive actuator 300A around the drive actuator 300A. The shoulder axis SX rotates so that the drive shaft of the drive section 300A drives rotation of the shoulder pulley 410 . An elbow pulley 411 is rotatably installed on the elbow axis EX, so that the elbow pulley 411 and the forearm 250FA rotate together around the elbow axis EX as a unit. Drive belts 400A, 400B of any suitable height are partially wrapped around pulleys 410, 411 in opposite directions such that both drive belts 400A, 400B are under tension during operation of the substrate transport arm 250, with The joints EX, WX provide rigidity for at least 250 of the substrate transport arm. Referring again to FIGS. 2A and 2E, in one aspect, the upper arm 250UA has a first length AL1 from the joint center SX to the joint center EX; the forearm 250FA has a first length AL1 from the joint center EX to the joint center WX. two lengths AL2; and the end effector 250E has a third length AL3 from the joint center WX to the substrate holding reference datum DD of the substrate holder 250EH. In one aspect, one or more of the first length AL1, the second length AL2, and the third length AL3 are connected to the other one or more of the first length AL1, the second length AL2, and the third length AL3. are different (that is, the transport arm 250 has arm links with unequal lengths). In one aspect, length AL2 is longer than lengths AL1 and AL3. The first end 250UAE1 of the upper arm 250UA is rotatably coupled at the pivot joint SX, for example to any suitable drive section, such as the drive sections 300A, 300B, 300C, 300D described herein (see 3A-3D) to provide the substrate transport arm 250 with at least two degrees of freedom. As seen in Figures 3A, 3B, 3C and 3D, each drive shaft 380S, 380AS, 380BS, 388 of the drive sections 300A, 300B, 300C, 300D (the set of drive shafts forming a drive spindle) and The shoulder axes SX of the substrate transport arms 250, 250A, 250B coupled thereto are coaxial. In one aspect, the substrate transport arm 250 includes three degrees of freedom, while in other aspects, the substrate transport arm has four or more degrees of freedom. The first end of the forearm 250FA is rotatably coupled to the second end 250UAE2 of the upper arm 250UA at a pivot joint (eg, elbow joint) EX. The first end of the at least one end effector 250E is coupled to the second end of the forearm 250FA at the pivot joint (eg, wrist joint) WX, and the second end of the substrate handling arm 250 includes a Substrate holder 250E for substrate S. Here, the substrate transport arm 250 is articulated and used to transport the substrate S held by the at least one substrate holder 250EH through the end and side substrate transport openings 260A, 260B, 270A1-270A6, 270B1 -270B6 is transported in and out of the transport chamber 210, so that the substrate transport arm 250 is shared by the end and side substrate transport openings 260A, 260B, 270A1-270A6, 270B1-270B6. 3A, 3B, 3C, 3D, in one aspect, the transport device 245 includes at least one drive section 300A, 300B, 300C, 300D and at least one transport arm 250, 250A, The transport arm part of 250B. The at least one transport arm 250, 250A, 250B may be coupled to the drive shaft of the drive sections 300A-300D at any suitable connection CNX in any suitable manner such that the drive shaft rotates as described herein The movement of the at least one transport arm 250, 250A, 250B is carried out. In one embodiment, the at least one transport arm 250, 250A, 250B is interchangeable with a plurality of different interchangeable transport arms 250, 250A, 250B for interchangeability with the drive section at the connection point CNX, each of which can The interchangeable transport arms 250, 250A, 250B have different drop characteristics and a corresponding drop distance register associated with them, which describes the arm drop distance of the associated transport arms 250, 250A, 250B, This enables the drive section to use a compensating arm movement in the Z direction as described, for example, in US Patent Application No. 62 entitled "Method and Apparatus for Substrate Transport Apparatus Position Compensation" filed on January 26, 2017. No. 450,818, the disclosure of which is hereby incorporated herein by reference. [0040] The at least one drive section 300A, 300B, 300C, 300D is mounted to any suitable frame 200F of the processing device 200, such as to the frame 200F2 of the core module 200M2. In one aspect, the at least one drive section 300A, 300B, 300C may include a common drive section including a frame 300F that houses one of a Z-axis drive 370 and a rotational drive section 382 or Many. The interior 300FI of the frame 300F may be sealed in any suitable manner as will be described below. In one aspect, the Z-axis drive 370 may be any suitable drive configured to move the at least one transport arm 250, 250A, 250B along the Z-axis. In one aspect, the Z-axis driver can be a helical driver, but in other aspects, the driver can be any suitable linear driver, such as a linear actuator, a piezoelectric motor, etc. The rotary drive section 382 can be configured as any suitable drive section, such as, for example, a harmonic drive section. For example, the rotational drive section 382 may include any suitable number of coaxially configured harmonic drive motors 380 (as seen in FIG. 3A ), where the drive section 382 includes three coaxially configured harmonic drive motors 380 , 380A, 380B. In other aspects, the drivers of drive section 382 may be positioned side-by-side and/or coaxially. In one aspect, the rotary drive section 382 may include, for example, any suitable number of coordinated drive motors 380, 380A, 380B corresponding to any suitable number of drive shafts 380S, 380AS, 380BS in the coaxial drive system. The harmonic drive motor 380 may have a highly loaded output bearing such that components of a ferrofluidic seal 376, 377 may be at least partially protected by the harmonic drive motor 380 on the conveyor 245. Centered and supported with sufficient stability and sufficient clearance during the necessary rotational movements T and extension movements R. It should be noted that the ferrofluid seal 376, 377 may comprise several components forming a substantially concentric coaxial seal as will be described below. In this example, the rotational drive section 382 includes a housing 381 housing one or more drive motors 380 substantially similar to those described in U.S. Patent Nos. 6,845,250; 5,899,658; 5,813,823; and 5,720,590. The disclosures of these patents are hereby incorporated herein by reference. The ferrous fluid seals 376, 377 may be tolerated to seal each drive shaft 380S, 380AS, 380BS within the drive shaft assembly. In one aspect, ferrous fluid seals may not be provided. For example, the drive section 382 may include a drive having a stator that is substantially sealed from the environment in which the transport arm operates, while the rotor and drive shaft share the environment in which the transport arm operates. Suitable examples of drive sections that do not have ferrous fluid seals and that can be used in aspects of the disclosed embodiments include the MagnaTran ^Ò 7 and MagnaTran ^Ò 8 robot drive sections provided by Brooks Automation, Inc., which have A seal configuration will be described below. It should be noted that the drive shaft 380S, 380AS, 380BS may also have a hollow structure (e.g., a hole extending longitudinally along the center of the drive shaft) to allow electrical wires or any other suitable items to pass therethrough. A drive assembly, for example, for connecting to another drive section mounted to the drive 300A, 300B, 300C, as in U.S. Patent Application No. 15/110,130 filed on July 7, 2016 (it was filed in November 2016 Those described in US2016/0325440 published on the 10th (the disclosure of which is hereby incorporated herein by reference), any suitable position encoder, controller, and/or the at least one transport arm 250, 250A, 250B. It will be understood that each drive handle of the drives 300A, 300B, 300C may include any suitable encoder configured to detect the position of the individual motor to determine the position of each transport arm 250, 250A, 250B. The location of the end effectors 250E, 250E1, and 250E2. In one aspect, the housing 381 may be mounted to a cassette coupled to the Z-axis drive 370 such that the Z-axis drive 370 moves the cassette (and the cassette thereon) along the Z-axis. The housing 381). It will be understood that in order to seal the controlled atmosphere within which the at least one transport arm 250, 250A, 250B operates from the interior of the actuator 300A, 300B, 300C which is operated in an atmospheric pressure ATM environment Operation) isolation, the driver may include one or more of ferrous fluid seals 376, 377 and a telescoping hose seal. One end of the telescoping hose seal can be coupled to the cassette and the other end to any suitable portion of the frame 300FI such that the interior 300FI of the frame 300F is in contact with the controlled atmosphere (the at least one The transport arms 250, 250A, 250B operate within this atmosphere) isolation. [0042] In other aspects, a driver having a stator may be provided on the cassette, wherein the stators are sealed without a ferrous fluid seal for operation of the transport arms therein This air isolation, for example, is provided by Brooks Automation's MagnaTran ^Ò 7 and MagnaTran ^Ò 8 robot drive sections. For example, referring to Figures 3A, 3B, 3C, and 3D, the rotational drive section 382 is constructed such that the motor stators are sealed from the atmosphere in which the robotic arms operate, while the motor rotors are sealed Share the environment in which the robotic arms operate. [0043] FIG. 3B shows a coaxial drive having a first drive motor 380' and a second drive motor 380A'. The first drive motor 380' has a stator 380S' and a rotor 380R', wherein the rotor 380R' is coupled to a drive shaft 380S. A can seal 380CS may be disposed between the stator 380S' and the rotor 380R' and connected to the housing 381 in any suitable manner to seal the stator 380S' to the rotor 380R'. The environment in which the robot arm operates is isolated. Similarly, the motor 380A' includes a stator 380AS' and a rotor 380AR', wherein the rotor 380AR' is coupled to a drive shaft 380AS. A container seal 380ACS may be disposed between the stator 380AS' and the rotor 380AR'. The container seal 380ACS may be connected to the housing 381 in any suitable manner to seal the stator 380AS' from the environment in which the robotic arms operate. It will be appreciated that any suitable encoder/sensor 368A, 368B may be provided for determining the position of the drive shaft (and the arm operated by the drive shaft). [0044] Referring to Figure 3C, a three-axis rotational drive section 382 is shown. The three-axis rotary drive section may be substantially similar to the coaxial drive section described above with reference to Figure 3B, but in this aspect there are three motors 380', 380A', 380B', each having a coupling to Individual drive shafts 380A, 380AS, 380BS and rotors 380R', 380AR', 380BR'. Each motor also includes an individual stator 380S', 380AS', 380BS', which is isolated from the environment in which the robot arm operates by an individual container seal 380CS, 380ACS, 380BCS. It will be appreciated that any suitable encoder/sensor may be provided as described above with reference to Figure 3C for determining the position of the drive shaft (and the arm operated by the drive shaft). Referring also to Figure 3D, a drive 300D is shown having a multi-axis rotary drive section 382 substantially similar to the three-axis rotary drive section described above, having four drive shafts 380S, 380AS, 380BS, 388 and four individual motors 380', 380A', 380B', 388M, where motor 38M includes a stator 388S, a rotor 388R and a container seal 388SC, which are substantially similar to those described above. In one aspect, a four-degree-of-freedom drive 300D (not including the Z-axis drive) may be provided, such as when the substrate transfer arm (eg, substrate transfer arm 250B) is configured with quick-swap end effectors and each When an end effector is rotated independently of other end effectors. In one aspect, three degrees of freedom actuators 300C (excluding Z-axis actuators) may be provided, such as when the substrate transport arm (e.g., substrate transport arm 250B) is configured with a quick-swap end effector (which uses when coupled (different from the way described above). It will be appreciated that in one aspect the drive shaft of the motor shown in Figures 3B, 3C and 3D may not allow electrical wires to be fed through, while in other aspects any suitable seal may be provided such that The wires may, for example, pass through the hollow drive shaft of the motor shown in Figures 3B, 3C and 3D. In one aspect with reference to Figures 2A, 2G and 2H, in order to compensate for arm descent (e.g., in addition to or instead of compensating for the Z motion implemented by the descent register described above) Z motion) and/or in order to reduce any bending moment exerted on the at least one driving section 300A, 300B, 300C, 300D due to the weight of the substrate transport arm 250, the first end of the upper arm 250UA 250UAE1 includes a balance weight (ballast) member 247 (which is shown schematically in the drawing in a representative form for the purpose of illustration) with the pivot axis SX extending in a direction in which the substrate transport arm extends substantially opposite directions, and with a balance based on the substrate transport arm moment on the pivot axis SX (e.g., on the drive spindle), and/or a compact footprint based on mounting the substrate transport arm 250 Internal fit is determined by configuration and weight. In one aspect, the balance weight 247 is fixedly mounted to a frame of the substrate transport arm 250 (eg, the frame 250UAF of the upper arm 250UA) at a fixed position relative to the pivot axis SX, As shown in FIG. 2G; in other aspects, the balance weight 247 is movably mounted to the frame of the substrate transport arm 250 (eg, the frame 250UAF of the upper arm 250UA) to be disposed on At different locations on the frame toward or away from the pivot axis SX (eg, along the direction 296 of the longitudinal axis LAX of the upper arm 250UA). In other aspects, the balance weight 247 can be installed at any suitable position on the substrate transport device 245, such as a position independent of the transport arm links 250US, 250FA, 250E, 250E1, 250E2. For example, the balance weight 247 may be used in any suitable manner (e.g., by mounting the balance weight 247 to one or more of the drive shafts or by mounting the balance weight 247 to a Pivot 247PA (which is, for example, mounted to one of the drive shafts 380S, 380AS, 380BS, 388 of that drive section, as shown in Figure 2I) is fixedly or movably mounted to the drive section 300A, 300B , 300C, 300D frame or housing. In this example, like but independent of upper arm 250UA, pivot 247PA is illustrated as being mounted to drive shaft 280S, but as described above, the pivot 247PA is 247PA may be mounted to any of the drive shafts 380S, 380AS, 380BS, 388 of the drive sections 300A, 300B, 300C, 300D. [0046] In one aspect, the counterweight 247 is a movable weight , it can move in direction 296 away from and toward the pivot axis SX relative to the frame (eg, frame 250UAF of the upper arm 250UA), complementary to the expansion and contraction of the substrate transport arm 250. For example, when the substrate transport arm When 250 is extended, the balance weight 247 moves in direction 296 away from the pivot axis SX and when the substrate transport arm 250 is retracted, the balance weight 247 moves in direction 296 toward the pivot axis SX. In In one aspect, the balance weight 247 is operatively coupled to the substrate transport arm 250 and implements at least one drive of the drive section 300A, 300B, 300C, 300D of the articulation of the substrate transport arm 250. The shaft moves relative to the substrate handling arm frame (eg, frame 250UAF of upper arm 250UA) in any suitable manner. For example, the balance weight 247 may be mounted within the upper arm 250UA (or within the pivot 247PA) on any suitable slide 247SL that is actuated by the drive sections 300A, 300B, 300C, 300D in any suitable manner (e.g., via a belt and pulley drive or any other suitable drive actuator). In one aspect, at least one drive shaft of the drive sections 300A, 300B, 300C, 300D implements movement of the balance weight 247 away from and toward the pivot axis in direction 296 and implements movement of the substrate transport arm 250 Expand and retract, so that the at least one drive shaft is a common drive shaft for the movement of the balance weight 246 and the extension and retraction of the substrate transport arm 250. For example, referring also to Figures 3A-3D, the outer drive shaft 380S can Coupled to the upper arm 250UA for rotating the upper arm 250UA about the shoulder axis SX. The intermediate drive shaft 380AS may be coupled to the forearm 250FA (e.g., via a belt and pulley arrangement described herein) for The forearm 250FA is rotated about the elbow axis EX. The inner drive shafts 380BS, 388 may be coupled to the end effectors 250E, 250E1, 250E2 (e.g., via the belt and pulley arrangement described herein) for moving the end effectors The actuators 250E, 250E1 and 250E2 rotate around the wrist axis WX. The intermediate drive shaft 380AS can also be used in any suitable manner (for example, through a belt including the shoulder pulley 410 and another pulley 412 disposed on the upper arm 250UA relative to the shoulder axis SX opposite the elbow pulley 411 Coupled to the balance weight 246 in a pulley configuration. Belts 400A', 400B' may be coupled to pulleys 410, 412, and balance weight 246 may be coupled to one of the belts 400A', 400B' in any suitable manner. Or, to move in direction 296 along any suitable linear slide 247SL. It will be appreciated that the pulley size ratio between pulley 410 and pulley 411 may be different from the pulley size ratio between pulley 410 and pulley 412, such that Movement of the counterweight 246 is calibrated to arm extension/retraction (e.g., the shoulder pulley 410 may include a first diameter to which the belts 400A, 400B are coupled and the belts 400A', 400B' are coupled to. a second diameter of the coupling, wherein the first and second diameters each correspond to one of the pulleys 411, 412). In other aspects, the balance weight 246 may be coupled to the upper arm 250UA, the forearm 250UA, and the end effector 250E , 250E1, 250E2 as well as any suitable drive shaft 380S, 380AS, 380BS, 388 coupled to the drive section 300A, 300B, 300C, 300D in any suitable manner such that the balance weight 246 moves between direction 296. [0047] Referring to Figure 2G, the balance weight member 247 has a balance weight portion 247A, 247B, 247C, which can be selected from a plurality of different interchangeable balance weight portions 247A, 247B, 247C. Selection. In one aspect, the selection of the interchangeable counterweight portions 247A, 247B, 247C depends on the aspect ratio of the length L to the width W of the substrate transport chamber 210. In other aspects, The selection of interchangeable counterweight portions 247A, 247B, 247C also depends on the type of end effector 250E, 250E1, 250E2 included in the substrate handling arm 250 (eg, single substrate holder end effector (e.g., end effectors 250E, 250E2) or side-by-side substrate holder end effectors (e.g., end effector 250E1)) or number. For example, for a transport chamber 210 constructed with six side openings (e.g., end effector 250E1) , the one shown in Figure 2A) and the selected balance weight portions 247A, 247B, 247C are selected relative to a transport chamber 210 constructed with four side openings (e.g., the one shown in Figure 9A) Balance weight sections 247A, 247B, 247C are heavy. Similarly, balance weight sections 247A, 247B are selected for a transport chamber 210 constructed with four side openings (such as that shown in Figure 9A). 247C is heavier than the counterweight portions 247A, 247B, 247C selected for a transport chamber 210 constructed with two side openings (eg, as shown in Figure 11). In one aspect, when the substrate transport chamber 210 has an aspect ratio of length L to width W of 1:1, there is no need to provide a counterweight (eg, the counterweight portion does not substantially add any balance). (counter weight to the substrate transport arm 250). It will be appreciated that the counterweight portions 247A, 247B, 247C may be configured as desired, such as based on the aspect ratio of the substrate transfer chamber 210 and/or the end effector included within the substrate transfer arm 250. and be added to or removed from the substrate conveying arm 250 . [0048] Referring now to FIGS. 2A, 2G, 2H, and 13A-17, exemplary operations of the substrate processing tool 200 will be described. In one aspect, the substrate transport chamber 210 is provided (block 1700 of FIG. 17 ) and the plurality of processing modules PM as described above along at least one of the sides 210S1 , 210S2 of the substrate transport chamber. The ones are arranged in a linear array (block 1710 of Figure 17). In one aspect, the processing modules PM and/or load lock chambers LL1, LL2 are also arranged in an array on the end walls 210E1, 210E2 of the substrate transport chamber 210. In one aspect, drive sections 300A, 300B, 300C, 300D are provided and connected to the substrate transport chamber 210 (block 1705 of Figure 17), wherein the drive sections include at least two degrees of freedom and the drive Each drive shaft 380S, 380AS, 380BS, 388 of a section 300A, 300B, 300C, 300D and the other drive shafts 380S, 380AS, 380BS, 388 of the drive section 300A, 300B, 300C, 300D revolve around a common axis (eg, shoulder axis SX) rotation. In one aspect, the substrate transport arm 250 is provided (block 1720 of Figure 17) and pivotally mounted within the substrate transport chamber 210 such that a pivot axis of the transport arm (eg, a shoulder The axis SX) is fixedly mounted relative to the substrate transport chamber as described above. As described above, in one aspect, the shoulder axis SX of the transport arm 250 is a common axis with the other drive shafts 380S, 380AS, 380BS, 388 of the drive sections 300A, 300B, 300C, 300D. In one aspect, the substrate transport arm 250 is articulated to transport the substrate held by the at least one substrate holder 250EH of the end effectors 250E, 250E1, 250E2 through the end and side substrates. Transport openings 260A, 260B, 270A1-270A6, 270B1-270B6 are transported in and out of the substrate transport indicator 210 such that end effectors 250E, 250E1, 250E2 are end and side substrate transport openings 260A, 260B, 270A1-270A6, 270B1-270B6 shared by everyone. In one aspect, when the balance weight 247 is active, articulation of the arm includes relying on extension of the substrate handling arm 250 to move the balance weight 247 in the direction 296 . In one aspect, as described above, the axes of substrate holder motion 270A1X-270A6X, 270B1X-270B6X passing through the side substrate transport openings 270A1-270A6, 270B1-270B6 are substantially orthogonal to The other axis 260A, 260BX of the substrate holder movement of the end substrate transport opening 260A, 260B of the at least one end wall 250E1, 250E2. As also mentioned above, some axes of motion (eg, 270A1X, 270A6X, 270B1X, 270B6X) are adjacent to the end walls 210E1, 210E2 of the substrate transport chamber. The joints of the substrate transport arm 250 driven by the driven sections 300A, 300B, 300C, 300D provide mobility to the substrate transport arm 250 to move the end effectors 250E, 250E1, 250E2 around the axis of motion. The substantially orthogonal corner rotations defined by 260AX, 260BX and the axes of motion 270A1X, 270A6X, 270B1X, 270B6X. 13A, 13B, an exemplary mobility of the end effector 250E, 250E1, 250E2 is shown when the substrate transport arm 250 is extended and retracted into each end opening 260A, 260B. Here, in the retracted configuration of the substrate transport arm 250, the shoulder axis SX is fixedly mounted relative to the substrate transport chamber 210 and allows the drive shaft driving the transport arm and the shoulder With axis SX disposed coaxially, the end effector is provided with a range of rotational motion 1300 of greater than 270 degrees but less than 360 degrees relative to the wrist axis WX of the substrate handling arm 250 (see Figure 13B). When the substrate transport arm 250 is extended such that the end effector 250E extends through the end opening 260B, the end effector 250E (and end effector 250E2) maintains an angle of greater than 270 degrees but less than 360 degrees relative to the wrist axis. Range of rotational motion of WX 1300 (see Figure 13C). Similarly, when the substrate transport arm 250 is extended such that the end effector 250E extends through the end opening 260A, the end effector 250E (and end effector 250E2) maintains the relative angle of greater than 270 degrees but less than 360 degrees. The range of rotational motion 1300 in the wrist axis WX (see Figure 13D). It will be appreciated that the full range of motion of the substrate transport arm 250 can be used without limitation with the independent joints including the end effectors 250E, 250E1, 250E2, throughout the reach and position of the arm motion. A bifurcated belt drive 400 is implemented for rapid exchange, as opposed to conventional substrate handling systems (eg, conventional substrate handling system 100 shown in FIG. 1 ), which have a conventional linear The elongated substrate transport chamber and the use of long arm links result in reduced mobility of the end effector with the belt drive and because the length of the transport chamber 114 is increased to accommodate the movement of the transport chamber 114 on each side of the transport chamber 114 to accommodate more than three processing modules (each processing module has a single substrate holding station), additional arm links are added to its substrate transport arm 150. These additional links are required for the substrate transport The increased weight of the arm increases the torque acting on the drive system of the substrate transport arm. The increased weight of the substrate transport arm 150 and the misalignment between the joints that couple the arm links together combine to cause increased drop or sag of the substrate transport arm 150 , which can cause the substrate transport arm 150 to Reduction in substrate placement and/or picking accuracy. Although end openings 260A, 260B are illustrated on end wall 210E1 of substrate transport chamber 210, it should be understood that end effectors 250E, 250E1, 250E2 extend into end openings 260A on end wall 210E2, 260B (shown in Figure 7) is substantially similar. Referring to Figures 14A-14C, when the substrate transport arm 250 is extended into each side opening 270A3, 270A4, 270B3, 270B4 of the core processing module 200M2 (or 1 to 1 length in Figures 11 and 12 An exemplary mobility of the end effectors 250E, 250E1, 250E2 is shown with wider end openings 260A, 260B of the transport chamber 210. Here, when the substrate transport arm 250 is extended such that the end effector 250E extends through the side opening 270B3 or 270B4, the end effector 250E (as well as the end effector 250E2) remains greater than 270 degrees but less than 360 degrees relative to The wrist axis WX has a rotational motion range 1300 (see Figure 14B). Similarly, when the substrate transport arm 250 is extended such that the end effector 250E extends through the side opening 270A3 or 270A4, the end effector 250E (as well as the end effector 250E2) remains greater than 270 degrees but less than 360 degrees relative to The wrist axis WX has a rotational motion range of 1300 (see Figure 14C). Although side openings 270A3, 270B3 are illustrated in Figures 14B and 14C, it should be understood that the end effectors 250E, 250E1, 250E2 extending into side openings 270A4, 270B4 are substantially similar. Referring to Figures 15A-15C, when the substrate transport arm 250 is extended into the side openings 270A2, 270A5, 270B2, 270B5 (or as shown in Figures 9A and 9B, the aspect ratio of the length L to the width W is 2:1 An exemplary mobility of the end effectors 250E, 250E1, 250E2 is shown when each of the side openings 270A2, 270A5, 270B2, 270B5) of the end walls 210E1, 210E2 of the transport chamber 210 is adjacent. Here, when the substrate transport arm 250 is extended such that the end effector 250E extends through the side opening 270B2, the end effector 250E (and the end effector 250E2) remains greater than 270 degrees but less than 360 degrees relative to the arm. Range of rotational movement of axis WX 1300 (see Figure 15B). Similarly, when the substrate transport arm 250 is extended such that the end effector 250E extends through the side opening 270A2, the end effector 250E (and therefore the end effector 250E2) remains greater than 270 degrees but less than 360 degrees relative to the arm. Range of rotational movement of axis WX 1300 (see Figure 15C). Although side openings 270A2, 270B2 are illustrated in Figures 15B and 15C, it should be understood that the end effectors 250E, 250E1, 250E2 extending into side openings 270A5, 270B5 are substantially similar. 16A-16C, when the substrate transport arm 250 is extended into the side opening 270A1 adjacent to the end wall 210E1, 210E2 of the transport chamber 210 with an aspect ratio of length L to width W of 3:1 , 270A6, 270B1, 270B6, each, an exemplary mobility of the end effector 250E, 250E1, 250E2 is shown. Here, when the substrate transport arm 250 is extended such that the end effector 250E extends through the side opening 270B1, the end effector 250E (as well as the end effector 250E2) remains greater than 270 degrees but less than 360 degrees relative to the arm. Range of rotational movement of axis WX 1300 (see Figure 16B). Similarly, when the substrate transport arm 250 is extended such that the end effector 250E extends through the side opening 270A1, the end effector 250E (as well as the end effector 250E2) remains greater than 270 degrees but less than 360 degrees relative to the arm. Range of rotational movement of axis WX 1300 (see Figure 16C). Although side openings 270A1, 270B1 are illustrated in Figures 16B and 16C, it should be understood that the end effectors 250E, 250E1, 250E2 extending into side openings 270A6, 270B6 are substantially similar. Although FIGS. 13A-16C have been described with reference to the substrate transport arm 250 including one or more end effectors 250E, 250E2, it should be understood that the plurality of substrate holders 250EH of the end effector 250E2 The range of motion 1300 is substantially similar to that described above. It will also be appreciated that aspects of the disclosed embodiments provide substantially unrestricted mobility of the substrate handling arm 250, including a range of motion 1300 of the end effectors 250E, 250E1, 250E2, which provides the The ability of the substrate transfer arm to reach the vicinity of substantially orthogonal corners defined by substantially orthogonal axes of motion 270A1X-270A6X, 270B1X-270B6X and 260AX, 260BX, regardless of whether such axes of motion are adjacent to the substrate transfer chamber 210 The end walls 210E1, 210E2. In one aspect, the range of motion 1300 of the end effectors 250E, 250E1, 250E2 is immobile or fixed relative to the substrate transport chamber 210 at the shoulder axis SX, the drive sections 300A, The drive spindle of 300B, 300C, 300D and the shoulder axis SX and/or the drive belt drive that drives the rotation of the substrate transport arm 250 linkage (e.g., forearm 250FA and end effector 250E, 250E1, 250E2) is provided Belt drive 400 (FIG. 4) is provided coaxially, where the drive belt drive provides tensioning tension on both sides of pulleys 410, 411 regardless of the direction of pulley rotation (e.g., this improves substrate handling Arm 250 stiffness). In one aspect, the end effectors 250E, 250E1, and 250E2 are rotated to compensate for the rotation of the upper arm 250UA and the forearm 250FA drive shafts (eg, the drive shafts 280A, 280AS) to implement the extension of the substrate transport arm 250 (While maintaining the end effectors 250E, 250E1, 250E2 in a predetermined direction (for example, along the respective axes of motion 270A1X-270A6X, 270B1X-270B6X, 260AX, 260BX), the end effectors 250E, 250E1, 250E2 The range of motion 1300 may be used to extend the end effector 250E, 250E1, 250E2 along the respective axes of motion 270A1X-270A6X, 270B1X-270B6X, 260AX, 260BX through the openings 270A1-270A6, 270B1-270B6, 260A, 260B range of motion (e.g., adjacent one of the end walls 210E1, 210E2 or anywhere between the end walls 210E1, 210E2). [0056] According to one or more aspects of the disclosed embodiments, a substrate processing apparatus includes: A linearly elongated substantially hexahedral-shaped substrate transport chamber having linearly elongated side surfaces of the hexahedron and at least one portion of the hexahedron that is substantially orthogonal to the linearly elongated side surfaces. An end wall; the at least one end wall has an end substrate transport opening, at least one of the linear elongated sides has a linear array of side substrate transport openings, each of the end and side substrate transport openings arranged to allow a substrate to be transported in and out of the substrate transport chamber; [0058] a plurality of processing modules linearly disposed along at least one of the linear elongated sides and through corresponding The side substrate transport openings are respectively communicated with the substrate transport chamber; and [0059] a substrate transport arm, which is pivotably installed in the substrate transport chamber, so that the pivot axis of the substrate transport arm is opposite to each other. Fixedly installed in the substrate transport chamber, the substrate transport arm has a three-link-three-joint SCARA type, one of which is an end effector with at least one substrate holder, which is Articulate for transporting the substrate held by the at least one substrate holder in and out of the substrate transport chamber through the end and side substrate transport openings, such that the end effector is the end and the side substrate transport openings; [0060] wherein the hexahedron has an aspect ratio of side length to width, which is a large aspect ratio, and the width is relative to the substrate The footprint of the transport arm is compact. [0061] According to one or more aspects of the disclosed embodiments, the aspect ratio is greater than 2:1, and for a predetermined maximum of the substrate transport arm The footprint of the substrate handling arm is compact in terms of reach. According to one or more aspects of the disclosed embodiments, the aspect ratio is about 3:1, and for a predetermined maximum reach of the substrate carrying arm, the length of the substrate carrying arm is The coverage area is compact. According to one or more aspects of the disclosed embodiments, the end wall is configured to accept two side-by-side edges placed substantially adjacent to each other at a common height and commonly facing the end wall. size of the load lock chamber or other processing module. [0064] According to one or more aspects of the disclosed embodiments, the SCARA arm has three degrees of freedom and links of different lengths, and the pivot axis defines a shoulder joint of the SCARA arm. According to one or more aspects of the disclosed embodiments, the linear array of processing modules provides at least six processing module substrate holding stations distributed along the at least one linear elongated side. are of substantially the same height, and each of the substrate holding stations is accessed via a corresponding side transport opening with the common end effector of the substrate transport arm. [0066] According to one or more aspects of the disclosed embodiments, it includes at least one load lock chamber or other processing module that communicates with the substrate transport chamber through the end substrate transport opening. According to one or more aspects of the disclosed embodiments, the other of the linear elongated sides opposite the at least one linear elongated side of the substrate transport chamber has at least one other a side substrate transport opening, and the substrate transport arm is configured to transport the substrate held by the at least one substrate holder through the end substrate transport opening, the side substrate transport opening, and the other side The substrate transport opening transports in and out of the substrate transport chamber such that the end effectors are respectively disposed on the end wall, the linear elongated side and the opposite linear elongated side of the substrate transport chamber Each of the first substrate transport opening, the side substrate transport opening, and the other side substrate transport opening is shared. According to one or more aspects of the disclosed embodiments, the opposite linear elongated side of the substrate transport chamber has more than one substrate transport opening on the other side along the Opposite sides are arranged in a linear array, and wherein the end effector is common to each of the opposite side substrate transport openings. According to one or more aspects of the disclosed embodiments, which include a drive section connected to the substrate transport chamber and having a drive spindle, the drive spindle includes a coaxial drive shaft, It is operably coupled to the substrate transport arm and defines at least two degrees of freedom, implements articulation of the substrate transport arm, and the drive spindle is arranged such that its axis of rotation and the pivot axis substantial overlap. [0070] According to one or more aspects of the disclosed embodiments, the substrate transport arm has a balance weight disposed on the substrate transport arm to extend from the pivot axis to a In a direction substantially opposite to the direction in which the substrate transport arm extends, and having a shape and weight defined by the balance of the substrate transport arm downward moments on the drive spindle. According to one or more aspects of the disclosed embodiments, the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, and the counterweight The shape and weight of the piece are further defined by the compact footprint that can fit within the substrate handling arm. According to one or more aspects of the disclosed embodiments, the at least one substrate holder of the end effector includes more than one substrate holder, which is disposed on the end effector and Arranged such that the end effector substantially simultaneously extends or retracts the more than one substrate holder through more than one of the side substrate transport openings arranged in a linear array with a common end effector motion. According to one or more aspects of the disclosed embodiments, the end effector is a first end effector, and the substrate transport arm has a second end effector, which is connected to the first end effector. A common forearm is attached to the substrate transport arm such that the first and second end effectors pivot relative to the forearm about a common axis of rotation, wherein the second end effector is the end effector Common to each of the substrate transport opening and the side substrate transport opening. According to one or more aspects of the disclosed embodiments, the first and second end effectors provide common access points for each of the end substrate transport openings and side substrate transport openings. A quick-change end effector is provided with the substrate handling arm. [0075] According to one or more aspects of the disclosed embodiments, the linear elongated sides have a selectively variable length, wherein the sides of the substrate transport chamber can operate at different lengths. A selectively changeable configuration of the substrate transport chamber is selected and defined. [0076] According to one or more aspects of the disclosed embodiments, the selectively changeable shape of the substrate transport chamber can vary in the aspect ratio of the side length to width from a large aspect ratio Choose between versions that vary to an aspect ratio of 1:1, and wherein the substrate transfer arm is common to each selectable version of the substrate transfer chamber. According to one or more aspects of the disclosed embodiments, the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm and has a counterbalanced A heavy piece is provided on the substrate transport arm to extend from the pivot axis in a direction substantially opposite to the extension direction of the substrate transport arm, and has a substrate based on the drive shaft The balance of the transfer arm lowering moment and the shape and weight defined by the compact footprint that can fit within the substrate transfer arm. [0078] According to one or more aspects of the disclosed embodiments, the counterweight is fixedly mounted to the frame of the substrate transport arm at a fixed position relative to the pivot axis. [0079] According to one or more aspects of the disclosed embodiments, the counterweight is movably mounted to the frame of the substrate transport arm for being disposed on the frame toward and away from the pivot axis. different locations on. According to one or more aspects of the disclosed embodiments, the counterweight is movably mounted to a frame of the substrate transport arm for moving relative to the frame away from and toward the pivot axis , to supplement the extension and contraction of the substrate's transport arm. According to one or more aspects of the disclosed embodiments, the counterweight is moved relative to the substrate transport arm frame by at least one drive shaft of a drive section that is operatively Coupled to the substrate transport arm and performing articulation of the substrate transport arm. According to one or more aspects of the disclosed embodiment, the at least one drive shaft implements the movement of the counterweight away from and toward the pivot axis and implements the extension and contraction of the substrate transport arm, so that the At least one drive shaft is a common drive shaft for movement of the counterweight and extension and retraction of the substrate transport arm. [0083] According to one or more aspects of the disclosed embodiments, the counterweight has a counterweight portion that is selectable from a number of different interchangeable counterweight portions and the selection is based on the basis. The aspect ratio of the material transport room. [0084] According to one or more aspects of the disclosed embodiments, the substrate transport arm includes a bifurcated belt drive system that implements joint motion of the substrate transport arm. [0085] According to one or more aspects of the disclosed embodiments, the substrate transport arm is a three-degree-of-freedom transport arm. [0086] According to one or more aspects of the disclosed embodiments, a substrate transport apparatus includes: [0087] A linear elongated substantially hexahedral-shaped substrate transport chamber having the hexahedral linearly elongated sides and at least one end wall of the hexahedron having an end substrate transport opening, at least one of the linearly elongated sides of the hexahedron having a linear array of side substrate transport openings, Each of the end and side substrate transport openings is arranged to allow a substrate to be transported in and out of the substrate transport chamber; [0088] a drive connected to the substrate transport chamber and having a drive spindle a section including a coaxial drive shaft defining at least two degrees of freedom of rotation about a common axis; and [0089] a substrate transport arm pivotably mounted within the substrate transport chamber, Such that the pivot axis of the substrate transport arm is fixedly mounted relative to the substrate transport chamber substantially coincident with the common axis of the drive spindle, the substrate transport arm having a three-link-three-joint SCARA A form in which one of the links is an end effector with a substrate holder operably coupled to the drive spindle such that the substrate handling arm is articulated with the isoaxial The at least two degrees of freedom implemented by the drive shaft for transporting the substrate on the substrate holder into and out of the substrate transport chamber through the end and side substrate transport openings; [0090] wherein the substrate The substrate transport arm has a counterweight disposed on the substrate transport arm to extend from the common axis of the drive spindle in a direction substantially opposite to the direction in which the substrate transport arm extends, and Having a form and weight defined by the balance of the lowering moments of the substrate transport arm on the drive spindle. According to one or more aspects of the disclosed embodiments, one of the linear array of lateral substrate transport openings is disposed opposite the at least one end wall of the hexahedral-shaped substrate transport chamber The side substrate transport opening adjacent the other end is oriented such that an axis corresponding to the movement of the substrate holder through the side substrate transport opening adjacent the opposite end is aligned with the end substrate through the at least one end wall. The other axis of motion of the substrate holder of the material transport opening is substantially orthogonal. [0092] According to one or more aspects of the disclosed embodiments, the substrate transport arm is jointly connected to transport the substrate on the substrate holder through the end and side substrates. The substrate transport openings transport in and out of the substrate transport chamber such that the end effector is common to each of the end substrate transport openings and side substrate transport openings. According to one or more aspects of the disclosed embodiments, each of the side substrate transport openings has a corresponding axis of movement of the substrate holder through each side substrate transport opening, Each axis of substrate motion of the linear array of lateral substrate transport openings extends substantially parallel to each other through each substrate transport opening, respectively. According to one or more aspects of the disclosed embodiments, the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, and the hexahedron There is a side length to width aspect ratio that is a large aspect ratio and the width is compact relative to the footprint of the substrate handling arm. [0095] According to one or more aspects of the disclosed embodiments, the at least one end wall of the hexahedron is substantially orthogonal to the rectilinear elongated side surfaces of the hexahedron. [0096] According to one or more aspects of the disclosed embodiments, the substrate transport arm includes a bifurcated belt drive system that implements joint motion of the substrate transport arm. [0097] According to one or more aspects of the disclosed embodiments, the isoaxial drive shaft provides the substrate transport arm with three degrees of freedom. [0098] In accordance with one or more aspects of the disclosed embodiments, a method includes: [0099] Providing a linear elongated substantially hexahedral-shaped substrate transfer chamber having the hexahedral linear shape elongated side surfaces and at least one end wall of the hexahedron that is substantially orthogonal to the linear elongated side surfaces; the at least one end wall has an end substrate transport opening, and at least one of the linear elongated side surfaces has a linear array of side substrate transport openings, each of the end and side substrate transport openings being arranged to allow a substrate to be transported therethrough into and out of the substrate transport chamber; [0100] providing a plurality of processing modes A group, which is linearly arranged along at least one of the linear elongated sides and is respectively connected to the substrate transport chamber through the corresponding side substrate transport opening; [0101] Provide a substrate transport arm, It is pivotably mounted in the substrate transport chamber such that the pivot axis of the substrate transport arm is fixedly mounted relative to the substrate transport chamber, the substrate transport arm having a three-link-three-joint SCARA type state, one of the connecting rods is an end effector with at least one substrate holder; and [0102] the substrate transport arm is articulated to transport the substrate held by the at least one substrate holder via The end and side substrate transport openings transport in and out of the substrate transport chamber such that the end effector is common to each of the end and side substrate transport openings; [0103] wherein the hexahedron There is a side length to width aspect ratio that is a large aspect ratio and the width is compact relative to the footprint of the substrate handling arm. According to one or more aspects of the disclosed embodiments, the aspect ratio is greater than 2:1, and for a predetermined maximum reach of the substrate transport arm, the substrate The delivery arm's footprint is compact. According to one or more aspects of the disclosed embodiments, the aspect ratio is about 3:1, and for a predetermined maximum reach of the substrate carrying arm, the length of the substrate carrying arm is The coverage area is compact. [0106] According to one or more aspects of the disclosed embodiments, the end wall is configured to accept two side-by-side edges placed substantially adjacent to each other at a common height and commonly facing the end wall. size of the load lock chamber or other processing module. [0107] According to one or more aspects of the disclosed embodiments, it further includes links that provide the SCARA arm with three degrees of freedom and different lengths, and the pivot axis defines a shoulder joint of the SCARA arm. According to one or more aspects of the disclosed embodiments, the linear array of processing modules provides at least six processing module substrate holding stations distributed along the at least one linear elongated side. The method further includes accessing each of the substrate holding stations with the common end effector of the substrate transport arm via a corresponding side transport opening. [0109] According to one or more aspects of the disclosed embodiments, at least one load lock chamber or other processing module communicates with the substrate transfer chamber through the end substrate transfer opening. According to one or more aspects of the disclosed embodiments, the other of the linear elongated sides opposite the at least one linear elongated side of the substrate transport chamber has at least one other a side substrate transport opening, and the method further includes using the substrate transport arm to pass the substrate held by the at least one substrate holder through the end substrate transport opening, the side substrate transport opening, and the other A side substrate transport opening transports in and out of the substrate transport chamber, so that the end effectors are respectively disposed on the end wall, the linear elongated side and the opposite linear elongated side of the substrate transport chamber The end substrate transport opening, the side substrate transport opening, and the other side substrate transport opening are common to each of the end substrate transport openings. According to one or more aspects of the disclosed embodiments, the opposite linear elongated side of the substrate transport chamber has more than one substrate transport opening on the other side along the Opposite sides are arranged in a linear array, and wherein the end effector is common to each of the opposite side substrate transport openings. According to one or more aspects of the disclosed embodiments, a drive section is connected to the substrate transport chamber and has a drive spindle that includes a coaxial drive shaft that is operably coupled to the substrate transport arm and defining at least two degrees of freedom, the method further comprising articulating the substrate transport arm with the drive section, wherein the drive spindle is configured such that rotation thereof The axis substantially coincides with the pivot axis. [0113] According to one or more aspects of the disclosed embodiments, it further includes providing the substrate transport arm with a balance weight disposed on the substrate transport arm for moving from the pivot axis. Extending in a direction substantially opposite to the direction in which the substrate transport arm extends, and having a shape and weight defined by the balance of the substrate transport arm downward moments on the drive spindle. According to one or more aspects of the disclosed embodiments, the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, and the counterweight The shape and weight of the piece are further defined by the compact footprint that can fit within the substrate handling arm. According to one or more aspects of the disclosed embodiments, the at least one substrate holder of the end effector includes more than one substrate holder, which is disposed on the end effector, The method further includes extending or retracting the end effector such that the more than one substrate holder substantially simultaneously extends or retracts in a common end effector motion across the more than one linear array. Side substrate transport openings. According to one or more aspects of the disclosed embodiments, the end effector is a first end effector, and the substrate transport arm has a second end effector, which is connected to the first end effector. Attached to a common forearm of the substrate handling arm, the method further includes pivoting the first and second end effectors relative to the forearm about a common axis of rotation, wherein the second end effector is Common to each of the end substrate transport openings and the side substrate transport openings. According to one or more aspects of the disclosed embodiments, the first and second end effectors provide common access points for each of the end substrate transport openings and side substrate transport openings. A quick-change end effector is provided with the substrate handling arm. According to one or more aspects of the disclosed embodiments, the linear elongated sides have a selectively variable length, wherein the method further includes selecting the base from sides having different lengths. The side surfaces of the substrate transport chamber are used to define a selectively changeable shape of the substrate transport chamber. [0119] According to one or more aspects of the disclosed embodiments, the selectively changeable shape of the substrate transport chamber can vary in the aspect ratio of the side length to width from a large aspect ratio Choose between versions that vary to an aspect ratio of 1:1, and wherein the substrate transfer arm is common to each selectable version of the substrate transfer chamber. According to one or more aspects of the disclosed embodiments, the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, the method further comprising providing The substrate transport arm has a balance weight disposed on the substrate transport arm to extend from the common axis of the pivot axis in a direction substantially opposite to the extension direction of the substrate transport arm, and There is a balance based on the substrate transport arm lowering moment on the pivot axis and a shape and weight defined by the compact footprint that can fit within the substrate transport arm. [0121] According to one or more aspects of the disclosed embodiments, the counterweight is fixedly mounted to the frame of the substrate transport arm at a fixed position relative to the pivot axis. [0122] According to one or more aspects of the disclosed embodiment, it further includes moving the counterweight relative to the frame of the substrate transport arm such that the counterweight is disposed on the frame in an orientation and different positions away from the pivot axis. [0123] According to one or more aspects of the disclosed embodiments, it further includes moving the counterweight relative to the frame of the substrate transport arm such that the counterweight moves away from and toward the frame relative to the frame. The pivot axis moves to supplement the extension and contraction of the substrate transport arm. According to one or more aspects of the disclosed embodiments, the counterweight is moved relative to the substrate transport arm frame by at least one drive shaft of a drive section that is operatively Coupled to the substrate transport arm and performing articulation of the substrate transport arm. [0125] According to one or more aspects of the disclosed embodiments, the at least one drive shaft implements the movement of the counterweight away from and toward the pivot axis and implements the extension and contraction of the substrate transport arm, so that the At least one drive shaft is a common drive shaft for movement of the counterweight and extension and retraction of the substrate transport arm. [0126] According to one or more aspects of the disclosed embodiments, the method further includes selecting a weight portion of the weight piece from a plurality of different interchangeable weight portions and the selection is based on the This aspect ratio of the substrate transport chamber. [0127] According to one or more aspects of the disclosed embodiments, it further includes using a bifurcated belt transmission system of the substrate carrying arm to implement the joint motion of the substrate carrying arm. [0128] According to one or more aspects of the disclosed embodiments, the substrate transport arm is a three-degree-of-freedom transport arm. [0129] In accordance with one or more aspects of the disclosed embodiments, a method includes: [0130] Providing a linear elongated substantially hexahedral-shaped substrate transfer chamber having the hexahedral linear shape The elongated sides and at least one end wall of the hexahedron have an end substrate transport opening, and at least one of the linear elongated sides of the hexahedron has a linear array of side substrate transport openings, the ends and each of the side substrate transport openings are arranged to allow a substrate to be transported in and out of the substrate transport chamber; [0131] providing a drive area connected to the substrate transport chamber and having a drive spindle a segment including a coaxial drive shaft defining at least two degrees of freedom for rotation about a common axis; [0132] providing a substrate transport arm pivotably mounted within the substrate transport chamber such that The substrate transport arm has a pivot axis fixedly mounted relative to the substrate transport chamber substantially coincident with the common axis of the drive spindle, the substrate transport arm having a three-link-three-joint SCARA type state, one of the links being an end effector with a substrate holder; and Two degrees of freedom for transporting the substrate on the substrate holder in and out of the substrate transport chamber through the end and side substrate transport openings; [0134] wherein the substrate transport arm has a counterbalance A weight disposed on the substrate transport arm to extend from a common axis of the drive spindle in a direction substantially opposite to the extension direction of the substrate transport arm and having a base on the drive spindle The shape and weight are defined by the balance of the downward moment of the transport arm on the substrate. According to one or more aspects of the disclosed embodiments, one of the linear array of lateral substrate transport openings is disposed opposite the at least one end wall of the hexahedral-shaped substrate transport chamber The side substrate transport opening adjacent the other end is oriented such that an axis corresponding to the movement of the substrate holder through the side substrate transport opening adjacent the opposite end is aligned with the end substrate through the at least one end wall. The other axis of motion of the substrate holder of the material transport opening is substantially orthogonal. [0136] According to one or more aspects of the disclosed embodiments, the substrate transport arm is jointly connected to transport the substrate on the substrate holder through the end and side substrates. The substrate transport openings transport in and out of the substrate transport chamber such that the end effector is common to each of the end substrate transport openings and side substrate transport openings. According to one or more aspects of the disclosed embodiments, each of the side substrate transport openings has a corresponding axis of movement of the substrate holder through each side substrate transport opening, Each axis of substrate motion of the linear array of lateral substrate transport openings extends substantially parallel to each other through each substrate transport opening, respectively. According to one or more aspects of the disclosed embodiments, the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, and the hexahedron There is a side length to width aspect ratio that is a large aspect ratio and the width is compact relative to the footprint of the substrate handling arm. [0139] According to one or more aspects of the disclosed embodiments, the at least one end wall of the hexahedron is substantially orthogonal to the rectilinear elongated side surfaces of the hexahedron. [0140] One or more aspects in accordance with the disclosed embodiments further include using a bifurcated belt drive system of the substrate carrying arm to implement articulation of the substrate carrying arm. [0141] According to one or more aspects of the disclosed embodiments, the substrate transport arm is a three-degree-of-freedom transport arm. [0142] It should be understood that the above description is merely an example of aspects of the disclosed embodiments. Various substitutions and modifications may be made by those skilled in the art without departing from the disclosed embodiments. Accordingly, these aspects of the disclosed embodiments are intended to cover all such alternatives, modifications, and variations that fall within the scope of the following claims. Furthermore, the fact that different features are recited in mutually different dependent claims or independent claims does not mean that a combination of these features cannot be used to advantage, such combinations remaining within the scope of aspects of the invention.

[0143] 100‧‧‧Conventional processing tool 110‧‧‧Load lock chamber 112‧‧‧Load lock chamber 114‧‧‧Transport chamber 120‧‧‧Processing module 122‧‧‧Processing module 124‧‧‧Processing module Group 126‧‧‧Handling module 128‧‧‧Handling module 130‧‧‧Handling module 150‧‧‧Substrate transport arm 152‧‧‧Upper arm link 154‧‧‧Forearm link 156‧‧‧End action Device 158‧‧‧End effector 100'‧‧‧Conventional processing tool 200‧‧‧Substrate processing tool 210‧‧‧Transport chamber L‧‧‧Length W‧‧‧Width 201‧‧‧Front end 202‧‧‧Rear Terminal 299‧‧‧Controller 290‧‧‧Equipment front-end module 292A‧‧‧Loading port 292B‧‧‧Loading port 292C‧‧‧Loading port LL1‧‧‧Load lock chamber LL2‧‧‧Load lock chamber 291‧‧ ‧Transport chamber C‧‧‧Substrate box/carrier S‧‧‧Substrate 210S1‧‧‧Linear slender side 210S2‧‧‧Linear slender side 210E1‧‧‧End wall 210E2‧‧‧End wall 250‧‧‧Substrate transport arm FP‧‧‧Covered area 270A1‧‧‧Side substrate transport opening 270A2‧‧‧Side substrate transport opening 270A3‧‧‧Side substrate transport opening 270A4‧‧‧Side substrate transport opening 270A5‧‧‧Side substrate transport opening 270A6‧‧‧Side substrate transport opening 270B1‧‧‧Side substrate transport opening 270B2‧‧‧Side substrate transport opening 270B3‧‧‧Side substrate transport opening 270B4‧‧‧Side Substrate transport opening 270B5‧‧‧Side substrate transport opening 270B6‧‧‧Side substrate transport opening 260A'‧‧‧Opening 260B'‧‧‧Opening 270A1X‧‧‧Axis 270A2X‧‧‧Axis 270A3X‧‧‧ Axis 270A4X ‧‧‧Axis 270A5X‧‧‧Axis 270A6X‧‧‧Axis 270B1X‧‧‧Axis 270B2X‧‧‧Axis 270B3X‧‧‧Axis 270B4X ‧‧‧Axis 270B6X‧‧‧Axis 260AX‧‧‧Axis 260BX ‧‧‧Axis PM‧‧‧Processing module TP1‧‧‧Substrate transport plane TP2‧‧‧Substrate transport plane 270A‧‧‧Opening 270B‧‧‧Opening TPM‧‧‧Series-connected processing module PMH1‧‧ ‧Substrate holding station PMH2‧‧‧Substrate holding station SPM‧‧‧Single processing module 250A‧‧‧Substrate transport arm 250B‧‧‧Substrate transport arm PMH‧‧‧Substrate holding station 245‧‧‧Transportation Equipment 200M1‧‧‧Front-end module 292A‧‧‧Load lock port 292B‧‧‧Load lock port 292C‧‧‧Load lock port 200M2‧‧‧Core module 200M3‧‧‧Insert module 200M4‧‧‧ Insert module 200M5‧‧‧Insert module 200M6‧‧‧Insert module 200M7‧‧‧Insert module 200M8‧‧‧Insert module 200F2‧‧‧Frame 200F3‧‧‧Frame 200F4‧‧‧Frame 200F5‧ ‧‧Frame 200F6‧ ‧‧Frame 200F7‧‧‧Frame 200F8‧‧‧Frame 200F‧‧‧Frame 210M3S1‧‧‧Side 210M3S2‧‧‧Side 210M3E1‧‧‧End wall 210M5E‧‧‧End wall 2 10M6S1‧‧‧Side 210MS2‧‧‧Side L1‧‧‧Length L2‧‧‧Length 210M6E1‧‧‧End wall 210M4E‧‧‧End wall 210M8S1‧‧‧Side 210M82‧‧‧Side 210M7E‧‧‧End wall L3‧‧‧Length 2 10M8E1‧‧‧End wall 200M2E1 ‧‧‧First end 200M2E2‧‧‧Second end SX‧‧‧Pivot axis 250EH‧‧‧Substrate holder PMH1‧‧‧Substrate holding station PMH2‧‧‧Substrate holding station WX‧‧‧Wrist axis 300A‧‧‧Drive section 300B‧‧‧Drive section 300C‧‧‧Drive section 300D‧‧‧Drive section 400‧‧‧Drive actuator 410‧‧‧Shoulder pulley 411‧‧‧Elbow pulley EX ‧‧‧Elbow axis 400A‧‧‧Drive belt 400B‧‧‧Drive belt AL1‧‧‧First length AL2‧‧‧Second length AL3‧‧‧Third length 250UAE1‧‧‧First end 250UAE1‧‧‧ Second end 380S‧‧‧Drive shaft 380AS‧‧‧Drive shaft 380BS‧‧‧Drive shaft 388‧‧‧Drive shaft CNX‧‧‧Connecting contact 300‧‧‧Frame 200F‧‧‧Frame 370‧‧‧Z-axis driver 382‧‧‧Rotary drive section 300FI‧‧‧Internal 380‧‧‧Hybrid drive motor 380A‧‧‧Hybrid drive motor 380B‧‧‧Hybrid drive motor 376‧‧‧Iron fluid seal 377‧‧‧Iron Fluid seal T‧‧‧Rotational movement R‧‧‧Extension movement 381‧‧‧Casing 380'‧‧‧First drive motor 380A'‧‧‧Second drive motor 380S'‧‧‧Stator 380R'‧‧‧ Rotor 380AS'‧‧‧Stator 380AR'‧‧‧Rotor 380ACS‧‧‧Container seal 380CS‧‧‧Container seal 368A‧‧‧Encoder/sensor 368B‧‧‧Encoder/sensor 380B'‧ ‧‧Motor 380BS'‧‧‧Stator 380BR'‧‧‧Rotor 380BCS‧‧‧Container seal 388CS‧‧‧Container seal 388R‧‧‧Rotor 296‧‧‧Direction LAX‧‧‧Longitudinal axis 247PA ‧‧‧ Pivot 246‧‧‧Balance weight 400A'‧‧‧Belt 400B'‧‧‧Belt 412‧‧‧Pulley 247‧‧‧Balance weight 247A‧‧‧Balance weight 247B‧‧‧Balance weight Part 247C‧‧‧Balance weight piece

[0006] The foregoing aspects and other features of the disclosed embodiments are described below with reference to the accompanying drawings, in which: [0007] Figures 1 and 1A are schematic illustrations of prior art substrate processing tools having different forms; [0008 ] FIG. 2A is a schematic diagram of a substrate processing tool in accordance with aspects of the disclosed embodiments; [0009] FIGS. 2B, 2C, 2D, 2E, 2F, 2G, 2H and 2I are in accordance with aspects of the disclosed embodiments. [0010] Figures 3A-3D are schematic views of the drive section of the transport device of the substrate treatment tool shown in Figures 2A-2E; [0011] Figure 4 is a schematic diagram of a portion of a substrate transport device of the substrate processing tool shown in FIGS. 2A-2E in accordance with aspects of the disclosed embodiments; [0012] FIG. 5 is a diagram in accordance with aspects of the disclosed embodiments; 2A-2E; [0013] Figure 6 is a schematic illustration of the substrate processing tool shown in Figures 2A-2E, in accordance with aspects of the disclosed embodiments; [0014] Figure 7 , 8, 9A, 9B, 10, 11, 12, and 12A are the substrate processing tools shown in FIGS. 2A-2E configured in different substrate processing tool types according to aspects of the disclosed embodiments. [0015] FIGS. 13A, 13B, 13C and 13D are schematic diagrams of the operation of a substrate processing tool according to aspects of the disclosed embodiments; [0017] Figures 15A, 15B, and 15C are schematic illustrations of the operation of the substrate processing tool in accordance with the disclosed embodiments; [0018] Figures 16A, 16B, 16C is a schematic diagram of the operation of a substrate processing tool in accordance with aspects of the disclosed embodiments; and [0019] FIG. 17 is an exemplary flow diagram in accordance with aspects of the disclosed embodiments.

200‧‧‧Substrate Treatment Tools

200F‧‧‧Frame

200SL‧‧‧Seals

201‧‧‧Front-end

202‧‧‧Backend

210‧‧‧Transportation Room

210E1, 210E2‧‧‧End wall

210S1, 210S2‧‧‧Side

245‧‧‧Transportation equipment

250‧‧‧Substrate transport arm

250E‧‧‧End effector

250EH‧‧‧Substrate Holder

250FA‧‧‧Forearm

250UA‧‧‧Upper arm

260A, 260B‧‧‧End substrate transport opening

270A1~270A6, 270B1~270B6‧‧‧Side substrate transport opening

290‧‧‧Device front-end module

291‧‧‧Transportation Room

292A~292C‧‧‧Loading port

299‧‧‧Controller

300A‧‧‧Drive Section

AL1‧‧‧First length

AL2‧‧‧Second length

AL3‧‧‧Third length

BS‧‧‧buffer station

C‧‧‧Substrate box/carrier

DD‧‧‧Substrate holding reference standard

EX‧‧‧Elbow axis

FP‧‧‧coverage area

LL1, LL2‧‧‧Load lock chamber

PM‧‧‧ processing module

PMH, PMH1, PMH2‧‧‧Substrate Holding Station

S‧‧‧Substrate

SPM‧‧‧Processing Module

SX‧‧‧Pivot axis

TPM‧‧‧Concatenated processing module

W, W1‧‧‧Width

WX‧‧‧Wrist axis

L‧‧‧Length

Claims (52)

A substrate processing apparatus includes: a linearly elongated substantially hexahedron-shaped substrate transport chamber having linearly elongated side surfaces of the hexahedron and the hexagonal surface substantially orthogonal to the linearly elongated side surfaces. At least one end wall of the surface body is such that the major axis of the linear elongated sides extends substantially orthogonally from the at least one end wall; the at least one end wall has an end substrate transport opening, and the linear elongated sides at least one of the sides having a linear array of side substrate transport openings, each of the end and side substrate transport openings being arranged to allow a substrate to be transported in and out of the substrate transport chamber therethrough; and a processing module, which is linearly disposed along at least one of the linear elongated sides and is respectively connected to the substrate transport chamber through the corresponding side substrate transport opening; and a substrate transport arm, It is pivotably mounted in the substrate transport chamber such that the pivot axis of the substrate transport arm is fixedly mounted relative to the substrate transport chamber, the substrate transport arm having a three-link-three-joint SCARA type In a state, one of the connecting rods is an end effector with at least one substrate holder, which is articulated to move the substrate held by the at least one substrate holder through the End and side substrate transport openings are transported in and out of the substrate transport chamber such that the end effector is common to each of the end and side substrate transport openings; wherein the hexahedron has a side length to width An aspect ratio, which is a large aspect ratio greater than one of 2:1, about 3:1, and greater than 3:1, and The width is compact relative to the footprint of the substrate handling arm. For example, the substrate processing equipment of Item 1 of the patent scope is applied for, wherein the aspect ratio is greater than 2:1, and for a predetermined maximum reach of the substrate transport arm, the coverage of the substrate transport arm The area is compact. For example, the substrate processing equipment of claim 1, wherein the aspect ratio is about 3:1, and for a predetermined maximum reach of the substrate transport arm, the coverage area of the substrate transport arm is compact of. The substrate processing apparatus of claim 1, wherein the end wall is configured to receive two side-by-side load lock chambers positioned substantially adjacent to each other at a common height along the edge and facing the end wall together. or other processing module dimensions. For example, in the substrate processing equipment of Item 1 of the patent application, the SCARA arm has three degrees of freedom and connecting rods of different lengths, and the pivot axis defines the shoulder joint of the SCARA arm. For example, the substrate processing equipment of claim 1, wherein the linear array of processing modules provides at least six processing module substrate holding stations, which are distributed at a substantially common height along the at least one linear elongated side. , and each of the substrate holding stations is accessed via a corresponding side transport opening using the common end effector of the substrate transport arm. For example, the substrate processing equipment of Item 1 of the patent application further includes at least one load lock chamber or other processing module, which is connected to the substrate transport chamber through the end substrate transport opening. For example, the substrate processing equipment of claim 1, wherein the other of the linear elongated sides opposite to the at least one linear elongated side of the substrate transport chamber has at least one other side substrate transport opening, and the substrate transport arm is configured to transport the substrate held by the at least one substrate holder through the end substrate transport opening, the side substrate transport opening, and the other side substrate transport opening Transporting in and out of the substrate transport chamber such that the end effectors are respectively disposed on the end wall, the linear elongated side and the opposite linear elongated side of the substrate transport chamber. Each of the opening, the side substrate transport opening, and the other side substrate transport opening is common. Such as the substrate processing equipment of claim 8, wherein the opposite linear elongated side of the substrate transport chamber has more than one substrate transport opening on the other side, which is provided along the opposite side In a linear array, the end effector is common to each of the substrate transport openings on the other side. For example, the substrate processing equipment of Item 1 of the patent application further includes a driving section connected to the substrate transport chamber and having a driving core. axle, the drive spindle comprising a coaxial drive shaft operably coupled to the substrate transport arm and defining at least two degrees of freedom to effect articulation of the substrate transport arm, and the drive spindle is configured to Make its center of rotation substantially coincide with the pivot axis. For example, the substrate processing equipment of claim 1, wherein the at least one substrate holder of the end effector includes more than one substrate holder, which is provided on the end effector and arranged such that The end effector substantially simultaneously extends or retracts the more than one substrate holder through the more than one arranged linear array of side substrate transport openings with a common end effector motion. For example, in the substrate processing equipment of item 1 of the patent application, the end effector is a first end effector, and the substrate transport arm has a second end effector, which and the first end effector are attached to the base. a common forearm of the material transport arm such that the first and second end effectors pivot relative to the forearm about a common axis of rotation, wherein the second end effector is the end substrate transport opening Common to each of the side substrate transport openings. For example, the substrate processing apparatus of claim 12, wherein the first and second end effectors provide a quick exchange end common to each of the end substrate transport openings and the side substrate transport openings. The actuator delivers arms to the substrate. For example, the substrate processing equipment of claim 1, wherein the linear elongated sides have a selectively changeable length, wherein the sides of the substrate transport chamber can be selected between different lengths and define the A selectively changeable version of the substrate transport chamber. For example, the substrate processing equipment of claim 14, wherein the selectively changeable shape of the substrate transport chamber can change the aspect ratio of the side length to width from a large aspect ratio to 1: Select between styles with an aspect ratio of 1, and wherein the substrate transport arm is common to each selectable model of the substrate transport chamber. For example, the substrate processing equipment of claim 1, wherein the substrate transport arm has a compact coverage area for a predetermined maximum reach of the substrate transport arm, and has a balance weight, which is provided on the substrate conveying arm to extend from the pivot axis in a direction substantially opposite to the extending direction of the substrate conveying arm, and has a descending moment of the substrate conveying arm based on the pivot axis Balanced and defined by form and weight that fit within the compact footprint of the substrate handling arm. For example, in the substrate processing equipment of claim 16, the counterweight is fixedly mounted to the frame of the substrate transport arm at a fixed position relative to the pivot axis. For example, the substrate processing equipment of claim 16, wherein the counterweight is movably mounted to the frame of the substrate transport arm to be arranged at different positions on the frame toward and away from the pivot axis. . For example, the substrate processing equipment of claim 16, wherein the counterweight is movably mounted to the frame of the substrate transport arm for moving away from and toward the pivot axis relative to the frame, to supplement the The substrate transport arm extends and contracts. The substrate processing apparatus of claim 19, wherein the counterweight is moved relative to the substrate transport arm frame by at least one drive shaft of a drive section operably coupled to the substrate The base material conveying arm implements the joint motion of the base material conveying arm. For example, the substrate processing equipment of claim 20, wherein the at least one drive shaft implements the movement of the counterweight away from and toward the pivot axis and implements the extension and contraction of the substrate transport arm, so that the at least one drive shaft A common drive shaft is used for the movement of the counterweight and the extension and contraction of the substrate transport arm. For example, in the substrate processing equipment of claim 18, the counterweight has a counterweight part that can be selected from several different interchangeable counterweight parts and the selection is based on the substrate transport chamber. The aspect ratio. For example, in the substrate processing equipment of item 10 of the patent application, the substrate transport arm has a balance weight, which is provided on the substrate transport arm to extend from the pivot axis to the base material. The transport arms extend in substantially opposite directions and have a shape and weight defined by the balance of the substrate transport arm downward moments on the drive spindle. For example, the substrate processing equipment of claim 23, wherein the substrate transport arm has a compact coverage area for a predetermined maximum reach of the substrate transport arm, and the type of the balance weight is Stance and weight are further defined in terms of what can fit within the compact footprint of the substrate handling arm. For example, in the substrate processing equipment of Item 1 of the patent application, the substrate transport arm includes a bifurcated belt transmission system that implements joint motion of the substrate transport arm. For example, in the substrate processing equipment of item 1 of the patent application, the substrate transport arm is a transport arm with three degrees of freedom. A method of transporting a substrate, the method comprising: providing a linearly elongated substantially hexahedral-shaped substrate transport chamber having linearly elongated side surfaces of the hexahedron and substantially aligned with the linearly elongated side surfaces. At least one end wall of the hexahedron is orthogonal so that the long axes of the linear elongated sides extend substantially orthogonally from the at least one end wall. Out; the at least one end wall has an end substrate transport opening, at least one of the linear elongated sides has a linear array of side substrate transport openings, each of the end and side substrate transport openings is Arranged to allow a substrate to be transported in and out of the substrate transport chamber; providing a plurality of processing modules linearly disposed along at least one of the linear elongated sides and passing through the corresponding side substrate The material transport openings are respectively connected with the substrate transport chamber; a substrate transport arm is provided, which is pivotably installed in the substrate transport chamber, so that the pivot axis of the substrate transport arm is relative to the substrate transport chamber Being fixedly installed, the substrate transport arm has a three-link-three-joint SCARA configuration, one of which is an end effector with at least one substrate holder; and the substrate transport arm is jointly connected to the substrate transport arm , used to transport the substrate held by the at least one substrate holder in and out of the substrate transport chamber through the end and side substrate transport openings, so that the end effector is the end and side substrates Common to each of the delivery openings; wherein the hexahedron has a side length to width aspect ratio that is one of greater than 2:1, about 3:1, and greater than 3:1 aspect ratio, and the width is compact relative to the footprint of the substrate handling arm. For example, the method of claim 27, wherein the aspect ratio is greater than 2:1, and for a predetermined maximum reach of the substrate transport arm, the coverage area of the substrate transport arm is compact of. Such as the method of claim 27, wherein the aspect ratio is about 3:1, and for a predetermined maximum reach of the substrate transport arm, the coverage area of the substrate transport arm is compact. The method of claim 27, wherein the end wall is configured to accept two side-by-side load lock chambers or other processes positioned substantially adjacent to each other at a common height along the edge and facing the end wall together. The size of the module. For example, the method of claim 27 further includes providing the SCARA arm with three degrees of freedom and connecting rods of different lengths, and the pivot axis defines a shoulder joint of the SCARA arm. For example, the method of claim 27, wherein the linear array of processing modules provides at least six processing module substrate holding stations distributed at substantially the same height along the at least one linear elongated side, the method It is further included that the common end effector of the substrate transport arm provides access to and from each of the substrate holding stations via corresponding side transport openings. For example, in the method of claim 27, at least one load lock chamber or other processing module is connected to the substrate transport chamber through the end substrate transport opening. For example, in the method of item 27 of the patent application, the base material transport chamber is neutralized The other one of the linear elongated sides opposite the at least one linear elongated side has at least one other side substrate transport opening, and the method further includes placing the substrate held by the at least one substrate holder. The substrate transport arm is used to transport the substrate in and out of the substrate transport chamber through the end substrate transport opening, the side substrate transport opening, and the other side substrate transport opening, so that the end effectors are respectively disposed on the The end substrate transport opening, the side substrate transport opening, and the other side substrate transport opening on the end wall of the substrate transport chamber, the linear elongated side and the opposite linear elongated side shared by everyone. Such as the method of claim 34, wherein the opposite linear elongated side of the substrate transport chamber has more than one substrate transport opening on the other side, which is arranged in a linear array along the opposite side , and wherein the end effector is common to each of the substrate transport openings on the other side. The method of claim 27, wherein a drive section is connected to the substrate transport chamber and has a drive spindle, the drive spindle includes a coaxial drive shaft operatively coupled to the substrate The transport arm defines at least two degrees of freedom, the method further comprising articulating the substrate transport arm with the drive section, wherein the drive spindle is arranged such that its axis of rotation substantially coincides with the pivot axis. For example, the method in item 36 of the patent scope further includes providing the base A balance weight member of the substrate transport arm is provided on the substrate transport arm to extend from the pivot axis in a direction substantially opposite to the extension direction of the substrate transport arm, and has a base on the substrate transport arm. The shape and weight of the substrate transport arm are defined by a balance of lowering moments on the drive spindle. Such as the method of claim 37, wherein the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, and the type and weight of the balancing weight It is further defined in terms of being able to fit within the compact footprint of the substrate handling arm. For example, the method of claim 27, wherein the at least one substrate holder of the end effector includes more than one substrate holder, which is disposed on the end effector, the method further includes extending or contracting The end effector causes the more than one substrate holder to substantially simultaneously extend or retract through the more than one side substrate transport openings arranged in a linear array in a common end effector motion. For example, the method of claim 27, wherein the end effector is a first end effector, and the substrate transport arm has a second end effector, which and the first end effector are attached to the substrate transport arm a common forearm, the method further comprising pivoting the first and second end effectors relative to the forearm about a common axis of rotation, wherein the second end effector is for transporting the end substrates Common to each of the opening and the side substrate transport opening. The method of claim 40, wherein the first and second end effectors provide a quick-swap end effector common to each of the end substrate transport openings and the side substrate transport openings. The substrate carries the arm. For example, the method of claim 27, wherein the linear elongated sides have a selectively variable length, wherein the method further includes selecting the sides of the substrate transport chamber from sides with different lengths, A selectively changeable pattern is used to define the substrate transport chamber. For example, the method of claim 42, wherein the selectively changeable shape of the substrate transport chamber can change the length-to-width aspect ratio of the side from a large aspect ratio to a length of 1:1. A selection is made between wide-ratio types, and the substrate transport arm is common to each selectable type of the substrate transport chamber. The method of claim 27, wherein the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, the method further comprising providing a balance to the substrate transport arm A counterweight is provided on the substrate transport arm to extend from the pivot axis in a direction substantially opposite to the extension direction of the substrate transport arm, and has a base on the pivot axis. The balance of the lowering moment of the substrate transport arm and the compact footprint of the substrate transport arm can be accommodated Defined type and weight. Such as the method of claim 44, wherein the counterweight is fixedly mounted to a frame of the substrate transport arm at a fixed position relative to the pivot axis. The method of claim 44 further includes moving the counterweight relative to the frame of the substrate transport arm so that the counterweight is disposed at different positions on the frame toward and away from the pivot axis. For example, the method of item 44 of the patent application further includes moving the counterweight relative to the frame of the substrate transport arm, so that the counterweight moves away from and toward the pivot axis relative to the frame to supplement the substrate Transport arm extension and contraction. The method of claim 47, wherein the counterweight is moved relative to the substrate transport arm frame by at least one drive shaft of a drive section operatively coupled to the substrate transport arm And implement the joint movement of the base material transport arm. For example, the method of claim 48, wherein the at least one drive shaft implements the movement of the counterweight away from and toward the pivot axis and the expansion and contraction of the substrate transport arm, so that the at least one drive shaft is used for The movement of the counterweight and the extension and contraction of the substrate transport arm are driven by a common Moving axis. The method of claim 47 further includes selecting a weight portion of the weight member from a plurality of different interchangeable weight portions and the selection is based on the aspect ratio of the substrate transport chamber. For example, the method of Item 27 of the patent application further includes using a bifurcated belt transmission system of the substrate transport arm to implement joint motion of the substrate transport arm. For example, in the method of claim 27 of the patent application, the substrate transport arm is a transport arm with three degrees of freedom.