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TWI899991B - Flexible circuit board and method of manufacturing thereof - Google Patents

Flexible circuit board and method of manufacturing thereof

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Publication number
TWI899991B
TWI899991B TW113117244A TW113117244A TWI899991B TW I899991 B TWI899991 B TW I899991B TW 113117244 A TW113117244 A TW 113117244A TW 113117244 A TW113117244 A TW 113117244A TW I899991 B TWI899991 B TW I899991B
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TW
Taiwan
Prior art keywords
stretchable
metal layer
circuit substrate
layer
circuit
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TW113117244A
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Chinese (zh)
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TW202545247A (en
Inventor
李成佳
Original Assignee
大陸商宏啟勝精密電子(秦皇島)有限公司
大陸商鵬鼎控股(深圳)股份有限公司
鵬鼎科技股份有限公司
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Application filed by 大陸商宏啟勝精密電子(秦皇島)有限公司, 大陸商鵬鼎控股(深圳)股份有限公司, 鵬鼎科技股份有限公司 filed Critical 大陸商宏啟勝精密電子(秦皇島)有限公司
Application granted granted Critical
Publication of TWI899991B publication Critical patent/TWI899991B/en
Publication of TW202545247A publication Critical patent/TW202545247A/en

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Abstract

A flexible circuit board includes a first circuit substrate having a first metal layer, a second circuit substrate having a second metal layer and at least one electrical connection part. The electrical connection part is electrically connected between the first circuit substrate and the second circuit substrate. The electrical connection part includes a flexible part and at least one liquidmetal material. The flexible part is connected between the first circuit substrate and the second circuit substrate and has at least one passage. The passage connects the first metal layer and the second metal layer. The liquidmetal material is filled in the passage and is electrically connected between the first metal layer and the second metal layer.

Description

可撓式電路板及其製造方法Flexible circuit board and manufacturing method thereof

本申請是有關一種電路板及電路板的製造方法,且特別是關於一種可撓曲且可伸縮的電路板及其製造方法。This application relates to a circuit board and a method for manufacturing the circuit board, and in particular to a flexible and stretchable circuit board and a method for manufacturing the same.

在現有的折疊式或可彎曲式的電子產品中,通常會透過排線及板對板連接器(Board-to-board connector,BTB)來實現不同模組間的連接,不僅占用電子產品的內部空間,亦導致電子產品無法實現輕薄化、微型化。此外,排線經過多次彎折或撓曲後,容易產生裂紋或斷裂,大幅降低了電子產品的使用壽命,且對於需頻繁插拔或移動各個模組的應用場域中,容易因震動而導致排線或板對板連接器與模組間接觸不良,降低連接的穩定性及可靠性。Existing foldable or bendable electronic products typically rely on flat cables and board-to-board connectors (BTBs) to connect different modules. This not only takes up space within the electronic product but also hinders the product's slimming and miniaturization. Furthermore, the cables are prone to cracking or breaking after repeated bending or flexing, significantly reducing the product's lifespan. Furthermore, in applications where modules require frequent plugging, unplugging, or movement, vibration can easily cause poor contact between the cable or BTB connector and the module, reducing the stability and reliability of the connection.

因此,本申請提供一種可撓式電路板,其包含具有第一金屬層的第一電路基板、具有第二金屬層的第二電路基板、以及至少一電連接部。所述至少一電連接部電性連接於所述第一電路基板及所述第二電路基板之間,並包含可拉伸部及至少一液態金屬材料。所述可拉伸部連接於所述第一電路基板與所述第二電路基板之間,並具有至少一通道,其中所述至少一通道連接所述第一金屬層與所述第二金屬層。所述至少一液態金屬材料填充於所述至少一通道中,其中所述至少一液態金屬材料電性連接於所述第一金屬層所述第二金屬層之間。Therefore, the present application provides a flexible circuit board comprising a first circuit substrate having a first metal layer, a second circuit substrate having a second metal layer, and at least one electrical connection portion. The at least one electrical connection portion electrically connects the first and second circuit substrates and comprises a stretchable portion and at least one liquid metal material. The stretchable portion connects the first and second circuit substrates and comprises at least one channel, wherein the at least one channel connects the first and second metal layers. The at least one liquid metal material is filled in the at least one channel, wherein the at least one liquid metal material electrically connects the first and second metal layers.

依據本申請的可撓式電路板,其中所述可拉伸部包含多條可拉伸線體,且其中所述多條可拉伸線體每一條包含所述通道,所述多條可拉伸線體與所述第一電路基板及所述第二電路基板密封所述液態金屬材料。According to the flexible circuit board of this application, the stretchable part includes multiple stretchable wires, and each of the multiple stretchable wires includes the channel, and the multiple stretchable wires and the first circuit substrate and the second circuit substrate seal the liquid metal material.

依據本申請的可撓式電路板,其中任相鄰兩條所述多條可拉伸線體之間的距離大於或等於20微米。According to the flexible circuit board of this application, the distance between any two adjacent stretchable wires is greater than or equal to 20 microns.

依據本申請的可撓式電路板,其中所述多條可拉伸線體每一條具有一寬度,且所述寬度隨著所述多條可拉伸線體被拉伸而減少。According to the flexible circuit board of the present application, each of the plurality of stretchable wires has a width, and the width decreases as the plurality of stretchable wires are stretched.

依據本申請的可撓式電路板,其中所述多條可拉伸線體每一條具有一線長,且所述多條可拉伸線體每一條的可拉伸長度小於或等於1.5倍的所述線長。According to the flexible circuit board of this application, each of the multiple stretchable wires has a wire length, and the stretchable length of each of the multiple stretchable wires is less than or equal to 1.5 times the wire length.

依據本申請的可撓式電路板,其中所述多條可拉伸線體每一條及所述液態金屬材料在彎折前具有第一電阻值,所述多條可拉伸線體每一條及所述液態金屬材料在彎折後具有第二電阻值,且所述第一電阻值與所述第二電阻值相同。According to the flexible circuit board of this application, each of the multiple stretchable wires and the liquid metal material has a first resistance value before bending, and each of the multiple stretchable wires and the liquid metal material has a second resistance value after bending, and the first resistance value is the same as the second resistance value.

本申請提供一種可撓式電路板的製造方法,包含提供第一電路基板,所述第一電路基板上設置有第一金屬層及可拉伸材料層;設置犧牲層於所述可拉伸材料層的上方;在所述犧牲層上形成多個槽孔,其中所述多個槽孔露出所述可拉伸材料層下方之所述第一金屬層;在所述犧牲層上形成所述多個槽孔之後,塗覆可拉伸材料於所述多個槽孔的內壁及所述犧牲層的部分表面,其中所述多個槽孔中未被所述可拉伸材料塗覆的底部露出所述第一金屬層;在塗覆所述可拉伸材料於所述多個槽孔的所述內壁及所述犧牲層的所述部分表面之後,填充所述液態金屬至所述多個槽孔中,以使所述液態金屬材料電性連接所述第一金屬層;設置第二金屬層於所述可拉伸材料及所述液態金屬材料上,使所述液態金屬在所述槽孔中更電性連接所述第二金屬層,並密封所述液態金屬材料於所述第一金屬層、所述可拉伸材料及所述第二金屬層之間;於所述第二金屬層的上方形成至少一電路結構;以及在形成所述至少一電路結構之後,移除所述犧牲層。The present application provides a method for manufacturing a flexible circuit board, comprising providing a first circuit substrate, wherein a first metal layer and a stretchable material layer are provided on the first circuit substrate; providing a sacrificial layer above the stretchable material layer; forming a plurality of slots on the sacrificial layer, wherein the plurality of slots expose the first metal layer below the stretchable material layer; after forming the plurality of slots on the sacrificial layer, coating the inner walls of the plurality of slots and a portion of the surface of the sacrificial layer with a stretchable material, wherein the bottoms of the plurality of slots not coated with the stretchable material expose the first metal layer; and coating the stretchable material on the inner walls of the plurality of slots and a portion of the surface of the sacrificial layer. After forming the material on the inner walls of the plurality of slots and the portion of the surface of the sacrificial layer, the plurality of slots are filled with the liquid metal so that the liquid metal material is electrically connected to the first metal layer; a second metal layer is disposed on the stretchable material and the liquid metal material so that the liquid metal in the slots is further electrically connected to the second metal layer and the liquid metal material is sealed between the first metal layer, the stretchable material and the second metal layer; at least one circuit structure is formed above the second metal layer; and after forming the at least one circuit structure, the sacrificial layer is removed.

依據本揭露之實施例,其中還包含利用增層法形成所述電路結構,使所述電路結構包含多個電路層。According to an embodiment of the present disclosure, the circuit structure is formed by a build-up method, so that the circuit structure includes multiple circuit layers.

依據本揭露之實施例,其中還包含裝設多個電子元件於所述多個電路層上。According to an embodiment of the present disclosure, a plurality of electronic components are further installed on the plurality of circuit layers.

依據本揭露之實施例,其中所述至少一電路結構為至少一第一電路結構,所述製造方法還包含在所述第一金屬層上形成至少一第二電路結構。According to an embodiment of the present disclosure, wherein the at least one circuit structure is at least one first circuit structure, the manufacturing method further includes forming at least one second circuit structure on the first metal layer.

以下申請提供許多不同的實施例或示例,用於實現所提供主題的不同特徵。下面描述組件和配置的具體示例以簡化本申請。當然,所述僅僅是示例,並非旨在於進行限制。例如,在以下的描述中,第一特徵形成於第二特徵上或上方,其中可能包含第一特徵和第二特徵直接接觸而形成的實施例,且還可以包含其中可以在第一特徵和第二特徵之間形成額外特徵,使得第一特徵和第二特徵不直接接觸的實施例。此外,本申請可以在各個示例中重複參考數字和/或文字。此重複是為了簡單和清楚的目的,本身並不限定所討論的各種實施例和/或組件之間的關係。The following application provides many different embodiments or examples for implementing different features of the provided subject matter. Specific examples of components and configurations are described below to simplify the present application. Of course, these are merely examples and are not intended to be limiting. For example, in the following description, a first feature is formed on or above a second feature, which may include embodiments in which the first feature and the second feature are in direct contact, and may also include embodiments in which additional features may be formed between the first feature and the second feature so that the first feature and the second feature are not in direct contact. In addition, the present application may repeatedly reference numbers and/or text in various examples. This repetition is for the purpose of simplicity and clarity and does not in itself limit the relationship between the various embodiments and/or components discussed.

請參照圖1,圖1為本申請實施例之可撓式電路板100的剖面示意圖。可撓式電路板100包含第一電路基板110、第二電路基板120、以及至少一電連接部130。第一電路基板110上設置有第一金屬層111,第二電路基板120上設置有第二金屬層121。電連接部130電性連接於第一電路基板110及第二電路基板120之間,且包含可拉伸部131(斜線區)及液態金屬材料132(圓點區)。可拉伸部131用於連接第一電路基板110與第二電路基板120,並具有至少一個通道131a。通道131a連接第一金屬層111與第二金屬層121,且液態金屬材料132填充於通道131a中。因此,液態金屬材料132得以電性連接第一金屬層111與第二金屬層121,從而實現第一電路基板110與第二電路基板120之間的訊號傳輸。Please refer to Figure 1, which is a schematic cross-sectional view of a flexible circuit board 100 according to an embodiment of the present application. Flexible circuit board 100 includes a first circuit substrate 110, a second circuit substrate 120, and at least one electrical connection portion 130. A first metal layer 111 is provided on the first circuit substrate 110, and a second metal layer 121 is provided on the second circuit substrate 120. Electrical connection portion 130 electrically connects first circuit substrate 110 and second circuit substrate 120 and includes a stretchable portion 131 (hatched area) and liquid metal material 132 (dotted area). Stretchable portion 131 is used to connect first circuit substrate 110 and second circuit substrate 120 and has at least one channel 131a. Channel 131a connects first metal layer 111 and second metal layer 121, and liquid metal material 132 fills channel 131a. Therefore, liquid metal material 132 can electrically connect first metal layer 111 and second metal layer 121, thereby achieving signal transmission between first circuit substrate 110 and second circuit substrate 120.

在本申請的實施例中,第一電路基板110包含但不限於電性連接主板及電池模組的至少一者,第二電路基板120包含但不限於電性連接顯示螢幕、攝像頭、聽筒的至少一者,且兩者之間透過具拉伸性及可反覆彎折性的電連接部130來實現訊號傳輸,使可撓式電路板100可廣泛應用於任何需進行多次彎折或拉伸的電子裝置。In the embodiment of the present application, the first circuit substrate 110 includes, but is not limited to, being electrically connected to at least one of a mainboard and a battery module, and the second circuit substrate 120 includes, but is not limited to, being electrically connected to at least one of a display screen, a camera, and an earpiece. Signal transmission between the two is achieved via a stretchable and reversibly bendable electrical connection portion 130, making the flexible circuit board 100 widely applicable to any electronic device requiring multiple bending or stretching.

第一電路基板110及第二電路基板120均可為具有一層或多層電路層的電路結構,且所需的多種電路元件140可裝設於電路結構上。電路層包含位於第一電路基板110的至少一層第一金屬層111、以及位於第二電路基板120的至少一層第二金屬層121。在一些實施例中,填充於通道131a中的液態金屬材料132直接接觸第一金屬層111及第二金屬層121,使得液態金屬材料132與第一電路基板110及第二電路基板120兩者間的連接處不需提供額外的電連接件或焊墊等,亦能夠實現電性連接及訊號傳輸。Both the first circuit substrate 110 and the second circuit substrate 120 can be circuit structures having one or more circuit layers, and a variety of desired circuit components 140 can be mounted on the circuit structures. The circuit layers include at least one first metal layer 111 located on the first circuit substrate 110 and at least one second metal layer 121 located on the second circuit substrate 120. In some embodiments, the liquid metal material 132 filled in the channel 131a directly contacts the first metal layer 111 and the second metal layer 121. This allows electrical connection and signal transmission between the liquid metal material 132 and the first circuit substrate 110 and the second circuit substrate 120 without the need for additional electrical connectors or pads.

在此實施例中,可拉伸部131包含多條可拉伸線體131b,且每一條可拉伸線體131b包含所述通道131a,所述可拉伸線體131b與所述第一電路基板110及所述第二電路基板120密封所述液態金屬材料132。在一些實施例中,每一條可拉伸線體131b可以彼此並列設置且實質地平行,其中前述實質地平行涵蓋在不影響可拉伸部131運作與功能的情況下,相鄰兩條可拉伸線體131b可些微地不平行。在一些實施例中,任意相鄰兩條可拉伸線體131b之間的距離d大於或等於20微米(μm)。In this embodiment, the stretchable portion 131 includes a plurality of stretchable wires 131b, each of which includes the channel 131a. The stretchable wires 131b, the first circuit substrate 110, and the second circuit substrate 120 seal the liquid metal material 132. In some embodiments, each stretchable wire 131b can be arranged side by side and substantially parallel to each other. Substantially parallel means that two adjacent stretchable wires 131b may be slightly non-parallel without affecting the operation and function of the stretchable portion 131. In some embodiments, the distance d between any two adjacent stretchable wires 131b is greater than or equal to 20 micrometers (μm).

可拉伸線體131b及填充於可拉伸線體131b內部的液態金屬材料132使得可拉伸部131具備可拉伸性、可彎折性及抗震能力,確保可拉伸部131在第一電路基板110及第二電路基板120之間實現任意拉伸及彎折時,能夠維持電性及訊號傳輸的穩定性。在一些實施例中,液態金屬材料132完全填充通道131a的內部空間,使得通道131a的內部空間實質上不留有任何空隙、或者不含有任何空氣,以確保可拉伸部131與第一電路基板110及第二電路基板120之間的電連接穩定性。The stretchable wire 131b and the liquid metal material 132 filling it provide the stretchable portion 131 with stretchability, bendability, and shock resistance. This ensures that the stretchable portion 131 maintains electrical and signal transmission stability when stretched and bent between the first and second circuit substrates 110 and 120. In some embodiments, the liquid metal material 132 completely fills the interior of the channel 131a, leaving virtually no gaps or air within the channel 131a. This ensures a stable electrical connection between the stretchable portion 131 and the first and second circuit substrates 110 and 120.

液態金屬材料132為不定型的液態金屬材料或金屬合金材料,具有流動性、可塑性及高熱導率,使得液態金屬材料132能夠隨著可拉伸線體131b的拉伸與彎折而相應地變形。液態金屬材料132包含但不限於液態汞金屬、低熔點的銣、銫金屬、鉛錫合金、鋁合金、銅合金、鎵銦錫合金(galinstan)、前述之金屬合金、或是其他種液態金屬合金。可拉伸線體131b可由膠體、橡膠或其他可拉伸後恢復的材料所製成。The liquid metal material 132 is an amorphous liquid metal or metal alloy material with fluidity, plasticity, and high thermal conductivity, enabling it to deform accordingly with the stretching and bending of the stretchable wire 131b. The liquid metal material 132 includes, but is not limited to, liquid mercury, low-melting-point galvanism, cesium, lead-tin alloys, aluminum alloys, copper alloys, gallium-indium-tin alloys (galinstan), alloys of the aforementioned metals, or other liquid metal alloys. The stretchable wire 131b can be made of a gel, rubber, or other material that can recover after stretching.

在本申請之實施例中,當可拉伸線體131b被拉伸時,可拉伸線體131b的寬度會隨著線長的增加而逐漸向內變窄,同時相應地影響填充於可拉伸線體131b內之液態金屬材料132的形狀。如圖1所示,在可拉伸線體131b未被拉伸的情況下,每一條可拉伸線體131b的線長為L,寬度為W。In the embodiment of the present application, when the stretchable wire 131b is stretched, the width of the stretchable wire 131b gradually narrows inward as the length of the wire increases, correspondingly affecting the shape of the liquid metal material 132 filled within the stretchable wire 131b. As shown in Figure 1, when the stretchable wire 131b is not stretched, each stretchable wire 131b has a length of L and a width of W.

當第一電路基板110及第二電路基板120之間藉由可拉伸線體131b的拉伸而逐漸遠離彼此時,線長L會逐漸增加,且寬度W逐漸變窄。同時,可拉伸線體131b之線長L及寬度W的變化亦會影響到整體的導通電阻。具體而言,導通電阻會隨著線長L逐漸增加、寬度W逐漸變窄而逐漸升高。在一些實施例中,每一條可拉伸線體的最大可拉伸長度小於或等於1.5倍的線長L。As the first circuit substrate 110 and the second circuit substrate 120 gradually move away from each other due to the stretching of the stretchable wire 131b, the wire length L gradually increases and the width W gradually narrows. At the same time, changes in the wire length L and width W of the stretchable wire 131b also affect the overall on-resistance. Specifically, the on-resistance gradually increases as the wire length L gradually increases and the width W gradually narrows. In some embodiments, the maximum stretchable length of each stretchable wire is less than or equal to 1.5 times the wire length L.

請參照圖2,圖2為根據本申請的一些實施例所繪示之電連接部130在第一電路基板110及第二電路基板120之間實現彎折時的示意圖。第一電路基板110及第二電路基板120可以分別電性連接至兩種電子裝置或電路(例如,主板及顯示螢幕)等,本發明不以此為限。Please refer to Figure 2, which illustrates an electrical connection portion 130 bent between a first circuit substrate 110 and a second circuit substrate 120, according to some embodiments of the present application. While the first circuit substrate 110 and the second circuit substrate 120 can each be electrically connected to two electronic devices or circuits (e.g., a motherboard and a display), the present invention is not limited thereto.

在單純彎折而不拉伸可拉伸線體131b的情況下,可拉伸線體131b及液態金屬材料132整體的導通電阻及線長L實質上與未彎折時相同。舉例而言,可拉伸線體131b及填充於其中的液態金屬材料132在彎折前具有第一電阻值,在彎折後具有第二電阻值,則第一電阻值與第二電阻值實質相同,或者差異量不超出預設值。When the stretchable wire 131b is simply bent without stretching, the on-resistance and wire length L of the stretchable wire 131b and the liquid metal material 132 are substantially the same as when not bent. For example, if the stretchable wire 131b and the liquid metal material 132 filled therein have a first resistance value before bending and a second resistance value after bending, the first resistance value and the second resistance value are substantially the same, or the difference does not exceed a preset value.

這是由於可拉伸線體131b的材料具有韌性及彈性,且填充於通道131a中的液態金屬材料132具有流動性及可塑性,使得電連接部130在彎折時能夠維持通道131a的內徑大小,便不會過多改變可拉伸線體131b及液態金屬材料132整體的導通電阻。應當可以理解,雖然圖2僅繪示出具有單一條可拉伸線體131b的電連接部130,但事實上電連接部130可以如圖1所示具有多條可拉伸線體131b。This is because the material of the stretchable wire 131b is pliable and elastic, and the liquid metal material 132 filled in the channel 131a is fluid and plastic. This allows the electrical connection portion 130 to maintain the inner diameter of the channel 131a when bent, thereby not significantly changing the overall on-resistance of the stretchable wire 131b and the liquid metal material 132. It should be understood that although Figure 2 only depicts the electrical connection portion 130 having a single stretchable wire 131b, the electrical connection portion 130 can actually have multiple stretchable wires 131b as shown in Figure 1.

請參照圖3A,圖3A為根據本申請的一些實施例所繪示之電連接部130的可拉伸線體131b呈現旋轉佈線型態的示意圖。在圖3A的示例中,第一電路基板110及第二電路基板120之間的電連接部130包含多條可拉伸線體131b,且每一條可拉伸線體131b填充有液態金屬材料132(未繪示)。每一條可拉伸線體131b可根據所需而在三維空間內實現任意型態的佈線,例如彼此交錯疊置等,使得本申請的可撓式電路板100能夠更加靈活、貼合地容置於各種電子裝置中。Please refer to Figure 3A, which is a schematic diagram illustrating a rotational layout of a stretchable wire 131b of an electrical connection portion 130 according to some embodiments of the present application. In the example of Figure 3A, the electrical connection portion 130 between the first circuit substrate 110 and the second circuit substrate 120 includes multiple stretchable wires 131b, each filled with a liquid metal material 132 (not shown). Each stretchable wire 131b can be arranged in any desired three-dimensional configuration, such as staggered or overlapping, allowing the flexible circuit board 100 of the present application to be more flexibly and snugly accommodated in various electronic devices.

請參照圖3B,圖3B為根據本申請的一些實施例所繪示之具有多個電連接部130及電路1~4之電子裝置的示意圖。其中,電路1至4中每兩個電路模塊及一個電連接部130可視為如圖1所示的一組可撓式電路板100。電路1~4之間包含多個電連接部130以實現彼此間的電性連接,且基於電連接部130中之可拉伸部131及液態金屬材料132(未繪示)的特性,電子裝置的多組可撓式電路板100可以適應各種曲面及形狀,並在彎折、拉伸、扭曲的情況下保持良好的電氣特性。Please refer to Figure 3B, which is a schematic diagram of an electronic device having multiple electrical connections 130 and circuits 1-4 according to some embodiments of the present application. Each pair of circuit modules and one electrical connection 130 in circuits 1-4 can be considered a flexible circuit board 100 as shown in Figure 1. Circuits 1-4 include multiple electrical connections 130 to achieve electrical connections between them. Due to the properties of the stretchable portions 131 and liquid metal material 132 (not shown) within the electrical connections 130, the multiple flexible circuit boards 100 in the electronic device can conform to various curves and shapes, maintaining excellent electrical properties even when bent, stretched, or twisted.

請參照圖4A至圖4G,圖4A至圖4G為根據本申請的一些實施例所繪示之可撓式電路板的製造流程的示意圖。在下文中,可撓式電路板400類似於圖1所示之可撓式電路板100,且圖4A至圖4G之製造流程可用於製造如圖1所示之可撓式電路板100。應當理解,雖然下文僅簡要地描述一些操作,但事實上製造流程可以包含其他額外的操作,且所提供的製造順序亦不旨在於限制。例如,某些操作可以依照不同的順序來進行,也可以對一些額外的操作進行適當修改。Please refer to Figures 4A to 4G, which are schematic diagrams of a manufacturing process for a flexible circuit board according to some embodiments of the present application. Hereinafter, flexible circuit board 400 is similar to flexible circuit board 100 shown in Figure 1, and the manufacturing process of Figures 4A to 4G can be used to manufacture flexible circuit board 100 as shown in Figure 1. It should be understood that although only some operations are briefly described below, the manufacturing process may actually include other additional operations, and the manufacturing sequence provided is not intended to be limiting. For example, certain operations may be performed in a different order, and some additional operations may be appropriately modified.

在圖4A中,首先提供第一電路基板410’。第一電路基板410’可先形成第一金屬層411,其例如是銅層。第一金屬層411例如為線路層,其可透過半加成法而形成,或者也可透過減成法而形成,即第一金屬層411可以是利用微影與蝕刻而形成。接著,設置犧牲層460於第一金屬層411的上方。在本申請之實施例中,在形成犧牲層460之前,可先在第一電路基板410’及第一金屬層411的上方形成可拉伸材料層450。In FIG4A , a first circuit substrate 410 ′ is first provided. A first metal layer 411 , such as a copper layer, may be formed on the first circuit substrate 410 ′. The first metal layer 411 , such as a circuit layer, may be formed by a semi-additive process or a subtractive process, i.e., the first metal layer 411 may be formed by lithography and etching. Next, a sacrificial layer 460 is disposed above the first metal layer 411 . In an embodiment of the present application, a stretchable material layer 450 may be formed above the first circuit substrate 410 ′ and the first metal layer 411 before forming the sacrificial layer 460 .

在圖4B中,接著在犧牲層460上形成多個槽孔461,以露出犧牲層460下方之第一金屬層411。具體而言,在包含可拉伸材料層450的實施例中,槽孔461還延伸穿過設置於第一電路基板410’及第一金屬層411上方的可拉伸材料層450,以露出第一金屬層411的部分表面。槽孔461可利用模具沖型、雷射開槽、雷射燒蝕、溼式蝕刻或乾式蝕刻等方式而形成,本申請不以此為限。In Figure 4B , multiple slots 461 are then formed in the sacrificial layer 460 to expose the first metal layer 411 beneath the sacrificial layer 460. Specifically, in the embodiment including the stretchable material layer 450, the slots 461 also extend through the stretchable material layer 450 disposed above the first circuit substrate 410' and the first metal layer 411 to expose a portion of the surface of the first metal layer 411. The slots 461 can be formed using methods such as die stamping, laser grooving, laser ablation, wet etching, or dry etching, but the present application is not limited thereto.

在圖4C中,在犧牲層460形成多個槽孔461之後,塗覆可拉伸材料451於每個槽孔461的內壁及犧牲層460的一部分表面,且可拉伸材料451延伸連接至犧牲層460下方之可拉伸材料層450。其中,槽孔461中未被可拉伸材料451塗覆的底部露出部分的第一金屬層411。至此,可拉伸材料層450與可拉伸材料451能形成如圖1所示的可拉伸部131,而槽孔461未被可拉伸材料451填滿的空間會形成如圖1所示的通道131a。在本申請之實施例中,可拉伸材料451與可拉伸材料層450所使用的材料可以相同或不同。當兩者材料相同時,可以更好地連接或融合兩者。In FIG4C , after a plurality of slots 461 are formed in the sacrificial layer 460, a stretchable material 451 is coated on the inner wall of each slot 461 and a portion of the surface of the sacrificial layer 460, and the stretchable material 451 extends to connect to the stretchable material layer 450 below the sacrificial layer 460. The first metal layer 411 is exposed at the bottom of the slot 461 not coated with the stretchable material 451. At this point, the stretchable material layer 450 and the stretchable material 451 can form the stretchable portion 131 shown in FIG1 , and the space in the slot 461 not filled with the stretchable material 451 forms the channel 131a shown in FIG1 . In the embodiment of the present application, the materials used for the stretchable material 451 and the stretchable material layer 450 can be the same or different. When the two materials are the same, they can be better connected or fused.

在圖4D中,在塗覆可拉伸材料451於槽孔461的內壁及犧牲層460的一部分表面之後,填充液態金屬材料432至每個槽孔461中,以使液態金屬材料432電性連接第一金屬層411。接著,設置第二金屬層421於可拉伸材料451及液態金屬材料432上,使液態金屬材料432在槽孔461中電性連接第二金屬層421。之後,利用加熱或加壓等方式密封液態金屬材料432於第一金屬層411、可拉伸材料451及第二金屬層421之間。液態金屬材料432可利用印刷、噴塗或澆注充型等方式而填充於每個槽孔461中。In Figure 4D , after stretchable material 451 is coated on the inner walls of slots 461 and a portion of the surface of sacrificial layer 460, liquid metal material 432 is filled into each slot 461, electrically connecting the liquid metal material 432 to the first metal layer 411. Next, a second metal layer 421 is disposed on the stretchable material 451 and the liquid metal material 432, electrically connecting the liquid metal material 432 to the second metal layer 421 within the slots 461. Subsequently, the liquid metal material 432 is sealed between the first metal layer 411, the stretchable material 451, and the second metal layer 421 using methods such as heat or pressure. The liquid metal material 432 can be filled into each slot 461 using methods such as printing, spraying, or pouring.

在圖4E中,在密封液態金屬材料432於第一金屬層411、可拉伸材料451及第二金屬層421之間後,在第二金屬層421的上方形成至少一電路結構470。電路結構470可透過增層法而形成,以使電路結構470包含多個電路層。其中,每個電路層皆可包含第二金屬層421。在一些實施例中,還包含在第一金屬層411上形成至少一電路結構(未標示),且同樣可透過增層法而形成。In Figure 4E , after sealing liquid metal material 432 between first metal layer 411, stretchable material 451, and second metal layer 421, at least one circuit structure 470 is formed above second metal layer 421. Circuit structure 470 can be formed using a build-up method, such that circuit structure 470 includes multiple circuit layers. Each circuit layer can include second metal layer 421. In some embodiments, at least one circuit structure (not shown) is also formed on first metal layer 411, and can also be formed using a build-up method.

在圖4F中,裝設多個電路元件440於電路結構470的電路層上。電路元件440可例如為連接器、電容器、電感器、電晶體、電阻器、二極體或任何所需之電子元件等,以在可撓式電路板400上實現功能性電路。In FIG4F , a plurality of circuit elements 440 are mounted on the circuit layer of the circuit structure 470. The circuit elements 440 may be, for example, connectors, capacitors, inductors, transistors, resistors, diodes, or any other desired electronic components to implement functional circuits on the flexible circuit board 400.

最後請參照圖4G,在形成電路結構470之後,移除犧牲層460。犧牲層460可利用剝離技術、化學物質處理,或是例如打磨、刮削等物理方式來移除。至此,可撓式電路板400基本上已完成。Finally, referring to FIG. 4G , after forming the circuit structure 470, the sacrificial layer 460 is removed. The sacrificial layer 460 can be removed using a peeling technique, chemical treatment, or physical methods such as grinding or scraping. At this point, the flexible circuit board 400 is essentially complete.

依據本申請之可撓式電路板及其製造方法,透過可拉伸部及填充於其中之液態金屬材料的特性,使得可撓式電路板經彎折或撓曲後不易產生裂紋或斷裂,有效提升可撓式電路板的耐彎折性、散熱性及抗震性。此外,本申請利用可拉伸部及液態金屬材料來取代排線及板對板連接器,並將液態金屬材料密封於兩電路基板之間,以實現電性連接,降低了接觸不良的風險,提升了電性連接的可靠性。The flexible circuit board and its manufacturing method of this application utilize the properties of the stretchable portion and the liquid metal material filled therein to make the flexible circuit board less susceptible to cracking or breaking after bending or flexing, effectively improving the flexible circuit board's bending resistance, heat dissipation, and vibration resistance. Furthermore, this application utilizes the stretchable portion and liquid metal material to replace flat cables and board-to-board connectors, sealing the liquid metal material between two circuit substrates to achieve an electrical connection, reducing the risk of poor contact and improving the reliability of the electrical connection.

雖然本申請已以各種實施例揭露如上,然其並非用以限定本申請,任何所屬技術領域中具有通常知識者,在不脫離本申請的精神和範圍內,當可作些許的更動與潤飾,故本申請的保護範圍當視後附的申請專利範圍所界定者為準。Although this application has been disclosed above through various embodiments, they are not intended to limit this application. Anyone with ordinary skill in the art may make slight modifications and improvements without departing from the spirit and scope of this application. Therefore, the scope of protection of this application shall be determined by the scope of the attached patent application.

100:可撓式電路板 110:第一電路基板 111:第一金屬層 120:第二電路基板 121:第二金屬層 130:電連接部 131:可拉伸部 131a:通道 131b:可拉伸線體 132:液態金屬材料 140:電路元件 400:可撓式電路板 410’:第一電路基板 411:第一金屬層 421:第二金屬層 432:液態金屬材料 440:電路元件 450:可拉伸材料層 451:可拉伸材料 460:犧牲層 461:槽孔 470:電路結構 d:距離 L:線長 W:寬度100: Flexible circuit board 110: First circuit substrate 111: First metal layer 120: Second circuit substrate 121: Second metal layer 130: Electrical connection 131: Stretchable portion 131a: Channel 131b: Stretchable wire 132: Liquid metal material 140: Circuit component 400: Flexible circuit board 410': First circuit substrate 411: First metal layer 421: Second metal layer 432: Liquid metal material 440: Circuit component 450: Stretchable material layer 451: Stretchable material 460: Sacrificial layer 461: Slot 470: Circuit structure d: Distance L: Cable length W: Width

為讓本發明之上述和其他特徵、優點與實施例能更加淺顯易懂,所附圖式之說明如下: 圖1為根據本申請的一些實施例所繪示之可撓式電路板的剖面示意圖; 圖2為根據本申請的一些實施例所繪示之電連接部在第一電路基板及第二電路基板之間實現彎折時的示意圖; 圖3A為根據本申請的一些實施例所繪示之電連接部的可拉伸線體呈現旋轉佈線型態的示意圖; 圖3B為根據本申請的一些實施例所繪示之具有多個電連接部及電路之電子裝置的示意圖;以及 圖4A至圖4G為根據本申請的一些實施例所繪示之可撓式電路板的製造流程的示意圖。 To facilitate understanding of the above and other features, advantages, and embodiments of the present invention, the accompanying drawings are described as follows: Figure 1 is a schematic cross-sectional view of a flexible circuit board according to some embodiments of the present application; Figure 2 is a schematic view of an electrical connection portion bent between a first circuit substrate and a second circuit substrate according to some embodiments of the present application; Figure 3A is a schematic view of a stretchable wire of an electrical connection portion exhibiting a rotational wiring configuration according to some embodiments of the present application; Figure 3B is a schematic view of an electronic device having multiple electrical connections and circuits according to some embodiments of the present application; and Figures 4A to 4G are schematic views of a manufacturing process for a flexible circuit board according to some embodiments of the present application.

100:可撓式電路板 100: Flexible circuit board

110:第一電路基板 110: First circuit board

111:第一金屬層 111: First metal layer

120:第二電路基板 120: Second circuit board

121:第二金屬層 121: Second metal layer

130:電連接部 130: Electrical connection part

131:可拉伸部 131: Stretchable part

131a:通道 131a: Passageway

131b:可拉伸線體 131b: Stretchable wire

132:液態金屬材料 132: Liquid Metal Materials

140:電路元件 140: Circuit components

d:距離 d: distance

L:線長 L: Cable length

W:寬度 W: Width

Claims (10)

一種可撓式電路板,包含: 一第一電路基板,具有至少一第一金屬層; 一第二電路基板,具有至少一第二金屬層;以及 至少一電連接部,電性連接於所述第一電路基板及所述第二電路基板之間,並包含: 一可拉伸部,連接於所述第一電路基板與所述第二電路基板之間,並具有至少一通道,其中所述至少一通道連接所述第一金屬層與所述第二金屬層;以及 至少一液態金屬材料,填充於所述至少一通道中,其中所述至少一液態金屬材料電性連接於所述第一金屬層與所述第二金屬層之間。 A flexible circuit board comprises: a first circuit substrate having at least one first metal layer; a second circuit substrate having at least one second metal layer; and at least one electrical connection portion electrically connected between the first circuit substrate and the second circuit substrate, comprising: a stretchable portion connected between the first circuit substrate and the second circuit substrate, having at least one channel, wherein the at least one channel connects the first metal layer and the second metal layer; and at least one liquid metal material filled in the at least one channel, wherein the at least one liquid metal material electrically connects between the first metal layer and the second metal layer. 如請求項1所述之可撓式電路板,其中所述可拉伸部包含: 多條可拉伸線體,且其中所述多條可拉伸線體每一條包含所述通道,所述多條可拉伸線體與所述第一電路基板、所述第二電路基板密封所述液態金屬材料。 The flexible circuit board of claim 1, wherein the stretchable portion comprises: A plurality of stretchable wires, wherein each of the plurality of stretchable wires comprises the channel, and the plurality of stretchable wires, the first circuit substrate, and the second circuit substrate seal the liquid metal material. 如請求項2所述之可撓式電路板,其中任相鄰兩條所述多條可拉伸線體之間的距離大於或等於20微米。A flexible circuit board as described in claim 2, wherein the distance between any two adjacent stretchable wires is greater than or equal to 20 microns. 如請求項2所述之可撓式電路板,其中所述多條可拉伸線體每一條具有一寬度,且所述寬度隨著所述多條可拉伸線體被拉伸而減少。A flexible circuit board as described in claim 2, wherein each of the plurality of stretchable wires has a width, and the width decreases as the plurality of stretchable wires are stretched. 如請求項2所述之可撓式電路板,其中所述多條可拉伸線體每一條具有一線長,且所述多條可拉伸線體每一條的一可拉伸長度小於或等於1.5倍的該線長。A flexible circuit board as described in claim 2, wherein each of the multiple stretchable wires has a wire length, and a stretchable length of each of the multiple stretchable wires is less than or equal to 1.5 times the wire length. 如請求項2所述之可撓式電路板,其中所述多條可拉伸線體每一條及所述液態金屬材料在彎折前具有一第一電阻值,所述多條可拉伸線體每一條及所述液態金屬材料在彎折後具有一第二電阻值,且所述第一電阻值與所述第二電阻值相同。A flexible circuit board as described in claim 2, wherein each of the multiple stretchable wires and the liquid metal material has a first resistance value before bending, and each of the multiple stretchable wires and the liquid metal material has a second resistance value after bending, and the first resistance value is the same as the second resistance value. 一種可撓式電路板的製造方法,包含: 提供一第一電路基板,所述第一電路基板設置有一第一金屬層; 設置一可拉伸材料層於所述第一金屬層的上方; 設置一犧牲層於所述可拉伸材料層的上方; 在所述犧牲層上形成多個槽孔,其中所述多個槽孔露出部分所述第一金屬層; 在所述犧牲層上形成所述多個槽孔之後,塗覆一可拉伸材料於所述多個槽孔的一內壁及所述犧牲層的一部分表面,其中所述多個槽孔中未被所述可拉伸材料塗覆的一底部露出部分所述第一金屬層; 在塗覆所述可拉伸材料於所述多個槽孔的所述內壁及所述犧牲層的所述部分表面之後,填充一液態金屬材料至所述多個槽孔中,以使所述液態金屬材料電性連接所述第一金屬層; 設置一第二金屬層於所述可拉伸材料及所述液態金屬材料上,使所述液態金屬材料在所述槽孔中更電性連接所述第二金屬層,並密封所述液態金屬材料於所述第一金屬層、所述可拉伸材料及所述第二金屬層之間; 於所述第二金屬層的上方形成至少一電路結構;以及 在形成所述至少一電路結構之後,移除所述犧牲層。 A method for manufacturing a flexible circuit board comprises: Providing a first circuit substrate, wherein the first circuit substrate is provided with a first metal layer; Disposing a stretchable material layer above the first metal layer; Disposing a sacrificial layer above the stretchable material layer; Forming a plurality of slots in the sacrificial layer, wherein the slots partially expose the first metal layer; After forming the slots in the sacrificial layer, coating an inner wall of the slots and a portion of the surface of the sacrificial layer with a stretchable material, wherein a bottom portion of the slots not coated with the stretchable material exposes a portion of the first metal layer; After coating the inner walls of the plurality of slots and the portion of the surface of the sacrificial layer with the stretchable material, a liquid metal material is filled into the plurality of slots so that the liquid metal material is electrically connected to the first metal layer. A second metal layer is disposed over the stretchable material and the liquid metal material so that the liquid metal material in the slots is further electrically connected to the second metal layer and the liquid metal material is sealed between the first metal layer, the stretchable material, and the second metal layer. At least one circuit structure is formed above the second metal layer. After forming the at least one circuit structure, the sacrificial layer is removed. 如請求項7所述之製造方法,其中還包含: 利用一增層法形成所述電路結構,使所述電路結構包含多個電路層。 The manufacturing method of claim 7 further comprises: Forming the circuit structure using a build-up method, such that the circuit structure includes multiple circuit layers. 如請求項8所述之製造方法,其中還包含: 裝設多個電路元件於所述多個電路層上。 The manufacturing method of claim 8 further comprises: Installing a plurality of circuit components on the plurality of circuit layers. 如請求項7所述之製造方法,其中所述至少一電路結構為至少一第一電路結構,所述製造方法還包含: 在所述第一金屬層上形成至少一第二電路結構。 The manufacturing method of claim 7, wherein the at least one circuit structure is at least one first circuit structure, further comprising: forming at least one second circuit structure on the first metal layer.
TW113117244A 2024-05-09 Flexible circuit board and method of manufacturing thereof TWI899991B (en)

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Publication number Priority date Publication date Assignee Title
CN117641771A (en) 2022-08-19 2024-03-01 宏启胜精密电子(秦皇岛)有限公司 Flexible circuit board, preparation method thereof and display module

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117641771A (en) 2022-08-19 2024-03-01 宏启胜精密电子(秦皇岛)有限公司 Flexible circuit board, preparation method thereof and display module

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