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TWI898839B - Chip type thermal conductive patch and method for manufacturing the same - Google Patents

Chip type thermal conductive patch and method for manufacturing the same

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Publication number
TWI898839B
TWI898839B TW113135514A TW113135514A TWI898839B TW I898839 B TWI898839 B TW I898839B TW 113135514 A TW113135514 A TW 113135514A TW 113135514 A TW113135514 A TW 113135514A TW I898839 B TWI898839 B TW I898839B
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Taiwan
Prior art keywords
trench
thermally conductive
copper sheet
chip
insulating
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TW113135514A
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Chinese (zh)
Inventor
蕭名宏
徐瑞岡
楊竣凱
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國巨股份有限公司
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Priority to TW113135514A priority Critical patent/TWI898839B/en
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Publication of TWI898839B publication Critical patent/TWI898839B/en

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Abstract

A chip type thermal conductive patch includes a first copper sheet, a second copper sheet, a thermally conductive and insulating double-sided adhesion film, an insulating solder resist protective layer, a first terminal electrode, and a second terminal electrode. The first copper sheet has a first groove to divide the first copper sheet into a first portion and a second portion, which are separated from each other. The second copper sheet has a second groove to divide the second copper sheet into a third portion and a fourth portion, which are separated from each other. The thermally conductive and insulating double-sided adhesion film is sandwiched between the first copper sheet and the second copper sheet to form a stacked structure. The stacked structure has a central axis, and the first groove and the second groove are respectively located on opposite sides of the central axis. The stacked structure includes a middle portion, and a first end portion and a second end portion located on opposite sides of the middle portion. The insulating solder resist protective layer covers the middle portion and fills the first second groove and the second groove. The first terminal electrode covers the first end portion. The second terminal electrode covers the second end portion.

Description

晶片型導熱貼片及其製造方法Chip-type thermal conductive patch and manufacturing method thereof

本揭露是有關於一種導熱元件,且特別是有關於一種晶片型導熱貼片及其製造方法。 This disclosure relates to a thermally conductive component, and more particularly to a chip-type thermally conductive patch and its manufacturing method.

隨著電路的應用設計越來越複雜化,因此電路板的發熱源也越來越多與複雜化。為了讓熱有效的傳導或分散,必須使用絕緣的導熱貼片或絕緣的陶瓷材料來增加導熱或熱流。 As circuit applications become increasingly complex, the sources of heat generated within circuit boards are also becoming more numerous and complex. To effectively conduct or disperse heat, insulating thermal pads or insulating ceramic materials must be used to increase thermal conductivity or heat flow.

晶片型導熱貼片主要可包含絕緣散熱承載體與一對可焊接之端電極。目前市售之晶片型導熱貼片皆是以高導熱之陶瓷基板作為絕緣散熱承載體。晶片型導熱貼片之導熱主要是以基板當作傳遞介質,因此基板之材料的導熱係數便決定了其熱傳導的能力。 Chip-type thermal pads primarily consist of an insulating heat sink and a pair of solderable terminal electrodes. Currently available chip-type thermal pads all utilize a highly thermally conductive ceramic substrate as the insulating heat sink. Chip-type thermal pads primarily utilize the substrate as a transfer medium, so the thermal conductivity of the substrate material determines their heat transfer capabilities.

高導熱之陶瓷基板的材料主要為氮化鋁(AlN)與碳化矽(SiC)。氮化鋁之導熱係數最高為230W/mK,而碳化矽之導熱係數最高為350W/mK。氮化鋁與碳化矽的成本高,且氮化鋁與碳化矽之表面與金屬之間的結合力不 如傳統氧化鋁(Al2O3)基板。因此,若要於氮化鋁與碳化矽等高導熱基板上形成優良結合力的電極,需先對基板之表面進行改質處理,例如粗化處理或氧化處理。但這樣的改質處理又會增加導熱貼片的生產成本。 The main materials for high thermal conductivity ceramic substrates are aluminum nitride (AlN) and silicon carbide (SiC). The maximum thermal conductivity of aluminum nitride is 230W/mK, while that of silicon carbide is 350W/mK. The cost of aluminum nitride and silicon carbide is high, and the bonding strength between the surface of aluminum nitride and silicon carbide and metal is not as good as that of traditional aluminum oxide ( Al2O3 ) substrates. Therefore, to form an electrode with excellent bonding strength on highly thermally conductive substrates such as aluminum nitride and silicon carbide, the substrate surface must first be modified, such as roughening or oxidation. However, such modification will increase the production cost of the thermal pad.

本揭露之一目的就是在提供一種晶片型導熱貼片及其製造方法,其以導熱絕緣雙面貼合膜貼合二銅片所形成之堆疊結構取代傳統之陶瓷基板。由於銅之導熱係數遠大於陶瓷基板之導熱係數,因此本晶片型導熱貼片具有優異的導熱性能,可有效傳導熱。 One objective of this disclosure is to provide a chip-type thermal patch and its manufacturing method. This chip-type thermal patch utilizes a stacked structure formed by laminating two copper sheets with a thermally conductive, insulating double-sided lamination film, replacing the traditional ceramic substrate. Because copper's thermal conductivity is significantly greater than that of the ceramic substrate, this chip-type thermal patch exhibits excellent thermal conductivity and effectively conducts heat.

本揭露之另一目的是在提供一種晶片型導熱貼片,其可利用表面黏著技術(SMT)直接焊接在電路板上,來同時提供散熱與電路隔離,因此應用性極佳。 Another object of this disclosure is to provide a chip-type thermal pad that can be directly soldered to a circuit board using surface mount technology (SMT) to simultaneously provide heat dissipation and circuit isolation, thus offering excellent applicability.

根據本揭露之上述目的,提出一種晶片型導熱貼片,包含第一銅片、第二銅片、導熱絕緣雙面貼合膜、絕緣防焊保護層、第一端電極、以及第二端電極。第一銅片具有第一溝槽。第一溝槽將第一銅片分成彼此分隔之第一部分與第二部分。第二銅片具有第二溝槽。第二溝槽將第二銅片分成彼此相隔之第三部分與第四部分。導熱絕緣雙面貼合膜夾設在第一銅片與第二銅片之間,以將第二銅片接合在第一銅片之上,而形成堆疊結構。此堆疊結構具有中心軸,第一溝槽與第二溝槽分別位於中心軸之二側。此堆疊結構包含中間部、以及分別位於中間部之相對二側之第一 端部、與第二端部。絕緣防焊保護層包覆中間部,而使第一端部與第二端部暴露出。絕緣防焊保護層填入第一溝槽與第二溝槽。第一端電極包覆第一端部及部分絕緣防焊保護層包覆之中間部。第二端電極包覆第二端部及部分絕緣防焊保護層包覆之中間部。 In accordance with the above-mentioned purpose of the present disclosure, a chip-type thermally conductive patch is proposed, comprising a first copper sheet, a second copper sheet, a thermally conductive insulating double-sided adhesive film, an insulating solder mask, a first end electrode, and a second end electrode. The first copper sheet has a first trench. The first trench divides the first copper sheet into a first part and a second part separated from each other. The second copper sheet has a second trench. The second trench divides the second copper sheet into a third part and a fourth part separated from each other. The thermally conductive insulating double-sided adhesive film is sandwiched between the first copper sheet and the second copper sheet to bond the second copper sheet to the first copper sheet to form a stacked structure. This stacked structure has a central axis, and the first trench and the second trench are respectively located on both sides of the central axis. The stacked structure includes a central portion, and first and second ends located on opposite sides of the central portion. An insulating solder mask layer covers the central portion, leaving the first and second ends exposed. The insulating solder mask layer fills the first and second trenches. A first end electrode covers the first end and a portion of the central portion covered by the insulating solder mask layer. A second end electrode covers the second end and a portion of the central portion covered by the insulating solder mask layer.

依據本揭露之一實施例,上述之第一溝槽與第二溝槽相對於中心軸對稱。 According to one embodiment of the present disclosure, the first trench and the second trench are symmetrical with respect to the central axis.

依據本揭露之一實施例,上述之堆疊結構具有彼此相對之第一短邊與第二短邊,第一溝槽與第二溝槽分別鄰近第一短邊與第二短邊。第一溝槽與第一短邊之第一距離、以及第二溝槽與第二短邊之第二距離均為堆疊結構之長度的1/4至1/3。 According to one embodiment of the present disclosure, the stacked structure has a first short side and a second short side facing each other, and the first trench and the second trench are adjacent to the first short side and the second short side, respectively. A first distance between the first trench and the first short side, and a second distance between the second trench and the second short side, are both 1/4 to 1/3 of the length of the stacked structure.

依據本揭露之一實施例,上述之第一溝槽與第二溝槽之寬度均為50μm至300μm。 According to one embodiment of the present disclosure, the width of the first trench and the second trench are both 50 μm to 300 μm.

依據本揭露之一實施例,上述之導熱絕緣雙面貼合膜之厚度為15μm至30μm。 According to one embodiment of the present disclosure, the thickness of the thermally conductive and insulating double-sided lamination film is 15 μm to 30 μm.

依據本揭露之一實施例,上述之導熱絕緣雙面貼合膜之熱導係數大於3W/mK。 According to one embodiment of the present disclosure, the thermal conductivity of the aforementioned thermally conductive insulating double-sided lamination film is greater than 3W/mK.

依據本揭露之一實施例,上述之導熱絕緣雙面貼合膜之材料內含石墨片及/或石墨烯,且導熱絕緣雙面貼合膜之含碳量大於90%。 According to one embodiment of the present disclosure, the material of the aforementioned thermally conductive insulating double-sided lamination film contains graphite sheets and/or graphene, and the carbon content of the thermally conductive insulating double-sided lamination film is greater than 90%.

依據本揭露之一實施例,上述之絕緣防焊保護層之材料包含環氧樹脂(epoxy)、樹脂(resin)、或聚醯亞胺(PI)。 According to one embodiment of the present disclosure, the material of the insulating solder mask layer includes epoxy, resin, or polyimide (PI).

根據本揭露之上述目的,另提出一種晶片型導熱貼片之製造方法。在此方法中,將第一銅片與第二銅片分別貼合在導熱絕緣雙面貼合膜之下表面與上表面上,而形成堆疊結構。此堆疊結構具有中心軸。此堆疊結構包含中間部、以及分別位於中間部之相對二側之第一端部與第二端部。形成第一溝槽於第一銅片中,以將第一銅片分成彼此分隔之第一部分與第二部分。形成第二溝槽於第二銅片中,以將第二銅片分成彼此分隔之第三部分與第四部分。第一溝槽與第二溝槽分別位於中心軸之二側。形成絕緣防焊保護層包覆中間部並填入第一溝槽與第二溝槽。形成第一端電極包覆第一端部及部分絕緣防焊保護層包覆之中間部。形成第二端電極包覆第二端部及部分絕緣防焊保護層包覆之中間部。 In accordance with the above-mentioned purpose of the present disclosure, a method for manufacturing a chip-type thermally conductive patch is also proposed. In this method, a first copper sheet and a second copper sheet are respectively bonded to the lower surface and the upper surface of a thermally conductive insulating double-sided bonding film to form a stacking structure. This stacking structure has a central axis. This stacking structure includes a middle portion, and a first end portion and a second end portion located on opposite sides of the middle portion. A first groove is formed in the first copper sheet to divide the first copper sheet into a first part and a second part separated from each other. A second groove is formed in the second copper sheet to divide the second copper sheet into a third part and a fourth part separated from each other. The first groove and the second groove are respectively located on both sides of the central axis. An insulating solder mask is formed to cover the middle portion and fill the first groove and the second groove. A first end electrode is formed to cover the first end portion and a portion of the middle portion is covered by the insulating solder mask protective layer. A second end electrode is formed to cover the second end portion and a portion of the middle portion is covered by the insulating solder mask protective layer.

依據本揭露之一實施例,上述形成第一溝槽與形成第二溝槽均包含利用微影製程與蝕刻製程。 According to one embodiment of the present disclosure, the formation of the first trench and the formation of the second trench both include utilizing a lithography process and an etching process.

依據本揭露之一實施例,上述之第一溝槽與第二溝槽相對於中心軸對稱。 According to one embodiment of the present disclosure, the first trench and the second trench are symmetrical with respect to the central axis.

依據本揭露之一實施例,上述之堆疊結構具有彼此相對之第一短邊與第二短邊。形成第一溝槽包含使第一溝槽鄰近第一短邊且與第一短邊相隔第一距離。形成第二溝槽包含使第二溝槽鄰近第二短邊且與第二短邊相隔第二距離。第一距離與第二距離均為堆疊結構之長度的1/4至1/3。 According to one embodiment of the present disclosure, the stacked structure has a first short side and a second short side facing each other. Forming the first trench includes forming the first trench adjacent to the first short side and spaced a first distance from the first short side. Forming the second trench includes forming the second trench adjacent to the second short side and spaced a second distance from the second short side. Both the first distance and the second distance are 1/4 to 1/3 of the length of the stacked structure.

依據本揭露之一實施例,上述之第一溝槽與第二溝 槽之寬度均為50μm至300μm。 According to one embodiment of the present disclosure, the width of the first trench and the second trench is 50 μm to 300 μm.

依據本揭露之一實施例,上述之導熱絕緣雙面貼合膜之熱導係數大於3W/mK。此導熱絕緣雙面貼合膜之材料內含石墨片及/或石墨烯,導熱絕緣雙面貼合膜之含碳量大於90%。 According to one embodiment of the present disclosure, the thermal conductivity of the aforementioned thermally conductive insulating double-sided laminate film is greater than 3 W/mK. The material of the thermally conductive insulating double-sided laminate film contains graphite flakes and/or graphene, and the carbon content of the thermally conductive insulating double-sided laminate film is greater than 90%.

依據本揭露之一實施例,上述形成第一端電極與形成第二端電極均包含形成銅層、形成鎳層覆蓋銅層、以及形成錫層覆蓋鎳層。銅層之上表面與絕緣防焊保護層之上表面之間之距離等於或大於5μm。 According to one embodiment of the present disclosure, forming the first terminal electrode and forming the second terminal electrode both include forming a copper layer, forming a nickel layer covering the copper layer, and forming a tin layer covering the nickel layer. The distance between the upper surface of the copper layer and the upper surface of the insulating solder mask layer is equal to or greater than 5 μm.

100:晶片型導熱貼片 100: Chip-type thermal pad

110:第一銅片 110: The First Copper Plate

112:第一溝槽 112: First Groove

114:第一部分 114: Part 1

116:第二部分 116: Part 2

120:第二銅片 120: Second Copper Plate

122:第二溝槽 122: Second Groove

124:第三部分 124: Part 3

126:第四部分 126: Part 4

130:導熱絕緣雙面貼合膜 130: Thermally conductive and insulating double-sided laminating film

132:下表面 132: Lower surface

134:上表面 134: Upper surface

140:絕緣防焊保護層 140: Insulation solder mask protective layer

142:上表面 142: Upper surface

144:絕緣防焊保護材料 144: Insulation solder mask protective material

150:第一端電極 150: First electrode

152:銅層 152:Copper layer

152t:上表面 152t: Upper surface

154:鎳層 154: Nickel layer

156:錫層 156: Tin layer

160:第二端電極 160: Second electrode

162:銅層 162:Copper layer

162t:上表面 162t: Upper surface

164:鎳層 164: Nickel layer

166:錫層 166: Tin layer

170:堆疊結構 170: Stacked Structure

170a:第一短邊 170a: First short side

170b:第二短邊 170b: Second short side

172:中間部 172:Middle part

174:第一端部 174: First end

176:第二端部 176: Second end

180:光阻層 180: Photoresist layer

182:光阻層 182: Photoresist layer

CA:中心軸 CA: Central axis

d1:第一距離 d1: First distance

d2:第二距離 d2: Second distance

H:熱 H:Hot

L:長度 L: Length

t1:厚度 t1: thickness

t2:厚度 t2: Thickness

t3:厚度 t3: Thickness

W:寬度 W: Width

w1:寬度 w1: width

w2:寬度 w2: width

從以下結合附圖所做的詳細描述,可對本揭露之態樣有更佳的了解。需注意的是,根據業界的標準實務,各特徵並未依比例繪示。事實上,為了使討論更為清楚,各特徵的尺寸都可任意地增加或縮減。 A better understanding of the present disclosure can be gained from the following detailed description in conjunction with the accompanying drawings. It should be noted that, in accordance with standard industry practice, the various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or decreased to facilitate discussion.

〔圖1〕係繪示依照本揭露之一實施方式的一種晶片型導熱貼片的立體示意圖。 Figure 1 is a schematic three-dimensional diagram of a chip-type thermal pad according to one embodiment of the present disclosure.

〔圖2〕係繪示依照本揭露之一實施方式的一種晶片型導熱貼片的上視示意圖。 Figure 2 is a schematic top view of a chip-type thermal pad according to one embodiment of the present disclosure.

〔圖3〕係繪示依照本揭露之一實施方式的一種晶片型導熱貼片的下視示意圖。 Figure 3 shows a schematic bottom view of a chip-type thermal pad according to one embodiment of the present disclosure.

〔圖4〕係繪示依照本揭露之一實施方式的一種晶片型導熱貼片的剖面示意圖。 Figure 4 is a schematic cross-sectional view of a chip-type thermal pad according to one embodiment of the present disclosure.

〔圖5〕係繪示依照本揭露之一實施方式的一種晶片型導熱貼片之堆疊結構的上視示意圖。 Figure 5 is a top view schematically illustrating a stacked structure of a chip-type thermal pad according to one embodiment of the present disclosure.

〔圖6〕係繪示依照本揭露之一實施方式的一種晶片型導熱貼片之熱傳導的示意圖。 Figure 6 is a schematic diagram illustrating heat conduction of a chip-type thermally conductive patch according to one embodiment of the present disclosure.

〔圖7〕至〔圖9〕與〔圖10A〕係分別繪示依照本揭露之一實施方式的一種晶片型導熱貼片在製造時之一些階段的剖面示意圖。 Figures 7 to 9 and Figure 10A are schematic cross-sectional views of various stages in the manufacturing process of a chip-type thermal pad according to an embodiment of the present disclosure.

〔圖10B〕係繪示圖10A之結構的上視示意圖。 Figure 10B is a schematic top view of the structure of Figure 10A.

〔圖11〕與〔圖12A〕係分別繪示依照本揭露之一實施方式的一種晶片型導熱貼片在製造時之另一些階段的剖面示意圖。 Figures 11 and 12A are schematic cross-sectional views of other stages in the manufacturing of a chip-type thermal pad according to an embodiment of the present disclosure.

〔圖12B〕係繪示圖12A之結構的上視示意圖。 Figure 12B is a schematic top view of the structure of Figure 12A.

〔圖13A〕係繪示依照本揭露之一實施方式的一種晶片型導熱貼片在製造時之一階段的剖面示意圖。 Figure 13A is a schematic cross-sectional view of a chip-type thermal pad during a manufacturing process according to an embodiment of the present disclosure.

〔圖13B〕係繪示圖13A之結構的上視示意圖。 Figure 13B is a schematic top view of the structure of Figure 13A.

以下仔細討論本揭露的實施例。然而,可以理解的是,實施例提供許多可應用的概念,其可實施於各式各樣的特定內容中。所討論與揭示的實施例僅供說明,並非用以限定本揭露之範圍。本揭露的所有實施例揭露多種不同特徵,但這些特徵可依需求而單獨實施或結合實施。 The following discusses embodiments of the present disclosure in detail. However, it should be understood that the embodiments provide many applicable concepts that can be implemented in a wide variety of specific contexts. The embodiments discussed and disclosed are for illustrative purposes only and are not intended to limit the scope of the present disclosure. All embodiments of the present disclosure disclose various features, which can be implemented individually or in combination as needed.

另外,關於本文中所使用之「第一」、「第二」、...等,並非特別指次序或順位的意思,其僅為了區別以相同 技術用語描述的元件或操作。 In addition, the terms "first," "second," etc., used herein do not specifically refer to order or sequence; they are merely used to distinguish between elements or operations described using the same technical term.

本揭露所敘述之二元件之間的空間關係不僅適用於圖式所繪示之方位,亦適用於圖式所未呈現之方位,例如倒置之方位。此外,本揭露所稱二個部件的「連接」、「電性連接」、或之類用語並非僅限制於此二者為直接的連接或電性連接,亦可視需求而包含間接的連接或電性連接。 The spatial relationship between two components described in this disclosure applies not only to the orientations shown in the drawings but also to orientations not shown, such as inverted orientations. Furthermore, terms such as "connection," "electrical connection," or similar terms between two components in this disclosure are not limited to direct or electrical connections between the two components but may also include indirect or electrical connections as needed.

請參照圖1至圖4,其係分別繪示依照本揭露之一實施方式的一種晶片型導熱貼片100的立體示意圖、上視示意圖、下視示意圖、與剖面示意圖。晶片型導熱貼片100主要可包含第一銅片110、第二銅片120、導熱絕緣雙面貼合膜130、絕緣防焊保護層140、第一端電極150、以及第二端電極160。 Please refer to Figures 1 to 4 , which respectively illustrate a schematic perspective view, a top view, a bottom view, and a cross-sectional view of a chip-type thermally conductive patch 100 according to one embodiment of the present disclosure. The chip-type thermally conductive patch 100 primarily includes a first copper sheet 110, a second copper sheet 120, a thermally conductive insulating double-sided lamination film 130, an insulating solder mask 140, a first end electrode 150, and a second end electrode 160.

如圖3與圖4所示,第一銅片110具有第一溝槽112。第一溝槽112縱向貫穿第一銅片110,而將第一銅片110分成第一部分114與第二部分116。第一溝槽112沿著第一銅片110之厚度t1的方向貫穿第一銅片110,而使第一部分114與第二部分116彼此分隔。第一銅片110之厚度t1可例如為100μm至300μm。第一銅片110之形狀可根據產品需求設計。在一些實施例中,第一銅片110之形狀為矩形。 As shown in Figures 3 and 4 , the first copper sheet 110 has a first trench 112. The first trench 112 extends longitudinally through the first copper sheet 110, dividing the first copper sheet 110 into a first portion 114 and a second portion 116. The first trench 112 extends through the first copper sheet 110 along the thickness t1 of the first copper sheet 110, separating the first portion 114 from the second portion 116. The thickness t1 of the first copper sheet 110 can be, for example, 100 μm to 300 μm. The shape of the first copper sheet 110 can be designed based on product requirements. In some embodiments, the first copper sheet 110 is rectangular.

第一溝槽112之寬度w1可例如為50μm至300μm。第一溝槽112之寬度w1若小於50μm,有可能因為蝕刻製程的限制,造成第一溝槽112的蝕刻不完全,而 導致第一部分114與第二部分116導通。第一溝槽112之寬度w1若大於300μm,會使得第一銅片110的面積縮減過多,導致第一銅片110與第二銅片120之間的交疊面積變小,造成第一銅片110與第二銅片120之熱的垂直傳導性不佳。 The width w1 of the first trench 112 can be, for example, 50 μm to 300 μm. If the width w1 of the first trench 112 is less than 50 μm, the etching process may limit the possibility of incomplete etching of the first trench 112, resulting in electrical conduction between the first portion 114 and the second portion 116. If the width w1 of the first trench 112 is greater than 300 μm, the area of the first copper sheet 110 is excessively reduced, resulting in a smaller overlap area between the first copper sheet 110 and the second copper sheet 120, and poor vertical heat conduction between the first copper sheet 110 and the second copper sheet 120.

第二銅片120之尺寸及形狀與第一銅片110之尺寸及形狀相同。在一些實施例中,如圖2與圖4所示,第二銅片120之形狀為矩形。第二銅片120具有第二溝槽122。第二溝槽122縱向貫穿第二銅片120,而將第二銅片120分成第三部分124與第四部分126。第二溝槽122沿著第二銅片120之厚度t2的方向貫穿第二銅片120,而使第三部分124與第四部分126彼此分隔。第二銅片120之厚度t2可例如為100μm至300μm。第二溝槽122之寬度w2可例如為50μm至300μm。第二溝槽122之寬度w2太小可能導致第三部分124與第四部分126未完全分隔,寬度w2太大則可能造成第一銅片110與第二銅片120之熱的垂直傳導性不佳。 The size and shape of the second copper sheet 120 are the same as the size and shape of the first copper sheet 110. In some embodiments, as shown in Figures 2 and 4, the shape of the second copper sheet 120 is rectangular. The second copper sheet 120 has a second trench 122. The second trench 122 penetrates the second copper sheet 120 vertically, dividing the second copper sheet 120 into a third portion 124 and a fourth portion 126. The second trench 122 penetrates the second copper sheet 120 along the direction of the thickness t2 of the second copper sheet 120, separating the third portion 124 and the fourth portion 126 from each other. The thickness t2 of the second copper sheet 120 can be, for example, 100 μm to 300 μm. The width w2 of the second trench 122 can be, for example, 50 μm to 300 μm. If the width w2 of the second trench 122 is too small, the third portion 124 and the fourth portion 126 may not be completely separated. If the width w2 is too large, the vertical heat conduction between the first copper plate 110 and the second copper plate 120 may be poor.

導熱絕緣雙面貼合膜130具有下表面132與上表面134,其中下表面132與上表面134均具有黏性。第一銅片110貼設在導熱絕緣雙面貼合膜130之下表面132,第二銅片120貼設在上表面134,使得導熱絕緣雙面貼合膜130夾設在第一銅片110與第二銅片120之間。第一溝槽112暴露出導熱絕緣雙面貼合膜130之下表面132的一部分,第二溝槽122則暴露出上表面134的一部分。 透過導熱絕緣雙面貼合膜130,可將第二銅片120接合在第一銅片110之上,而形成由第一銅片110、導熱絕緣雙面貼合膜130、與第二銅片120所構成之堆疊結構170。 The thermally conductive, insulating double-sided adhesive film 130 has a lower surface 132 and an upper surface 134, both of which are adhesive. The first copper sheet 110 is attached to the lower surface 132 of the thermally conductive, insulating double-sided adhesive film 130, and the second copper sheet 120 is attached to the upper surface 134, so that the thermally conductive, insulating double-sided adhesive film 130 is sandwiched between the first and second copper sheets 110, 120. The first groove 112 exposes a portion of the lower surface 132 of the thermally conductive, insulating double-sided adhesive film 130, while the second groove 122 exposes a portion of the upper surface 134. The second copper sheet 120 can be bonded to the first copper sheet 110 via the thermally conductive and insulating double-sided laminating film 130, forming a stacked structure 170 consisting of the first copper sheet 110, the thermally conductive and insulating double-sided laminating film 130, and the second copper sheet 120.

堆疊結構170具有中心軸CA。第一溝槽112與第二溝槽122分別位於中心軸CA之二側,即中心軸CA的左側與右側。在一些實施例中,第一溝槽112與第二溝槽122相對於中心軸CA對稱,即第一溝槽112與第二溝槽122彼此旋轉180度對稱。請一併參照圖5,其係繪示依照本揭露之一實施方式的一種晶片型導熱貼片100之堆疊結構170的上視示意圖。在一些實施例中,堆疊結構170為長方體結構,且具有長度L與寬度W。堆疊結構170具有彼此相對之第一短邊170a與第二短邊170b。第一溝槽112鄰近第一短邊170a,第二溝槽122鄰近第二短邊170b。 The stacking structure 170 has a central axis CA. The first trench 112 and the second trench 122 are located on either side of the central axis CA, i.e., on the left and right sides of the central axis CA, respectively. In some embodiments, the first trench 112 and the second trench 122 are symmetrical with respect to the central axis CA, i.e., the first trench 112 and the second trench 122 are symmetrical when rotated 180 degrees relative to each other. Please also refer to Figure 5, which is a top view of the stacking structure 170 of a chip-type thermal conductive patch 100 according to one embodiment of the present disclosure. In some embodiments, the stacking structure 170 is a rectangular parallelepiped structure having a length L and a width W. The stacking structure 170 has a first short side 170a and a second short side 170b that are opposite to each other. The first groove 112 is adjacent to the first short side 170a, and the second groove 122 is adjacent to the second short side 170b.

如圖4所示,第一溝槽112與第一短邊170a之間具有第一距離d1,第二溝槽122與第二短邊170b之間具有第二距離d2。第一距離d1與第二距離d2可相同。然,根據產品設計,第一距離d1與第二距離d2可不相同。在一些示範實施例中,第一距離d1與第二距離d2之範圍均為堆疊結構170之長度L的1/4至1/3。如圖4所示,堆疊結構170包含中間部172、第一端部174、與第二端部176,其中第一端部174與第二端部176分別位於中間部172的相對二側。第一溝槽112與第二溝槽122均位於中間部172中。 As shown in FIG4 , a first distance d1 is defined between the first trench 112 and the first short side 170a, and a second distance d2 is defined between the second trench 122 and the second short side 170b. The first distance d1 and the second distance d2 may be the same. However, depending on the product design, the first distance d1 and the second distance d2 may differ. In some exemplary embodiments, the first distance d1 and the second distance d2 are both within a range of 1/4 to 1/3 of the length L of the stacking structure 170. As shown in FIG4 , the stacking structure 170 includes a middle portion 172, a first end portion 174, and a second end portion 176, wherein the first end portion 174 and the second end portion 176 are located on opposite sides of the middle portion 172. The first groove 112 and the second groove 122 are both located in the middle portion 172.

第一溝槽112及第二溝槽122偏設於堆疊結構170上而分別鄰近第一短邊170a與第二短邊170b的設計,可增加第一銅片110與第二銅片120在中間部172的交疊面積,而可提升第一銅片110與第二銅片120之間的熱傳導效果。第一距離d1與第二距離d2的範圍設計為堆疊結構170之長度L的1/4至1/3,可兼顧端電極的尺寸規格、以及第一銅片110與第二銅片120之間的熱傳導效果。 The first and second trenches 112, 122 are offset from the stacking structure 170, adjacent to the first and second short sides 170a, 170b, respectively. This increases the overlapping area between the first and second copper sheets 110, 120 in the center portion 172, thereby enhancing heat conduction between the first and second copper sheets 110, 120. The first and second distances d1, d2 are designed to be between 1/4 and 1/3 of the length L of the stacking structure 170, taking into account both the size of the terminal electrodes and the heat conduction between the first and second copper sheets 110, 120.

在一些實施例中,導熱絕緣雙面貼合膜130的熱導係數大於3W/mK。在一些示範實施例中,導熱絕緣雙面貼合膜130之材料內含石墨片及/或石墨烯,且導熱絕緣雙面貼合膜130之含碳量大於90%。此外,導熱絕緣雙面貼合膜130之厚度t3不能太厚,以避免影響第一銅片110與第二銅片120之間的熱傳導。導熱絕緣雙面貼合膜130之厚度t3可例如為15μm至30μm。 In some embodiments, the thermal conductivity of the thermally conductive double-sided insulating film 130 is greater than 3 W/mK. In some exemplary embodiments, the material of the thermally conductive double-sided insulating film 130 includes graphite flakes and/or graphene, and the carbon content of the thermally conductive double-sided insulating film 130 is greater than 90%. Furthermore, the thickness t3 of the thermally conductive double-sided insulating film 130 should not be too thick to avoid affecting heat conduction between the first copper sheet 110 and the second copper sheet 120. The thickness t3 of the thermally conductive double-sided insulating film 130 can be, for example, 15 μm to 30 μm.

如圖2至圖4所示,絕緣防焊保護層140包覆堆疊結構170之中間部172,並使第一端部174與第二端部176暴露出。由於第一溝槽112與第二溝槽122均位於中間部172,因此絕緣防焊保護層140填入第一溝槽112與第二溝槽122。絕緣防焊保護層140具有上表面142。舉例而言,絕緣防焊保護層140之材料可包含環氧樹脂、樹脂、或聚醯亞胺。 As shown in Figures 2 to 4 , the insulating solder mask layer 140 covers the middle portion 172 of the stacked structure 170, leaving the first end 174 and the second end 176 exposed. Because the first trench 112 and the second trench 122 are both located in the middle portion 172, the insulating solder mask layer 140 fills the first trench 112 and the second trench 122. The insulating solder mask layer 140 has an upper surface 142. For example, the insulating solder mask layer 140 may be made of epoxy, resin, or polyimide.

如圖4所示,第一端電極150包覆堆疊結構170之第一端部174。第一端電極150可覆蓋絕緣防焊保護層 140之鄰近第二短邊170b的外緣部分。舉例而言,第一端電極150可包含銅層152、鎳層154、與錫層156,以利焊接於例如電路板等外部裝置上。銅層152先包覆住暴露出之第一端部174,鎳層154覆蓋住銅層152,錫層156則覆蓋住鎳層154。銅層152具有上表面152t,其中上表面152t高於絕緣防焊保護層140之上表面142。 As shown in Figure 4 , the first end electrode 150 covers the first end 174 of the stacked structure 170 . The first end electrode 150 may cover the outer edge of the insulating solder mask layer 140 adjacent to the second short side 170b. For example, the first end electrode 150 may include a copper layer 152, a nickel layer 154, and a tin layer 156 to facilitate soldering to an external device such as a circuit board. The copper layer 152 first covers the exposed first end 174, the nickel layer 154 covers the copper layer 152, and the tin layer 156 covers the nickel layer 154. The copper layer 152 has an upper surface 152t, wherein the upper surface 152t is higher than the upper surface 142 of the insulating solder mask layer 140.

如圖4所示,第二端電極160包覆第二端部176。第二端電極160可覆蓋絕緣防焊保護層140之鄰近第一短邊170a的外緣部分。舉例而言,第二端電極160可包含銅層162、鎳層164、與錫層166,以利焊接於例如電路板等外部裝置上。銅層162先包覆住暴露出之第二端部176,鎳層164覆蓋住銅層162,錫層166覆蓋住鎳層164。銅層162具有上表面162t,其中上表面162t高於絕緣防焊保護層140之上表面142。 As shown in Figure 4 , the second end electrode 160 covers the second end portion 176 . The second end electrode 160 may cover the outer edge of the insulating solder mask layer 140 adjacent to the first short side 170a. For example, the second end electrode 160 may include a copper layer 162, a nickel layer 164, and a tin layer 166 to facilitate soldering to an external device such as a circuit board. The copper layer 162 first covers the exposed second end portion 176, the nickel layer 164 covers the copper layer 162, and the tin layer 166 covers the nickel layer 164. The copper layer 162 has an upper surface 162t, wherein the upper surface 162t is higher than the upper surface 142 of the insulating solder mask layer 140.

銅層152之上表面152t與絕緣防焊保護層140之上表面142之間之距離、以及銅層162之上表面162t與絕緣防焊保護層140之上表面142之間之距離均等於或大於5μm,以確保晶片型導熱貼片100與外部裝置的接合可靠度。 The distance between the upper surface 152t of the copper layer 152 and the upper surface 142 of the insulating solder mask layer 140, as well as the distance between the upper surface 162t of the copper layer 162 and the upper surface 142 of the insulating solder mask layer 140, are both equal to or greater than 5 μm to ensure reliable bonding between the chip-type thermal pad 100 and external devices.

請參照圖6,其係繪示依照本揭露之一實施方式的一種晶片型導熱貼片100之熱傳導的示意圖。當晶片型導熱貼片100設置在電路板等外部裝置上時,從外部裝置傳導至晶片型導熱貼片100的熱H可例如從第一銅片110之第一部分114,經由夾設在位於堆疊結構170之中間部 172中之第一銅片110與第二銅片120之間的導熱絕緣雙面貼合膜130,而傳導至第二銅片120之第四部分126,再散逸到外部。藉此,熱H可從晶片型導熱貼片100之一側傳導至另一側。 Please refer to Figure 6, which is a schematic diagram illustrating heat conduction within a chip-type thermal patch 100 according to an embodiment of the present disclosure. When the chip-type thermal patch 100 is mounted on an external device such as a circuit board, heat H transferred from the external device to the chip-type thermal patch 100 can be conducted, for example, from the first portion 114 of the first copper sheet 110, through the thermally conductive double-sided adhesive film 130 sandwiched between the first and second copper sheets 110, 120, in the middle portion 172 of the stacked structure 170, to the fourth portion 126 of the second copper sheet 120, and then dissipated externally. In this manner, heat H can be conducted from one side of the chip-type thermal patch 100 to the other.

此外,透過第一溝槽112與第二溝槽122分別電性隔離第一銅片110之第一部分114與第二部分116、以及第二銅片120之第三部分124與第四部分126,並利用導熱絕緣雙面貼合膜130電性隔離第一銅片110與第二銅片120,可使晶片型導熱貼片100兼具散熱與電路隔離的功能。 Furthermore, the first and second trenches 112 and 122 electrically isolate the first and second portions 114 and 116 of the first copper sheet 110, and the third and fourth portions 124 and 126 of the second copper sheet 120, respectively. Furthermore, the thermally conductive double-sided lamination film 130 electrically isolates the first and second copper sheets 110 and 120, enabling the chip-type thermal pad 100 to achieve both heat dissipation and circuit isolation.

請參照圖7至圖9、圖10A、圖11、圖12A、與圖13A,其係分別繪示依照本揭露之一實施方式的一種晶片型導熱貼片100在製造時之各階段的剖面示意圖。在一些實施例中,製作如圖1至圖4所示之晶片型導熱貼片100時,可先提供如上所述之第一銅片110、第二銅片120、與導熱絕緣雙面貼合膜130,如圖7所示。再將第一銅片110貼合在導熱絕緣雙面貼合膜130之下表面132,以及將第二銅片120貼合在導熱絕緣雙面貼合膜130之上表面134。藉此,第二銅片120可接合在第一銅片110之上,並與導熱絕緣雙面貼合膜130及第一銅片110構成堆疊結構170。堆疊結構170具有中心軸CA。此外,堆疊結構170可分成中間部172,以及分別位於中間部172之相對二側的第一端部174與第二端部176。第一端部174與第二端部176可供後續之端電極設置。 Please refer to Figures 7 to 9, 10A, 11, 12A, and 13A, which are schematic cross-sectional views illustrating various stages of the manufacturing process of a chip-type thermally conductive patch 100 according to an embodiment of the present disclosure. In some embodiments, when manufacturing the chip-type thermally conductive patch 100 shown in Figures 1 to 4, the first copper sheet 110, the second copper sheet 120, and the thermally conductive double-sided laminating film 130 described above can be provided, as shown in Figure 7. The first copper sheet 110 is then laminated to the lower surface 132 of the thermally conductive double-sided laminating film 130, and the second copper sheet 120 is laminated to the upper surface 134 of the thermally conductive double-sided laminating film 130. In this way, the second copper sheet 120 can be bonded to the first copper sheet 110 and, together with the thermally conductive double-sided insulating film 130 and the first copper sheet 110, form a stacked structure 170. The stacked structure 170 has a central axis CA. Furthermore, the stacked structure 170 can be divided into a central portion 172 and first and second end portions 174 and 176 located on opposite sides of the central portion 172. The first and second end portions 174 and 176 provide for the subsequent placement of terminal electrodes.

堆疊結構170形成後,可於第一銅片110中形成第一溝槽112,以及於第二銅片120中形成第二溝槽122,如圖11所示。在一些實施例中,利用微影技術與蝕刻技術形成第一溝槽112與第二溝槽122。具體而言,如圖9所示,可利用例如印刷或膜壓貼合方式,形成二光阻層180與182分別覆蓋在第一銅片110與第二銅片120上。光阻層180與182分別位於堆疊結構170之相對二側。 After the stacked structure 170 is formed, a first trench 112 can be formed in the first copper sheet 110, and a second trench 122 can be formed in the second copper sheet 120, as shown in Figure 11 . In some embodiments, the first trench 112 and the second trench 122 are formed using lithography and etching techniques. Specifically, as shown in Figure 9 , two photoresist layers 180 and 182 can be formed, respectively, overlying the first copper sheet 110 and the second copper sheet 120, using methods such as printing or lamination. Photoresist layers 180 and 182 are located on opposite sides of the stacked structure 170.

請同時參照圖10A與圖10B,其中圖10B係繪示圖10A之結構的上視示意圖。接下來,對光阻層180與182進行包含曝光與顯影的微影製程,以移除部分之光阻層180與部分之光阻層182,而暴露出部分之第一銅片110與部分之第二銅片120,藉以定義出第一銅片110與第二銅片120之待蝕刻之區域。 Please refer to Figures 10A and 10B , where Figure 10B is a schematic top view of the structure of Figure 10A . Next, a lithography process including exposure and development is performed on the photoresist layers 180 and 182 to remove portions of the photoresist layers 180 and 182, exposing portions of the first copper sheet 110 and the second copper sheet 120, thereby defining the areas of the first copper sheet 110 and the second copper sheet 120 to be etched.

接著,如圖11所示,可利用剩餘之光阻層180與182作為蝕刻遮罩,對第一銅片110的暴露部分、以及第二銅片120的暴露部分進行蝕刻製程,例如濕式蝕刻製程。蝕刻製程移除第一銅片110的暴露部分與第二銅片120的暴露部分,而在第一銅片110中形成第一溝槽112、以及在第二銅片120中形成第二溝槽122。第一溝槽112暴露出導熱絕緣雙面貼合膜130之下表面132的一部分,而將第一銅片110分成彼此相隔之第一部分114與第二部分116。第二溝槽122暴露出導熱絕緣雙面貼合膜130之上表面134的一部分,而將第二銅片120分成彼此相隔之第三部分124與第四部分126。 Next, as shown in FIG11 , the remaining photoresist layers 180 and 182 can be used as etching masks to perform an etching process, such as a wet etching process, on the exposed portions of the first copper sheet 110 and the exposed portions of the second copper sheet 120. The etching process removes the exposed portions of the first copper sheet 110 and the second copper sheet 120, thereby forming a first trench 112 in the first copper sheet 110 and a second trench 122 in the second copper sheet 120. The first trench 112 exposes a portion of the lower surface 132 of the thermally conductive double-sided adhesive film 130, thereby dividing the first copper sheet 110 into a first portion 114 and a second portion 116 separated from each other. The second groove 122 exposes a portion of the upper surface 134 of the thermally conductive and insulating double-sided lamination film 130, thereby dividing the second copper sheet 120 into a third portion 124 and a fourth portion 126 that are separated from each other.

第一溝槽112與第二溝槽122之間的相對位置關係,在堆疊結構170中的配置,以及尺寸如上所述,於此不再贅述。 The relative positional relationship between the first trench 112 and the second trench 122, their configuration within the stacked structure 170, and their dimensions have been described above and will not be further elaborated here.

第一溝槽112與第二溝槽122形成後,可先移除光阻層180與182。請同時參照圖12A、圖12B、圖13A、與圖13B,其中圖12B與圖13B係分別繪示圖12A與圖13A之結構的上視示意圖。接著,如圖13A與圖13B所示,可利用例如印刷、壓膜、或黃光微影方式,形成絕緣防焊保護層140包覆堆疊結構170之中間部172,其中絕緣防焊保護層140填入第一溝槽112與第二溝槽122。形成絕緣防焊保護層140時,可先形成一層絕緣防焊保護材料144覆蓋堆疊結構170之中間部172、第一端部174、與第二端部176,如圖12A與圖12B所示。再去除覆蓋在第一端部174與第二端部176上的絕緣防焊保護材料144,而形成絕緣防焊保護層140。 After the first trench 112 and the second trench 122 are formed, the photoresist layers 180 and 182 can be removed. Referring to Figures 12A, 12B, 13A, and 13B, Figures 12B and 13B illustrate top views of the structures of Figures 12A and 13A, respectively. Next, as shown in Figures 13A and 13B, an insulating solder mask layer 140 can be formed to cover the central portion 172 of the stacked structure 170, for example, by printing, lamination, or photolithography. The insulating solder mask layer 140 fills the first trench 112 and the second trench 122. To form the insulating solder mask layer 140, a layer of insulating solder mask material 144 is first formed to cover the middle portion 172, first end portion 174, and second end portion 176 of the stacked structure 170, as shown in Figures 12A and 12B. The insulating solder mask material 144 covering the first end portion 174 and second end portion 176 is then removed to form the insulating solder mask layer 140.

隨後,如圖1至圖4所示,形成第一端電極150包覆堆疊結構170之第一端部174,以及形成第二端電極160包覆第二端部176,而大致完成晶片型導熱貼片100的製作。在一些實施例中,形成第一端電極150時包含形成銅層152包覆第一端部174,形成鎳層154覆蓋銅層152,以及形成錫層156覆蓋鎳層154。形成第二端電極160時包含形成銅層162包覆第二端部176,形成鎳層164覆蓋銅層162,以及形成錫層166覆蓋鎳層164。銅層152及162與絕緣防焊保護層140之間的相對高度如 上所述,於此不再贅述。 Subsequently, as shown in Figures 1 to 4 , a first end electrode 150 is formed to cover the first end 174 of the stacked structure 170, and a second end electrode 160 is formed to cover the second end 176, thereby substantially completing the fabrication of the chip-type thermal patch 100. In some embodiments, forming the first end electrode 150 includes forming a copper layer 152 to cover the first end 174, forming a nickel layer 154 to cover the copper layer 152, and forming a tin layer 156 to cover the nickel layer 154. Forming the second end electrode 160 includes forming a copper layer 162 to cover the second end 176, forming a nickel layer 164 to cover the copper layer 162, and forming a tin layer 166 to cover the nickel layer 164. The relative heights between copper layers 152 and 162 and insulating solder mask layer 140 are as described above and will not be repeated here.

由上述之實施方式可知,本揭露以導熱絕緣雙面貼合膜貼合二銅片所形成之堆疊結構取代傳統之陶瓷基板。由於銅之導熱係數遠大於陶瓷基板之導熱係數,因此本揭露之晶片型導熱貼片具有優異的導熱性能,可有效傳導熱。 As can be seen from the above embodiments, the present disclosure replaces the traditional ceramic substrate with a stacked structure formed by laminating two copper sheets with a thermally conductive, insulating double-sided lamination film. Because copper's thermal conductivity is much greater than that of the ceramic substrate, the chip-type thermally conductive patch disclosed herein has excellent thermal conductivity and can effectively transfer heat.

本揭露之晶片型導熱貼片可利用表面黏著技術直接焊接在電路板上,來同時提供散熱與電路隔離,因此應用性極佳。 The chip-type thermal pad disclosed herein can be directly soldered to a circuit board using surface mount technology to simultaneously provide heat dissipation and circuit isolation, thus offering excellent applicability.

雖然本揭露已以實施例揭示如上,然其並非用以限定本揭露,任何在此技術領域中具有通常知識者,在不脫離本揭露之精神和範圍內,當可作各種之更動與潤飾,因此本揭露之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present disclosure has been disclosed above through the use of embodiments, this is not intended to limit the present disclosure. Anyone with ordinary skill in the art may make various modifications and improvements without departing from the spirit and scope of the present disclosure. Therefore, the scope of protection of the present disclosure shall be determined by the scope of the attached patent application.

100:晶片型導熱貼片 100: Chip-type thermal pad

110:第一銅片 110: The First Copper Plate

112:第一溝槽 112: First Groove

114:第一部分 114: Part 1

116:第二部分 116: Part 2

120:第二銅片 120: Second Copper Plate

122:第二溝槽 122: Second Groove

124:第三部分 124: Part 3

126:第四部分 126: Part 4

130:導熱絕緣雙面貼合膜 130: Thermally conductive and insulating double-sided laminating film

132:下表面 132: Lower surface

134:上表面 134: Upper surface

140:絕緣防焊保護層 140: Insulation solder mask protective layer

142:上表面 142: Upper surface

150:第一端電極 150: First electrode

152:銅層 152:Copper layer

152t:上表面 152t: Upper surface

154:鎳層 154: Nickel layer

156:錫層 156: Tin layer

160:第二端電極 160: Second electrode

162:銅層 162:Copper layer

162t:上表面 162t: Upper surface

164:鎳層 164: Nickel layer

166:錫層 166: Tin layer

170:堆疊結構 170: Stacked Structure

170a:第一短邊 170a: First short side

170b:第二短邊 170b: Second short side

172:中間部 172:Middle part

174:第一端部 174: First end

176:第二端部 176: Second end

CA:中心軸 CA: Central axis

d1:第一距離 d1: First distance

d2:第二距離 d2: Second distance

t1:厚度 t1: thickness

t2:厚度 t2: Thickness

t3:厚度 t3: Thickness

w1:寬度 w1: width

w2:寬度 w2: width

Claims (15)

一種晶片型導熱貼片,包含: 一第一銅片,具有一第一溝槽,其中該第一溝槽將該第一銅片分成彼此分隔之一第一部分與一第二部分; 一第二銅片,具有一第二溝槽,其中該第二溝槽將該第二銅片分成彼此相隔之一第三部分與一第四部分; 一導熱絕緣雙面貼合膜,夾設在該第一銅片與該第二銅片之間,以將該第二銅片接合在該第一銅片之上,而形成一堆疊結構,其中該堆疊結構具有一中心軸,該第一溝槽與該第二溝槽分別位於該中心軸之二側,該堆疊結構包含一中間部、以及分別位於該中間部之相對二側之一第一端部、與一第二端部; 一絕緣防焊保護層,包覆該中間部,而使該第一端部與該第二端部暴露出,其中該絕緣防焊保護層填入該第一溝槽與該第二溝槽; 一第一端電極,包覆該第一端部及部分該絕緣防焊保護層包覆之該中間部;以及 一第二端電極,包覆該第二端部及部分該絕緣防焊保護層包覆之該中間部。A chip-type thermally conductive patch comprises: a first copper sheet having a first trench, wherein the first trench divides the first copper sheet into a first portion and a second portion separated from each other; a second copper sheet having a second trench, wherein the second trench divides the second copper sheet into a third portion and a fourth portion separated from each other; a thermally conductive double-sided laminating film sandwiched between the first copper sheet and the second copper sheet to bond the second copper sheet to the first copper sheet to form a stacked structure, wherein the stacked structure has a central axis, the first trench and the second trench are respectively located on opposite sides of the central axis, and the stacked structure includes a middle portion and a first end portion and a second end portion respectively located on opposite sides of the middle portion; an insulating solder mask layer covering the middle portion and exposing the first end portion and the second end portion, wherein the insulating solder mask layer fills the first trench and the second trench; a first end electrode covering the first end portion and a portion of the middle portion covered by the insulating solder mask layer; and a second end electrode covering the second end portion and a portion of the middle portion covered by the insulating solder mask layer. 如請求項1所述之晶片型導熱貼片,其中該第一溝槽與該第二溝槽相對於該中心軸對稱。The chip-type thermal patch as described in claim 1, wherein the first trench and the second trench are symmetrical with respect to the central axis. 如請求項1所述之晶片型導熱貼片,其中該堆疊結構具有彼此相對之一第一短邊與一第二短邊,該第一溝槽與該第二溝槽分別鄰近該第一短邊與該第二短邊,且該第一溝槽與該第一短邊之一第一距離、以及該第二溝槽與該第二短邊之一第二距離均為該堆疊結構之一長度的1/4至1/3。A chip-type thermal patch as described in claim 1, wherein the stacking structure has a first short side and a second short side opposite to each other, the first trench and the second trench are adjacent to the first short side and the second short side respectively, and a first distance between the first trench and the first short side, and a second distance between the second trench and the second short side are both 1/4 to 1/3 of a length of the stacking structure. 如請求項1所述之晶片型導熱貼片,其中該第一溝槽與該第二溝槽之每一者之一寬度為50μm至300μm。The chip-type thermal patch as described in claim 1, wherein a width of each of the first trench and the second trench is 50 μm to 300 μm. 如請求項1所述之晶片型導熱貼片,其中該導熱絕緣雙面貼合膜之一厚度為15μm至30μm。The chip-type thermally conductive patch as described in claim 1, wherein a thickness of one of the thermally conductive insulating double-sided bonding films is 15μm to 30μm. 如請求項1所述之晶片型導熱貼片,其中該導熱絕緣雙面貼合膜之一熱導係數大於3W/mK。A chip-type thermally conductive patch as described in claim 1, wherein a thermal conductivity coefficient of the thermally conductive insulating double-sided adhesive film is greater than 3W/mK. 如請求項1所述之晶片型導熱貼片,其中該導熱絕緣雙面貼合膜之一材料內含石墨片及/或石墨烯,且該導熱絕緣雙面貼合膜之含碳量大於90%。A chip-type thermally conductive patch as described in claim 1, wherein one of the materials of the thermally conductive insulating double-sided laminating film contains graphite sheets and/or graphene, and the carbon content of the thermally conductive insulating double-sided laminating film is greater than 90%. 如請求項1所述之晶片型導熱貼片,其中該絕緣防焊保護層之一材料包含環氧樹脂、樹脂、或聚醯亞胺。The chip-type thermal pad as described in claim 1, wherein one material of the insulating solder mask protective layer includes epoxy resin, resin, or polyimide. 一種晶片型導熱貼片之製造方法,包含: 將一第一銅片與一第二銅片分別貼合在一導熱絕緣雙面貼合膜之一下表面與一上表面上,而形成一堆疊結構,其中該堆疊結構具有一中心軸,且該堆疊結構包含一中間部、以及分別位於該中間部之相對二側之一第一端部與一第二端部; 形成一第一溝槽於該第一銅片中,以將該第一銅片分成彼此分隔之一第一部分與一第二部分; 形成一第二溝槽於該第二銅片中,以將該第二銅片分成彼此分隔之一第三部分與一第四部分,其中該第一溝槽與該第二溝槽分別位於該中心軸之二側; 形成一絕緣防焊保護層包覆該中間部並填入該第一溝槽與該第二溝槽; 形成一第一端電極包覆該第一端部及部分該絕緣防焊保護層包覆之該中間部;以及 形成一第二端電極包覆該第二端部及部分該絕緣防焊保護層包覆之該中間部。A method for manufacturing a chip-type thermally conductive patch includes: laminating a first copper sheet and a second copper sheet onto a lower surface and an upper surface of a thermally conductive double-sided laminating film, respectively, to form a stacked structure, wherein the stacked structure has a central axis and includes a middle portion and a first end portion and a second end portion located on opposite sides of the middle portion; forming a first trench in the first copper sheet to divide the first copper sheet into a first portion and a second portion that are separated from each other; forming a second trench in the second copper sheet to divide the second copper sheet into a third portion and a fourth portion that are separated from each other, wherein the first trench and the second trench are located on opposite sides of the central axis; An insulating solder mask layer is formed to cover the middle portion and fill the first trench and the second trench; a first end electrode is formed to cover the first end portion and a portion of the middle portion covered by the insulating solder mask layer; and a second end electrode is formed to cover the second end portion and a portion of the middle portion covered by the insulating solder mask layer. 如請求項9所述之晶片型導熱貼片之製造方法,其中形成該第一溝槽與形成該第二溝槽均包含利用一微影製程與一蝕刻製程。The method for manufacturing a chip-type thermally conductive patch as described in claim 9, wherein forming the first trench and forming the second trench both include utilizing a lithography process and an etching process. 如請求項9所述之晶片型導熱貼片之製造方法,其中該第一溝槽與該第二溝槽相對於該中心軸對稱。A method for manufacturing a chip-type thermally conductive patch as described in claim 9, wherein the first trench and the second trench are symmetrical with respect to the central axis. 如請求項9所述之晶片型導熱貼片之製造方法,其中該堆疊結構具有彼此相對之一第一短邊與一第二短邊,且形成該第一溝槽包含使該第一溝槽鄰近該第一短邊且與該第一短邊相隔一第一距離,形成該第二溝槽包含使該第二溝槽鄰近該第二短邊且與該第二短邊相隔一第二距離,其中該第一距離與該第二距離之每一者為該堆疊結構之一長度的1/4至1/3。A method for manufacturing a chip-type thermally conductive patch as described in claim 9, wherein the stacking structure has a first short side and a second short side opposite to each other, and forming the first trench includes making the first trench adjacent to the first short side and separated from the first short side by a first distance, and forming the second trench includes making the second trench adjacent to the second short side and separated from the second short side by a second distance, wherein each of the first distance and the second distance is 1/4 to 1/3 of a length of the stacking structure. 如請求項9所述之晶片型導熱貼片之製造方法,其中該第一溝槽與該第二溝槽之每一者之一寬度為50μm至300μm。The method for manufacturing a chip-type thermally conductive patch as described in claim 9, wherein a width of each of the first trench and the second trench is 50 μm to 300 μm. 如請求項9所述之晶片型導熱貼片之製造方法,其中該導熱絕緣雙面貼合膜之一熱導係數大於3W/mK,且該導熱絕緣雙面貼合膜之一材料內含石墨片及/或石墨烯,該導熱絕緣雙面貼合膜之含碳量大於90%。A method for manufacturing a chip-type thermally conductive patch as described in claim 9, wherein a thermal conductivity coefficient of the thermally conductive insulating double-sided adhesive film is greater than 3W/mK, a material of the thermally conductive insulating double-sided adhesive film contains graphite sheets and/or graphene, and the carbon content of the thermally conductive insulating double-sided adhesive film is greater than 90%. 如請求項9所述之晶片型導熱貼片之製造方法,其中形成該第一端電極與形成該第二端電極均包含: 形成一銅層; 形成一鎳層覆蓋該銅層;以及 形成一錫層覆蓋該鎳層,其中該銅層之一上表面與該絕緣防焊保護層之一上表面之間之一距離等於或大於5μm。A method for manufacturing a chip-type thermally conductive patch as described in claim 9, wherein forming the first end electrode and forming the second end electrode both include: forming a copper layer; forming a nickel layer covering the copper layer; and forming a tin layer covering the nickel layer, wherein a distance between an upper surface of the copper layer and an upper surface of the insulating solder mask layer is equal to or greater than 5μm.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI285420B (en) * 2004-12-01 2007-08-11 Taiwan Semiconductor Mfg Heat stud for stacked chip packsge
TWI483353B (en) * 2010-06-15 2015-05-01 南茂科技股份有限公司 Heat dissipation gain type electronic package
CN114864753A (en) * 2022-07-05 2022-08-05 杭州视光半导体科技有限公司 Preparation method and application of wafer with three-layer stacking structure
TWI830320B (en) * 2022-07-28 2024-01-21 大陸商鵬鼎控股(深圳)股份有限公司 Circuit board with heat dissipation performance and method for fabrication of the same
TWI851818B (en) * 2019-09-26 2024-08-11 日商富士軟片股份有限公司 Method for manufacturing heat-conducting layer, method for manufacturing laminate, and method for manufacturing semiconductor device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI285420B (en) * 2004-12-01 2007-08-11 Taiwan Semiconductor Mfg Heat stud for stacked chip packsge
TWI483353B (en) * 2010-06-15 2015-05-01 南茂科技股份有限公司 Heat dissipation gain type electronic package
TWI851818B (en) * 2019-09-26 2024-08-11 日商富士軟片股份有限公司 Method for manufacturing heat-conducting layer, method for manufacturing laminate, and method for manufacturing semiconductor device
CN114864753A (en) * 2022-07-05 2022-08-05 杭州视光半导体科技有限公司 Preparation method and application of wafer with three-layer stacking structure
TWI830320B (en) * 2022-07-28 2024-01-21 大陸商鵬鼎控股(深圳)股份有限公司 Circuit board with heat dissipation performance and method for fabrication of the same

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