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TWI896784B - Superhard alloy and cutting tool having the same - Google Patents

Superhard alloy and cutting tool having the same

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Publication number
TWI896784B
TWI896784B TW110137325A TW110137325A TWI896784B TW I896784 B TWI896784 B TW I896784B TW 110137325 A TW110137325 A TW 110137325A TW 110137325 A TW110137325 A TW 110137325A TW I896784 B TWI896784 B TW I896784B
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TW
Taiwan
Prior art keywords
less
tungsten carbide
mass
ratio
phase
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TW110137325A
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Chinese (zh)
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TW202223114A (en
Inventor
山川隆洋
広瀬和弘
内野克哉
山本剛志
Original Assignee
日商住友電工硬質合金股份有限公司
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Publication of TW202223114A publication Critical patent/TW202223114A/en
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Publication of TWI896784B publication Critical patent/TWI896784B/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B51/00Tools for drilling machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23CMILLING
    • B23C5/00Milling-cutters
    • B23C5/16Milling-cutters characterised by physical features other than shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D77/00Reaming tools
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/04Making non-ferrous alloys by powder metallurgy
    • C22C1/05Mixtures of metal powder with non-metallic powder
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C29/00Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
    • C22C29/02Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides
    • C22C29/06Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds
    • C22C29/08Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds based on tungsten carbide
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10Sintering only

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Powder Metallurgy (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

本發明係一種具備由複數個碳化鎢粒子構成之第1相及包含鈷之第2相之超硬合金,於藉由掃描式電子顯微鏡對上述超硬合金進行拍攝所得之圖像中,上述第1相之比率為78面積%以上且未達100面積%,且上述第2相之比率超過0面積%且為22面積%以下,於算出上述圖像中各個上述碳化鎢粒子之圓相當徑之情形時,上述圓相當徑之平均值為0.5 μm以上1.2 μm以下,上述圓相當徑為0.3 μm以下之上述碳化鎢粒子之個數基準之比率為10%以下,上述圓相當徑超過1.8 μm之上述碳化鎢粒子之個數基準之比率未達2%,上述超硬合金之上述鈷之質量基準之含量超過0質量%且為10質量%以下。The present invention is a superhard alloy having a first phase composed of a plurality of tungsten carbide particles and a second phase containing cobalt. In an image obtained by photographing the superhard alloy using a scanning electron microscope, the ratio of the first phase is 78 area % or more and less than 100 area %, and the ratio of the second phase is more than 0 area % and less than 22 area %. When the circular equivalent diameter of each of the tungsten carbide particles in the image is calculated, the average value of the circular equivalent diameter is 0.5 μm or more and 1.2 μm or less, the number-based ratio of the tungsten carbide particles with a circular equivalent diameter of 0.3 μm or less is 10% or less, and the number of the tungsten carbide particles with a circular equivalent diameter of more than 1.8 μm is less than 10%. The number-based ratio of the tungsten carbide particles having a diameter of 0.01 μm is less than 2%, and the mass-based content of the cobalt in the cemented carbide exceeds 0% by mass and is 10% by mass or less.

Description

超硬合金及具備其之切削工具Superhard alloy and cutting tool having the same

本發明係關於一種超硬合金及具備其之切削工具。The present invention relates to a superhard alloy and a cutting tool comprising the same.

於印刷電路基板之開孔中, 1 mm以下之小徑之開孔為主流。因此,作為小徑鑽孔器等工具中所使用之超硬合金,使用硬質相包含平均粒徑為1 μm以下之碳化鎢粒子之所謂微粒超硬合金(例如日本專利特開2007-92090號公報(專利文獻1)、日本專利特開2012-52237號公報(專利文獻2)、日本專利特開2012-117100號公報(專利文獻3))。 [先前技術文獻] [專利文獻] In the opening of the printed circuit board, Small diameter holes of 1 mm or less are the mainstream. Therefore, as super-hard alloys used in tools such as small diameter drills, so-called micro-hard alloys are used, in which the hard phase includes tungsten carbide particles with an average particle size of 1 μm or less (for example, Japanese Patent Publication No. 2007-92090 (Patent Document 1), Japanese Patent Publication No. 2012-52237 (Patent Document 2), and Japanese Patent Publication No. 2012-117100 (Patent Document 3)). [Prior Art Literature] [Patent Literature]

[專利文獻1]日本專利特開2007-92090號公報 [專利文獻2]日本專利特開2012-52237號公報 [專利文獻3]日本專利特開2012-117100號公報 [Patent Document 1] Japanese Patent Publication No. 2007-92090 [Patent Document 2] Japanese Patent Publication No. 2012-52237 [Patent Document 3] Japanese Patent Publication No. 2012-117100

本發明之超硬合金係具備由複數個碳化鎢粒子構成之第1相及包含鈷之第2相者,並且 於藉由掃描式電子顯微鏡對上述超硬合金進行拍攝所得之圖像中,上述第1相之比率為78面積%以上且未達100面積%,且上述第2相之比率超過0面積%且為22面積%以下, 於算出上述圖像中各個上述碳化鎢粒子之圓相當徑之情形時,上述圓相當徑之平均值為0.5 μm以上1.2 μm以下, 上述圓相當徑為0.3 μm以下之上述碳化鎢粒子之個數基準之比率為10%以下, 上述圓相當徑超過1.8 μm之上述碳化鎢粒子之個數基準之比率未達2%, 上述超硬合金之上述鈷之質量基準之含量超過0質量%且為10質量%以下。 The superhard alloy of the present invention comprises a first phase composed of a plurality of tungsten carbide particles and a second phase containing cobalt. In an image of the superhard alloy taken with a scanning electron microscope, the ratio of the first phase is 78% by area or more and less than 100% by area, and the ratio of the second phase is more than 0% by area and less than 22% by area. When the circular equivalent diameter of each of the tungsten carbide particles in the image is calculated, the average value of the circular equivalent diameter is 0.5 μm or more and 1.2 μm or less. The number-based ratio of the tungsten carbide particles having a circular equivalent diameter of 0.3 μm or less is 10% or less. The number of particles having a circular equivalent diameter exceeding 1.8 μm is less than 10%. The number-based ratio of the tungsten carbide particles with a diameter of μm is less than 2%. The mass-based content of the cobalt in the cemented carbide exceeds 0% by mass and is less than 10% by mass.

本發明之切削工具係具備包含上述超硬合金之刀尖者。The cutting tool of the present invention has a cutting tip made of the above-mentioned superhard alloy.

[本發明所欲解決之問題] 近年來,隨著5G(第5代行動通訊系統)之擴大,資訊之高容量化正在發展。因此,對印刷電路基板要求進一步之耐熱性。為了提高印刷電路基板之耐熱性,業界正在開發一種提高構成印刷電路基板之樹脂或玻璃填料之耐熱性之技術。另一方面,印刷電路基板因此變得難以切削。 [Problem to be Solved by the Present Invention] In recent years, with the expansion of 5G (fifth generation mobile communication systems), data capacity is increasing. Consequently, printed circuit boards (PCBs) are required to have even higher heat resistance. To improve the heat resistance of PCBs, the industry is developing technologies that enhance the heat resistance of the resins and glass fillers that comprise them. However, this approach makes PCBs difficult to cut.

因此,本發明之目的在於提供一種超硬合金及具備其之切削工具,該超硬合金在作為工具材料使用時,尤其是在印刷電路基板之微細加工中,可延長工具之壽命。Therefore, an object of the present invention is to provide a superhard alloy and a cutting tool having the same, wherein the superhard alloy can extend the life of the tool when used as a tool material, especially in the micromachining of printed circuit boards.

[本發明之效果] 本發明之超硬合金在作為工具材料使用時,尤其是在印刷電路基板之微細加工中,可延長工具之壽命。 [Effects of the Invention] The superhard alloy of the present invention, when used as a tool material, can extend the tool life, particularly in micromachining of printed circuit boards.

[本發明之實施方式之說明] 首先舉出本發明之實施方式進行說明。 (1)本發明之超硬合金係具備由複數個碳化鎢粒子構成之第1相及包含鈷之第2相者,並且 於藉由掃描式電子顯微鏡對上述超硬合金進行拍攝所得之圖像中,上述第1相之比率為78面積%以上且未達100面積%,且上述第2相之比率超過0面積%且為22面積%以下, 於算出上述圖像中各個上述碳化鎢粒子之圓相當徑之情形時,上述圓相當徑之平均值為0.5 μm以上1.2 μm以下, 上述圓相當徑為0.3 μm以下之上述碳化鎢粒子之個數基準之比率為10%以下, 上述圓相當徑超過1.8 μm之上述碳化鎢粒子之個數基準之比率未達2%, 上述超硬合金之上述鈷之質量基準之含量超過0質量%且為10質量%以下。 [Description of the Implementation Methods of the Present Invention] First, we will explain the implementation methods of the present invention. (1) The superhard alloy of the present invention has a first phase composed of a plurality of tungsten carbide particles and a second phase containing cobalt, and in an image obtained by photographing the superhard alloy using a scanning electron microscope, the ratio of the first phase is 78 area % or more and less than 100 area %, and the ratio of the second phase is more than 0 area % and less than 22 area %, when the circular equivalent diameter of each of the tungsten carbide particles in the image is calculated, the average value of the circular equivalent diameter is 0.5 μm or more and 1.2 μm or less, the number-based ratio of the tungsten carbide particles having a circular equivalent diameter of 0.3 μm or less is 10% or less, the circular equivalent diameter exceeds 1.8 The number-based ratio of the tungsten carbide particles with a diameter of μm is less than 2%. The mass-based content of the cobalt in the cemented carbide exceeds 0% by mass and is less than 10% by mass.

本發明之超硬合金在作為工具材料使用時,尤其是在印刷電路基板之微細加工中,可延長工具之壽命。When the superhard alloy of the present invention is used as a tool material, especially in the micro-machining of printed circuit boards, it can extend the life of the tool.

(2)於上述圖像中,上述第2相之比率較佳為5面積%以上12面積%以下。藉此,工具壽命進一步延長。(2) In the above image, the ratio of the second phase is preferably not less than 5 area % and not more than 12 area %. This further extends the tool life.

(3)上述超硬合金之鉻之質量基準之含量較佳為0.15質量%以上1.0質量%以下。藉此,工具壽命進一步延長。(3) The chromium content of the above-mentioned superhard alloy is preferably not less than 0.15 mass% and not more than 1.0 mass%. This further extends the tool life.

(4)上述鉻相對於上述鈷之比率以質量基準計較佳為5%以上10%以下。藉此,工具壽命進一步延長。(4) The ratio of chromium to cobalt is preferably 5% to 10% by mass. This further extends the tool life.

(5)上述超硬合金之釩之質量基準之含量較佳為0 ppm以上且未達2000 ppm。藉此,工具壽命進一步延長。(5) The mass-based content of vanadium in the above-mentioned superhard alloy is preferably 0 ppm or more and less than 2000 ppm. This further extends the tool life.

(6)上述超硬合金之釩之質量基準之含量較佳為0 ppm以上且未達100 ppm。藉此,工具壽命進一步延長。(6) The mass-based content of vanadium in the above-mentioned superhard alloy is preferably 0 ppm or more and less than 100 ppm. This further extends the tool life.

(7)本發明之切削工具係具備包含上述超硬合金之刀尖者。本發明之切削工具具有較長之工具壽命。(7) The cutting tool of the present invention has a cutting tip comprising the above-mentioned superhard alloy. The cutting tool of the present invention has a longer tool life.

(8)上述切削工具較佳為印刷電路基板加工用旋轉工具。本發明之切削工具適合印刷電路基板之微細加工。(8) The above-mentioned cutting tool is preferably a rotary tool for processing printed circuit boards. The cutting tool of the present invention is suitable for fine processing of printed circuit boards.

[本發明之實施方式之詳細情況] 以下參照圖式對本發明之超硬合金及切削工具之具體例進行說明。於本發明之圖式中,相同之參照符號表示相同部分或相當部分。又,為了明確及簡化圖式而適當變更長度、寬度、厚度、深度等尺寸關係,不一定代表實際之尺寸關係。 [Details of the Embodiments of the Invention] The following describes specific embodiments of the cemented carbide and cutting tool of the present invention with reference to the accompanying drawings. In the drawings of the present invention, identical reference numerals denote identical or equivalent parts. Dimensional relationships, such as length, width, thickness, and depth, are modified for clarity and simplicity and do not necessarily represent actual dimensional relationships.

於本說明書中,「A~B」這一形式之記法意指範圍之上限下限(即A以上B以下),當於A中未記載單位,僅於B中記載有單位時,A之單位與B之單位相同。In this specification, the notation "A-B" refers to the upper and lower limits of a range (i.e., A is greater than and B is less than). When the unit is not specified in A and only in B, the unit of A is the same as the unit of B.

於本說明書中,當以化學式來表示化合物等時,對原子比並無特別限定時包括先前公知之所有原子比,不一定僅限於化學計量範圍內之原子比。例如當記載為「WC」時,構成WC之原子數之比包括先前公知之所有原子比。In this specification, when compounds are represented by chemical formulas, unless otherwise specified, the atomic ratios include all known atomic ratios and are not necessarily limited to atomic ratios within the stoichiometric range. For example, when "WC" is described, the ratios of the number of atoms constituting WC include all known atomic ratios.

本發明人等為了獲得可延長工具之壽命之超硬合金,研究了使用包含先前之微粒超硬合金之工具對印刷電路基板進行微細加工之情形時工具之損傷形態。結果確認到,於先前之微粒超硬合金中,碳化鎢粒子隨著工具之使用而脫落磨耗。本發明人等對脫落磨耗進一步進行研究,結果確認到,粒徑為0.3 μm以下之碳化鎢粒子尤其容易脫落。To develop a super-hard alloy that extends tool life, the inventors investigated tool damage patterns during micromachining of printed circuit boards using tools containing conventional micro-hard alloys. They discovered that tungsten carbide particles in conventional micro-hard alloys detach and wear away during tool use. Further research into this shedding wear revealed that tungsten carbide particles with a diameter of 0.3 μm or less are particularly susceptible to shedding.

因此,本發明人等推測:為了達成較長之工具壽命,於微粒超硬合金中,降低使用工具時容易脫落之粒徑為0.3 μm以下之碳化鎢粒子之含量較為重要。Therefore, the inventors of the present invention speculate that in order to achieve a longer tool life, it is more important to reduce the content of tungsten carbide particles with a particle size of 0.3 μm or less, which are easily detached during tool use, in the micro-hard alloy.

為了降低微粒超硬合金中之粒徑為0.3 μm以下之碳化鎢粒子之含量,考慮於其製造步驟中,促進原料中之微粒碳化鎢粒子(粒徑約0.2 μm)之晶粒生長。例如,考慮在燒結作為原料之微粒碳化鎢粒子時,不添加具有晶粒生長抑制作用之釩及鉻,或於高溫下進行燒結。然而,若採用該等方法,則會因異常晶粒生長而產生粒徑約為2 μm以上之粗大碳化鎢粒子。該粗大碳化鎢粒子係導致微粒超硬合金之強度降低之要因。In order to reduce the content of tungsten carbide particles with a particle size of less than 0.3 μm in fine-grained super-hard alloys, consideration is given to promoting the grain growth of fine-grained tungsten carbide particles (with a particle size of approximately 0.2 μm) in the raw material during its manufacturing process. For example, consideration is given to not adding vanadium and chromium, which have a grain growth-inhibiting effect, when sintering the fine-grained tungsten carbide particles used as the raw material, or to sintering at high temperatures. However, if these methods are adopted, coarse tungsten carbide particles with a particle size of approximately 2 μm or more will be produced due to abnormal grain growth. These coarse tungsten carbide particles are the main cause of the reduction in strength of fine-grained super-hard alloys.

另一方面,若為了抑制異常晶粒生長,而如先前之微粒超硬合金之製造方法般添加釩及鉻,則有作為原料使用之微粒碳化鎢粒子直接殘留於所獲得之微粒超硬合金中的趨勢。On the other hand, if vanadium and chromium are added as in the previous method of manufacturing micro-grained super-hard alloy in order to suppress abnormal grain growth, there is a tendency that the micro-grained tungsten carbide particles used as the raw material will remain directly in the obtained micro-grained super-hard alloy.

本發明人等鑒於上述情況,對可降低超硬合金中之粒徑0.3 μm以下之碳化鎢粒子之含量且抑制粗大碳化鎢粒子之產生的原料、組成及製造條件進行了銳意研究,結果完成了本發明之超硬合金。以下對本發明之超硬合金及具備其之切削工具之詳細情況進行說明。In light of the above circumstances, the inventors conducted intensive research into raw materials, composition, and manufacturing conditions that could reduce the content of tungsten carbide particles with a diameter of 0.3 μm or less in super-hard alloys and inhibit the formation of coarse tungsten carbide particles. This resulted in the development of the super-hard alloy of the present invention. The following details the super-hard alloy of the present invention and cutting tools incorporating the same.

[實施方式1:超硬合金] 本發明之超硬合金係具備由複數個碳化鎢粒子構成之第1相及包含鈷之第2相者,並且 於藉由掃描式電子顯微鏡對超硬合金進行拍攝所得之圖像中,第1相之比率為78面積%以上且未達100面積%,且第2相之比率超過0面積%且為22面積%以下, 於算出圖像中各個碳化鎢粒子之圓相當徑之情形時,圓相當徑之平均值為0.5 μm以上1.2 μm以下, 圓相當徑為0.3 μm以下之碳化鎢粒子之個數基準之比率為10%以下, 圓相當徑超過1.8 μm之碳化鎢粒子之個數基準之比率未達2%, 超硬合金之鈷之質量基準之含量超過0質量%且為10質量%以下。 [Embodiment 1: Superhard alloy] The superhard alloy of the present invention has a first phase composed of a plurality of tungsten carbide particles and a second phase containing cobalt. In an image of the superhard alloy taken with a scanning electron microscope, the ratio of the first phase is 78% by area or more and less than 100% by area, and the ratio of the second phase is more than 0% by area and less than 22% by area. When the circular equivalent diameter of each tungsten carbide particle in the image is calculated, the average value of the circular equivalent diameter is 0.5 μm or more and 1.2 μm or less. The number-based ratio of tungsten carbide particles with a circular equivalent diameter of 0.3 μm or less is 10% or less. The number of particles with a circular equivalent diameter exceeding 1.8 μm is less than 10%. The number-based ratio of μm tungsten carbide particles is less than 2%. The mass-based content of cobalt in the cemented carbide exceeds 0% and is less than 10%.

本發明之超硬合金在作為工具材料使用時,尤其是在印刷電路基板之微細加工中,可延長工具之壽命。其原因雖不明確,但推測如下述(i)~(v)。The superhard alloy of the present invention, when used as a tool material, can extend the life of the tool, particularly in micromachining of printed circuit boards. The reasons for this are not yet clear, but are speculated as follows (i) to (v).

(i)於本發明之超硬合金中,由複數個碳化鎢粒子構成之第1相之比率為78面積%以上且未達100面積%,且包含鈷之第2相之比率超過0面積%且為22面積%以下。藉此,可對印刷電路基板之加工發揮必需硬度及耐磨耗性,抑制工具壽命產生差異。 (ii)於本發明之超硬合金中,碳化鎢粒子(以下亦記為「WC粒子」)之圓相當徑之平均值為0.5 μm以上1.2 μm以下。若碳化鎢粒子之圓相當徑之平均值為0.5 μm以上,則不易隨著使用而發生脫落磨耗,超硬合金可具有優異之耐磨耗性。若碳化鎢粒子之圓相當徑之平均值為1.2 μm以下,則超硬合金可具有較高之硬度且具有優異之耐磨耗性,又,可具有較高之抗彎力且具有優異之耐破損性。 (i) In the super-hard alloy of the present invention, the ratio of the first phase composed of a plurality of tungsten carbide particles is 78% by area or more and less than 100% by area, and the ratio of the second phase containing cobalt is greater than 0% by area and less than 22% by area. This allows the hardness and wear resistance required for printed circuit board processing to be achieved, suppressing variations in tool life. (ii) In the super-hard alloy of the present invention, the average equivalent diameter of the tungsten carbide particles (hereinafter also referred to as "WC particles") is 0.5 μm or more and 1.2 μm or less. When the average equivalent diameter of the tungsten carbide particles is 0.5 μm or more, the super-hard alloy is less likely to experience shedding wear during use, and thus exhibits excellent wear resistance. If the average equivalent diameter of the tungsten carbide particles is 1.2 μm or less, the superhard alloy can have higher hardness and excellent wear resistance, as well as higher bending strength and excellent fracture resistance.

(iii)於本發明之超硬合金中,圓相當徑為0.3 μm以下之碳化鎢粒子之個數基準之比率為10%以下。藉此,不易隨著使用而發生脫落磨耗,超硬合金可具有優異之耐磨耗性。(iii) In the super-hard alloy of the present invention, the number-based ratio of tungsten carbide particles with a circular equivalent diameter of 0.3 μm or less is less than 10%. This makes it less likely for the super-hard alloy to suffer from shedding wear during use, and the super-hard alloy can have excellent wear resistance.

(iv)於本發明之超硬合金中,圓相當徑超過1.8 μm之該碳化鎢粒子之個數基準之比率未達2%。藉此,超硬合金可具有較高之抗彎力且具有優異之耐破損性。(iv) In the super-hard alloy of the present invention, the number-based ratio of the tungsten carbide particles having a circular equivalent diameter exceeding 1.8 μm is less than 2%. As a result, the super-hard alloy can have higher bending strength and excellent fracture resistance.

(v)超硬合金之鈷之質量基準之含量超過0質量%且為10質量%以下。藉此,超硬合金可具有較高之硬度且具有優異之耐磨耗性。(v) The cobalt content of the super-hard alloy is greater than 0% by mass and less than 10% by mass. This allows the super-hard alloy to have higher hardness and excellent wear resistance.

<第1相> (第1相之組成) 第1相由複數個碳化鎢粒子構成。此處,碳化鎢不僅包括「純粹之WC(亦包括不含任何雜質元素之WC、雜質元素未達檢測極限之WC)」,還包括「於不損害本發明之效果之範圍內,其內部刻意地或無法避免地含有其他雜質元素之WC」。碳化鎢中所含有之雜質之濃度(當構成雜質之元素為兩種以上時為其等之合計濃度)相對於上述碳化鎢及上述雜質之總量未達0.1質量%。第1相中之雜質元素之含量係藉由感應耦合電漿(ICP)發光分析(Inductively Coupled Plasma Emission Spectroscopy)(測定裝置:島津製作所「ICPS-8100」(商標))進行測定。 <Phase 1> (Composition of Phase 1) Phase 1 is composed of a plurality of tungsten carbide particles. Tungsten carbide herein includes not only pure WC (including WC without any impurity elements or WC with impurity elements below the detection limit) but also WC that intentionally or unavoidably contains other impurity elements, to the extent that the effects of the present invention are not impaired. The concentration of impurities in the tungsten carbide (or the combined concentration of two or more impurity elements when the impurities are present) is less than 0.1% by mass relative to the total amount of the tungsten carbide and the impurities. The content of impurity elements in the first phase was measured using inductively coupled plasma (ICP) emission spectroscopy (ICP) (measurement equipment: Shimadzu Corporation "ICPS-8100" (trademark)).

(碳化鎢粒子之圓相當徑) 於藉由掃描式電子顯微鏡對本發明之超硬合金進行拍攝所得之圖像中,碳化鎢粒子之圓相當徑之平均值為0.5 μm以上1.2 μm以下。若碳化鎢粒子之圓相當徑之平均值為0.5 μm以上,則不易隨著使用而發生脫落磨耗,超硬合金可具有優異之耐磨耗性。若碳化鎢粒子之圓相當徑之平均值為1.2 μm以下,則超硬合金可具有較高之硬度且具有優異之耐磨耗性,又,可具有較高之抗彎力且具有優異之耐破損性。 (Equivalent Circle Diameter of Tungsten Carbide Particles) In images of the super-hard alloy of the present invention taken with a scanning electron microscope, the average equivalent circle diameter of the tungsten carbide particles is 0.5 μm or greater and 1.2 μm or less. When the average equivalent circle diameter of the tungsten carbide particles is 0.5 μm or greater, the super-hard alloy is less likely to experience shedding wear during use, resulting in excellent wear resistance. When the average equivalent circle diameter of the tungsten carbide particles is 1.2 μm or less, the super-hard alloy exhibits higher hardness and excellent wear resistance, as well as higher bending strength and excellent fracture resistance.

碳化鎢粒子之圓相當徑之平均值之下限較佳為0.5 μm以上、0.55 μm以上、0.60 μm以上。碳化鎢粒子之圓相當徑之平均值之上限較佳為1.2 μm以下、1.1 μm以下、1.0 μm以下。碳化鎢粒子之圓相當徑之平均值為0.5 μm以上1.2 μm以下,較佳為0.55 μm以上1.1 μm以下、0.60 μm以上1.0 μm以下。The lower limit of the average value of the equivalent circular diameter of the tungsten carbide particles is preferably 0.5 μm or greater, 0.55 μm or greater, or 0.60 μm or greater. The upper limit of the average value of the equivalent circular diameter of the tungsten carbide particles is preferably 1.2 μm or less, 1.1 μm or less, or 1.0 μm or less. The average value of the equivalent circular diameter of the tungsten carbide particles is 0.5 μm or greater and 1.2 μm or less, preferably 0.55 μm or greater and 1.1 μm or less, and 0.60 μm or greater and 1.0 μm or less.

碳化鎢粒子之圓相當徑係按照下述(A1)~(C1)之順序進行測定。 (A1)對超硬合金之任意表面或任意剖面進行鏡面加工。作為鏡面加工之方法,例如可例舉:用鑽石膏進行研磨之方法、使用聚焦離子束裝置(FIB裝置)之方法、使用截面拋光儀裝置(CP裝置)之方法、及組合其等之方法等。 The equivalent circular diameter of tungsten carbide particles is measured in the order of (A1) to (C1) below. (A1) Mirror finishing is performed on any surface or cross-section of the cemented carbide. Examples of mirror finishing methods include polishing with diamond plaster, using a focused ion beam apparatus (FIB apparatus), using a cross-section polisher apparatus (CP apparatus), and combinations thereof.

(B1)藉由掃描式電子顯微鏡(日立高新技術股份有限公司製造之「S-3400N」)拍攝超硬合金之加工面。條件設為觀察倍率5000倍、加速電壓10 kV、反射電子圖像。將本發明之超硬合金藉由掃描式電子顯微鏡所得之拍攝圖像之一例示於圖1中。(B1) The processed surface of the cemented carbide was photographed using a scanning electron microscope (S-3400N, manufactured by Hitachi High-Technologies Corporation). The conditions were 5000x magnification, 10 kV accelerating voltage, and backscattered electron imaging. An example of an image of the cemented carbide of the present invention obtained using a scanning electron microscope is shown in Figure 1.

(C1)用圖像解析軟體(ImageJ,version1.51j8:https://imagej.nih.gov/ij/)將上述(B1)中獲得之拍攝圖像導入電腦,進行二值化處理。導入圖像後,按下電腦螢幕上之顯示「Make Binary」,藉此執行二值化處理(在上述圖像解析軟體中預先設定之條件下進行二值化處理)。於所獲得之二值化處理後之圖像中設定縱25.3 μm×寬17.6 μm之矩形測定視野,算出該測定視野中之碳化鎢粒子之圓相當徑(Heywood直徑:等面積圓直徑)。由碳化鎢粒子構成之第1相與包含鈷之第2相可藉由上述拍攝圖像中之顏色之深淺來識別。將對圖1之拍攝圖像進行二值化處理所獲得之圖像示於圖2中。圖2中,黑色區域為第1相,白色區域為第2相。白色線表示晶界。(C1) Use image analysis software (ImageJ, version 1.51j8: https://imagej.nih.gov/ij/) to import the image obtained in (B1) into a computer and perform binarization. After importing the image, click "Make Binary" on the computer screen to perform the binarization process (binarization is performed under the pre-set conditions in the image analysis software). A rectangular measurement field of view measuring 25.3 μm in length and 17.6 μm in width is set in the binarized image. Calculate the equivalent circular diameter (Heywood diameter: the diameter of a circle of equal area) of the tungsten carbide particles within this measurement field. The first phase, composed of tungsten carbide particles, and the second phase, composed of cobalt, can be distinguished by the color depth in the image captured above. Figure 2 shows the image obtained by binarizing the image in Figure 1. In Figure 2, the black area represents the first phase, and the white area represents the second phase. White lines represent grain boundaries.

據申請人所測定,確認到,只要對同一試樣進行測定,則即便變更測定視野之選擇部位而測定複數次超硬合金中之碳化鎢粒子之圓相當徑,測定結果之差異亦較小,即便任意設定測定視野亦不會隨意變化。The applicant has determined that, as long as the same sample is measured, the difference in the measurement results is small even if the selected location of the measurement field of view is changed and the equivalent circular diameter of tungsten carbide particles in super-hard alloy is measured multiple times. Even if the measurement field of view is arbitrarily set, the difference does not change arbitrarily.

(碳化鎢粒子之圓相當徑之分佈) 於藉由掃描式電子顯微鏡對本發明之超硬合金進行拍攝所得之圖像中,圓相當徑為0.3 μm以下之碳化鎢粒子之個數基準之比率為10%以下。藉此,不易隨著使用而發生脫落磨耗,超硬合金可具有優異之耐磨耗性。 (Distribution of Tungsten Carbide Particles by Equivalent Circle Diameter) In images of the cemented carbide of the present invention taken with a scanning electron microscope, the number-based proportion of tungsten carbide particles with an equivalent circle diameter of 0.3 μm or less was less than 10%. This reduces the risk of shedding and wear associated with use, resulting in excellent wear resistance for the cemented carbide.

圓相當徑為0.3 μm以下之碳化鎢粒子之個數基準之比率為10%以下,較佳為9%以下、8%以下。圓相當徑為0.3 μm以下之碳化鎢粒子之個數基準之比率的下限並無特別限定,例如可設為0%以上、2%以上、4%以上。圓相當徑為0.3 μm以下之碳化鎢粒子之個數基準之比率可設為0%以上10%以下、0%以上9%以下、0%以上8%以下、2%以上10%以下、2%以上9%以下、2%以上8%以下、4%以上10%以下、4%以上9%以下、4%以上8%以下。The number-based ratio of tungsten carbide particles having a circle-equivalent diameter of 0.3 μm or less is 10% or less, preferably 9% or less, or 8% or less. The lower limit of the number-based ratio of tungsten carbide particles having a circle-equivalent diameter of 0.3 μm or less is not particularly limited, and may be, for example, 0% or more, 2% or more, or 4% or more. The number-based ratio of tungsten carbide particles having a circle-equivalent diameter of 0.3 μm or less may be 0% or more and 10% or less, 0% or more and 9% or less, 0% or more and 8% or less, 2% or more and 10% or less, 2% or more and 9% or less, 2% or more and 8% or less, 4% or more and 10% or less, 4% or more and 9% or less, or 4% or more and 8% or less.

於本說明書中,藉由掃描式電子顯微鏡對超硬合金進行拍攝所得之圖像中圓相當徑為0.3 μm以下之碳化鎢粒子的個數基準之比率係按照下述(D1)及(E1)之順序算出。In this specification, the number-based ratio of tungsten carbide particles with a circular equivalent diameter of 0.3 μm or less in an image of a cemented carbide film obtained by scanning electron microscopy is calculated in the following order (D1) and (E1).

(D1)按照上述碳化鎢粒子之圓相當徑之測定方法之(A1)及(B1)之順序,準備3張(相當於3個測定視野)藉由掃描式電子顯微鏡對超硬合金進行拍攝所得之圖像。分別於3個測定視野中進行上述碳化鎢粒子之圓相當徑之測定方法之(C1)中所記載的圖像處理(二值化處理)。1個測定視野之大小設為縱25.3 μm×寬17.6 μm之矩形。(D1) Prepare three images (corresponding to three measurement fields) of the cemented carbide alloy using a scanning electron microscope, following the sequence of steps (A1) and (B1) for measuring the equivalent circular diameter of tungsten carbide particles described above. Perform the image processing (binarization) described in step (C1) for measuring the equivalent circular diameter of tungsten carbide particles described above on each of the three measurement fields. The size of one measurement field is a rectangle measuring 25.3 μm in length and 17.6 μm in width.

(E1)分別於3個測定視野中算出測定視野中之圓相當徑為0.3 μm以下之碳化鎢粒子相對於全部碳化鎢粒子的個數基準之比率。將3個測定視野中之個數基準之比率之平均值設為超硬合金中之圓相當徑為0.3 μm以下之碳化鎢粒子之個數基準之比率。(E1) Calculate the number-based ratio of tungsten carbide particles with a circle-equivalent diameter of 0.3 μm or less in each of the three measurement fields relative to the total number of tungsten carbide particles in each field of view. The average of the number-based ratios in the three measurement fields is defined as the number-based ratio of tungsten carbide particles with a circle-equivalent diameter of 0.3 μm or less in the cemented carbide.

據申請人所測定,確認到,只要對同一試樣進行測定,則即便變更測定視野之選擇部位而測定複數次超硬合金中之圓相當徑為0.3 μm以下之碳化鎢粒子的個數基準之比率,測定結果之差異亦較小,即便任意設定測定視野亦不會隨意變化。The applicant has determined that, as long as the same sample is measured, the difference in the measurement results of the ratio of the number of tungsten carbide particles with a circular equivalent diameter of 0.3 μm or less in super-hard alloy is small even if the selected location of the measurement field of view is changed and the measurement results are measured multiple times. Even if the measurement field of view is arbitrarily set, the difference does not change arbitrarily.

於藉由掃描式電子顯微鏡對本發明之超硬合金進行拍攝所得之圖像中,圓相當徑超過1.8 μm之碳化鎢粒子之個數基準之比率未達2%。藉此,超硬合金可具有較高之抗彎力且具有優異之耐破損性。In images of the present invention's super-hard alloy taken with a scanning electron microscope, the number of tungsten carbide particles exceeding 1.8 μm in diameter was less than 2%. This demonstrates the super-hard alloy's high bending strength and excellent damage resistance.

圓相當徑超過1.8 μm之碳化鎢粒子之個數基準之比率未達2%,較佳為1%以下、0.5%以下。圓相當徑超過1.8 μm之碳化鎢粒子之個數基準之比率的下限並無特別限定,例如可設為0%以上、0.1%以上、0.2%以上。圓相當徑超過1.8 μm之碳化鎢粒子之個數基準之比率可設為0%以上且未達2%、0%以上1%以下、0%以上0.5%以下、0.1%以上且未達2%、0.1%以上1%以下、0.1%以上0.5%以下、0.2%以上且未達2%、0.2%以上1%以下、0.2%以上0.5%以下。The number-based ratio of tungsten carbide particles with a circle-equivalent diameter exceeding 1.8 μm is less than 2%, preferably 1% or less, or 0.5% or less. The lower limit of the number-based ratio of tungsten carbide particles with a circle-equivalent diameter exceeding 1.8 μm is not particularly limited, and may be, for example, 0% or more, 0.1% or more, or 0.2% or more. The number-based ratio of tungsten carbide particles with a circle-equivalent diameter exceeding 1.8 μm may be 0% or more and less than 2%, 0% or more and less than 1%, 0% or more and less than 0.5%, 0.1% or more and less than 2%, 0.1% or more and less than 1%, 0.1% or more and less than 0.5%, 0.2% or more and less than 2%, 0.2% or more and less than 1%, or 0.2% or more and less than 0.5%.

於本說明書中,藉由掃描式電子顯微鏡對超硬合金進行拍攝所得之圖像中圓相當徑超過1.8 μm之碳化鎢粒子的個數基準之比率係按照下述(F1)及(G1)之順序算出。In this specification, the number-based ratio of tungsten carbide particles with a circular equivalent diameter exceeding 1.8 μm in an image of cemented carbide obtained by scanning electron microscopy is calculated according to the following sequence (F1) and (G1).

(F1)按照上述碳化鎢粒子之圓相當徑之測定方法之(A1)及(B1)之順序,準備3張(相當於3個測定視野)藉由掃描式電子顯微鏡對超硬合金進行拍攝所得之圖像。分別於3個測定視野中進行上述碳化鎢粒子之圓相當徑之測定方法之(C1)中所記載的圖像處理(二值化處理)。1個測定視野之大小設為縱25.3 μm×寬17.6 μm之矩形。(F1) Prepare three images (corresponding to three measurement fields) of the cemented carbide alloy using a scanning electron microscope, following the sequence of steps (A1) and (B1) for measuring the equivalent circular diameter of tungsten carbide particles described above. Perform the image processing (binarization) described in step (C1) for measuring the equivalent circular diameter of tungsten carbide particles described above on each of the three measurement fields. The size of one measurement field is a rectangle measuring 25.3 μm in length and 17.6 μm in width.

(G1)分別於3個測定視野中算出測定視野中之圓相當徑超過1.8 μm之碳化鎢粒子相對於全部碳化鎢粒子的個數基準之比率。將其等之平均值設為超硬合金中之圓相當徑超過1.8 μm之碳化鎢粒子之個數基準之比率。(G1) Calculate the ratio of tungsten carbide particles with a circle-equivalent diameter exceeding 1.8 μm to the total number of tungsten carbide particles in each of the three measurement fields. The average of these ratios is used as the number-based ratio of tungsten carbide particles with a circle-equivalent diameter exceeding 1.8 μm in the cemented carbide.

據申請人所測定,確認到,只要對同一試樣進行測定,則即便變更測定視野之選擇部位而測定複數次超硬合金中之圓相當徑超過1.8 μm之碳化鎢粒子的個數基準之比率,測定結果之差異亦較小,即便任意設定測定視野亦不會隨意變化。The applicant has determined that, as long as the same sample is measured, the difference in the measurement results of the ratio of the number of tungsten carbide particles with a circular equivalent diameter exceeding 1.8 μm in a super-hard alloy is small even if the selected location of the measurement field of view is changed and the measurement results are measured multiple times. Even if the measurement field of view is arbitrarily set, the difference does not change arbitrarily.

<第2相> 第2相包含鈷。第2相係使構成第1相之碳化鎢粒子彼此結合成之結合相。 <Second Phase> The second phase contains cobalt. It is a bonding phase that binds the tungsten carbide particles that make up the first phase together.

此處,「第2相包含鈷(Co)」意指第2相之主成分為Co。「第2相之主成分為Co」意指第2相中之鈷之質量比率為90質量%以上100質量%以下。第2相中之鈷之質量比率可藉由感應耦合電漿(ICP)發射光譜分析法(使用機器:島津製作所製造之「ICPS-8100」(商標))進行測定。Here, "the second phase contains cobalt (Co)" means that the main component of the second phase is Co. "The main component of the second phase is Co" means that the mass ratio of cobalt in the second phase is 90% to 100% by mass. The mass ratio of cobalt in the second phase can be measured by inductively coupled plasma (ICP) optical emission spectroscopy (using the "ICPS-8100" (trademark) manufactured by Shimadzu Corporation).

第2相除包含鈷外,還可包含鎳等鐵屬元素、合金中之溶解物(鉻(Cr)、鎢(W)、釩(V)等)。In addition to cobalt, the second phase may also contain iron elements such as nickel, and dissolved substances in the alloy (chromium (Cr), tungsten (W), vanadium (V), etc.).

<超硬合金之組成> (組成) 超硬合金具備由複數個碳化鎢粒子構成之第1相及包含鈷之第2相,於藉由掃描式電子顯微鏡對超硬合金進行拍攝所得之圖像中,第1相之比率為78面積%以上且未達100面積%,且第2相之比率超過0面積%且為22面積%以下。藉此,可對印刷電路基板之加工發揮所需硬度及耐磨耗性,抑制工具壽命產生差異。 <Composition of Supercarbide> (Composition) Supercarbide has a first phase composed of multiple tungsten carbide particles and a second phase composed of cobalt. Images of the supercarbide taken with a scanning electron microscope show that the first phase accounts for 78% to 100% by volume, while the second phase accounts for 0% to 22% by volume. This ensures the hardness and wear resistance required for printed circuit board processing, minimizing variations in tool life.

若超硬合金中之第1相之比率為78面積%以上,則超硬合金之硬度提高。超硬合金中之第1相之比率之下限可設為78面積%以上、88面積%以上。超硬合金中之第1相之比率之上限可設為未達100面積%、95面積%以下。超硬合金中之第1相之比率可設為78面積%以上且未達100面積%、88面積%以上95面積%以下。If the ratio of the first phase in the cemented carbide is 78% by volume or greater, the hardness of the cemented carbide increases. The lower limit of the ratio of the first phase in the cemented carbide can be set to 78% by volume or greater and 88% by volume or greater. The upper limit of the ratio of the first phase in the cemented carbide can be set to less than 100% by volume and less than 95% by volume. The ratio of the first phase in the cemented carbide can be set to 78% by volume or greater and less than 100% by volume, 88% by volume or greater and less than 95% by volume.

若超硬合金中之第2相之比率為22面積%以下,則超硬合金之硬度提高。超硬合金中之第2相之比率之下限可設為超過0面積%、5面積%以上。超硬合金中之第2相之比率之上限可設為22面積%以下、12面積%以下。超硬合金中之第2相之比率可設為超過0面積%且為22面積%以下、5面積%以上12面積%以下。If the proportion of the second phase in the cemented carbide is 22% by volume or less, the hardness of the cemented carbide increases. The lower limit of the proportion of the second phase in the cemented carbide can be set to more than 0% by volume and more than 5% by volume. The upper limit of the proportion of the second phase in the cemented carbide can be set to less than 22% by volume and less than 12% by volume. The proportion of the second phase in the cemented carbide can be set to more than 0% by volume and less than 22% by volume, and more than 5% by volume and less than 12% by volume.

於藉由掃描式電子顯微鏡對超硬合金進行拍攝所得之圖像中,第1相之比率較佳為88面積%以上95面積%以下,且第2相之比率較佳為5面積%以上12面積%以下。In an image of the cemented carbide taken with a scanning electron microscope, the ratio of the first phase is preferably not less than 88 area% and not more than 95 area%, and the ratio of the second phase is preferably not less than 5 area% and not more than 12 area%.

超硬合金中之第1相及第2相各者之面積比率係按照下述(A2)~(C2)之順序進行測定。The area ratios of the first phase and the second phase in the cemented carbide are measured in the order of (A2) to (C2) below.

(A2)按照上述碳化鎢粒子之圓相當徑之測定方法之(A1)及(B1)之順序,準備5張(相當於5個測定視野)藉由掃描式電子顯微鏡對超硬合金進行拍攝所得之圖像。分別於5個測定視野中進行上述碳化鎢粒子之圓相當徑之測定方法之(C1)中所記載的圖像處理(二值化處理)。1個測定視野之大小設為縱25.3 μm×寬17.6 μm之矩形。(A2) Prepare five images (equivalent to five measurement fields) of the cemented carbide alloy using a scanning electron microscope, following the sequence of steps (A1) and (B1) for measuring the equivalent circular diameter of tungsten carbide particles described above. Perform the image processing (binarization) described in step (C1) for measuring the equivalent circular diameter of tungsten carbide particles described above on each of the five measurement fields. The size of one measurement field is a rectangle measuring 25.3 μm in length by 17.6 μm in width.

(B2)分別於5個測定視野中,以整個測定視野作為分母,測定第1相及第2相各者之面積比率。(B2) In each of the five measurement fields, using the entire measurement field as the denominator, determine the area ratio of the first phase to the second phase.

(C2)將5個測定視野中所獲得之第1相之面積比率之平均值設為超硬合金中之第1相之面積比率。將5個測定視野中所獲得之第2相之面積比率之平均值設為超硬合金中之第2相之面積比率。(C2) The average of the area ratios of the first phase obtained in the five measurement fields is set as the area ratio of the first phase in the cemented carbide. The average of the area ratios of the second phase obtained in the five measurement fields is set as the area ratio of the second phase in the cemented carbide.

(釩含量) 本發明之超硬合金之釩之質量基準之含量較佳為0 ppm以上且未達2000 ppm。即,本發明之超硬合金較佳為(a)不含釩,或(b)於包含釩之情形時釩之質量基準之含量未達2000 ppm。 (Valium Content) The vanadium content of the cemented carbide of the present invention is preferably 0 ppm by mass or greater and less than 2000 ppm by mass. Specifically, the cemented carbide of the present invention preferably (a) contains no vanadium, or (b) if it contains vanadium, the vanadium content is less than 2000 ppm by mass.

釩由於具有抑制晶粒生長之作用,故被用於製造先前之超微粒超硬合金。然而,若為了抑制晶粒生長而添加釩,則有作為原料使用之微粒碳化鎢粒子直接殘留於所獲得之微粒超硬合金中的趨勢。Vanadium has been used in the production of previously ultrafine-grained cemented carbide alloys due to its ability to inhibit grain growth. However, when vanadium is added to inhibit grain growth, the tungsten carbide particles used as the raw material tend to remain in the resulting cemented carbide alloy.

本發明人等對製造條件進行了銳意研究,結果新發現了如下製造條件:於不添加釩之情形時或添加微量釩之情形時,亦可有效地抑制作為原料之微粒碳化鎢粒子殘留於所獲得之超硬合金中,且可有效地抑制粗大粒子之產生。關於製造條件之詳細情況,將於下文進行敍述。The inventors of this invention have conducted intensive research on manufacturing conditions, resulting in the discovery of new manufacturing conditions that effectively prevent the retention of fine tungsten carbide particles, the raw material, in the resulting superhard alloy, even when no vanadium is added or when a trace amount of vanadium is added. These conditions can also effectively suppress the formation of coarse particles. Details of these manufacturing conditions are described below.

超硬合金之釩之含量之上限未達2000 ppm,較佳為未達100 ppm。由於超硬合金之釩之含量越少越好,故其下限為0 ppm。超硬合金之釩之含量可設為0 ppm以上且未達2000 ppm、0 ppm以上且未達100 ppm。The upper limit of the vanadium content in cemented carbide is less than 2000 ppm, preferably less than 100 ppm. Since the lower the vanadium content in cemented carbide, the better, the lower limit is 0 ppm. The vanadium content in cemented carbide can be set to 0 ppm or more but less than 2000 ppm, or 0 ppm or more but less than 100 ppm.

超硬合金之釩之含量係藉由ICP發射光譜分析法進行測定。The vanadium content of cemented carbide was determined by ICP emission spectroscopy.

(鈷含量) 本發明之超硬合金之鈷之質量基準之含量超過0質量%且為10質量%以下。藉此,超硬合金可具有較高之硬度且具有優異之耐磨耗性。 (Cobalt Content) The cobalt content of the cemented carbide of the present invention is greater than 0% by mass and less than 10% by mass. This allows the cemented carbide to possess high hardness and excellent wear resistance.

超硬合金之鈷之含量之上限較佳為9質量%以下、8質量%以下。超硬合金之鈷之含量之下限較佳為1質量%以上、2質量%以上。超硬合金之鈷之含量較佳為1質量%以上9質量%以下、2質量%以上8質量%以下。The upper limit of the cobalt content in the cemented carbide is preferably 9% by mass or less and 8% by mass or less. The lower limit of the cobalt content in the cemented carbide is preferably 1% by mass or more and 2% by mass or more. The cobalt content in the cemented carbide is preferably 1% by mass or more and 9% by mass or less and 2% by mass or more and 8% by mass or less.

超硬合金中之鈷之含量係藉由ICP發射光譜分析法進行測定。The cobalt content in cemented carbide was determined by ICP emission spectrometry.

(鉻含量) 本發明之超硬合金包含鉻(Cr),超硬合金之鉻之質量基準之含量較佳為0.15質量%以上1.0質量%以下。鉻具有抑制碳化鎢粒子之晶粒生長之作用。本發明人等進行了研究,結果新發現:於超硬合金中之鉻之含量為0.15質量%以上1.0質量%以下之情形時,可有效地抑制作為原料之微粒碳化鎢粒子殘留於所獲得之超硬合金中,且可有效地抑制粗大粒子之產生。 (Chromium Content) The superhard alloy of the present invention contains chromium (Cr). The chromium content of the superhard alloy is preferably 0.15% by mass to 1.0% by mass. Chromium inhibits the grain growth of tungsten carbide particles. The inventors have conducted research and discovered that a chromium content of 0.15% by mass to 1.0% by mass in the superhard alloy effectively prevents the fine tungsten carbide particles used as the raw material from remaining in the resulting superhard alloy, and also effectively suppresses the formation of coarse particles.

超硬合金之鉻之含量之上限較佳為0.95質量%以下、0.90質量%以下。超硬合金之鉻之含量之下限較佳為0.20質量%以上、0.25量%以上。超硬合金之鉻之含量較佳為0.20質量%以上0.95質量%以下、0.25質量%以上0.90質量%以下。The upper limit of the chromium content in the cemented carbide is preferably 0.95% by mass or less and 0.90% by mass or less. The lower limit of the chromium content in the cemented carbide is preferably 0.20% by mass or more and 0.25% by mass or more. The chromium content in the cemented carbide is preferably 0.20% by mass or more and 0.95% by mass or less and 0.25% by mass or more and 0.90% by mass or less.

超硬合金中之鉻之含量係藉由ICP發射光譜分析法進行測定。The chromium content in cemented carbide was determined by ICP emission spectrometry.

(鈷與鉻之比率) 於本發明之超硬合金中,鉻相對於鈷之比率以質量基準計較佳為5%以上10%以下。鉻具有抑制碳化鎢粒子之晶粒生長之作用。進而,藉由固溶於鈷中,促進鈷產生晶格應變。因此,若超硬合金以上述比率包含鉻,則耐破損性進一步提高。 (Cobalt to Chromium Ratio) In the superhard alloy of the present invention, the ratio of chromium to cobalt is preferably 5% to 10% by mass. Chromium inhibits the grain growth of tungsten carbide particles. Furthermore, by forming a solid solution in cobalt, it promotes lattice strain in the cobalt. Therefore, when the superhard alloy contains chromium in the above ratio, its fracture resistance is further improved.

另一方面,若鉻之量過多,則有時鉻以碳化物之形式析出,成為破損之起點。若鉻相對於鈷之比率為5%以上10%以下,則不易析出鉻之碳化物,可獲得提高耐破損性之效果。On the other hand, if the amount of chromium is too high, it may precipitate as carbides, becoming a starting point for damage. If the ratio of chromium to cobalt is between 5% and 10%, chromium carbides are less likely to precipitate, resulting in improved damage resistance.

又,若鉻相對於鈷之比率為10%以下,則抑制晶粒生長之作用之程度適當,可抑制超硬合金中之圓相當徑超過1.2 μm之碳化鎢粒子之量變得過多。Furthermore, if the ratio of chromium to cobalt is 10% or less, the degree of grain growth inhibition is appropriate, and the amount of tungsten carbide particles with a circle equivalent diameter exceeding 1.2 μm in the superhard alloy can be prevented from becoming excessive.

鉻相對於鈷之比率之下限較佳為5%以上,更佳為7%以上。鉻相對於鈷之比率較佳為10%以下,更佳為9%以下。鉻相對於鈷之比率可設為5%以上10%以下、7%以上9%以下。The lower limit of the ratio of chromium to cobalt is preferably 5% or more, more preferably 7% or more. The ratio of chromium to cobalt is preferably 10% or less, more preferably 9% or less. The ratio of chromium to cobalt can be set to 5% or more and 10% or 7% or more and 9% or less.

<超硬合金之製造方法> 本實施方式之超硬合金代表性地可藉由依序進行原料粉末之準備步驟、混合步驟、成形步驟、燒結步驟、冷卻步驟而製造。以下,對各步驟進行說明。 <Method for Manufacturing Superhard Carbide> The superhard carbide of this embodiment can typically be manufactured by sequentially performing a raw material powder preparation step, a mixing step, a forming step, a sintering step, and a cooling step. Each step is described below.

≪準備步驟≫ 準備步驟係準備構成超硬合金之所有材料之原料粉末的步驟。關於原料粉末,可例舉第1相之原料即碳化鎢粉末、第2相之原料即鈷(Co)粉末作為必需原料粉末。又,可視需要準備碳化鉻(Cr 3C 2)粉末作為晶粒生長抑制劑。碳化鎢粉末、鈷粉末、碳化鉻粉末可使用市售者。 The preparation step involves preparing the raw material powders for all materials that make up the cemented carbide alloy. Essential raw material powders include tungsten carbide powder, the raw material for the first phase, and cobalt (Co) powder, the raw material for the second phase. Chromium carbide (Cr 3 C 2 ) powder can also be prepared as a grain growth inhibitor, if necessary. Commercially available tungsten carbide, cobalt, and chromium carbide powders can be used.

準備平均粒徑為0.5 μm以上1.5 μm以下之碳化鎢粉末作為碳化鎢粉末。於本說明書中,原料粉末之平均粒徑意指藉由FSSS(Fisher Sub-Sieve Sizer,費氏微篩分粒器)法測得之平均粒徑。該平均粒徑係使用Fisher Scientific公司製造之「Sub-Sieve Sizer Model 95」(商標)進行測定。Prepare tungsten carbide powder with an average particle size of 0.5 μm to 1.5 μm. In this specification, the average particle size of the raw material powder refers to the average particle size measured using the Fisher Sub-Sieve Sizer (FSSS) method. This average particle size is measured using a "Sub-Sieve Sizer Model 95" (trademark) manufactured by Fisher Scientific.

碳化鎢粉末之20%體積粒徑d20與80%體積粒徑d80之比d20/d80較佳為0.2以上1以下。此種碳化鎢粉末之粒徑均一,且粒徑為0.3 μm以下之微粒碳化鎢粒子之含量較少。因此,若使用該碳化鎢粉末製作超硬合金,則可抑制燒結步驟中因溶解再析出而產生粗大碳化鎢粒子。又,可降低所獲得之超硬合金中之微粒碳化鎢粒子之含量。The ratio (d20/d80) of the 20% volume particle size (d20) to the 80% volume particle size (d80) of the tungsten carbide powder is preferably 0.2 or higher and 1 or lower. This tungsten carbide powder has a uniform particle size and contains a low content of fine tungsten carbide particles with a particle size of 0.3 μm or less. Therefore, when using this tungsten carbide powder to produce superhard alloys, the formation of coarse tungsten carbide particles due to dissolution and reprecipitation during the sintering step can be suppressed. Furthermore, the content of fine tungsten carbide particles in the resulting superhard alloy can be reduced.

於本說明書中,碳化鎢粉末之體積粒徑之分佈係使用Microtrac公司製造之粒度分佈測定裝置(商品名:MT3300EX)進行測定。20%體積粒徑d20意指按升序累計構成碳化鎢粉末之各粒子之體積時,占總體積之20%時之粒徑。80%體積粒徑d80意指按升序累計構成碳化鎢粉末之各粒子之體積時,占總體積之80%時之粒徑。In this specification, the volume particle size distribution of tungsten carbide powder is measured using a Microtrac particle size distribution analyzer (trade name: MT3300EX). The 20% volume particle size (d20) refers to the particle size at which the volume of the particles comprising the tungsten carbide powder, in ascending order, accounts for 20% of the total volume. The 80% volume particle size (d80) refers to the particle size at which the volume of the particles comprising the tungsten carbide powder, in ascending order, accounts for 80% of the total volume.

於本發明之超硬合金之製造方法中,不使用製造先前之微粒超硬合金時通常使用之晶粒生長抑制效果較高之碳化釩(VC)粉末,或者即便使用亦為微量(例如,原料粉末中之質量基準之含量未達2000 ppm)。於本發明之超硬合金之製造方法中,於原料之準備階段降低了粒徑為0.3 μm以下之微粒碳化鎢粒子於原料粉末中之含量,故不論釩(V)之添加量多少,均可將超硬合金中之微粒碳化鎢粒子之面積比率抑制得較低。再者,由於在原料之準備階段降低了微粒碳化鎢粒子之含量,故於不添加釩(V)之情形時,該等微粒碳化鎢粒子之晶粒生長,可進一步減少超硬合金中之微粒碳化鎢粒子。另一方面,由於本來原料粉末中之微粒碳化鎢粒子之數量較少,故亦不會發生產生粗大碳化鎢粒子之程度之異常晶粒生長。該作用機制係本發明人等新發現者。In the super-hard alloy manufacturing method of the present invention, vanadium carbide (VC) powder, which has a high grain growth inhibition effect and is commonly used in the production of previous micro-particle super-hard alloys, is not used, or even if it is used, it is only used in trace amounts (for example, the mass-based content in the raw material powder is less than 2000 ppm). In the super-hard alloy manufacturing method of the present invention, the content of micro-particle tungsten carbide particles with a particle size of 0.3 μm or less in the raw material powder is reduced during the raw material preparation stage. Therefore, regardless of the amount of vanadium (V) added, the area ratio of micro-particle tungsten carbide particles in the super-hard alloy can be suppressed to a low level. Furthermore, because the content of micro-particle tungsten carbide particles is reduced during the raw material preparation stage, the grain growth of these micro-particle tungsten carbide particles can be further reduced when vanadium (V) is not added, thereby further reducing the micro-particle tungsten carbide particles in the super-hard alloy. On the other hand, because the amount of fine tungsten carbide particles in the raw material powder is relatively small, abnormal grain growth to the extent that coarse tungsten carbide particles would be produced does not occur. This mechanism of action is a new discovery by the inventors.

鈷粉末之平均粒徑可設為0.5 μm以上1.5 μm以下。碳化鉻粉末之平均粒徑可設為1.0 μm以上2.0 μm以下。該平均粒徑係使用Fisher Scientific公司製造之「Sub-Sieve Sizer Model 95」(商標)進行測定。The average particle size of cobalt powder can be set to 0.5 μm to 1.5 μm. The average particle size of chromium carbide powder can be set to 1.0 μm to 2.0 μm. The average particle size is measured using a "Sub-Sieve Sizer Model 95" manufactured by Fisher Scientific.

≪混合步驟≫ 混合步驟係將準備步驟中所準備之各原料粉末進行混合之步驟。藉由混合步驟,可獲得各原料粉末混合而成之混合粉末。 Mixing Step The mixing step involves combining the raw material powders prepared in the preparation step. This step creates a mixed powder.

混合粉末中之碳化鎢粉末之比率例如可設為88.85質量%以上99.83質量%以下。The ratio of the tungsten carbide powder in the mixed powder can be set to, for example, 88.85 mass % or more and 99.83 mass % or less.

混合粉末中之鈷粉末之比率例如可設為超過0質量%且為10質量%以下。The ratio of the cobalt powder in the mixed powder can be set to, for example, more than 0 mass % and not more than 10 mass %.

混合粉末中之碳化鉻粉末之比率例如可設為0.17質量%以上1.15質量%以下。The ratio of the chromium carbide powder in the mixed powder can be set to, for example, 0.17 mass % to 1.15 mass %.

使用球磨機將混合粉末進行混合。混合時間可設為15小時以上36小時以下。藉由該等條件,可抑制原料粉末粉碎,可維持原料粉末之粒徑之均一性。The mixed powder is mixed using a ball mill. The mixing time can be set to 15 to 36 hours. These conditions can prevent the raw material powder from pulverizing and maintain the uniformity of the raw material powder particle size.

亦可於混合步驟之後,視需要將混合粉末進行造粒。藉由將混合粉末進行造粒,於下述成形步驟時容易將混合粉末填充於模(die)或模具(mold)中。造粒時可應用公知之造粒方法,例如可使用噴霧乾燥器等市售之造粒機。After the mixing step, the mixed powder can be granulated as needed. Granulating the mixed powder facilitates filling the die or mold with the mixed powder during the molding step described below. Granulation can be performed using known granulation methods, such as a commercially available granulator such as a spray dryer.

≪成形步驟≫ 成形步驟係將混合步驟中所獲得之混合粉末成形為特定形狀而獲得成形體之步驟。成形步驟中之成形方法及成形條件並無特別限制,只要採用通常之方法及條件即可。作為特定形狀,例如可例舉製成切削工具形狀(例如小徑鑽孔器之形狀)。 Forming Step The forming step involves forming the mixed powder obtained in the mixing step into a specific shape to produce a compact. The forming method and conditions in the forming step are not particularly limited; conventional methods and conditions may be employed. An example of a specific shape is the shape of a cutting tool (e.g., a small-diameter drill).

≪燒結步驟≫ 燒結步驟係燒結成形步驟中所獲得之成形體,獲得超硬合金之步驟。於本發明之超硬合金之製造方法中,燒結溫度可設為1350~1450℃。藉此,抑制粗大碳化鎢粒子之產生。又,可降低所獲得之超硬合金中之微粒碳化鎢粒子之含量。 Sintering Step The sintering step involves sintering the formed body obtained in the forming step to produce a superhard alloy. In the superhard alloy production method of the present invention, the sintering temperature can be set to 1350-1450°C. This suppresses the formation of coarse tungsten carbide particles and reduces the content of fine tungsten carbide particles in the resulting superhard alloy.

若燒結溫度未達1350℃,則有抑制晶粒生長,所獲得之超硬合金中之微粒碳化鎢粒子之含量增加的趨勢。另一方面,若燒結溫度超過1450℃,則有容易發生異常晶粒生長之趨勢。If the sintering temperature is lower than 1350°C, grain growth is suppressed, and the content of fine tungsten carbide particles in the resulting super-hard alloy tends to increase. On the other hand, if the sintering temperature exceeds 1450°C, abnormal grain growth tends to occur.

≪冷卻步驟≫ 冷卻步驟係將燒結完成後之超硬合金進行冷卻之步驟。冷卻條件並無特別限制,只要採用通常之條件即可。 Cooling Step The cooling step involves cooling the sintered cemented carbide. There are no specific cooling conditions; standard cooling conditions will suffice.

根據本發明之超硬合金之製造方法,即便於不使用製造先前之微粒超硬合金時通常使用之晶粒生長抑制效果較高之碳化釩(VC)粉末,或即便使用亦為微量(例如,原料粉末中之質量基準之含量未達2000 ppm)之情形時,亦可獲得異常晶粒生長之產生得以抑制且微粒碳化鎢粒子之含量得以降低之超硬合金。其係本發明人等進行了銳意研究後新發現者。The present invention's super-hard alloy production method allows for the production of super-hard alloys that suppress abnormal grain growth and reduce the content of fine-grained tungsten carbide particles, even without the use of vanadium carbide (VC) powder, which has a high grain growth-inhibiting effect and is commonly used in the production of previous micro-grained super-hard alloys. Even when VC powder is used, it is only in trace amounts (e.g., less than 2000 ppm by mass in the raw material powder). This discovery is the result of intensive research by the inventors.

[實施方式2:切削工具] 本發明之切削工具含有包含上述超硬合金之刀尖。於本說明書中,刀尖意指參與切削之部分,意指超硬合金中由其刀尖稜線與假想面所包圍之區域,該假想面係自該刀尖稜線至超硬合金側,沿著該刀尖稜線之切線之垂線的距離為2 mm。 [Embodiment 2: Cutting Tool] The cutting tool of the present invention comprises a cutting tip made of the aforementioned super-hard alloy. In this specification, the cutting tip refers to the portion of the super-hard alloy involved in cutting, specifically the area of the super-hard alloy enclosed by the cutting tip edge and a hypothetical plane measured 2 mm from the cutting tip edge to the side of the super-hard alloy, along a perpendicular line tangent to the cutting tip edge.

作為切削工具,例如可例示:切削刀具、鑽孔器、端銑刀、銑削加工用刀尖更換型切削尖梢、車削加工用刀尖更換型切削尖梢、金屬用鋸、齒輪切製工具、鉸刀或螺絲攻等。尤其是,當本發明之切削工具為印刷電路基板加工用小徑鑽孔器時,可發揮優異之效果。Examples of cutting tools include cutting tools, drills, end mills, replaceable cutting tips for milling, replaceable cutting tips for turning, metal saws, gear cutting tools, hinges, and taps. The cutting tool of the present invention is particularly effective when used as a small-diameter drill for processing printed circuit boards.

本實施方式之超硬合金可構成該等工具之整體,亦可構成一部分。此處,「構成一部分」表示將本實施方式之超硬合金硬焊於任意基材之特定位置而製成刀尖部之態樣等。The super-hard alloy of this embodiment can constitute the whole of these tools or a part thereof. Here, "constituting a part" means that the super-hard alloy of this embodiment is brazed to a specific position of any base material to form the tip of the tool.

≪硬質膜≫ 本實施方式之切削工具可進而具備被覆包含超硬合金之基材之表面之至少一部分的硬質膜。作為硬質膜,例如可使用類鑽碳或金剛石。 Hard Coating The cutting tool of this embodiment may further include a hard coating covering at least a portion of the surface of the substrate made of a cemented carbide. Diamond-like carbon or diamond, for example, may be used as the hard coating.

[附記1] 於本發明之超硬合金中,碳化鎢粒子之圓相當徑之平均值較佳為0.55 μm以上1.1 μm以下。 於本發明之超硬合金中,碳化鎢粒子之圓相當徑之平均值較佳為0.60 μm以上1.0 μm以下。 [Note 1] In the superhard alloy of the present invention, the average equivalent diameter of the tungsten carbide particles is preferably not less than 0.55 μm and not more than 1.1 μm. In the superhard alloy of the present invention, the average equivalent diameter of the tungsten carbide particles is preferably not less than 0.60 μm and not more than 1.0 μm.

[附記2] 於本發明之超硬合金中,圓相當徑為0.3 μm以下之碳化鎢粒子之個數基準之比率較佳為0%以上10%以下。 於本發明之超硬合金中,圓相當徑為0.3 μm以下之碳化鎢粒子之個數基準之比率較佳為0%以上9%以下。 於本發明之超硬合金中,圓相當徑為0.3 μm以下之碳化鎢粒子之個數基準之比率較佳為0%以上8%以下。 [Note 2] In the super-hard alloy of the present invention, the ratio of tungsten carbide particles with a circle-equivalent diameter of 0.3 μm or less, based on number, is preferably 0% or more and 10% or less. In the super-hard alloy of the present invention, the ratio of tungsten carbide particles with a circle-equivalent diameter of 0.3 μm or less, based on number, is preferably 0% or more and 9% or less. In the super-hard alloy of the present invention, the ratio of tungsten carbide particles with a circle-equivalent diameter of 0.3 μm or less, based on number, is preferably 0% or more and 8% or less.

[附記3] 於本發明之超硬合金中,圓相當徑超過1.8 μm之碳化鎢粒子之個數基準之比率較佳為0%以上且未達2%。 於本發明之超硬合金中,圓相當徑超過1.8 μm之碳化鎢粒子之個數基準之比率較佳為0%以上1%以下。 於本發明之超硬合金中,圓相當徑超過1.8 μm之碳化鎢粒子之個數基準之比率較佳為0%以上0.5%以下。 [Note 3] In the super-hard alloy of the present invention, the number-based ratio of tungsten carbide particles with a circle-equivalent diameter exceeding 1.8 μm is preferably 0% or more and less than 2%. In the super-hard alloy of the present invention, the number-based ratio of tungsten carbide particles with a circle-equivalent diameter exceeding 1.8 μm is preferably 0% or more and less than 1%. In the super-hard alloy of the present invention, the number-based ratio of tungsten carbide particles with a circle-equivalent diameter exceeding 1.8 μm is preferably 0% or more and less than 0.5%.

[附記4] 於藉由掃描式電子顯微鏡對本發明之超硬合金進行拍攝所得之圖像中,第1相之比率較佳為88面積%以上95面積%以下。 於藉由掃描式電子顯微鏡對本發明之超硬合金進行拍攝所得之圖像中,第2相之比率較佳為5面積%以上12面積%以下。 於藉由掃描式電子顯微鏡對本發明之超硬合金進行拍攝所得之圖像中,第1相之比率較佳為88面積%以上95面積%以下,且第2相之比率較佳為5面積%以上12面積%以下。 [Note 4] In an image of the cemented carbide of the present invention photographed using a scanning electron microscope, the ratio of the first phase is preferably 88% by area to 95% by area. In an image of the cemented carbide of the present invention photographed using a scanning electron microscope, the ratio of the second phase is preferably 5% by area to 12% by area. In an image of the cemented carbide of the present invention photographed using a scanning electron microscope, the ratio of the first phase is preferably 88% by area to 95% by area, and the ratio of the second phase is preferably 5% by area to 12% by area.

[附記5] 本發明之超硬合金之釩之質量基準之含量較佳為0 ppm以上且未達2000 ppm。 本發明之超硬合金之釩之質量基準之含量較佳為0 ppm以上且未達100 ppm。 [Note 5] The vanadium content of the cemented carbide of the present invention is preferably 0 ppm or more and less than 2000 ppm by mass. The vanadium content of the cemented carbide of the present invention is preferably 0 ppm or more and less than 100 ppm by mass.

[附記6] 本發明之超硬合金之鈷之質量基準之含量較佳為1質量%以上9質量%以下。 本發明之超硬合金之鈷之質量基準之含量較佳為2質量%以上8質量%以下。 [Note 6] The cobalt content of the cemented carbide of the present invention is preferably not less than 1% by mass and not more than 9% by mass. The cobalt content of the cemented carbide of the present invention is preferably not less than 2% by mass and not more than 8% by mass.

[附記7] 本發明之超硬合金之鉻之質量基準之含量較佳為0.20質量%以上0.95質量%以下。 本發明之超硬合金之鉻之質量基準之含量較佳為0.25質量%以上0.90質量%以下。 [Note 7] The chromium content of the cemented carbide of the present invention is preferably not less than 0.20 mass% and not more than 0.95 mass%. The chromium content of the cemented carbide of the present invention is preferably not less than 0.25 mass% and not more than 0.90 mass%.

[附記8] 於本發明之超硬合金中,鉻相對於鈷之比率以質量基準計較佳為7%以上9%以下。 [實施例] [Note 8] In the superhard alloy of the present invention, the ratio of chromium to cobalt is preferably not less than 7% and not more than 9% by mass. [Example]

藉由實施例對本實施方式更具體地進行說明。但是,本實施方式並不受該等實施例限定。The present embodiment is described in more detail with reference to the following examples, but the present embodiment is not limited to these examples.

變更原料粉末之種類、調配比及製造條件,製作試樣1~試樣17之超硬合金。製作具備包含該超硬合金之刀尖之小徑鑽孔器,對其進行評估。By varying the type of raw material powder, mixing ratio, and manufacturing conditions, super-hard alloy samples 1 to 17 were produced. Small-diameter drills with tool tips incorporating these super-hard alloys were manufactured and evaluated.

≪試樣之製作≫ (準備步驟) 作為原料粉末,準備表1之「原料」欄所示之組成之粉末。作為碳化鎢(WC)粉末,準備複數種平均粒徑不同者。WC粉末之平均粒徑如表1之「WC粉末」之「平均粒徑(μm)」欄所示。Co粉末之平均粒徑為1.0 μm。Cr 3C 2粉末之平均粒徑為1.5 μm。VC粉末之平均粒徑為0.9 μm。原料粉末之平均粒徑係使用Fisher Scientific公司製造之「Sub-Sieve Sizer Model 95」(商標)測得之值。 Sample Preparation (Preparation Steps) Prepare raw material powders with the compositions shown in the "Raw Materials" column of Table 1. Prepare several tungsten carbide (WC) powders with different average particle sizes. The average particle sizes of the WC powders are shown in the "Average Particle Size (μm)" column of the "WC Powder" section of Table 1. The average particle size of the Co powder is 1.0 μm. The average particle size of the Cr₃C₂ powder is 1.5 μm. The average particle size of the VC powder is 0.9 μm. The average particle size of the raw material powders was measured using a "Sub-Sieve Sizer Model 95" (trademark) manufactured by Fisher Scientific.

對於試樣1~試樣13之WC粉末,測定其20%體積粒徑d20與其80%體積粒徑d80之比d20/d80,結果所有試樣之d20/d80均處於0.2以上1以下之範圍內。 對試樣14~試樣17之WC粉末測定d20/d80,結果所有試樣之d20/d80均為0.1以上且未達0.2。 WC粉末之d20/d80係使用Microtrac公司製造之粒度分佈測定裝置(商品名:MT3300EX)測得之值。 For WC powders from Samples 1 to 13, the ratio of the 20% volume particle size (d20) to the 80% volume particle size (d80) (d20/d80) was measured. The results showed that all samples had a d20/d80 ratio between 0.2 and 1. For WC powders from Samples 14 to 17, the d20/d80 ratio was measured. The results showed that all samples had a d20/d80 ratio between 0.1 and 0.2. The d20/d80 ratios of the WC powders were measured using a Microtrac particle size distribution analyzer (trade name: MT3300EX).

(混合步驟) 將各原料粉末以表1之「原料」之「質量%」欄所示之調配量進行混合,製作混合粉末。表1之「原料」欄之「質量%」表示各原料粉末相對於原料粉末之合計質量之比率。混合係藉由球磨機或磨碎機進行。混合時間如表1之「混合步驟」之「混合機/時間」欄所記載。將所獲得之混合粉末進行噴霧乾燥,製成造粒粉末。 (Mixing Step) Mix the raw material powders in the amounts listed in the "Mass %" column under "Raw Materials" in Table 1 to produce a mixed powder. The "Mass %" in the "Raw Materials" column in Table 1 represents the ratio of each raw material powder to the total mass of the raw material powders. Mixing is performed using a ball mill or attritor. The mixing time is as specified in the "Mixer/Time" column under "Mixing Step" in Table 1. The resulting mixed powder is spray dried to produce a granulated powder.

(成形步驟) 將所獲得之造粒粉末進行加壓成形,製作 3.4 mm之圓桿形狀之成形體。 (Forming step) The obtained granulated powder is pressurized to form 3.4 mm round rod shaped molded body.

(燒結步驟) 將成形體放入燒結爐中,於真空中進行燒結。燒結溫度及燒結時間如表1之「燒結步驟」之「溫度/時間」欄所記載。 (Sintering Step) The formed body is placed in a sintering furnace and sintered in a vacuum. The sintering temperature and time are as shown in the "Temperature/Time" column of the "Sintering Step" in Table 1.

(冷卻步驟) 燒結完成後,於氬(Ar)氣氛圍中進行緩冷,獲得超硬合金。 (Cooling Step) After sintering, the alloy is slowly cooled in an argon (Ar) atmosphere to obtain a super-hard alloy.

[表1] 表1 試樣No. 原料 混合步驟 燒結步驟 WC粉末 Co粉末 Cr 3C 2粉末 VC粉末 混合機/時間 溫度/時間 平均粒徑 (μm) 質量% 平均粒徑 (μm) 質量% 平均粒徑 (μm) 質量% 質量% 1 0.9 94.54 1.0 5 1.5 0.46 - 球磨機/15小時 1420℃/1小時 2 0.7 94.54 1.0 5 1.5 0.46 - 球磨機/15小時 1420℃/1小時 3 1.4 94.54 1.0 5 1.5 0.46 - 球磨機/15小時 1420℃/1小時 4 0.9 94.44 1.0 5 1.5 0.46 0.10 球磨機/15小時 1420℃/1小時 5 0.9 94.34 1.0 5 1.5 0.46 0.20 球磨機/15小時 1420℃/1小時 6 0.9 90.17 1.0 9 1.5 0.83 - 球磨機/15小時 1420℃/1小時 7 0.9 96.72 1.0 3 1.5 0.28 - 球磨機/15小時 1420℃/1小時 8 0.9 97.82 1.0 2 1.5 0.18 - 球磨機/15小時 1420℃/1小時 9 0.9 94.88 1.0 5 1.5 0.12 - 球磨機/15小時 1420℃/1小時 10 0.9 93.62 1.0 5 1.5 1.38 - 球磨機/15小時 1420℃/1小時 11 0.9 94.83 1.0 5 1.5 0.17 - 球磨機/15小時 1420℃/1小時 12 0.9 93.85 1.0 5 1.5 1.15 - 球磨機/15小時 1420℃/1小時 13 0.9 94.53 1.0 5 1.5 0.46 0.01 球磨機/15小時 1420℃/1小時 14 1.0 94.54 1.0 5 1.5 0.46 - 磨碎機/9小時 1420℃/1小時 15 0.5 94.54 1.0 5 1.5 0.46 - 球磨機/15小時 1470℃/1小時 16 2.0 94.54 1.0 5 1.5 0.46 - 球磨機/15小時 1420℃/1小時 17 0.9 88.08 1.0 11 1.5 0.92 - 球磨機/15小時 1420℃/1小時 [Table 1] Table 1 Sample No. raw material Mixing step Sintering steps WC powder Co powder Cr 3 C 2 powder VC powder Mixer/time Temperature/time Average particle size (μm) Mass% Average particle size (μm) Mass% Average particle size (μm) Mass% Mass% 1 0.9 94.54 1.0 5 1.5 0.46 - Ball mill/15 hours 1420℃/1 hour 2 0.7 94.54 1.0 5 1.5 0.46 - Ball mill/15 hours 1420℃/1 hour 3 1.4 94.54 1.0 5 1.5 0.46 - Ball mill/15 hours 1420℃/1 hour 4 0.9 94.44 1.0 5 1.5 0.46 0.10 Ball mill/15 hours 1420℃/1 hour 5 0.9 94.34 1.0 5 1.5 0.46 0.20 Ball mill/15 hours 1420℃/1 hour 6 0.9 90.17 1.0 9 1.5 0.83 - Ball mill/15 hours 1420℃/1 hour 7 0.9 96.72 1.0 3 1.5 0.28 - Ball mill/15 hours 1420℃/1 hour 8 0.9 97.82 1.0 2 1.5 0.18 - Ball mill/15 hours 1420℃/1 hour 9 0.9 94.88 1.0 5 1.5 0.12 - Ball mill/15 hours 1420℃/1 hour 10 0.9 93.62 1.0 5 1.5 1.38 - Ball mill/15 hours 1420℃/1 hour 11 0.9 94.83 1.0 5 1.5 0.17 - Ball mill/15 hours 1420℃/1 hour 12 0.9 93.85 1.0 5 1.5 1.15 - Ball mill/15 hours 1420℃/1 hour 13 0.9 94.53 1.0 5 1.5 0.46 0.01 Ball mill/15 hours 1420℃/1 hour 14 1.0 94.54 1.0 5 1.5 0.46 - Grinder/9 hours 1420℃/1 hour 15 0.5 94.54 1.0 5 1.5 0.46 - Ball mill/15 hours 1470℃/1 hour 16 2.0 94.54 1.0 5 1.5 0.46 - Ball mill/15 hours 1420℃/1 hour 17 0.9 88.08 1.0 11 1.5 0.92 - Ball mill/15 hours 1420℃/1 hour

<評估> 對於各試樣之超硬合金,測定碳化鎢粒子之圓相當徑之平均值及分佈、第1相及第2相之面積比率、釩之質量基準之含量、鈷之質量基準之含量及鉻相對於鈷之質量基準之比率。 <Evaluation> For each sample of cemented carbide, the average value and distribution of the circular equivalent diameter of tungsten carbide particles, the area ratio of the first and second phases, the mass-based vanadium content, the mass-based cobalt content, and the mass-based ratio of the chromium phase to the cobalt were measured.

(碳化鎢粒子之圓相當徑之平均值) 對於各試樣之超硬合金,測定碳化鎢粒子之圓相當徑之平均值。由於具體測定方法已記載於實施方式1中,故不再重複其說明。將結果示於表2之「WC粒子之圓相當徑」之「平均值」欄中。 (Average Value of the Circle Equivalent Diameter of Tungsten Carbide Particles) For each sample of cemented carbide, the average value of the circle equivalent diameter of the tungsten carbide particles was measured. Since the specific measurement method is described in Example 1, its description is not repeated here. The results are shown in the "Average Value" column under "Circle Equivalent Diameter of WC Particles" in Table 2.

(碳化鎢粒子之圓相當徑之分佈) 對於各試樣之超硬合金,算出圓相當徑為0.3 μm以下之碳化鎢粒子之個數基準之比率、及圓相當徑超過1.8 μm之碳化鎢粒子之個數基準之比率。由於具體測定方法及算出方法已記載於實施方式1中,故不再重複其說明。 (Distribution of Tungsten Carbide Particles by Equivalent Circle Diameter) For each sample of cemented carbide, the number-based ratio of tungsten carbide particles with an equivalent circle diameter of 0.3 μm or less and the number-based ratio of tungsten carbide particles with an equivalent circle diameter of more than 1.8 μm were calculated. The specific measurement and calculation methods are described in Example 1 and will not be repeated here.

將結果分別示於表2之「WC粒子之圓相當徑」之「0.3 μm以下之比率(%)」及「超過1.8 μm之比率」欄中。The results are shown in Table 2 under the "Circular Equivalent Diameter of WC Particles" column, under the "Ratio of WC Particles Less Than 0.3 μm (%)" and the "Ratio of WC Particles Exceeding 1.8 μm (%)" columns.

(第1相及第2相之體積比率) 對於各試樣之超硬合金,測定藉由掃描式電子顯微鏡進行拍攝所得之圖像中第1相及第2相之面積比率。由於具體測定方法已記載於實施方式1中,故不再重複其說明。將結果示於表2之「第1相」之「面積%」欄及「第2相」之「面積%」欄中。 (Volume Ratio of Phase 1 and Phase 2) For each sample of cemented carbide, the area ratio of Phase 1 to Phase 2 was measured in images captured using a scanning electron microscope. The specific measurement method is described in Example 1 and will not be repeated here. The results are shown in the "Area %" column for "Phase 1" and the "Area %" column for "Phase 2" in Table 2.

(釩之質量基準之含量、鈷之質量基準之含量、鉻相對於鈷之質量基準之比率) 對於各試樣之超硬合金,測定釩之質量基準之含量、鈷之質量基準之含量及鉻相對於鈷之質量基準之比率。由於具體測定方法已記載於實施方式1中,故不再重複其說明。將結果示於表2之「V」之「ppm」、「Co」之「質量%」、「Cr」之「質量%」及「Cr/Co」之「%」欄中。 (Valvium content by mass, cobalt content by mass, and chromium ratio to cobalt by mass) For each sample of cemented carbide, the vanadium content by mass, the cobalt content by mass, and the chromium ratio to cobalt by mass were measured. The specific measurement methods are described in Example 1 and are not repeated here. The results are shown in the "V" (ppm), "Co" (mass %), "Cr" (mass %), and "Cr/Co" (%) columns of Table 2.

<切削試驗> 對各試樣之圓桿進行加工,製作刃徑 0.35 mm之小徑鑽孔器。目前,僅將刃部壓入不鏽鋼柄而使鑽孔器成形為主流,但為了進行評估,藉由對 3.4 mm之圓桿之前端進行開刃加工來製作鑽孔器。使用該鑽孔器對市售之車載用印刷電路基板進行開孔加工。開孔加工之條件設為轉速155 krpm、進給速度2.5 m/min。根據鑽孔器直徑之減少量算出開出10000個孔後之鑽孔器之磨耗量。用3個鑽孔器進行開孔加工。將3個鑽孔器之磨耗量之平均值示於表2之「磨耗量(μm)」欄中。又,觀察開孔加工後之刀尖狀態。將其結果示於表1之「刀尖狀態」欄中。 <Cutting test> The round rod of each sample is processed to make the cutting edge 0.35 mm small diameter drill. Currently, the mainstream method is to simply press the blade into the stainless steel handle to form the drill, but for the purpose of evaluation, A drill was made by sharpening the tip of a 3.4 mm round rod. This drill was used to drill holes in commercially available automotive printed circuit boards. The drilling conditions were set at a rotational speed of 155 krpm and a feed rate of 2.5 m/min. The wear of the drill after drilling 10,000 holes was calculated based on the reduction in the drill diameter. Three drills were used for drilling. The average wear of the three drills is shown in the "Wear (μm)" column of Table 2. The condition of the tool tip after drilling was observed. The results are shown in the "Tool Tip Condition" column of Table 1.

磨耗量越小,表示鑽孔器之工具壽命越長。當「磨耗量(μm)」欄中記載為「-」時,表示2個以上之鑽孔器在剛開始加工後便發生破損,無法測定磨耗量。又,當「刀尖狀態」欄中記載為「1個破損」時,將未破損之2個鑽孔器之磨耗量之平均值示於表2之「磨耗量(μm)」欄中。當「刀尖狀態」欄中記載為「微小碎屑」時,表示刀尖產生微小碎屑。The smaller the wear, the longer the tool life of the drill. If "-" is entered in the "Wear (μm)" column, it means that two or more drills were damaged immediately after the start of processing, and wear measurement was unavailable. Furthermore, if "1 damaged" is entered in the "Tool Tip Condition" column, the average wear of two undamaged drills is shown in the "Wear (μm)" column in Table 2. If "Fine chipping" is entered in the "Tool Tip Condition" column, it indicates that fine chipping has occurred at the tool tip.

[表2] 表2 試樣No. 超硬合金 切削試驗 WC粒子之圓相當徑 第1相 第2相 V Co Cr Cr/Co 磨耗量 (μm) 刀尖狀態 平均值 (μm) 0.3 μm以下之比率 (%) 超過1.8 μm之比率 (%) 面積% 面積% ppm 質量% 質量% % 1 0.7 7 1.2 89.3 10.7 0 5 0.40 8.0 13.0 正常磨耗 2 0.5 9 0.8 89.1 10.9 0 5 0.40 8.0 14.6 正常磨耗 3 1.2 4 1.8 89.5 10.5 0 5 0.40 8.0 14.2 正常磨耗 4 0.6 8 0.5 89.3 10.7 810 5 0.40 8.0 14.2 正常磨耗 5 0.5 9 0.2 89.3 10.7 1620 5 0.40 8.0 14.5 正常磨耗 6 0.7 6 1.4 80.9 19.1 0 9 0.72 8.0 15.5 正常磨耗 7 0.7 6 1.0 93.6 6.4 0 3 0.24 8.0 13.8 正常磨耗 8 0.7 6 0.9 95.8 4.2 0 2 0.16 8.0 14.0 微小碎屑 9 1.0 3 1.8 89.2 10.8 0 5 0.10 2.0 14.5 正常磨耗 10 0.5 10 0.4 89.3 10.7 0 5 1.2 24.0 14.9 正常磨耗 11 1.0 5 1.6 89.4 10.6 0 5 0.15 3.0 14.6 正常磨耗 12 0.6 9 0.6 89.3 10.7 0 5 1.0 20.0 14.0 正常磨耗 13 0.7 7 1.0 89.3 10.7 81 5 0.40 8.0 13.4 正常磨耗 14 0.9 6 4.8 89.3 10.7 0 5 0.40 8.0 16.2 1個破損 15 0.5 11 5.8 89.5 10.5 0 5 0.40 8.0 - 2個破損 16 1.7 0.5 32 89.1 10.9 0 5 0.40 8.0 - 3個破損 17 0.7 6 1.9 76.7 23.3 0 11 0.88 8.0 16.9 正常磨耗 [Table 2] Table 2 Sample No. super carbide Cutting test WC particle equivalent diameter Phase 1 Phase 2 V Co Cr Cr/Co Wear loss (μm) Tip status Average value (μm) Ratio below 0.3 μm (%) Ratio exceeding 1.8 μm (%) Area% Area% ppm Mass% Mass% % 1 0.7 7 1.2 89.3 10.7 0 5 0.40 8.0 13.0 Normal wear 2 0.5 9 0.8 89.1 10.9 0 5 0.40 8.0 14.6 Normal wear 3 1.2 4 1.8 89.5 10.5 0 5 0.40 8.0 14.2 Normal wear 4 0.6 8 0.5 89.3 10.7 810 5 0.40 8.0 14.2 Normal wear 5 0.5 9 0.2 89.3 10.7 1620 5 0.40 8.0 14.5 Normal wear 6 0.7 6 1.4 80.9 19.1 0 9 0.72 8.0 15.5 Normal wear 7 0.7 6 1.0 93.6 6.4 0 3 0.24 8.0 13.8 Normal wear 8 0.7 6 0.9 95.8 4.2 0 2 0.16 8.0 14.0 tiny debris 9 1.0 3 1.8 89.2 10.8 0 5 0.10 2.0 14.5 Normal wear 10 0.5 10 0.4 89.3 10.7 0 5 1.2 24.0 14.9 Normal wear 11 1.0 5 1.6 89.4 10.6 0 5 0.15 3.0 14.6 Normal wear 12 0.6 9 0.6 89.3 10.7 0 5 1.0 20.0 14.0 Normal wear 13 0.7 7 1.0 89.3 10.7 81 5 0.40 8.0 13.4 Normal wear 14 0.9 6 4.8 89.3 10.7 0 5 0.40 8.0 16.2 1 damaged 15 0.5 11 5.8 89.5 10.5 0 5 0.40 8.0 - 2 damaged 16 1.7 0.5 32 89.1 10.9 0 5 0.40 8.0 - 3 damaged 17 0.7 6 1.9 76.7 23.3 0 11 0.88 8.0 16.9 Normal wear

<探討> 試樣1~試樣13屬於實施例,試樣14~試樣17屬於比較例。確認到,試樣1~試樣13與試樣14~試樣17相比,磨耗量較少,工具壽命較長。 <Discussion> Samples 1 through 13 are examples, and samples 14 through 17 are comparative examples. It was confirmed that samples 1 through 13 exhibited less wear and longer tool life than samples 14 through 17.

確認到,試樣1~試樣13雖然原料粉末不含作為晶粒生長抑制劑通常使用之碳化釩粉末,或即便於包含碳化釩粉末之情形時亦為2000 ppm以下之微量,但是於所獲得之超硬合金中,圓相當徑為1.8 μm以上之WC粒子之比率未達2%,晶粒生長得以抑制。It was confirmed that although the raw material powders of Samples 1 to 13 did not contain vanadium carbide powder, which is commonly used as a grain growth inhibitor, or even if vanadium carbide powder was contained, the content was only a trace amount of less than 2000 ppm. However, the ratio of WC particles with a circular equivalent diameter of 1.8 μm or more in the obtained superhard alloys did not reach 2%, and grain growth was suppressed.

以上對本發明之實施方式及實施例進行了說明,但最初便計劃對上述各實施方式及實施例之構成進行適當組合或進行各種變化。 應認為,本次揭示之實施方式及實施例在所有方面均為例示,不具有限制性。本發明之範圍係由申請專利範圍表示,而不由上述實施方式及實施例表示,旨在包括與申請專利範圍相同之含義及範圍內之所有變更。 The above describes the embodiments and examples of the present invention. However, it is initially intended that the above embodiments and examples may be appropriately combined or modified in various ways. The embodiments and examples disclosed herein are to be considered in all respects as illustrative and non-restrictive. The scope of the present invention is defined by the claims, not by the above embodiments and examples, and is intended to encompass all modifications within the meaning and scope of the claims.

圖1係本發明之超硬合金藉由掃描式電子顯微鏡所得之拍攝圖像之一例。 圖2係對圖1之拍攝圖像進行二值化處理所得之圖像。 Figure 1 shows an example of an image of the cemented carbide of the present invention captured using a scanning electron microscope. Figure 2 shows the image of Figure 1 after binarization processing.

Claims (8)

一種超硬合金,其係由第1相及第2相組成,上述第1相由複數個碳化鎢粒子組成,上述第2相包含鈷,並且於藉由掃描式電子顯微鏡對上述超硬合金進行拍攝所得之圖像中,上述第1相之比率為78面積%以上且未達100面積%,且上述第2相之比率超過0面積%且為22面積%以下,於算出上述圖像中各個上述碳化鎢粒子之圓相當徑之情形時,上述圓相當徑之平均值為0.5μm以上1.2μm以下,上述圓相當徑為0.3μm以下之上述碳化鎢粒子之個數基準之比率為10%以下,上述圓相當徑超過1.8μm之上述碳化鎢粒子之個數基準之比率未達2%,上述超硬合金之上述鈷之質量基準之含量超過0質量%且為10質量%以下。 A superhard alloy, comprising a first phase and a second phase, wherein the first phase is composed of a plurality of tungsten carbide particles, and the second phase contains cobalt, and in an image of the superhard alloy photographed by a scanning electron microscope, the ratio of the first phase is greater than 78 area % and less than 100 area %, and the ratio of the second phase is greater than 0 area % and less than 22 area %, and in calculating the ratio of each tungsten carbide particle in the image, In the case of particles with an equivalent circular diameter, the average value of the equivalent circular diameter is 0.5 μm or more and 1.2 μm or less, the number-based ratio of the tungsten carbide particles with an equivalent circular diameter of 0.3 μm or less is 10% or less, the number-based ratio of the tungsten carbide particles with an equivalent circular diameter exceeding 1.8 μm is less than 2%, and the mass-based content of cobalt in the cemented carbide exceeds 0% and is 10% or less. 如請求項1之超硬合金,其中於上述圖像中,上述第2相之比率為5面積%以上12面積%以下。 The superhard alloy of claim 1, wherein in the above image, the ratio of the second phase is not less than 5 volume % and not more than 12 volume %. 如請求項1或請求項2之超硬合金,其中上述超硬合金之鉻之質量基準之含量為0.15質量%以上1.0質量%以下。 For the superhard alloy of claim 1 or claim 2, the chromium content of the superhard alloy is not less than 0.15% by mass and not more than 1.0% by mass. 如請求項3之超硬合金,其中上述鉻相對於上述鈷之比率以質量基準 計為5%以上10%以下。 The superhard alloy of claim 3, wherein the ratio of the chromium to the cobalt is not less than 5% and not more than 10% by mass. 如請求項1或2之超硬合金,其中上述超硬合金之釩之質量基準之含量為0ppm以上且未達2000ppm。 For the superhard alloy of claim 1 or 2, the mass-based content of vanadium in the superhard alloy is 0 ppm or more and less than 2000 ppm. 如請求項5之超硬合金,其中上述超硬合金之釩之質量基準之含量為0ppm以上且未達100ppm。 For example, the superhard alloy of claim 5, wherein the mass-based content of vanadium in the superhard alloy is greater than 0 ppm and less than 100 ppm. 一種切削工具,其具備包含如請求項1至6中任一項之超硬合金之刀尖。 A cutting tool having a cutting tip comprising the superhard alloy according to any one of claims 1 to 6. 如請求項7之切削工具,其中上述切削工具為印刷電路基板加工用旋轉工具。 The cutting tool of claim 7, wherein the cutting tool is a rotary tool for processing printed circuit boards.
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