TWI893118B - Light-emitting device and display device having the same - Google Patents
Light-emitting device and display device having the sameInfo
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- TWI893118B TWI893118B TW110117551A TW110117551A TWI893118B TW I893118 B TWI893118 B TW I893118B TW 110117551 A TW110117551 A TW 110117551A TW 110117551 A TW110117551 A TW 110117551A TW I893118 B TWI893118 B TW I893118B
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Abstract
Description
本發明是有關於一種發光元件及顯示裝置,特別是有關於一種具有濾光層的發光元件及具有此發光元件的顯示裝置。 The present invention relates to a light-emitting element and a display device, and in particular to a light-emitting element having a filter layer and a display device having the light-emitting element.
固態發光元件中的發光二極體(LEDs)具有低功率消耗、高亮度、高演色性、及體積小等優點,已廣泛用於各式照明及顯示裝置。舉例而言,發光元件作為顯示裝置的畫素,可以取代傳統液晶顯示裝置,並實現更高畫質的顯示效果。當發光元件應用於顯示裝置,如何維持發光元件的光電特性並提升顯示裝置之顯示效果,為本技術領域人員所研究開發的目標之一。 Light-emitting diodes (LEDs), a type of solid-state light-emitting device, offer advantages such as low power consumption, high brightness, excellent color rendering, and a compact size, making them widely used in various lighting and display devices. For example, as pixels in display devices, LEDs can replace traditional liquid crystal displays (LCDs) and achieve higher-quality displays. When LEDs are used in display devices, maintaining their photoelectric properties while improving the display quality is one of the research and development goals of researchers in this field.
一種發光元件,包含:一半導體疊層;以及一濾光層,位於半導體疊層上,包含一第一表面面對半導體疊層以及一第二表面相對於第一表面;其中:發光元件發出一光線;所述光線包含在一第一方向光,其具有一第一半高寬;以及在一第二方向光,其具有一第二半高寬;第一方向與第二表面之法線方向之夾角介於45-90度,第二方向與第二表面之法線方向之夾角介於0-30度;以及第二半高寬小於第一半高寬。 A light-emitting element comprises: a semiconductor stack; and a filter layer disposed on the semiconductor stack, comprising a first surface facing the semiconductor stack and a second surface opposite the first surface. The light-emitting element emits light; the light includes light in a first direction having a first half-height width (WHM); and light in a second direction having a second half-height width (WHM). The angle between the first direction and a normal to the second surface is between 45 and 90 degrees, and the angle between the second direction and the normal to the second surface is between 0 and 30 degrees. The second half-height width (WHM) is smaller than the first half-height width (WHM).
一種發光元件,包含:一半導體疊層,發出一第一光線;以及一濾光層,位於半導體疊層上,包含一第一表面面對半導體疊層以及一第二表面相對於第一表面;其中:第一光線經由濾光層得到一第二光線;第一光線具有一第一半高寬,第二光線具有一第二半高寬;以及第二半高寬小於第一半高寬,及/或第二光線具有一半高寬小於或等於25nm。 A light-emitting element comprises: a semiconductor stack emitting a first light ray; and a filter layer disposed on the semiconductor stack, comprising a first surface facing the semiconductor stack and a second surface opposite the first surface. The first light ray passes through the filter layer to produce a second light ray. The first light ray has a first half-height width (WWHM), and the second light ray has a second half-height width (WWHM). The second half-height width (WWHM) is smaller than the first half-height width (WWHM), and/or the second light ray has a half-height width (WWHM) of less than or equal to 25 nm.
一種發光元件,包含:一半導體疊層,發出一第一光線;以及一濾光層,位於半導體疊層上,包含一第一表面面對半導體疊層以及一第二表面相對於第一表面;其中:濾光層包含交互堆疊的一第一介電材料層以及一第二介電材料層;第一光線經由濾光層得到一第二光線;以及發光元件具有一發散角介於50度至110度。 A light-emitting device comprises: a semiconductor stack that emits a first light ray; and a filter layer disposed on the semiconductor stack, comprising a first surface facing the semiconductor stack and a second surface opposite the first surface; wherein: the filter layer comprises a first dielectric material layer and a second dielectric material layer alternately stacked; the first light ray passes through the filter layer to obtain a second light ray; and the light-emitting device has a divergence angle ranging from 50 degrees to 110 degrees.
1、2、3、4、5、9:發光元件 1, 2, 3, 4, 5, 9: Light-emitting elements
6、6’:發光元件封裝體 6, 6': Light-emitting element package
8a、8b:電路接合墊 8a, 8b: Circuit bonding pads
10:基板 10:Substrate
10a:基板第一表面 10a: First surface of substrate
10b:基板第二表面 10b: Second surface of substrate
11a、11b:發光單元 11a, 11b: Light-emitting unit
101:顯示裝置 101: Display device
201:感測模組 201: Sensing module
110:電路層 110: Circuit layer
130:資料線驅動電路 130: Data line driver circuit
140:掃描線驅動電路 140: Scanning line drive circuit
12:半導體疊層 12: Semiconductor stacking
121:第一半導體層 121: First semiconductor layer
121a:第一表面 121a: First surface
121b:第二表面 121b: Second surface
122:第二半導體層 122: Second semiconductor layer
122a:第二半導體層表面 122a: Surface of the second semiconductor layer
123:活性層 123: Active layer
16:反射結構 16: Reflective Structure
18:透明導電層 18:Transparent conductive layer
20、20’、20”:第一電極 20, 20’, 20”: First electrode
30、30’、30”:第二電極 30, 30’, 30”: Second electrode
26:保護層 26: Protective layer
261、262:保護層開口 261, 262: Protective layer opening
36:絕緣層 36: Insulating layer
40:光感測元件 40: Light sensor element
50、50’:濾光層 50, 50': Filter layer
50a:第一子層 50a: First sublayer
50b:第二子層 50b: Second sublayer
50c:第三子層 50c: Third sublayer
50d:第四子層 50d: Fourth sublayer
50e、50e’:濾光層表面 50e, 50e’: Filter surface
501、502:開孔 501, 502: Openings
60:連接電極 60: Connecting electrodes
80:光阻擋元件 80: Light blocking element
81、83:電極 81, 83: Electrode
90:封裝材料 90: Packaging materials
200:顯示基板 200: Display substrate
210:顯示區 210: Display area
220:非顯示區 220: Non-display area
400:載板 400: Carrier board
PX:畫素 PX: Pixel
PX_A、PX_B、PX_C:子畫素 PX_A, PX_B, PX_C: sub-pixels
P1、P2:光路徑 P1, P2: Light path
〔圖1〕顯示本申請案第一實施例發光元件1。 Figure 1 shows the light-emitting element 1 according to the first embodiment of this application.
〔圖2A及圖2B〕顯示本申請案一實施例發光元件中濾光層的一截面局部放大圖。 Figures 2A and 2B show a partially enlarged cross-sectional view of a filter layer in a light-emitting element according to an embodiment of this application.
〔圖3〕顯示依據本申請案一實施例所模擬的實驗結果 [Figure 3] shows the experimental results simulated according to an embodiment of this application.
〔圖4〕顯示本申請案第二實施例發光元件2。 Figure 4 shows the light-emitting element 2 according to the second embodiment of this application.
〔圖5〕顯示本申請案第三實施例發光元件3。 Figure 5 shows the light-emitting element 3 according to the third embodiment of this application.
〔圖6〕顯示本申請案第四實施例發光元件4。 [Figure 6] shows the light-emitting element 4 according to the fourth embodiment of this application.
〔圖7A及圖7B〕顯示本申請案第五實施例發光元件5。 Figures 7A and 7B show the light-emitting element 5 according to the fifth embodiment of this application.
〔圖8A至8C〕顯示依本申請案第三實施例發光元件3與一比較例發光元件之實驗比較。 Figures 8A to 8C show experimental comparisons of the light-emitting device 3 according to the third embodiment of this application and a comparative light-emitting device.
〔圖9〕顯示依本申請案第三實施例之發光元件3依不同角度所量測的波長與光強度。 Figure 9 shows the wavelength and light intensity measured at different angles by the light-emitting element 3 according to the third embodiment of this application.
〔圖10A〕顯示依據本申請案一實施例之顯示裝置101的上視示意圖。 Figure 10A shows a schematic top view of a display device 101 according to an embodiment of the present application.
〔圖10B〕顯示依據本申請案一實施例一個畫素PX的截面示意圖。 Figure 10B shows a schematic cross-sectional view of a pixel PX according to an embodiment of this application.
〔圖10C〕顯示依據本申請案一實施例發光元件封裝體的截面示意圖。 [Figure 10C] shows a schematic cross-sectional view of a light-emitting device package according to an embodiment of this application.
〔圖11〕顯示本申請案第六實施例發光元件9。 Figure 11 shows the light-emitting element 9 according to the sixth embodiment of this application.
〔圖12〕顯示依據本申請案第六實施例發光元件9的光路徑示意圖。 Figure 12 shows a schematic diagram of the optical path of the light-emitting element 9 according to the sixth embodiment of this application.
〔圖13〕顯示第六實施例之發光元件9與比較例發光元件的光強度分佈。 Figure 13 shows the light intensity distribution of the light-emitting element 9 of the sixth embodiment and the light-emitting element of the comparative example.
〔圖14〕顯示依據本申請案一實施例感測模組的截面示意圖。 Figure 14 shows a schematic cross-sectional view of a sensing module according to an embodiment of this application.
下文中,將參照圖示詳細地描述本發明之示例性實施例,已使得本發明領域技術人員能夠充分地理解本發明之精神。本發明並不限於以下之實施例,而是可以以其他形式實施。在本說明書中,有一些相同的符號,其表示具有相同或是類似之結構、功能、原理的元件,且為業界具有一般知識能力者可以依據本說明書之教導而推知。為說明書之簡潔度考量,相同之符號的元件將不再重述。 Below, exemplary embodiments of the present invention are described in detail with reference to the accompanying diagrams, enabling those skilled in the art to fully understand the spirit of the present invention. The present invention is not limited to the following embodiments and may be implemented in other forms. Throughout this specification, identical symbols denote components having identical or similar structures, functions, and principles, which can be inferred by those skilled in the art based on the teachings of this specification. For the sake of brevity, components with identical symbols will not be repeated.
圖1顯示本申請案第一實施例發光元件1之截面圖。如圖1所示,發光元件1包含基板10,半導體疊層12位於基板第一表面10a,其中半導體疊層12在基板第一表面10a上依序包含一第一半導體層121、一活性層123和一第二半導體層122,第一半導體層121具有一第一表面121a不被活性層123和第二半導體層122所覆蓋。透明導電層18位於第二半導體層122上,第一 電極20位於第一半導體層第一表面121a上,以及第二電極30位於透明導電層18上。濾光層50位於半導體疊層12上。在基板10相對於第一表面10a的第二表面10b,設置有反射結構16。 Figure 1 shows a cross-sectional view of a light-emitting device 1 according to the first embodiment of this application. As shown in Figure 1 , the light-emitting device 1 comprises a substrate 10, a semiconductor stack 12 disposed on a first surface 10a of the substrate, and a first semiconductor layer 121, an active layer 123, and a second semiconductor layer 122, sequentially formed on the first surface 10a. The first semiconductor layer 121 has a first surface 121a uncovered by the active layer 123 and the second semiconductor layer 122. A transparent conductive layer 18 is disposed on the second semiconductor layer 122, a first electrode 20 is disposed on the first surface 121a of the first semiconductor layer, and a second electrode 30 is disposed on the transparent conductive layer 18. The filter layer 50 is located on the semiconductor stack 12. A reflective structure 16 is provided on the second surface 10b of the substrate 10, which is opposite to the first surface 10a.
基板10可以是一成長基板,包括用於生長磷化鎵銦(AlGaInP)的砷化鎵(GaAs)基板、及磷化鎵(GaP)基板,或用於生長氮化銦鎵(InGaN)或氮化鋁鎵(AlGaN)的藍寶石(Al2O3)基板,氮化鎵(GaN)基板,碳化矽(SiC)基板、及氮化鋁(AlN)基板。基板10可以是一圖案化基板,即,基板10在其第一表面10a上具有圖案化結構(圖未示)。於一實施例中,從半導體疊層12發射的光可以被基板10的圖案化結構所折射,從而提高發光元件的亮度。此外,圖案化結構減緩或抑制了基板10與半導體疊層12之間因晶格不匹配而導致的錯位,從而改善半導體疊層12的磊晶品質。 Substrate 10 can be a growth substrate, including a gallium arsenide (GaAs) substrate and a gallium phosphide (GaP) substrate for growing gallium indium phosphide (AlGaInP), or a sapphire ( Al2O3 ) substrate, a gallium nitride (GaN) substrate, a silicon carbide (SiC) substrate, and an aluminum nitride (AlN) substrate for growing indium gallium nitride ( InGaN ) or aluminum gallium nitride (AlGaN). Substrate 10 can be a patterned substrate, i.e., substrate 10 has a patterned structure (not shown) on its first surface 10a. In one embodiment, light emitted from semiconductor stack 12 can be refracted by the patterned structure of substrate 10, thereby increasing the brightness of the light-emitting device. In addition, the patterned structure reduces or suppresses the misalignment between the substrate 10 and the semiconductor stack 12 caused by lattice mismatch, thereby improving the epitaxial quality of the semiconductor stack 12.
在本申請案的一實施例中,在基板10上形成半導體疊層12的方法包含有機金屬化學氣相沉積(MOCVD)、分子束磊晶法(MBE)、氫化物氣相磊晶(HVPE)或離子鍍,例如濺鍍或蒸鍍等。 In one embodiment of the present application, the method for forming the semiconductor stack 12 on the substrate 10 includes metal organic chemical vapor deposition (MOCVD), molecular beam epitaxy (MBE), hydrogenated vapor phase epitaxy (HVPE), or ion plating, such as sputtering or evaporation.
半導體疊層12更包含緩衝結構(圖未示)在基板第一表面10a與第一半導體層121之間。緩衝結構、第一半導體層121、活性層123和第二半導體層122構成半導體疊層12。緩衝結構可減小上述的晶格不匹配並抑制錯位,從而改善磊晶品質。緩衝層的材料包括GaN、AlGaN或AlN。在一實施例中,緩衝結構包括多個子層(圖未示)。子層包括相同材料或不同材料。在一實施例中,緩衝結構包括兩個子層,其中第一子層的生長方式為濺鍍,第二子層的生長方式為MOCVD。在一實施例中,緩衝層另包含第三子層。其中第三子層的生長方式為MOCVD,第二子層的生長溫度高於或低於第三子層的生長溫度。於一實施例中,第一、第二及第三子層包括相同的材料,例如AlN,或不同材料,例如AN、GaN、AlGaN。在本申請案的一實施例 中,第一半導體層121和第二半導體層122,例如為包覆層(cladding layer)或侷限層(confinement layer),具有不同的導電型態、電性、極性或用於提供電子或電洞的摻雜元素。例如,第一半導體層121是n型半導體,以及第二半導體層122是p型半導體。活性層123形成於第一半導體層121與第二半導體層122之間。電子與電洞在電流驅動下在活性層123中結合,將電能轉換成光能以發光。可藉由改變半導體疊層12中一個或多個層別的物理特性和化學組成,來調整發光元件1或半導體疊層12所發出的光之波長。 The semiconductor stack 12 further includes a buffer structure (not shown) between the substrate first surface 10a and the first semiconductor layer 121. The buffer structure, the first semiconductor layer 121, the active layer 123, and the second semiconductor layer 122 constitute the semiconductor stack 12. The buffer structure can reduce the aforementioned lattice mismatch and suppress dislocation, thereby improving epitaxial quality. The buffer layer is made of GaN, AlGaN, or AlN. In one embodiment, the buffer structure includes multiple sublayers (not shown). The sublayers may comprise the same material or different materials. In one embodiment, the buffer structure includes two sublayers, wherein the first sublayer is grown by sputtering, and the second sublayer is grown by MOCVD. In one embodiment, the buffer layer further includes a third sublayer. The third sublayer is grown by MOCVD, and the second sublayer is grown at a temperature higher or lower than the third sublayer. In one embodiment, the first, second, and third sublayers comprise the same material, such as AlN, or different materials, such as An, GaN, or AlGaN. In one embodiment of the present application, a first semiconductor layer 121 and a second semiconductor layer 122, such as cladding layers or confinement layers, have different conductivity types, electrical properties, polarities, or doping elements that provide electrons or holes. For example, the first semiconductor layer 121 is an n-type semiconductor, and the second semiconductor layer 122 is a p-type semiconductor. An active layer 123 is formed between the first and second semiconductor layers 121, 122. Electrons and holes combine in the active layer 123 under current drive, converting electrical energy into light energy, resulting in luminescence. The wavelength of light emitted by the light-emitting element 1 or the semiconductor stack 12 can be adjusted by changing the physical properties and chemical composition of one or more layers in the semiconductor stack 12.
半導體疊層12的材料包括AlxInyGa(1-x-y)N或AlxInyGa(1-x-y)P的III-V族半導體材料,其中0x,y1;x+y1。根據活性層的材料,當半導體疊層12的材料是AlInGaP系列時,可以發出波長介於570nm和780nm之間的紅光或波長介於550nm和570nm之間的黃光。當半導體疊層12的材料是InGaN系列時,可以發出波長介於380nm和490nm之間的藍光或深藍光或波長介於490nm和550nm之間的綠光。活性層123可以是單異質結構(single heterostructure;SH)、雙異質結構(double heterostructure;DH)、雙面雙異質結構(double-side double heterostructure;DDH)、多重量子井(multi-quantum well;MQW)。活性層123的材料可以是i型、p型或n型半導體。 The material of the semiconductor stack 12 includes a III-V semiconductor material of AlxInyGa (1-xy) N or AlxInyGa (1-xy) P , wherein 0 x,y 1; x + y 1. Depending on the material of the active layer, when the material of the semiconductor stack 12 is AlInGaP series, red light with a wavelength between 570nm and 780nm or yellow light with a wavelength between 550nm and 570nm can be emitted. When the material of the semiconductor stack 12 is InGaN series, blue light or deep blue light with a wavelength between 380nm and 490nm or green light with a wavelength between 490nm and 550nm can be emitted. The active layer 123 can be a single heterostructure (SH), a double heterostructure (DH), a double-side double heterostructure (DDH), or a multi-quantum well (MQW). The material of the active layer 123 can be an i-type, p-type, or n-type semiconductor.
透明導電層18與第二半導體層122電性接觸,用以橫向分散電流。於另一實施例中,透明導電層18可包含開口(圖未示)位於第二電極30下方,暴露第二半導體層122,第二電極30可經由透明導電層18之開口接觸第二半導體層122。透明導電層18可以是金屬或是透明導電材料,其中金屬可選自具有透光性的薄金屬層,透明導電材料對於活性層123所發出的光線為透明,包含石墨烯、銦錫氧化物(ITO)、氧化鋁鋅(AZO)、氧化鎵鋅(GZO)、氧化鋅(ZnO)或銦鋅氧化物(IZO)等材料。 The transparent conductive layer 18 is in electrical contact with the second semiconductor layer 122 to disperse current laterally. In another embodiment, the transparent conductive layer 18 may include an opening (not shown) below the second electrode 30, exposing the second semiconductor layer 122. The second electrode 30 may contact the second semiconductor layer 122 through the opening in the transparent conductive layer 18. The transparent conductive layer 18 may be a metal or a transparent conductive material. The metal may be selected from a thin, light-transmitting metal layer. The transparent conductive material is transparent to light emitted by the active layer 123 and includes materials such as graphene, indium tin oxide (ITO), aluminum zinc oxide (AZO), gallium zinc oxide (GZO), zinc oxide (ZnO), or indium zinc oxide (IZO).
第一電極20位於第一半導體層第一表面121a上,與第一半導體層121電性連接。第二電極30與第二半導體層122電性連接。第一電極20及第二電極30分別包含一焊盤電極。於圖1中,僅示例性地繪示第一電極20及第二電極30的焊盤電極。於另一實施例中,第一電極20及/或第二電極30更包含延伸自焊盤電極的指狀電極(圖未示)。第一電極20及第二電極30的焊盤電極用以打線或焊接,使發光元件1和外部電源或外部電子元件電性連接。第一電極20與第二電極30之材料包含金屬,例如鉻(Cr)、鈦(Ti)、金(Au)、鋁(Al)、銅(Cu)、銀(Ag)、錫(Sn)、鎳(Ni)、銠(Rh)或鉑(Pt)等金屬或上述材料之合金或疊層。 The first electrode 20 is located on the first surface 121a of the first semiconductor layer and is electrically connected to the first semiconductor layer 121. The second electrode 30 is electrically connected to the second semiconductor layer 122. The first electrode 20 and the second electrode 30 each include a pad electrode. In FIG1 , the pad electrodes of the first electrode 20 and the second electrode 30 are shown for exemplary purposes only. In another embodiment, the first electrode 20 and/or the second electrode 30 further include finger electrodes (not shown) extending from the pad electrodes. The pad electrodes of the first electrode 20 and the second electrode 30 are used for wire bonding or soldering to electrically connect the light-emitting element 1 to an external power source or external electronic component. The materials of the first electrode 20 and the second electrode 30 include metals, such as chromium (Cr), titanium (Ti), gold (Au), aluminum (Al), copper (Cu), silver (Ag), tin (Sn), nickel (Ni), rhodium (Rh), or platinum (Pt), or alloys or stacks of the above materials.
於一實施例中,發光元件1更可包含一電流阻擋層(圖未示)位於透明導電層18與第二半導體層122之間,及/或位於第一電極20與第一半導體層121之間。 In one embodiment, the light-emitting element 1 may further include a current blocking layer (not shown) located between the transparent conductive layer 18 and the second semiconductor layer 122, and/or between the first electrode 20 and the first semiconductor layer 121.
濾光層50包含開孔501及502,於本實施例中,如圖1所示,濾光層50覆蓋半導體疊層12、透明導電層18及部分的第一電極20和第二電極30,並分別經由開孔501及502露出第一電極20和第二電極30,更詳言之,露出第一電極20和第二電極30的焊盤電極。於另一實施例(圖未示)中,濾光層50未覆蓋第一電極20及第二電極30。於另一實施例(圖未示)中,濾光層50覆蓋半導體疊層12、透明導電層18且延伸至部分的第一電極20和第二電極30下方,第一電極20和第二電極30分別經由其下方的開孔501及502與半導體疊層12電性連接。 The filter layer 50 includes openings 501 and 502. In this embodiment, as shown in FIG1 , the filter layer 50 covers the semiconductor stack 12, the transparent conductive layer 18, and portions of the first electrode 20 and the second electrode 30. The filter layer 50 also exposes the first electrode 20 and the second electrode 30 through the openings 501 and 502, respectively. More specifically, the bonding pads of the first electrode 20 and the second electrode 30 are exposed. In another embodiment (not shown), the filter layer 50 does not cover the first electrode 20 and the second electrode 30. In another embodiment (not shown), the filter layer 50 covers the semiconductor stack 12 and the transparent conductive layer 18 and extends to partially below the first electrode 20 and the second electrode 30. The first electrode 20 and the second electrode 30 are electrically connected to the semiconductor stack 12 through openings 501 and 502 thereunder, respectively.
濾光層50由一對或複數對不同折射率的材料層交互堆疊所形成,對特定波長範圍的光線提供過濾功能。當發光元件1發出單一顏色光時,可藉由濾光層50過濾特定波長範圍的光線,將發光元件1所發出的單一顏色光純化。此外,於一實施例中,濾光層50也可同時做為一保護結構,具有保 護發光元件的功能,例如阻擋外界水氣進入發光元件。於一實施例中,藉由不同折射率介電材料的選擇搭配其厚度設計,形成一干涉現象,讓發光元件發出的光經由濾光層50選擇性地進行穿透或反射,僅有特定波長範圍的光可以穿透濾光層50,來達到濾光的效果。濾光層50可具有帶通濾光功能、低通濾光功能或高通濾光功能。 The filter layer 50 is formed by stacking one or more pairs of alternating layers of materials with different refractive indices, providing a filtering function for light within a specific wavelength range. When the light-emitting element 1 emits a single color, the filter layer 50 filters the light within the specific wavelength range, purifying the single-color light emitted by the light-emitting element 1. Furthermore, in one embodiment, the filter layer 50 also serves as a protective structure, protecting the light-emitting element by, for example, preventing moisture from entering the light-emitting element. In one embodiment, the selection of dielectric materials with different refractive indices and their thickness design create an interference effect, allowing light emitted by the light-emitting element to be selectively transmitted or reflected by the filter layer 50. Only light within the specific wavelength range can pass through the filter layer 50, achieving the filtering effect. The filter layer 50 can have a bandpass filtering function, a low-pass filtering function, or a high-pass filtering function.
圖2A顯示濾光層50的一截面局部放大圖,於本實施例中,如第2A圖所示,濾光層50包含第一組材料疊層,由第一子層50a及第二子層50b堆疊所組成。第一組材料疊層例如包含介電材料,一第一子層50a及一第二子層50b組成一介電材料對。第一子層50a相較於第二子層50b具有較高的折射率。藉由不同折射率材料的選擇搭配其厚度設計,過濾特定波長範圍的光線。於一實施例中,第一子層50a相較於第二子層50b具有較小的厚度。介電材料包括例如氧化矽、氮化矽、氧氮化矽、氧化鈮、氧化鉿、氧化鈦、氟化鎂、氧化鋁等。於一實施例中,濾光層50例如為一分佈式布拉格反射器(DBR,distributed Bragg reflector)。 Figure 2A shows a partially enlarged cross-sectional view of the filter layer 50. In this embodiment, as shown in Figure 2A, the filter layer 50 includes a first set of material stacks, which are composed of a first sublayer 50a and a second sublayer 50b stacked together. The first set of material stacks, for example, includes a dielectric material, with a first sublayer 50a and a second sublayer 50b forming a dielectric material pair. The first sublayer 50a has a higher refractive index than the second sublayer 50b. By selecting materials with different refractive indices and designing their thicknesses, light within a specific wavelength range is filtered. In one embodiment, the first sublayer 50a has a smaller thickness than the second sublayer 50b. Dielectric materials include, for example, silicon oxide, silicon nitride, silicon oxynitride, niobium oxide, niobium oxide, titanium oxide, magnesium fluoride, aluminum oxide, etc. In one embodiment, the filter layer 50 is, for example, a distributed Bragg reflector (DBR).
於一實施例中,濾光層50更可包含第一子層50a及第二子層50b以外的其他層。例如,濾光層50更包含一底層(圖未示)位於第一子層50a(及/或第二子層50b)與半導體疊層12之間。也就是說,先於半導體疊層12上形成底層,接著再形成第一子層50a及第二子層50b。於一實施例中,底層包含介電材料,其厚度大於第一子層50a及第二子層50b的厚度。於一實施例中,底層之形成方式與第一子層50a及第二子層50b不同,例如,底層之形成方式為化學汽相沉積(Chemical Vapor Deposition,CVD),更佳地,藉由電漿輔助化學氣相沉積(plasma enhanced chemical vapor deposition,PECVD)來形成。第一子層50a及第二子層50b之形成方式為濺鍍。於一實施例中, 底層可提供保護發光元件或保護半導體疊層的功能,例如阻擋外界水氣進入發光元件。 In one embodiment, the filter layer 50 may include layers other than the first sublayer 50a and the second sublayer 50b. For example, the filter layer 50 may further include a base layer (not shown) positioned between the first sublayer 50a (and/or the second sublayer 50b) and the semiconductor stack 12. In other words, the base layer is formed on the semiconductor stack 12 first, followed by the first sublayer 50a and the second sublayer 50b. In one embodiment, the base layer comprises a dielectric material and has a thickness greater than that of the first sublayer 50a and the second sublayer 50b. In one embodiment, the base layer is formed differently from the first sublayer 50a and the second sublayer 50b. For example, the base layer is formed by chemical vapor deposition (CVD), more preferably, by plasma enhanced chemical vapor deposition (PECVD). The first sublayer 50a and the second sublayer 50b are formed by sputtering. In one embodiment, the base layer may provide protection for the light-emitting element or the semiconductor stack, for example, by preventing moisture from entering the light-emitting element.
於另一實施例中,如圖2B所示,濾光層50包含複數組材料疊層,第一組材料疊層由第一子層50a及第二子層50b堆疊所組成,第二組材料疊層由第三子層50c及第四子層50d堆疊所組成。其中第二組材料疊層例如包含介電材料,一第三子層50c及一第四子層50d組成一介電材料對。第三子層50c相較於第四子層50d具有較高的折射率,於一實施例中,第三子層50c相較於第四子層50d具有較小的厚度。第三子層50c與第一子層50a具有不同厚度,第三子層50c與第一子層50a可以是相同材料或不同材料。第四子層50d與第二子層50b具有不同厚度,第四子層50d與第二子層50b可以是相同材料或不同材料。 In another embodiment, as shown in FIG2B , the filter layer 50 includes multiple sets of material stacks. The first set of material stacks is composed of a first sublayer 50a and a second sublayer 50b stacked together, and the second set of material stacks is composed of a third sublayer 50c and a fourth sublayer 50d stacked together. The second set of material stacks may include, for example, a dielectric material, with the third sublayer 50c and the fourth sublayer 50d forming a dielectric material pair. The third sublayer 50c has a higher refractive index than the fourth sublayer 50d. In one embodiment, the third sublayer 50c is thinner than the fourth sublayer 50d. The third sublayer 50c has a different thickness than the first sublayer 50a. The third sublayer 50c and the first sublayer 50a can be made of the same material or different materials. The fourth sublayer 50d has a different thickness than the second sublayer 50b. The fourth sublayer 50d and the second sublayer 50b can be made of the same material or different materials.
於另一實施例中,濾光層50更可包含一上層(圖未示)位於第一子層50a(及/或第二子層50b)上,相對第二半導體層122之另一側。也就是說,先於半導體疊層12上形成第一子層50a及第二子層50b,接著再形成上層。上層包含介電材料,其厚度大於第一子層50a及第二子層50b的厚度。於一實施例中,上層之形成方式與第一子層50a及第二子層50b不同,例如,上層之形成方式為化學汽相沉積(CVD),更佳地,藉由電漿輔助化學氣相沉積(PECVD)來形成。第一子層50a及第二子層50b之形成方式為濺鍍。於一實施例中,上層可增加整體濾光層50的強度,例如當濾光層50受到外力時,上層可使濾光層50不至於因外力而破裂損傷。 In another embodiment, the filter layer 50 may further include an upper layer (not shown) located on the first sublayer 50a (and/or the second sublayer 50b) on the other side of the second semiconductor layer 122. In other words, the first sublayer 50a and the second sublayer 50b are first formed on the semiconductor stack 12, and then the upper layer is formed. The upper layer includes a dielectric material and has a thickness greater than that of the first sublayer 50a and the second sublayer 50b. In one embodiment, the upper layer is formed differently from the first sublayer 50a and the second sublayer 50b. For example, the upper layer is formed by chemical vapor deposition (CVD), more preferably, by plasma-assisted chemical vapor deposition (PECVD). The first sublayer 50a and the second sublayer 50b are formed by sputtering. In one embodiment, the upper layer can increase the strength of the entire filter layer 50. For example, when the filter layer 50 is subjected to external forces, the upper layer can prevent the filter layer 50 from being broken or damaged.
於另一實施例中,濾光層50包含複數組材料疊層與底層及/或上層。 In another embodiment, the filter layer 50 includes a plurality of sets of material stacks and a bottom layer and/or an upper layer.
於另一實施例中,於形成濾光層50之前,藉由原子沉積法於透明導電層18及半導體疊層12之表面上形成一緻密層(圖未示)以直接披覆半導體疊層12。緻密層的材料包含氧化矽、氧化鋁、氧化鉿、氧化鉭、氧化鋯、 氧化釔、氧化鑭、氧化鉭、氮化矽、氮化鋁或氮氧化矽。於本實施例中,緻密層與半導體疊層12相接之介面包含金屬元素及氧,其中金屬元素包含鋁、鉿、鉭、鋯、釔、鑭或鉭。緻密層包含一厚度介於50Å至2000Å之間,較佳介於100Å至1500Å之間。於一實施例中,緻密層可共型覆蓋形成於半導體疊層12上,藉由其膜質特性可提供半導體疊層12一較佳的保護作用,例如避免水氣進入半導體疊層12,且可輔助濾光層50與半導體疊層12之間的附著力。 In another embodiment, before forming the filter layer 50, a dense layer (not shown) is formed on the surfaces of the transparent conductive layer 18 and the semiconductor stack 12 by atomic deposition to directly cover the semiconductor stack 12. The dense layer is made of silicon oxide, aluminum oxide, einsteinium oxide, tantalum oxide, zirconium oxide, yttrium oxide, tantalum oxide, silicon nitride, aluminum nitride, or silicon oxynitride. In this embodiment, the interface between the dense layer and the semiconductor stack 12 contains a metal element and oxygen, wherein the metal element includes aluminum, einsteinium, tantalum, zirconium, yttrium, tantalum, or tantalum. The dense layer has a thickness ranging from 50Å to 2000Å, preferably from 100Å to 1500Å. In one embodiment, the dense layer can be conformally formed on the semiconductor stack 12. Its film properties can provide better protection for the semiconductor stack 12, such as preventing moisture from entering the semiconductor stack 12 and facilitating adhesion between the filter layer 50 and the semiconductor stack 12.
於一實施例中,濾光層50包含4對以上、30對以下的介電材料對。當介電材料對小於4對時,濾光效果不佳。當介電材料對大於30對時,會增加製作成本。較佳地,濾光層50包含8對以上、20對以下的介電材料對。以一具有低通濾光功能的濾光層50為例,濾光層50對於一波長小於λon的光線具有95%以上的穿透率,對於一波長大於λoff的光線具有5%以下的穿透率。對於λon至λoff之間的波長,取決於濾光層50的介電材料對數,穿透率具有劇烈變化。於一實施例中,當濾光層50包含8對以上的介電材料對,可以使λoff與λon之差值小於或等於31nm。當濾光層50包含12對以上的介電材料對,可以使λoff與λon之差值小於或等於11nm,也就是說,濾光層50包含12對以上的介電材料對可以有較窄的光過渡區段(transition band),進而達到較有效的濾光純化效果。藉由濾光層50的低通濾光功能,可將發光元件1發出的光線在大於λoff的特定波長範圍被過濾掉,進一步達到光純化的效果。類似的,當濾光層50具有高通濾光功能,對於一波長大於λon的光線具有95%以上的穿透率,對於一波長小於λoff的光線具有5%以下的穿透率。當濾光層50具有帶通濾光功能,對於一波長介於λon1至λon2的光線具有95%以上的穿透率,對於一波長小於λoff1的光線具有5%以下的穿透率,對於一波長大於λoff2的光線具有5%以下的穿透率,其中λoff1<λon1<λon2<λoff2。 In one embodiment, the filter layer 50 includes at least 4 and no more than 30 dielectric material pairs. When the number of dielectric material pairs is less than 4, the filtering effect is poor. When the number of dielectric material pairs is greater than 30, the manufacturing cost increases. Preferably, the filter layer 50 includes at least 8 and no more than 20 dielectric material pairs. Taking a filter layer 50 with a low-pass filtering function as an example, the filter layer 50 has a transmittance of more than 95% for light with a wavelength less than λ on and a transmittance of less than 5% for light with a wavelength greater than λ off . For wavelengths between λ on and λ off , the transmittance varies dramatically depending on the number of dielectric material pairs in the filter layer 50. In one embodiment, when the filter layer 50 includes eight or more dielectric material pairs, the difference between λ off and λ on can be less than or equal to 31 nm. When the filter layer 50 includes twelve or more dielectric material pairs, the difference between λ off and λ on can be less than or equal to 11 nm. In other words, a filter layer 50 containing twelve or more dielectric material pairs can have a narrower light transition band, thereby achieving more effective light filtering and purification. The low-pass filtering function of the filter layer 50 can filter out light emitted by the light-emitting element 1 within a specific wavelength range greater than λ off , further achieving a light purification effect. Similarly, when the filter layer 50 has a high-pass filtering function, it has a transmittance of greater than 95% for light with a wavelength greater than λ on and a transmittance of less than 5% for light with a wavelength less than λ off . When the filter layer 50 has a bandpass filtering function, it has a transmittance of greater than 95% for light with a wavelength between λ on1 and λ on2 , a transmittance of less than 5% for light with a wavelength less than λ off1 , and a transmittance of less than 5% for light with a wavelength greater than λ off2 , where λ off1 <λ on1 <λ on2 <λ off2 .
反射結構16位於基板第二表面10b,用以反射半導體疊層12所發出的光線,使光線主要經由發光元件1之上表面(即,濾光層50所在之表面)被摘出。於一實施例中,反射結構16包含一金屬反射層,其中金屬材料可選自對於半導體疊層12所發出的光線具有高反射率的材料,例如鋁、銀等。於另一實施例中,反射結構16可包含疊層結構,其中疊層結構包含由一對或複數對不同折射率的子層交互堆疊所形成。疊層結構各子層的材料包含具有光穿透性的材料,例如導電材料或絕緣材料。導電材料包含金屬氧化物例如銦錫氧化物(ITO)、氧化鋁鋅(AZO)、氧化鎵鋅(GZO)、氧化鋅(ZnO)或銦鋅氧化物(IZO)等。絕緣材料包含有機材料或無機材料,其中無機材料包含矽膠、玻璃或介電材料等。藉由不同折射率材料的選擇搭配其厚度設計,使反射結構16對特定波長範圍的光線提供反射功能。於一實施例中,反射結構16例如為一分佈式布拉格反射器(DBR,distributed Bragg reflector)。於另一實施例中,反射結構16包含介電材料疊層與及金屬層(圖未示),形成一全方位反射鏡(omnidirectional reflector,ODR)。於另一實施例中,反射結構16可省略。 The reflective structure 16 is located on the second surface 10b of the substrate to reflect the light emitted by the semiconductor stack 12, so that the light is mainly extracted through the upper surface of the light-emitting element 1 (i.e., the surface where the filter layer 50 is located). In one embodiment, the reflective structure 16 includes a metal reflective layer, wherein the metal material can be selected from materials with high reflectivity for the light emitted by the semiconductor stack 12, such as aluminum, silver, etc. In another embodiment, the reflective structure 16 may include a stacked structure, wherein the stacked structure includes a pair or a plurality of pairs of sub-layers with different refractive indices stacked alternately. The material of each sub-layer of the stacked structure includes a light-transmitting material, such as a conductive material or an insulating material. Conductive materials include metal oxides such as indium tin oxide (ITO), aluminum zinc oxide (AZO), gallium zinc oxide (GZO), zinc oxide (ZnO), or indium zinc oxide (IZO). Insulating materials include organic or inorganic materials, with inorganic materials including silica gel, glass, or dielectric materials. By selecting materials with different refractive indices and adjusting their thicknesses, the reflective structure 16 provides a reflective function for light within a specific wavelength range. In one embodiment, the reflective structure 16 is, for example, a distributed Bragg reflector (DBR). In another embodiment, the reflective structure 16 includes a dielectric material stack and a metal layer (not shown) to form an omnidirectional reflector (ODR). In another embodiment, the reflective structure 16 may be omitted.
半導體疊層12所發出的光線,例如一第一光線,為單一顏色光,例如為藍光、綠光、藍綠光、黃光或紅光。其經過濾光層50而得到一第二光線,與第一光線顏色相同。第二光線從發光元件1之上表面被摘出。其中,第二光線具有比第一光線還小的半高寬(full width at half maximum,FWHM)。於一實施例中,經過濾光層50而得到的第二光線,與第一光線顏色相同,其峰值波長與第一光線的峰值波長一致或近似,或者第一光線和第二光線的波長範圍重疊,且第二光線具有比第一光線還小的半高寬。於一實施例中,半導體疊層12發出的第一光線部份經過濾光層50從上表面被摘出,即第二光線;第一光線另一部份由發光元件1的側面未經過濾光層50 被摘出。由發光元件1的側面未經過濾光層50被摘出的光,其峰值波長及半高寬與第一光線一致或近似。於一實施例中,針對一峰值波長為λp nm的光線,濾光層50在λp nm下具有80%以上的穿透率,更佳地,具有90%以上的穿透率。濾光層50對於波長(λp+△λ)nm以上光線的穿透率小於50%,及/或對於波長(λp-△λ)nm以下光線的穿透率小於50%。可依使用者對於濾光效果及發光元件光強度的需求來決定△λ,並選擇不同折射率的子層材料搭配其厚度來設計濾光層50。 The light emitted by the semiconductor stack 12, such as a first light, is a single-color light, such as blue, green, blue-green, yellow, or red. It passes through the filter layer 50 to obtain a second light having the same color as the first light. The second light is extracted from the top surface of the light-emitting element 1. The second light has a smaller full width at half maximum (FWHM) than the first light. In one embodiment, the second light obtained after passing through the filter layer 50 has the same color as the first light, and its peak wavelength is consistent with or similar to the peak wavelength of the first light, or the wavelength ranges of the first light and the second light overlap, and the second light has a smaller full width at half maximum (FWHM) than the first light. In one embodiment, a portion of the first light emitted by the semiconductor stack 12 passes through the filter layer 50 and is extracted from the top surface, i.e., the second light. Another portion of the first light is extracted from the side of the light-emitting element 1 without passing through the filter layer 50. The peak wavelength and half-height width of the light extracted from the side of the light-emitting element 1 without passing through the filter layer 50 are consistent with or similar to those of the first light. In one embodiment, for light with a peak wavelength of λp nm, the filter layer 50 has a transmittance of greater than 80% at λp nm, and more preferably, a transmittance of greater than 90%. The transmittance of the filter layer 50 is less than 50% for light with a wavelength greater than ( λp + Δλ) nm, and/or less than 50% for light with a wavelength less than ( λp - Δλ) nm. The Δλ can be determined based on the user's requirements for filtering effect and light intensity of the light-emitting element, and the filter layer 50 can be designed by selecting sub-layer materials with different refractive indices and their thicknesses.
圖3顯示依據本申請案一實施例所模擬的實驗結果。圖3中,曲線L1表示半導體疊層12實際發出光線的波長頻譜,為第一光線;曲線F1表示濾光層50對於不同波長光線的穿透率;以及曲線L2表示半導體疊層12搭配濾光層50所得到的模擬波長頻譜,也就是第一光線經由濾光層50後所得到的第二光線的模擬波長頻譜。於本實驗中,半導體疊層12所發出的第一光線為綠光,其峰值波長(peak wavelength)為532nm。濾光層50包含複數對由SiO2和TiO2所組成的介電材料對,其中,包含三組介電材料疊層,第一組介電材料疊層較靠近半導體疊層12,第二組介電材料疊層較遠離半導體疊層12,第三組介電材料疊層介於第一組和第二組介電材料疊層之間。其中,第一組的SiO2和TiO2介電材料對的光學厚度大於第三組的SiO2和TiO2介電材料對的光學厚度;第二組的SiO2和TiO2介電材料對的光學厚度大於及/或小於第三組的SiO2和TiO2介電材料對的光學厚度。第一組的SiO2和TiO2介電材料對包含整數對或非整數對,第二組的SiO2和TiO2介電材料對包含整數對或非整數對,第三組的SiO2和TiO2介電材料對包含整數對或非整數對。第三組介電材料疊層中介電材料對數目分別大於第一組及第二組介電材料疊層中的介電材料對數目。藉由調整第一組和第二組介電材料疊層的厚度,可以降低因干涉現象造成部分波長範圍穿透率下降的現象。 Figure 3 shows the experimental results simulated according to an embodiment of the present application. In Figure 3, curve L1 represents the wavelength spectrum of the light actually emitted by semiconductor stack 12, which is the first light; curve F1 represents the transmittance of filter layer 50 for light of different wavelengths; and curve L2 represents the simulated wavelength spectrum obtained by combining semiconductor stack 12 with filter layer 50, that is, the simulated wavelength spectrum of the second light obtained after the first light passes through filter layer 50. In this experiment, the first light emitted by semiconductor stack 12 is green light with a peak wavelength of 532 nm. The filter layer 50 includes a plurality of dielectric material pairs composed of SiO2 and TiO2 , including three groups of dielectric material stacks. The first group of dielectric material stacks is closer to the semiconductor stack 12, the second group of dielectric material stacks is farther away from the semiconductor stack 12, and the third group of dielectric material stacks is located between the first and second groups of dielectric material stacks. The optical thickness of the first group of SiO2 and TiO2 dielectric material pairs is greater than the optical thickness of the third group of SiO2 and TiO2 dielectric material pairs; and the optical thickness of the second group of SiO2 and TiO2 dielectric material pairs is greater than and/or less than the optical thickness of the third group of SiO2 and TiO2 dielectric material pairs. The first set of SiO2 and TiO2 dielectric material pairs may include an integer or non-integer number of pairs, the second set of SiO2 and TiO2 dielectric material pairs may include an integer or non-integer number of pairs, and the third set of SiO2 and TiO2 dielectric material pairs may include an integer or non-integer number of pairs. The number of dielectric material pairs in the third set of dielectric material stacks is greater than the number of dielectric material pairs in the first and second sets of dielectric material stacks, respectively. By adjusting the thickness of the first and second sets of dielectric material stacks, the reduction in transmittance in certain wavelength ranges due to interference can be reduced.
如圖3所示,濾光層50對於此峰值波長具有80%以上的穿透率;更佳地,濾光層50對於此峰值波長具有90%以上的穿透率。濾光層50對於波長550nm以上光線的穿透率小於50%,對於波長535nm以下光線的穿透率大於或等於80%。此外,第一光線經過濾光層50得到第二光線,第二光線同為綠光,但具有比第一光線還小的半高寬。濾光層50過濾掉了第一光線在特定波段的光。於本實驗中,藉由濾光層50對第一光線在550nm以上低穿透率的特性,過濾掉大部分550nm以上的光,使第二光線的波長頻譜比第一光線的波長頻譜對稱,具有比第一光線還小的半高寬。於一實施例中,第二光線的半高寬小於或等於25nm。更佳地,第二光線的半高寬小於或等於20nm。如此一來,可提高發光元件1所發出光線的色彩純度。 As shown in Figure 3, filter layer 50 has a transmittance of over 80% at this peak wavelength; more preferably, filter layer 50 has a transmittance of over 90% at this peak wavelength. Filter layer 50 has a transmittance of less than 50% for light with a wavelength above 550nm and a transmittance of greater than or equal to 80% for light with a wavelength below 535nm. Furthermore, the first light passes through filter layer 50 to produce a second light. This second light is also green, but has a smaller half-height width than the first light. Filter layer 50 filters out light from the first light in a specific wavelength range. In this experiment, the filter layer 50, due to its low transmittance for the first light above 550 nm, filters out most of the light above 550 nm. This makes the wavelength spectrum of the second light symmetrical with that of the first light, resulting in a smaller half-width (WWHM) than that of the first light. In one embodiment, the WWHM of the second light is less than or equal to 25 nm. More preferably, the WWHM of the second light is less than or equal to 20 nm. This improves the color purity of the light emitted by the light-emitting element 1.
於另一實施例中,針對峰值波長為λp nm的光線,例如532nm的綠光,濾光層50具有帶通濾光功能,對於此峰值波長具有80%以上的穿透率,對於波長550nm以上光線的穿透率小於50%,對於波長510nm以下光線的穿透率小於50%。藉由濾光層50過濾掉大部分波長550nm以上的光線,以及波長510nm以下的光線。 In another embodiment, filter layer 50 has a bandpass filter function for light with a peak wavelength of λp nm, such as 532 nm green light. It has a transmittance of over 80% for this peak wavelength, less than 50% for light with a wavelength above 550 nm, and less than 50% for light with a wavelength below 510 nm. Filter layer 50 filters out most of the light with a wavelength above 550 nm and the light with a wavelength below 510 nm.
圖4顯示本申請案第二實施例發光元件2之截面圖。與發光元件1之差別在於,發光元件2包含複數個電性串聯的發光單元。本實施例以具有兩個發光單元11a及11b的發光元件2為示例,發光單元11a及11b相互分離位於基板第一表面10a上。發光單元11a及11b分別具有半導體疊層12及透明導電層18,絕緣層36位於發光單元11a及11b之間,覆蓋基板第一表面10a、發光單元11a的第一半導體層121側壁、發光單元11b的半導體疊層12側壁及部分第二半導體層122的上表面。連接電極60位於絕緣層36上,其一端接觸發光單元11a的第一半導體層121,其另一端接觸發光單元11b的透明導電層18。如此一來,使發光單元11a及11b形成電性串接。在另一實施例中,連 接電極60電性連接發光單元11a及11b上的第一半導體層121,及/或連接電極60電性連接發光單元11a及11b上的第二半導體層122,使發光單元11a及11b形成並聯、串聯或是串並聯等不同的發光單元陣列。 Figure 4 shows a cross-sectional view of a light-emitting element 2 according to the second embodiment of this application. Unlike light-emitting element 1, light-emitting element 2 includes a plurality of light-emitting units electrically connected in series. This embodiment uses a light-emitting element 2 having two light-emitting units 11a and 11b as an example. Light-emitting units 11a and 11b are separated from each other and located on a first surface 10a of a substrate. Light-emitting units 11a and 11b each include a semiconductor stack 12 and a transparent conductive layer 18. An insulating layer 36 is located between light-emitting units 11a and 11b, covering the first surface 10a of the substrate, the sidewalls of the first semiconductor layer 121 of light-emitting unit 11a, the sidewalls of the semiconductor stack 12 of light-emitting unit 11b, and a portion of the upper surface of the second semiconductor layer 122. Connecting electrode 60 is located on insulating layer 36. One end of the connecting electrode contacts the first semiconductor layer 121 of light-emitting cell 11a, and the other end contacts the transparent conductive layer 18 of light-emitting cell 11b. This electrically connects light-emitting cells 11a and 11b in series. In another embodiment, connecting electrode 60 electrically connects the first semiconductor layer 121 of light-emitting cells 11a and 11b, and/or the second semiconductor layer 122 of light-emitting cells 11a and 11b, allowing light-emitting cells 11a and 11b to form different light-emitting cell arrays, such as parallel, series, or a combination of series and parallel.
第一電極20位於發光單元11b的第一半導體層121上,第二電極30位於發光單元11a的第二半導體層122上。濾光層50覆蓋發光單元11a及11b、連接電極60、以及發光單元11a及11b之間的基板第一表面10a。類似於第一實施例之發光元件1,發光元件2的濾光層50具有開孔501及502分別露出第一電極20和第二電極30。濾光層50之功能、結構與材料如同前述,在此不加以贅述。發光元件2中半導體疊層12所發出的第一光線,經過濾光層50得到第二光線,從發光元件2之上表面(即,濾光層50所在之表面)被摘出。其中,第二光線與第一光線顏色相同,且具有比第一光線還小的半高寬。如此一來,可提高發光元件2所發出光線的色彩純度。於一實施例中,第二光線為綠光,其半高寬小於或等於25nm。更佳地,第二光線的半高寬小於或等於20nm。 The first electrode 20 is located on the first semiconductor layer 121 of the light-emitting cell 11b, and the second electrode 30 is located on the second semiconductor layer 122 of the light-emitting cell 11a. The filter layer 50 covers the light-emitting cells 11a and 11b, the connecting electrode 60, and the first surface 10a of the substrate between the light-emitting cells 11a and 11b. Similar to the light-emitting element 1 of the first embodiment, the filter layer 50 of the light-emitting element 2 has openings 501 and 502, respectively, exposing the first electrode 20 and the second electrode 30. The function, structure, and materials of the filter layer 50 are as described above and will not be elaborated here. The first light emitted by the semiconductor stack 12 in the light-emitting element 2 passes through the filter layer 50 to produce the second light, which is then extracted from the top surface of the light-emitting element 2 (i.e., the surface where the filter layer 50 is located). The second light has the same color as the first light and a smaller half-height width than the first light. This improves the color purity of the light emitted by the light-emitting element 2. In one embodiment, the second light is green, and its half-height width is less than or equal to 25 nm. More preferably, the half-height width of the second light is less than or equal to 20 nm.
圖5顯示本申請案第三實施例發光元件3之截面圖。不同於發光元件1及發光元件2,發光元件3為一覆晶式元件(flip-chip),以覆晶方式將發光元件3的第一電極20’及第二電極30’連接至一載板(圖未示),使發光元件3與載板上的電路(圖未示)接合,以達到和外部電子元件或外部電源的連接。此外,不同於發光元件1及發光元件2,發光元件3的濾光層50形成於半導體疊層12上,且位於基板第二表面10b。濾光層50之功能、結構及材料如同前述實施例,在此不加以贅述。 Figure 5 shows a cross-sectional view of a light-emitting device 3 according to the third embodiment of this application. Unlike light-emitting devices 1 and 2, light-emitting device 3 is a flip-chip device. Its first electrode 20' and second electrode 30' are connected to a carrier (not shown) via a flip-chip method. This allows light-emitting device 3 to interface with circuitry on the carrier (not shown) to facilitate connection to external electronic components or an external power source. Furthermore, unlike light-emitting devices 1 and 2, light-emitting device 3 has a filter layer 50 formed on the semiconductor stack 12 and located on the second surface 10b of the substrate. The function, structure, and materials of filter layer 50 are similar to those of the previous embodiments and will not be further described here.
發光元件3包含反射結構28覆蓋透明導電層18。反射結構28可包含金屬反射層,例如是單層金屬或是由複數層金屬所形成之疊層。於一實施例中,反射結構28包含阻障層(圖未示)及反射層(圖未示),阻障層形成並覆 蓋於反射層上,阻障層可以防止反射層之金屬元素的遷移、擴散或氧化。反射層的材料包含對於半導體疊層12所發射的光線具有高反射率的金屬材料,例如銀(Ag)、金(Au)、鋁(Al)、鈦(Ti)、鉻(Cr)、銅(Cu)、鎳(Ni)、鉑(Pt)、釕(Ru)或上述材料之合金或疊層。阻障層的材料包括鉻(Cr)、鉑(Pt)、鈦(Ti)、鎢(W)、鋅(Zn)或上述材料之合金或疊層。半導體疊層12所發出的光線,經由反射結構28的反射,從發光元件3之上表面(即,濾光層50所在之表面)被摘出,增加發光元件3的亮度。 The light-emitting element 3 includes a reflective structure 28 covering the transparent conductive layer 18. The reflective structure 28 may include a metal reflective layer, such as a single metal layer or a stack of multiple metal layers. In one embodiment, the reflective structure 28 includes a barrier layer (not shown) and a reflective layer (not shown). The barrier layer is formed overlying the reflective layer to prevent the migration, diffusion, or oxidation of the metal elements in the reflective layer. The reflective layer comprises a metal material with high reflectivity for light emitted by the semiconductor stack 12, such as silver (Ag), gold (Au), aluminum (Al), titanium (Ti), chromium (Cr), copper (Cu), nickel (Ni), platinum (Pt), ruthenium (Ru), or alloys or stacks of these materials. The barrier layer comprises chromium (Cr), platinum (Pt), titanium (Ti), tungsten (W), zinc (Zn), or alloys or stacks of these materials. Light emitted by the semiconductor stack 12 is reflected by the reflective structure 28 and extracted from the top surface of the light-emitting element 3 (i.e., the surface where the filter layer 50 is located), thereby increasing the brightness of the light-emitting element 3.
發光元件3包含保護層26覆蓋半導體疊層12以及半導體疊層12之側壁,於一實施例中,保護層26更可覆蓋基板第一表面10a。保護層26包含開孔261及262分別露出第一半導體層121及反射結構28。保護層26的材料為非導電材料,包含有機材料,例如Su8、苯并環丁烯(BCB)、過氟環丁烷(PFCB)、環氧樹脂(Epoxy)、丙烯酸樹脂(Acrylic Resin)、環烯烴聚合物(COC)、聚甲基丙烯酸甲酯(PMMA)、聚對苯二甲酸乙二酯(PET)、聚碳酸酯(PC)、聚醚醯亞胺(Polyetherimide)或氟碳聚合物(Fluorocarbon Polymer),或是無機材料,例如矽膠(Silicone)、玻璃(Glass)或是介電材料,介電材料例如為氧化矽(SiOx)、氮化矽(SiNx)、氧氮化矽(SiOxNy)、氧化鈮(Nb2O5)、氧化鉿(HfO2)、氧化鈦(TiOx)、氟化鎂(MgF2)、氧化鋁(Al2O3)等。於一實施例中,保護層26由一對或複數對不同折射率的材料交互堆疊所形成,藉由不同折射率材料的選擇搭配其厚度設計,保護層26形成一反射結構,對特定波長範圍的光線提供反射功能,例如為一分佈式布拉格反射器。當保護層26形成反射結構時,半導體疊層12所發出的光線,經由保護層26的反射,從發光元件3之上表面(即,濾光層50所在之表面)被摘出,可增加發光元件3的亮度。 The light-emitting element 3 includes a protective layer 26 covering the semiconductor stack 12 and the sidewalls of the semiconductor stack 12. In one embodiment, the protective layer 26 may further cover the first surface 10a of the substrate. The protective layer 26 includes openings 261 and 262 that expose the first semiconductor layer 121 and the reflective structure 28, respectively. The material of the protective layer 26 is a non-conductive material, including organic materials such as Su8, benzocyclobutene (BCB), perfluorocyclobutane (PFCB), epoxy resin, acrylic resin, cycloolefin copolymer (COC), polymethyl methacrylate (PMMA), polyethylene terephthalate (PET), polycarbonate (PC), polyetherimide or fluorocarbon polymer, or inorganic materials such as silicone, glass or dielectric materials, such as silicon oxide ( SiOx ), silicon nitride (SiNx), silicon oxynitride ( SiOxNy ), niobium oxide ( Nb2O5 ), ferrous oxide ( HfO2 ), titanium oxide ( TiOx ) , etc. ), magnesium fluoride (MgF 2 ), aluminum oxide (Al 2 O 3 ), etc. In one embodiment, the protective layer 26 is formed by alternating a stack of one or more pairs of materials with different refractive indices. By selecting materials with different refractive indices and designing their thicknesses, the protective layer 26 forms a reflective structure that reflects light within a specific wavelength range, such as a distributed Bragg reflector. When the protective layer 26 forms a reflective structure, light emitted from the semiconductor stack 12 is reflected by the protective layer 26 and removed from the top surface of the light-emitting element 3 (i.e., the surface where the filter layer 50 is located), thereby increasing the brightness of the light-emitting element 3.
於一實施例中,當保護層26為一反射結構時,反射結構28可以省略。 In one embodiment, when the protective layer 26 is a reflective structure, the reflective structure 28 can be omitted.
發光元件3包含第一電極20’和第二電極30’。第一電極20’經由開口261與第一半導體層121電性連接,第二電極30’經由開口262與反射結構28、透明導電層18以及第二半導體層122電性連接。第一電極20’及第二電極30’包含金屬材料,例如鉻(Cr)、鈦(Ti)、鎢(W)、金(Au)、鋁(Al)、銦(In)、錫(Sn)、鎳(Ni)、銠(Rh)、鉑(Pt)等金屬或上述材料之疊層或合金。第一電極20’及第二電極30’可由單個層或是多個層所組成。例如,第一電極20’及第二電極30’可包括Ti/Au、Ti/Pt/Au、Cr/Au、Cr/Pt/Au、Ni/Au、Ni/Pt/Au或Cr/Al/Cr/Ni/Au等。 The light-emitting element 3 includes a first electrode 20' and a second electrode 30'. The first electrode 20' is electrically connected to the first semiconductor layer 121 via an opening 261, and the second electrode 30' is electrically connected to the reflective structure 28, the transparent conductive layer 18, and the second semiconductor layer 122 via an opening 262. The first electrode 20' and the second electrode 30' comprise a metal material, such as chromium (Cr), titanium (Ti), tungsten (W), gold (Au), aluminum (Al), indium (In), tin (Sn), nickel (Ni), rhodium (Rh), platinum (Pt), or a stack or alloy of these materials. The first electrode 20' and the second electrode 30' can be composed of a single layer or multiple layers. For example, the first electrode 20' and the second electrode 30' may include Ti/Au, Ti/Pt/Au, Cr/Au, Cr/Pt/Au, Ni/Au, Ni/Pt/Au, or Cr/Al/Cr/Ni/Au, etc.
於另一實施例中,發光元件3可包含複數個發光單元形成於基板10上,類似於發光元件2,相鄰發光單元之間形成有絕緣層,以連接電極將複數個發光單元電性連接後,接著,再形成保護層26、第一電極20’及第二電極30’。 In another embodiment, the light-emitting element 3 may include a plurality of light-emitting units formed on a substrate 10. Similar to the light-emitting element 2, an insulating layer is formed between adjacent light-emitting units to electrically connect the plurality of light-emitting units via connecting electrodes. Subsequently, a protective layer 26, a first electrode 20', and a second electrode 30' are formed.
發光元件3中半導體疊層12所發出的第一光線,穿過基板10,經過濾光層50而得到第二光線,從發光元件3之上表面(即,濾光層50所在之表面)被摘出。其中,第二光線與第一光線顏色相同,且具有比第一光線還小的半高寬。如此一來,可提高發光元件3所發出光線的色彩純度。於一實施例中,第二光線為綠光,其半高寬小於或等於25nm。更佳地,第二光線的半高寬小於或等於20nm。 The first light emitted by the semiconductor stack 12 in the light-emitting element 3 passes through the substrate 10 and the filter layer 50, resulting in the second light, which is then extracted from the top surface of the light-emitting element 3 (i.e., the surface where the filter layer 50 is located). The second light has the same color as the first light and a smaller half-height width than the first light. This improves the color purity of the light emitted by the light-emitting element 3. In one embodiment, the second light is green, and its half-height width is less than or equal to 25 nm. More preferably, the half-height width of the second light is less than or equal to 20 nm.
圖6顯示本申請案第四實施例發光元件4之截面圖。發光元件4與發光元件3類似,差別在於,發光元件4不具有基板10,發光元件4的濾光層50位於第一半導體層121的第二表面121b,其中第二表面121b與第一表面121a相對。濾光層50之功能、結構及材料如同前述實施例,在此不加以贅述。 發光元件4中半導體疊層12所發出的第一光線,經過濾光層50而得到第二光線,從發光元件4之上表面(即,濾光層50所在之表面)被摘出。其中,第二光線具有比第一光線還小的半高寬。如此一來,可提高發光元件4所發出光線的色彩純度。於一實施例中,第二光線為綠光,其半高寬小於或等於25nm。更佳地,第二光線的半高寬小於或等於20nm。 Figure 6 shows a cross-sectional view of a light-emitting element 4 according to the fourth embodiment of this application. Light-emitting element 4 is similar to light-emitting element 3, except that it lacks a substrate 10. Instead, a filter layer 50 is located on the second surface 121b of the first semiconductor layer 121, with the second surface 121b opposing the first surface 121a. The function, structure, and materials of the filter layer 50 are similar to those of the previous embodiments and will not be further described here. The first light emitted by the semiconductor stack 12 in light-emitting element 4 passes through the filter layer 50 to produce the second light, which is then extracted from the top surface of light-emitting element 4 (i.e., the surface where the filter layer 50 is located). The second light has a smaller half-height width than the first light. This improves the color purity of the light emitted by light-emitting element 4. In one embodiment, the second light is green light, and its half-width is less than or equal to 25 nm. More preferably, the half-width of the second light is less than or equal to 20 nm.
圖7A顯示本申請案第五實施例發光元件5之截面圖。發光元件5包含第一電極20”與第二電極30”分別設置在半導體疊層12的兩個相對表面121b及122a,分別與第一半導體層121和第二半導體層122電性連接。濾光層50覆蓋半導體疊層12的側表面及第一半導體層第二表面121b,包含開口501露出第一電極20”。於另一實施例中(圖未示),濾光層50更覆蓋第一電極20”的側表面,開口501露出第一電極20”的上表面。於另一實施例中,第一電極20”位於開口501中且覆蓋部分濾光層50的表面50e。於一實施例中,發光元件5更包含導電接著層及/或導電基板(圖未示)位於第二半導體層122與第二電極30”之間,半導體疊層12利用導電接著層與導電基板接合。於另一實施例中,如圖7B所示,半導體疊層12的順序與圖7A相反。濾光層50覆蓋半導體疊層12的側表面及第二半導體層表面122a,包含開口501露出第二電極30”。發光元件5中半導體疊層12所發出的第一光線,經過濾光層50而得到第二光線,從發光元件5之上表面及側表面(即,濾光層50所在之表面)被摘出。其中,第二光線與第一光線顏色相同,且具有比第一光線還小的半高寬。如此一來,可提高發光元件5所發出光線的色彩純度。於一實施例中,第二光線為綠光,其半高寬小於或等於25nm。更佳地,第二光線的半高寬小於或等於20nm。於另一實施中(圖未示),濾光層50覆蓋半導體疊層12的表面121b或122a,未覆蓋半導體疊層12的側面。於一實施例中,在量測上述各實施例之發光元件時,為避免有未通過濾光層50的光線,例如由發光 元件側面未覆蓋濾光層50所摘出的光干擾,於量測時可選用光學量測套筒收光量測,以收集量測由濾光層50摘出的第二光線。 FIG7A shows a cross-sectional view of a light-emitting element 5 according to the fifth embodiment of the present application. The light-emitting element 5 includes a first electrode 20″ and a second electrode 30″ disposed on two opposing surfaces 121b and 122a of the semiconductor stack 12, respectively, and electrically connected to the first semiconductor layer 121 and the second semiconductor layer 122, respectively. The filter layer 50 covers the side surfaces of the semiconductor stack 12 and the second surface 121b of the first semiconductor layer, and includes an opening 501 exposing the first electrode 20". In another embodiment (not shown), the filter layer 50 further covers the side surfaces of the first electrode 20", and the opening 501 exposes the top surface of the first electrode 20". In another embodiment, the first electrode 20" is located in the opening 501 and covers a portion of the surface 50e of the filter layer 50. In one embodiment, the light-emitting element 5 further includes a conductive contact layer and/or a conductive substrate (not shown) located between the second semiconductor layer 122 and the second electrode 30", and the semiconductor stack 12 is bonded to the conductive substrate using the conductive contact layer. In another embodiment, as shown in Figure 7B, the order of the semiconductor stack 12 is opposite to that of Figure 7A. The filter layer 50 covers the side surface of the semiconductor stack 12 and the second semiconductor layer surface 122a, and includes an opening 501 exposing the second electrode 30". The first light emitted by the semiconductor stack 12 in the light-emitting element 5 passes through the filter layer 50 to obtain the second light, which is extracted from the upper surface and side surface of the light-emitting element 5 (that is, the surface where the filter layer 50 is located). The second light has the same color as the first light and has a smaller half-height width than the first light. In this way, the color purity of the light emitted by the light-emitting element 5 can be improved. In one embodiment, the second light is green light, and its half-height width is less than or equal to 25nm. More preferably, the half-height width of the second light is less than or equal to 20nm. In another embodiment (not shown), the filter layer 50 covers the surface 121b or 122a of the semiconductor stack 12, but does not cover the side of the semiconductor stack 12. In one embodiment, when measuring the light-emitting devices of the aforementioned embodiments, to avoid interference from light that does not pass through the filter layer 50, such as light picked up by the side of the light-emitting device not covered by the filter layer 50, an optical measurement sleeve can be used to collect and measure the second light picked up by the filter layer 50.
在本技術領域中,發光元件的波長頻譜中具有最高光強度的波長定義為峰值波長,而在衡量一光線的色彩特性時,尤其是可見光色光的色彩特性時,可利用色光的主波長(dominant wavelength)或是色度座標來定義。本技術領域人員可以理解具有同樣峰值波長的光線,不見得具有同樣的主波長,也就是說不見得具有同樣的色彩特性。而當一色光的主波長與峰值波長越接近,表示此色光的色純度越高。相較於習知技術,依據本申請案任一實施例之發光元件,所發出的光線的主波長與峰值波長較接近,例如,發光元件所發出的光線的主波長與峰值波長的差值小於3nm,更佳地,小於2nm。圖8A至8C顯示依本申請案第三實施例之發光元件3與一比較例發光元件之實驗比較。發光元件3與比較例發光元件的差別在於,比較例發光元件不具有濾光層50。在本實驗中,濾光層50包含如同圖3模擬實驗中所使用的疊層結構。如圖8A所示,比較例發光元件與發光元件3皆發出綠光,具有近似的峰值波長,但相較於比較例發光元件,依據第三實施例的發光元件3所發出的光線,其半高寬較小。此外,發光元件3所發出的光線,其主波長與其峰值波長的差值為2.46nm,小於比較例發光元件其主波長與峰值波長的差值8.63nm。換言之,發光元件3所發出的光線的色純度較高。 In this technical field, the wavelength with the highest light intensity in the wavelength spectrum of a light-emitting element is defined as the peak wavelength. When measuring the color characteristics of a light ray, especially the color characteristics of visible light, the dominant wavelength (dominant wavelength) or chromaticity coordinates of the color light can be used to define it. Those skilled in the art can understand that light rays with the same peak wavelength do not necessarily have the same dominant wavelength, that is, they do not necessarily have the same color characteristics. The closer the dominant wavelength and the peak wavelength of a color light are, the higher the color purity of the color light. Compared to the prior art, the light-emitting element according to any embodiment of the present application has a dominant wavelength and a peak wavelength that are closer. For example, the difference between the dominant wavelength and the peak wavelength of the light emitted by the light-emitting element is less than 3nm, and more preferably, less than 2nm. Figures 8A to 8C show experimental comparisons between the light-emitting element 3 according to the third embodiment of this application and a comparative light-emitting element. The difference between light-emitting element 3 and the comparative light-emitting element is that the comparative light-emitting element does not include a filter layer 50. In this experiment, the filter layer 50 includes a stacked structure similar to that used in the simulation experiment shown in Figure 3. As shown in Figure 8A, both the comparative light-emitting element and light-emitting element 3 emit green light with similar peak wavelengths. However, the light emitted by light-emitting element 3 according to the third embodiment has a smaller half-height width than that of the comparative light-emitting element. Furthermore, the difference between the main wavelength and peak wavelength of the light emitted by light-emitting element 3 is 2.46 nm, which is smaller than the 8.63 nm difference between the main wavelength and peak wavelength of the light-emitting element in the comparative example. In other words, the color purity of the light emitted by light-emitting element 3 is higher.
圖8B顯示色域規範BT.2020(又稱Rec.2020)於CIE 1931色度座標上的色域分布,以及比較例發光元件與發光元件3的正向光線於CIE 1931色度座標上的分布。在圖8B及8C中,比較例發光元件與發光元件3的光線係利用光學量測套筒收得及量測。為清楚顯示所測得的色度座標值,圖8C顯示圖8B中區域R的局部放大圖。參照圖8B,色域規範BT.2020定義在CIE 1931 色度座標上,純紅色位於(0.708,0.292),純綠色位於(0.17,0.797),純藍色位於(0.131,0.046)。相較於習知技術,依據本申請案任一實施例之發光元件,所發出的光線的色純度較高,也就是說,更接近上述色域規範中的純色點座標。一般而言,當一待測光源於色度座標上越接近色域之邊界(也就是如圖8B中馬蹄形光譜軌跡),則色純度越高。色純度可以用百分比表示,定義在CIE色度座標上,待測光源的色度坐標與白點光源(energy white point)之色度座標直線距離與白點光源至待測光源主波長之光譜軌跡色度座標距離的百分比。以本申請案任一實施例之發光元件所發出峰值波長介於525nm至535nm的綠光為例,此綠光基於CIE 1931色度座標具有一色度座標值(X1,Y1),其中X1≦0.2,Y1≧0.75。參照圖8C,Group_Ref_1為發出光線之峰值波長為530nm的比較例發光元件所測得的資料點,Group_Ref_2為發出光線之峰值波長為532nm的比較例發光元件所測得的資料點,Group_Exp_1為發出光線之峰值波長為530nm的發光元件3所測得的資料點,Group_Exp_2為發出光線之峰值波長為532nm的發光元件3所測得的資料點。相較於發出光線之峰值波長相同的比較例發光元件,依據第三實施例的發光元件3所發出的綠光,較接近純綠色座標(0.17,0.797),具有較高的色純度。以本申請案任一實施例之發光元件所發出峰值波長介於525nm至535nm的綠光為例,其色純度大於或等於92%。更佳地,大於或等於93%。 Figure 8B shows the color gamut distribution of the BT.2020 (also known as Rec. 2020) color gamut standard on the CIE 1931 chromaticity coordinates, as well as the distribution of forward light from the comparative example light-emitting element and Light-emitting Element 3 on the CIE 1931 chromaticity coordinates. In Figures 8B and 8C, the light from the comparative example light-emitting element and Light-emitting Element 3 was collected and measured using an optical measuring tube. To clearly illustrate the measured chromaticity coordinate values, Figure 8C shows a partial magnification of area R in Figure 8B. Referring to Figure 8B, the BT.2020 color gamut standard defines the CIE 1931 chromaticity coordinates as follows: pure red is located at (0.708, 0.292), pure green is located at (0.17, 0.797), and pure blue is located at (0.131, 0.046). Compared to conventional technology, the light-emitting element according to any embodiment of the present application emits light with higher color purity, that is, closer to the pure color point coordinates in the aforementioned color gamut specification. Generally speaking, the closer a measured light source is to the color gamut boundary on the chromaticity coordinates (i.e., as shown by the horseshoe-shaped spectral trajectory in Figure 8B), the higher the color purity. Color purity can be expressed as a percentage, defined as the percentage of the straight line distance between the chromaticity coordinates of the measured light source and the white point light source (energy white point) on the CIE chromaticity coordinates to the chromaticity coordinate distance of the spectral trajectory of the main wavelength of the measured light source. Taking green light emitted by a light-emitting element in any embodiment of the present application with a peak wavelength between 525nm and 535nm as an example, this green light has a chromaticity coordinate value (X1, Y1) based on the CIE 1931 chromaticity coordinates, where X1 ≤ 0.2 and Y1 ≥ 0.75. Referring to FIG8C , Group_Ref_1 represents the data points measured for a comparative example light-emitting element emitting light with a peak wavelength of 530nm, Group_Ref_2 represents the data points measured for a comparative example light-emitting element emitting light with a peak wavelength of 532nm, Group_Exp_1 represents the data points measured for light-emitting element 3 emitting light with a peak wavelength of 530nm, and Group_Exp_2 represents the data points measured for light-emitting element 3 emitting light with a peak wavelength of 532nm. Compared to a comparative light-emitting element with the same peak wavelength, the green light emitted by the light-emitting element 3 according to the third embodiment is closer to the pure green coordinates (0.17, 0.797), exhibiting higher color purity. For example, for green light emitted by the light-emitting element of any embodiment of this application with a peak wavelength between 525nm and 535nm, the color purity is greater than or equal to 92%. More preferably, it is greater than or equal to 93%.
圖9顯示依本申請案第三實施例之發光元件3依不同角度所量測的波長與光強度。於本實驗中,發光元件3依上述實施例所述,濾光層50位於基板第二表面10b上,發光元件3所發出的光線包含正向出光及側向出光,其中正向出光的光強度大於側向出光的光強度,正向出光的半高寬小於側向出光的半高寬。發光元件3發出的光線包含在一第一方向所發出的光線,其包含經由側向出光的光線,具有一第一半高寬及第一光強度;發光元件3 發出的光線包含在一第二方向所發出的光線,其包含經由正向出光的光線,具有一第二半高寬及第二光強度。於一實施例中,由於濾光層50位於基板第二表面10b上,基板第二表面10b與第一表面10a之間的側壁未披覆濾光層50,因此第一方向與光摘出表面的法線方向之夾角介於45-90度範圍內所量測到的第一方向光線包含有未經由經由濾光層50自發光元件3側面(例如基板側壁)摘出的光線。第二方向與光摘出表面的法線方向之夾角介於0-30度範圍內所量測到的第二方向光線包含有經由正向出光的光線。於本實驗中,相對於第一方向光線,第二方向光線的第二半高寬小於第一半高寬且小於或等於25nm,第二光強度大於第一光強度。這裡的光摘出表面為濾光層50相對於半導體疊層12的表面50e。上述實驗係以一綠光發光元件為例,然而,依本申請案任一實施例發光元件的半導體疊層可以發出紅光、黃光、藍光或藍綠光,依據該些色光來設計濾光層50的疊層結構,可得到純化的紅光、黃光、藍光或藍綠光,達到如同前述的效果。藉由濾光層50提升發光元件的光色彩純度,特別是在正向光上的色彩純度,對於特定的產品應用有所助益。例如將依本申請案任一實施例之發光元件應用在顯示裝置,可實現高色彩飽和度、高對比度及廣色域。 Figure 9 shows the wavelength and light intensity measured at different angles for the light-emitting element 3 according to the third embodiment of this application. In this experiment, the light-emitting element 3, as described in the aforementioned embodiment, has a filter layer 50 located on the second surface 10b of the substrate. The light emitted by the light-emitting element 3 includes both forward and side light. The forward light has a higher intensity than the side light, and the half-width at half-height of the forward light is smaller than the half-width at half-height of the side light. The light emitted by the light-emitting element 3 includes light emitted in a first direction, including light emitted via the side light, having a first half-width at half-height and a first intensity. The light emitted by the light-emitting element 3 includes light emitted in a second direction, including light emitted via the forward light, having a second half-width at half-height and a second intensity. In one embodiment, since the filter layer 50 is located on the second surface 10b of the substrate, the sidewall between the second surface 10b and the first surface 10a of the substrate is not covered with the filter layer 50. Therefore, the first-directional light rays measured when the angle between the first direction and the normal direction of the light extraction surface is in the range of 45-90 degrees includes light rays that are not extracted from the side surface of the light-emitting element 3 (e.g., the substrate sidewall) through the filter layer 50. The second-directional light rays measured when the angle between the second direction and the normal direction of the light extraction surface is in the range of 0-30 degrees include light rays that are emitted in the forward direction. In this experiment, relative to the first-directional light rays, the second half-height width of the second-directional light rays is less than the first half-height width and less than or equal to 25nm, and the second light intensity is greater than the first light intensity. The light extraction surface here refers to surface 50e of the filter layer 50 facing the semiconductor stack 12. The above experiments used a green light-emitting device as an example. However, the semiconductor stack of the light-emitting device according to any embodiment of this application can emit red, yellow, blue, or blue-green light. By designing the stack structure of the filter layer 50 according to these colors, purified red, yellow, blue, or blue-green light can be obtained, achieving the same effect as described above. Improving the color purity of the light from the light-emitting device, especially in the forward direction, through the filter layer 50 can be beneficial for specific product applications. For example, using a light-emitting device according to any embodiment of this application in a display device can achieve high color saturation, high contrast, and a wide color gamut.
正向出光的光線是經由濾光層50所摘出的光,其藉由濾光層50的濾光特性純化半導體疊層12產生的光線。於本實施例中,側向出光的光,例如在第一方向的光包含未經由濾光層50所摘出的光,例如自發光元件側面摘出的光,具有接近原來半導體疊層12產生的光線的特性,例如具有接近原來半導體疊層12產生的光線的半高寬。然而本申請案不在此限。基於進一步減少未經濾光層50摘出的側向光影響光純化,於一實施例中,依本申請案任一實施例發光元件之側面上亦可形成一調變結構(圖未示)。於一實施例中,調變結構包含一反射層,將射向發光元件側面的光反射或改變方 向成為正向出光的光線。於另一實施例中,調變結構包含一光吸收層,吸收射向發光元件側面的光。於另一實施例中,調變結構包含一濾光層,其功能類似濾光層50僅讓特定波段的光穿透。於另一實施例中,調變結構包含一光阻擋層,阻擋光從發光元件側面摘出。於一實施例中,調變結構可於後段封裝模組應用端搭配使用。例如於封裝體中發光元件的側面設置調變結構,發光元件封裝體的結構將詳述如後。 The light emitted in the forward direction is the light extracted by the filter layer 50, which purifies the light generated by the semiconductor stack 12 by the filtering properties of the filter layer 50. In this embodiment, the light emitted in the side direction, for example, the light in the first direction includes the light not extracted by the filter layer 50, for example, the light extracted from the side of the light-emitting element, and has characteristics close to those of the light generated by the original semiconductor stack 12, for example, having a half-height width close to that of the light generated by the original semiconductor stack 12. However, the present application is not limited to this. In order to further reduce the impact of the side light not extracted by the filter layer 50 on light purification, in one embodiment, a modulation structure (not shown) can also be formed on the side of the light-emitting element according to any embodiment of the present application. In one embodiment, the modulation structure includes a reflective layer that reflects or redirects light directed toward the sides of the light-emitting element, converting it into forward-emitting light. In another embodiment, the modulation structure includes a light-absorbing layer that absorbs light directed toward the sides of the light-emitting element. In another embodiment, the modulation structure includes a filter layer, which functions similarly to filter layer 50 by allowing only light within a specific wavelength band to pass through. In another embodiment, the modulation structure includes a light-blocking layer that blocks light from exiting the sides of the light-emitting element. In one embodiment, the modulation structure can be used in conjunction with a back-end packaging module application. For example, the modulation structure can be disposed on the side of the light-emitting element in the package. The structure of the light-emitting element package will be described in detail below.
圖10A為依據本申請案一實施例之顯示裝置101的上視示意圖。如第10圖所示,顯示裝置101包含顯示基板200,其中顯示基板200包含顯示區210與非顯示區220,以及複數個畫素PX排列設置於顯示基板200中的顯示區210,各畫素PX分別包含第一子畫素PX_A、第二子畫素PX_B與第三子畫素PX_C。非顯示區220中設置有資料線驅動電路130以及掃描線驅動電路140。資料線驅動電路130連接各畫素PX的資料線(data line)(圖未示),以傳輸資料訊號至各畫素PX。掃描線驅動電路140連接各畫素PX之掃描線(scan line)(圖未示),以傳輸掃描訊號至各畫素PX。畫素PX包含前述任一實施例之發光元件,以濾光層50相對於半導體疊層12的表面50e做為主要的光摘出面。於一實施例中,為了實現高解析度的顯示裝置,通常需要設置小尺寸、高密度排列的畫素,因此任一子畫素的發光元件的對角線長度小於300μm。 Figure 10A is a top view schematic diagram of a display device 101 according to an embodiment of the present application. As shown in Figure 10 , the display device 101 includes a display substrate 200, wherein the display substrate 200 includes a display area 210 and a non-display area 220. A plurality of pixels PX are arranged in the display area 210 of the display substrate 200, each pixel PX including a first sub-pixel PX_A, a second sub-pixel PX_B, and a third sub-pixel PX_C. A data line driver circuit 130 and a scan line driver circuit 140 are disposed in the non-display area 220. The data line driver circuit 130 is connected to a data line (not shown) of each pixel PX to transmit a data signal to each pixel PX. The scan line driver circuit 140 connects to the scan lines (not shown) of each pixel PX to transmit a scan signal to each pixel PX. The pixel PX includes a light-emitting element according to any of the aforementioned embodiments, with the surface 50e of the filter layer 50 facing the semiconductor stack 12 serving as the primary light extraction surface. In one embodiment, to achieve a high-resolution display device, small, densely packed pixels are typically required. Therefore, the diagonal length of the light-emitting element in any sub-pixel is less than 300 μm.
各子畫素發出不同顏色的光,於一實施例中,第一子畫素PX_A、第二子畫素PX_B與第三子畫素PX_C例如分別為紅色子畫素、綠色子畫素以及藍色子畫素。可選用發出不同波長光線的發光元件分別作為子畫素,使各子畫素呈現不同顏色。藉由各子畫素所發出紅色、綠色以及藍色之光線的組合,使顯示裝置101發出全彩的影像。再次參照圖8B,當各子畫素中的發光元件所發出的色光基於色度座標越接近色域規範所制定的純色點座標時,畫素所能呈現的色域範圍越廣,即,可以實現廣色域的顯示裝置。 在習知顯示裝置中,為了達到高色彩飽和度、高對比度或廣色域等目的,需要在畫素中發光元件以外設置濾光元件或波長轉換元件等,可能增加整體顯示裝置的製程複雜度、製作成本及結構複雜度。此外,使用濾光元件或波長轉換元件可能會損失掉發光元件的亮度或光強度。依本申請案任一實施例之發光元件所製作的顯示裝置,可以改善上述問題。 Each subpixel emits light of a different color. In one embodiment, the first subpixel PX_A, the second subpixel PX_B, and the third subpixel PX_C are, for example, red, green, and blue, respectively. Light-emitting elements emitting light of different wavelengths can be used as subpixels to enable each subpixel to display a different color. The combination of red, green, and blue light emitted by each subpixel enables the display device 101 to produce a full-color image. Referring again to Figure 8B , the closer the color coordinates of the light emitted by the light-emitting elements in each subpixel are to the pure color point coordinates defined by the color gamut specification, the wider the color gamut the pixel can display, thus achieving a wide color gamut display device. In conventional display devices, achieving high color saturation, high contrast, or a wide color gamut requires the installation of filters or wavelength converters in addition to the light-emitting elements within the pixels. This can increase the overall display device's manufacturing process complexity, production costs, and structural complexity. Furthermore, the use of filters or wavelength converters can compromise the brightness or light intensity of the light-emitting elements. Display devices fabricated using the light-emitting elements of any embodiment of this application can alleviate these issues.
本實施例中單一畫素PX之子畫素個數、面積及排列並不限於此,可依據使用者對於色彩及解析度等不同需求,進而有不同的實施方式。依據本申請案另一實施例之顯示裝置(圖未示),其畫素PX更包含一第四子畫素,第四子畫素包含前述任一實施例之發光元件。第四子畫素所包含的發光元件的光線波長不同於第一子畫素至第三子畫素中的發光元件。例如,第四子畫素為藍綠色子畫素,第四子畫素中的發光元件,其發出光線的峰值波長介於495nm至520nm。更佳地,介於500nm至510nm。同樣地,第四子畫素中的發光元件藉由濾光層50純化半導體疊層所發出的藍綠光,以得到較高色彩純度的藍綠光,進而提高顯示裝置的色彩表現能力。 The number, area, and arrangement of sub-pixels in a single pixel PX in this embodiment are not limited thereto, and may be implemented in different ways based on the user's different requirements for color and resolution. According to a display device (not shown) in another embodiment of this application, the pixel PX further includes a fourth sub-pixel, and the fourth sub-pixel includes a light-emitting element according to any of the aforementioned embodiments. The light wavelength of the light-emitting element included in the fourth sub-pixel is different from that of the light-emitting elements in the first to third sub-pixels. For example, the fourth sub-pixel is a blue-green sub-pixel, and the peak wavelength of the light emitted by the light-emitting element in the fourth sub-pixel is between 495nm and 520nm. More preferably, it is between 500nm and 510nm. Similarly, the light-emitting element in the fourth sub-pixel uses the filter layer 50 to purify the blue-green light emitted by the semiconductor stack to obtain blue-green light with higher color purity, thereby improving the color rendering capability of the display device.
於一實施例中,圖10B為圖10A中一個畫素PX的截面示意圖。任一子畫素包含一發光元件封裝體6,發光元件封裝體6內封有前述第三實施例之發光元件3或第四實施例之發光元件4。發光元件封裝體6接合於顯示基板200上。顯示基板200上設置有電路層110以及電路接合墊8a與8b。電路層110與電路接合墊之間為電性連接,電路層110可包含主動式電子元件,例如電晶體。發光元件封裝體6之電極81及83例如透過焊接的方式分別與電路接合墊8a及8b接合,並經由電路層110與顯示器驅動電路(即,資料線驅動電路130以及掃描線驅動電路140)電性連接。如此一來,藉由資料線驅動電路130、掃描線驅動電路140及電路層110可控制畫素PX中的發光元件。 In one embodiment, Figure 10B is a schematic cross-sectional view of a pixel PX in Figure 10A . Each sub-pixel includes a light-emitting device package 6, which encapsulates the light-emitting device 3 of the third embodiment or the light-emitting device 4 of the fourth embodiment. The light-emitting device package 6 is bonded to a display substrate 200. A circuit layer 110 and circuit bonding pads 8a and 8b are provided on the display substrate 200. The circuit layer 110 is electrically connected to the circuit bonding pads and may include active electronic components, such as transistors. Electrodes 81 and 83 of the light-emitting device package 6 are bonded to circuit bonding pads 8a and 8b, respectively, for example, by soldering. These electrodes are then electrically connected to the display driver circuits (i.e., data line driver circuit 130 and scan line driver circuit 140) via circuit layer 110. In this way, the light-emitting device in the pixel PX can be controlled by the data line driver circuit 130, scan line driver circuit 140, and circuit layer 110.
圖10C為依據本申請案一實施例之發光元件封裝體6,如前述,發光元件封裝體6內封有第三實施例之發光元件3。發光元件封裝體6包含封裝材料90覆蓋發光元件3的側表面。於一實施例中,封裝材料90包含一基材(matrix),例如為矽氧樹脂(Silicone)、環氧樹脂(Epoxy)、壓克力或其混和物。於另一實施例中,封裝材料90包含基材及其他材料,以形成前述的調變結構。例如,封裝材料90包含基材及吸光材料,以形成一光吸收層,其中吸光材料包含黑色材料,例如碳黑。例如,封裝材料90包含基材及反射材料,以形成一反射層,其中反射材料包含氧化鈦(TiOx)、氧化矽(SiOx)或其混和物。於另一實施例中,封裝材料90包含多個不同功能的調變結構,例如,封裝材料90包含反射層覆蓋發光元件,以及光吸收層覆蓋反射層。 FIG10C illustrates a light-emitting device package 6 according to an embodiment of the present application. As described above, the light-emitting device package 6 encapsulates the light-emitting device 3 of the third embodiment. The light-emitting device package 6 includes a packaging material 90 covering the side surfaces of the light-emitting device 3. In one embodiment, the packaging material 90 includes a matrix, such as silicone, epoxy, acrylic, or a mixture thereof. In another embodiment, the packaging material 90 includes a matrix and other materials to form the aforementioned modulation structure. For example, the packaging material 90 includes a matrix and a light-absorbing material to form a light-absorbing layer, wherein the light-absorbing material includes a black material, such as carbon black. For example, encapsulation material 90 includes a substrate and a reflective material to form a reflective layer, wherein the reflective material includes titanium oxide (TiO x ), silicon oxide (SiO x ), or a mixture thereof. In another embodiment, encapsulation material 90 includes multiple modulation structures with different functions. For example, encapsulation material 90 includes a reflective layer covering a light-emitting element and a light-absorbing layer covering the reflective layer.
於另一實施例中(圖未示),畫素PX包含發光元件封裝體6,單一發光元件封裝體6內同時封有複數個發光元件,各發光元件構成一子畫素。於一實施例中,發光元件封裝體6的封裝材料90形成調變結構,並填充於複數個發光元件之間。圖10B示例性繪示發光元件封裝體6內封有依本申請案一實施例之覆晶式發光元件,但本申請案的發光元件封裝體並不限於此。於其他實施例中(圖未示),任一子畫素包含依據本申請案任一實施例之發光元件,以適合不同實施例發光元件的打線方式、焊接方式或固晶方式,將發光元件之第一電極20(20’或20”)與第二電極30(30’或30”),分別電性連接於顯示基板200上的電路接合墊8a與8b。 In another embodiment (not shown), the pixel PX includes a light-emitting device package 6. Multiple light-emitting devices are encapsulated within a single light-emitting device package 6, each of which constitutes a sub-pixel. In one embodiment, the encapsulation material 90 of the light-emitting device package 6 forms a modulation structure and fills the spaces between the multiple light-emitting devices. Figure 10B exemplarily illustrates a flip-chip light-emitting device encapsulated within the light-emitting device package 6 according to one embodiment of the present application, but the light-emitting device package of the present application is not limited thereto. In other embodiments (not shown), each sub-pixel includes a light-emitting element according to any embodiment of the present application. The first electrode 20 (20' or 20") and the second electrode 30 (30' or 30") of the light-emitting element are electrically connected to circuit bonding pads 8a and 8b on the display substrate 200, respectively, using wire bonding, soldering, or die bonding methods appropriate for the light-emitting element of the respective embodiment.
圖11本申請案第六實施例發光元件9之截面圖。圖11的發光元件9僅以類似前述圖1的發光元件1作為一示例,發光元件9和發光元件1的主要結構類似,差異在於濾光層50’。然而,發光元件9的主要結構可如同前述實施例中任一發光元件。發光元件9包含濾光層50’,由一對或複數對不同折射率的材料層交互堆疊所形成。濾光層50’與前述濾光層50具有類似的結 構,藉由選擇不同折射率介電材料作為濾光層50’中第一子層及第二子層(圖未示),並搭配其厚度設計,形成一干涉現象,讓發光元件9發出的光經由濾光層50’選擇性地進行穿透或反射。其差別在於,濾光層50’對特定角度範圍的光線提供過濾功能,也就是僅有特定角度範圍的光可以穿透濾光層50’。具體而言,如圖11所示的發光元件9,半導體疊層12發出一具有特定峰值波長的光線入射到濾光層50’,濾光層50’可讓大部分小角度入射光穿透,並反射大部分大角度入射光。於另一實例中,發光元件9的結構類似前述實施例中的發光元件3,半導體疊層12發出的光線穿過基板10,入射到濾光層50’,濾光層50e’可讓大部分小角度入射光穿透,並反射大部分大角度入射光。這裡入射光的角度係指入射光方向與入射面法線方向的夾角。於一實施例中,圖12顯示發光元件9的光路徑示意圖。小角度入射光的光路徑如同P1,自活性層123發出的光經過濾光層50’,從濾光層表面50e’摘出。大角度入射光的光路徑如同P2,自活性層123發出的光在半導體疊層12和濾光層50’之介面發生全反射,朝向基板10,並且在基板第一表面10a的圖案化結構(圖未示)而產生折射及/或散射,而改變了方向,在半導體疊層12和濾光層50’之介面形成小角度入射光,從濾光層表面50e’摘出。如此一來,濾光層50’可使發光元件9所發出光線的出光角度收斂,來達到收斂出光角度的效果。 Figure 11 is a cross-sectional view of a light-emitting element 9 according to the sixth embodiment of this application. The light-emitting element 9 in Figure 11 is merely an example of a light-emitting element similar to the light-emitting element 1 in Figure 1 . The primary structure of light-emitting element 9 is similar to that of light-emitting element 1, differing only in the filter layer 50'. However, the primary structure of light-emitting element 9 can be the same as that of any of the light-emitting elements in the aforementioned embodiments. Light-emitting element 9 includes a filter layer 50' formed by alternating stacks of one or more pairs of material layers having different refractive indices. Filter layer 50' has a similar structure to the aforementioned filter layer 50. By selecting dielectric materials with different refractive indices as the first and second sublayers (not shown) within filter layer 50' and adjusting their thicknesses, an interference effect is created, allowing light emitted by light-emitting element 9 to selectively pass through or reflect through filter layer 50'. The difference lies in that filter layer 50' filters light within a specific angle range, meaning that only light within that specific angle range can pass through filter layer 50'. Specifically, in the light-emitting element 9 shown in Figure 11, semiconductor stack 12 emits light with a specific peak wavelength that is incident on filter layer 50'. Filter layer 50' allows most of the light incident at low angles to pass through, while reflecting most of the light incident at high angles. In another embodiment, the structure of the light-emitting element 9 is similar to the light-emitting element 3 in the aforementioned embodiment. The light emitted by the semiconductor stack 12 passes through the substrate 10 and is incident on the filter layer 50'. The filter layer 50e' allows most of the small-angle incident light to pass through and reflects most of the large-angle incident light. The angle of the incident light here refers to the angle between the direction of the incident light and the normal direction of the incident surface. In one embodiment, Figure 12 shows a schematic diagram of the light path of the light-emitting element 9. The light path of the small-angle incident light is the same as P1. The light emitted from the active layer 123 passes through the filter layer 50' and is extracted from the filter layer surface 50e'. The optical path of high-angle incident light is similar to that of P2. Light emitted from active layer 123 undergoes total internal reflection at the interface between semiconductor stack 12 and filter layer 50', traveling toward substrate 10. There, it undergoes refraction and/or scattering at the patterned structure (not shown) on substrate first surface 10a, changing its direction. Light incident at the interface between semiconductor stack 12 and filter layer 50' forms low-angle incident light, which is then extracted from filter layer surface 50e'. In this way, filter layer 50' converges the light output angle of light emitted by light-emitting element 9, achieving a converged light output angle effect.
發光元件9所發出的光線包含正向出光及側向出光,其中正向出光的光強度大於側向出光的光強度。於一實施例中,濾光層50’對於入射角小於10度的光線時,光穿透率大於90%;對於入射角大於20度的光線,光穿透率小於10%。依上述第六實施例之發光元件9,其發散角(或又稱光束角)小於等於120度;於另一實施例中,發光元件9的發散角小於或等於110度。於另一實施例中,發光元件9的發散角介於50度至110度。於另一實施例中, 發光元件9的發散角介於50度至100度。發散角指的是,在光源的配光曲線中,也就是發光元件在各個角度發光強度的空間分佈中,光強度達到出光面法線方向上光強度的二分之一,兩邊所形成的夾角。 The light emitted by the light-emitting element 9 includes forward light and side light, with the intensity of the forward light being greater than the intensity of the side light. In one embodiment, the filter layer 50' has a light transmittance greater than 90% for light with an incident angle less than 10 degrees and less than 10% for light with an incident angle greater than 20 degrees. According to the sixth embodiment, the light-emitting element 9 has a divergence angle (also known as a beam angle) of less than or equal to 120 degrees. In another embodiment, the divergence angle of the light-emitting element 9 is less than or equal to 110 degrees. In another embodiment, the divergence angle of the light-emitting element 9 is between 50 and 110 degrees. In another embodiment, the divergence angle of the light-emitting element 9 is between 50 and 100 degrees. The divergence angle refers to the angle formed by the point in the light distribution curve of a light source, that is, the spatial distribution of the light intensity of the light-emitting element at various angles, where the light intensity reaches half of the light intensity in the direction normal to the light-emitting surface.
圖13顯示第六實施例之發光元件9與比較例發光元件在各個角度發光強度的空間分佈。第六實施例之發光元件9結構類似發光元件1,濾光層50、50’都是由一對或複數對不同折射率材料構成的第一子層及第二子層交互堆疊所形成,濾光層50’類似濾光層50可以選擇性反射及穿透特定入射光。濾光層50內第一子層及第二子層之折射率及厚度設定為讓特定波長範圍的光線穿透,提供過濾功能,同時在入射光小角度入射角下,相對大角度其具有較大的光強度。濾光層50’內第一子層及第二子層之折射率及厚度設定為讓特定入射角度範圍的光線穿透,小角度入射角的入射光相較於大角度入射角的入射光具有較大的光強度。於一實施例中,入射光在小於10度的入射角達到90%以上的穿透率,在大於20度的入射角僅有10%以下的穿透率(或達到80%以上的反射率)。於一實施例中,濾光層50’包含複數對由SiO2和TiO2所組成的介電材料對,其中,包含三組介電材料疊層,第一組介電材料疊層較靠近半導體疊層12,第二組介電材料疊層較遠離半導體疊層12,第三組介電材料疊層介於第一組和第二組介電材料疊層之間。其中,第一組的SiO2和TiO2介電材料對的光學厚度大於第三組的SiO2和TiO2介電材料對的光學厚度;第二組的SiO2和TiO2介電材料對的光學厚度大於及/或小於第三組的SiO2和TiO2介電材料對的光學厚度。第一組的SiO2和TiO2介電材料對包含整數對或非整數對,第二組的SiO2和TiO2介電材料對包含整數對或非整數對,第三組的SiO2和TiO2介電材料對包含整數對或非整數對。第三組介電材料疊層中介電材料對數目分別大於第一組及第二組介電材料疊層中的介電材料對數目。藉由調整第一組和第二組介電材料疊層的厚 度,可以降低因干涉現象造成部分角度範圍穿透率下降的現象。比較例發光元件結構類似於發光元件9,惟差別在於不具有濾光層50’。由圖13可看出,相較於比較例,第六實施例發光元件9在60度至120度有較高的光強度,具有較高的正向光;也就是說,以濾光層表面50e’之法線方向約正負30度以內,第六實施例發光元件9具有較高的光強度,可將光集中在正向上。此外,第六實施例發光元件9的發散角為101度,小於比較例發光元件的發散角139度。 Figure 13 shows the spatial distribution of luminous intensity at various angles for the sixth embodiment of light-emitting element 9 and the comparative example light-emitting element. The structure of light-emitting element 9 of the sixth embodiment is similar to that of light-emitting element 1. Filter layers 50 and 50' are formed by alternating stacks of one or more pairs of first and second sublayers made of materials with different refractive indices. Filter layer 50', similar to filter layer 50, can selectively reflect and transmit specific incident light. The refractive indices and thicknesses of the first and second sublayers within filter layer 50 are set to allow light within a specific wavelength range to pass through, providing a filtering function. At the same time, at small incident angles, the light intensity is higher than at larger angles. The refractive index and thickness of the first and second sublayers within filter layer 50' are designed to allow light to penetrate within a specific range of incident angles. Light incident at shallow angles of incidence has a higher intensity than light incident at high angles. In one embodiment, light transmittance reaches over 90% at angles of incidence less than 10 degrees, while transmittance is less than 10% (or reflectivity reaches over 80%) at angles of incidence greater than 20 degrees. In one embodiment, the filter layer 50' includes a plurality of dielectric material pairs composed of SiO2 and TiO2 , including three groups of dielectric material stacks: a first group of dielectric material stacks is closer to the semiconductor stack 12, a second group of dielectric material stacks is farther from the semiconductor stack 12, and a third group of dielectric material stacks is located between the first and second groups of dielectric material stacks. The optical thickness of the first group of SiO2 and TiO2 dielectric material pairs is greater than the optical thickness of the third group of SiO2 and TiO2 dielectric material pairs; and the optical thickness of the second group of SiO2 and TiO2 dielectric material pairs is greater than and/or less than the optical thickness of the third group of SiO2 and TiO2 dielectric material pairs. The first set of SiO2 and TiO2 dielectric material pairs includes an integer or non-integer number of pairs, the second set of SiO2 and TiO2 dielectric material pairs includes an integer or non-integer number of pairs, and the third set of SiO2 and TiO2 dielectric material pairs includes an integer or non-integer number of pairs. The number of dielectric material pairs in the third set of dielectric material stacks is greater than the number of dielectric material pairs in the first and second sets of dielectric material stacks, respectively. By adjusting the thickness of the first and second sets of dielectric material stacks, the decrease in transmittance in certain angular ranges due to interference can be reduced. The comparative example light-emitting element structure is similar to light-emitting element 9, except that it does not include filter layer 50'. As shown in Figure 13 , compared to the comparative example, the sixth embodiment light-emitting element 9 exhibits higher light intensity at angles between 60 and 120 degrees, resulting in higher forward light. Specifically, within approximately 30 degrees from the normal to the filter surface 50e', the sixth embodiment light-emitting element 9 exhibits higher light intensity and can concentrate light in the forward direction. Furthermore, the sixth embodiment light-emitting element 9 exhibits a divergence angle of 101 degrees, which is smaller than the 139 degrees divergence angle of the comparative example light-emitting element.
如同前述實施例,於另一實施例中,第六實施例發光元件9之側面上亦可形成一調變結構(圖未示)。於一實施例中,調變結構包含一反射層,將射向發光元件側面的光反射或改變方向成為正向出光的光線。於另一實施例中,調變結構包含一光吸收層,吸收射向發光元件側面的光。於另一實施例中,調變結構包含一濾光層,其功能類似濾光層50’僅讓特定角度的光線穿透。於另一實施例中,調變結構包含一光阻擋層,阻擋光從發光元件側面摘出。 As in the previous embodiment, in another embodiment, a modulation structure (not shown) may also be formed on the side of the light-emitting element 9 of the sixth embodiment. In one embodiment, the modulation structure includes a reflective layer to reflect or redirect light directed toward the side of the light-emitting element into forward-emitting light. In another embodiment, the modulation structure includes a light-absorbing layer to absorb light directed toward the side of the light-emitting element. In another embodiment, the modulation structure includes a filter layer, which functions similarly to the filter layer 50' by only allowing light at a specific angle to pass through. In another embodiment, the modulation structure includes a light-blocking layer to prevent light from escaping from the side of the light-emitting element.
圖14為一感測模組201的示意圖。如圖14所示,感測模組201包含載板400,一發光元件封裝體6’其內封有依據本申請案任意實施例之發光元件9以及一光感測元件40位於載板400之表面,發光元件9與光感測元件40電性連接於載板400上的電路(圖未示)。發光元件封裝體6’之結構與前述發光元件封裝體6類似,在此不加以贅述。圖14的發光元件封裝體6’和發光元件9以類似發光元件3的結構以覆晶方式接合於載板400上做為一示例,然而可依據不同實施例的發光元件來選擇不同的打線方式、焊接方式或固晶方式,將發光元件9固定於載板400,並使其與載板400上的電路電性連接。光感測元件40包含光電二極體。光感測元件40與發光元件封裝體6’或發光元 件9之間更可設置一光阻擋元件80,可避免兩者之間干擾,例如避免發光元件9所發出的光線直接被光感測元件40接收。 FIG14 is a schematic diagram of a sensing module 201. As shown in FIG14 , the sensing module 201 includes a carrier 400, a light-emitting element package 6′ encapsulating a light-emitting element 9 according to any embodiment of the present application, and a light-sensing element 40 located on the surface of the carrier 400. The light-emitting element 9 and the light-sensing element 40 are electrically connected to a circuit (not shown) on the carrier 400. The structure of the light-emitting element package 6′ is similar to the light-emitting element package 6 described above and will not be described in detail here. The light-emitting element package 6′ and the light-emitting element 9 in FIG14 are flip-chip bonded to the carrier 400 in a structure similar to the light-emitting element 3 as an example. However, different wire bonding methods, soldering methods, or die bonding methods can be selected according to different embodiments of the light-emitting element to secure the light-emitting element 9 to the carrier 400 and electrically connect it to the circuit on the carrier 400. The light-sensing element 40 includes a photodiode. A light-blocking element 80 may be placed between the light-sensing element 40 and the light-emitting element package 6' or the light-emitting element 9 to prevent interference between the two, for example, preventing light emitted by the light-emitting element 9 from being directly received by the light-sensing element 40.
感測模組201應用於一生理感測裝置。例如,發光元件9所發出的光線,照射於使用者的人體,而產生一反射訊號,光感測元件40接收反射訊號,可得到一量測訊號,再經由電路的運算得到使用者的生理資訊,例如包含心跳、血氧、血壓、血糖、水分或汗液等資訊。為了量測到準確的生理資訊,發光元件9所發出的光線較佳為集中的並具有一定的光強度。依本申請案實施例的感測模組201,使用具有濾光層50’之發光元件9,由於濾光層50’可以收斂發光元件的出光角度,在不需要額外光學元件例如透鏡的輔助下,可以得到較集中的光源。此外,少了額外光學元件,也使得感測模組201具有較輕薄的體積,適合使用者配戴。 The sensing module 201 is applied to a physiological sensing device. For example, the light emitted by the light-emitting element 9 is irradiated on the user's body and generates a reflection signal. The light-sensing element 40 receives the reflection signal and obtains a measurement signal. Then, through circuit calculation, the user's physiological information is obtained, such as heart rate, blood oxygen, blood pressure, blood sugar, water content, or sweat. In order to measure accurate physiological information, the light emitted by the light-emitting element 9 is preferably concentrated and has a certain light intensity. According to the sensing module 201 of the embodiment of the present application, a light-emitting element 9 with a filter layer 50' is used. Since the filter layer 50' can converge the light output angle of the light-emitting element, a more concentrated light source can be obtained without the assistance of additional optical elements such as lenses. Furthermore, the lack of additional optical components also makes the sensing module 201 thinner and lighter, making it more suitable for users to wear.
於另一實施例中,發光元件9也可以應用於如圖10A之顯示裝置101及如圖10B之畫素PX。藉由濾光層50’收斂發光元件的出光角度,使整體顯示裝置101的複數個畫素PX中的發光元件出光角度一致,進而提高顯示裝置101畫面的均勻性。 In another embodiment, the light-emitting element 9 can also be used in the display device 101 shown in FIG10A and the pixel PX shown in FIG10B . By using the filter layer 50' to converge the light emission angle of the light-emitting element, the light emission angles of the light-emitting elements in the plurality of pixels PX of the entire display device 101 are made uniform, thereby improving the uniformity of the image on the display device 101.
惟上述實施例僅為例示性說明本申請案之原理及其功效,而非用於限制本申請案。任何本申請案所屬技術領域中具有通常知識者均可在不違背本申請案之技術原理及精神的情況下,對上述實施例進行修改及變化。舉凡依本申請案申請專利範圍所述之形狀、構造、特徵及精神所為之均等變化與修飾,均應包括於本申請案之申請專利範圍內。 The above embodiments are intended only to illustrate the principles and effects of this application and are not intended to limit this application. Anyone with ordinary skill in the art to which this application relates may modify and alter the above embodiments without departing from the technical principles and spirit of this application. All equivalent variations and modifications based on the shape, structure, features, and spirit of this application are intended to be included within the scope of this application.
3:發光元件 3: Light-emitting element
10:基板 10:Substrate
10a:第一表面 10a: First surface
10b:第二表面 10b: Second surface
12:半導體疊層 12: Semiconductor stacking
121:第一半導體層 121: First semiconductor layer
122:第二半導體層 122: Second semiconductor layer
123:活性層 123: Active layer
18:透明導電層 18:Transparent conductive layer
26:保護層 26: Protective layer
261、262:開孔 261, 262: Openings
28:反射結構 28: Reflective Structure
20’:第一電極 20’: First electrode
30’:第二電極 30’: Second electrode
50:濾光層 50: Filter layer
50e:濾光層表面 50e: Filter surface
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| CN202110870856.4A CN114068784A (en) | 2020-07-31 | 2021-07-30 | Light-emitting element and display device |
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