TWI891022B - Wiring carrier, electronic package and manufacturing method of electronic structure - Google Patents
Wiring carrier, electronic package and manufacturing method of electronic structureInfo
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Abstract
Description
本發明是有關於一種電子零件,且特別是有關於一種線路載板、電子封裝體及電子結構之製作方法。The present invention relates to an electronic component, and more particularly to a method for manufacturing a circuit carrier, an electronic package, and an electronic structure.
晶片封裝用的線路載板用於固定積體電路(IC)晶片並作為電性連接至其他電子零件的媒介。依照是否具有介電核心(dielectric core),線路載板可分成有核心(core)類型及無核心(coreless)類型。在多晶片封裝的情況下,需要大尺寸的線路載板。然而,大尺寸的線路載板於量產時存在較低的排版利用率及良率,這增加了生產成本。Circuit carriers used in chip packaging secure integrated circuit (IC) chips and serve as a medium for electrical connections to other electronic components. Circuit carriers are categorized as either cored or coreless, depending on whether they have a dielectric core. Multi-chip packaging requires large circuit carriers. However, large circuit carriers have lower layout utilization and yield rates during mass production, increasing production costs.
本發明提供一種線路載板,用以降低生產成本。The present invention provides a circuit carrier board for reducing production costs.
本發明提供一種電子封裝體,用以降低生產成本。The present invention provides an electronic package for reducing production costs.
本發明提供一種電子結構之製作方法,用以製作電子結構。The present invention provides a method for manufacturing an electronic structure, which is used to manufacture the electronic structure.
本發明的一實施例的一種線路載板適於安裝多個晶片元件。線路載板包括多個線路子板、一封膠層及一重佈線路結構。封膠層包覆這些線路子板並填滿這些線路子板之間的間隙。封膠層的一面暴露出這些線路子板的每一個的一面。重佈線路結構配置在封膠層較遠離這些線路子板的一面上並適於讓這些晶片元件安裝其上,使得這些晶片元件經由重佈線路結構電性連接這些線路子板。One embodiment of the present invention provides a circuit carrier suitable for mounting multiple chip components. The circuit carrier includes multiple circuit daughter boards, an encapsulation layer, and a redistribution wiring structure. The encapsulation layer covers the circuit daughter boards and fills the gaps between the circuit daughter boards. One side of the encapsulation layer exposes one side of each of the circuit daughter boards. The redistribution wiring structure is configured on a side of the encapsulation layer farther from the circuit daughter boards and is suitable for mounting the chip components thereon, such that the chip components are electrically connected to the circuit daughter boards via the redistribution wiring structure.
本發明的一實施例的一種電子封裝體包括多個晶片元件及一線路載板。線路載板包括多個線路子板、一封膠層及一重佈線路結構。封膠層包覆這些線路子板並填滿這些線路子板之間的間隙。封膠層的一面暴露出這些線路子板的每一個的一面。重佈線路結構配置在封膠層較遠離這些線路子板的一面上並讓這些晶片元件安裝其上,使得這些晶片元件經由重佈線路結構電性連接這些線路子板。An electronic package according to one embodiment of the present invention includes a plurality of chip components and a circuit carrier. The circuit carrier includes a plurality of circuit daughter boards, an encapsulation layer, and a redistribution wiring structure. The encapsulation layer covers the circuit daughter boards and fills the gaps between the circuit daughter boards. One side of the encapsulation layer exposes one side of each of the circuit daughter boards. The redistribution wiring structure is configured on a side of the encapsulation layer farther from the circuit daughter boards and allows the chip components to be mounted thereon, so that the chip components are electrically connected to the circuit daughter boards via the redistribution wiring structure.
本發明的一實施例的一種電子結構之製作方法包括以下步驟。將多個線路子板經由一臨時接合層固定至一臨時載具。形成一封膠層覆蓋臨時接合層及這些線路子板,其中封膠層填滿這些線路子板之間的間隙。形成一重佈線路結構在封膠層上,其中重佈線路結構電性連接這些線路子板。A method for fabricating an electronic structure according to an embodiment of the present invention includes the following steps: securing a plurality of circuit daughter boards to a temporary carrier via a temporary bonding layer; forming an encapsulation layer covering the temporary bonding layer and the circuit daughter boards, wherein the encapsulation layer fills the gaps between the circuit daughter boards; and forming a redistribution wiring structure on the encapsulation layer, wherein the redistribution wiring structure electrically connects the circuit daughter boards.
基於上述,將多個線路子板以封膠層包覆並將配置重佈線路結構在封膠層上來電性連接這些線路子板。相較於傳統用於晶片封裝的大尺寸線路載板,小尺寸的線路載板具有明顯較高的排版利用率及良率。因此,本案採用小尺寸的線路載板作為線路子板來構成大尺寸的線路載板,還可降低生產成本。Based on the above, multiple circuit daughter boards are encapsulated with a layer of encapsulant, and a redistribution wiring structure is placed on the encapsulant layer to electrically connect these circuit daughter boards. Compared to the large-scale circuit carrier boards traditionally used for chip packaging, small-sized circuit carrier boards have significantly higher layout utilization and yield. Therefore, in this case, using small-sized circuit carrier boards as circuit daughter boards to construct a large-scale circuit carrier board can also reduce production costs.
請參考圖1,在本實施例中,電子封裝體50包括多個晶片元件51及一線路載板100。這些晶片元件51例如是積體電路裸晶片或小型的晶片封裝體(例如多晶片封裝、堆疊晶片封裝、晶片尺寸封裝等)。這些晶片元件51安裝至線路載板100,例如經由導電凸塊53安裝至線路載板100。Referring to FIG. 1 , in this embodiment, an electronic package 50 includes multiple chip components 51 and a circuit carrier 100. These chip components 51 may be, for example, bare integrated circuit chips or small chip packages (e.g., multi-chip packages, stacked chip packages, chip-scale packages, etc.). These chip components 51 are mounted to the circuit carrier 100, for example, via conductive bumps 53.
在本實施例中,線路載板100包括多個線路子板110、一封膠層120及一重佈線路結構130。封膠層120包覆這些線路子板110並填滿這些線路子板110之間的間隙,即封膠層120中的這些線路子板110是彼此絕緣的。封膠層120的一面暴露出這些線路子板110的每一個的一面,以連接下一層級的電子元件(例如主機板或模組板等)。重佈線路結構130配置在封膠層120較遠離這些線路子板110的一面上並讓這些晶片元件51安裝其上,使得這些晶片元件51經由重佈線路結構130電性連接這些線路子板110。因為在封膠層120中的這些線路子板110是彼此絕緣的,而無法在封膠層120直接電性連接,因此這些線路子板110可經由重佈線路結構130彼此電性連接。此外,這些線路子板110可經由多個子板導電球140安裝至下一層級的電子元件,例如主機板或模組板。In this embodiment, circuit carrier 100 includes multiple circuit daughter boards 110, an encapsulation layer 120, and a redistribution wiring structure 130. The encapsulation layer 120 covers the circuit daughter boards 110 and fills the gaps between them, effectively isolating the circuit daughter boards 110 within the encapsulation layer 120. One side of the encapsulation layer 120 exposes one side of each circuit daughter board 110 for connection to the next-level electronic components (e.g., a motherboard or module board). The redistribution wiring structure 130 is disposed on a side of the encapsulation layer 120 that is farther from the circuit daughter boards 110. The chip components 51 are mounted thereon, allowing the chip components 51 to be electrically connected to the circuit daughter boards 110 via the redistribution wiring structure 130. Because the circuit daughter boards 110 are insulated from one another within the encapsulation layer 120 and cannot be directly electrically connected through the encapsulation layer 120, the circuit daughter boards 110 can be electrically connected to one another via the redistribution wiring structure 130. Furthermore, the circuit daughter boards 110 can be mounted to the next level of electronic components, such as a motherboard or module board, via a plurality of daughter board conductive balls 140.
在本實施例中,每個線路子板110可包括多個子板介電層112、多個子板圖案化導電層114及多個子板導電孔道116。這些子板圖案化導電層114與這些子板介電層112交替疊合。這些子板導電孔道116分別連接這些子板圖案化導電層114。此外,重佈線路結構130可包括多個重佈介電層132、多個重佈圖案化導電層134及多個重佈導電孔道136。這些重佈圖案化導電層134與這些重佈介電層132交替疊合。這些重佈導電孔道136分別連接這些重佈圖案化導電層134。在一實施例中,重佈線路結構130更包括重佈圖案化導電層134a,可以直接電性連接至少2個線路子板110,以傳遞訊號。另外,這些晶片元件51也可經由重佈線路結構130彼此電性連接,以傳遞訊號。In this embodiment, each circuit daughterboard 110 may include multiple daughterboard dielectric layers 112, multiple daughterboard patterned conductive layers 114, and multiple daughterboard conductive vias 116. The daughterboard patterned conductive layers 114 alternate with the daughterboard dielectric layers 112. The daughterboard conductive vias 116 connect the daughterboard patterned conductive layers 114, respectively. Furthermore, the redistribution wiring structure 130 may include multiple redistribution dielectric layers 132, multiple redistribution patterned conductive layers 134, and multiple redistribution conductive vias 136. The redistribution patterned conductive layers 134 alternate with the redistribution dielectric layers 132. These redistribution conductive vias 136 are connected to the redistribution patterned conductive layers 134, respectively. In one embodiment, the redistribution wiring structure 130 further includes a redistribution patterned conductive layer 134a, which can directly electrically connect at least two circuit daughter boards 110 to transmit signals. Furthermore, the chip components 51 can also be electrically connected to each other via the redistribution wiring structure 130 to transmit signals.
請參考圖2A、圖2B、圖2C,這些晶片元件51及這些線路子板110排列在重佈線路結構130的範圍內。這些線路子板110可呈矩形,其長度及寬度可以相等或不相等。這些線路子板110的矩形尺寸可存在差異。這些線路子板110可面陣列地排列或直線地排列。此外,有些晶片元件51可分別位於對應的這些線路子板110上,而有些晶片元件51可同時位於多個線路子板110上,即至少跨接兩個相鄰的線路子板110。Referring to Figures 2A, 2B, and 2C, these chip components 51 and these circuit daughter boards 110 are arranged within the scope of the redistribution wiring structure 130. These circuit daughter boards 110 can be rectangular, and their lengths and widths can be equal or unequal. The rectangular dimensions of these circuit daughter boards 110 can vary. These circuit daughter boards 110 can be arranged in a plane array or in a straight line. In addition, some chip components 51 can be located on corresponding circuit daughter boards 110, while some chip components 51 can be located on multiple circuit daughter boards 110 at the same time, that is, they can span at least two adjacent circuit daughter boards 110.
請參考圖3,相較於圖1的電子封裝體50,圖3的電子封裝體50的線路子板110a可具有小的厚度,意即這些線路子板110、110a的厚度存在差異,而圖1中的這些線路子板110的厚度不存在差異,且可為同類型的線路子板。請參考圖4,相較於圖1的電子封裝體50,圖4的電子封裝體50的線路子板110及線路子板110b可為不同類型。舉例而言,線路子板110為無核心類型的線路板,而線路子板110b可為有核心類型的線路板。換言之,在不同的實施例中,線路子板的厚度或是類型,可以依照不同的需求,進行選擇與組合。Referring to FIG3 , compared to the electronic package 50 of FIG1 , the circuit daughter board 110a of the electronic package 50 of FIG3 may have a smaller thickness, meaning that there is a difference in thickness between these circuit daughter boards 110 and 110a, whereas there is no difference in thickness between these circuit daughter boards 110 in FIG1 and they may be circuit daughter boards of the same type. Referring to FIG4 , compared to the electronic package 50 of FIG1 , the circuit daughter boards 110 and 110b of the electronic package 50 of FIG4 may be of different types. For example, the circuit daughter board 110 may be a coreless type circuit board, while the circuit daughter board 110b may be a core-equipped type circuit board. In other words, in different embodiments, the thickness or type of the circuit daughter boards may be selected and combined according to different needs.
請再參考圖1,在本實施例中,電子封裝體50還可包括一保護蓋52或其他具有散熱功能的元件,保護蓋52也可以具備散熱功能。保護蓋52安裝在重佈線路結構130上並籠罩這些晶片元件51。此外,請參考圖5,相較於圖1的實施例,圖6的電子封裝體50可包括一晶片封膠52a,且晶片封膠52a配置在重佈線路結構130上並填滿這些晶片元件51之間的間隙,在一實施例中,晶片封膠52a會暴露出這些晶片元件51的背面(非主動面)。另外,請參考圖6,相較於圖1的實施例,圖6的電子封裝體50的線路載板100可包括一線路基板150,這些線路子板110安裝在線路基板150上,例如這些線路子板110可經由多個子板導電球140安裝在線路基板150上。此外,線路基板150可經由多個基板導電球160安裝至下一層級的電子元件,例如主機板或模組板。Please refer to Figure 1 again. In this embodiment, the electronic package 50 may further include a protective cover 52 or other components with heat dissipation function. The protective cover 52 may also have a heat dissipation function. The protective cover 52 is mounted on the redistribution wiring structure 130 and covers these chip components 51. In addition, please refer to Figure 5. Compared with the embodiment of Figure 1, the electronic package 50 of Figure 6 may include a chip encapsulant 52a, and the chip encapsulant 52a is configured on the redistribution wiring structure 130 and fills the gaps between these chip components 51. In one embodiment, the chip encapsulant 52a exposes the back side (non-active side) of these chip components 51. 6 , compared to the embodiment of FIG. 1 , the circuit carrier 100 of the electronic package 50 of FIG. 6 may include a circuit substrate 150. The circuit daughter boards 110 are mounted on the circuit substrate 150. For example, the circuit daughter boards 110 may be mounted on the circuit substrate 150 via a plurality of daughter board conductive balls 140. Furthermore, the circuit substrate 150 may be mounted to a next-level electronic component, such as a motherboard or module board, via a plurality of substrate conductive balls 160.
下文將參考圖7A至圖7F來說明本發明的另一實施例的一種電子結構之製作方法。7A to 7F are used to illustrate a method for manufacturing an electronic structure according to another embodiment of the present invention.
請參考圖7A,將多個線路子板110經由一臨時接合層202固定至一臨時載具204。在本實施例中,線路子板110上具有多個導電墊P。在一實施例中,導電墊P的材料為銅,其包含底部的銅接墊和上面的銅柱。7A , a plurality of circuit daughter boards 110 are fixed to a temporary carrier 204 via a temporary bonding layer 202. In this embodiment, the circuit daughter board 110 has a plurality of conductive pads P. In one embodiment, the conductive pads P are made of copper and include a copper pad at the bottom and a copper column at the top.
請參考圖7B,形成一封膠層120覆蓋臨時接合層202及這些線路子板110。封膠層120填滿這些線路子板110之間的間隙,換言之,封膠層120中的這些線路子板110是彼此絕緣的,而無法在封膠層120直接電性連接。在本實施例中,封膠層120也覆蓋這些導電墊P。Referring to FIG. 7B , an encapsulation layer 120 is formed to cover the temporary bonding layer 202 and the circuit daughter boards 110. The encapsulation layer 120 fills the gaps between the circuit daughter boards 110. In other words, the circuit daughter boards 110 in the encapsulation layer 120 are insulated from each other and cannot be directly electrically connected at the encapsulation layer 120. In this embodiment, the encapsulation layer 120 also covers the conductive pads P.
請參考圖7C,移除封膠層120的一部分,以暴露出這些導電墊P的每一個的一部分,例如是暴露出導電墊P的頂面。此步驟可以平坦化電子結構的表面,以利後續步驟進行。7C , a portion of the encapsulant layer 120 is removed to expose a portion of each of the conductive pads P, such as the top surface of the conductive pads P. This step can flatten the surface of the electronic structure to facilitate subsequent steps.
請參考圖7D,形成一重佈線路結構130在封膠層120上,其中重佈線路結構130電性連接這些線路子板110。在本實施例中,從這些導電墊P的頂面製作重佈線路結構130的多個重佈導電孔道136和重佈圖案化導電層134,以與這些線路子板110電性連接。在一實施例中,重佈線路結構130更包括重佈圖案化導電層134a,可以直接電性連接至少2個線路子板110。此外,在重佈線路結構130的重佈圖案化導電層134上可以形成預接墊53a,之後可用於連接其他元件。在另一未繪示的實施例中,可移除臨時接合層202及臨時載具204,以形成圖8的線路載板100。接著,更可將這些線路子板110安裝在圖6的線路基板150上,以形成圖9的線路載板100。Referring to FIG. 7D , a redistribution wiring structure 130 is formed on the encapsulant layer 120 , where the redistribution wiring structure 130 electrically connects to the circuit daughter boards 110 . In this embodiment, a plurality of redistribution conductive vias 136 and a redistribution patterned conductive layer 134 are formed on the top surface of the conductive pads P to electrically connect to the circuit daughter boards 110 . In one embodiment, the redistribution wiring structure 130 further includes a redistribution patterned conductive layer 134a that can directly electrically connect to at least two circuit daughter boards 110 . Furthermore, pre-bonding pads 53a can be formed on the redistribution patterned conductive layer 134 of the redistribution wiring structure 130 , which can later be used to connect to other components. In another embodiment (not shown), the temporary bonding layer 202 and the temporary carrier 204 may be removed to form the circuit carrier 100 of Figure 8. Subsequently, the circuit daughter boards 110 may be mounted on the circuit substrate 150 of Figure 6 to form the circuit carrier 100 of Figure 9.
請參考圖7E,安裝多個晶片元件51在重佈線路結構130上,使得這些晶片元件51經由重佈線路結構130電性連接這些線路子板110。此外,這些晶片元件51也可經由重佈線路結構130彼此電性連接。在本實施例中,這些晶片元件51可經由多個導電凸塊53連接至重佈線路結構130的預接墊53a上。在另一未繪示的實施例中,可安裝如圖1的一保護蓋52在圖7E的重佈線路結構130上並籠罩這些晶片元件51。在另一未繪示的實施例中,可形成如圖5的晶片封膠52a在圖7E的重佈線路結構130上並包覆這些晶片元件51,並暴露出這些晶片元件51的背面。Referring to FIG7E , a plurality of chip components 51 are mounted on the redistribution wiring structure 130 so that the chip components 51 are electrically connected to the circuit daughter boards 110 via the redistribution wiring structure 130. Furthermore, the chip components 51 can also be electrically connected to each other via the redistribution wiring structure 130. In this embodiment, the chip components 51 can be connected to the pre-bonded pads 53a of the redistribution wiring structure 130 via a plurality of conductive bumps 53. In another embodiment not shown, a protective cover 52 as shown in FIG1 can be mounted on the redistribution wiring structure 130 of FIG7E to cover the chip components 51. In another embodiment (not shown), a chip encapsulant 52a as shown in FIG. 5 may be formed on the redistribution wiring structure 130 in FIG. 7E to cover the chip components 51 and expose the back surfaces of the chip components 51.
請參考圖7F,移除圖7E的臨時接合層202及臨時載具204,以暴露出這些線路子板110。在另一未繪示的實施例中,可將這些線路子板110安裝在圖6的線路基板150上。7F , the temporary bonding layer 202 and the temporary carrier 204 of FIG. 7E are removed to expose the circuit daughter boards 110. In another embodiment (not shown), the circuit daughter boards 110 may be mounted on the circuit substrate 150 of FIG. 6 .
綜上所述,將多個線路子板以封膠層包覆並將配置重佈線路結構在封膠層上來電性連接這些線路子板。相較於傳統用於晶片封裝的大尺寸線路載板良率較低,小尺寸的線路載板具有明顯較高的排版利用率及良率。因此,本案採用小尺寸的線路載板作為線路子板來構成大尺寸的線路載板,這可降低生產成本。In summary, multiple circuit daughter boards are encapsulated with a layer of encapsulant, and a redistribution wiring structure is placed on the encapsulant to electrically connect these circuit daughter boards. Compared to the low yield of large-scale circuit carrier boards traditionally used for chip packaging, small-scale circuit carrier boards have significantly higher layout utilization and yield. Therefore, in this case, small-scale circuit carrier boards are used as circuit daughter boards to construct a large-scale circuit carrier board, which can reduce production costs.
50:電子封裝體 51:晶片元件 52:保護蓋 52a:晶片封膠 53:導電凸塊 53a:預接墊 100:線路載板 110、110a、110b:線路子板 112:子板介電層 114:子板圖案化導電層 116:子板導電孔道 120:封膠層 130:重佈線路結構 132:重佈介電層 134、134a:重佈圖案化導電層 136:重佈導電孔道 140:子板導電球 150:線路基板 160:基板導電球 202:臨時接合層 204:臨時載具 P:導電墊 50: Electronic package 51: Chip component 52: Protective cover 52a: Chip encapsulation 53: Conductive bumps 53a: Pre-pads 100: Circuit carrier 110, 110a, 110b: Circuit daughterboard 112: Daughterboard dielectric layer 114: Daughterboard patterned conductive layer 116: Daughterboard conductive vias 120: Encapsulation layer 130: Relay wiring structure 132: Relay dielectric layer 134, 134a: Relay patterned conductive layer 136: Relay conductive vias 140: Daughterboard conductive balls 150: Circuit substrate 160: Substrate conductive balls 202: Temporary bonding layer 204: Temporary carrier P: Conductive pad
圖1是依照本發明的一實施例的一種電子封裝體的剖面示意圖。 圖2A是圖1的電子封裝體的晶片元件、線路子板和重佈線路結構的一種排列的俯視示意圖。 圖2B是圖1的電子封裝體的晶片元件、線路子板和重佈線路結構的另一種排列的俯視示意圖。 圖2C是圖1的電子封裝體的晶片元件、線路子板和重佈線路結構的又一種排列的俯視示意圖。 圖3是依照本發明的另一實施例的一種電子封裝體的剖面示意圖。 圖4是依照本發明的另一實施例的一種電子封裝體的剖面示意圖。 圖5是依照本發明的另一實施例的一種電子封裝體的剖面示意圖。 圖6是依照本發明的另一實施例的一種電子封裝體的剖面示意圖。 圖7A至圖7F繪示本發明的另一實施例的一種電子結構之製作方法。 圖8是依照本發明的另一實施例的一種線路載板的剖面示意圖。 圖9是依照本發明的另一實施例的一種線路載板的剖面示意圖。 Figure 1 is a schematic cross-sectional view of an electronic package according to an embodiment of the present invention. Figure 2A is a schematic top view of one arrangement of a chip component, a circuit daughterboard, and a redistribution wiring structure of the electronic package of Figure 1. Figure 2B is a schematic top view of another arrangement of a chip component, a circuit daughterboard, and a redistribution wiring structure of the electronic package of Figure 1. Figure 2C is a schematic top view of yet another arrangement of a chip component, a circuit daughterboard, and a redistribution wiring structure of the electronic package of Figure 1. Figure 3 is a schematic cross-sectional view of an electronic package according to another embodiment of the present invention. Figure 4 is a schematic cross-sectional view of an electronic package according to another embodiment of the present invention. Figure 5 is a schematic cross-sectional view of an electronic package according to another embodiment of the present invention. Figure 6 is a schematic cross-sectional view of an electronic package according to another embodiment of the present invention. Figures 7A to 7F illustrate a method for fabricating an electronic structure according to another embodiment of the present invention. Figure 8 is a schematic cross-sectional view of a circuit carrier according to another embodiment of the present invention. Figure 9 is a schematic cross-sectional view of a circuit carrier according to another embodiment of the present invention.
50:電子封裝體 50: Electronic package
51:晶片元件 51: Chip components
52:保護蓋 52: Protective cover
53:導電凸塊 53: Conductive bumps
100:線路載板 100: Line carrier board
110:線路子板 110: Circuit board
112:子板介電層 112: Sub-board dielectric layer
114:子板圖案化導電層 114: Daughterboard patterned conductive layer
116:子板導電孔道 116: Conductive vias on daughterboard
120:封膠層 120: Sealant layer
130:重佈線路結構 130: Re-routing wiring structure
132:重佈介電層 132:Redistribution of dielectric layer
134、134a:重佈圖案化導電層 134, 134a: Re-patterned conductive layer
136:重佈導電孔道 136: Re-arrange the conductive vias
140:子板導電球 140: Sub-board conductive ball
Claims (32)
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| TW112126084A TWI891022B (en) | 2023-07-12 | 2023-07-12 | Wiring carrier, electronic package and manufacturing method of electronic structure |
| CN202322045565.9U CN220474621U (en) | 2023-07-12 | 2023-08-01 | Circuit carrier boards and electronic packages |
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| US20200105544A1 (en) * | 2018-09-28 | 2020-04-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fan-Out Packages And Methods Of Forming The Same |
| US20200312783A1 (en) * | 2019-04-01 | 2020-10-01 | Samsung Electronics Co., Ltd. | Semiconductor package |
| US20220077130A1 (en) * | 2020-09-10 | 2022-03-10 | Samsung Electronics Co., Ltd. | Semiconductor package |
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| US20200105544A1 (en) * | 2018-09-28 | 2020-04-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fan-Out Packages And Methods Of Forming The Same |
| US20200312783A1 (en) * | 2019-04-01 | 2020-10-01 | Samsung Electronics Co., Ltd. | Semiconductor package |
| US20220077130A1 (en) * | 2020-09-10 | 2022-03-10 | Samsung Electronics Co., Ltd. | Semiconductor package |
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