TWI888991B - Array objective lens module calibration equipment and calibration method thereof - Google Patents

Abstract

An array lens module calibration equipment includes a carrying platform, a visual positioning module, a laser alignment module, a depth of field measurement module and a coplanarity adjustment module is provided. The array lens module has an optical axis and includes a substrate, a plurality of lens frames and a plurality of lens groups. The visual positioning module is adapted to provide a visual positioning light beam to the array lens module and capture the appearance of the array lens module to obtain appearance information. The laser alignment module is adapted to provide a calibration laser beam to image after passing through the array lens module to obtain alignment information through reflection imaging. The depth of field measurement module is adapted to capture depth-of-field images of the plurality of lens groups to obtain depth of field information of the plurality of lens groups. The coplanarity adjustment module is adapted to adjust the relative positions between the plurality of lens frames and the substrate in the optical axis direction parallel to the optical axis based on the appearance information, the alignment information and the depth of field information.

Description

Array lens module calibration device and calibration method thereof

The present invention relates to an optical calibration device, and in particular to an array lens module calibration device and a calibration method thereof.

In the future market demand, with the widespread application of advanced packaged chips, high computing power components are gradually becoming the mainstream of the market. If the inspection area of a single chip is large, it is impossible to use multiple devices for synchronous inspection acceleration. Therefore, providing fast and accurate 3D appearance inspection is one of the main goals of the development of this field.

At present, white light interferometry can be used to achieve nano-level precision detection, but the speed of traditional white light interferometry detection will be limited. In the solution using multi-lens detection, multiple additional components are also required for scanning, so it is not in line with the equipment construction cost. In addition, the use of a multi-lens architecture must ensure that the coplanarity of each component is consistent in order to meet the white light coherence length specification of less than or equal to 10 microns, thereby achieving simultaneous scanning. However, the lens is limited by the insufficient processing accuracy of the existing optical clamping mechanism, resulting in a coplanarity far greater than 10 microns, so simultaneous scanning cannot be achieved, and it is difficult to expand the field of view in an array. In other words, in the current development, the detection speed has encountered a bottleneck and cannot be used for online detection.

The present invention provides an array lens module calibration device and a calibration method thereof, which can adjust the coplanarity of multiple lens groups in the array lens module.

The present invention provides an array lens module calibration device, including a supporting platform, a visual positioning module, a laser alignment module, a depth of field measurement module and a coplanarity adjustment module. The supporting platform is used to support the array lens module. The array lens module has an optical axis, and includes a substrate, a plurality of lens frames arranged on the substrate, and a plurality of lens groups respectively arranged in the plurality of lens frames. The visual positioning module is used to provide a visual positioning beam to the array lens module, and to capture the appearance of the array lens module to obtain appearance information. The laser alignment module is used to provide a calibration laser beam to pass through the calibration through hole of the array lens module and the plurality of lens groups to form an image to obtain alignment information. The depth-of-field measurement module is used to perform depth-of-field imaging on a plurality of lens groups to obtain depth-of-field information of the plurality of lens groups. The coplanarity adjustment module is used to adjust the relative positions of the plurality of lens frames and the substrate in the direction of the optical axis parallel to the optical axis according to the appearance information, the alignment information and the depth-of-field information.

In one embodiment of the present invention, the above-mentioned supporting platform includes a clamp, and the clamp is used to clamp and fix the array lens module.

In one embodiment of the present invention, the visual positioning module comprises a coaxial light source, a telecentric lens and a visual positioning receiving element. The coaxial light source provides a visual positioning beam. The telecentric lens is disposed between the visual positioning receiving element and the array lens module. The visual positioning receiving element is used to receive the visual positioning beam from the array lens module.

In one embodiment of the present invention, the calibration laser beam is an off-axis laser beam.

In one embodiment of the present invention, the laser alignment module includes an off-axis laser light source and a laser alignment receiving element. The calibration laser beam is an off-axis laser beam. The off-axis laser light source is used to provide the calibration laser beam to pass through the calibration through hole and multiple lens groups. The laser alignment receiving element is used to receive the calibration laser beam from the array lens module.

In one embodiment of the present invention, the calibration through holes are located at the symmetrical centers of the plurality of lens frames.

In one embodiment of the present invention, the depth measurement module includes an array light source and a depth measurement imaging element. The array light source is used to provide a depth measurement beam to be transmitted to multiple lens groups of the array lens module. The depth measurement imaging element is used to receive the depth measurement beam from the array lens module to capture an image of the array lens module.

In an embodiment of the present invention, the coplanarity adjustment module includes at least one robot arm for adjusting a plurality of lens frames of the array lens module according to appearance information, alignment information and depth of field information.

In one embodiment of the present invention, the relative positions of the lens frames and the substrate are changed according to the rotation angles of the lens frames.

The present invention also provides a calibration method for an array lens module calibration device, including the steps of providing an array lens module calibration device, wherein the array lens module calibration device includes a supporting platform, a visual positioning module, a laser alignment module, a depth of field measurement module, and a coplanarity adjustment module; providing an array lens module to the supporting platform, wherein the array lens module includes a substrate, a plurality of lens frames disposed on the substrate, and a plurality of lens groups respectively disposed in the plurality of lens frames; providing a colloid between the substrate and the plurality of lens frames; providing a visual positioning module; and providing a colloid between the substrate and the plurality of lens frames. The invention relates to a method for producing a laser beam to an array lens module and capturing an appearance of the array lens module to obtain appearance information; a method for providing a calibration laser beam to pass through a calibration through hole of the array lens module and multiple lens groups to form an image to obtain alignment information; a method for capturing depth of field of multiple lens groups to obtain depth of field information; a method for adjusting the relative positions of multiple lens frames and a substrate in an optical axis direction parallel to the optical axis according to the appearance information, alignment information and depth of field information; and a method for curing a colloid to fix the positions of the multiple lens frames on the substrate.

In one embodiment of the present invention, the above-mentioned visual positioning module includes a coaxial light source, a telecentric lens and a visual positioning receiving element, and the method of providing a visual positioning beam to an array lens module to obtain appearance information includes: a step of providing a visual positioning beam to the array lens module with a coaxial light source; and a step of receiving the visual positioning beam from the array lens module with a visual positioning receiving element to obtain appearance information.

In one embodiment of the present invention, the above-mentioned laser alignment module includes an off-axis laser light source and a laser alignment receiving element, and a method for providing a calibration laser beam to an array lens module to obtain alignment information includes: a step of using an off-axis laser light source to provide a calibration laser beam to pass through a calibration through hole of the array lens module, wherein the calibration through hole is located at the symmetrical center of a plurality of lens frames; and a step of using a laser alignment receiving element to receive the calibration laser beam from the array lens module.

In one embodiment of the present invention, the above-mentioned depth of field measurement module includes an array light source and a depth of field measurement imaging element, and a method for providing a depth of field measurement beam to an array lens module to obtain depth of field information includes: a step of providing a depth of field measurement beam through multiple lens groups of the array lens module by the array light source; and a step of receiving the depth of field measurement beam from the array lens module by the depth of field measurement imaging element to capture an image of the array lens module.

In one embodiment of the present invention, the above-mentioned coplanarity adjustment module includes at least one robot arm, and the method of adjusting the relative positions of multiple lens frames and the substrate in the optical axis direction according to appearance information, alignment information and depth of field information includes: adjusting the relative rotation angle of each lens frame and the substrate according to the appearance information, alignment information and depth of field information.

In one embodiment of the present invention, the calibration method of the above-mentioned array lens module calibration device also includes: repeatedly providing a calibration laser beam to the array lens module to update the alignment information; repeatedly providing a depth of field measurement beam to the array lens module to obtain the depth of field information; and adjusting the relative positions of multiple lens frames and the substrate in the optical axis direction according to the updated alignment information and depth of field information.

Based on the above, in the array lens module calibration device and the calibration method thereof of the present invention, the array lens module calibration device includes a supporting platform, a visual positioning module, a laser alignment module, a depth of field measurement module and a coplanarity adjustment module. Among them, the visual positioning module provides a visual positioning beam to the array lens module to obtain appearance information, the laser alignment module provides a calibration laser beam to the array lens module to obtain alignment information, and the depth of field measurement module provides a depth of field measurement beam to the array lens module to obtain depth of field information. In this way, the positions of different structures on the array lens module, the positions of the light spots reflected by the calibration laser beam, and the depth of field range of each lens group in the array lens module can be obtained through appearance information, alignment information, and depth of field information, and then the array lens module can be optically calibrated to adjust the relative positions of multiple lens groups in the array lens module and the substrate in the optical axis direction to improve the coplanarity of multiple lens groups in the array lens module.

In order to make the above features and advantages of the present invention more clearly understood, embodiments are specifically cited below and described in detail with reference to the accompanying drawings.

FIG1 is a schematic diagram of an array lens module calibration device of an embodiment of the present invention. This embodiment provides an array lens module calibration device 200, including a support platform 210, a visual positioning module 220, a laser alignment module 230, a depth of field measurement module 240, and a coplanarity adjustment module 250. The array lens module calibration device 200 is used to calibrate the array lens module 100 so that the array lens module 100 can be applied to an optical interference microscope system, such as a white light interference microscope, which uses the principle of optical interference to display the surface or internal structure of the component to be measured, and can be applied to fast and accurate 3D stereo measurement.

The supporting platform 210 is used to support the array lens module 100. In this embodiment, the supporting platform 210 includes a clamp 212 for clamping and fixing the array lens module 100.

FIG2 is a top view schematic diagram of an array lens module of an embodiment of the present invention. FIG3 is a cross-sectional schematic diagram of the array lens module of FIG2 along line A-A'. Please refer to FIG2 and FIG3. In this embodiment, the array lens module 100 has an optical axis and includes a substrate 110, a plurality of lens frames 120 disposed on the substrate 110, and a plurality of lens assemblies 130 respectively disposed in the plurality of lens frames 120. For example, the substrate 110 includes a plurality of accommodating through holes 112 and a calibration through hole 114, and the calibration through hole 114 is located at the symmetrical center of the plurality of lens frames 120. A plurality of lens frames 120 are respectively disposed in a plurality of accommodating through holes 112, and each lens frame 120 includes at least one adjustment hole 122, which is respectively located around a plurality of lens groups 130. A plurality of lens groups 130 are respectively disposed in a plurality of lens frames 120, and each lens group 130 includes at least one lens 132. Each accommodating through hole 112 includes an internal thread structure B1, and each lens frame 120 includes an external thread structure B2, and the internal thread structure B1 and the external thread structure B2 are adapted to each other.

Please continue to refer to Figure 1. The visual positioning module 220 is used to provide a visual positioning beam L1 to the array lens module 100, and to capture an image of the array lens module 100 to obtain appearance information. In this embodiment, the appearance information includes, for example, the positions of structures such as each lens frame 120, adjustment holes 122, and calibration through holes 114 of the array lens module 100. In detail, the visual positioning module 220 includes a coaxial light source 222, a telecentric lens 224, and a visual positioning receiving element 226. The coaxial light source 222 is used to provide a visual positioning beam L1 to the array lens module 100. The telecentric lens 224 is disposed between the visual positioning receiving element 226 and the array lens module 100. When the visual positioning module 220 captures the array lens module 100, the visual positioning receiving element 226 is used to receive the visual positioning beam L1 from the array lens module 100 to obtain appearance information, and thereby adjust the imaging of different lens groups 130 on the imaging surface to converge into one point. In this way, the location of the structure of the array lens module 100 can be obtained by the visual positioning module 220, so that other components can accurately calibrate the lens groups 130 of the array lens module 100 respectively.

The laser alignment module 230 is used to provide a calibration laser beam L2 to pass through the calibration through hole 114 of the array lens module 100 and multiple lens groups 130 to form an image, so as to obtain alignment information. In this embodiment, the alignment information is, for example, the spot position of the calibration laser beam L2 after passing through the array lens module 100. In detail, the laser alignment module 230 includes an off-axis laser light source 232 and a laser alignment receiving element 234, and a reflective plane (not shown) is configured on one side of the array lens module 100 away from the laser alignment module 230, for example, to reflect the light beam back to the laser alignment module 230 for imaging, but the present invention is not limited thereto. The reflective plane is, for example, a reflective structure inside each lens assembly 130 or an additional reflective element disposed externally, and the present invention is not limited thereto. The off-axis laser light source 232 is used to provide a calibration laser beam L2 to pass through the calibration through hole 114 and multiple lens assemblies 130 of the array lens module 100. The calibration laser beam L2 is a parallel beam parallel to the optical axis, and the calibration laser beam L2 is an off-axis laser beam. After the calibration laser beam L2 is transmitted downward through the calibration through hole 114 and multiple lens assemblies 130, it will be reflected by the reflective plane and transmitted upward, and the laser alignment receiving element 234 is used to receive the calibration laser beam L2 from the array lens module 100 for imaging, thereby obtaining alignment information. Since the calibration through hole 114 is located at the symmetrical center of the plurality of lens frames 120, the imaging position of the calibration laser beam L2 passing through the calibration through hole 114 and reflected by the reflection plane at the laser alignment receiving element 234 can be defined as the zero point. By calculating the distance between the zero point position and the imaging position of the calibration laser beam L2 passing through different lens assemblies 130 and reflected by the reflection plane at the laser alignment receiving element 234, the focal point position of each lens assembly 130 can be calculated. In this way, the laser alignment module 230 can provide the calibration laser beam L2 through the array lens module 100 and the reflected light spot position distance, so as to perform optical calibration on the array lens module 100. For example, each lens group 130 is adjusted so that the images of the calibration laser beam L2 reflected by different lens groups 130 and the calibration through hole 114 overlap into one point to complete the calibration, so as to improve the coplanarity of multiple lens groups 130 in the array lens module 100.

The depth-of-field measurement module 240 is used to perform depth-of-field imaging on a plurality of lens groups 130 to obtain depth-of-field information. In the present embodiment, the depth-of-field information is, for example, the depth-of-field range of each lens group 130 in the array lens module 100. In detail, the depth-of-field measurement module 240 includes an array light source 242 and a depth-of-field measurement imaging element (not shown). The array light source 242 is used to provide a depth-of-field measurement beam L3 to be transmitted through the plurality of lens groups 130 in the array lens module 100. The depth-of-field measurement imaging element is used to receive the depth-of-field measurement beam L3 from the array lens module 100, and thereby obtain the depth-of-field information of each lens group 130 in the array lens module 100. For example, a reference optical element with a specific pattern can be configured in each lens group 130, so that the specific pattern is displayed when the depth measurement imaging element of the depth measurement module 240 captures an image of each lens group 130, and the depth position is determined by the clarity of the pattern. In this way, the depth measurement beam L3 provided by the depth measurement module 240 can be used to measure the depth range of each lens group 130 in the array lens module 100, and the array lens module 100 can be optically calibrated to keep the clarity of each lens group 130 consistent, so as to improve the coplanarity of multiple lens groups 130 in the array lens module 100. However, the reference optical component with the specific pattern may also be independently disposed outside the lens group 130. In this configuration, the depth measurement imaging element of the depth measurement module 240 may also display the specific pattern when capturing images of each lens group 130 to determine the depth position. Therefore, the reference optical component with the specific pattern is not limited to being disposed inside the lens group.

The coplanarity adjustment module 250 is used to adjust the relative positions of the plurality of lens frames 120 and the substrate 110 in the optical axis direction D according to the appearance information, the alignment information and the depth of field information. In the present embodiment, the coplanarity adjustment module 250 includes at least one robot arm 252 for adjusting the plurality of lens frames 120 of the array lens module 100. Specifically, in the present embodiment, the robot arm 252 can adjust the adjustment hole 122 according to the appearance information, and then adjust the relative rotation angle of each lens frame 120 in the array lens module 100 by adapting the internal thread structure B1 and the external thread structure B2 to each other to change the position in the substrate 110 along the optical axis direction D parallel to the optical axis. In other words, the relative position of each lens frame 120 and the substrate 110 changes according to the rotation angle of the plurality of lens frames 120. It is worth mentioning that the aforementioned alignment information and depth of field information will change due to the adjustment of the coplanarity adjustment module 250, so the alignment information and depth of field information can be repeatedly obtained according to different requirements to repeatedly adjust the array lens module 100 through the coplanarity adjustment module 250. In this way, it can be ensured that the coplanarity of the plurality of lens groups 130 in the array lens module 100 meets the requirements. According to the design of this embodiment, the maximum distance difference of the focal planes of the plurality of lens assemblies 130 can be calibrated by the array lens module calibration device 200 to a precision less than or equal to 3 microns, which has better coplanarity and good optical effect compared to the traditional technology.

FIG4 is a flow chart of the steps of the calibration method of the array lens module calibration device of an embodiment of the present invention. Please refer to FIG1, FIG3 and FIG4. This embodiment provides a calibration method of the array lens module calibration device 200, which can be applied to at least the array lens module calibration device 200 and the array lens module 100 of FIG1 and FIG2, so the following description takes this as an example. In this embodiment, first, step S300 is executed to provide the array lens module calibration device 200. The array lens module calibration device 200 includes a supporting platform 210, a visual positioning module 220, a laser alignment module 230, a depth of field measurement module 240, and a coplanarity adjustment module 250. Then, step S301 is performed to provide the array lens module 100 to the supporting platform 210. The array lens module 100 has an optical axis and includes a substrate 110, a plurality of lens frames 120 disposed on the substrate 110, and a plurality of lens assemblies 130 respectively disposed in the plurality of lens frames 120.

Next, step S302 is performed to provide glue between the substrate 110 and the plurality of lens frames 120. The glue is, for example, a light-curing glue. After the glue is provided, the plurality of lens frames 120 can still be rotationally calibrated on the substrate 110.

Next, step S303 is executed to provide a visual positioning beam L1 to the array lens module 100, and to capture the appearance of the array lens module 100 to obtain appearance information. Specifically, the visual positioning module 220 includes a coaxial light source 222, a telecentric lens 224, and a visual positioning receiving element 226. The coaxial light source 222 is used to provide a visual positioning beam L1 to the array lens module 100. The telecentric lens 224 is disposed between the visual positioning receiving element 226 and the array lens module 100. The visual positioning receiving element 226 is used to receive the visual positioning beam L1 from the array lens module 100 to obtain appearance information.

Then, step S304 is executed to provide a calibration laser beam L2 to pass through the calibration through hole 114 of the array lens module 100 and the plurality of lens groups 130 to form an image, so as to obtain alignment information. Specifically, the laser alignment module 230 includes an off-axis laser light source 232 and a laser alignment receiving element 234. The off-axis laser light source 232 is used to provide a calibration laser beam L2 to pass through the calibration through hole 114 of the array lens module 100 and the plurality of lens groups 130, and the calibration laser beam L2 is an off-axis laser beam. After the calibration laser beam L2 passes through the calibration through hole 114 and the plurality of lens assemblies 130, it can be designed to be reflected by the reflection plane to the laser alignment receiving element 234. The laser alignment receiving element 234 is used to receive the calibration laser beam L2 from the array lens module 100 for imaging, thereby obtaining alignment information.

Next, step S305 is executed to perform depth-of-field imaging on the plurality of lens groups 130 to obtain depth-of-field information. Specifically, the depth-of-field measurement module 240 includes an array light source 242 and a depth-of-field measurement imaging element (not shown). The array light source 242 is used to provide a depth-of-field measurement beam L3 to be transmitted through the plurality of lens groups 130 of the array lens module 100. The depth-of-field measurement imaging element is used to receive the depth-of-field measurement beam L3 from the array lens module 100, and thereby obtain the depth-of-field information of each lens group 130 in the array lens module 100.

Next, step S306 is performed to adjust the relative positions of the plurality of lens frames 120 and the substrate 110 in the optical axis direction D parallel to the optical axis according to the appearance information, the alignment information and the depth of field information. Specifically, the robot arm 252 in the coplanarity adjustment module 250 is used to adjust the adjustment hole 122 according to the appearance information, the alignment information and the depth of field information, and the rotation angle of each lens frame 120 in the array lens module 100 is adjusted by the internal thread structure B1 and the external thread structure B2 being adapted to each other, thereby changing the position of each lens frame 120 in the substrate 110 along the optical axis direction D, so as to complete the calibration of the array lens module 100.

Finally, step S307 is performed to cure the glue to fix the positions of the multiple lens frames 120 on the substrate 110, so as to fix the positions of the multiple lens groups 130 in the array lens module 100. In this way, it is ensured that the coplanarity of the multiple lens groups 130 in the array lens module 100 meets the requirements, so that the maximum distance difference of the focal planes of the multiple lens groups 130 respectively reaches an accuracy of less than or equal to 3 microns.

It is worth mentioning that in the above steps, some steps can be further repeated to improve the calibration accuracy. For example, in this embodiment, the calibration laser beam L2 is repeatedly provided to the array lens module 100 to update the alignment information, and the depth of field measurement beam L3 is repeatedly provided to the array lens module 100 to obtain the depth of field information. Finally, the relative positions of the plurality of lens frames 120 and the substrate 110 in the optical axis direction D are adjusted according to the updated alignment information and depth of field information.

In summary, in the array lens module calibration device and the calibration method thereof of the present invention, the array lens module calibration device includes a supporting platform, a visual positioning module, a laser alignment module, a depth of field measurement module and a coplanarity adjustment module. Among them, the visual positioning module provides a visual positioning beam to the array lens module to obtain appearance information, the laser alignment module provides a calibration laser beam to the array lens module to obtain alignment information, and the depth of field measurement module provides a depth of field measurement beam to the array lens module to obtain depth of field information. In this way, the positions of different structures on the array lens module, the positions of the light spots reflected by the calibration laser beam, and the depth of field range of each lens group in the array lens module can be obtained through appearance information, alignment information, and depth of field information, and then the array lens module can be optically calibrated to adjust the relative positions of multiple lens groups in the array lens module and the substrate in the optical axis direction to improve the coplanarity of multiple lens groups in the array lens module.

Although the present invention has been disclosed as above by the embodiments, they are not intended to limit the present invention. Any person with ordinary knowledge in the relevant technical field can make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be defined by the scope of the attached patent application.

100: Array lens module 110: Substrate 112: Accommodation through hole 114: Calibration through hole 120: Lens frame 122: Adjustment hole 130: Lens assembly 132: Lens 200: Array lens module calibration equipment 210: Carrying platform 212: Clamp 220: Visual positioning module 222: Coaxial light source 224: Telecentric lens 226: Visual positioning receiving element 230: Laser alignment module 232: Off-axis laser light source 234: Laser alignment receiving element 240: Depth of field measurement module 242: Array light source 250: Coplanarity adjustment module 252: Robotic arm B1: Internal thread structure B2: External thread structure D: Optical axis direction L1: Visual positioning beam L2: Calibration laser beam L3: Depth of field measurement beam

FIG1 is a schematic diagram of an array lens module calibration device of an embodiment of the present invention. FIG2 is a schematic diagram of an array lens module of an embodiment of the present invention from above. FIG3 is a schematic diagram of a cross section of the array lens module of FIG2 along line A-A’. FIG4 is a flow chart of the steps of a calibration method of an array lens module calibration device of an embodiment of the present invention.

100: Array lens module

200: Array lens module calibration equipment

210: Loading platform

212: Clamp

220: Visual positioning module

222: Coaxial light source

224: Telecentric lens

226: Visual positioning receiving element

230: Laser alignment module

232: Off-axis laser light source

234: Laser alignment receiving element

240: Depth of field measurement module

242: Array light source

250: Coplanarity adjustment module

252:Robotic Arm

L1: Visual positioning beam

L2: Calibration laser beam

L3: Depth of field measurement beam

Claims (15)

An array lens module calibration device includes: A supporting platform for supporting an array lens module, wherein the array lens module has an optical axis and includes a substrate, a plurality of lens frames disposed on the substrate, and a plurality of lens groups respectively disposed in the plurality of lens frames; A visual positioning module for providing a visual positioning beam to the array lens module and capturing an image of the appearance of the array lens module to obtain appearance information; A laser alignment module for providing a calibration laser beam to pass through the calibration through hole of the array lens module and the plurality of lens groups to form an image to obtain alignment information; A depth-of-field measurement module for performing depth-of-field imaging on the plurality of lens groups to obtain depth-of-field information of the plurality of lens groups; and a coplanarity adjustment module for adjusting the relative positions of the plurality of lens frames and the substrate in the direction of the optical axis parallel to the optical axis according to the appearance information, the alignment information and the depth-of-field information. An array lens module calibration device as described in claim 1, wherein the supporting platform includes a clamp, and the clamp is used to clamp and fix the array lens module. An array lens module calibration device as described in claim 1, wherein the visual positioning module includes a coaxial light source, a telecentric lens and a visual positioning receiving element, the coaxial light source provides the visual positioning light beam, the telecentric lens is arranged between the visual positioning receiving element and the array lens module, and the visual positioning receiving element is used to receive the visual positioning light beam from the array lens module. An array lens module calibration device as described in claim 1, wherein the calibration laser beam is a parallel beam parallel to the optical axis. An array lens module calibration device as described in claim 4, wherein the laser alignment module includes an off-axis laser light source and a laser alignment receiving element, the off-axis laser light source is used to provide the calibration laser beam to pass through the calibration through hole and the multiple lens groups, and the laser alignment receiving element is used to receive the calibration laser beam from the array lens module. An array lens module calibration device as described in claim 1, wherein the calibration through hole is located at the symmetrical center of the multiple lens frames. An array lens module calibration device as described in claim 1, wherein the depth of field measurement module includes an array light source and a depth of field measurement imaging element, the array light source is used to provide a depth of field measurement beam to be transmitted to the multiple lens groups of the array lens module, and the depth of field measurement imaging element is used to receive the depth of field measurement beam from the array lens module to capture an image of the array lens module. An array lens module calibration device as described in claim 1, wherein the coplanarity adjustment module includes at least one robotic arm for adjusting multiple lens frames of the array lens module based on the appearance information, the alignment information and the depth of field information. An array lens module calibration device as described in claim 8, wherein the relative position of each of the multiple lens frames and the substrate changes according to a rotation angle of the multiple lens frames. A calibration method for an array lens module calibration device, comprising: Providing an array lens module calibration device, the array lens module calibration device comprising a supporting platform, a visual positioning module, a laser alignment module, a depth of field measurement module and a coplanarity adjustment module; Providing an array lens module to the supporting platform, the array lens module having an optical axis and comprising a substrate, a plurality of lens frames arranged on the substrate and a plurality of lens groups respectively arranged in the plurality of lens frames; Providing a colloid between the substrate and the plurality of lens frames; Providing a visual positioning beam to the array lens module, and capturing an image of the appearance of the array lens module to obtain appearance information; Providing a calibration laser beam to pass through the calibration through hole of the array lens module and the multiple lens groups to form an image to obtain alignment information; Performing depth of field imaging on the multiple lens groups to obtain depth of field information; Adjusting the relative positions of the multiple lens frames and the substrate in the direction of the optical axis parallel to the optical axis according to the appearance information, the alignment information and the depth of field information; and Curing the colloid to fix the positions of the multiple lens frames on the substrate. The calibration method of the array lens module calibration device as described in claim 10, wherein the visual positioning module includes a coaxial light source, a telecentric lens, and a visual positioning receiving element, and the method of providing the visual positioning beam to the array lens module to obtain the appearance information includes: Providing the visual positioning beam to the array lens module with the coaxial light source; and Receiving the visual positioning beam from the array lens module with the visual positioning receiving element to obtain the appearance information. The calibration method of the array lens module calibration device as described in claim 10, wherein the laser alignment module includes an off-axis laser light source and a laser alignment receiving element, and the method of providing the calibration laser beam to the array lens module to obtain the alignment information includes: Using the off-axis laser light source to provide the calibration laser beam to pass through the calibration through hole of the array lens module and the multiple lens groups, the calibration through hole is located at the symmetrical center of the multiple lens frames; and Using the laser alignment receiving element to receive the calibration laser beam from the array lens module. The calibration method of the array lens module calibration device as described in claim 10, wherein the depth of field measurement module includes an array light source and a depth of field measurement imaging element, and the method of performing depth of field imaging on the multiple lens groups to obtain the depth of field information includes: Using the array light source to provide a depth of field measurement beam to pass through the multiple lens groups of the array lens module; and Using the depth of field measurement imaging element to receive the depth of field measurement beam from the array lens module to image the array lens module. As described in claim 10, the calibration method of the array lens module calibration device, wherein the coplanarity adjustment module includes at least one robot arm, and the method of adjusting the relative positions of the plurality of lens frames and the substrate in the optical axis direction according to the appearance information, the alignment information and the depth of field information includes: Adjusting the relative rotation angle of each of the plurality of lens frames and the substrate according to the appearance information, the alignment information and the depth of field information. The calibration method of the array lens module calibration device as described in claim 10 further includes: Repeatedly providing the calibration laser beam to the array lens module to update the alignment information; Repeatedly performing depth of field imaging on the multiple lens groups to update the depth of field information; and Adjusting the relative positions of the multiple lens frames and the substrate in the optical axis direction according to the updated alignment information and the depth of field information.

Images