TWI872451B - Dust collecting device, resin forming device, and filter component - Google Patents

Abstract

The problem that the present invention aims to solve is to provide a dust collecting device, a resin forming device, and a filter component, wherein the dust collecting device can collect dust by stable suction. In order to solve this problem, the dust collecting device of the present invention can be provided with a bag-shaped filter component having an opening and at least a part of which is formed of a breathable material having air permeability; the dust collecting device comprises: a frame body, which is formed with an air intake port and an air exhaust port; a gas suction source, which can inhale air from the aforementioned air exhaust port; and a setting component, which is arranged inside the aforementioned frame body in a manner covering the aforementioned air exhaust port and is formed with a plurality of air holes; wherein, the aforementioned opening of the aforementioned filter component is connected to the aforementioned air intake port and at least a part of the aforementioned breathable material is arranged on the aforementioned setting component, and the aforementioned gas suction source is driven so that the gas flowing in from the aforementioned air intake port passes through the filter component and is discharged from the aforementioned air exhaust port.

Description

Dust collecting device, resin forming device, and filter component

The present invention relates to a dust collecting device, a resin forming device, and a filter component.

Conventionally, a resin molding device is provided with a dust collecting device for recovering resin residue and dust (hereinafter referred to as "dust, etc."). The dust collecting device is provided with a filter for capturing the recovered dust, etc. For example, the dust collecting device described in Patent Document 1 is provided with a bag-shaped primary filter and a plate-shaped secondary filter.

In order to implement proper dust collection, the filter with dust and the like attached must be replaced before the mesh is clogged, and the attached filter must be cleaned when the replaced filter is to be reused. However, when the filter is replaced (removed), the dust from the filter is scattered, which may cause pollution to the clean room where the resin molding device is installed. The bag-shaped primary filter of the dust collection device of Patent Document 1 can store dust in the bag, so it is possible to suppress the dust from flying when the bag-shaped primary filter is removed.

[Prior technical literature] (Patent literature) Patent literature 1: Japanese Patent Publication No. 9-219414

[Problem to be solved by the invention] However, this primary filter has an air suction pipe suspended in the frame, and air is sucked through the air suction pipe below the primary filter. Therefore, the primary filter may be hit during suction, or the primary filter may be laid inside the frame in an unstable shape, and stable suction may not be achieved. As a result, there is a possibility that the dust collection function is reduced.

The present invention is made to solve this problem, and its purpose is to provide a dust collecting device, a resin forming device, and a filter component, wherein the dust collecting device can collect dust by stable suction.

[Technical means for solving the problem] The dust collecting device of the present invention may be provided with a bag-shaped filter component having an opening and at least a part of which is formed of a breathable material having air permeability; the dust collecting device comprises: a frame having an air intake port and an air exhaust port; a gas suction source which can inhale air from the aforementioned air exhaust port; and a setting component which is arranged inside the aforementioned frame in a manner covering the aforementioned air exhaust port and is formed with a plurality of air holes; wherein, the aforementioned filter component is configured such that, in a state where the aforementioned opening of the aforementioned filter component is connected to the aforementioned air intake port and at least a part of the aforementioned breathable material is arranged on the aforementioned setting component, the aforementioned gas suction source is driven so that the gas flowing in from the aforementioned air intake port passes through the filter component and is discharged from the aforementioned air exhaust port.

The resin forming device of the present invention comprises: a resin forming module for performing resin forming; and a dust collecting module for collecting dust in the resin forming module and having the same structure as the above-mentioned dust collecting device.

The filter component of the present invention is a filter component installed in the above-mentioned dust collecting device, and comprises: a filter body having an opening at the top and formed in a bag shape; the bottom of the filter body is formed by a substantially flat surface; at least the bottom of the filter body is formed by a breathable material having air permeability.

[Effect of the invention] According to the present invention, dust collection can be performed by stable attraction.

Hereinafter, an embodiment of the resin molding device of the present invention will be described with reference to the drawings. In this resin molding device, a dust collecting module of an embodiment of the dust collecting device of the present invention is provided. In order to facilitate understanding, appropriate objects are omitted or exaggerated and schematically depicted in each drawing.

<1. Structure of resin molding device> FIG. 1 is a schematic plan view of a resin molding device 100 of the present embodiment. The resin molding device 100 is configured to perform resin molding (resin encapsulation) on a substrate (resin molding object) W to which electronic components such as semiconductor chips, resistors, capacitors, etc. are connected, and electronic components encapsulated with resin (hereinafter collectively referred to as electronic components) are applied by transfer molding to produce a resin molded product. To explain in more detail, after the electronic components are fixed to one side of the substrate W, the surface is encapsulated with resin. Thereafter, there is also a case where the electronic components are further fixed to the other side of the substrate W and the surface is encapsulated with resin. In this way, when the surfaces of the substrate W are sealed with resin, the resin molding device 100 of this embodiment is used, and the fixing of the electronic components to the substrate is implemented in other devices.

Examples of the substrate W used here include semiconductor substrates such as silicon wafers, lead frames, printed wiring boards, metal substrates, resin substrates, glass substrates, and ceramic substrates. The substrate W may be a carrier used in FOWLP (Fan Out Wafer Level Packaging) or FOPLP (Fan Out Panel Level Packaging). The substrate W may or may not have wiring applied.

As shown in FIG. 1 , the resin forming device 100 includes a substrate and resin material supply module A (hereinafter, also referred to as "module A"), two resin forming modules B (hereinafter, also referred to as "module B"), a substrate storage module C (hereinafter, also referred to as "module C"), and a control unit 14. As the control unit, for example, a PLC (Programmable Logic Controller), a PC (Personal Computer), etc. can be used. The control unit 14 includes a CPU (Central Processing Unit), a RAM (Random Access Memory), and a ROM (Read Only Memory), etc., and is configured to implement control of each module A to C in accordance with information processing. Each module A to C is described in detail below. In addition, each module can be attached to and detached from other modules and can be exchanged. In addition, in the resin molding device 100, each module A to C can be increased or decreased.

<1-1. Module A> Module A is a module for supplying substrates W before forming and supplying resin material P, and has a substrate supply unit 42, a feed cassette 78, an arrangement mechanism 70, and a resin supply mechanism 79. The substrate supply unit 42, the feed cassette 78, and the arrangement mechanism 70 are arranged on the front side (lower side of FIG. 1) of the module A than the guide G. The substrate supply unit 42 pushes out the substrates W one at a time from the feed cassette 78 and conveys them to the arrangement mechanism 70. The feed cassette 78 is a storage container that stores and stores a plurality of substrates W separated by intervals in the vertical direction. In this embodiment, the substrate supply unit 42 pushes the substrate W from the feed cassette 78 by means of an actuator and moves it to the arrangement mechanism 70 adjacent to the feed cassette 78. The arrangement mechanism 70 has a rotating disk, and if a substrate W is placed on it, the rotating disk is rotated to arrange the substrate W in a state suitable for being picked up by the loader 40. The resin supply mechanism 79 supplies a tablet-shaped resin material P and arranges it in a state suitable for being picked up by the loader 40. The resin material P is used for resin molding.

<1-2. Module B> Each module B is a module (resin forming module) for performing the forming of the resin material, and has a forming section 5 to manufacture a formed substrate W (resin formed product) by transfer forming. The forming section 5 has an upper mold 52, a lower mold 51 opposite to the upper mold 52, a mold tightening mechanism 53, and a plunger (not shown). The lower mold 51 is configured to hold the substrate W on the top surface and has a groove (pot) for accommodating the resin material P. On the other hand, the upper mold 52 has a concave mold cavity. The mold tightening mechanism 53 is configured to mold tighten the upper mold 52 and the lower mold 51 supplied with the substrate W and the resin material P. In this embodiment, a cull portion, a gutter, and a gutter are further formed in the upper mold 52. The hardening part, the gutter, and the gutter constitute a resin flow passage, and the resin material P melted in the groove can be pushed out from the resin flow passage to the mold cavity by a plunger.

<1-3. Module C> Module C is a module for removing unnecessary resin from the substrate W after forming and storing it. As shown in FIG. 1, module C has a spout breaking mechanism 771 and a discharge cassette 772. The spout breaking mechanism 771 removes unnecessary resin from the substrate W after forming. The discharge cassette 772 stores the substrate W after forming from which the unnecessary resin has been removed.

<1-4. Loader and unloader> In the resin molding device 100 of this embodiment, a guide G is provided which crosses the module A, the module B, and the module C and is arranged in a straight line. The guide G is a track-shaped component for the loader 40 and the unloader 44 to move. The guide G is arranged on the back side of each module (the upper side of FIG. 1). The loader 40 can move in a manner of crossing from the module A to the module B, pick up the substrate W and the resin material P in the module A, transport them to the module B, and supply the substrate W and the resin material P to the lower mold 51. The unloader 44 can move from module B to module C, pick up the finished substrate W in module B, transport it to module C and hand it over to the gate destroying mechanism 771.

<2. Dust collecting module> Next, the dust collecting module is described. As shown in FIG. 2, the dust collecting module 200 is connected to the air intake pipe 50, which is arranged adjacent to the module B and sucks the air around the forming part 5 in the module B. In addition, the air intake pipe 50 can also be further arranged in the module A and the module C. Furthermore, the air sucked by the air intake pipe 50 passes through the dust collecting module 200, and the filtered air is discharged to the outside of the dust collecting module 200. The dust collecting module 200 is described in detail below.

FIG. 3 is a schematic diagram of the dust collection module 200. As shown in FIG. 3, the dust collection module 200 comprises: a first frame 7, which contains a bag-shaped filter component 300; a second frame 8, which contains a sheet-shaped auxiliary filter component 81; and a third frame 9, which contains a blower motor 91; these three frames 7 to 9 are arranged adjacent to each other.

FIG. 4 is a cross-sectional view of the first frame 7 viewed from the front. As shown in FIG. 4, the first frame 7 is formed in a cubic shape, and a part of the side surface is an openable door (not shown), and the internal space maintenance such as installation of the filter component 300 can be performed by opening the door. The end of the above-mentioned air intake pipe 50 is mounted on the top wall portion 71 of the first frame 7. The end of the air intake pipe 50 is formed in a cylindrical shape and extends downward from the top wall portion 71. Furthermore, as shown in FIG. 9 described later, the filter component 300 is mounted on the lower end of this air intake pipe 50. Thus, dust and resin burrs and other debris (hereinafter collectively referred to as resin chips) sucked from the module B are introduced into the first frame 7 through the air intake pipe 50 and stored in the filter member 300. In addition, the air intake pipe 50 installed in the first frame 7 is equivalent to the air intake port in this case.

On the other hand, a rectangular exhaust port 721 is formed in the bottom wall portion 72 of the first frame body 7, and a rectangular plate-shaped installation member 73 is arranged to cover the exhaust port 721. The installation member 73 has a plurality of air holes, and the filter member 300 is installed on the installation member 73.

The setting member 73 is supported by a plurality of support portions 74 disposed on the bottom wall portion 72 of the first frame body 7. More specifically, at the four corners of the outer edge of the exhaust port 721 in the bottom wall portion 72, there are disposed cubic support portions 74 protruding upward, and the four corners of the setting member 73 are supported by these support portions 74. Thus, a gap is formed between the setting member 73 and the bottom wall portion 72, so that air can flow into the gap from the side of the setting member 73. In addition, on the top surface of the setting member 73, a dome-shaped (hemispherical) convex portion 75 is formed, and a plurality of air holes are also formed in this convex portion 75.

An exhaust pipe 76 is installed on the bottom surface of the bottom wall portion 72, and the exhaust pipe 76 is connected to the second frame 8. As shown in FIG. 3, the second frame 8 is formed into a cubic shape with a small thickness in the horizontal direction, and the above-mentioned auxiliary filter member 81 is installed inside. A known filter (for example, a HPEA filter) formed by bending a sheet into an accordion shape is installed in the auxiliary filter member 81. By means of this auxiliary filter member 81, the interior of the second frame 8 is divided into two areas in the horizontal direction, that is, divided into an upstream area 84 and a downstream area 85.

The exhaust pipe 76 is connected to the upstream area 84. Therefore, the air exhausted from the first frame 7 flows into the upstream area 84, passes through the auxiliary filter member 81, and flows to the downstream area 85. That is, the auxiliary filter member 81 captures dust and the like to purify the air. The wall surface of the second frame 8 in the downstream area 85 is connected to the third frame 9, so that the air in the downstream area 85 flows to the third frame 9.

As shown in FIG. 3 , a blower motor (gas suction source) 91 is disposed inside the third frame 9, and the blower motor 91 is driven to suck air from the module B through the first frame 7 to the third frame 9. The sucked air is discharged from an exhaust pipe 92 disposed on the upper portion of the third frame 9.

<3. Filter member> Next, the filter member will be described with reference to FIGS. 5 to 8. FIG. 5 is a side view of the filter member, FIG. 6 is a plan view of FIG. 5, FIG. 7 is a cross-sectional view showing the folds of the filter member, and FIG. 8 is a bottom view of the filter member. As shown in FIGS. 5 to 8, the filter member 300 has a bag-shaped filter body 31, a belt member 32 disposed on the outside of the filter body 31, and two support members 33 extending upward and downward.

The filter body 31 has a bottom 311 formed in a flat circular shape. On the other hand, a circular opening 312 having a smaller diameter than the bottom 311 is formed at the upper portion of the filter body 31. The opening 312 is formed by folding back and sewing the vicinity of the upper end opening of the filter body 31 inward, thereby forming a passage 314 for the rope-like member 34 to pass around the opening 312. Furthermore, a cutout 313 leading to the outside is formed in the passage 314, and both ends of the rope-like member 34 are pulled out from the cutout 313 and extend to the outside. That is, the opening portion 312 of the filter body 31 has a sealing structure like a drawstring bag, and is configured so that the opening portion 312 is tightened and closed by pulling both ends of the rope-like member 34.

Furthermore, a ring-shaped elastic member 35 extending in the circumferential direction is attached to the outer peripheral surface of the filter body 31 below the rope-shaped member 34. This allows the air intake pipe 50 inserted from the opening 312 to be tightened. The elastic member 35 can be formed of, for example, rubber or the like.

A plurality of folds (pleats) 315 extending in the vertical direction and arranged at predetermined intervals in the circumferential direction are formed on the outer surface of the filter body 31. As shown in FIG. 7 , the folds 315 are formed by folding the filter body 31. Therefore, the volume of the filter body 31 increases by the expansion of the folds 315.

As shown in FIG. 5 , the belt member 32 is formed into a ring shape near the middle of the filter body 31 in the vertical direction so as to surround the filter body 31 in the circumferential direction. The length of the belt member 32 in the circumferential direction is formed to be slightly longer than the outer circumference of the filter body 31. On the other hand, each supporting member 33 is attached to the outside of the filter body 31 so as to connect the vicinity of the elastic member 35 and the vicinity of the periphery of the bottom 311. Each supporting member 33 is formed into a belt shape and is arranged at positions offset by about 180 degrees from each other in the circumferential direction of the filter body 31. Furthermore, the belt member 32 is fixed to these supporting members 33, thereby maintaining the position of the belt member 32 in the vertical direction.

The material forming the filter body 31 is not particularly limited, and can be formed from a flexible material such as a porous woven fabric or non-woven fabric known in filter materials such as polyester. In other words, any material can be used as long as it can capture resin sheets and allow air to circulate. Furthermore, the filter body 31 can be formed from not only one material but also a plurality of materials. For example, in the filter body 31, the area around the opening 312 is mounted on the air intake pipe 50, so it can be formed from a resin material that cannot pass through gas in consideration of strength. Therefore, in the filter body 31, the portion other than the portion that is not air permeable is made of the air permeable material of the present invention.

<4. Operation of the dust collecting module> Next, the operation of the dust collecting module constructed as described above will be described with reference to FIGS. 9 to 11. First, as shown in FIG. 9, the filter member 300 is set in the first frame 7. That is, the door of the first frame 7 is opened, and the air intake pipe 50 is inserted into the opening 312 of the filter member 300. An elastic member 35 is arranged around the opening 312, so that the opening 312 can be expanded by pushing the elastic member 35 while stretching it to insert the air intake pipe 50. Next, the insertion length of the air intake pipe 50 is adjusted while the upper and lower positions of the air intake pipe 50 are adjusted so that the bottom 311 of the filter body 31 contacts the top surface of the setting member 73. The filter body 31 is positioned in this way so that the annular fixing member 98 is installed and tightened to the outer peripheral surface of the filter body 31. Thus, the opening 312 of the filter body 31 is pressed and tightly fitted to the outer peripheral surface of the air intake pipe 50 by the fixing member 98. As a result, the air intake pipe 50 and the filter body 31 are tightly fixed.

In this state, the center of the bottom 311 of the filter body 31 is pushed upward by the protrusion 75 and deformed into a convex shape on the inner space side to form a protrusion 318 (see FIG. 11 ).

Next, after closing the door of the first frame 7, the blower motor 91 is driven to suck the air containing the resin sheet from the module B. As shown in FIG. 10, a part of this air F1 flows into the filter body 31 through the air intake pipe 50, and is sucked from the bottom 311 of the filter body 31 toward the exhaust pipe 76 through the setting member 73. In this process, as shown in FIG. 11, the resin sheet S is stored in the bottom 311 of the filter body 31. At this time, the resin sheet S is stored around the convex portion 318 formed on the bottom 311. In addition, the resin sheet S that hits the convex portion 318 rolls down from the convex portion 318 and is stored around it.

As shown in FIG. 10 , in the exhaust pipe 76, not only the air F1 passing through the inside of the filter member 300 but also the air F2 around the filter member 300 is sucked. This is because a gap is formed between the setting member 73 and the exhaust port 721, so the air around the filter member 300 communicating with the gap is also sucked. Therefore, inside the first frame 7, the surrounding of the filter member 300 becomes negative pressure, and the air flowing into the filter body 31 flows out of the filter member 300 from the outer peripheral surface other than the bottom 311 (F2) not only toward the bottom 311 of the filter body 31. Therefore, the resin sheet S is captured not only at the bottom 311 of the filter body 31 but also at the outer peripheral surface.

In this way, the air passing through the filter body 31 flows into the second frame 8 from the exhaust port 721 through the exhaust pipe 76 as shown in FIG. 3, and flows from the upstream area 84 through the auxiliary filter member 81 to the downstream area 85. At this time, there are almost no resin flakes left in the air passing through the auxiliary filter member 81, but if the filter member 300 is damaged and a bad condition occurs, the resin flakes can be captured by the auxiliary filter member 81. Then, the air flows to the third frame 9 and is discharged from the exhaust pipe 92 to the outside of the dust collection module 200.

The filter member 300 is replaced regularly. At this time, the door of the first housing 7 is opened, and after the fixing member 98 is removed, the filter member 300 is removed from the air intake pipe 50. Thereafter, as shown in FIG. 12 , the opening 312 can be simply closed by tightening the rope-like member 34, thereby preventing the resin sheet from leaking out from the filter member 300. The filter member 300 thus handled can be properly discarded.

<5. Features> In the dust collecting module 200 constructed as above, the following effects can be obtained.

(1) Since the filter body 31 is formed into a bag shape, after catching the resin pieces, it can be removed from the air intake pipe 50 and directly discarded. Therefore, it is possible to prevent the resin pieces from scattering when the filter member 300 is replaced. Moreover, when replacing, only the opening portion 312 of the filter member 300 is mounted on the air intake pipe 50, and the bottom portion 311 is arranged on the installation member 73, so it is also easy to replace. Therefore, if the filter member 300 related to the present embodiment is used, maintenance can be easily performed.

(2) In the present embodiment, the filter member 300 is arranged on the setting member 73 and suction is performed. Therefore, the setting direction (gravity direction) of the filter member 300 coincides with the suction direction, so that the shaking of the filter member 300 in the first frame 7 can be suppressed. As a result, the air can be stably sucked and the resin sheet can be captured. In particular, the filter member 300 of the present embodiment has a flat bottom 311, so the filter member 300 can be stably arranged on the setting member 73.

(3) As shown in FIG. 10, a gap is formed between the setting member 73 and the exhaust port 721, so the sucked air F2 also flows in from this gap. Therefore, the surrounding of the filter member 300 can be set to negative pressure inside the first frame 7, so that the air can be discharged from the outer peripheral surface other than the bottom 311 of the filter body 31. As a result, the resin sheet can capture not only the bottom 311 of the filter body 31 but also the outer peripheral surface. Therefore, the capture area of the resin sheet can be expanded.

Furthermore, in the initial use of the filter component 300, the attraction of air from the bottom 311 is strong, so the resin sheets are mainly stored in the bottom 311. However, when the resin sheets are accumulated on the bottom 311 and block the mesh, the outer peripheral surface of the filter body 31 can be used to capture the resin sheets, so the operation time of the filter component 300 can be extended.

(4) Since the convex portion 75 is formed on the setting member 73, the bottom 311 of the filter body 31 also contributes to the attraction and is deformed into a convex shape toward the inner space along the convex portion 75 to form a convex portion 318. Therefore, as shown in FIG. 11, the captured resin sheet S is mainly stored around the convex portion 318 in the bottom 311 as described above. As a result, even if the stored resin sheet S covers the convex portion 318, air can be circulated in the convex portion 318, so it is possible to suppress the reduction of the filter function. Therefore, it is possible to extend the operating time of the filter member 300.

(5) Since the band member 32 is provided so as to surround the outer periphery of the filter body 31, the filter body 31 can be held so as not to be excessively expanded without collapsing the shape of the filter body 31.

(6) Even if the filter member 300 is broken or the filter function is degraded, the auxiliary filter member 81 is provided, so the resin pieces can be captured reliably.

<6. Variations> The above describes one embodiment of the present invention, but the present invention is not limited to the above embodiment, and various variations can be made as long as they do not deviate from the main purpose. For example, the following variations can be made. In addition, the main purpose of the following variations can be appropriately combined.

(1) The structure of the filter body 31 is not particularly limited, as long as at least a portion is formed of an air-permeable material having air permeability and an opening 312 is formed to which the air intake pipe 50 can be mounted. Therefore, the rope member 34, the elastic member 35, the fold 315, the support member 33, and the belt member 32 can be appropriately provided as needed. In addition, the shape of the filter body 31 is not particularly limited. For example, the bottom 311 does not necessarily have to be flat, as long as it can be arranged on the setting member 73, and the portion of the filter body 31 arranged on the setting member 73 is formed of an air-permeable material having air permeability.

(2) In the above-mentioned embodiment, a convex portion 75 is formed on the setting member 73, but the shape of the convex portion 75 is not particularly limited as long as it is air-permeable and protrudes upward. For example, in addition to the above-mentioned dome shape (hemispherical shape), it can be set to various shapes such as a pyramid shape (Figure 13 (a)), a cone shape (Figure 13 (b)), a column shape (Figure 13 (c)), a polygonal column shape, a polygonal cone shape, and a polygonal pyramid shape. Among them, in order to facilitate the resin sheet to roll down to the bottom 311, it is preferred that the flat portion set on the upper part is as small as possible. In addition, the convex portion 75 is not necessarily necessary, but according to the confirmation of the inventors, if it is set, the operating time of the filter member 300 can be extended according to the above-mentioned principle. Furthermore, in the above-mentioned embodiment, the convex portion 75 is provided on the setting member 73, but the convex portion 75 may be formed by providing a part of the setting member 73 with a convex shape.

(3) A recessed portion into which the protrusion 75 of the setting member 73 is inserted can be formed in advance at the bottom 311 of the filter member 300. In this case, the shape of the recessed portion is not particularly limited, but is preferably formed in a shape that matches the shape of the protrusion 75.

(4) In the above embodiment, a blower motor is used as a gas suction source, but there is no particular limitation as long as it can suck gas.

(5) In the first frame 7, it is sufficient to form the air intake pipe 50 as the air intake port, the air exhaust port 721, and to provide the setting member 73 for the filter member 300 to be set. A gap between the setting member 73 and the air exhaust port 721 is not necessarily required, and it is sufficient to provide a gap according to the need. If such a gap is provided, the resin piece can be captured even on the outer peripheral surface of the filter member 300 as described above.

(6) The auxiliary filter member 81 is not necessarily necessary, and can be provided as needed. In addition, the type of the auxiliary filter member is not particularly limited, and filters of various shapes can be used.

(7) The resin molding apparatus of the above-mentioned embodiment is an apparatus for performing resin molding by transfer molding, but the dust collecting apparatus of the present invention is also applicable to an apparatus for performing resin molding by compression molding. Therefore, the above-mentioned modules A to C are examples of the resin molding apparatus and can be appropriately changed.

(8) The filter component of the present invention is not limited to the above-mentioned dust collecting module 200, but can also be used in other dust collecting devices.

14: Control unit 31: Filter body 311: Bottom 312: Opening 313: Cutout 314: Passage 315: Crease 318: Protrusion 32: Belt member 33: Support member 34: Rope member 35: Elastic member 300: Filter member 40: Loader 42: Substrate supply unit 44: Unloader 5: Forming unit 50: Suction pipe (suction port) 51: Lower mold 52: Upper mold 53: Mold fastening mechanism 7: First frame (frame) 70: Arrangement mechanism 71: Top wall 72: Bottom wall 73: Setting member 74: Support unit 75: convex part 76: exhaust pipe 78: feeding cassette 79: resin supply mechanism 721: exhaust port 771: gate breaking mechanism 772: discharge cassette 8: second frame (frame) 81: auxiliary filter component 84: upstream area 85: downstream area 9: third frame 91: blower motor 92: exhaust pipe 98: fixed component 100: resin forming device 200: dust collecting module (dust collecting device) A: substrate and resin material supply module B: resin forming module C: substrate storage module G: guide member W: substrate P: resin material S: resin sheet F1: Air inside the filter component F2: Air around the filter component

FIG. 1 is a plan view showing a resin molding device. FIG. 2 is a schematic view showing the position of a dust collecting module. FIG. 3 is a schematic diagram showing the structure of a dust collecting module. FIG. 4 is a cross-sectional view showing the first frame from the front. FIG. 5 is a side view of a filter member. FIG. 6 is a plan view of FIG. 5. FIG. 7 is a cross-sectional view showing the folds of the filter member. FIG. 8 is a bottom view of the filter member. FIG. 9 is a cross-sectional view showing the operation of the dust collecting module. FIG. 10 is a cross-sectional view showing the operation of the dust collecting module. FIG. 11 is a cross-sectional view showing the operation of the dust collecting module. FIG. 12 is a front view showing the operation of the filter member after use. Figure 13 is a front view showing another example of a protrusion provided on a setting member.

Domestic storage information (please note the order of storage institution, date, and number) None

Overseas storage information (please note the storage country, institution, date, and number in order) None

14: Control Department

40: Loader

42: Substrate supply unit

44: Uninstaller

5: Forming section

50: Intake pipe (intake port)

51: Lower mold

52: Upper mold

53: Mold fastening mechanism

70: Arrangement mechanism

78: Feeding cassette

79: Resin supply mechanism

771: Watering hole destruction mechanism

772: Discharge cassette

100: Resin forming device

A: Substrate and resin material supply module

B: Resin forming module

C: Substrate storage module

G: Guide piece

W: Substrate

P: Resin material

Claims (10)

A dust collecting device can be provided with a bag-shaped filter component, which has an opening at the top and is at least partially formed of a breathable material with air permeability; the dust collecting device comprises: a frame, which is formed with an air intake port and an air exhaust port; a gas suction source, which can inhale air from the aforementioned air exhaust port; and a setting component, which is arranged inside the aforementioned frame in a manner covering the aforementioned air exhaust port and is formed with a plurality of air holes; wherein at least a portion of the bottom of the aforementioned filter component is formed by a substantially flat surface; at least a portion of the top surface of the aforementioned setting component is formed by a flat surface; the substantially flat bottom of the aforementioned filter component is formed by The upper and lower positions of the filter member are adjusted by connecting the opening of the filter member to the air inlet and placing at least a portion of the air-permeable material on the setting member, and the gas suction source is driven to allow the gas flowing in from the air inlet to pass through the filter member and be discharged from the exhaust port; the air from the air inlet flows into the filter member from the opening of the upper part of the filter member, and is discharged from the exhaust port from the lower part of the filter member through the setting member. A dust collecting device as described in claim 1, wherein a gap is formed between a surface of the inner surface of the frame having the exhaust port and the setting member; the gas flowing out from the air permeable material of the filter member to the outside is attracted by flowing into the gap and toward the exhaust port. The dust collecting device as described in claim 1 or 2, wherein an auxiliary filter component is further provided between the aforementioned exhaust port and the aforementioned gas suction source. A dust collecting device as described in claim 1 or 2, wherein at least one convex portion protruding upward is formed on the aforementioned setting member, and a ventilation hole is formed on the at least one convex portion. A resin forming device comprises: a resin forming module for performing resin forming; and a dust collecting module for collecting dust in the resin forming module, and the dust collecting module has the same structure as the dust collecting device described in any one of claims 1 to 4. A filter component is a filter component provided in a dust collecting device as described in any one of claims 1 to 4, comprising: a filter body having an opening at the top and formed in a bag shape; the filter body having the bottom, at least the bottom being formed of an air-permeable material having air permeability. A filter component as described in claim 6, wherein a plurality of folds extending in the vertical direction between the bottom and the opening are formed on the outer peripheral surface of the filter body. The filter component as described in claim 6 or 7, wherein, on the outer side of the outer peripheral surface of the aforementioned filter body, there is further provided an annular belt component for maintaining the shape of the filter component. A filter component as described in claim 6 or 7, wherein a rope-shaped component is provided along the periphery of the aforementioned opening, and has a sealing structure for tightening the aforementioned opening by pulling the aforementioned rope-shaped component. A filter component is a filter component installed in the dust collecting device described in claim 4, comprising: a filter body having an opening at the top and formed into a bag shape by a breathable material; the filter body having the bottom, at least the bottom being formed by a breathable material; and a concave portion for the convex portion of the installation component to be embedded in the substantially flat surface.