TWI847199B - Observation carrier for microscope - Google Patents

Abstract

An observation carrier for microscope includes a stage body, a chip and a pressure relief assembly. The stage body includes a base and an upper cover, and the upper cover is detachably disposed on the base and includes a window. The chip is integrated on the upper cover and is adjacent to the base. An observation area is formed between the base and the chip. The observation area corresponds to the window and is suitable for carrying a sample to be tested. The pressure relief assembly is disposed on the base and includes a rupture disk, wherein the rupture disk connects to the observation area.

Description

Microscope observation stage

The present invention relates to an observation platform, and in particular to a microscope observation platform.

Optical microscopes and electron microscopes carry samples to be tested on an observation stage to facilitate subsequent observation of the samples. However, due to incorrect experimental parameter settings, the observation stage is prone to excessive pressure in the internal cavity where the sample is located, causing the observation window of the observation stage to break and the sample to be tested to splash, and causing the microscope and the observation stage to be contaminated or damaged. Therefore, how to improve the observation stage's observation window breakage and sample to be splashed due to excessive pressure in the internal cavity is a major research focus in this field.

The present invention provides a microscope observation platform, which can avoid the observation window of the observation platform from breaking and the sample to be tested from splashing due to excessive internal pressure of the observation platform.

The microscope observation stage of the present invention includes a stage body, a chip and a pressure relief assembly. The stage body includes a base and an upper cover, the upper cover is detachably arranged on the base and includes a window. The chip is integrated with the upper cover and is adjacent to the base, and an observation area is formed between the base and the chip, the observation area corresponds to the window and is suitable for carrying a sample to be tested. The pressure relief assembly is arranged on the base and includes a rupture disk, wherein the rupture disk is connected to the observation area.

In one embodiment of the present invention, the material of the rupture disk is the same as that of the wafer, and the thickness of the rupture disk is less than the thickness of the wafer.

In one embodiment of the present invention, the carrier body has an air flow channel, which is connected between the rupture disk and the observation area.

In one embodiment of the present invention, the air flow channel includes a first section and a second section, the first section is located between the upper cover and the base and connected to the observation area, and the second section is located at the base and connected to the first section and extends to the rupture disk.

In an embodiment of the present invention, the first section is perpendicular to the second section.

In one embodiment of the present invention, the pressure relief assembly includes a joint having a through hole, the rupture disc is located between the air flow channel and the through hole, and the through hole is connected to the outside.

In one embodiment of the present invention, the microscope observation platform includes a sealing ring, wherein the sealing ring is disposed between the air flow channel and the rupture disk.

Based on the above, in the microscope observation stage of the present invention, the rupture disk is directly connected to the observation area. Thus, when the internal pressure of the observation area carrying the sample to be tested is too large, the rupture disk can be ruptured and pressure released before the chip corresponding to the observation area, avoiding the splashing of the sample to be tested due to the rupture of the chip, and reducing the risk of contamination or damage to the microscope observation stage.

Figure 1 is a three-dimensional view of a microscope observation platform of an embodiment of the present invention, Figure 2 is a partial cross-sectional three-dimensional view of the microscope observation platform of Figure 1, and Figure 3 is a cross-sectional side view of the microscope observation platform of Figure 1.

Please refer to Figures 1 to 3. The microscope observation stage 100 of this embodiment includes a stage body 110, a chip 120 (Figure 3) and a pressure relief assembly 130. The stage body 110 includes a base 111 and a cover 112. The cover 112 is detachably disposed on the base 111, and the cover 112 includes a window 113. The chip 120 is integrated with the cover 112 and is adjacent to the base 111. An observation area R (Figure 3) is formed between the base 111 and the chip 120. The observation area R corresponds to the window 113 and is suitable for carrying a sample to be tested (not shown). The pressure relief assembly 130 is disposed on the base 111 and includes a rupture disk 131 (Figure 3). The rupture disk 131 is connected to the observation area R.

Thus, the microscope observation stage 100 of this embodiment is directly connected to the observation area R because the rupture disk 131 is directly connected to the observation area R. When the internal pressure of the observation area R carrying the sample to be tested is too large, the rupture disk 131 can be ruptured and pressure released before the chip 120 corresponding to the observation area R. In other words, the rupture disk 131 has a lower ability to withstand pressure than the chip 120, so before the pressure reaches a level sufficient to rupture the chip 120, the rupture disk 131 will rupture and pressure release first, so that the pressure will no longer continue to rise, ensuring that the chip 120 will not rupture. This avoids the splashing of the sample to be tested due to the rupture of the chip 120, and reduces the risk of contamination or damage to the microscope observation stage 100.

In this embodiment, the material of the rupture disk 131 is the same as the material of the chip 120, and the thickness of the rupture disk 131 is less than the thickness of the chip 120, so that the rupture disk 131 can be broken before the chip 120. The thickness of the chip 120 in this embodiment is 50 nanometers (nm), and the thickness of the rupture disk 131 is 30 nanometers (nm), but the present invention is not limited to this. In addition, in another embodiment of the present invention, the material of the rupture disk 131 is different from the material of the chip 120, and the thickness of the rupture disk 131 is the same as the thickness of the chip 120, but the material strength of the rupture disk 131 must be lower than the material strength of the chip 120, so that the rupture disk 131 can be broken before the chip 120. The present invention does not limit the materials of the rupture disk 131 and the chip 120.

In this embodiment, the carrier body 110 has an airflow channel 114 (FIG. 3), which is connected between the rupture disk 131 and the observation area R, and includes a first section 114A (FIG. 3) and a second section 114B (FIG. 3). The first section 114A is located between the upper cover 112 and the base 111 and is formed by the upper cover 112 and the base 111. The first section 114A is connected to the observation area R, and the second section 114B is located at the base 111 and connected to the first section 114A and extends to the rupture disk 131. The first section 114A is perpendicular to the second section 114B.

In this embodiment, the pressure relief assembly 130 includes a connector 132, the connector 132 has a through hole 133, the rupture disk 131 is located between the airflow channel 114 and the through hole 133, and the through hole 133 is connected to the outside. When the rupture disk 131 is broken, the observation area R can be connected to the outside through the airflow channel 114 and the through hole 133, so as to prevent the chip 120 from being broken due to excessive internal pressure in the observation area R. The through hole 133 of this embodiment is designed to be a straight line in the connector 132, but in other embodiments of the present invention, the through hole 133 in the connector may not be a straight line design, and the present invention does not limit the shape of the through hole 133.

It is worth mentioning that the rupture disk 131 and the joint 132 of this embodiment are disposed on the side surface S ( FIG. 2 ) of the base 111. However, in other embodiments of the present invention, the rupture disk 131 and the joint 132 may be disposed on the top surface T ( FIG. 2 ) of the base 111, and the present invention is not limited thereto.

In this embodiment, the microscope observation platform 100 includes a sealing ring 140 (Figure 3), which is arranged between the airflow channel 114 and the rupture disk 131, so that the observation area R will not be connected to the outside due to the gap between the airflow channel 114 and the rupture disk 131, thereby avoiding affecting the pressure value of the observation area R during observation.

In this embodiment, the microscope observation stage 100 includes a liquid container assembly 150 (FIG. 3) and a top support 160 (FIG. 3). The liquid container assembly 150 is adjacent to the chip 120, and an observation area R is formed between the liquid container assembly 150 and the chip 120. The top support 160 is disposed between the liquid container assembly 150 and the base 111, and the top support 160 is suitable for supporting the liquid container assembly 150, which helps to make the liquid container assembly 150 adjacent to the chip 120.

In addition, the microscope observation stage 100 of the present embodiment includes a sealing ring 170 (FIG. 3) and a sealing ring 180, and the base 111 includes a bottom plate 1111 and a cover 1112. The bottom plate 1111 and the cover 1112 are assembled to accommodate the liquid containing assembly 150 and the top support 160. The sealing ring 170 is disposed between the bottom plate 1111 and the cover 1112 and surrounds the liquid containing assembly 150 and the top support 160 to enhance the sealing effect between the bottom plate 1111 and the cover 1112. The sealing ring 180 is disposed between the cover 1112 and the upper cover 112 of the base 111 and surrounds the wafer 120 to enhance the sealing between the cover 1112 and the upper cover 112.

FIG4 is a perspective view of some components of the microscope observation platform of FIG1. Referring to FIG3 and FIG4, the microscope observation platform 100 of this embodiment includes a screw cover 190 (FIG3). The screw cover 190 has at least one positioning column 191 (FIG3), and the cover body 1112 of the base 111 has at least one positioning groove 1113 (FIG4). The positioning column 191 of the screw cover 190 is suitable for being positioned in the positioning groove 1113 of the cover body 1112 as the screw cover 190 rotates relative to the base 111, so that the screw cover 190 can be detachably disposed on the cover body 1112 and the upper cover 112 is limited on the cover body 1112.

In summary, in the microscope observation stage of the present invention, the rupture disk is directly connected to the observation area through the air flow channel. Thus, when the internal pressure of the observation area carrying the sample to be tested is too high, the rupture disk can be ruptured and pressure released before the chip corresponding to the observation area, avoiding the splashing of the sample to be tested due to the rupture of the chip, and reducing the risk of contamination or damage to the microscope observation stage.

100: microscope observation stage 110: stage body 111: base 1111: bottom plate 1112: cover 1113: positioning groove 112: upper cover 113: window 114: air flow channel 114A: first section 114B: second section 120: chip 130: pressure relief assembly 131: rupture disk 132: connector 133: through hole 140, 170, 180: sealing ring 150: liquid storage assembly 160: top support 190: screw cover 191: positioning column R: observation area S: side surface T: top surface

FIG. 1 is a perspective view of a microscope observation stage of an embodiment of the present invention. FIG. 2 is a partial cross-sectional perspective view of the microscope observation stage of FIG. 1 . FIG. 3 is a cross-sectional side view of the microscope observation stage of FIG. 1 . FIG. 4 is a perspective view of some components of the microscope observation stage of FIG. 1 .

100: Microscope observation platform

110: Carrier body

111: Base

1111: Base plate

1112: hood body

1113: Positioning slot

112: Upper cover

113: Window

114: Air flow channel

114A: Section 1

114B: Second section

120: Chip

130: Pressure relief assembly

131: Ruptured disc

132:Connection

133:Through hole

140, 170, 180: Sealing ring

150: Liquid container assembly

160: Top support

190: Screw cap

191: Positioning column

R: Observation area

Claims (7)

A microscope observation platform comprises: a platform body, comprising a base and a cover, wherein the cover is detachably arranged on the base and comprises a window; a chip, integrated with the cover and adjacent to the base, wherein an observation area is formed between the base and the chip, the observation area corresponds to the window and is suitable for carrying a sample to be tested; and a pressure relief assembly, arranged on the base and comprising a rupture disk, wherein the rupture disk is connected to the observation area, wherein the pressure bearing capacity of the rupture disk is lower than the pressure bearing capacity of the chip, so that when the internal pressure of the observation area is too large, the rupture disk ruptures before the chip. A microscope observation stage as described in claim 1, wherein the material of the rupture disk is the same as the material of the chip, and the thickness of the rupture disk is less than the thickness of the chip. A microscope observation platform as described in claim 1, wherein the platform body has an air flow channel, and the air flow channel is connected between the rupture disk and the observation area. The microscope observation platform as described in claim 3, wherein the airflow channel includes a first section and a second section, the first section is located between the upper cover and the base and connected to the observation area, and the second section is located on the base and connected to the first section and extends to the rupture disk. A microscope observation platform as described in claim 4, wherein the first section is perpendicular to the second section. A microscope observation platform as described in claim 3, wherein the pressure relief assembly includes a joint, the joint has a through hole, the rupture disk is located between the air flow channel and the through hole, and the through hole is connected to the outside. The microscope observation platform as described in claim 3 includes a sealing ring, wherein the sealing ring is arranged between the airflow channel and the rupture disk.

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