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TWI709818B - Photosensitive resin composition for light-sielding film with the role of spacer, light-sielding film, liquid crystal display device, method for producing photosensitive resin composition for light-sielding film with the role of spacer, method for producing light-sielding film and method for producing liquid crystal display device - Google Patents

Photosensitive resin composition for light-sielding film with the role of spacer, light-sielding film, liquid crystal display device, method for producing photosensitive resin composition for light-sielding film with the role of spacer, method for producing light-sielding film and method for producing liquid crystal display device Download PDF

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TWI709818B
TWI709818B TW105133127A TW105133127A TWI709818B TW I709818 B TWI709818 B TW I709818B TW 105133127 A TW105133127 A TW 105133127A TW 105133127 A TW105133127 A TW 105133127A TW I709818 B TWI709818 B TW I709818B
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light
component
resin composition
film
photosensitive resin
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TW201715306A (en
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小野悠樹
滑川崇平
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日商日鐵化學材料股份有限公司
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/0008Organic ingredients according to more than one of the "one dot" groups of C08K5/01 - C08K5/59
    • C08K5/0041Optical brightening agents, organic pigments
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • G02F1/13394Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/67Thin-film transistors [TFT]
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • G02F1/13398Spacer materials; Spacer properties

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
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  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Liquid Crystal (AREA)
  • Polymerisation Methods In General (AREA)
  • Polyurethanes Or Polyureas (AREA)
  • Macromonomer-Based Addition Polymer (AREA)

Abstract

本發明是有關於一種具有間隔件功能的遮光膜用的感光性樹脂組成物。本發明的感光性樹脂組成物包含以下成分作為必須成分:(A)含聚合性不飽和基的鹼可溶性樹脂,其為使分子中具有乙烯性不飽和鍵的多元醇化合物(a)、分子中具有羧基的二醇化合物(b)、二異氰酸酯化合物(c)進行反應而獲得的胺基甲酸酯化合物;(B)具有至少1個乙烯性不飽和鍵的光聚合性單體;(C)光聚合起始劑;(D)選自由黑色有機顏料、混色有機顏料及遮光材所組成的群組中的一種以上遮光成分;及(E)溶劑。The present invention relates to a photosensitive resin composition for a light-shielding film having a spacer function. The photosensitive resin composition of the present invention contains the following components as essential components: (A) an alkali-soluble resin containing a polymerizable unsaturated group, which is a polyol compound (a) having an ethylenically unsaturated bond in the molecule, A urethane compound obtained by reacting a diol compound (b) having a carboxyl group and a diisocyanate compound (c); (B) a photopolymerizable monomer having at least one ethylenically unsaturated bond; (C) Photopolymerization initiator; (D) one or more light-shielding components selected from the group consisting of black organic pigments, color-mixing organic pigments and light-shielding materials; and (E) solvent.

Description

具有間隔件功能的遮光膜用的感光性樹脂組成物、遮光膜、液晶顯示裝置、具有間隔件功能的遮光膜用的感光性樹脂組成物的製造方法、遮光膜的製造方法以及液晶顯示裝置的製造方法Photosensitive resin composition for light-shielding film with spacer function, light-shielding film, liquid crystal display device, method for manufacturing photosensitive resin composition for light-shielding film with spacer function, method for manufacturing light-shielding film, and liquid crystal display device Manufacturing method

本發明是有關於一種具有間隔件功能的遮光膜用的感光性樹脂組成物、以及將其硬化而成的具有間隔件功能的遮光膜,詳細而言,是有關於一種可利用光微影法來形成在液晶顯示裝置中兼具間隔件功能與黑色矩陣功能的黑色管柱間隔件的感光性樹脂組成物及其硬化膜。本發明進而是有關於使用所述硬化而獲得的黑色管柱間隔件的液晶顯示裝置。本發明進而是有關於所述感光性樹脂組成物、遮光膜及液晶顯示裝置的製造方法。The present invention relates to a photosensitive resin composition for a light-shielding film having a spacer function, and a light-shielding film having a spacer function formed by curing the photosensitive resin composition. In detail, it relates to a photolithography method that can be used The photosensitive resin composition and the cured film thereof are formed to form a black column spacer having a spacer function and a black matrix function in a liquid crystal display device. The present invention further relates to a liquid crystal display device using the black column spacer obtained by curing. This invention further relates to the manufacturing method of the said photosensitive resin composition, a light-shielding film, and a liquid crystal display device.

近年來,在液晶電視、液晶監視器、彩色液晶手機等所有領域中使用彩色液晶顯示裝置(Liquid Crystal Display,LCD)。其中,為了LCD的高性能化,積極地進行以提高視角、對比度、響應速度等特性為目的的改善,目前大量使用的薄膜電晶體(Thin Film Transistor,TFT)-LCD中也正在開發多種面板結構。關於TFT-LCD,主要採用如下方法:分別製造形成現有的TFT的陣列基板與彩色濾光片基板,使兩基板以由間隔件來保持固定間隔的狀態而貼合;但也正在開發以低成本化、提高良率為目的的LCD製程。例如,作為在陣列基板的TFT上直接形成彩色濾光片而對向的基板,正在開發貼合玻璃基板的製程。以所述方式形成的結構被稱為TFT上的彩色濾光片(Color Filter On Thin Film Transistor,COT)等。該COT中,也正在對將成為形成於TFT上的彩色濾光片層的紅(R)、綠(G)、藍(B)等各畫素的邊界的黑色矩陣,在RGB形成前形成的方法、或在形成RGB畫素之後形成的方法、或者形成於對向的玻璃基板上的方法等多種LCD面板結構進行研究。In recent years, color liquid crystal displays (LCD) have been used in all fields such as liquid crystal televisions, liquid crystal monitors, and color liquid crystal mobile phones. Among them, in order to improve the performance of LCD, the improvement aimed at improving the viewing angle, contrast, response speed and other characteristics is actively carried out. At present, the thin film transistor (Thin Film Transistor, TFT)-LCD is also developing various panel structures. . Regarding TFT-LCD, the following methods are mainly used: the array substrate and the color filter substrate forming the existing TFT are separately manufactured, and the two substrates are bonded with a fixed interval maintained by spacers; however, they are also being developed at low cost. The LCD manufacturing process for the purpose of improving the yield rate. For example, as a substrate facing the color filter directly formed on the TFT of the array substrate, a process for bonding glass substrates is being developed. The structure formed in this manner is called a color filter on TFT (Color Filter On Thin Film Transistor, COT) or the like. In this COT, the black matrix that will be the boundary of the red (R), green (G), and blue (B) pixels of the color filter layer formed on the TFT is also being formed before the RGB is formed. Various LCD panel structures such as methods, methods of forming after RGB pixels are formed, or methods of forming on opposing glass substrates, have been studied.

關於發揮將影響LCD的性能的其中一個因數即液晶層的厚度(若為現有方法,則為陣列基板與彩色濾光片基板的間隔)保持固定的功能的間隔件,先前,採取夾持固定粒徑的球間隔件的方法。但是,該方法中,通過球間隔件的分散狀態變得不均勻,而存在每個畫素的光的透過量變得不固定的問題。針對該問題,採用通過光微影法來形成管柱間隔件的方法。但是,利用光微影法來形成的管柱間隔件多為透明,此種管柱間隔件中存在如下問題:自傾斜方向入射的光對TFT的電特性造成影響,使顯示品質劣化。針對此種問題,提出了通過光微影法來形成的具有間隔件功能的遮光膜即應用遮光性管柱間隔件的LCD面板結構(專利文獻1)。COT中,也對利用與黑色矩陣相同的材料來形成管柱間隔件的形成所謂黑色管柱間隔件(Black Column Spacer,BCS)的方法進行研究(例如專利文獻2)。Regarding spacers that have the function of keeping one of the factors that affect the performance of the LCD, that is, the thickness of the liquid crystal layer (or the distance between the array substrate and the color filter substrate in the existing method), the spacer has been adopted to hold fixed particles. Diameter ball spacer method. However, in this method, the dispersion state of the ball spacer becomes uneven, and there is a problem that the amount of light transmitted per pixel becomes unstable. In response to this problem, a method of forming column spacers by photolithography is adopted. However, most of the column spacers formed by the photolithography method are transparent. Such column spacers have the following problem: the light incident from an oblique direction affects the electrical characteristics of the TFT and deteriorates the display quality. In response to this problem, a light-shielding film having a spacer function formed by a photolithography method, that is, an LCD panel structure using a light-shielding column spacer has been proposed (Patent Document 1). In COT, a method of forming a so-called black column spacer (BCS) in which column spacers are formed using the same material as the black matrix has also been studied (for example, Patent Document 2).

該遮光性管柱間隔件為了作為間隔件來發揮功能,而需要2 μm~7 μm左右的膜厚。另外,必須能夠在形成有TFT的部位與其他的部位同時形成高度不同的遮光性管柱間隔件。另外,對於遮光性管柱間隔件還要求作為間隔件功能的彈性模數、變形量、彈性復原率等為適當的範圍(專利文獻3)。進而,對於遮光性管柱間隔件還要求改善通過對間隔件添加遮光性成分(著色劑)而引起的硬化性成分的減少、或由著色劑中的雜質等的影響而引起的電特性的損耗等(專利文獻4)。 [現有技術文獻] [專利文獻]In order for the light-shielding column spacer to function as a spacer, a film thickness of about 2 μm to 7 μm is required. In addition, it is necessary to be able to form light-shielding post spacers with different heights at the same time at the location where the TFT is formed and other locations. In addition, for the light-shielding column spacer, the elastic modulus, the amount of deformation, the elastic recovery rate, etc., which function as the spacer, are required to be in an appropriate range (Patent Document 3). Furthermore, for light-shielding column spacers, it is required to improve the reduction of curable components caused by the addition of light-shielding components (colorants) to the spacers, or the loss of electrical characteristics caused by the influence of impurities in the coloring agent. Etc. (Patent Document 4). [Prior Art Document] [Patent Document]

[專利文獻1]日本專利特開平08-234212號公報 [專利文獻2]美國專利申請公開第2009/0303407號說明書 [專利文獻3]日本專利特開2009-031778號公報 [專利文獻4]國際公開第2013/062011號[Patent Document 1] Japanese Patent Laid-Open No. 08-234212 [Patent Document 2] US Patent Application Publication No. 2009/0303407 [Patent Document 3] Japanese Patent Laid-Open No. 2009-031778 [Patent Document 4] International Publication No. 2013/062011

[發明所欲解決的課題] 專利文獻4中雖使用混色有機顏料,但未示出遮光性管柱間隔件的光密度。混色有機顏料與碳黑等無機顏料相比,對低介電常數化有效果,但遮光性低的情況多。另外,間隔件必須同時形成高度不同的間隔件,因此對於遮光性管柱間隔件進而還要求彈性模數、變形量、彈性復原率等機械特性。所述間隔件的形狀或機械特性大幅度受到遮光成分的影響,因此使遮光膜用的感光性樹脂組成物的設計變得困難。因此,使用碳黑或混色有機顏料等的間隔件的形狀或機械特性仍然稱不上充分,需要進一步的改良。[Problem to be Solved by the Invention] Although Patent Document 4 uses mixed color organic pigments, the optical density of the light-shielding column spacer is not shown. Compared with inorganic pigments such as carbon black, mixed-color organic pigments are effective for lowering the dielectric constant, but often have low light-shielding properties. In addition, the spacers must be formed at the same time as spacers with different heights. Therefore, the light-shielding column spacers also require mechanical properties such as elastic modulus, deformation amount, and elastic recovery rate. The shape and mechanical properties of the spacer are greatly affected by the light-shielding component, which makes it difficult to design the photosensitive resin composition for the light-shielding film. Therefore, the shape or mechanical properties of spacers using carbon black or mixed-color organic pigments are still insufficient, and further improvement is required.

另外,如上所述,遮光性管柱間隔件是以2 μm~7 μm左右的膜厚來製造。隨著近年來的液晶顯示元件的小型化,對於遮光性管柱間隔件也期望能夠形成即便膜厚為2 μm~7 μm左右也微細的間隔件形狀。In addition, as described above, the light-shielding column spacer is manufactured with a film thickness of about 2 μm to 7 μm. With the miniaturization of liquid crystal display elements in recent years, it is desirable for the light-shielding column spacer to be able to form a fine spacer shape even if the film thickness is about 2 μm to 7 μm.

本發明是鑒於所述問題點而形成,在於提供一種遮光性及絕緣性高,進而彈性模數、變形量、彈性復原率優異的具有間隔件功能的遮光膜用的感光性樹脂組成物以及使用其來形成的具有間隔件功能的遮光膜以及以該遮光膜作為構成要素的液晶顯示裝置。 [解決課題的手段]The present invention is formed in view of the above-mentioned problems, and is to provide a photosensitive resin composition for a light-shielding film having a spacer function, which has high light-shielding and insulation properties, and excellent elastic modulus, deformation amount, and elastic recovery rate, and use thereof A light-shielding film having a spacer function formed therefrom and a liquid crystal display device using the light-shielding film as a constituent element. [Means to solve the problem]

本發明者們為了解決如上所述的遮光膜用的感光性樹脂組成物中的課題而進行了研究,結果發現,特定的著色劑適合作為目標的遮光膜用的感光性樹脂組成物的遮光成分,從而完成本發明。 (1)本發明為一種具有間隔件功能的遮光膜用的感光性樹脂組成物,其特徵在於包含下述(A)~(E)成分作為必須成分:(A)含聚合性不飽和基的鹼可溶性樹脂,其為使分子中具有乙烯性不飽和鍵的多元醇化合物(a)、分子中具有羧基的二醇化合物(b)、及二異氰酸酯化合物(c)進行反應而獲得的胺基甲酸酯化合物;(B)具有至少1個乙烯性不飽和鍵的光聚合性單體;(C)光聚合起始劑;(D)選自由黑色有機顏料、混色有機顏料及遮光材所組成的群組中的一種以上的遮光成分;以及(E)溶劑。 (2)另外,本發明為如(1)所述的感光性樹脂組成物,其包含鈦黑作為(D)遮光成分。 (3)另外,本發明為如(2)所述的感光性樹脂組成物,其中所述鈦黑的平均二次粒徑為100 nm~300 nm。 (4)另外,本發明為如(1)~(3)中任一項所述的感光性樹脂組成物,其包含黑色有機顏料及/或混色有機顏料作為(D)遮光成分,並且所述黑色有機顏料及/或混色有機顏料的平均二次粒徑為20 nm~500 nm。 (5)另外,本發明為如(1)~(4)中任一項所述的感光性樹脂組成物,其中相對於(A)成分100質量份而包含5質量份~400質量份的(B)成分,相對於(A)成分與(B)成分的合計量100質量份而包含0.1質量份~30質量份的(C)成分,且當將包含光硬化後成為固體成分的(B)成分的(E)成分除外的成分作為固體成分時,在固體成分中包含5質量%~80質量%的(D)成分。 (6)另外,本發明為如(1)~(5)中任一項所述的感光性樹脂組成物,其可形成如下遮光膜:光密度OD為0.5/μm以上、3/μm以下,並且施加10 V電壓時的體積電阻率為1×109 Ω・cm以上,且介電常數為2~10。 (7)另外,本發明為如(1)~(6)中任一項所述的感光性樹脂組成物,其在利用微小硬度計的負荷-除荷試驗中,可形成滿足下述(i)~(iii)的至少一個的遮光膜, (i)斷裂強度為200 mN以上; (ii)彈性復原率為30%以上; (iii)壓縮率為40%以下。 (8)另外,本發明為一種具有間隔件功能的遮光膜,其使如(1)~(7)中任一項所述的感光性樹脂組成物硬化而形成。 (9)另外,本發明為一種液晶顯示裝置,其包括如(8)所述的遮光膜作為黑色管柱間隔件(BCS)。 (10)另外,本發明為如(9)所述的液晶顯示裝置,其更包括薄膜電晶體(TFT)。 (11)另外,本發明為一種具有間隔件功能的遮光膜用的感光性樹脂組成物的製造方法,其在製備使(D)遮光成分在(E)溶劑中分散而成的分散體後,在所述分散體中進而添加(A)含聚合性不飽和基的鹼可溶性樹脂、(B)具有至少1個乙烯性不飽和鍵的光聚合性單體、(C)光聚合起始劑、以及(E)溶劑,進行混合;所述(A)鹼可溶性樹脂為使分子中具有乙烯性不飽和鍵的多元醇化合物(a)、分子中具有羧基的二醇化合物(b)、及二異氰酸酯化合物(c)進行反應而獲得的胺基甲酸酯化合物,且(D)遮光成分為選自由黑色有機顏料、混色有機顏料及遮光材所組成的群組中的一種以上成分。 (12)另外,本發明為如(11)所述的方法,其中(D)遮光成分包含鈦黑。 (13)另外,本發明為如(12)所述的方法,其中在所述分散體中,所述鈦黑的平均二次粒子為100 nm~300 nm。 (14)另外,本發明為如(11)~(13)中任一項所述的方法,其中(D)遮光成分包含黑色有機顏料及/或混色有機顏料,且在所述分散體中,所述黑色有機顏料及/或混色有機顏料的平均二次粒徑為20 nm~500 nm。 (15)另外,本發明為一種形成於基板上的遮光膜的製造方法,其將如(1)~(7)中任一項所述的感光性樹脂組成物塗布於基板上,通過光照射而使所述感光性樹脂組成物硬化。 (16)另外,本發明為如(15)所述的遮光膜的製造方法,其中關於用以將作為遮光膜的光密度設為0.5/μm以上、且小於3/μm的膜厚H1、以及擔負間隔件功能的遮光膜的膜厚H2,當H2為2 μm~7 μm時,同時形成ΔH=H2-H1為0.1~2.9的膜厚H1與膜厚H2的遮光膜。 (17)另外,本發明為一種液晶顯示裝置的製造方法,其將利用如(16)所述的方法來製造的遮光膜作為黑色管柱間隔件。 (18)另外,本發明為如(17)所述的製造方法,其中所述液晶顯示裝置包括薄膜電晶體(TFT)。 [發明的效果]The inventors of the present invention conducted studies in order to solve the above-mentioned problems in the photosensitive resin composition for light-shielding films, and found that a specific coloring agent is suitable as the light-shielding component of the photosensitive resin composition for the light-shielding film. , Thereby completing the present invention. (1) The present invention is a photosensitive resin composition for a light-shielding film having a spacer function, which is characterized by containing the following (A) to (E) components as essential components: (A) containing a polymerizable unsaturated group Alkali-soluble resin, which is a urethane obtained by reacting a polyol compound (a) having an ethylenically unsaturated bond in the molecule, a diol compound having a carboxyl group in the molecule (b), and a diisocyanate compound (c) Ester compound; (B) photopolymerizable monomer with at least one ethylenically unsaturated bond; (C) photopolymerization initiator; (D) selected from black organic pigments, color-mixing organic pigments and light-shielding materials One or more light-shielding components in the group; and (E) solvent. (2) Moreover, this invention is the photosensitive resin composition as described in (1) which contains titanium black as (D) light-shielding component. (3) In addition, the present invention is the photosensitive resin composition as described in (2), wherein the average secondary particle size of the titanium black is 100 nm to 300 nm. (4) In addition, the present invention is the photosensitive resin composition according to any one of (1) to (3), which contains a black organic pigment and/or a color-mixing organic pigment as (D) a light-shielding component, and The average secondary particle size of the black organic pigment and/or the mixed color organic pigment is 20 nm to 500 nm. (5) In addition, the present invention is the photosensitive resin composition according to any one of (1) to (4), which contains 5 parts by mass to 400 parts by mass with respect to 100 parts by mass of (A) component ( B) component, (B) which contains 0.1 to 30 parts by mass of component (C) with respect to 100 parts by mass of the total amount of component (A) and component (B), and which becomes a solid component after light curing When the components other than the (E) component of the component are used as the solid content, the solid content contains 5 mass% to 80 mass% of the (D) component. (6) In addition, the present invention is the photosensitive resin composition according to any one of (1) to (5), which can form a light-shielding film: an optical density OD of 0.5/μm or more and 3/μm or less, And when a voltage of 10 V is applied, the volume resistivity is 1×10 9 Ω·cm or more, and the dielectric constant is 2-10. (7) In addition, the present invention is the photosensitive resin composition according to any one of (1) to (6), which can be formed to satisfy the following (i) in a load-unloading test using a microhardness meter ) To (iii) at least one light-shielding film, (i) breaking strength of 200 mN or more; (ii) elastic recovery rate of 30% or more; (iii) compression rate of 40% or less. (8) In addition, the present invention is a light-shielding film having a spacer function, which is formed by curing the photosensitive resin composition according to any one of (1) to (7). (9) In addition, the present invention is a liquid crystal display device including the light-shielding film as described in (8) as a black column spacer (BCS). (10) In addition, the present invention is the liquid crystal display device as described in (9), which further includes a thin film transistor (TFT). (11) In addition, the present invention is a method for producing a photosensitive resin composition for a light-shielding film having a spacer function, which comprises preparing a dispersion in which (D) a light-shielding component is dispersed in a solvent (E), To the dispersion, (A) an alkali-soluble resin containing polymerizable unsaturated groups, (B) a photopolymerizable monomer having at least one ethylenically unsaturated bond, (C) a photopolymerization initiator, And (E) a solvent, mixed; the (A) alkali-soluble resin is a polyol compound (a) having an ethylenically unsaturated bond in the molecule, a diol compound having a carboxyl group in the molecule (b), and a diisocyanate Compound (c) is a urethane compound obtained by reacting, and (D) the light-shielding component is one or more components selected from the group consisting of black organic pigments, color-mixing organic pigments, and light-shielding materials. (12) In addition, the present invention is the method described in (11), wherein the (D) light-shielding component contains titanium black. (13) In addition, the present invention is the method according to (12), wherein in the dispersion, the average secondary particles of the titanium black are 100 nm to 300 nm. (14) In addition, the present invention is the method according to any one of (11) to (13), wherein (D) the light-shielding component contains a black organic pigment and/or a color-mixing organic pigment, and in the dispersion, The average secondary particle size of the black organic pigment and/or the color-mixing organic pigment is 20 nm to 500 nm. (15) In addition, the present invention is a method of manufacturing a light-shielding film formed on a substrate, which coats the photosensitive resin composition as described in any one of (1) to (7) on the substrate, and irradiates it with light. The photosensitive resin composition is cured. (16) In addition, the present invention is a method of manufacturing a light-shielding film as described in (15), wherein the optical density of the light-shielding film is set to 0.5/μm or more and a film thickness H1 of less than 3/μm, and When the thickness H2 of the light-shielding film that is responsible for the spacer function is 2 μm to 7 μm, a light-shielding film with a film thickness H1 and a film thickness H2 of 0.1-2.9 ΔH=H2-H1 is formed at the same time. (17) In addition, the present invention is a method of manufacturing a liquid crystal display device that uses a light-shielding film manufactured by the method described in (16) as a black column spacer. (18) In addition, the present invention is the manufacturing method described in (17), wherein the liquid crystal display device includes a thin film transistor (TFT). [Effects of the invention]

本發明的遮光膜用的感光性樹脂組成物由於包含特定的著色劑,故而與現有的感光性樹脂組成物相比,能夠在維持遮光性、絕緣性的情況下獲得彈性模數、變形量、彈性復原率優異的硬化物。進而,本發明的遮光膜用的感光性樹脂組成物能夠形成即便膜厚為2 μm~7 μm左右也微細的間隔件形狀。Since the photosensitive resin composition for the light-shielding film of the present invention contains a specific coloring agent, compared with the conventional photosensitive resin composition, the elastic modulus, the amount of deformation, and the amount of deformation can be obtained while maintaining light-shielding and insulating properties. A cured product with excellent elastic recovery rate. Furthermore, the photosensitive resin composition for a light-shielding film of the present invention can be formed into a fine spacer shape even if the film thickness is about 2 μm to 7 μm.

以下,對本發明進行詳細說明。 (A)成分的含聚合性不飽和基的鹼可溶性樹脂是使分子中具有乙烯性不飽和鍵的多元醇化合物(a)、分子中具有羧基的二醇化合物(b)、及二異氰酸酯化合物(c)進行反應而獲得的胺基甲酸酯化合物。Hereinafter, the present invention will be described in detail. (A) The polymerizable unsaturated group-containing alkali-soluble resin of the component is a polyol compound (a) having an ethylenically unsaturated bond in the molecule, a diol compound having a carboxyl group in the molecule (b), and a diisocyanate compound ( c) The urethane compound obtained by the reaction.

該(A)成分的製造中使用的分子中具有乙烯性不飽和鍵的多元醇化合物(a)例如可列舉:分子中具有2個以上醇性羥基及2個以上環氧基的環氧化合物與(甲基)丙烯酸(其為「丙烯酸及/或甲基丙烯酸」的含義)的反應物即環氧基丙烯酸酯化合物。代表性的環氧基(甲基)丙烯酸酯化合物可例示使(甲基)丙烯酸與通式(I)所表示的環氧化合物進行反應而獲得的化合物。 [化1]

Figure 02_image001
其中,通式(I)中,R1 、R2 、R3 及R4 獨立地表示氫原子、碳數1~5的烷基、鹵素原子或苯基,X表示-CO-、-SO2 -、-C(CF3 )2 -、-Si(CH3 )2 -、-CH2 -、-C(CH3 )2 -、-O-、或者茀-9,9-二基或單鍵,m的平均值為0~10、優選為0~4的範圍。The polyol compound (a) having an ethylenically unsaturated bond in the molecule used in the production of the component (A) includes, for example, epoxy compounds having two or more alcoholic hydroxyl groups and two or more epoxy groups in the molecule, and The reactant of (meth)acrylic acid (which means "acrylic acid and/or methacrylic acid") is an epoxy acrylate compound. A representative epoxy (meth)acrylate compound can exemplify a compound obtained by reacting (meth)acrylic acid with an epoxy compound represented by the general formula (I). [化1]
Figure 02_image001
Among them, in the general formula (I), R 1 , R 2 , R 3 and R 4 independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, a halogen atom or a phenyl group, and X represents -CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, or -9,9-diyl or single bond The average value of m is 0-10, preferably 0-4.

提供通式(I)的環氧化合物的雙酚類可列舉:雙(4-羥基苯基)酮、雙(4-羥基-3,5-二甲基苯基)碸、雙(4-羥基苯基)六氟丙烷、雙(4-羥基苯基)二甲基矽烷、雙(4-羥基苯基)甲烷、雙(4-羥基-3,5-二氯苯基)甲烷、2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥基-3,5-二甲基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯基)丙烷、2,2-雙(4-羥基-3-甲基苯基)丙烷、2,2-雙(4-羥基-3-氯苯基)丙烷、雙(4-羥基-3,5-二甲基苯基)醚、9,9-雙(4-羥基苯基)茀、9,9-雙(4-羥基-3-甲基苯基)茀、4,4'-聯苯酚、3,3'-聯苯酚等。這些雙酚類可僅使用一種化合物,也可將多種組合使用。其中,可優選使用通式(I)中的X為丙烷-2,2-二基的雙酚類。The bisphenols that provide the epoxy compound of the general formula (I) include: bis(4-hydroxyphenyl) ketone, bis(4-hydroxy-3,5-dimethylphenyl) sulfide, bis(4-hydroxy) Phenyl) hexafluoropropane, bis(4-hydroxyphenyl)dimethylsilane, bis(4-hydroxyphenyl)methane, bis(4-hydroxy-3,5-dichlorophenyl)methane, 2,2 -Bis(4-hydroxyphenyl)propane, 2,2-bis(4-hydroxy-3,5-dimethylphenyl)propane, 2,2-bis(4-hydroxy-3,5-dichlorobenzene) Yl)propane, 2,2-bis(4-hydroxy-3-methylphenyl)propane, 2,2-bis(4-hydroxy-3-chlorophenyl)propane, bis(4-hydroxy-3,5 -Dimethylphenyl) ether, 9,9-bis(4-hydroxyphenyl) sulfone, 9,9-bis(4-hydroxy-3-methylphenyl) sulfone, 4,4'-biphenol, 3,3'-Biphenol, etc. These bisphenols may use only one kind of compound, and may also use multiple types in combination. Among them, bisphenols in which X in the general formula (I) is propane-2,2-diyl can be preferably used.

通式(I)的化合物是使所述雙酚類與表氯醇進行反應而獲得的具有(m+2)個以上的醇性羥基以及2個縮水甘油基醚基的環氧化合物。該反應時,通常伴隨著二縮水甘油醚化合物的寡聚物化,m在各個分子中為0~10的整數,由於通常混在多個值的分子,故而平均值成為0~10(並不限於整數),但優選的m的平均值為0~4。若m的平均值超過上限值,則當形成利用使用該環氧化合物來合成的鹼可溶性樹脂的感光性樹脂組成物時,組成物的黏度變得過大,無法順利地進行塗敷,或無法充分地賦予鹼可溶性,鹼顯影性變得非常差。The compound of the general formula (I) is an epoxy compound having (m+2) or more alcoholic hydroxyl groups and two glycidyl ether groups obtained by reacting the bisphenols with epichlorohydrin. This reaction is usually accompanied by oligomerization of the diglycidyl ether compound, and m is an integer of 0-10 in each molecule. Since it is usually mixed in molecules of multiple values, the average value becomes 0-10 (not limited to integers). ), but the preferred average value of m is 0-4. If the average value of m exceeds the upper limit, when a photosensitive resin composition is formed using an alkali-soluble resin synthesized using the epoxy compound, the viscosity of the composition becomes too large, and the coating cannot be smoothly applied or cannot The alkali solubility is sufficiently imparted, and the alkali developability becomes very poor.

環氧基(甲基)丙烯酸酯的製造中使用的環氧化合物的通式(I)的化合物以外的例子可列舉:通式(I)的化合物的苯環經氫化而成為環己烷環的化合物群組、或使分子中具有2個以上酚性羥基的酚化合物與表氯醇進行反應而獲得的環氧化合物群組。Examples of epoxy compounds used in the production of epoxy (meth)acrylates other than the compound of general formula (I) include: the benzene ring of the compound of general formula (I) is hydrogenated to become a cyclohexane ring A compound group or an epoxy compound group obtained by reacting a phenol compound having two or more phenolic hydroxyl groups in the molecule with epichlorohydrin.

關於使分子中具有2個以上酚性羥基的酚化合物與表氯醇進行反應而獲得的環氧化合物,例如可列舉通式(II)的化合物。 [化2]

Figure 02_image003
其中,通式(II)中,Y及Z表示苯骨架、萘骨架、或者聯苯骨架,G表示縮水甘油基。l表示1或2,n表示以平均值計為1~5的數。Regarding the epoxy compound obtained by reacting a phenol compound having two or more phenolic hydroxyl groups in the molecule with epichlorohydrin, for example, a compound of the general formula (II) can be cited. [化2]
Figure 02_image003
Among them, in the general formula (II), Y and Z represent a benzene skeleton, a naphthalene skeleton, or a biphenyl skeleton, and G represents a glycidyl group. l represents 1 or 2, and n represents a number from 1 to 5 on average.

環氧基(甲基)丙烯酸酯中使用的環氧化合物的環氧當量宜為100~500,若環氧當量小於100,則形成(A)含聚合性不飽和基的鹼可溶性樹脂時的分子量小,成膜可能變得困難,存在膜變脆的顧慮。另外,在環氧當量超過500的情況下,每1分子的聚合性不飽和基的含有率變小,無法充分地獲得作為感光性樹脂的感度。The epoxy equivalent of the epoxy compound used in the epoxy (meth)acrylate is preferably 100 to 500. If the epoxy equivalent is less than 100, the molecular weight when (A) an alkali soluble resin containing polymerizable unsaturated groups is formed Small, film formation may become difficult, and there is a concern that the film becomes brittle. In addition, when the epoxy equivalent exceeds 500, the content rate of the polymerizable unsaturated group per molecule becomes small, and the sensitivity as a photosensitive resin cannot be sufficiently obtained.

繼而,(A)成分的製造中使用的分子中具有羧基的二醇化合物(b)若為在分子中同時具有2個醇性羥基與1個以上羧基的化合物,則並無特別限定,可優選使用二羥甲基丙酸、二羥甲基丁酸。另外,也可列舉三官能以上的多元醇化合物與多元酸酐的反應產物等。這些具有羧基的二醇化合物可僅使用一種化合物,也可將多種組合使用。Furthermore, the diol compound (b) having a carboxyl group in the molecule used in the production of the component (A) is not particularly limited as long as it is a compound having two alcoholic hydroxyl groups and one or more carboxyl groups in the molecule. Use dimethylol propionic acid and dimethylol butyric acid. In addition, a reaction product of a trifunctional or higher polyol compound and a polybasic acid anhydride can also be cited. These diol compounds having a carboxyl group may be used alone or in combination of multiple types.

接著,(A)成分的製造中使用的二異氰酸酯化合物(c)若為分子中具有2個異氰酸酯基的化合物,則並無特別限定,但為了形成柔軟性等優異的胺基甲酸酯化合物,優選使用:苯二異氰酸酯、甲苯二異氰酸酯、二苯基甲烷二異氰酸酯、六亞甲基二異氰酸酯、二環己基甲烷二異氰酸酯、異佛爾酮二異氰酸酯、伸芳基碸醚二異氰酸酯、降冰片烷-二氰酸甲酯等,這些化合物中,可優選使用異佛爾酮二異氰酸酯或三甲基六亞甲基二異氰酸酯。可將這些化合物單獨使用,也可同時使用兩種以上的化合物。Next, the diisocyanate compound (c) used in the production of the component (A) is not particularly limited as long as it is a compound having two isocyanate groups in the molecule, but in order to form a urethane compound excellent in flexibility, etc. Preferably used: phenylene diisocyanate, toluene diisocyanate, diphenylmethane diisocyanate, hexamethylene diisocyanate, dicyclohexylmethane diisocyanate, isophorone diisocyanate, aryl ether diisocyanate, norbornane -Methyl dicyanate, etc. Among these compounds, isophorone diisocyanate or trimethylhexamethylene diisocyanate can be preferably used. These compounds may be used alone, or two or more compounds may be used at the same time.

在(a)成分為具有乙烯性不飽和鍵的二醇化合物的情況下,製造(A)成分時的(a)、(b)、(c)各成分的組成優選為莫耳比[(a)+(b)]/(c)的值為1~5。在莫耳比小於1的情況下,會在通過反應而獲得的化合物的末端殘存異氰酸酯基,存在凝膠化的顧慮,因此並不優選,在莫耳比超過5的情況下,所獲得的含聚合性不飽和基的鹼可溶性樹脂的分子量變小,形成感光性樹脂組成物時無法充分地獲得感度,或在成膜時產生黏性的問題。When the component (a) is a diol compound having an ethylenically unsaturated bond, the composition of each component (a), (b), and (c) when the component (A) is produced is preferably molar ratio [(a )+(b)]/(c) is 1~5. When the molar ratio is less than 1, the isocyanate group may remain at the end of the compound obtained by the reaction, which may cause gelation. Therefore, it is not preferable. When the molar ratio exceeds 5, the obtained content The molecular weight of the alkali-soluble resin of the polymerizable unsaturated group becomes small, and sufficient sensitivity cannot be obtained when forming a photosensitive resin composition, or a problem of viscosity occurs during film formation.

此外,也可形成將(b)成分的一部分置換為分子中不具有乙烯性不飽和鍵或羧基的二醇化合物(d)來進行反應而成的(A)成分。(d)成分的例子可列舉:(聚)乙二醇、(聚)丙二醇、1,4-丁二醇、1,6-己二醇等脂肪族二醇化合物,或環己烷-1,4,-二醇、環己烷-1,4-二甲醇等脂環式二醇等。In addition, it is also possible to form the component (A) obtained by substituting a part of the component (b) with a diol compound (d) that does not have an ethylenically unsaturated bond or a carboxyl group in the molecule and reacting. (D) Examples of components include: (poly)ethylene glycol, (poly)propylene glycol, 1,4-butanediol, 1,6-hexanediol, and other aliphatic diol compounds, or cyclohexane-1, Alicyclic diols such as 4,-diol, cyclohexane-1,4-dimethanol, etc.

作為(A)成分的反應條件,於在無溶劑或者不具有醇性羥基的溶劑中(例如由乙二醇等製造的二醇醚類、丙二醇單甲醚乙酸酯、丁基溶纖劑乙酸酯等酯類等)中添加既定量的(a)、(b)、視需要的(d)成分來進行混合、攪拌的反應器內,緩緩地添加(c)成分後,進行反應溫度為40℃~120℃、反應時間約為5小時~60小時的反應,藉此獲得作為(A)成分的具有乙烯性不飽和鍵的鹼可溶性樹脂。The reaction conditions for component (A) are in a solvent-free or non-alcoholic solvent (for example, glycol ethers made from ethylene glycol, etc., propylene glycol monomethyl ether acetate, butyl cellosolve acetate In the reactor where a predetermined amount of (a), (b), and (d) components are added as necessary to mix and stir, slowly add (c) component, and the reaction temperature is 40 A reaction at a temperature of about 5 to 60 hours at a temperature of 120° C. and a reaction time of about 5 hours to 60 hours yields an alkali-soluble resin having an ethylenically unsaturated bond as the component (A).

例如在(a)成分為使通式(I)所表示的環氧化合物與(甲基)丙烯酸進行反應而成的環氧基(甲基)丙烯酸酯的情況下,所獲得的具有乙烯性不飽和鍵的鹼可溶性樹脂的基本骨架可由通式(III)及通式(IV)所表示。此時所獲得的鹼可溶性樹脂為該兩種結構基本上無規地鍵結而成的樹脂,也可包含一部分結構不同的骨架。 [化3]

Figure 02_image005
其中,通式(III)中,R5 獨立地表示氫原子或者甲基,J表示環氧化合物的環氧基除外的殘基,L表示二異氰酸酯化合物的異氰酸酯基除外的殘基,p表示10~100的數。 [化4]
Figure 02_image007
其中,通式(IV)中,L表示二異氰酸酯化合物的異氰酸酯基除外的殘基,M表示碳數1~5的三元烷基,q表示10~100的數。For example, when the (a) component is an epoxy (meth)acrylate obtained by reacting an epoxy compound represented by the general formula (I) with (meth)acrylic acid, the obtained has an ethylenic non- The basic skeleton of the saturated bond alkali-soluble resin can be represented by the general formula (III) and the general formula (IV). The alkali-soluble resin obtained at this time is a resin in which the two structures are basically randomly bonded, and may include a part of skeletons with different structures. [化3]
Figure 02_image005
Among them, in the general formula (III), R 5 independently represents a hydrogen atom or a methyl group, J represents a residue other than the epoxy group of the epoxy compound, L represents a residue other than the isocyanate group of the diisocyanate compound, and p represents 10 The number of ~100. [化4]
Figure 02_image007
However, in the general formula (IV), L represents a residue other than the isocyanate group of the diisocyanate compound, M represents a trivalent alkyl group with 1 to 5 carbon atoms, and q represents a number from 10 to 100.

進而,可通過使該反應中獲得的含乙烯性不飽和基的鹼可溶性樹脂中所殘存的末端醇性羥基與酸酐(e)進行反應,來調整(A)成分的酸值。Furthermore, the acid value of (A) component can be adjusted by making the terminal alcoholic hydroxyl group remaining in the ethylenically unsaturated group-containing alkali-soluble resin obtained by this reaction react with acid anhydride (e).

該用於調整酸值的酸酐(e)例如可列舉:順丁烯二酸酐、丁二酸酐、衣康酸酐、鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、偏苯三甲酸酐、四氫偏苯三甲酸酐、六氫偏苯三甲酸酐等。The acid anhydride (e) for adjusting the acid value includes, for example, maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, and hexahydrophthalic anhydride , Trimellitic anhydride, tetrahydrotrimellitic anhydride, hexahydrotrimellitic anhydride, etc.

(A)的鹼可溶性樹脂的通過凝膠滲透層析法(Gel Permeation Chromatography,GPC)測定而得的聚苯乙烯換算的重量平均分子量(Mw)通常為2000~50000,優選為5000~20000。在重量平均分子量小於2000的情況下,存在鹼顯影時的圖案的密合性下降的顧慮,在重量平均分子量超過50000的情況下,存在顯影性顯著下降的顧慮。The weight average molecular weight (Mw) in terms of polystyrene of the alkali-soluble resin of (A) measured by Gel Permeation Chromatography (GPC) is usually 2,000 to 50,000, and preferably 5,000 to 20,000. When the weight average molecular weight is less than 2000, there is a concern that the adhesion of the pattern during alkali development may decrease, and when the weight average molecular weight exceeds 50,000, there is a concern that the developability is significantly reduced.

另外,(A)的鹼可溶性樹脂的酸值的優選範圍為80 mgKOH/g~120 mgKOH/g。若該值小於80 mgKOH/g,則在鹼顯影時容易殘留殘渣,若超過120 mgKOH/g,則鹼顯影液的滲透變得過快,引起剝離顯影,因此均不優選。此外,(A)含聚合性不飽和基的鹼可溶性樹脂可僅使用其中一種,也可使用兩種以上的混合物。Moreover, the preferable range of the acid value of the alkali-soluble resin of (A) is 80 mgKOH/g-120 mgKOH/g. If the value is less than 80 mgKOH/g, residues are likely to remain during alkali development, and if it exceeds 120 mgKOH/g, the penetration of the alkali developer becomes too fast, causing peeling and development, which is not preferable. In addition, (A) the polymerizable unsaturated group-containing alkali-soluble resin may use only one kind of these, or may use a mixture of two or more kinds.

繼而,(B)具有至少1個乙烯性不飽和鍵的光聚合性單體例如可列舉:(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸2-羥基己酯等具有羥基的(甲基)丙烯酸酯類,或乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、四亞甲基二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基乙烷三(甲基)丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇四(甲基)丙烯酸酯、丙三醇(甲基)丙烯酸酯、山梨糖醇五(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、或者二季戊四醇六(甲基)丙烯酸酯、山梨糖醇六(甲基)丙烯酸酯、磷腈的環氧烷改性六(甲基)丙烯酸酯、己內酯改性二季戊四醇六(甲基)丙烯酸酯等(甲基)丙烯酸酯類,季戊四醇、二季戊四醇等多元醇類,苯酚酚醛清漆等多元酚類的乙烯基苄基醚化合物,二乙烯基苯等二乙烯基化合物類的加成聚合體等。這些(B)具有至少1個乙烯性不飽和鍵的光聚合性單體可僅使用一種化合物,也可將多種組合使用。此外,(B)具有至少1個乙烯性不飽和鍵的光聚合性單體不具有游離的羧基。Then, (B) the photopolymerizable monomer having at least one ethylenically unsaturated bond includes, for example, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, and (meth) (Meth)acrylates having hydroxyl groups such as 2-hydroxyhexyl acrylate, or ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, triethylene glycol di(meth) ) Acrylate, tetraethylene glycol di(meth)acrylate, tetramethylene glycol di(meth)acrylate, trimethylolpropane tri(meth)acrylate, trimethylolethane tri (Meth)acrylate, pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol tetra(meth)acrylate, glycerol (meth)acrylate ) Acrylate, sorbitol penta(meth)acrylate, dipentaerythritol penta(meth)acrylate, or dipentaerythritol hexa(meth)acrylate, sorbitol hexa(meth)acrylate, phosphazene Alkylene oxide modified hexa(meth)acrylate, caprolactone modified dipentaerythritol hexa(meth)acrylate and other (meth)acrylates, pentaerythritol, dipentaerythritol and other polyols, phenol novolac, etc. Vinyl benzyl ether compounds of phenols, addition polymers of divinyl compounds such as divinylbenzene, etc. These (B) photopolymerizable monomers having at least one ethylenically unsaturated bond may use only one kind of compound or a combination of multiple kinds. In addition, (B) the photopolymerizable monomer having at least one ethylenically unsaturated bond does not have a free carboxyl group.

相對於(A)成分100質量份,(B)成分的調配比例宜為5質量份~400質量份,優選為10質量份~150質量份為宜。若相對於(A)成分100質量份,(B)成分的調配比例多於400質量份,則光硬化後的硬化物變脆,另外,由於未曝光部中塗膜的酸值低,故而對鹼顯影液的溶解性下降,產生圖案邊緣帶有鋸齒而不清晰的問題。另一方面,若相對於(A)成分100質量份,(B)成分的調配比例少於5質量份,則光反應性官能基在樹脂中所占的比例少,交聯結構的形成不充分,進而,由於樹脂成分的酸值高,故而曝光部的對鹼顯影液的溶解性提高,因此存在產生如下問題的顧慮:所形成的圖案變得比目標線寬細,或容易產生圖案的脫落。The blending ratio of the component (B) is preferably 5 parts by mass to 400 parts by mass, and preferably 10 parts by mass to 150 parts by mass relative to 100 parts by mass of the component (A). If the blending ratio of (B) component is more than 400 parts by mass relative to 100 parts by mass of (A) component, the cured product after photocuring becomes brittle, and the acid value of the coating film in the unexposed area is low. The solubility of the alkaline developer decreases, causing the problem of jagged edges of the pattern and unclearness. On the other hand, if the blending ratio of component (B) is less than 5 parts by mass relative to 100 parts by mass of component (A), the proportion of photoreactive functional groups in the resin is small, and the formation of a crosslinked structure is insufficient Furthermore, since the acid value of the resin component is high, the solubility of the exposed part in the alkali developer is improved, so there is a concern that the formed pattern becomes thinner than the target line width, or the pattern is likely to fall off .

另外,(C)成分的光聚合起始劑例如可列舉:苯乙酮、2,2-二乙氧基苯乙酮、對二甲基苯乙酮、對二甲基胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、對第三丁基苯乙酮等苯乙酮類,二苯甲酮、2-氯二苯甲酮、p,p'-雙二甲基胺基二苯甲酮等二苯甲酮類,苄基、安息香、安息香甲醚、安息香異丙醚、安息香異丁醚等安息香醚類,2-(鄰氯苯基)-4,5-苯基聯咪唑、2-(鄰氯苯基)-4,5-二(間甲氧基苯基)聯咪唑、2-(鄰氟苯基)-4,5-二苯基聯咪唑、2-(鄰甲氧基苯基)-4,5-二苯基聯咪唑、2,4,5-三芳基聯咪唑等聯咪唑系化合物類,2-三氯甲基-5-苯乙烯基-1,3,4-噁二唑、2-三氯甲基-5-(對氰基苯乙烯基)-1,3,4-噁二唑、2-三氯甲基-5-(對甲氧基苯乙烯基)-1,3,4-噁二唑等鹵甲基二唑化合物類,2,4,6-三(三氯甲基)-1,3,5-三嗪、2-甲基-4,6-雙(三氯甲基)-1,3,5-三嗪、2-苯基-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-氯苯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基萘基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(3,4,5-三甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲基硫代苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪等鹵甲基-均三嗪系化合物類,1,2-辛二酮,1-[4-(苯基硫代)苯基]-,2-(O-苯甲醯基肟)、1-(4-苯基巰基苯基)丁烷-1,2-二酮-2-肟-O-苯甲酸酯、1-(4-甲基巰基苯基)丁烷-1,2-二酮-2-肟-O-乙酸酯、1-(4-甲基巰基苯基)丁烷-1-酮肟-O-乙酸酯、乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(0-乙醯基肟)、甲酮,(9-乙基-6-硝基-9H-咔唑-3-基)[4-(2-甲氧基-1-甲基乙氧基)-2-甲基苯基]-,O-乙醯基肟、甲酮,(2-甲基苯基)(7-硝基-9,9-二丙基-9H-茀-2-基)-,乙醯基肟、乙酮,1-[7-(2-甲基苯甲醯基)-9,9-二丙基-9H-茀-2-基]-,1-(O-乙醯基肟)、乙酮,1-(-9,9-二丁基-7-硝基-9H-茀-2-基)-,1-O-乙醯基肟等O-醯基肟系化合物類,苄基二甲基縮酮、硫雜蒽酮、2-氯硫雜蒽酮、2,4-二乙基硫雜蒽酮、2-甲基硫雜蒽酮、2-異丙基硫雜蒽酮等硫化合物,2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌等蒽醌類,偶氮雙異丁腈、苯甲醯基過氧化物、枯烯過氧化物等有機過氧化物,2-巰基苯并咪唑、2-巰基苯并噁唑、2-巰基苯并噻唑等硫醇化合物等。其中,就容易獲得高感度的遮光膜用的感光性樹脂組成物的觀點而言,優選為使用O-醯基肟系化合物類。這些(C)光聚合起始劑可僅使用一種化合物,也可將多種組合使用。此外,本發明中所謂的光聚合起始劑是以包含增感劑的含義來使用。In addition, the photopolymerization initiator of the component (C) includes, for example, acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropiophenone, and two Acetophenones such as chloroacetophenone, trichloroacetophenone, p-tert-butyl acetophenone, benzophenone, 2-chlorobenzophenone, p,p'-bisdimethylamino two Benzophenones such as benzophenone, benzyl, benzoin, benzoin methyl ether, benzoin isopropyl ether, benzoin isobutyl ether and other benzoin ethers, 2-(o-chlorophenyl)-4,5-phenylbiimidazole , 2-(o-chlorophenyl)-4,5-bis(m-methoxyphenyl)biimidazole, 2-(o-fluorophenyl)-4,5-diphenylbiimidazole, 2-(o-methyl (Oxyphenyl)-4,5-diphenylbiimidazole, 2,4,5-triarylbiimidazole and other biimidazole compounds, 2-trichloromethyl-5-styryl-1,3, 4-oxadiazole, 2-trichloromethyl-5-(p-cyanostyryl)-1,3,4-oxadiazole, 2-trichloromethyl-5-(p-methoxystyrene Yl)-1,3,4-oxadiazole and other halomethyl diazole compounds, 2,4,6-tris(trichloromethyl)-1,3,5-triazine, 2-methyl-4 ,6-bis(trichloromethyl)-1,3,5-triazine, 2-phenyl-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4 -Chlorophenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl) -1,3,5-triazine, 2-(4-methoxynaphthyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methoxy Styryl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(3,4,5-trimethoxystyryl)-4,6-bis( Trichloromethyl)-1,3,5-triazine, 2-(4-methylthiostyryl)-4,6-bis(trichloromethyl)-1,3,5-triazine, etc. Halomethyl-s-triazine compounds, 1,2-octanedione, 1-[4-(phenylthio)phenyl]-, 2-(O-benzyloxime), 1-( 4-Phenylmercaptophenyl)butane-1,2-dione-2-oxime-O-benzoate, 1-(4-methylmercaptophenyl)butane-1,2-dione- 2-oxime-O-acetate, 1-(4-methylmercaptophenyl)butane-1-one oxime-O-acetate, ethyl ketone, 1-[9-ethyl-6-(2 -Methylbenzyl)-9H-carbazol-3-yl)-,1-(0-acetoxyoxime), ketone, (9-ethyl-6-nitro-9H-carbazole- 3-yl)[4-(2-methoxy-1-methylethoxy)-2-methylphenyl]-,O-acetyloxime, ketone, (2-methylphenyl) (7-nitro-9,9-dipropyl-9H-茀-2-yl)-, acetoxime, ethyl ketone, 1-[7-(2-methylbenzyl)-9, 9-Dipropyl-9H-茀-2-yl)-,1-(O-acetyloxime), ethyl ketone, 1-(-9,9-dibutyl-7-nitro-9H-茀-2-base)- ,1-O-Acetyl oxime and other O-acyl oxime compounds, benzyl dimethyl ketal, thioxanthone, 2-chlorothioxanthone, 2,4-diethylthioxanthone Sulfur compounds such as ketone, 2-methylthioxanthone, 2-isopropylthioxanthone, 2-ethylanthraquinone, octamethylanthraquinone, 1,2-benzoanthraquinone, 2,3- Anthraquinones such as diphenylanthraquinone, organic peroxides such as azobisisobutyronitrile, benzoyl peroxide, cumene peroxide, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole , 2-mercaptobenzothiazole and other mercaptan compounds. Among them, from the viewpoint of easily obtaining a photosensitive resin composition for a high-sensitivity light-shielding film, it is preferable to use O-acetoxime-based compounds. These (C) photopolymerization initiators may use only one type of compound, or may use multiple types in combination. In addition, the photopolymerization initiator in the present invention is used in the meaning of including a sensitizer.

這些光聚合起始劑或增感劑除了可僅單獨使用其中一種以外,也可將兩種以上組合使用。另外,雖然其自身不會作為光聚合起始劑或增感劑而發揮作用,但通過組合使用,也可添加能夠使光聚合起始劑或增感劑的能力增大的化合物。此種化合物例如可列舉若與二苯甲酮組合使用則具有效果的三乙醇胺、三乙基胺等三級胺。These photopolymerization initiators or sensitizers may be used alone or in combination of two or more kinds. In addition, although it does not function as a photopolymerization initiator or sensitizer by itself, it is also possible to add a compound capable of increasing the ability of the photopolymerization initiator or sensitizer by using in combination. Examples of such compounds include tertiary amines such as triethanolamine and triethylamine, which are effective when used in combination with benzophenone.

以(A)成分與(B)成分的合計100質量份為基準,(C)成分的光聚合起始劑的使用量宜為0.1質量份~30質量份,優選為1質量份~25質量份為宜。在(C)成分的調配比例小於0.1質量份的情況下,光聚合的速度變得緩慢,感度下降,另一方面,在超過30質量份的情況下,存在產生如下問題的顧慮:感度過強,成為圖案線寬相對於圖案遮罩而變粗的狀態,無法對於遮罩再現出忠實的線寬,或者圖案邊緣帶有鋸齒而不清晰。Based on 100 parts by mass of the total of (A) component and (B) component, the usage amount of the photopolymerization initiator of (C) component is preferably 0.1 to 30 parts by mass, preferably 1 to 25 parts by mass Appropriate. When the blending ratio of (C) component is less than 0.1 parts by mass, the speed of photopolymerization becomes slow and sensitivity decreases. On the other hand, when it exceeds 30 parts by mass, there is a concern that the following problems may occur: too strong sensitivity , The pattern line width becomes thicker relative to the pattern mask, and the faithful line width cannot be reproduced for the mask, or the pattern edges are jagged and unclear.

(D)成分為選自黑色有機顏料、混色有機顏料及遮光材中的遮光成分,宜為絕緣性、耐熱性、耐光性及耐溶劑性優異者。此處,黑色有機顏料例如可列舉:苝黑(perylene black)、苯胺黑(aniline black)、花青黑(cyanine black)、內醯胺黑(lactam black)等。混色有機顏料可列舉將選自紅、藍、綠、紫、黃色、花青、洋紅等中的兩種以上顏料混合而模擬黑色化者。遮光材可列舉碳黑、氧化鉻、氧化鐵、鈦黑等。這些(D)遮光成分可僅使用一種化合物,也可將多種組合使用。The component (D) is a light-shielding component selected from black organic pigments, mixed-color organic pigments, and light-shielding materials, and is preferably one having excellent insulation, heat resistance, light resistance, and solvent resistance. Here, black organic pigments include, for example, perylene black, aniline black, cyanine black, lactam black, and the like. Examples of the mixed-color organic pigments include those that mix two or more kinds of pigments selected from red, blue, green, purple, yellow, cyanine, magenta, and the like to simulate blackening. Examples of the light-shielding material include carbon black, chromium oxide, iron oxide, and titanium black. These (D) light-shielding components may use only one compound, and may use multiple types in combination.

作為遮光材,就遮光性、彈性模數、變形量、彈性復原率良好的方面而言,優選為鈦黑。在使用鈦黑的情況下,出於進一步提高絕緣性的目的,也可將黑色有機顏料及/或混色有機顏料併用。如上所述,在將無機系的遮光材與有機顏料併用的情況下,[遮光材/(黑色有機顏料及/或混色有機顏料)]的調配比以質量比計宜為90/10~10/90,優選為70/30~30/70為宜。根據所述遮光材與有機顏料的組合以及它們的調配比,可獲得具有所需的遮光性、絕緣性等特性的具有間隔件功能的遮光膜。出於欲使遮光膜成為無彩色的控制遮光膜的色度等目的,並不是使黑色以外的有機顏料成為通過模擬混色而得的黑色的目的,也可作為單色來添加。As the light-shielding material, titanium black is preferable in terms of good light-shielding properties, elastic modulus, deformation amount, and elastic recovery rate. In the case of using titanium black, for the purpose of further improving insulation, black organic pigments and/or mixed color organic pigments may be used in combination. As described above, when an inorganic light-shielding material is used in combination with an organic pigment, the blending ratio of [light-shielding material/(black organic pigment and/or mixed-color organic pigment)] should be 90/10 to 10/ in mass ratio. 90, preferably 70/30 to 30/70. According to the combination of the light-shielding material and the organic pigment and their blending ratio, a light-shielding film having a spacer function with required properties such as light-shielding and insulation can be obtained. For the purpose of controlling the chromaticity of the light-shielding film in order to make the light-shielding film achromatic, it is not the purpose of making organic pigments other than black black obtained by pseudo-color mixing, but may be added as a single color.

本發明中使用的鈦黑為低價氧化鈦、氮氧化鈦等所代表的含鈦黑色無機顏料,這些無機顏料中可優選使用顯示出高絕緣性者。這些鈦黑的製作方法有:將二氧化鈦與金屬鈦的混合體在還原氣體環境下進行加熱而使其還原的方法(日本專利特開昭49-5432號公報);將通過四氯化鈦的高溫水解而獲得的超微細二氧化鈦在包含氫的還原氣體環境下進行還原的方法(日本專利特開昭57-205322號公報);將二氧化鈦或氫氧化鈦在氨存在下進行高溫還原的方法(日本專利特開昭60-65069號公報、日本專利特開昭61-201610號公報);使二氧化鈦或者氫氧化鈦上附著釩化合物,在氨存在下進行高溫還原的方法(日本專利特開昭61-201610號公報)等;但並不限定於這些方法。The titanium black used in the present invention is a titanium-containing black inorganic pigment represented by titanium suboxide, titanium oxynitride, and the like. Among these inorganic pigments, those exhibiting high insulation can be preferably used. The production methods of these titanium blacks include: heating a mixture of titanium dioxide and metallic titanium in a reducing gas environment to reduce it (Japanese Patent Laid-Open No. 49-5432); and passing the high temperature of titanium tetrachloride A method of reducing the ultrafine titanium dioxide obtained by hydrolysis in a reducing gas atmosphere containing hydrogen (Japanese Patent Laid-Open No. 57-205322); a method of reducing titanium dioxide or titanium hydroxide at high temperature in the presence of ammonia (Japanese Patent Japanese Patent Laid-Open No. 60-65069 and Japanese Patent Laid-Open No. 61-201610); a method of attaching a vanadium compound to titanium dioxide or titanium hydroxide and performing high-temperature reduction in the presence of ammonia (Japanese Patent Laid-Open No. 61-201610 No. Bulletin) etc.; but not limited to these methods.

另外,這些含鈦黑色無機顏料也可以是在無機粒子表面上被覆著有機化合物或者無機化合物者。用於被覆的有機化合物的例子有:多元醇、烷醇胺或其衍生物,有機矽化合物(聚矽氧烷類、矽烷系偶聯劑等),高級脂肪酸或其金屬鹽,有機金屬化合物(鈦系偶聯劑、鋁系偶聯劑等)等。另一方面,用於被覆的無機化合物的例子可列舉:鋁化合物、矽化合物、鋯化合物、錫化合物、鈦化合物、銻化合物等。該含鈦粒子的表面被覆的方法可使用日本專利特開2006-206891中記載的方法等。In addition, these titanium-containing black inorganic pigments may be those coated with an organic compound or an inorganic compound on the surface of the inorganic particles. Examples of organic compounds used for coating include: polyols, alkanolamines or their derivatives, organosilicon compounds (polysiloxanes, silane coupling agents, etc.), higher fatty acids or their metal salts, organometallic compounds ( Titanium coupling agent, aluminum coupling agent, etc.) etc. On the other hand, examples of inorganic compounds used for coating include aluminum compounds, silicon compounds, zirconium compounds, tin compounds, titanium compounds, and antimony compounds. As a method of coating the surface of the titanium-containing particles, the method described in JP 2006-206891 and the like can be used.

鈦黑的市售品的例子可列舉:三菱材料製造的鈦黑12S、13M-T、13M-C、UF8,赤穗化成製造的提拉克(Tilack)D(「提拉克(Tilack)D」為該公司的註冊商標)等。Examples of commercially available titanium black products include: Titanium Black 12S, 13M-T, 13M-C, UF8 manufactured by Mitsubishi Materials, and Tilack D manufactured by Ako Chemicals ("Tilack D" is The company’s registered trademark), etc.

本發明中使用的有機顏料可無特別限制地使用公知的化合物,優選為經微粒化的加工且利用布魯諾-埃梅特-特勒爾(Brunauer-Emmett-Teller,BET)法而得的比表面積為50 m2 /g以上的化合物。具體而言可列舉:偶氮(azo)顏料、縮合偶氮顏料、偶氮甲鹼(azomethine)顏料、酞菁(phthalocyanine)顏料、喹吖啶酮(quinacridone)顏料、異吲哚啉酮(isoindolinone)顏料、異吲哚啉(isoindoline)顏料、二噁嗪(dioxazine)顏料、還原(threne)顏料、苝(perylene)顏料、紫環酮(perinone)顏料、喹酞酮(quinophthalone)顏料、二酮基吡咯并吡咯(diketopyrrolopyrrole)顏料、硫靛(thioindigo)顏料等,具體而言,可列舉如以下所述的顏料索引(color index,C.I.)名的化合物,但並不限定於這些化合物。The organic pigment used in the present invention can be any known compound without particular limitation, and preferably is a specific surface area obtained by a micronization process and a Brunauer-Emmett-Teller (Brunauer-Emmett-Teller, BET) method It is a compound of 50 m 2 /g or more. Specific examples include: azo pigments, condensed azo pigments, azomethine pigments, phthalocyanine pigments, quinacridone pigments, isoindolinone ) Pigments, isoindoline (isoindoline) pigments, dioxazine (dioxazine) pigments, reduction (threne) pigments, perylene (perylene) pigments, perinone pigments, quinophthalone pigments, diketones Specific examples of diketopyrrolopyrrole (diketopyrrolopyrrole) pigments, thioindigo (thioindigo) pigments, and the like include compounds with the following color index (CI) names, but are not limited to these compounds.

C.I.顏料・紅2、3、4、5、9、12、14、22、23、31、38、112、122、144、146、147、149、166、168、170、175、176、177、178、179、184、185、187、188、202、207、208、209、210、213、214、220、221、242、247、253、254、255、256、257、262、264、266、272、279等; C.I.顏料・橙5、13、16、34、36、38、43、61、62、64、67、68、71、72、73、74、81等; C.I.顏料・黃1、3、12、13、14、16、17、55、73、74、81、83、93、95、97、109、110、111、117、120、126、127、128、129、130、136、138、139、150、151、153、154、155、173、174、175、176、180、181、183、185、191、194、199、213、214等; C.I.顏料・綠7、36、58等; C.I.顏料・藍15、15:1、15:2、15:3、15:4、15:6、16、60、80等; C.I.顏料・紫19、23、37等。CI Pigment・Red 2, 3, 4, 5, 9, 12, 14, 22, 23, 31, 38, 112, 122, 144, 146, 147, 149, 166, 168, 170, 175, 176, 177, 178, 179, 184, 185, 187, 188, 202, 207, 208, 209, 210, 213, 214, 220, 221, 242, 247, 253, 254, 255, 256, 257, 262, 264, 266, 272, 279, etc.; CI Pigment·Orange 5, 13, 16, 34, 36, 38, 43, 61, 62, 64, 67, 68, 71, 72, 73, 74, 81, etc.; CI Pigment·Yellow 1, 3, 12, 13, 14, 16, 17, 55, 73, 74, 81, 83, 93, 95, 97, 109, 110, 111, 117, 120, 126, 127, 128, 129, 130, 136, 138, 139, 150, 151, 153, 154, 155, 173, 174, 175, 176, 180, 181, 183, 185, 191, 194, 199, 213, 214, etc.; CI Pigment・Green 7, 36, 58 Etc.; CI Pigment・Blue 15, 15:1, 15:2, 15:3, 15:4, 15:6, 16, 60, 80 etc.; CI Pigment・Violet 19, 23, 37 etc.

另外,(E)成分的溶劑例如可列舉:甲醇、乙醇、正丙醇、異丙醇、乙二醇、丙二醇、3-甲氧基-1-丁醇、乙二醇單丁醚、3-羥基-2-丁酮、二丙酮醇等醇類,α-萜品醇或β-萜品醇等萜烯類等,丙酮、甲基乙基酮、環己酮、N-甲基-2-吡咯烷酮等酮類,甲苯、二甲苯、四甲基苯等芳香族烴類,溶纖劑、甲基溶纖劑、乙基溶纖劑、卡必醇、甲基卡必醇、乙基卡必醇、丁基卡必醇、丙二醇單甲醚、丙二醇單乙醚、二丙二醇單甲醚、二丙二醇單乙醚、三乙二醇單甲醚、三乙二醇單乙醚等二醇醚類,乙酸乙酯、乙酸丁酯、乳酸乙酯、乙酸3-甲氧基丁酯、乙酸3-甲氧基-3-丁酯、溶纖劑乙酸酯、乙基溶纖劑乙酸酯、丁基溶纖劑乙酸酯、卡必醇乙酸酯、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等酯類等;通過使用這些溶劑進行溶解、混合,可形成均勻的溶液狀的組成物。為了設為塗布性等必須特性,這些溶劑也可使用兩種以上。In addition, the solvent of (E) component includes, for example, methanol, ethanol, n-propanol, isopropanol, ethylene glycol, propylene glycol, 3-methoxy-1-butanol, ethylene glycol monobutyl ether, 3- Alcohols such as hydroxy-2-butanone and diacetone alcohol, terpenes such as α-terpineol or β-terpineol, acetone, methyl ethyl ketone, cyclohexanone, N-methyl-2- Ketones such as pyrrolidone, aromatic hydrocarbons such as toluene, xylene, tetramethylbenzene, cellosolve, methyl cellosolve, ethyl cellosolve, carbitol, methyl carbitol, ethyl carbitol Alcohol, butyl carbitol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether and other glycol ethers, ethyl acetate Ester, butyl acetate, ethyl lactate, 3-methoxybutyl acetate, 3-methoxy-3-butyl acetate, cellosolve acetate, ethyl cellosolve acetate, butyl cellosolve Acetate, carbitol acetate, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate and other esters; by use These solvents can be dissolved and mixed to form a homogeneous solution-like composition. In order to provide essential characteristics such as coatability, two or more of these solvents may be used.

而且,這些遮光成分優選為預先與(F)分散劑一起分散在溶劑中而形成遮光性分散液,然後調配為遮光膜用的感光性樹脂組成物為宜。此處,分散的溶劑成為(E)成分的一部分,因此若為所述(E)成分中列舉者,則可使用,例如適合使用丙二醇單甲醚乙酸酯、乙酸3-甲氧基丁酯等。關於形成遮光性分散液的(D)遮光成分的調配比例,相對於本發明的遮光膜用的感光性樹脂組成物的總固體成分,宜為在5質量%~80質量%的範圍內使用。此外,所謂所述固體成分是指組成物中(E)成分除外的成分。所述固體成分中也包含在光硬化後成為固體成分的(B)成分。若少於5質量%,則無法設定為所需的遮光性。若超過80質量%,則本來的成為黏合劑的感光性樹脂的含量減少,因此產生不僅損及顯影特性,而且膜形成能力受損的欠佳問題。Furthermore, it is preferable that these light-shielding components are dispersed in a solvent together with the (F) dispersant in advance to form a light-shielding dispersion liquid, and then formulated as a photosensitive resin composition for a light-shielding film. Here, the dispersed solvent becomes a part of (E) component, so if it is listed in the above (E) component, it can be used. For example, propylene glycol monomethyl ether acetate and 3-methoxybutyl acetate are suitably used. Wait. Regarding the blending ratio of the (D) light-shielding component forming the light-shielding dispersion liquid, it is preferable to use it in the range of 5 mass% to 80 mass% with respect to the total solid content of the photosensitive resin composition for the light-shielding film of the present invention. In addition, the said solid content means the component except (E) component in a composition. The solid component also includes the component (B) which becomes a solid component after photocuring. If it is less than 5% by mass, it cannot be set to the required light-shielding property. If it exceeds 80% by mass, the content of the photosensitive resin originally used as the binder decreases, and therefore, not only the development characteristics are impaired, but also the film forming ability is impaired.

該遮光性分散液中的遮光成分的以雷射繞射・散射式粒徑分析計來測定的平均粒徑(以下稱為「平均二次粒徑」)優選為設為如下所述。使用鈦黑的情況下的鈦黑的平均二次粒徑宜為100 nm~300 nm,在使用黑色有機顏料及/或混色有機顏料、以及/或者單色的有機顏料的情況下,分散粒子的平均二次粒徑宜為20 nm~500 nm。此外,在調配這些遮光性分散液來製備的遮光膜用的感光性樹脂組成物中,這些遮光成分優選為具有相同的平均二次粒徑。The average particle diameter of the light-shielding component in the light-shielding dispersion liquid measured with a laser diffraction/scattering particle size analyzer (hereinafter referred to as "average secondary particle diameter") is preferably as follows. When titanium black is used, the average secondary particle size of titanium black is preferably 100 nm to 300 nm. When black organic pigments and/or mixed color organic pigments and/or monochromatic organic pigments are used, the dispersion of particles The average secondary particle size is preferably 20 nm to 500 nm. In addition, in the photosensitive resin composition for a light-shielding film prepared by blending these light-shielding dispersion liquids, it is preferable that these light-shielding components have the same average secondary particle diameter.

另外,遮光性分散液中,為了使遮光成分穩定地分散而使用(F)分散劑,但出於該目的,可使用各種高分子分散劑等公知的分散劑。分散劑的例子可無特別限制地使用以前用於顏料分散的公知化合物(以分散劑、分散濕潤劑、分散促進劑等名稱來銷售的化合物等),例如可列舉:陽離子性高分子系分散劑、陰離子性高分子系分散劑、非離子性高分子系分散劑、顏料衍生物型分散劑(分散助劑)等。特別優選為陽離子性高分子系分散劑,其具有咪唑基、吡咯基、吡啶基、一級胺基、二級胺基或三級胺基等陽離子性官能基作為對顏料的吸附點,且胺值為1 mgKOH/g~100 mgKOH/g、數量平均分子量在1千~10萬的範圍內。相對於遮光成分,該分散劑的調配量為1質量%~30質量%,優選為2質量%~25質量%。In addition, in the light-shielding dispersion liquid, the (F) dispersant is used in order to stably disperse the light-shielding component, but for this purpose, various known dispersants such as various polymer dispersants can be used. Examples of the dispersant can be used without particular limitation of the well-known compounds previously used for pigment dispersion (compounds sold under the names of dispersant, dispersion wetting agent, dispersion accelerator, etc.), for example: cationic polymer dispersant , Anionic polymer dispersant, nonionic polymer dispersant, pigment derivative dispersant (dispersion aid), etc. Particularly preferred is a cationic polymer dispersant, which has cationic functional groups such as imidazole groups, pyrrolyl groups, pyridyl groups, primary amine groups, secondary amine groups, or tertiary amine groups as adsorption points for pigments, and has an amine value It is 1 mgKOH/g~100 mgKOH/g, and the number average molecular weight is in the range of 1,000~100,000. The blending amount of the dispersant is 1% by mass to 30% by mass, preferably 2% by mass to 25% by mass relative to the light-shielding component.

進而,製備遮光性分散液時,當通過除了所述分散劑以外,還使(A)成分的含聚合性不飽和基的鹼可溶性樹脂的一部分進行共分散,來形成遮光膜用的感光性樹脂組成物時,能夠形成容易將曝光感度維持為高感度、顯影時的密合性良好且殘渣的問題也難以產生的感光性樹脂組成物。(A)成分的調配量優選為遮光性分散液中的2質量%~20質量%,更優選為5質量%~15質量%。若(A)成分小於2質量%,則無法獲得感度提高、密合性提高、殘渣減少等共分散的效果。另外,若為20質量%以上,則特別是在遮光材的含量大時,遮光性分散液的黏度高,均勻分散困難或者非常需要時間,變得難以得到用以獲得均勻分散有遮光成分的塗膜的感光性樹脂組成物。Furthermore, when preparing a light-shielding dispersion, in addition to the dispersant, a part of the polymerizable unsaturated group-containing alkali-soluble resin of the component (A) is co-dispersed to form a photosensitive resin for a light-shielding film In the case of a composition, it is possible to form a photosensitive resin composition that is easy to maintain the exposure sensitivity at high sensitivity, has good adhesion during development, and is hard to cause residue problems. (A) The compounding amount of the component is preferably 2% by mass to 20% by mass in the light-shielding dispersion liquid, and more preferably 5% by mass to 15% by mass. If the (A) component is less than 2% by mass, the effects of co-dispersion such as improved sensitivity, improved adhesion, and reduced residue cannot be obtained. In addition, if it is 20% by mass or more, especially when the content of the light-shielding material is large, the viscosity of the light-shielding dispersion liquid is high, uniform dispersion is difficult or takes a lot of time, and it becomes difficult to obtain a coating with uniformly dispersed light-shielding components. The photosensitive resin composition of the film.

以所述方式獲得的遮光性分散液可通過與(A)成分(在製備遮光性分散液時使(A)成分進行共分散的情況下,為殘留的(A)成分)、(B)成分、(C)成分及殘留的(E)成分進行混合,來形成遮光膜用感光性樹脂組成物。The light-shielding dispersion liquid obtained in the above-mentioned manner can be combined with the component (A) (when the component (A) is co-dispersed during the preparation of the light-shielding dispersion liquid, the remaining component (A)) and the component (B) , (C) component and residual (E) component are mixed, and the photosensitive resin composition for light-shielding films is formed.

另外,本發明的感光性樹脂組成物中,可視需要來調配硬化促進劑、熱聚合抑制劑及抗氧化劑、塑化劑、填充材、溶劑、調平劑、消泡劑、偶聯劑、表面活性劑等添加劑。熱聚合抑制劑及抗氧化劑可列舉:對苯二酚(hydroquinone)、對苯二酚單甲醚(hydroquinone monomethylether)、鄰苯三酚(pyrogallol)、第三丁基鄰苯二酚(tert-butyl catechol)、吩噻嗪(phenothiazine)、受阻酚(hindered phenol)系化合物等,塑化劑可列舉:鄰苯二甲酸二丁酯、鄰苯二甲酸二辛酯、磷酸三甲苯酯等,填充材可列舉:玻璃纖維、二氧化矽、雲母、氧化鋁等,消泡劑或調平劑可列舉:矽酮系、氟系、丙烯酸系的化合物。另外,表面活性劑可列舉:氟系表面活性劑、矽酮系表面活性劑等,偶聯劑可列舉:3-(縮水甘油氧基)丙基三甲氧基矽烷、3-丙烯醯氧基丙基三甲氧基矽烷、3-異氰酸基丙基三乙氧基矽烷、3-脲基丙基三乙氧基矽烷等矽烷偶聯劑。In addition, in the photosensitive resin composition of the present invention, a curing accelerator, a thermal polymerization inhibitor, an antioxidant, a plasticizer, a filler, a solvent, a leveling agent, a defoamer, a coupling agent, and a surface may be blended as necessary. Additives such as active agents. Thermal polymerization inhibitors and antioxidants include: hydroquinone, hydroquinone monomethylether, pyrogallol, tert-butyl catechol (tert-butyl) catechol), phenothiazine, hindered phenol compounds, etc. Plasticizers include: dibutyl phthalate, dioctyl phthalate, tricresyl phosphate, etc., filler Examples include glass fiber, silica, mica, alumina, etc., and examples of defoaming agents or leveling agents include silicone-based, fluorine-based, and acrylic-based compounds. In addition, surfactants include fluorine-based surfactants, silicone-based surfactants, etc., and coupling agents include 3-(glycidoxy)propyltrimethoxysilane, 3-propenoxypropyl Silane coupling agents such as trimethoxysilane, 3-isocyanatopropyltriethoxysilane, 3-ureidopropyltriethoxysilane, etc.

本發明的感光性樹脂組成物也可併用通過熱而聚合或硬化的其他樹脂成分。其他的樹脂成分優選為(G)具有2個以上環氧基的環氧樹脂或環氧化合物,可列舉:3,3’,5,5’-四甲基-4,4’-聯苯酚型環氧樹脂、雙酚A型環氧樹脂、雙酚茀型環氧樹脂、苯酚酚醛清漆型環氧樹脂、3,4-環氧基環己烯基甲基-3,4-環氧基環己烯羧酸酯、2,2-雙(羥基甲基)-1-丁醇的1,2-環氧基-4-(2-環氧乙烷基)環己烷加成物、環氧基矽酮樹脂等。這些追加成分可僅使用一種化合物,也可將多種組合使用。The photosensitive resin composition of the present invention may also use other resin components that are polymerized or cured by heat in combination. Other resin components are preferably (G) epoxy resins or epoxy compounds having two or more epoxy groups, and examples include: 3,3',5,5'-tetramethyl-4,4'-biphenol type Epoxy resin, bisphenol A type epoxy resin, bisphenol phenol type epoxy resin, phenol novolac type epoxy resin, 3,4-epoxycyclohexenylmethyl-3,4-epoxy ring Hexene carboxylate, 1,2-epoxy-4-(2-oxiranyl) cyclohexane adduct of 2,2-bis(hydroxymethyl)-1-butanol, epoxy Base silicone resin, etc. For these additional components, only one compound may be used, or multiple types may be used in combination.

本發明的感光性樹脂組成物含有所述(A)~(E)成分作為主成分。理想為在所述固體成分中包含合計為70質量%、優選為80質量%以上的(A)~(D)成分。(E)溶劑的量根據作為目標的黏度而變化,但宜為以60質量%~90質量%的範圍包含在感光性樹脂組成物中。The photosensitive resin composition of this invention contains the said (A)-(E) component as a main component. It is desirable to include (A) to (D) components in a total of 70% by mass, preferably 80% by mass or more in the solid content. (E) The amount of the solvent changes according to the target viscosity, but it is preferably contained in the photosensitive resin composition in the range of 60% by mass to 90% by mass.

本發明的遮光膜用的感光性樹脂組成物作為用以形成例如具有間隔件功能的遮光膜的感光性樹脂組成物而優異。具有間隔件功能的遮光膜的形成方法有如以下所述的光微影法。可列舉如下方法:首先,將本發明的遮光膜用的感光性樹脂組成物塗布於基材上,繼而使溶媒乾燥(預烘烤)後,在以所述方式獲得的被膜上放上光罩,照射紫外線而使曝光部硬化,進而使用鹼水溶液來進行使未曝光部溶出的顯影而形成圖案,進而進行後烘烤(熱煅燒)來作為後乾燥。The photosensitive resin composition for a light-shielding film of the present invention is excellent as a photosensitive resin composition for forming a light-shielding film having a spacer function, for example. The method of forming a light shielding film having a spacer function includes the photolithography method described below. The following methods can be cited: first, the photosensitive resin composition for the light-shielding film of the present invention is coated on a substrate, and then the solvent is dried (pre-baked), and then a photomask is placed on the film obtained in the manner described above , The exposed part is irradiated with ultraviolet rays to harden the exposed part, the unexposed part is further eluted using an aqueous alkali solution to form a pattern, and then post-baking (thermal calcination) is performed as post-drying.

所述基材可為透明基板,也可以是在形成RGB等畫素後,在畫素上、或者畫素上的平坦化膜上、或者畫素上的平坦化膜上製膜而成的配向膜等透明基板以外的基材。在哪一種基材上形成具有間隔件功能的遮光膜,根據液晶顯示裝置的設計而不同。The substrate may be a transparent substrate, or an alignment film formed on the pixel, or on the flattening film on the pixel, or on the flattening film on the pixel after pixels such as RGB are formed Base materials other than transparent substrates. The type of substrate on which the light-shielding film with the spacer function is formed depends on the design of the liquid crystal display device.

塗布感光性樹脂組成物的透明基板除了玻璃基板以外,還可例示在透明膜(例如聚碳酸酯、聚對苯二甲酸乙二酯、聚醚碸等)上蒸鍍或圖案化有氧化銦錫(indium tin oxide,ITO)或金等透明電極者等。在透明基板上塗布感光性樹脂組成物的溶液的方法除了公知的溶液浸漬法、噴射法以外,也可採用使用輥塗布機、蘭德(Land)塗布機、狹縫塗布機或旋轉機的方法等任一種方法。利用這些方法,塗布為所需的厚度後,去除溶劑(預烘烤),藉此形成被膜。預烘烤是通過利用烘箱、加熱板等進行加熱來進行。預烘烤中的加熱溫度及加熱時間是根據所使用的溶劑來適當選擇,例如在60℃~110℃的溫度下進行1分鐘~3分鐘。In addition to the glass substrate, the transparent substrate coated with the photosensitive resin composition can also be exemplified by vapor-deposited or patterned indium tin oxide on a transparent film (for example, polycarbonate, polyethylene terephthalate, polyether oxide, etc.) (Indium tin oxide, ITO) or transparent electrodes such as gold. In addition to the well-known solution immersion method and spray method, the method of coating the solution of the photosensitive resin composition on the transparent substrate can also be a method using a roll coater, a land coater, a slit coater, or a rotary machine. Wait for either method. Using these methods, after coating to a desired thickness, the solvent is removed (pre-baking) to form a film. Pre-baking is performed by heating with an oven, a hot plate, etc. The heating temperature and heating time in the prebaking are appropriately selected according to the solvent to be used, and for example, it is performed at a temperature of 60°C to 110°C for 1 minute to 3 minutes.

在預烘烤後進行的曝光是利用紫外線曝光裝置來進行,通過經由光罩進行曝光,而僅使與圖案對應的部分的抗蝕劑進行感光。適當選擇曝光裝置及其曝光照射條件,使用超高壓水銀燈、高壓水銀燈、金屬鹵化物燈、遠紫外線燈等光源進行曝光,使塗膜中的感光性樹脂組成物進行光硬化。The exposure performed after the prebaking is performed using an ultraviolet exposure device, and by performing exposure through a photomask, only the portion of the resist corresponding to the pattern is exposed to light. The exposure device and its exposure and irradiation conditions are appropriately selected, and light sources such as ultra-high-pressure mercury lamps, high-pressure mercury lamps, metal halide lamps, and far-ultraviolet lamps are used for exposure, and the photosensitive resin composition in the coating film is photocured.

曝光後的鹼顯影是出於將未經曝光的部分的抗蝕劑去除的目的而進行,通過該顯影來形成所需的圖案。適合於該鹼顯影的顯影液例如可列舉鹼金屬或鹼土類金屬的碳酸鹽的水溶液、鹼金屬的氫氧化物的水溶液等,特別優選為使用含有0.05質量%~3質量%的碳酸鈉、碳酸鉀、碳酸鋰等碳酸鹽的弱鹼性水溶液,在23℃~28℃的溫度下進行顯影,可使用市售的顯影機或超聲波洗滌機等來精密地形成微細的圖像。The alkali development after exposure is performed for the purpose of removing the resist of the unexposed part, and a desired pattern is formed by this development. Examples of developing solutions suitable for the alkaline development include aqueous solutions of carbonates of alkali metals or alkaline earth metals, aqueous solutions of hydroxides of alkali metals, and the like. It is particularly preferable to use sodium carbonate or carbonic acid containing 0.05% to 3% by mass. A weakly alkaline aqueous solution of carbonates such as potassium and lithium carbonate is developed at a temperature of 23°C to 28°C, and a commercially available developing machine or ultrasonic cleaner can be used to precisely form a fine image.

顯影後,優選為以180℃~250℃的溫度及20分鐘~60分鐘的條件來進行熱處理(後烘烤)。該後烘烤是出於用以提高經圖案化的遮光膜與基板的密合性等目的來進行。這與預烘烤同樣是通過利用烘箱、加熱板等進行加熱來進行。本發明的經圖案化的遮光膜是經過利用以上的光微影法的各步驟來形成。After development, it is preferable to perform heat treatment (post-baking) at a temperature of 180°C to 250°C and conditions of 20 minutes to 60 minutes. This post-baking is performed for the purpose of improving the adhesion between the patterned light-shielding film and the substrate. This is performed by heating with an oven, hot plate, etc., similarly to pre-baking. The patterned light-shielding film of the present invention is formed through each step using the above photolithography method.

依據所述方法,可形成光密度(OD)為0.5/μm~3/μm、優選為1.5/μm~2.5/μm的遮光膜。另外,依據所述方法,可形成施加10 V電壓時的體積電阻率為1×109 Ω・cm以上、優選為1×1012 Ω・cm以上的遮光膜。另外,依據所述方法,可形成介電常數為2~10、優選為2~8、尤其優選為3~6的遮光膜。另外,依據所述方法,在機械特性試驗中,可形成斷裂強度滿足200 mN以上、及/或彈性復原率滿足30%以上、及/或壓縮率滿足40%以下的遮光膜。利用所述方法來形成的遮光膜可作為液晶顯示裝置的管柱間隔件來使用,優選為可作為黑色管柱間隔件來使用。According to the method, a light-shielding film having an optical density (OD) of 0.5/μm to 3/μm, preferably 1.5/μm to 2.5/μm can be formed. In addition, according to the method, a light-shielding film having a volume resistivity of 1×10 9 Ω·cm or more, preferably 1×10 12 Ω·cm or more when a voltage of 10 V is applied can be formed. In addition, according to the method, a light-shielding film having a dielectric constant of 2-10, preferably 2-8, and particularly preferably 3-6 can be formed. In addition, according to the above method, in a mechanical property test, a light-shielding film having a breaking strength of 200 mN or more, an elastic recovery rate of 30% or more, and/or a compression rate of 40% or less can be formed. The light-shielding film formed by the method can be used as a column spacer of a liquid crystal display device, and preferably can be used as a black column spacer.

另外,依據所述方法,關於用以將作為遮光膜的光密度設為0.5/μm以上且小於3/μm的膜厚H1、以及擔負間隔件功能的遮光膜的膜厚H2,可同時形成當H2為2 μm~7 μm時,ΔH=H2-H1為0.1~2.9的膜厚H1的遮光膜與膜厚H2的遮光膜。利用所述方法來形成的硬化膜可作為液晶顯示裝置的管柱間隔件來使用,優選為可作為黑色管柱間隔件來使用。依據所述ΔH為所述範圍的硬化膜,可由同一材料來一次形成高度有差異的黑色管柱間隔件,因此能夠效率更良好地進行液晶顯示裝置的製造。此時,例如,也可使膜厚H2的硬化膜作為間隔件來發揮功能,且使膜厚H1的硬化膜作為黑色矩陣來發揮功能。此外,ΔH成為必須的原因在於:若將黑色矩陣功能的膜設為與間隔件功能的膜相同的膜厚,則液晶層被各畫素所劃分,不僅妨礙液晶層自由流動,而且擔憂會使填充液晶層來形成液晶顯示裝置時的良率下降。In addition, according to the method described above, the film thickness H1 for setting the optical density of the light-shielding film to 0.5/μm or more and less than 3/μm and the film thickness H2 of the light-shielding film functioning as a spacer can be simultaneously formed. When H2 is 2 μm to 7 μm, ΔH=H2-H1 is a light-shielding film with a film thickness of H1 and a light-shielding film with a film thickness of H2 of 0.1 to 2.9. The cured film formed by the above method can be used as a column spacer of a liquid crystal display device, and preferably can be used as a black column spacer. According to the cured film whose ΔH is in the above-mentioned range, black column spacers with different heights can be formed at one time from the same material, so that the liquid crystal display device can be manufactured more efficiently. In this case, for example, the cured film of film thickness H2 may function as a spacer, and the cured film of film thickness H1 may function as a black matrix. In addition, the reason why ΔH is necessary is that if the black matrix function film is set to the same film thickness as the spacer function film, the liquid crystal layer is divided by pixels, which not only hinders the free flow of the liquid crystal layer, but also concerns that When the liquid crystal layer is filled to form a liquid crystal display device, the yield rate decreases.

包括所述遮光膜或硬化膜的液晶顯示裝置優選為設置有薄膜電晶體的TFT-LCD。The liquid crystal display device including the light-shielding film or the cured film is preferably a TFT-LCD provided with a thin film transistor.

包括所述遮光膜或硬化膜的液晶顯示裝置的遮光性及絕緣性高,進而具有彈性模數、變形量、彈性復原率優異的間隔件功能,且能夠形成即便膜厚為2 μm~7 μm左右也微細的間隔件形狀。 [實施例]The liquid crystal display device including the light-shielding film or the cured film has high light-shielding and insulating properties, and further has a spacer function with excellent elastic modulus, deformation amount, and elastic recovery rate, and can be formed even with a film thickness of 2 μm-7 μm The shape of the spacer is fine on the left and right. [Example]

以下,基於實施例及比較例,對本發明的實施形態進行具體說明,但本發明並不限定於這些。Hereinafter, the embodiments of the present invention will be specifically described based on Examples and Comparative Examples, but the present invention is not limited to these.

首先,示出本發明的(A)含聚合性不飽和基的鹼可溶性樹脂的合成例。合成例中的樹脂的評價是以如下方式進行。First, a synthesis example of the (A) polymerizable unsaturated group-containing alkali-soluble resin of the present invention is shown. The evaluation of the resin in the synthesis example was performed as follows.

[固體成分濃度] 使合成例中獲得的1 g樹脂溶液含浸於玻璃過濾器[重量:W0(g)]中,進行秤量[W1(g)],根據以160℃加熱2 hr後的重量[W2(g)],由下式求出。 固體成分濃度(重量%)=100×(W2-W0)/(W1-W0)[Solid content concentration] 1 g of the resin solution obtained in the synthesis example was impregnated in a glass filter [weight: W0 (g)], weighed [W1 (g)], based on the weight after heating at 160°C for 2 hr [ W2(g)], calculated by the following formula. Solid content concentration (weight%)=100×(W2-W0)/(W1-W0)

[酸值] 使樹脂溶液溶解於二噁烷中,使用電位差滴定裝置[平沼產業(股)製造,商品名COM-1600],以1/10 N-KOH水溶液進行滴定來求出。[Acid value] The resin solution was dissolved in dioxane, and the potentiometric titration device [manufactured by Hiranuma Sangyo Co., Ltd., trade name COM-1600] was used to titrate with 1/10 N-KOH aqueous solution.

[分子量] 利用凝膠滲透層析法(GPC)[東曹(股)製造的商品名HLC-8220GPC,溶媒:四氫呋喃,管柱:TSKgelSuperH-2000(2根)+TSKgelSuperH-3000(1根)+TSKgelSuperH-4000(1根)+TSKgelSuper-H5000(1根)[東曹(股)製造],溫度:40℃,速度:0.6 ml/min]進行測定,以標準聚苯乙烯[東曹(股)製造的PS-寡聚物套組]換算值的形式求出重量平均分子量(Mw)。[Molecular weight] Gel permeation chromatography (GPC) [trade name HLC-8220GPC manufactured by Tosoh Co., Ltd., solvent: tetrahydrofuran, column: TSKgelSuperH-2000 (2) + TSKgelSuperH-3000 (1) + TSKgelSuperH-4000 (1 piece) + TSKgelSuper-H5000 (1 piece) [manufactured by Tosoh Co., Ltd.], temperature: 40°C, speed: 0.6 ml/min], measured with standard polystyrene [Tosoh Co., Ltd. Manufactured PS-oligomer set] The weight average molecular weight (Mw) is calculated as the converted value.

[平均二次粒徑測定] 對於將遮光性分散液以溶劑(本實施例中為丙二醇單甲醚乙酸酯(propylene glycol monomethyl ether acetate,PGMEA))加以稀釋而遮光成分的濃度為0.1質量%左右的溶液,利用雷射繞射・散射法的細微性分佈計(日機裝股份有限公司製造,麥奇克(Microtrac)MT-3000),來測定平均二次粒徑。[Average secondary particle size measurement] The light-shielding dispersion is diluted with a solvent (propylene glycol monomethyl ether acetate (PGMEA) in this example), and the concentration of the light-shielding component is 0.1% by mass For the left and right solutions, the average secondary particle size is measured using a fineness distribution meter (manufactured by Nikkiso Co., Ltd., Microtrac MT-3000) by the laser diffraction and scattering method.

[合成例1] 在帶有回流冷卻器的500 mL的四口燒瓶中,添加105.7 g(0.29 mol)的雙酚A型環氧化合物(新日化環氧製造公司製造,商品名YD-128,環氧當量=182)、41.8 g(0.58 mol)的丙烯酸、1.52 g的三苯基膦(triphenylphosphine,TPP)、以及40.0 g的丙二醇單甲醚乙酸酯(PGMEA),在100℃~105℃的加熱下攪拌12 hr,獲得反應產物。[Synthesis example 1] In a 500 mL four-necked flask equipped with a reflux cooler, 105.7 g (0.29 mol) of bisphenol A epoxy compound (manufactured by Shinichi Ka Epoxy Co., Ltd., trade name YD-128) was added , Epoxy equivalent = 182), 41.8 g (0.58 mol) acrylic acid, 1.52 g triphenylphosphine (TPP), and 40.0 g propylene glycol monomethyl ether acetate (PGMEA), at 100℃~105 Stir under heating at ℃ for 12 hr to obtain the reaction product.

繼而,在所獲得的反應產物中添加16.9 g(0.13 mol)的二羥甲基丙酸以及96 g的PGMEA,升溫至45℃。繼而,一邊注意燒瓶內的溫度一邊滴加61.8 g(0.28 mol)的異佛爾酮二異氰酸酯。滴加結束後,在75℃~80℃的加熱下攪拌6 hr。進而,添加6.2 g(0.04 mol)的四氫鄰苯二甲酸酐,在90℃~95℃的加熱下攪拌6 hr,獲得含聚合性不飽和基的鹼可溶性樹脂溶液(A)-1。所獲得的樹脂溶液的固體成分濃度為63.2 wt%,酸值(固體成分換算)為40 mgKOH/g,通過GPC分析而得的Mw為11540。Then, 16.9 g (0.13 mol) of dimethylolpropionic acid and 96 g of PGMEA were added to the obtained reaction product, and the temperature was raised to 45°C. Then, while paying attention to the temperature in the flask, 61.8 g (0.28 mol) of isophorone diisocyanate was added dropwise. After the dropwise addition, the mixture was stirred under heating at 75°C to 80°C for 6 hr. Furthermore, 6.2 g (0.04 mol) of tetrahydrophthalic anhydride was added, and the mixture was stirred under heating at 90° C. to 95° C. for 6 hr to obtain a polymerizable unsaturated group-containing alkali-soluble resin solution (A)-1. The solid content concentration of the obtained resin solution was 63.2 wt %, the acid value (in terms of solid content) was 40 mgKOH/g, and the Mw obtained by GPC analysis was 11,540.

[合成例2] 在帶有回流冷卻器的500 mL的四口燒瓶中,添加104.2 g(0.29 mol)的雙酚A型環氧化合物(新日鐵住金化學股份有限公司製造,商品名YD-128,環氧當量=182)、41.2 g(0.57 mol)的丙烯酸、1.50 g的TPP、以及40.0 g的PGMEA,在100℃~105℃的加熱下攪拌12 hr,獲得反應產物。[Synthesis Example 2] In a 500 mL four-necked flask equipped with a reflux cooler, 104.2 g (0.29 mol) of bisphenol A epoxy compound (manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., trade name YD- 128, epoxy equivalent = 182), 41.2 g (0.57 mol) of acrylic acid, 1.50 g of TPP, and 40.0 g of PGMEA, stir under heating at 100°C to 105°C for 12 hours to obtain a reaction product.

繼而,在所獲得的反應產物中添加23.1 g(0.17 mol)的二羥甲基丙酸以及98 g的PGMEA,升溫至45℃。繼而,一邊注意燒瓶內的溫度一邊滴加68.0 g(0.31 mol)的異佛爾酮二異氰酸酯。滴加結束後,在75℃~80℃的加熱下攪拌6 hr,獲得含聚合性不飽和基的鹼可溶性樹脂溶液(A)-2。所獲得的樹脂溶液的固體成分濃度為63.3 wt%,酸值(固體成分換算)為41 mgKOH/g,通過GPC分析而得的Mw為11210。Then, 23.1 g (0.17 mol) of dimethylolpropionic acid and 98 g of PGMEA were added to the obtained reaction product, and the temperature was raised to 45°C. Then, while paying attention to the temperature in the flask, 68.0 g (0.31 mol) of isophorone diisocyanate was added dropwise. After the dropwise addition, the mixture was stirred under heating at 75° C. to 80° C. for 6 hr to obtain a polymerizable unsaturated group-containing alkali-soluble resin solution (A)-2. The solid content concentration of the obtained resin solution was 63.3 wt%, the acid value (in terms of solid content) was 41 mgKOH/g, and the Mw by GPC analysis was 11210.

[合成例3] 在帶有回流冷卻器的500 mL的四口燒瓶中,添加104.2 g(0.29 mol)的雙酚A型環氧化合物(新日鐵住金化學股份有限公司製造,商品名YD-128,環氧當量=182)、41.2 g(0.57 mol)的丙烯酸、1.50 g的TPP、以及40.0 g的PGMEA,在100℃~105℃的加熱下攪拌12 hr,獲得反應產物。[Synthesis Example 3] In a 500 mL four-necked flask equipped with a reflux cooler, 104.2 g (0.29 mol) of bisphenol A epoxy compound (manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., trade name YD- 128, epoxy equivalent = 182), 41.2 g (0.57 mol) of acrylic acid, 1.50 g of TPP, and 40.0 g of PGMEA, stir under heating at 100°C to 105°C for 12 hours to obtain a reaction product.

繼而,在所獲得的反應產物中添加17.4 g(0.13 mol)的二羥甲基丙酸以及84 g的PGMEA,升溫至45℃。繼而,一邊注意燒瓶內的溫度一邊滴加61.8 g(0.28 mol)的異佛爾酮二異氰酸酯。滴加結束後,在75℃~80℃的加熱下攪拌6 hr。進而,添加21.0 g(0.14 mol)的四氫鄰苯二甲酸酐,在90℃~95℃的加熱下攪拌6 hr,獲得含聚合性不飽和基的鹼可溶性樹脂溶液(A)-3。所獲得的樹脂溶液的固體成分濃度為66.6 wt%,酸值(固體成分換算)為61 mgKOH/g,通過GPC分析而得的Mw為11860。Then, 17.4 g (0.13 mol) of dimethylolpropionic acid and 84 g of PGMEA were added to the obtained reaction product, and the temperature was raised to 45°C. Then, while paying attention to the temperature in the flask, 61.8 g (0.28 mol) of isophorone diisocyanate was added dropwise. After the dropwise addition, the mixture was stirred under heating at 75°C to 80°C for 6 hr. Furthermore, 21.0 g (0.14 mol) of tetrahydrophthalic anhydride was added, and it stirred under heating of 90-95 degreeC for 6 hours, and obtained the alkali-soluble resin solution (A)-3 containing a polymerizable unsaturated group. The solid content concentration of the obtained resin solution was 66.6 wt%, the acid value (in terms of solid content) was 61 mgKOH/g, and the Mw obtained by GPC analysis was 11860.

[合成例4] 在帶有回流冷卻器的500 mL的四口燒瓶中,添加105.7 g(0.29 mol)的雙酚A型環氧化合物(新日鐵住金化學股份有限公司製造,商品名YD-128,環氧當量=182)、41.8 g(0.58 mol)的丙烯酸、1.52 g的TPP、以及40.0 g的PGMEA,在100℃~105℃的加熱下攪拌12 hr,獲得反應產物。[Synthesis Example 4] In a 500 mL four-necked flask with a reflux cooler, 105.7 g (0.29 mol) of bisphenol A epoxy compound (manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., trade name YD- 128, epoxy equivalent = 182), 41.8 g (0.58 mol) of acrylic acid, 1.52 g of TPP, and 40.0 g of PGMEA, stir for 12 hr under heating at 100°C to 105°C to obtain a reaction product.

繼而,在所獲得的反應產物中添加16.9 g(0.13 mol)的二羥甲基丙酸以及96 g的PGMEA,升溫至45℃。繼而,一邊注意燒瓶內的溫度一邊滴加58.5 g(0.28 mol)的三甲基六亞甲基二異氰酸酯。滴加結束後,在75℃~80℃的加熱下攪拌6 hr。進而,添加6.2 g(0.04 mol)的四氫鄰苯二甲酸酐,在90℃~95℃的加熱下攪拌6 hr,獲得含聚合性不飽和基的鹼可溶性樹脂溶液(A)-4。所獲得的樹脂溶液的固體成分濃度為62.9 wt%,酸值(固體成分換算)為41 mgKOH/g,通過GPC分析而得的Mw為11950。Then, 16.9 g (0.13 mol) of dimethylolpropionic acid and 96 g of PGMEA were added to the obtained reaction product, and the temperature was raised to 45°C. Then, while paying attention to the temperature in the flask, 58.5 g (0.28 mol) of trimethylhexamethylene diisocyanate was added dropwise. After the dropwise addition, the mixture was stirred under heating at 75°C to 80°C for 6 hr. Furthermore, 6.2 g (0.04 mol) of tetrahydrophthalic anhydride was added, and the mixture was stirred under heating at 90° C. to 95° C. for 6 hr to obtain a polymerizable unsaturated group-containing alkali-soluble resin solution (A)-4. The solid content concentration of the obtained resin solution was 62.9 wt%, the acid value (in terms of solid content) was 41 mgKOH/g, and the Mw obtained by GPC analysis was 11950.

[合成例5] 在帶有回流冷卻器的500 mL的四口燒瓶中,添加104.2 g(0.29 mol)的雙酚A型環氧化合物(新日鐵住金化學股份有限公司製造,商品名YD-128,環氧當量=182)、41.2 g(0.57 mol)的丙烯酸、1.50 g的TPP、以及40.0 g的PGMEA,在100℃~105℃的加熱下攪拌12 hr,獲得反應產物。[Synthesis Example 5] In a 500 mL four-necked flask with a reflux cooler, 104.2 g (0.29 mol) of bisphenol A epoxy compound (manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., trade name YD- 128, epoxy equivalent = 182), 41.2 g (0.57 mol) of acrylic acid, 1.50 g of TPP, and 40.0 g of PGMEA, stir under heating at 100°C to 105°C for 12 hours to obtain a reaction product.

繼而,在所獲得的反應產物中添加4.0 g(0.03 mol)的二羥甲基丙酸、11.8 g(0.10 mol)的1,6-己二醇以及84 g的PGMEA,升溫至45℃。繼而,一邊注意燒瓶內的溫度一邊滴加61.8 g(0.28 mol)的異佛爾酮二異氰酸酯。滴加結束後,在75℃~80℃的加熱下攪拌6 hr。進而,添加21.0 g(0.14 mol)的四氫鄰苯二甲酸酐,在90℃~95℃的加熱下攪拌6 hr,獲得含聚合性不飽和基的鹼可溶性樹脂溶液(A)-5。所獲得的樹脂溶液的固體成分濃度為66.5 wt%,酸值(固體成分換算)為38 mgKOH/g,通過GPC分析而得的Mw為12220。Then, 4.0 g (0.03 mol) of dimethylolpropionic acid, 11.8 g (0.10 mol) of 1,6-hexanediol, and 84 g of PGMEA were added to the obtained reaction product, and the temperature was raised to 45°C. Then, while paying attention to the temperature in the flask, 61.8 g (0.28 mol) of isophorone diisocyanate was added dropwise. After the dropwise addition, the mixture was stirred under heating at 75°C to 80°C for 6 hr. Furthermore, 21.0 g (0.14 mol) of tetrahydrophthalic anhydride was added, and it stirred under heating of 90-95 degreeC for 6 hours, and obtained the alkali-soluble resin solution (A)-5 containing a polymerizable unsaturated group. The solid content concentration of the obtained resin solution was 66.5 wt%, the acid value (in terms of solid content) was 38 mgKOH/g, and the Mw obtained by GPC analysis was 12220.

[比較合成例1] 在帶有氮導入管及回流管的1000 ml四口燒瓶中,添加51.65 g(0.60 mol)的甲基丙烯酸、38.44 g(0.38 mol)的甲基丙烯酸甲酯、38.77 g(0.22 mol)的甲基丙烯酸苄酯、5.91 g的偶氮雙異丁腈、以及370 g的二乙二醇二甲醚,在80℃~85℃、氮氣流下攪拌8 hr而使其聚合。進而,在燒瓶內添加39.23 g(0.28 mol)的甲基丙烯酸縮水甘油酯、1.44 g的TPP、0.055 g的2,6-二-第三丁基-對甲酚,在80℃~85℃下攪拌16 hr,獲得鹼可溶性樹脂溶液(A)-6。所獲得的樹脂溶液的固體成分濃度為32質量%,酸值(固體成分換算)為110 mgKOH/g,通過GPC分析而得的Mw為18100。[Comparative Synthesis Example 1] In a 1000 ml four-neck flask equipped with a nitrogen introduction tube and a reflux tube, 51.65 g (0.60 mol) of methacrylic acid, 38.44 g (0.38 mol) of methyl methacrylate, and 38.77 g were added (0.22 mol) of benzyl methacrylate, 5.91 g of azobisisobutyronitrile, and 370 g of diethylene glycol dimethyl ether were polymerized by stirring for 8 hr under a nitrogen stream at 80°C to 85°C. Furthermore, 39.23 g (0.28 mol) of glycidyl methacrylate, 1.44 g of TPP, and 0.055 g of 2,6-di-tert-butyl-p-cresol were added to the flask at 80°C to 85°C Stir for 16 hr to obtain alkali-soluble resin solution (A)-6. The solid content concentration of the obtained resin solution was 32% by mass, the acid value (in terms of solid content) was 110 mgKOH/g, and the Mw obtained by GPC analysis was 18,100.

(含聚合性不飽和基的鹼可溶性樹脂) (A)-1成分:所述合成例1中獲得的鹼可溶性樹脂溶液 (A)-2成分:所述合成例2中獲得的鹼可溶性樹脂溶液 (A)-3成分:所述合成例3中獲得的鹼可溶性樹脂溶液 (A)-4成分:所述合成例4中獲得的鹼可溶性樹脂溶液 (A)-5成分:所述合成例5中獲得的鹼可溶性樹脂溶液 (A)-6成分:所述比較合成例1中獲得的鹼可溶性樹脂溶液(Alkali-soluble resin containing polymerizable unsaturated groups) (A)-1 component: the alkali-soluble resin solution obtained in the synthesis example 1 (A)-2 component: the alkali-soluble resin solution obtained in the synthesis example 2 (A)-3 component: the alkali-soluble resin solution obtained in the synthesis example 3 (A)-4 component: the alkali-soluble resin solution obtained in the synthesis example 4 (A)-5 component: the synthesis example 5 Alkali-soluble resin solution obtained in (A)-6 components: the alkali-soluble resin solution obtained in Comparative Synthesis Example 1

(光聚合性單體) (B):二季戊四醇六丙烯酸酯與二季戊四醇五丙烯酸酯的混合物(日本化藥股份有限公司製造,商品名DPHA)(Photopolymerizable monomer) (B): Mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate (manufactured by Nippon Kayaku Co., Ltd., trade name DPHA)

(光聚合起始劑) (C):乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(0-乙醯基肟)(巴斯夫(BASF)公司製造,製品名豔佳固(Irgacure)OXE02) (遮光性分散顏料) (D)-1:20.0質量%的鈦黑(三菱材料股份有限公司製造,製品名13M-C)、5.0質量%的分散劑的PGMEA分散液(固體成分為25.0%,鈦黑的平均粒徑為188 nm) (D)-2:15.0質量%的黑色顏料(內醯胺黑,巴斯夫(BASF)公司製造,豔佳芳(Irgaphor)S100CF)、4.5質量%的高分子分散劑的PGMEA分散液(固體成分為19.5%,黑色顏料的平均二次粒徑為241 nm) (D)-3:7.0質量%的C.I.顏料・橙64(巴斯夫(BASF)公司製造)、3.0質量%的C.I.顏料・紫23(科萊恩(Clariant)公司製造)、7.0質量%的C.I.顏料・藍15:6(科萊恩(Clariant)公司製造)、4.0質量%的高分子分散劑、2.0質量%的磺化偶氮系分散助劑、2.0質量%的甲基丙烯酸苄酯/甲基丙烯酸共聚物的PGMEA分散液(固體成分為25.0%) (D)-4:20.0質量%的碳黑、5.0質量%的高分子分散劑的PGMEA分散液(固體成分為25.0%,碳黑的平均二次粒徑為162 nm)(Photopolymerization initiator) (C): Ethyl ketone, 1-[9-ethyl-6-(2-methylbenzyl)-9H-carbazol-3-yl]-,1-(0 -Acetyl oxime) (manufactured by BASF, product name Irgacure OXE02) (light-shielding dispersed pigment) (D)-1: 20.0% by mass titanium black (manufactured by Mitsubishi Materials Co., Ltd., Product name 13M-C), 5.0% by mass dispersant PGMEA dispersion (solid content is 25.0%, the average particle size of titanium black is 188 nm) (D)-2: 15.0% by mass black pigment (endoamide Black, made by BASF, Irgaphor S100CF), 4.5 mass% polymer dispersant PGMEA dispersion (solid content 19.5%, average secondary particle size of black pigment is 241 nm) ( D) -3: 7.0% by mass CI pigment, orange 64 (manufactured by BASF), 3.0% by mass CI pigment, purple 23 (manufactured by Clariant), 7.0% by mass CI pigment, blue 15: 6 (manufactured by Clariant), 4.0% by mass polymer dispersant, 2.0% by mass sulfonated azo-based dispersing aid, 2.0% by mass benzyl methacrylate/methacrylic acid copolymer PGMEA dispersion (solid content of 25.0%) (D)-4: 20.0% by mass of carbon black, 5.0% by mass of polymer dispersant PGMEA dispersion (solid content of 25.0%, average secondary particles of carbon black Diameter is 162 nm)

(溶劑) (E)-1:PGMEA (E)-2:乙酸3-甲氧基-3-甲基-1-丁酯(Solvent) (E)-1: PGMEA (E)-2: 3-methoxy-3-methyl-1-butyl acetate

(表面活性劑) (H):BYK-330(畢克化學(BYK-Chemie)公司製造)的PGMEA溶液(固體成分為1.0%)(Surfactant) (H): PGMEA solution of BYK-330 (manufactured by BYK-Chemie) (solid content 1.0%)

將所述的調配成分以表1及表2所示的比例進行調配,製備實施例1~實施例11及比較例1~比較例2的感光性樹脂組成物。此外,表1及表2中的數值全部表示質量份。另外,溶劑的欄中的(E)-1為不包括含不飽和基的樹脂溶液(含聚合性不飽和基的鹼可溶性樹脂溶液)中的PGMEA(與(E)-1相同)、以及遮光性分散液中的PGMEA(與(E)-1相同)的量。The said compounding component was compounded in the ratio shown in Table 1 and Table 2, and the photosensitive resin composition of Example 1-Example 11 and Comparative Example 1-Comparative Example 2 was prepared. In addition, all the numerical values in Table 1 and Table 2 represent parts by mass. In addition, (E)-1 in the column of solvents does not include PGMEA (same as (E)-1) in the unsaturated group-containing resin solution (polymerizable unsaturated group-containing alkali-soluble resin solution) and shading The amount of PGMEA (same as (E)-1) in the aqueous dispersion.

[表1]

Figure 105133127-A0304-0001
[Table 1]
Figure 105133127-A0304-0001

[表2]

Figure 105133127-A0304-0002
[Table 2]
Figure 105133127-A0304-0002

[評價] 使用實施例1~實施例11以及比較例1~比較例2的遮光膜用的感光性樹脂組成物,進行以下所記載的評價。將這些評價結果示於表3及表4中。[Evaluation] Using the photosensitive resin composition for the light-shielding film of Example 1 to Example 11 and Comparative Example 1 to Comparative Example 2, the evaluation described below was performed. These evaluation results are shown in Table 3 and Table 4.

<顯影特性> 使用旋轉塗布機,以熱硬化處理後的膜厚成為3.0 μm的方式,將所述獲得的各感光性樹脂組成物塗布於厚度為1.2 mm的玻璃基板上,在90℃下進行1分鐘預烘烤。然後,使光罩密合,以波長365 nm、照度30 mW/cm2 的超高壓水銀燈來照射100 mJ/cm2 的紫外線,進行感光部分的光硬化反應。<Development characteristics> Using a spin coater, each photosensitive resin composition obtained as described above was applied to a glass substrate with a thickness of 1.2 mm so that the film thickness after the thermosetting treatment became 3.0 μm, and it was carried out at 90°C 1 minute pre-bake. Then, the photomask was tightly attached, and 100 mJ/cm 2 ultraviolet rays were irradiated with an ultra-high pressure mercury lamp with a wavelength of 365 nm and an illuminance of 30 mW/cm 2 to perform a photohardening reaction on the photosensitive part.

繼而,使用0.05%氫氧化鉀水溶液,以24℃、0.1 MPa的壓力對該曝光後的玻璃基板進行60秒顯影,去除塗膜的未曝光部。然後,使用熱風乾燥機,在230℃下進行30分鐘加熱硬化處理,獲得感光性樹脂組成物的硬化膜。Then, using a 0.05% potassium hydroxide aqueous solution, the exposed glass substrate was developed at 24° C. and a pressure of 0.1 MPa for 60 seconds to remove the unexposed part of the coating film. Then, using a hot air dryer, heat curing treatment was performed at 230°C for 30 minutes to obtain a cured film of the photosensitive resin composition.

利用光學顯微鏡對所獲得的硬化膜圖案的細線形成進行確認,利用以下的3個階段進行評價。 ○:無殘渣而形成有L/S為10 μm/10 μm以上的圖案者 △:無殘渣而形成有L/S為30 μm/30 μm以上的圖案者 ×:未形成L/S小於50 μm/50 μm的圖案,或圖案的底部卷邊或殘渣顯著The thin line formation of the obtained cured film pattern was confirmed by an optical microscope, and it evaluated by the following 3 stages. ○: There is no residue and a pattern with L/S of 10 μm/10 μm or more is formed △: There is no residue and a pattern with L/S of 30 μm/30 μm or more is formed ×: No L/S is less than 50 μm /50 μm pattern, or the bottom curl or residue of the pattern is significant

<光密度> 使用旋轉塗布機,以熱硬化處理後的膜厚成為1.1 μm的方式,將所述獲得的各感光性樹脂組成物塗布於厚度為1.2 mm的玻璃基板上,在90℃下進行1分鐘預烘烤。然後,使用熱風乾燥機,在230℃下進行30分鐘加熱硬化處理,獲得感光性樹脂組成物的硬化膜。繼而,所獲得的硬化膜的光密度是使用麥克貝思(Macbeth)透過濃度計來測定,以每單位膜厚的光密度進行評價。<Optical Density> Using a spin coater, each photosensitive resin composition obtained as described above was coated on a glass substrate with a thickness of 1.2 mm so that the film thickness after the thermosetting treatment became 1.1 μm, at 90°C 1 minute pre-bake. Then, using a hot air dryer, heat curing treatment was performed at 230°C for 30 minutes to obtain a cured film of the photosensitive resin composition. Then, the optical density of the obtained cured film was measured using a Macbeth transmission densitometer, and it evaluated by the optical density per unit film thickness.

<體積電阻率> 使用旋轉塗布機,以熱硬化處理後的膜厚成為3.5 μm的方式,將所述獲得的各感光性樹脂組成物塗布於蒸鍍有Cr的厚度為1.2 mm的玻璃基板上的電極除外的部分,在90℃下進行1分鐘預烘烤。然後,使用熱風乾燥機來進行230℃、30分鐘加熱硬化處理,獲得感光性樹脂組成物的硬化膜。然後,在硬化膜上形成鋁電極而製成體積電阻率測定用基板。繼而,使用靜電計(吉時利(Keithley)公司製造,「6517A型」),測定施加電壓1 V至10 V下的體積電阻率。利用在1 V階段中,在各施加電壓下各進行60秒的電壓保持的條件進行測定,將施加10 V時的體積電阻率示於表3及表4中。<Volume resistivity> Using a spin coater, each photosensitive resin composition obtained as described above was coated on a glass substrate with a thickness of 1.2 mm on which Cr was vapor-deposited so that the film thickness after the thermosetting treatment became 3.5 μm The part except the electrode is pre-baked at 90°C for 1 minute. Then, a hot-air dryer was used to perform heat curing treatment at 230°C for 30 minutes to obtain a cured film of the photosensitive resin composition. Then, an aluminum electrode was formed on the cured film to produce a substrate for volume resistivity measurement. Then, using an electrometer (produced by Keithley, "Model 6517A"), the volume resistivity under an applied voltage of 1 V to 10 V was measured. The measurement was performed under the conditions of voltage holding for 60 seconds at each applied voltage in the 1 V stage, and the volume resistivity when 10 V was applied is shown in Tables 3 and 4.

<介電常數> 使用旋轉塗布機,以熱硬化處理後的膜厚成為3.5 μm的方式,將所述獲得的各感光性樹脂組成物塗布於蒸鍍有Cr的厚度為1.2 mm的玻璃基板上的電極除外的部分,在90℃下進行1分鐘預烘烤。然後,使用熱風乾燥機來進行230℃、30分鐘加熱硬化處理,獲得感光性樹脂組成物的硬化膜。然後,在硬化膜上形成鋁電極而製成介電常數測定用基板。繼而,使用靜電計(吉時利(Keithley)公司製造,「6517A型」),測定頻率1 Hz至100000 Hz下的電容,根據電容來算出介電常數。<Dielectric constant> Using a spin coater, each photosensitive resin composition obtained as described above was applied to a glass substrate with a thickness of 1.2 mm on which Cr was vapor-deposited so that the film thickness after the thermosetting treatment became 3.5 μm The part except the electrode is pre-baked at 90°C for 1 minute. Then, a hot-air dryer was used to perform heat curing treatment at 230°C for 30 minutes to obtain a cured film of the photosensitive resin composition. Then, an aluminum electrode was formed on the cured film to produce a substrate for dielectric constant measurement. Then, using an electrometer (made by Keithley, "Type 6517A"), the capacitance at a frequency of 1 Hz to 100,000 Hz was measured, and the dielectric constant was calculated from the capacitance.

<間隔件的半色調(half tone,HT)特性> 使用旋轉塗布機,以熱硬化處理後的膜厚成為3.0 μm的方式,將所述獲得的各感光性樹脂組成物塗布於厚度為1.2 mm的玻璃基板上,在90℃下進行1分鐘預烘烤。然後,使具有點圖案的光罩密合,以波長365 nm、照度30 mW/cm2 的超高壓水銀燈來照射5 mJ/cm2 ~100 mJ/cm2 的紫外線,進行感光部分的光硬化反應。<Half tone (HT) characteristics of the spacer> Using a spin coater, each photosensitive resin composition obtained as described above was applied to a thickness of 1.2 mm so that the film thickness after the thermal curing treatment became 3.0 μm On the glass substrate, pre-baked at 90°C for 1 minute. Then, a photomask with a dot pattern is closely attached, and an ultra-high pressure mercury lamp with a wavelength of 365 nm and an illuminance of 30 mW/cm 2 is used to irradiate ultraviolet rays of 5 mJ/cm 2 to 100 mJ/cm 2 to perform the photohardening reaction of the photosensitive part .

繼而,使用0.05%氫氧化鉀水溶液,以24℃、0.1 MPa的壓力對該曝光後的玻璃基板進行60秒顯影,去除塗膜的未曝光部。然後,使用熱風乾燥機,在230℃下進行30分鐘加熱硬化處理,獲得感光性樹脂組成物的硬化膜。Then, using a 0.05% potassium hydroxide aqueous solution, the exposed glass substrate was developed at 24° C. and a pressure of 0.1 MPa for 60 seconds to remove the unexposed part of the coating film. Then, using a hot air dryer, heat curing treatment was performed at 230°C for 30 minutes to obtain a cured film of the photosensitive resin composition.

間隔件的半色調特性是算出曝光量為5 mJ/cm2 及100 mJ/cm2 下的間隔件的高度之差(ΔH),利用以下4個階段進行評價。 ○:ΔH為1.0 μm~2.0 μm的情況 △:ΔH為0.1 μm~2.9 μm的情況 ×:ΔH小於0.1 μm或者大於2.9 μm的情況The halftone characteristic of the spacer is calculated by calculating the difference (ΔH) between the height of the spacer at an exposure amount of 5 mJ/cm 2 and 100 mJ/cm 2 , and evaluated in the following four stages. ○: When ΔH is 1.0 μm to 2.0 μm △: When ΔH is 0.1 μm to 2.9 μm ×: When ΔH is less than 0.1 μm or greater than 2.9 μm

<間隔件的壓縮率、彈性恢復率、斷裂強度> 使用旋轉塗布機,以熱硬化處理後的膜厚成為3.0 μm的方式,將所述獲得的各感光性樹脂組成物塗布於厚度為1.2 mm的玻璃基板上,在90℃下進行1分鐘預烘烤。然後,使具有點圖案的光罩密合,以波長365 nm、照度30 mW/cm2 的超高壓水銀燈來照射100 mJ/cm2 的紫外線,進行感光部分的光硬化反應。<Compression rate, elastic recovery rate, and breaking strength of the spacer> Using a spin coater, each photosensitive resin composition obtained as described above was applied to a thickness of 1.2 mm so that the film thickness after the thermosetting treatment became 3.0 μm On the glass substrate, pre-baked at 90°C for 1 minute. Then, a photomask with a dot pattern was closely attached, and 100 mJ/cm 2 of ultraviolet rays were irradiated with an ultra-high pressure mercury lamp with a wavelength of 365 nm and an illuminance of 30 mW/cm 2 to perform a photohardening reaction on the photosensitive part.

繼而,使用0.05%氫氧化鉀水溶液,以24℃、0.1 MPa的壓力對該曝光後的玻璃基板進行60秒顯影,去除塗膜的未曝光部。然後,使用熱風乾燥機,在230℃下進行30分鐘加熱硬化處理,獲得感光性樹脂組成物的硬化膜。Then, using a 0.05% potassium hydroxide aqueous solution, the exposed glass substrate was developed at 24° C. and a pressure of 0.1 MPa for 60 seconds to remove the unexposed part of the coating film. Then, using a hot air dryer, heat curing treatment was performed at 230°C for 30 minutes to obtain a cured film of the photosensitive resin composition.

所獲得的硬化膜圖案的間隔件特性是使用超微小硬度計(費希爾儀器(Fisher Instruments)公司製造,費希爾測厚儀(Fischerscope)HM2000Xyp)進行評價。以負荷速度5.0 mN/sec擠入100 μm見方的平面壓頭,負荷至50 mN為止的荷重後,以除荷速度5.0 mN/sec而除荷,製作位移量曲線。The spacer characteristics of the obtained cured film pattern were evaluated using an ultra-micro hardness tester (manufactured by Fisher Instruments, Fischer scope HM2000Xyp). Squeeze a 100 μm square flat indenter at a load speed of 5.0 mN/sec. After the load reaches a load of 50 mN, remove the load at a load removal speed of 5.0 mN/sec to create a displacement curve.

壓縮率是將負荷時的荷重50 mN下的位移量設為L1,由下述式來算出。 壓縮率(%)=L1/間隔件的高度×100The compressibility is calculated by the following formula, assuming that the displacement under a load of 50 mN is L1. Compression rate (%)=L1/height of spacer×100

彈性恢復率是將負荷時的荷重50 mN下的位移量設為L1,且將除荷時的位移量設為L2,由下述式來算出。 彈性恢復率(%)=(L1-L2)/L1×100The elastic recovery rate is calculated by the following formula, assuming that the displacement under a load of 50 mN under load is L1 and the displacement during unloading is L2. Elastic recovery rate (%)=(L1-L2)/L1×100

斷裂強度是使用超微小硬度計(費希爾儀器(Fisher Instruments)公司製造,費希爾測厚儀(Fischerscope)HM2000Xyp)來評價。以負荷速度5.0 mN/sec擠入100 μm見方的平面壓頭,負荷至300 mN為止的荷重來測定間隔件斷裂時的荷重,利用以下的4個階段進行評價。 ○:斷裂強度為300 mN以上的情況 △:斷裂強度為200 mN以下的情況 ×:斷裂強度為100 mN以下的情況The breaking strength was evaluated using an ultra-micro hardness tester (manufactured by Fisher Instruments, Fischer scope HM2000Xyp). A 100 μm square flat indenter was squeezed at a load speed of 5.0 mN/sec, and the load up to 300 mN was used to measure the load when the spacer broke, and the following 4 stages were used for evaluation. ○: When the breaking strength is 300 mN or more △: When the breaking strength is 200 mN or less ×: When the breaking strength is 100 mN or less

<間隔件的形狀> 使用旋轉塗布機,以熱硬化處理後的膜厚成為3.0 μm的方式,將所述獲得的各感光性樹脂組成物塗布於厚度為1.2 mm的玻璃基板上,在90℃下進行1分鐘預烘烤。然後,使具有點圖案的光罩密合,以波長365 nm、照度30 mW/cm2 的超高壓水銀燈來照射100 mJ/cm2 的紫外線,進行感光部分的光硬化反應。<Shape of spacer> Using a spin coater, each photosensitive resin composition obtained as described above was applied to a glass substrate with a thickness of 1.2 mm so that the film thickness after the thermosetting treatment became 3.0 μm, at 90°C Pre-bake for 1 minute. Then, a photomask with a dot pattern was closely attached, and 100 mJ/cm 2 of ultraviolet rays were irradiated with an ultra-high pressure mercury lamp with a wavelength of 365 nm and an illuminance of 30 mW/cm 2 to perform a photohardening reaction on the photosensitive part.

繼而,使用0.05%氫氧化鉀水溶液,以24℃、0.1 MPa的壓力對該曝光後的玻璃基板進行60秒顯影,去除塗膜的未曝光部。然後,使用熱風乾燥機,在230℃下進行30分鐘加熱硬化處理,獲得感光性樹脂組成物的硬化膜。Then, using a 0.05% potassium hydroxide aqueous solution, the exposed glass substrate was developed at 24° C. and a pressure of 0.1 MPa for 60 seconds to remove the unexposed part of the coating film. Then, using a hot air dryer, heat curing treatment was performed at 230°C for 30 minutes to obtain a cured film of the photosensitive resin composition.

間隔件的形狀是使用掃描型電子顯微鏡,以間隔件端部的內角(錐角)來評價。錐角為70°以上、90°以下的情況為◎,50°以上、小於70°的情況為○,50°以下的情況為△,90°以上的情況為×。The shape of the spacer was evaluated by the internal angle (taper angle) of the end of the spacer using a scanning electron microscope. When the taper angle is 70° or more and 90° or less, it is ⊚, if it is 50° or more and less than 70°, it is ○, if it is 50° or less, it is △, and if it is 90° or more, it is ×.

[表3]

Figure 105133127-A0304-0003
[table 3]
Figure 105133127-A0304-0003

[表4]

Figure 105133127-A0304-0004
[Table 4]
Figure 105133127-A0304-0004

根據實施例1~實施例11與比較例1~比較例2的結果可知,通過對(D)遮光材使用鈦黑,可在維持體積電阻率的情況下提高遮光性、介電常數及彈性恢復率等間隔件特性。特別是通過將鈦黑與黑色有機顏料或者混色有機顏料併用,可在不使彈性恢復率等間隔件特性下降的情況下,對各種遮光材的缺點加以補充,對遮光性、體積電阻率、介電常數的併存有效果。According to the results of Example 1 to Example 11 and Comparative Example 1 to Comparative Example 2, it can be seen that by using titanium black for the (D) light shielding material, the light shielding property, dielectric constant, and elastic recovery can be improved while maintaining the volume resistivity. Rate and other spacer characteristics. In particular, by using titanium black together with black organic pigments or mixed-color organic pigments, it is possible to supplement the shortcomings of various light-shielding materials without degrading the characteristics of the spacer such as elastic recovery rate, and improve light-shielding, volume resistivity, dielectric The coexistence of the electrical constant has an effect.

no

no

Claims (14)

一種具有間隔件功能的遮光膜用的感光性樹脂組成物,其特徵在於:包含下述(A)~(E)成分作為必須成分:(A)含聚合性不飽和基的鹼可溶性樹脂,其為使分子中具有乙烯性不飽和鍵的多元醇化合物(a)、分子中具有羧基的二醇化合物(b)、及二異氰酸酯化合物(c)進行反應而獲得的胺基甲酸酯化合物;(B)具有至少1個乙烯性不飽和鍵的光聚合性單體;(C)光聚合起始劑;(D)包含內醯胺黑的遮光成分;以及(E)溶劑。 A photosensitive resin composition for a light-shielding film having a spacer function, characterized by containing the following (A) to (E) components as essential components: (A) an alkali-soluble resin containing polymerizable unsaturated groups, which A urethane compound obtained by reacting a polyol compound (a) having an ethylenically unsaturated bond in the molecule, a diol compound having a carboxyl group in the molecule (b), and a diisocyanate compound (c); B) A photopolymerizable monomer having at least one ethylenically unsaturated bond; (C) a photopolymerization initiator; (D) a light-shielding component containing internal amido black; and (E) a solvent. 如申請專利範圍第1項所述的感光性樹脂組成物,其更包含混色有機顏料作為所述(D)遮光成分,且所述內醯胺黑及/或混色有機顏料的平均二次粒徑為20nm~500nm。 The photosensitive resin composition according to the first item of the scope of patent application, which further contains a color-mixed organic pigment as the light-shielding component (D), and the average secondary particle size of the internal amide black and/or the color-mixed organic pigment It is 20nm~500nm. 如申請專利範圍第1項所述的感光性樹脂組成物,其中相對於所述(A)成分100質量份而包含5質量份~400質量份的所述(B)成分,相對於所述(A)成分與所述(B)成分的合計量100質量份而包含0.1質量份~30質量份的所述(C)成分,並且當將包含光硬化後成為固體成分的所述(B)成分的所述(E)成分除外的成分作為固體成分時,固體成分中包含5質量%~80質量%的所述(D)成分。 The photosensitive resin composition according to claim 1, wherein 5 parts by mass to 400 parts by mass of the component (B) are contained relative to 100 parts by mass of the component (A), relative to the ( The total amount of the A) component and the (B) component is 100 parts by mass, and 0.1 to 30 parts by mass of the (C) component is contained, and the (B) component that becomes a solid content after light curing is included When the component except for the component (E) is a solid component, the solid component contains 5 mass% to 80 mass% of the component (D). 如申請專利範圍第1項所述的感光性樹脂組成物,其可形成如下的遮光膜:光密度OD為0.5/μm以上、3/μm以下,並且施加10V電壓時的體積電阻率為1×109Ω‧cm以上,且介電常數為2~10。 The photosensitive resin composition described in the first item of the scope of patent application can form a light-shielding film: the optical density OD is 0.5/μm or more and 3/μm or less, and the volume resistivity when a voltage of 10V is applied is 1× 10 9 Ω‧cm or more, and the dielectric constant is 2~10. 如申請專利範圍第1項所述的感光性樹脂組成物,其在利用微小硬度計的負荷-除荷試驗中,可形成滿足下述(i)~(iii)的至少一個的遮光膜,(i)斷裂強度為200mN以上;(ii)彈性復原率為30%以上;(iii)壓縮率為40%以下。 The photosensitive resin composition described in the first item of the patent application can form a light-shielding film that satisfies at least one of the following (i) to (iii) in a load-unloading test using a microhardness meter, ( i) Breaking strength of 200mN or more; (ii) Elastic recovery rate of 30% or more; (iii) Compression rate of 40% or less. 一種具有間隔件功能的遮光膜,其特徵在於:使如申請專利範圍第1項至第5項中任一項所述的感光性樹脂組成物硬化而形成。 A light-shielding film having a spacer function, characterized by being formed by curing the photosensitive resin composition described in any one of items 1 to 5 in the scope of the patent application. 一種液晶顯示裝置,其包括如申請專利範圍第6項所述的遮光膜作為黑色管柱間隔件(BCS)。 A liquid crystal display device includes the light-shielding film as described in item 6 of the scope of patent application as a black column spacer (BCS). 如申請專利範圍第7項所述的液晶顯示裝置,其更包括薄膜電晶體(TFT)。 The liquid crystal display device described in item 7 of the scope of patent application further includes a thin film transistor (TFT). 一種具有間隔件功能的遮光膜用的感光性樹脂組成物的製造方法,其製備使(D)遮光成分在(E)溶劑中分散而成的分散體後,在所述分散體中進而添加(A)含聚合性不飽和基的鹼可溶性樹脂、(B)具有至少1個乙烯性不飽和鍵的光聚合性單體、(C)光聚合起始劑、以及(E)溶劑,進行混合;並且 所述(A)鹼可溶性樹脂是使分子中具有乙烯性不飽和鍵的多元醇化合物(a)、分子中具有羧基的二醇化合物(b)、及二異氰酸酯化合物(c)進行反應而獲得的胺基甲酸酯化合物,所述(D)遮光成分包含內醯胺黑的成分。 A method for producing a photosensitive resin composition for a light-shielding film with a spacer function, which prepares a dispersion in which (D) a light-shielding component is dispersed in a solvent (E), and then adds to the dispersion ( A) Alkali-soluble resin containing a polymerizable unsaturated group, (B) a photopolymerizable monomer having at least one ethylenically unsaturated bond, (C) a photopolymerization initiator, and (E) a solvent are mixed; and The (A) alkali-soluble resin is obtained by reacting a polyol compound (a) having an ethylenically unsaturated bond in the molecule, a diol compound having a carboxyl group in the molecule (b), and a diisocyanate compound (c) In the urethane compound, the (D) light-shielding component includes an internal amide black component. 如申請專利範圍第9項所述的感光性樹脂組成物的製造方法,其中所述(D)遮光成分更包含混色有機顏料,並且在所述分散體中,所述內醯胺黑及/或混色有機顏料的平均二次粒徑為20nm~500nm。 The method for producing a photosensitive resin composition according to claim 9, wherein the (D) light-shielding component further contains a color-mixing organic pigment, and in the dispersion, the internal amide black and/or The average secondary particle size of the mixed color organic pigment is 20nm~500nm. 一種形成於基板上的遮光膜的製造方法,其將如申請專利範圍第1項至第5項中任一項所述的感光性樹脂組成物塗布於基板上,通過光照射而使所述感光性樹脂組成物硬化。 A method for manufacturing a light-shielding film formed on a substrate, which coats the photosensitive resin composition as described in any one of items 1 to 5 in the scope of the patent application on the substrate, and irradiates the light with the photosensitive resin composition. The resin composition hardens. 如申請專利範圍第11項所述的遮光膜的製造方法,其中關於用以將作為遮光膜的光密度設為0.5/μm以上且小於3/μm的膜厚H1、以及擔負間隔件功能的遮光膜的膜厚H2,同時形成當H2為2μm~7μm時,△H=H2-H1為0.1~2.9的膜厚H1與膜厚H2的遮光膜。 The method for manufacturing a light-shielding film as described in the scope of patent application, wherein the light-shielding film is used to set the optical density of the light-shielding film to a film thickness H1 of 0.5/μm or more and less than 3/μm, and the light-shielding function of the spacer The film thickness of the film is H2, and when H2 is 2 μm to 7 μm, a light-shielding film with a film thickness H1 and a film thickness H2 of 0.1 to 2.9 △H=H2-H1 is formed at the same time. 一種液晶顯示裝置的製造方法,其特徵在於:將利用如申請專利範圍第12項所述的遮光膜的製造方法來製造的遮光膜作為黑色管柱間隔件。 A method for manufacturing a liquid crystal display device is characterized in that a light shielding film manufactured by the method for manufacturing a light shielding film as described in the scope of patent application is used as a black column spacer. 如申請專利範圍第13項所述的液晶顯示裝置的製造方法,其特徵在於:所述液晶顯示裝置包括薄膜電晶體(TFT)。 The method for manufacturing a liquid crystal display device according to item 13 of the scope of patent application is characterized in that the liquid crystal display device includes a thin film transistor (TFT).
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