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TWI799601B - Lgps系固體電解質及其製造方法 - Google Patents

Lgps系固體電解質及其製造方法 Download PDF

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Publication number
TWI799601B
TWI799601B TW108120397A TW108120397A TWI799601B TW I799601 B TWI799601 B TW I799601B TW 108120397 A TW108120397 A TW 108120397A TW 108120397 A TW108120397 A TW 108120397A TW I799601 B TWI799601 B TW I799601B
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Taiwan
Prior art keywords
lgps
manufacturing
solid electrolyte
based solid
electrolyte
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TW108120397A
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English (en)
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TW202000586A (zh
Inventor
伊藤智弘
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日商三菱瓦斯化學股份有限公司
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G19/00—Compounds of tin
    • C01G19/006—Compounds containing tin, with or without oxygen or hydrogen, and containing two or more other elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
    • H01M10/0561—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
    • H01M10/0562—Solid materials
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B17/00—Sulfur; Compounds thereof
    • C01B17/22—Alkali metal sulfides or polysulfides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B25/00—Phosphorus; Compounds thereof
    • C01B25/14—Sulfur, selenium, or tellurium compounds of phosphorus
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G19/00—Compounds of tin
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/547—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on sulfides or selenides or tellurides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
    • H01B1/10—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances sulfides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • C01P2002/74—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by peak-intensities or a ratio thereof only
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/80—Crystal-structural characteristics defined by measured data other than those specified in group C01P2002/70
    • C01P2002/84—Crystal-structural characteristics defined by measured data other than those specified in group C01P2002/70 by UV- or VIS- data
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
    • C04B2235/3203—Lithium oxide or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/76—Crystal structural characteristics, e.g. symmetry
    • C04B2235/761—Unit-cell parameters, e.g. lattice constants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00—Electrolytes
    • H01M2300/0017—Non-aqueous electrolytes
    • H01M2300/0065—Solid electrolytes
    • H01M2300/0068—Solid electrolytes inorganic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Structural Engineering (AREA)
  • Secondary Cells (AREA)
  • Conductive Materials (AREA)
TW108120397A 2018-06-13 2019-06-13 Lgps系固體電解質及其製造方法 TWI799601B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-112866 2018-06-13
JP2018112866 2018-06-13

Publications (2)

Publication Number Publication Date
TW202000586A TW202000586A (zh) 2020-01-01
TWI799601B true TWI799601B (zh) 2023-04-21

Family

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Family Applications (1)

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TW108120397A TWI799601B (zh) 2018-06-13 2019-06-13 Lgps系固體電解質及其製造方法

Country Status (11)

Country Link
US (1) US11799128B2 (zh)
EP (1) EP3809425B1 (zh)
JP (1) JP7294334B2 (zh)
KR (1) KR102714666B1 (zh)
CN (1) CN112074918B (zh)
AU (1) AU2019286882B2 (zh)
CA (1) CA3096602A1 (zh)
HU (1) HUE060032T2 (zh)
PL (1) PL3809425T3 (zh)
TW (1) TWI799601B (zh)
WO (1) WO2019239949A1 (zh)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4092691B1 (en) * 2020-01-17 2025-04-23 Mitsubishi Gas Chemical Company, Inc. Method for producing sulfide solid electrolyte including sn
JP7400492B2 (ja) * 2020-01-22 2023-12-19 三菱瓦斯化学株式会社 硫化物系固体電解質の製造方法
TWI829867B (zh) * 2020-02-19 2024-01-21 日商三井金屬鑛業股份有限公司 含硫化合物、固體電解質及電池
JP7754083B2 (ja) * 2020-02-28 2025-10-15 株式会社Ｇｓユアサ 固体電解質、固体電解質の製造方法及び蓄電素子
JP2021150289A (ja) * 2020-03-17 2021-09-27 国立大学法人東京工業大学 硫化物固体電解質材料の製造方法
CN111710902B (zh) * 2020-06-01 2021-11-09 国联汽车动力电池研究院有限责任公司 玻璃-陶瓷型硫化物电解质及其制备方法和应用
WO2022009679A1 (ja) * 2020-07-10 2022-01-13 三菱マテリアル株式会社 固体電解質部材の製造方法
JP7251562B2 (ja) * 2020-07-10 2023-04-04 三菱マテリアル株式会社 固体電解質部材の製造方法
KR20230113276A (ko) * 2020-09-23 2023-07-28 솔리드 파워 오퍼레이팅, 인코퍼레이티드 고체 전해질 물질 및 이로 만든 고체 상태 배터리
KR102269019B1 (ko) * 2020-12-14 2021-06-25 한국전자기술연구원 고체전해질 및 그를 포함하는 전고체전지
JP7615815B2 (ja) * 2021-03-24 2025-01-17 三菱瓦斯化学株式会社 Ｌｇｐｓ型固体電解質の製造方法
JP7687592B2 (ja) * 2021-06-16 2025-06-03 株式会社Ｇｓユアサ 硫化物固体電解質、硫化物固体電解質の製造方法、及び蓄電素子
JP7679008B2 (ja) * 2021-06-16 2025-05-19 株式会社Ｇｓユアサ 硫化物固体電解質、硫化物固体電解質の製造方法、及び蓄電素子
CN113363569B (zh) * 2021-06-30 2023-05-05 国联汽车动力电池研究院有限责任公司 一种高稳定性无机硫化物固体电解质及其制备方法
KR102854498B1 (ko) * 2021-12-13 2025-09-03 고려대학교 산학협력단 리튬이차전지용 황화물계 고체 전해질, 이의 제조방법 및 이를 포함한 전극
WO2024143262A1 (ja) * 2022-12-28 2024-07-04 Ａｇｃ株式会社 硫化物固体電解質複合体の製造方法、硫化物固体電解質複合体および複合体粉末の製造方法
CN120836063A (zh) 2023-03-28 2025-10-24 公立大学法人大阪 固体电解质材料、固体电解质复合体、电极和固体电解质材料的制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104025363A (zh) * 2011-11-07 2014-09-03 出光兴产株式会社 固体电解质
CN105009332A (zh) * 2013-02-28 2015-10-28 I-Ten公司 制造单片全固态电池的方法
CN107851842A (zh) * 2015-07-09 2018-03-27 国立大学法人东京工业大学 锂固体电解质
WO2018096957A1 (ja) * 2016-11-28 2018-05-31 国立研究開発法人産業技術総合研究所 無機硫化物及びその製造方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6044588B2 (ja) 1977-08-24 1985-10-04 株式会社 サタケ 穀物乾燥機の乾燥自動停止装置
JPS6044587B2 (ja) 1978-03-03 1985-10-04 株式会社日立製作所 全低圧式の空気分離方法およびその装置
JPS56107566A (en) * 1980-12-03 1981-08-26 Hitachi Ltd Resin sealing method for semiconductor device
JPS57161835A (en) 1981-03-31 1982-10-05 Anritsu Corp Acoustooptical electric signal processor
JPS6044587U (ja) 1983-09-02 1985-03-29 山田　璋三 焼売
JPS6044588U (ja) 1983-09-02 1985-03-29 久保田　実 串刺機
JPS6222134U (zh) 1985-07-24 1987-02-10
KR101392689B1 (ko) 2010-03-26 2014-05-07 도요타지도샤가부시키가이샤 황화물 고체 전해질 재료, 전지 및 황화물 고체 전해질 재료의 제조 방법
WO2013118722A1 (ja) 2012-02-06 2013-08-15 トヨタ自動車株式会社 硫化物固体電解質材料、電池および硫化物固体電解質材料の製造方法
JP5888609B2 (ja) 2012-02-06 2016-03-22 国立大学法人東京工業大学 硫化物固体電解質材料、電池および硫化物固体電解質材料の製造方法
JP5750067B2 (ja) 2012-02-21 2015-07-15 ルネサスエレクトロニクス株式会社 制御装置及びデジタル制御電源並びに制御方法
CN105453324B (zh) 2013-06-07 2018-09-04 丰田自动车株式会社 硫化物固体电解质材料、电池和硫化物固体电解质材料的制造方法
JP6025981B2 (ja) * 2013-07-04 2016-11-16 三井金属鉱業株式会社 結晶性固体電解質及びその製造方法
CN105098228A (zh) * 2014-05-05 2015-11-25 中国科学院宁波材料技术与工程研究所 硫化物固体电解质材料及其制备方法
JP6044588B2 (ja) 2014-05-15 2016-12-14 トヨタ自動車株式会社 硫化物固体電解質材料、電池および硫化物固体電解質材料の製造方法
JP6044587B2 (ja) 2014-05-15 2016-12-14 トヨタ自動車株式会社 硫化物固体電解質材料、電池および硫化物固体電解質材料の製造方法
JP5975071B2 (ja) * 2014-07-22 2016-08-23 トヨタ自動車株式会社 硫化物固体電解質材料、電池および硫化物固体電解質材料の製造方法
JP6222134B2 (ja) 2015-02-25 2017-11-01 トヨタ自動車株式会社 硫化物固体電解質材料、電池および硫化物固体電解質材料の製造方法
JP2016213006A (ja) * 2015-05-01 2016-12-15 出光興産株式会社 多硫化物複合体及び硫化リチウム複合体の製造方法、正極合材、並びに全固体電池
US20190074541A1 (en) * 2016-03-11 2019-03-07 Tokyo Institute Of Technology Sulfide solid electrolyte
US20170317382A1 (en) * 2016-04-29 2017-11-02 University Of Maryland Battery made from a single material
CN106129465B (zh) 2016-08-10 2019-09-20 中国科学院西安光学精密机械研究所 一种掺氟锂离子固体电解质及其制备方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104025363A (zh) * 2011-11-07 2014-09-03 出光兴产株式会社 固体电解质
CN105009332A (zh) * 2013-02-28 2015-10-28 I-Ten公司 制造单片全固态电池的方法
CN107851842A (zh) * 2015-07-09 2018-03-27 国立大学法人东京工业大学 锂固体电解质
WO2018096957A1 (ja) * 2016-11-28 2018-05-31 国立研究開発法人産業技術総合研究所 無機硫化物及びその製造方法

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KR102714666B1 (ko) 2024-10-07
CA3096602A1 (en) 2019-12-19
PL3809425T3 (pl) 2022-11-21
TW202000586A (zh) 2020-01-01
AU2019286882B2 (en) 2023-11-23
HUE060032T2 (hu) 2023-01-28
JP7294334B2 (ja) 2023-06-20
JPWO2019239949A1 (ja) 2021-07-08
WO2019239949A1 (ja) 2019-12-19
US20210313618A1 (en) 2021-10-07
BR112020021583A2 (pt) 2021-03-02
KR20210020996A (ko) 2021-02-24
EP3809425A1 (en) 2021-04-21
AU2019286882A1 (en) 2020-11-12
CN112074918B (zh) 2022-02-22
US11799128B2 (en) 2023-10-24
CN112074918A (zh) 2020-12-11
EP3809425B1 (en) 2022-08-17
EP3809425A4 (en) 2021-08-11

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