TWI778531B - Release film roll, ceramic part sheet and method for producing the same, and ceramic part and method for producing the same - Google Patents

Abstract

The release film roll of the present disclosure has: a release film having a base film and a release layer; and a core on which the release film is wound. When the distance r [mm] along the radial direction from the outer peripheral surface of the roll core on the side of the release film roll is 10 to 130 mm, the rebound hardness K (r ) [HL] satisfies the following formula (1). -2r+670≦K(r)≦-1.25r+862.5…(1)

Description

Release film roll, ceramic part sheet and method for producing the same, and ceramic part and method for producing the same

The present disclosure relates to a release film roll, a ceramic part sheet and a method for producing the same, and a ceramic part and a method for producing the same.

In recent years, with the requirement of miniaturization of electronic machines, electronic components are also gradually miniaturized. One of the electronic parts, namely ceramic parts, has been miniaturized year by year. For example, a multilayer ceramic capacitor, which is one of the ceramic parts, has reduced the thickness of the dielectric layer and the internal electrode to increase the capacitance. A general multilayer ceramic capacitor is manufactured by using a release film as a carrier film, forming a dielectric layer and an internal electrode on the carrier film as a green sheet, peeling off the green sheet, and laminating.

When the thickness of the dielectric layer of the multilayer ceramic capacitor becomes thinner, the withstand voltage performance, which is a problem such as short circuit, tends to decrease. In particular, when the thickness of the dielectric layer is non-uniform, the thinner portion may be a cause of lowering the withstand voltage performance. The multilayer ceramic capacitor having the dielectric layer having such a thin portion has poor withstand voltage, and the yield of the multilayer ceramic capacitor decreases. On the other hand, if the thickness of the dielectric layer is uniform, the withstand voltage performance is good, and the yield of the multilayer ceramic capacitor is improved.

Damage or the like in the release film used as the carrier film for the dielectric layer is a factor for the thickness variation of the dielectric layer. In addition, the smoothness of the surface of the release film affects the thickness uniformity of the dielectric layer. In view of such a situation, for example, in Patent Document 1, a release film roll that can smooth the release film and reduce the thickness unevenness of the dielectric layer is examined. [Prior Art Literature] [Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. 2011-206995

[Problems to be Solved by Invention]

In the manufacturing step of the ceramic part, a ceramic green sheet is formed on the release film drawn from the release film roll. Here, as a measure for improving the productivity of ceramic parts, it is considered to be effective to lengthen the winding length of the release film wound around the release film roll and reduce the frequency of replacement of the release film roll.

Such release film rolls are fixed or supported by the core during storage and transportation. When the winding length is increased, there is a possibility that the roll-up release film may slip in the form of bamboo shoots due to vibrations during conveyance or the like. Moreover, there exists a possibility that a winding deviation will generate|occur|produce by vibration, and a peeling layer may be damaged by this. If the peeling layer is damaged, it may become a cause of pinholes in the dielectric layer. As a measure to avoid the occurrence of such winding offset and slip phenomenon, it is considered to be effective to increase the winding strength of the release film.

However, when the winding strength of the release film is increased, the uneven shape of the base film can be easily transferred to the release layer. When the winding length becomes longer, the pressure on the inner release film becomes larger, and it becomes easier to transfer the concave-convex shape in particular. As a measure to avoid such a phenomenon, it is considered to be effective to reduce the winding strength of the release film.

In this way, there are cases in which the winding strength is to be reduced in order to suppress the transfer of the concavo-convex shape near the winding core, and on the other hand, there are cases in which the winding strength is intended to be increased in order to suppress the winding deviation and slippage during conveyance and the like. Happening. In order to lengthen the winding length of the release film, it is necessary to take into account the opposite requirements.

Therefore, the present disclosure provides a release film roll that can sufficiently reduce damage to the release layer of the release film even if the winding length of the release film is lengthened. Furthermore, the present disclosure provides a method for producing a ceramic component sheet and a method for producing a ceramic component having excellent reliability by using such a release film roll. Furthermore, the present disclosure provides a ceramic component sheet and ceramic component having excellent reliability. [Technical means to solve problems]

A release film roll of one aspect of the present disclosure has: a release film having a base film and a release layer; a core on which the release film is wound; and a distance in the radial direction from the outer peripheral surface of the core on the side surface When r [mm] is 10 to 130 mm, the rebound hardness K(r) [HL] of the release film roll at a distance r measured from the surface of the release film exposed on the outer peripheral surface of the roll toward the center of the roll core satisfies the following formula (1). -2r+670≦K(r)≦-1.25r+862.5…(1)

The rebound hardness K(r) varies depending on the amount of air existing in the gap between the wound release films. When the amount of air existing between the release films increases, the rebound hardness K(r) decreases, and when the amount of air decreases, the rebound hardness increases. Here, when the rebound hardness K(r) is too high, the adjacent release films are too close to each other, and the uneven shape of the base film is easily transferred to the release layer. Since the rebound hardness tends to increase on the inner side of the release film roll, it is easy to transfer the uneven shape to the inner release film. Therefore, the inner part of the peeling film roll, that is, the part where the distance r is 10 to 130 mm, the rebound hardness K(r) is set to be equal to or less than a specific upper limit value (-1.25r+862.5). Thereby, transcription|transfer of the uneven|corrugated shape to a release film is suppressed.

On the other hand, when the rebound hardness K(r) is too low, the air existing between the adjacent release films increases, and the inner part of the release film roll tends to slide easily in the form of bamboo shoots, and it is easy to be damaged by vibration. There is a tendency for winding offset to occur. In addition, when the release film is wound with the release film on the outside, the force acts on the release film already wound on the inner side, which occurs when the winding direction is shifted and the winding is tightened and wrinkles are formed. Therefore, in the said peeling film roll, the rebound hardness K(r) is made into the specific lower limit value (-2r+670) or more in the part where the distance r is 10-130 mm. Thereby, bamboo shoot-like slippage of the peeling film, occurrence of winding deviation due to vibration, and occurrence of winding tightness are suppressed.

Therefore, even if the winding length of the peeling film is lengthened, the above-mentioned peeling film roll can sufficiently reduce damages such as unevenness and damage generated in the peeling layer of the peeling film.

The rebound hardness K(r) in the range where the distance r is less than 10 mm is preferably 650 HL or more. Thereby, it is possible to sufficiently suppress the occurrence of winding deviation of the release film in the vicinity of the core or the separation of the core from the release film roll. In addition, for the portion where the distance r is less than 10 mm, the ceramic green sheet may not be formed, and the peeling film roll can be effectively used in the replacement operation. For example, it can be used as a deceleration area for decelerating the delivery speed, and as a part that stays in a drying furnace.

The distance r ₀ from the outer peripheral surface of the roll core to the outer peripheral surface of the roll-shaped release film in the radial direction of the above-mentioned release film roll can be 160 mm or more, and the rebound hardness K(r) of the distance r is 160 mm or more is 350 ~ 662.5 HL. Thereby, in the whole peeling film roll, adjoining peeling films can be fully adhere|attached mutually, and generation|occurence|production of wrinkles in the peeling film in the outer peripheral part of a peeling film roll can be suppressed fully.

When the distance r is in the range of 10 to 130 mm, the release film can be wound so that the rebound hardness K(r) [HL] decreases as the distance r increases. Thereby, it is possible to sufficiently suppress the occurrence of winding misalignment in the vicinity of the inner circumference and the vicinity of the outer circumference of the release film roll.

A method of manufacturing a ceramic part sheet according to an aspect of the present disclosure includes the steps of forming a ceramic green sheet using a paste containing ceramic powder on the surface of the release layer of the release film drawn from any of the above-mentioned release film rolls.

The above-mentioned production method uses the release film drawn from any of the above-mentioned release film rolls. The peeling layer of the above-mentioned peeling film is sufficiently suppressed from the occurrence of damage and unevenness due to winding offset and sliding phenomenon. Therefore, a ceramic green sheet with sufficiently reduced thickness variation and pinholes can be formed over a wide area from the front end to the rear end of the release film wound on the release film roll. Therefore, a ceramic component sheet excellent in reliability can be produced. In the present disclosure, the "rear end" of the release film refers to an end on the side that is in contact with the roll core, and the "front end" of the release film refers to an end on the side that appears on the outer peripheral surface of the release film roll.

A method of manufacturing a ceramic part according to one aspect of the present disclosure includes the steps of: using the ceramic part sheet obtained by the above-described manufacturing method to obtain a laminate including a ceramic green sheet; and firing the laminate to obtain a sintered body.

In the above-mentioned production method, the ceramic parts are produced using a release film which sufficiently suppresses the occurrence of damage due to winding deviation, sliding phenomenon, and the like, and unevenness. Thereby, a ceramic green sheet with sufficiently reduced thickness variation and pinholes can be formed. Therefore, a ceramic part excellent in reliability can be manufactured.

The ceramic component sheet of one aspect of the present disclosure can be obtained by forming a green sheet including a ceramic green sheet on the surface of the release layer of the release film drawn from any of the above-mentioned release film rolls.

The above-mentioned ceramic component sheet can be obtained using a release film drawn from any of the above-mentioned release film rolls. The peeling layer of the above-mentioned peeling film has sufficiently suppressed the occurrence of damage and unevenness due to winding offset and sliding phenomenon. Therefore, thickness variation and pinholes of the ceramic green sheet can be sufficiently reduced. A ceramic component sheet obtained by forming a green sheet including such a ceramic green sheet has excellent reliability.

A ceramic component according to one aspect of the present disclosure includes a sintered body obtained by forming a layered body of ceramic green sheets including the above-mentioned ceramic component sheet, and by firing the layered body. The thickness variation and pinholes of the above-mentioned ceramic green sheets have been sufficiently reduced. The above-mentioned ceramic component is provided with a sintered body obtained by sintering a layered body including such a ceramic green sheet, and thus is excellent in reliability. [Effect of invention]

According to the present disclosure, even if the winding length of the release film is lengthened, it is possible to provide a release film roll that can sufficiently reduce damage to the release layer of the release film. Moreover, by using such a peeling film roll, the manufacturing method of the ceramic component sheet|seat which has the outstanding reliability, and the manufacturing method of a ceramic component can be provided. In addition, a ceramic component sheet and ceramic component having excellent reliability can be provided.

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings depending on the circumstances. In each drawing, the same or equivalent elements are marked with the same symbols, and repeated explanations are omitted depending on the situation. However, the following embodiments are examples for explaining the present disclosure, and are not intended to limit the present disclosure to the following contents.

Fig. 1 is a perspective view of a release film roll according to an embodiment. The release film roll 100 of FIG. 1 is provided with the release film 20 which has a base material film and a release layer, and the core 10 with which the release film 20 was wound. The release film 20 is used as a carrier film in, for example, a manufacturing process of ceramic parts including a multilayer ceramic capacitor. In this production step, for example, by coating or printing on the release film, a ceramic green sheet to be a dielectric sheet and an electrode green sheet to be an internal electrode are formed, and then these are peeled off and laminated. , sintering the laminate to manufacture ceramic parts. The release film 20 is used by being pulled out from the release film roll 100 .

Examples of the material of the core 10 include paper, plastic, metal, and the like. In the manufacture of ceramic parts, since the particles may cause pinholes, it is preferable to include a lightweight plastic that does not generate paper dust. Examples of such materials include ABS resins, phenolic resins, fiber-reinforced plastics, and the like. Fiber-reinforced plastics can be preferably used because they have flexibility in addition to high mechanical strength. Examples of fiber-reinforced plastics include fibers reinforced with thermosetting resins. As resin, epoxy resin, unsaturated polyester resin, etc. are mentioned. As fiber, glass fiber, aramid fiber, etc. are mentioned. In consideration of cost and the like, the resin may be an unsaturated polyester resin. From the same viewpoint, the fibers may be glass fibers.

When the core 10 is made of fiber-reinforced plastic, the rebound hardness K(r) in the range where r is less than 10 mm may be less than 950 HL. Thereby, the occurrence of cracking of the winding core 10 can be suppressed. On the other hand, when the core 10 is made of metal, the rebound hardness K(r) in the range where r is less than 10 mm may exceed 950 HL. The outer diameter of the core 10 may be 150 mm or less, or 100 mm or less. Thereby, the size of the peeling film roll 100 can be reduced, and the installation space and transportation cost can be reduced.

The winding length of the release film 20 wound around the core 10 may be 4000 m or more, 5000 m or more, or 6000 m or more. Thereby, in the manufacturing steps of ceramic green sheets and ceramic parts, etc., the replacement frequency of the peeling film roll 100 can be reduced, thereby improving the production efficiency of various products. The thickness of the peeling film 20 may be 10-110 μm, or 20-60 μm. The width of the release film 20 may be, for example, 100 to 1000 mm. In addition, in the present disclosure, the direction in which the release film is conveyed when the release film is drawn and wound is referred to as the longitudinal direction, and the direction orthogonal to the longitudinal direction of the release film is referred to as the width direction of the release film.

FIG. 2 is a cross-sectional view showing an example of a release film. The release film 20 has a base film 22 and a release layer 24 on one side thereof. The base film 22 may be a synthetic resin film. Examples of synthetic resins include polyolefin resins such as polyester resins, polypropylene resins, and polyethylene resins, acrylic resins such as polylactic acid resins, polycarbonate resins, and polymethyl methacrylate resins, polystyrene resins, and polyamide resins such as nylon. Amide resin, polyvinyl chloride resin, polyurethane resin, fluorine resin, polyphenylene sulfide resin, etc. Among them, polyester resins are preferred. Among the polyester resins, polyethylene terephthalate (PET) is more preferred from the viewpoints of mechanical properties, transparency, cost, and the like.

The thickness of the base film 22 is preferably 10 to 100 μm, more preferably 20 to 50 μm. When the thickness is less than 10 μm, the physical properties such as the dimensional stability of the release film 20 tend to be impaired. When the thickness exceeds 100 μm, the production cost per unit area of the release film 20 tends to increase.

From the viewpoint of sufficiently improving the mechanical strength of the release film 20, the base film 22 may contain a filler (filler) to such an extent that transparency is not impaired. The release film roll 100 of the present embodiment is capable of sufficiently suppressing the transfer of the shape of the filler to the release layer 24 of the adjacent release film 20 even if the base film 22 contains the filler. The filler is not particularly limited, and examples thereof include calcium carbonate, calcium phosphate, silica, kaolin, talc, titanium oxide, fired silica, alumina, and organic particles.

When a polyester film is used as the base film 22, it can be manufactured according to the following procedure. First, molten polyester is cast from an extruder onto a rotating cooling drum. The molten polyester is extruded from a slotted die. Then, it cooled and peeled from a rotating cooling roll, and obtained the polyester film which is not extended|stretched. If the gap of the gap of the extruder is adjusted, the thickness of the polyester film and its variation range can be adjusted.

Next, the unstretched polyester film is stretched, adjusted to a desired thickness, and given mechanical strength. The stretching of the polyester film is preferably carried out by biaxial stretching. In this case, horizontal stretching is performed after vertical stretching. The stretching temperature at the time of stretching is preferably performed at a temperature equal to or higher than the glass transition temperature of the polyester film and lower than or equal to the melting temperature. When extending vertically and horizontally, it can be extended several times respectively. The thickness variation of the unstretched film is also continued after stretching. Therefore, by controlling the thickness variation of the unstretched film, the thickness variation range of the base film 22 and the release film 20 can be adjusted.

The release layer 24 is formed by coating a solution containing a release agent on one surface of the base film 22, drying and curing it. The coating method is not particularly limited, as long as a reverse coating method, a gravure coating method, a bar coating method, a bar coating method, a Meyer bar coating method, a die coating method, a spray coating method, or the like is used. For drying, hot air drying, infrared drying, natural drying and the like can be used. In order to suppress moisture condensation during drying, heating is preferably performed, and it can be about 60 to 120°C.

As a release agent used for forming the release layer 24, a silicone type release agent, a long-chain alkyl type release agent, a fluorine type release agent, and an amino alkyd resin type are mentioned, for example. Silicone-based release agents include addition reaction-type silicone release agents, condensation-type ketone-silicon release agents, and UV-curable release agents based on the difference in curing reaction.

The curing conditions may be appropriately selected according to the curing system of the release agent. For example, if the release agent is an addition reaction type silicone, it can be hardened by heat treatment at 80-130°C for several tens of seconds. In the case of an ultraviolet curing system, a mercury lamp, a metal halide lamp, or the like can be used as a light source, and ultraviolet rays can be irradiated and cured. In the case of radical polymerization by irradiation with ultraviolet rays, it is preferable to perform curing in a nitrogen atmosphere in order to prevent oxygen inhibition. The thickness variation of the peeling layer 24 is preferably small.

The addition reaction-based silicone release agent reacts with hydrosiloxane to harden the polydimethylsiloxane with vinyl groups introduced into the terminal and/or side chain. Hardening can use platinum catalysts. For example, it can be hardened at a hardening temperature of about 100°C for several tens of seconds to several minutes. The thickness of the peeling layer 24 may also be about 50-300 nm. As the release agent of the addition reaction system, K847, KS847T, KS-776L, KS-776A, KS-841, KS-774, KS-3703T, KS-3601, etc., manufactured by Shin-Etsu Chemical Co., Ltd. (all are Product name).

The peeling layer 24 may be constituted by, for example, a (meth)acrylate component and a cured product of a (meth)acrylate modified silicone. Since such a cured product can be cured by ultraviolet rays, the thickness of the peeling layer 24 can be increased. Therefore, for example, when the base film 22 contains the filler, the protrusions due to the filler can be covered, and the surface (release surface) of the release layer 24 can be smoothed. In this case, the thickness of the peeling layer 24 may be 30 to 3000 nm.

It is also possible to use immiscible (meth)acrylate monomers and (meth)acrylate modified silicone oils. These are mixed with a reaction initiator in a solvent, and after apply|coating to the base film 22, the solvent is dried. In this way, the release layer 24 can also be formed by curing the silicone-modified silicone oil with ultraviolet rays in a state where the silicone-modified silicone oil is localized near the surface. As the (meth)acrylate-modified silicone oil, well-known ones can be used. For example, X-22-164A, X-22-164B, X-22-174DX, X-22-2445 (all are trade names) by Shin-Etsu Chemical Co., Ltd., etc. are mentioned.

The surface of the release layer 24 of the release film 20 is preferably smooth. Specifically, the surface roughness (Rp) of the peeling layer 24 is preferably 100 nm or less, more preferably 50 nm or less. The surface roughness (Rp) of the peeling layer 24 of the present embodiment is the maximum peak value specified in JIS B 0601-2001, and can be measured using a contact surface roughness meter or a scanning white interference microscope.

The thickness fluctuation range in the width direction of the release film 20 is preferably 0.5 μm or less, more preferably 0.4 μm or less, and still more preferably 0.3 μm or less. Especially preferably, it is 0.2 μm or less. When the thickness fluctuation range becomes large, the repulsion hardness is higher than the other parts because the wound release films 20 are in strong contact with each other in the thick part. Deformation of the release film 20 can be suppressed by reducing the thickness fluctuation range. In addition, when the ceramic green sheets are formed on the release film 20, the thickness fluctuation range of the ceramic green sheets can be reduced.

The width of the thickness variation in the width direction of the release film of the present disclosure is the difference between the maximum value and the minimum value of the thickness of the release film between both ends in the width direction of the release film 20 . The difference is obtained as follows.

A reference point is set on the release film 20, and a plurality of positions for measuring the thickness of the release film are set along the width direction. The interval between the measured positions can be appropriately set. For example, since the thickness of the peeling film is substantially less likely to change drastically, it may be set to an interval of about 1 mm to 10 mm. Moreover, a reference point can be set as the side edge of a peeling film, for example. The thickness of the peeling film was measured at each measurement position, and the film was appropriately moved in the longitudinal direction. Similarly, the thickness of the peeling film was appropriately measured. The average value is calculated by using a plurality of measured values of thickness in the longitudinal direction measured at the same position in the width direction, and the difference between the maximum value and the minimum value of the average value of the thickness of the release film calculated for each measurement position in the width direction becomes the thickness variation range.

As the thickness measurement method, methods such as a contact thickness measurement device, an optical thickness measurement device, an electrostatic capacitance type thickness measurement device, and a radiation type thickness measurement device using beta rays, fluorescent X-rays, etc., and observation by a microscope are exemplified. A method of measuring the cross section of the release film 20, etc. If a contact thickness measuring device is used, the thickness variation of the release film 20 can be directly measured. In addition, the thickness fluctuation range of the base film 22 and the peeling layer 24 may be measured separately by the same method or a different method, and the thickness of each may be summed up as the thickness of the peeling film 20 . For example, the thickness of the base film 22 may be measured with a radiation-type film thickness meter, the thickness of the release layer 24 may be measured by an optical measurement obtained by spectrophotometry, and the thickness variation of each may be summed up as the thickness of the release film 20 . range of change. In addition, the measurement spot diameter of the optical thickness measuring device may be appropriately set, and may be set to about 0.2 m to 2 mm.

In addition, a thickness measuring device may be installed in a production line such as a coating device or a cutting device, and the thickness may be measured successively. By carrying out the thickness measurement in which the measuring device is installed in the production line by an optical type or a radiation type, it is possible to prevent the measuring device from coming into contact with the release film 20 . Thereby, damage etc. can be suppressed, and the quality of a peeling film roll can be fully maintained. By arranging the thickness gauge in the coating line or the cutting line, the thickness can be measured over the entire length of the release film 20 by measuring while crossing the thickness gauge in the width direction when the release film 20 is conveyed.

FIG. 3 is a side view of the roll 100 of release film. On the side surface 12 of the release film roll 100, the side end of the release film 20 wound around the core 10 is exposed. However, in FIG. 3, only the release film 20 of the outermost periphery is shown for illustration. As shown in FIG. 3, in the side view, when the distance r [mm] measured from the outer peripheral surface 10a of the core 10 of the peeling film roll 100 along the radial direction R of the peeling film roll 100 is 10 to 130 mm, the following formula is satisfied (1). (-2r+670)≦K(r)≦(-1.25r+862.5)…(1)

In the formula (1), K(r) represents the rebound hardness [HL]. The rebound hardness K(r) is obtained from the rebound of the surface of the release film 20 of the outer peripheral surface 26 of the release film roll 100 when a ball hits it. The rebound hardness K(r) can be measured by a Leeb hardness tester or a tester sold in the market under the name of a rebound hardness tester. As a manufacturing company of the measuring device, SMART SENSOR and the like are mentioned. In addition, there are cases where the rebound hardness of the present disclosure is called Leeb hardness. In addition, in the above formula (1), the upper limit value and the lower limit value of the rebound hardness K(r) when the distance r is 10 to 130 mm are specified.

The lower limit of the distance r ₀ along the radial direction R from the outer peripheral surface 10 a of the roll core 10 to the outer peripheral surface 26 of the roll release film 20 may be 160 mm or 200 mm. In this case, when the distance r is 160 mm or more, the rebound hardness K(r) may be 350 to 662.5 HL. Thereby, in the whole peeling film roll 100, the adjacent peeling films 20 can be sufficiently adhered to each other, and the generation of wrinkles in the peeling film in the outer peripheral portion of the peeling film roll 100 can be sufficiently suppressed. The upper limit of the distance r ₀ may be 500 mm.

FIG. 4 is a diagram for explaining a method of measuring the rebound hardness K(r). In the release film roll 100 of FIG. 3, when the distance r ₀ exceeds 130 mm, in order to measure the rebound hardness K(r) of the distance r in the range of 10 to 130 mm, the release film wound on the release film roll 100 needs to be pulled out. 20 until the distance r is 130 mm. And, in the side surface 12A of the roll 23, after the distance r from the outer peripheral surface 10a of the core 10 in the radial direction of the release film roll 100 to the outer peripheral surface 26A of the roll 23 reaches 130 mm, as shown in FIG. The sensor is pressed against the surface 27 of the release film 20 exposed on the outer peripheral surface 26A of the roll 23 (release film roll), and the rebound hardness K(r) is measured. At this time, the sensor is pressed against the central portion of the release film 20 in the width direction. Moreover, as shown by the arrow P, it presses toward the center C of a winding core. Thereby, the rebound hardness K(r) when the distance r was 130 mm was measured. After that, while pulling out the release film 20, it is sufficient to measure the rebound hardness K(r) of the distance r in the range of 10 to 130 mm. Generally speaking, since the rebound hardness does not change drastically in the release film roll, it is preferable to measure the rebound hardness K(r) at a distance r of about 5 mm. In addition, when the distance r ₀ exceeds 130 mm, in order to measure the rebound hardness K(r) of the distance r in the range of 10 to 130 mm, the release film 20 wound on the release film roll 100 is pulled out until the distance r becomes In the process of 130 mm, the interval of distance r can also be appropriately set in the same way as above, and the rebound hardness K(r) from 130 mm to distance r ₀ can be measured.

When the distance r is 10 to 130 mm, when the rebound hardness K(r) is high, the adjacent release films 20 are too closely adhered to each other, and the uneven shape of the base film 22 is easily transferred to the release layer 24 . When a ceramic green sheet is formed on such a release film 20, the thickness variation of the ceramic green sheet tends to increase. On the other hand, if the rebound hardness K(r) becomes lower, more air exists between the adjacent release films 20, and the inner portion of the release film roll 100 tends to be prone to the release film 20 sliding like bamboo shoots, and The tendency of winding deflection due to vibration. If such a phenomenon occurs, the peeling layer 24 is damaged, and pinholes are easily generated in the ceramic green sheet formed on the peeling film. Since the peeling film roll 100 of the present embodiment satisfies the above-mentioned formula (1), damage (unevenness and damage) generated in the peeling layer 24 of the peeling film 20 can be sufficiently reduced.

When the distance r is in the range of 10-130 mm, the release film 20 can be wound in such a manner that the rebound hardness K(r) decreases as the distance r increases. Thereby, generation|occurrence|production of winding misalignment in both the inner peripheral part and the outer peripheral part of the peeling film roll 100 can be suppressed fully. When the distance r is 130 mm or more, the release film 20 may be wound so that the rebound hardness K(r) decreases as the distance r increases. When the distance r is less than 10 mm, the rebound hardness K(r) can be above 650 HL. Thereby, it is possible to sufficiently suppress the occurrence of winding deviation of the release film in the vicinity of the core 10 or the detachment of the core 10 from the release film roll 100 . In addition, for the part where the distance r is less than 10 mm, the ceramic green sheet may not be formed, and it can be effectively used in the replacement operation of the peeling film roll.

5 : is a figure which shows an example of the manufacturing apparatus of the peeling film roll 100. In the manufacturing apparatus 300 of FIG. 5, the peeling film roll 200 is used. The release film roll 200 winds the release film 20A having a wider width (for example, 1 to 2 m) than the release film 20 on the core 11 . The release film roll 200 is manufactured by winding the release film 20A around the core 11 by a well-known method. At this time, the base film side of the release film 20A may be wound around the core 11 as the inner side, or the release layer side may be wound as the inner side.

The manufacturing apparatus 300 inserts the core 11 of the peeling film roll 200 on the upstream side to the rotating shaft 202, and the rotating shaft 202 supports the peeling film roll 200 rotatably. Moreover, the manufacturing apparatus 300 is provided with the nip roll 50 provided with the pair of rolls which sandwich the release film 20A pulled out from the release film roll 200 in the up-down direction; the cutting part 60; The core 10 of the film roll 100 supports the core 10 rotatably.

Among the nip rollers 50, the upper roller 50a may be a roller whose surface is made of rubber. The lower roller 50b may be a roller whose surface is made of metal. The nip roll 50 has a function of making the tension of the release film 20A different between its upstream side and its downstream side. Thereby, the tension control at the time of winding the release film 20 around the core 10 can be performed highly freely.

The cutting part 60 has an upper blade roller 60a and a lower blade roller 60b. The upper blade roller 60a may be provided with a plurality of upper blades at specific intervals along the rotation axis direction thereof. The upper blade of the upper blade roller 60a may be engaged with the lower blade roller 60b. The release film 20A that has passed through the nip roll 50 is cut in the longitudinal direction between the upper blade roll 60a and the lower blade roll 60b. Thereby, it is divided|segmented into the release film 20 which has a width|variety of 100-500 mm, for example. When a plurality of cores 10 are attached to the take-up shaft 102 and the cut release film 20 is wound around the core 10 while pressing the cut release film 20 with the touch roll 70, a plurality of release film rolls 100 can be produced at one time. As the cutting part 60, a well-known cutting machine such as a row blade can be used. In addition, the cutting part 60 may not be provided. In this case, one release film roll 100 can be obtained from one release film roll 200 .

The release film 20 cut by the cutting part 60 is wound around the core 10 attached to the winding shaft 102 . At this time, the take-up shaft 102 rotates with a predetermined torque, and the contact roller 70 which rotates while being in contact with the release layer 24 of the release film 20 presses the wound release film 20 against the core 10 side. That is, the release film 20 is wound while being pressed by the touch roll 70 . The touch roller 70 may also be rotationally driven. In this way, by using the touch roller 70, the air between the release films 20 can be sufficiently reduced without increasing the tension. Thereby, the occurrence of winding misalignment, slip phenomenon, and winding tightness can be suppressed, and the occurrence of wrinkles and damage in the peeling layer 24 can be suppressed.

By controlling the pressing force and driving force of the touch roller 70 and the torque control of the winding shaft 102 , the rebound hardness K(r) of the surface of the release layer 24 of the release film 20 wound on the release film roll 100 can be adjusted. For example, when the release film 20 is cut and wound, the diameter (roll diameter) of the release film roll 100 gradually increases. The winding tension is adjusted to a desired tension by controlling the torque of the winding shaft 102 according to the winding diameter during winding. As the coil diameter increases, the tension decreases more than necessary, and when the rebound hardness K(r) is lower than the lower limit, the rebound hardness can be increased only by increasing the torque of the winding shaft 102 . In addition, even if the coil diameter increases, the tension is not sufficiently lowered, and when the rebound hardness K(r) exceeds the upper limit, the torque of the winding shaft 102 can be reduced to reduce the rebound hardness.

The manufacturing method of the peeling film roll 100 is not limited to the said method. For example, it is also possible to manufacture only by driving the touch roll and adjusting the torque of the touch roll.

6 is a cross-sectional view of a ceramic component sheet according to an embodiment of the present disclosure. The manufacturing method of the ceramic part sheet 40 of FIG. 6 has the following steps: on the surface 24a of the peeling layer 24 of the peeling film 20 drawn from the peeling film roll 100, a paste containing ceramic powder and an electrode paste are used to form a paste containing ceramic powder and an electrode paste. Green sheet 30 of green sheet 32 and electrode green sheet 34 .

The ceramic green sheet 32 can be formed by coating and drying a ceramic paste containing ceramic powder. The electrode green sheet 34 can be formed by coating electrode paste on the ceramic green sheet 32 and drying it.

For example, in the case of a multilayer ceramic capacitor, a ceramic paste can be prepared by kneading a dielectric raw material (ceramic powder) and an organic vehicle. As a dielectric raw material, various compounds which become composite oxides or oxides by firing are exemplified. For example, carbonates, nitrates, hydroxides, organometallic compounds and the like can be appropriately selected and used. The average particle size of the dielectric raw material is 4 μm or less, preferably 0.1-3.0 μm powder.

The electrode paste can be, for example, at least one selected from the group consisting of conductive materials such as various conductive metals and alloys, and various oxides, organometallic compounds, and resinates that become conductive materials after firing. It is prepared by mixing with organic media. As the conductor material used in the production of the electrode paste, Ni metal, Ni alloy, or a mixture thereof is preferably used. To improve adhesion, the electrode paste may also contain a plasticizer. Examples of the plasticizer include phthalates such as butyl benzyl phthalate (BBP, Butyl Benzyl Phthalate), adipic acid, phosphoric acid esters, glycols, and the like.

The organic vehicle contained in the ceramic paste and the electrode paste is prepared by dissolving a binder resin in an organic solvent. Examples of the binder resin used for the organic vehicle include ethyl cellulose, acrylic resin, butyral resin, polyvinyl acetal, polyvinyl alcohol, polyolefin, polyurethane, polystyrene, and the like. Copolymers, etc. Among them, butyral-based resins, specifically polyvinyl butyral-based resins, are preferably used. By using the butyral-based resin, the mechanical strength of the ceramic green sheet can be improved. One or both of the ceramic paste and the electrode paste may optionally contain at least one additive selected from the group consisting of various dispersants, plasticizers, antistatic agents, dielectrics, glass frit, insulators, and the like.

The above-mentioned ceramic paste is applied to the surface 24a of the release layer 24 of the release film 20 using, for example, a squeegee device. Then, the applied ceramic paste is dried in a drying apparatus, for example, at a temperature of 50 to 100° C. for 1 to 20 minutes to form a ceramic green sheet 32 . The ceramic green sheet 32 shrinks by 5 to 25% compared to before drying.

Then, on the surface 32a of the ceramic green sheet 32, the above-mentioned electrode paste is printed in a specific pattern using, for example, a screen printing apparatus. The printed electrode paste is dried in a drying device, for example, at a temperature of 50 to 100° C. for 1 to 20 minutes to form an electrode green sheet 34 . In this way, the ceramic component sheet 40 in which the ceramic green sheet 32 and the electrode green sheet 34 are sequentially laminated on the release layer 24 of the release film 20 can be obtained.

When the unevenness|corrugation of the release film 20 of the release film roll 100 becomes large, the thickness fluctuation range of the ceramic green sheet 32 becomes large. The peeling film 20 pulled out from the peeling film roll 100 has sufficiently reduced the generation of damage and unevenness of the peeling layer 24 due to winding deviation and sliding phenomenon. Therefore, the ceramic green sheet 32 in which thickness variation is sufficiently suppressed can be formed over a wide area from the front end to the rear end of the release film 20 wound on the release film roll 100 . The reliability of a ceramic part produced using the ceramic part sheet 40 having such a ceramic green sheet is good.

The thickness of the ceramic green sheet 32 and the electrode green sheet 34 may be 1.0 μm or less, respectively. Even if the thickness is so small, thickness variation is suppressed, so that a ceramic part with high reliability can be obtained. The ceramic component sheet of the present disclosure is not limited to that shown in FIG. 6 , and for example, it may be composed of only the ceramic green sheet 32 without the electrode green sheet.

A method of manufacturing a ceramic part according to an embodiment of the present disclosure includes: a lamination step of preparing a plurality of ceramic part sheets, laminating green sheets of the plurality of ceramic part sheets to obtain a laminated body; and a firing step of firing the laminated body body to obtain a sintered body; and an electrode formation step of forming terminal electrodes on the sintered body to obtain a multilayer ceramic capacitor.

FIG. 7 is a cross-sectional view showing an example of a multilayer ceramic capacitor manufactured by the above-described manufacturing method. The multilayer ceramic capacitor 90 includes an inner layer portion 92 and an outer layer portion 93 sandwiching one of the inner layer portions 92 in the stacking direction. The multilayer ceramic capacitor 90 has terminal electrodes 95 on the side surfaces.

The inner layer portion 92 has a plurality of layers (13 layers in this example) of ceramic layers 96 (dielectric layers) and a plurality of layers (12 layers in this example) of internal electrode layers 94 . The ceramic layers 96 and the internal electrode layers 94 are alternately laminated. The internal electrode layer 94 is electrically connected to the terminal electrode 95 . The outer layer portion 93 is formed of a ceramic layer. This ceramic layer may be formed in the same manner as the ceramic green sheet 32, for example.

In the lamination step, the release film 20 of the ceramic component sheet 40 shown in FIG. 6 is peeled off to obtain a green sheet 30 . One surface 30b of the green sheet 30 is laminated on the green sheet for outer layers. The other peeling film 20 is peeled off from the other ceramic part sheet 40 to obtain another green sheet 30, and the electrode green sheet 34 of the first peeled green sheet and the electrode green sheet 30b of the other green sheet 30 are laminated so that they face each other. Then, by repeating this procedure, the green sheets 30 are laminated to obtain a laminated body. That is, in this lamination step, the release film 20 is peeled off to obtain a green sheet 30, and the green sheets 30 are sequentially laminated. By repeating this sequence a plurality of times, a layered body is formed. Finally, lamination of green sheets for outer layers is also performed.

The number of laminated sheets of the green sheets of the laminated body is not particularly limited, and may be, for example, tens to hundreds of layers. A green sheet for an outer layer having a thickness where no electrode layer is formed may be provided on both end surfaces orthogonal to the lamination direction of the laminate. After forming the layered body, the layered body may be cut and used as a green sheet.

In the firing step, the layered body (green sheet) obtained in the layering step is fired to obtain a sintered body. The firing conditions are preferably 1100 to 1300°C in an atmosphere such as a humidified mixed gas of nitrogen and hydrogen. However, the oxygen partial pressure in the atmosphere during firing is preferably 10 ^-2 Pa or less, more preferably 10 ^-2 to 10 ^-8 Pa. In addition, it is preferable to perform the debindering process of a laminated body before baking. The debinder treatment can be carried out under normal conditions. For example, when a base metal such as Ni or a Ni alloy is used as the dielectric material of the internal electrode layer, it is preferably performed at 200 to 600°C.

After firing, in order to reoxidize the ceramic layer constituting the sintered body, heat treatment may be performed. The holding temperature or the maximum temperature of the heat treatment is preferably 1000 to 1100°C. The oxygen partial pressure during heat treatment is preferably higher than the oxygen partial pressure of the reducing atmosphere during firing, more preferably 10 ^-2 Pa to 1 Pa. The sintered body thus obtained is preferably subjected to face grinding by, for example, barrel grinding, sandblasting, or the like.

In the electrode forming step, the terminal electrode 95 is formed by firing the terminal electrode paste on the side surface of the sintered body, whereby the multilayer ceramic capacitor 90 shown in FIG. 7 can be obtained. In the manufacturing method of this multilayer ceramic capacitor 90, the peeling film roll 100 which has the peeling layer which fully reduces the damage by the unevenness|corrugation of the peeling film 20, winding offset, etc. is used. Therefore, thickness unevenness and pinholes of the ceramic layer 96 and the internal electrode layer 94 can be sufficiently reduced. Therefore, the breakdown of the withstand voltage is suppressed, and the reliability is excellent.

Although some embodiments have been described above, the present disclosure is not limited to the above-mentioned embodiments. For example, although the example of forming a multilayer ceramic capacitor as a ceramic component has been described, the ceramic component of the present disclosure is not limited to a multilayer ceramic capacitor, and may be other ceramic components, for example. The ceramic part can also be, for example, a varistor or a multilayer inductor. [Example]

Although the content of the present disclosure will be described in more detail with reference to Examples and Comparative Examples, the present disclosure is not limited to the following Examples.

(Example 1) <Production of peeling film roll> In order to prepare a release film, a release agent solution was prepared according to the following procedure. For 100 parts by mass of nonanediol diacrylate, prepare 0.25 parts by mass of acrylate-modified silicone oil (trade name: X-22-2445, manufactured by Shin-Etsu Chemical Co., Ltd.), and 100 parts by mass of methyl ethyl acetate ketone, and 100 parts by mass of toluene. These were put into a metal container, stirred and mixed to obtain a colorless and transparent solution.

2.5 parts by mass of a reaction initiator (trade name: Omnirad127, manufactured by IGM Rasins B.V.) was added to the above solution to prepare a coating liquid. The coating liquid was extruded from the gap of the coating device, and coated on one side of a biaxially stretched polyethylene terephthalate film (PET film, thickness: 30 μm) with a width of 1100 mm, and heated at a temperature of 80°C. The air was blown for 30 seconds to evaporate methyl ethyl ketone and toluene. In this way, a coating layer is formed on the PET film.

Next, ultraviolet rays are irradiated in a nitrogen atmosphere with an oxygen concentration of 100 ppm to harden the coating layer to form a peeling layer with a peeling function. In this way, a release film (before cutting) having a release layer on one surface of the PET film was obtained. Using a scanning white interference microscope (device name: VS1540, manufactured by Hitachi Hightech Co., Ltd.), the surface roughness (Rp) of the release layer of the release film was measured. As a result, the surface roughness (Rp) of the peeling layer was 30 nm. Such a release film was wound around a core to obtain a release film roll (before cutting). In addition, the thickness of the peeling layer was 1 μm, and the thickness fluctuation range, which is the difference between the maximum value and the minimum value of the thickness in the width direction of the peeling film, was 0.5 μm. In addition, the total length of the produced release film was 7000 m.

Using the manufacturing apparatus shown in FIG. 5, the said peeling film roll (before cutting) was attached to the rotating shaft 202. The peeling film drawn out from the peeling film roll (before cutting) was cut into five pieces along the long side by the cutting part 60, and the size was set to a width of 200 mm. As shown in FIG. 5 , each of the five rolls of the release film (after cutting) was wound around the core 10 so that the release layer 24 became the outer side. At the time of winding, the touch roll 70 is pressed against the release film roll 100 , and the winding shaft 102 and the touch roll 70 are driven to rotate, and are wound around the core 10 . In this way, 5 rolls of release film were obtained. 5 rolls of release film were wound under the same conditions. The winding length of the 5 rolls of release film is 6000 m. Moreover, in 5 rolls of peeling film rolls, the distance _r0 from the outer peripheral surface of a core to the outer peripheral surface of the peeling film wound in a roll shape was all about 205 mm.

<Measurement of rebound hardness K(r)> The rebound hardness K(r) of the peeling layer of the first peeling film roll among the five peeling film rolls thus obtained was measured. The rebound hardness K(r) was measured using a digital hardness tester (trade name: AR936, measuring range: 170-960 HLD) manufactured by SMART SENSOR.

The rebound hardness K(r) is measured on the surface of the release layer (the center part in the width direction) of the outermost release film in the release film roll, and the sensor of the digital hardness tester is pressed against the center of the roll core C is carried out. The measurement is to measure the rebound hardness K(r) of the release film roll when the distance r in the radial direction reaches a specific value while unwinding the release film roll. Specifically, in the range of r from 195 mm to 135 mm, measurements were made at 10 mm intervals. That is, the rebound hardness K(r) was measured when the distance r was 195 mm, 185 mm, and 135 mm. Also, when the distance r is in the range of 135 mm to 5 mm, the measurement is performed at intervals of 5 mm. That is, the rebound hardness K(r) was measured when the distance r was 135 mm, 130 mm, and 5 m. The relationship between the distance r and the rebound hardness K(r) of Example 1 is plotted in FIG. 8 . As shown in FIG. 8 , when the distance r is 10 to 130 m, the rebound hardness K(r) satisfies the above formula (1).

<Formation and Evaluation of Dielectric Green Sheet> The release film was pulled out from the second release film roll among the 5 release film rolls, and the surface state of the release layer of the release film was visually inspected. As a result, there was no particular abnormality. Using the 3rd release film roll among the 5 rolls of release film rolls, a dielectric green sheet was formed as a ceramic component sheet according to the following procedure. BaTiO3 _- based powder was prepared as a ceramic powder, polyvinyl butyral (PVB) as an organic binder, and methanol as a solvent, respectively. Next, with respect to 100 parts by mass of the ceramic powder, 10 parts by mass of the organic binder and 165 parts by mass of the solvent were prepared, and kneaded with a ball mill to obtain a dielectric slurry.

The release film roll was mounted on a coater, and the dielectric slurry was applied to the release layer side of the release film pulled out from the release film roll to form a dielectric green sheet on the release film. The set thickness of the dielectric green sheet was 0.9 μm. The presence or absence of pinholes in the dielectric green sheet formed on the release film and the variation in thickness of the dielectric green sheet were investigated. The presence or absence of pinholes is checked by an image processing inspection device. The thickness variation range was continuously measured using a transmission-type X-ray film thickness meter (trade name: manufactured by AccureX Co., Ltd. Hutec) installed in-line. The thickness variation range is obtained from the average value, maximum value and minimum value of the thickness. That is, the larger value of the absolute value of the maximum value and the average value and the absolute value of the minimum value and the average value is used as the thickness variation width.

As a result, the average thickness of the dielectric green sheets was 0.9 μm, and the thickness fluctuation range was 0.04 μm. The fluctuation range is within ±5% (0.045 μm) of the set thickness (0.9 μm), which is a good product. Also, no pinhole was detected.

(Example 2) The same procedure as in Example 1 was carried out, except that the torque of the winding shaft 102 when the release film (after cutting) was wound using the winding device was adjusted, and the tension applied to the wound release film was set to about 0.8 times that of Example 1. to make rolls of release film. And, similarly to Example 1, the measurement of rebound hardness K(r), and the formation and evaluation of a dielectric green sheet were performed. The relationship between the distance r and the rebound hardness K(r) of Example 2 is plotted in FIG. 8 . As shown in FIG. 8 , when the distance r is 10 to 130 m, the rebound hardness K(r) satisfies the above formula (1). The release film was pulled out from the release film roll, and the surface state of the release layer of the release film was visually inspected. As a result, there was no particular abnormality. The average thickness of the dielectric green sheets was 0.9 μm. In addition, the variation range of the thickness of the dielectric green sheet was 0.03 μm, which was a good product. Also, no pinhole was detected.

(Example 3) The same procedure as in Example 1 was carried out, except that the torque of the winding shaft 102 when the release film (after cutting) was wound using the winding device was adjusted, and the tension applied to the wound release film was set to about 0.6 times that of Example 1. to make rolls of release film. And, similarly to Example 1, the measurement of rebound hardness K(r), and the formation and evaluation of a dielectric green sheet were performed. The relationship between the distance r and the rebound hardness K(r) of Example 3 is plotted in FIG. 8 . As shown in FIG. 8 , when the distance r is 10 to 130 m, the rebound hardness K(r) satisfies the above formula (1). Moreover, the peeling film was pulled out from the peeling film roll, and the surface state of the peeling layer of the peeling film was visually inspected. As a result, there was no particular abnormality. The average thickness of the dielectric green sheets was 0.9 μm. In addition, the variation range of the thickness of the dielectric green sheet was 0.03 μm, which was a good product. Also, no pinhole was detected.

(Comparative Example 1) The same procedure as in Example 1 was carried out, except that the torque of the winding shaft 102 when the release film (after cutting) was wound using the winding device was adjusted, and the tension applied to the wound release film was set to about 1.3 times that of Example 1. to make rolls of release film. And, similarly to Example 1, the measurement of rebound hardness K(r), and the formation and evaluation of a dielectric green sheet were performed. The relationship between the distance r and the rebound hardness K(r) of Comparative Example 1 is plotted in FIG. 9 . As shown in FIG. 9 , when the distance r is 10 to about 45 mm, the rebound hardness K(r) exceeds the upper limit of the above formula (1). The release film was pulled out from the release film roll, and the surface state of the release layer of the release film was visually inspected. As a result, there was no particular abnormality. On the other hand, the thickness variation of the dielectric green sheet becomes larger as it approaches the core. The thickness variation of the dielectric green sheet on the release film within 40 mm from the rear end of the release film exceeds 0.06 μm and cannot meet within ±5% of the set thickness (0.9 μm).

(Comparative Example 2) A release film roll was produced in the same manner as in Example 1, except that the torque of the winding shaft 102 when the release film (after cutting) was wound using a winding device was adjusted and the tension was about 0.3 times that of Example 1. And, similarly to Example 1, the measurement of rebound hardness K(r) was performed. The relationship between the distance r and the rebound hardness K(r) of Comparative Example 2 is plotted in FIG. 9 . As shown in FIG. 9 , when the distance r is about 30 to about 115 mm, the rebound hardness K(r) is lower than the lower limit of the above formula (1). When the dielectric green sheet is formed, when it is about to be transported, the peeling film near the core of the peeling film roll bulges out like a bamboo shoot, causing the roll shape to be uneven. At this point, the peeling film roll of Comparative Example 2 was judged to be unsuitable, and the evaluation was completed.

(Comparative Example 3) During winding, the torque of the winding shaft 102 was adjusted so that the tension applied to the wound release film was approximately constant, and the pressure of the touch roller on the release film roll was set to about 1.5 times that of Example 1. Except for this, it carried out similarly to Example 1, and produced the peeling film roll. And, similarly to Example 1, the measurement of rebound hardness K(r) was performed. The relationship between the distance r and the rebound hardness K(r) of Comparative Example 3 is plotted in FIG. 10 . As shown in FIG. 10 , when the distance r is about 110 to 130 mm, the rebound hardness K(r) exceeds the upper limit of the above formula (1).

The release film was pulled out from the release film roll, and the surface state of the release layer of the release film was visually inspected. As a result, in the portion on the core side where the distance r was 70 mm or less, a plurality of wrinkles that were arranged in the width direction and extended in the longitudinal direction of the release film occurred, and it was confirmed that the release film was deformed. It is believed that the deformation caused by such folds is affected by the winding tightness. At this point, the peeling film roll of Comparative Example 3 was judged to be unsuitable, and the evaluation was completed.

(Comparative Example 4) The winding torque does not change greatly from the start of the winding to the end of the winding. Moreover, the pressure of the touch roll with respect to the peeling film roll was about 0.7 times that of Example 1. Moreover, it carried out similarly to Example 1, and produced the peeling film roll. And, similarly to Example 1, the measurement of rebound hardness K(r) was performed. The relationship between the distance r and the rebound hardness K(r) of Comparative Example 4 is plotted in FIG. 10 . As shown in FIG. 10 , when the distance r is about 35 to 130 mm, the rebound hardness K(r) is lower than the lower limit of the above formula (1).

The side edge part (cut part) of the release film of the outer peripheral part of the obtained release film roll became uneven. The release film was pulled out from the release film roll, and the surface state of the release layer of the release film was visually inspected. As a result, in the region within about 3 cm inward from the side end, deformation such as folding of the release film was observed. As a result of the unevenness of the side end portion, pressure deformation acts on the vicinity of the side end portion, and as a result, it is considered that the release film is deformed. At this point, the peeling film roll of Comparative Example 4 was judged to be unsuitable, and the evaluation was completed. [Industrial Availability]

According to the present disclosure, according to the present disclosure, even if the winding length of the release film is lengthened, it is possible to provide a release film roll that can sufficiently reduce damage to the release layer of the release film. Moreover, by using such a peeling film roll, the manufacturing method of the ceramic component sheet|seat which has the outstanding reliability, and the manufacturing method of a ceramic component can be provided. In addition, a ceramic component sheet and ceramic component having excellent reliability can be provided.

10: Core 10a: Outer peripheral surface 11: Core 12: Side 12A: Side 20: Release film 20A: Release film 22: Base film 23: Roll 24: Release layer 24a: Surface 26: Outer peripheral surface 26A: Outer peripheral surface 27 : Surface 30: Green sheet 30b: One side 32: Ceramic green sheet 32a: Surface 34: Electrode green sheet 40: Ceramic parts sheet 50: Pinch roll 50a: Top roll 50b: Bottom roll 60: Cut portion 60a : Upper blade roller 60b : Lower blade roller 70 : Contact roller 90 : Multilayer ceramic capacitor 92 : Inner layer part 93 : Outer layer part 94 : Internal electrode layer 95 : Terminal electrode 96 : Ceramic layer 100 : Release film roll 102 : Winding shaft 200: peeling film roll 202: rotating shaft 300: manufacturing apparatus C: center P: arrow R: radial direction r: distance r ₀ : distance

Fig. 1 is a perspective view of a release film roll according to an embodiment. FIG. 2 is a cross-sectional view showing an example of a release film. Fig. 3 is a side view of the release film roll of one embodiment. FIG. 4 is a diagram for explaining a method of measuring the rebound hardness K(r). It is a figure which shows an example of the manufacturing apparatus of the peeling film roll of one Embodiment. Fig. 6 is a cross-sectional view of a ceramic component sheet according to an embodiment. Fig. 7 is a cross-sectional view showing a ceramic part according to an embodiment. FIG. 8 is a graph showing the relationship between the distance r of the peeling film rolls and the rebound hardness K(r) of Examples 1, 2, and 3. FIG. FIG. 9 is a graph showing the relationship between the distance r of the peeling film rolls and the rebound hardness K(r) of Comparative Examples 1 and 2. FIG. 10 is a graph showing the relationship between the distance r of the peeling film rolls and the rebound hardness K(r) of Comparative Example 3 and Comparative Example 4. FIG.

20: peel off film

22: substrate film

24: Peel layer

Claims (8)

A release film roll comprising: a release film having a base film and a release layer; and a core on which the release film is wound; in a side surface, a distance r from an outer peripheral surface of the core in a radial direction When [mm] is 10 to 130 mm, the rebound hardness K(r) [HL] of the release film roll at a distance r measured toward the center of the roll core on the surface of the release film exposed on the outer peripheral surface of the roll satisfies the following: Formula (1), -2r+670≦K(r)≦-1.25r+862.5…(1). The peeling film roll according to claim 1, wherein when the distance r is less than 10 mm, the rebound hardness K(r) is 650HL or more. The release film roll of claim 1 or 2, wherein the distance r ₀ along the radial direction from the outer peripheral surface of the roll core to the outer peripheral surface of the roll-shaped release film is 160 mm or more, and when the distance r is 160 mm or more, the rebound hardness K(r) is 350~662.5HL. The peeling film roll according to claim 1 or 2, wherein within the range of the distance r being 10 to 130 mm, the rebound hardness K(r) [HL] decreases as the distance r increases. A method for producing a ceramic part sheet, comprising the steps of: using a paste containing ceramic powder on the surface of the above-mentioned release layer of the above-mentioned release film drawn from the release film roll of any one of claims 1 to 4, A ceramic green sheet is formed; and the thickness of the ceramic green sheet is 1.0 μm or less. A method of manufacturing a ceramic part, comprising the steps of: using the above-mentioned ceramic part sheet obtained by the manufacturing method as claimed in claim 5 to obtain a layered body comprising the above-mentioned ceramic green sheet; and firing the above-mentioned layered body to obtain a sintered body . A ceramic component sheet obtained by forming a green sheet comprising a ceramic green sheet on the surface of the above-mentioned release layer of the above-mentioned release film drawn from the release film roll of any one of claims 1 to 4. A ceramic part provided with a sintered body, the sintering system forming a layered body of ceramic green sheets including the ceramic part sheet according to claim 7, and obtained by firing the layered body.

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