TWI765217B - Probe and manufacturing method thereof - Google Patents

Abstract

This invention provides a probe and a manufacturing method thereof that can suppress the increase in manufacturing time and can achieve a narrow spacing. The solution of the present invention is a probe, which includes: a tube body 10, which is tube-shaped and has an open end; and a plunger 20, which has a rod shape and has an insertion portion 22 inserted into the tube body 10 from the open end and a front end portion 21 connected to the insertion portion 22; and a concave joint region 50 formed in a part of the outer wall portion of the tube body 10, and the contact portion between the inner wall portion of the tube body 10 and the outer wall portion of the plunger 20 is alloyed and the tube body 10 and the plunger 20 are joined.

Description

Probe and method of making the same

The present invention relates to a probe for use in the measurement of properties of an object and a method for producing the same.

Probes are used in order to measure the characteristics of a test object such as an integrated circuit without being separated from the wafer (see Patent Document 1). For example, use a probe having a plunger in the shape of a rod with a small diameter that contacts the object to be inspected and a barrel in the shape of a cylinder with a large diameter into which a part of the plunger is inserted . For the connection between the inserted part of the plunger and the tube body, a point at which a current flows between the tube body and the plunger is used while the tube body is sandwiched by two welding electrodes and pressed from both sides (press). spot) welding.

[Prior Art Literature]

[Patent Literature]

(Patent Document 1) Japanese Patent Laid-Open No. 2002-267686

However, if point welding is used, due to the pressure caused by the two welding electrodes, the tube body will bulge outward, and the adjacent probes are likely to come into contact with each other. Therefore, in spot welding, the pitch of the probes cannot be narrowed, and it is difficult to narrow the pitch of the probes. Furthermore, there is a problem in that the probe cannot be inserted into the through hole of the probe head for holding the probe due to the bulging of the tube body.

In addition, in point welding, after pressurizing the tube body with two welding electrodes, a step of passing an electric current is included. That is, it takes time for the two pieces of welding electrodes to physically sandwich the tube body and pressurize, and a time for current to flow through the two pieces of welding electrodes sandwiching the tube body to weld the tube body and the plunger. Therefore, the time required for the welding of the tube body and the plunger becomes longer, which increases the manufacturing time of the probe.

In view of the above-mentioned problems, an object of the present invention is to provide a probe needle and a probe needle manufacturing method which can suppress the increase in the manufacturing time and can achieve a narrower pitch.

According to one aspect of the present invention, there is provided a probe comprising: a tube body in the shape of a tie tube and having an open end; and a plunger in the shape of a tie rod and having an insertion portion inserted into the inside of the tube body from the open end and a connection At the front end portion of the insertion portion; wherein, in the concave joint area formed in a part of the outer wall portion of the tube body, the contact portion between the inner wall portion of the tube body and the outer wall portion of the plunger is alloyed and the tube body and the plunger engage.

According to another aspect of the present invention, there is provided a method for manufacturing a probe, comprising: making a state in which the insertion portion of the plunger is inserted into the inside of the tube body from the open end, A part of the area of the bonding area is fused by the heat generated by irradiating the laser light The pipe body and the plunger in the disjoint region are alloyed at the contact portion between the inner wall of the molten pipe body and the outer wall of the molten plunger, and the pipe body and the plunger are joined in the joint region.

ADVANTAGE OF THE INVENTION According to this invention, it can suppress the increase of manufacturing time, and can provide the probe needle and the manufacturing method of a probe needle which can achieve a narrow pitch.

1: Probe

2: Probe head

10, 10A: tube body

20, 20A: plunger

21: Front end

22: Insertion part

30: Alloy Department

50: Joint area

51: Top side joint area

52: Bottom side joint area

201: Top Side Plunger

202: Bottom side plunger

301: The first welding electrode

302: Second welding electrode

500: Auxiliary

D1, D2: distance

L: laser light

Fig. 1 is a schematic diagram showing the configuration of a probe according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view taken along the II-II direction of FIG. 1 .

Fig. 3 is a schematic view showing an example of a probe holding the probe head according to the embodiment of the present invention.

FIG. 4 is a schematic process diagram (Part 1) for explaining a method of manufacturing a probe according to an embodiment of the present invention.

FIG. 5 is a schematic process diagram (Part 2) for explaining a method for manufacturing a probe according to an embodiment of the present invention.

FIG. 6 is a schematic process diagram (Part 3) for explaining a method for manufacturing a probe according to an embodiment of the present invention.

FIG. 7 is a photograph showing a cross-section of the junction region of the probe according to the embodiment of the present invention.

Fig. 8 is a plan view of a probe showing an embodiment of the present invention.

FIG. 9 is a table showing evaluation conditions of the joint strength of the tube body and the plunger.

FIG. 10 is a graph showing the evaluation result of the joint strength of the tube body and the plunger.

FIG. 11 is a photograph showing the joint area of the sample obtained by evaluating the joint strength of the tube body and the plunger.

Fig. 12 is a schematic diagram showing the joining process of the tube body and the plunger. Fig. 12(a) shows when the clearance is 12μm, Fig. 12(b) shows when the clearance is 6μm, and Fig. 12(c) shows the clearance When the gap is 0 μm.

FIG. 13 is a graph showing the results of evaluation of the joint strength of the tube body and the plunger after changing the clearance.

FIG. 14 is a photograph showing the bonding area when the clearance is 12 μm.

FIG. 15 is a schematic diagram for explaining a method of manufacturing a probe of a comparative example.

FIG. 16 is a schematic diagram showing the shape of the probe of the comparative example.

FIG. 17 is a plan view showing an example of the bonding region of the probe according to the embodiment of the present invention.

Fig. 18 is a plan view showing another example of the bonding region of the probe according to the embodiment of the present invention.

FIG. 19 is a schematic diagram showing the structure of a probe according to another embodiment of the present invention.

Next, embodiments of the present invention will be described with reference to the drawings. In the description of the following drawings, the same or similar parts are denoted by the same or similar symbols. However, the drawings are schematic, and it should be noted that the ratio of the thickness of each part is different from the actual configuration. In addition, it is needless to say that the relationship or ratio of the dimensions is different between the drawings. The embodiments shown below are examples of devices or methods for embodying the technical idea of the present invention However, the embodiments of the present invention do not specifically limit the material, shape, structure, arrangement, etc. of the constituent members to those described below.

As shown in FIG. 1, a probe according to an embodiment of the present invention includes: a tube body 10 having a tube shape with an open end; an insertion part 22 inserted into the tube body 10 from the open end; The rod-shaped plunger 20 of the front end portion 21 of 22 is provided.

In the probe shown in FIG. 1, both ends of the tube body 10 are provided with open ends, respectively. An insertion portion 22 of a plunger 20 (hereinafter referred to as a "top-side plunger 201") is inserted into an open end on one side of the tubular body 10 . Furthermore, an insertion portion 22 of another plunger 20 (hereinafter referred to as a "bottom-side plunger 202") is inserted into the opening end on the other side of the tube body 10 . Here, the “plunger 20 ” is a general term for the top-side plunger 201 and the bottom-side plunger 202 .

In the probe of the embodiment, the tube body 10 is joined to the plunger 20 in the concave joint region 50 formed in a part of the outer wall portion of the tube body 10 . In the joint region 50 , the inner wall portion of the barrel 10 and the outer wall portion of the plunger 20 are alloyed by a manufacturing method described later. In FIG. 2 , which is a cross-sectional view taken along the direction II-II in FIG. 1 , the alloyed portion is represented by an alloy portion 30 . The tube body 10 is joined to each plunger 20 at a joint region 50 (alloy portion 30 ) at one location.

The probe shown in FIG. 1 is used for judging, for example, the electrical properties of an object to be inspected. In this case, it has been described that the distal end portion 21 of one of the plungers 20 (eg, the top-side plunger 201 ) contacts the object to be inspected. Further, the distal end portion 21 of the other plunger 20 (eg, the bottom plunger 202 ) is in contact with a terminal of a wiring board or the like, and is electrically connected to a measuring device such as a tester through the wiring board.

Therefore, a conductive material is used as the barrel 10 and the plunger 20 . For example, nickel (Ni), nickel phosphide (NiP), or the like is used as the material of the tube body 10 . Use AgPdCu (APC) or Tungsten (W) etc. as the material of the plunger 20 . The materials of the barrel 10 and the plunger 20 are selected so that the contact portion between the inner wall portion of the barrel 10 and the outer wall portion of the plunger 20 is melted and alloyed.

For example, as shown in FIG. 3 , the probe is held by the probe head 2 . That is, the probes 1 necessary for the measurement of the object to be inspected are arranged in a state of penetrating through the through holes of the probe head 2 . In this way, one end of the probe 1 exposed from the main surface on one side of the probe head 2 (eg, the distal end 21 of the top-side plunger 201 ) comes into contact with the object to be inspected. The other end portion of the probe 1 exposed from the other main surface of the probe head 2 (eg, the distal end portion 21 of the bottom plunger 202 ) is electrically connected to the measuring device.

Next, the manufacturing method of the probe 1 shown in FIG. 1 is demonstrated. First, as shown in FIG. 4 , it is assumed that the insertion portion 22 of the plunger 20 is inserted into the inside of the barrel 10 from the opening.

Next, as shown in FIG. 5 , the outer wall portion of the tube body 10 is irradiated with laser light L in a predetermined joint region 50 by a laser device (not shown). The joint area 50 is set at a part of the area where the tube body 10 and the insertion portion 22 of the plunger 20 overlap.

By the heat generated by irradiating the laser light L, as shown in FIG. 6 , the tube body 10 is melted in the bonding region 50 . Then, the outer wall portion of the plunger 20 is also melted at the contact portion with the inner wall portion of the melted barrel 10, and the contact portion of the inner wall portion of the melted barrel and the outer wall portion of the melted plunger 20 is alloyed change. After that, the alloyed contact portion is solidified to form an alloy portion 30 as shown in FIG. 2 .

As described above, the body 10 is engaged with the plunger 20 in the engagement region 50 . In the manufacturing method of the probe of the embodiment, as shown in the photograph obtained by cutting the joint region 50 in FIG. 7, the tube body 10 does not bulge outward. Therefore, the narrow pitch of the arrangement|positioning of a probe is not hindered. Here, a phenomenon in which the so-called "bulging" bollard 20 and the outer wall portion of the pipe body 10 after welding are swollen to the outside is more than the outer wall portion of the pipe body 10 before welding.

According to the manufacturing method of the probe of the embodiment, the tube body 10 is melted by the irradiation of the laser light L, and in the bonding area 50 , the outer wall portion of the tube body 10 retreats in the direction of the central axis more than the periphery. That is, the outer wall portion of the pipe body 10 of the joint region 50 is in a state of being more concave than the periphery.

In terms of the dimensions of the barrel 10 and the plunger 20, various combinations can be selected. For example, the plunger 20 having an outer diameter of 42 μm is joined to the barrel 10 having an outer diameter of 60 μm and an inner diameter of 47 μm. Alternatively, the plunger 20 with an outer diameter of 48 μm is joined to the tube body 10 with an outer diameter of 70 μm and an inner diameter of 54 μm. Alternatively, the plunger 20 with an outer diameter of 72 μm is joined to the tube body 10 with an outer diameter of 95 μm and an inner diameter of 80 μm. The full length of the probe is, for example, about 6.2 mm to 8.4 mm.

The power and irradiation time of the laser light L are appropriately selected according to the materials and thicknesses of the tube body 10 and the plunger 20 .

When the power of the laser light L is too small, the tube body 10 and the plunger 20 cannot be melted. On the other hand, when the power of the laser light L is too large, a hole will be formed in the tube body 10 . The power of the laser light L is, for example, about 10W to 40W. In addition, when the irradiation time of the laser light L is too short, the tube body 10 and the plunger 20 cannot be melted, and when the irradiation time of the laser light L is too long, a hole will be formed in the tube body 10 . The irradiation time of the laser light L is 0.0001 second to 0.001 second.

In addition, the beam diameter of the laser beam L is selected according to the diameter of the plunger 20 and the like. The beam diameter is, for example, about half of the diameter of the plunger 20 , and a laser beam L or the like of 20 μm is used for the beam diameter.

FIG. 8 shows a plan view of the probe with the region where the bonding region 50 is formed as the upper surface. By the irradiation of the laser light L, the bonding region 50 is formed in a substantially circular shape in a plan view. shape. The diameter of the joint region 50 along the axial direction of the tube body 10 is approximately the same as the beam diameter of the laser light L. As shown in FIG. In addition, the distance from the opening end to the center of the bonding region 50 is, for example, about 0.1 μm.

The inventors of the present invention evaluated the bonding strength of the tube body 10 and the plunger 20 bonded by the irradiation of the laser light L as described below. FIG. 9 shows conditions such as the dimensions of the tube body 10 , the material of the plunger 20 , and the output of the laser light L, which are used for the evaluation of the bonding strength. In the evaluation of the bonding strength, a diaphragm having a hole with a diameter of 3.5 mm, for example, is used to irradiate the bonding region 50 with the laser light output from the laser device at the set output at the actual output attenuated by 70%. As shown in FIG. 9 , the actual output of the laser light L at this time is 15W when the set output of the laser device is raised to 50W for the tube body 10 with an outer diameter of 60 μm (inner diameter of 47 μm). In addition, for the tube body 10 with an outer diameter of 70 μm (inner diameter of 54 μm), the set output of the laser device was increased to 60 W, and the actual output of the laser light L at this time was 18 W.

The irradiation time of the laser light L was set to 0.5 msec. The materials of the plunger 20 are material A: APC, material B: alloy of rhodium (Rh) and gold (Au) (Rh+Au), and material C: alloy of W and Au (W+Au), respectively. joint strength. The material of the tube body 10 is set to NiP. In addition, the pressing force at which the joint portion does not peel off when the plunger 20 is pressed into the tube body 10 after the joint is used as the joint strength between the tube body 10 and the plunger 20 .

Fig. 10 shows the evaluation results of the joint strength. FIG. 10 shows that the joint strength when the outer diameter of the tube 10 is 60 μm is S60, and the joint strength when the outer diameter of the tube 10 is 70 μm is S70. As shown in FIG. 10, the bonding strength S60 is sufficiently larger than 45 gf, which is set as the lower limit of the bonding strength specification, when the actual output of the laser light L is 15 W. Further, the bonding strength S70 is sufficiently larger than 45 gf, which is set as the lower limit of the bonding strength specification, when the actual output of the laser light L is 18 W.

FIG. 11 shows, for materials A to C, the plan and cross-section of the joint region 50 of a sample having a joint strength greater than the lower limit of the joint strength specification. In any of the case where the outer diameter of the barrel 10 was 60 μm and the case of 70 μm, the bonding state was good regardless of the material of the plunger 20 . In addition, in the period of irradiating the laser beam L, it is preferable to spray nitrogen gas for cooling the bonding region 50 . In the bonding shown in FIG. 11 , except that the outer diameter of the barrel 10 is 70 μm and the material of the plunger 20 is the material B, nitrogen gas is sprayed while the laser beam L is irradiated.

However, it is assumed that in the bonding process of the tube body 10 and the plunger 20 by the irradiation of the laser light L, the central axis of the tube body 10 and the central axis of the plunger 20 may not coincide. The inventors of the present invention changed the distance from the inner wall portion of the barrel 10 on the side irradiated by the laser light L to the outer wall portion of the plunger 20 (hereinafter referred to as "play"), and evaluated the performance of the barrel 10 The joint strength when the central axis does not coincide with the central axis of the plunger 20 .

Specifically, the bonding strength of the barrel 10 and the plunger 20 was evaluated for the bonding process of inserting the plunger 20 by changing the play of the barrel 10 having an outer diameter of 70 μm and an inner diameter of 54 μm. FIG. 12( a ) shows the case 1 in which the outer diameter of the plunger 20 is 42 μm, and the outer wall of the plunger 20 is in contact with the inner wall of the tube body 10 opposite to the side irradiated by the laser light L. That is, the clearance of Case 1 is 12 μm. 12(b) shows the case 2 in which the outer diameter of the plunger 20 is 48 μm, and the outer wall portion of the plunger 20 is in contact with the inner wall portion of the tube body 10 opposite to the side irradiated by the laser light L. That is, the clearance of Case 2 is 6 μm. FIG. 12( c ) shows the case 3 where the outer diameter of the plunger 20 is 48 μm, and the outer wall of the plunger 20 is in contact with the inner wall of the tube body 10 on the side irradiated by the laser light L. That is, the clearance of Case 3 is 0 μm.

As shown in FIGS. 12( a ) to 12 ( c ), the tube body 10 and the plunger 20 are supported by the auxiliary device 500 so as to form a predetermined clearance, and the bonding area 50 is irradiated with the laser beam L. Tube 10 The material is NiP, and the material of the plunger 20 is an alloy of Rh and Au. The set output of the laser device is set to 50W or 60W, and the set output is attenuated by 70% through the aperture as the actual output of the laser light L. Figure 13 shows the results obtained by evaluating the joint strength for case 1 (clearance C=12 μm), case 2 (clearance C=6 μm), case 3 (clearance C=0 μm). In Fig. 13, the white circles represent the bonding strength of the laser device with the set output of 50W, and the black circles represent the bonding strength of the laser device with the set output of 60W.

As shown in FIG. 13 , in any of the cases 1 to 3, the bonding strength was greater than 45 gf, which is the lower limit of the bonding strength. Therefore, when the clearance is in the range of 0 μm to 12 μm, the joint state of the barrel 10 and the plunger 20 is good. Therefore, the tubular body 10 and the plunger 20 can be joined in such a manner that the positions of the central axis of the tubular body 10 and the central axis of the plunger 20 do not coincide within a certain range. In this case, a probe in which the tube body 10 and the plunger 20 are joined so that the positions of the central axis of the tube body 10 and the central axis of the plunger 20 do not coincide can be obtained.

In addition, when the clearance is 12 μm, the distance from the inner wall portion of the tube body 10 facing the joining region 50 to the outer wall portion of the plunger 20 is 0 μm in case 1. In the joining process, the outer wall of the plunger 20 is 0 μm. When the portion is in contact with the bonding region 50 , it is 12 μm. FIG. 14 shows the plane and cross-section of the bonding region 50 when the clearance is 12 μm.

In addition, in the above, the joint region 50 between the tube body 10 and the top-side plunger 201 (hereinafter referred to as the "top-side plunger joint region") and the joint region 50 between the tube body 10 and the bottom-side plunger 202 (hereinafter referred to as the "bottom plunger joint region") Side plunger engagement area”), which are formed on the same plane when viewed from above. That is, the straight line connecting the top-side joint region and the bottom-side joint region is parallel to the axial direction of the pipe body 10 . However, the surfaces on which the bonding regions 50 are formed can be arbitrarily set, and the bonding regions 50 need not be formed on the same surface.

An example of the method of joining the barrel and the plunger by spot welding will be described below as a comparative example of the manufacturing method of the probe.

In the case of spot welding, as in the comparative example shown in FIG. 15, the probe is sandwiched between a pair of welding electrodes (the first welding electrode 301 and the second welding electrode 302), and the pipe is pressurized in the direction of the arrow. The body 10A and the plunger 20A flow current. As a result, resistance heat is generated at the contact surface of the tube body 10A and the plunger 20A, and the metal is melted and solidified inside the tube body 10A and the plunger 20A due to the resistance heat, and the tube body 10A and the plunger 20A are welded together. . Therefore, as shown in FIG. 16, the surface of the tube body 10A is swollen due to the change in shape during the pressurization.

In order to prevent the probes from contacting each other when the surfaces of the probes are bulged, the distance between the probes must be widened. Therefore, the narrow pitch of the arrangement|positioning of probe needles is hindered.

On the other hand, according to the manufacturing method of the probe of the above-described embodiment, the bonding area 50 of the tube body 10 does not generate bulging caused by pressurization. Therefore, it is not necessary to widen the interval of the probes in order to prevent the probes from coming into contact with each other. As a result, a narrower pitch of the arrangement of the probes can be achieved. Furthermore, since the probe does not bulge, there is no problem that the probe cannot be inserted into the through hole of the probe head for holding the probe.

Furthermore, in the case of spot welding, the time for physically pinching the probes by the welding electrodes is about 10 seconds per probe. In addition, the time required to flow a current to the tube body and the plunger by spot welding and to weld the welded portion is about 5 seconds on average per welded portion. That is, when the top-side plunger and the bottom-side plunger are joined to the tube body, the time required for spot welding is about 15 seconds.

On the other hand, the time required to join the tube body 10 and the plunger 20 by the irradiation of the laser beam L in the manufacturing method of the probe of the embodiment is 0.0005 for one joining area 50 . seconds or so. Therefore, the time required to sequentially engage the top-side plunger 201 and the bottom-side plunger 202 to the barrel 10 is 0.001 seconds. Furthermore, since it is not necessary to physically sandwich the tube body with the welding electrodes before welding, the manufacturing method of the probe of the embodiment can shorten the manufacturing time of the probe.

Furthermore, in the manufacturing method of the probe of the embodiment, the position of the tube body 10 where the bonding region 50 is formed can be arbitrarily set. That is, it is not necessary to precisely align the position where the laser light L is irradiated, and even if the distance between the end of the tube body 10 and the bonding region 50 is slightly uneven, it does not pose a problem.

Also, the surface on which the bonding region 50 is formed can be arbitrarily set. That is, when the top side plunger 201 and the bottom side plunger 202 are joined to the pipe body 10, the top side joining region and the bottom side joining region may not be formed on the same surface as the pipe body 10 in plan view. For example, when the surface on which the top-side joining region is formed is the upper surface of the pipe body 10, the bottom-side joining region is formed on the lower surface of the pipe body 10 opposite to the upper surface. Or the bottom-side joint region is formed at any position along the circumferential direction between the upper surface and the lower surface. FIG. 17 shows an example in which the angle formed by the surface on which the top-side joint region 51 is formed and the surface on which the bottom-side joint region 52 is formed is approximately 90 degrees.

As described above, the surface of the tube body 10 forming the top-side joint region may be different from the surface of the tube body 10 forming the bottom-side joint region in plan view. That is, the straight line connecting the top-side joint region and the bottom-side joint region may not be parallel to the axial direction of the pipe body 10 .

Furthermore, in a state in which the top-side plunger 201 and the bottom-side plunger 202 are respectively inserted from the open ends of both ends of the pipe body 10, the top-side plunger 201 and the bottom-side plunger 202 can be simultaneously or continuously connected to the pipe body 10. Body 10 is engaged. At this time, precise alignment is not required. That is, the distance from the end of the tube body 10 to the joint region 50 may be different in the top-side joint region and the bottom-side joint region. Figure 18 The distance D1 from the open end of the tube body 10 with the top side plunger 201 inserted to the top side junction area 51, and the distance D1 from the open end of the tube body 10 with the bottom side plunger 202 inserted to the bottom side junction area 52 are shown The distance D2 up to this point is a different example (D1<D2).

In addition, two laser devices can be used to simultaneously engage the top-side plunger 201 and the bottom-side plunger 202 with the tube body 10 . Alternatively, the position where the laser beam L is irradiated is changed, and the top-side plunger 201 is continuously joined to the bottom-side plunger 202 and the tube body 10 . Alternatively, the position where the laser beam L is irradiated is fixed and the probe is moved, whereby the top plunger 201, the bottom plunger 202 and the tube body 10 can be continuously joined.

As described above, the setting of the position of the bonding region 50 has a high degree of flexibility, and precise alignment is not required when the laser light L is irradiated. Therefore, according to the manufacturing method of the probe according to the embodiment, compared with point welding, the time required for joining the tube body 10 and the plunger 20 can be greatly shortened. Therefore, the throughput of products can be increased, and the production efficiency of the probe can be improved.

In addition, spot welding requires a process of aligning the welding electrode and the probe, a process of sandwiching the probe with the welding electrode, and a process of welding the tube body and the plunger while applying current while applying pressure. Therefore, unevenness in the manufacture of probes is likely to occur in spot welding.

On the other hand, according to the manufacturing method of the probe needle of an embodiment, the number of steps can be reduced more than spot welding. Therefore, the manufacturing unevenness of the probe can be suppressed.

As described above, in the probe of the embodiment, the tube body 10 and the plunger 20 are joined by the irradiation of the laser light L, thereby suppressing the bulging of the probe. Therefore, a narrower pitch of the arrangement of the probes can be achieved. Furthermore, according to the manufacturing method of the probe needle of an embodiment, the manufacturing time can be shortened compared with point welding, and manufacturing unevenness can be suppressed. Therefore, the manufacturing yield and production efficiency can be improved.

Along with the miniaturization of integrated circuits, the number of inspection pads in the integrated circuits is also increased, and the intervals between the inspection pads are narrowed. Therefore, it is necessary to use a narrower pitch for the arrangement of probes that contact the inspection pads of the integrated circuit. Therefore, there is a need to efficiently manufacture a large number of fine probes corresponding to the narrowing of the pitch. In order to solve this requirement, the probe of the implementation type and the manufacturing method of the probe can be well applied.

(Other implementations)

As described above, the present invention is described in the form of an embodiment, but it should not be construed that the discussion and drawings constituting a part of the disclosure of the present invention limit the content of the present invention. Based on the disclosure of the present invention, those with ordinary knowledge in the technical field to which the present invention pertains can clearly understand various alternative implementation forms, embodiments and application techniques.

For example, in the above description, the probe into which the plunger 20 is inserted at both ends of the tube body 10 has been described, but the present embodiment can also be applied to the tube as shown in FIG. A probe consisting of a plunger 20 is inserted into one end of the body 10 . For example, the plunger 20 inserted at one end of the tube body 10 may be brought into contact with the object to be inspected, and the other end of the tube body 10 may be brought into contact with a terminal such as a wiring board.

Furthermore, although the case where the cross-sectional shape of the probe is circular has been described, the cross-sectional shape may be a polygonal shape such as a quadrangle. In addition, although the example in which the front end portion 21 of the top side plunger 201 is conical and the front end portion 21 of the bottom side plunger 202 is cylindrical has been described, it can be appropriately adapted to the shape of the terminal with which the front end portion 21 contacts. The shape of the front end portion 21 of the plunger 20 is appropriately selected.

In addition, a helical cut or the like may be formed on the side surface of the probe, and a spring portion may be formed on the probe. Thereby, the probe can freely expand and contract in the axial direction. The engaging region 50 is set between the spring portion and the open end, for example.

As mentioned above, it is needless to say that the present invention includes various embodiments and the like which are not described in the content of the present invention.

10: Tube body

20: Plunger

21: Front end

22: Insertion part

50: Joint area

201: Top Side Plunger

202: Bottom side plunger

Claims (13)

A probe comprising: a tube body in the shape of a tube and having an open end; and a plunger in the shape of a bar and having an insertion portion inserted into the tube body from the open end and a front end portion connected to the insertion portion ; wherein, in the concave joint area formed in a part of the outer wall of the tube body, the contact part of the inner wall of the tube body and the outer wall of the plunger is alloyed to join the tube body and the plunger , and in the joint area, the tube body melts from the outer wall to the inner wall and solidifies; the tube body and the plunger are joined in such a way that the position of the central axis of the tube body and the central axis of the plunger are inconsistent. . The probe according to claim 1, wherein the bonding region is formed in a substantially circular shape in plan view. The probe according to claim 1, wherein the tube body and the plunger are joined at only one portion of the joining area. The probe according to any one of claims 1 to 3, wherein the distance from the inner wall portion of the barrel to the outer wall portion of the plunger is 0 μm to 12 μm. The probe according to any one of claims 1 to 3, wherein the tube body has the open ends at both ends, the open end on one side is for inserting a top-side plunger as the plunger, and the other open end is used as the plunger. The open end of one side is for inserting the bottom side plunger as the aforesaid plunger, the connecting line between the aforesaid joint area where the tube body and the top side plunger are joined and the joint area where the tube body and the bottom side plunger are joined, It is not parallel to the axial direction of the aforementioned pipe body. The probe according to any one of claims 1 to 3, wherein the tube body has the open ends at both ends, the open end on one side is used for inserting a top-side plunger as the plunger, and the other The said open end of one side is used to insert the bottom side plunger as the said plunger, and the distance from the said open end where the said top side plunger is inserted to the said joint area where the said tube body and the said top side plunger are joined is the same as the distance from The distance from the opening end into which the bottom-side plunger is inserted to the joint region between the pipe body and the bottom-side plunger is different. The probe according to any one of claims 1 to 3, wherein no play is formed on both sides of the bonding region. A manufacturing method of a probe, the probe is provided with a tube body and a plunger, the tube body is in the shape of a tube, the plunger is in the shape of a rod and has an insertion portion inserted into the inside of the tube body from the open end of the tube body and a front end portion connected to the insertion portion, the probe manufacturing method comprising: making the insertion portion of the plunger into a state inserted into the inside of the tube body from the open end, by aligning the tube body and the tube body The heat generated by irradiating a part of the joint area of the overlapping area of the plunger with laser light melts the tube body and the plunger in the joint area, so that the outer wall of the tube body is concave, and the center of the tube body is formed. The position of the shaft and the center axis of the plunger is not aligned, and the contact part between the inner wall part of the molten pipe body and the outer wall part of the molten plunger is alloyed, and the pipe body is welded in the joint area. Engage with the aforementioned plunger. The method for manufacturing a probe according to claim 8, wherein the outer wall portion of the tube body is retreated in the direction of the central axis in the bonding region by irradiation with laser light. The method for manufacturing a probe according to claim 8 or 9, wherein the tube body and the plunger are joined in the joining region at one location. The method for manufacturing a probe according to claim 8 or 9, wherein the distance from the inner wall portion of the tube body on the side irradiated by the laser light to the outer wall portion of the plunger is 0 μm to 12 μm . The method for manufacturing a probe according to claim 8 or 9, wherein a top-side plunger as the plunger is inserted into the open end of one side of the tube body having the open ends at both ends, The bottom side plunger is used as the aforementioned plunger, and is inserted into the aforementioned open end of the other side, with the aforementioned joint area where the tube body and the top side plunger are joined and the joint area where the tube body and the bottom side plunger are joined. The connecting line is not parallel to the axial direction of the pipe body, and the pipe body is joined to the top-side plunger and the bottom-side plunger. The method for manufacturing a probe according to claim 8 or 9, wherein a top-side plunger as the plunger is inserted into the open end of one side of the tube body having the open ends at both ends, The bottom side plunger is used as the aforementioned plunger, and is inserted into the aforementioned opening end of the other side, from the aforementioned opening end where the aforementioned top side plunger is inserted to the aforementioned joint area where the aforementioned tube body and the aforementioned top side plunger are joined. distance from the open end into which the bottom side plunger is inserted to The said pipe body is joined to the said top side plunger and the said bottom side plunger so that the distance to the said joining area|region of joining the said pipe body and the said bottom side plunger may differ.

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