TWI745645B - Single-sided and double-sided sidewall inspection system and paired mirror assembly device - Google Patents

Abstract

The invention provides a single-sided and double-sided sidewall inspection system, comprising an object platform, an image capturing device, and one or plurality of reflecting mirror. The image capturing device is disposed on one side of the object to capture an image of the object. The reflecting mirror is disposed between the image capturing device and the object platform, whereby the reflecting mirror reflects the inner side wall of the hole from the object, to obtain the defect through the reflecting mirror from the image capturing device.

Description

Single-sided and double-sided detection system and paired mirror group device

The present invention relates to an optical detection system, in particular to an optical detection system for detecting the side wall of a hole of an object to be tested.

Automated Optical Inspection (AOI) uses machine vision as the inspection standard technology to replace traditional human eye recognition through machine vision to achieve high-precision and high-efficiency inspections. As an improvement on the shortcomings of the traditional use of optical instruments for inspection by humans, the application level includes areas such as research and development, manufacturing quality control, national defense, people's livelihood, medical care, environmental protection, and electricity in high-tech industries.

In the field of optical inspection, it is more difficult to detect complex surfaces than smooth surfaces. Generally, the visibility of complex surfaces depends on the depth of field of the camera. If the depth of field of the camera is sufficient, it can generally be overcome. Relatively speaking, it is difficult to detect defects with invisible planes by traditional optical methods (such as plane shooting), so that such inspections are very time-consuming and labor-intensive, and it is difficult to achieve corresponding efficiency.

The object of the present invention is to provide a single-sided detection system for detecting at least one side wall of a hole on an object to be tested. The single-sided detection system includes a platform for the object to be tested and an image capturing device. The test object carrier is used to carry the test object. The image capturing device is arranged on the side of the test object carrier to capture the image of the test object, wherein there is an image capturing angle between the image capturing device and the side wall of the hole to capture the side wall of the hole image.

Another object of the present invention is to provide a double-sided detection system for detecting at least one side wall of a hole on an object to be tested. The single-sided detection system includes a platform for the object to be tested and a first image capturing device , And a second image capturing device. The test object carrier is used to carry the test object. The first image capturing device is arranged on the side of the test object carrier to capture the image of the test object, wherein there is a first image capturing inclination between the first image capturing device and the side wall of the hole to Capture the first side image of the side wall of the hole. The second image capturing device is arranged on the side of the test object carrier to capture the image of the test object, wherein there is a second image capturing inclination between the second image capturing device and the side wall of the hole, The image capturing device captures a second side image of the side wall of the hole.

Another object of the present invention is to provide a single-sided detection system for detecting at least one side wall of a hole on an object to be tested, the single-sided detection system including a platform for the object to be tested, an image capturing device, and A mirror device. The test object carrier is used to carry the test object. The image capturing device is arranged on the side of the test object carrier to capture the image of the test object. The reflecting mirror device is arranged between the image capturing device and the object-to-be-tested stage, and there is an image capturing angle between the reflecting mirror device and the side wall of the hole, so that the image capturing device can capture through the reflecting mirror device The image of the side wall of the hole.

Another object of the present invention is to provide a double-sided detection system for detecting at least one side wall of a hole on an object to be tested. The single-sided detection system includes a platform for the object to be tested and a first image capturing device And a second image capturing device, a first mirror device, and a second mirror device. The test object carrier is used to carry the test object. The first image capturing device and the second image capturing device are arranged on one side of the test object carrier to capture images of the test object. The first mirror device is disposed between the first image capturing device and the object-to-be-tested stage, wherein there is a first image acquisition inclination between the first mirror device and the side wall of the hole, so that the first The image capturing device captures the first side image of the side wall of the hole through the first mirror device. The second mirror device is disposed between the second image capturing device and the object-to-be-tested stage, and there is a second image capturing angle between the second mirror and the side wall of the hole, so that the second image is captured The capturing device captures the second side image of the side wall of the hole through the second mirror device.

Another object of the present invention is to provide a paired mirror assembly device, including a first mirror and a second mirror. The first reflecting mirror is arranged between the image capturing device and the object under test platform, and there is a first image acquisition inclination between the first reflecting mirror and the side wall of the hole of the object under test. The second reflecting mirror is arranged between the image capturing device and the object-to-be-measured stage and arranged on the opposite side of the first reflecting mirror. There is a gap between the second reflecting mirror and the side wall of the hole A second acquisition inclination angle.

Another object of the present invention is to provide a double-sided detection system for detecting at least one side wall of a hole on an object to be tested. The double-sided detection system includes a platform for the object to be tested, an image capture device, and a The paired mirror group device as described above. The test object carrier is used to carry the test object. The image capturing device is arranged on the side of the test object carrier to capture the image of the test object. The image capturing device captures the first side image and the second side image of the side wall of the hole through the reflecting mirror.

Another object of the present invention is to provide a double-sided detection system for detecting at least one side wall of a hole on an object to be tested. The double-sided detection system includes a platform for the object to be tested, an image capturing device, and A pair of mirror group devices as described above. The test object carrier is used to carry the test object. The image capturing device is arranged on the side of the test object carrier to capture the image of the test object. A plurality of the above-mentioned paired mirror group devices are respectively arranged corresponding to the side wall of the hole of the object to be measured, and the image capturing device captures the first side image and the second side image of the side wall of the hole through the mirror.

The invention can effectively improve the efficiency of the optical detection system to detect blind holes, perforations or other complex surface defects, and can greatly reduce the time cost required for detection compared with the conventional technology.

Furthermore, the mechanism of the present invention is simple to set up, and compared with the conventional technology, the complexity of detection can be reduced, and the maintenance cost of the equipment can be reduced at the same time.

The detailed description and technical content of the present invention will now be described in conjunction with the drawings as follows. Furthermore, for the convenience of description, the figures in the present invention are not necessarily drawn according to actual proportions. These figures and their proportions are not intended to limit the scope of the present invention, and are described here first.

In the present invention, the controller is not explicitly disclosed in the drawings. However, it can be understood that the present invention is applied to optical inspection equipment and must include an image processor for performing image processing; in order to coordinate the operation of various devices, It must include a central controller (such as PLC) to adjust the parameters of each device to ensure the smooth operation of the device and eliminate errors; the device can individually include an independent controller and corresponding firmware to switch the working mode of each device, or by The parameters corresponding to the sensor feedback must be described here first.

The controllers can be, for example, a central processing unit (Central Processing Unit; CPU), or other programmable general-purpose or special-purpose microprocessors (Microprocessors), digital signal processors (Digital Signal Processors; DSPs), Programmable controller, Application Specific Integrated Circuits (ASIC), Programmable Logic Device (PLD) or other similar devices or a combination of these devices.

The optical detection system of the present invention is mainly used for optical detection of objects to be tested on complex surfaces, such complex surfaces including concave and convex surfaces, gold pillars, blind holes, perforations, etc., which are particularly difficult for the surface of the object to be tested when shooting in a plane. The sidewalls shown are inspected. The present invention is particularly effective for detecting blind holes and perforations, and can complete the detection of multiple blind holes and the inner wall of the perforation through one-time shooting.

The following is a description of a plurality of different embodiments of the present invention. Please refer to "FIG. 1" first, which is a schematic diagram of the appearance of the first embodiment of the present invention.

This embodiment provides a single-sided object-to-be-tested sidewall inspection system 100, which includes an object-to-be-tested stage 10A, an image capture device 20A, a mirror device 30A, and a first transfer device 40A.

The test object carrier 10A is used to carry the test object AN. In one of the preferred embodiments, the test object carrier 10A can be a platform for placing the test object AN, and the position of the test object AN is fixed by a jig. In the embodiment for detecting the perforation, the test object carrier 10A can be used as a second light source to provide a backlight source for the test object AN, and the second light source is arranged under the side wall H of the hole to provide The side wall H of the hole illuminates the light source to provide uniform illumination to the inner side of the hole. In a preferred embodiment, the second light source includes a surface light source, wherein the area of the surface light source is proportional to the test object AN, and the embodiment of the test object stage 10A is not limited in the present invention.

The image capturing device 20A is arranged on the side of the test object stage 10A to capture the image of the test object. The image capturing device 20A captures the image of the test object AN through the photosensitive element and the corresponding lens, and sends the acquired image to the back-end image processing device IP for image analysis to confirm the defect status of the test object AN and Complete the test. In this embodiment, in order to perform high-precision detection, the image capturing device 20A includes an imaging unit 21A, an objective lens 22A disposed on the imaging unit 21A, and a first light source combined with the objective lens 22A. The imaging unit 21A includes a plurality of photosensitive elements. The inner side of the objective lens 22A is provided with a plurality of optical elements (for example, lenses, mirrors) corresponding to the optical path thereof. The image capturing device includes, but is not limited to, a line scan camera or an area scan camera. In a preferred embodiment, the image capturing device can be a line scan camera, which is beneficial to increase the detection efficiency. The first light source is arranged above the side wall H of the hole to provide an illuminating light source for the side wall H of the hole. In a preferred embodiment, the type of the first light source includes a coaxial light source 23A, a side light source 70A, or a ring light source.

The mirror device 30A is disposed between the image capturing device 20A and the object stage 10A. In a preferred embodiment, the reflector device 30A can be a metal-coated reflector, a silicon light reflector, a dielectric light reflector, etc., which is not limited in the present invention. There is an imaging inclination A between the mirror device 30A and the target side wall of the object AN to be measured, so that the hole side wall H falls within the imaging range of the mirror device 30A relative to the image capturing device 20A. The reflector device 30A has an adjustment mechanism to adjust the range of the imaging inclination angle A of the reflector device 30A. In a preferred embodiment, the mirror device 30A includes a flat mirror or a diamond mirror, so that the image capturing device 20A captures the image of the side wall H of the hole through the mirror device 30A.

The image capturing device 20A and the mirror device 30A are disposed on the mirror on the first transfer device 40A (the mirror device 30A can also be combined with the objective lens 22A and cooperate with the objective lens 22A to follow), and the The image capturing device 20A and the mirror device 30A are moved from the first side position of the test object stage 10A to the second side position to obtain images of all the target side walls of the entire surface of the test object AN. In another preferred embodiment, the object-under-test stage 10A can also be arranged on a second transfer device for moving the object-under-test stage 10A relative to the image capturing device 20A. The second transfer device can be a movable stage (or XYZ stage, XYθ stage, etc.), which can transfer or move the test object AN to an appropriate image capturing position.

Please refer to "FIG. 2" and "FIG. 3" together, which are the schematic diagrams of the optical path and the imaging diagram of the first embodiment of the present invention.

As shown in "FIG. 2", during inspection, the first transfer device 40A moves the image capturing device 20A and the mirror device 30A from the first side position L1 of the test object stage 10A to the second The side position L2 (such as the arrow A1) completes the detection of blind holes and perforations on the entire path of the test object AN. In order to reflect the target image of the test object AN on the test object stage 10A to the image capturing device 20A to photograph the side wall H of the hole of the test object AN, in the image capturing device 20A and the test object AN plane When it is set to 90 degrees, the inclination angle A of the image acquisition must be at least lower than 45 degrees. In a preferred embodiment, in order to reduce the imaging distance, the imaging inclination A is between 10 degrees and 20 degrees, so that better imaging quality can be obtained. The obtained image is shown in "FIG. 3". When moving in one direction, the first side image W1 of the side wall H of the hole of the test object AN is like a diagonal position, which can be captured and obtained by the image capturing device 20A. The second side image (not shown) of the hole side wall H on the other side of the target side wall W1 can be obtained by mirroring (for example, the entire image capturing device and the mirror device are rotated 180 degrees horizontally, the mirror device 180 The degree mirror rotates, or the auxiliary image capturing device and the auxiliary mirror are directly set (as shown in the second embodiment below).

For the moving path of the image capturing device 20A during detection, please refer to "FIG. 4" and "FIG. 5" together, which are the working schematic diagram (1) and working schematic diagram (2) of the first embodiment of the present invention.

As shown in "FIG. 4", in this embodiment, the first transfer device 40A can drive the image capturing device 20A to move in an S path, thereby obtaining images of the side walls H of the plurality of rows of holes on the test object AN. The number of turns of the S path depends on the area of the object AN or the imaging range of the image capturing device 20A, which is not limited in the present invention.

After shooting the image of the target side wall, as shown in "Figure 5", when reaching the end of the path, the image capturing device 20A and the mirror device 30A can be rotated 180 degrees horizontally, and then return to the original path along the S path. From the starting position, the detection of the second side image of the side wall H of the hole is completed. In this way, the images on both sides of the side wall H of the hole can be effectively obtained.

In another preferred embodiment, the first transfer device 40A can be omitted, and the test object stage 10A (XY stage) is directly moved relative to the image capturing device 20A to obtain all sidewall images. This part is not within the scope of the present invention.

Regarding the configuration of the light source, please refer to "FIG. 6" and "FIG. 7" together, which is the optical configuration method for blind hole detection and perforation detection according to the first embodiment of the present invention.

For an embodiment of the present invention for blind hole detection, please refer to FIG. 6. Blind hole detection mainly uses coaxial light source 23A to fill light on the side wall H of the hole of the object AN to be measured, and illuminate the side wall of the hole with relatively high directivity coaxial light H, to highlight the flaws on the side wall H of the hole. In addition to supplementing light with coaxial light, the side light source 70A on one or both sides can also be used to supplement light to the object under test. In the example, it is possible to switch among multiple light sources so that the back-end image processing equipment can classify different types of defects.

For an embodiment of the present invention used for perforation detection, please refer to FIG. The backlight source 80A is preferably a diffuse light source, which provides consistent fill light through a light homogenizing plate. In order to further enhance the image of the inner wall of the perforation, the optical configuration for detecting the perforation can still provide a side light source to further supplement the light.

For another preferred embodiment, please also refer to "FIG. 8", which is a schematic diagram of the appearance of the second embodiment of the present invention. The second embodiment of the present invention will be described below. Since the difference between this embodiment and the first embodiment is only in the number of image capture devices and mirror devices of the present invention, the same parts will not be repeated.

In addition to the object stage 10A, the image capture device 20A (first image capture device), the mirror device 30A (first mirror device), and the first transfer device 40A originally included in this embodiment, It further includes a second image capturing device 50A and a second mirror device 60A. The second image capturing device 50A is arranged on the side of the test object carrier 10A, and is used to capture an image of the side wall H of the hole AN of the test object. The second mirror device 60A is disposed between the second image capturing device 50A and the object stage 10A to be tested.

Please also refer to "FIG. 9", which is a schematic diagram of imaging of the second image capturing device 50A in the second embodiment of the present invention. Since the second mirror device 60A and the test object AN have a second image capturing angle B with respect to the side wall H of the hole, the second image capturing device 50A will photograph the side wall H of the hole through the second mirror device 60A. The second side image W2 of the side wall H of the hole is obtained, so that all areas of the side wall H of the hole are photographed and obtained.

In a preferred embodiment, the second image capturing device 50A and the second mirror device 60A are arranged in a mirror direction with respect to the first image capturing device 20A and the first mirror device 30A, and are arranged together in On the first transfer device 40A, in this way, when the first transfer device 40A moves, the target sidewall (first direction) can be obtained through the combination of the first image capturing device 20A and the first mirror device 30A at the same time. The combination of the image, the second image capturing device 50A, and the second mirror device 60A obtains the image of the other target side wall (the second direction), thereby completing the detection of the target side walls on both sides in the primary path direction.

The following is a description of the third embodiment of the present invention. Please also refer to "FIG. 10", which is a schematic diagram of the appearance of the third embodiment of the present invention. The following definitions of the same technical terms will not be repeated, and only the main differences between the first embodiment and the second embodiment in terms of structure will be described.

This embodiment provides a double-sided object-to-be-tested sidewall inspection system 200, which includes an object-to-be-tested stage 10B, an image capturing device 20B, a paired mirror assembly device 30B, and a linear slide rail stage 40B . In a preferred embodiment, the object stage 10B, an image capturing device 20B, and a pair of mirror assembly devices 30B can be co-constituted as a whole. The image capturing device 20B is arranged on the side of the test object stage 10B, and is used to capture an image of the test object. The paired mirror assembly device 30B is disposed between the image capturing device 20B and the object stage 10B, and includes a first mirror 31B and a mirror set on the opposite side of the first mirror 31B The second mirror 32B. There is a first imaging inclination angle C between the first reflector 31B and the hole side wall H of the test object AN, and a second picking angle C is provided between the second reflector 32B and the hole side wall H of the test object AN. The image inclination angle D is such that the first side image of the hole side wall H and the second side image of the hole side wall H respectively fall on the first mirror 31B and the second mirror 32B relative to the image capturing device 20B. Like the range. The first mirror 31B has a first adjustment mechanism to adjust the range of the first imaging inclination angle of the first mirror 31B, and the second mirror 32B has a second adjustment mechanism to adjust the second The range of the second imaging inclination angle of the mirror 32B.

In order to reflect the image of the side wall H of the hole of the test object AN on the test object carrier 10B to the image capture device 20B for detection, the plane of the image capture device 20B and the test object AN is set at 90 degrees In the case, including but not limited to, the first imaging inclination angle C must be at least less than 45 degrees (0° to 45 degrees). In the mirror setting embodiment, including but not limited to the second imaging inclination angle D, it must be at least Must be higher than 45 degrees (-45 degrees to 0 degrees). In a preferred embodiment, in order to reduce the imaging distance, the first imaging inclination angle C is between 10 degrees and 20 degrees, and the second imaging inclination angle D is between -10 degrees and -20 degrees. , You can get better imaging quality.

It should be noted that in the embodiment of the line scan camera, in order to obtain the images of the first mirror 31B and the second mirror 32B at the same time, the scanning direction of the line scan camera is orthogonal to the first mirror 31B and the The second reflecting mirror 32B simultaneously obtains the first side image and the second side image of the side wall H of the hole.

Please refer to "FIG. 11" and "FIG. 12" together, which are the schematic diagrams of the optical path and the imaging diagram of the third embodiment of the present invention. As shown in "FIG. 11", when a line scan camera is used as an embodiment for detection, the linear slide rail stage 40B is configured to move the image capturing device 20B relative to the paired mirror assembly device 30B from the object stage to be tested. The first side position L3 of 10B is moved to the second side position L4 (such as arrow A2) to scan the plurality of hole sidewalls H along the path to complete the detection of the hole sidewall H on the entire path of the test object AN. As shown in "Figure 12", the images on the opposite sides (the first mirror 31B and the second mirror 32B) are captured by the image capturing device 20B at the same time, so in one trip, the image capturing device 20B is sufficient The detection of the first side image P1 and the second side image P2 of the side wall H of the hole is completed.

The following is a description of the fourth embodiment of the present invention. Please also refer to "FIG. 13", which is a schematic diagram of the appearance of the fourth embodiment of the present invention.

The following describes the fourth embodiment of the present invention. Since the difference between this embodiment and the third embodiment is only the number of paired mirror assembly devices, the same parts will not be repeated.

This embodiment includes a plurality of paired mirror assembly devices 30B for respectively aligning to the blind holes and perforations of the plurality of areas on the test object AN for detection. In this embodiment, the image capturing device 20B is cooperatingly arranged on a linear slide rail carrier 40B, so as to move to a plurality of areas via the linear slide rail carrier 40B to respectively photograph the blind holes and perforated first targets The side wall and the second target side wall. Since the paired mirror row I composed of a plurality of paired mirror group devices 30B is arranged on the upper side of the test object AN, the first target sidewall image and the second target sidewall image of a plurality of holes can be captured at one time.

For the moving path of the image capturing device 20B during detection, please also refer to "FIG. 14", which is a working schematic diagram of the fourth embodiment of the present invention.

As shown in "FIG. 14", in this embodiment, since a plurality of pairs of mirror assembly devices 30B are arranged on the side of the blind hole or perforation of the test object AN, the linear slide rail carrier 40B can directly capture the image The fetching device 20B moves along a linear path, and respectively photographs the blind holes and perforations at the corresponding positions. When the image of the blind hole and perforation reaches the end of the path after shooting, an inspection is completed. With the method of this embodiment, the time required for detection can be greatly reduced, and the efficiency of detection can be effectively improved.

Please also refer to "Figure 15", which is a schematic diagram of the operation of the fifth embodiment of the present invention. The difference of the fourth embodiment lies only in the types of mirrors, and the same parts will not be repeated.

This embodiment includes a plurality of diamond mirrors M arranged side by side to respectively align to the blind holes and perforations of the plurality of areas on the test object AN for detection. As shown in "Figure 15", the diamond mirror M is in the shape of an inverted triangle. , A reflective film is provided on the two slopes of the diamond mirror M. In this embodiment, the image capturing device 20B is cooperatingly arranged on a linear slide rail carrier 40B, so as to move to a plurality of areas via the linear slide rail carrier 40B to respectively photograph the blind holes and perforated first targets The side wall and the second target side wall. Since the multiple diamond mirrors M are arranged on the upper side of the test object AN, the first target sidewall image and the second target sidewall image of multiple holes can be captured at one time. Please also refer to "FIG. 14" for the moving path of the image capturing device 20B during detection.

As shown in "FIG. 14", in this embodiment, since a plurality of diamond mirrors M are arranged side by side on the blind hole or perforation side of the test object AN, the linear slide rail carrier 40B can directly connect the image capturing device 20B Move along a straight path to shoot blind holes and perforations at corresponding positions. When the image of the blind hole and perforation reaches the end of the path after shooting, an inspection is completed. With the method of this embodiment, the time required for detection can be greatly reduced, and the efficiency of detection can be effectively improved.

Please also refer to "FIG. 16", which is a schematic diagram of the appearance of the sixth embodiment of the present invention.

In this embodiment, a single-sided detection system 300 is disclosed for detecting at least one side wall H of the hole on the test object AN. The single-sided inspection system 300 includes a test object stage 10C and an image capturing device 20C.

The test object carrier 10C is used to carry the test object AN. In one of the preferred embodiments, the test object carrier 10C can be a platform for placing the test object AN through a fixture Fix the AN position of the test object. In another preferred embodiment, the test object stage 10C may be a movable stage (or XYZ stage, XYθ stage, etc.), which can transfer or move the test object AN to an appropriate image capturing position . In the embodiment for detecting perforations, under the test object stage 10C, a surface light source is provided to provide a backlight source for the test object AN, wherein the area of the surface light source is proportional to the test object AN In order to provide uniform illumination on the inner side of the perforation, the embodiment of the test object carrier 10C is not limited in the present invention.

The image capturing device 20C is arranged on the side of the test object stage 10C to capture the image of the test object AN. The image capturing device 20C captures the image of the test object AN through the photosensitive element and the corresponding lens. The obtained image is sent to the back-end image processing device 24C for image analysis to confirm the defect state of the test object AN and complete the inspection. In this embodiment, in order to perform high-precision detection, the image capturing device 20C includes an imaging unit 21C, an objective lens 22C disposed on the imaging unit 21C, and a first light source 23C combined with the objective lens 22C. The imaging unit 21C includes a plurality of photosensitive elements. The inner side of the objective lens 22C is provided with a plurality of optical elements (for example, lenses, mirrors) corresponding to its optical path. The image capturing device 20C includes, but is not limited to, a line scan camera or an area scan camera. In a preferred embodiment, the image capturing device 20C can be a line scan camera, which is beneficial to increase the detection efficiency.

In order to capture the image of the side wall H of the hole, there is an inclination angle E between the image capturing device 20C and the side wall H of the hole, so that the image capturing device 20C captures the image of the side wall H of the hole. In a preferred embodiment, the image acquisition inclination angle E may be between 15 degrees and 75 degrees.

In a preferred embodiment, in order to obtain the image in the side wall H of the hole, the image capturing device 20C can be configured with a linear track, a circular track, a multi-axis arm, or other similar devices. In the embodiment of the linear track, the image capturing device 20C can be moved through the linear track to capture the first side image of the side wall H of the hole, and then rotate 180 degrees when returning from the other side to capture the first side image of the side wall H of the hole. Two-sided images to complete the detection of the side wall H of the hole; in the embodiment of the circular track, the image capturing device 20A can be rotated 180 degrees on the plane with the center of the side wall H of the hole as the axis to obtain the side wall H of the hole All images of; these embodiments are not within the scope of the present invention.

In a feasible preferred embodiment, the single-sided inspection system 300 may further include a mirror device disposed between the image capturing device 20C and the object stage 10C, the image capturing device 20C having An adjustment mechanism is used to adjust the range of the imaging inclination E of the mirror device.

Please also refer to "FIG. 17", which is a schematic diagram of the appearance of the seventh embodiment of the present invention.

The sixth embodiment of the present invention will be described below. Since the difference between this embodiment and the first embodiment lies in the number of image capturing devices of the present invention, the same parts will not be repeated.

In this embodiment, a second image capturing device 50C is further provided. The second image capturing device 50C is disposed on the other side of the first image capturing device 20C relative to the side wall H of the hole, so that At the same time, the first side image and the second side image of the side wall H of the hole of the test object AN are captured. In this embodiment, there is a first image capturing angle E between the first image capturing device 20C and the side wall H of the hole, and a second capturing angle E is provided between the second image capturing device 50C and the side wall H of the hole. The image inclination angle F enables the first image capturing device 20C and the second image capturing device 50C to capture the first side image and the second side image of the side wall H of the hole, respectively.

In order to capture the image of the side wall H of the hole, there is an inclination E between the first image capturing device 20C and the side wall H of the hole, so that the image capturing device 20C captures the image of the side wall H of the hole. In a preferred embodiment, the imaging inclination angle E may be between 15 degrees and 45 degrees, and in a preferred embodiment, the imaging inclination angle E may be between -15 degrees and -45 degrees.

In summary, the present invention can effectively improve the efficiency of the optical inspection system to detect blind holes, perforations or other complex surface defects, and can greatly reduce the time and cost required for inspection compared with the prior art. In addition, the mechanism of the present invention is simple to set up, and compared with the conventional technology, the complexity of detection can be reduced, and the maintenance cost of the equipment can be reduced at the same time.

The present invention has been described in detail above, but what is described above is only a preferred embodiment of the present invention, and should not be used to limit the scope of implementation of the present invention, that is, everything made in accordance with the scope of the patent application of the present invention is equal Changes and modifications should still fall within the scope of the patent of the present invention.

100: Single-sided detection system 10A: Object stage to be tested 20A: Image capture device 21A: imaging unit 22A: Objective lens 23A: Coaxial light source 30A: Mirror device 40A: The first transfer device 50A: Second image capture device 60A: Second mirror device 70A: Side light A: Acquisition inclination B: The second acquisition inclination W1: The first side image W2: second side image 200: Double-sided detection system 10B: Object stage to be tested 20B: Image capture device 30B: Paired mirror group device 31B: The first mirror 32B: second mirror 40B: Linear slide rail carrier C: The first acquisition inclination D: The second acquisition inclination P1: first target side wall P2: Second target side wall H: Sidewall of the hole L1: first side position L2: second side position A1: Arrow L3: First side position L4: second side position A2: Arrow 300: Single-sided detection system 10C: Object stage to be tested 20C: Image capture device 40C: Linear slide rail carrier 50C: Second image capture device A3: Arrow E: The first acquisition inclination F: second acquisition inclination Ⅰ: Pair of mirrors IP: image processing device

Fig. 1 is a schematic diagram of the appearance of the first embodiment of the present invention.

Fig. 2 is a schematic diagram of the optical path of the first embodiment of the present invention.

Fig. 3 is a schematic diagram of imaging of the first embodiment of the present invention.

Fig. 4 is a working schematic diagram (1) of the first embodiment of the present invention.

Fig. 5 is a working schematic diagram (2) of the first embodiment of the present invention.

Fig. 6 shows the optical configuration for blind hole detection according to the first embodiment of the present invention.

Fig. 7 shows the optical configuration for perforation detection in the first embodiment of the present invention.

Fig. 8 is a schematic diagram of the appearance of the second embodiment of the present invention.

FIG. 9 is a schematic diagram of imaging of the second image capturing device in the second embodiment of the present invention.

Fig. 10 is a schematic diagram of the appearance of the second embodiment of the present invention.

Fig. 11 is a schematic diagram of the appearance of the third embodiment of the present invention.

Fig. 12 is a schematic diagram of the operation of the third embodiment of the present invention.

Fig. 13 is a schematic diagram of imaging of the third embodiment of the present invention.

Fig. 14 is a schematic diagram of the appearance of the fourth embodiment of the present invention.

Fig. 15 is a schematic diagram of the operation of the fourth embodiment of the present invention.

Fig. 16 is a schematic diagram of the appearance of the fifth embodiment of the present invention.

Fig. 17 is a schematic diagram of the operation of the sixth embodiment of the present invention.

100: Single-sided detection system

10A: Object stage to be tested

20A: Image capture device

21A: imaging unit

22A: Objective lens

23A: Coaxial light source

30A: Mirror device

40A: The first transfer device

A: Acquisition inclination

IP: image processing device

AN: DUT

H: Sidewall of the hole

Claims (32)

A single-sided detection system is used to detect a plurality of side walls of holes on an object to be tested. The single-sided detection system includes: an object-to-be-tested platform for carrying the object to be tested; an image capture device provided with On the side of the test object stage, it is used to capture the image of the test object; and a first transfer device is used to horizontally transfer the image capture device on the XY plane, the XY plane being orthogonal to the The wall surface of the side wall of the hole; wherein there is an inclination angle between the image capturing device and the side wall of each of the holes to capture the image of the side wall of the holes. The single-sided detection system described in item 1 of the scope of patent application, wherein the range of the inclination angle of the image acquisition is between 15 degrees and 75 degrees based on the vertical plane. A double-sided detection system for detecting a plurality of sidewalls of holes on an object to be tested. The single-sided detection system includes: a platform for the object to be tested for carrying the object to be tested; and a first image capturing device , Arranged on the side of the test object carrier to capture the image of the test object; a second image capturing device is arranged on the side of the test object carrier to capture the image of the test object; And a first transfer device for horizontally transferring the first image capturing device and the second image capturing device on an XY plane, the XY plane being orthogonal to the walls of the side walls of the holes; There is a first image capturing angle between the first image capturing device and the sidewalls of each of the holes to capture first side images of the sidewalls of the holes, and the second image capturing device and each of the holes There is a second image capturing angle between the side walls of the holes to capture a second side image of the side walls of the holes. For the single-sided detection system described in item 3 of the scope of patent application, the range of the inclination angle of the image acquisition is between 15 degrees and 75 degrees based on the vertical plane. A single-sided detection system for detecting at least one side wall of a hole on an object to be tested. The single-sided detection system includes: an object to be tested carrier for carrying the object to be tested; an image capturing device provided with On the side of the object to be tested for capturing an image of the object to be tested; a mirror device arranged between the image capturing device and the object to be tested; and a first transfer device for The image capturing device and the mirror device are moved horizontally on the XY plane; wherein there is an image inclination angle between the mirror device and the side wall of the hole, so that the image capturing device captures the image through the mirror device Image of the side wall of the hole. According to the one-sided inspection system described in the fifth item of the scope of patent application, the image capturing device includes a line scan camera or an area scan camera. The single-sided detection system described in item 5 of the scope of patent application further includes a second transfer device for transferring the object under test. The single-sided inspection system as described in item 5 of the scope of patent application, wherein the object to be tested includes a copper foil substrate, a printed circuit board (PCB), a flexible printed circuit board (Flexible Printed Circuit), or a stamping board Pieces. According to the single-sided detection system described in item 5 of the scope of patent application, the side wall of the hole includes a perforated side wall or a blind hole side wall. The single-sided detection system described in item 5 of the scope of patent application further includes a first light source disposed above the side wall of the hole to provide an illumination light source for the side wall of the hole. According to the single-sided detection system described in item 10 of the scope of patent application, the type of the first light source includes a coaxial light source, a side light source or a ring light source. The single-sided detection system described in item 5 of the scope of patent application further includes a second light source disposed under the side wall of the hole to provide an illumination light source for the side wall of the hole. The single-sided detection system described in item 12 of the scope of patent application, wherein the second light source includes a surface light source, and the area of the surface light source is proportional to the object to be measured. According to the one-sided detection system described in item 5 of the scope of patent application, the reflector device has an adjustment mechanism to adjust the range of the inclination angle of the image pickup of the reflector device. For the single-sided detection system described in item 5 of the scope of patent application, the range of the inclination angle of the image acquisition is between 10 degrees and 20 degrees based on the vertical plane. According to the one-sided detection system described in item 5 of the scope of patent application, the mirror device includes a flat mirror or a diamond mirror, whereby the image capturing device captures the image of the side wall of the hole through the mirror device. A double-sided detection system for detecting at least one side wall of a hole on an object to be tested. The double-sided detection system includes: an object to be tested carrier for carrying the object to be tested; and a first image capturing device And a second image capturing device arranged on the side of the test object carrier to capture the image of the test object; and a first mirror device arranged on the first image capturing device and the test object Between the stages, wherein there is a first image capturing inclination between the first mirror device and the side wall of the hole; a second mirror device is arranged between the second image capturing device and the object stage to be tested Between the second mirror and the side wall of the hole, there is a second image capturing angle; and a first transfer device for horizontally transferring and transferring the first image capturing device and the second image capturing device on the XY plane. Capture device, the first mirror device and the second mirror device; wherein the first image capture device captures the first side image of the side wall of the hole through the first mirror device, and the second image capture The device captures the second side image of the side wall of the hole through the second mirror device. A paired reflecting mirror group device includes: a first reflecting mirror arranged between the image capturing device and the object to be measured, and a hole side wall of the object to be measured is provided between the first reflecting mirror and the object to be measured. The first acquisition inclination angle; and A second reflecting mirror is arranged between the image capturing device and the object-to-be-measured stage and arranged on the opposite side of the first reflecting mirror, between the second reflecting mirror and the side wall of the hole of the object-to-be-measured It has a second inclination angle. A double-sided detection system for detecting at least one side wall of a hole on an object to be tested. The double-sided detection system includes: a platform for the object to be tested for carrying the object to be tested; an image capturing device provided with On the side of the test object stage, it is used to capture the image of the test object; the paired mirror group device as described in the 18th patent application; and a first transfer device for the XY plane The image capturing device and the paired mirror assembly device are moved horizontally; wherein the image capturing device captures the first side image of the side wall of the hole through the first mirror, and the image capturing device transmits the first side image of the hole The second mirror captures the second side image of the side wall of the hole. For the double-sided detection system described in item 19 of the scope of patent application, the image capturing device includes a line scan camera or an area scan camera. The double-sided detection system described in item 19 of the scope of patent application further includes a first transfer device for transferring the image capturing device and the mirror device. As described in item 19 of the scope of patent application, the double-sided detection system further includes a second transfer device for transferring the object under test. The double-sided inspection system described in item 19 of the scope of patent application, wherein the object to be tested includes a copper foil substrate, a printed circuit board (PCB), a flexible printed circuit board (Flexible Printed Circuit), or a stamping board Pieces. The double-sided detection system described in item 19 of the scope of patent application, wherein the side wall of the hole includes a side wall of a perforated hole or a side wall of a blind hole. The double-sided detection system described in item 19 of the scope of patent application further includes a first light source disposed above the side wall of the hole to provide an illumination light source for the side wall of the hole. According to the double-sided detection system described in item 25 of the scope of patent application, the type of the first light source includes a coaxial light source, a side light source or a ring light source. As described in item 19 of the scope of patent application, the double-sided detection system further includes a second light source disposed under the side wall of the hole to provide an illumination light source for the side wall of the hole. According to the double-sided detection system described in item 27 of the scope of patent application, the second light source includes a surface light source, and the area of the surface light source is proportional to the object to be measured. The double-sided detection system described in item 19 of the scope of patent application, wherein the first reflector has a first adjustment mechanism, so as to adjust the range of the first imaging inclination angle of the first reflector device; wherein the first reflector device The two reflecting mirrors have a second adjusting mechanism, so as to adjust the range of the second image capturing inclination angle of the second reflecting mirror. The double-sided detection system described in item 19 of the scope of patent application, wherein the range of the first image acquisition inclination angle is between 10 degrees and 20 degrees based on the vertical plane; wherein the range of the first image acquisition inclination angle It is between -10 degrees and -20 degrees based on the vertical plane. For the double-sided detection system described in item 19 of the scope of patent application, wherein the first mirror includes a flat mirror or a diamond mirror, whereby the image capturing device captures the first mirror of the side wall of the hole through the first mirror. One side image; the second mirror includes a flat mirror or a diamond mirror, whereby the image capturing device captures the second side image of the side wall of the hole through the second mirror. A double-sided detection system for detecting at least one side wall of a hole on an object to be tested. The double-sided detection system includes: a platform for the object to be tested for carrying the object to be tested; an image capturing device provided with On the side of the test object stage, it is used to capture the image of the test object; a plurality of paired mirror group devices as described in item 18 of the scope of patent application are respectively arranged corresponding to the side wall of the hole of the test object; and A first transfer device for horizontally transferring the image capturing device and the paired mirror assembly device on the XY plane; wherein the image capturing device captures the first side wall of the hole through the first mirror A side image, and the image capturing device captures a second side image of the side wall of the hole through the second reflector.

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