TWI742861B - Storage equipment and a storage system - Google Patents

Abstract

The invention discloses a storage equipment and a storage system. The storage system includes storage equipment, conveying equipment and processing equipment. The processing equipment can control the conveying equipment to take the carrier frame out from the freezer and placed in the storage equipment. The storage equipment includes a processing device, a conveying device, a first chamber and a second chamber. The processing device can control the conveying device to move the carrier frame into the first chamber, and the processing device can also control the conveying device to move the carrier frame stored in the first chamber to the second chamber. The temperature of the first chamber is between minus 5 degrees and 15 degrees, and the temperature of the second chamber is between 20 degrees and 25 degrees.

Description

Storage equipment and storage system

The invention relates to a storage device and a storage system, in particular to a storage device that can be used to store freezing and cold storage at the same time.

In some semiconductor manufacturing processes, the materials that need to be used must be stored in a refrigerated environment. When the relevant process operations need to use the material, the relevant personnel must first remove the material from the freezer before the relevant process starts operation, and set it in a room temperature environment for thawing until the temperature of the material is approximately equal to room temperature. Put it into related process operations.

As mentioned above, in practical applications, after the relevant personnel take the material out of the freezer, set it on a table in a room temperature environment, and wait for the temperature of the material to be approximately equal to room temperature before putting it into the relevant manufacturing process. . This kind of operation process and method is not only labor intensive, but also prone to errors.

The present invention discloses a storage equipment, which is mainly used to improve the conventional manual method to take out objects set in a freezer and place them in a normal temperature environment, and wait for the temperature of the objects to be approximately normal temperature, and then put them into the relevant Various inconveniences and problems caused by the operation method in the production operation.

One of the embodiments of the present invention discloses a storage device, which is used to provide a plurality of carrier racks for storage, each carrier rack is used to carry an object, the storage device includes: a body, a processing device, a transfer device, at least one second A chamber, at least one second chamber, a temperature resistance partition, and at least one environmental regulation device. The body contains an entrance and exit. The transfer device includes a telescopic mechanism, a rotating mechanism, and a holding component. The telescopic mechanism is connected to the rotating mechanism, the holding component is connected to the telescopic mechanism, and the holding component is used to hold the carrier; the transfer device is electrically connected to the processing device for processing The device can control the telescopic mechanism to move the holding assembly forward or backward relative to the rotating mechanism; the processing device can control the rotating mechanism to rotate the telescopic mechanism and the holding assembly. The first chamber is arranged around the transfer device, and the first chamber is used for accommodating a plurality of supporting racks. The second chamber is arranged around the transfer device, and the second chamber is located above the first chamber, and the second chamber is used for accommodating a plurality of carrier racks. The temperature resistance baffle is arranged between the first chamber and the second chamber, and the temperature resistance baffle is used to block the heat energy inside the first chamber and the heat energy inside the second chamber from being transferred to each other. The environmental adjustment device is electrically connected to the processing device, and the processing device is used to control the environmental adjustment device so that the temperature of the first chamber is not higher than a first temperature, and the temperature of the second chamber is not higher than a second temperature; Wherein, the second temperature is lower than 30 degrees, the first temperature is higher than minus 10 degrees, and the first temperature is not higher than the second temperature. Among them, the processing device can control the transfer device, so that the holding component will be moved into the first chamber or the second chamber to be placed on the carrier at the entrance and exit, and the processing device can control the transfer device, and the holding component will be located in the first chamber or the second chamber. The carrier in the first chamber or the second chamber is transferred to the inlet and outlet.

One of the embodiments of the present invention discloses a storage system, which includes: a storage device, a transfer device, and a processing device. The storage equipment is used to provide multiple carrier racks for storage, and each carrier rack is used to carry an object. The storage equipment includes: a body, a processing device, a transfer device, at least one first chamber, at least one second chamber, A temperature resistance baffle and at least one environmental regulation device. The main body includes a carrier and an entrance and exit, and the carrier is used to provide a carrier for placement. The transfer device includes a telescopic mechanism, a rotating mechanism, and a holding component. The telescopic mechanism is connected to the rotating mechanism, the holding component is connected to the telescopic mechanism, and the holding component is used to hold the carrier; the transfer device is electrically connected to the processing device for processing The device can control the telescopic mechanism to move the holding assembly forward or backward relative to the rotating mechanism; the processing device can control the rotating mechanism to rotate the telescopic mechanism and the holding assembly. The first chamber is arranged around the transfer device, and the first chamber is used for accommodating a plurality of supporting racks. The second chamber is arranged around the transfer device, and the second chamber is located above the first chamber, and the second chamber is used for accommodating a plurality of carrier racks. The temperature resistance baffle is arranged between the first chamber and the second chamber, and the temperature resistance baffle is used to block the heat energy inside the first chamber and the heat energy inside the second chamber from being transferred to each other. The environmental adjustment device is electrically connected to the processing device, and the processing device is used to control the environmental adjustment device so that the temperature of the first chamber is not higher than a first temperature, and the temperature of the second chamber is not higher than a second temperature; Wherein, the second temperature is lower than 30 degrees, the first temperature is higher than minus 10 degrees, and the first temperature is not higher than the second temperature. Among them, the processing device can control the transfer device, so that the holding component will be arranged on the carrier of the carrier, pass through the entrance and exit, and move into the first chamber or the second chamber for placement, and the processing device can control the transfer Device, so that the holding component will pass through the inlet and outlet of the carrier in the first chamber or the second chamber and be placed on the carrier. The transfer equipment is used to transfer the carrier and the objects it carries from a freezer to the carrier of the storage equipment. The processing equipment can receive a piece of demand information, and the processing equipment can control the transfer equipment to remove at least one carrier and its carried objects from the freezer and transfer it to the carrier according to the demand information; the processing device can control the transfer according to the demand information. The carrier device moves the carrier and the objects it carries into the first chamber, and the processing device can move the carrier and the objects it carries into the first chamber according to demand information after the carrier and its objects are set in the first chamber for a predetermined period of time. The carrying frame and its carried objects are transferred to the second chamber.

In summary, the storage equipment and storage system of the present invention, through the design of the processing device and the transfer device, can allow relevant personnel to more conveniently store the carrying racks and objects that have just been taken out of the freezer.

In order to further understand the features and technical content of the present invention, please refer to the following detailed descriptions and drawings about the present invention, but these descriptions and drawings are only used to illustrate the present invention, and do not make any claims about the protection scope of the present invention. limit.

In the following description, if it is pointed out, please refer to a specific drawing or as shown in a specific drawing, it is only used to emphasize that in the subsequent description, most of the related content appears in the specific drawing. However, it is not limited that only the specific drawings can be referred to in this subsequent description.

Please refer to FIGS. 1 to 3. FIG. 1 is a schematic diagram of the storage device of the present invention, FIG. 2 is a block diagram of the storage device of the present invention, and FIG. 3 is a schematic partial cross-sectional view of the storage device of the present invention. The storage equipment 100 is used to provide a plurality of carrier racks 200 (as shown in FIG. 5) for storage, and each carrier rack 200 is used to carry an object 2 (as shown in FIG. 5). The storage equipment 100 includes: a body A, a processing device B, a transfer device C, a first chamber D, three second chambers E, a temperature resistance partition F, and at least one environmental regulation device G.

The main body A may include a frame body A1 and a plurality of cover plates A2. The frame body A1 serves as the overall supporting structure of the storage equipment 100, the cover plate A2 is fixedly arranged on the frame body A1, and the frame body A1 and a plurality of cover plates A2 forms the first chamber D and three second chambers E together. In practical applications, the plurality of cover plates A2 used to form the first chamber D can be selected components with good heat resistance effect, and the cover plates A2 can prevent the temperature in the first chamber D from being affected by the external environment. Influence.

The processing device B is electrically connected to the transfer device C and the environmental adjustment device G, the processing device B can control the operation of the transfer device C, and the processing device B can also control the operation of the environmental adjustment device G. In practical applications, the processing device B can be, for example, various computers, servers, various processors, etc., which is not limited herein. The processing device B may be installed in the main body A of the storage facility 100, or the processing device B may be installed independently of the main body A. The processing device B may also be connected with at least one input device (for example, various keyboards, mice, touch screens, touch pads, etc.) and at least one display device, and the relevant personnel may control the processing device B through the input device The relevant procedures are executed, and the relevant personnel can learn the current storage status of the storage equipment 100 by watching the display device.

The transfer device C includes a telescopic mechanism C1, a rotating mechanism C2, a holding component C3, and a lifting mechanism C4. The telescopic mechanism C1 is connected to the rotating mechanism C2. One end of the telescopic mechanism C1 is provided with a holding component C3 for the holding component C3. To hold the carrier 200 (as shown in FIG. 5). The telescopic mechanism C1, the rotating mechanism C2, and the holding assembly C3 are all connected to the lifting mechanism C4, and the lifting mechanism C4 can make the telescopic mechanism C1 and the holding assembly C3 move vertically upward or downward. The telescopic mechanism C1 is electrically connected to the processing device B, and the processing device B can control the action of the telescopic mechanism C1, so that the holding assembly C3 is forward (ie close to the direction of the first chamber D) or backward (ie away from the first chamber D) relative to the rotating mechanism C2. The direction of a chamber D) moves.

The rotating mechanism C2 is electrically connected to the processing device B, and the processing device B can control the operation of the rotating mechanism C2, so that the telescopic mechanism C1 and its connected holding assembly C3 rotate a predetermined angle with respect to the first chamber D (it can be arbitrary according to requirements) angle). The holding component C3 is used to hold the carrier 200. The holding component C3 can be changed according to the specific appearance of the carrying frame 200, and any component that can be used to clamp the carrying frame 200 belongs to the scope that the holding component C3 can be implemented.

The telescopic mechanism C1, the rotating mechanism C2, the holding assembly C3, and the lifting mechanism C4 can cooperate with each other, so that the carrier 200 held by the holding assembly C3 moves in the lateral direction (that is, the X-axis or Y-axis direction of the coordinates shown in FIG. 3) , To enter or leave the first chamber D or the second chamber E.

The telescopic mechanism C1, the rotating mechanism C2, the holding assembly C3, and the lifting mechanism C4 can cooperate with each other, so that the carrier 200 held by the holding assembly C3 moves in the longitudinal direction (that is, the Z-axis direction of the coordinates shown in FIG. 3), and moves from adjacent The position of the first chamber D moves to a position adjacent to the second chamber E, or from a position adjacent to the second chamber E to a position adjacent to the first chamber D.

The telescopic mechanism C1, the rotating mechanism C2, the holding assembly C3, and the lifting mechanism C4 can cooperate with each other, so that the carrier 200 held by the holding assembly C3 rotates relative to the first chamber D and relative to the second chamber E.

The mechanisms, components, electronic components, etc. included in the telescopic mechanism C1, the rotating mechanism C2, the holding assembly C3, and the lifting mechanism C4 can be based on the actual carrier 200 and the object to be carried by the carrier 200 2. The appearance of the body A The design and size are not limited here; that is to say, any can be used to hold the carrier 200 and the objects 2 it carries, and make it move in the Z-axis direction, in the X-axis direction, and in the Y-axis direction. Mechanisms that move and rotate around the Z axis are all within the applicable range of the transfer device C referred to here.

Please refer to FIGS. 4 to 8 together. FIG. 4 is a schematic diagram of the first chamber and the second chamber of the storage device of the present invention, and FIG. 5 is a schematic diagram of the storage device of the present invention provided with multiple carrier racks, and FIG. 6 It is a schematic diagram of the first chamber and annular movable wall of the storage equipment of the present invention. FIG. 7 is a schematic diagram of the holding component of the storage equipment of the present invention holding the carrier in the first chamber. FIG. 8 is the storage equipment of the present invention. A schematic partial cross-sectional view of the first base. The first chamber D is arranged around the transfer device C, the first chamber D can accommodate a plurality of carrier racks 200, and the plurality of carrier racks 200 can be arranged in the first chamber D in a circular arrangement. Specifically, the storage equipment 100 has a first base H, the first base H is ring-shaped, and the first base H is arranged around the transfer device C, and the first base H, the multiple cover plates A2 of the body A, and the temperature The barrier plates F together form the first chamber D.

The first base H is used to provide a plurality of supporting frames 200 settings. When a plurality of supporting frames 200 are arranged on the first base H, the plurality of supporting frames 200 will be arranged corresponding to the surrounding transfer device C, and the processing device B may control the movement of the transfer device C, so that the holding component C3 will be set One of the supporting frames 200 on the first base H is taken out. The processing device B can also control the transfer device C, so that the holding component C3 sets a carrier 200 on the first base H. The appearance and size of the first base H can be changed according to requirements, and are not limited to those shown in the figure. The number of supporting frames 200 that can be accommodated in the first base H can also be changed according to requirements.

In a specific application, the first base H may also include a plurality of positioning structures H1 (as shown in FIG. 8), and the plurality of positioning structures H1 are used to restrict the plurality of carrier frames 200 disposed in the first chamber D relative to The range of movement of the first base H; in a preferred embodiment, the four positioning structures H1 can jointly limit a carrier 200 provided on the first base H, and the four positioning structures H1 can be correspondingly abutted against the carrier The four bottom corners of the frame 200. Of course, the first base H restricts one supporting frame 200 through several positioning structures H1, and is not limited to four, and is used to restrict the setting position of the multi-positioning structure H1 of one supporting frame 200 on the first base H. Not limited to what is shown in the figure.

It is worth mentioning that the body A may also include a plurality of sensors A3 (as shown in FIG. 2), each sensor A3 is electrically connected to the processing device B, and each sensor A3 is used to sense the Whether each carrier 200 in the chamber D is correctly set on the first base H. In this way, the processing device B can determine whether the carrier 200 is provided at each position of the first base H through each sensor A3 provided on the first base H, and the processing device B can also use each sensor A3. To determine whether the carrier 200 installed on the first base H is correctly installed.

In different embodiments, the first base H may include a plurality of rails, and each rail is used to provide each supporting frame 200 to be slidably disposed on the first base H. The periphery of each track may be provided with a corresponding sensor and a stop mechanism. The sensor is used for whether the carrier 200 has been connected to the rail. If the sensor detects that the sliding rail has been connected to the carrier 200, then The related processor will control the stop mechanism to act, so as to limit the range of movement of the carrier 200 on the track.

The plurality of second chambers E are located above the first chamber D, and the plurality of second chambers E may be arranged up and down in communication with each other. In different embodiments, the plurality of second chambers E may not communicate with each other. Each second cavity E is arranged around the transfer device C, and each second cavity E can accommodate a plurality of carrier racks 200, and the plurality of carrier racks 200 can be arranged in the second cavity E in a circular arrangement. Specifically, the storage device 100 includes three second bases L. The three second bases L pass through a plurality of supporting structures M, and are arranged vertically up and down at intervals, and the second base L closest to the temperature resistance partition F passes through A plurality of supporting structures M are connected with the temperature resistance partition F. Each second base L is ring-shaped, each second base L is arranged around the transfer device C, part of the second base L and a plurality of cover plates A2 together form a second chamber E, and one of the second bases L is connected with The temperature resistance partition F and a plurality of cover plates A2 together form a second chamber E.

In the figure of this embodiment, the storage device 100 includes one first chamber D and three second chambers E as an example, but the number of first chamber D and second chamber E included in the storage device 100 is different. This is limited; in different embodiments, the number of the first chamber D may be two or more, and the number of the second chamber E may also be one, two or more than four. Preferably, the number of second chambers E is greater than the number of first chambers D.

The temperature resistance barrier F is arranged between the first chamber D and the second chamber E closest to the first chamber D. The temperature barrier F is used to block the first chamber D and the second chamber E, so that the first chamber D and the second chamber E are not communicated with each other, and accordingly block the internal thermal energy of the first chamber D and The heat energy inside the second chamber E is transferred to each other. The appearance and size of the temperature resistance spacer F can be designed according to requirements, and there is no limitation here.

The environmental adjustment device G is electrically connected to the processing device B, and the processing device B is used to control the environmental adjustment device G so that the temperature of the first chamber D is not higher than a first temperature, and the temperature of the second chamber E is not high At a second temperature; the first temperature is higher than minus 10 degrees, the second temperature is lower than 30 degrees, and the first temperature is not higher than the second temperature; preferably, the difference between the first temperature and the second temperature is greater than 5 Spend. In a preferred embodiment, the second temperature can be between 20-25 degrees, and the first temperature can be between minus 5 degrees and 15 degrees; that is, the processing device B is controlled by the environmental adjustment device G, To make the temperature of the second chamber E close to the temperature of normal temperature, and make the temperature of the first chamber D close to the temperature of refrigeration.

In order to better control the environmental state of the first chamber D and the environmental state of the second chamber E, the storage facility 100 may include two environmental adjustment devices G, which are defined as a first environmental adjustment device and a second environmental adjustment device. The environmental adjustment device, the first environmental adjustment device is used solely to control the temperature and humidity of the first chamber D, and the second environmental adjustment device is used solely to control the temperature and humidity of the plurality of second chambers E.

Please refer to FIGS. 2, 6 and 7 together. In practical applications, the storage device 100 may also include an annular movable wall N, a movable wall rotating mechanism P, and a movable door Q. The annular movable wall N is connected with the movable wall rotating mechanism P, and the movable wall rotating mechanism P can drive the annular movable wall N to rotate relative to the first chamber D. The ring-shaped movable wall N has an opening N1, and the movable door Q is movably arranged on one side of the ring-shaped movable wall N. The movable door Q can be operated to cover the opening N1 or not to cover the opening N1. When the opening N1 is not covered by the movable door Q, the carrier 200 held by the holding component C3 can enter and exit the first chamber D through the opening N1. In the figure of this embodiment, the ring-shaped movable wall N surrounds the transfer device C and the overall shape is roughly circular as an example, but the shape of the ring-shaped movable wall N is not limited to this. In different embodiments The outer shape of the ring-shaped movable wall N may also surround the transfer device C and the entirety is roughly rectangular.

As described above, the process in which the processing device B controls the holding assembly C3 to place the carrier 200 and the object 2 it carries into the first chamber D may be, for example, as follows: the processing device B first controls the transfer device C to act, and the holding assembly C3 and its holding carrier 200 are moved outside the first chamber D, and then the processing device B will control the movable wall rotating mechanism P to rotate, so that the movable door Q and the opening N1 are rotated to the current position corresponding to the holding assembly C3. Finally, the processing device B controls the opening of the movable door Q and controls the movement of the transfer device C, so that the holding component C3 moves the carrier 200 held by it into the first chamber D through the opening N1. Of course, in different embodiments, the processing device B can also control the transfer device C and the movable wall rotating mechanism P at the same time, and the transfer device C drives the carrier 200 held by it to move to the first chamber D In the external process, the movable wall rotating mechanism P simultaneously drives the annular movable wall N to rotate, so that the opening N1 is correspondingly moved to a predetermined position.

The movable door Q can be connected to the annular movable wall N through an electronically controlled slide rail group, and the processing device B can control the movable door Q relative to the annular movable wall N by controlling the electronically controlled slide rail group. Movable to open or close the opening N1, or the movable door Q can be connected to the annular movable wall N only by mechanical means, and the processing device B cannot electronically control the movable door Q relative to the annular movable wall N moves. In other words, the movable door Q can be an electric door or a non-electric door.

In the embodiment where the annular movable wall N is arc-shaped, the movable door Q may correspond to an arc-shaped plate, and the movable door Q may be a non-electric door, and the storage device 100 may further include a door opening assembly R, The door opening assembly R is connected to the aforementioned rotating mechanism C2. The door opening assembly R can rotate together with the aforementioned rotating mechanism C2 relative to the first chamber D. The door opening assembly R is used to drive the movable door Q to move relative to the annular movable wall N to make The opening N1 is exposed or not exposed. In practical applications, the movable door Q may have a door handle, and the door opening assembly R may have a member capable of holding the door handle, and the processing device B can control the operation of the door opening assembly R to hold the door handle of the movable door Q. And drive the movable door Q to move relative to the annular movable wall N.

Please refer to FIGS. 2 and 8 together. In an embodiment in which the processing device B controls the temperature of the first chamber D at minus 5 degrees to 15 degrees through the environmental adjustment device G, the first base H may also have more A drainage groove H2. One end of the plurality of drain grooves H2 is connected to a drain channel H3, the liquid in each drain channel H2 will be guided to the drain channel H3, and the liquid located in the drain channel H3 will be guided Lead and discharge outward. Regarding the number, shape and arrangement of the drainage grooves H2, they are not limited to those shown in the figure. Any structure that can be used to guide liquid to the drainage channel H3 is applicable to the drainage groove H2. Scope. The number of the drainage channels H3 and the connection with the multiple drainage grooves H2 are not limited to those shown in the figure.

For example, the first chamber D may be used to store the carrier 200 and the objects 2 carried by it that have just been taken out from the freezer. When the carrying rack and the objects 2 it carries are placed on the first base H, the temperature of the first chamber D is higher than the temperature of the freezer. Therefore, the carrying rack Condensed water may be formed on the surface of the 200 and the object 2 it carries, and the condensed water may be discharged to the outside through the drain grooves H2 and the drain channel H3. In a preferred embodiment, the surface H4 of the first base H can be inclined to the drain channel H3. In this way, the condensed water falling on the surface H4 of the first base H can also be guided to flow into the drain channel. H3 or drainage groove H2.

In different embodiments, the storage facility 100 may further include a blowing device W, which is electrically connected to the processing device B, and the blowing device W can be controlled by the processing device B to blow a blow into the first chamber D. According to the gas, the carrier 200, which has just been taken out of the freezer and placed in the first chamber D, can be heated up to approximately the same temperature as the first chamber D relatively quickly. The blowing device W may be connected to a clean gas supply device, for example, and the blowing device W continuously blows clean gas into the first chamber D.

In an embodiment where the storage equipment 100 is set in an environment of 20-25 degrees, the storage equipment 100 may also include an air extraction device X, the air extraction device X is connected to the air blowing device W, and the air extraction device X is used to extract the storage equipment 100 The air blowing device W is used to blow the air drawn by the air suction device X into the first chamber D. Through the arrangement of the blowing device W, the environmental adjustment device G can better control the environmental state (such as temperature and humidity) of the first chamber D. In the case where the temperature of the environment where the storage equipment 100 is set is approximately the same as the temperature of each second chamber E, the air extraction device X and the air blowing device W may cooperate with each other to blow the air outside the storage equipment 100 at the same time Into each of the second chamber E and the first chamber D. Of course, the air outlet of the blowing device W may be provided with related filtering components according to requirements to filter the air sucked by the suction device X.

Please refer to FIGS. 1 and 2 again. The body A of the storage device 100 also includes an inlet and outlet A4 and a carrier A5. The inlet and outlet A4 can communicate with the second chamber E. The main body A may also have an entrance and exit door A6, which can be controlled by the processing device B without shielding or not shielding the entrance and exit A4. When the entrance and exit door A6 does not cover the entrance and exit A4, the second chamber E will communicate with the outside through the entrance and exit A4. The carrier A5 is arranged adjacent to the entrance and exit A4, and the carrier A5 is used to provide the carrier 200 (as shown in FIG. 5) and the objects 2 it carries. When the entrance and exit A4 is not shielded, the holding component C3 can pass through the entrance and exit A4 to hold the carrier 200 set on the carrier A5. On the other hand, the holding component C3 can also be originally set in the first chamber D or the first chamber D. The carrier 200 in the second chamber E and the object 2 it carries are placed on the carrier A5. Regarding the number and location of the carrier A5 and the inlet and outlet A4, they are not limited to those shown in the figure. In special applications, the storage equipment 100 can also have two or more inlets and outlets A4 and carrier. A5.

In different embodiments, the body A of the storage device 100 may also include at least one carrier sensor A7, and the carrier sensor A7 is used to sense whether the carrier A5 is provided with the carrier 200, and accordingly A sensed information A71 is generated, and the processing device B can control the movement of the transfer device C and the access door A6 according to the sensed information A71. For example, when a related person or related equipment sets the carrier 200 on the carrier A5, the processing device B will receive the sensing information A71 transmitted by the carrier sensor A7, and control the opening of the entrance and exit door A6 accordingly. And the transfer device C is controlled to act, so that the holding component C3 passes through the inlet and outlet A4 to move the carrier 200 on the carrier A5 into the second chamber E or the first chamber D.

In practical applications, the processing device B can receive a demand information 3 transmitted by an external electronic device (such as various computers, servers, smart phones, tablet computers, etc.) in a wired or wireless manner, and the processing device B can According to the demand information 3, the transfer device C is controlled to act to take out a carrier 200 from the second chamber E or the first chamber D, and then the access door A6 is controlled to open, and the newly taken out carrier 200 is allowed to pass in The exit A4 is placed on the stage A5. Finally, after the processing device B receives the sensing information A71 transmitted by the stage sensor A7, the processing device B will transmit the relevant information to the external electronic equipment, so that the external electronic equipment Notify relevant equipment or personnel to take the carrier 200 to carrier A5.

Please refer to FIGS. 1 and 2 again. When the storage equipment 100 of the present invention is applied in an automated factory, the storage equipment 100 may further include a reading device Y for reading an identification unit to generate identification information. The identification unit is used to be installed on the object 2 or the carrier 200. The identification unit is, for example, various bar codes, various radio frequency (RFID) tags, and the like. The identification information may, for example, include basic data related to the object (for example, the date of manufacture of the object, the service life, etc.). In the embodiment where the identification unit is a readable and writable component (such as a radio frequency tag), the reading device Y can not only read the data stored by the identification unit, but also can read The data is written in the identification unit.

The processing device B is electrically connected to the reading device Y. The processing device B can control the transfer device C to move the carrier 200 located at the entrance and exit A4 into the first chamber D or the second chamber E according to the identification information; on the other hand, the processing device B can also control the transfer based on the identification information The device C transfers one of the supporting racks 200 in the first chamber D or one of the supporting racks 200 in the second chamber E to the inlet and outlet A4.

The storage device 100 of the present invention can be applied to a semiconductor equipment factory, for example, and the object 2 can be, for example, a specific type of film used in the semiconductor production process. The specific type of film must be stored in a freezer when not in use. kind of. When the storage device 100 of the present invention is applied in a semiconductor equipment factory, the storage device 100 may be used to store the film.

In the existing applications, the process for the relevant personnel to use the film set in the freezer is roughly as follows: the relevant personnel first judge when the film will be used according to the operation process, and then, 6 hours or even a day before the film is needed. , Take the film out of the freezer, and set the film on the table in the room temperature environment, so that the temperature of the film gradually rises to room temperature. Finally, when the relevant personnel need to use the film, they directly take the film set in the room temperature environment. On the table, and the temperature has been roughly equivalent to the film at room temperature. For the film use process in the above-mentioned existing applications, if the relevant personnel do not take out the film from the freezer at the correct time, when the film needs to be used in the relevant operation process, the temperature of the film may be too low, and the relevant operation process cannot use the film. Even if the relevant personnel do not take out the film from the freezer in advance, the related operation process must be forced to stop. In addition, the film taken out of the freezer is placed directly on the table in a room temperature environment, and the water droplets condensed on the surface of the film will flow to the tabletop, causing a puddle of water on the tabletop or the ground. Furthermore, when the relevant person takes the film out of the freezer and places it on a table in a room temperature environment, if the relevant person does not correctly set a label or relevant mark on the film, another person may take the wrong film.

In conclusion, in an embodiment in which the storage equipment 100 of the present invention is applied to a semiconductor automation plant, the process of storing the carrier 200 taken out of the freezer and the objects 2 carried by it in the first chamber D may be: first, related The equipment or personnel sets the carrier 200 taken out from the freezer and the object 2 it carries on the carrier A5; then, the processing device B will receive the carrier sensor A7 and sense that the carrier 200 is set on the carrier A5. For the sent sensing information A71, the processing device B may first control the reading device Y to act, so as to read the identification information stored in the identification unit on the carrier 200 or the object 2. Then, the processing device B can control the operation of the transfer device C and the access door A6 according to the identification information and the current storage state of the first chamber D, so that the holding component C3 will be set on the carrier 200 and the carrier 200 of the carrier A5 The carried objects 2 are transferred to the outside of the first chamber D together; finally, the processing device B will actuate the rotating mechanism C2, the movable wall rotating mechanism P, and the movable door Q, and the holding assembly C3 will hold the carrier 200 moves into the first chamber D through the opening N1 of the annular movable wall N.

In addition, when the processing device B controls the holding component C3 to place the carrier 200 and the object 2 it carries in the first chamber D, the processing device B will perform related records (for example, including the identification of entering the carrier 200). The identification information stored in the unit, the time when the carrier 200 is installed in the first chamber D, etc.), and then the processing device B will store the carrier 200 and the object 2 carried by it according to the identification information or related demand information At a predetermined time (for example, 6-10 hours) after the first chamber D, the transfer device C, the movable wall rotation mechanism P, and the movable door Q are controlled to act, so that the holding assembly C3 transfers the carrier 200 to The second chamber E is stored. When the processing device B transfers the carrier 200 to the second chamber E for storage, the processing device B may send relevant notification information to related external electronic equipment to notify the related equipment or personnel that the carrier 200 carries The temperature of the object 2 has been roughly equal to room temperature. When the relevant equipment or personnel receives the notification information sent by the processing device B, the relevant equipment or personnel can send the relevant fetching information to the processing device B, and the processing device B will control the transfer device C after receiving the fetching information And the entrance and exit door A6 to set the carrier 200 arranged in the second chamber E on the carrier A5.

As mentioned above, in other words, when the storage equipment 100 of the present invention is applied to store film that needs to be frozen and stored for use in a semiconductor factory, the processing device B may be able to execute a thawing procedure, and when the processing device B executes the thawing procedure, the processing device B The transfer device C is controlled, and the carrier 200 and the objects 2 carried on the carrier A5 are first transferred to the first chamber D, and the processing device B is transferred to the carrier 200 and its carried objects 2 After the object 2 is placed in the first chamber D for a predetermined period of time, the transfer device C is controlled to transfer the carrier 200 and the object 2 it carries from the first chamber D to the second chamber E for storage, The processing device B will not further move the carrier 200 and the object 2 carried in the second chamber E to the carrier A5 until the relevant personnel or equipment sends out relevant retrieval information to the processing device B.

Please refer to FIGS. 9 to 12 together. FIGS. 9 and 10 are schematic diagrams of different perspectives of the carrier frame of the storage equipment of the present invention. FIG. 11 is a schematic diagram of the telescopic mechanism and holding components of the storage equipment of the present invention. FIG. 12 is A schematic diagram of the holding frame of the holding component of the storage equipment of the present invention. The storage device 100 may also include multiple carrier racks 200. In practical applications, when the storage device 100 of the present invention is sold, it may include multiple carrier racks 200 for sale together, or, when the storage device 100 is sold, it may not include multiple carrier racks 200.

Each carrier 200 may have a top plate 201, a bottom plate 202, and three side plates. The top plate 201, the bottom plate 202, and the three side plates are connected to each other to form a containing chamber 204. The containing chamber 204 is used for accommodating objects 2 . The three side panels are respectively defined as two side panels 2031 and a rear side panel 2032. The two side panels 2031 are disposed facing each other, and each side panel 2031 has a plurality of perforations 20311. Through the design of multiple perforations 20311, when the carrier 200 is installed in the first chamber D, the air blowing device W (as shown in FIG. 2) can be sent into the first chamber D, which can be used in the article 2 As a result, the temperature of the object 2 can reach approximately the same temperature as that of the first chamber D relatively quickly. Regarding the shape, size, number, and location of the perforations 20311 of each side board 2031, they are not limited to those shown in the figure. The rear side plate 2032 is connected to the two side plates 2031, and the rear side plate 2032 may also have a plurality of perforations 20321, each perforation 20321 is provided through the rear side plate 2032, and one side of the rear side plate 2032 can also be provided with two auxiliary structures 205 and two riding structures 206, the two auxiliary structures 205 are spaced apart from each other, and each riding structure 206 is provided at one end of each auxiliary structure 205.

As shown in FIG. 11, corresponding to the design of the auxiliary structure 205 and the riding structure 206 of the carrier 200, the holding assembly C3 may include a holding body C31 and four movable clamping members C32, of which two movable clamping members C32 The other two movable clamping members C32 are arranged facing each other, and the two movable clamping members C32 arranged facing each other can be controlled to clamp one of the auxiliary structures 205 of the carrier 200. Each movable clamping member C32 may also have an engaging portion C321 for engaging with the riding structure 206 of the carrying frame 200, and the carrying frame 200 can pass through the riding structure 206 and the engaging portion C321. Hang on the holding component C3.

As shown in FIGS. 9 to 12, specifically, each riding structure 206 can form a receiving slot 207 together with the rear side plate 2032, and each engaging portion C321 can be correspondingly locked and disposed in the receiving slot 207 In this way, when the holding component C3 holds the carrier 200, the holding component C3 not only clamps the two auxiliary structures 205 through the four movable clamping members C32, but also engages each other with each receiving slot 207 through each engaging portion C321 The combination is connected to the carrying frame 200 so as to effectively ensure that the holding component C3 can stably hold the carrying frame 200.

Please refer to FIG. 1 to FIG. 3 and FIG. 13 together. FIG. 13 shows a block diagram of the storage system of the present invention. The storage system 1 of the present invention includes the aforementioned storage device 100, a transfer device 400, and a processing device 300. The detailed description of the storage device 100 will not be repeated here. The transfer equipment 400 is used to transfer the carrier 200 and the objects 2 arranged on the carrier 200 from a freezer to the carrier A5 of the storage facility 100. The processing device 300 can receive a demand information 3. The processing device 300 can control the transfer device 400 to take out the at least one carrier 200 and the object 2 carried by it from the freezer according to the demand information 3 and transfer it to the carrier A5.

The processing device B of the storage facility 100 may also be capable of receiving the demand information 3, and the processing device B can control the transfer device C to move the carrier 200 set on the carrier A5 and the objects 2 carried by it into according to the demand information 3. The first chamber D and the processing device B can be moved to the second chamber E after the carrier 200 and the object 2 it carries in the first chamber D for a predetermined period of time according to the demand information 3, and the processing device According to the demand information 3, after the carrier 200 and the object 2 it carries are set in the second chamber E for another predetermined time, the transfer device C can be controlled to transfer the carrier 200 and the object 2 it carries from the second chamber E The chamber E is transferred to the stage A5.

In addition, the processing device 300 can also receive a piece of fetching information 4, and the processing device 300 can control the storage device 100 according to the fetching information 4, so that the processing device B controls the transfer device C to act, and is set in the second cavity One of the carrier 200 and the object 2 it carries in the room E is moved to the carrier A5, and the processing equipment 300 can also control the transfer equipment 400 to set the carrier 200 and the carrier 200 on the carrier A5 according to the fetching information 4 The carried object 2 is moved to a specific workstation or work equipment.

In summary, the storage equipment of the present invention is designed with a transfer device, a first chamber, and a second chamber, so that relevant personnel can conveniently use the storage equipment to store the carrying rack and its carried objects that have just been taken out of the freezer. The storage system of the present invention is designed through storage equipment, transfer equipment and processing equipment, so that relevant personnel can send demand information to the processing equipment, and the storage system can automatically take out the carrying rack and its carried objects from the freezer according to the demand information. , And set it in the first chamber and the second chamber successively for thawing.

The above descriptions are only the preferred and feasible embodiments of the present invention, which do not limit the scope of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the protection scope of the present invention. .

1: Warehousing system

100: storage equipment

A: Ontology

A1: Frame

A2: Cover

A3: Sensor

A4: Import and export

A5: Carrier

A6: in and out

A7: Stage sensor

A71: Sensing information

B: Processing device

C: Transfer device

C1: Telescopic mechanism

C2: Rotating mechanism

C3: Holding components

C31: Hold the body

C32: movable clamping member

C321: Card joint part

C4: Lifting mechanism

D: The first chamber

E: second chamber

F: Temperature resistance baffle

G: Environmental regulation device

H: First base

H1: Positioning structure

H2: Drainage groove

H3: Drainage channel

H4: Surface

L: second base

M: Supporting structure

N: Annular movable wall

N1: opening

P: movable wall rotating mechanism

Q: movable door

R: Door opening assembly

W: blowing device

X: Exhaust device

Y: Reading device

200: Carrier

201: top plate

20: bottom plate

2031: side panel

20311: perforation

2032: rear side panel

20321: Piercing

204: storage room

205: auxiliary structure

206: Riding Structure

207: Tolerance

300: processing equipment

400: Transfer equipment

2: Object

3: Demand information

4: Fetching information

Figure 1 is a schematic diagram of the storage equipment of the present invention.

Figure 2 is a block diagram of the storage equipment of the present invention.

Fig. 3 is a schematic partial cross-sectional view of the storage equipment of the present invention.

Fig. 4 is a schematic diagram of the first chamber and the second chamber of the storage device of the present invention.

Fig. 5 is a schematic diagram of the storage equipment of the present invention provided with multiple supporting racks.

Fig. 6 is a schematic diagram of the first chamber and the annular movable wall of the storage device of the present invention.

Fig. 7 is a schematic diagram of the holding component of the storage equipment of the present invention holding the carrier in the first chamber.

Fig. 8 is a schematic partial cross-sectional view of the first base of the storage equipment of the present invention.

9 and 10 are schematic diagrams of different perspectives of the carrying rack of the storage equipment of the present invention.

Fig. 11 is a schematic diagram of the telescopic mechanism and the holding assembly of the storage equipment of the present invention.

Fig. 12 is a schematic diagram of the holding frame of the holding component of the storage equipment of the present invention.

Fig. 13 is a block diagram of the storage system of the present invention.

100: storage equipment

C: Transfer device

C1: Telescopic mechanism

C3: Holding components

C4: Lifting mechanism

D: The first chamber

E: second chamber

F: Temperature resistance baffle

H: First base

L: second base

M: Supporting structure

N: Annular movable wall

Q: movable door

R: Door opening assembly

Claims (12)

A storage facility is used to provide a plurality of carrier racks for storage, each of the carrier racks is used to carry an object, and the storage facility includes: a body including an entrance and exit; a processing device; and a transfer device, which It includes a telescopic mechanism, a rotating mechanism, and a holding component, the telescopic mechanism is connected to the rotating mechanism, the holding component is connected to the telescopic mechanism, and the holding component is used to hold the carrier frame; The transfer device is electrically connected to the processing device, and the processing device can control the telescopic mechanism so that the holding assembly can move forward or backward relative to the rotating mechanism; the processing device can control the rotation Mechanism to rotate the telescopic mechanism and the holding assembly; at least one first chamber is arranged around the transfer device, and the first chamber is used for accommodating a plurality of the carrier; at least one A second chamber, which is arranged around the transfer device, and the second chamber is located above the first chamber, and the second chamber is used for accommodating a plurality of the carrier racks; a temperature A barrier plate, which is arranged between the first chamber and the second chamber, and the temperature barrier plate is used to block the thermal energy inside the first chamber from the thermal energy inside the second chamber Heat energy is transferred to each other; at least one environmental conditioning device is electrically connected to the processing device, and the processing device is used to control the environmental conditioning device so that the temperature of the first chamber is not higher than a first temperature, And make the temperature of the second chamber not higher than a second temperature; wherein, the second temperature is lower than 30 degrees, the first temperature is higher than minus 10 degrees, and the first temperature is not higher than The second temperature; wherein, the processing device can control the transfer device, so that the holding assembly will be located at the entrance and exit of the carrier, into the first cavity Chamber or the second chamber, and the processing device can control the transfer device, so that the holding component will be located in the first chamber or the second chamber The carrying rack is transferred to the entrance and exit; wherein, the storage equipment further includes an air blowing device which is electrically connected to the processing device, and the air blowing device can be controlled by the processing device. A gas is blown into the first chamber; the storage facility includes two of the environmental adjustment devices, which are defined as a first environmental adjustment device and a second environmental adjustment device, and the first environmental adjustment device is used for To control the temperature and humidity of the first chamber, the second environmental adjustment device is used to control the temperature and humidity of the second chamber. The storage device according to claim 1, wherein the storage device further includes at least one first base, the first base is located in the first chamber, the first base is ring-shaped, and the first The base is used to carry a plurality of the supporting racks; the first base has a plurality of drainage grooves and a drainage channel, one end of the plurality of drainage grooves is connected to the drainage channel, and each The liquid in the liquid drainage groove will be guided into the liquid drainage channel, and the liquid in the liquid drainage channel will be guided to be discharged outward. The storage device according to claim 1, wherein the storage device further includes a movable wall rotating mechanism, an annular movable wall and a movable door, and the annular movable wall is connected with the movable wall rotating mechanism, The ring-shaped movable wall has an opening, the movable door is movably disposed on the ring-shaped movable wall, and the movable door can be operated to shield the opening or not to shield the opening; the movable wall rotates The mechanism can drive the ring-shaped movable wall to rotate relative to the first chamber; when the opening is not covered by the movable door, the holding component can pass through the opening to hold the first cavity The carrier in the room. The storage device according to claim 3, wherein the movable door is an arc-shaped plate The storage device further includes a door opening assembly connected to the rotation mechanism, and the door opening assembly and the telescopic mechanism can rotate together with the rotation mechanism relative to the first chamber, The door opening assembly is used to open or close the movable door, so that the opening is exposed or not exposed. The storage facility according to claim 1, wherein the storage facility further includes an air extraction device connected to the air blowing device, and the air extraction device is used to extract air outside the storage facility The air blowing device is used to blow the air drawn by the air pumping device into the first chamber. The storage device according to claim 1, wherein the storage device further includes at least one first base, the first base is located in the first chamber, the first base is ring-shaped, and the first The base is used to carry a plurality of the supporting frames; the first base includes a plurality of positioning structures, and the plurality of the positioning structures are used to restrict the plurality of the supporting frames arranged in the first chamber relative to all the supporting frames. The moving range of the first base; the storage equipment further includes a plurality of sensors, each of the sensors is electrically connected to the processing device, the plurality of sensors are disposed on the first base, each The sensor is used for sensing whether each of the supporting frames in the first chamber is correctly set on the first base. The storage facility according to claim 1, wherein the storage facility further includes a reading device for reading an identification unit to generate identification information; the identification unit is used for being installed on the object or The carrier; the processing device is electrically connected to the reading device; the processing device can control the transfer device to move the carrier located at the entrance and exit into the first according to the identification information Chamber or the second chamber; the processing device can control the transfer device to be located in one of the carrier racks in the first chamber or in the second chamber according to the identification information One of the supporting racks in the chamber is transferred to the inlet and outlet. The storage device according to claim 7, wherein the storage device further includes an access door and a carrier, the access door can be controlled to open or close, so that the second chamber communicates with the outside Or not communicate with the outside; the carrier is located outside the second chamber, and the carrier is used to carry the carrier, the reading device is arranged adjacent to the carrier, the reading device It is used to read the identification unit provided on the carrier of the carrier. The storage device according to claim 1, wherein the storage device further includes an access door, a carrier, and at least one carrier sensor, and the access door can be controlled to be opened or closed so that the The second chamber is connected to the outside or not connected to the outside; the carrier is located outside the second chamber, and the carrier is used to carry the carrier, and the carrier sensor is used to sense the Whether the carrier is provided with the carrier and generating a sensing information accordingly, the processing device can control the transfer device and the entrance and exit door according to the sensing information. The storage facility according to claim 1, wherein the processing device can execute a thawing program, and when the processing device executes the thawing program, the processing device will control the transfer device and store the location in the loading device. The carrying frame and the objects carried by the outlet are first transferred to the first chamber, and the processing device will place the carrying frame and the objects carried by the carrying frame and the objects carried in the first chamber. After a predetermined period of time in the first chamber, the transfer device is controlled to transfer the carrier and the objects carried by the carrier from the first chamber to the second chamber for storage. The storage facility according to claim 1, wherein the storage facility includes a plurality of the carrying racks, each of the carrying racks has a top plate, a bottom plate, and a plurality of side plates, the top plate, the bottom plate, and a plurality of side plates. The side plates collectively form a accommodating chamber, the accommodating chamber is used to carry the object, at least one of the side plates has at least one perforation, the perforation penetrates the side plate, and the accommodating chamber can pass through the The perforation communicates with the outside; one side of the side plate has There is at least one auxiliary structure and at least one supporting structure; the holding assembly includes two movable clamping members, and the two movable clamping members can be controlled to clamp the auxiliary structure together, and each of the movable clamps The component has an engaging portion, and the two engaging portions included in the holding assembly are used for engaging with the riding structure, so that the carrier frame can be hung on the holding assembly. A storage system, comprising: a storage device for providing a plurality of carrier racks for storage, each of the carrier racks is used for carrying an object, the storage device includes: a body, which includes a carrier and an entrance and exit , The carrier is used to provide the carrier frame placement; a processing device; a transfer device, which includes a telescopic mechanism, a rotating mechanism and a holding assembly, the telescopic mechanism is connected with the rotating mechanism, The holding component is connected to the telescopic mechanism, and the holding component is used to hold the carrier; the transfer device is electrically connected to the processing device, and the processing device can control the telescopic mechanism so as to The holding assembly moves forward or backward with respect to the rotating mechanism; the processing device can control the rotating mechanism to rotate the telescopic mechanism and the holding assembly; at least one first chamber surrounds the rotating mechanism. The transfer device is set up, the first chamber is used for accommodating a plurality of the carrying racks; at least one second chamber is arranged around the transfer device, and the second chamber is located in the first Above a chamber, the second chamber is used for accommodating a plurality of the carrier racks; a temperature resistance baffle is arranged between the first chamber and the second chamber, and the temperature The barrier is used to block the heat energy inside the first chamber and the heat energy inside the second chamber from being transferred to each other; At least one environmental adjustment device is electrically connected to the processing device, and the processing device is used to control the environmental adjustment device so that the temperature of the first chamber is not higher than a first temperature, and the The temperature of the second chamber is not higher than a second temperature; wherein, the second temperature is lower than 30 degrees, the first temperature is higher than minus 10 degrees, and the first temperature is not higher than the second temperature Temperature; wherein, the processing device can control the transfer device, so that the holding component will be set on the carrier of the carrier, pass through the inlet and outlet, and move into the first cavity Chamber or the second chamber, and the processing device can control the transfer device, so that the holding component will be located in the first chamber or the second chamber A carrier is placed on the carrier through the entrance and exit; a transfer device is used to transfer the carrier and the objects it carries from a freezer to the storage facility The carrier; and a processing device that can receive demand information, and the processing device can control the transfer device to transfer at least one of the carrier and the object carried by the carrier according to the demand information Taken out of the freezer and transferred to the carrier; the processing device can control the transfer device to be set on the carrier and the object carried by the carrier according to the demand information, Moved into the first chamber, and the processing device can, according to the demand information, set the support frame and the objects it carries in the first chamber for a predetermined period of time. And the object carried by it is transferred to the second chamber.

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