TWI612331B - Device for modulating light intensity - Google Patents

Abstract

A light intensity modulation device includes a light source module and a holographic diffraction module. The holographic diffraction module is configured to generate an interference holographic pattern to diffract the reconstructed light provided by the light source module, and form a first focused image having a first light intensity distribution and having a second light intensity distribution A second focused image. The first and second focused images partially overlap to form a third focused image having a third light intensity distribution, wherein the third light intensity distribution is greater than the first light intensity distribution and the second light intensity distribution. The above-mentioned light intensity modulation device can accurately define the processing position by controlling the position and size of the third focused image to facilitate beam processing applications.

Description

Light intensity modulation device

The invention relates to a modulation device, in particular to a light intensity modulation device.

The principle of multi photon absorption is to cure a suitable material into a designed pattern after being exposed to sufficient light intensity. Conventional beam processing devices utilize a lens-type optical lens to focus the light source such that the intensity of the focused spot is greater than a threshold to cure the material. However, in order to form a particular pattern, the focused spot must be scanned with the material of the processing zone with a suitable scanning mechanism, thus resulting in an inefficient increase in throughput.

Another beam processing apparatus produces a stereoscopic image having a spatial volume using a holographic technique to cure a material in a solid image area to form a particular pattern. However, limited by the resolution of the imaging and the degree of freedom of the phase order, the depth, and the modulation of the pixel size, the diffraction efficiency cannot be accurately controlled, resulting in poor product resolution or even erroneous processing.

In view of this, how to increase the throughput of the beam processing device and precisely define the processing position is the current goal.

The present invention provides a light intensity modulation device that forms a plurality of focused images that are partially overlapped by using at least one interference holographic pattern to obtain an overlapping image region with a high light intensity distribution, by controlling By adjusting the position and size of the image area, it is possible to precisely define the processing position and facilitate the application of beam processing.

The light intensity modulation device according to an embodiment of the invention comprises a light source module and a holographic diffraction module. The light source module is used to provide a reconstructed light. The holographic diffraction module is configured to generate an interference holographic pattern to diffract the reconstructed light and form a first focused image having a first light intensity distribution and a second focused image having a second light intensity distribution The second focused image partially overlaps the first focused image to form a third focused image having a third light intensity distribution, and the third light intensity distribution is greater than the first light intensity distribution and the second light intensity distribution.

The purpose, technical contents, features, and effects achieved by the present invention will become more apparent from the detailed description of the appended claims.

11‧‧‧Lighting unit

11a, 11b‧‧‧ light source module

12a, 12b‧‧‧ first hologram diffraction module

121a~121c‧‧‧All-in-one film

122‧‧‧Roller

123‧‧‧ Turntable

13‧‧‧Control elements

14‧‧‧ Spectroscope

15a, 15b‧‧ ‧ beam expander

16a, 16b‧‧‧ optical scanning module

IM1, IM1'‧‧‧ first focused image

IM2‧‧‧Second focus image

IM3‧‧‧ third focused image

RLa, RLb‧‧‧ reconstructed light

RLa’, RLb’‧‧‧Reconstruction of light

S81~S83‧‧‧Steps

Fig. 1 is a schematic view showing a light intensity modulation device according to a first embodiment of the present invention.

Fig. 2 is a schematic view showing the light intensity distribution of the light intensity modulation device according to an embodiment of the present invention.

3 is a schematic view showing a holographic diffraction module of a light intensity modulation device according to an embodiment of the present invention.

4 is a schematic view showing a holographic diffraction module of a light intensity modulation device according to another embodiment of the present invention.

Fig. 5 is a schematic view showing a light intensity modulation device according to a second embodiment of the present invention.

Figure 6 is a schematic view showing a light intensity modulation device according to a third embodiment of the present invention.

Fig. 7 is a schematic view showing a focused image of a light intensity modulation device according to another embodiment of the present invention.

The embodiments of the present invention will be described in detail below with reference to the drawings. In addition to the detailed description, the present invention may be widely practiced in other embodiments, and any alternatives, modifications, and equivalent variations of the described embodiments are included in the scope of the present invention. quasi. In the description of the specification, numerous specific details are set forth in the description of the invention. In addition, well-known steps or elements are not described in detail to avoid unnecessarily limiting the invention. The same or similar elements in the drawings will be denoted by the same or similar symbols. It is to be noted that the drawings are for illustrative purposes only and do not represent the actual dimensions or quantities of the components. Some of the details may not be fully drawn in order to facilitate the simplicity of the drawings.

Referring to FIG. 1, a light intensity modulation device according to an embodiment of the present invention includes a light source module, a first hologram diffraction module 12a, and a second hologram diffraction module 12b. In the embodiment shown in FIG. 1, the light source module includes a plurality of light emitting units 11a, 11b. The light emitting units 11a, 11b can provide the reconstructed light RLa, RLb to illuminate the first hologram diffraction module 12a and the second hologram diffraction module 12b, respectively. In one embodiment, the reconstructed light RLa, RLb has coherence or partial homology. Preferably, the reconstructed light RLa, RLb may be a femtosecond laser. In one embodiment, the light source module includes a laser diode or a light emitting diode.

The first hologram diffraction module 12a is configured to generate a first interference holographic pattern to diffract the reconstructed light RLa and form a first focused image IM1 having a first light intensity distribution. Similarly, the second hologram diffraction module 12b is configured to generate a second interference hologram pattern to diffract the reconstructed light RLb and form a second focused image IM2 having a second light intensity distribution. As shown in FIG. 1 , the first focused image IM1 and the second focused image IM2 are partially overlapped to form a third focused image IM3 having a third light intensity distribution, as shown in FIG. 1 . The third light intensity distribution of the three-focus image IM3 is greater than the first light intensity distribution of the first focused image IM1 and the second light intensity distribution of the second focused image IM2. It can be understood that the light-emitting units 11a, 11b can provide the reconstructed light RLa, RLb of different wavelength ranges. this invention. For example, the light-emitting units 11a, 11b provide different wavelength ranges of the reconstructed light RLa, RLb respectively illuminating the first hologram diffraction module 12a and the second hologram diffraction module 12b, thereby forming the first of different wavelength ranges. The image IM1 and the second focused image IM2 are focused.

It should be noted that, in the embodiment shown in FIG. 1, the first focused image IM1 and the second focused image IM2 are respectively generated by the first hologram diffraction module 12a and the second hologram diffraction module 12b. However, the first focused image IM1 and the second focused image IM2 can also be formed by a single holographic diffraction module. For example, a single holographic diffraction module generates an interference hologram pattern including a first interference hologram pattern and a second interference hologram pattern, so that a first focus image IM1 with different focus positions and partial overlaps can be formed. And a second focused image IM2. It will be understood that the present invention can be implemented in three or more sets of light source modules and holographic diffraction modules without departing from the scope of the invention.

Referring to FIG. 2, the light intensity distribution along the line segment OO' of the first focused image IM1, the second focused image IM2, and the third focused image IM3 shown in FIG. 1 is displayed. Since the first focused image IM1 and the second focused image IM2 are formed by using the holographic technique, at least one of the first focused image IM1 and the second focused image IM2 may have a relatively uniform light intensity distribution at the focus position. In one embodiment, the uniform light intensity distribution of the first focused image IM1 or the second focused image IM2 is different from the light intensity distribution formed by the lenticular optical element having a Gaussian distribution. For example, the first focused image IM1 is mostly a uniform light intensity distribution from point A1 to point A2, and the second focused image IM2 is also a uniform light intensity distribution from point B1 to point B2. Therefore, the first focus is The third focused image IM3 formed by the overlapping of the image IM1 and the second focused image IM2 has a light intensity distribution from the point A1 to the point B2 that is greater than the first light intensity distribution of the first focused image IM1 and the second focused image IM2. Two light intensity distribution. In one embodiment, the first light intensity distribution of the first focused image IM1 and the second light intensity distribution of the second focused image IM2 are less than a threshold, and the light intensity distribution of the third focused image IM3 is greater than a threshold, thus By precisely controlling the position and size of the third focused image IM3, the machining position can be accurately defined for more precise beam processing applications. The first focused image IM1 and the second focused image IM2 whose light intensity distribution is smaller than the threshold will not solidify the material and will not affect the processing operation of the third focused image IM3.

Referring to FIG. 1 again, in an embodiment, at least one of the first hologram diffraction module 12a and the second hologram diffraction module 12b includes a spatial light modulator and a control component 13, wherein the control component 13 is electrically connected to the spatial light modulator. For example, the spatial light modulator can be a phase-based germanium-based liquid crystal panel. In the embodiment shown in FIG. 1, the spatial light modulators of the first hologram diffraction module 12a and the second hologram diffraction module 12b are transmissive holographic diffraction modules. The control element 13 can control the first interference hologram pattern generated by the first hologram diffraction module 12a or the second interference hologram pattern generated by the second hologram diffraction module 12b to generate a plurality of sub-sequences in time series. The image is focused, and the first focused image IM1 or the second focused image IM2 is formed by overlapping a plurality of sub-focused images in time series, so that a relatively uniform light intensity distribution can be obtained.

In an embodiment, the control component 13 can also control the first interference hologram pattern generated by the first hologram diffraction module 12a or the second interference hologram pattern generated by the second hologram diffraction module 12b. The focus position of the first focused image IM1 or the second focused image IM2 is moved. In other words, the control element 13 can move the first by controlling the first interference hologram pattern generated by the first hologram diffraction module 12a or the second interference hologram pattern generated by the second hologram diffraction module 12b. The image IM1 or the second focused image IM2 is focused to achieve the purpose of scanning the processed material.

Referring to FIG. 3 , in an embodiment, taking the first hologram diffraction module 12 a as an example, the first hologram diffraction module 12 a may include a plurality of static full images 121 a , 121 b , 121 c and a drive. Module (eg, wheel 122). A plurality of sub-focus images may also be generated by the roller 122 driving the plurality of holograms 121a, 121b, 121c sequentially through the illumination range of the reconstructed light RLa. Similarly, the plurality of sub-focus images are sequentially superposed to form a first focused image IM1 having a relatively uniform light intensity distribution. In another embodiment, referring to FIG. 4, the driving module can be a turntable 123, and the plurality of full-image pieces 121a, 121b, and 121c can be driven by the turntable 123 to sequentially generate the illumination range of the reconstructed light RLa. The images are focused and overlapped in order to form a light intensity distribution. It is a uniform first focused image IM1. It can be understood that by designing the holograms 121a, 121b, and 121c and driving the holograms 121a, 121b, and 121c, the focus position of the first focus image IM1 can be moved to scan the processed material. purpose.

Referring to FIG. 5 , in an embodiment, the light source module can include a light emitting unit 11 and a beam splitter 14 . The light emitting unit can be a laser diode or a light emitting diode for providing reconstructed light. The beam splitter 14 is disposed on one light emitting side of the light emitting unit 11 for dividing the reconstructed light into the plurality of reconstructed lights RLa, RLb, and causing the reconstructed lights RLa, RLb to respectively illuminate the first hologram diffraction module 12a and the second hologram The diffraction module 12b. In the embodiment shown in FIG. 5, the first hologram diffraction module 12a and the second hologram diffraction module 12b are a reflective hologram diffraction module. For example, the beam splitter 14 can be a polarization beam splitter (PBS). In one embodiment, the light intensity modulation device of the present invention further includes at least one beam expander 15a, 15b disposed on the first hologram diffraction module 12a and the second hologram diffraction module. At least one of 12b enters the light path. The beam expanders 15a, 15b can increase the illumination range of the reconstructed light RLa', RLb', that is, the reconstructed light RLa', RLb' emitted from the beam expanders 15a, 15b has a larger beam cross-sectional area than the incident to the expanded beam The beam cross-sectional areas of the reconstructed lights RLa, RLb of the devices 15a, 15b.

In the foregoing embodiments, the focus position of the first focused image or the second focused image is achieved by different interference holographic patterns, but is not limited thereto. Referring to FIG. 6, in an embodiment, the light intensity modulation device of the present invention further includes at least one optical scanning module 16a, 16b disposed on the first hologram diffraction module 12a and the second hologram diffraction. At least one of the modules 12b exits the light side. The optical scanning module 16a, 16b can be a reflective or refractive mechanical scanning optical element to move the focus position of at least one of the first focused image IM1 and the second focused image IM2 to achieve the purpose of scanning the processed material. For example, the optical scanning module 16a can move the focus position of the first focused image IM1 to the focus position of the first focused image IM1'.

It can be seen from the foregoing description that the present invention can obtain a strong light intensity distribution by adjusting the first light intensity distribution of the first focused image IM1 and the second light intensity distribution of the second focused image IM2. The third focused image IM3. Therefore, according to the above structure, the present invention can be a solid-state solidified material having a space volume. It can be understood that any one of the first focused image IM1, the second focused image IM2, and the third focused image IM3 can be a point image, a one-dimensional image, a two-dimensional image, or a stereoscopic image with a spatial volume according to different processing requirements. . For example, as shown in FIG. 7 , the first focused image IM1 is a larger ring image drawn by a solid line, and the second focused image IM2 is a smaller ring image drawn by a broken line, and the inner side of the first focused image IM1 is The outer sides of the second focused image IM2 partially overlap each other to form a smaller ring-shaped third focused image IM3. Therefore, if the third focused image IM3 is a point image, the image can be scanned point by point to obtain a three-dimensional processed object; if the third focused image IM3 is a planar image, the layered image can be scanned layer by layer to obtain a three-dimensional processed object.

In summary, the light intensity modulation device of the present invention forms a plurality of focused images partially overlapping by using at least one interference hologram pattern to obtain overlapping image regions having a high light intensity distribution. Therefore, the present invention not only can easily control the light intensity distribution of the overlapping image area, but also can favor the application of the beam processing by precisely controlling the position and size of the overlapping image area to accurately define the processing position.

The embodiments described above are only intended to illustrate the technical idea and the features of the present invention, and the purpose of the present invention is to enable those skilled in the art to understand the contents of the present invention and to implement the present invention. That is, the equivalent variations or modifications made by the spirit of the present invention should still be included in the scope of the present invention.

11a, 11b‧‧‧ light source module

12a, 12b‧‧‧ first hologram diffraction module

13‧‧‧Control elements

RLa, RLb‧‧‧ reconstructed light

IM1‧‧‧ first focused image

IM2‧‧‧Second focus image

IM3‧‧‧Second focus image

Claims (10)

A light intensity modulation device includes: a light source module for providing a reconstructed light; and at least one holographic diffraction module for generating an interference hologram pattern for diffracting the reconstructed light, and Forming a first focused image having a first light intensity distribution and a second focused image having a second light intensity distribution, wherein the second focused image partially overlaps the first focused image to form a first The third light intensity distribution is one of the third focus images, and the third light intensity distribution is greater than the first light intensity distribution and the second light intensity distribution. The light intensity modulation device of claim 1, wherein the holographic diffraction module comprises: a first hologram diffraction module for generating a first interference hologram pattern to diffract the reconstruction Light and forming the first focused image; and a second holographic diffraction module for generating a second interference holographic pattern to diffract the reconstructed light and form the second focused image. The light intensity modulation device of claim 1, wherein the hologram diffraction module comprises a full image or spatial light modulator. The light intensity modulation device of claim 1, wherein the hologram diffraction module comprises a plurality of full images and a driving module, wherein the driving module drives the plurality of full-image movements to generate a plurality of sub-images Focusing the image, and the plurality of sub-focus images are sequentially overlapped to form at least one of the first focused image and the second focused image. The light intensity modulation device of claim 1, wherein the holographic diffraction module comprises a spatial light modulator and a control component, wherein the control component is electrically connected to the spatial light modulator for controlling the Interfering with the holographic pattern to generate a plurality of sub-focus images, and the plurality of sub-focus images are overlapped in time series to form at least one of the first focus image and the second focus image. The light intensity modulation device of claim 1, wherein the holographic diffraction module comprises a spatial light modulator and a control component, wherein the control component is electrically connected to the spatial light modulator for controlling the Interfering with the holographic pattern to move the first focused image and at least one of the second focused images to focus the position. The light intensity modulation device of claim 1, further comprising: an optical scanning module disposed on one of the light exiting sides of the holographic diffraction module for moving the first focused image and the second focus At least one of the images is in focus. The light intensity modulation device of claim 1, further comprising: at least one beam expander disposed in one of the light-integrating optical paths of the holographic diffraction module for increasing one of the reconstructed lights Irradiation range. The light intensity modulation device of claim 1, wherein the light source module comprises at least two light emitting units, and the at least two light emitting units provide the reconstructed light in at least two different wavelength ranges to form different wavelength ranges. The first focused image and the second focused image. The light intensity modulation device of claim 1, wherein at least one of the first focused image, the second focused image, and the third focused image is a point image, a one-dimensional image, a two-dimensional image, or has a spatial volume Stereoscopic image.