TWI610061B - Three-dimensional measuring device - Google Patents

Abstract

Provided is a three-dimensional measurement device capable of rapidly improving measurement accuracy when performing three-dimensional measurement using a phase shift method.

The substrate inspection device 1 includes an illumination device 4 that projects a predetermined stripe pattern on the surface of the printed substrate 2 from an obliquely upward direction; a camera 5 that captures a portion of the printed substrate 2 on which the striped pattern is projected; and a control device 6 that controls the substrate inspection device. Various control, image processing, and calculation processing are implemented in 1. Then, the stripe pattern projected on the printed substrate 2 is moved and the moved stripe pattern is divided into a plurality of shots, and the luminance values of each pixel of the captured series of video data are added by pixels to calculate the average value.

Description

Three-dimensional measuring device

The present invention relates to a three-dimensional measurement device for three-dimensional measurement using a phase shift method.

Generally, when an electronic component is mounted on a printed substrate, a solder paste is first printed on a predetermined electrode pattern provided on the printed substrate. Then, the electronic components are temporarily bonded to the printed circuit board by the viscosity of the solder paste. After that, the printed substrate is guided to a reflow furnace, and is subjected to a predetermined reflow process for soldering. Recently, it has been necessary to check the printing state of the solder paste before being guided to the reflow furnace. When performing such inspection, a three-dimensional measuring device is sometimes used.

In recent years, various non-contact three-dimensional measurement devices using light have been proposed. Among them, a three-dimensional measurement device using a phase shift method is known.

In a three-dimensional measurement device using a phase shift method, a predetermined fringe pattern is projected on a measured object by a predetermined projection method. The projection means includes a light source that emits predetermined light and a grid that converts light from the light source into a striped pattern.

The grid system is configured such that the light-transmitting portions that transmit light and the light-shielding portions that block light are alternately arranged.

Next, a stripe pattern projected on the measured object is captured using an imaging means disposed directly on the measured object. As for the imaging means, a CCD camera or the like composed of a lens, an imaging element, and the like is used.

Here, it has been known from the past that a stripe pattern having a rectangular wave-like light intensity distribution converted through the above-mentioned grid is projected on the object to be measured while shifting focus, and is regarded as a stripe pattern having a sinusoidal light intensity distribution. A technique for performing projection (for example, refer to Patent Document 1).

With the above configuration, the light intensity (brightness) I of each pixel on the image data captured by the photographing means is obtained by the following formula (U1).

I = f‧sinφ + e (U1)

Among them, f: gain, e: offset, φ: phase of stripe pattern.

Next, the movement of the grid is controlled so that the phase of the stripe pattern is shifted, for example, by 4 steps (φ + 0, φ + 90 °, φ + 180 °, φ + 270 °), and the corresponding order is sequentially taken into consideration. Based on the image data of the intensity distributions I ₀ , I ₁ , I ₂ , and I ₃ , the phase φ is obtained according to the following formula (U2).

φ = tan ^-1 [(I ₁ -I ₃ ) / (I ₂ -I ₀ )] (U2)

Using this phase φ, the height (Z) of each coordinate (X, Y) on the object to be measured can be obtained according to the principle of triangulation.

Prior art literature Patent literature

Patent Document 1 JP 2007-85862

However, unlike the case of focusing, it is very difficult to maintain and manage the degree of shift of the focus of the stripe pattern to a desired state. The light intensity distribution (waveform) of the stripe pattern projected on the object to be measured easily collapses, making it impossible. There is a possibility of a sine wave-shaped light intensity distribution.

In addition, the degree of shift of the focal point of the stripe pattern also varies depending on the relative positional relationship with the object to be measured. Therefore, when the relative positional relationship with the object to be measured changes, there may be a light intensity distribution (waveform) of the stripe pattern. There is also the possibility of change.

Furthermore, since the focus is shifted to project, it is also impossible to project a fringe pattern using a telecentric optical system.

As a result, there is a concern that the measurement accuracy in three-dimensional measurement is reduced.

In addition, the above-mentioned problems are not necessarily limited to the height measurement of solder paste and the like printed on a printed circuit board, and also include other fields of three-dimensional measurement devices.

The present invention has been made in view of the foregoing circumstances, and an object thereof is to provide a three-dimensional measurement device capable of rapidly improving measurement accuracy when performing three-dimensional measurement using a phase shift method.

Hereinafter, each of the means suitable for solving the above problems will be described. In addition, according to the needs, the specific effects are added to the corresponding means.

Means 1. A three-dimensional measuring device, comprising: a projection means having a light source that emits predetermined light, a grid that converts light from the light source into a predetermined stripe pattern, and a movable grid The driving means can project the stripe pattern on the object to be measured (such as a printed circuit board); the photographing means can photograph the object to be measured on which the stripe pattern is projected; the image acquisition means can control the projection means and the photographing means To obtain a plurality of image data with different light intensity distributions; and an image processing method, based on the plurality of image data obtained by the foregoing image acquisition method, a three-dimensional measurement of the object to be measured may be performed using a phase shift method. On the premise that one of the plurality of image data is obtained, the moving process of moving the grid is performed, and continuous shooting (exposure) is performed in a predetermined period that overlaps at least part of the moving period of the grid. The photographing process, or a plurality of photographing (exposure) photographing processes is performed in a predetermined period that overlaps at least a part of the moving period of the grid, and the photographing result (each pixel of the plurality of captured image data) is executed. Luminance value) is added or averaged for each pixel.

According to the above-mentioned means 1, a predetermined stripe pattern (for example, a stripe pattern having a rectangular wave-shaped light intensity distribution) projected on the object to be measured is moved and the moving stripe pattern is continuously photographed, or divided into multiple shots and the result of the photographing Add or average by pixels.

As a result, compared with the case where only a predetermined fringe pattern is projected and captured on the premise that one of the plurality of image data having different light intensity distributions required for three-dimensional measurement by the phase shift method is obtained , Can obtain image data with light intensity distribution closer to the ideal sine wave.

The so-called "sine wave shape" here means "sinusoidal shape". When only "sine wave shape" is mentioned, it is not only an ideal "sine wave", but also an approximation of "sine wave". (The same applies to other "non-sinusoidal waves" such as "rectangular waves" described later).

The "predetermined stripe pattern" also includes "a stripe pattern having a sinusoidal light intensity distribution". In short, a stripe pattern having a light intensity distribution similar to that of a sine wave can be made to project a non-ideal "sine wave", and a composition of image data having a light intensity distribution closer to an ideal sine wave can be obtained.

According to this method, even if a fringe pattern is projected in a focused state, image data having a sinusoidal light intensity distribution can be obtained. Since the fringe pattern can be projected in the focused state, it becomes easy to maintain the light intensity distribution (waveform) of the fringe pattern. Furthermore, a stripe pattern can be projected using a telecentric optical system.

As a result, when performing three-dimensional measurement using a phase shift method, it is possible to quickly improve measurement accuracy.

In addition, the movement of the grille in the above-mentioned "movement processing" may be a continuous motion in which the grille moves continuously, or an intermittent motion in which the grille moves intermittently (a predetermined amount per movement).

Furthermore, the execution of the above-mentioned "shooting processing that is continuously performed (or divided into multiple shots) in a predetermined period that overlaps at least a part of the movement period of the grille" also includes the start of the photographing process while stopping the movement of the grille. In the case where the movement of the grille is stopped, and the photographing process is ended while stopped. Therefore, for example, a configuration may be adopted in which the movement of the grid is started after the photographing process is started while the grid is stopped, and the photographing process is ended after the movement of the grid is stopped.

Means 2. The three-dimensional measurement device according to means 1, wherein the aforementioned photographing process is started at the same time or during the movement process of the grid, and the aforementioned photographing process is ended at the same time as the grid's movement process is stopped or during the movement process.

According to the above-mentioned means 2, the position (phase) of the stripe pattern captured in a predetermined period always changes. Therefore, it is possible to obtain image data having a light intensity distribution closer to the ideal sine wave than the case of data containing a part of the unmoved stripe pattern. As a result, measurement accuracy can be further improved.

Means 3. The three-dimensional measuring device according to means 1 or 2, wherein the predetermined fringe pattern is a fringe pattern having a non-sinusoidal light intensity distribution.

In addition, the above-mentioned "non-sinusoidal wave" means a predetermined wave that is not a "sinusoidal wave" such as a "rectangular wave", a "trapezoidal wave", a "triangular wave", or a "saw wave".

Compared with a three-dimensional surveyor who generally projects a fringe pattern with a non-sinusoidal (eg rectangular wave) light intensity distribution, it is better to measure a three-dimensional surveyor by projecting a fringe pattern with a sine-wave-shaped light intensity distribution.

However, as described above, it is very difficult to generate a stripe pattern having a sine wave-shaped light intensity distribution by projection means, and there is a possibility that the mechanical configuration is complicated.

In this regard, according to the present method 3, a stripe pattern having a non-sinusoidal wave shape (for example, a rectangular wave shape) of light intensity distribution can be projected without complicating the mechanical configuration of the projection means, and the ratio Simpler control processing or calculation processing can obtain image data with sinusoidal light intensity distribution. As a result, complication of the mechanical structure is suppressed, and further, manufacturing cost can be suppressed.

Means 4. The three-dimensional measuring device according to any one of means 1 to 3, wherein the grid is configured by alternately arranging a light transmitting portion that transmits light and a light shielding portion that blocks light.

According to the above-mentioned means 4, the same effects as those of the above-mentioned means 3 can be obtained. By using a binary grid like this method, it is possible to project a peak portion (hereinafter, referred to as a "bright portion") having at least maximum luminance and a constant flatness, and a peak portion (hereinafter referred to as "flat portion") having a minimum luminance and constant flatness. , Called the "dark part") stripe pattern of light intensity distribution. In short, a stripe pattern having a rectangular or trapezoidal light intensity distribution can be projected.

Usually, the light passing through the grid is not completely parallel light, and the diffraction effect at the interface between the light-transmitting portion and the light-shielding portion may cause an intermediate portion between the "light portion" and "dark portion" of the stripe pattern. The tone zone is not a complete rectangular wave.

Here, although the arrangement interval between the light-transmitting portion and the light-shielding portion of the grille also varies depending on the configuration, the brightness gradient of the intermediate tone region at the interface between the "light portion" and the "dark portion" is sharp. A stripe pattern having a rectangular wave-like light intensity distribution, and a gentle slope in the middle tone region, is a stripe pattern having a trapezoidal wave-like light intensity distribution.

Means 5. The three-dimensional measuring device according to any one of means 1 to 4, wherein the object to be measured is a printed substrate on which solder paste is printed or a wafer substrate on which solder bumps are formed.

According to the above-mentioned means 5, the height measurement of the solder paste printed on the printed circuit board or the solder bump formed on the wafer substrate can be performed. In addition, in the inspection of solder paste or solder bumps, it is possible to determine whether the solder paste or solder bumps are good or bad based on the measured values. Therefore, in this inspection, the effects of the above-mentioned means are achieved, and good or bad judgment can be performed. As a result, it is possible to improve inspection accuracy in a solder print inspection apparatus or a solder bump inspection apparatus.

1‧‧‧ substrate inspection device

2‧‧‧printed substrate

4‧‧‧lighting device

4a‧‧‧light source

4b‧‧‧ Grille

5‧‧‧ Camera

6‧‧‧Control device

24‧‧‧Image data memory means

FIG. 1 is a schematic configuration diagram of a substrate inspection apparatus.

FIG. 2 is a block diagram showing the electrical configuration of the substrate inspection apparatus.

FIG. 3 is a schematic view showing a state of a stripe pattern projected on a printed substrate.

FIG. 4 is a timing chart for explaining processing operations of the camera and the lighting device.

FIG. 5 is a table showing the light intensity distribution of the X-axis direction (coordinates X1 to X8) of the image sensor every predetermined time in the first simulation.

FIG. 6 is a table showing the light intensity distribution in the X-axis direction (coordinates X9 to X16) of the image sensor every predetermined time in the first simulation.

FIG. 7 is a table showing the light intensity distribution in the X-axis direction (coordinates X17 to X24) of the image sensor every predetermined time in the first simulation.

FIG. 8 is a table showing the light intensity distribution in the X-axis direction (coordinates X25 to X32) of the image sensor every predetermined time in the first simulation.

FIG. 9 is a table showing the light intensity distribution of the X-axis direction (coordinates X33 to X36) of the image sensor every predetermined time in the first simulation.

FIG. 10 is a table related to the first simulation. (A) is a light intensity distribution table showing an ideal sine wave in the X-axis direction (coordinates X1 to X10) of the imaging element, and (b) is a luminance value showing each pixel. (C) is a table showing the difference between ideal values and various average values.

FIG. 11 is a table related to the first simulation. (A) is a light intensity distribution table showing an ideal sine wave in the X-axis direction (coordinates X11 to X20) of the imaging element, and (b) is a luminance value showing each pixel. (C) is a table showing the difference between the ideal value and various average values.

FIG. 12 is a table related to the first simulation. (A) is a light intensity distribution table showing an ideal sine wave in the X-axis direction (coordinates X21 to X30) of the imaging element, and (b) is a table showing the luminance value in each pixel. A table of various average values, (c) is a table showing the difference between an ideal value and various average values.

FIG. 13 is a table related to the first simulation. (A) is a light intensity distribution table showing an ideal sine wave in the X-axis direction (coordinates X31 to X36) of the imaging element, and (b) is a table showing the luminance value in each pixel. A table of various average values, (c) is a table showing the difference between an ideal value and various average values.

FIG. 14 is a graph showing the light intensity distribution of the first simulated stripe pattern.

FIG. 15 is a graph showing a light intensity distribution of an ideal sine wave shown in FIGS. 10 to 13 (a).

FIG. 16 is a graph plotting various average values shown in FIGS. 10 to 13 (b).

FIG. 17 is a graph plotting differences between various average values and ideal values shown in (c) of FIGS. 10 to 13.

FIG. 18 is a table showing the light intensity distribution in the X-axis direction (coordinates X1 to X8) of the image sensor every predetermined time in the second simulation.

FIG. 19 is a table showing the light intensity distribution in the X-axis direction (coordinates X9 to X16) of the image sensor every predetermined time in the second simulation.

FIG. 20 is a table showing the light intensity distribution in the X-axis direction (coordinates X17 to X24) of the image sensor every predetermined time in the second simulation.

FIG. 21 is a table showing the light intensity distribution in the X-axis direction (coordinates X25 to X32) of the image sensor every predetermined time in the second simulation.

FIG. 22 is a table showing a light intensity distribution in the X-axis direction (coordinates X33 to X36) of the image sensor every predetermined time in the second simulation.

FIG. 23 is a table related to the second simulation. (A) is a light intensity distribution table showing an ideal sine wave in the X-axis direction (coordinates X1 to X10) of the imaging element, and (b) is a luminance value showing each pixel. (C) is a table showing the difference between the ideal value and various average values.

FIG. 24 is a table related to the second simulation. (A) is a light intensity distribution table showing an ideal sine wave in the X-axis direction (coordinates X11 to X20) of the imaging element, and (b) is a luminance value showing each pixel. (C) is a table showing the difference between the ideal value and various average values.

FIG. 25 is a table related to the second simulation. (A) is a light intensity distribution table showing an ideal sine wave in the X-axis direction (coordinates X21 to X30) of the imaging element, and (b) is a luminance value showing each pixel. (C) is a table showing the difference between ideal values and various average values.

Fig. 26 is a table related to the second simulation. (A) is a light intensity distribution table showing an ideal sine wave in the X-axis direction (coordinates X31 to X36) of the imaging element, and (b) is a luminance value showing each pixel. (C) is a table showing the difference between the ideal value and various average values.

FIG. 27 is a graph showing the light intensity distribution of the second simulated stripe pattern.

FIG. 28 is a graph showing the light intensity distribution of the ideal sine wave shown in (a) of FIGS. 23 to 26.

Fig. 29 is a graph plotting various average values shown in Figs. 23 to 26 (b).

FIG. 30 is a graph plotting differences between various average values and ideal values shown in (c) of FIGS. 23 to 26.

31 (a) to (d) are timing charts for explaining processing operations of a camera and a lighting device in another embodiment.

Hereinafter, an embodiment will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram of a substrate inspection apparatus 1 including a three-dimensional measurement apparatus according to this embodiment. As shown in the same figure, the substrate inspection apparatus 1 includes a mounting table 3 on which a printed substrate 2 as a measured object is printed with the solder paste K (see FIG. 3) printed thereon, and illumination as a projection means. The device 4 projects a predetermined stripe pattern (striped light pattern) on the surface of the printed substrate 2 obliquely from the top; the camera 5 as a photographing means captures a portion of the printed substrate 2 on which the stripe pattern is projected; and the control device 6, It is used to implement various controls, image processing, and arithmetic processing in the substrate inspection apparatus 1 such as the drive control of the lighting device 4 and the camera 5. The control device 6 constitutes an image acquisition means and an image processing means in this embodiment.

The mounting table 3 is provided with motors 15 and 16, and the motors 15 and 16 are driven and controlled by the control device 6. The printed board 2 formed on the mounting table 3 can be oriented in any direction (X-axis direction and Y-axis). Direction).

The lighting device 4 includes a light source 4 a that emits predetermined light, and a grid plate 4 b that converts light from the light source 4 a into a striped pattern, and is driven and controlled by the control device 6. Here, the light emitted from the light source 4a is guided to a light collecting lens (not shown), and after it is set to be parallel light, it is guided to a projection lens (not shown) via the grid plate 4b, and then printed to the printing lens. The substrate 2 projects a stripe pattern.

In addition, a configuration using a telecentric optical system as the optical system of the illuminating device 4 such as a collecting lens or a projection lens may be adopted. The printed board 2 may change the height position slightly when the inspection area is moved. By using a telecentric optical system, measurement can be performed with high accuracy without being affected by such changes.

The grid plate 4b is arranged in such a manner that a linear light-transmitting portion that transmits light and a linear light-shielding portion that blocks light are alternately arranged in a predetermined direction orthogonal to the optical axis of the light source 4a. Thereby, a stripe pattern having a rectangular wave shape or a trapezoid wave light intensity distribution can be projected on the printed substrate 2. As shown in FIG. 3, in this embodiment, a fringe pattern in which the fringe direction is orthogonal to the X-axis direction and parallel to the Y-axis direction is projected.

Generally, the light passing through the grille plate 4b is not completely parallel light, and the diffraction effect at the interface between the light transmitting portion and the light shielding portion may be caused at the interface between the "light portion" and the "dark portion" of the stripe pattern. A mid-tone region is generated, so it is not a complete rectangular wave. However, in FIG. 3, for simplicity, the intermediate tone region is omitted, and the striped pattern is illustrated by a striped pattern of light and dark values.

Here, the arrangement intervals of the light-transmitting portion and the light-shielding portion in the grille plate 4b are different depending on the composition, but the "light portion" and "dark portion" If the brightness gradient of the intermediate tone region in the boundary is sharp, it will become a stripe pattern with a rectangular wave-like light intensity distribution (see FIG. 14). When the brightness slope of the intermediate tone region is gentle, it will have a trapezoidal wave shape Striped pattern of light intensity distribution (see FIG. 27).

In addition, the lighting device 4 includes a driving means (not shown) such as a motor that moves the grille plate 4b. The control device 6 performs a movement process of continuously moving the grid plate 4b at a constant speed in the predetermined direction orthogonal to the optical axis of the light source 4a by controlling the driving means. Thereby, a stripe pattern can be projected so that it may move to an X-axis direction with respect to the printed board 2.

The camera 5 includes a lens, an imaging element, and the like. In this embodiment, a CCD sensor is used as the imaging element. The imaging element of this embodiment has a resolution of 512 pixels in the X-axis direction (horizontal direction) and 480 pixels in the Y-axis direction (vertical direction).

The camera 5 is driven and controlled by the control device 6. More specifically, the control device 6 is based on a signal from an encoder (not shown) provided by the driving means provided on the grille plate 4b, while making the timing of moving the grille plate 4b and the timing of taking in images by the camera 5 Take synchronization while shooting.

The image data captured by the camera 5 is converted into digital signals inside the camera 5 and then input to the control device 6 in the form of digital signals, and is stored in an image data storage device 24 described later. Then, based on the video data, the control device 6 performs video processing, calculation processing, and the like described later.

Here, the electrical configuration of the control device 6 will be described. As shown in FIG. 2, the control device 6 includes the entire substrate inspection device 1. Control CPU and input / output interface 21 (hereinafter referred to as "CPU etc. 21"); keyboard or mouse, touch panel input device 22 as "input means"; with CRT or LCD display screen A display device 23 as a "display means"; an image data storage device 24 for storing image data taken by the camera 5; a calculation result storage device 25 for storing various calculation results; and a memory for design data in advance Setting data storage device 26 such as various information. These devices 22 to 26 are electrically connected to a CPU 21 and the like.

Next, an inspection procedure performed by the substrate inspection apparatus 1 for each inspection area of the printed substrate 2 will be described in detail with reference to FIG. 4. FIG. 4 is a timing chart for explaining processing operations of the camera 5 and the lighting device 4.

Such an inspection program is executed by the control device 6 (CPU, etc. 21). In this embodiment, four types of image data having different light intensity distributions are obtained by performing image acquisition processing four times for each inspection area.

The control device 6 first drives and controls the motors 15 and 16 to move the printed circuit board 2 so that the field of view (imaging range) of the camera 5 is aligned with a predetermined inspection area on the printed circuit board 2. In addition, the inspection area is one area in which the surface of the printed circuit board 2 is divided in advance with the visual field size of the camera 5 being one unit.

Next, the control device 6 drives and controls the lighting device 4, sets the position of the grille plate 4 b to the first initial setting position (for example, the position of the phase “0 °”), and starts the first image acquisition process. In addition, the initial setting positions of the grille plate 4b are different in the four image acquisition processes, and the phases of the stripe patterns set at the initial setting positions are shifted by 90 ° (one-fourth of each pitch).

When the first image acquisition process is started, the control device 6 causes the light source 4a of the lighting device 4 to emit light at a predetermined timing M1, starts the projection of the stripe pattern, and simultaneously starts the movement process of the grid plate 4b. Thereby, the stripe pattern projected on the inspection area is continuously moved at a constant speed along the X-axis direction.

In addition, the control device 6 controls the driving of the camera 5 and starts imaging processing at a predetermined timing N1. However, in this embodiment, the start timing M1 of the movement process of the grille plate 4b and the start timing N1 of the photographing process by the camera 5 are set to be the same.

When the photographing process is started, during the execution thereof, the camera 5 is used to perform photographing (exposure) in a plurality of times. More specifically, the printed board 2 is photographed every time the striped pattern moves by a predetermined amount Δx (for example, a distance corresponding to a phase of the striped pattern of 10 °), that is, every predetermined time Δt elapses. Here, the image data captured by the camera 5 every time a predetermined time Δt elapses is transferred to the image data storage device 24 and stored at any time.

Next, the control device 6 ends the moving process of the grid plate 4b and ends the projection of the stripe pattern at a time sequence M2 after a predetermined time has passed from the time sequence M1. The control device 6 ends the imaging process by the camera 5 at the timing N2 after a predetermined time has passed from the timing N1. However, in this embodiment, the end timing M2 of the movement process of the grille plate 4b and the end timing N2 of the photographing process by the camera 5 are set to be the same.

When the shooting process using the camera 5 ends, the control device 6 executes a predetermined calculation process based on a shooting result obtained by the shooting process. In more detail, a series of image data (a plurality of images captured by a fixed amount of Δx for each shift of the stripe pattern is executed) is executed. The luminance value of each pixel in the data) is added in pixels, and the average processing of the average value is calculated. Thereby, image data having a sinusoidal light intensity distribution is obtained.

Next, the control device 6 memorizes the image data obtained by the above-mentioned averaging processing in the calculation result storage device 25 and ends the first image acquisition processing.

On the other hand, the control device 6 drives and controls the lighting device 4 after the completion of the first image acquisition process or during the execution of the above-mentioned average processing of the first image acquisition process, and positions the grid plate 4b. It is set to the second initial setting position (for example, a position where the phase of the stripe pattern is shifted from the first initial setting position by a phase “90 °” of a one-fourth pitch).

After that, the control device 6 starts the second image acquisition process. In addition, since the steps of the second image acquisition process are the same as those of the first image acquisition process described above, detailed descriptions thereof are omitted (the same applies to the third and fourth image acquisition processes).

The control device 6 obtains image data having a sine wave-shaped light intensity distribution through the second image acquisition process, stores the image data in the calculation result storage device 25, and ends the second image acquisition process.

The control device 6 drives and controls the lighting device 4 after the second image acquisition process is completed, or during the execution of the above-mentioned average processing of the second image acquisition process, and sets the position of the grille plate 4b to the third The initial setting position (for example, a position where the phase of the stripe pattern is shifted from the second initial setting position by a phase “180 °” of a one-fourth pitch) starts the third image acquisition process.

The control device 6 obtains image data having a sine wave-shaped light intensity distribution through the third image acquisition process, stores the image data in the calculation result storage device 25, and ends the third image acquisition process.

The control device 6 drives and controls the lighting device 4 after the completion of the third image acquisition process or during the above-mentioned average processing of the third image acquisition process, and sets the position of the grille plate 4b to the fourth The initial setting position (for example, a position where the phase of the stripe pattern is shifted from the third initial setting position by a phase “270 °” of a one-fourth pitch) starts the fourth image acquisition process.

The control device 6 obtains image data having a sine wave-shaped light intensity distribution by the fourth image acquisition process, stores the image data in the calculation result storage device 25, and ends the fourth image acquisition process.

In this way, four types of image data having different light intensity distributions are obtained by performing the four image acquisition processes described above. Thereby, it is possible to obtain the same image data as the four types of image data obtained by shifting the phases of the stripe pattern having a sine wave-shaped light intensity distribution by 90 ° each and photographing them.

Next, the control device 6 performs three-dimensional measurement (height measurement) based on the four types of image data (brightness values of each pixel) obtained as described above, using a well-known phase shift method also described in the background art. The measurement result is stored in the calculation result storage device 25.

Next, the control device 6 performs a good or bad judgment process of the solder paste K based on the three-dimensional measurement results (height data in each coordinate). Specifically, the control device 6 is based on the measurement results of the inspection area obtained as described above, The printing range of the solder paste K that is higher than the reference plane is detected, and the amount of the printed solder paste K is calculated by integrating the height of each part within this range.

Next, the control device 6 compares and determines the position, area, height, or amount of the solder paste K thus obtained with reference data (cover data, etc.) stored in the setting data storage device 26 in advance, and then clicks The comparison result is within the allowable range to determine whether the printing state of the solder paste K in the inspection area is good.

During such processing, the control device 6 drives the control motors 15 and 16 to move the printed circuit board 2 to the next inspection area, and then repeats the above-mentioned series of processes in all inspection areas to end the entire inspection of the printed circuit board 2. .

The results of the operation and effect verification of the substrate inspection apparatus 1 according to this embodiment by simulation are shown below. First, the results of a simulation (first simulation) in a case where a stripe pattern having a rectangular wave-shaped light intensity distribution is projected will be described with reference to FIGS. 5 to 17.

In this simulation, the 36-pixel weight in the X-axis direction of the imaging element is set to 1 cycle, and the middle-tone area (luminance slope) of 2-pixel weight is projected at the boundary between the "bright part" and "dark part" The stripe pattern of the rectangular wave-shaped light intensity distribution is moved by 1 pixel portion (the phase of the stripe pattern is 10 ° portion) in the X-axis direction each time the stripe pattern passes a predetermined time Δt.

Figs. 5 to 9 show the brightness of the stripe pattern of the image element in the X-axis direction (horizontal axis: coordinates X1 to X36) and the fringe pattern that changes with the passage of time (vertical axis: time t1 to t36). Table of values. That is, the light intensity of the imaging element in the X-axis direction after a predetermined time has elapsed Degree distribution table. Among them, the simulation is performed assuming that the luminance value of the “bright part” with the largest luminance is “1”, and the luminance value of the “dark part” with the smallest luminance is “0”.

In addition, although FIG. 5 to FIG. 9 show only one cycle of the stripe pattern (36 pixels in the X-axis direction), in fact, the stripe pattern of plural cycles continuously exists in the X-axis direction. That is, the light intensity distribution shown in the range of the coordinates X1 to X36 exists repeatedly.

As shown in Figs. 5 to 9, in the shooting sequence t1, the range of the coordinates X2 to X17 is the "bright part" which becomes the luminance value "1", and the range of the coordinates X20 to X35 is the "dark part" which becomes the luminance value "0". ". In addition, in the coordinates X36 and X1 and the coordinates X18 and X19 where the boundary between the "light part" and the "dark part" is encountered, there is an intermediate tone region of 2 pixels in which the luminance value changes slowly. That is, the light intensity distribution of the stripe pattern at the imaging timing t1 is as shown in the graph shown in FIG. 14.

Further, in the shooting sequence t2 after a predetermined time Δt has elapsed from the shooting sequence t1, the range of the coordinates X3 to X18 is the "bright part" which becomes the brightness value "1", and the range of the coordinates X21 to X36 is the brightness value "0" "Dark part." Furthermore, from the shooting sequence t3 after a predetermined time Δt has elapsed from the shooting sequence t2, the range of the coordinates X4 to X19 is the "bright part" which becomes the brightness value "1", and the range of the coordinates X22 to X1 is the brightness value "0" "Dark part."

In this way, the light intensity distribution of the stripe pattern is shifted by one pixel each in the right direction of FIG. 5 to FIG. 9 every predetermined time Δt.

Next, verify it by comparing it with a stripe pattern having an ideal sine wave light intensity distribution. (A) of Fig. 10 to Fig. 13 A table showing the relationship between the coordinate position (coordinates X1 to X36) of each pixel in the X-axis direction of the imaging element and the light intensity distribution (ideal value) of an ideal sine wave. Here, an ideal sine wave light intensity distribution having the same stripe pattern as the rectangular wave-like light intensity distribution and the period, amplitude, and phase at the imaging timing t1 is shown. The ideal sine wave system at the shooting timing t1 is as shown in the graph shown in FIG. 15.

(B) of FIG. 10 to FIG. 13 are the results of averaging processing on a plurality of image data (brightness values of each pixel) taken at a predetermined time before and after the image data captured at the shooting timing t1. (Average value) A table based on the coordinate position (horizontal axis: coordinates X1 to X36) of each pixel of the imaging element in the X-axis direction.

In more detail, in FIG. 10 to FIG. 13 (b), in the comparative example of the uppermost layer, the image data (brightness value of each pixel) captured at the shooting timing t1 without averaging is used. Show as is.

On the second layer from the top, one each before and after the shooting timing t1 is displayed, that is, the average of 3 pieces of image data (brightness value of each pixel) captured at the shooting timings t36 to t2 is 3 Averages.

On the third layer from the top, two are displayed around the shooting sequence t1 as the center, that is, the average of 5 image data (brightness value of each pixel) captured at the shooting sequence t35 to t3 is 5 Averages.

On the fourth layer from the top, three are displayed before and after the shooting sequence t1 as the center, that is, the average of 7 image data (brightness value of each pixel) captured at the shooting sequence t34 to t4 is 7 Averages.

On the fifth layer from the top, four each before and after the shooting timing t1 are displayed, that is, the average of 9 image data (brightness values of each pixel) captured at the shooting timings t33 to t5 is 9 Averages.

On the sixth layer from the top, five are displayed around the shooting sequence t1 as the center, that is, an average of 11 image data (the luminance value of each pixel) captured at the shooting sequence t32 to t6 is 11 Averages.

On the seventh layer from the top, there are 6 before and after the shooting sequence t1 as the center, that is, an average of 13 image data (brightness values of each pixel) captured at shooting sequences t31 to t7. Averages.

Next, each of the above average values shown in (b) of FIG. 10 to FIG. 13 is plotted, and it becomes a graph as shown in FIG. 16.

In addition, FIGS. 10 to 13 (c) are the differences between the ideal values shown in FIGS. 10 to 13 (a) and the average values shown in FIGS. 10 to 13 (b). A table showing the coordinate position (horizontal axis: coordinates X1 to X36) of each pixel in the X-axis direction.

More specifically, in FIG. 10 to FIG. 13 (c), in the comparative example of the uppermost layer, the image data (brightness value of each pixel) captured at the shooting timing t1 without averaging is displayed. And the ideal value.

On the second layer from the top, the difference between the above three average values and the ideal values is displayed. On the third layer from the top, the difference between the five average values and the ideal values is displayed. On the fourth layer from the top, the difference between each of the seven average values and the ideal values is displayed. In the fifth layer from the top, the difference between the above 9 average values and the ideal values is displayed. On the sixth layer from the top, the difference between each of the 11 average values and the ideal values is displayed. On the seventh layer from the top, the difference between the above 13 average values and the ideal values is displayed.

Next, each of the above-mentioned values shown in (c) of FIG. 10 to FIG. 13 is plotted, and becomes a graph as shown in FIG. 17. Also, in Fig. 13 (c) The right end of the display shows the average value of the above average values and the maximum value of each average value represented by the pixels (coordinates X1 to X36) in the X-axis direction of the imaging element.

Looking at the right end of Fig. 13 (c), Figs. 16, 17 and so on, it can be seen that the average number is increased with the increase of 5 average values compared with 3 average values and 7 average values compared with 5 average values. The error of the sine wave (ideal value) continues to decrease, and the 13 averages become the smallest error. Therefore, in this simulation, it is best to use the 13 average values for three-dimensional measurement using the phase shift method.

Next, a simulation (second simulation) result in the case of projecting a stripe pattern having a trapezoidal wave-shaped light intensity distribution will be described with reference to FIGS. 18 to 30.

In this simulation, the X-axis direction's 36-pixel weight in the imaging element is set to 1 cycle, and the middle-tone area (luminance slope) of 12-pixel weight is projected at the boundary between the "bright part" and "dark part". A stripe pattern of trapezoidal wavy light intensity distribution moves the stripe pattern in the X-axis direction by 1 pixel portion (the phase of the stripe pattern is 10 ° portion) every time a predetermined time Δt elapses.

FIG. 18 to FIG. 22 show the luminance of the striped pattern of the image element in the X-axis direction (horizontal axis: coordinates X1 to X36) and the brightness of the stripe pattern that changes with time elapse (vertical axis: time t1 to t36) Table of values. That is, it is a light intensity distribution table showing the X-axis direction of the imaging element every predetermined time. Among them, the simulation is performed assuming that the luminance value of the “bright part” with the largest luminance is “1”, and the luminance value of the “dark part” with the smallest luminance is “0”.

In addition, although only one cycle of the stripe pattern (36 pixels in the X-axis direction) is shown in FIGS. 18 to 22, the stripe pattern of a plurality of cycles actually exists continuously in the X-axis direction. That is, the light intensity distribution shown in the range of the coordinates X1 to X36 exists repeatedly.

As shown in FIG. 18 to FIG. 22, in the shooting sequence t1, the range of the coordinates X7 to X12 is the "bright part" that becomes the luminance value "1", and the range of the coordinates X25 to X30 is the "dark part" that becomes the luminance value "0" ". In addition, at the coordinates X31 ~ X6 and X13 ~ X24 where the boundary between the "bright part" and the "dark part" is encountered, there is an intermediate tone region of 12 pixels in which the luminance value changes slowly. That is, the light intensity distribution of the stripe pattern at the imaging timing t1 is as shown in the graph of FIG. 27.

Further, in the shooting sequence t2 after a predetermined time Δt has elapsed from the shooting sequence t1, the range of the coordinates X8 to X13 is the "bright part" that becomes the brightness value "1", and the range of the coordinates X26 to X31 is the brightness value "0" "Dark part." Furthermore, in the shooting sequence t3 after a predetermined time Δt has elapsed from the shooting sequence t2, the range of the coordinates X9 to X14 is the "bright part" which becomes the brightness value "1", and the range of the coordinates X27 to X32 is the brightness value " "Dark part".

In this way, the light intensity distribution of the stripe pattern is shifted by 1 pixel each in the right direction of FIG. 18 to FIG. 22 every predetermined time Δt.

Next, verify it by comparing it with a stripe pattern having an ideal sine wave light intensity distribution. (A) of FIG. 23 to FIG. 26 are tables showing the relationship between the coordinate position (coordinates X1 to X36) of each pixel of the imaging element in the X-axis direction and the light intensity distribution (ideal value) of an ideal sine wave. Here, the light having the trapezoidal wave shape described above at the imaging timing t1 is shown. The stripe pattern of the intensity distribution and the period, amplitude, and phase are the ideal light intensity distribution of a sine wave. The ideal sine wave system at the imaging timing t1 is as shown in the graph shown in FIG. 28.

(B) of FIG. 23 to FIG. 26 are the results of averaging processing on a plurality of image data (brightness values of each pixel) taken at a predetermined time before and after the image data captured at the shooting timing t1. (Average value) A table based on the coordinate position (horizontal axis: coordinates X1 to X36) of each pixel of the imaging element in the X-axis direction.

More specifically, in FIG. 23 to FIG. 26 (b), in the comparative example of the uppermost layer, the image data (brightness value of each pixel) captured at the shooting timing t1 without averaging is used. Show as is.

On the second layer from the top, one each before and after the shooting timing t1 is displayed, that is, the average of 3 pieces of image data (brightness value of each pixel) captured at the shooting timings t36 to t2 is 3 Averages.

On the third layer from the top, two are displayed around the shooting sequence t1 as the center, that is, the average of 5 image data (brightness value of each pixel) captured at the shooting sequence t35 to t3 is 5 Averages.

On the fourth layer from the top, three are displayed before and after the shooting sequence t1 as the center, that is, the average of 7 image data (brightness value of each pixel) captured at the shooting sequence t34 to t4 is 7 Averages.

On the fifth layer from the top, four each before and after the shooting timing t1 are displayed, that is, the average of 9 image data (brightness values of each pixel) captured at the shooting timings t33 to t5 is 9 Averages.

Next, each of the above average values shown in (b) of FIG. 23 to FIG. 26 is plotted, and it becomes a graph as shown in FIG. 29.

23 (c) shows the difference between the ideal values shown in FIGS. 23 to 26 (a) and the average values shown in FIGS. 23 to 26 (b). A table showing the coordinate position (horizontal axis: coordinates X1 to X36) of each pixel in the X-axis direction.

More specifically, in FIG. 23 to FIG. 26 (c), in the comparative example of the uppermost layer, the image data (brightness value of each pixel) captured at the shooting timing t1 without the averaging processing is displayed. And the ideal value.

On the second layer from the top, the difference between the above three average values and the ideal values is displayed. On the third layer from the top, the difference between the five average values and the ideal values is displayed. On the fourth layer from the top, the difference between each of the seven average values and the ideal values is displayed. In the fifth layer from the top, the difference between the above 9 average values and the ideal values is displayed.

Next, each of the above-mentioned values shown in (c) of FIGS. 23 to 26 is plotted, and it becomes a graph as shown in FIG. 30. In addition, at the right end of FIG. 26 (c), the average value of each of the above average values and the maximum value of each average value are shown for each pixel (coordinates X1 to X36) in the X-axis direction of the imaging element.

Looking at the right end of Fig. 26 (c) and Figs. 29 and 30, it can be seen that the error from the ideal sine wave (ideal value) is the smallest of the five average values. Therefore, in this simulation, it is preferable to use three average values for three-dimensional measurement using the phase shift method.

Among them, the other three average values, seven average values, and nine average values are also the same. Compared with the five average values in this simulation, the difference between the ideal values is only slightly larger than the ideal sine wave. In addition, even if three-dimensional measurement is performed using these, it is possible to perform measurement with high accuracy.

As described in detail above, according to this embodiment, a stripe pattern having a rectangular or trapezoidal light intensity distribution projected on the printed substrate 2 is moved, and the moved stripe pattern is divided into multiple shots, and the The luminance value of each pixel of a series of captured image data is added based on the pixels, and the average value is calculated.

In this way, in obtaining one image data among a plurality of image data having different light intensity distributions required for three-dimensional measurement using the phase shift method, it is possible to project and photograph only light having a rectangular wave shape or a trapezoidal wave shape. Compared with the case of the striped pattern of the intensity distribution, image data having a light intensity distribution closer to an ideal sine wave can be obtained.

In addition, according to this embodiment, even if a fringe pattern is projected in a focused state, image data having a sinusoidal light intensity distribution can be obtained. Since the fringe pattern can be projected in the focused state, it becomes easy to maintain the light intensity distribution (waveform) of the fringe pattern.

As a result, when performing three-dimensional measurement using a phase shift method, it is possible to quickly improve measurement accuracy.

Furthermore, according to this embodiment, a stripe pattern having a rectangular wave or trapezoidal light intensity distribution with a non-sinusoidal wave can be projected without complicating the mechanical structure, and simpler control processing or calculation processing can be performed. For example, image data having a sinusoidal light intensity distribution can be obtained. As a result, complication of the mechanical structure is suppressed, and further, manufacturing cost can be suppressed.

In addition, it is not limited to the description of the said embodiment, For example, it can implement it as follows. Of course, it can also be other application examples and modification examples which are not illustrated below.

(a) In the embodiment described above, the three-dimensional measurement device is embodied as a substrate inspection device 1 that measures the height of the solder paste K printed on the printed substrate 2. However, it is not limited to this and may be embodied as, for example, measurement printing The height of the solder bumps on the substrate or electronic components mounted on the substrate.

(b) In the above embodiment, four types of image data are obtained in which the initial phase of the stripe pattern differs by 90 ° in three-dimensional measurement using the phase shift method, but the number of phase shifts and the amount of phase shift are not the same. Limited by these. It is also possible to use another number of phase shifts and the amount of phase shift that can be three-dimensionally measured by the phase shift method.

For example, it is also possible to create a configuration for obtaining three types of image data with a phase difference of 120 ° (or 90 °) for three-dimensional measurement, or to obtain two types of image data for a phase difference of 180 ° (or 90 °) for three-dimensional measurement. Composition.

(c) In the embodiment described above, a stripe pattern having a rectangular wave-like or trapezoidal wave-like light intensity distribution is projected to obtain image data having a sinusoidal wave-like light intensity distribution.

However, it is not limited to this. For example, a stripe pattern having a non-sinusoidal light intensity distribution such as a triangular wave shape or a saw wave shape may be projected to obtain image data having a sinusoidal light intensity distribution. Of course, if possible, a stripe pattern having a rectangular wave-like light intensity distribution without an intermediate tone region (luminance slope) can be created to obtain image data having a sinusoidal light intensity distribution.

Alternatively, a stripe pattern having a light intensity distribution similar to that of a sine wave (sinusoidal wave) can be obtained by projecting a non-ideal sine wave. The structure of the image data having a light intensity distribution closer to the ideal sine wave is required.

(d) The configuration of the projection means is not limited to the lighting device 4 of the above-mentioned embodiment.

For example, in the above embodiment, the grid plate 4b is used as a grid that converts light from the light source 4a into a stripe pattern.

However, it is not limited to this. For example, a liquid crystal panel can also be used as the grille. The liquid crystal panel includes a common electrode that forms a liquid crystal layer between a pair of transparent substrates and is disposed on one transparent substrate, and a plurality of strip-shaped electrodes that are parallel to each other on the other transparent substrate and are connected to each other by a driving circuit pair. On-off control is performed on switching elements (thin-film transistors, etc.) of each strip electrode, and the light transmittance of each grid line corresponding to each strip electrode is controlled by controlling the voltage applied to each strip electrode to form A grid pattern in which light transmitting portions with high light transmittance and light shielding portions with low light transmittance are alternately arranged. Then, the position of the light-transmitting part and the light-shielding part can be controlled to switch the movement of the grid.

Instead of a liquid crystal panel, DLP (registered trademark) using a digital micromirror device may be used as a grille.

(e) Although a two-valued grid (grid plate 4b) in which the light-transmitting portion and the light-shielding portion are alternately arranged is used in the above embodiment, it is not limited to this. For example, a grid plate or a liquid crystal panel may be formed. A multi-valued grid pattern with different transmittances at different stages.

(f) In the above embodiment, the start timing M1 of the moving process of the grille plate 4b and the start timing N1 of the shooting process by the camera 5 are set to be the same, and the end time M2 of the moving process of the grille plate 4b and the use The end timing N2 of the imaging process of the camera 5 is set to be simultaneous.

However, it is not limited to this. As shown in FIG. 31 (a), it is also possible to start the photographing process (start timing N1) using the camera 5 after the movement of the grill plate 4b (start timing M1) is started. The configuration of ending the photographing process (end sequence N2) by the camera 5 before the movement of the plate 4b is stopped (end sequence M2).

Alternatively, as shown in FIG. 31 (b), it is also possible to start the photographing process (start sequence N1) by the camera 5 before the movement of the grid plate 4b (start sequence M1), and stop the movement of the grid plate 4b. (End timing M2) A configuration in which the imaging process (end timing N2) by the camera 5 is ended at the same time or before.

Alternatively, as shown in FIG. 31 (c), it is also possible to start the photographing process (start timing N1) with the camera 5 at the same time as or after the movement of the grill plate 4b is started (start timing M1). After the movement is stopped (the end sequence M2), the imaging process using the camera 5 (the end sequence N2) is ended.

Alternatively, as shown in FIG. 31 (d), it is also possible to start the photographing process (start timing N1) by the camera 5 before the movement of the grille plate 4b (start sequence M1), and stop the movement of the grille plate 4b. (End sequence M2) After that, the imaging process using the camera 5 (end sequence N2) is ended.

(g) In the above-mentioned embodiment, in each of the image acquisition processes, a movement process is performed in which the grille plate 4b is continuously moved at a constant speed by a driving means such as a motor. The driving means of the grille plate 4b is not limited to a person who continuously moves the grille plate 4b like a motor or the like, but may also employ, for example, a person moving the grille plate 4b intermittently (moving each predetermined amount) like a piezoelectric element or the like.

When the moving process of the grid plate 4b is performed by a driving means such as a piezoelectric element, it is also possible to make a configuration in which, for example, a single movement process is performed by a single intermittent movement operation, or each predetermined quantity can be made. It is configured by a plurality of intermittent movement operations.

In the above-mentioned embodiment, the configuration is such that the grille plate 4b is stopped in one image acquisition process, but it may be configured such that the grille plate 4b continuously moves during the four image acquisition processes. .

(h) In the above-mentioned embodiment, during each image acquisition process, the grid plate 4b is moved into multiple shots (exposure) during the movement of the grid plate 4b, and the luminance value of each pixel of the captured series of image data is set as pixels. Add up and calculate the average composition.

However, it is not limited to this, and a process of omitting the calculation of the average value may be made, and the three-dimensional measurement is based on the luminance value of each pixel in a series of image data and added data (image data) after addition of each pixel.

In addition, it is also possible to create a configuration in which shooting (exposure) is continuously performed while the grid plate 4b is moving during each image acquisition process, and three-dimensional measurement is performed based on the captured image data.

In addition, generally, the more the amount of light received by the photographing means (the amount of light received), the better the image quality that is more suitable for measurement, that is, the image with less influence of noise and quantization error. However, when the shooting (exposure) time is long, the shooting method reaches a saturation level, which will cause the so-called "overexposure" of the image. On the other hand, when the grid plate 4b is moved as described above, the shooting (exposure) is divided into a plurality of iterations, and repeated for each pixel. Calculate the brightness value to obtain an image with more received light without saturating it.

On the other hand, if the imaging element is in a range where the imaging element does not reach the saturation level, the processing load of a person who continuously performs imaging (exposure) while the grid plate 4b is moving is less.

(i) In the above embodiment, a CCD sensor is used as the imaging element of the camera 5. However, the imaging element is not limited to this. For example, a CMOS sensor may be used.

In addition, in the case of using a general CCD camera or the like, since data transmission cannot be performed during exposure, it is necessary to perform shooting (exposure) in a plurality of times during the movement of the grille plate 4b as in the above-mentioned embodiment, and it is necessary to perform it during Data transfer (read out).

In this regard, in the case of the camera 5, a CMOS camera or a CCD camera having a function capable of exposing during data transmission is used. Since the shooting (exposure) and data transmission processing can be partially repeated, the measurement can be shortened. time.

1‧‧‧ substrate inspection device

2‧‧‧printed substrate

3‧‧‧mounting table

4‧‧‧lighting device

4a‧‧‧light source

4b‧‧‧ Grille

5‧‧‧ Camera

6‧‧‧Control device

15, 16‧‧‧ Motor

Claims (9)

A three-dimensional measuring device is characterized in that it includes projection means, a light source that emits a predetermined light, a grid that converts light from the light source into a predetermined stripe pattern, and a driving means that can move the grid. Projecting the stripe pattern on the object to be measured; photographing means to photograph the object to be measured with the stripe pattern projected; image acquisition means to control the projection means and the photographing means to obtain a plurality of light intensity distributions different from each other Image data; and image processing means, based on the plurality of image data obtained by the aforementioned image acquisition means, a three-dimensional measurement of the object to be measured can be performed using a phase shift method, and the image acquisition means obtains one of the plurality of image data In terms of image data, the moving process of moving the grid is performed, and the continuous shooting process is performed during a predetermined period that overlaps at least a part of the moving period of the grid, or at least during the moving period of the grid. A part of the predetermined period of overlap is executed in a plurality of times to perform the shooting process. This shooting result is added or averaged for each pixel. The predetermined stripe pattern is a stripe pattern having a non-sinusoidal light intensity distribution. The three-dimensional measurement device according to claim 1, wherein the aforementioned photographing process is started at the same time or during the movement process of the aforementioned grid, and the aforementioned photographing process is ended at the same time as the movement process of the grid is stopped or during the movement process. The three-dimensional measuring device according to claim 1, wherein the grille is configured by alternately arranging the light-transmitting portions that transmit light and the light-shielding portions that block light. According to the three-dimensional measuring device of claim 1, wherein the predetermined period is a period during which the grille moves within a range corresponding to a quantity equal to or more than 30 ° and a phase equivalent to or less than 130 °. A three-dimensional measuring device is characterized in that it includes projection means, a light source that emits a predetermined light, a grid that converts light from the light source into a predetermined stripe pattern, and a driving means that can move the grid. Projecting the stripe pattern on the object to be measured; photographing means to photograph the object to be measured with the stripe pattern projected; image acquisition means to control the projection means and the photographing means to obtain a plurality of light intensity distributions different from each other Image data; and image processing means, based on the plurality of image data obtained by the aforementioned image acquisition means, the three-dimensional measurement of the object to be measured can be performed using a phase shift method, and the aforementioned image acquisition means is used to obtain the aforementioned plurality of image data For one of the image data, the moving process of moving the grid is performed, and the continuous shooting process is performed in a predetermined period that overlaps at least part of the moving period of the grid, or the moving with the grid is performed. In a predetermined period where at least a part of the period overlaps, a shooting process is performed in which the shooting result is divided into a plurality of times, and the shooting result is added or averaged for each pixel. The object to be measured is a printed substrate printed with solder paste or a solder bump Block wafer substrate. The three-dimensional measuring device according to claim 5, wherein the aforementioned photographing process is started at the same time as the movement process of the grid is started, and the aforementioned photographing process is ended at the same time as the movement process of the grid is stopped or during the movement process. The three-dimensional measuring device according to claim 5, wherein the predetermined stripe pattern is a stripe pattern having a non-sinusoidal light intensity distribution. The three-dimensional measuring device according to claim 5, wherein the grid is configured to alternately arrange a light transmitting portion that transmits light and a light shielding portion that blocks light. The three-dimensional measuring device according to claim 5, wherein the predetermined period is a period during which the grid is moved within a range corresponding to a phase corresponding to a phase of 30 ° and a phase corresponding to a phase corresponding to a phase of 130 °.