TWI687887B - Micro pollution management system - Google Patents

Abstract

The invention is a micro-pollution management system, including at least one sensing device arranged in a space to detect a plurality of micro-pollution data in the space within a working time, so that the sensing device transmits the plurality of micro-pollution data to central processing The device enables it to determine whether the micro-pollution data exceeds the first micro-pollution limit value, or to extract the maximum value of the micro-pollution data during the normal yield of the product, but a value less than the first micro-pollution limit value becomes a second micro-pollution limit Value to determine whether the micro-pollution data exceeds the second micro-pollution limit value to generate the first warning signal and the second warning signal to the display for display. The invention can control and control micro-pollution data in the environment, supplemented by two-dimensional geographic information display, timely remind and predict the performance value after replacing the filter, and can actively learn to modify the micro-pollution limit value, so that the micro-pollution Control is more intelligent and efficient.

Description

Micro pollution management system

The invention relates to a monitoring technology, in particular to a micro-pollution management system for capturing large amounts of data for micro-pollution data control.

After the advent of semiconductors, the use of electronic products has changed dramatically, and the invention of semiconductors has made mobile devices, computers, and other related electronic products smaller, lighter, and easier to carry. Moreover, the invention of semiconductors has been hailed as one of the four important inventions in parallel with printing presses, electricity, and penicillin.

However, semiconductors are extremely precise parts, and impurities at any point may change the characteristics of semiconductors. Therefore, semiconductors need to be manufactured in clean rooms. With the development of technology, the volume of semiconductors can be made smaller. The current semiconductors The volume can be gradually reduced to below 5 nanometers (nm), but relatively speaking, the micro-pollution limit conditions for the production of semiconductor clean rooms are also more stringent.

Micro-pollution in a clean room can be divided into fine pollutants (Particle), gas, and electrostatic static charge (Electric static charge) and other micro-pollutants. The gas is further divided into acid gases (Molecular Acids, MA) and alkaline gases (Molecular Bases, MB), condensable gas (Molecular Condensable, MC) and impurity gas (Molecular Dopants, MD). When the above-mentioned micro-pollutants come into contact with semiconductors, physical or chemical reactions may occur, which in turn affect the yield of semiconductor manufacturing.

Therefore, if the concentration of various micro-pollution in the clean room can be monitored in real time, and the data of the micro-pollution can be effectively analyzed, the effect of the micro-pollution in the clean room on the semiconductor can be effectively controlled and mastered to improve the electronic products such as semiconductors Yield. Although there are currently some monitoring systems that can monitor the micro-pollution data in clean rooms, the current monitoring systems only use a single pollution limit value to control the pollution value, and cannot automatically learn the best pollution limit value in different areas. And, the current monitoring system also does not have the predicted value of air quality in the area after the replacement of filter materials.

In view of this, the present invention proposes a micro-pollution management system in order to effectively overcome the aforementioned problems in view of the above-mentioned lack of conventional technology.

The main purpose of the present invention is to provide a micro-pollution management system that can effectively control micro-pollution data in a clean room, and the system of the present invention not only warns when the micro-pollution data exceeds the maximum first micro-pollution limit value , It also has an active learning function, which can actively memorize the micro pollution data in the normal air range, the maximum value is less than the first micro pollution limit, and set the value of the micro pollution data to the second micro pollution limit, when the micro pollution When the data exceeds the second micro-pollution limit, you can be alerted first.

Another object of the present invention is to provide a micro-pollution management system, which can generate a concentration distribution map of micro-pollution design data, and provide managers with a clear knowledge of the location of micro-pollution problems for corresponding processing.

Another object of the present invention is to provide a micro-pollution management system that can record the location of the filter and predict the micro-pollution data that may be generated in the environment after the new filter is replaced, which is beneficial for the administrator to control the micro-pollution .

To achieve the above purpose, the present invention provides a micro-pollution management system, which includes at least one sensing device disposed in a space, the sensing device has corresponding identity information, and the sensing device can be in a working time , To detect the environment of the space to generate a plurality of micro-polluted data, so that the sensing device transmits the identity information and the plurality of micro-polluted data to a central processing device, the central processing device is connected to the sensing device, and the central processing device is provided with a The first micro-pollution limit value, when the micro-pollution data exceeds the first micro-pollution limit value, a first warning signal is generated, and the central processing device can retrieve the maximum value in the micro-pollution data, but less than the first micro-pollution limit value The value of becomes a second micro-pollution limit value. When the micro-pollution data exceeds the second micro-pollution limit value, a second warning signal is generated, and a display device is connected to the central processing device to receive and display the second warning signal and The first warning signal.

The micro pollution data further includes a micro dust particle concentration data, a gas concentration data and an electrostatic charge concentration data. The sensing device includes a fine dust particle sensor, at least one gas sensor, and an electrostatic charge sensor to generate fine dust particle concentration data, gas concentration data, and static charge concentration data, respectively.

The gas concentration data further includes an acid gas concentration data, an alkaline gas concentration data, an organic gas concentration data, and an impurity gas concentration data. The gas sensor includes a sour gas (Molecular Acid, MA) sensor, alkaline gas (Molecular Base, MB) sensor, organic gas (Molecular Condensable, MC) sensor and impurity gas (Molecular Dopant, MD) sensors to generate the acid gas concentration data, the alkaline gas concentration data, the organic gas concentration data, and the impurity gas concentration data, respectively.

The sensing device may be a plurality of sensing devices. The plurality of sensing devices are distributed in the space, and the central processing device stores identity information corresponding to each sensing device and its corresponding second micro-pollution limit value, and each A location information of the sensing device in the space.

The central processing device further includes a micro pollution concentration display module, which generates a concentration distribution map based on the position information of each sensing device and corresponding micro pollution data, and transmits it to the display device for display. The values are divided into different intervals from high to low, and each interval is displayed on a different layer.

The detailed description will be given below through specific embodiments, so that it is easier to understand the purpose, technical content, characteristics and achieved effects of the present invention.

The present invention provides a micro-pollution management system that can effectively control micro-pollution data in a clean room. It has the largest first micro-pollution limit in itself, so that when the micro-pollution data exceeds the first micro-pollution limit, a warning will be given. The invention can also actively memorize the micro-pollution data with the maximum value in the normal air range but less than the first micro-pollution limit, and set the value of the micro-pollution data as the second micro-pollution limit. When the second micro-pollution is restricted, a warning can be issued.

Next, please refer to the first figure to illustrate how the present invention achieves the above-mentioned effects. As shown in the figure, it is the architecture of the micro-pollution management system 1 which includes at least one sensing device 10 signal connected to a central The processing device 20 and a display device 30 signally connect to the central processing device 20. In this embodiment, a plurality of sensing devices 10 are connected to a central processing device 20, and the plurality of sensing devices 10 may be distributed in a space. In this embodiment, the plurality of sensing devices 10 are distributed in a clean room. Each sensing device 10 has a corresponding identity information, and each sensing device 10 can detect the environment of the space within a working time to generate a plurality of micro-pollution data, so that each sensing device 10 can The identity information and the micro-pollution data are transmitted to the central processing device 20, so that the central processing device 20 stores the plurality of micro-pollution data of each sensing device 10, and can be controlled according to the plurality of micro-pollution data.

Each sensing device 10 includes a fine dust particle sensor 12, at least one gas sensor 14, and an electrostatic charge sensor 16, the fine dust particle sensor 12 generates fine dust particle concentration data in the micro pollution data, gas The sensor 14 generates gas concentration data in the micro-pollution data and the static charge concentration data pollution data in the micro-pollution data is generated by the electrostatic charge sensor 16, and the gas sensor 14 of the sensing device 10 further includes an acid gas (Molecular Acid, MA) sensor 142, an alkaline gas (Molecular Base, MB) sensor 144, an organic gas (Molecular Condensable, MC) sensor 146 and an impurity gas (Molecular Dopant, MD) sensor The detector 148 generates acid gas concentration data, alkaline gas concentration data, organic gas concentration data, and impurity gas concentration data among the gas concentration data, respectively. Each sensing device 10 further includes a transmission device 18, which can transmit a plurality of micro-pollution data including fine dust particle concentration data, gas concentration data and electrostatic charge concentration data to the central processing device 20 for storage Control.

Please continue to refer to the first figure, and at the same time refer to the second to fifth figures. The central processing device 20 can be a computer host. The central processing device 20 is provided with a micro-contamination concentration display module 22 and a filter position display module 24 And the filter micro-pollution prediction module 26 is updated, and the central processing device 20 records the identity information of each sensing device 10 and its corresponding location information. Please refer to the first and second figures, the central processing device 20 receives the identity information and plural micro-pollution data of each sensing device 10, and determines the position of each sensing device 10 according to the identity information, so that the micro-pollution The concentration display module 22 can display a plurality of micro-pollution data at the corresponding positions according to the identity information to generate a concentration distribution map and transmit it to the display device 30 for display. The display device 30 can be a screen.

In addition, the central processing device 20 is provided with a first micro-pollution limit value. When the micro-pollution data exceeds the first micro-pollution limit value, a first warning signal is generated; at the same time, the central processing device 20 can also capture micro-pollution The maximum value in the pollution data, but the value less than the first micro-pollution limit value becomes a second micro-pollution limit value. When the micro-pollution data transmitted by the sensing device 10 exceeds the second micro-pollution limit value, a second Warning signal. For example, in this embodiment, the value of the first pollution limit value is 5, when the micro-pollution data exceeds 5, a first warning signal will be issued, but sometimes the micro-pollution data in some specific areas may not always reach 5, part The micro-pollution data of a specific area may only be within a certain range of values. If the long-term air pollution records show that the micro-pollution data will only fluctuate between 1 and 3, then the maximum value of 3 can be defined as the second micro-pollution The limit value, at this time, although the micro pollution data does not exceed 5, but when the micro pollution data exceeds 3, the second warning signal is issued. Although the micro-pollution data in the clean room is within the normal air range as long as it stays below the first micro-pollution limit value, that is, as long as it remains below the first micro-pollution limit value, the products manufactured in the clean room will remain normal However, the present invention uses automatic learning to determine the second micro-pollution limit value in the normal air range, which can make the air in the clean room more stable and improve the product yield.

Please refer to the first picture and the third picture together, in which the display device 30 displays the first warning signal and the second warning signal, which can be presented by sound or image. This embodiment exemplifies the first warning signal and the second warning signal. Taking the image display mode, in which the first warning signal and the second warning signal are displayed in the same way, only the first warning signal is used as an example for description. Please refer to the third figure. The display method of the first warning signal indicates that the position of the sensing device 10 exceeding the first micro-pollution limit value is indicated by an obvious frame.

Next, please refer to the first and fourth figures together. It is worth noting that each sensing device 10 generates a second micro-pollution limit value according to the micro-pollution data range detected by itself, so each sensor The second micro-pollution limit value of the device 10 will also be different, so the central processing device 20 may enable the micro-pollution concentration display module 22 to correspond to the micro-pollution data and the second pollution limit value according to the position information of each sensing device 10 A relative concentration distribution map is generated and transmitted to the display device 30 for display. The relative concentration distribution map can set the corresponding second micro-pollution limit value in each sensing device 10 as the maximum value, so as to distinguish the values of the complex micro-pollution data below the second micro-pollution limit value from high to low Interval, each interval is displayed on different layers. For example, as shown in the fourth diagram, the second pollution limit value of the sensing device 10 at position A is 3, and the second pollution limit value of the sensing device 10 at position B is 2, so the sensing device at position A 10 adjusts the value 3 to the layer with the highest density, and the layer density in the interval between 3 and 0 gradually fades; the sensing device 10 at position B adjusts the value 2 to the layer with the highest density, 2 to 0 The layer density in the interval between them gradually fades.

Please continue to refer to the first figure, the filter position display module 24 of the central processing device 20 is used to record the position of a plurality of filters in the space of the clean room, and generate a filter position distribution map based on it. The display is transferred to the display device 30. Please refer to the first and fifth figures. The updated filter micro-pollution prediction module 24 of the central processing device 20 is used to predict the micro-pollution data in the space after the updated filter to generate a micro-pollution prediction distribution map. And it is transferred to the display device 30 for display. As shown in the fifth figure, the micro-pollution prediction distribution map can predict the micro-pollution data after the filter is updated, allowing the administrator to determine whether there is still a position that exceeds the micro-pollution limit after the filter is updated.

The above concentration distribution diagrams are all exemplified by the acid gas concentration data of the gas concentration data in the micro pollution data. Of course, the micro dust particle concentration data, gas concentration data, electrostatic charge concentration data pollution data, and alkaline gas concentration data in the micro pollution data , The concentration data of the organic gas and the concentration data of the impurity gas can be displayed in a concentration distribution diagram, but the display mode is the same as the above embodiment, so the description will not be repeated.

In summary, the present invention can effectively control the micro-pollution data in the clean room. In addition to warning when the micro-pollution data exceeds the maximum first micro-pollution limit value, it also has an active learning function, and the present invention can actively memorize In the normal air range, the maximum pollution data is less than the first micro-pollution limit, and the value of the micro-pollution data is set to the second micro-pollution limit. When the micro-pollution data exceeds the second micro-pollution limit, a warning will be given first. Moreover, the central processing device of the present invention can generate the concentration distribution map of the micro-pollution equipment data, providing the administrator with a clear knowledge of the location of the micro-pollution problem for corresponding processing, and at the same time can record the location of the filter screen and predict the replacement of the new After the filter, the micro-pollution data that may be generated in the environment is beneficial to managers to control micro-pollution.

The above are only preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Therefore, any changes or modifications based on the features and spirit described in the application scope of the present invention should be included in the patent application scope of the present invention.

1: Micro pollution management system

10: Sensing device

12: Fine dust particle sensor

14: Gas sensor

142: Acid gas sensor

144: alkaline gas sensor

146: Organic gas sensor

148: Impurity gas sensor

16: Static charge sensor

18: Transmission device

20: central processing unit

22: Micro pollution concentration display module

24: Filter position display module

26: Update filter micro-pollution prediction module

30: display device

The first figure is a system block diagram of an embodiment of the present invention. The second graph is a concentration distribution diagram of an embodiment of the present invention. The third diagram is a schematic diagram of the warning state of the concentration distribution diagram of the embodiment of the present invention. The fourth graph is a relative concentration distribution diagram of an embodiment of the present invention. The fifth diagram is a micro-pollution prediction distribution diagram according to an embodiment of the present invention.

1: Micro pollution management system

10: Sensing device

12: Fine dust particle sensor

14: Gas sensor

142: Acid gas sensor

144: alkaline gas sensor

146: Organic gas sensor

148: Impurity gas sensor

16: Static charge sensor

18: Transmission device

20: central processing unit

22: Micro pollution concentration display module

24: Filter position display module

26: Update filter micro-pollution prediction module

30: display device

Claims (9)

A micro-pollution management system includes: at least one sensing device set in a space, the sensing device has corresponding identity information, and the sensing device detects the environment of the space within a working time to generate plural numbers Micro-polluted data, the sensing device can transmit the identity information and the micro-polluted data together; a central processing device, connected to the sensing device to receive the identity information and the micro-polluted data, the central processing device There is a first micro-pollution limit value, when the micro-pollution data exceeds the first micro-pollution limit value, a first warning signal is generated; the central processing device can retrieve the maximum value of the micro-pollution data, but less than The value of the first micro-pollution limit value becomes a second micro-pollution limit value, when the micro-pollution data exceeds the second micro-pollution limit value, a second warning signal is generated, and the central processing device further includes a filter A position display module, which can record the positions of a plurality of filters set in the space, generate a filter position distribution map based on it, and transmit it to the display device for display, and an update filter micro-pollution prediction module, which After the filter is predicted to be updated, the micro-pollution data in the space can be generated to generate a micro-pollution prediction distribution map, which is transmitted to the display device for display; and a display device connected to the central processing device to receive and display the The second warning signal and the first warning signal. The micro-pollution management system according to claim 1, wherein the micro-pollution data further includes a micro-dust particle concentration data, a gas concentration data and an electrostatic charge concentration data; the sensing device further includes a micro-dust particle sensor, at least A gas sensor and an electrostatic charge sensor are used to generate the fine dust particle concentration data, the gas concentration data, and the electrostatic charge concentration data, respectively. The micro-pollution management system according to claim 2, wherein the gas concentration data further includes an acid gas concentration data, an alkaline gas concentration data and an organic gas concentration data, and an impurity gas concentration data; the gas sensor further Including an acid gas (Molecular Acid, MA) sensor, alkaline gas (Molecular Base, MB) sensor, organic gas (Molecular Condensable, MC) sensor and impurity gas (Molecular Dopant, MD) sensor To generate the acid gas concentration data, the alkaline gas concentration data, the organic gas concentration data, and the impurity gas concentration data, respectively. The micro-pollution management system according to claim 1, wherein the at least one sensing device can be a plurality of sensing devices, the sensing devices are distributed in the space, and the central processing device stores a corresponding The identity information of the sensing device and the corresponding second micro-pollution limit value, and the location information of each sensing device in the space. The micro-pollution management system according to claim 4, wherein the central processing device further includes a micro-pollution concentration display module that generates a concentration distribution based on the location information of each of the sensing devices and the corresponding micro-pollution data The graph is transmitted to the display device for display. The concentration distribution map distinguishes different intervals of the value of the micro-pollution data from high to low, and each of the intervals is displayed on a different layer. The micro-pollution management system according to claim 5, wherein the micro-pollution concentration display module can further generate a relative value corresponding to the micro-pollution data and the second pollution limit value according to the position information of each of the sensing devices The concentration distribution map and transmit it to the display device to display that the relative concentration distribution map takes the corresponding second micro-pollution limit value in each of the sensing devices as the maximum value, so that the second micro-pollution limit value below the second micro-pollution limit value The values of the micro-polluted data are distinguished from high to low, and each interval is displayed on different layers. The micro-pollution management system according to claim 1, wherein the display device is a screen. The micro-pollution management system according to claim 1, wherein the sensing device further includes a transmission device To transmit the micro-contamination data to the central processing device. The micro-pollution management system according to claim 1, wherein the central processing device is a computer host.

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