TWI674169B - Scoring wheel and manufacturing method thereof - Google Patents

Abstract

The scoring wheel of the present invention can improve the strength of the end surface of the substrate when scoring and breaking the substrate of the brittle material.

The circumference of the scoring wheel is ground into a V shape and a diamond film is formed on the ground surface. Next, the polishing surface 15 is formed by rough polishing so that the band-shaped portion including the ridge line of the V-shaped front end becomes the apex angle α 2. Further, the belt-shaped portion including the ridge line in the polishing surface 15 is further polished to form a polishing surface 16 having an apex angle α 3. The polishing width w from the ridgeline to the boundary between the rough polishing and the finish polishing is set to 20 μm or more. As a result, the ridges at the tip of the blade and the unevenness of the inclined surface can be reduced, and the end face strength of the scratched brittle material substrate can be improved.

Description

Scribing wheel and manufacturing method thereof

The present invention relates to a scribing wheel for scribing a brittle material substrate such as a ceramic substrate or a glass substrate, and a manufacturing method thereof.

The conventional scoring wheel is formed by cutting a circular plate made of cemented carbide or sintered diamond, slicing its circumferential portion obliquely from both sides, and forming a V-shaped blade tip on the circumferential surface. The scoring wheel has a through hole in the center, and is used as a scoring head that is rotatably mounted on the scoring device.

Conventionally, in order to form a V-shaped blade tip on the circumferential surface of the scoring wheel, a through-hole 102 is first formed in the center of the circular plate 101. Fig. 1 (a) shows a side view of the circular plate 101. Next, as shown in the side view shown in FIG. 1 (b) and the front view shown in FIG. 1 (c), the peripheral portion is ground into a V shape from both sides to become the blade front end portion 103. According to circumstances, the blade tip portion 103 is finished and ground with a finer-grained abrasive material to constitute the scoring wheel 100.

Patent Document 1 discloses a glass cutting blade for cutting a glass substrate, and a V-shaped blade tip surface is covered with a diamond in order to prolong its life. This glass cutting blade is coated with a diamond film on the surface of the blade tip formed of ceramics compatible with diamond, and the diamond film is subjected to surface polishing treatment to be shaped. It was also revealed that by using such a glass cutting blade, the blade has a long life and can cut glass with high hardness with a smooth cut surface.

In addition, Patent Document 2 discloses the following: formation of a scribing wheel base material Diamond film, rough grinding the diamond film at the front end of the blade, and then finishing polishing to make a scoring wheel.

Patent Document 1: Japanese Patent Application Laid-Open No. 04-224128

Patent Document 2: Japanese Patent Application Publication No. 2013-202975

If the surface roughness of a diamond is to be reduced by mechanical polishing, it is necessary to use abrasive particles having a smaller particle size. However, when the particle size of the abrasive particles is small, the amount of processing is reduced and the polishing time is long. On the other hand, if the polishing time is to be shortened, it is necessary to use abrasive particles having a large particle diameter, and it is difficult to reduce the surface roughness. The blade for cutting glass disclosed in Patent Document 1 is constituted by using a base material as a ceramic, having a V-shaped cross-sectional shape, coating a diamond film, and further polishing it. However, although only one stage of polishing can remove the unevenness of the diamond film, the surface roughness after polishing cannot be sufficiently reduced. In the diamond-coated cutting blade described in Patent Document 2, two-stage grinding of rough grinding and finishing grinding is performed for the purpose of shortening the grinding time. Specifically, coarse particles are used to shape the particles in a short time by rough grinding, and finishing polishing of smaller particles is performed in a narrower range to reduce the surface roughness near the ridgeline. As a result, the cutting edge can be formed in a shorter processing time than when the entire surface is finished and ground. However, if the angle difference between the rough grinding and the finishing grinding at the tip of the blade is large, there is a problem that the correction time of the abrasive grains becomes long as described below, so that the machining efficiency cannot be significantly improved. Still further, there is a problem that the ridge line becomes large and it is difficult to perform uniform processing over the entire ridge line of the scribe wheel.

When a material to be processed is polished by using a grinding material such as a grindstone, the grinding material itself is worn, and the shape of the grindstone or the like is changed due to local processing, thereby reducing workability. Under such circumstances, it is necessary to correct (also known as truing, dressing) the grindstone, etc. Shape or replacement. Because diamonds are extremely hard, the shape of the abrasive material also changes greatly, which causes time and time-consuming manufacture of corrections such as grinding stones.

The present invention has been made in view of such a problem, and its object is to increase the polishing width in a scribe wheel covered with a diamond film, thereby making the curvature of the ridges smaller and more uniform, and improving the manufacturing efficiency. .

In order to solve the problem, the method for manufacturing a scoring wheel according to the present invention, the scoring wheel system has a ridgeline along a circumferential portion, and has a blade front end composed of the ridgeline and inclined surfaces on both sides of the ridgeline. The manufacturing method includes: The inclined surface of the scoring wheel base material including the ridge line portion is rough ground by a grinding material, so that the vertex angle (α2) of the first grinding surface crossing formed by the rough grinding is greater than the inclination of the diamond film The scoring wheel base material is disc-shaped, and the diamond film is formed along the circumference of the circumferential portion from the side surfaces on both sides and is formed obliquely to form a first polishing surface. The ridgeline portion where the inclined surfaces intersect each other; the inclined surface including the ridgeline portion of the first polishing surface is finished and polished by using a coarser and finer abrasive material, and The width of the boundary of the work polishing is set to 20 μm or more, and the second polishing surface is formed so that the vertex angle (α3) of the second polishing surface crossing is larger than the apex angle of the first polishing surface crossing.

Here, the difference (θ2) between the vertex angle at which the first polishing surface intersects and the vertex angle at which the second polishing surface intersects may be greater than 5 ° and 25 ° or less.

Here, the difference (θ1) between the vertex angle at which the inclined surface of the diamond film intersects and the vertex angle at which the first abrasive surface intersects is greater than the vertex angle at which the first abrasive surface intersects with the second abrasive surface. The difference in apex angle (θ2).

Here, the scribing wheel base material may be a cemented carbide.

In order to solve this problem, the scribing wheel of the present invention is formed with a ridgeline along a circumferential portion, and has a blade front end composed of the ridgeline and an inclined surface on both sides of the ridgeline. A cutting edge front end portion is formed on the circumference; a diamond film is formed on the cutting edge front surface of the scribing wheel base material; a first grinding surface is ground by abrasive materials on both sides of a ridge line formed by the diamond film; and The second polishing surface is polished by abrasive materials on both sides of the ridge line at the front end of the first polishing surface; the vertex angle (α3) of the intersection of the second polishing surface is greater than the vertex angle (α2) of the first polishing surface. And the polishing width from the ridgeline to the boundary between the rough polishing and the finishing polishing is set to 20 μm or more.

According to the present invention having such characteristics, the front end of the blade of the scoring wheel is ground into a V-shape, and a diamond film is formed on the polishing surface, and only the front end portion is rough ground, followed by finishing grinding. Furthermore, the apex angle of the finish polishing is made larger than the apex angle during rough polishing, and the polishing width from the ridgeline to the boundary between the rough polishing and the finish polishing is set to 20 μm or more. Thereby, the following effects can be obtained: the degree of bending of the ridgeline can be made small, uniform over the entire perimeter of the ridgeline, the grinding stone correction time can be shortened, and the manufacturing efficiency can be improved.

10‧‧‧ Scribing Wheel

11‧‧‧ round plate

12‧‧‧through hole

12a‧‧‧rotation shaft

13‧‧‧ polished surface

14‧‧‧ Diamond Film

15‧‧‧ 1st polished surface

16‧‧‧ 2nd polished surface

FIG. 1 is a side view and a front view showing a conventional scribing wheel and a manufacturing process thereof.

Fig. 2 is a front view and a side view of a scribing wheel according to an embodiment of the present invention.

FIG. 3 is a side view showing the manufacturing process of the scribing wheel according to this embodiment.

FIG. 4A is an enlarged cross-sectional view of a tip portion showing a state where a diamond film is formed on a scribing wheel base material according to this embodiment.

FIG. 4B is an enlarged cross-sectional view showing a front end portion of the scoring wheel subjected to rough grinding.

FIG. 4C is an enlarged cross-sectional view showing a front end portion of the scoring wheel subjected to finish grinding.

FIG. 5 is a diagram showing the grinding angle and grinding stone correction time, ridge line curvature radius, and grinding width of the scoring wheels of the examples and comparative examples of the present invention.

Fig. 2 (a) is a front view of the scribe wheel according to the embodiment of the present invention, and Fig. 2 (b) is a side view thereof. In addition, Figs. 3 (a) to (d) are side views showing the manufacturing process of the scribing wheel of this embodiment. When manufacturing the scoring wheel 10, for example, first, a through-hole 12 serving as a shaft hole is formed in the center of a circular plate 11 of a scoring wheel base made of cemented carbide or ceramic as shown in FIG. 3 (b).

Next, a shaft of a motor or the like is connected to the through-hole 12 and the center axis of the through-hole 12 is used as the rotation shaft 12a to rotate and grind the entire circumference of the circular plate 11 from both sides as shown in FIG. 3 (b). A V-shaped vertical cross-section having an inclined surface and a ridgeline is formed, and the inclined surface becomes the polishing surface 13. The apex angle at this time is preferably 80 ° to 150 °, and more preferably 90 ° to 140 °. When it is 80 ° or less, the ridge tip is liable to be broken during processing, and when it is 150 ° or more, the practicality as a blade tip tends to disappear.

Next, a diamond film is formed on the substantially V-shaped polishing surface 13. First, as shown in FIG. 4A, an enlarged cross-sectional view of a ridge portion at the tip of the blade is used to make the rough V-shaped polishing surface 13 rough in advance so that the adhesion of the diamond film becomes easy. Next, a diamond having a particle diameter of submicron or less is formed on the bevel portion, and then the diamond core is grown by a chemical vapor reaction to form a diamond film 14 having a film thickness of, for example, 10 to 30 μm. The formation of such a diamond film can be performed once to become a single-layer diamond film, and it can also be repeatedly performed to form a multi-layer diamond film. Here, since the diamond film is formed substantially uniformly on the inclined surface and the ridge line of the scribe wheel base material, the apex angle of the diamond film is substantially equal to the apex angle of the scribe wheel base material. The apex angle of this diamond film is set to a first apex angle α1. The apex angle α1 is preferably 80 ° to 150 °, and more preferably 90 ° to 140 °. If it is below 80 ° The tip is easily damaged during processing, and if it is 150 ° or more, the practicality as a tip of the blade tends to disappear.

Next, the diamond film 14 is rough-polished. For rough grinding, for example, an abrasive having a particle size of 8000 or less is used. In the case of an abrasive material having a size larger than 8000, the particle size of the abrasive material is too small, and the necessary degree of processing for the diamond film 14 cannot be obtained. In this step, the second vertex angle α2 (α2> α1) is polished only for a band-shaped portion including a ridge line in the center. FIG. 4B is an enlarged view of the front end portion. The polishing surface formed in this manner is referred to as a first polishing surface 15. Here, the vertex angle α2 is polished so as to have a value that is only larger than θ1 with respect to α1.

Next, as shown in FIG. 4C, only a narrower band-shaped portion including a ridge line of the polishing surface 15 in the center is subjected to finishing polishing. In fine grinding, coarser and finer particles of fine powder are used for grinding. The polished surface including a circle formed by a ridge line is polished so as to be perpendicular to the rotation axis 12a, and the vertex angle is polished to a desired third vertex angle α3 (α3> α2). The finished polished surface thus formed is referred to as the second polished surface 16. Here, the polishing width from the ridgeline to the boundary between the polishing surfaces 15 and 16 is set to w. The polishing width w is 20 μm or more.

The particle size of the abrasive here is preferably 9000 or more, more preferably 10,000 or more, and even more preferably 15,000 or more. In the finishing polishing, a coarser and finer-grained fine powder is used for polishing, so the arithmetic average roughness of the second polishing surface is smaller than the arithmetic average roughness of the first polishing surface. In the finishing grinding step, grinding is performed until the arithmetic average roughness Ra of the front end surface of the blade and the ridgeline is 0.03 μm or less, and preferably 0.015 μm or less. If the particle size of the abrasive is less than 9000, it is difficult to make the arithmetic average thickness Ra of the front end surface of the blade and the ridgeline after the grinding become 0.03 μm or less. Therefore, the defect or peeling of the film is easy to occur during scoring. There is a tendency that the end surface of the broken brittle material substrate tends to remain scratched. Here, the vertex angle α3 is polished so as to have a value that is only larger than θ2 with respect to α2. θ2 is larger than 5 °. Θ2 is 25 ° or less, and preferably 20 ° or less. The larger θ2 is, the larger the shape of the tip of the tip of the finish grinding blade changes. In addition, θ2 is preferably smaller than θ1. The surface including the circle formed by the ridgeline of the diamond film by this finishing grinding becomes perpendicular to the center axis of the scribe wheel base. In addition, the larger final vertex angle α3 is suitable for use with a higher scribe load, and the smaller final vertex angle α3 is suitable for use with a lower scribe load.

The scoring wheel is polished by a grinding material such as a grindstone, thereby making it easy to grind the inclined surface at the same angle over the entire circumference of the scoring wheel. When rough grinding or finishing grinding on one side is completed, the other side is also polished similarly. As such, it is easy to recognize that the apex angles α2 and α3 are desired values based on the grinding using a grindstone, and to make the ridge line of the scribing wheel a straight line when viewed from the side. Further, it is possible to easily and reliably polish a region having a desired width w.

In this way, by setting the leading edge of the blade into a two-step V shape, and only finishing the diamond leading edge portion of the leading edge of the blade which is necessary as a scoring wheel, the machining area is reduced, thereby reducing the processing time and the leading edge of the blade. The unevenness of the ridgeline is reduced.

By grinding in this manner, since the entire portion in contact with the brittle material substrate is a diamond compared to the conventional scoring diamond scoring wheel, the abrasion resistance of the scoring wheel can be improved. In addition, since the entire portion in contact with the brittle material substrate is a diamond film, it is possible to make the thickness of the leading end portion of the cutting edge and the ridgeline thin. Further different from the ion beam grinding, since both sides of the ridgeline can be ground under the same conditions, the thickness of the grinding surface on both sides of the grinding can be equal, and it is easy to make the ridgeline linear in side view And reduce the deviation of the radius of curvature formed by the ridge line.

In addition, the particle size of the abrasive material disclosed here is an example, and it is not limited to this particle size.

[Example]

Next, the pre-polishing state and the post-polishing state of the scribe wheel of the present invention will be described using the example and the comparative example of FIG. 5. Here, the apex angle α3 after finishing the scribe wheel is set to 140 °. The apex angle of the scribing wheel substrate is 100 °, and a diamond film is formed thereon. Moreover, the angle α1 of the leading edge of the blade before grinding was 100 °, and in the rough grinding, the comparative example was 110 °, and the example was 130 °. Therefore, the difference θ1 between α1 and α2 is 30 ° in the embodiment, 10 ° in the comparative example, and the difference θ2 between α2 and α3 is 10 ° in the embodiment, and 30 ° in the comparative example. That is, θ1> θ2 in the example, and θ1 <θ2 in the comparative example. In addition, the pressing amount of the grindstone at the time of finishing grinding is set to be constant, and the apex angle α3 after finishing finishing grinding is all ground to 140 °. At this time, the polishing width w is about 15 μm in the comparative example, and about 30 μm in the example. The larger the grinding width in the finishing grinding, the larger the contact area with the grinding stone and the smaller the load on the grinding stone. Therefore, after using the grinding stone, the necessary time for correcting the grinding stone is shortened. For example, in the comparative example, the grindstone correction time is about 50 minutes, while in the example, it is about 10 minutes. On the other hand, there is no change in polishing time due to different polishing widths. In the case of rough grinding, since abrasive particles having a larger particle size than that of fine grinding are used, it is easy to process the tip angle to be achieved. There is no substantial difference in grinding time between the examples and the comparative examples. In the case of finishing polishing, although the polishing width is larger than the comparative example in the examples, θ2 is smaller than the comparative example and the shape of the tip does not change much, so the polishing time is not longer than that of the comparative example. In addition, the curvature radius of the ridge line is about 2.5 μm and 2 μm or more in the comparative example, and the deviation is large. On the other hand, in the examples, about 1.5 μm and 2 μm or less, they are smaller than the ridge lines. The use of such a scoring wheel enables the brittle material substrate to be cut during cutting. Improved end face accuracy.

The scoring wheel of the present invention can be used in a scoring device for scoring brittle material substrates, and is particularly effective for scoring devices for scoring thin and hard bristle material substrates.

Claims (8)

A method for manufacturing a scoring wheel. The scoring wheel is formed with a ridge line along a circumferential portion, and has a blade front end formed by the ridge line and an inclined surface on both sides of the ridge line. The scoring wheel is characterized by: The inclined surface of the base material including the ridgeline portion is rough-polished so that the vertex angle (α2) of the first abrasive surface crossing formed by the rough polishing is greater than the vertex angle (α1) of the inclined surface crossing of the diamond film The scribe wheel base material is disc-shaped, and a diamond film is formed with a ridgeline portion where the inclined surfaces intersect with each other and the inclined surfaces are formed obliquely from the side surfaces on both sides along the circumferential portion. ; The inclined surface including the ridge line portion of the first polishing surface is subjected to finishing polishing by using a grinding material having a coarser grain size and a finer grinding, and the width from the ridge line to the boundary between the rough grinding and the finishing grinding is set as The second polished surface is formed such that the vertex angle (α3) of the intersection of the second polished surface is greater than 20 μm, and the radius of curvature of the ridgeline is 2 μm or less. For example, the manufacturing method of the scoring wheel in the first scope of the patent application, wherein the difference (θ2) between the vertex angle at which the first grinding surface intersects and the vertex angle at which the second grinding surface intersects is set to be greater than 5 °, and is Below 25 °. For example, the manufacturing method of the scoring wheel in the scope of application for patent item 1, wherein the difference (θ1) between the apex angle of the inclined surface crossing of the diamond film and the apex angle of the first polishing surface crossing is greater than the first polishing surface crossing The difference (θ2) between the vertex angle and the vertex angle at which the second polishing surface intersects. For example, the method for manufacturing a scoring wheel according to item 1 of the scope of patent application, wherein the scoring wheel base material is made of cemented carbide. A scoring wheel is formed with a ridgeline along a circumferential portion, and has a blade front end composed of the ridgeline and inclined surfaces on both sides of the ridgeline, which is characterized in that: The scribing wheel substrate is formed with a blade front end portion along the circumference of the circular plate; the diamond film is formed on the blade tip surface of the scribing wheel substrate; the first grinding surface is on both sides of the edge line formed by the diamond film Grinding with a grinding material; and a second grinding surface with grinding at both sides of a ridge line at the front end of the first grinding surface; the vertex angle (α3) of the intersection of the second grinding surface is larger than the first grinding surface; The apex angle (α2) where the polishing surfaces intersect, and the polishing width from the ridgeline to the boundary between the rough polishing and the finishing polishing is set to 20 μm or more, and the curvature radius of the ridgeline is 2 μm or less. For example, the scoring wheel in the fifth scope of the patent application, wherein the difference (θ2) between the vertex angle at which the first polishing surface intersects and the vertex angle at which the second polishing surface intersects is set to be greater than 5 ° and 25 ° or less . For example, the scoring wheel of the fifth scope of the patent application, wherein the difference (θ1) between the vertex angle of the inclined surface crossing of the diamond film and the vertex angle of the first grinding surface is greater than the vertex angle of the first grinding surface crossing The difference (θ2) between the apex angles crossing the second polishing surface. For example, the scoring wheel of the scope of application for patent No. 5 wherein the scoring wheel base material is made of cemented carbide.