TWI644596B - Static charge reduction system - Google Patents

Abstract

An electrostatic charge reduction system for reducing electrostatic charge at local locations is disclosed. The electrostatic charge reduction system includes a humidifier (100), a main flow air delivery pipe (200), a main return air delivery pipe (300), and at least one time extending from a branch of the main flow air delivery pipe (200). An outflow air delivery tube (230) and at least one secondary return air delivery tube (330) extending from the main return air delivery tube (300) branch. Thus, by using a single main flow outlet duct and at least one secondary outflow air duct, an effective electrostatic charge reduction of the target area is surprisingly obtained. Furthermore, by using a pair of primary air delivery tube loops and secondary air delivery tube loops, an effective reduction in electrostatic charge for multiple target regions is surprisingly achieved.

Description

 Electrostatic charge reduction system  

This invention relates to electrostatic charge reduction techniques and, more particularly, to an electrostatic charge reduction system for electrostatic charge reduction at local locations.

In the device miniaturization market trend, increasing circuit density has forced microchip manufacturers to continuously improve product performance, reduce costs, and squeeze billions of transistors into a single chip. The trend toward miniaturization of such devices has created new challenges that have led to the need for more static neutralizing air ionizers to address critical device failures due to electrostatic discharge (ESD) damage.

It is often seen that a large number of air ionizers are installed simultaneously in a typical microchip test handler to reduce electrostatic charge generation, thereby minimizing or eliminating microchip damage due to electrostatic discharge (ESD).

To overcome the increasing cost and device sensitivity issues, more specialized air ionizers are being produced to keep up with industrial miniaturization trends to meet more stringent and demanding requirements.

However, this is still limited. The components or components used to make the microchips highly ESD sensitive become very sensitive, so that even a slight imbalance of positive and negative air ions emanating from the air ionizer will result in quality in the production of many new generation ESD sensitive devices. Problems and low yield problems.

PCT/CN/2011/076825 describes a method of mitigating electrostatic charge generation using a wet gas flow within a closed enclosure. PCT/CN/2013/087133 describes a method of using humid air to mitigate static charge generation in a spatially open localized region in the surrounding environment. When it is desired to mitigate static charge generation at several locations simultaneously, one of ordinary skill in the art can repeatedly implement the spatially open system of PCT/CN/2013/087133 based on the exact number of locations that need to be mitigated, thereby solving the problem accordingly.

However, these solutions by conventional means are inconvenient and costly. It not only takes up a lot of space, but also is affected by system site maintenance and comprehensive maintenance work.

Therefore, the cost of protecting the microchip from ESD damage is very high compared to the old days when the microchip is less susceptible to ESD damage.

Therefore, further research is needed to find a better and more feasible technical solution to address the deficiencies highlighted in the preceding paragraphs to solve the high cost challenge of microchip protection. 1

According to an aspect of the invention, there is provided an electrostatic charge reduction system comprising a humidifier, a main flow outlet duct connected to an outlet of the humidifier, wherein a branch of the main air outlet duct extends from the main duct ( At least one secondary outflow air delivery tube, wherein the secondary outflow air delivery tube directs a target location to deliver humid air from the humidifier to the target location.

Optionally, the electrostatic charge reduction system further includes a main return air delivery tube connected to the inlet of the humidifier, and at least one secondary return air delivery tube extending from the main return air delivery tube branch, wherein A secondary return air delivery tube draws the humid air back to the humidifier from the target location.

Optionally, at least one microcapillary is attached to the main flow outlet duct and directed to a particular target location.

Optionally, the main air outlet duct is connected to the main return air duct to form a closed loop or sealed at one or both ends thereof to form an open loop.

Optionally, a valve plug is provided at a tip end of the main flow air delivery tube and/or a tip of the main return air delivery tube. Optionally, the valve plug comprises a hollow cylindrical insert and an outer plug, wherein an opening is provided in the hollow cylindrical insert. The sliding of the valve plug along the length of the hollow cylindrical insertion portion may hinder or convey the humid air in the main flow outlet duct and/or the main return air duct.

Alternatively, the main flow outlet duct and the main return air duct may be the same piece of one single tubing having a cut-off wall to form a tip opening. Alternatively, the secondary outflow air delivery tube and the secondary return air delivery tube may be the same piece of one single tubing having a cut-off wall to form a distal opening.

Optionally, a plurality of secondary outflow air delivery conduits extend from the main exhaust air delivery conduit and a plurality of secondary return air delivery conduits extend from the primary return air delivery conduit.

Optionally, each of the secondary outflow air delivery conduits and the secondary outflow air delivery conduits are directed to the same target location to form a secondary air delivery loop.

Optionally, the main air outlet duct and the main return air duct are respectively provided with a plurality of openings at different positions along a length direction thereof, and at least one secondary tube is inserted into an opening of the main air outlet duct to form The secondary outflow air delivery tube and at least one secondary tube are inserted into an opening of the primary return air delivery tube to form the secondary return air delivery tube.

Optionally, an air controller is provided to cover at least one opening of the main flow outlet duct and the main return air duct. Alternatively, the air controller may be a cylindrical rotatable tube enclosing the main flow air delivery tube and the main return air delivery tube.

Optionally, a main pipe support is provided for supporting the main flow air delivery pipe and the main return air delivery pipe, wherein the main pipe support comprises a U-shaped structure having a structure for supporting parallel arrangement At least two grooves of the main air outlet pipe and the main return air delivery pipe are described. Alternatively, a plurality of grooves may be provided and the main support may be slidable.

Optionally, a secondary tube support is provided for supporting the secondary outflow air delivery tube and the secondary return air delivery tube, wherein the secondary tube support has a bottom plate and two side walls, wherein the two side walls respectively have at least A support opening for supporting the secondary outflow air delivery tube and the secondary return air delivery tube. Alternatively, the two side walls may slide towards each other on the bottom plate. Optionally, the two side walls are fixed at both ends of the bottom plate, the bottom plate is telescopic, and at least two grooves are provided on each side wall for supporting the secondary outflow air delivery pipe And the secondary return air delivery tube. Optionally, the two side walls are a wire-like structure provided with at least two grooves for supporting the secondary outflow air delivery tube and the secondary reflow Air delivery tube.

Optionally, the main air outlet duct and the main return air duct are attached to the double wall tube structure, or the secondary outflow air duct and the secondary return air duct are attached to the double wall tube structure, wherein The double wall tube structure includes a large diameter tube and a small diameter tube placed within the large diameter tube to form an external wet gas stream and an internal wet gas stream that travel in opposite directions. Optionally, the small diameter tube is slidable. Optionally, the annular plate is attached to the mouth of the double wall tube structure.

Optionally, the humidifier comprises a hollow cylindrical chamber, a moisture generator disposed at the bottom of the hollow cylindrical chamber for generating a continuous wet air flow, and the moisture generator and the mainstream a suction fan between the air delivery pipes, the suction fan forming a spiral air flow of the continuous wet air flow and the intake air flow, the spiral air flow spiraling toward the main flow air delivery pipe, thereby eliminating the hollow cylinder Water droplets in the exit region of the chamber collect or condense. Optionally, the humidifier may further comprise an inlet tube attached to the hollow cylindrical chamber to feed the intake air stream.

Optionally, the hollow cylindrical chamber comprises a vertical cylindrical lower chamber and a tapered upper chamber attached to the top of the vertical cylindrical lower chamber, the main air outlet tube being attached to the chamber The tapered upper type chamber is placed, and the suction fan is placed in the vertical cylindrical lower chamber.

Optionally, the hollow cylindrical chamber comprises a vertical cylindrical lower chamber and an outlet flow path extending from the vertical cylindrical lower chamber branch, the main flow air delivery tube being attached to the outlet flow passage, And the suction fan is placed in the outlet flow channel.

Optionally, the suction fan is a centrifugal fan fixedly attached to the disc, the disc having a central hole to allow the continuous wet airflow and the intake airflow to enter the centrifugal fan Thereby mixing the continuous wet gas stream and the feed gas stream to form the spiral gas stream.

Optionally, the centrifugal fan comprises a drum-shaped housing, the middle of the drum-shaped housing is provided with fins, and the drum-shaped housing further comprises an air outlet, the air outlet is tangent parallel to the air outlet Or releasing the mixed gas of the continuous wet gas flow and the intake gas flow in a direction inclined by a small angle with respect to the tangential line to form the spiral gas flow along a circumferential direction of an inner wall of the hollow cylindrical chamber.

Optionally, the disc is fixedly attached to an inner wall of the hollow cylindrical chamber, wherein fins of the drum-shaped housing are located directly above the central aperture of the disc.

Optionally, the suction fan is inclined from the horizontal axis upward or downward with respect to the horizontal axis by 0 degrees to 80 degrees, preferably 5 degrees to 75 degrees, more preferably 25 degrees to 60 degrees, and most preferably from 35 degrees to 50 degrees. degree.

Optionally, the flow angle of the spiral airflow increases as its spiral rises, and as the spiral airflow spirals up until reaching the topmost portion of the hollow cylindrical chamber, the flow angle rises from a minimum of 5 degrees to Up to 80 degrees.

By using a single main exhaust air delivery tube and at least one secondary outflow air delivery tube, an effective reduction in electrostatic charge of the target area is surprisingly obtained. Furthermore, by using a pair of primary air delivery tube loops and secondary air delivery tube loops, an effective reduction in electrostatic charge for multiple target regions is surprisingly achieved.

100‧‧‧ humidifier

110‧‧‧Export

120‧‧‧ entrance

2‧‧‧ hollow cylindrical chamber

21‧‧‧Moisture Generator

22‧‧‧Inlet pipe

24‧‧‧Vertical cylindrical lower chamber

25‧‧‧Tear-cone upper chamber

26‧‧‧Bend pipe

200‧‧‧mainstream air delivery pipe

210, 310‧‧‧ valve plug

220‧‧‧ outflow opening

230‧‧‧ outflow air duct

3‧‧‧ disc

31‧‧‧Central hole

300‧‧‧Main return air duct

320‧‧‧Return opening

330‧‧‧ return air ducts

4‧‧‧ suction fan

42‧‧‧ outlet

43‧‧‧Central location

400, 400’, 400” ‧ ‧ tube support

410, 410’, 410”‧‧‧ bottom plate

420, 420', 420" ‧ ‧ side walls

440, 440’ ‧ ‧ support opening

5‧‧‧ hollow cylindrical chamber

51‧‧‧Vertical cylindrical lower chamber

52‧‧‧Export flow channel

500‧‧‧Open/close connection valve plug

520‧‧‧ hollow cylindrical insert

520‧‧‧ hollow cylindrical insert

530‧‧‧ openings

600‧‧‧Supervisor

610‧‧‧ Groove

700‧‧‧Microcapillary

800‧‧‧Air controller

900‧‧‧Double wall tube structure

910‧‧‧ ring plate

920‧‧‧ Large diameter tube

930‧‧‧Small diameter tube

L‧‧‧Lower airflow area

U‧‧‧Upstream airflow area

The exemplary embodiments of the present invention will be further described with reference to the accompanying drawings and embodiments. FIG. 1 is a schematic diagram of an open circuit of an electrostatic charge reduction system according to an embodiment of the present application; FIG. 2 is a schematic diagram according to the present application. A schematic diagram of an electrostatic charge reduction system of another embodiment; FIG. 3 is a schematic diagram of a secondary air transfer circuit of the electrostatic charge reduction system of FIG. 2; FIG. 4 is a valve plug of an electrostatic charge reduction system according to an embodiment of the present application. 5 is a schematic diagram of a mains support of an electrostatic charge reduction system in accordance with an embodiment of the present application; FIG. 6A is a schematic illustration of a first embodiment of a secondary tube support of an electrostatic charge reduction system in accordance with an embodiment of the present application. 6B is a schematic diagram of a second embodiment of a secondary tube support of an electrostatic charge reduction system in accordance with an embodiment of the present application; FIG. 6C is a third embodiment of a secondary tube support of an electrostatic charge reduction system in accordance with an embodiment of the present application. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 7 is a schematic diagram of an electrostatic charge reduction system according to still another embodiment of the present application; FIG. 8 is an empty static charge reduction system according to an embodiment of the present application. FIG. 9 is a schematic view of a humidifier of an electrostatic charge reduction system according to an embodiment of the present application; FIG. 10 is a schematic view of a centrifugal fan and a circular plate of the humidifier shown in FIG. 9; A schematic diagram of a centrifugal fan generating a spiral flow along the circumference of the inner wall of the hollow cylindrical chamber; FIG. 12 is a schematic cross-sectional view of the humidifier shown in FIG. 9; FIG. 13 is a rotation effect of generating the spiral flow Schematic diagram of a gas flow condition; FIG. 14 is a schematic diagram of a humidifier of an electrostatic charge reduction system according to another embodiment of the present application; FIG. 15 is a schematic diagram of a double wall tube structure of an electrostatic charge reduction system according to an embodiment of the present application. Figure 16 is a schematic illustration of the annular plate of the double-walled tube structure shown in Figure 15; Figure 17 is a schematic illustration of a preferred embodiment of the primary/secondary outflow air delivery tube and the primary/secondary return air delivery tube.

The various advantages, aspects, and novel features of the invention, as well as the illustrated embodiments. However, the various embodiments of the invention set forth herein are by way of example and not limitation. In the figure below, the arrows represent the direction of the airflow.

1-3 illustrate an electrostatic charge reduction system in accordance with an embodiment of the present invention. As shown in FIGS. 1-3, the electrostatic charge reduction system includes a humidifier 100, a main flow air delivery pipe 200 connected to an outlet 110 of the humidifier 100, and an inlet connected to the humidifier 100. The main return air delivery tube 300 of 120.

The tip of the main air outlet duct 200 may be affixed to the valve plug 210, and the tip of the main return air duct 300 may also be affixed to the valve plug 310, thereby forming an open or closed type Loop wet air flow delivery system. However, in another embodiment of the invention, the main flow air delivery duct 200 and the main return air delivery duct 300 may be formed by a closed loop tube. In another embodiment of the present invention, the main air outlet duct 200 and the distal end of the main return air duct 300 are respectively sealed to form an open loop.

According to a preferred embodiment of the present invention as shown in Figure 17, the main flow air delivery tube 200 and the main return air delivery tube 300 may be the same tube having a cut-off wall to form a distal opening. (the same piece of one single tubing). The flow of wet air through the tip opening acts as an electrostatic charge that attenuates or reduces electrostatic charge to reduce moisture flow.

As shown in FIG. 2, the main air outlet duct 200 and the main return air duct 300 may be disposed in parallel on the same side of the humidifier 100. Further, the main flow outlet duct 200 is provided with a plurality of outflow openings 220 at different positions along its length direction. At the same time, the main return air delivery pipe 300 is provided with a plurality of return openings 320 at different positions along its length direction. A secondary tube is inserted into an outflow opening 220 to form a secondary outflow air delivery tube 230. The secondary outflow air delivery tube 230 is directed to the target area to deliver humid air from the humidifier 100 to the target area, thereby attenuating or reducing electrostatic charges generated in the target area. A secondary tube is inserted into a return opening 320 to form a secondary return air delivery tube 330. The secondary return air delivery pipe 330 is directed to the same target area to draw humid air from the target area to return to the humidifier 100. As shown in FIG. 3, the ends of the secondary outflow air delivery pipe 230 and the secondary return air delivery pipe 330 are directed to the same target area to form an open secondary air delivery circuit.

In one embodiment of the invention, the number of the outflow opening 220 and the return opening 320 may be the same or different. Therefore, the number of pairs of the secondary outflow air delivery pipe 230 and the secondary return air delivery pipe 330 can be determined according to actual needs.

However, in a simplified embodiment of the invention, only one of the main flow outlet duct 200 and one secondary outflow duct 230 are provided without providing any of the main return air duct 300 and the secondary recirculation. The air delivery tube 330 is for special use.

In some embodiments, the return opening 320 and the outflow opening 220 may be incisions made in the main flow outlet duct 200 and the main return air duct 300, respectively. In some embodiments, glue, adhesive, aggregating agent, seal or other sealing element may be provided for sealing the secondary outflow air delivery tube 230 into the outflow opening 220, or the secondary return air delivery A tube 330 is inserted into the return opening 320.

In another embodiment, the main flow air delivery duct 200 may be a main pipe having a plurality of branched tubings, which means the main air outlet duct 200 and the secondary outflow air duct 230 Can be molded in one piece. Similarly, the primary return air delivery tube 300 can be fabricated in the same manner.

According to a preferred embodiment of the invention, the secondary outflow air delivery tube 230 and the secondary return air delivery tube 330 may be the same tube having a cut-off wall to form a distal opening. According to a more preferred embodiment, the main flow air delivery duct 200 and the main return air delivery duct 300 may be the same tube having a cut-off wall to form a distal opening, and the secondary outflow air The delivery tube 230 and the secondary return air delivery tube 330 can be the same tube having a cut-off wall to form a distal opening. Thus, the flow of moist air through the distal opening acts as an electrostatic charge that attenuates or reduces the electrostatic charge to reduce the flow of moisture.

FIG. 4 shows a preferred embodiment of the valve plugs 210, 310. As shown in FIG. 4, the OPEN/CLOSE connection valve plug 500 has a hollow cylindrical insertion portion 520 and an outer flat plug 510. The outer plug plug 510 may be a cylindrical bottom plate having a diameter larger than a diameter of the main flow outlet duct 200 and the main return air duct 300. Of course, the outer plug plug 510 can also be other shapes, such as square, rectangular, circular, elliptical or any other shape. The diameter of the hollow cylindrical insertion portion 520 is slightly smaller than the diameters of the main flow outlet duct 200 and the main return air duct 300 so that it can be inserted into the main flow outlet duct 200 and the main recirculation The diameter of the air delivery tube 300 does not cause leakage of wet air. An opening 530 is provided in the hollow cylindrical insertion portion 520. The main flow air delivery pipe 200 and/or the main return air delivery pipe 300 may be blocked or conveyed by the sliding of the opening/closing connection valve plug 500 along the longitudinal direction of the hollow cylindrical insertion portion 520. Wet air in. In one embodiment, the opening 530 can have a square, rectangular, circular, elliptical shape or any other shape that allows wet air to flow.

In another embodiment of the invention, the valve plugs 210, 310 may be constructed by a known gas plug that does not have any openings, which means the main flow air delivery tube 200 and the main reflow. The air delivery tube 300 can be completely sealed.

As shown in FIG. 2, a plurality of secondary tube supports 400 may be provided for supporting the secondary outflow air delivery tube 230 and the secondary return air delivery tube 330.

A preferred embodiment of the secondary tube holder 400 is illustrated in Figures 6A-6C. As shown in FIG. 6A, the secondary tube support 400 has a bottom plate 410 and two side walls 420 that can slide toward each other on the bottom plate 410. As shown in FIG. 6A, the two side walls 420 each have at least one support opening 440 for supporting the secondary outflow air delivery tube 230 and the secondary return air delivery tube 330. Alternatively, the support opening 440 may be a circular hole, an elliptical groove or an opening of any shape that can receive and accommodate the secondary outflow air delivery tube 230 and the secondary return air delivery tube 330. As shown in FIG. 6B, the secondary tube support 400' has a bottom plate 410' and two side walls 420', the two side walls 420' are fixed to the bottom plate 410', and the bottom plate 410' is telescopic . At least two grooves 440' are provided in each of the side walls 420' for supporting the secondary outflow air delivery pipe 230 and the secondary return air delivery pipe 330. The secondary outflow air delivery tube 230 and the secondary return air delivery tube 330 are flexible so that they can be moved from one recess to the other to adjust the secondary outflow air delivery tube 230 and the secondary return air The height of the delivery tube 330.

As shown in FIG. 6C, the secondary tube support 400" has a bottom plate 410" and two side walls 420". The bottom plate 410" is telescopic, and the bottom plate 410" and the two side walls 420" have In the linear structure, the side wall 420" may be at least two grooves 440" formed by lines. The secondary outflow air delivery tube 230 and the secondary return air delivery tube 330 can be inserted into the grooves and moved from one groove to the other to support and adjust its height.

Of course, in another embodiment of the present invention, a simple clipper may be employed as the secondary tube holder 400 that clamps the secondary outflow air delivery tube 230 and the secondary return air delivery tube 330.

In a preferred embodiment, a main pipe support 600 can also be provided for supporting the main flow air delivery pipe 200 and the main return air delivery pipe 300. FIG. 5 shows a preferred embodiment of the main support 600. As shown in FIG. 5, the main pipe support 600 has a U-shaped structure having at least two of the main flow air delivery pipe 200 and the main return air delivery pipe 300 for supporting the parallel arrangement. Groove 610. Alternatively, a plurality of grooves 610 may be provided such that the main flow-out air delivery pipe 200 and the main return air delivery pipe 300 disposed in parallel may be supported parallel to each other and at a distance. In the present embodiment, the main pipe support 600 is slidable along the longitudinal direction of the main flow air delivery pipe 200 and the main return air delivery pipe 300.

In the preferred embodiment illustrated in FIG. 8, an air controller 800 may be provided to cover at least one of the outflow openings 220 on the main flow outlet duct 200. Preferably, another air controller 800 may be provided to cover at least one of the return openings 320 on the main return air delivery tube 300. Additionally, the air controller 800 can be a cylindrical rotatable tube mounted (eg, wrapped, attached, adhered, etc.) on the main flow air delivery tube 200 and the main return air delivery tube 300. Thus, the electrostatic charge reduction system according to the present invention can better control the moisture flow rate, thereby obtaining a finer electrostatic charge reduction target.

Alternatively, the main flow air delivery tube 200 and the main return air delivery tube 300 may be flexible and have a "swing-back" action to allow the tubes to swing back after movement. To its original location (not shown). Similarly, the secondary outflow air delivery tube 230 and the secondary return air delivery tube 330 may also be flexible and have a "swing-back" action to allow the tubes to swing back after movement. To its original location (not shown). This is useful in applications involving very high intensity process movement or process displacement where space availability is very limited.

Thus, for the same electrostatic charge mitigation target, the use of a single outflow tube with at least one outflow opening and a single return tube with at least one recirculation opening arranged in parallel can surprisingly achieve the same effect as multiple micro air ionizer units. .

7 is a schematic diagram of an electrostatic charge reduction system in accordance with yet another embodiment of the present application. As shown in Figure 7, a plurality of microcapillary tubes 700 are attached to the main flow outlet duct 200 and directed to a particular target location, and no return loops are used to accommodate the particular application of providing additional electrostatic charge mitigation. In another embodiment of the invention, a plurality of microcapillary tubes 700 may be attached to the main return air delivery tube 300 to suit a particular application.

In the preferred embodiment illustrated in FIG. 15, one of the main flow outlet ducts 200 and one of the main return air ducts 300 can be attached to the double wall duct structure 900. In another preferred embodiment shown in FIG. 16, two of said main flow air delivery ducts 200 and one of said main return air delivery ducts 300 are attached to a double walled tubular structure 900. In still another preferred embodiment, two of said secondary outflow air delivery tubes and one of said secondary return air delivery tubes are attached to a double walled tubular structure 900.

As shown in Figure 15, the double wall tube structure 900 includes a large diameter tube 920 and a small diameter tube 930 disposed within the large diameter tube 920 to form an external wet gas stream and an internal wet gas stream. The external wet airflow in the outer airflow path and the inner wet airflow in the inner airflow path travel in opposite directions. The main flow outlet duct 200 is attached to an opening mouth in the external air flow path, and the main return air duct 300 is attached to an open mouth in the internal air flow path. This unique wet air flow design is ideal for electrostatic charge removal applications in local locations.

Preferably, the small diameter tube 930 is slidable to allow for a finer control of the amount and strength of the wet gas stream, thereby achieving more specific electrostatic charge mitigation goals.

In the preferred embodiment illustrated in FIG. 16, the dual wall tube structure 900 further includes an annular plate 910. The annular plate 910 is attached to the open mouth of the outer airflow path of the double walled tubular structure 900. Two of the main flow outlet ducts 200 are attached to the annular plate 910. The annular plate 910 allows the humid air to travel a greater distance inwardly to cover a wider area before it is drawn into the external wet airflow. The primary return air delivery tube 300 is attached to an internal airflow path formed by a small diameter tube 930 placed in the center of the large diameter tube 920.

In the present invention, the humidifier 100 may be any known humidifier on the market. However, in a preferred embodiment of the invention, with reference to Figures 9-13, a special humidifier is provided.

As shown in FIG. 9, the humidifier 100 includes a hollow cylindrical chamber 2, a moisture generator 21 disposed at the bottom of the hollow cylindrical chamber 2 for generating a continuous wet air flow, and the moisture a suction fan 4 between the generator 21 and the main flow outlet air duct 200, the suction fan 4 forms a spiral air flow of the continuous wet air flow and the intake air flow, the spiral air flow is sent toward the main flow air The tube 200 is spirally raised to eliminate the accumulation or condensation of water droplets in the exit region of the hollow cylindrical chamber 2.

The humidifier 100 may further include an inlet pipe 22 fed into the intake air stream, and the inlet pipe 22 may be the main return air delivery pipe 300 or other inlet pipes. It depends on the actual needs.

We have found that, as shown in FIG. 9, the mixed flow of the continuous wet gas stream and the inlet gas stream is created in a spiral flow pattern along the inner wall of the hollow cylindrical chamber 2, and then from the lower gas flow region L to the upper portion. The airflow region U spirally flows upward, and then flows toward the main flow air delivery pipe 200 at the upper end of the hollow cylindrical chamber 2, the outlet airflow region of the hollow cylindrical chamber 2, and the hollow cylindrical chamber 2 The accumulation or condensation of water droplets on the inner wall will surprisingly disappear.

As shown in Fig. 9, the suction fan 4 is a centrifugal fan fixedly attached to a disc 3 having a central hole 31 therein to allow the continuous wet air flow and the advance A gas stream is passed through the centrifugal fan to mix the continuous wet gas stream and the feed gas stream to form the spiral gas stream. The humid air generated by the moisture generator 21 is sucked up by the suction fan 4 at a position around a central portion inside the hollow cylindrical chamber 2 and passed through the suction fan 4.

The centrifugal fan 4 can be any type of centrifugal fan on the market. Preferably, the centrifugal fan can be separately disposed at a central region inside the hollow cylindrical chamber 2, so that the disc 3 can be omitted.

In an embodiment, the centrifugal fan 4 located on the disc 3 can be placed flat as shown in FIG. In another embodiment, the centrifugal fan can be tilted by tilting the disc 3, which can be tilted at a suitable angle with respect to the horizontal line shown by the AA' in Figure 13, for use in the present invention. Provide more flexible design. The tilt angle may be inclined from the horizontal line by 0 to 80 degrees, or from the horizontal line by 0 to 80 degrees. Alternatively, the tilt angle may be inclined from the horizontal line by 5 degrees to 75 degrees, or from the horizontal line by 5 degrees to 75 degrees. Preferably, the tilt angle may be inclined from the horizontal line by 25 degrees to 60 degrees, or from the horizontal line by 25 degrees to 60 degrees. Most preferably, the angle of inclination may be inclined from the horizontal line by 35 degrees to 50 degrees, or from the horizontal line by 35 degrees to 50 degrees.

In the present application, the hollow cylindrical chamber 2 may be of any cylindrical shape. Figure 9 shows a preferred arrangement of the hollow cylindrical chamber 2. As shown in FIG. 9, the hollow cylindrical chamber 2 includes a vertical cylindrical lower chamber 24 and a tapered upper chamber 25 attached to the top of the vertical cylindrical lower chamber 24. As shown in FIG. 9, the washing fan 4 is disposed at the center of the vertical cylindrical lower chamber 24. As shown in Fig. 9, the accumulation or condensation of water droplets on the inner wall of the inclined cone type upper chamber 25 and the bent pipe 26 of the main flow air supply pipe 200 surprisingly disappears.

The suction fan 4 is placed between the moisture generator 21 at the bottom of the vertical cylindrical lower chamber 24 and the outlet region at the top, and the gas flows directly to the inner wall at an unexpected 0 degree in the notch. It is technically unique and non-obvious to create a spiral flow as shown in FIG.

Figure 10 is a schematic illustration of a centrifugal fan and disk of a humidifier in accordance with yet another embodiment of the present invention. As shown in Figure 10, the centrifugal fan comprises a drum-shaped housing. The drum-shaped casing is provided with fins 41 at its central portion 43. The drum housing further includes an air outlet 42. The air outlet 42 releases the mixed gas of the continuous wet airflow and the intake air flow in a direction parallel to a tangent line at the air outlet 42 or a small angle with respect to the tangent line so as to be along the hollow cylinder The spiral flow is formed in the circumferential direction of the inner wall of the chamber 2. As shown in FIG. 10, the disc 3 is fixedly attached to the inner wall of the hollow cylindrical chamber 2, wherein the fins 41 of the drum-shaped housing are located at the central hole 31 of the disc 3. Directly above. Of course, the centrifugal fan and disc of the present invention can also be provided in any other manner as long as it is capable of generating a spiral flow.

As shown in FIG. 11, the centrifugal fan 4 shown in FIG. 10 can generate a spiral flow in the circumferential direction of the inner wall of the hollow cylindrical chamber 2. The flow angle of the spiral gas flow increases as its helix rises, and as the spiral gas flow spirals up to the top of the hollow cylindrical chamber 2, the flow angle rises from a minimum of 5 degrees to a maximum of 80 degree.

Figure 13 is a schematic illustration of gas flow conditions for generating a rotational effect of the spiral gas flow. As shown in Fig. 13, when the airflow direction is blown from the center point A in any direction, no spiral airflow is generated. Referring further to Fig. 13, when the airflow direction is blown from point B to point 0 and from point B to point 0', no spiral airflow is generated.

However, for example, the airflow generates a spiral based on the following conditions: 1) the direction of the airflow from point B to point 1; 2) the direction of the airflow from point B to point 2; 3) the direction of the airflow from point B to point 3.

Therefore, a spiral flow is generated in parallel with the tangent of the centrifugal fan or at a small angle to the tangent of the centrifugal fan, thereby forming a spiral flow in the circumferential direction of the inner wall of the hollow cylindrical chamber 2. The flow angle of the spiral flow of the spiral along the circumferential direction of the inner wall of the hollow cylindrical chamber 2 is 5 to 80 degrees, preferably 25 to 60 degrees, and most preferably 35 to 50 degrees.

Figure 14 is a schematic illustration of a humidifier of an electrostatic charge reduction system in accordance with yet another embodiment of the present invention. As shown in FIG. 14, the humidifier includes a hollow cylindrical chamber 5, a moisture generator 21 disposed inside the hollow cylindrical chamber 5 for generating a continuous wet air flow, attached to the The hollow cylindrical chamber 5 is connected to an outlet pipe (not shown) of the hollow cylindrical chamber 5 with an inlet pipe 22 for inputting an intake air flow, and between the moisture generator 21 and the outlet pipe a suction fan 4, the suction fan 4 forms a spiral flow of the continuous wet gas stream and the inlet gas stream, the spiral gas stream spiraling toward the outlet pipe, and surprisingly, the spiral gas flow can Water droplets are collected or condensed in the exit region of the hollow cylindrical chamber 5. The intake air flow may be return air or ambient air, depending on actual needs.

As shown in FIG. 14, the hollow cylindrical chamber 5 includes a vertical cylindrical lower chamber 51 and an outlet flow passage 52 extending from the vertical cylindrical lower chamber 51. The outlet tube is attached to the outlet flow passage 52. In the present embodiment, the suction fan 4 is placed in the outlet flow path 52. As shown in Fig. 15, the accumulation and condensation of water droplets in the outlet flow path 52 above the blower 4 surprisingly disappeared. Likewise, the accumulation and condensation of water droplets in the outlet tube attached to the outlet flow passage 52 surprisingly disappears. The working principle has been described in the above embodiments, and therefore will not be described here.

In the present embodiment, the centrifugal fan 4 is fixedly attached to the disc 3 and perpendicular to the axis of the outlet flow passage 52. In another embodiment, the centrifugal fan 4 can be arranged in other orientations. The suction fan 4 of the present invention can be constructed with reference to the above embodiment, and will not be described again here.

In one embodiment of the invention, the outlet flow passage 52 is removable and replaceable, thereby making the application of the present invention more flexible.

Although FIG. 14 shows only one outlet flow passage 52, those skilled in the art will recognize that more than one outlet flow passage 52 can branch from the vertical cylindrical lower chamber 51 to provide a more attractive commercial advantage. Multi-flow outlet.

The inventors do not know why it is surprising that the water droplets on the inner wall of the hollow cylindrical chamber and the inner wall of the outlet tube are gathered or condensed by merely providing a spiral air flow inside the hollow cylindrical chamber. This may be due to the fact that setting the suction fan or adjusting the angle of the suction fan will cause the spiral air flow to have a centrifugal effect, which will cause the larger and heavier water droplets to spiral outward and collide with the wall to remain on the wall surface. This process will continue until the spiral airflow gradually spirals upward toward the air outlet of the top end of the hollow cylindrical chamber, causing the larger and heavier water droplets to gradually decrease and disappear.

The airflow design of the present invention does not only allow the humidifier device to achieve a non-condensing wet air flow, but it also requires a simple design to introduce additional equipment (such as a heater) in the airflow system, resulting in the need to retrofit the entire humidifier device. The problem of condensation is solved, so it is more convenient for maintenance and the performance is superior.

The design of the present invention not only simplifies and minimizes the product components required to form a spiral airflow, but also shortens the height of the hollow cylindrical chamber by effectively optimizing the spiral process, thereby reducing material loss and saving equipment space, which is generally limited in space. Small production equipment is very advantageous.

The present invention can effectively eliminate the water droplets on the inner wall of the hollow cylindrical chamber and the inner wall of the outlet pipe by a simple and unconventional method by providing a suction fan inside the hollow cylindrical chamber. Gather or condense.

Claims (19)

An electrostatic charge reduction system, comprising: a humidifier, a main flow air delivery pipe connected to an outlet of the humidifier, and a main return air delivery pipe connected to an inlet of the humidifier, wherein The main air outlet duct branch extends from the at least one secondary outflow air duct, and the at least one secondary return air duct extends from the main return air duct branch; wherein the secondary outflow air duct is guided to the target position Transporting humid air from the humidifier to the target location, and the secondary return air delivery tube absorbs the humid air back to the humidifier from the target location; air delivery in the main flow a valve plug is disposed at a distal end of the tube and/or a distal end of the main return air delivery tube; the valve plug includes a hollow cylindrical insertion portion and an outer flat plug; an opening is provided in the hollow cylindrical insertion portion through the valve The sliding of the plug along the length direction of the hollow cylindrical insertion portion can block or convey the main flow air delivery pipe and/or the main return air delivery pipe Moist air. The electrostatic charge reduction system of claim 1, wherein at least one microcapillary is attached to the main flow outlet duct and directed to a particular target location. The electrostatic charge reduction system of claim 2, wherein the main flow outlet duct is coupled to the main return air duct to form a closed loop or sealed at one or both ends thereof to form an open loop. The electrostatic charge reduction system of claim 1, wherein a plurality of secondary outflow air delivery conduits extend from the main exhaust air delivery conduit and a plurality of secondary return air delivery conduits from the primary return air delivery conduit The upper branch extends. The electrostatic charge reduction system of claim 4, wherein each of the pair of the secondary outflow air delivery conduits and the secondary outflow air delivery conduits are directed to the same target location to form a secondary air delivery loop. The electrostatic charge reduction system of claim 5, wherein the main flow air delivery tube and The main return air delivery pipe is respectively provided with a plurality of openings at different positions along its length direction, and at least one secondary pipe is inserted into one opening of the main flow air delivery pipe to form the secondary outflow air delivery pipe and at least one secondary A tube is inserted into an opening of the main return air delivery tube to form the secondary return air delivery tube. The electrostatic charge reduction system of claim 6, wherein an air controller is provided to cover at least one opening of the main flow outlet duct and the main return air duct. The electrostatic charge reduction system of claim 7, wherein the air controller is a cylindrical rotatable tube that wraps the main flow air delivery tube and the main return air delivery tube. The electrostatic charge reduction system of claim 1, wherein a main pipe support is provided for supporting the main flow air delivery pipe and the main return air delivery pipe, wherein the main pipe support comprises a U-shaped structure, the U The shaped structure has at least two grooves for supporting the main flow outlet duct and the main return air duct disposed in parallel. The electrostatic charge reduction system of claim 1, wherein a secondary tube support is provided for supporting the secondary outflow air delivery tube and the secondary return air delivery tube, wherein the secondary tube support has a bottom plate and two side walls Wherein the two side walls each have at least one support opening for supporting the secondary outflow air delivery tube and the secondary return air delivery tube. The electrostatic charge reduction system of claim 1, wherein the main flow air delivery pipe and the main return air delivery pipe are attached to a double wall pipe structure, or the secondary outflow air delivery pipe and the secondary return air The delivery tube is attached to a double wall tube structure; the double wall tube structure includes a large diameter tube and a small diameter tube placed within the large diameter tube to form an external wet gas stream and an internal moisture gas stream traveling in opposite directions. The electrostatic charge reduction system of claim 1, wherein the main flow outlet duct and the main return air duct belong to the same tube having a cutting wall to form a distal opening, and/or the secondary outflow air The delivery tube and the secondary return air delivery tube belong to a cutting wall The same tube that forms the distal opening. The electrostatic charge reduction system of any one of claims 1 to 12, wherein the humidifier comprises a hollow cylindrical chamber disposed at a bottom of the hollow cylindrical chamber for generating a wet stream of continuous wet air flow a gas generator, and a suction fan between the moisture generator and the main flow air delivery pipe; a mixed air flow of the continuous wet gas flow and the intake air flow along the hollow cylindrical chamber The wall is created in a spiral flow pattern and then spirally upwardly flowing from the lower gas flow region to the upper gas flow region, and then to the outlet of the hollow cylindrical chamber when flowing toward the main flow air delivery pipe at the upper end of the hollow cylindrical chamber The accumulation or condensation of water droplets on the gas flow region and the inner wall of the hollow cylindrical chamber will surprisingly disappear. The electrostatic charge reduction system of claim 13, wherein the suction fan is a centrifugal fan fixedly attached to a disk having a central aperture therein to allow the continuous wet air flow and The intake stream enters the centrifugal fan to mix the continuous wet gas stream and the feed gas stream to form the spiral gas stream. The electrostatic charge reduction system of claim 14, wherein the centrifugal fan comprises a drum-shaped housing, and the drum-shaped housing is provided with a fin in a middle portion, the drum-shaped housing further comprising an air outlet, the air outlet Release the mixed gas of the continuous wet gas stream and the feed gas stream in a direction parallel to the tangent at the gas outlet or at a slight angle to the tangent to thereby follow the inner wall of the hollow cylindrical chamber The spiral flow is formed in the circumferential direction. The electrostatic charge reduction system of claim 15, wherein the disk is fixedly attached to an inner wall of the hollow cylindrical chamber, wherein the fin of the drum-shaped housing is located at the disc Directly above the central aperture; the suction fan is inclined from 0 to 80 degrees from the horizontal axis with respect to the horizontal axis. The electrostatic charge reduction system of claim 16, wherein a flow angle of the spiral flow increases as its helix rises, as the spiral flow rises spirally until reaching the hollow At the very top of the cylindrical chamber, the flow angle increases from a minimum of 5 degrees to a maximum of 80 degrees. The electrostatic charge reduction system of claim 13, wherein the hollow cylindrical chamber comprises a vertical cylindrical lower chamber and a tapered upper chamber attached to a top of the vertical cylindrical lower chamber, The main air outlet duct is attached to the tapered cone type upper chamber, and the suction fan is placed in the vertical cylindrical lower chamber. The electrostatic charge reduction system of claim 13, wherein the hollow cylindrical chamber comprises a vertical cylindrical lower chamber and an outlet flow path extending from the vertical cylindrical lower chamber branch, the main flow air delivery A tube is attached to the outlet flow channel and the suction fan is placed in the outlet flow channel.