TWI559559B - Manufacture of solar cells - Google Patents
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- TWI559559B TWI559559B TW103140981A TW103140981A TWI559559B TW I559559 B TWI559559 B TW I559559B TW 103140981 A TW103140981 A TW 103140981A TW 103140981 A TW103140981 A TW 103140981A TW I559559 B TWI559559 B TW I559559B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Description
本發明係有關太陽能電池之製造方法。 The present invention relates to a method of manufacturing a solar cell.
在太陽能電池之製造時,進行經由於矽基板上,將導電性電糊進行塗層,再燒成此等之時,形成可作為配線或電極等而發揮機能之導電性圖案的情況。 At the time of manufacture of a solar cell, when a conductive electric paste is coated on a ruthenium substrate, and it is baked, etc., the electroconductive pattern which can function as a wiring, an electrode, etc. can be formed.
自以往,導電性圖案的形成係從可確實且容易地形成高精細之導電性圖案之情況,經由網版印刷法而加以進行。一般而言,網版印刷法係作為使用具有如形成有所期望之導電性圖案之開口部的網版印刷版,將導電性電糊塗層於矽基板上者。 Conventionally, the formation of a conductive pattern has been carried out by a screen printing method from the case where a highly fine conductive pattern can be formed reliably and easily. In general, the screen printing method is a method in which a conductive paste is coated on a ruthenium substrate by using a screen printing plate having an opening portion forming a desired conductive pattern.
近年,為了謀求太陽能電池之高效率化及高機能化等,而要求有確實地形成更高精細之導電性圖案者。為了對應於此,在網版印刷版之開口寬度(縫隙寬度)亦有逐漸縮小之傾向。使用開口寬度(縫隙寬度)窄之網版印刷版時係成為呈可通過如此窄之開口(縫隙)地,加以採用黏度比較低之導電性電糊者。 In recent years, in order to increase the efficiency and high performance of solar cells, it has been demanded to form a finer conductive pattern. In order to cope with this, the opening width (slit width) of the screen printing plate tends to gradually decrease. When a screen printing plate having a narrow opening width (slit width) is used, it is possible to pass through such a narrow opening (slit) and to use a conductive paste having a relatively low viscosity.
但,如此黏度低之導電性電糊係從在加以塗 層於矽基板上之後,亦容易流動乃至變動(所謂,容易產生「切口」)之情況,有著在塗層後,導電性電糊之線寬則變寬,以及矽基板上之導電性電糊的厚度下降,容易產生不均一的問題。 However, such a conductive paste having a low viscosity is coated After the layer is on the ruthenium substrate, it is also easy to flow or even change (so-called "cut" is easy to occur). After the coating, the line width of the conductive paste is widened, and the conductive paste on the substrate is conductive. The thickness is reduced, which is prone to non-uniform problems.
其結果,燒成如此之導電性電糊所得到之導電性圖案亦同樣地,往往線寬變寬,以及厚度下降而成為不均一之構成。 As a result, the conductive pattern obtained by firing such a conductive paste has a structure in which the line width is widened and the thickness is lowered to have a non-uniform structure.
如此之情況係不僅單使在太陽能電池面板而可有效利用之受光面積降低,而加以鄰接形成之導電性圖案彼此則在未意圖的部位產生短路,以及容易招致電性阻抗之增加或不安定化,斷線等之故,而得到信賴性高之高效率之太陽能電池之情況係為困難。 In this case, not only the light-receiving area that can be effectively utilized in the solar cell panel but also the conductive patterns formed adjacently are short-circuited at an unintended portion, and the call impedance is easily increased or unstable. In the case of disconnection, etc., it is difficult to obtain a highly efficient solar cell with high reliability.
〔專利文獻1〕日本特開2000-247020號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2000-247020
〔專利文獻2〕日本特開2005-231294號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2005-231294
本發明係提供:確實地加以形成高精細之導電性圖案的信賴性高之太陽能電池之製造方法者。 The present invention provides a method for manufacturing a solar cell having high reliability in which a high-definition conductive pattern is reliably formed.
如此之本申請發明係作為工程(A),採用形成溶劑容納層於矽基板之至少單方之表面的一部分之工 程。以往,在關連於噴墨記錄之技術領域中,係加以提案有:於印刷對象物上形成油墨等之容納層的技術(專利文獻1及專利文獻2)。但在如此之噴墨記錄中所採用之油墨容納層係作為目的之畫像等之形成對象,隨之在施以油墨之後未完全意圖加以除去的點,明確地與在本發明之溶劑容納層加以區別者。 Thus, the invention of the present application, as the item (A), employs a part of forming a solvent accommodating layer on at least a part of the surface of the ruthenium substrate. Cheng. In the related art, the technique of forming an accommodation layer such as ink on a printing object has been proposed (Patent Document 1 and Patent Document 2). However, the ink accommodating layer used in such ink jet recording is formed as a target image or the like, and is not completely removed after the application of the ink, and is clearly combined with the solvent accommodating layer of the present invention. The difference.
本發明係作為對於上述課題付與解決之構成。 The present invention is configured as a solution to the above problems.
隨之,經由本發明之太陽能電池之製造方法(第一製造方法),係其特徵為包含下述的工程(A),(B)及(D)所成者。 Accordingly, the method for producing a solar cell according to the present invention (first manufacturing method) is characterized by comprising the following items (A), (B) and (D).
工程(A):於矽基板之至少單方之表面的一部分,形成溶劑容納層的工程 Engineering (A): Engineering for forming a solvent containing layer on at least a part of the surface of the substrate
工程(B):將包含導電性金屬粒子及溶劑之導電性電糊,呈接觸於前述溶膜容納層地進行塗層,於前述矽基板,形成導電性圖案的工程。 (B): A conductive electric paste containing conductive metal particles and a solvent is coated in contact with the solution containing layer to form a conductive pattern on the tantalum substrate.
工程(D):接著,將形成有前述導電性圖案之矽基板,交付燒成處理而燒成導電性電糊之工程。 (D): Next, the ruthenium substrate on which the conductive pattern is formed is subjected to a firing treatment to burn a conductive paste.
並且,經由另一個本發明之太陽能電池之製造方法(第二製造方法)係其特徵為包含下記工程(A),(B),(C)及(D)所成者。 Further, another method for producing a solar cell according to the present invention (second manufacturing method) is characterized by comprising the following items (A), (B), (C) and (D).
工程(A):於矽基板之至少單方之表面的一部分, 形成溶劑容納層的工程 Engineering (A): a part of the surface of at least one of the substrate, Engineering to form a solvent containing layer
工程(B):將包含導電性金屬粒子及溶劑之導電性電糊,呈接觸於前述溶劑容納層地進行塗層,於前述矽基板,形成導電性圖案的工程。 (B): A conductive electric paste containing conductive metal particles and a solvent is coated in contact with the solvent accommodating layer to form a conductive pattern on the ruthenium substrate.
工程(C):將形成有前述導電性圖案之矽基板,交付熱處理而熱分解前述溶劑容納層之至少一部分之工程。 Engineering (C): a process in which a tantalum substrate having the above-described conductive pattern is formed and subjected to heat treatment to thermally decompose at least a part of the solvent containing layer.
工程(D):接著,將形成有前述導電性圖案之矽基板,交付燒成處理而燒成導電性電糊之工程。 (D): Next, the ruthenium substrate on which the conductive pattern is formed is subjected to a firing treatment to burn a conductive paste.
經由如此之本發明之太陽能電池之製造方法係作為理想的形態,包含前述之溶劑容納層則自含有於前述導電性電糊之溶劑(對於加以含有複數之溶劑的情況,比率最大者)而言之溶劑容納量為50%以上之材料加以形成者。 The method for producing a solar cell according to the present invention is preferably a form in which the solvent accommodating layer is contained in a solvent contained in the conductive paste (the ratio is the largest when a plurality of solvents are contained). A material having a solvent content of 50% or more is formed.
經由如此之本發明之太陽能電池之製造方法係作為理想的形態,包含前述之溶劑容納層則在前述工程(D)及/或工程(C)中,經由可熱分解之材料加以形成者。 The solar cell manufacturing method according to the present invention is preferably a form in which the solvent accommodating layer described above is formed by a thermally decomposable material in the above process (D) and/or engineering (C).
經由如此之本發明之太陽能電池之製造方法係作為理想的形態,包含前述之溶劑容納層則經由熱分解溫度為500℃以下之材料加以構成者。 The method for producing a solar cell according to the present invention is preferably a form in which the solvent accommodating layer described above is formed of a material having a thermal decomposition temperature of 500 ° C or lower.
經由如此之本發明之太陽能電池之製造方法係作為理想的形態,包含自對於含有於前述導電性電糊之溶劑(對於加以含有複數之溶劑的情況,比率最大者)而言之溶劑容納量為60%以上之有機微粒子加以形成者。 The method for producing a solar cell according to the present invention is preferably a form in which the solvent storage amount is the same as the solvent contained in the conductive paste (for the case where a plurality of solvents are contained, the ratio is the largest). More than 60% of the organic microparticles are formed.
經由如此之本發明之太陽能電池之製造方法 係作為理想的形態,包含經由網版印刷法而進行在工程(B)之導電性電糊之塗層者。 Manufacturing method of solar cell via such invention As an ideal form, it includes a coating of a conductive electric paste of the engineering (B) by a screen printing method.
如根據本發明,從加以抑制經由塗層後之導電性電糊的流動乃至變動之形態變化(切口)之情況,即使作為使用以往同樣之導電性電糊,亦可得到具有較以往為良好的對比(即,在形成於基板上之線狀的導電體之橫剖面,〔基板與導電體之接觸長度(X)〕和〔導電體的高度(Y)〕之〔數值比率((Y)/(X))〕)之導電性電糊之燒結物者。 According to the present invention, it is possible to suppress the flow of the conductive paste after the coating or the morphological change (cut) of the change, even if it is used in the same manner as the conventional conductive paste. Comparison (i.e., the cross section of the linear conductor formed on the substrate, [the contact length (X) of the substrate to the conductor] and [the height (Y) of the conductor] [numerical ratio ((Y)/ (X))]) The sinter of the conductive paste.
並且,如根據本發明,從加以抑制塗層後之導電性電糊之切口的情況,即使使用較以往黏度低之導電性電糊,亦可得到具有與以往同等或較以往良好之對比的導電性電糊之燒結物者。 Further, according to the present invention, in the case of suppressing the slit of the conductive paste after the coating, even if a conductive paste having a lower viscosity than the conventional one is used, it is possible to obtain a conductive having a comparison with the conventional one or a better contrast than the conventional one. The sinter of the electric paste.
並且,如根據本發明,如上述,從加以抑制塗層後之導電性電糊之切口的情況,因可使用較以往黏度更低之導電性電糊之故,即使為開口寬度(縫隙寬度)則較以往窄之網版印刷版,亦可實現良好的網版印刷者。隨之,成為可形成以往,形成困難之細導電性圖案者。 Further, according to the present invention, as described above, from the case where the slit of the conductive paste after the coating is suppressed, since the conductive paste having a lower viscosity than the conventional one can be used, even the opening width (slit width) is used. It is also a narrower screen printing version than the previous one, and can also achieve good screen printing. Accordingly, it is possible to form a fine conductive pattern which has been formed in the past and which is difficult to form.
因而,如根據本發明,可得到細化,高精細,且良好的對比之導電性圖案者。隨之,如根據本發明,因可降低太陽能電池面板上之電極及配線等之總面積之故,可製造對於較以往受光面的面積比率高之太陽能電 池特性優越之太陽能電池者。 Thus, as in accordance with the present invention, a refined, high-precision, and well-contrast conductive pattern can be obtained. Accordingly, according to the present invention, since the total area of the electrodes, the wiring, and the like on the solar cell panel can be reduced, it is possible to manufacture solar power having a higher ratio of the area of the light receiving surface than the conventional light receiving surface. A solar cell with superior pool characteristics.
1‧‧‧矽基板 1‧‧‧矽 substrate
2‧‧‧溶劑容納層 2‧‧‧ solvent containment layer
3、3’‧‧‧導電性電糊 3, 3'‧‧‧ Conductive electric paste
圖1係顯示在本發明之太陽能電池之製造方法的溶劑容納層之理想的具體例之斜視圖。 Fig. 1 is a perspective view showing a preferred specific example of a solvent accommodating layer in the method for producing a solar cell of the present invention.
圖2係顯示在本發明之太陽能電池之製造方法的溶劑容納層之理想的具體例之剖面圖。 Fig. 2 is a cross-sectional view showing a preferred specific example of the solvent accommodating layer in the method for producing a solar cell of the present invention.
圖3係顯示在本發明之太陽能電池之製造方法的溶劑容納層之理想的具體例之剖面圖。 Fig. 3 is a cross-sectional view showing a preferred specific example of the solvent accommodating layer in the method for producing a solar cell of the present invention.
圖4係顯示本發明之概要的模式圖。 Fig. 4 is a schematic view showing an outline of the present invention.
經由本發明之太陽能電池之製造方法(第一製造方法),係其特徵為包含下述的工程(A),(B)及(D)所成者。 The method for producing a solar cell according to the present invention (first manufacturing method) is characterized by comprising the following items (A), (B) and (D).
工程(A):於矽基板之至少單方之表面的一部分,形成溶劑容納層的工程 Engineering (A): Engineering for forming a solvent containing layer on at least a part of the surface of the substrate
工程(B):將包含導電性金屬粒子及溶劑之導電性電糊,呈接觸於前述溶劑容納層地進行塗層,於前述矽基板,形成導電性圖案的工程。 (B): A conductive electric paste containing conductive metal particles and a solvent is coated in contact with the solvent accommodating layer to form a conductive pattern on the ruthenium substrate.
工程(D):接著,將形成有前述導電性圖案之矽基板,交付燒成處理而燒成導電性電糊之工程。 (D): Next, the ruthenium substrate on which the conductive pattern is formed is subjected to a firing treatment to burn a conductive paste.
並且,經由另一個本發明之太陽能電池之製造方法 (第二製造方法)係其特徵為包含下記工程(A),(B),(C)及(D)所成者。 And another method of manufacturing a solar cell according to the present invention (Second manufacturing method) is characterized by including the following items (A), (B), (C) and (D).
工程(A):於矽基板之至少單方之表面的一部分,形成溶劑容納層的工程 Engineering (A): Engineering for forming a solvent containing layer on at least a part of the surface of the substrate
工程(B):將包含導電性金屬粒子及溶劑之導電性電糊,呈接觸於前述溶劑容納層地進行塗層,於前述矽基板,形成導電性圖案的工程。 (B): A conductive electric paste containing conductive metal particles and a solvent is coated in contact with the solvent accommodating layer to form a conductive pattern on the ruthenium substrate.
工程(C):將形成有前述導電性圖案之矽基板,交付熱處理而熱分解前述溶劑容納層之至少一部分之工程。 Engineering (C): a process in which a tantalum substrate having the above-described conductive pattern is formed and subjected to heat treatment to thermally decompose at least a part of the solvent containing layer.
工程(D):接著,將形成有前述導電性圖案之矽基板,交付燒成處理而燒成導電性電糊之工程。 (D): Next, the ruthenium substrate on which the conductive pattern is formed is subjected to a firing treatment to burn a conductive paste.
在此,「包含工程(A),(B)及(D)所成」及「包含(A),(B),(C)及(D)所成」係指雖僅由舉例出之工程所成者以外,亦意味與此等工程同時,包含此等工程以外之其他的工程所成者。 Here, the words "including works (A), (B) and (D)" and "including (A), (B), (C) and (D)" mean engineering only by way of example. In addition to the achievements, it also means that, in addition to these projects, other projects other than these projects are included.
工程(A)係於矽基板之至少單方之表面的一部分,形成溶劑容納層的工程。 The process (A) is a process of forming a solvent accommodating layer on a part of at least one surface of the ruthenium substrate.
作為本發明之矽基板係理想為例如,可使用單結晶矽基板及多結晶矽基板者。對於本發明之理想之矽基板的具體例,係加以包含有例如,於基板內部具有p-n接合面之矽基板,特別理想係於成為太陽能電池單元之受光面之面側,具有n型矽層之p形矽基板。 As the ruthenium substrate of the present invention, for example, a single crystal ruthenium substrate and a polycrystalline ruthenium substrate can be used. A specific example of the substrate of the present invention includes, for example, a substrate having a pn junction surface inside the substrate, and particularly preferably a surface of the light receiving surface of the solar cell, having an n-type germanium layer. P-shaped germanium substrate.
然而,對於在本發明之矽基板,係亦包含有對於太陽能電池之機能乃至性能提升有利地作用之其他的材料乃至構成,例如,反射防止膜,具有表面粗化構造等之矽基板。 However, the substrate of the present invention also includes other materials and structures which advantageously contribute to the improvement of the function and performance of the solar cell, for example, an antireflection film having a surface roughening structure or the like.
在本發明中,溶劑容納層係指在工程(B)(詳細後述)中與加以塗層之導電性電糊接觸時,吸收加以塗層之該導電性電糊中之溶劑之至少一部分而容納的層。 In the present invention, the solvent containing layer means that at least a part of the solvent in the conductive paste to be coated is accommodated in contact with the coated conductive paste in the process (B) (described later in detail). Layer.
在本發明中,將此溶劑容納層,在工程(B)中,將所期望之導電性圖案的形成作為目的而塗層導電性電糊於矽基板時,可呈包含與塗層後之導電性電糊接觸之範圍地加以形成。 In the present invention, the solvent accommodating layer, in the engineering (B), is formed by coating the conductive conductive paste on the ruthenium substrate for the purpose of forming the desired conductive pattern. The range of the electrical paste contact is formed.
隨之,在此工程(A)中,未洩漏於矽基板全範圍而無須形成溶劑容納層,而可將矽基板之導電性電糊之接觸範圍作為對象,於矽基板之至少單方表面之一部分,形成溶劑容納層者。例如,在矽基板中,對於未加以形成有導電性圖案側的表面或範圍,以及即使作為加以形成有導電性圖案,亦未特別要求經由本發明之溶劑容納層之效果/作用之矽基板的範圍,係未有形成溶劑容納層之必要性。 Accordingly, in this process (A), the entire range of the ruthenium substrate is not leaked without forming a solvent accommodating layer, and the contact range of the conductive paste of the ruthenium substrate can be targeted, and at least one part of the unilateral surface of the ruthenium substrate Forming a solvent containing layer. For example, in the tantalum substrate, the surface or range in which the conductive pattern side is not formed, and even if a conductive pattern is formed, the effect of the solvent containing layer of the present invention is not particularly required. The range is not necessary to form a solvent containing layer.
在本發明之溶劑容納層係自對於含有於導電性電糊之溶劑(對於含有複數之溶劑之情況,係比率為最大者)而言之溶劑容納量為50%以上之材料而形成者為佳。 The solvent accommodating layer of the present invention is preferably formed from a material having a solvent content of 50% or more for a solvent contained in a conductive paste (for a case where a plurality of solvents are contained). .
在此,溶劑容納量係指因應樹脂材料之性狀,經由下記之A法或B法而算出時之構成。 Here, the solvent storage amount refers to a configuration in which the properties of the resin material are calculated by the A method or the B method described below.
A法:於聚乙烯對苯二甲酸酯(PET)製之薄膜,將要求溶劑容納量之樹脂材料,由棒塗法而以100μm之厚度塗層,再以室溫條件下乾燥此等。乾燥後,從樹脂材料剝離PET製薄膜,製作溶劑容納量測定用之試料。對於此等,測定重量(乾燥重量)。呈將此等,全體浸漬於溶劑之中,浸漬5分鐘之後,拉起,以面紙輕輕擦拭,測定重量(浸漬後重量)。將所測定之乾燥重量及浸漬後重量,導入於下記(1),算出溶劑容納量(重量%)。 Method A: A film made of polyethylene terephthalate (PET), which requires a solvent-containing resin material, is coated by a bar coating method to a thickness of 100 μm, and then dried at room temperature. After drying, the PET film was peeled off from the resin material to prepare a sample for measuring the solvent content. For this, the weight (dry weight) was measured. The whole was immersed in a solvent, immersed for 5 minutes, and then pulled up, gently wiped with a tissue paper, and the weight (weight after immersion) was measured. The measured dry weight and the weight after immersion were introduced into the following (1), and the solvent storage amount (% by weight) was calculated.
溶劑容納量(%)=(浸漬後重量-乾燥重量)/乾燥重量‧‧‧式(1) Solvent accommodation capacity (%) = (weight after immersion - dry weight) / dry weight ‧‧‧式(1)
B法:樹脂材料為有機狀微粒子,如A法,對於塗層於PET製薄膜上者則為困難之樹脂材料的情況,經由下記之方法而算出溶劑容納量。(參考:JIS K5101-13-1(第13部:吸油量-第1節:精製亞麻仁油法) The B method is a case where the resin material is an organic fine particle, such as the A method, and the resin material is difficult to be coated on a PET film, and the solvent storage amount is calculated by the method described below. (Reference: JIS K5101-13-1 (Part 13: Oil absorption - Section 1: Refined linseed oil method)
將測定試料1g,放置於測定板*1上。從量管,1次滴4、5滴溶劑而慢慢加上。此情況,以調色刀*2,將溶劑混入於試料。反覆此等,溶劑及試料的塊完成為止持續滴下。之後,1滴1滴地滴下,作為呈完全混入而反覆進行。將電糊成為滑順的硬度時,作為終點。此電糊係可未破裂,以及分散地擴張,且做為輕輕附著於測定板之程度者。呈不喪失試料地,操作者係盡最大限的努 力。 1 g of the measurement sample was placed on the measurement plate *1 . From the measuring tube, add 4 or 5 drops of solvent once and add slowly. In this case, the solvent was mixed into the sample with a palette knife *2 . This is repeated, and the solvent and the sample block are continuously dripped. Thereafter, one drop and one drop were dropped, and the mixture was carried out as it was completely mixed. When the electric paste is made into a smooth hardness, it serves as an end point. The paste can be unbroken, and dispersedly expanded, and is considered to be lightly attached to the assay plate. The operator does not lose the sample, the operator is doing his best.
依據接下來之式(2),算出溶劑容納量。 The solvent accommodation amount was calculated according to the following formula (2).
溶劑容納量(%)=滴下之溶劑量(g)/試料的重量(g)×100‧‧‧式(2) Solvent accommodation amount (%) = amount of solvent dropped (g) / weight of sample (g) × 100‧‧‧式(2)
*1測定板…玻璃板或大理石板,最低300mm×400mm之構成。 *1 Measuring plate... Glass plate or marble plate, which is composed of a minimum of 300 mm × 400 mm.
*2調色刀…附有前端為細之鋼製刀刃,長度為140~150mm、最大寬度20~30mm、最小寬度12.5mm以上之構成。 *2 Palette knife... It is equipped with a steel blade with a front end that is 140 to 150 mm long, a maximum width of 20 to 30 mm, and a minimum width of 12.5 mm.
並且,在本發明之溶劑容納層係在工程(D)及/或工程(C)(詳細後記)中,經由可熱分解之材料而形成者為佳。從此情況,溶劑容納層係可經由熱分解溫度則理想為500℃以下,特別理想為400℃以下,有機材料或無機材料而形成者。 Further, in the solvent accommodating layer of the present invention, it is preferably formed by a thermally decomposable material in the engineering (D) and/or the engineering (C) (detailed later). In this case, the solvent accommodating layer can be formed by an organic material or an inorganic material, preferably at a temperature of 500 ° C or less, particularly preferably 400 ° C or less, via a thermal decomposition temperature.
本發明之溶劑容納層係理想為例如,可經由纖維素系樹脂及丙烯酸系樹脂等而形成者。作為纖維素系樹脂之理想具體例,係例如可舉出乙基纖維素,硝化纖維素等者。另外,作為前述之丙烯酸系樹脂的理想具體例,係可舉出丙烯酸或甲基丙烯酸,及此等之(甲基)丙烯酸之酯與各種乙烯基化合物之共聚合體等。作為特別理想之丙烯酸系樹脂,係可舉出丙烯酸,甲基丙烯酸,丙烯酸甲酯,丙烯酸乙酯,丙烯腈等丙烯酸化合物,和乙酸乙烯酯,聚氯乙烯,苯乙烯等之共聚合體者。此等共聚合體係 加以交聯亦可。另外,中空狀或多孔質狀之粒子為佳。如本發明之溶劑容納層係例如,可使用「ES-960MC」(日本高松油脂公司製)、「Ultra zole」(日本Aica工業公司製)等丙烯酸系樹脂,或「Ganz Pearl」(日本Aica工業公司製),「SX868(B)(JSR公司製)等之有機微粒子而形成者。在此,對於含有於導電性電糊之溶劑(對於含有複數之溶劑之情況,係比率為最大者)而言之溶劑容納量為60%以上之材料而形成者為佳。 The solvent accommodating layer of the present invention is preferably formed, for example, by a cellulose resin, an acrylic resin or the like. Preferable specific examples of the cellulose resin include ethyl cellulose, nitrocellulose, and the like. Further, preferred examples of the acrylic resin include acrylic acid or methacrylic acid, and copolymers of the (meth)acrylic acid ester and various vinyl compounds. The acrylic resin which is particularly preferable is an acrylic compound such as acrylic acid, methacrylic acid, methyl acrylate, ethyl acrylate or acrylonitrile, and a copolymer of vinyl acetate, polyvinyl chloride, styrene or the like. Such copolymerization systems It is also possible to cross-link. Further, hollow or porous particles are preferred. For the solvent accommodating layer of the present invention, for example, "ES-960MC" (manufactured by Takatsuki Oil Co., Ltd.), "Ultra zole" (manufactured by Aica Industries, Ltd., Japan), or "Ganz Pearl" (Aica Industries, Japan) can be used. (manufactured by the company), formed by organic fine particles such as "SX868 (B) (manufactured by JSR Corporation). Here, the solvent contained in the conductive paste (the ratio is the largest when a plurality of solvents are contained) It is preferable to form a material having a solvent content of 60% or more.
在本發明中,可經由任意的方法,形成溶劑容納層於矽基板者。作為理想之形成方法,可舉出將如上述之溶劑容納層的形成材料,直接,或者將適當的溶劑乃至未溶解於分散媒而使其分散之液狀物,例如,經由印刷法,噴墨法,簾塗法,棒塗法,氣刀法及此等組合之方法等,塗層於矽基板之方法者。塗層後係因應必要,可交付除去使用於溶劑容納層之形成的溶劑或分散媒等所成之乾燥處理。此乾燥係經由放置於室溫或加熱條件(但,溶劑容納層之變質乃至分解溫度以下)之時而進行為佳。 In the present invention, the solvent accommodating layer may be formed on the ruthenium substrate by any method. An ideal method for forming the solvent is a liquid material obtained by dispersing a solvent-containing layer as described above, or by dissolving a suitable solvent or a solvent in a suitable solvent, for example, by a printing method. Method, curtain coating method, bar coating method, air knife method, and the like, the method of coating on the substrate. After the coating, the drying treatment for removing the solvent or the dispersion medium used for the formation of the solvent containing layer may be delivered as necessary. This drying is preferably carried out by standing at room temperature or under heating conditions (however, deterioration of the solvent containing layer or even decomposition temperature).
在本發明之溶劑容納層係密著於矽基板上而加以固著於矽基板上者為佳,但如能達成本發明之目的及效果,無須固著於矽基板上。例如,在本發明之溶劑容納層係可由可吸收溶劑之粉體,粒體,其他形狀之粒子加以配置於矽基板上者,包含可吸收溶劑之粒子的液狀體乃至乳化液,或可吸收溶劑之材料所成之膠體乃至黏稠體等所成者。 It is preferable that the solvent accommodating layer of the present invention is adhered to the ruthenium substrate and adhered to the ruthenium substrate. However, if the object and effect of the present invention are achieved, it is not necessary to fix it on the ruthenium substrate. For example, in the solvent accommodating layer of the present invention, the powder, the granules, and other shaped particles of the absorbable solvent may be disposed on the ruthenium substrate, and the liquid or the emulsion containing the particles of the absorbing solvent may be absorbed or absorbed. A mixture of a solvent or a viscous body.
圖1~圖3係對於在經由本發明之太陽能電池之製造方法的溶劑容納層之理想形成位置之具體例而顯示之構成。 1 to 3 are views showing a specific example of the ideal formation position of the solvent containing layer by the method for producing a solar cell of the present invention.
圖1(a)係對於本發明之理想的具體例(第一具體例)之斜視圖,圖1(b)係顯示圖1(a)之第一具體例之A-A剖面的剖面圖。 Fig. 1(a) is a perspective view showing a preferred specific example (first specific example) of the present invention, and Fig. 1(b) is a cross-sectional view showing a cross section taken along line A-A of the first specific example of Fig. 1(a).
圖2係對於本發明之理想的其他具體例(第二具體例)之剖面圖。 Fig. 2 is a cross-sectional view showing another specific example (second specific example) of the present invention.
圖3係對於本發明之理想的其他具體例(第三具體例)之剖面圖。 Fig. 3 is a cross-sectional view showing another specific example (third specific example) of the present invention.
此等圖1~圖3之具體例係均於矽基板1之單方的表面之一部分,加以複數形成溶劑容納層2者,在工程(B)中,在加以塗層導電性電糊時,於與此加以塗層之導電性電糊3接觸的部位,加以形成前述溶劑容納層2所成者。 The specific examples of these FIGS. 1 to 3 are all formed on the one surface of the single substrate of the tantalum substrate 1, and the solvent-accepting layer 2 is formed in plural. In the engineering (B), when the conductive paste is coated, The portion where the conductive electric paste 3 to be coated is in contact with the solvent-containing layer 2 is formed.
在本發明中,例如,如圖1(a)及圖1(b)所示地,可將溶劑容納層2,作為連續層而形成於矽基板1之單方的表面,將導電性電糊3塗層於此溶劑容納層2上,而形成導電性圖案者。 In the present invention, for example, as shown in FIGS. 1(a) and 1(b), the solvent accommodating layer 2 can be formed as a continuous layer on the single surface of the ruthenium substrate 1, and the conductive paste 3 can be used. The coating layer is coated on the solvent accommodating layer 2 to form a conductive pattern.
然而,溶劑容納層2係無須不洩漏於加以塗層有導電性電糊之範圍全部而形成。例如,如圖1(a)所示,即使為加以塗層有導電性電糊3’之範圍,未加以形成有溶劑容納層2之部分則亦可存在於矽基板1者。如此,作為未接觸於溶劑容納層2而加以塗層有導電性電糊 3’之部分,係典型而言,可舉出成為作為太陽能電池單元之集電極(所謂,匯流排電極)所利用情況之導電性部分者。 However, the solvent accommodating layer 2 is formed without leaking all of the coated electrically conductive paste. For example, as shown in Fig. 1(a), even if the conductive paste 3' is coated, the portion in which the solvent containing layer 2 is not formed may be present on the substrate 1. Thus, the conductive paste is coated as being not in contact with the solvent containing layer 2 The portion of 3' is typically a conductive portion that is used as a collector of a solar cell (so-called bus bar electrode).
並且,在本發明中,例如,如圖2及圖3所示,可將溶劑容納層2,斷續性地設置於矽基板1之單方的表面者。在此圖2及圖3中,溶劑容納層2則從所塗層之導電性電糊3吸收溶劑之同時,此溶劑容納層2之存在則可作為抑制導電性電糊擴散於橫方向之障壁而發揮機能者。如根據如此之具體例,可更容易地形成更高精細之導電性圖案者。 Further, in the present invention, for example, as shown in FIGS. 2 and 3, the solvent accommodating layer 2 may be intermittently provided on one surface of the ruthenium substrate 1. In FIG. 2 and FIG. 3, the solvent accommodating layer 2 absorbs the solvent from the coated conductive paste 3, and the solvent accommodating layer 2 can serve as a barrier for suppressing the diffusion of the conductive paste into the lateral direction. And play the function. According to such a specific example, a person with a higher-precision conductive pattern can be formed more easily.
然而,溶劑容納層則在同一之矽基板中加以複數形成之情況,此等複數之溶劑容納層的厚度係未必為同一,而可作為不同。另外,溶劑容納層為連續之情況,此連續的溶劑容納層之厚度係可作為部分不同者。 However, the solvent accommodating layer is formed plurally in the same substrate, and the thicknesses of the plurality of solvent accommodating layers are not necessarily the same, but may be different. Further, the solvent accommodating layer is continuous, and the thickness of the continuous solvent accommodating layer may be partially different.
作為本發明之理想其他的具體例,可舉出以點狀加以配置多數之溶劑容納層於矽基板上者,或以網目狀加以配置溶劑容納層者等。 As another preferable example of the present invention, a solvent-accommodating layer in which a large number of solvent-accommodating layers are arranged in a dot shape or a solvent-accepting layer in a mesh shape may be mentioned.
在本發明之溶劑容納層之厚度係例如,如圖1(a)及圖1(b)所示,溶劑容納層2則介入存在於矽基板1與導電性電糊3之間者之情況,理想為0.01~5.0μm、特別理想為0.1~2.0μm、更理想為0.1~1.0μm。對於溶劑容納層之厚度不足0.01μm之情況,係有無法充分抑制切口之情況,另一方面,對於超過5.0μm之情況,係從電極的斷線等之觀點,並不理想。在本發明中,例如,考慮所 塗層之導電性電糊中之溶劑量,塗層後之導電性電糊之切口程度,與導電性電糊之接觸面積等,可在上述範圍內訂定最適宜最佳的厚度者。 In the thickness of the solvent accommodating layer of the present invention, for example, as shown in FIGS. 1(a) and 1(b), the solvent accommodating layer 2 is interposed between the ruthenium substrate 1 and the conductive paste 3. The thickness is preferably 0.01 to 5.0 μm, particularly preferably 0.1 to 2.0 μm, more preferably 0.1 to 1.0 μm. When the thickness of the solvent accommodating layer is less than 0.01 μm, the slit may not be sufficiently suppressed. On the other hand, when it exceeds 5.0 μm, it is not preferable from the viewpoint of disconnection of the electrode or the like. In the present invention, for example, consider The amount of the solvent in the conductive paste of the coating, the degree of the incision of the conductive paste after the coating, the contact area with the conductive paste, and the like can be determined within the above range.
對於使所期望厚度之溶劑容納層,安定地形成於矽基板,係著眼於「形成溶劑容納層之前的矽基板之重量」,和「形成溶劑容納層之後之矽基板的重量」,和「加以形成於矽基板之溶劑容納層的面積」,和「使用於溶劑容納層之形成的塗層液的量」之關係,呈加以形成所期望厚度之溶劑容納層地,經由控制相當所形成之溶劑容納層之單位面積之溶劑容納層形成材料的塗層量之時,可容易地進行者。相當所形成之溶劑容納層之單位面積之溶劑容納層形成材料的塗層量係理想為0.5~10μg/mm2、特別理想為0.8~2.1μg/mm2。 The solvent accommodating layer having a desired thickness is stably formed on the ruthenium substrate, focusing on "the weight of the ruthenium substrate before forming the solvent accommodating layer", and "the weight of the ruthenium substrate after forming the solvent accommodating layer", and The relationship between the area of the solvent accommodating layer formed on the ruthenium substrate and the amount of the coating liquid used for forming the solvent accommodating layer is to form a solvent accommodating layer having a desired thickness, and the solvent is formed by control. When the solvent accommodating layer per unit area of the accommodating layer forms the coating amount of the material, it can be easily carried out. The coating amount of the solvent containing layer forming material per unit area of the solvent containing layer to be formed is preferably 0.5 to 10 μg/mm 2 , particularly preferably 0.8 to 2.1 μg/mm 2 .
工程(B):將包含導電性金屬粒子及溶劑之導電性電糊,呈接觸於前述溶劑容納層地進行塗層,於前述矽基板,形成導電性圖案的工程。 (B): A conductive electric paste containing conductive metal particles and a solvent is coated in contact with the solvent accommodating layer to form a conductive pattern on the ruthenium substrate.
在此工程(B)中,經由如此呈將導電性電糊接觸於溶劑容納層地進行塗層之時,該導電性電糊中之溶劑之至少一部分則作為呈吸收於溶劑容納層。 In the above process (B), when the conductive paste is brought into contact with the solvent containing layer in such a manner, at least a part of the solvent in the conductive paste is absorbed in the solvent containing layer.
導電性電糊中之溶劑係與溶劑容納層之接觸後,通常,因馬上加以吸收於溶劑容納層之故,所塗層之導電性電糊係從與溶劑容納層之接觸部附近,其黏度則上 升之同時,所塗層之導電性電糊的體積則成為減少者。 After the solvent in the conductive paste is in contact with the solvent containing layer, it is usually absorbed in the solvent containing layer, and the coated conductive paste is in the vicinity of the contact portion with the solvent containing layer. Then At the same time, the volume of the coated conductive paste is reduced.
對此,如以往技術,對於未加以形成有溶劑容納層於矽基板之情況,係未作為有依據此溶劑容納層之導電性電糊之黏度上升及體積減少。如此之情況,產生有矽基板上之導電性電糊面積之擴大及矽基板上之導電性電糊之膜厚的下降乃至不均一化(導電性電糊之切口),而無法得到細且高精細,良好之對比之導電性圖案者。 On the other hand, as in the prior art, in the case where the solvent containing layer is not formed on the tantalum substrate, the viscosity of the conductive paste having the solvent containing layer is not increased and the volume is reduced. In such a case, the enlargement of the area of the conductive paste on the substrate and the decrease in the film thickness of the conductive paste on the substrate or even the non-uniformity (the slit of the conductive paste) cannot be obtained. Fine, good contrast conductive pattern.
在工程(B)所進行之導電性電糊之塗層係網版印刷法為佳。作為導電性電糊,係包含可適用於如此之網版印刷用之導電性金屬粒子及溶劑之導電性電糊為佳。 The coating of the conductive paste prepared by the engineering (B) is preferably a screen printing method. The conductive electric paste is preferably a conductive electric paste which can be applied to such conductive metal particles and a solvent for screen printing.
作為導電性金屬粒子,係在本發明亦可使用在以往此種導電性電糊所採用者。作為理想之導電性金屬粒子,係例如,可舉出銅,鋁,鎳,鐵,銀,金,鉬,鈷,鋅等所成者。其中係特別是銅,鋁,鎳,銀為佳。上述之導電性金屬粒子係可併用兩種以上者。導電性金屬粒子係可使用球狀,片狀等之任一形狀者。 As the conductive metal particles, those conventionally used in such conductive electric pastes can also be used in the present invention. Examples of the preferred conductive metal particles include copper, aluminum, nickel, iron, silver, gold, molybdenum, cobalt, zinc, and the like. Among them, copper, aluminum, nickel and silver are preferred. The above-mentioned conductive metal particles may be used in combination of two or more kinds. As the conductive metal particles, any shape such as a spherical shape or a sheet shape can be used.
導電性金屬粒子之粒徑係例如,考慮網版印刷性等而可適宜訂定者。理想的粒徑係平均粒子徑為0.05~20μm、而特別理想為0.1~5.0μm。 The particle diameter of the conductive metal particles can be suitably determined, for example, in consideration of screen printing properties and the like. The ideal particle diameter is an average particle diameter of 0.05 to 20 μm, and particularly preferably 0.1 to 5.0 μm.
導電性電糊中之導電性金屬粒子之存在量係例如,考慮網版印刷性等而可適宜訂定者。導電性金屬粒子之存在量係對於導電性電糊100重量%而言,理想為60~95重量%、而特別理想為70~90重量%。 The amount of the conductive metal particles present in the conductive paste is suitably set, for example, in consideration of screen printing properties and the like. The amount of the conductive metal particles present is preferably from 60 to 95% by weight, particularly preferably from 70 to 90% by weight, based on 100% by weight of the conductive paste.
導電性電糊之溶劑亦在本發明亦可使用在以 往此種導電性電糊所採用者。作為理想的溶劑,係例如,可舉出二甘醇丁醚醋酸酯(BCA)、乙基乙氧乙醇乙酸酯(ECA)、丁基卡必醇(BC)、選自松油醇之有機溶劑等者。其中,特別是二甘醇丁醚醋酸酯(BCA)、乙基乙氧乙醇乙酸酯(ECA)、丁基卡必醇(BC)為佳。上述之溶劑係可併用兩種以上者。 The solvent of the conductive paste can also be used in the present invention. For those who use this type of conductive paste. Preferred examples of the solvent include diethylene glycol butyl ether acetate (BCA), ethyl ethoxyethanol acetate (ECA), butyl carbitol (BC), and organic selected from terpineol. Solvents, etc. Among them, in particular, diethylene glycol butyl ether acetate (BCA), ethyl ethoxyethanol acetate (ECA), and butyl carbitol (BC) are preferred. The solvent may be used in combination of two or more kinds.
導電性電糊中之溶劑之存在量係例如,考慮網版印刷性等而可適宜訂定者。溶劑之存在量係對於導電性金屬粒子100重量份而言,理想為0.5~30重量份、而特別理想為10~20重量份。 The amount of the solvent in the conductive paste is suitably set, for example, in consideration of screen printing properties and the like. The amount of the solvent present is preferably from 0.5 to 30 parts by weight, particularly preferably from 10 to 20 parts by weight, per 100 parts by weight of the conductive metal particles.
使用於本發明之製造方法之導電性電糊係除了上述導電性金屬粒子及溶劑以外,因應必要,可包含其他的成分者。作為如此之成分,係例如,可舉出玻璃粉末,結合劑成分,金屬化合物,其他成分(例如,安定劑,可塑劑,消泡劑,分散劑,黏度調整劑等)者。 The conductive electric paste used in the production method of the present invention may contain other components as necessary in addition to the above-mentioned conductive metal particles and solvent. Examples of such a component include glass powder, a binder component, a metal compound, and other components (for example, a stabilizer, a plasticizer, an antifoaming agent, a dispersing agent, a viscosity adjusting agent, etc.).
在本發明之導電性電糊之塗層寬度係理想為50μm以下、特別理想為45μm以下、更理想為40μm以下。對於導電性電糊之塗層寬度為超過50μm之情況,因電糊的塗層量變多,而得到充分之效果的情況則變為困難之故。 The coating width of the conductive paste of the present invention is preferably 50 μm or less, particularly preferably 45 μm or less, and more preferably 40 μm or less. When the coating width of the conductive paste is more than 50 μm, it is difficult to obtain a sufficient effect because the coating amount of the electric paste is increased.
導電性電糊之塗層厚度係例如,考慮所塗層之導電性電糊中之溶劑量,塗層後之導電性電糊之切口的程度等,可訂定適宜最佳的厚度者。 The coating thickness of the conductive paste is determined by, for example, considering the amount of the solvent in the conductive paste to be coated, the degree of the slit of the conductive paste after the coating, and the like, and the optimum thickness can be determined.
在此,導電性電糊之塗層寬度係在塗層導電 性電糊之後,以約150℃靜置約1分鐘之後進行評估時之構成。 Here, the coating width of the conductive paste is conductive in the coating After the electrophoresis, the composition was evaluated after standing at about 150 ° C for about 1 minute.
然而,導電性電糊之塗層部則在同一矽基板中複數存在之情況,此等導電性電糊之塗層部的厚度係未必為同一,而可為不同。另外,導電性電糊之塗層部則連續的情況,此連續之導電性電糊之塗層部厚度係可部分不同者。 However, the coating portion of the conductive paste may be present in plural in the same substrate, and the thickness of the coating portion of the conductive paste may not necessarily be the same, but may be different. Further, in the case where the coating portion of the conductive paste is continuous, the thickness of the coating portion of the continuous conductive paste may be partially different.
工程(C),係熱處理加以形成有經由前述工程(B)所得到之導電性圖案的矽基板之工程。 The item (C) is a process of heat-treating a tantalum substrate on which the conductive pattern obtained by the above-mentioned item (B) is formed.
此熱處理係以呈加以進行溶劑容納層的熱分解之條件而進行者為佳。作為此熱處理,係可舉出對於理想為200℃以上、600℃以下、特別理想為250℃以上、500℃以下的溫度,保持理想為5~60秒間、特別理想為10~30秒間之熱處理者。然而,具體之熱處理溫度及熱處理時間係例如,考慮形成溶劑容納層之材料種類,或溶劑容納層之厚度,導電性電糊之構成材料,或與導電性電糊之塗層量或溶劑量等之組合等,可在上述範圍內作適宜訂定者。 This heat treatment is preferably carried out under the conditions of thermal decomposition of the solvent containing layer. The heat treatment is preferably a heat treatment of preferably 200 ° C or more and 600 ° C or less, particularly preferably 250 ° C or more and 500 ° C or less, and preferably between 5 and 60 seconds, particularly preferably 10 to 30 seconds. . However, the specific heat treatment temperature and heat treatment time are, for example, the type of material forming the solvent containing layer, or the thickness of the solvent containing layer, the constituent material of the conductive paste, or the amount of coating or solvent of the conductive paste. Combinations and the like can be suitably set within the above range.
在此工程(C)之熱處理中,熱分解存在於矽基板之溶劑容納層多的部分(例如,矽基板上之溶劑容納層之總量的理想係70重量%以上、特別是90重量%以上、而特別理想係溶劑容納層之實質的全量)者為佳。但 在本發明中,在此工程(C)之後所進行之工程(D)中,從溶劑容納層之熱分解亦進行之況,在工程(C)中,未必要求熱分解溶劑容納層之全量為止。 In the heat treatment of this process (C), thermal decomposition is present in a portion of the ruthenium substrate in which the solvent accommodating layer is large (for example, the total amount of the solvent accommodating layer on the ruthenium substrate is preferably 70% by weight or more, particularly 90% by weight or more. Preferably, it is particularly desirable that the entire amount of the solvent accommodating layer is substantially the entire amount. but In the present invention, in the process (D) performed after the process (C), the thermal decomposition from the solvent containing layer is also carried out, and in the process (C), the total amount of the thermally decomposable solvent containing layer is not necessarily required. .
工程(D)係將加以形成有經由前述工程(B)所得到之導電性電糊之矽基板或經由前述工程(D)所熱處理之矽基板,交付燒成處理而燒成導電性電糊之工程。 In the process (D), the substrate of the conductive paste obtained by the above-mentioned item (B) or the substrate of the heat treated by the above process (D) is formed, and the baking process is carried out to burn the conductive paste. engineering.
工程(C)之燒成溫度以及燒成溫度係例如,考慮導電性電糊中之導電性微粒子種類,溶劑之種類等,呈可得到作為目的之燒成物地作適宜訂定。例如,使用銀電糊之情況之燒成溫度係約800℃,而使用銅電糊之情況的燒成溫度係約200~300℃為適當。 The firing temperature and the firing temperature of the process (C) are appropriately determined in consideration of the type of the conductive fine particles in the conductive paste, the type of the solvent, and the like, and the desired fired product can be obtained. For example, in the case of using a silver paste, the firing temperature is about 800 ° C, and in the case of using a copper paste, the firing temperature is about 200 to 300 ° C.
在本發明中,前述工程(B)結束之後,可開始此工程(D)者(第一製造方法)。 In the present invention, after the completion of the above-mentioned project (B), the person (D) who can start the process (the first manufacturing method) can be started.
另外,在本發明中,前述工程(C)結束之後,可開始此工程(D)者(第二製造方法)。在此,工程(D)係在對於加以形成有導電性圖案之矽基板而言之熱處理的點,與工程(C)同樣,通常,至較工程(C)為高的溫度為止,進行加熱之工程。從如此之情況,在工程(C)與工程(D)一連串的加熱操作之中,連續加以進行時係有明確地區別工程(C)之結束時點與工程(D)之開始時點者則為困難之情況,但在如此之情況,本發明係亦成立,可得到特定之效果。另外,在實施工程 (D)目的之燒成時之加熱操作的前段部分中,加以實現與工程(C)同樣之熱處理條件的情況,有著明確地區別工程(C)與工程(D)者則為困難的情況,但在如此之情況,本發明係亦成立,可得到特定之效果。 Further, in the present invention, after the completion of the above-mentioned project (C), the person (D) can be started (the second manufacturing method). Here, the item (D) is heated at the point of heat treatment for the substrate on which the conductive pattern is formed, as in the case of the item (C), usually, until the temperature higher than the temperature of the item (C) is performed. engineering. From such a situation, in the series of heating operations of engineering (C) and engineering (D), it is difficult to clearly distinguish between the end point of the project (C) and the beginning of the project (D). In this case, but in such a case, the present invention is also established, and a specific effect can be obtained. In addition, in the implementation of the project (D) In the front part of the heating operation at the time of firing, it is difficult to clearly distinguish between the engineering (C) and the engineering (D) in the case of realizing the same heat treatment conditions as the engineering (C). However, in such a case, the present invention is also established, and a specific effect can be obtained.
在本發明中,經由此工程(D)的實施,可得到加以進行塗層於矽基板之導電性電糊的燒成,和溶劑容納層之熱分解及除去,堅固地加以接合來自矽基板與導電性電糊之燒成物之導電性圖案,經由本發明之太陽能電池者。 In the present invention, by the implementation of the above process (D), firing of the conductive electric paste coated on the ruthenium substrate, thermal decomposition and removal of the solvent accommodating layer, and solid bonding from the ruthenium substrate can be obtained. The conductive pattern of the fired material of the conductive paste is passed through the solar cell of the present invention.
如根據如此之本發明,從加以抑制塗層後之導電性電糊的切口之情況,可得到具有較以往為良好之對比的導電性圖案者。即,例如,如模式性地顯示本發明之概要之圖4(a),在本發明中,因經由存在有特定之溶劑收納層2於矽基板1之時,加以抑制所塗層後之導電性電糊3在塗層後切口之情況之故,可安定且容易地形成對比(即,〔基板與導電体之接觸長度(X)〕和〔導電體的高度(Y)〕之〔數值比率((Y)/(X))〕)為良好之導電性圖案者。 According to the present invention as described above, it is possible to obtain a conductive pattern having a comparatively good contrast from the conventional one in which the slit of the conductive paste after the coating is suppressed. That is, for example, as shown in Fig. 4(a) schematically showing the outline of the present invention, in the present invention, the conductive layer after the coating is suppressed by the presence of the specific solvent containing layer 2 on the substrate 1 The electric paste 3 can be stably and easily formed into a contrast (i.e., [contact length of the substrate to the conductor (X)] and [height of the conductor (Y)]. ((Y)/(X))]) is a good conductive pattern.
隨之,如根據本發明,因可降低太陽能電池面板上之電極及配線等之總面積之故,可製造對於較以往受光面的面積比率高之太陽能電池特性優越之太陽能電池者。 According to the present invention, since the total area of the electrodes, the wiring, and the like on the solar cell panel can be reduced, it is possible to manufacture a solar cell having superior solar cell characteristics with a higher area ratio than the conventional light-receiving surface.
另一方面,在於矽基板1,未存在有特定之溶劑容納層2之以往方法中,從所塗層後之導電性電糊3之 塗層後的切口為大之情況,無法形成如本發明之對比良好之導電性圖案者(圖4(b))。 On the other hand, in the conventional method in which the substrate 1 is not provided with the specific solvent containing layer 2, the conductive paste 3 after coating is applied. The slit after the coating was large, and it was impossible to form a comparatively good conductive pattern of the present invention (Fig. 4(b)).
將具有背面電極之太陽能電池作為目的時,可因應必要,於上述之矽基板的背面,為了形成背面電極而塗層導電性電糊,再經由燒成此而加以製造者。為了形成背面電極而塗層導電性電糊係可在任意的階段進行者,但於工程(D)之前為止進行者為佳。因在此工程(D)中,可同時進行塗層於矽基板表面之導電性電糊之燒成,和與塗層於矽基板背面之導電性電糊燒成之故。另外,將背面電極形成用之導電性電糊進行塗層及燒成係亦於工程(A),或者工程(D)之後進行者。 When a solar cell having a back electrode is used as an object, a conductive paste may be coated on the back surface of the above-mentioned substrate to form a back electrode, and then fired. In order to form the back surface electrode, the coating conductive paste may be carried out at any stage, but it is preferably carried out before the start of the process (D). In this process (D), the baking of the conductive paste which is coated on the surface of the ruthenium substrate and the baking of the conductive paste on the back surface of the ruthenium substrate can be simultaneously performed. Further, the coating and firing of the conductive paste for forming the back electrode are performed after the process (A) or the process (D).
以下,經由實施例而更詳細說明本發明,但本發明之內容係未僅限定於揭示於實施例之範圍內者。 Hereinafter, the present invention will be described in more detail by way of examples. However, the invention is not limited to the scope of the examples.
在實施例及比較例中,溶劑容納層等之形成係使用下記的樹脂材料。 In the examples and the comparative examples, the resin accommodation layer or the like was formed by using the resin material described below.
‧丙烯酸系樹脂材料(「ES-960MC」、日本高松油脂公司製) ‧Acrylic resin material ("ES-960MC", manufactured by Japan Takamatsu Oil Co., Ltd.)
‧中空粒子(「SX868(B)」、JSR公司製) ‧ Hollow particles ("SX868(B)", manufactured by JSR)
‧有機微粒子(「Ganz Pearl PM-030EM」、日本Aica工業公司製) ‧Organic microparticles ("Ganz Pearl PM-030EM", manufactured by Aica Industries, Japan)
‧丙烯酸系樹脂材料(「AC100B3」、日本大成火藥公司製) ‧Acrylic resin material ("AC100B3", made by Japan Dacheng Powder Co., Ltd.)
‧聚乙烯醇(「poval PVA225」、日本KURARAY社製) ‧Polyvinyl alcohol ("poval PVA225", manufactured by KURARAY, Japan)
上述各樹脂材料之溶劑容納量係如表1所示。 The solvent accommodation amounts of the above respective resin materials are shown in Table 1.
所使用之各樹脂材料的溶劑容納量係如表1所示。 The solvent accommodation amounts of the respective resin materials used are shown in Table 1.
在此,溶劑容納量係指因應樹脂材料之性狀,經由下記之A法或B法而算出時之構成。 Here, the solvent storage amount refers to a configuration in which the properties of the resin material are calculated by the A method or the B method described below.
A法:於聚乙烯對苯二甲酸酯(PET)製之薄膜,將要求溶劑容納量之樹脂材料,由棒塗法而以100μm之厚度塗層,再以室溫條件下乾燥此等。乾燥後,從樹脂材料剝離PET製薄膜,製作溶劑容納量測定用之試料。對於此等,測定重量(乾燥重量)。呈將此等,全體浸漬於溶 劑之中,浸漬5分鐘之後,拉起,以面紙輕輕擦拭多餘部分,測定重量(浸漬後重量)。將所測定之乾燥重量及浸漬後重量,導入於下記式(1),算出溶劑容納量(重量%)。 Method A: A film made of polyethylene terephthalate (PET), which requires a solvent-containing resin material, is coated by a bar coating method to a thickness of 100 μm, and then dried at room temperature. After drying, the PET film was peeled off from the resin material to prepare a sample for measuring the solvent content. For this, the weight (dry weight) was measured. In this way, the whole is immersed in the solution Among the agents, after immersing for 5 minutes, the film was pulled up, and the excess portion was gently wiped with a tissue paper to measure the weight (weight after immersion). The measured dry weight and the weight after immersion were introduced into the following formula (1), and the solvent storage amount (% by weight) was calculated.
溶劑容納量(%)=(浸漬後重量-乾燥重量)/乾燥重量‧‧‧式(1) Solvent accommodation capacity (%) = (weight after immersion - dry weight) / dry weight ‧‧‧式(1)
B法:樹脂材料為有機狀微粒子,如A法,對於塗層於PET製薄膜上者則為困難之樹脂材料的情況,經由下記之方法而算出溶劑容納量(參考:JIS K5101-13-1(第13部:吸油量-第1節:精製亞麻仁油法))。 B method: The resin material is an organic fine particle, such as the A method, and the resin material is difficult to be coated on a PET film, and the solvent capacity is calculated by the method described below (reference: JIS K5101-13-1) (Part 13: Oil absorption - Section 1: Refined linseed oil method)).
將測定試料1g,放置於測定板*1上。從量管,1次滴4、5滴溶劑而慢慢加上。此情況,以調色刀*2,將溶劑混入於試料。反覆此等,溶劑及試料的塊完成為止持續滴下。之後,1滴1滴地滴下,作為呈完全混入而反覆進行。將電糊成為滑順的硬度時,作為終點。此電糊係可未破裂,以及分散地擴張,且做為輕輕附著於測定板之程度者。呈不喪失試料地,操作者係盡最大限的努力。 1 g of the measurement sample was placed on the measurement plate *1 . From the measuring tube, add 4 or 5 drops of solvent once and add slowly. In this case, the solvent was mixed into the sample with a palette knife *2 . This is repeated, and the solvent and the sample block are continuously dripped. Thereafter, one drop and one drop were dropped, and the mixture was carried out as it was completely mixed. When the electric paste is made into a smooth hardness, it serves as an end point. The paste can be unbroken, and dispersedly expanded, and is considered to be lightly attached to the assay plate. The operator does not lose the sample, the operator is doing his best.
溶劑容納量係以以下式(2)加以算出。 The solvent storage amount was calculated by the following formula (2).
溶劑容納量(%)=滴下之溶劑量(g)/試料的重量(g)×100‧‧‧式(2) Solvent accommodation amount (%) = amount of solvent dropped (g) / weight of sample (g) × 100‧‧‧式(2)
*1測定板…玻璃板或大理石板,最低300mm×400mm之構成。 *1 Measuring plate... Glass plate or marble plate, which is composed of a minimum of 300 mm × 400 mm.
*2調色刀…附有前端為細之鋼製刀刃,長度為140~150mm、最大寬度20~30mm、最小寬度12.5mm以上之構成。 *2 Palette knife... It is equipped with a steel blade with a front end that is 140 to 150 mm long, a maximum width of 20 to 30 mm, and a minimum width of 12.5 mm.
於多結晶矽晶圓(縱156mm×156mm×厚度200μm)之表面,使用丙烯酸系樹脂材料(「ES-960MC」、日本高松油脂公司製),以乾燥重量,塗層量呈成為1μg/mm2地加以塗層。之後,以50℃進行5分鐘乾燥,得到加以形成有厚度0.4μm之溶劑容納層的矽基板。 An acrylic resin material ("ES-960MC", manufactured by Nippon Takatsu Oil Co., Ltd.) was used for the surface of the polycrystalline silicon wafer (vertical 156 mm × 156 mm × thickness 200 μm), and the coating amount was 1 μg/mm 2 at a dry weight. Ground the coating. Thereafter, the film was dried at 50 ° C for 5 minutes to obtain a ruthenium substrate on which a solvent accommodating layer having a thickness of 0.4 μm was formed.
對於此溶劑容納層而言,經由網版印刷法而塗層於導電性電糊(「XSR3921-599 NT7」、日本namics公司製),形成表面電極。然而,此時所使用之網版係於線徑16μm之#500網版網目,加以保持有厚度15μm之乳劑膜者,於此乳劑膜,加以形成有指狀電極形成用的開口寬度26μm之縫隙者。 The solvent accommodating layer was coated with a conductive paste ("XSR3921-599 NT7", manufactured by Nippins, Japan) by a screen printing method to form a surface electrode. However, the screen used at this time is a #500 screen mesh having a wire diameter of 16 μm, and an emulsion film having a thickness of 15 μm is held. In this emulsion film, a slit having an opening width of 26 μm for forming a finger electrode is formed. By.
上述之網版印刷的結果,得到塗膜寬度為28μm之導電性電糊之塗膜。此塗膜的對比((Y’)/(X’))係0.15~0.4之範圍內。 As a result of the above-described screen printing, a coating film of a conductive electric paste having a coating film width of 28 μm was obtained. The contrast of the coating film ((Y') / (X')) is in the range of 0.15 to 0.4.
取代實施例1之丙烯酸系樹脂材料(「ES-960MC」、日本高松油脂公司製),除使用中空粒子(「SX868(B)」、JSR公司製)以外係與實施例1同樣 作為,得到形成有厚度0.4μm之溶劑容納層的矽基板。接著,經由與實施例1同樣的方法而進行網版印刷。 The acrylic resin material ("ES-960MC", manufactured by Nippon Takamatsu Co., Ltd.) of the first embodiment is the same as that of the first embodiment except that hollow particles ("SX868 (B)", manufactured by JSR Corporation) are used. As a ruthenium substrate in which a solvent accommodating layer having a thickness of 0.4 μm was formed. Next, screen printing was carried out in the same manner as in Example 1.
此結果,得到塗膜寬度為29μm之導電性電糊之塗膜。此塗膜的對比((Y)/(X))係0.11~0.4之範圍內。 As a result, a coating film of a conductive electric paste having a coating film width of 29 μm was obtained. The comparison of the coating film ((Y)/(X)) is in the range of 0.11 to 0.4.
取代實施例1之丙烯酸系樹脂材料(「ES-960MC」、日本高松油脂公司製),除使用多孔質粒子(「Ganz Pearl PM-030EM」、日本Aica工業公司製)以外係與實施例1同樣作為,得到形成有厚度0.9μm之溶劑容納層的矽基板。接著,經由與實施例1同樣的方法而進行網版印刷。 The acrylic resin material of the first embodiment ("ES-960MC", manufactured by Nippon Takamatsu Co., Ltd.) was used in the same manner as in Example 1 except that porous particles ("Ganz Pearl PM-030EM", manufactured by Aica Industries, Japan) were used. As a ruthenium substrate in which a solvent accommodating layer having a thickness of 0.9 μm was formed. Next, screen printing was carried out in the same manner as in Example 1.
此結果,得到塗膜寬度為28μm之導電性電糊之塗層膜。此塗膜的對比((Y)/(X))係0.13~0.4之範圍內。 As a result, a coating film of a conductive electric paste having a coating film width of 28 μm was obtained. The comparison of the coating film ((Y)/(X)) is in the range of 0.13 to 0.4.
與實施例1同樣,使用多結晶矽晶圓。於此多結晶矽晶圓,未形成溶劑容納層,而與實施例1同樣而使用導電性電糊及網版,進行網版印刷。 In the same manner as in Example 1, a polycrystalline germanium wafer was used. In the polycrystalline germanium wafer, a solvent-containing layer was not formed, and a conductive paste and a screen were used in the same manner as in Example 1, and screen printing was performed.
此結果,得到塗膜寬度為35μm之導電性電糊之塗膜。此塗膜的對比((Y)/(X))係0.05~0.22之範圍內。 As a result, a coating film of a conductive electric paste having a coating film width of 35 μm was obtained. The comparison of the coating film ((Y)/(X)) is in the range of 0.05 to 0.22.
取代實施例1之丙烯酸系樹脂材料(「ES-960MC」、高松油脂公司製),除使用「AC100B3」、日本大成火藥社製)以外係與實施例1同樣作為,得到形成有樹脂膜於表面的矽基板。接著,經由與實施例1同樣的方法而進行網版印刷。 In the same manner as in the first embodiment, except that the acrylic resin material ("ES-960MC" and the Komatsu Oil Co., Ltd.) of the first embodiment was used, the resin film was formed on the surface.矽 substrate. Next, screen printing was carried out in the same manner as in Example 1.
此結果,得到塗膜寬度為34μm之導電性電糊之塗層膜。此塗膜的對比((Y)/(X))係0.06~0.26之範圍內。 As a result, a coating film of a conductive electric paste having a coating film width of 34 μm was obtained. The comparison of the coating film ((Y)/(X)) is in the range of 0.06 to 0.26.
取代實施例1之丙烯酸系樹脂材料(「ES-960MC」、高松油脂公司製),除使用聚乙烯醇(「poval PVA225」、日本KURARAY社製)以外係與實施例1同樣作為,得到形成有樹脂膜於表面的矽基板。接著,經由與實施例1同樣的方法而進行網版印刷。 The acrylic resin material ("ES-960MC", manufactured by Komatsu Oil Co., Ltd.) of the first embodiment was used in the same manner as in Example 1 except that polyvinyl alcohol ("poval PVA225", manufactured by KURARAY Co., Ltd.) was used. A resin substrate is a tantalum substrate on the surface. Next, screen printing was carried out in the same manner as in Example 1.
此結果,得到塗膜寬度為35μm之導電性電糊之塗層膜。此塗膜的對比((Y)/(X))係0.05~0.22之範圍內。 As a result, a coating film of a conductive electric paste having a coating film width of 35 μm was obtained. The comparison of the coating film ((Y)/(X)) is in the range of 0.05 to 0.22.
與實施例1同樣地,於多結晶矽晶圓(縱156mm×156mm×厚度180μm)之單方的表面,使用丙烯酸 系樹脂材料(「ES-960MC」、日本高松油脂公司製),以乾燥重量,塗層量呈成為1μg/mm2地加以塗層。之後,以50℃進行5分鐘乾燥,得到加以形成有溶劑容納層之矽基板。 In the same manner as in the first embodiment, an acrylic resin material ("ES-960MC", manufactured by Nippon Takamatsu Co., Ltd.) was used as a dry weight on the surface of a single crystal of a polycrystalline silicon wafer (a length of 156 mm × 156 mm × a thickness of 180 μm). The coating amount was applied to be 1 μg/mm 2 . Thereafter, the film was dried at 50 ° C for 5 minutes to obtain a ruthenium substrate on which a solvent accommodating layer was formed.
對於此溶劑容納層而言,經由網版印刷法而塗層於導電性電糊(「XSR3921-599」、日本namics公司製),形成表面電極。然而,此時所使用之網版係於線徑19μm之#400網版網目,加以保持有厚度15μm之乳劑膜者,於此乳劑膜,加以形成有指狀電極形成用的開口寬度54μm之縫隙以及匯流排電極形成用的開口寬度2μm之縫隙者。 The solvent accommodating layer was coated with a conductive electric paste ("XSR3921-599", manufactured by Nippins, Japan) by a screen printing method to form a surface electrode. However, the screen used at this time was a #400 screen mesh having a wire diameter of 19 μm, and an emulsion film having a thickness of 15 μm was held. The emulsion film was formed with a slit having an opening width of 54 μm for forming a finger electrode. And a gap having an opening width of 2 μm for forming the bus bar electrode.
上述之網版印刷的結果,加以得到塗膜寬度為60μm指狀電極用之塗膜以及塗膜寬度為2mm匯流排電極用之塗膜。 As a result of the above-described screen printing, a coating film for a finger-shaped electrode having a coating film width of 60 μm and a coating film for a bus bar electrode having a coating film width of 2 mm were obtained.
接著,經由網版印刷法而形成背面電極於矽基板。此背面電極之形成係於矽基板的相反面(即,未加以形成有指狀電極及匯流排電極的面),以12mm角而印刷將鋁粒子,玻璃粉末,乙基纖維素及溶劑作為主成分之導電性電糊,以150℃進行1分鐘乾燥。 Next, a back electrode is formed on the ruthenium substrate by a screen printing method. The formation of the back electrode is performed on the opposite surface of the ruthenium substrate (that is, the surface on which the finger electrode and the bus bar electrode are not formed), and the aluminum particles, the glass powder, the ethyl cellulose, and the solvent are mainly printed at an angle of 12 mm. The conductive paste of the composition was dried at 150 ° C for 1 minute.
將加以形成有在上述所得到之指狀電極,匯流排電極及背面電極之矽基板,使用將鹵素燈作為加熱源之近紫外線燒結爐(Despatch Industries製)而加以燒成。燒成條件係將775~800℃作為峰值溫度,在大氣中以燒成爐之輸出入30秒,兩面同時地燒成。由如以上作為,製造太陽能電池。 The ruthenium substrate in which the finger electrode, the bus bar electrode, and the back electrode electrode obtained above were formed was fired in a near-ultraviolet sintering furnace (manufactured by Despatch Industries) using a halogen lamp as a heating source. In the firing conditions, 775 to 800 ° C was used as the peak temperature, and the output of the firing furnace was placed in the atmosphere for 30 seconds, and both surfaces were simultaneously fired. From the above, a solar cell is manufactured.
對於上述所製作成之太陽能電池,以太陽模擬光(AM1.5、能量密度100mW/cm2)之照射下而測定電流-電壓特性,從測定結果而算出曲線因子(FF)。 The solar cell produced as described above was measured for current-voltage characteristics by irradiation with solar simulation light (AM 1.5, energy density: 100 mW/cm 2 ), and a curve factor (FF) was calculated from the measurement results.
此實施例4之太陽能電池係FF值為0.787者。此FF值係作為太陽能電池為良好的數值同時,與在後述之<比較例4>所製作之太陽能電池(即,未形成溶劑容納層而製作成之太陽能電池)同等之FF值者。隨之,加以確認到即使歷經溶劑容納層之形成及熱分解物,亦對於太陽能電池特性未產生有任何不良影響。 The solar cell of this Example 4 had an FF value of 0.787. This FF value is a FF value equivalent to a solar cell produced in <Comparative Example 4> (that is, a solar cell produced without forming a solvent accommodating layer), which is a good value for a solar cell. Subsequently, it was confirmed that the formation of the solvent containing layer and the thermal decomposition product did not have any adverse effect on the solar cell characteristics.
於與實施例4同樣之多結晶矽晶圓上,直接,經由網版印刷法而塗層導電性電糊(「XSR3921-599」、日本namics公司製),形成表面電極。然而,此時所使用之網版係於線徑19μm之#400網版網目,加以保持有厚度15μm之乳劑膜者,於此乳劑膜,加以形成有指狀電極形成用的開口寬度54μm之縫隙以及匯流排電極形成用的開口寬度2mm之縫隙者。 On the polycrystalline germanium wafer similar to that of Example 4, a conductive paste ("XSR3921-599", manufactured by Nippins, Japan) was directly coated by a screen printing method to form a surface electrode. However, the screen used at this time was a #400 screen mesh having a wire diameter of 19 μm, and an emulsion film having a thickness of 15 μm was held. The emulsion film was formed with a slit having an opening width of 54 μm for forming a finger electrode. And a gap of 2 mm in opening width for forming the bus bar electrode.
上述之網版印刷的結果,與實施例4同樣地,加以得到塗膜寬度為60μm指狀電極用之塗膜以及塗膜寬度為2mm匯流排電極用之塗膜。 As a result of the above-described screen printing, a coating film for a finger-shaped electrode having a coating film width of 60 μm and a coating film for a bus-bar electrode having a coating film width of 2 mm were obtained in the same manner as in Example 4.
以和實施例4同樣條件而進行燒成,製造太陽能電 池,並且,同樣地進行電性特性之評估。此比較例4之太陽能電池係FF值為0.785者。 The same conditions as in Example 4 were carried out to produce solar energy. The pool, and, similarly, the evaluation of electrical characteristics. The solar cell of Comparative Example 4 had an FF value of 0.785.
1‧‧‧矽基板 1‧‧‧矽 substrate
2‧‧‧溶劑容納層 2‧‧‧ solvent containment layer
3‧‧‧導電性電糊 3‧‧‧Electrical electric paste
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