TWI434087B - Optical-electrical consolidated substrate and electronic apparatus - Google Patents
Optical-electrical consolidated substrate and electronic apparatus Download PDFInfo
- Publication number
- TWI434087B TWI434087B TW97145541A TW97145541A TWI434087B TW I434087 B TWI434087 B TW I434087B TW 97145541 A TW97145541 A TW 97145541A TW 97145541 A TW97145541 A TW 97145541A TW I434087 B TWI434087 B TW I434087B
- Authority
- TW
- Taiwan
- Prior art keywords
- opto
- optical waveguide
- substrate
- film
- electric hybrid
- Prior art date
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- 239000000758 substrate Substances 0.000 title claims description 74
- 230000003287 optical effect Effects 0.000 claims description 83
- 238000005452 bending Methods 0.000 claims description 38
- 238000005253 cladding Methods 0.000 claims description 34
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- 239000010410 layer Substances 0.000 description 32
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- 238000011161 development Methods 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 12
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- 239000000243 solution Substances 0.000 description 10
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- 230000000052 comparative effect Effects 0.000 description 8
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Landscapes
- Optical Integrated Circuits (AREA)
Description
本發明是有關於一種將具有撓性的光配線與電配線加以組合而成的光電混載基板、及使用該基板的電子機器。The present invention relates to an opto-electric hybrid board in which a flexible optical wiring and an electric wiring are combined, and an electronic apparatus using the same.
近年來,關於電子元件間或配線基板間的高速及高密度信號傳輸,在先前利用電配線所進行的傳輸中,信號的相互干擾或衰減成為障礙,因而開始見到高速-高密度化受到限制。為了打破該限制,正在研究利用光來作為電子元件間或配線基板間連接的技術、即所謂的光互連(Optical Interconnection)。關於光的傳輸路徑,就加工的容易性、低成本、配線的自由度高、且可實現高密度化的觀點而言,聚合物(polymer)光波導受到關注。In recent years, in the high-speed and high-density signal transmission between electronic components or between wiring boards, in the transmission by the electric wiring, interference or attenuation of signals has become an obstacle, and thus high-speed and high-density are limited. . In order to break this limitation, a technique of using light as a connection between electronic components or wiring boards, that is, a so-called optical interconnection, is being studied. Regarding the light transmission path, a polymer optical waveguide has been attracting attention from the viewpoints of easiness of processing, low cost, high degree of freedom of wiring, and high density.
特別是正在對行動電話或筆記型個人電腦等中所使用光波導進行研究,為了滿足節省空間、薄型化的要求,光配線與電配線進行組合的光電混載基板受到關注(參照日本專利第3193500號公報、圖2)。In particular, optical waveguides used in mobile phones and notebook PCs have been studied, and in order to meet space-saving and thin-film requirements, optical hybrid substrates in which optical wirings and electrical wirings are combined have attracted attention (refer to Japanese Patent No. 3193500). Bulletin, Figure 2).
然而,在光電混載基板的用途之一的行動電話等電子機器中,假定在可開閉的二個機構部間的信號傳輸中使用撓性(flexible)光電混載基板,則可認為該撓性光電混載基板跨及二個機構部的連接部(鉸鏈(hinge))。通常,為了使撓性電配線基板側連接在鉸鏈上,而將該光電混載基板彎曲,由於彎曲,光波導部分有時會產生裂痕或龜裂(crack)。特別是根據近年來的電子機器的小型化的要求,要求鉸鏈以R為1.5mm~2mm左右的較小彎曲半徑而彎曲,因此有鉸鏈上會產生顯著的裂痕或龜裂的問題。However, in an electronic device such as a mobile phone which is one of the applications of the opto-electric hybrid board, it is assumed that the flexible opto-electric hybrid board is used for signal transmission between the two mechanism parts that can be opened and closed. The substrate spans the connection portion (hinge) of the two mechanism portions. Usually, in order to connect the flexible electric wiring board side to the hinge, the opto-electric hybrid board is bent, and cracks or cracks may occur in the optical waveguide portion due to the bending. In particular, according to the demand for miniaturization of electronic equipment in recent years, the hinge is required to be bent with a small bending radius of R of about 1.5 mm to 2 mm, so that there is a problem that significant cracks or cracks are generated in the hinge.
針對上述問題,提出有一種撓性光電配線基板,其特徵在於:光波導膜(optical waveguide film)與撓性電配線板進行局部接合,至少基板面彎曲的部位不接合(參照日本專利特開2006-284925號公報、申請專利範圍)。In view of the above problems, a flexible optical wiring board is proposed in which an optical waveguide film and a flexible electric wiring board are locally joined, and at least a portion where the substrate surface is curved is not joined (refer to Japanese Patent Laid-Open Publication No. 2006). -284925, the scope of application for patents).
然而,本發明者等人發現:若光波導膜與撓性電配線板形成為局部相分離的構造,則在實際上藉由鉸鏈而彎曲時,特別是在電子機器具有滑動(slide)構造、且具有於光電混載基板以彎曲部為中心而彎曲的狀態下、彎曲部隨著滑動而移動的構造時,光波導容易相對於其與撓性電配線板的接著面產生橫向偏移,且由於該種橫偏移,光波導在發生滑動時會一邊變形一邊移動,因此,存在容易斷裂的問題。特別是在光電混載基板較長時,該傾向較為顯著。另外,為了防止該種光波導的橫向偏移,亦可設置側導板(side guide)機構,但非常複雜,且對要求緊密(compact)的電子機器而言極為不利。However, the present inventors have found that when the optical waveguide film and the flexible electric wiring board are formed to be partially phase-separated, when actually bent by a hinge, particularly in an electronic device, a slide structure is When the optical hybrid substrate is bent in a state where the optical hybrid substrate is bent around the curved portion, and the curved portion moves in accordance with the sliding, the optical waveguide is likely to be laterally offset with respect to the adhesion surface of the flexible electrical wiring board, and In this kind of lateral displacement, the optical waveguide moves while deforming while slipping, and therefore there is a problem that it is easily broken. This tendency is remarkable especially when the opto-electric hybrid board is long. Further, in order to prevent lateral shift of such an optical waveguide, a side guide mechanism may be provided, but it is very complicated and extremely disadvantageous for an electronic device that requires compactness.
即,在如專利文獻2所揭示的具有分離構造的光電混載基板中,最終光波導部分產生應力,結果無法解決產生裂痕或龜裂的問題。In other words, in the opto-electric hybrid board having the separated structure disclosed in Patent Document 2, stress is generated in the final optical waveguide portion, and as a result, the problem of cracking or cracking cannot be solved.
因此,本發明是為了解決上述課題而成者,其目的在於提供一種光電混載基板及使用該光電混載基板而成的電子機器,上述光電混載基板是由光波導膜與撓性電配線基板進行接合而成的,且即便進行彎曲、彎折,亦不會產生裂痕或龜裂。In view of the above, an object of the present invention is to provide an opto-electric hybrid board in which an opto-electric hybrid board is bonded to a flexible electric wiring board, and an electronic device using the opto-electric hybrid board. It does not crack or crack even if it is bent or bent.
本發明者等人著眼於以下方面:在光電混載基板中,藉由鉸鏈而彎曲時產生應力的部分,對構成電配線基板的銅線等電配線造成較大影響,且集中於光波導的芯部(core)部分。即,電配線中所使用的金屬材料的彈性模數(modulus of elasticity)與其他材料相比極高,因此,應力中心偏向於電配線部分,由此,可推斷應力集中於光波導的芯部,光波導容易斷裂。並且,經過反覆努力研究後發現:彎曲部的光波導的芯部與撓性電配線基板的電配線在投影面上以不重疊的方式進行配置,藉此,可解決上述課題。本發明是基於該觀點而完成的。The inventors of the present invention have focused on the fact that in the opto-electric hybrid board, the portion where the stress is generated when bent by the hinge greatly affects the electric wiring such as the copper wire constituting the electric wiring board, and concentrates on the core of the optical waveguide. Department (core) part. That is, the modulus of elasticity of the metal material used in the electric wiring is extremely high compared with other materials, and therefore, the stress center is biased toward the electric wiring portion, whereby it is estimated that the stress concentrates on the core of the optical waveguide. The optical waveguide is easily broken. Further, after repeated efforts, it has been found that the core portion of the optical waveguide of the bent portion and the electric wiring of the flexible electric wiring substrate are disposed so as not to overlap each other on the projection surface, whereby the above problem can be solved. The present invention has been completed based on this point of view.
即,提供一種光電混載基板、及具有該光電混載基板而成的電子機器,上述光電混載基板是由具備芯部及包層(clad)的光波導膜與撓性電配線基板接合而成的,其特徵在於:彎曲部的光波導的芯部與撓性電配線基板的電配線在投影面上不重疊。In other words, an opto-electric hybrid board in which an optical waveguide film including a core portion and a clad and a flexible electric wiring substrate are bonded together, and an electronic device including the opto-electric hybrid board, are provided. It is characterized in that the core of the optical waveguide of the curved portion and the electrical wiring of the flexible electric wiring substrate do not overlap on the projection surface.
本發明的光電混載基板、及使用該光電混載基板的電子機器具有極為良好的彎曲耐久性,即便長時間反覆彎曲,該光電混載基板上亦不會產生裂痕或龜裂,並可維持良好的通信功能。The opto-electric hybrid board of the present invention and the electronic device using the opto-electric hybrid board have excellent bending durability, and even if the film is repeatedly bent for a long period of time, cracks or cracks do not occur on the opto-electric hybrid board, and good communication can be maintained. Features.
為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.
本發明的光電混載基板之特徵在於:其是由具備芯部及包層的光波導膜與撓性電配線基板接合而成的,彎曲部的光波導的芯部與撓性電配線基板的電配線在投影面上不重疊。在本發明中,只要彎曲部中的芯部與電配線在投影面上不重疊即可,關於彎曲部以外的部分、例如端部中的芯部與電配線在投影面上可重疊,亦可不重疊。但是,就使用本發明的光電混載基板的電子機器的緊密觀點而言,必須藉由使端部的電氣接點比配線路寬數倍而獲得結合裕度,並且光通信用的芯部的層與電配線的層不同,因此,較好的是在至少一端部、較好的是兩端部(彎曲部以外的至少一部分)中,芯部與電配線在投影面上重疊。The opto-electric hybrid board of the present invention is characterized in that the optical waveguide film having the core portion and the cladding layer is bonded to the flexible electric wiring substrate, and the core portion of the optical waveguide of the bent portion and the electric wiring of the flexible electric wiring substrate The wiring does not overlap on the projection surface. In the present invention, as long as the core portion and the electric wiring in the curved portion do not overlap on the projection surface, the portion other than the curved portion, for example, the core portion and the electric wiring in the end portion may overlap on the projection surface, or may not overlapping. However, in terms of the closeness of the electronic device using the opto-electric hybrid board of the present invention, it is necessary to obtain a bonding margin by making the electrical contact of the end portion several times wider than the wiring line, and to form a layer of the core for optical communication. Unlike the layer of the electric wiring, it is preferable that the core portion and the electric wiring overlap on the projection surface at at least one end portion, preferably at both end portions (at least a portion other than the curved portion).
以下,參照圖式,進行詳細說明。Hereinafter, the details will be described with reference to the drawings.
本發明的光電混載基板1如圖1所示,是由具備芯部及包層的光波導膜2與撓性電配線基板3接合而成的,考慮到光波導膜2與撓性電配線基板3的接著性,較好的是以整個面進行接合。此處,所謂接合,表示接著或密著,是指在使光電混載基板彎曲時具有不會剝離之程度的接著性、密著性。As shown in FIG. 1, the opto-electric hybrid board 1 of the present invention is formed by bonding an optical waveguide film 2 having a core portion and a cladding layer to a flexible electric wiring substrate 3, and considering the optical waveguide film 2 and the flexible electric wiring substrate. The adhesion of 3 is preferably carried out by the entire surface. Here, the term "bonding" means adhesion or adhesion, and refers to adhesion and adhesion which are not peeled off when the opto-electric hybrid board is bent.
本發明的光電混載基板適用於如圖2所示的、具有光電混載基板的一部分以鉸鏈4為中心沿旋轉方向可動的構造的電子機器,或如圖3所示的、具有滑動構造的電子機器。The opto-electric hybrid board of the present invention is suitable for an electronic apparatus having a structure in which a part of the opto-electric hybrid board is movable in the rotational direction about the hinge 4 as shown in FIG. 2, or an electronic apparatus having a sliding structure as shown in FIG. .
此處,本發明的彎曲部是指通常意義上的要彎曲的部分或已彎曲的部分,即自彎曲起始點至彎曲結束點為止。例如,在使用鉸鏈使光電混載基板彎曲時,本發明的彎曲部是指,在光電混載基板已彎曲的狀態下,與鉸鏈相接觸的部分及其外緣部。更具體而言,如鉸鏈部的放大圖即圖4所示,該彎曲部,不僅指由與鉸鏈相接觸而開始彎曲的彎曲起始點X1 、彎曲結束的彎曲結束點X2 、與X1 及X2 相對的光波導膜側部位Y1 及Y2 所包圍的部分,而且還指自該部分向外側擴展的由a、b、c及d所包圍的部分6。此處,所擴展的部分的a-X1 間的距離,只要在可獲得本發明的效果的範圍內,則無特別限定,為X1 -X2 間距離的1%~10%左右。Here, the curved portion of the present invention means a portion to be bent or a bent portion in a usual sense, that is, from the starting point of bending to the end point of bending. For example, when the opto-electric hybrid board is bent using a hinge, the bent portion of the present invention refers to a portion that comes into contact with the hinge and an outer edge portion thereof in a state where the opto-electric hybrid board has been bent. More specifically, as shown in FIG. 4, which is an enlarged view of the hinge portion, the curved portion refers not only to the bending starting point X 1 that starts to bend in contact with the hinge, but also to the bending end point X 2 of the bending end, and X. and a portion surrounded 1 and X 2 film side opposite to the optical waveguide portion Y 1 Y 2, but also to extend from the portion to the outside by the a, b, c and d are surrounded by section 6. Here, the distance between aX 1 of the expanded portion is not particularly limited as long as the effect of the present invention is obtained, and is about 1% to 10% of the distance between X 1 and X 2 .
另外,在如圖3所示的具有滑動構造的電子機器中,即便是在未使用鉸鏈的情況下,亦與上述具有鉸鏈的情況相同,在使光電混載基板相對於彎曲中心彎曲時,所謂彎曲部,在光電混載基板被彎曲的狀態下、假想有相當於鉸鏈4的軸7(以下稱為「彎曲軸」)時,是指與該彎曲軸接觸的部分及其外緣部,關於該定義,在上述的彎曲部的說明中,可將鉸鏈4更換為彎曲軸7。關於該彎曲軸可有以下兩種情況:實際上存在,且該彎曲軸7一邊旋轉一邊沿水平方向移動、或不旋轉地沿水平方向移動,藉此而實現滑動構造;不存在彎曲軸7,利用蓋體等自上下方向夾持光電混載基板1,藉由該蓋體的移動,而使光電混載基板1的端部X0 沿水平方向移動,藉此實現滑動構造。而且,光電混載基板的另一側的端部可為通常被固定但沿與端部X0 相對方向移動的構造。Further, in the electronic device having the sliding structure as shown in FIG. 3, even in the case where the hinge is not used, as in the case of the above-described hinge, when the opto-electric hybrid substrate is bent with respect to the bending center, the so-called bending In the state where the opto-electric hybrid board is bent, the shaft 7 corresponding to the hinge 4 (hereinafter referred to as "bending axis") is assumed to be a portion that comes into contact with the bending shaft and an outer edge portion thereof. In the above description of the bent portion, the hinge 4 can be replaced with the bending shaft 7. There are two cases in which the bending axis can be actually formed, and the bending shaft 7 moves in the horizontal direction while rotating, or moves in the horizontal direction without rotating, thereby realizing a sliding structure; there is no bending shaft 7, The opto-electric hybrid board 1 is sandwiched from the up-down direction by a lid or the like, and the end portion X 0 of the opto-electric hybrid board 1 is moved in the horizontal direction by the movement of the lid body, thereby realizing a sliding structure. Moreover, the other end of the opto-electric hybrid substrate may have a configuration that is generally fixed but moved in a direction opposite to the end portion X 0 .
本發明特別是可良好地用於具有如圖3所示的滑動構造的電子機器。即,形成以下構造:在光電混載基板1以彎曲部為中心而彎曲的狀態下,例如位於上下的撓性光電混載基板的直線部幾乎相平行地配置。並且具有以下構造:在維持著該彎曲狀態下光電混載基板1的至少一個端部X0 沿水平方向(圖3中為右方向)移動,且彎曲部隨著該移動而移動。即,隨著端部X0 的移動,彎曲起始點發生移動。該種情況下,彎曲部中的光波導的芯部與撓性電配線基板的電配線在投影面上不重疊,藉此可發揮本發明的效果。The present invention is particularly well applicable to an electronic machine having a sliding configuration as shown in FIG. In other words, in a state in which the opto-electric hybrid board 1 is bent around the curved portion, for example, straight portions of the flexible opto-electric hybrid board located above and below are arranged substantially in parallel. Further, it has a configuration in which at least one end portion X 0 of the opto-electric hybrid board 1 is moved in the horizontal direction (the right direction in FIG. 3) while the bending state is maintained, and the bent portion moves with the movement. That is, as the end portion X 0 moves, the bending start point moves. In this case, the core of the optical waveguide in the curved portion and the electrical wiring of the flexible electric wiring substrate do not overlap on the projection surface, whereby the effects of the present invention can be exhibited.
本發明的光電混載基板1之特徵在於,如上所述,彎曲部中的光波導的芯部與撓性電配線基板的電配線在投影面上不重疊。In the opto-electric hybrid board 1 of the present invention, as described above, the core portion of the optical waveguide in the bent portion and the electric wiring of the flexible electric wiring substrate do not overlap on the projection surface.
圖5及圖6中表示本發明的光電混載基板的一態樣。圖5為立體圖,圖6為自圖5的a方向觀察的投影圖。在圖5及圖6所示的態樣中,在光電混載基板1的兩外側配置有電配線31,在中央部配置有芯部21,並且以上述兩者在投影面上不重疊的方式進行配置。An aspect of the opto-electric hybrid board of the present invention is shown in Figs. 5 and 6. Fig. 5 is a perspective view, and Fig. 6 is a projection view as seen from the direction a of Fig. 5. In the aspect shown in FIG. 5 and FIG. 6 , the electric wiring 31 is disposed on both outer sides of the opto-electric hybrid board 1 , and the core portion 21 is disposed at the center portion, and the two surfaces are not overlapped on the projection surface. Configuration.
接著,圖7是表示本發明的光電混載基板的其他態樣的投影圖。電配線31在兩外側方向上成為曲線,而芯部21在兩端間成為直線狀。電配線31與芯部21的形態為在彎曲部不重疊,而在端部重疊。Next, Fig. 7 is a projection view showing another aspect of the opto-electric hybrid board of the present invention. The electric wiring 31 has a curved line in both outer directions, and the core portion 21 has a linear shape between both ends. The electric wiring 31 and the core portion 21 are formed so as not to overlap the curved portion and overlap at the end portion.
另外,圖8是進一步表示本發明的光電混載基板之其他態樣的投影圖,於圖中,電配線31在兩外側方向上形成曲線,芯部21在內側方向形成曲線。電配線31與芯部21的形態為在彎曲部不重疊,而在端部兩者有一部分重疊。In addition, FIG. 8 is a projection view further showing another aspect of the opto-electric hybrid board of the present invention. In the drawing, the electric wiring 31 is curved in both outer directions, and the core portion 21 is curved in the inner direction. The electric wiring 31 and the core portion 21 have a form in which the curved portion does not overlap, and a part of the end portion overlaps.
以下,對於本發明中使用的光波導膜與撓性電配線基板進行說明。Hereinafter, the optical waveguide film and the flexible electric wiring substrate used in the present invention will be described.
[光波導膜][optical waveguide film]
本發明的光波導膜具備芯部以及包層,可利用先前可用作光波導膜的材料。例如可使用由含有(A)基礎聚合物、(B)光聚合性化合物、及(C)光聚合起始劑的樹脂組成物所構成的光波導形成用樹脂膜。The optical waveguide film of the present invention is provided with a core portion and a cladding layer, and a material which can be used as an optical waveguide film can be used. For example, a resin film for forming an optical waveguide comprising a resin composition containing (A) a base polymer, (B) a photopolymerizable compound, and (C) a photopolymerization initiator can be used.
(A)基礎聚合物,在形成膜等硬化物時,是用來確保其強度的,若可實現該目的,則並無特別限定,可列舉:苯氧樹脂、環氧樹脂、(甲基)丙烯酸系樹脂、聚碳酸酯樹脂、聚芳酯樹脂、聚醚醯胺、聚醚醯亞胺、聚醚碸等、或其等之衍生物等。這些基礎聚合物可單獨使用1種,又可將2種或2種以上混合使用。(A) The base polymer is used to secure the strength when forming a cured product such as a film, and is not particularly limited as long as the object can be achieved, and examples thereof include a phenoxy resin, an epoxy resin, and a (meth) group. Acrylic resin, polycarbonate resin, polyarylate resin, polyether decylamine, polyether phthalimide, polyether oxime, or the like, or the like. These base polymers may be used alone or in combination of two or more.
(B)光聚合性化合物,若為藉由照射紫外線等光而進行聚合的化合物,則並無特別限定,就對光的反應性觀點而言,較好的是分子內具有乙烯性不飽和基的化合物。具體可列舉:(甲基)丙烯酸酯、偏二鹵乙烯、乙烯基醚、乙烯基吡啶、乙烯基苯酚等,但就透明性以及耐熱性觀點而言,其等中較好的是(甲基)丙烯酸酯。作為(甲基)丙烯酸酯,可使用1官能性、2官能性、3官能性(甲基)丙烯酸酯中的任一種。(B) The photopolymerizable compound is not particularly limited as long as it is a compound which is polymerized by irradiation with light such as ultraviolet rays. From the viewpoint of reactivity with light, it is preferred that the compound has an ethylenically unsaturated group in the molecule. compound of. Specific examples thereof include (meth) acrylate, vinylidene halide, vinyl ether, vinyl pyridine, and vinyl phenol. However, from the viewpoint of transparency and heat resistance, (meth) is preferable. )Acrylate. As the (meth) acrylate, any of a monofunctional, bifunctional, and trifunctional (meth) acrylate can be used.
而且,此處所謂(甲基)丙烯酸酯,是指丙烯酸酯及甲基丙烯酸酯。Further, the term "(meth)acrylate" as used herein means acrylate and methacrylate.
(C)成分的光聚合起始劑並無特別限定,例如可列舉:二苯甲酮、N,N'-四甲基-4,4'-二胺基二苯甲酮(米其勒酮)、N,N'-四乙基-4,4'-二胺基二苯甲酮、4-甲氧基4'-二甲胺基二苯甲酮、2-苄基-2-二甲胺基-1-(4-嗎啉基苯基)-丁烷-1-酮、2,2-二甲氧基-1,2-二苯基乙烷-1-酮、1-羥基環己基苯基酮、2-羥基-2-甲基-1-苯基丙烷-1-酮、1-[4-(2-羥基乙氧基)苯基]-2-羥基-2-甲基-1-丙烷-1-酮、1,2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉基丙烷-1-酮等芳香族酮;2-乙基蒽醌、菲醌、2-第三丁基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-苯并蒽醌、2-苯基蒽醌、2,3-二苯基蒽醌、1-氯蒽醌、2-甲基蒽醌、1,4-萘醌、9,10-菲醌、2-甲基-1,4-萘醌、2,3-二甲基蒽醌等醌類;安息香甲醚、安息香乙醚、安息香苯醚等安息香醚化合物;安息香、甲基安息香、乙基安息香等安息香化合物;苄基二甲基縮酮等苯偶醯衍生物;2-(鄰氯苯基)-4,5-二苯基咪唑二聚物、2-(鄰氯苯基)-4,5-二(甲氧基苯基)咪唑二聚物、2-(鄰氟苯基)-4,5-二苯基咪唑二聚物、2-(鄰甲氧基苯基)-4,5-二苯基咪唑二聚物、2-(對甲氧基苯基)-4,5-二苯基咪唑二聚物等2,4,5-三芳基咪唑二聚物;雙(2,4,6-三甲基苯甲醯基)苯基氧化膦、雙(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基戊基氧化膦、2,4,6-三甲基苯甲醯基二苯基氧化膦等氧化膦類;9-苯基吖啶、1,7-雙(9,9'-吖啶基)庚烷等吖啶衍生物;N-苯基甘胺酸、N-苯基甘胺酸衍生物、香豆素系化合物等。The photopolymerization initiator of the component (C) is not particularly limited, and examples thereof include benzophenone and N,N'-tetramethyl-4,4'-diaminobenzophenone (micilenone). ), N,N'-tetraethyl-4,4'-diaminobenzophenone, 4-methoxy 4'-dimethylaminobenzophenone, 2-benzyl-2-dimethyl Amino-1-(4-morpholinylphenyl)-butan-1-one, 2,2-dimethoxy-1,2-diphenylethane-1-one, 1-hydroxycyclohexyl Phenyl ketone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1-[4-(2-hydroxyethoxy)phenyl]-2-hydroxy-2-methyl-1 An aromatic ketone such as propan-1-one or 1,2-methyl-1-[4-(methylthio)phenyl]-2-morpholinylpropan-1-one; 2-ethyl hydrazine, Phenanthrene, 2-tert-butylhydrazine, octamethylguanidine, 1,2-benzopyrene, 2,3-benzopyrene, 2-phenylindole, 2,3-diphenyl Bismuth, 1-chloroindole, 2-methylindole, 1,4-naphthoquinone, 9,10-phenanthrenequinone, 2-methyl-1,4-naphthoquinone, 2,3-dimethylhydrazine Anthraquinones; benzoin ether compounds such as benzoin methyl ether, benzoin ethyl ether, benzoin phenyl ether; benzoin compounds such as benzoin, methyl benzoin, ethyl benzoin; benzoin derivatives such as benzyl dimethyl ketal; Chlorophenyl)-4,5-diphenylimidazole dimer, 2-(o-chlorophenyl)-4,5-bis(methoxyphenyl)imidazole dimer, 2-(o-fluorophenyl) A-4,5-diphenylimidazole dimer, 2-(o-methoxyphenyl)-4,5-diphenylimidazole dimer, 2-(p-methoxyphenyl)-4, 2,4,5-triarylimidazole dimer such as 5-diphenylimidazole dimer; bis(2,4,6-trimethylbenzylidene)phenylphosphine oxide, bis(2,6- Phosphine oxides such as dimethoxybenzhydryl)-2,4,4-trimethylpentylphosphine oxide, 2,4,6-trimethylbenzhydryldiphenylphosphine oxide; 9-benzene Acridine derivatives such as pyridinium, 1,7-bis(9,9'-acridinyl)heptane; N-phenylglycine, N-phenylglycine derivatives, coumarin compounds Wait.
關於(A)基礎聚合物的調配量,較好的是,相對於(A)成分及(B)成分的總量而言為10wt%~80wt%。若該調配量為10wt%或10wt%以上,則在形成膜時,即便是膜厚為50μm或50μm以上的厚膜,亦可容易地製造,另一方面,若該調配量為80wt%或80wt%以下,則光硬化反應可充分進行。就以上觀點而言,(A)基礎聚合物的調配量更好的是設為20wt%~70wt%。The amount of the (A) base polymer to be blended is preferably from 10% by weight to 80% by weight based on the total amount of the component (A) and the component (B). When the compounding amount is 10% by weight or more, when a film is formed, even a thick film having a film thickness of 50 μm or more can be easily produced. On the other hand, if the compounding amount is 80% by weight or 80%. Below %, the photohardening reaction can be sufficiently carried out. From the above viewpoints, the blending amount of the (A) base polymer is more preferably from 20% by weight to 70% by weight.
作為(B)光聚合性化合物的調配量,較好的是,相對於(A)成分及(B)成分的總量而言為20wt%~90wt%。若該調配量為20wt%或20wt%以上,則可容易地使基礎聚合物相互纏繞而硬化,另一方面,若該調配量為90wt%或90wt%以下,則可容易地形成厚膜。就以上觀點而言,(B)光聚合性化合物的調配量更好的是設為30wt%~80wt%。The blending amount of the (B) photopolymerizable compound is preferably from 20% by weight to 90% by weight based on the total amount of the component (A) and the component (B). If the compounding amount is 20% by weight or more, the base polymer can be easily entangled and hardened. On the other hand, if the compounding amount is 90% by weight or less, a thick film can be easily formed. From the above viewpoints, the blending amount of the (B) photopolymerizable compound is more preferably from 30% by weight to 80% by weight.
關於(C)光聚合起始劑的調配量,較好的是,相對於(A)成分及(B)成分的總量100質量份而言為0.1質量份~10質量份。若該調配量為0.1質量份或0.1質量份以上,則光靈敏度充分,另一方面,若該調配量為10質量份或10質量份以下,則曝光時感光性樹脂組成物的表層的吸收不會增強,因而內部的光硬化較充分。而且,傳輸損失亦不會受聚合起始劑自身的光吸收的影響而增大,因而較好。就以上觀點而言,(C)聚合起始劑的調配量更好的是設為0.2質量份~5質量份。The amount of the (C) photopolymerization initiator is preferably 0.1 parts by mass to 10 parts by mass based on 100 parts by mass of the total of the components (A) and (B). When the amount is 0.1 part by mass or more, the light sensitivity is sufficient. On the other hand, when the amount is 10 parts by mass or less, the surface layer of the photosensitive resin composition is not absorbed during exposure. Will be enhanced, so the internal light hardening is more adequate. Further, the transmission loss is also not increased by the influence of the light absorption of the polymerization initiator itself, and thus is preferable. From the above viewpoints, the compounding amount of the (C) polymerization initiator is more preferably from 0.2 part by mass to 5 parts by mass.
本發明的光波導膜可藉由以下方式而容易製造,該方式為:將含有(A)~(C)成分的樹脂組成物溶解於溶劑,而塗佈於基材上,再除去溶劑,從而製造出光波導膜。關於此處所用的溶劑,若可溶解該樹脂組成物,則並無特別限定,例如可使用:丙酮、甲基乙基酮、甲基溶纖劑、乙基溶纖劑、甲苯、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、丙二醇單甲醚等溶劑或這些的混合溶劑。樹脂溶液中的固體成分濃度通常較好的是30wt%~60wt%左右。The optical waveguide film of the present invention can be easily produced by dissolving a resin composition containing the components (A) to (C) in a solvent, applying it on a substrate, and removing the solvent. An optical waveguide film is produced. The solvent to be used herein is not particularly limited as long as it can dissolve the resin composition. For example, acetone, methyl ethyl ketone, methyl cellosolve, ethyl cellosolve, toluene, N, N can be used. a solvent such as dimethylformamide, N,N-dimethylacetamide or propylene glycol monomethyl ether or a mixed solvent of these. The solid content concentration in the resin solution is usually preferably from about 30% by weight to about 60% by weight.
本發明中的光波導膜的厚度並無特別限定,乾燥後的厚度通常為10μm~250μm。若為10μm或10μm以上,則有可放大光波導膜與受發光元件或光纖(fiber optics)的結合容許度(tolerance)的優點,若為250μm或250μm以下,則有提昇光波導膜與受發光元件或光纖的結合效率的優點。就以上觀點而言,該膜的厚度更好的是40μm~90μm的範圍。The thickness of the optical waveguide film in the present invention is not particularly limited, and the thickness after drying is usually 10 μm to 250 μm. When it is 10 μm or more, there is an advantage that the coupling tolerance of the optical waveguide film and the light-receiving element or the optical fiber optics can be amplified, and if it is 250 μm or less, the optical waveguide film and the light-emitting are improved. The advantage of the combined efficiency of components or fibers. From the above viewpoints, the thickness of the film is more preferably in the range of 40 μm to 90 μm.
本發明中的光波導形成用樹脂膜的製造過程中所用的基材,是支撐光波導形成用膜的支撐體,其材料並無特別限定,以就在後面步驟中容易剝離光波導形成用膜、且具有耐熱性及耐溶劑性的觀點而言,較好地可列舉:聚對苯二甲酸乙二酯等聚酯,聚丙烯、聚乙烯等。該基材的厚度較好的是5μm~50μm的範圍。若為5μm或5μm以上,則有可容易獲得作為支撐體的強度的優點,若為50μm或50μm以下,則在形成圖案(pattefn)時,有與遮罩(mask)的間隙(gap)變小、且可形成更微細的圖案的優點。就以上觀點而言,該基材的厚度更好的是10μm~40μm的範圍,特別好的是20μm~30μm。The substrate used in the production process of the resin film for forming an optical waveguide of the present invention is a support for supporting the film for forming an optical waveguide, and the material thereof is not particularly limited, so that the film for forming an optical waveguide can be easily peeled off in a later step. Further, from the viewpoint of heat resistance and solvent resistance, polyesters such as polyethylene terephthalate, polypropylene, polyethylene, and the like are preferable. The thickness of the substrate is preferably in the range of 5 μm to 50 μm. When the thickness is 5 μm or more, the strength as a support can be easily obtained. When the thickness is 50 μm or less, the gap with the mask becomes small when a pattern is formed (pattefn). And the advantage of forming a finer pattern. From the above viewpoints, the thickness of the substrate is more preferably in the range of 10 μm to 40 μm, particularly preferably 20 μm to 30 μm.
作為設置於以上述方式而獲得的基材上的光波導形成用膜,例如可藉由捲繞成輥狀而容易地儲存。另外,視需要,亦可在光波導形成用膜上設置保護膜。而且,為了在後面的步驟中容易剝離光波導形成用膜,上述基材及保護膜亦可實施抗靜電處理等。The film for forming an optical waveguide provided on the substrate obtained in the above manner can be easily stored, for example, by being wound into a roll shape. Further, a protective film may be provided on the film for forming an optical waveguide as needed. Further, in order to easily peel off the film for forming an optical waveguide in the subsequent step, the substrate and the protective film may be subjected to an antistatic treatment or the like.
以下,對使用由上述方式而獲得的光波導形成用樹脂膜來形成光波導的製造方法進行說明。作為該方法例如可列舉以下方法:在存在保護膜時,將保護膜除去後,對自基材剝離的下部披覆膜,於基板上一邊進行加熱一邊進行壓接,藉此進行積層。此處,就密著性及追隨性觀點而言,較好的是在減壓下進行積層。該樹脂膜的加熱溫度較好的是設為50℃~130℃,壓接壓力較好的是0.1Mpa~1.0Mpa左右(1kgf/cm2 ~10kgf/cm2 左右),但並不特別限定於該些條件。Hereinafter, a method of manufacturing an optical waveguide using the resin film for forming an optical waveguide obtained in the above manner will be described. For example, in the case where the protective film is removed, the protective film is removed, and the lower coating film peeled off from the substrate is laminated while being heated while being heated on the substrate. Here, in terms of adhesion and followability, it is preferred to laminate under reduced pressure. The heating temperature of the resin film is preferably from 50 ° C to 130 ° C, and the pressure of the pressure is preferably from about 0.1 Mpa to about 1.0 Mpa (about 1 kgf/cm 2 to about 10 kgf/cm 2 ), but is not particularly limited thereto. These conditions.
下部包層的厚度並無特別限定,較好的是2μm~50μm。若下部包層的厚度為2μm或2μm以上,則可容易地將傳輸光封閉在芯部內部,若下部包層的厚度為50μm或50μm以下,則光波導1整體的厚度不會過大。本發明中,特別是就滿足以較小彎曲半徑進行彎曲的彎曲耐久性的觀點而言,下部包層的厚度更好的是2μm~20μm的範圍,特別好的是5μm~15μm的範圍。The thickness of the lower cladding layer is not particularly limited, but is preferably 2 μm to 50 μm. When the thickness of the lower cladding layer is 2 μm or more, the transmitted light can be easily enclosed inside the core. If the thickness of the lower cladding layer is 50 μm or less, the thickness of the entire optical waveguide 1 is not excessively large. In the present invention, the thickness of the lower cladding layer is more preferably in the range of 2 μm to 20 μm, particularly preferably in the range of 5 μm to 15 μm, from the viewpoint of satisfying the bending durability of bending with a small bending radius.
而且,所謂下部包層的厚度,是自芯部與下部包層的邊界至下部包層的下表面為止的值。Further, the thickness of the lower cladding layer is a value from the boundary between the core portion and the lower cladding layer to the lower surface of the lower cladding layer.
接著,藉由光或加熱而使下部披覆膜硬化,並以同樣的方法將折射率高於下部披覆膜的芯部膜進行積層。活性光線通過稱為原圖(artwork)的負或正遮罩圖案,而呈圖像狀地照射到如此積層而成的樹脂膜上。作為活性光線的光源,例如可列舉:碳弧(carbon arc)燈、水銀蒸汽電弧(mercury vapor arc)燈、超高壓水銀燈、高壓水銀燈、氙氣燈(xenon lamp)等有效放射紫外線的公知的光源。另外,亦可使用照相用泛光(flood)電燈、太陽燈等有效放射可見光的光源。Next, the lower cladding film is cured by light or heating, and a core film having a higher refractive index than that of the lower cladding film is laminated in the same manner. The active light is irradiated onto the resin film thus laminated in an image-like manner by a negative or positive mask pattern called an artwork. Examples of the light source of the active light include a carbon arc lamp, a mercury vapor arc lamp, an ultrahigh pressure mercury lamp, a high pressure mercury lamp, and a xenon lamp, and the like. Further, a light source for efficiently radiating visible light such as a flood light or a sun light for photography may be used.
芯部31的高度並無特別限定,較好的是10μm~150μm。若芯部的高度為10μm或10μm以上,則光波導形成後的芯部與受發光元件或光纖的結合中對準容許度不會變小;若芯部的高度為150μm或150μm以下,則光波導形成後的芯部與受發光元件或光纖的結合中,結合效率不會變小。在本發明中,特別是就滿足以較小彎曲半徑進行彎曲的彎曲耐久性的觀點而言,芯部的高度更好的是30μm~120μm的範圍,特別好的是50μm~90μm的範圍。The height of the core portion 31 is not particularly limited, but is preferably 10 μm to 150 μm. When the height of the core is 10 μm or more, the alignment tolerance of the core after the formation of the optical waveguide and the light-receiving element or the optical fiber does not become small; if the height of the core is 150 μm or less, the light is light. In the combination of the core after the waveguide is formed and the light-receiving element or the optical fiber, the bonding efficiency does not become small. In the present invention, in particular, from the viewpoint of satisfying the bending durability of bending with a small bending radius, the height of the core portion is more preferably in the range of 30 μm to 120 μm, particularly preferably in the range of 50 μm to 90 μm.
接著,在曝光後,藉由濕式(wet)顯影、乾式(dry)顯影等而除去未曝光部分並進行顯影,而製造芯部圖案(core pattern)。此處,關於芯部圖案,重要的是在後面的與撓性電配線基板進行接合時,在彎曲部中不與電配線重疊。Next, after the exposure, the unexposed portion is removed by wet development, dry development, or the like, and development is performed to produce a core pattern. Here, it is important that the core pattern does not overlap with the electric wiring in the bent portion when it is joined to the flexible electric wiring substrate later.
關於顯影,就濕式顯影而言,可使用有機溶劑、鹼性水溶液、水系顯影液等與上述樹脂膜的組成相對應的顯影液,且藉由例如噴霧(spray)、搖動浸漬、刷洗(brushing)、刮塗(scrapping)等公知的方法進行顯影。Regarding development, in the case of wet development, a developer corresponding to the composition of the above resin film such as an organic solvent, an alkaline aqueous solution, or an aqueous developer can be used, and by, for example, spraying, shaking, and brushing (brushing) Development by a known method such as scrapping.
作為顯影液,較好的是使用有機溶劑、鹼性水溶液等安全、穩定、且操作性良好的顯影液。上述有機溶劑系顯影液例如可列舉:1,1,1-三氯乙烷、N-甲基吡咯烷酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、環環己酮、甲基異丁基酮、γ-丁內酯等。為了防止起火,這些有機溶劑中可添加1wt%~20wt%的範圍的水。As the developer, a developer which is safe, stable, and has good handleability, such as an organic solvent or an alkaline aqueous solution, is preferably used. Examples of the organic solvent-based developing solution include 1,1,1-trichloroethane, N-methylpyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, and a ring. Cyclohexanone, methyl isobutyl ketone, γ-butyrolactone, and the like. In order to prevent ignition, water in the range of 1% by weight to 20% by weight may be added to these organic solvents.
作為上述鹼性水溶液的鹼,例如可使用:鋰、鈉或鉀的氫氧化物等氫氧化鹼,鋰、鈉、鉀或銨的碳酸鹽或重碳酸鹽等碳酸鹼,磷酸鉀、磷酸鈉等鹼金屬磷酸鹽,焦磷酸鈉、焦磷酸鉀等鹼金屬焦磷酸鹽等。另外,用於顯影的鹼性水溶液較好的是可列舉:例如0.1wt%~5wt%碳酸鈉的稀薄溶液、0.1wt%~5wt%碳酸鉀的稀薄溶液、0.1wt%~5wt%氫氧化鈉的稀薄溶液、0.1wt%~5wt%四硼酸鈉的稀薄溶液等。另外,用於顯影的鹼性水溶液的pH值較好的是設為9~14的範圍,且其溫度可根據感光性樹脂組成物層的顯影性進行調節。另外,在鹼性水溶液中可添加表面活性劑、消泡劑、用以促進顯影的少量有機溶劑等。As the base of the alkaline aqueous solution, for example, an alkali hydroxide such as a hydroxide of lithium, sodium or potassium, a carbonate such as lithium, sodium, potassium or ammonium carbonate or a bicarbonate, a potassium phosphate, a sodium phosphate or the like can be used. Alkali metal phosphate, alkali metal pyrophosphate such as sodium pyrophosphate or potassium pyrophosphate. Further, the alkaline aqueous solution for development is preferably, for example, a thin solution of 0.1% by weight to 5% by weight of sodium carbonate, a thin solution of 0.1% by weight to 5% by weight of potassium carbonate, and 0.1% by weight to 5% by weight of sodium hydroxide. a thin solution, a thin solution of 0.1 wt% to 5 wt% sodium tetraborate, and the like. Further, the pH of the alkaline aqueous solution used for development is preferably in the range of 9 to 14, and the temperature thereof can be adjusted in accordance with the developability of the photosensitive resin composition layer. Further, a surfactant, an antifoaming agent, a small amount of an organic solvent for promoting development, and the like may be added to the alkaline aqueous solution.
上述水系顯影液是由水或鹼水溶液與1種或1種以上的有機溶劑所構成。此處,鹼物質除了上述物質以外,例如可列舉:硼砂、偏矽酸鈉、氫氧化四甲基銨、乙醇胺、乙二胺、二乙三胺、2-胺基-2-羥基甲基-1,3-丙烷二醇、1,3-二胺基丙醇-2、嗎啉等。顯影液的pH值較好的是在可充分使光阻劑顯影的範圍內設定為儘可能小的值,較好的是pH值設為8~12,更好的是pH值設為9~10。作為上述有機溶劑,例如可列舉:三丙酮醇、丙酮、乙酸乙酯、具有碳數為1~4的烷氧基的烷氧乙醇、乙醇、異丙醇、丁醇、二乙二醇單甲醚、二乙二醇單乙醚、二乙二醇單丁醚等。該些有機溶劑可單獨使用或將2種或2種以上組合使用。通常,有機溶劑的濃度較好的是設為2wt%~90wt%,其溫度可根據顯影性進行調整。另外,在水系顯影液中亦可添加少量界面活性劑、消泡劑等。The aqueous developing solution is composed of one or more organic solvents, such as water or an aqueous alkali solution. Here, in addition to the above substances, the alkali substance may, for example, be borax, sodium metasilicate, tetramethylammonium hydroxide, ethanolamine, ethylenediamine, diethylenetriamine or 2-amino-2-hydroxymethyl- 1,3-propanediol, 1,3-diaminopropanol-2, morpholine, and the like. The pH of the developer is preferably set to a value as small as possible within a range in which the photoresist can be sufficiently developed. Preferably, the pH is set to 8 to 12, and more preferably, the pH is set to 9 to 10. Examples of the organic solvent include triacetone alcohol, acetone, ethyl acetate, alkoxyethanol having an alkoxy group having 1 to 4 carbon atoms, ethanol, isopropanol, butanol, and diethylene glycol monomethyl. Ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, and the like. These organic solvents may be used singly or in combination of two or more kinds. Usually, the concentration of the organic solvent is preferably from 2% by weight to 90% by weight, and the temperature thereof can be adjusted according to developability. Further, a small amount of a surfactant, an antifoaming agent, or the like may be added to the aqueous developing solution.
另外,視需要可併用2種或2種以上的顯影方法。顯影的方式例如可列舉:浸漬(dip)方式、攪拌方式、高壓噴霧方式等噴霧(spray)方式、刷洗(brushing)、珀擊(slapping)等。Further, two or more development methods may be used in combination as needed. Examples of the development method include a spray method such as a dip method, a stirring method, and a high-pressure spray method, brushing, and slapping.
作為顯影後的處理,可視需要進行60℃~250℃左右的加熱或0.1mJ/cm2 ~1000mJ/cm2 左右的曝光,藉此使芯部圖案進一步硬化而使用。As a treatment after the development, heating optionally about 60 ℃ ~ 250 ℃ or 0.1mJ / cm 2 ~ 1000mJ exposure of about 2 / cm, whereby the core portion further harden the pattern used.
接著,以同樣的方法積層折射率低於芯部膜的上部披覆膜,而製作光波導。上部包層的厚度若為可嵌入芯部的範圍,則並無特別限定,乾燥後的厚度較好的是2μm~50μm,就滿足以較小彎曲半徑進行彎曲的彎曲耐久性的觀點而言,其厚度更好的是2μm~20μm的範圍,特別好的是5μm~15μm的範圍。上部包層的厚度與最初所形成的下部包層的厚度可相同亦可不同。而且,此處所示的上部包層的厚度是,自芯部與上部包層的邊界至上部包層的上表面為止的值。Next, an optical waveguide was produced by laminating an upper cladding film having a lower refractive index than that of the core film in the same manner. The thickness of the upper cladding layer is not particularly limited as long as it can be embedded in the core portion, and the thickness after drying is preferably 2 μm to 50 μm, and the bending durability against bending with a small bending radius is satisfied. The thickness thereof is more preferably in the range of 2 μm to 20 μm, particularly preferably in the range of 5 μm to 15 μm. The thickness of the upper cladding layer may be the same as or different from the thickness of the lower cladding layer initially formed. Further, the thickness of the upper cladding layer shown here is a value from the boundary between the core portion and the upper cladding layer to the upper surface of the upper cladding layer.
[撓性電配線基板][Flexible Electrical Wiring Substrate]
作為撓性電配線基板,較好的是可使用FPC(Flexible Printed Circuit,柔性印刷電路)基板。FPC基板的基板材料可使用:聚醯亞胺、聚醯胺、聚醚醯亞胺、聚對苯二甲酸乙二酯、液晶聚合物等,但一般就耐熱性或容易獲得的觀點而言,使用聚醯亞胺。作為市售品,例如可列舉:使用Kapton(東麗-杜邦(Toray-Dupont)股份有限公司製造)的FPC基板。As the flexible electric wiring substrate, an FPC (Flexible Printed Circuit) substrate can be preferably used. The substrate material of the FPC substrate can be: polyimine, polyamine, polyetherimide, polyethylene terephthalate, liquid crystal polymer, etc., but generally, from the viewpoint of heat resistance or easy availability, Polyimine is used. As a commercial item, the FPC board|substrate which used Kapton (made by Toray-Dupont Co., Ltd.) is mentioned, for example.
此處,構成撓性電配線基板的基板的厚度並無特別限定,可根據光電混載基板自身所要求的厚度,來適當決定該基板的厚度,具體而言,較好的是5μm~50μm的範圍。Here, the thickness of the substrate constituting the flexible electric wiring substrate is not particularly limited, and the thickness of the substrate can be appropriately determined depending on the thickness required for the opto-electric hybrid board itself. Specifically, it is preferably in the range of 5 μm to 50 μm. .
另外,重要的是,在撓性電配線基板中的電配線與光波導接合時,以與彎曲部中的芯部不重疊的方式進行配線。In addition, when the electric wiring in the flexible electric wiring board is joined to the optical waveguide, it is important to perform wiring so as not to overlap the core portion in the curved portion.
[光電混載基板][Optical hybrid substrate]
將上述光波導膜及撓性電配線基板進行接合,而製造本發明的光電混載基板。The optical waveguide film and the flexible electric wiring substrate are joined to each other to manufacture the opto-electric hybrid board of the present invention.
在光波導膜與撓性電配線基板進行接合時,視需要可使用接著劑。接著劑的種類可根據光波導膜及撓性電配線基板的材質而適當決定。When the optical waveguide film is bonded to the flexible electric wiring substrate, an adhesive may be used as needed. The type of the adhesive can be appropriately determined depending on the material of the optical waveguide film and the flexible electric wiring substrate.
為了使光電混載基板具有可撓性,較好的是接著劑在硬化後具有柔軟性,具體而言,硬化後的彈性模數較好的是700Mpa或700Mpa以下,更好的是600Mpa或600Mpa以下,特別好的是500Mpa或500Mpa以下。另外,就作為接著劑的強度的觀點而言,較好的是1Mpa或1Mpa以上,更好的是5Mpa或5Mpa以上。In order to make the opto-electric hybrid substrate flexible, it is preferred that the adhesive has flexibility after curing. Specifically, the elastic modulus after hardening is preferably 700 MPa or less, more preferably 600 MPa or less. Particularly good is 500Mpa or less. Further, from the viewpoint of the strength of the adhesive, it is preferably 1 Mpa or more, more preferably 5 Mpa or more.
關於接著劑的種類,就丙烯酸系橡膠系接著劑或市售品而言,較好的是可例示:日立化成工業股份有限公司製造的高耐熱接著絕緣材KS7003(彈性模數700MPa)、日立化成聚合物(Hitachi Kasei Polymer)股份有限公司製造的撓性印刷配線板用接著劑Hi-Bon 808(彈性模數50MPa)等。For the type of the adhesive, the acrylic rubber-based adhesive or the commercially available product is preferably a high heat-resistant adhesive insulating material KS7003 (elastic modulus 700 MPa) manufactured by Hitachi Chemical Co., Ltd., and Hitachi Chemical Co., Ltd. Polymer (Hitachi Kasei Polymer) Co., Ltd., an adhesive for Hi-Bon 808 (elastic modulus 50 MPa) or the like for a flexible printed wiring board.
光波導膜與撓性電配線基板接合的方法並無特別限定,就密著性、防氣泡捲入的觀點而言,較好的是使用輥貼合機(roll laminator)、或平板型貼合機的方法。使用輥貼合機(roll laminator)時的層壓(laminate)溫度較好的是設為室溫(25℃)~100℃的範圍。若層壓溫度為室溫(25℃)或室溫以上,則撓性電配線基板與光波導的密著性會提昇;若層壓溫度為100℃或100℃以下,則接著劑層不會流動,而可獲得需要的膜厚。就以上觀點而言,更好的是40℃~100℃的範圍。壓力較好的是0.2MPa~1.0MPa(1kgf/cm2 ~10kgf/cm2 ),層壓速度較好的是0.1m/min~3m/min,但並不特別限定於這些條件。The method of bonding the optical waveguide film to the flexible electric wiring substrate is not particularly limited, and from the viewpoint of adhesion and prevention of bubble entrapment, it is preferable to use a roll laminator or a flat type lamination. Machine method. The lamination temperature at the time of using a roll laminator is preferably in the range of room temperature (25 ° C) to 100 ° C. When the laminating temperature is room temperature (25 ° C) or more, the adhesion between the flexible electric wiring substrate and the optical waveguide is improved; if the lamination temperature is 100 ° C or less, the adhesive layer is not Flow to obtain the desired film thickness. From the above viewpoints, it is more preferably in the range of 40 ° C to 100 ° C. The pressure is preferably 0.2 MPa to 1.0 MPa (1 kgf/cm 2 to 10 kgf/cm 2 ), and the lamination speed is preferably 0.1 m/min to 3 m/min, but is not particularly limited to these conditions.
另外,所謂平板型貼合機,是指將積層材料夾於一對平板間,對平板進行加壓,從而使之壓接的貼合機,較好的是例如可使用真空加壓式貼合機。此處的加熱溫度較好的是設為50℃~100℃,壓接壓力較好的是設為0.1MPa~1.0MPa(1kgf/cm2 ~10kgf/cm2 ),但並不特別限定於這些條件。In addition, the flat type laminating machine is a laminating machine in which a laminated material is sandwiched between a pair of flat plates, and the flat plate is pressed to be pressed, and it is preferable to use, for example, a vacuum press fit. machine. The heating temperature here is preferably from 50 ° C to 100 ° C, and the pressure is preferably from 0.1 MPa to 1.0 MPa (1 kgf / cm 2 to 10 kgf / cm 2 ), but is not particularly limited thereto. condition.
實施例Example
以下,對本發明的實施例進行更具體的說明,但本發明不受這些實施例任何限定。Hereinafter, the embodiments of the present invention will be more specifically described, but the present invention is not limited by these examples.
(評價方法)(evaluation method)
1.拉伸彈性模數及拉伸強度1. Tensile modulus and tensile strength
自作為測定對象的膜獲得寬度為10mm、長度為70mm的樣本(sample),使用拉伸試驗機(Orientec股份有限公司製造的「RTM-100」),依據JIS-K7127,按以下條件進行測定。A sample having a width of 10 mm and a length of 70 mm was obtained from the film to be measured, and the measurement was carried out under the following conditions using a tensile tester ("RTM-100" manufactured by Orientec Co., Ltd.) in accordance with JIS-K7127.
條件:夾具(chuck)間的距離為50mm、溫度為25℃、拉伸速度為50mm/minCondition: The distance between the chucks is 50 mm, the temperature is 25 ° C, and the stretching speed is 50 mm/min.
拉伸彈性模數是使用拉伸應力-應變曲線的最初的直線部分根據以下所示式而算出的。另外,在拉伸應力-應變曲線中,將直至斷裂為止的最大強度作為拉伸強度。The tensile elastic modulus is calculated from the first straight line portion using the tensile stress-strain curve according to the following formula. Further, in the tensile stress-strain curve, the maximum strength up to the fracture was taken as the tensile strength.
拉伸彈性模數(MPa)=直線上的2點間的應力之差(N)÷光波導膜原來的平均截面積(mm2 )÷此2點間的應變之差Tensile modulus of elasticity (MPa) = difference in stress between two points on a straight line (N) The original average cross-sectional area of the optical waveguide film (mm 2 ) ÷ the difference between the two points
2.彎曲耐久試驗2. Bending endurance test
使用如圖3所示的使光電混載基板滑動的形式的彎曲耐久試驗機,對各實施例及比較例中所製造的光電混載基板進行彎曲耐久試驗。試驗是在以下情況下進行,即,針對~各實施例及比較例中所獲得的光電混載基板,相對於彎曲軸7而將光波導膜配置於內側。另外,對於彎曲半徑,亦對1.5mm的條件及1.0mm的條件之2種條件進行試驗,並在滑動速度為80mm/秒、X1 ~X2 間的距離為20mm的條件下進行試驗。至於評價,對於實施例1、比較例1及參考例1是每1萬次而觀察斷裂的有無並求出未斷裂的最大次數,對於比較例2是每1000次而觀察斷裂的有無並求出未斷裂的最大次數。The optical hybrid substrate manufactured in each of the examples and the comparative examples was subjected to a bending endurance test using a bending endurance tester in the form of sliding the opto-electric hybrid substrate as shown in FIG. The test was carried out in the case where the optical hybrid substrate obtained in each of the examples and the comparative examples was placed on the inner side with respect to the bending axis 7 . Further, the bending radius was also tested under the conditions of 1.5 mm and 1.0 mm, and the test was carried out under the conditions of a sliding speed of 80 mm/sec and a distance between X 1 and X 2 of 20 mm. As for the evaluation, in Example 1, Comparative Example 1, and Reference Example 1, the presence or absence of the fracture was observed every 10,000 times, and the maximum number of unbroken times was determined. For Comparative Example 2, the presence or absence of the fracture was observed every 1000 times. The maximum number of times that it has not been broken.
實施例1Example 1
(1-1)光波導膜的製作(1-1) Fabrication of optical waveguide film
[包層形成用樹脂膜的製作][Production of Resin Film for Cladding Formation]
稱量48質量份的作為(A)黏合劑聚合物(binder polymer)的苯氧樹脂(商品名:PHENO TOHTO YP-70、東都化成股份有限公司製造)、49.6質量份的作為(B)光聚合性化合物的脂環族二環氧基羧酸酯(商品名:KRM-2110、分子量:252、旭電化工業股份有限公司製造)、2質量份的作為(C)光聚合起始劑的三苯基鋶六氟銻酸鹽(商品名:SP-170、旭電化工業股份有限公司製造)、0.4質量份的作為增感劑的SP-100(商品名、旭電化工業股份有限公司製造)、40質量份的作為有機溶劑的丙二醇單甲醚乙酸酯放入至廣口聚乙烯瓶中,使用機械攪拌器(mechanical stirrer)、軸(shaft)及螺旋槳(propeller),在溫度為25℃、旋轉數為400rpm的條件下攪拌6小時,調合成包層形成用樹脂清漆(varnish)A。然後,使用孔徑為2μm的聚四氟乙烯過濾器(polyflon filter)(商品名:PF020、Advantec Toyo股份有限公司製造),在溫度為25℃、壓力為0.4Mpa的條件下加壓過濾,進而使用真空泵(pump)及鐘罩(bell jar)在減壓度為50mmHg的條件下減壓脫泡15分鐘。48 parts by mass of a phenoxy resin (trade name: PHENO TOHTO YP-70, manufactured by Tohto Kasei Co., Ltd.) as a (A) binder polymer, and 49.6 parts by mass of (B) photopolymerization were weighed. An alicyclic diepoxy carboxylic acid ester of a compound (trade name: KRM-2110, molecular weight: 252, manufactured by Asahi Kasei Kogyo Co., Ltd.), and 2 parts by mass of triphenyl as (C) photopolymerization initiator Based on hexafluoroantimonate (trade name: SP-170, manufactured by Asahi Kasei Kogyo Co., Ltd.), 0.4 parts by mass of SP-100 (trade name, manufactured by Asahi Kagaku Kogyo Co., Ltd.) as a sensitizer, 40 A mass part of propylene glycol monomethyl ether acetate as an organic solvent was placed in a wide-mouth polyethylene bottle, using a mechanical stirrer, a shaft, and a propeller at a temperature of 25 ° C. The mixture was stirred at a number of 400 rpm for 6 hours to prepare a resin varnish A for cladding formation. Then, a polyflon filter (trade name: PF020, manufactured by Advantec Toyo Co., Ltd.) having a pore size of 2 μm was used, and the mixture was filtered under pressure at a temperature of 25 ° C and a pressure of 0.4 MPa, and further used. A vacuum pump and a bell jar were degassed under reduced pressure for 15 minutes under a reduced pressure of 50 mmHg.
使用塗佈機(Multi-Coater TM-MC、HIRANO TECSEED股份有限公司製造),將上述所得的包層形成用樹脂清漆A塗佈於聚醯胺膜(商品名:Mictron、東麗股份有限公司製造、厚度:12μm)的電暈處理面上,在80℃下乾燥10分鐘,然後在100℃下乾燥10分鐘,接著,貼附作為保護膜的脫模PET膜(商品名:Purex A31、帝人杜邦膜(Teijin Dupont Films)股份有限公司、厚度:25μm)而使脫模面成為樹脂側,而獲得包層形成用樹脂膜。此時樹脂層的厚度可藉由調節塗佈機的間隙而進行任意的調整,在本實施例中硬化後的膜厚調節成下部包層為20μm、上部包層為70μm。The resin varnish A for cladding formation obtained above was applied to a polyimide film using a coater (Multi-Coater TM-MC, manufactured by HIRANO TECSEED Co., Ltd.) (trade name: Mictron, Toray Co., Ltd.) , corona-treated surface of thickness: 12 μm), dried at 80 ° C for 10 minutes, and then dried at 100 ° C for 10 minutes, and then attached as a protective film of a release PET film (trade name: Purex A31, Teijin DuPont The film (Teijin Dupont Films Co., Ltd., thickness: 25 μm) was used to form the release side as the resin side, and a resin film for cladding formation was obtained. At this time, the thickness of the resin layer can be arbitrarily adjusted by adjusting the gap of the coater. In the present embodiment, the film thickness after hardening is adjusted to 20 μm for the lower cladding layer and 70 μm for the upper cladding layer.
[芯部層形成用樹脂膜的製作][Production of Resin Film for Core Layer Formation]
使用26質量份的作為(A)黏合劑聚合物的苯氧樹脂(商品名:PHENO TOHTO YP-70、東都化成股份有限公司製造)、作為(B)光聚合性化合物的36質量份的9,9-雙[4-(2-丙烯醯氧基乙氧基)苯基]芴(商品名:A-BPEF、新中村化學工業股份有限公司製造)、及36質量份的雙酚A型丙烯酸環氧酯(商品名:EA-1020、新中村化學工業股份有限公司製造)、作為(C)光聚合起始劑的1質量份的雙(2,4,6-三甲基苯甲醯基)苯基氧化膦(商品名:Irgacure 819、汽巴精化(Ciba Specialty Chemicals)公司製造)、及1質量份的1-[4-(2-羥基乙氧基)苯基]-2-羥基-2-甲基-1-丙烷-1-酮(商品名:Irgacure 2959、汽巴精化公司製造)、40質量份的作為有機溶劑的丙二醇單甲醚乙酸酯,除此以外,以與上述製造例相同的方法以及條件調合芯部層形成用樹脂清漆B。然後,以與上述製造例相同的方法以及條件進行加壓過濾,進而減壓脫泡。26 parts by mass of a phenoxy resin (trade name: PHENO TOHTO YP-70, manufactured by Tohto Kasei Co., Ltd.) as the (A) binder polymer, and 36 parts by mass of the (B) photopolymerizable compound were used. 9-bis[4-(2-acryloxyethoxy)phenyl]anthracene (trade name: A-BPEF, manufactured by Shin-Nakamura Chemical Co., Ltd.), and 36 parts by mass of bisphenol A type acrylic ring Oxygen ester (trade name: EA-1020, manufactured by Shin-Nakamura Chemical Co., Ltd.), and 1 part by mass of bis(2,4,6-trimethylbenzylidene) as (C) photopolymerization initiator Phenylphosphine oxide (trade name: Irgacure 819, manufactured by Ciba Specialty Chemicals Co., Ltd.), and 1 part by mass of 1-[4-(2-hydroxyethoxy)phenyl]-2-hydroxy- 2-methyl-1-propan-1-one (trade name: Irgacure 2959, manufactured by Ciba Specialty Chemicals Co., Ltd.), 40 parts by mass of propylene glycol monomethyl ether acetate as an organic solvent, in addition to the above The resin varnish B for core layer formation was blended in the same method and conditions as in the production example. Then, pressure filtration was carried out in the same manner and under the same conditions as in the above production examples, and further defoaming under reduced pressure.
以與上述製造例相同的方法,將上述所得的芯部層形成用樹脂清漆B塗佈於PET 膜(商品名:COSMOSHINEA1517、東洋紡織股份有限公司製造、厚度:16μm)的非處理面上並進行乾燥,接著,貼附作為保護膜的脫模PET膜(商品名:Purex A31、帝人杜邦膜股份有限公司、厚度:25μm)使脫模面成為樹脂側,而獲得芯部層形成用樹脂膜。在本實施例中,調整塗佈機的間隙使硬化後的膜厚為50μm。In the same manner as in the above-described production example, the resin layer varnish B for core layer formation obtained above was applied to a non-treated surface of a PET film (trade name: COSMOSHINEA 1517, manufactured by Toyobo Co., Ltd., thickness: 16 μm). After drying, a release PET film (trade name: Purex A31, Teijin DuPont Film Co., Ltd., thickness: 25 μm) as a protective film was attached, and the release surface was made into a resin side, and a resin film for forming a core layer was obtained. In the present embodiment, the gap of the coater was adjusted so that the film thickness after hardening was 50 μm.
[光波導膜的製作][Production of Optical Waveguide Film]
將上述所得的下部包層形成用樹脂膜的保護膜即脫模PET膜(Purex A31)剝離,使用紫外線曝光機(OAK製作所股份有限公司製造、EXM-1172)自樹脂側(基材膜的相對側)照射1J/cm2 的紫外線(波長365nm),接著在80℃下進行10分鐘的加熱處理,藉此形成下部包層。The release PET film (Purex A31) which is a protective film of the resin film for forming a lower cladding layer obtained above was peeled off, and the relative side of the base film was used by using an ultraviolet exposure machine (manufactured by OAK Co., Ltd., EXM-1172). The side was irradiated with 1 J/cm 2 of ultraviolet rays (wavelength: 365 nm), followed by heat treatment at 80 ° C for 10 minutes, thereby forming a lower cladding layer.
接著,使用輥貼合機(Hitachi Kasei Techno Plant股份有限公司製造、HLM-1500),在壓力為0.4MPa、溫度為50℃、層壓速度為0.2m/min的條件下,將上述芯部層形成用樹脂膜層壓於該下部包層上,接著,使用作為平板型貼合機的真空加壓式貼合機(名機製作所股份有限公司製造、MVLP-500),進行真空處理成500Pa或500Pa以下後,在壓力為0.4MPa、溫度為50℃、加壓時間為30秒的條件下進行加熱壓接,而形成芯部層。Then, using a roll laminator (manufactured by Hitachi Kasei Techno Plant Co., Ltd., HLM-1500), the core layer was placed under the conditions of a pressure of 0.4 MPa, a temperature of 50 ° C, and a lamination speed of 0.2 m/min. The resin film for forming is laminated on the lower cladding layer, and then vacuum-treated into 500 Pa or by using a vacuum pressure type laminator (manufactured by Nago Seisakusho Co., Ltd., MVLP-500) as a flat type laminator. After 500 Pa or less, the core layer was formed by heating and pressure bonding under the conditions of a pressure of 0.4 MPa, a temperature of 50 ° C, and a press time of 30 seconds.
接著,使用寬度為50μm的負型光罩,藉由上述紫外線曝光機照射0.6J/cm2 的紫外線(波長365nm),接著在80℃下曝光5分鐘後進行加熱,以使芯部形成如圖7所示的形狀。Next, a negative-type photomask having a width of 50 μm was used, and ultraviolet rays (wavelength: 365 nm) of 0.6 J/cm 2 were irradiated by the above-mentioned ultraviolet exposure machine, followed by exposure at 80° C. for 5 minutes, followed by heating to form a core portion as shown in the figure. The shape shown in 7.
然後,將支撐膜即PET膜剝離,使用顯影液(丙二醇單甲醚乙酸酯/N,N-二甲基乙醯胺=8/2、質量比),對芯部圖案進行顯影。接著,使用清洗液(異丙醇)進行清洗,並在100℃下加熱乾燥10分鐘。Then, the PET film which is a support film was peeled off, and the core pattern was developed using a developing solution (propylene glycol monomethyl ether acetate / N, N-dimethylacetamide = 8/2, mass ratio). Next, it was washed with a washing liquid (isopropyl alcohol), and dried by heating at 100 ° C for 10 minutes.
接著,以與上述相同的層壓條件,層壓上述包層形成用樹脂膜來作為上部包層。進而,對兩面照射合計為25J/cm2 的紫外線(波長365nm)後,在160℃下進行1小時的加熱處理,藉此製作形成了上部包層並且基材膜配置於外側的撓性光波導。進而,為了剝離聚醯胺膜,將該撓性光波導於85℃/85%的高溫高濕條件下進行24小時處理,而製作除去了基材膜的撓性光波導。Next, the above-mentioned resin film for forming a cladding layer was laminated as the upper cladding layer under the same lamination conditions as described above. Further, after irradiating ultraviolet rays (wavelength: 365 nm) having a total of 25 J/cm 2 on both surfaces, heat treatment was performed at 160 ° C for 1 hour to prepare a flexible optical waveguide in which an upper cladding layer was formed and a base film was disposed outside. . Further, in order to remove the polyimide film, the flexible optical waveguide was treated under high temperature and high humidity conditions of 85 ° C / 85% for 24 hours to prepare a flexible optical waveguide from which the base film was removed.
而且,使用Metricon公司製造的稜鏡耦合器(prism coupler)(Model 2010)測定芯部層及包層的折射率,可知,在波長為830nm下,芯部層為1.584,包層為1.550。另外,光源是使用850nm的面發光雷射((EXFO公司製造、FLS-300-01-VCL),受光感測器是使用Advantest股份有限公司製造的Q82214,藉由回截法(cutback method)(測定波導管長10cm、5cm、3cm、2cm,入射光纖:GI-50/125多模光纖(NA=0.20)、出射光纖:SI-114/125(NA=0.22)),測定所製作的光波導的傳輸損失,結果為0.05dB/cm。Further, the refractive index of the core layer and the cladding layer was measured using a prism coupler (Model 2010) manufactured by Metricon Co., Ltd., and it was found that the core layer was 1.584 and the cladding layer was 1.550 at a wavelength of 830 nm. In addition, the light source is a 850 nm surface-emitting laser ((EXFO-made, FLS-300-01-VCL), and the light-receiving sensor is Q82214 manufactured by Advantest Co., Ltd. by a cutback method ( Measuring waveguide lengths 10 cm, 5 cm, 3 cm, 2 cm, incident optical fiber: GI-50/125 multimode fiber (NA = 0.20), outgoing fiber: SI-114/125 (NA = 0.22)), measuring the fabricated optical waveguide The transmission loss was 0.05 dB/cm.
另外,藉由上述方法對所得的光波導膜的拉伸彈性模數及拉伸強度進行測定,結果可知,拉伸彈性模數為2,000MPa、拉伸強度為70MPa。Moreover, the tensile elastic modulus and tensile strength of the obtained optical waveguide film were measured by the above-mentioned method, and as a result, it was found that the tensile elastic modulus was 2,000 MPa and the tensile strength was 70 MPa.
(1-2)片狀(sheet)接著劑的製作(1-2) Production of sheet adhesive
添加100質量份的HTR-860P-3(帝國化學產業股份有限公司製造、商品名、含縮水甘油基的丙烯酸系橡膠、分子量100萬、Tg-7℃)、5.4質量份的YDCN-703(東都化成股份有限公司製造、商品名、鄰甲酚酚醛清漆型環氧樹脂、環氧當量210)、16.2質量份的YDCN-8170C(東都化成股份有限公司製造、商品名、雙苯酚F型環氧樹脂、環氧當量157)、15.3質量份的PLYOPHEN LF2882(大日本油墨化學工業(Dainippon Ink and Chemicals)股份有限公司製造、商品名、雙酚A酚醛清漆樹脂)、0.1質量份的NUCA-189(Nippon Unicar股份有限公司製造、商品名、γ-巰丙基三甲氧基矽烷)、0.3質量份的NUCA-1160(Nippon Unicar股份有限公司製造、商品名、γ-脲丙基三乙氧基矽烷)、30質量份的A-DPII(新中村化學工業股份有限公司製造、商品名、二季戊四醇六丙烯酸酯)、1.5質量份的Irgacure 369(汽巴精化公司製造、商品名、2-苄基-2-二甲胺基-1-(4-嗎啉基苯基)-丁酮-1-酮:I-369)、環己酮而攪拌混合,並進行真空脫氣。將該接著劑清漆塗佈於厚度為75μm的表面脫模處理聚對苯二甲酸乙二酯(帝人股份有限公司製造、Teijin Tetoron Film:A-31)上,在80℃下進行30分鐘的加熱乾燥而獲得黏接著片。在該黏接著片上層壓厚度為80μm的透光性支撐基材(THERMO股份有限公司製造、低密度聚對苯二甲酸乙二酯/乙酸乙烯酯/低密度聚對苯二甲酸乙二酯三層膜:FHF-100),藉此製作包括保護膜(表面脫模處理聚對苯二甲酸乙二酯)、黏接著劑層、及透光性支撐基材的片狀接著劑。黏接著劑層的厚度為10μm。100 parts by mass of HTR-860P-3 (manufactured by Imperial Chemical Industry Co., Ltd., trade name, glycidyl group-containing acrylic rubber, molecular weight of 1,000,000, Tg-7 ° C), and 5.4 parts by mass of YDCN-703 (East Capital) YCCN-8170C, manufactured by Toei Chemical Co., Ltd. , epoxy equivalent 157), 15.3 parts by mass of PLYOPHEN LF2882 (manufactured by Dainippon Ink and Chemicals Co., Ltd., trade name, bisphenol A novolak resin), 0.1 parts by mass of NUCA-189 (Nippon) Manufactured by Unicar Co., Ltd., trade name, γ-mercaptopropyltrimethoxydecane, 0.3 parts by mass of NUCA-1160 (manufactured by Nippon Unicar Co., Ltd., trade name, γ-ureidopropyl triethoxy decane), 30 parts by mass of A-DPII (manufactured by Shin-Nakamura Chemical Co., Ltd., trade name, dipentaerythritol hexaacrylate), 1.5 parts by mass of Irgacure 369 (manufactured by Ciba Specialty Chemicals Co., Ltd., trade name, 2-benzyl-2) -dimethylamino 1-(4-morpholinylphenyl)-butanone-1-one: I-369), cyclohexanone, stirred and mixed, and vacuum degassed. The adhesive varnish was applied to a surface release-treated polyethylene terephthalate (manufactured by Teijin Tetoron Film: A-31) having a thickness of 75 μm, and heated at 80 ° C for 30 minutes. Dry to obtain a sticky sheet. A light-transmitting support substrate having a thickness of 80 μm is laminated on the adhesive sheet (manufactured by THERMO Co., Ltd., low-density polyethylene terephthalate/vinyl acetate/low-density polyethylene terephthalate III) A film: FHF-100), thereby producing a sheet-like adhesive including a protective film (surface release-treated polyethylene terephthalate), an adhesive layer, and a light-transmitting support substrate. The thickness of the adhesive layer was 10 μm.
將如此而製作的片狀接著劑的黏接著劑層在160℃下硬化1小時,使用Hitachi High-Technologies股份有限公司製造的U-3310紫外可見分光光度計,測定透光率,可知,在波長為850nm下具有98%或98%以上的高透過率,透過損失相當於0.1dB或0.1dB以下。The adhesive layer of the sheet-like adhesive thus prepared was cured at 160 ° C for 1 hour, and the transmittance was measured using a U-3310 ultraviolet-visible spectrophotometer manufactured by Hitachi High-Technologies Co., Ltd., and it was found that the wavelength was With a high transmittance of 98% or more at 850 nm, the transmission loss is equivalent to 0.1 dB or less.
而且,藉由Metricon公司製造的稜鏡耦合器(Model 2010)測定折射率,可知,在波長為830nm下折射率為1.505。Further, the refractive index was measured by a 稜鏡 coupler (Model 2010) manufactured by Metricon, and it was found that the refractive index was 1.505 at a wavelength of 830 nm.
另外,藉由上述方法對所得的片狀接著劑的拉伸彈性模數進行測定,可知,拉伸彈性模數為350MPa。Moreover, the tensile elastic modulus of the obtained sheet-like adhesive was measured by the above method, and it was found that the tensile elastic modulus was 350 MPa.
(1-3)光電混載基板的製作(1-3) Production of Photoelectric Mixed Substrate
使用輥貼合機(Hitachi Kasei Techno Plant股份有限公司製造、HLM-1500),在壓力為0.4MPa、溫度為50℃、層壓速度為0.2m/min的條件下,將剝離了保護膜的片狀接著劑層壓於撓性光波導上。接著,使用切割機(dicing saw)(DISCO股份有限公司製造、DAD-341),將波導管加工成帶狀(長度為120mm.、寬度為2mm),自支撐基材側照射250mJ/cm2 的紫外線(365nm),使黏接著劑層與支撐基材界面的密著力降低並剝離支撐基材,而獲得帶有接著劑的光波導。Using a roll laminator (manufactured by Hitachi Kasei Techno Plant Co., Ltd., HLM-1500), the protective film was peeled off under the conditions of a pressure of 0.4 MPa, a temperature of 50 ° C, and a lamination speed of 0.2 m/min. The adhesive is laminated to the flexible optical waveguide. Then, using a dicing saw (manufactured by DISCO Co., Ltd., DAD-341), the waveguide was processed into a strip shape (length: 120 mm., width: 2 mm), and the substrate side was irradiated with 250 mJ/cm 2 . Ultraviolet rays (365 nm) reduce the adhesion of the adhesive layer to the interface of the support substrate and peel off the support substrate to obtain an optical waveguide with an adhesive.
接著,利用紫外線曝光機(DAINIPPON SCREEN股份有限公司製造、MAP-1200-L)附帶的遮罩對準曝光機機構,將帶有接著劑層的光波導定位在具有電配線的撓性電配線基板(長度為120mm、寬度為2mm、基材:Kapton100EN(藉由上述方法測定的拉伸強度為370MPa。)、基板厚度:25μm、銅電路厚度:12μm)的特定部位上,使用該輥貼合機在壓力為0.4MPa、溫度為80℃、層壓速度為0.2m/min的條件下暫時壓接後,在潔淨烘箱(C1eanOven)中以160℃加熱1小時,使撓性光波導與電配線基板接著,而獲得如圖7中表示為投影圖的光電混載基板。Next, a mask alignment exposure mechanism attached to the ultraviolet exposure machine (DAINIPPON SCREEN Co., Ltd., MAP-1200-L) is used to position the optical waveguide with the adhesive layer on the flexible electric wiring substrate having the electric wiring. (The roll bonding machine is used at a specific portion of a length of 120 mm, a width of 2 mm, a substrate: Kapton 100EN (tensile strength measured by the above method: 370 MPa), substrate thickness: 25 μm, copper circuit thickness: 12 μm) After temporary pressure bonding under the conditions of a pressure of 0.4 MPa, a temperature of 80 ° C, and a lamination speed of 0.2 m/min, the film was heated at 160 ° C for 1 hour in a clean oven (C1ean Oven) to form a flexible optical waveguide and an electric wiring substrate. Next, an opto-electric hybrid substrate as shown in FIG. 7 as a projection image is obtained.
此處,藉由Hitachi High-Technologies股份有限公司製造的U-3310分光光度計,測定撓性電配線板的基材即KaptonEN的透光率,可知,在波長為850nm下透光率為86%。其透過損失相當於0.7dB,即便與上述黏接著劑層的進行累計,透過電配線板時的光損失亦為小於1dB的低損失,因此在本實施例中,形成未設置光透過用通孔(through hole)的構造。藉由上述方法進行評價的結果示於第1表。Here, the light transmittance of KaptonEN, which is a substrate of a flexible electric wiring board, was measured by a U-3310 spectrophotometer manufactured by Hitachi High-Technologies Co., Ltd., and it was found that the light transmittance was 86% at a wavelength of 850 nm. . The transmission loss is equivalent to 0.7 dB, and even if the adhesion layer is integrated, the light loss when passing through the electric wiring board is low loss of less than 1 dB. Therefore, in the present embodiment, the through hole for light transmission is not provided. (through hole) structure. The results of evaluation by the above method are shown in Table 1.
比較例1Comparative example 1
實施例1中,芯部21及電配線31均為直線狀,彎曲部中的芯部21與電配線31在投影面上重疊,除此以外,以與實施例1相同的方式獲得光電混載基板。In the first embodiment, the core portion 21 and the electric wiring 31 are linear, and the optical hybrid substrate is obtained in the same manner as in the first embodiment except that the core portion 21 and the electric wiring 31 in the curved portion are overlapped on the projection surface. .
比較例2Comparative example 2
比較例1中,僅在撓性光波導的端部,以與實施例1相同的條件層壓片狀接著劑,而不與中央部分接合,除此以外,以與比較例1相同的方式製作光電混載基板。以與實施例1相同的方式進行評價,結果示於第1表。In the first comparative example, the sheet-like adhesive was laminated on the same end of the flexible optical waveguide as in the first embodiment, and the laminate was not bonded to the central portion, except that it was produced in the same manner as in Comparative Example 1. Photoelectric hybrid substrate. Evaluation was carried out in the same manner as in Example 1, and the results are shown in Table 1.
參考例1Reference example 1
使用實施例1中所製作的光波導單體,以與實施例1的光電混載基板相同的方式進行彎曲耐久試驗。結果示於第1表。Using the optical waveguide unit produced in Example 1, the bending endurance test was conducted in the same manner as the opto-electric hybrid substrate of Example 1. The results are shown in Table 1.
根據第1表所示可知,由於彎曲部中的光波導的芯部與撓性電配線基板的電配線在投影面上不重疊,因此,可飛躍性地提昇光電混載基板的彎曲耐久性。As shown in the first table, the core portion of the optical waveguide in the curved portion and the electrical wiring of the flexible electric wiring substrate do not overlap on the projection surface, so that the bending durability of the opto-electric hybrid board can be dramatically improved.
本發明的光電混載基板,具有極為良好的彎曲耐久性,即便長時間反覆彎曲,光波導膜部分亦不會產生裂痕或龜裂。因此,本發明的光電混載基板可適用於行動電話等電子機器,在鉸鏈部分,即便在要求以R為1.5mm~2mm左右的較小彎曲半徑彎曲時,亦可長期地維持良好的通信功能,且電子機器自身可實現高可靠性、及耐久性。The opto-electric hybrid board of the present invention has extremely excellent bending durability, and cracks or cracks do not occur in the optical waveguide film portion even if it is repeatedly bent for a long period of time. Therefore, the opto-electric hybrid board of the present invention can be applied to an electronic device such as a mobile phone, and the hinge portion can maintain a good communication function for a long period of time even when it is required to bend with a small bending radius of R of about 1.5 mm to 2 mm. And the electronic machine itself can achieve high reliability and durability.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.
1...光電混載基板1. . . Photoelectric hybrid substrate
2...光波導膜2. . . Optical waveguide film
3...撓性電配線基板3. . . Flexible electrical wiring substrate
4...鉸鏈4. . . Hinge
6...彎曲部6. . . Bending
7...彎曲軸7. . . Bending axis
21...芯部twenty one. . . Core
31...電配線31. . . Electric wiring
圖1是表示光電混載基板的概念圖。Fig. 1 is a conceptual diagram showing an opto-electric hybrid board.
圖2是表示光電混載基板彎曲的狀態的概念圖。2 is a conceptual view showing a state in which an opto-electric hybrid board is bent.
圖3是表示電子機器具有滑動構造時的光電混載基板之一例的概念圖。3 is a conceptual view showing an example of an opto-electric hybrid board when the electronic device has a sliding structure.
圖4是圖2中的鉸鏈部分的放大圖。Figure 4 is an enlarged view of the hinge portion of Figure 2.
圖5是表示本發明的光電混載基板之一例的立體圖。Fig. 5 is a perspective view showing an example of an opto-electric hybrid board of the present invention.
圖6是自a方向觀察圖5所示的本發明的光電混載基板的投影圖。Fig. 6 is a projection view of the opto-electric hybrid board of the present invention shown in Fig. 5 as seen from the direction a.
圖7是表示本發明的光電混載基板的其他一例的投影圖。Fig. 7 is a projection view showing another example of the opto-electric hybrid board of the present invention.
圖8是表示本發明的光電混載基板的其他一例的投影圖。Fig. 8 is a projection view showing another example of the opto-electric hybrid board of the present invention.
1...光電混載基板1. . . Photoelectric hybrid substrate
2...光波導膜2. . . Optical waveguide film
3...撓性電配線基板3. . . Flexible electrical wiring substrate
4...鉸鏈4. . . Hinge
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