TWI433967B - Vertical system for the plating treatment of a work piece and method for conveying the work piece - Google Patents

Description

Vertical system for plating treatment of work pieces and method for transporting the same Field of invention

The present invention relates to an upright system for the plating of workpieces and a method for transporting a plurality of workpieces held in a vertical orientation by a gripping device to a processing module.

Plating systems are used in particular for the processing of printed circuit boards and printed circuit foils and semiconductor wafers, as well as for the fabrication of photovoltaic cells such as photovoltaic solar cells, and monitor panels. Processing in these systems typically involves chemical and electrochemical processing methods.

Background technique

Currently, wafer manufacturers in the semiconductor industry are working hard to introduce the so-called 65 nanostructure (Computertechnik (10), 2007), and the smaller 45nm structure is also in the process of development. However, these dimensions are only intermediate steps on the way to even smaller structures. Depending on the continued miniaturization of semiconductor components, manufacturers of printed circuit boards with wafer carriers have new challenges in adapting their products to new conditions. This means, for example, that if they are to be present in the market, a current need to achieve a structural size of about 0.25 [mu]m must be achieved. At the same time, it is already clear that the size will become smaller in the near future. With the conventional methods and apparatus nowadays in the manufacture of printed circuit boards, it is no longer possible to achieve such precise structures with the necessary qualities. When the structure is miniaturized, you will see structures with irregular contours, even bridging (short circuiting) or breaking. In addition, the deposited metal layer has been established. Insufficient uniformity. This is unacceptable because the electrical characteristics of the circuits fabricated in this manner will be destroyed in an unpredictable manner, which means that the circuits will have to be discarded.

The foregoing requirements for high precision manufacturing of printed circuit boards have arisen with the need to repeatedly manufacture these printed circuit boards in very large quantities and in a manner that is as cost effective as possible.

In the past, various proposals have been made to achieve the aforementioned objectives: for example, WO 2006/002969 A2 discloses a device for chemically or electrolytically treating a material to be treated, and the device comprises a processing container for processing the material to be treated and a device for transporting Material delivery system. The apparatus has a clean room area that connects the processing vessels, and the material to be treated can be transported by the delivery system through the clean room area. In detail, the clean room area is spatially defined by a clean room housing, and the clean room housing includes a plurality of perforations and is overpressured by the supply of purge gas. A delivery system comprising a fastening element is used to hold the material to be treated, and the fastening element is preferably disposed substantially within the clean room area.

WO 2004/022814 A2 also discloses a device for electrolytically treating a material to be treated which is at least electrically conductive on its surface, and which contains a power supply unit for the material to be treated. The power supply devices of the device each include contact pads that are in electrical contact with the material to be treated at substantially opposite side edges, and the contact pads can be secured to the support frame, and the support frames can be supported by the support member It can be stored in the container of the treatment fluid. The support elements can be moved, which means that the positions of the support frames relative to the support points in the container are changeable.

WO 2006/015871 A1 also discloses a container for a vertical plating treatment system for the treatment of workpieces, and the container has a container interior defined by the container wall and a container bottom and formed by at least two container modules. In each case, the wall and bottom of the container define the interior of the module at the same height and width. Provided in such containers as contact frames, contact clamps, power supply devices, moving devices, guiding elements for materials to be processed, nozzles, devices for introducing air, pumps, heating elements, cooling elements, filters, sensors, dosing devices And a plurality of mounting members of the chemical processing apparatus, in detail, the nozzles are spray nozzles, spray nozzles, and impact nozzles. The mounts can be supported by the support frame and can be raised into and out of the container together with the support frames, and a plurality of containers can be arranged in a plurality of rows and columns in a matrix-like manner.

Furthermore, WO 2006/000439 A1 discloses a processing system comprising at least one row of processing stations and at least one translation operator, and the operator comprises at least one driving element that can be driven along at least two processing stations in a row, and for processing At least one lifting element of the material and at least one gripping element mounted on the lifting element. The lifting elements and the gripping elements can be modularly expanded such that the lifting elements extend laterally relative to at least two rows of processing stations in the expanded condition. Each row of processing stations is coupled to at least one gripping element and is formed by at least one lifting unit that is held by at least one transverse beam or by at least one transverse beam that is held by at least one lifting unit. The transverse beam extends across the plurality of rows of processing stations, and the gripping elements are formed by two clamps that grip the material to be treated, are pivotally mounted by respective pivot points, and can be pivoted by the fixture The axial movement of each part is caused move.

In addition, DE 195 39 868 C1 discloses a conveying device for transporting upright plate-like objects for their chemical or electrolytic surface treatment. The device includes a grip-like lower pick-up area whereby the objects can be received and actuated by an element that is substantially vertically movable between the ends. The device includes a plurality of gripping portions, and the gripping portions are held in a pliers manner and have a contact portion as a picking region at a lower end thereof. The contact portions are actuated by a pivoting portion to detect and release the object using a sliding body that is held in a clamping cradle. The pivoting portion includes two actuating arms, and wherein the intermeshing arm is pivotally mounted on one side of the bottom end of the sliding body and on the other side of the top end of the contact portion. The movement of the sliding body produces two consecutive movements of the contact portion, that is, when transferred from the holding position to the release position or from the release position to the holding position, a substantially horizontally extending stretch or clip is produced. Moves and moves in a substantially vertical extension.

A device for transporting a material to be treated in an electrolysis system is disclosed in WO 2006/125629 A1, and is designed to transport the material to be treated along a transport path in a predetermined transport plane. The apparatus includes a plurality of clamps spaced and movable along the transport path, and the apparatus has a drive for moving the clamps along the transport path. The clamps include a first clamping surface disposed on one side of the conveying plane and a second clamping surface disposed on the opposite side of the conveying plane, and the clamping surfaces are designed to enable the first clamping surface Both a clamping surface and the second clamping surface are movable relative to the conveying plane to close the clamps and grasp the material to be treated Material, or separately moved to open the clamps to release the material to be treated. The position of the bottom gripping surface adjacent to the conveying plane can be determined by a stop member.

Furthermore, DE 91 02 321 U1 relates to an automatic loading device for electroplating printed circuit boards. This device comprises, i.e., a plurality of clamping devices that are fixed to a support frame. The clamping devices include a plurality of clamps, and each clamp includes a forearm and a rear arm, and the forearms and the rear arms are pivotable in a central position. The top end of the rear arm is fixedly coupled to a pull rod. Further, the clamps are disposed in the support frame, and a plurality of pneumatic cylinders are located on the support frame, and the front and rear arms can be pressed by the pneumatic cylinders. When these pneumatic cylinders are actuated, they press against the various tops of the clamps or front walls, and the clamps are thus opened to grasp or release the printed circuit board.

EP 0 517 349 A1 discloses a structure for a system for chemically processing printed circuit boards, wherein the circuit boards are supplied to a loading station and thereby carried by a majority of flight bars that are moved by the transport vehicle. Most of the processing stations in the system then return to an unloading station. The boards are detachably suspended by the clamps on the respective pylons and in this case are caught in an edge region. The clamps each include a clamping arm that is biased to a clamping position by a spring, and one of the clamping arms is mounted on a hanger, and the other clamping arm is pivotally pivoted against the spring pressure. The swivel can be moved from a closed position to an open position by a thrust member.

Furthermore, DE 42 43 252 A1 discloses a device for holding a printed circuit board by means of a support frame, and the support frame comprises a substantially horizontally extending support with a spring-biased clamp, and the clamps are used In The printed circuit boards are latched at the side edges and electrically contact the printed circuit boards. The clamps are held at an upper strut, and the clamps include a portion fixed to the support, wherein the portion includes a shaft, and a moving portion can pivot about the shaft and is pre-stressed by a spring Bias away from the closed position of the clamp.

Finally, EP 0 666 343 discloses a device for electrolytically depositing metal onto a coatable substrate. The device comprises, ie a clamping device. The upper edge of the substrate can be mounted to a common pole. Once the rod and the substrate are immersed in a container, the clamping device grips the bottom edge of the substrate. The clamp comprises at least two lever arms rotatably connected to each other by a pivot point, and the clamp is in an open position when floating on a liquid surface due to its buoyancy, and is closed when immersed in the liquid. position.

A disadvantage of these conventional devices is that the workpieces are not sufficiently processed to produce metal structures in the aforementioned structural dimensions, and this is particularly evident when the workpieces are thin and foil-like.

Purpose of the invention

It is an object of the present invention to improve conventional devices to avoid the disadvantages of such devices and to specifically achieve reproducible processing of the workpieces to form metal structures on the workpieces in the aforementioned structural dimensions. Another object of the invention is also to treat foil-like workpieces to meet the aforementioned objectives. Furthermore, it is an object of the present invention to provide a process bath with high cleanliness and long service life through less bath entrainment due to delivery conditions. In addition, another object of the present invention is to manufacture the product as economically as possible. Wait for work pieces. Still another object of the invention is to process the workpieces in the most appropriate manner. A further object of the invention is to produce the most appropriate processing conditions for the workpieces at each processing location and in each processing step. Another object of the invention is to improve the processing conditions such that as little as possible in terms of size and time. A further object of the invention is to produce processing conditions that are as reproducible as possible. A further object of the invention is to keep the variation of the processing conditions of the same processing object between different processing locations as small as possible. Another object of the present invention is to achieve a high degree of flexibility in terms of the sequence of processing steps, the adjustability of processing parameters, and the adaptability of system dimensions. It is an object of the present invention to separately record processing conditions for the workpieces of the respective processes.

Description of the invention

These objects are achieved by the system for the plating treatment of work pieces in the first application of the patent scope and the method of transporting the work pieces held in the cubic position through the application of the scope of the patent application. Preferred specific embodiments of the invention are disclosed in the dependent claims.

The term "upright system" as used in the following description and in the scope of the claims refers to a processing system in which the workpieces can be processed, and the workpieces are transported from one processing module to another during processing. The processing modules are each located substantially in a straight cubic position (i.e., in a position in which the workpieces are inclined at most 20 angstroms relative to the vertical line).

The term "plating treatment" as used in the following description and in the scope of the patent application means a treatment of a workpiece by a liquid or gas treatment agent, and more particularly in a process cycle of several plating treatment steps. Work piece is in, for example, at least one method step of depositing or dissolving a metal layer change. The plating treatment can be a chemical or electrochemical treatment.

The term "workpiece" as used in the following description and in the context of the patent application, particularly denotes a plate-like workpiece, in particular a printed circuit board and a printed circuit foil. However, it can also mean a semiconductor wafer, a photovoltaic cell such as a photovoltaic solar cell, and a monitor board and a glass plate. Insofar as the workpieces are in the form of a plate, they have a plane of the workpiece extending parallel to the surface of the plates. In the singular or plural term "work piece / majority work piece", it should be understood that it can also be used in plural or singular, respectively.

Preferably, the processing system of the present invention is designed such that the workpieces can be held in a straight cubic position when processed in the processing modules, and when transported from one processing module to another, the operations The pieces were also held in straight cubes. Also, an automated device can be provided to orient the workpieces vertically during loading and unloading procedures.

The fastening device is disposed in the processing module of the workpieces, and a workpiece is held by the fastening device during the processing. The fastening device is fixed in the processing module in a fixed manner, and after the workpiece is transferred to a processing module, the workpiece is transferred to the fastening module in the processing module. Device.

The system of the present invention is characterized in that the boards are preferably directly grasped by the transport means, i.e. they are transported without any frame or support frame or pylon.

The conveying device comprises at least one holding the working piece and in each case at least one fixing device, and each fixing device comprises first and second clamping devices, and the first and second clamping devices respectively One side of the work piece is connected. The The first clamping device and the second clamping device together form a pair of clamping devices and are movable to grasp and release the workpieces. Therefore, the workpieces are grasped by the gripping device when the gripping devices are opened and can also be transported from one processing module to another in this manner. Typically, a gripping device is used to hold and transport a work piece or a plurality of work pieces.

Since not only one clamping device but two clamping devices of each fixing device of the grasping device can be moved, a vulnerable working piece can be grasped without any problem, and there is no need to worry that the working piece will be caught. Colliding with one of the clamping devices during the gripping process. This type of collision occurs particularly when a clamping device is fixed and the workpiece must be placed in two clamping portions in the open position. In this case, there is a danger that the fixing portion of the consolidation device, for example, the holding device to be fixed, scrapes the work piece along the work piece and damages it.

Since a fastening device is disposed in a processing module, by: a) the workpiece is transported to the processing module; b) the workpiece is grasped by the fastening device; and c) the workpiece is The gripping device release can utilize the gripping device to transport the workpiece held in the straight cubic position to the processing module.

This means that when transported from one processing module to another, the workpiece can be grasped on the surface of the workpiece at a plurality of points outside the area to be treated ("active area"). Furthermore, the gripping device is only in transient contact with the treatment fluid and is not exposed to a current during the electrolysis procedure.

At least one first clamping device coupled to the first side of the workpiece is preferably designed and arranged such that the position of the first side of the workpiece is defined by the first clamping device and the workpiece The first side can be a contact plane. In contrast, at least one second clamping device coupled to the second side of the workpiece is preferably designed and arranged such that a clamping force can be applied to the workpiece by the second clamping device.

In a preferred embodiment, the portion of the gripping device that transmits the force is in the form of a tube-in-tube structure, i.e., the two gripping devices are mounted to be rotatable relative to one another. Therefore, no bath fluid will penetrate into the clamping devices and a seal can be provided at the bottom of the tubes to prevent this from happening. This means that the gripping device has the advantage of having a smaller surface such that it only produces a bath entrainment with minimal.

Preferably, the first clamping device is designed such that the position of the first side of the workpiece is defined by the first clamping device, and this indicates that the position of the contact side of the first member of the workpiece is The gripping device is accurately delivered to or taken over by the holding device. In contrast, the second clamping device is preferably designed and arranged such that a clamping force can be applied to the workpiece by the second clamping device. Through the different designs and settings and thus the specialization of the two clamping devices, the precise positioning of the held workpiece can be ensured.

In order to be able to perform the aforementioned work, the gripping device is actuated as follows to grasp the working piece: i) moving the first clamping device such that the first clamping device reaches a contact position and thus defines the workpiece Positioning the first side; and ii) moving the second clamping device such that the second clamping device reaches a The clamping position, and in doing so, grips the workpiece with the (at least one) first clamping device.

Preferably, the first clamping device reaches the contact position before the second clamping device reaches the clamping position, so that the first clamping device first moves to the end position and then the second clamping device moves to Its terminal location. However, this does not preclude the two gripping devices from moving at least sometimes simultaneously. In fact, the two clamping devices can also be moved one after the other, ie first the first clamping device, followed by the second clamping device. In the opposite manner, when the consolidation device is opened, the second clamping device can be moved to an open position and the first clamping device is delayed relative to the open position. By using this operation to grasp a work piece, on the one hand, the work piece can be positioned very accurately in a reproducible manner, and on the other hand, in the case where there is no danger of the work piece colliding with the holding devices, The work piece is grasped by the consolidation device without problems. The holding device in the processing module can be configured to have a pair of clamping devices for holding the working member (the first and second clamping devices of the fastening devices, as in the grasping device) ). Such gripping means at the retaining means, as in the gripping means of the gripping means, may be in the form of first and second gripping means and as in the gripping of the gripping means The holding device is generally used to define the position of the first side of the work piece or to apply a clamping force on the work piece and to move for this purpose. The gripping means of the retaining means may preferably have the same construction as the gripping means of the gripping means, and thus, for example, are rotatable and may generally include corresponding gripping means of the gripping means Use the way of clamping the surface. Moreover, the holding devices can borrow Actuated by, for example, a pneumatic actuator.

In another preferred embodiment of the present invention, the gripping device comprises at least two separate consolidation devices, and the consolidation devices respectively hold a workpiece at opposite edges, and each of the consolidation devices The first and second clamping devices are movable such that the workpiece is stretched (between the consolidation devices) when clamped parallel to the first side thereof to avoid bending of the circuit board or arch. For example, on a rectangular workpiece that is held in a constant cubic position, if the consolidation devices are disposed at opposite vertical edges of the workpiece, the stretching can be performed in a substantially horizontal direction, or If the consolidation means are disposed at opposite horizontal edges of the workpiece, the stretching can be performed in a substantially vertical direction.

In a further preferred embodiment of the invention, the at least two consolidation means are designed and arranged such that they are in the region outside the effective area, for example at the edge region and preferably at the bottom and top edges or at the side edges. The workpiece is grasped and a tensile force is applied to the workpiece in opposite directions in the plane of the board during clamping. The work piece W has a contact side (first side) WE in Fig. 1A.

The plate-like workpiece can be gripped in this manner, in particular at the edge of the relative position, and at least the two consolidation devices are separate. Preferably, the movement of the clamping device is such that when the workpiece is clamped, in addition to applying the clamping force (perpendicularly acting on the surface of the workpiece), an outward stretching is applied parallel to the surface of the workpiece. force. In order to apply this tensile force, another method step can be performed, namely: (iii) moving at least one of the first and second clamping devices, in particular The second clamping device is moved without moving the first clamping device such that a tensile force is applied to the workpiece along a first side of the workpiece.

Furthermore, the stretching step can also be carried out simultaneously with the clamping step, and a very easy to implement movement sequence comprises the third method step which is carried out later, and the step is by moving the second clamping device After the clamping force is applied to the workpiece, the clamping devices continue to move such that another force parallel to the surface of the workpiece is exerted on the workpiece.

For example, to stretch the foil after clamping, the second clamping device can be rotated again such that a pair of stresses are applied to the foil by friction. This rotation should be applied in the direction in which the force pulls the foil apart, and the force and movement for stretching can be the same size on both sides of the board, or the foil can be stretched only on one side.

If a workpiece having a considerably different thickness is to be conveyed in the system, the gripping device can in each case be provided with a resilient element for the second clamping device. In this case, the spring travel is in the direction of the work piece or away from the work piece. The foregoing specific embodiments are preferably used to hold the foil-like workpieces in a reproducible manner and join them in the plane of the panel so that the regions of the product can be processed uniformly. By stretching the workpieces during clamping, their position is fixed in an accurate manner and they can be conveyed and conveyed to a holding device in a processing station at an accurate location. Another result is that the spacing between the circuit board and the mounting member, such as the spacing of the outflow device, is equal across the surface so that each surface element can be processed uniformly. Even when the product moves, the regions of the product move through the same path.

The work piece can also be held by a first (larger) force and pull the other side outward only with a second force that is less than the first force.

It is particularly advantageous when the movement of the first and second clamping devices is rotational. For example, in a consolidation device of a particularly preferred embodiment of the invention, the first clamping device of the clamping device can be rotated about a first axis of rotation and the pair of clamping members in the consolidation device The second clamping device of the device is pivoted about a second axis of rotation parallel to the first axis of rotation, which allows the device to be designed in a very tight manner. In addition, the closing force acting on the workpiece can be adjusted in a gentle and accurate manner using the rotational position. Finally, this design also allows the foil-like workpieces to be grasped and stretched.

The position of the first side of the workpiece can be defined particularly precisely by the rotational position of the first clamping device, in a particularly preferred embodiment of the invention, the body is defined by rotating the first clamping device The first portion of the outer boundary of a section of the first clamping device that is generated at a right angle to the first rotating shaft may be convexly curved, and the second portion of the outer boundary of the segment may be Formed by a straight boundary line, and the boundary line connects the first portion of the outer boundary in a tangential manner. Therefore, the first portion can be formed as a cam disc. Since the second portion is adapted to be placed flush with the workpiece, the position of the workpiece can be defined in an accurate manner. The first portion is for gently guiding the workpiece when the second portion is approached, and in this particular embodiment, the axis of rotation of the first clamping device can preferably be placed such that the outer boundary is Approaching the surface of the workpiece as it rotates until the straight second portion abuts the surface of the workpiece in a flush manner.

In a particularly preferred embodiment of the present invention, the first portion is formed by a convex surface section parallel to the first rotating shaft, and the second portion is formed by a structure against the working member. A preferred flat contact surface on the first side is formed. This means that the first clamping device abuts smoothly against the surface of the workpiece in the closed position; thereby avoiding tilting movement of the workpiece at the nip point. When the workpiece is gripped, in this case in method step i), the first clamping device can be rotated until the flat surface portion reaches the abutment position.

Preferably, the second clamping device has a convex clamping surface configured to transmit a clamping force to the second side of the working member, and the second clamping device preferably includes a design A clamping force is transmitted to the convex clamping surface of the second side of the workpiece. In order for this to occur, the second clamping surface is disposed at a distance from the second rotating shaft, and the distance is equal to or greater than the distance between the second rotating shaft and the surface of the workpiece against which the clamping should abut. This second clamping surface is preferably designed to be parallel to the second axis of rotation.

For a compact embodiment, the consolidation device includes a first torsion bar that holds at least one first clamping device and is coaxial with the first rotating shaft, and a second holding device that holds at least one second clamping device and The second torsion bar of the second rotating shaft is coaxial. The torsion bars can be formed from a solid material or from a tube.

Therefore, a plate-shaped work piece can be fastened in a secure manner, and at least two pairs of clamping devices each composed of the first and second clamping devices can be held in a pair to include the first and second torsion forces The torsion bar of the rod, and the first and second torsion bars form a consolidation device. These pairs of clamping devices can preferably be arranged separately at the respective consolidation device so that, for example, they can be held

A work piece, or at other points as far apart as possible from each other, causes the work piece to be held in a situation where it is impossible to dump. Thus, when the workpiece is lowered into a bath in the processing module, the board is unlikely to bend. If a fixture has several pairs of clamping devices, care must be taken to ensure that all of the clamping devices are gripped by sufficient clamping force. Between a pair of upper clamping devices and a pair of lower clamping devices on a consolidation device, a plurality of pairs of additional clamping devices that grip the edges of the circuit board at the side may be provided.

In another particular embodiment of the invention, the workpieces can also be fully held by the gripping device at their upper edges. In this case, the workpiece is grasped by only a plurality of clamping devices, that is, through a small number of contact points, and preferably only through two contact points, and the clamping devices contact the workpiece through the aforementioned contact points. . Since the consolidation device is only slightly immersed in the bath in this example, the fluid is hardly entrained out of the processing module.

In a preferred embodiment, the gripping devices are made of a corrosion resistant material such as stainless steel or titanium.

The gripping devices grip the product directly, i.e., without the use of additional frames or shelves to hold the product while transporting or processing. In this way, the high cleanliness and long service life of the treatment baths can be obtained, and in this way, contamination of the circuit boards due to fluid adhesion to the frame can also be avoided.

The holding force is generated by a spring mechanism, so that the product can be kept in a state of being held even when the power is cut off. In contrast, the opening force at the consolidation devices is generated by actuating the actuator, such as a pneumatic cylinder or motor.

The gripping device used in the system of the present invention is used to work The workpiece is transported to a processing module for the processing. According to the present invention, the working member is transferred to the holding device disposed in the module. To this end, the gripping device can release the work piece immediately after the work piece has been transferred to the holding device that grips the work piece. It can then move the module out again. After the gripping device has placed a first work piece in the module, it can be used to transport another work piece. Therefore, during this process, in this case, the gripping device is not located in the processing module. Therefore, the gripping device holding the working piece can be moved into a processing module to place and release the working piece there, and the working piece is taken over by the holding device disposed in the module. The gripping device is then removed from the processing module.

In a corresponding manner, the gripping device can be moved into a processing module prior to method step i) to take over a workpiece that has been processed in a processing module for gripping the workpiece there. To this end, the holding device provided there releases the work piece. Once the workpiece has been grasped, the gripping device is removed from the processing module along with the workpiece.

In order to prevent damage to a work piece located in a processing module when moving in and out of the gripping device, the first and second holding devices can be opened simultaneously by their gripping position or with a time difference.

In order to transfer the workpiece from the gripping device to the holding device in the bath container or to perform the aforementioned actions in reverse, the position of the workpieces must not be changed, since otherwise it must be made in the bath container. The work pieces are then aligned. In particular, if it is a very thin and light printed circuit foil, a minimum of two consolidation devices are provided for each workpiece. In this case, the work pieces The transfer from the delivery device to the fastening device occurs in the bath container and preferably includes two steps: in a first step, the first clamping device of the grasping device is open, and The holding device of the relevant holding device in the bath is also open. The second gripping device of the gripping device remains in the initial position such that the workpiece still only abuts the second gripping device. Next, the first holding device of the holding device in the bath is closed. In a second step, the second gripping means of the gripping device is open and the second gripping means of the gripping means in the bath is closed.

The method of operation prevents the conductive foils from being damaged by the transfer procedure and the position of the workpieces is unchanged. When the movable gripping device at the transport system is offset relative to the fixed gripping device at the holding device in the bath, if the gripping device of the gripping device and the gripping device of the retaining device are When one side of the circuit board is simultaneously closed, the work pieces will be damaged by excessive expansion of the materials when grasped by the fastening device.

In addition, the gripping device can also be configured to generate electrical contact with a held workpiece by the gripping device, which means that a polarized current is transmitted to the processing module or to a processing module. product.

Preferably, the system of the present invention includes a plurality of irrigation devices, preferably water spray devices, and can be used to flush at least one of the grasping devices and/or the work members (e.g., when removed from the processing module). Rinse with a water pipe). The flushing devices are disposed above the level of the bath and operate when the gripping device with or without the workpiece is raised and moved through a flushing device such as a spray tube. Thus, the gripping devices can be cleaned as the gripping device moves through the flushing devices. The edge is that the majority can be washed In the area of the clamping device, the clamping devices contact the workpieces through the regions. It is also possible to operate a flushing device when the gripping device at the position does not hold any working piece, that is, to operate the flushing device particularly when the gripping device removes the processing module after the working member has been placed. . Alternatively, it is also possible to use flushing devices provided on the transport device, for example by means of spray tubes mounted at the location, for flushing the gripping devices, for example, when moving from one processing module to another. The delivery system can have an automated drip tray to avoid rinsing fluid dr-out.

The holding device in a processing module can be designed such that the position of a workpiece thus held can be adjusted in one or more directions parallel to the plane of the workpiece or at a right angle thereto, in particular It is to make it centered. A positioning device is provided in the processing module for this purpose, thereby ensuring the most appropriate position of the product at the time of processing. Preferably, the positioning means are located in the bath area and the board is aligned parallel to the surface of the board, for example the vertical alignment can be set by a stop member and the lateral alignment can be transmitted through an eccentrically mounted disc or a lever Institutional settings.

In order to know in a timely manner whether the circuit board is suspended obliquely relative to the gripping device, the transport system can be provided with a sensor system. This monitors the board at least at two points, and for example a light sensing sensor is suitable.

Preferably, each processing module has a self-contained self-contained device, that is, each processing module has all the devices required to process the product, for example, its own container; its own outflow member; means for moving the product; Pump; means for filtering, cooling, heating and dosing. Therefore, each processing module can operate independently of each other. So by fluid exchange, exhaust air mixing Coupling, different power sources, etc., avoid mutual interference between the processing modules and the work pieces in the processing modules, such as via heat transfer through the walls of the common container. This means that the processing parameters can be controlled and measured in a very accurate manner and can produce fairly good and particularly uniform processing results.

In principle, the system can be configured to use several processing modules. The various modules have selectivity to the number and design (bath cycle, heating, cooling, input flow devices, etc.) for mounting and additional parts, and the mounting and additional parts are then installed in accordance with the program requirements in the processing module. Therefore, the most equipment selected by most of the parts can be equipped with the processing module. This means that different process module installations and additional components in a module are equally designed and placed at the same location, which reduces the cost and effort involved in design and production. The procedural and processing-related performance of such installations and additional parts is also the same in each of the processing modules in which they are installed, which is indicated in the performance data of the processing modules having the same equipment and therefore in such Deviations in the processing results of the workpieces processed in the processing module are minimized. As such, the performance and therefore the processing results from processing modules with different configurations are comparable.

The system of the present invention can be designed such that at least one processing module comprises the following structural features: a. a container for containing a processing fluid; b. a basic frame having a receiving frame for holding the container; c. a plurality of mounting parts a part that is inside the container and up to the cover, for example, heating and cooling; d. a support frame for mounting at right angles to the plane of the workpiece a moving part; e. a swinging frame for mounting a part movable parallel to the plane of the workpiece; f. an additional part, a part located outside the inner area of the container, for example, a pump, a filter; and g. Most covers are used for the container.

Since the container is supported by a receiving frame and is fixedly or detachably attached to the frame at the same time, it does not itself have to undertake any static work. It is mounted to have a relatively large play, for example, suspended in the receiving frame such that its thermal expansion is not transmitted to the receiving frame or the frame. For example, a container having a flange can be suspended in a receiving frame that is held by a basic frame. The processing modules can thus be attached to the floor, to the ceiling or to another joining surface. Each module may have its own basic frame or may have a shared basic frame with other modules, which may also be expandable. The basic frame is preferably made of metal to substantially avoid the effects of temperature, and the basic frame can stand on the floor or can be attached to a wall or ceiling. The additional and mounting components of the components of a processing module are not attached to the container itself, which allows the container to be fully thermally expanded during operation without changing the position of the components. Therefore, there must be a support function with respect to the container itself, and the relative spatial arrangement between the various components in the processing modules is more accurate and easier to reproduce. Since the thermal expansion of the container does not affect the positioning of the various components in the processing module for the foregoing reasons, the design can be simple and the container does not need to be reinforced, which means that compared to conventional structures, the container Manufacturing The cost can be greatly reduced.

Moreover, the containers are preferably configured to have no dead zone relative to the bath flow, i.e., they have a rounded corner. The cross section of the container can be larger at the top than at the bottom, making it easier to replace the mounting parts. Preferably, the containers are made of a plastic material and, in order to achieve a cost-effective production, such products are preferably produced in a cost-effective manner in mass production, for example, centrifugal molding, rotary molding or container blow molding. law. The containers may be made of a metal plastic material.

The support frame is preferably attached to the receiving frame, and in another particular embodiment, the support frame is retained by the receiving frame for movement. This means that the support frame can hold container mounting parts such as fastening means, outflow members and electrodes, and the container mounting parts move relative to the container and are at right angles to the product. Preferably, the support frame is moved using a pneumatic actuator and the predetermined end position of the pneumatic drive is reached, the support frame reaching a predetermined position in the processing module. If other devices in a processing module have to reach a predetermined location, these types of pneumatic actuators are also available for use with the aforementioned devices.

Regardless of the mobility of the support frame, its accurate positioning in the processing module is as important as the mounting components mounted thereon, and the product must be accurately positioned relative to the gripping device. Thus, in a particular embodiment of the invention, the support frame or its guiding member is adjustable at least in one direction in at least one direction, and preferably is vertically or laterally adjustable.

The support frame is preferably made of metal to greatly reduce the effects of temperature.

The swing frame can be coupled to the support frame so as to be movable. And a plurality of components, such as an outflow member or an anode, which are movable parallel to the surface of the board, are attached to the swing frame. In a preferred embodiment, the swing frame can include a boom that can be used to guide the swing frame on the support frame and also serve as a tube for the spray tube. The effect of this construction is that most components that are intended to move parallel to the product, particularly the outflow member and the anode, will remain at a fixed distance from the product, even if the product is moving at right angles to its surface. This makes it possible to treat the product evenly and uniformly.

Preferably, the outflow device is disposed in each processing module.

In order to keep the volume of the solution in the processing module as small as possible of the module, the processing modules are preferably designed to be as compact as possible. For example, it is possible to achieve a ratio between the liquid volume and the billet in a module that is operated in a chemical and electrodeless manner of less than 8 l/dm ² and less than 15 l/dm ² in the energization module, and The corresponding size of the container is hardly greater than the size of the workpiece.

In order to achieve the economical benefit of the maintenance procedures of the various processing modules, the support frame with the removable mounting parts attached thereto can be designed to be separated from the module. This also makes the processing station easy to work with different processing.

Due to the relatively light weight and compactness of the processing module and the use of the same connecting member to supply the second power to the modules and to suspend the supply and due to the same space requirements in each case, it can be simple The way to exchange the complete processing module, and upgrading the system is also quite simple. Again, the prefabricated processing modules are placed, aligned and attached at corresponding locations of the processing stations and the conveyor is adjusted.

For example, a supply device for pressurized air and water can be preferably connected On this basic framework. They are located at the same position in the same processing module, so the location of the processing module is simple.

In a particularly preferred embodiment of the invention, at least one processing module in the system is designed to accommodate and process only one workpiece, ie, at any time in the processing module, only one workpiece . A module can also be designed to accommodate a plurality of workpieces disposed adjacent to each other in the module, in which case the workpieces can preferably be positioned in separate chambers of the processing module . However, it is preferred to process a separate work piece in a module and the work pieces are highly reproducible and simplifiable. The processing conditions of each work piece can be adjusted very accurately regardless of the processing conditions of other work pieces.

For the processing of the workpieces, the processing modules can be arranged in the module sequence, so that the workpieces can be moved into the modules one by one by the workpieces in the module sequence. Processed one after another. Most of these types of processing modules can be arranged one after the other to produce a matrix of multiple columns and multiple rows of processing modules. Therefore, most of the processing modules in which the same processing steps are performed can be arranged one after another to process most of the workpieces at the same time. The matrix also includes a number of modules that can be substituted for the mode of operation of processing in a processing bank, for example, modules having different program parameters. This system can fit the available space in the most appropriate way. If a plurality of separate containers are used and the adjacent containers are preferably separate, then the interaction of adjacent containers, such as through heat transfer, will not occur. However, separate containers may be interconnected by a preferably closable line (bypass line). The achievable effect is that the interconnected containers are thicker The same bath fluid as temperature.

Controlling the delivery device can be specifically designed to maximize capacity utilization as much as possible.

The modules in the matrix structure may also be arranged such that for most independent processing stations, the processing components processed by a predetermined processing column are not moved into the processing modules of the module rectangles of one row or column. In the module, but it will move into a different sequence. Therefore, when the modules are arranged in a rectangular shape, the conveying device can be specially designed such that a gripping device is transported from one processing module to any other module (using a so-called coordinate conveying trolley), ie The conveyor can be extended to all of the processing module rows such that the handling device supplies the workpiece to processing stations in different rows or transports the plurality of workpieces one after the other to different modules in a row. This also allows the grip device to achieve maximum possible flexibility and capacity utilization, and the system's maximum suitability for space and production needs.

Preferably, the boards are transported in the direction of the method, which means that the material is delivered in the most appropriate manner. However, it can also be a freely constructed processing sequence, for example, repeating a processing step. This gives the greatest degree of freedom in processing these boards.

The upright system is characterized by a main conveying direction produced by the path of the transport trolley, hereinafter referred to as the x-axis, and the y-axis extends at right angles thereto and is located in the horizontal direction. At right angles to the two axes, the height of each processing module is represented by the z-axis.

a processing module, in addition to a vertical extension corresponding to the extension of the circuit board in the module, further including opposite longitudinal sides and ends in each case Faces, and the end faces are narrower than the longitudinal sides.

In a preferred embodiment of the invention, the processing modules are arranged such that the respective longitudinal sides extend in the conveying direction. This means that many of the processing modules can be placed adjacent to each other and thus many of the work pieces can be processed simultaneously in each of the processing modules of the processing modules, and the transport device need not have a processing module that is sufficient to span across a row. Thus, the processing modules in this particular embodiment are placed such that their longitudinal sides are parallel to the x-axis. Basically, there are two different processing sequences: Processing Sequence 1: Modules for different processing are along y The direction is set in the x direction so that the processed product can be transported through the system in the y and x directions using the gripping device. This can be, for example, a meandering sequence of processing locations, and this sequence is advantageous for systems with small throughput.

Processing sequence 2: The modules with the same processing work are placed in the y direction and have different processing operations set in the x direction. This sequence of processing will only occur in the x direction, and this design is used to make the x dimension of the transport carriage as short as possible when having a predetermined number of boards.

Of course, it is also possible to align the longitudinal sides in the y-direction in both processing sequences.

In addition, it is preferred that each of the two processing modules are disposed adjacent to each other (directly adjacent to each other) through the end faces. Thus, the components associated with each processing module can be housed such that they are accessible for maintenance because a service channel can be provided between each pair of processing modules. Preferably, the components are disposed at each end face of the module, which saves space in this respect and has good accessibility on the other hand.

Since the equipment (installation parts, additional parts) used for each piece is only related to one processing module and one workpiece (when processed in the module), the actual supply current of the workpiece can be evaluated at any time. , the flow conditions in the container, temperature, bath composition, etc., to develop information on the production conditions of a work piece and its processing data. This means that it is not necessary to otherwise formulate the indirect measurement of the sensor necessary to process the data.

Further, the processing module may include a plurality of power supply connection members such as air injection, a connection portion for water supply and exhaust, and each of which has its own sensor capable of detecting each output. Additionally, sensor systems and control systems for temperature, fluid level, and flow conditions can be provided for the particular purpose of the processing module. This means that the processing parameters of each process can be recorded, documented and associated with the work piece being processed.

In another preferred construction, the processing module of the upright system of the present invention can have a plurality of covers, preferably with an automatically actuated cover. The cover can be a sliding door for a work piece that can be lowered into a processing module.

The processing modules may also have an exhaust device. Furthermore, in a preferred embodiment of the invention, there is an exhaust device on the transport device, particularly when the transport device is also subjected to a treatment module at a temperature above room temperature. When moving. In this case, the delivery device is preferably provided with a housing surrounding the device. The corresponding outlet air line of the venting device may have a plurality of corresponding exhaust connectors such that the separated air is drawn out of the conveying device and the connectors may have suitable valves.

The system can be designed using clean room technology. a so-called feed box A flow box may be provided here, that is, a tank through which purified (filtered) air flows in a layerwise manner. The feed bin may be arranged to be secured above the processing modules such that the conveyor moves towards the feed bin, or the feed bin only surrounds and moves with the conveyor. In order to create a clean room condition in the feed bin, it may be provided, for example, a device carried by the transport device above the transported work piece and outputting the clean room air downwardly to flow around the work piece. Only when a workpiece is moved into a processing module, a lid mounted on the container can be opened to prevent contaminants from entering the processing liquid. Once the work piece has been moved in or out, the cover will close again.

Thus the laminar flow from the feed bins remains as laminar as possible along the product as much as possible, and the shape of the delivery system is consistent with it. The gripping device is designed such that interference occurs as little as possible and, therefore, for example, is enclosed in a droplet-like manner in an advantageous manner for flow. The beam joining the gripping device is round, for example, having a circular cross section.

The delivery device can include an absolute measurement system that allows the delivery device to be properly positioned in the three directions of movement of the device. To this end, for example, each processing module uses a motor centering system. The various locations are approached at system startup until they arrive accurately, and the position values obtained at this time are stored in the system control so that they will automatically approach in an accurate manner in the future. Also, after some time periods, an automatic control is performed to adjust.

Each processing module may have its own automated system for monitoring the parameters of the processing liquid, ie, an automated measurement system, and preferably measuring the fluid on-line The concentration of the substance in the medium, in addition, also has an automatic dosing device for these substances. Further, recording means associated with the processing modules may be provided whereby the recording device product related data of the respective workpieces may be individually collected and associated with the corresponding workpiece and then recorded in a report.

In the system of the present invention, each board can be processed by a different processing program. Since it is necessary to be able to handle most boards, the processing program requires very wide spectrally different processing parameters, for example, in a particularly suitable manner. The blind hole, the inner hole having a high length to diameter ratio, the surface having a particularly small deviation in layer thickness distribution, the base material having a poor conductive coating, and the like. The variables to be most suitably optimized in each case may be, for example, bath composition, processing time, feed stream, current parameters, temperature, method sequence, and the like.

In order to achieve the most appropriate processing results, the workpieces may be aligned in the x direction, ie, in a main transport direction, and/or in the y direction, ie, transverse to the transport direction, in a plurality of processing modules. Aligned, and/or aligned in the z-direction, i.e., in a liter/lower direction. This can occur in the system itself, for example, in a processing module. Or it must be such that after a misalignment of the board, the board guiding means on the conveyor and within the processing module act accurately so that no tolerance is exceeded beyond that before being moved into the system.

Description of the schema

The invention will be described in more detail in the following figures: Figure 1 is a preferred embodiment of a gripping device; Figure 1A is a schematic cross-sectional view through a plate-like workpiece; Figure 2 is a view along Figure 1. a cross-sectional view of BB; Figure 3 is a cross-sectional view taken along line CC of Figure 2; Figure 4 is a cross-sectional view of the gripping device shown in Figure 2 taken along CC and in different gripping stages; Figure 5 is a vertical system of the present invention; A schematic plan view of a processing module; FIG. 6 is a schematic side view of a cross section of the processing module of FIG. 5; and FIG. 7 is a portion of the conveying device of the gripping device when a working member W is placed or picked up Figure 8 is a schematic side view of the conveying device of Figure 7 with an aerodynamic housing; Figure 9 is a schematic view of the processing module structure of a first particular embodiment; The Figure is a schematic illustration of the structure of a processing module in a second particular embodiment; Figure 11 is a schematic illustration of the structure of a processing module in a third particular embodiment.

In all the figures, the same symbols denote the same elements.

1 shows a preferred embodiment of a gripping device 10 of the present invention, and a workpiece W is grasped by the gripping device 10. This is a plate-like workpiece, such as a printed circuit foil. According to Fig. 1A, the work piece W has a contact side (first side) WE, and it includes an inner effective area W _N , and the inner effective area W _N is separated from an outer edge area W _R by a broken line. The grasping device 10 includes a first consolidation device 20 and a second consolidation device 30, and each of the consolidation devices 20, 30 includes a first torsion bar 21, 31 and a second torsion bar 22 (Fig. 2) . These second torsion bars are not visible in Figure 1 because they are covered by the work piece W. The first torsion bars 21, 31 and the second torsion bars 22 extend further upwardly and are retained in a mounting member not shown and form part of the gripping device 10.

The first holding devices 25, 35 that hold the work piece W together with the second holding device (not shown) are supported on the first torsion bars 21, 31.

The first torsion bars 21, 31 and the second torsion bar 22 of the gripping device 10 and the first clamping devices 25, 35 and the second clamping device 26 (Fig. 2) are preferably made of stainless steel.

Fig. 2 shows a cross-sectional view taken along line B-B in Fig. 1. A first torsion bar 21 (centered on the first shaft 201) and a second torsion bar 22 (centered on the second shaft 202) support the respective first clamping device 25 and the second clamping device 26, and are shown The work piece W is clamped between these holding devices 25, 26.

Fig. 3 shows a cross-sectional view taken along line C-C in Fig. 2. The first clamping device 25 is placed on the first torsion bar 21 (centered on the first rotating shaft 201) and the second clamping device 26 is placed on the second torsion bar 22 (centered on the second rotating shaft 202) on. For example, a working piece W of a conductive foil is sandwiched between the two holding means, and in Fig. 3 (as in Figs. 1 and 2), the working piece W shown is completely clamped. The first clamping device 25 and the second clamping device are rotated by rotating the first torsion bar 21 (centered on the first rotating shaft 201) or respectively rotating the second torsion bar 22 (centered on the second rotating shaft 202) 26 is moved into the closed position. In this closed position, the planar contact surface 27 abuts flat against the surface of the workpiece W in the illustrated example. This surface is formed by the contact plane WE on the workpiece and the clamping surface 29 of the second clamping device 26 It also abuts against the work piece and exerts a clamping force on the work piece W. The convex surface section of the first clamping device 25 is indicated by reference numeral 28.

The timing of the gripping step is shown in Figure 4 in five different stages, and this view corresponds to in Figure 3. In the first position in which the work piece W has not been grasped, neither of the two holding devices 25, 26 abuts against the surface of the work piece W. The outer convex surface section 28 is adjacent to the first surface of the workpiece W by rotating the first clamping device 25 counterclockwise. At the same time, in the illustrated example, the second clamping device 26 rotates clockwise. In a third rotational position (C), since the first clamping device 25 has been rotated counterclockwise, the contact surface 27 of the first clamping device 25 abuts against the first surface of the workpiece W. Although the second clamping device 26 has also rotated clockwise, the clamping surface 29 of the second clamping device 26 has not yet abutted against the second surface of the workpiece W. In this rotational position (D), the clamping surface 29 also abuts against the second surface of the workpiece W and exerts a clamping force on the workpiece W. If the second clamping device 26 is rotated further away from the rotational position by applying a greater rotational force (clockwise; see arrow), the workpiece W will be stretched (rotation position E) .

For a more detailed description of the upright system of the present invention, reference is made to the following figures which reproduce the individual components of the system in a schematic manner.

Figure 5 shows a schematic top view of the processing module 100 of the upright system.

The processing module 100 includes a receiving frame 110, and the receiving frame 110 is a component of a basic frame 105, and the basic frame 105 is shown in more detail in FIG. The storage frame 110 is for holding the container (not shown in more detail in Fig. 5), and the processing liquid is accommodated in the container and a plating process is performed in the container. For example, it is made of, for example, a sturdy profile, and is preferably made of metal, and it may be fixedly or detachably attached to the remainder of the basic frame. FIG. 5 shows the inside of the processing module 100, and a support frame 120 is also visible, and the support frame 120 is partially located above a work piece W in the container and extends around the container. The edge area. The support frame 120 is configured to hold a plurality of holding devices 130 (130.1, 130.2) and a swing frame 140 for holding different mounting parts, and the holding devices 130 (130.1, 130.2) hold the working pieces W . The support frame moves back and forth parallel to the arrow P ₁ , so that all the module components and the work piece W also move synchronously with the movement, and the mobile system is supported by the storage frame 110 This is achieved by a driver 125 such as a pneumatic cylinder. The support frame is moved through the track 127 and the tracks 127 are accurately positioned by a adjustment device 128 on a predetermined path. The pneumatic cylinder of the actuator 125 is small and compared to the motor drive, there is typically a large amount of vapor present between the bath surface and the lid of the plating vessel and is insensitive to fluids. In addition, they are economical. In addition, they enable the driven support frame 120 to reach a predetermined end position.

Since the support frame 120 also holds the pivot frame 140, the frame 140 will pivot the support frame 120 as generally parallel to the arrow P ₁ moves back and forth. In addition, the pivot frame is moved back and forth 140,145 in one direction through the other driver, which a moving direction of the support frame 120 extending at right angles P _1. This direction of movement is indicated by another arrow P ₂ .

The support frame or the drivers 125 and 145 of the swing frame 140 are gas Operate either electrically or electrically.

Inside the container, there is a work piece W such as a printed circuit board. The workpiece W is held in the container by the fastening device 130 (130.1, 130.2) in a vertical orientation, and the fastening devices 130 grip the respective end regions of the workpiece W. Figure 5 shows two holding devices 130, i.e., a first holding device 130.1 that grips the left edge of the working member W, and a second holding device 130.2 that grips the right edge of the working member W. The holding device 130 is also held in the container in a vertical orientation as the working member W, and the holding devices 130 each include two clamping finger groups 135, and each clamping finger group 135 is The workpiece W is placed against an edge side when clamped. The gripping fingers 135 can each pivot about a pivot point so that they can be pivoted to a release position and a gripping position. To this end, it is useful to actuate a driver 137 that holds a finger group 135. These actuators 137 are also pneumatically operated and are opened or closed by aerodynamic forces or are actuated by aerodynamic forces, in which case a closing force is applied by a pre-biased spring. This means that the closing force can be maintained even if the power fails.

The fastening devices 130 are held by the support frame 120, which means that the fastening devices 130 and thus the clamping finger groups 135 and the working member W can be moved back and forth through the support frame to keep parallel to the The arrow direction P ₁ continues to move.

Further, on both sides of the workpiece W in the container, there are a plurality of outflow devices 150 that are held by the swing frame 140. Since the oscillating frame 140 continues to move in the arrow direction P ₁ and also in the arrow direction P ₂ , the outflow devices 150 also move in these directions. Since the offset of the movement in the direction of the arrow P ₁ corresponds to the offset of the support frame 120 and the workpiece W, it remains unchanged between the workpiece W and the outflow devices 150. In addition, a relative movement parallel to the surface thereof occurs between the outflow device 150 and the workpiece W, so that a uniform impact of the surfaces of the two workpieces can be obtained.

Outside the container are additional components, i.e., units such as filter 600, other units such as pump 700, and connection members for auxiliary medium 500 such as compressed air, water, and the like. These are attached to the basic frame at a common location, and they are preferably located on the basic frame at a location where the module abuts a service access. These connecting members have a joint that allows the unit using the medium to be easily separated.

There may also be a plurality of unshown covers which cover the process module during processing or which also cover them when they do not contain a work piece. In order to cover the processing module, there is a cover that automatically opens on the receiving frame, and the cover is preferably a sliding cover and is preferably pneumatically driven. On this basis, the dropped particles will be excluded from the bath and the volume of air to be aspirated will decrease.

Figure 6 is a side view schematically showing a processing module 100 in cross section. The processing module 100 includes a basic frame 105, and a part of the basic frame 105 is the receiving frame 110, and the receiving frame 110 is located in an upper area of the processing module 100 for holding, for example, the container. 200. To this end, a receiving profile 115 is disposed on the receiving frame 110 and the receiving profile 115 is incorporated into the flanged edge of the container 200. Therefore, the container 200 is suspended in the storage frame 110.

Further, the support frame 120 is coupled to the storage frame 110 by the guidance of the rails 127. Therefore, the thermal expansion of the container 200 does not affect The positioning of the support frame 120 or thus affects other components of the module 100. The fastening device is coupled to the support frame represented by the gripping finger group 135 in this example. In addition, a swing frame 140 that moves back and forth parallel to the plane of the drawing is also shown here. A work piece W, for example, a printed circuit board, is grasped by the pair of grip fingers 135 at the edges of its sides.

Figure 7 is a more detailed schematic diagram showing the delivery device when a work piece W is placed in the process module or picked up by the process module, respectively, and the process module is not shown.

The work piece W is shown in the lower area of Fig. 7, and its outer boundary is indicated by a solid line and is separated from the inner working edge by a peripheral edge and shown by a broken line. The workpiece W is temporarily held by the gripping fingers 135 and the gripping devices 25, 35 of the gripping devices at the same time, and the gripping fingers 135 are gripped in the side edge region only by a clamping manner. The work piece W is gripped to avoid breaking a process, and the gripping devices 25, 35 of the gripping devices can also contact the work piece W at the top and bottom edges to transport it.

The clamping devices 25, 35 are held by a delivery head 300 that is movable over the processing modules, and the delivery head 300 supports the consolidation devices 20, 30 of the grasping device and their operation (rotation) The driver of the gripping device. For example, the torsion bars 21, 31 of the consolidation devices 20, 30 can be driven in a variety of ways, i.e., using a gear system, a lever system, a spring mechanism, a motor, or a pneumatic actuator. The drive mechanism can be configured such that when the consolidation devices 20, 30 are in the closed state, the workpiece W can be held by means of a spring system. In order to release the work piece W, an open drive acting opposite to the spring force can be actuated.

The delivery head 300 includes a dovetail guiding member 310 at a central portion thereof, and the dovetail guiding member 310 is held by a beam 350. The beam 350 extends transversely over a row of adjacent processing modules such that the head 300 can be moved over the entire row of processing modules. This means that the delivery head 300 can lower the consolidation devices 20, 30 into the various processing modules in this row. If the multi-row processing modules are arranged in a matrix in a row behind a row, the delivery head 300 can also be moved in a direction perpendicular to the direction of the beam 350. The delivery device includes a transport trolley (not shown) for this purpose.

Figure 8 shows a delivery head 300 having a plurality of consolidation devices 20 coupled thereto, and a plurality of torsion bars 21, 22 are coupled to the consolidation devices 20 by clamping devices 25, 26, and an aerodynamic housing 360 surrounds the delivery Head 300. The housing completely encloses the delivery head 300 and allows the filtered air to flow around the product W from above in a uniform manner, which means that there is no risk of contamination due to the formation of air turbulence. A layer of flowing air is not destroyed by the housing 360.

Figure 9 is a schematic illustration of the configuration of a processing module in a first particular embodiment. This configuration relates to the processing of printed circuit boards to clean the inner bores, and the processing sequence is: loading, expansion, rinsing, permanganate treatment, rinsing, reduction, rinsing, drying, and unloading.

From a top view, each processing module is displayed in the form of a separate box. A single printed circuit board can be housed in each processing module, and the modules are configured such that they are disposed adjacent to each other and their narrow ends are opposite each other. Therefore, the printed circuit boards are parallel to a main transport direction (at the top of the figure) The arrow P) is imported into the module. This means that many boards can be processed at the same time, and the transport means for achieving this purpose and extending over a row of 100R modules of this type (not shown) can be quite narrow.

In addition, each row of modules 100R, 100R' is disposed such that each two module rows are disposed next to each other, and between the two rows of adjacent modules 100R, 100R' is a service channel 800. Additionally, at the side of the modules facing the service access 800, a number of additional components (not shown) may be provided and these additional components may be easily accessed for servicing.

In this particular embodiment, there are a plurality of modules in a row of modules for performing the same processing steps. Thus, the boards are lowered into each module 100R in parallel, processed therein and then each dropped into a row of modules located in adjacent modules 100R'.

The printed circuit boards are first moved into the various modules of the loading station by a device not shown here, and then the circuit boards are transferred from the processing module 100R to the next processing unit by the conveying device. Module 100R'. After the boards have been transferred to the module of the unloading station, the completed boards are removed from the system using a device not shown therein.

Figure 10 is a schematic illustration of a second particular embodiment of the configuration of the processing modules. This configuration relates to the processing of printed circuit boards to clean the inner bore: loading, expansion, rinsing, permanganate treatment, rinsing, reduction, rinsing, electroless copper plating, rinsing, drying, unloading.

As in the case of Figure 9, only one board is dropped into each processing module. However, the modules in this second particular embodiment are not repeatedly arranged in a plurality of rows of modules 100R, 100R' that are at right angles to a main transport direction P. The The module has only one sample for a specific processing step, which means that one board and then one board are transported through the upright system. It can be seen from the configuration of the various processing modules that the boards are each transported through the system in a meandering manner.

In this configuration, each of the two rows of modules 100R, 100R' are also in close proximity to one another such that a service channel 800 is created between the two rows.

Figure 11 shows a variation of the ninth embodiment, wherein the processing modules are disposed transversely to the main transport direction P in the plurality of rows of modules 100R, 100R' and formed in various series 100F of the processing module, In each row in 100F'.

It is to be understood that the examples and embodiments described herein are merely illustrative and that those of ordinary skill in the art will recognize the various modifications and changes and the features described in the application. Combinations are included within the spirit and scope of the invention and are intended to be within the scope of the invention. All publications, patents and patent applications mentioned herein are hereby incorporated by reference.

10‧‧‧grip device

20‧‧‧First consolidation device

21,31‧‧‧First torsion bar

22‧‧‧Second torsion bar

25,35‧‧‧First clamping device

26‧‧‧Second clamping device

27‧‧‧Contact surface

28‧‧‧Outer convex surface section

29‧‧‧ clamping surface

30‧‧‧Second consolidation device

100‧‧‧Processing module

105‧‧‧Basic framework

110‧‧‧ 收纳 frame

115‧‧‧Storage profiles

120‧‧‧Support framework

125‧‧‧ drive

127‧‧‧ Track

128‧‧‧Adjustment device

130, 130.1, 130.2‧‧‧ holding device

135‧‧‧ gripping group

137‧‧‧ drive

140‧‧‧ swing frame

145‧‧‧ drive

150‧‧‧ outflow device

200‧‧‧ container

201‧‧‧First shaft

202‧‧‧second shaft

300‧‧‧ delivery head

310‧‧‧鸠尾导部件

350‧‧‧ beams

360‧‧‧Pneumatic housing

500‧‧‧Auxiliary media

600‧‧‧Filter

700‧‧‧ pump

800‧‧‧Maintenance access

P‧‧‧Main conveying direction

P ₁ , P ₂ ‧‧‧ moving direction

W‧‧‧Workpieces; products

WE‧‧‧Contact side (first side)

W _N ‧‧‧Active area W _N

W _R ‧‧‧Outer edge area W _R

100R, 100R'‧‧‧ modules

100F, 100F‧‧‧ series

Figure 1 is a preferred embodiment of a gripping device; Figure 1A is a schematic cross-sectional view through a plate-like workpiece; Figure 2 is a cross-sectional view taken along line BB of Figure 1; 2 is a cross-sectional view of CC; FIG. 4 is a cross-sectional view of CC according to the gripping device shown in FIG. 2 and in different gripping stages; FIG. 5 is a schematic view of a processing module of the vertical system of the present invention; a top view; Fig. 6 is a schematic side view of a cross section of the processing module in Fig. 5; Figure 7 is a schematic side view of a portion of the conveying device of the gripping device when a working member W is placed or picked up; and Figure 8 is a schematic side view of the conveying device of Figure 7 having an aerodynamic housing Figure 9 is a schematic diagram showing the structure of a processing module in a first specific embodiment; Figure 10 is a schematic diagram showing the structure of a processing module in a second specific embodiment; and Figure 11 is a third specific Schematic diagram of the structure of the processing module in the embodiment.

25‧‧‧First clamping device

26‧‧‧Second clamping device

27‧‧‧Contact surface

28‧‧‧Outer convex surface section

29‧‧‧ clamping surface

W‧‧‧Workpieces

Claims (34)

An upright system for a plating process of a workpiece, the system comprising at least two processing modules and at least one conveying device, wherein a fastening device for the workpieces is disposed in the processing modules, and The at least one transport device is configured to transport at least one work piece to a process module and to transfer the work piece to the hold device in the process module, wherein the transport device includes at least one grip device The at least one gripping device holds the workpiece and has at least one other consolidation device, and each consolidation device includes a first clamping device and a second clamping device each connected to one side of the workpiece The first clamping device and the second clamping device are both movable to grasp and release the working members, wherein the at least one grasping device comprises at least two consolidation devices separated from each other, Each of the first clamping device and the second clamping device is movable such that the workpiece is stretched between the consolidation devices during clamping parallel to the first side thereof. The upright system of claim 1, wherein the at least one first clamping device connected to the first side of the working member is designed and arranged such that the position of the first side of the working member is a first clamping device is defined, and wherein at least one of the second clamping devices coupled to the second side of the workpiece is designed and arranged such that a clamping force can be applied by the second clamping device On the piece. The upright system of claim 2, wherein the at least two consolidation devices are designed and arranged such that they grip the workpiece at opposite edges and apply stretching in opposite directions during clamping The force is on the work piece. The upright system of claim 1, wherein the first clamping device of one of the consolidation devices is rotatable about a first axis of rotation and the second clamping device of the consolidation device is A second rotating shaft parallel to the first rotating shaft rotates. The upright system of claim 4, wherein the position of the first side of the workpiece is defined by a rotational position of the first clamping device. The upright system of claim 4, wherein the first portion of the outer boundary of a section of the first clamping device that is produced at a right angle to the first rotating shaft is convexly curved, and the region The second portion of the outer boundary of the segment is formed by a straight boundary line that connects the first portion of the outer boundary in a tangential manner. The upright system of claim 6, wherein the first portion is formed by a convex surface section parallel to the first rotating shaft, and the second portion is abutted against the working piece A contact surface on one side is formed. The upright system of claim 1, wherein the second clamping device comprises a convex clamping surface designed to transmit a clamping force to the second side of the workpiece. The upright system of claim 4, wherein the at least one consolidation device comprises a first torsion bar that holds the first clamping device and is coaxial with the first rotating shaft, and at least one of the second torsion bar A clamping device and a second torsion bar coaxial with respect to the second rotating shaft. Such as the upright system of claim 9 of the patent scope, each of which contains a At least two pairs of clamping devices of a clamping device and a second clamping device are fastened to a pair of torsion bars of the consolidation device, the pair of torsion bars comprising the first torsion bar and the second torsion bar. The upright system of claim 1 or 2, wherein the gripping device is designed in a manner that is advantageous for the inflow of filtered air. The upright system of claim 1 or 2, wherein the fastening device is designed such that the position of the workpiece held by the fastening device is adjustable in the processing module. The upright system of claim 1 or 2, wherein at least one processing module has the following structural features: a. a container for receiving a processing fluid; b. a basic frame having a receiving frame for supporting the container ; c. a majority of the mounting parts; d. a support frame for mounting a component that is movable at right angles to the plane of the workpiece; e. a swinging frame for mounting a component that is movable parallel to the plane of the workpiece; Additional parts; and g. many covers for the container. The upright system of claim 13, wherein the support frame is movable by being held by the storage frame. For example, the upright system of claim 14 wherein the container does not assume any static work. Such as the upright system of claim 13 of the patent scope, wherein the support framework The system can be moved using at least one pneumatic actuator. The upright system of claim 13, wherein the support frame is adjustable in at least one direction. The upright system of claim 13, wherein the swing frame is movable on the support frame. The upright system of claim 13 wherein a plurality of mounting parts movable parallel to the workpiece are held by the swing frame. In the upright system of claim 1 or 2, at least one of the processing modules is designed to process only a single workpiece therein. For example, in the vertical system of claim 1 or 2, most of the processing modules are arranged in a matrix-like manner in a multi-column and multi-row processing module. The upright system of claim 21, wherein the processing modules have an elongate basic profile on opposite longitudinal sides and are arranged such that each longitudinal side extends toward the conveying direction of the workpieces. The upright system of claim 21, wherein the processing modules have an elongated basic profile with opposite end faces, and each of the two processing modules is disposed adjacent to each other by the end faces. The upright system of claim 21, wherein at least one of the transport devices is designed to be transportable by a processing module to any other processing module. For example, the upright system of claim 1 or 2, wherein each processing module is equipped to be self-sufficient. A method for transporting a work piece to a processing module, the work piece being a gripping device is fastened in a vertical orientation, wherein each gripping device comprises at least one consolidating device, and the first clamping device and the second connecting device are connected to one side of the working member a clamping device, wherein the first clamping device and the second clamping device are movable to grasp and release the working members, and wherein the method for grasping the working member comprises the following method steps: a Transporting the workpiece to the processing module; b. grasping the workpiece with a fastening device disposed in the processing module; and c. releasing the workpiece with the grip device; wherein the grip The device comprises at least two consolidation means separated from each other, the individual first clamping means and the individual second clamping means clamping the working piece at an appropriate position on the opposite edge and inserting in opposite directions during the clamping action An extension is applied to the workpiece such that during clamping parallel to the first side thereof, a tensile force is applied to the workpiece between the consolidation devices. The method of claim 26, wherein the method further comprises the following method step of actuating the gripping device: i. moving the first clamping device such that the first clamping device takes over a contact position and thus Defining a position of the first side of the work piece; and ii. moving the second clamping device such that the second clamping device takes over a clamping position and thus is clamped with the at least one first clamping device The work piece is in a suitable position; wherein the first clamping device is in the second clamping device to take over the The contact position is taken before the clamping position. The method of claim 27, wherein the gripping device comprises at least two separate consolidation devices, and wherein the respective first clamping devices of the at least two consolidation devices are opposite to the individual second clamping devices The workpiece is clamped at an appropriate position of the edge and a tensile force is applied to the workpiece in opposite directions during the clamping action. The method of claim 27 or 28, wherein after performing the method step ii, the method further comprises the following method steps: iii. moving the first clamping device synchronously with the second clamping device such that A tensile force is applied to the workpiece parallel to the first side of the workpiece. The method of claim 26, 27 or 28, wherein the movement of the first clamping device and the movement of the second clamping device rotate. The method of claim 30, wherein the first clamping device comprises a flat surface portion and is rotated in method step i until the flat surface portion reaches the contact position. The method of claim 26, 27 or 28, wherein after processing a workpiece, the gripping device is moved into the processing module to grip the workpiece, and once the workpiece is grasped, The gripping device moves out of the processing module. The method of claim 26, 27 or 28, wherein the gripping device places the workpiece in a processing module, releases it and then moves out of the processing module. The method of claim 26, 27 or 28, wherein the work piece The position of the contact side is accurately transmitted by the gripping device to the holding device and is taken over by the holding device.