TWI486535B - Gas supply collection unit - Google Patents

Description

Gas supply collection unit

The present invention relates to a gas supply assembly unit for supplying a process gas in a semiconductor process and supplying a process gas.

In a semiconductor manufacturing plant, the process gas system is disposed outside of a clean room that is housed in a tank. Further, in order to supply the same processing gas from the cabin to a plurality of places in the clean room, a gas supply device that supplies the processing gas to be branched is used. In such a gas supply device, when a place where a new processing gas is required is generated, it is necessary to perform an operation of adding one line.

In Fig. 24, there is shown a circuit diagram of a gas supply collecting unit that performs supply of three lines; and in Fig. 25, a plan view showing an arrangement state of this circuit as an actualized machine. The machining gas air operated valve 107 is connected to a machining gas tank (not shown) via a machining gas supply port 108. The machining gas pneumatic valve 107 is connected to the second manual valves 103A, 103B, and 103C via the machining gas common flow path 105.

The second manual valves 103A, 103B, and 103C are connected to the first manual valves 101A, 101B, and 101C. The outlets of the first manual valves 101A, 101B, and 101C are in communication with the process gas outlets 100A, 100B, and 100C. The flow path between the second manual valves 103A, 103B, 103C and the first manual valves 101A, 101B, 101C is in communication with the pressure gauges 102A, 102B, 102C.

Further, the purge gas manual valve 110 is connected to a purge gas tank (not shown) via the purge gas supply port 111. The purge gas manual valve 111 is connected to the third manual valves 104A, 104B, and 104C via the check valve 109 and the purge gas common flow path 106. The third manual valves 104A, 104B, 104C are connected to the first manual valves 101A, 101B, 101C.

The end portion 105a of the process gas common flow path 105 is sealed by the stopper. The end portion 106a of the purge gas common flow path 106 is sealed by the stopper.

Next, a case will be described in which one line is added to the circuit of the three lines in Fig. 24. In Fig. 24, the fourth line D is described on the right side. In Fig. 26, the circuit diagram after the addition is shown, and in Fig. 27, the installation state of the machine in which the circuit is embodied is shown in a plan view.

Explain the sequence of operations for adding the fourth line. In this operation, the processing gas is not supplied, and it is also necessary to stop the semiconductor manufacturing process.

First, the machining gas pneumatic valve 107 is in a closed state, and the third manual valves 104A, 104B, and 104C are in an open state, and the first manual valves 101A, 101B, and 101C are in an open state. In this state, the purge gas manual valve 111 is opened. Thereby, the processing gas system remaining in the first manual valves 101A, 101B, and 101C from the machining gas pneumatic valve 107 is replaced with nitrogen as a purge gas. Thereafter, the first manual valves 101A, 101B, and 101C, the second manual valves 103A, 103B, and 103C, and the third manual valves 104A, 104B, and 104C are in a closed state.

Next, the stopper pin that seals the end portion 106a of the purge gas common flow path 106 is removed, and the pipe 112 is connected to the inlet end portion 106b of the purge gas common flow path of the fourth line. Further, the stopper pin for sealing the end portion 105a of the processing gas common flow path 105 is removed, and the pipe 113 is connected to the inlet end portion 105b of the purge gas common flow path of the fourth line.

Since the configuration of the machine of the fourth line is the same as that of the first to third lines, the description thereof will be omitted. The new end portion 106c of the purge gas common flow path 106 of the fourth line is sealed by stopping the plug. Further, the new end portion 105c of the processing gas common flow path 105 is sealed by stopping the plug.

Next, the processing gas outlet 100D is connected to a necessary place (not shown).

Thereby, the addition of the fourth line ends.

However, the conventional gas supply assembly unit has the following problems.

(1) In the case of adding a new gas line, it is necessary to stop the existing gas line, and it is only possible to perform an additional operation when the semiconductor manufacturing process is stopped.

In addition, after the end of the additional operation, the 26th drawing of the processing gas common flow path 105 and the purge gas common flow path 106 is a portion indicated by oblique lines as the exposed portion of the atmosphere, but is exposed to the atmosphere. There is a problem that moisture in the atmosphere adheres to the inner wall of the flow path. In other words, if the processing gas is mixed with water, the function of the processing gas may be incomplete. After the fourth line is added, the common flow path from the purge gas flows into the purge gas for a long time because the flow path exposed by the air must be removed. Moisture. In fact, purification is performed for hours to tens of hours.

(2) Since the additional pipings 112 and 113 are required, the gas supply assembly unit becomes larger in the lateral direction, which is in violation of the requirement of miniaturization by integration. Further, the fourth line is attached to the substrate 120 by bolts, and the position of the fourth line must be adjusted by the pipes 112 and 113, which causes a problem of wasted time due to piping work.

(3) In the gas line after the completion of the additional operation, the portion exposed to the atmosphere is the circuit 43 and the circuit 44, which are indicated by oblique lines in Fig. 9. In order to remove the moisture which is exposed to the atmosphere, the purge gas common flow path 16 is used to flow the purge gas in the additional gas unit to remove the moisture in the additional gas unit. The flow of the purge gas in the purification and the atmospheric residual portion blocked by the purge gas are represented by the following diagrams: a plan view showing the configuration of Fig. 9 (Fig. 20), and a view showing the removal of Fig. 20. A plan view of a flow block in the lower part of the machine (Fig. 21), a cross-sectional view of the flow path end manual valves 22 and 24 and a lower flow path block (Fig. 22), and a removal of the first A perspective view of the flow path block at the lower portion of the machine of Fig. 22 (Fig. 23). As can be seen from these figures, although the purge gas flows in a portion of the circuit 44, since the retention portion is large, there is a portion where the purge gas does not flow. Further, the circuit 43 is blocked by the purge gas, and there is a problem that the atmosphere remains. This is because the purification is incomplete, the process gas is mixed with water, and the function of the process gas is not complete.

Here, an object of the present invention is to provide a gas supply assembly unit which can facilitate an additional line in order to solve the above problems. Further, an object of the present invention is to provide a gas supply collecting unit which can be surely purified when a line is added for purification.

The gas supply assembly unit of the present invention has a configuration as described below.

(1) The gas supply assembly unit includes a plurality of gas units that are connected in an in-line manner by the flow path block: the first manual valve is disposed at the outlet flow path; and the second manual valve is disposed to communicate with the above a position of the first manual valve and the processing gas common flow path; and a third manual valve disposed at a position connecting the first manual valve and the common flow path of the purge gas; wherein: the manual valve of the processing gas common flow end end, The end portion of the common flow path of the processing gas is communicated with the end portion of the common flow path of the purge gas, and communicates with the end portion of the common flow path of the purge gas.

(2) The gas supply assembly unit according to (1), further comprising: a fixing plate that is provided in a plurality of directions intersecting with a flow of the gas of the gas unit in a direction perpendicular thereto, and the gas unit is attached; a machining gas common flow end end manual valve is connected to the machining gas common flow path end manual valve; and another purge gas common flow path end manual valve, the purge gas communicating with the end of the purge gas common flow path The common flow path end manual valve is connected.

(3) The gas supply unit according to (2), wherein the additional gas unit has a height adjusting device for connecting the gas supply unit provided.

(4) The gas supply assembly unit according to (1), further comprising: an additional gas unit, and another processing gas common flow path end manual valve that communicates with the machining gas common flow path end manual valve a separate purge gas common flow path end manual valve communicating with the purge gas common flow path end manual valve, and another second manual valve communicating with the machining gas common flow path end manual valve; a passage connecting the outlet flow path of the manual valve at the end of the additional purge gas common flow path and the outlet flow path of the manual valve at the end of the additional process gas common flow path; and the second communication path connecting the additional process gas common flow An inlet flow path of the road end manual valve and an outlet flow path of the machining gas common flow end end manual valve; and a third communication path connecting the outlet flow path of the machining gas common flow end end manual valve and the other The inlet flow path of the second manual valve.

(5) In the gas supply assembly unit according to (1), two branch outlet flow paths are formed in the inside of the machining gas common flow path end manual valve, and the additional one of the additional gas units is The inside of the manual valve at the end of the processing gas common flow path forms two branch outlet flow paths.

(6) The gas supply assembly unit according to (5), wherein the first communication path is at an outlet flow path of the manual valve at the end of the additional purge gas common flow path, and the other processing gas common flow path end Two outlets of the two branch outlets of the manual valve communicate with each other, and the second communication passage is at an inlet flow path of the manual valve at the end of the other processing gas common flow path and the end of the common flow path of the machining gas One of the two branch outlet flow paths of the manual valve communicates with the other of the two bypass outlet flow paths of the manual communication valve end manual valve and the other The inlet flow path of the second manual valve is connected.

Next, the effects of the invention having the configuration described in the above (1) to (3) will be described.

The machining gas common flow path end manual valve that communicates with the end portion of the machining gas common flow path and the purge gas common flow path end manual valve that communicates with the end portion of the purge gas common flow path are normally closed. Further, even when a new line is added, the machining valve common flow end manual valve and the purge gas common flow path end manual valve are closed at least until the end of the purification.

Next, the fourth gas unit constituting the fourth line intersects with the flow of the gas at right angles, and is mounted on the plurality of positioned guide rails to be moved on the guide rail to make the processing gas of the fourth gas unit common to the flow path. The inlet end portion is moved at a position connected to the manual valve at the end of the processing gas common flow path, and the inlet end portion of the purge gas common flow path is moved at a position connected to the outlet of the manual valve at the end of the purge gas common flow path.

In this case, the block at the inlet end portion of the processing gas common flow path constituting the fourth gas unit and the block forming the inlet end portion of the purge gas common flow path are, for example, reduced in thickness in the height direction to have only the thickness of the partition plate. These blocks can be moved to the position immediately below the exit of the manual valve at the end of the processing gas common flow path without interference, and also to the position immediately below the outlet of the manual valve at the end of the common flow path of the purge gas. Next, by inserting a partition plate under the entire fourth gas unit, the inlet end portion of the processing gas common flow path of the fourth unit can be connected to the outlet of the manual valve at the end of the processing gas common flow path, so that the purge gas can be used in common. The inlet end of the flow path is connected to the outlet of the purge gas common flow path end manual valve. Next, the connecting bolt and the fourth gas unit fixing bolt are locked.

Next, the new processing gas common flow path end manual valve of the fourth gas unit and the purge gas common flow path end manual valve are used as the closed valve state, and the second manual valve is used as the closed valve state, and the first manual valve and the first manual valve are The third manual valve is opened in the valve state, and the manual valve of the common flow path of the purge gas of the gas unit is opened.

Thereby, the purge gas flows in the fourth gas unit, and the moisture in the fourth gas unit is removed. The water can be sufficiently removed, and after the preparation on the semiconductor manufacturing apparatus side is completed, the processing gas can be supplied to the fourth gas line by closing the third manual valve and opening the second manual valve.

As described above, the gas supply assembly unit according to the present invention includes a plurality of gas units which are connected in series by means of a flow path block: the first manual valve is disposed at the outlet flow path; the second manual a valve disposed at a position communicating the first manual valve and the processing gas common flow path; and a third manual valve disposed at a position communicating the first manual valve and the purge gas common flow path; and, because of the gas supply set The unit further includes a machining gas common flow path end manual valve that communicates with an end portion of the processing gas common flow path, and a purge gas common flow path end manual valve that communicates with an end portion of the purge gas common flow path, and does not The existing gas line has an influence, that is, a new gas line can be added in the case of performing semiconductor manufacturing operations.

Further, even after the completion of the additional operation, since the existing processing gas common flow path and the purge gas common flow path are not exposed to the atmosphere, a new gas unit can be installed, and the additional work can be completed in a short time.

Further, the gas supply assembly unit includes: a guide rail that is disposed at a right angle to the flow of the gas of the gas unit, and is provided with a plurality of gas units; and the other processing gas common flow path end manual valve is provided for additional The gas unit is in communication with the manual valve at the end of the processing gas common flow path; and the other purge gas common flow path end manual valve, the common gas flow channel end of the purge gas communicating with the end of the purge gas common flow path The manual valve is connected; therefore, for example, even when a fifth gas unit for the fifth line is required to be added, the same operation can be performed.

Moreover, since the above-mentioned additional gas unit has a height adjusting device for connecting the existing gas supply collecting unit, it is easy to determine the position of the additional gas unit, and the work efficiency of the additional work is good.

Next, the effects of the invention having the configuration described in the above (4) to (6) will be described.

The machining gas common flow path end manual valve that communicates with the end portion of the machining gas common flow path and the purge gas common flow path end manual valve that communicates with the end portion of the purge gas common flow path are normally closed. When a new line is added, the flow of the added gas unit and the gas intersects at right angles, and is mounted on the plurality of guide rails to move on the guide rail, and the loop is connected as follows.

First, the outlet flow path of the manual valve at the end of the processing gas common flow path of the existing line and the inlet flow path of the second manual valve of the additional line are communicated by the communication path in the flow path block, and the third communication path is provided. The outlet flow path of the manual valve at the end of the purge gas common flow path of the existing line and the inlet flow path of the third manual valve of the additional line are communicated by the communication path in the flow path block. The outlet flow path of the manual valve at the end of the processing gas common flow path of the existing line and the inlet flow path of the manual valve of the processing gas common flow end of the additional line are connected by a pipe, and a second communication path is provided. Further, before the additional operation, the outlet flow path of the manual valve at the end of the processing gas common flow path of the additional line and the outlet flow path of the purge gas common flow path end manual valve of the additional line are connected by the first communication path of the pipeline . After connecting the circuit as described above, lock the connecting bolt and add the fixing bolt of the gas unit.

Thereby, after the additional line is connected to the existing line, the machining gas common flow path end manual valve, the purge gas common flow path end manual valve, the first manual valve, the second manual valve, and the third manual are added to the line. As a valve opening state, the valve will open the manual valve at the end of the common flow path of the purge gas of the line.

Next, the purge gas manual valve of the existing line is opened, and in the additional line, the purge gas system flows from the third manual valve and the first manual valve toward the processing gas outlet. Further, the other side of the purge gas flows from the purge gas common flow path end manual valve, the machining gas common flow path end manual valve, the second manual valve, and the first manual valve toward the machining gas outlet. According to this, in the invention having the configuration described in the above (1) to (3), the purge gas may be filled in the circuit in which the purge gas does not flow. Although the trapped portion of the purge gas occurs in a part, it takes only necessary time to purify, and the removal of moisture in the additional line can be performed substantially completely. The water can be sufficiently removed, and after the preparation of the semiconductor manufacturing apparatus side is completed, the processing gas common flow end end manual valve, the purge gas common flow path end manual valve, and the third manual valve are closed by opening the additional line, and the existing line is opened. The machining gas common flow end end manual valve can supply machining gas in the additional line.

Further, two separate outlet flow paths are formed in the manual valve at the end of the machining gas common flow path of the existing line and the manual valve at the end of the processing gas common flow path of the additional line, and the purge gas can also be respectively The manual valve of the processing gas common flow path end of the line and the internal flow of the machining gas common flow end end manual valve of the additional line are provided, and the retained portion of the purge gas becomes a little. Therefore, the removal of moisture in the additional line can be performed substantially completely.

As described above, the gas supply assembly unit of the present invention includes a plurality of gas units integrally connected to the following elements by a flow path block: a first manual valve is disposed at the outlet flow path; and a second manual valve is disposed at a position connecting the first manual valve and the processing gas common flow path; and a third manual valve disposed at a position connecting the first manual valve and the purge gas common flow path; and, because the gas supply assembly unit further includes: adding The gas unit includes a machining gas common flow end end manual valve that communicates with the machining gas common flow path end manual valve, and a purge gas common flow end end manual valve that communicates with the purge gas common flow path end portion, and a different processing gas common flow path manual valve that communicates with the manual valve at the end of the processing gas common flow path, another purge gas common flow path end manual valve that communicates with the purge gas common flow path end, and the processing gas a second second manual valve connected to the common flow end end manual valve; the first communication path communicating with the other common purge gas common flow path An outlet flow path of the manual valve and an outlet flow path of the manual valve at the end of the additional processing gas common flow path; a second communication path connecting the inlet flow path of the manual valve at the end of the additional processing gas common flow path and the above processing An outlet flow path of the manual valve at the end of the gas common flow path; and a third communication path connecting the outlet flow path of the manual valve end of the processing gas common flow path and the inlet flow path of the other second manual valve; When the line is cleaned by the additional line, the entire circuit can be filled with the purge gas, and the purge can be performed for a necessary period of time, and the moisture in the additional gas unit can be substantially removed.

Further, the gas supply assembly unit of the present invention forms two branch outlet flow paths inside the manual valve at the end of the processing gas common flow path, and the above-mentioned additional processing gas common flow in the additional gas unit The inside of the road end manual valve forms two branching outlet flow paths. Therefore, when the additional line is added to purify the additional line, the purge gas can be separately distributed to the end of the common flow path of the processing gas of the existing line, and the additional valve is added. The inside of the manual valve of the processing gas common flow path of the line does not take time, and the moisture in the additional gas unit can be almost completely removed.

Further, the gas supply collecting unit of the present invention is provided such that the first communication passage is manually connected to the outlet flow path of the manual valve at the end of the additional purge gas common flow path and the end of the common processing gas common flow path Two outlets of the two branch outlets of the valve are communicated such that the second communication passage is at the inlet flow path of the manual valve at the end of the additional processing gas common flow path and the manual valve of the machining gas common flow end One of the two branch outlet flow paths communicates with the third communication passage at the other of the two branch outlet flow paths of the machining gas common flow path end manual valve and the other second Since the inlet flow path of the manual valve is connected, the purge gas can be separately flown to the end of the machining gas common flow end manual valve of the existing line, the inside of the machining gas common flow end end manual valve of the additional line, and all the flow paths. . Therefore, it takes no time to purify, and the moisture in the additional gas unit can be almost completely removed.

Embodiments of the gas supply assembly unit relating to the present invention are explained below.

[First Embodiment]

A first embodiment of the gas supply assembly unit relating to the present invention will be described below with reference to the drawings. In the first drawing, a circuit diagram of a gas supply assembly unit including a first gas unit A and a second gas unit B for supplying a machining gas to two existing lines, and an additional gas unit for additional addition are shown. Circuit diagram of C. As shown in FIG. 1, the first gas unit A, the second gas unit B, and the additional gas unit C are disposed in order from the processing gas supply port 18.

The machining gas pneumatic valve 17 is connected to a machining gas tank (not shown) via a machining gas supply port 18. The machining gas pneumatic valve 17 is connected to one port of the second manual valves 13A and 13B via the machining gas common flow path 15.

The other port of the second manual valves 13A, 13B is connected to the first manual valves 11A, 11B. The outlets of the first manual valves 11A, 11B are in communication with the process gas outlets 10A, 10B. The pressure gauges 12A, 12B are connected to the flow path that connects the second manual valves 13A, 13B and the first manual valves 11A, 11B.

Further, the purge gas manual valve 20 is connected to a purge gas tank (not shown) via the purge gas supply port 21. The purge gas manual valve 20 is connected to one port of the third manual valves 14A and 14B via the check valve 19 and the purge gas common flow path 16. The other port of the third manual valves 14A, 14B is connected to the first manual valves 11A, 11B.

The end of the machining gas common flow path 15 is sealed by the machining gas common flow path end manual valve 22. Further, the end portion of the purge gas common flow path 16 is sealed by the purge gas common flow path end manual valve 23.

Fig. 2 is a plan view showing the arrangement state of this circuit as an actualized machine. Both ends of the two guide rails 26, 27 are fixed in parallel by the rail fixing bars 41, 29. The unit fixing plates 28, 29, 30 are mounted along the guide rails 26, 27 so as to be movable in parallel in the lateral direction. The machining gas pneumatic valve 17 is fixed to the machining gas unit fixing plate 28. In the purge gas unit fixing plate 29, the purge gas manual valve 20 and the check valve 19 are fixed.

The first gas unit fixing plate 30A in the first gas unit A is connected to the first manual valve 11A, the pressure gauge 12A, and the line 38A from above, and fixes the third manual valve 14A and the second manual valve 13A. Similarly, the second gas unit fixing plate 30B in the second gas unit B connects the first manual valve 11B, the pressure gauge 12B, and the line 38B from above, and fixes the third manual valve 14B and the second manual valve 13B, and The existing machining gas common flow path end manual valve 22 is fixed at a position slightly offset to the right side. Further, the purge gas common flow path end manual valve 23 is fixed at a position slightly offset to the right side away from the line 38B.

The additional gas unit C is slightly fixed from the existing gas unit, and is attached to the additional gas unit fixing plate 30C. In other words, the gas unit fixing plate 30C is additionally provided, and the first manual valve 11C, the pressure gauge 12C, and the line 38C are connected from above, and the third manual valve 14C and the second manual valve 13C are fixed, and are fixed at positions slightly shifted to the right side. The machining gas shares the flow path end manual valve 24. Further, the purge gas common flow path end manual valve 25 is fixed at a position slightly offset to the right side away from the line 38C.

Further, the notch portion 34 is formed at the position of the machining gas common flow path end manual valve 24 of the gas unit fixing plate 30C, and the notch portion 35 is formed at the position of the purge gas common flow path end manual valve 25. .

Fig. 3 is a cross-sectional view taken along line AA of Fig. 2; The process gas common flow path 15 of the pipe shape communicates with the V flow path 321A formed in the V flow path block 32A via the relay block 42. The V flow path 321A is connected to the manual valve inlet flow path 131A, and the valve chamber via the manual valve communicates with the V flow path 321B formed in the V flow path block 32B via the manual valve communication path 133A. Therefore, regardless of the opening and closing of the second manual valve 13A, the manual valve inlet flow path 131A and the manual valve communication path 133A are constantly in communication.

The outlet flow path 132A of the third manual valve communicates with the machining gas outlet flow path 331A formed in the flow path block 33A.

Since the flow path configuration of the second gas unit B is substantially the same as the flow path configuration of the first gas unit A, the description thereof will be omitted. Only explain the differences.

Fig. 4 is a cross-sectional view taken along line BB of Fig. 2; The manual valve communication passage 133B of the second manual valve 13B communicates with the inlet flow passage 22a of the machining gas common flow passage end manual valve 22 via the flow passage 361B formed in the flow passage block 36B. Further, the outlet flow path 22b of the machining gas common flow path end manual valve 22 communicates with the relay hole 37a shown in Fig. 2 via the flow path 371B formed in the flow path block 37B.

On the other hand, the height adjustment plate 31 is held on the lower side of the additional gas unit fixing plate 30C to which the additional gas unit C is added and the upper side of the guide rail 26. Since the drawing of the recessed portion 34 of the gas unit fixing plate 30C is not easily seen, only the notch portion 34 is described, and the portion that can be seen on the opposite side is omitted.

The structure of the purge gas common flow end end manual valve and the purge gas common flow path end manual valve 25 of the additional gas unit C is substantially the same as the structure shown in FIG. 4, and the description thereof is omitted. The flow path block 39 which is formed in a flow path which is formed to communicate with the outlet flow path of the purge gas common flow path end manual valve 23 is extended in the lower direction of the second drawing, and is used for the A relay hole 39a that communicates with the inlet flow path of the three manual valve 14C is formed.

Next, the additional gas unit fixing plate 30C is placed close to the second gas unit fixing plate 30B, and the hole position of the manual valve inlet flow path 131C of the relay hole 37a and the second manual valve 13C of the additional gas unit C is in the plane of Fig. 2 The direction is the same. In this state, the cross-sectional view corresponding to Fig. 3 is shown in Fig. 5. The relay hole 37a and the manual valve inlet flow path 131C are separated by the thickness of the height adjustment plate 31 in the height direction. Further, a cross-sectional view corresponding to Fig. 4 is shown in Fig. 6. The flow path block 37B is realized by entering the space of the notch portion 34, and the positional relationship of Fig. 5 is realized.

In this state, the height adjustment plate 31 is removed. Then, it is fixed by a bolt (not shown). Thereby, the relay hole 37a and the manual valve inlet flow path 131C of the second manual valve 13C to which the gas unit C is added are communicated.

As described above, the installation work of the additional gas unit C is completed. Next, the new machining gas common flow path end manual valve 24 and the purge gas common flow path end manual valve 25 in which the gas unit C is added are in a closed state, and the second manual valve 13C is in a closed state, and the first The manual valve 11C and the third manual valve 14C are in an open state, and the purge gas common flow path end manual valve 23 of the second gas unit B is opened.

Thereby, the purge gas flows in the additional gas unit C, and the moisture in the additional gas unit C is removed. The moisture can be sufficiently removed, and after the semiconductor manufacturing apparatus side is completely prepared, the third manual valve 14C is closed, and the second manual valve 13C is opened to supply the machining gas to the third gas line.

As described above, the gas supply assembly unit according to the present invention includes a plurality of gas units which are connected in series by means of a flow path block to integrally connect the following elements: the first manual valves 11A, 11B are disposed in the outlet flow path; The second manual valves 13A, 13B are disposed at positions that communicate the first manual valves 11A, 11B and the process gas common flow path 15; and the third manual valves 14A, 14B are disposed to communicate with the first manual valves 11A, 11B and The position of the purge gas common flow path 16; further, because the gas supply assembly unit further includes a machining gas common flow path end manual valve 22 communicating with the end of the process gas common flow path 15, and a common flow path 16 with the purge gas The purge gas common flow path end manual valve 23 that is connected to the end portion does not affect the existing gas line, that is, a new gas line can be added to the semiconductor manufacturing operation.

Further, according to the gas supply assembly unit of the present invention, since the piping system exposed to the atmosphere is only the portion shown by oblique lines in Fig. 9, the existing processing gas common flow path 15 and the purge gas common flow path 16 are not exposed. In the atmosphere, a new gas unit C can be installed, and the additional work can be completed in a short time.

Further, since the gas supply assembly unit includes the guide rails 26 and 27, a plurality of the gas guide units are disposed at right angles to the flow of the gas of the gas unit, and the gas unit is mounted: another processing gas common flow path end manual valve 24, The additional gas unit C is connected to the processing gas common flow path end manual valve 22; and the additional purge gas common flow path end manual valve 25 connects the additional gas unit C to the end of the purge gas common flow path The purge gas common flow path end manual valve 23 is in communication; therefore, for example, even when a fourth gas unit for the fourth line needs to be added, the same operation can be performed.

Further, since the additional gas unit C to be installed has the height adjusting plate 31 for connecting the gas supply unit to be provided, it is easy to determine the position at which the gas unit is added, and the work efficiency of the additional work is good.

[Second embodiment]

Next, a second embodiment of the present invention will be described. Since the configuration and operational effects of the gas supply assembly unit of the second embodiment are substantially the same as those of the first embodiment, only differences will be described, and other portions will be omitted.

The drawing corresponding to Fig. 5 is shown in Fig. 7, and the drawing corresponding to Fig. 6 is shown in Fig. 8.

In the seventh and eighth drawings, the height adjustment plates 40, 40A, 40B are attached to the lower portions of the unit fixing plates 28, 29, the first gas unit fixing plate 30A, and the second gas unit fixing plate 30B, respectively. Below the additional gas unit fixing plate 30C, the original height adjusting plate is not mounted.

Further, in the seventh and eighth figures, the flow path block 37B is not attached to the second gas unit fixing plate 30B, but is attached to the additional gas unit fixing plate 30C.

After the state of the seventh and eighth states is determined, the height adjustment plate 40C (not shown) is held under the additional gas cell fixing plate 30C, so that the opening formed in the flow path block 37B and the end of the processing gas common flow path are formed. The output port of the manual valve 22 is connected.

Further, although the embodiment of the present invention has been described, the present invention is not limited to the above embodiment, and various applications are possible.

For example, it is sufficient to install a mechanism that knows that the machining gas common flow path manual valve 22 is opened at least once. Usually, in order to be sealed and safe by the machining gas common flow path manual valve 22, the relay hole 16a is also used as a stop bolt. In this case, even if the machining gas common flow path end manual valve 22 is accidentally opened, since the relay hole 16a is sealed, the machining gas does not leak to the outside. However, at the time of the additional work, there is a risk that the remaining machining gas leaks to the outside from the output port of the machining gas common flow end end manual valve 22 to the space of the relay hole 16a at the time of the operation. In order to prevent such a situation, even if the machining gas common flow path end manual valve 22 is opened once and then closed, as long as a mechanism that can be confirmed from the outside is installed, safety can be improved.

[Third embodiment]

Next, a third embodiment of the gas supply assembly unit of the present invention will be described with reference to the drawings. In the tenth diagram, a circuit diagram of a gas supply assembly unit including a gas unit A for supplying a machining gas to an existing line, and a circuit diagram for an additional gas unit C added thereto are shown.

The machining gas pneumatic valve 17 is connected to a machining gas tank (not shown) via a machining gas supply port 18. The machining gas pneumatic valve 17 is connected to one port of the second manual valve 13A via the machining gas common flow path 15. The other port of the second manual valve 13A is connected to the first manual valve 11A. The outlet of the first manual valve 11A is in communication with the process gas outlet 10A. The pressure gauge 12A is connected to the flow path in which the second manual valve 13A and the first manual valve 11A are communicated.

Further, the purge gas manual valve 20 is connected to a purge gas tank (not shown) via the purge gas supply port 21. The purge gas manual valve 20 is connected to one port of the third manual valve 14A via the check valve 19 and the purge gas common flow path 16. The other port of the third manual valve 14A is connected to the first manual valve 11A. The end of the machining gas common flow path 15 is sealed by the machining gas common flow path end manual valve 22. Further, the end portion of the purge gas common flow path 16 is sealed by the purge gas common flow path end manual valve 23.

Fig. 11 is a plan view showing the arrangement state of this circuit as an actualized machine. Both ends of the two guide rails 26, 27 are fixed in parallel by the rail fixing bars 41, 45. The unit fixing plates 28, 29, 30A are mounted along the guide rails 26, 27 so as to be movable in parallel in the lateral direction. The machining gas pneumatic valve 17 is fixed to the machining gas unit fixing plate 28. In the purge gas unit fixing plate 29, the purge gas manual valve 20 and the check valve 19 are fixed.

In the first gas unit fixing plate 30A, the first manual valve 11A, the pressure gauge 12A, and the line 38A are connected from above, and the third manual valve 14A and the second manual valve 13A are fixed, and the existing machining is fixed at a position slightly biased to the right. The gas common flow path end manual valve 22. Further, the purge gas common flow path end manual valve 23 is fixed at a position slightly offset to the right side away from the line 38A.

Since the existing gas units are slightly separated, the additional gas unit C to be added is fixed to the additional gas unit fixing plate 30C. In other words, the gas unit fixing plate 30C is additionally provided, and the first manual valve 11C, the pressure gauge 12C, and the line 38C are connected from above, and the third manual valve 14C and the second manual valve 13C are fixed, and are fixed at positions slightly shifted to the right side. The machining gas shares the flow path end manual valve 24. Further, the purge gas common flow path end manual valve 25 is fixed at a position slightly offset to the right side away from the line 38C. The machining gas common flow path end manual valve 24 and the purge gas common flow path end manual valve 25 are connected by the first communication passage 52 of the pipeline.

As described above, the installation operation of the additional gas unit C is performed as follows, from the state in which the gas unit C is slightly separated and the additional gas unit C is added. First, the additional gas unit fixing plate 30C is brought close to the fixing plate 30A of the first gas unit A, as shown in Figs. 14 and 15, the outlet flow path 22b of the machining gas common flow path end manual valve 22 and the additional gas unit C The inlet flow path 51 (refer to Fig. 12) of the second manual valve 13C is connected by the flow path block 37A. In other words, the outlet flow path 22b of the machining gas common flow path end manual valve 22 is connected to the flow path block 37A so that the flow path 371A of the U-shaped flow path and the flow path 373A communicate with each other in the flow path 372A, and the flow path 372A It is in communication with the inlet flow path 51 of the second manual valve 13C. Similarly, as shown in Figs. 12 and 13, an outlet flow path (not shown) of the purge gas common flow path end manual valve 23 and a third manual valve 14C of the additional gas unit C are provided. The flow path 56, the flow path 55, and the flow path 57 of the flow path block 58 communicate with each other. Next, as shown in Figs. 14 and 15, the flow path 371A communicating with the outlet flow path 22b of the machining gas common flow path end manual valve 22, and the machining gas common flow path end manual valve 24 of the additional gas unit C are provided. The flow path 361C that the inlet flow path 24a communicates with is connected by the second communication path 59 of the pipe. Further, before the installation operation of the additional gas unit C, the outlet flow path 24b of the machining gas common flow path end manual valve 24 is a flow path 371C that communicates with the outlet flow path 24b in the flow path block 37C, and a flow in the horizontal direction. The path 373C is connected and the self-flow path 373C is connected to the first communication path 52 of the pipeline. Similarly, as shown in Figs. 12 and 13, the outlet flow path 54 of the purge gas common flow path end manual valve 25 is connected to the flow line 52 by the flow path 53 in the flow path block 47.

By the above, the installation work of the additional gas unit C is completed. Next, a new processing gas common flow path end manual valve 24, a purge gas common flow path end manual valve 25, a second manual valve 13C, a first manual valve 11C, and a third manual valve 14C of the gas unit C are added. In the valve opening state, the purge gas common flow path end manual valve 23 and the purge gas manual valve 20 of the gas unit are opened.

Thereby, the purge gas flows in the additional gas unit C, and the moisture in the additional gas unit C is removed. The flow of the purge gas and the retention portion of the purge gas are shown in the following figures. That is, a plan view showing the configuration of Fig. 12, a plan view showing a flow path block in which the lower portion of the apparatus of Fig. 13 is removed, and a machining gas common flow path end manual valve 22, 24 and a flow path block shown in Fig. 14. 36 and 37 are cross-sectional views and perspective views showing the flow path blocks of the lower portion of the machine in Fig. 15 .

The flow of the purge gas will be described below. When the purge gas manual valve 20 is opened, in the additional gas unit C, when the purge gas flows, the purge gas tank (not shown) is passed through the purge gas supply port 21, the purge gas manual valve 20, the check valve 19, and the purge gas. The flow path 16 flows from the purge gas common flow path end manual valve 23 to the third manual valve 14C and the purge gas common flow path end manual valve 25. The purge gas system flowing at the third manual valve 14C flows from the first manual valve 11C to the process gas outlet 10C.

Further, the purified gas system flowing through the manual valve 25 at the end portion of the purge gas common flow path is in the first communication path 52 of the line, the manual valve 24 at the end of the processing gas common flow path, the second communication path 59 of the line, and the flow path. The third communication path 373A in the horizontal direction and the flow path 372A in the vertical direction of the U-shaped flow path in the block 37A flow. The purge gas system flowing through the flow path 372A flows to the process gas outlet 10C via the inlet flow path 51 of the second manual valve 13C, the second manual valve 13C, and the first manual valve 11C.

Thereby, the purge gas flows in the additional gas unit C. As shown in Figs. 14 and 15, the portion in which the purge gas is retained is generated in a part of the flow path. However, even if the purge gas is retained, since it is in communication with the flow of the purge gas, it is only necessary to flow the purge gas for a necessary time, and the moisture in the additional gas unit C can be removed. The water can be sufficiently removed, and after the semiconductor manufacturing apparatus side is completely prepared, the processing gas common flow end end manual valve 24, the purge gas common flow path end manual valve 25, and the third manual valve 14C are closed to open the common processing gas. The flow path end manual valve 22 can supply the machining gas on the second line.

As described in detail above, the gas supply assembly unit according to the third embodiment includes a plurality of gas units integrally connected to the following elements by the flow path block: the first manual valves 11A, 11B are disposed at the outlet flow path The second manual valves 13A, 13B are disposed at positions that communicate the first manual valves 11A, 11B and the process gas common flow path 15; and the third manual valves 14A, 14B are disposed to communicate with the first manual valves 11A, 11B And the position of the purge gas common flow path 16; further, the gas supply assembly unit further includes: an additional gas unit C added, and a processing gas common flow path end manual valve 22 having an end portion communicating with the processing gas common flow path 15. a purge gas common flow path end manual valve 23 at the end of the purge gas common flow path 16 and another process gas common flow path manual valve 24 and the purge gas that communicate with the process gas common flow path end manual valve 22 a common purge gas common flow path end manual valve 25 communicating with the common flow path end manual valve 23, and another second manual valve 13C communicating with the machining gas common flow path end manual valve 22; a communication path 52 connecting the outlet flow path 54 of the additional purge gas common flow path end manual valve 25 and the outlet flow path 24b of the additional machining gas common flow path end manual valve 24; the second communication path 59 is connected to the other An inlet flow path 24a of the machining gas common flow path end manual valve 24 and an outlet flow path 22b of the machining gas common flow path end manual valve 22; and a third communication path 373A that communicates with the machining gas common flow path end manual valve 22 The outlet flow path 22b and the inlet flow path 51 of the other second manual valve 13C; therefore, when the additional line is added to purify the additional line, all the flow paths in the additional gas unit can be filled with the purge gas. Although the retention portion in which no purge gas flows does not occur in part, since the retention portion communicates with the flow of the purge gas, and the purge gas flows for the necessary time, the moisture in the additional gas unit C can be substantially completely removed.

[Fourth embodiment]

Next, a fourth embodiment of the present invention will be described. Since the configuration and operational effects of the gas supply assembly unit of the fourth embodiment are substantially the same as those of the third embodiment, only differences will be described, and other portions will be omitted. The difference is the flow path structure between the manual valve of the processing gas common flow path end of the existing line to the second communication path of the additional line, the manual valve of the processing gas common flow path end, and the connection of the first communication path.

The operation system in which the additional gas unit C is attached to the existing gas unit is carried out in the same manner as in the first embodiment. The gas supply assembly unit in which the additional gas unit C is installed is shown in the following drawings. The drawing corresponding to Fig. 12 is shown in Fig. 16, the drawing corresponding to Fig. 13 is shown in Fig. 17, and the drawing corresponding to Figs. 14 and 15 is shown in Figs. 18 and 19, respectively. As shown in Figs. 18 and 19, the outlet flow path of the machining gas common flow path end manual valve 22' is branched downward into two, so that one flow path 222b and the second manual valve 13C to which the gas unit C is added are provided. The inlet flow path 51 is connected by the U-shaped flow path of the flow path block 37A'. That is, the outlet flow path 222b of the machining gas common flow path end manual valve 22' is in the flow path block 37A', the vertical flow path 371A', the horizontal third communication path 373A', and the vertical direction. The flow path 372A' communicates, and the flow path 372A' communicates with the inlet flow path 51 of the second manual valve 13C.

Next, the other flow path 221b of the outlet flow path of the machining gas common flow path end manual valve 22' and the inlet flow path 24a' of the machining gas common flow path end manual valve 24' of the additional gas unit C are used. The second communication path 361C' of the V-shaped flow path of the flow path block 36C' is in communication. Similarly to the machining gas common flow path end manual valve 22', the outlet flow path of the machining gas common flow path end manual valve 24' is divided into two, and one flow path 241b and the other flow path are branched. 242b is in communication with the port 375 on the left side and the port 376 on the right side of the V-shaped stream path 371C' of the flow path block 37C', respectively. The V-shaped flow path 371C' in the flow path block 37C' is communicated with the flow path 373C' at the lowest point of the V-shape, and the flow path 373C' is communicated with the first communication path 52' of the flow path.

The operation of the fourth embodiment with this setting and its effect will be explained. In the additional gas unit C, the purge gas flows to remove the moisture in the additional gas unit C. The flow of the purge gas and the retention portion of the purge gas are shown in Figures 16, 17, 18, and 19.

The flow of the purge gas will be described below. Compared with the third embodiment, the flow from the purge gas common flow path end manual valve 25 to the first communication passage 52' of the pipeline is the same, and from the first communication passage 52' to the third communication passage 373A'. The flow system is different and only describes the flow between them. The purge gas system flowing through the first communication passage 52' of the pipe flows from the flow path 373C' of the flow path block 37C' to the lowest point of the V-shape of the V-shaped flow path 371C', and passes through one of the V-shaped flow paths. The left port 375 flows to one of the flow paths 241b of the outlet flow path of the machining gas common flow path end manual valve 24', or flows from the other V-shaped flow path to the processing gas common flow path via the right port 376. The other flow path 242b of the outlet flow path of the end manual valve 24'. The self-flow path 241b and the flow path 242b flow in the purge gas system of the machining gas common flow path end manual valve 24' from the inlet flow path 24a', the second communication path 361C' of the V-shaped flow path of the flow path block 36C', and the processing The other flow path 221b' of the outlet flow path of the gas common flow path end manual valve 22' flows to one of the outlet flow paths 222b. The flow path 371A' of the U-shaped flow path in the purge gas system self-flow path block 37A' flowing through one of the outlet flow paths 222b of the machining gas common flow path end manual valve 22', and the flow path 373A' of the third communication passage It flows to the flow path 372A'. The purge gas system flowing through the flow path 372A' flows in the inlet flow path 51 of the second manual valve 13C, which is the same as that of the third embodiment.

As described above, when the purge gas flows in the additional gas unit C, as shown in FIGS. 18 and 19, a portion of the outlet flow path of the manual valve 22' at the end of the processing gas common flow path is subjected to the flow of the purge gas. Retention department. However, since the retention portion is located beside the bending point at which the flow of the purge gas changes to an acute angle, the appearance is actually almost unretained and the volume is extremely small, so that it does not take time, but can be substantially completely The removal of moisture in the gas unit C is additionally performed.

The moisture can be sufficiently removed, and after the preparation of the semiconductor manufacturing apparatus side is completed, the machining gas common flow path end manual valve 24', the purge gas common flow path end manual valve 25, and the third manual valve 14C are closed to open the processing. The gas common flow path end manual valve 22' can supply the machining gas on the second line.

According to the gas supply assembly unit of the second embodiment described in detail above, since the two branch outlet flow paths 221b and the outlet flow paths 222b are formed inside the machining gas common flow path end manual valve 22', and the gas is added In the inside of the other processing gas common flow path end manual valve 24 of the unit C, two branch outlet flow paths 241b and 242b are formed. Therefore, when the additional line is added and the additional line is cleaned, the processing gas can be used in common. The flow path end manual valve 22' and the additional process gas common flow path end manual valve 24' of the individual internal flow purge gas do not take time, and the moisture in the added gas unit can be substantially completely removed.

Further, according to the gas supply assembly unit of the fourth embodiment, the first communication path 52' is manually operated at the outlet flow path 54 of the other purge gas common flow path end manual valve 25 and the other processing gas common flow path end portion. The two outlet ports 241b and 242b of the two branch ports of the valve 24' communicate with each other, so that the second communication path 361C' is at the inlet flow path 24a' of the manual valve 24' at the end of the additional process gas common flow path and processing One side 221b of the two branch outlet flow paths of the gas common flow path end manual valve 22' communicates, and the third communication path 373A' flows at the two branch outlets of the manual valve 22 at the end of the machining gas common flow path. The other side 222b of the road and the inlet flow path 51 of the other second manual valve are connected to each other. Therefore, when the additional line is added to purify the additional line, the purge gas can flow at the end of the processing gas common flow path manual valve 22 'Individual processing gas common flow end end manual valve 24' individual interior, and all flow paths. Therefore, it takes no time to purify, and the moisture in the additional gas unit C to be added can be removed substantially completely.

While the present invention has been described in its preferred embodiments, the present invention is not intended to limit the invention, and the present invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application.

11A, 11B, 11C. . . First manual valve

13A, 13B, 13C. . . Second manual valve

14A, 14B, 14C. . . Third manual valve

15. . . Process gas common flow path

16. . . Purified gas common flow path

17. . . Process gas pneumatic valve

20. . . Purified gas manual valve

22, 24. . . Process gas common flow end end manual valve

23, 25. . . Purified gas common flow path end manual valve

22b. . . Export flow path

24a. . . Inlet flow path

24b. . . Export flow path

51. . . Inlet flow path

52. . . First connected road

54. . . Export flow path

59. . . Second connected road

373A. . . Third connected road

221b, 222b. . . Export flow path

241b, 242b. . . Export flow path

361C’. . . Second connected road

Fig. 1 is a circuit diagram showing the configuration of a gas supply assembly unit according to a first embodiment of the present invention;

Figure 2 is a plan view showing the configuration of the first embodiment;

Figure 3 is a cross-sectional view taken along line AA of Figure 2;

Figure 4 is a BB cross-sectional view of Figure 2;

Figure 5 is a cross-sectional view showing the movement of the additional gas unit fixing plate 30C in Fig. 3;

Figure 6 is a cross-sectional view showing the movement of the additional gas unit fixing plate 30C in Fig. 4;

Figure 7 is a drawing corresponding to Figure 5 of the second embodiment;

Figure 8 is a drawing corresponding to Figure 6 of the second embodiment;

Figure 9 is a circuit diagram showing an atmospheric exposed portion when the gas supply assembly unit of the present invention is used;

Figure 10 is a circuit diagram showing the configuration of a gas supply assembly unit of a third embodiment of the present invention;

Figure 11 is a plan view showing the configuration of Figure 10;

Figure 12 is a plan view showing the configuration of the third embodiment, showing the movement of the additional gas unit fixing plate 30C in Fig. 11;

Figure 13 is a plan view showing the flow path block of the lower portion of the machine of Figure 12;

Figure 14 is a cross-sectional view taken along line A-A of Figure 12;

Figure 15 is a perspective view showing the flow path block of the lower portion of the machine of Figure 14;

Figure 16 is a plan view showing the configuration of the fourth embodiment;

Figure 17 is a plan view showing the flow path block of the lower portion of the machine of Figure 16;

Figure 18 is a cross-sectional view taken along line B-B of Figure 16;

Figure 19 is a perspective view showing the flow path block of the lower portion of the machine of Figure 18;

Figure 20 is a plan view showing the configuration of Figure 9;

Figure 21 is a plan view showing the flow path block of the lower portion of the machine of Figure 20;

Figure 22 is a cross-sectional view taken along line C-C of Figure 20;

Figure 23 is a perspective view showing the flow path block of the lower portion of the machine of Figure 22;

Figure 24 is a circuit diagram showing the configuration of a conventional gas supply unit;

Figure 25 is a plan view showing a configuration of Fig. 24 as an embodiment;

Figure 26 is a circuit diagram showing a conventional post-addition gas supply unit;

Fig. 27 is a plan view showing a configuration of Fig. 26 as an embodiment.

10A, 10B. . . Process gas outlet

11A, 11B, 11C. . . First manual valve

12A, 12B, 12C. . . pressure gauge

13A, 13B, 13C. . . Second manual valve

14A, 14B, 14C. . . Third manual valve

15. . . Process gas common flow path

16. . . Purified gas common flow path

17. . . Process gas pneumatic valve

18. . . Processing gas supply port

19. . . Check valve

20. . . Purified gas manual valve

22, 24. . . Process gas common flow end end manual valve

23, 25. . . Purified gas common flow path end manual valve

Claims (4)

A gas supply assembly unit comprising: a plurality of gas units, wherein the following components are connected in an integrated manner by a flow path block: a first manual valve is disposed at an outlet flow path; and a second manual valve is disposed to communicate with the first a position of the common valve and the processing gas common flow path; and a third manual request, which is disposed at a position connecting the first manual valve and the common flow path of the purge gas, wherein the plurality of gas units include: an existing gas unit, and a transmission The method is connected to the additional gas unit of the above-mentioned existing gas unit, wherein the existing gas unit comprises: a processing gas common flow end end manual valve, communicating with an end portion of the processing gas common flow path; and purifying gas common flow a road end manual valve communicating with an end of the purge gas common flow path, wherein the additional gas unit comprises: another processing gas common flow path end manual valve, and a common flow path end with the processing gas through an additional manner The manual valve is connected; the other purge gas common flow end end manual valve, through the addition method and the above The gas flow common flow end is connected by a manual valve; the other second manual valve is connected to the machining valve common flow end manual valve through an additional manner; the first communication path is connected to the other common purge gas common flow end The outlet flow path of the manual valve and the above-mentioned additional processing gas common flow path end hand An outlet flow path of the movable valve; a second communication path connecting the inlet flow path of the manual valve at the end of the common processing gas common flow path; and an outlet flow path of the manual valve at the end of the processing gas common flow path; and the third communication path And an inlet flow path that communicates with the machining valve common end end manual valve and the other second manual valve inlet flow path. The gas supply assembly unit according to claim 1, wherein two branch outlet flow paths are formed inside the end of the processing gas common flow path end, and the additional processing of the additional gas unit is performed. The inside of the manual valve at the end of the gas common flow path forms two branch outlet flow paths. The gas supply assembly unit according to claim 2, wherein the first communication path is an outlet flow path of the manual valve at the end of the additional purge gas common flow path and the end of the additional processing gas common flow path The two outlets of the manual valve are connected to each other; the second communication path is an inlet flow path of the manual valve at the end of the additional processing gas common flow path and the end of the processing gas common flow path One of the two branch outlet flow paths of the valve is in communication; the third communication path is the other of the two branch outlet flow paths of the machining gas common flow path end manual valve and the other The inlet flow path of the two manual valves is connected. The gas supply assembly unit of claim 1, wherein the third communication path is an outlet flow path manually asked by the end of the processing gas common flow path and an inlet flow of the additional second manual valve road The connected mode is formed in the U-shaped flow path of the flow path block, and the U-shaped flow path is connected to the second communication path.