TWI471525B - Microscopic geometry measuring system - Google Patents

Description

Microscopic geometry measurement system

The present invention relates to a microscopic geometry system and, in particular, to a differential micro-geometry measurement system employing two probes.

Referring to FIG. 1, the architecture of the prior art micro-geometry measurement system 1 is schematically illustrated in FIG. The microscopic geometry measurement system 1 is used to measure the microscopic geometry of the test piece 2.

The microscopic geometry measurement system 1 includes a susceptor 10, a lifting platform 11, a scanning traverse table 12, a scanning device 13, a flat substrate 15, a displacement sensing device 16, and an actuation device 18.

The flat substrate 15 is fixed to the susceptor 10. The test piece 2 is placed on the scanning traverse station 12. The scanning traverse station 12 is placed on the scanning traverse station 12. The structure of the scanning traverse table 12 is such that it can move with low friction on the flat substrate 15. As a condition of the flat substrate 15, the surface thereof must be polished to a relatively flat flatness, so that the flat substrate 15 is expensive to manufacture. The larger the area of the flat substrate 15, the more expensive it is to manufacture.

The lifting platform 11 is detachably connected to the base 10. The scanning device 13 includes a pivotable arm 132 and a probe 134. The pivotable arm 132 is pivotally coupled to the lifting platform 11. For example, as shown in FIG. 1, the pivotable arm 132 is coupled to the lift table 11 with a frictionless or low friction hinge 112 (eg, a jewel bearing, wire cut elastomer, etc.). As shown in FIG. 1, the probe 134 is coupled to the head end of the pivotable arm 132. The probe 134 contacts the measuring surface 20 of the test piece 2 by adjusting the height of the lifting table 11.

Actuating device 18 is secured to base 10 and operatively coupled to scanning traverse station 12. The actuator 18 shown in FIG. 1 is coupled to the scanning traverse station 12 by a transmission mechanism 182. The actuating device 18 actuates the scanning traverse table 12 and the test strip 2 disposed on the scanning traverse station 12, thereby moving the probe 134 over the measurement surface 20 of the test strip 2. In fact, the scanning device 13 is not actuated. In practical applications, the actuation device 18 can be a high resolution motor. Transmission mechanism 182 can be a flexible piano wire.

The displacement sensing device 16 is fixed to the lifting table 11. The displacement sensing device 16 is used to sense the displacement of the pivotable arm 132. Generally, the displacement sensing device 16 senses the displacement of the trailing end of the pivotable arm 132, as shown in FIG. The microscopic geometry of the measurement surface 20 of the test strip 2 is resolved by sensing the displacement of the pivotable arm 132.

During the scanning process, the displacement signal sensed by the displacement sensing device 1 is actually a mixture of the signal for measuring the surface topography of the surface 20 and the signal addition for the laterally moving substrate. Since the surface of the flat substrate 15 is very smooth, the signal about the laterally moving substrate is very smooth and can be ignored. Therefore, the displacement signal sensed by the displacement sensing device 1 can be regarded as a signal regarding the surface topography of the measurement surface 20.

However, using the micro-geometry measurement system 1 of the prior art to measure the large-sized test piece 2, for example, a large-sized wafer, a touch panel, a display panel, a solar panel, etc., it is necessary to adopt a flat substrate of a larger size. . As shown in Fig. 1, the size of the scanning traverse table 12 needs to be larger than the size of the test piece 2, and the size of the flat substrate 15 is such that the scanning traverse table 12 moves thereon. The large-sized flat substrate 15 is relatively expensive to manufacture. However, the microscopic geometry of a typical test piece is only about 1 cm ^{2 in} relation to the measurement. Under cost considerations, the optimal size of a flat substrate is naturally greater than about 1 cm ² . This ideal is not possible with the architecture of the prior art micro-geometry measurement system 1.

Obviously, the current microscopic geometry measurement system has not been seen An architectural design that measures different size test pieces without the need to change the flat substrate is proposed.

Therefore, the technical problem to be solved by the present invention is to provide a microscopic geometric shape measurement system, in particular, a differential microscopic geometric shape measurement system using two probes. Thereby, the micro-geometry measurement system of the present invention can measure different size test pieces without changing the flat substrate.

The microscopic geometry measurement system of the first preferred embodiment of the present invention is for measuring the microscopic geometry of the test piece. The microscopic geometry measurement system of the first preferred embodiment of the present invention includes a first scanning device, a second scanning device, a flat substrate, a first displacement sensing device, a second displacement sensing device, and a processing unit. The first scanning device includes a first pivotable arm and a first probe. The first probe is coupled to the first pivotable arm and contacts the measurement surface of the test strip. The first scanning device is actuated to cause the first probe to move over the measurement surface. The second scanning device includes a second pivotable arm and a second probe. The second probe is coupled to the second pivotable arm. The second probe contacts the flat surface of the flat substrate. The second pivotable arm is operatively coupled to the first pivotable arm such that the second scanning device is synchronized with the first scanning device to move the second probe over the flat surface. The first displacement sensing device is configured to sense a first displacement of the first pivotable arm to output the first signal. The second displacement sensing device is configured to sense a second displacement of the second pivotable arm to output a second signal. The processing unit is electrically connected to the first displacement sensing device and the second displacement sensing device, respectively. The processing unit calculates the microscopic geometry of the test piece according to the first signal and the second signal.

A microscopic geometrical appearance measuring system according to a second preferred embodiment of the present invention is for measuring the microscopic geometry of the test piece. A microscopic geometrical appearance measuring system according to a second preferred embodiment of the present invention includes a first scanning device, a second scanning device, a flat substrate, a first displacement sensing device, and a second displacement sense Measuring device and processing unit. The first scanning device includes a first pivotable arm and a first probe. The first probe is coupled to the first pivotable arm and contacts the measurement surface of the test strip. The first scanning device is actuated to cause the first probe to move over the measurement surface. The second scanning device includes a second pivotable arm and a second probe. The second probe is coupled to the second pivotable arm. The second probe contacts the flat surface of the flat substrate. The flat substrate is operatively coupled to the first pivotable arm such that the flat substrate is synchronously actuated with the first scanning device to move the second probe over the flat surface. The first displacement sensing device is configured to sense a first displacement of the first pivotable arm to output the first signal. The second displacement sensing device is configured to sense a second displacement of the second pivotable arm to output a second signal. The processing unit is electrically connected to the first displacement sensing device and the second displacement sensing device, respectively. The processing unit calculates a microscopic geometric shape of the test piece according to the first signal and the second signal.

Compared with the prior art, the micro-geometry measurement system of the present invention adopts a differential measurement method of two probes, whereby the test pieces of different sizes can be measured, and the flat substrate is not required to be changed.

The advantages and spirit of the present invention will be further understood from the following detailed description of the invention.

1‧‧‧Microscopic Geometry Measurement System

10‧‧‧ Pedestal

11‧‧‧ Lifting platform

112‧‧‧No friction or low friction hinge

12‧‧‧Scanning traverse station

13‧‧‧Scanning device

132‧‧‧ pivotable arm

134‧‧‧ probe

15‧‧‧flat substrate

16‧‧‧Displacement sensing device

18‧‧‧Acoustic device

182‧‧‧Transmission mechanism

2‧‧‧ test strips

20‧‧‧Measurement surface

3‧‧‧Microscopic Geometry Measurement System

30‧‧‧Base

302‧‧‧ stage

31‧‧‧ Lifting table

312‧‧‧Adjustable seating

32‧‧‧Scanning traverse station

322‧‧‧No friction or low friction hinge

324‧‧‧No friction or low friction hinges

33‧‧‧First scanning device

332‧‧‧First pivotable arm

334‧‧‧First probe

34‧‧‧Second scanning device

342‧‧‧Second pivotable arm

344‧‧‧Second probe

35‧‧‧flat substrate

350‧‧‧ flat surface

36‧‧‧First displacement sensing device

37‧‧‧Second displacement sensing device

38‧‧‧Actuating device

382‧‧‧Transmission mechanism

392‧‧‧Slide rails

394‧‧‧ Slider

4‧‧‧ test strips

40‧‧‧Measurement surface

5‧‧‧Microscopic Geometry Measurement System

50‧‧‧ pedestal

502‧‧‧ stage

51‧‧‧ lifting platform

514‧‧‧No friction or low friction hinge

52‧‧‧Scanning traverse station

522‧‧‧No friction or low friction hinge

526‧‧‧Adjustable seating

53‧‧‧First scanning device

532‧‧‧First pivotable arm

534‧‧‧First probe

54‧‧‧Second scanning device

542‧‧‧Second pivotable arm

544‧‧‧Second probe

55‧‧‧flat substrate

550‧‧‧flat surface

56‧‧‧First displacement sensing device

57‧‧‧Second displacement sensing device

58‧‧‧Actuating device

582‧‧‧Transmission mechanism

592‧‧‧Slide rails

594‧‧‧ Slider

6‧‧‧ test strips

60‧‧‧Measurement surface

1 is a schematic diagram of the architecture of a prior art micro-geometry measurement system.

2 is a schematic diagram showing the architecture of a microscopic geometrical appearance measurement system according to a first preferred embodiment of the present invention.

3 is a schematic view showing the architecture of a microscopic geometrical appearance measuring system according to a second preferred embodiment of the present invention.

Referring to FIG. 2, the architecture of the micro-geometry measurement system 3 of the first preferred embodiment of the present invention is schematically illustrated in FIG. The microscopic geometry measurement system 3 of the present invention is used to measure the microscopic geometry of the test piece 4.

The micro-geometric measurement system 3 of the first preferred embodiment of the present invention includes a first scanning device 33, a second scanning device 34, a flat substrate 35, a first displacement sensing device 36, and a second displacement sensing device. 37 and processing unit (not shown in Figure 2). Likewise, the condition of the flat substrate 35 is such that the surface roughness must be less than a few millimeters.

The first scanning device 33 includes a first pivotable arm 332 and a first probe 334. The first probe 334 is coupled to the first pivotable arm 332 and contacts the metrology surface 40 of the test strip 4. As shown in FIG. 2, the first probe 334 is coupled to the head end of the first pivotable arm 332. The first scanning device 33 is actuated to cause the first probe 334 to move over the measurement surface 40.

The second scanning device 34 includes a second pivotable arm 342 and a second probe 344. The second probe 344 is coupled to the second pivotable arm 342. As shown in FIG. 2, the second probe 344 is coupled to the head end of the second pivotable arm 342. The second probe 344 contacts the flat surface 350 of the flat substrate 35. The second pivotable arm 342 is operatively coupled to the first pivotable arm 332, causing the second scanning device 34 to be actuated in synchronization with the first scanning device 33 to move the second probe 342 over the flat surface 350.

The first displacement sensing device 36 is configured to sense a first displacement of the first pivotable arm 332 to output a first signal. As shown in FIG. 2, the first displacement sensing device 36 senses a first displacement of the trailing end of the first pivotable arm 332. The second displacement sensing device 37 is configured to sense a second displacement of the second pivotable arm 342 to output a second signal. As shown in FIG. 2, the second displacement sensing device 37 senses a second displacement of the trailing end of the second pivotable arm 342. The processing units are electrically connected to the first displacement sensing device 36 and the second displacement sensing device 37, respectively. Processing unit based The first signal and the second signal calculate the microscopic geometry of the test strip 4. The second signal represents the laterally moving substrate measured when the second probe 342 moves in synchronism with the first probe 332. Therefore, basically, the processing unit deducts the second signal from the first signal to calculate a signal representing the microscopic geometry of the test strip 4.

In one embodiment, the first displacement sensing device 36 and the second displacement sensing device 37 may respectively be an optical displacement sensing device, a capacitive displacement sensing device, a linear variable differential transformer (LVDT), or the like. Non-contact type displacement sensing device.

Referring to FIG. 2 again, in a specific embodiment, the micro-geometric measurement system 3 of the present invention further includes a base 30, a lifting platform 31, and a scanning traverse platform 32. The test piece 4 is placed on the stage 302 and then placed on the base 30.

The lifting platform 31 is detachably connected to the base 30. In particular, unlike the prior art, the flat substrate 35 is fixed to the elevating table 31. The scanning traverse table 32 is slidably coupled to the lifting platform 31. For example, as shown in FIG. 2, the slide rail 392 is mounted on the lift table 31. A slider 394 is slidably mounted on the slide rail 392. The scanning traverse station 32 is fixed to the slider 394.

The first pivotable arm 332 and the second pivotable arm 342 are pivotally coupled to the scanning traverse station 32. For example, as shown in FIG. 2, the first pivotable arm 332 is coupled to the scanning traverse station 32 with a frictionless or low friction hinge 322 (eg, a jewel bearing, wire cut elastomer, etc.). The second pivotable arm 342 is coupled to the scanning traverse station 32 with a frictionless or low friction hinge 324 (eg, a jewel bearing, wire cut elastomer, etc.). The first displacement sensing device 36 and the second displacement sensing device 37 are fixed to the scanning traverse station 32. The first probe 334 appropriately contacts the measurement surface 40 of the test strip 4 by adjusting the height of the lift table 31.

Further, the microscopic geometry measurement system 3 of the present invention further includes an actuation device 38. Actuating device 38 is secured to lift platform 31 and is operatively coupled to scan traverse station 32. For example, as shown in Figure 2, the actuation device The 38 is coupled to the scanning traverse station 32 by a transmission mechanism 382. Actuating device 38 actuates scanning traverse table 32, first displacement sensing device 36 and second displacement sensing device 37. In practical applications, the actuation device 38 can be a high resolution motor. The transmission mechanism 382 can be a flexible piano wire, a rack and pinion, a screw, or the like.

The actuating device 38 actuates the lateral movement of the scanning traverse table 32. The amount of up and down variation between the slide rail 392 and the slider 394 can be measured by the second probe 344, that is, the laterally moving base. The processing unit subtracts the signal about the laterally moving substrate by the signal obtained by the first probe 332 to obtain a signal representing the microscopic geometric shape of the test strip 4.

Further, the micro-geometric measurement system 3 of the present invention further includes an adjustable seating 312. The adjustable seating 312 is fixed to the lifting platform 31. The flat substrate 35 is fixed to the adjustable seating seat 312. The flat substrate 35 can be adjusted in contact with the second probe 344 by the fine adjustment screw of the adjustable seating 312.

The respective component placement positions of the micro-geometry measurement system 3 of the first preferred embodiment of the present invention are not limited to those disclosed in FIG.

Referring to FIG. 3, the architecture of the micro-geometry measurement system 5 of the second preferred embodiment of the present invention is schematically illustrated in FIG. The microscopic geometry measurement system 5 of the present invention is used to measure the microscopic geometry of the test piece 6.

The micro-geometric measurement system 5 of the second preferred embodiment of the present invention includes a first scanning device 53, a second scanning device 54, a flat substrate 55, a first displacement sensing device 56, and a second displacement sensing device. 57 and processing unit (not shown in Figure 3). Likewise, the condition of the flat substrate 55 is such that its surface roughness must be less than a few millimeters.

The first scanning device 53 includes a first pivotable arm 532 and a first probe 534. The first probe 534 is coupled to the first pivotable arm 532 and contacts the measurement surface 60 of the test strip 6. As shown in Figure 3, the first probe 534 is Connected to the head end of the first pivotable arm 532. The first scanning device 53 is actuated to cause the first probe 534 to move over the metrology surface 60.

The second scanning device 54 includes a second pivotable arm 542 and a second probe 544. The second probe 544 is coupled to the second pivotable arm 542. As shown in FIG. 3, the second probe 544 is coupled to the head end of the second pivotable arm 542. The second probe 544 contacts the flat surface 550 of the flat substrate 55. Unlike the first preferred embodiment of the present invention, the flat substrate 55 is operatively coupled to the first pivotable arm 532 such that the flat substrate 55 is synchronously actuated with the first scanning device 53 for the second probe 544 Moving on the flat surface 550.

The first displacement sensing device 56 is configured to sense a first displacement of the first pivotable arm 532 to output a first signal. As shown in FIG. 3, the first displacement sensing device 56 senses a first displacement of the trailing end of the first pivotable arm 532. The second displacement sensing device 57 is configured to sense a second displacement of the second pivotable arm 542 to output a second signal. As shown in FIG. 3, the second displacement sensing device 57 senses a second displacement of the trailing end of the second pivotable arm 542. The processing units are electrically connected to the first displacement sensing device 56 and the second displacement sensing device 57, respectively. The processing unit calculates the microscopic geometry of the test strip 6 based on the first signal and the second signal. The second signal represents the laterally moving substrate as measured by the second probe 542 moving synchronously with the first probe 532. Therefore, basically, the processing unit deducts the second signal from the first signal to calculate a signal representing the microscopic geometry of the test strip 6.

In one embodiment, the first displacement sensing device 56 and the second displacement sensing device 57 may respectively be an optical displacement sensing device, a capacitive displacement sensing device, a linear variable differential transformer (LVDT), or the like. Non-contact type displacement sensing device.

Referring to FIG. 3 again, in a specific embodiment, the micro-geometric measurement system 5 of the present invention further includes a base 50, a lifting platform 51, and a scanning traverse platform 52. The test piece 6 is placed on the stage 502 and then placed on the base 50.

The lifting platform 51 is detachably connected to the base 50. The scanning traverse table 52 is slidably coupled to the lifting platform 51. For example, as shown in FIG. 3, the slide rail 592 is mounted on the lift table 51. A slider 594 is slidably mounted on the slide rail 592. The scanning traverse table 52 is fixed to the slider 594.

The first pivotable arm 532 is pivotally coupled to the scanning traverse station 52. The second pivotable arm 542 is pivotally coupled to the lift platform 51. For example, as shown in FIG. 3, the first pivotable arm 532 is coupled to the scanning traverse station 52 with a frictionless or low friction hinge 522. The second pivotable arm 542 is coupled to the lift table 51 with a frictionless or low friction hinge 514.

The first displacement sensing device 56 is fixed to the scanning traverse station 52. The second displacement sensing device 57 is fixed to the lifting platform 51. The first probe 534 appropriately contacts the measurement surface 60 of the test strip 6 by adjusting the height of the lift table 51. Unlike the first preferred embodiment of the present invention, the flat substrate 55 is fixed to the scanning traverse station 52.

Further, the microscopic geometry measurement system 5 of the present invention further includes an actuation device 58. Actuating device 58 is secured to lift platform 51 and is operatively coupled to scan traverse station 52. For example, as shown in FIG. 3, the actuator 58 is coupled to the scanning traverse station 52 by a transmission mechanism 582. Actuating device 58 actuates scanning traverse table 52, first displacement sensing device 56 and flat substrate 55. In a practical application, the actuator 58 can be a high resolution motor. The transmission mechanism 582 can be a flexible piano wire, a rack and pinion, a screw, or the like.

The actuating device 58 actuates the lateral movement of the scanning traverse table 52. The amount of up and down variation between the slide rail 592 and the slider 594 can be measured by the second probe 544, that is, the laterally moving base. The processing unit subtracts the signal about the laterally moving substrate by the signal obtained by the first probe 532 to obtain a signal representing the microscopic geometric shape of the test strip 6.

Further, the microscopic geometry measurement system 5 of the present invention further includes an adjustable mount 526. The adjustable seating 526 is on the scanning traverse station 52. The flat substrate 55 is fixed to the adjustable mount 526. The flat substrate 55 can be adjusted in contact with the second probe 544 by the fine adjustment screw of the adjustable seating 526.

The respective component placement positions of the micro-geometry measurement system 5 of the second preferred embodiment of the present invention are not limited to those disclosed in FIG.

From the above detailed description of the present invention, it can be clearly understood that the micro-geometry measurement system of the present invention uses a two-probe differential measurement method to subtract the signal about the laterally moving substrate, thereby obtaining the true micro geometry of the test piece. . Moreover, by this, the micro-geometry measurement system of the present invention can measure different size test pieces without changing the flat substrate.

The features and spirit of the present invention are intended to be more apparent from the detailed description of the preferred embodiments. On the contrary, the intention is to cover various modifications and equivalents that are within the scope of the invention as claimed. Therefore, the scope of the patent application of the present invention should be construed broadly in the light of the above description, so that it covers all possible changes and arrangements.

3‧‧‧Microscopic Geometry Measurement System

30‧‧‧Base

302‧‧‧ stage

31‧‧‧ Lifting table

312‧‧‧Adjustable seating

32‧‧‧Scanning traverse station

322‧‧‧No friction or low friction hinge

324‧‧‧No friction or low friction hinges

33‧‧‧First scanning device

332‧‧‧First pivotable arm

334‧‧‧First probe

34‧‧‧Second scanning device

342‧‧‧Second pivotable arm

344‧‧‧Second probe

35‧‧‧flat substrate

350‧‧‧ flat surface

36‧‧‧First displacement sensing device

37‧‧‧Second displacement sensing device

38‧‧‧Actuating device

382‧‧‧Transmission mechanism

392‧‧‧Slide rails

394‧‧‧ Slider

4‧‧‧ test strips

40‧‧‧Measurement surface

Claims (10)

A micro-geometric measurement system for measuring a micro-geometry of a test piece, the micro-geometry measurement system comprising: a first scanning device comprising a first pivotable arm and a first a probe coupled to the first pivotable arm and contacting a measurement surface of the test strip, wherein the first scanning device is actuated such that the first probe is in the measurement Moving on the surface; a second scanning device comprising a second pivotable arm and a second probe connected to the second pivotable arm; a flat substrate, the second probe Contacting a flat surface of the flat substrate, wherein the second pivotable arm is operatively coupled to the first pivotable arm, causing the second scanning device to be actuated in synchronization with the first scanning device, The second probe moves on the flat surface; a first displacement sensing device is configured to sense a first displacement of the first pivotable arm to output a first signal; and a second displacement sensing device Sensing a second displacement of the second pivotable arm to output a second signal; A processing unit electrically connected to the first displacement sensing means and second displacement sensing means, calculates the microscopic geometries of the test strip according to the first signal and the second signal. The micro-geometric measurement system of claim 1, further comprising: a base disposed on the base; and a lifting platform connected to the base in a liftable manner, the flat substrate Fastened to the lifting platform; a scanning traverse station slidably coupled to the lifting platform, the first pivotable arm and the second pivotable arm pivotally coupled to the scanning traverse station, the first displacement sensing The device and the second displacement sensing device are attached to the scanning traverse. The microscopic geometric shape measuring system of claim 2, further comprising: an actuating device fixed to the lifting platform and operatively connected to the scanning traverse station to actuate the scanning traverse station, The first displacement sensing device and the second displacement sensing device. The microscopic geometrical shape measuring system of claim 3, wherein the first displacement sensing device and the second displacement sensing device are respectively an optical displacement sensing device, a capacitive displacement sensing device or a line Variable differential transformer. The micro-geometric measurement system of claim 4, further comprising: an adjustable seating base fixed to the lifting platform, the flat substrate being fixed on the adjustable mounting seat. A micro-geometric measurement system for measuring a test piece, the micro-geometric measurement system comprising: a first scanning device comprising a first pivotable arm and a first probe, the first a probe system coupled to the first pivotable arm and contacting a measurement surface of the test strip, wherein the first scanning device is actuated to cause the first probe to move over the measurement surface; a second scanning device comprising a second pivotable arm and a second probe, the second probe is connected to the second pivotable arm; a flat substrate, the second probe contacting a flat surface of the flat substrate, the flat substrate being operatively coupled to the first pivotable arm, such that the flat substrate is synchronously actuated with the first scanning device, Moving the second probe on the flat surface; a first displacement sensing device for sensing a first displacement of the first pivotable arm to output a first signal; a second sense of displacement Measuring device for sensing a second displacement of the second pivotable arm to output a second signal; and a processing unit electrically connected to the first displacement sensing device and the second displacement sensing The device calculates a microscopic geometric shape of the test piece according to the first signal and the second signal. The micro-geometry measurement system of claim 6, further comprising: a base disposed on the base; a lifting platform coupled to the base, the second a pivotable arming system pivotally coupled to the lifting platform, the second displacement sensing device secured to the lifting platform; and a scanning traverse station slidably coupled to the lifting platform, the first A pivotable arm is pivotally coupled to the scanning traverse station, the first displacement sensing device being secured to the scanning traverse table with the flat substrate. The micro-geometry measurement system of claim 7, further comprising: an actuating device fixed to the lifting platform and operatively coupled to the scanning traverse station to actuate the scanning traverse station, The first displacement sensing device and the flat substrate. The micro-geometric measurement system according to claim 8, wherein the first bit The shift sensing device and the second displacement sensing device are respectively an optical displacement sensing device, a capacitive displacement sensing device or a linear variable differential transformer. The micro-geometric measurement system of claim 9, further comprising: an adjustable mounting seat fixed to the scanning traverse, the flat substrate being fixed on the adjustable mounting seat.