TWI308218B - - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrical inspection apparatus having an electrical connection mechanism for connecting a power supply circuit and a display panel in order to perform electrical inspection of a display panel such as a liquid crystal display panel. . [Prior Art] As one of the inspection devices of the display panel of the liquid crystal display panel, there is a device which is provided with a plurality of probe units (contacts) for inspecting the inspection table for arranging the inspection display panel. Unit) (Patent Document 丨). The plurality of probe units ' supply the electric power from the energizing circuit to the display panel by contacting the probes with the corresponding electrodes of the display panel on the panel frame of the inspection stage at the time of inspection. Further, when the display panel is placed on the panel frame and the display panel is removed from the panel frame before inspection, each of the probe units is retracted from the arrangement area of the display panel. Therefore, many of the probe units do not interfere with the arrangement and removal of the display panel, and the display panel can be processed smoothly. However, since each probe unit must have a driving device for each probe, and in order to make all the probe units operate in unison, the actuation of the driving device must be synchronized, resulting in a complicated configuration. [Patent Document 〖] JP-A-2002-350485. SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide an electrical inspection apparatus for a display panel capable of simultaneously operating a plurality of probe units with a relatively simple configuration. The inspection apparatus of the present invention is characterized in that it is composed of a rectangular frame body, and the frame of the moment 6 and 1308218 has four side portions for receiving the table; The moving piece, the elongated moving piece disposed on the edge of the display panel, is moved by the branch to the side of at least one side of the panel frame; the width direction of the driving device is advanced at the edge of the corresponding panel ^ . . . is used to move between the position of the month j that corresponds to the display of the i, the first moving piece that leaves the movement, the second inscription, and the position, and is held in the respective positions. Following the first moving piece

The long side of the second moving piece is a multi-moving piece; a plurality of probe units are held at a distance from each other in the far direction, and have a corresponding moving piece set corresponding to the electrode, the first movement) ί Θ i 1 ten And the motion conversion mechanism is configured to: when the first moving piece and the second moving piece n ^ are moved between the moving position and the forward position, the system == is: the position of the detecting position of the second moving piece is retracted, And the electrode that is held in the panel area after being maintained at m ^ m ^ ;; fe#!· the corresponding position of the motion conversion of the electrode moves integrally with the moving piece, and in order to move the two pieces and the first movement in the movement The probe unit is moved up and down at the corresponding position, and the second moving device is moved in a direction perpendicular to the moving direction of the first moving piece to the second electrical inspection device. The motion conversion: the structure and the moving piece are in the retracted position and the advancement position of the advancement field, and are held in the second movement:=: the probe corresponding to the electrode in the panel area is π early π Between the points, the movement of the second moving piece and the ith: position is converted into the movement switching point and the advancement position f, and in order to move up and down in the corresponding position, the 3 吏 probe unit is in front of the fans. The second moving piece moves in a direction perpendicular to the moving direction of the first i-th moving 7 1308218 piece. In the above-described electrical inspection apparatus according to the present invention, the second moving piece is moved between the retracted position and the motion switching point by the motion = the plurality of the two pieces: the changing mechanism moves the first and the sheet-body. On the other hand, at the time, the movement between the system and the first, forward position is at the motion transition point.

2 Each of the probe pieces of the moving piece is moved up and down in order to be held. The needle moves early in the direction of the electrode and away from it. Therefore, according to the present invention, the movement can be actuated by the driving device, thereby not relying on each probe: 1 moving the sheet to hold the plurality of probes of the moving piece Cui: = device, that can move to not hinder the lifting and lowering of the panel operation, or the arrowhead wilderness, the retracted position outside the area. When the first moving piece of Tian•逑 moves between the above-mentioned retreat positions, the second Chiang dynasty 〃 别 别 别 别 别 别 别 别 别 别 别 别 别 别 别 别 别 别 运动 运动 运动 运动 运动 运动 运动 运动 运动 运动 运动 运动 运动 运动 运动 运动 运动 运动 运动 运动 运动With this, you can make the aforementioned

Above the liquid crystal panel, between the two positions parallel to the liquid crystal panel and the corresponding position. Another + 哲 (4) in the retreat motion transition point i 2, although the first moving piece moves in the above-mentioned = edge: the horizontal path at a right angle to the vertical path. According to this, the needle can be used to lower the contact or the contact corresponding to the contact at the corresponding position in the panel area. By using the probe, it is possible to reliably prevent the probe tip of the probe unit from rubbing the electrode, and it is only possible to prevent the probe tip from damaging the electrode. The plurality of probe units can be held in such a manner as to be along the longitudinal direction of the second moving piece 8 1308218. = The position mechanism is removable at the desired position: various display panels with different electrode positions. In addition to the motion conversion mechanism, the following dynamic conversion mechanism can be used, which is: parallel to each other. In other words, the 1st and 2nd t^4 bevels are formed on the surfaces of the first and second moving pieces facing each other, and the first and second moving p^ The magazines are placed along the inclined surface of each other along the aforementioned inclined surface of the inclined surface, and the first moving piece is moved toward the first moving piece from the inch π 'and the brake' to the second 2 @ @ κ m When the switching point is used, the elastic force of the elastic mechanism is resisted to move forward, and the surface is slid. Thus, the second moving piece can be compared with the tilting motion conversion mechanism. The moving piece is guided downwards. By means of the aforementioned unit synchronous action, the pre-purity constitutes a solid reading of each side of the rectangular frame of the plurality of probes, and the rectangular base of the rectangular opening is moved along the corresponding rectangular opening of the base member. And can move closer to the corresponding. h A direction of the opening side of the material and the direction away from it = The size of the two-shaped opening can be changed, so it can correspond to different sizes of display panels. The rectangular base member may be provided with: a pair of track members, wherein the rectangular base member has the rectangular opening σ disposed opposite to each other, and a pair of moving base members, The position of the fW on the track member at right angles to the track member moves on the track. One of the side portions of the rectangular frame may be disposed on the moving member 9 308 218 member along the corresponding moving member, and can be moved toward the longitudinal direction thereof. Moreover, the end of the other side of the other side of the rectangular frame is coupled to the lower side of the knife adjacent to the one end, and the eight sides of the Xiang; Part can go to the long side. Move and prevent the side portion from moving in the width direction, and respectively: "the side portion of the side portion adjacent to the side portion is respectively connected = the adjacent side portion of the adjacent side so that the side portion can be long The edge ^ moves and prevents the edge portion from moving in the width direction.

Using a pair of moving base members erected on the pair of track members and arranging the rectangular frame on the pair of moving bases, thereby avoiding the shaking of the rectangular frame 'to keep the rectangular frame capable of The steady state moves on the rectangular base member and the rigidity of the rectangular frame can be increased. By adopting the combination structure as described above in the rectangular frame body, it is possible to prevent independent movement of the respective side portions, and to move the side portions while maintaining the straight-line relationship of the adjacent side portions, so that when the corresponding display is formed When the rectangular opening of the size of the panel is used to manually move the side portions, the operation can be easily performed. In order to manually operate the respective side portions, a fixing mechanism can be respectively disposed between each of the moving bases and the rectangular base member, and between the moving bases and the one side portion of the moving base, in order to be movable The base and the one side portion are moved, and these are respectively detachably fixed to the rectangular base member and the moving base. By releasing the fixing mechanism', the operation of each side portion can be performed to form a rectangular opening of a desired size. Then, by the fixing action of the fixing mechanism, the rectangular frame caused by the fretting of each side portion can be surely prevented. The movement or deformation of the body. 10 1308218 A fixing machine for the moving base is provided on the aforementioned rectangular base member. The bee-flying screw is supported as a rotatable screw R rail member and configured to be rotated by a (four) cup member, and a ❹ (2) screw member fixedly mounted to the moving base and fixed by a fixed-edge member . A screw mechanism for the aforementioned I-knife, and similarly, a screw member disposed on the moving base along the aforementioned side portion and injured, and screwed to the screw member == rotatable the movable base The nut member; and the fixing device: the square (4) is in a manner to prevent the rotation of the screw member. The ball screw of each fixing mechanism that can be released can smoothly adjust the rectangular opening specified by the rectangular frame by appropriately applying the appropriate sliding resistance when the base and the side portion of the fixing device are removed. According to the present invention, it is possible to provide an inspection apparatus for a display panel. Since the movement of the i-th moving piece can be actuated by the driving device as described above, The probe unit is provided with a driving device, that is, the plurality of probe units held by the second movable piece can be raised and lowered together, or moved to a retracted position outside the panel operation area of the frame. Knowing the early pure composition to synchronize the multiple probe units. [Embodiment] The electrical inspection device 1 of the invention of the second embodiment, as shown in Fig. 1, is an electrical test 11 for a lighting inspection of a display panel such as a liquid panel 12, and the panel 12 has a rectangular shape, although Although not shown, a plurality of electrode groups spaced apart from each other are formed along each side of one side thereof. The inspection device 10' has a flat rectangular base member 16 disposed on the stage 14 at a distance from the stage, as shown in Fig. 2 of Fig. 1, and spaced apart from each other on the base member. One of the pair of movable base members 18 is disposed on the movable base member, and is formed on the movable base member to constitute a rectangular frame 2 that receives the panel frame of the liquid crystal panel 12, and a plurality of the probe units 22 provided in the frame. As shown in FIG. 2, the rectangular base member 16' defines a rectangular opening portion a6a, and a backlight device 24' is disposed on a region corresponding to the rectangular opening portion i6a on the carrier 14, which is configured to be disposed in a rectangular frame. Lighting test of the liquid crystal panel 12 on the body 2 (). In the panel 12, the edge portion is placed on the inner edge of the rectangular frame u and the rim with the electrode facing upward, whereby the backlight 41 can be received from the back surface. Connected to the aforementioned electrode in this preserved state

The Z-needle unit 22 supplies electric power for inspection to the liquid crystal panel 12. The 14' can be moved in the same manner as the conventional one, and can be moved on the X-axis of the stage, * and the two axes perpendicular thereto, and can be rotated around the Z-axis at an angle. On the rectangular base member 16, as shown in FIG. 3 and FIG. 4, which are not rectangular frame structures, one of the rectangular door members of the rectangular base member 16 in the γ-axis direction is open to the 26-way M.一对16a is set on a pair of longitudinal sides. One of the portions 16a is formed of a pair of long plate members, and is disposed along the weight/channel % below the rectangular opening. A sliding member movable on the corresponding rail 12 1308218 26 is fixed in the vicinity of the two ends 鳊P of the base member of the (4) base 18®: the seat member 18 can maintain the same == two:: γ: There are 7::1 moving base members for the moving track: moving: moving each solid: the fixing mechanism for the moving base member 18. The port mechanism is 3 〇, and is provided. The bearing 32 is used to support the warp and the shaft direction, and the two parts 34 and the male screw body which can be rotated on the base member 16 by the disc member are used in each of the male screw members. And the nut member 36 fixed to the opposite side of the movable base structure; and, for example, the == shifting device 40, is assembled with one end of the solid 34. The male screw member device I projecting from the snail member 34 is supported by the rectangular base member 16 i, and the male y = 4 is locked to be released. Compared with the member 3q, the locking is used to: the rotation of the member 'and the unlocking to allow the male screw structure: the screw 2: the nut member %, assembled in a conventional manner to be used with the △ screw # component 34 smoothly sway the ball (not shown). When the fixing mechanism 30 is released, the operating force in the γ pumping direction is applied to the moving base member 18_, and the corresponding nut member is screwed to the male screw member 34 to smoothly rotate. Accordingly, the pair of moving base members 18, i.e., with the rotation of the male screw member 34, smoothly slide on the rail 26 with appropriate friction within a predetermined range of movement of the pair of bearings 32. Therefore, the fine adjustment of the pair of moving base members 18 can be easily performed by using the ball screw 38. After this fine adjustment, when the rotation of the male screw 34 is blocked by the locking of the respective fixing devices 40, the pair of moving bottoms 13 J308218 seat members 18' are indeed fixed within the movement range specified by the pair of bearings 32. The desired position where the rotation is blocked. The rectangular frame body 2 held by the pair of moving base members 18 has a pair of long side boring blades 20a, 20b' disposed in the X-axis direction on the moving base member 18, and a length arranged along the Y-axis direction. A pair of longitudinal side portions 20c, 20d. On the lower side of each of the edge detecting portions 20a, 20b, as shown in Fig. 2, a roadway 44 supported by a guide portion 42 fixed to a pair of moving base members 18 is provided. By the fitting of the guiding portion 42 and the rail 44, the moving base member 18 and the corresponding lateral side portion are added, and the bird can be placed at a right angle to the obstructive passage 44 on the rectangular base member 16. The axis direction moves integrally. Further, by the guiding action of the track 44, the horizontal side portion can be moved to the longitudinal direction of the corresponding moving base member 18, that is, in the X-axis direction. Into the longitudinal section of the material, under the top, there are rails 46 (refer to Figs. 2 and 4) which are elongated in the longitudinal direction of the longitudinal portion, and a rail 46' of the longitudinal portion - 20c is as follows The guide portion of the middle portion of the longitudinal portion is not supported by a guide portion 48 formed at a lateral side portion 2a-end so that the lateral side portion can slide in the width direction. Further, on each of the lateral side portions, a rail 50 extending in the longitudinal direction of the lateral side portion is provided on the lower surface of the lateral side portion, and

The track 50 is shown as a notch in the middle portion of the knurling portion 7 in the middle portion of the knuckle portion 7b in Fig. 4, and is formed by a guide bow formed at one end of the longitudinal portion to slide the longitudinal portion in the width direction. Therefore, the one end of the side boring blade 2〇a is configured to prevent the relative movement of a longitudinal side portion 14.1308218 by 20c in the width direction (that is, the χ axis direction), and the longitudinal side portion to the long side direction (γ _ direction). The relative movement 2 allows the one longitudinal side portion 2Ge. Moreover, this - the longitudinal side portion 2 () ^ is combined with the other lateral side portion of the bird in the width direction (γ axis direction) against you::: the lateral side portion to the long side ... direction) =, The formula is combined with the other side portion 2〇b. The moving side is similarly the same as the 'other _ horizontal side part of the survey-end, the family---partial wide and one longitudinal side part 2〇c the same combined structure,:: - the longitudinal side part 20d in the width direction (x-axis direction The relative movement of the longitudinal side allows the longitudinal side portion to be in the direction of the long side, and the knot is in the other longitudinal side portion 20d. Further, the other longitudinal side portion 2 =: the mode side portion 2 ° a and the other - the lateral side portion _ the same: to prevent a lateral side portion 2 〇 a from moving in the width direction (the γ axis is moved, and the lateral side is allowed Part of the way to the long side ° relative movement is combined with a lateral side part 2〇a car by the direction of the side 2 points 2 ° 'bird, 2. 〇The other end, which is beyond the abutting edge #The knife protrudes outward in the width direction of the side portion. - for the lateral side portion 2Ga, 鸠, the system can correspond to the corresponding - shift: to I:; the body moves in the Y-axis direction, and can move in the X-axis direction of the moving base member "two long sides". The sides of each side ^^ to the wide sound side / U to prevent each side part from taking 2〇d, 20b, 20a phase two movement and allowing the side parts to move in the long side direction, respectively As shown in FIG. 3 and FIG. 4, a pair of moving base members are provided with 15 • 1308218 fixed machines # 13〇' for restraining one pair of the pair of moving base members 18 respectively. The lateral side portions 2〇a, 2〇w are relatively moved in the direction of the main longitudinal direction, and have the same configuration and function as the above-described fixing mechanism 30.

Therefore, in a state in which the fixing functions of the fixing mechanisms 30, 13 are released, each side portion of the rectangular frame constituting the panel frame is manually operated, and the job W can be a rectangular frame as shown in FIG. 5 (4); . The rectangular opening 54 defined by the inner edge is freely changed from the maximum size to a rectangular opening α 54, which is smaller than the largest size as shown in FIG. 5(b), and is adjusted to support the edge of the liquid crystal panel 12. After the most appropriate size, by the locking of the fixing mechanisms 4 of the fixing mechanisms 30, 130, the most appropriate rectangular opening 54 corresponding to the size of the liquid crystal panel 12 can be maintained. A pair of moving base members 18 are disposed across a pair of rails, that is, a rail member 26, and a rectangular frame is disposed on the pair of moving bases 18, thereby preventing the rectangular frame from being shaken, and the rectangular frame is prevented. 2〇 is maintained to be movable on the rectangular base member 16 in a stable state, and the rigidity of the rectangular frame 20 can be improved. By employing the combined structure as described above in the rectangular frame 20, the independent movement of the respective side portions 20a, 20b, 20c, 20d can be prevented, and the side portions 2 can be moved while maintaining the right-angle relationship of the adjacent side portions. 〇a, 2〇b, 20d, so when the side portions 2〇a, 2〇b, 2〇c, 2〇d are manually moved in order to form the rectangular opening 16a corresponding to the size of the display panel 12, it is easy to Do its operation. In addition, the manual operation of the side portions 20a, 20b, 20c, 20d is performed by the movement of the base member 18 and the rectangular member 16, and the movement of the base member 18 and the movable base member. Between the two parts, the 'fixing mechanism 30, 130' is set up in a releasable manner, and the side portions can be easily manipulated to form a rectangular opening of a desired size, and then ## The fixing mechanism fixes the movement or deformation of the rectangular frame caused by the fretting of the sides. In order to ensure that the rectangular frame body, that is, the liquid crystal panel 12' on the panel frame 2, is provided as shown in FIG. i, a locating pin 56 is provided on one lateral side portion and the other longitudinal side portion _ is provided, and the other side is laterally The portion _ and the longitudinal portion 2〇c are provided with a pusher 58 that holds the liquid crystal panel 12 in a manner that can be released in a manner that can be released. Each of the pushers 58 is provided on the lateral side bird and the vertical side portion 2〇c, respectively, but is only representatively described based on the pusher 58 provided in the longitudinal side portion shown in Figs. 6 and 7 . As shown in FIG. 7 and FIG. 8 , the pusher 5 8 is supported on the front end of the support member 6 配置 disposed along the longitudinal side portion ( 10 ) in the width direction, and the support member 6 〇 is provided on the longitudinal side portion 2 The guide member 62 of the 〇eT surface is guided to be movable in the width direction of the four longitudinal sides. The guiding member 62 is movable along the slit 66 in the holding position shown in Fig. 8 (4) and the driving position shown in Fig. 8 (b) by the piston cylinder device 64 which is not supported by the bracket 6 in the longitudinal portion 2Ge. Move between positions. The positioning mechanism constituted by the positioning pin 56 and the pusher 58 described above is used to securely hold the liquid crystal panel, and the liquid crystal panel 12 for supplying the inspection power to the panel frame 20 via the electrodes. The majority of the description probes 70 22 are held in the corresponding side portions 17 1308218 2〇a, 20b, 20c, 20d of the panel frame 20. Due to the probes on the side portions 20a, 20b, 20c, 20d The support structure of the unit 22 is the same, and therefore only the support structure of the longitudinal side portion 2〇c of the eighth embodiment of Figs. 6 and 7 is representatively illustrated. The longitudinal side portion 20c is also the side portion.

The elongated i-th moving piece 68 and the second moving piece % are disposed in the direction. As clearly shown in Fig. 7, the i-th moving piece 68 is provided with a bottom portion 68a disposed on the side portion and an upright wall erected from the edge portion of the rectangular opening w side at the bottom portion and the bottom edge 68a. The portion (10) has an L-shaped cross-sectional shape as a whole. On the side portion/sub-application, a pair of rails 72 extending in the width direction of the side portion are provided, and a corresponding guide portion 74 is provided under the bottom portion 68a of the i-th moving sheet 68. For the guide (2), the wrong guide is moved in the width direction of the 洚 冰 糸 冰 冰 刖 刖 刖 刖 。 。 。 。 。 。 。 。 。 。 。 。 The position of the first moving piece is close to the position of the side portion 2〇c, and is formed by the advancement formed in the right, +, and true rectangular openings 54) into the edge portion 2〇r々R system 76a, and the pair; ^ The bottom of the concave portion of the outer edge is defined by the abutment of the corresponding recesses formed at the bottom _. The second movable piece 70 of the stop member 78 is disposed along the inner edge of the edge portion 20c along the inner edge of the edge portion 20c, and the inner edge side of the #3 τ is parallel to the upright wall portion 68b. The ground is stretched over the ends of the second moving piece 7〇^ beyond the first moving piece 68, and is formed at each of the arm portions 70a, and the arms are extended by the ends of the rotatable wall 6 7〇a. Rotating the roller 8 turns (having a rotation axis that is perpendicular to the direction of elongation of the arm toward the outer side of 18 1308218). As shown in Fig. 9 and Fig. 10, 1 the upright wall portion of the moving piece 68: : the second moving piece 7 〇 < is formed with a coupling mechanism 82 that combines the two into a movable movement. As clearly shown in Fig. 1 , the coupling mechanism 82, The lower block body 82a is formed at the bottom of the upright wall portion _; the upper block body 82b is formed at a diagonal position of the lower block 胄 82a with the second movable piece 7 对 opposed to the bottom portion (four). The block body ^, the branch has an inclined pin 82 which is elongated by the upward block body 82b, and the tilt pin 仏, the lower part of the block 82a upwards and the inner edge of the aforementioned side portion 2〇c On the other hand, in the upper block body 82b, the hole 82d for accommodating the inclined pin 82c is formed. (4) The coupling mechanism 82 is used to combine the two moving pieces to allow the second working piece 68 and the second moving piece 70 to be oriented in the axial direction of the tilt pin. The relative movement is further configured to include a compression coil spring 84 that winds up the tilt pin 82c (the elastic compression coil spring 84 is used to force the lower block body and the upper block body 8 to separate from each other in the direction of the axis of the tilt pin 82c). As shown in Fig. 7 and Fig. 9, the mechanism 82 is provided in the vicinity of both ends in the longitudinal direction of the second and second movable pieces 70, and in the central portion. In each of the coupling mechanisms 82, the guide hole 82d is a spring of a compression coil. The force is disengaged from the inclined pin 82c, which is provided at both ends of the side portion 2Ge as shown in Figs. 7 and _ _ against the brake member %: 'each brake member 86 has the side portion 2〇 c along the second side of the arm portion 70a, the upright portion 86a, and the straight piece: the hook portion 8讣 that can be engaged with the corresponding arm portion 70a. 19 1308218

The hook portion 86b of the brake member 8 6 3» A is slidably received as shown in Fig. 10, and the upper portion of the arm portion 70a of the second moving piece 70 is moved by the block body 82b from the inclined 鍅 (10) ^ The slanting pin 82 is disengaged. Further, the second moving piece 7 is caused by the spring force of the compression coil magazine 84' to abut the arm portion 70a against the hook portion 86b.

The recovery position, 舆篦1I Xingdi 1 moving piece 68 moves along the track 72. The brake member 8 6 is a roller that is abutted against the arm portion 7A by the upright portion 86a, and the month b is moved vertically by the second guide rail together with the guide bow mechanism 88 to be described later. Naichuan

Further, as shown in Figs. 7 and 10, the i-th moving sheet (four) moves toward the sheet 7 in opposition thereto. Between the two: a pair of guiding mechanisms that are guided by the inclination of the tilting (four) 82c, each guiding mechanism 88' is provided on the first moving "8 oblique block 88a, and The inclined block faces the second inclined block 88b provided on the second movable piece 7〇. The i-th inclined block is attached to the i-th movement ": = the face of the upright wall portion 68b facing the second movable piece 70 The inclined surface 9〇 with the inclination angle of the aforementioned inclined 胄... On the inclined surface 90a, a rail 92 is provided along the extending direction of the inclined pin 82c. Further, the second inclined block 88b has an inclined surface gauge which is formed in parallel with the inclined surface 90a of the first inclined block 88a. The inclined surface 90b is provided with a guiding material that is fitted to the rail 92 and guided by the rail. When the second moving piece 7 is subjected to a force for compressing the compression coil spring between the second moving piece 7 and the first moving piece, as will be described later, the second moving piece 70 can be surely guided along the inclined pin 82c. Move. Real 20 I3〇82l8 set 96. Each of the living parts is provided with a pair of piston cylinders supported on the side portion 1: a cylinder of '6' passes through a bracket knife 20c (not shown), and the extension of the piston cylinder device 96 = 乍The door keeps moving for the second time.... Move "8, in: Near-rectangular opening 54 continued; mail eve, social / + position between the drive position and the distance from the aforementioned edge back: = move "8, the second moving piece 7 〇, set in two moves" 8,

:: "The mechanism 82, the compression coil spring 84, the guiding mechanism Μ and the structure of the living Π 96" are in the lateral side portions 2〇a, 2〇b and the respective longitudinal sides. The knives 20c and 20d are common (refer to Fig. 1) The second (four) piece % on each side portion 2Ga, 鸠, ' holds a plurality of the aforementioned probe units 22. As shown in Figure u, each probe unit 22 is coupled to the guide rod in a releasable manner 98 (fixing device (10) constituted by a clamp mechanism along the second moving piece 7 支 and the outer side of the yoke is detachably fixed to each of the second movable pieces 7 成, and each of the probes is suspended. The probe unit 22 is securely held by the guide portion 1〇4 that is engaged with the track 1〇2 (formed in the longitudinal direction of the second moving piece 7〇), and can be moved to (2) The moving piece 70<the longitudinal direction of the side portion in which the longitudinal direction is the same is surely guided. Therefore, each of the second moving pieces 7〇 provided on each of the side portions 20a, 20b, 2〇c, 2〇d The probe unit 22 is movable to a predetermined position corresponding to the arrangement of the electrodes provided in the liquid crystal panel 12 in a state where the fixing device 1 is released, and The respective probe units 22 are securely positioned at a predetermined position by the locking of each fixing device. 21 1308218 The operation of the inspection device 1 () of the present invention will be described with reference to Fig. 12. The inspection device U) of the present invention The piston-cylinder device 96 4 is placed in each side portion 2Ga, and the piston cylinder device 96 4 is contracted to maintain the contraction position. At the contraction position of each piston-cylinder device 96, the corresponding side portion (10) of the bird is disposed. The first moving piece 68 is held in the retracted position as shown in Fig. 12 (4). In this retracted position, the 'second moving piece 7 is held by the spring force of the compression coil elastic 84'. The arm portion Μ is engaged with the hook portion 86b of the μ member. By the means of y*, 馇, 4u, the second moving piece 70 can be integrated with the corresponding first moving piece 68, respectively In the width direction of the corresponding side portions 20a, 20b, 20c, and 20d, in the retracted position of the i-th moving piece 68, the roll supported at the front end of each arm portion 7〇a is as follows. & _ The upright portion 86a of the moving member 86 is held at intervals, and each probe unit 22 is held in The edge of the opening 54 and the standby position of the panel frame 2 are separated by a large distance. In this state, as described with reference to FIG. 5, the size of the panel frame 2 is adjusted to the liquid crystal panel 12 suitable for inspection. The size of the panel frame 2 is fixed to the rectangular base member 16 by the fixing mechanism 30. Next, the liquid crystal panel 12 is placed on the panel frame 20 with the electrodes facing upward, and the edge portion thereof is arranged. It is placed on the edge of the rectangular opening W of the panel frame 2. At this time, the probe units 22 in the standby position are located outside the processing area of the liquid crystal panel 12, so that the liquid crystal panel 12 is not supported by the panel. The arrangement on the frame 20 and the removal operation from the panel frame 2 are hindered. Further, when the liquid crystal panel 12 is disposed on the panel frame 2, the respective pusher 58 and the corresponding liquid crystal panel 12 can be used as described in the above-mentioned 22 1308218. The locks 56 are surely held between the locks 56 and the liquid crystal panel is held in the panel frame 2g 96, and the elongating action is performed. With this extension, the cylinder device m "follows this elongation action, the first moving piece 68 is /, The movement of the moving piece 70 toward the forward position is the same as that of the movement. As shown in Fig. 12(a), the movement of the movement piece 70 corresponds to the face of the panel frame 2 Each side portion 2〇a, 2〇, 2〇c, 2〇d diameter. The horizontal path of the first moving piece 68 and the second moving piece 7° in the width direction move along the horizontal path as shown in Fig. 12 ( b) The erect 86 86 of the thousand, 〆, 奋 2 & 卞峪仫 86. The "field" 80 abuts against the brake member action, the ith movement V, with the subsequent extension of the piston cylinder device 96. However, the second moving piece is then abutted along the horizontal path to the forward position to prevent the *first, the scorpion 8 〇 and the upright part ... /, the brother 1 moving piece 68 one body moves. When the sub- 8 抵 is in contact with the erecting portion, it is supported by the second moving Κ 7 λ port, and the moving portion 70 is disposed in the arrangement area of each of the probe units 22, and the skew is left... 丨On the liquid helium panel 12, the probe 22a of the probe soap 22, directly above the corresponding electrode (3) of the panel 12. When the liquid crystal surface is again blocked by the brake member %, the piston cylinder is inspected for a second. The top of the moving piece 70 is given from the eight devices 96 to the previous force - Qiu Bajieshan combined with the mechanism 82 of the base of the Q1 〇 P knife, by the cardlet and the guide hole 82d card guide The tilting & Q card of the guiding mechanism 88, and the engagement of the forming, the switching of the second, the track 92 and the guiding portion 94 'the contraction force of the coil spring 84. The result, the volume Chu, the field of the first moving piece 68, when the brake member 86 and the roller 23 1308218 are advanced: when the movement transition point is advanced, the straight piece 2 of the first moving piece 68 is moved down, and the piece 70 is moved at a right angle to the horizontal path. The movement of the probe unit 22 and the J-body of the second moving piece 70 is reduced to 2aT. By the lowering, in the other position of the second detection 68) 68, such as ® 12(C) shows that each probe unit 22a is connected to the corresponding electrode 12a of the liquid crystal panel 12. The aforementioned movement of the ^2 moves along the vertical path, due to Roller Element 22: Shang upright portion 86 of the shirt is rotated, and therefore the probe can be smoothly performed along a single vertical lifting path of point 2 of. Further, when the electrical inspection accompanying the power supply from the probe unit 22 is completed, the piston steam inlet face 12 is contracted by the piston cylinder device 96: 9 from ifr, at, _ W % field first moving piece 68 Move ^ When moving to the retracted position, the 移动2 moving piece 7G moves with the elastic force of the compression coil spring 84 to the upper needle unit 22 gp + ” force ,, so the finder 2 is along the vertical path. When the upper portion of the corresponding electrode is moved by the second movement, the fishing portion of the brake member 86 causes the movement of the arm portion 7〇a to be blocked, so that the second movement is moved. The sheet 7 〇 the upper sheet 68 is moved toward the movement beyond the movement 卩, and the #1 first moving piece 68 is retracted integrally, and the movement of the retracting position is the same as the first one for limiting the coupling mechanism 82 provided at the second position. Guide mechanism 88: second moving piece 7. The moving member 86 of the roller 80 and the brake member moving piece 7 is moved horizontally according to the movement of the second moving piece 70 along the horizontal 24 1308218 and by the piston-cylinder device 96. The body is converted to move along its vertical path, thus forming a motion conversion mechanism.

In the electrical inspection device 10 of each of the above, as described above, since the piston red device 96 that is actuated by the moving piece 68 can be actuated, a plurality of pieces of the moving piece 7 are further moved. The probe unit 22 is actuated, and therefore, each of the needle units 22 is provided with a driving device for actuating. Therefore, since the number of driving devices for operating the probe unit 22 can be reduced, the configuration of the inspection device 10 can be simplified. Moreover, since a plurality of probe units 22 provided by the respective side portions 2〇a, 2〇b, 2〇c, 2〇d of the panel frame 20 are integrally operated, it is not required to be used for each side portion. Since 20a, 2〇b, 2〇c, and 2〇d have a plurality of other probe units 同步 synchronized with each other, the configuration can be further simplified. The present invention is not limited to the above embodiments, and various changes can be made without departing from the gist of the invention. For example, the panel frame 20 can be made into a fixed frame. Further, as the motion converting mechanism, various motion converting mechanisms can be employed instead of the aforementioned motion converting mechanism. Further, the display panel to be inspected is an example of a liquid crystal panel, but the inspection apparatus of the present invention may be used for inspection of various display panels such as an organic EL panel and a plasma display panel instead of the liquid crystal panel. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view of an inspection apparatus of the present invention. 25 .1308218 Fig. /0 The line π — I shown in Figure 1 [the resulting cross-section. 3 is a plan view of the rectangular frame shown in FIG. 1. A perspective view showing a relationship of a portion s of a side portion constituting a rectangular frame body is cut off. Fig. 5', _ shows the panel frame of the rectangular frame < change the size, (4) shows the top view of the panel frame set to ·i σ 1 and the maximum size, and (8) shows the setting 、, ,, A top view of a panel frame that is smaller than its size.

Fig. 6' is an enlarged plan view showing the motion conversion of the present invention shown by w i . Fig. 7 is a perspective view showing the motion converting mechanism of the present invention partially exploded from the side of the rectangular frame. Fig. 8' shows a state in which the pusher is actuated, (a) shows a cross-sectional view of the pusher in the holding position of the liquid crystal surface: (b) shows a cross-sectional view of the pusher located at the liberation position of the liquid crystal panel. Fig. 9 is a perspective view showing a portion of the motion converting mechanism of the present invention cut away. Figure 10 is a cross-sectional view taken along line χ-χ shown in Figure 6. Figure 11 is a cross-sectional view taken along line phantom-illusion shown in Figure 6. Fig. 12 is an explanatory view showing the operation of the probe unit, (4) showing the probe unit at the standby position, (8) showing the probe unit in a state where the ith moving piece reaches the motion transition point, and (4) showing the liquid crystal toward the standby position. An explanatory view of the probe unit at the contact position of the electrodes of the panel. [Main component symbol description] 10 Inspection device 26 1308218 12 Display panel (liquid crystal panel) 12a Electrode 16 Rectangular base member 18 A pair of moving base members 20 Rectangular frame (panel frame) 20a, 20b, 20c, 20d Rectangular frame Side portion 22 probe unit 26 pair of track members (track)

30 fixing mechanism 34 male screw member 36 nut member 38 ball screw 40 fixing device 54 rectangular opening of rectangular frame 68 first moving piece 70 second moving piece 80, 82, 86, 88 motion conversion mechanism 82c inclined needle 82d guiding Hole 84 Spring mechanism (compression coil spring) 90a, 90b Inclined surface 92 Rail 94 Guide 96 Drive (piston cylinder) 27

Claims (1)

L3〇82l8 X. Patent application scope: A display panel inspection device is characterized in that: the core surface = the frame frame is composed of a rectangular frame body having a rectangular shape for the surface/electrode Displaying the four side portions of the edge of the panel; the long-moving η #moving piece' is cut along the thin side of the panel frame to be cut into a width that can be moved to the width of the panel (4) , the : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : 1 moving the sheet configuration, and holding a plurality of probe units, the probes are spaced apart from each other in the longitudinal direction of the second moving piece ml moving piece and the probe provided by the eighty-yield β-electrode; the motion conversion mechanism Provided when the first moving piece is between the retracted position Α and the second moving piece, and the position corresponding to the electrode in the panel area when the moving position is moved between the moving position and the second moving position The needle arrives early and arrives with the system to make the 2nd moving piece of flute "... between the motion transition points of the standing, the & moving sheet and the first shifting point and the forward position, and in order to reduce the motion, the second moving sheet is in the corresponding position The π work is moved in the direction of the first angle 0. The moving direction of the moving piece is straight. 2. As claimed in the patent application 帛 J, the moving piece is in the retracted position with: the device, wherein, when the righteous movement When moving between the transition points, the second 28 1308218: the multi-moving second system moves along the horizontal path along with the second moving piece to the side portion of the Hitachi, the probe unit, that is, above the liquid crystal panel, the knife-shaped panel flat rod is With the liquid the first! Moving between the retracted position and the corresponding position, when the second moving piece motion transition point moves between the forward position and the forward position, the probe 丄/D moves perpendicularly to the horizontal path at a right angle. The wide needle is as early as the corresponding bit in the panel area to contact the corresponding electrode or to release the contact. 3' If the probe unit of the inspection device of the scope of patent application 帛i, the total 6t 〇T 6 haidu μ system moves along the long side of the second moving piece, and the erecting mechanism is at the desired position. Positioning in the way of lifting. Department will be the first! And the second line of the second line; the combination mechanism, the moving pieces are combined to move along each other along the inclined surface by a predetermined line; the plucking machine 媸β 1 λί ^ is applied between the two moving pieces along the inclination a strong plug a· spring force at one end of the stroke of the curve, and a brake, when the first moving piece reaches the switching point from the retracted position, the second moving piece is blocked from the first moving piece— The body arrow body is introduced and moved, and the spring of the spring mechanism is pressed to allow the second moving piece to slide along the inclined surface, thereby guiding the second moving moon to the lower side. 5. The side parts of the first part of the patent scope are in the right inspection apparatus, wherein the rectangular frame is selected as a rectangular base member which can be respectively opened along the base 2, and is & Each of the corresponding rectangular opening sides of the member moves and can move in a direction close to the corresponding rectangular opening edge and away from the direction, so that 29 1308218 can correspond to different size display panels. 6_ As in the base member of the fourth application patent scope, there is: "on the track structure: 'the one in which the rectangular opening of the moment piece is opposite to each other' is along the rectangular base structure... And the movable seating member is disposed across the two rail members and is movable on the obstructing member in a posture of *: a corner; the rectangular frame is ::: = The pair of moving base members are moved along the corresponding moving member, and are disposed so as to be movable toward the longitudinal direction of the moving base member at the end of the other side portion of the frame, and are coupled to: Moving the sun yang w straight so that the side portion can be moved to the long side side - the opposite side, the part moving in the width direction, and the other side part adjacent to the other side end is in the moving and yang ^ t moves the edge portion to the long side direction and prevents the side portion from moving in the width direction. 7. According to the fifth aspect of the patent application, in the visual inspection device of the panel, the mechanism on the moving base and the moving base of the rectangular base member and the moving base is The manual operation room is respectively provided with a fixed edge portion, and the movable base and the piece and the movement are moved by the retractable square t; ^ (4) The electrical inspection device for the display panel, which is set in the rectangular base structure - in the case of I, has a fixed mechanism in the second, and has a ball screw, which is disposed along the obstructing member and supported by the rotatable member. a twisted material member, and screwed to the screw member and 30 1308218, in a leap second/eight-turn arrangement, with a rotation of the solvable member; a fixed portion for the side portion: :=' is provided with a screw member on the moving base along the side screw member, and is screwed and screwed to the fixing device, and is configured to: a nut member that moves the base: The rotation of the screw member is prevented in a released manner. 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