TWI305552B - - Google Patents
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- Publication number
- TWI305552B TWI305552B TW95127176A TW95127176A TWI305552B TW I305552 B TWI305552 B TW I305552B TW 95127176 A TW95127176 A TW 95127176A TW 95127176 A TW95127176 A TW 95127176A TW I305552 B TWI305552 B TW I305552B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- microperforated
- opening
- substrate
- metal structure
- Prior art date
Links
- 229910052751 metal Inorganic materials 0.000 claims description 59
- 239000002184 metal Substances 0.000 claims description 59
- 238000000034 method Methods 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 23
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 4
- 238000002161 passivation Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 1
- 238000005266 casting Methods 0.000 claims 1
- 229920000307 polymer substrate Polymers 0.000 claims 1
- 229910052707 ruthenium Inorganic materials 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 19
- 238000005323 electroforming Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 206010011224 Cough Diseases 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 210000000496 pancreas Anatomy 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Landscapes
- Manufacture Or Reproduction Of Printing Formes (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95127176A TW200806813A (en) | 2006-07-25 | 2006-07-25 | Method of producing a micro-perforated electroformed metal structure with a lift-off process and the structure thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95127176A TW200806813A (en) | 2006-07-25 | 2006-07-25 | Method of producing a micro-perforated electroformed metal structure with a lift-off process and the structure thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200806813A TW200806813A (en) | 2008-02-01 |
| TWI305552B true TWI305552B (ja) | 2009-01-21 |
Family
ID=44766437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW95127176A TW200806813A (en) | 2006-07-25 | 2006-07-25 | Method of producing a micro-perforated electroformed metal structure with a lift-off process and the structure thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200806813A (ja) |
-
2006
- 2006-07-25 TW TW95127176A patent/TW200806813A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200806813A (en) | 2008-02-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |