TWI398931B - Drive unit and solid crystal machine - Google Patents

Abstract

This invention discloses a driving apparatus and a die bonder thereof, which includes a driving apparatus body, a first drive module, a second drive module, and a drive load board. The drive load board is disposed on one side of the driving apparatus body, and the first drive module and the second drive module are installed on the driving apparatus body and actuate the drive load board respectively to produce driving forces for the first displacement and the second displacement, wherein the displacement speed of the first displacement is greater than that of the second displacement, and the displacement precision of the second displacement is greater than that of the first displacement. This invention adopts two driving sources to collectively drive load so as to produce a single direction displacement, thereby capable of improving the movement speed and movement precision of the driving apparatus.

Description

Drive unit and solid crystal machine

The invention relates to a driving device and a solid crystal machine, which can be driven by a quick pick-and-place and precise positioning drive device.

At present, with the development of the technology of the Light Emitting Diode, the LED is widely used in daily life such as illumination and signal display. Among them, LED can be mass-produced, and the quality of solid-crystal technology affects the quality of LED products. As a result, solid-crystal technology has become one of the key technologies for LED quality. In order to accelerate the solid crystal growth rate of LEDs and increase the solid crystal yield of LEDs, the development of solid crystal machines with fast and accurate positioning is currently the subject of the production industry.

In the case of conventional die bonding machines, the displacement in the uniaxial direction is typically driven by a single drive such as a linear motor, a motor and ball lead screw, or a motor and a flexible drive member to drive the fixed arm movement.

The linear device is characterized by the linear motor, which can be used to quickly and accurately control the moving position of the target with the optical scale. Therefore, for the solid crystal machine that needs precise positioning, the linear motor meets the requirements of the solid crystal machine. However, due to the characteristics of the linear motor itself, the load weight is lower than that of the ball lead screw, and the high linear motion cannot be achieved under the load. Therefore, the displacement speed at the time of the solid crystal is limited, and the higher production cannot be further achieved. effectiveness.

Furthermore, the motor and the lead screw of the driving device are characterized by large load weight and high precision, but the displacement speed is slower than that of the linear motor, so the production efficiency is less than that of the solid crystal machine with a linear motor. .

In addition, the driving device adopts a motor and a flexible transmission member, and its displacement speed is faster than that of a linear motor and a solid crystal machine of a motor and a ball lead screw, but the accuracy is the worst compared with the above two.

In view of the above-mentioned problems of the prior art, it is an object of the present invention to provide a driving device and a die bonding machine for fast and accurate object movement.

According to the purpose of the present invention, a driving device is provided, including a driving device body, a first driving module, a second driving module and a driving load board. The driving load board is disposed on one side of the driving device body, and the first driving module and the second driving module are mounted on the driving device body, and the first driving module and the second driving module respectively drive the driving load The plate produces a first displacement and a second displacement. Wherein, the displacement speed of the first displacement is greater than the second displacement, and is used as the movement of the long distance position, and the displacement precision of the second displacement is greater than the first displacement, and is used for making the first displacement to the positioning, and the micro-correction of the short distance To get good precision.

The first driving module includes a driving unit and a flexible transmission member, and the flexible transmission member can generate a first displacement by the driving unit.

The drive unit is a motor.

The first driving module further includes at least two rotating shafts, and the conveyor belt is attached to one of the two rotating shafts, and one of the two rotating shafts is pivotally connected to the driving unit, and when the driving unit drives the rotating shaft to rotate, the rotating shaft is driven The conveyor belt produces a first displacement.

The second driving module is a linear motor, including a certain sub-unit and a moving sub-unit, and the moving sub-unit is disposed inside the stator unit.

Wherein, the mover unit is coupled to the driving load plate, and when the stator unit drives the mover unit to move, the mover unit drives the load plate to generate a second displacement.

Wherein, the stator unit is a permanent magnet, and the mover unit is a coil.

Wherein, the driving load plate has a connecting portion, and the connecting portion is connected with the flexible transmission member, and when the driving unit drives the flexible transmission member to move, the flexible transmission member drives the load plate to generate the first displacement.

Wherein the first displacement is parallel to the second displacement.

According to still another object of the present invention, a die bonding machine is provided, which includes a platform, a driving device, a fixed crystal arm, and a measuring unit. The driving device is disposed on the platform, and includes a driving device body, a driving load board, a first driving module and a second driving module. The driving load board is disposed on one side of the driving device body, and the first driving module and the second driving module are mounted on the driving device body, and the first driving module and the second driving module respectively drive the driving load The plate produces a first displacement and a second displacement. The solid crystal arm is disposed on the driving load board. The measuring unit is disposed on one side of the driving device body, and the measuring unit measures the displacement of the driving load board. The displacement of the first displacement is greater than the second displacement, and the displacement accuracy of the second displacement is greater than the first displacement.

Wherein, the measuring unit is an optical scale.

In view of the above, the die bonder capable of switching different speeds according to the present invention may have one or more of the following advantages:

(1) The solid crystal machine can switch different working speeds by different driving modules, thereby accelerating the driving device and improving the efficiency of the solid crystal machine without reducing the precision of the positioning of the solid crystal machine.

(2) The solid crystal machine has different drive modules. Therefore, when one of the drive modules fails, the other drive module can continue to work, which can improve the reliability of the die bonding operation.

Please refer to FIG. 1 , which is a schematic diagram of an embodiment of a driving module of the present invention. In this embodiment, the driving device 100 includes a driving device body 110, a first driving module 120, a second driving module 130, and a driving load board 140. The first driving module 120 and the second driving module 130 are mounted on the driving device body, and the driving load board 140 is disposed on one side of the driving device body 110.

The first driving module 120 includes a driving unit 122, a flexible transmission member 124 and two rotating shafts 126, and the driving unit 122 can be a motor. In addition, the driving load board 140 has a connecting portion 142 connected to the flexible transmission member 124. The driving unit 122 is pivotally connected to one of the rotating shafts 126. Therefore, the driving unit 122 can drive the rotating shaft 126 to rotate to drive the flexible transmission member 124 attached to the rotating shaft 126 by the rotating shaft 126, thereby driving the driving load plate 140 to generate a First displacement.

The second driving module 130 can be a linear motor including a stator unit 132 and a mover unit 134. In the present embodiment, the stator unit 132 is a permanent magnet, and the mover unit 134 is a coil, and the drive load board 140 is coupled to the mover unit 134. When it is energized to the mover unit 134, it is changed in polarity, so that an electromagnetic force is generated between the mover unit 134 and the stator unit 132 to drive the mover unit 134 to move, and the drive load plate to be coupled to the mover unit 134 140 produces a second displacement.

It should be noted that the stator unit 132 is a coil, and the mover unit 134 is a permanent magnet. Therefore, the stator unit 132 can drive the mover unit 134 by changing the polarity of the coil. Since the linear unit 130, the stator unit 132 and the mover unit 134 are magnetically driven, the linear motor 130 is made to have a lower load. In addition, when the conventional motor is matched with the flexible transmission member, the positioning of the flexible transmission member is not accurate due to the poor rigidity of the belt when the flexible transmission member moves. Therefore, in the present invention, the conventional motor can be used as the first driving module 120, and the speed is fast, so as to achieve rapid position positioning; and the linear motor is used as the second driving module 130, and the precision is high. , to do precision control. Thereby, the traditional motor and the linear motor are matched to each other to improve the efficiency of the die bonding machine.

Please refer to FIG. 2, which is a schematic view of an embodiment of the die bonding machine of the present invention. As can be seen from FIGS. 1 and 2, the die bonding machine 1 includes a driving device 100, a platform 200, a fixed crystal arm 300, and a measuring unit 400. The driving device 100 can be disposed on the platform 200, and the fixed crystal arm 300 is disposed on the driving load board 140 of the driving device 100, so the crystal holding arm 300 can move along with the driving load board 140. The measuring unit 400 is disposed on the driving device body 110 and can be used to measure the displacement of the driving load board 140.

When the driving load plate 140 is moved, the fixed crystal arm 300 is driven at the same time. When the driving device 100 is activated, the driving unit 122 of the first driving module 120 drives the flexible transmission member 124 to drive the driving load plate 140 and the fixed crystal arm 300 connected to the flexible transmission member 124 to generate a first displacement. After the solid crystal arm 300 travels the first displacement, the first driving module 120 stops driving the solid crystal arm 300. After the stop, it can be controlled according to a preset program. Within a few microseconds to several tens of microseconds, the second driving module 130 then starts to drive the driving load board 140 connected to the moving unit 134, and the driving load board 140 is driven. Actuation with the crystallizer arm 300 to produce a second displacement until the crystallizer arm 300 moves to the set position. The second displacement must be parallel to the first displacement displacement, so that the condition that the two displacement travel paths interfere with each other does not occur, and the position of the solid crystal arm 300 can be correctly positioned. And the displacement speed of the first displacement is greater than the second displacement, so the crystallizer arm 300 can move rapidly at the first displacement and accurately move to the preset position during the second displacement. In addition, since the linear motor has a higher precision positioning feature than the conventional motor, the displacement accuracy of the second displacement is greater than the first displacement.

The advantage of the above operation mode is that the solid crystal arm 300 can be moved in an efficient manner, and the solid crystal arm 300 is first moved by the first driving module 120 to be quickly and widely moved, and then the second driving module is used. 130 moves the fixed crystal arm 300 into a small range and a relatively precise positioning. At this time, the measuring unit 400 can measure the displacement of the solid crystal arm 300, and with a preset program, determine the first driving module 120 or the difference between the displacement of the solid crystal arm 300 and the set position. One of the two driving modules 130 is used to drive the fixed crystal arm 300 to move. The measuring unit 400 can be an optical scale and can be disposed on one of the optical reading heads 500 on the platform 200 for measuring the position. The optical pickup 500 can read the scale on the optical scale 400 to measure the displacement of the fixed crystal arm 300. Therefore, the first driving module 120 and the second driving module 130 can be used in combination with each other, and achieve the characteristics of the present invention with efficient and precise positioning and movement. In addition, the above-mentioned actuation method including the first displacement and the second displacement may be a reciprocating motion back and forth in addition to the one-way movement. In addition, it should be noted that the optical scale 400 can also be disposed on the platform 200, and the optical pickup 500 can also be disposed on the driving device body 110, and the positions of the optical scale 400 and the optical reading head 500 are exchanged without affecting the two. The functionality of the measurement is measured in the present invention.

In summary, the driving device and the die bonding machine of the present invention are characterized in that the first driving module has a fast and wide-range movement, and the second driving module performs a small range and precise movement, thereby achieving Improve the movement speed of the fixed crystal arm and maintain the original movement accuracy.

The above description is for illustrative purposes only and is not intended to limit the use of the invention. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.

1. . . Solid crystal machine

100. . . Drive unit

110. . . Drive unit

120. . . First drive module

122. . . Drive unit

124. . . Flexible transmission

126. . . Rotating shaft

130. . . Second drive module

132. . . Stator unit

134. . . Moving unit

140. . . Drive load board

142. . . Connection

200. . . platform

300. . . Solid crystal arm

400. . . Measuring unit

as well as

500. . . Optical read head

1 is a schematic view of a drive module of an embodiment of the present invention;

Fig. 2 is a schematic view of a die bonder according to an embodiment of the present invention.

100. . . Drive unit

110. . . Drive unit

120. . . First drive module

122. . . Drive unit

124. . . Flexible transmission

126. . . Rotating shaft

130. . . Second drive module

132. . . Stator unit

134. . . Moving unit

140. . . Drive load board

as well as

142. . . Connection

Claims (19)

A driving device for achieving fast and accurate object movement, the driving device comprises: a driving device body; a driving load plate, the driving load plate is disposed on one side of the driving device body; and a first driving module The first driving module is mounted on the driving device body and drives the driving load board to generate a first displacement. The first driving module includes a driving unit and a flexible transmission member. The driving member generates the first displacement by the driving unit; and a second driving module is mounted on the driving device body, and drives the driving load plate to generate a second displacement; The displacement speed of the first displacement is greater than the second displacement, the displacement accuracy of the second displacement is greater than the first displacement, and the driving load plate has a connecting portion, and the connecting portion is connected to the flexible transmission member, and the connecting portion is connected to the flexible transmission member When the driving unit drives the flexible transmission member to move, the flexible transmission member drives the driving load plate to generate the first displacement. The driving device of claim 1, wherein the driving unit is a motor. The driving device of claim 1, wherein the first driving module further comprises at least two rotating shafts, and the flexible transmission member is attached to one of the two rotating shafts, and one of the two rotating shafts The pivoting mechanism is coupled to the driving unit, and when the driving unit drives the rotating shaft to rotate, the rotating shaft drives the flexible transmission member to generate the first displacement. The driving device of claim 1, wherein the second driving The module is a linear motor. The driving device of claim 4, wherein the second driving module comprises a certain sub-unit and a moving sub-unit, and the moving sub-unit is disposed inside the stator unit. The driving device of claim 5, wherein the mover unit is coupled to the drive load plate, and the stator unit drives the mover unit to move, causing the mover unit to drive the drive load plate to generate the Second displacement. The driving device of claim 5, wherein the stator unit is a permanent magnet, and the moving unit is a coil. The driving device of claim 1, wherein the first displacement is parallel to the second displacement. A solid crystal machine comprising: a platform; a driving device disposed on the platform, comprising: a driving device body; a driving load plate, the driving load plate is disposed on one side of the driving device body; a first driving module, the first driving module is mounted on the driving device body, and drives the driving load board to generate a first displacement; and a second driving module, the second driving module is Mounted on the driving device body and driving the driving load plate to generate a second displacement; a fixed crystal arm, the fixed crystal arm is disposed on the driving load plate; and a measuring unit, the measuring unit is The measuring unit is disposed on one side of the driving device body, and the measuring unit measures the displacement of the driving load plate; wherein the displacement speed of the first displacement is greater than the second displacement, and the displacement accuracy of the second displacement is greater than the first Displacement. The die bonder of claim 9, wherein the first driving module comprises a driving unit and a flexible transmission member, and the flexible transmission member generates the first displacement by the driving unit. The die bonder of claim 10, wherein the drive unit is a motor. The die bonder of claim 10, wherein the first drive module further comprises at least two rotating shafts, and the flexible transmission member is attached to one of the two rotating shafts, and the two rotating shafts are One of the pivoting members is pivotally connected to the driving unit, and when the driving unit drives the rotating shaft to rotate, the rotating shaft drives the flexible transmission member to generate the first displacement. The die bonder of claim 9, wherein the second drive module is a linear motor. The die bonder of claim 13, wherein the second driving module comprises a certain subunit and a moving subunit, and the moving subunit is disposed inside the stator unit. The die bonder of claim 14, wherein the mover unit is coupled to the drive load plate, and the stator unit drives the mover unit to move, causing the mover unit to drive the drive load plate to generate The second displacement. The die bonder of claim 14, wherein the stator unit is a permanent magnet and the mover unit is a coil. The die bonder of claim 9, wherein the driving load plate has a connecting portion connected to the flexible transmission member, and when the driving unit drives the flexible transmission member to move, The flexible transmission member drives the drive load plate to generate the first displacement. The die bonder of claim 9, wherein the first displacement is parallel to the second displacement. The die bonder of claim 9, wherein the measuring unit is an optical scale.