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TWI396464B - Organic electroluminescence display device and manufacturing method thereof - Google Patents

Organic electroluminescence display device and manufacturing method thereof Download PDF

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Publication number
TWI396464B
TWI396464B TW096102276A TW96102276A TWI396464B TW I396464 B TWI396464 B TW I396464B TW 096102276 A TW096102276 A TW 096102276A TW 96102276 A TW96102276 A TW 96102276A TW I396464 B TWI396464 B TW I396464B
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protective layer
layer
substrate
display device
organic electroluminescent
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TW096102276A
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Chinese (zh)
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TW200833164A (en
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Ryuji Nishikawa
Siang Lun Hsu
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Innolux Corp
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Priority to TW096102276A priority Critical patent/TWI396464B/en
Priority to US12/009,502 priority patent/US7928646B2/en
Priority to JP2008010917A priority patent/JP2008177169A/en
Publication of TW200833164A publication Critical patent/TW200833164A/en
Priority to US13/048,168 priority patent/US8500504B2/en
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Publication of TWI396464B publication Critical patent/TWI396464B/en

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/38Devices specially adapted for multicolour light emission comprising colour filters or colour changing media [CCM]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/84Passivation; Containers; Encapsulations
    • H10K50/844Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/87Passivation; Containers; Encapsulations
    • H10K59/873Encapsulations
    • H10K59/8731Encapsulations multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301Details of OLEDs
    • H10K2102/302Details of OLEDs of OLED structures
    • H10K2102/3023Direction of light emission
    • H10K2102/3026Top emission
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/81Anodes
    • H10K50/818Reflective anodes, e.g. ITO combined with thick metallic layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/122Pixel-defining structures or layers, e.g. banks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/805Electrodes
    • H10K59/8051Anodes
    • H10K59/80518Reflective anodes, e.g. ITO combined with thick metallic layers

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  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)

Description

有機電致發光顯示裝置及其製作方法 Organic electroluminescence display device and manufacturing method thereof

本發明係有關於有機電致發光顯示裝置,特別是有關係一種具有提升隔離濕氣能力的有機電致發光顯示裝置及其製作方法。 The present invention relates to an organic electroluminescence display device, and more particularly to an organic electroluminescence display device having an improved ability to isolate moisture and a method of fabricating the same.

相較於傳統顯示器,例如陰極射線管型顯示器(CRT)及液晶顯示器(LCD),有機電致發光顯示裝置具有較佳之彩度、視角、亮度及小體積的優點,使得有機電致發光顯示裝置的需求也愈來愈大。由於有機電致發光顯示裝置內的構件,極容易受到外界濕氣的影響,例如電極的氧化,使得減低有機電致發光顯示裝置的使用壽命。因此,對製作有機電致發光顯示裝置而言,有機電致發光顯示裝置的封裝結構及其製作是十分關鍵的步驟。 Compared with conventional displays, such as cathode ray tube displays (CRTs) and liquid crystal displays (LCDs), organic electroluminescent display devices have advantages of better chroma, viewing angle, brightness, and small volume, so that organic electroluminescent display devices The demand is also growing. Since the components in the organic electroluminescence display device are extremely susceptible to external moisture, such as oxidation of the electrodes, the life of the organic electroluminescent display device is reduced. Therefore, for fabricating an organic electroluminescence display device, the package structure of the organic electroluminescence display device and its fabrication are very critical steps.

在第1圖中,顯示一種習知的有機電致發光顯示裝置。在上述有機電致發光顯示裝置中,第一電極12形成於第一基板10上,接著,依序形成有機電致發光層14及第二電極16於第一電極12的上方,之後覆蓋保護層18於第二電極16,且對應地設置第二基板20於第一基板10的上方。由於僅形成一層保護層,使得隔離濕氣的效果能力不佳,另一方面,若增加保護層厚度,則會增加有機電致發光顯示裝置的整體厚度。 In Fig. 1, a conventional organic electroluminescence display device is shown. In the above organic electroluminescent display device, the first electrode 12 is formed on the first substrate 10, and then the organic electroluminescent layer 14 and the second electrode 16 are sequentially formed over the first electrode 12, and then covered with a protective layer. 18 is disposed on the second electrode 16 and correspondingly disposed on the first substrate 10 above the first substrate 10. Since only one protective layer is formed, the effect of isolating moisture is poor, and on the other hand, if the thickness of the protective layer is increased, the overall thickness of the organic electroluminescent display device is increased.

因此,亟需要一種具有提升隔離濕氣能力的有機電 致發光顯示裝置及其製作方法。 Therefore, there is a need for an organic power that has the ability to enhance the ability to isolate moisture. An electroluminescence display device and a method of fabricating the same.

有鑑於此,本發明之一目的係提供一種有機電致發光顯示裝置。上述有機電致發光顯示裝置,包含一具有至少一薄膜電晶體的第一基板;一發光單元,形成於該第一基板上;一第一保護層,形成於該發光單元的上方;一第二保護層,形成於該第一保護層上;以及一第三保護層,形成於該第二保護層上,且接觸該第一保護層。上述有機電致發光顯示裝置,更包括一第二基板,封合於該第一基板上,以形成該發光單元於該第一基板與第二基板之間。 In view of the above, an object of the present invention is to provide an organic electroluminescence display device. The organic electroluminescent display device includes a first substrate having at least one thin film transistor; a light emitting unit formed on the first substrate; a first protective layer formed over the light emitting unit; a second a protective layer formed on the first protective layer; and a third protective layer formed on the second protective layer and contacting the first protective layer. The organic electroluminescent display device further includes a second substrate sealed on the first substrate to form the light emitting unit between the first substrate and the second substrate.

上述有機電致發光顯示裝置,其中該第二保護層與該第三保護層接觸的頂部表面積係大於或等於該第二保護層與該第一保護層接觸的底部表面積。 In the above organic electroluminescent display device, the top surface area of the second protective layer in contact with the third protective layer is greater than or equal to the bottom surface area of the second protective layer in contact with the first protective layer.

上述有機電致發光顯示裝置,其中該第二保護層與該第三保護層接觸之頂部邊緣間的距離係大於或等於該第二保護層與該第一保護層接觸之底部邊緣間的距離。 In the above organic electroluminescent display device, the distance between the top edge of the second protective layer and the third protective layer is greater than or equal to the distance between the second protective layer and the bottom edge of the first protective layer.

本發明之另一目的係提供一種有機電致發光顯示裝置的製作方法。上述有機電致發光顯示裝置的製作方法,包括提供具有一薄膜電晶體的一第一基板;接著,形成一發光單元於該第一基板上,且電性連接該薄膜電晶體;之後,形成一第一保護層於該發光單元上;接著,形成一第二保護層於該第一保護層的上方;以及形成一 第三保護層於該第二保護層上,且接觸第一保護層。上述有機電致發光顯示裝置的製作方法,更包括封合一第二基板於該第一基板的上方,以形成該發光單元於該第一基板與該第二基板之間。上述有機電致發光顯示裝置的製作方法,其中形成該第二保護層係由噴墨印刷或網版印刷的方式完成。 Another object of the present invention is to provide a method of fabricating an organic electroluminescence display device. The method for fabricating the organic electroluminescent display device includes: providing a first substrate having a thin film transistor; then forming a light emitting unit on the first substrate and electrically connecting the thin film transistor; and then forming a a first protective layer on the light emitting unit; then, forming a second protective layer over the first protective layer; and forming a The third protective layer is on the second protective layer and contacts the first protective layer. The method for fabricating the organic electroluminescent display device further includes sealing a second substrate over the first substrate to form the light emitting unit between the first substrate and the second substrate. In the above method for fabricating an organic electroluminescence display device, the formation of the second protective layer is performed by inkjet printing or screen printing.

根據本發明之製作的有機電致發光顯示裝置,由於發光單元的上方形成包含無機材料的第一保護層、包含有機材料的第二保護層及包含無機材料的第三保護層,以有效的隔離濕氣侵入發光單元中,進而可減少濕氣造成發光單元的電極氧化現象。再者,第二保護層僅形成於發光單元的上方,故並不會造成材料的浪費,而導致製作成本的增加,同時包含有機材料的第二保護層也會減少包含無機材料的第一保護層及第三保護層之間的應力。另外,由於僅在發光單光上方形成第二保護層,因此,並可在不增加顯示裝置厚度的前提下,有效地增加隔離濕氣的能力,進而增加顯示裝置的使用壽命。 According to the organic electroluminescence display device produced by the present invention, a first protective layer containing an inorganic material, a second protective layer containing an organic material, and a third protective layer containing an inorganic material are formed above the light emitting unit for effective isolation Moisture invades the light-emitting unit, thereby reducing the oxidation of the electrode of the light-emitting unit caused by moisture. Furthermore, the second protective layer is formed only above the light-emitting unit, so that no waste of material is caused, and the manufacturing cost is increased, and the second protective layer containing the organic material also reduces the first protection including the inorganic material. The stress between the layer and the third protective layer. In addition, since the second protective layer is formed only on the single light, the ability to isolate moisture can be effectively increased without increasing the thickness of the display device, thereby increasing the service life of the display device.

接下來,將詳細說明本發明之較佳實施例及其製作的方法。然而,可以了解的是,本發明提供許多可實施於廣泛多樣之應用領域的發明概念。用來說明的具實施例,僅是利用本發明概念之具體實施方式的說明,並不限制本發明的範圍。 Next, a preferred embodiment of the present invention and a method of fabricating the same will be described in detail. However, it will be appreciated that the present invention provides many inventive concepts that can be implemented in a wide variety of applications. The embodiments used for the description are merely illustrative of specific embodiments of the present invention and are not intended to limit the scope of the invention.

在第2A圖至第2H圖中,顯示根據本發明第一實施例之形成一種有機電致發光顯示裝置(organic electroluminescent display device)的剖面圖。在本發明第一實施例,有機電致發光顯示裝置中的彩色濾光層與作為開關的薄膜電晶體(thin film transistor;TFT)可設置於同一個基板上。也就是說,在第一實施例中的彩色濾光層可以搭配薄膜電晶體的製程形成於同一個基板上。 In Figs. 2A to 2H, there are shown cross-sectional views showing the formation of an organic electroluminescent display device according to the first embodiment of the present invention. In the first embodiment of the present invention, the color filter layer in the organic electroluminescence display device and the thin film transistor (TFT) as a switch may be disposed on the same substrate. That is to say, the color filter layer in the first embodiment can be formed on the same substrate as the process of the thin film transistor.

如第2A圖示,形成彩色濾光層204於一具有多數個薄膜電晶體202的第一基板200上。上述第一基板200較佳可以是例如玻璃或塑膠的透明材質,當然也可以是具有可彎曲性的透明材質。 As shown in FIG. 2A, a color filter layer 204 is formed on a first substrate 200 having a plurality of thin film transistors 202. The first substrate 200 may preferably be a transparent material such as glass or plastic, and may of course be a transparent material having flexibility.

上述薄膜電晶體202包含閘極2021、源極2025及汲極2023,其中閘極2021形成於該第一基板200上,且源極2025及汲極2023分別形成於上述閘極2021的上方,以構成可作為開關的薄膜電晶體202。形成上述閘極、源極及汲極的方式可以是通常的方式,在此並不在贅述。 The thin film transistor 202 includes a gate 2021, a source 2025, and a drain 2023. The gate 2021 is formed on the first substrate 200, and the source 2025 and the drain 2023 are respectively formed above the gate 2021. A thin film transistor 202 that can function as a switch is constructed. The manner of forming the above-mentioned gate, source and drain may be a usual manner and will not be described herein.

又如第2A圖所示,形成介電層203於第一基板200上,且覆蓋薄膜電晶體202,以保護及隔離該薄膜電晶體202。在一較佳實施例中,形成上述介電層203的方式可以是例如低溫化學氣相沈積(low temperature chemical vapor deposition;LTCVD)、電漿加強式化學氣相沈積(plasma enhanced chemical vapor deposition;PECVD)或低壓化學氣相沈積(low pressure chemical vapor deposition; LPCVD)的化學氣相沈積法,且較佳之介電層203可以是氧化矽、氮化矽或其它可作為介電層的材質。 As shown in FIG. 2A, a dielectric layer 203 is formed on the first substrate 200 and covers the thin film transistor 202 to protect and isolate the thin film transistor 202. In a preferred embodiment, the dielectric layer 203 may be formed by, for example, low temperature chemical vapor deposition (LTCVD) or plasma enhanced chemical vapor deposition (PECVD). ) or low pressure chemical vapor deposition (low pressure chemical vapor deposition; The chemical vapor deposition method of LPCVD), and preferably the dielectric layer 203 may be tantalum oxide, tantalum nitride or other material which can serve as a dielectric layer.

接著,形成彩色濾光層204於第一基板200的介電層203上。在一較佳實施例中,彩色濾光層204是設置於未形成薄膜電晶體202之基板200的上方,也就是說,薄膜電晶體202並未設置於彩色濾光層204的下方。再者,薄膜電晶體202也可以作為例如黑矩陣(black matrix;BM)的遮光層。因此,根據本發明第一實施例之有機電致發光顯示裝置可不需形成遮光層,故可減少材料的成本。 Next, a color filter layer 204 is formed on the dielectric layer 203 of the first substrate 200. In a preferred embodiment, the color filter layer 204 is disposed above the substrate 200 where the thin film transistor 202 is not formed, that is, the thin film transistor 202 is not disposed under the color filter layer 204. Further, the thin film transistor 202 can also be used as a light shielding layer of, for example, a black matrix (BM). Therefore, the organic electroluminescence display device according to the first embodiment of the present invention can reduce the cost of materials without forming a light shielding layer.

在一較佳實施例中,形成彩色濾光層204的方式,可以是藉由噴墨印刷(ink-jet printing;IJP)法將包含紅色色層(color pigment)、綠色色層(green pigment)及藍色色層(blue pigment)的彩色濾光層204噴塗於第一基板200上,接著,進行一烘烤步驟,以形成上述彩色濾層204。上述彩色濾光層204較佳可以是有機彩色光阻的材料或其它可作為彩色濾光層的材質。 In a preferred embodiment, the color filter layer 204 is formed by using an ink-jet printing (IJP) method to include a red color pigment and a green color pigment. A color filter layer 204 of blue pigment is sprayed onto the first substrate 200, and then a baking step is performed to form the color filter layer 204. The color filter layer 204 may preferably be an organic color resist material or other material that can be used as a color filter layer.

在第2B圖中,覆蓋一平坦層(overcoat layer)206於第一基板200上,且覆蓋彩色濾光層204及薄膜電晶體202,以平坦化該第一基板200的表面。上述平坦層206較佳可以是感光材料,且藉由例如旋轉塗佈(spin coating)的方式形成。接著,進行一微影及蝕刻製程,圖案化該平坦層206,以形成一接觸孔207,且暴露薄膜電晶體202之汲極2023的上表面。 In FIG. 2B, an overcoat layer 206 is overlaid on the first substrate 200 and covers the color filter layer 204 and the thin film transistor 202 to planarize the surface of the first substrate 200. The flat layer 206 may preferably be a photosensitive material and formed by, for example, spin coating. Next, a lithography and etching process is performed to pattern the planar layer 206 to form a contact hole 207 and expose the upper surface of the drain 2023 of the thin film transistor 202.

在完成上述接觸孔207之後,形成第一電極208於 該平坦層206上,且延伸至接觸孔207之中,以電性連接薄膜電晶體202的汲極2023,如第2B圖所示。在一較佳實施中,形成第一電極208的方式,可以是藉由例如濺鍍(sputtering)形成例如是銦錫氧化物(Indium Tin Oxide;ITO)的透明導電層,以微影及蝕刻製程圖案化上述導電層,以形成第一電極208,其大體上對應於第一基板200上之彩色濾光層204的上方。上述第一電極208可作為後續形成發光單元的陽極,故也可稱為陽極電極。 After the contact hole 207 is completed, the first electrode 208 is formed. The flat layer 206 extends into the contact hole 207 to electrically connect the drain 2023 of the thin film transistor 202, as shown in FIG. 2B. In a preferred embodiment, the first electrode 208 is formed by, for example, sputtering to form a transparent conductive layer such as Indium Tin Oxide (ITO), and the lithography and etching process is performed. The conductive layer is patterned to form a first electrode 208 that substantially corresponds to above the color filter layer 204 on the first substrate 200. The first electrode 208 can be used as an anode for subsequently forming a light-emitting unit, and thus can also be referred to as an anode electrode.

如第2C圖所示,形成具有多數開口209的畫素定義層(pixel define layer;PDL)210於第一基板200上,且各開口209會暴露部分的第一電極208,以形成一畫素區域(pixel area)212。在一較佳實施例中,藉由例如旋轉塗佈的方式,形成例如是感光材料的畫素定義層210於第一基板200上,且覆蓋第一電極208。接著,圖案化上述畫素定義層210,形成預先決定的開口209,以暴露第一電極208的表面。 As shown in FIG. 2C, a pixel define layer (PDL) 210 having a plurality of openings 209 is formed on the first substrate 200, and each of the openings 209 exposes a portion of the first electrode 208 to form a pixel. Pixel area 212. In a preferred embodiment, a pixel defining layer 210, such as a photosensitive material, is formed on the first substrate 200 and covers the first electrode 208 by, for example, spin coating. Next, the pixel defining layer 210 is patterned to form a predetermined opening 209 to expose the surface of the first electrode 208.

值得注意的是,上述畫素區域212大體上對應地形成於上述第一電極208與彩色濾光層204的上方。此外,畫素區域212之頂部邊緣間的距離係大於或等於畫素區域212與第一電極208接觸之底部邊緣間的距離。 It should be noted that the pixel region 212 is substantially correspondingly formed above the first electrode 208 and the color filter layer 204. Moreover, the distance between the top edges of the pixel regions 212 is greater than or equal to the distance between the pixel regions 212 and the bottom edges of the first electrodes 208.

如第2D圖所示,形成有機電致發光層(organic electroluminescent layer)214於畫素區域212內的第一電極208上,以提供顯示裝置光源。在一實施例中,上述有機電致發光層214可以是藉由真空蒸鍍(vacuum evaporation)的方式完成,且有機電致發光層214可以是包含藍色發光層(blue emitting layer)、紅色發光層(red emitting layer)及綠色發光層(green emitting layer)的堆疊層,或是在藍色發光層摻雜黃色發光材料(或紅色發光材料)的結構,以提供例如白光光源至顯示裝置。在另一實施例中,在形成有機電致發光層214之前,也可以依序形成電洞注入層(hole injection layer)及電洞傳輸層(hole transport layer)於第一電極208上方。接著,在形成有機電致發光層214之後,再依序形成電子傳輸層(electron transport layer)及電子注入層(electro injection layer)於有機電致發光層214上方。 As shown in FIG. 2D, an organic electroluminescent layer 214 is formed on the first electrode 208 in the pixel region 212 to provide a display device light source. In an embodiment, the organic electroluminescent layer 214 may be vacuum evaporated (vacuum) The evaporation method is completed, and the organic electroluminescent layer 214 may be a stacked layer including a blue emitting layer, a red emitting layer, and a green emitting layer, or The blue luminescent layer is doped with a yellow luminescent material (or red luminescent material) to provide, for example, a white light source to the display device. In another embodiment, before the formation of the organic electroluminescent layer 214, a hole injection layer and a hole transport layer may be sequentially formed over the first electrode 208. Next, after the organic electroluminescent layer 214 is formed, an electron transport layer and an electron injection layer are sequentially formed over the organic electroluminescent layer 214.

在第2E圖中,順應性地形成一第二電極216於第一基板200上,且覆蓋畫素定義層210及有機電致發光層214。上述第二電極216與畫素區域212之中的有機電致發光層214及第一電極208構成一發光單元217,且該第二電極216可作為發光單元217的陰極電極。在一較佳實施例中,形成第二電極216的方式可以是例如濺鍍(sputtering)、電子束蒸鍍(electron beam evaporation)或加熱蒸鍍(thermal evaporation)的方式,且較佳可以是鋁、鋁鋰合金(aluminum-lithium alloys)或鎂銀合金(magnesium-sliver alloys)。 In FIG. 2E, a second electrode 216 is conformally formed on the first substrate 200 and covers the pixel defining layer 210 and the organic electroluminescent layer 214. The second electrode 216 and the organic electroluminescent layer 214 and the first electrode 208 in the pixel region 212 constitute a light emitting unit 217, and the second electrode 216 can serve as a cathode electrode of the light emitting unit 217. In a preferred embodiment, the second electrode 216 may be formed by, for example, sputtering, electron beam evaporation, or thermal evaporation, and may preferably be aluminum. , aluminum-lithium alloys or magnesium-sliver alloys.

值得注意的是,在畫素區域212中包含第一電極208、有機電致發光層214及第二電極216的發光單元217係對應地設置於彩色濾光層204的上方。當電流通過發 光單元217時,第二電極216所提供之電子與第一電極208提供之電洞會在有機電致發光層214結合,使得有機電致發光層214會發射光線,且上述光線會穿過第一電極208、彩色濾光層204及第一基板200至顯示裝置外。 It should be noted that the light-emitting unit 217 including the first electrode 208, the organic electroluminescent layer 214 and the second electrode 216 in the pixel region 212 is correspondingly disposed above the color filter layer 204. When the current passes through When the light unit 217 is used, the electrons provided by the second electrode 216 and the holes provided by the first electrode 208 are combined in the organic electroluminescent layer 214, so that the organic electroluminescent layer 214 emits light, and the light passes through the first An electrode 208, a color filter layer 204 and the first substrate 200 are outside the display device.

接著,順應性地形成第一保護層218於第二電極216上,如第2F圖所示。在一較佳實施例中,形成上述第一保護層218的方式較佳可以是真空蒸鍍(vacuum evaporation)、濺鍍(sputtering)或電漿加強式化學氣相沈積法(plasma enhanced chemical vapor deposition;PECVD)。上述第一保護層218較佳厚度範圍介於0.1um至0.5um之間。 Next, a first protective layer 218 is formed conformally on the second electrode 216 as shown in FIG. 2F. In a preferred embodiment, the first protective layer 218 may be formed by vacuum evaporation, sputtering or plasma enhanced chemical vapor deposition. ;PECVD). The first protective layer 218 preferably has a thickness ranging from 0.1 um to 0.5 um.

在一較佳實施例中,上述第一保護層218較佳可以是無機材料,例如氧化金屬(metal oxide)、氮化金屬(metal nitride)、碳化金屬(metal carbide)、氮氧化金屬(metal oxynitride)及其組合。上述氧化金屬較佳可以是氧化矽(silicon oxide;SiOx)、氧化鋁(aluminum oxide;Al2O3)、二氧化鈦(titanium oxide;TiO2)、氧化銦(indium oxide;In2O3)、氧化錫(tin oxide;SnO2)、氧化銦錫(indium tin oxide;ITO)及其組合。上述氮化金屬較佳例如氮化鋁(aluminum nitride;AlN)、氮化矽(silicon nitride;SiNx)及其組合。上述碳化金屬較佳例如碳化矽(silicon carbide;SiC)。而,上述氮氧化金屬較佳可以是氮氧化矽(silicon oxynitride;SiON)。 In a preferred embodiment, the first protective layer 218 may preferably be an inorganic material such as metal oxide, metal nitride, metal carbide, or metal oxynitride. ) and its combination. The oxidized metal may preferably be silicon oxide (SiOx), aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), indium oxide (In 2 O 3 ), oxidation. Tin oxide (SnO 2 ), indium tin oxide (ITO), and combinations thereof. The above metal nitride is preferably, for example, aluminum nitride (AlN), silicon nitride (SiNx), or a combination thereof. The above carbonized metal is preferably, for example, silicon carbide (SiC). Further, the above metal oxynitride may preferably be silicon oxynitride (SiON).

又如第2F圖所示,形成一第二保護層220於上述發 光單元217上方的第一保護層218上,且發光單元217上方之凹槽219會容置該第二保護層220於其中。在一較佳實施例中,形成第二保護層220的方式可以是藉由噴墨印刷(ink-jet printing;IJP)的方式,將第二保護層220噴塗於發光單元217上方的第一保護層218上。值得注意的是,由於第二保護層220係容置於凹槽219之中,使得第二保護層220的上表面與第一保護層218的上表面係大體上形成一平面。 As shown in FIG. 2F, a second protective layer 220 is formed on the above The first protective layer 218 above the light unit 217, and the recess 219 above the light emitting unit 217 can accommodate the second protective layer 220 therein. In a preferred embodiment, the second protective layer 220 may be formed by first spraying the second protective layer 220 over the light emitting unit 217 by inkjet printing (IJP). On layer 218. It is noted that since the second protective layer 220 is received in the recess 219, the upper surface of the second protective layer 220 and the upper surface of the first protective layer 218 form a substantially planar surface.

接著,進行例如熱固化或光固化的固化步驟,其中固化步驟係由第二保護層220的材料決定,例如第二保護層220是熱固性樹脂(thermal resin)時,可藉由熱處理步驟,固化第二保護層220。而第二保護層220是感光性材料時,可藉由紫外光或可見光固化第二保護層220。在一較佳實施例中,第二保護層220於進行固化步驟前的黏度較佳介於1浬泊(cp)至1000浬泊(cp)之間。在另一實施例中,也可以是藉由網版印刷(screen printing)的方式,將第二保護層220直接印製於發光單元217上方之凹槽219之中的第一保護層218上。 Then, a curing step such as thermal curing or photo curing is performed, wherein the curing step is determined by the material of the second protective layer 220. For example, when the second protective layer 220 is a thermal resin, the curing step can be performed by a heat treatment step. Two protective layers 220. When the second protective layer 220 is a photosensitive material, the second protective layer 220 can be cured by ultraviolet light or visible light. In a preferred embodiment, the viscosity of the second protective layer 220 before the curing step is preferably between 1 kPa and 1000 kPa. In another embodiment, the second protective layer 220 may be directly printed on the first protective layer 218 in the recess 219 above the light emitting unit 217 by means of screen printing.

在一較佳實施例中,上述第二保護層220可以是有機材料,例如光固化(photo curable)型材料的環氧化樹脂(epoxy)或熱固化(thermal curable)型材料的含丙烯酸系高分子材料。值得注意的是,第二保護層220之頂部邊緣的距離係大於或等於第二保護220與第一保護層218接觸之底部邊緣的距離。由於第二保護220係形成於發光 單元上方的第一保護層218上,使得第二保護層220及第一保護層218的頂部表面會形成大體上平坦的表面。 In a preferred embodiment, the second protective layer 220 may be an organic material, such as an epoxidized or thermally curable type of acrylic curable polymer of a photo curable type material. material. It should be noted that the distance of the top edge of the second protective layer 220 is greater than or equal to the distance between the second protective 220 and the bottom edge of the first protective layer 218. Since the second protection 220 is formed in the light The first protective layer 218 over the cell such that the top surfaces of the second protective layer 220 and the first protective layer 218 form a substantially planar surface.

在第2G圖中,形成第三保護層222於第一基板200上,且接觸第一保護層218的表面。在一較佳實施例中,形成第三保護層222的方式可以是真空蒸鍍、濺鍍或電漿加強式化學氣相沈積法,以形成第三保護層222於第一保層218及第二保護層220的表面上。第三保護層222較佳之厚度範圍約介於0.1um至0.5um之間。形成第三保護層222的材質可以是與第一保護層218相似的材質,因此,並不再贅述。 In the 2GG, the third protective layer 222 is formed on the first substrate 200 and contacts the surface of the first protective layer 218. In a preferred embodiment, the third protective layer 222 may be formed by vacuum evaporation, sputtering or plasma enhanced chemical vapor deposition to form a third protective layer 222 on the first protective layer 218 and On the surface of the second protective layer 220. The third protective layer 222 preferably has a thickness ranging from about 0.1 um to about 0.5 um. The material forming the third protective layer 222 may be a material similar to that of the first protective layer 218, and thus will not be described again.

值得注意的是,第二保護層220與第三保護層222接觸的頂部表面係大於或等於第二保護層220與第一保護層218接觸的底部表面積。也就是說,第二保護層220與第三保護層222接觸之頂部邊緣間的距離(如第2G圖中的距離b)係大於或等於第二保護層220與第一保護層218接觸之底部邊緣間的距離(如第2G圖中的距離a),如第2G圖所示。再者,第二保護層220與第一保護層218接觸之底部邊緣間的距離係大於或等於有機電致發光層214與第一電極208接觸之底部邊緣間的距離(如第2G圖中的距離c),也就是說,第二保護層220的底部寬度(如第2G圖中的距離a)是大於或等於有機電致發光層214的底部寬度(如第2G圖中的距離c),如第2G圖所示。 It should be noted that the top surface of the second protective layer 220 in contact with the third protective layer 222 is greater than or equal to the bottom surface area of the second protective layer 220 in contact with the first protective layer 218. That is, the distance between the top edge of the second protective layer 220 in contact with the third protective layer 222 (such as the distance b in FIG. 2G) is greater than or equal to the bottom of the second protective layer 220 in contact with the first protective layer 218. The distance between the edges (such as the distance a in Figure 2G) is shown in Figure 2G. Furthermore, the distance between the bottom edge of the second protective layer 220 in contact with the first protective layer 218 is greater than or equal to the distance between the bottom edge of the organic electroluminescent layer 214 and the first electrode 208 (as in FIG. 2G). The distance c), that is, the bottom width of the second protective layer 220 (such as the distance a in the 2G diagram) is greater than or equal to the bottom width of the organic electroluminescent layer 214 (such as the distance c in the 2G diagram), As shown in Figure 2G.

可以了解的是,在本實施例中的第一保護層218、第二保護層220及第三保護層222較佳可以是透明的材 料,且第二電極216也可以是透明的導電材料。 It can be understood that the first protective layer 218, the second protective layer 220, and the third protective layer 222 in the embodiment may preferably be transparent materials. The second electrode 216 can also be a transparent conductive material.

接著,在真空或充滿氮氣或氬氣的環境,以封膠226將一第二基板228對應地設置於該第一基板200上,且形成一緩衝層224於該第一基板200與第二基板228之間,以完成根據本發明第一實施例之有機電致發光顯示裝置,如第2H圖所示。上述第二基板228可以是與第一基板200相似的材質,或可作為封裝板的塑膠薄膜,例如表面形成有防水層的塑膠薄膜。上述封膠226可以是例如環氧基的黏著劑。 Then, a second substrate 228 is correspondingly disposed on the first substrate 200 with a sealant 226 in a vacuum or filled with nitrogen or argon, and a buffer layer 224 is formed on the first substrate 200 and the second substrate. Between 228, the organic electroluminescent display device according to the first embodiment of the present invention is completed, as shown in FIG. 2H. The second substrate 228 may be a material similar to the first substrate 200 or a plastic film that can be used as a package board, such as a plastic film having a waterproof layer formed on the surface. The sealant 226 described above may be an adhesive such as an epoxy group.

當電流通過發光單元時,第二電極(也可稱為陰極)提供之電子與第一電極(也可稱為陽極)提供之電洞會在有機電致發光層結合,使得有機電致發光層會發射光線,且上述光線會穿過第一電極、彩色濾光層及第一基板至顯示裝置外,如第2H圖的箭頭所示。 When a current passes through the light emitting unit, the electrons provided by the second electrode (also referred to as the cathode) and the holes provided by the first electrode (also referred to as the anode) are combined in the organic electroluminescent layer, so that the organic electroluminescent layer Light is emitted, and the light passes through the first electrode, the color filter layer, and the first substrate to the outside of the display device, as indicated by the arrow in FIG. 2H.

根據本發明之第一實施例製作的有機電致發光顯示裝置,由於發光單元的上方形成包含無機材料的第一保護層218、包含有機材料的第二保護層220及包含無機材料的第三保護層222,以有效的隔離濕氣侵入發光單元中,進而可減少濕氣造成發光單元的電極氧化現象,且包含有機材料的第二保護層也會減少包含無機材料的第一保護層及第三保護層之間的應力。再者,第二保護層220僅形成於發光單元的上方,故也可以減少製作的成本。另外,由於僅在畫素區域內的發光單元上方形成第二保護層220,因此,並可在不增加顯示裝置厚度的前提 下,有效地增加隔離濕氣的能力,進而增加顯示裝置的使用壽命。 An organic electroluminescence display device fabricated according to the first embodiment of the present invention has a first protective layer 218 containing an inorganic material, a second protective layer 220 containing an organic material, and a third protective layer containing an inorganic material formed above the light emitting unit. The layer 222 injects moisture into the light-emitting unit with effective isolation, thereby reducing the oxidation of the electrode of the light-emitting unit caused by moisture, and the second protective layer containing the organic material also reduces the first protective layer and the third layer containing the inorganic material. The stress between the protective layers. Furthermore, since the second protective layer 220 is formed only above the light-emitting unit, the cost of fabrication can also be reduced. In addition, since the second protective layer 220 is formed only above the light emitting unit in the pixel region, the thickness of the display device can be increased without increasing the thickness of the display device. The utility model effectively increases the ability to isolate moisture, thereby increasing the service life of the display device.

第3A至第3E圖顯示根據本發明第二實施例之形成一種有機電致發光顯示裝置的剖面圖。在本發明第二實施例,有機電致發光顯示裝置中的彩色濾光層與作為開關的薄膜電晶體係分別設置於不同的基板上。 3A to 3E are cross-sectional views showing the formation of an organic electroluminescence display device according to a second embodiment of the present invention. In the second embodiment of the present invention, the color filter layer in the organic electroluminescence display device and the thin film transistor system as a switch are respectively disposed on different substrates.

在第3A圖中,形成一反射層306於具有多數個薄膜電晶體302的第一基板300上,且反射層306位於第一基板300之未形成薄膜電晶體302的部分上方。在形成反射層306之前,依序形成介電層303及平坦層304於該第一基板上,且覆蓋該些薄膜電體302。此外,第一基板300上方的薄膜電晶體302、介電層303及平坦層304可以是與上述第一實施例之薄膜電晶體、介電層及平坦層相似的形成方式及材質。在一較佳實施例中,形成上述反射層306的方式,可以是藉由例如濺鍍或蒸鍍的方式,形成例如是鋁的金屬層於第一基板300上方的平坦層304上。接著,圖案化上述金屬層,以形成反射層306於第一基板300之未形成薄膜電晶體302的部分上方。 In FIG. 3A, a reflective layer 306 is formed on the first substrate 300 having a plurality of thin film transistors 302, and the reflective layer 306 is located over portions of the first substrate 300 where the thin film transistor 302 is not formed. Before forming the reflective layer 306, a dielectric layer 303 and a planarization layer 304 are sequentially formed on the first substrate, and the thin film electrical devices 302 are covered. In addition, the thin film transistor 302, the dielectric layer 303, and the flat layer 304 above the first substrate 300 may be formed and formed similarly to the thin film transistor, the dielectric layer, and the flat layer of the first embodiment. In a preferred embodiment, the reflective layer 306 is formed by forming a metal layer such as aluminum on the flat layer 304 above the first substrate 300 by, for example, sputtering or evaporation. Next, the metal layer is patterned to form a reflective layer 306 over a portion of the first substrate 300 where the thin film transistor 302 is not formed.

又如第3A圖所示,形成一第一電極308於反射層306上,且穿過接觸孔307電性連接薄膜電晶體302的汲極。在一較佳實施例中,形成上述第一電極308的方式,可以是先使用一圖案光阻層(圖未顯示)遮蔽反射層306及部分平坦層304,接著,移除部分平坦層304及介電層 303,以形成暴露薄膜電晶體302之汲極的接觸孔。之後,在移除圖案光阻層後,形成例如銦錫氧化物的透明導電層於平坦層304上,且覆蓋反射層306,接著,圖案化透明導電層,使得形成第一電極308於反射層306上,且穿過接觸孔電性連接薄膜晶體302的汲極。第一電極308的材質及形成方式可以是與第一實施例中的第一電極相似,其中上述第一電極308也可以作為後續形成之發光單元的陽極。 As shown in FIG. 3A, a first electrode 308 is formed on the reflective layer 306, and is electrically connected to the drain of the thin film transistor 302 through the contact hole 307. In a preferred embodiment, the first electrode 308 is formed by first shielding a reflective layer 306 and a portion of the planarization layer 304 by using a patterned photoresist layer (not shown), and then removing a portion of the planarization layer 304 and Dielectric layer 303, to form a contact hole exposing the drain of the thin film transistor 302. Thereafter, after removing the patterned photoresist layer, a transparent conductive layer such as indium tin oxide is formed on the planar layer 304, and the reflective layer 306 is covered, and then the transparent conductive layer is patterned such that the first electrode 308 is formed on the reflective layer. 306, and electrically connected to the drain of the thin film crystal 302 through the contact hole. The material and formation manner of the first electrode 308 may be similar to the first electrode in the first embodiment, wherein the first electrode 308 may also serve as an anode of the subsequently formed light emitting unit.

在第3B圖中,形成一具有開口的畫素定義層310於第一基板300上,且上開口會暴露反射層306上方的第一電極308,以形成一畫素區域312。在一較佳實施例中,畫素區域312之頂部邊緣的距離係大於或等於畫素區域312與第一電極308接觸之底部邊緣的距離。上述畫素定義層310的材質及形成方法可以是與第一實施例中的畫素定義層相似,因此並不再贅述。 In FIG. 3B, a pixel defining layer 310 having an opening is formed on the first substrate 300, and the upper opening exposes the first electrode 308 over the reflective layer 306 to form a pixel region 312. In a preferred embodiment, the distance of the top edge of the pixel region 312 is greater than or equal to the distance of the pixel region 312 from the bottom edge of the first electrode 308. The material and formation method of the pixel defining layer 310 described above may be similar to the pixel defining layer in the first embodiment, and thus will not be described again.

如第3C圖所示,形成一有機電致發光層314於該畫素區域312之中,接著覆蓋一第二電極316於上述有機電致發光層314及畫素定義層310的上方。在畫素區域312內的第一電極308、有機電致發光層314及第二電極316構成一發光單元317,其中第一電極308及第二電極316分別作為發光單元317的陽極及陰極。上述有機電致發光層314及第二電極316的材質及形成方式可以是與第一實施例中的有機電致發光層及第二電極的材質及形成方法相似。 As shown in FIG. 3C, an organic electroluminescent layer 314 is formed in the pixel region 312, and then a second electrode 316 is overlying the organic electroluminescent layer 314 and the pixel defining layer 310. The first electrode 308, the organic electroluminescent layer 314 and the second electrode 316 in the pixel region 312 constitute a light emitting unit 317, wherein the first electrode 308 and the second electrode 316 respectively serve as an anode and a cathode of the light emitting unit 317. The material and formation method of the organic electroluminescent layer 314 and the second electrode 316 may be similar to those of the organic electroluminescent layer and the second electrode in the first embodiment.

接著,形成一第一保護層318於第二電極316上,之後再形成一第二保護層320於發光單元317上方的第一保護層318上,如第3D圖所示。在一較佳實施例中可以是藉由真空蒸鍍、濺鍍或電漿加強式化學氣相沈積法,形成例如是無機材質的第一保護層318於第二電極316上,且第一保護層316的材質可以是與第一實施例中之第一保護層的材質相似。第一保護層318較佳厚度範圍介於0.1um至0.5um之間。 Next, a first protective layer 318 is formed on the second electrode 316, and then a second protective layer 320 is formed on the first protective layer 318 above the light emitting unit 317, as shown in FIG. 3D. In a preferred embodiment, a first protective layer 318, such as an inorganic material, may be formed on the second electrode 316 by vacuum evaporation, sputtering, or plasma enhanced chemical vapor deposition, and the first protection may be performed. The material of the layer 316 may be similar to the material of the first protective layer in the first embodiment. The first protective layer 318 preferably has a thickness ranging from 0.1 um to 0.5 um.

在一較佳實施例中,形成例如是有機材質之第二保護層320的方式可以是藉由噴墨印刷(ink-jet printing;IJP)的方式,將第二保護層320噴塗於發光單元317上方的第一保護層318上。接著,進行例如熱固化或光固化的固化步驟,以形成第二保護層320於發光單元317上方的凹槽319之中,其中固化步驟係由第二保護層320的材料決定,例如第二保護層320是熱固性樹脂(thermal resin)時,可藉由熱處理步驟,固化第二保護層320。而第二保護層320例如是感光性材料時,可藉由紫外光或可見光固化第二保護層320。在一較佳實施例中,第二保護層320於進行固化步驟前的黏度較佳介於1浬泊(cp)至1000浬泊(cp)之間。在另一實施例中,也可以是藉由網版印刷(screen printing)的方式,將第二保護層320直接印製於發光單元317上方凹槽319之中的第一保護層318上,以容置第二保護層320於凹槽319之中。值得注意的是,由於第二保護層320係容置於凹槽319之中, 使得第二保護層320的上表面與第一保護層318的上表面係大體上形成一平面。上述第二保護層320的材質較佳可以是與第一實施例中的第二保護層的材質相似,故在此不再贅述。 In a preferred embodiment, the second protective layer 320 is formed of, for example, an organic material. The second protective layer 320 may be sprayed on the light emitting unit 317 by inkjet printing (IJP). Above the first protective layer 318. Next, a curing step such as thermal curing or photocuring is performed to form the second protective layer 320 in the recess 319 above the light emitting unit 317, wherein the curing step is determined by the material of the second protective layer 320, for example, the second protection When the layer 320 is a thermal resin, the second protective layer 320 may be cured by a heat treatment step. When the second protective layer 320 is, for example, a photosensitive material, the second protective layer 320 can be cured by ultraviolet light or visible light. In a preferred embodiment, the viscosity of the second protective layer 320 before the curing step is preferably between 1 kPa and 1000 kPa. In another embodiment, the second protective layer 320 may be directly printed on the first protective layer 318 in the recess 319 above the light emitting unit 317 by means of screen printing. The second protective layer 320 is received in the recess 319. It is worth noting that since the second protective layer 320 is housed in the recess 319, The upper surface of the second protective layer 320 and the upper surface of the first protective layer 318 are substantially formed into a plane. The material of the second protective layer 320 is preferably similar to that of the second protective layer in the first embodiment, and therefore will not be described herein.

在第3E圖中,形成例如是無機材料的第三保護層322於第一基板300上,且接觸第一保護層318及第二保護層320的表面。在一較佳實施例中,第三保護層322較佳之厚度範圍約介於0.1um至0.5um之間。第三保護層322的材質及形成方式可以是與第一實施例中的第三保護層的材質及形成方式相似。 In FIG. 3E, a third protective layer 322, such as an inorganic material, is formed on the first substrate 300 and contacts the surfaces of the first protective layer 318 and the second protective layer 320. In a preferred embodiment, the third protective layer 322 preferably has a thickness ranging from about 0.1 um to about 0.5 um. The material and formation manner of the third protective layer 322 may be similar to the material and formation of the third protective layer in the first embodiment.

值得注意的是,第二保護層320與第三保護層322接觸的頂部表面係大於或等於第二保護層320與第一保護層318接觸的底部表面積。也就是說,第二保護層320與第三保護層322接觸之頂部邊緣間的距離(如第3E圖中的距離b)係大於或等於第二保護層320與第一保護層318之底頂邊緣間的距離(如第3E圖中的距離a),如第3E圖所示。再者,第二保護層320與第一保護層318接觸之底部邊緣間的距離係大於或等於有機電致發光層314與第一電極308接觸之底部邊緣間的距離(如第3E圖中的距離c),也就是說,第二保護層320的底部寬度(如第3E圖中的距離a)是大於或等於有機電致發光層314的底部寬度(如第3E圖中的距離c),如第3E圖所示。 It should be noted that the top surface of the second protective layer 320 in contact with the third protective layer 322 is greater than or equal to the bottom surface area of the second protective layer 320 in contact with the first protective layer 318. That is, the distance between the top edge of the second protective layer 320 and the third protective layer 322 (such as the distance b in FIG. 3E) is greater than or equal to the bottom of the second protective layer 320 and the first protective layer 318. The distance between the edges (such as the distance a in Figure 3E) is shown in Figure 3E. Moreover, the distance between the bottom edge of the second protective layer 320 and the first protective layer 318 is greater than or equal to the distance between the bottom edge of the organic electroluminescent layer 314 and the first electrode 308 (as in FIG. 3E). The distance c), that is, the bottom width of the second protective layer 320 (such as the distance a in FIG. 3E) is greater than or equal to the bottom width of the organic electroluminescent layer 314 (as in the distance c in FIG. 3E), As shown in Figure 3E.

接著,在真空或充滿氮氣或氬氣的環境,以封膠將一具有彩色濾光層的第二基板對應地設置於該第一基板 300上,且形成一緩衝層於該第一基板300與第二基板之間,以完成根據本發明第二實施例之有機電致發光顯示裝置。上述第二基板可以是與第一基板300相似的材質或表面形成有防水層的塑膠薄膜。上述封膠可以是例如環氧基的黏著劑。上述彩色濾光層係以遮光層隔離,且對應地設置於畫素區域內之發光單元的上方。上述彩色濾光層的材質及形成方式可以是與第一實施例中之彩色濾光層的材質及形成方式相似,也可以是習知任何可形成彩色濾光層的方式及材質。 Next, a second substrate having a color filter layer is correspondingly disposed on the first substrate in a vacuum or a place filled with nitrogen or argon. 300, and a buffer layer is formed between the first substrate 300 and the second substrate to complete the organic electroluminescent display device according to the second embodiment of the present invention. The second substrate may be a material similar to the first substrate 300 or a plastic film having a waterproof layer formed on the surface. The above sealant may be an adhesive such as an epoxy group. The color filter layer is isolated by a light shielding layer and correspondingly disposed above the light emitting unit in the pixel region. The material and formation method of the color filter layer may be similar to the material and formation method of the color filter layer in the first embodiment, and may be any conventional manner and material for forming a color filter layer.

當電流通過發光單元時,第二電極(陰極)提供之電子與第一電極(陽極)提供之電洞會在有機電致發光層結合,使得有機電致發光層會發射光線,且上述光線會穿過第二電極316、彩色濾光層及第二基板至顯示裝置外。而,部分穿過第一電極的光線也會經由反射層反射後,再經由上述路徑至顯示裝置外。 When the current passes through the light emitting unit, the electrons provided by the second electrode (cathode) and the holes provided by the first electrode (anode) are combined in the organic electroluminescent layer, so that the organic electroluminescent layer emits light, and the light will be The second electrode 316, the color filter layer and the second substrate are passed through the display device. However, the light that partially passes through the first electrode is also reflected by the reflective layer, and then passes through the above path to the outside of the display device.

根據本發明之第二實施例製作的有機電致發光顯示裝置,由於在發光單元的上方形成包含無機材料的第一保護層、包含有機材料的第二保護層及包含無機材料的第三保護層,以有效的隔離濕氣侵入發光單元中,進而可減少濕氣造成發光單元的電極氧化現象,且包含有機材料的第二保護層也會減少包含無機材料的第一保護層及第三保護層之間的應力。再者,第二保護層僅形成於發光單元的上方,故並不會造成材料的浪費,而導致製作成本的增加。另外,由於僅在畫素區域內形成第二保 護層,因此,並可在不增加顯示裝置厚度的前提下,有效地增加隔離濕氣的能力,進而增加顯示裝置的使用壽命。 An organic electroluminescence display device fabricated according to a second embodiment of the present invention, wherein a first protective layer containing an inorganic material, a second protective layer containing an organic material, and a third protective layer containing an inorganic material are formed over the light emitting unit Injecting moisture into the light-emitting unit with effective isolation, thereby reducing the oxidation of the electrode of the light-emitting unit caused by moisture, and the second protective layer containing the organic material also reduces the first protective layer and the third protective layer containing the inorganic material. The stress between. Moreover, the second protective layer is formed only above the light emitting unit, so that no waste of material is caused, and the manufacturing cost is increased. In addition, since the second guarantee is formed only in the pixel area The protective layer, therefore, can effectively increase the ability to isolate moisture without increasing the thickness of the display device, thereby increasing the service life of the display device.

值得注意的是,在第二實施例中之第一保護層、第二保護層及第三保護層較佳之材質可以是透明材料,且第二電極較佳也可以是透明導電材料。 It should be noted that the first protective layer, the second protective layer and the third protective layer in the second embodiment may be made of a transparent material, and the second electrode may preferably be a transparent conductive material.

第4圖係顯示本發明之第三實施例之有機電致發光顯示裝置的剖面圖。本實施例與第二實施例相較,最大的不同在於以彩色光阻材料作為第二保護層,因此,相似的元件及步驟可以參閱前述,在此並不在贅述。 Figure 4 is a cross-sectional view showing an organic electroluminescence display device of a third embodiment of the present invention. The maximum difference between this embodiment and the second embodiment is that a color photoresist material is used as the second protective layer. Therefore, similar components and steps can be referred to the foregoing, and are not described herein.

在第4圖中,在完成包含第一電極410、有機電致發光層414及第二電極416之發光單元417的製作後,接著,形成一第一保護層418於第二電極416的上方。上述第一保護層418的形成方式及材質可與上述實施例相似。之後,形成一有機彩色光阻材料的第二保護層420於發光單元417的上方,以作為一彩色濾光層。上述第二保護層420的形成方式當然也可以是與上述實施例中的噴墨印刷或網版印刷相同。 In FIG. 4, after the fabrication of the light-emitting unit 417 including the first electrode 410, the organic electroluminescent layer 414, and the second electrode 416 is completed, a first protective layer 418 is formed over the second electrode 416. The forming manner and material of the first protective layer 418 may be similar to the above embodiment. Thereafter, a second protective layer 420 of an organic color photoresist material is formed over the light emitting unit 417 to serve as a color filter layer. The manner in which the second protective layer 420 is formed may of course be the same as the inkjet printing or screen printing in the above embodiment.

在形成第二保護層420之後,接著,覆蓋一第三保護層422於第二保護層420上方,且第三保護層422直接與第一保護層418接觸。最後,利用封膠426將第二基板428封合於第一基板400上方,且填充緩衝層424於第一基板400及第二基板428之間,如第4圖所示。值得注意的是,在本實施例中,第二基板428的上方可 以不需另外形成彩色濾光層及遮光層。因此,在第三實施例中不但可減少製程步驟,而且也可以降低材料的使用成本。再者,由於第二保護層420係有機光阻材料,使得可減少包含無機材料的第一保護層及第三保護層之間的應力。同樣地,在第一實施例中的第二保護層也可以使用有機彩色光阻材料作為保護層,以降低製作成本。雖然,在本說明書中並未揭露,但在不脫離本發明的精神下,習知該領域者當可衍生出許多變化的實施例,其仍應屬本發明的專利範圍。 After the second protective layer 420 is formed, a third protective layer 422 is overlaid over the second protective layer 420, and the third protective layer 422 is in direct contact with the first protective layer 418. Finally, the second substrate 428 is sealed over the first substrate 400 by the encapsulant 426, and the buffer layer 424 is filled between the first substrate 400 and the second substrate 428, as shown in FIG. It should be noted that in this embodiment, the upper surface of the second substrate 428 can be Therefore, it is not necessary to separately form a color filter layer and a light shielding layer. Therefore, in the third embodiment, not only the process steps can be reduced, but also the use cost of the material can be reduced. Furthermore, since the second protective layer 420 is an organic photoresist material, the stress between the first protective layer and the third protective layer containing the inorganic material can be reduced. Similarly, the second protective layer in the first embodiment may also use an organic color photoresist material as a protective layer to reduce the manufacturing cost. Although not disclosed in the present specification, it is to be understood that those skilled in the art can devise many variations, which are still within the scope of the invention.

雖然本發明已以較佳實施例揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作此許之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定為準。 Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the invention, and it is to be understood that the present invention may be modified and retouched without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

10‧‧‧第一基板 10‧‧‧First substrate

12‧‧‧第一電極 12‧‧‧First electrode

14‧‧‧有機電致發光層 14‧‧‧Organic electroluminescent layer

16‧‧‧第二電極 16‧‧‧second electrode

18‧‧‧保護層 18‧‧‧Protective layer

20‧‧‧第二基板 20‧‧‧second substrate

200‧‧‧第一基板 200‧‧‧First substrate

202‧‧‧薄膜電晶體 202‧‧‧film transistor

2021‧‧‧閘極 2021‧‧‧ gate

2023‧‧‧汲極 2023‧‧‧汲polar

2025‧‧‧源極 2025‧‧‧ source

203‧‧‧介電層 203‧‧‧ dielectric layer

204‧‧‧彩色濾光層 204‧‧‧Color filter layer

206‧‧‧平坦層 206‧‧‧flat layer

207‧‧‧接觸孔 207‧‧‧Contact hole

208‧‧‧第一電極 208‧‧‧first electrode

209‧‧‧開口 209‧‧‧ openings

210‧‧‧畫素定義層 210‧‧‧ pixel definition layer

212‧‧‧畫素區域 212‧‧‧ pixel area

214‧‧‧有機電致發光層 214‧‧‧Organic electroluminescent layer

216‧‧‧第二電極 216‧‧‧second electrode

217‧‧‧發光單元 217‧‧‧Lighting unit

218‧‧‧第一保護層 218‧‧‧ first protective layer

219‧‧‧凹槽 219‧‧‧ Groove

220‧‧‧第二保護層 220‧‧‧Second protective layer

222‧‧‧第三保護層 222‧‧‧ third protective layer

224‧‧‧緩衝層 224‧‧‧buffer layer

226‧‧‧封膠 226‧‧‧Packing

228‧‧‧第二基板 228‧‧‧second substrate

300‧‧‧第一基板 300‧‧‧First substrate

302‧‧‧薄膜電晶體 302‧‧‧film transistor

303‧‧‧介電層 303‧‧‧ dielectric layer

304‧‧‧平坦層 304‧‧‧flat layer

306‧‧‧反射層 306‧‧‧reflective layer

307‧‧‧接觸孔 307‧‧‧Contact hole

308‧‧‧第一電極 308‧‧‧First electrode

309‧‧‧開口 309‧‧‧ openings

310‧‧‧畫素定義層 310‧‧‧ pixel definition layer

312‧‧‧畫素區域 312‧‧‧ pixel area

314‧‧‧有機電致發光層 314‧‧‧Organic electroluminescent layer

316‧‧‧第二電極 316‧‧‧second electrode

317‧‧‧發光單元 317‧‧‧Lighting unit

318‧‧‧第一保護層 318‧‧‧ first protective layer

319‧‧‧凹槽 319‧‧‧ Groove

320‧‧‧第二保護層 320‧‧‧Second protective layer

322‧‧‧第三保護層 322‧‧‧ third protective layer

400‧‧‧第一基板 400‧‧‧First substrate

410‧‧‧第一電極 410‧‧‧First electrode

414‧‧‧有機電致發光層 414‧‧‧Organic electroluminescent layer

416‧‧‧第二電極 416‧‧‧second electrode

417‧‧‧發光單元 417‧‧‧Lighting unit

418‧‧‧第一保護層 418‧‧‧First protective layer

420‧‧‧第二保護層 420‧‧‧Second protective layer

422‧‧‧第三保護層 422‧‧‧ third protective layer

424‧‧‧緩衝層 424‧‧‧buffer layer

428‧‧‧第二基板 428‧‧‧second substrate

第1圖顯示習知之一種有機電致發光顯示裝置;第2A至第2H圖顯示根據本發明第一實施例之有機電致發光顯示裝置之製作方法的剖面圖;第3A至第3E圖顯示根據本發明第二實施例之有機電致發光顯示裝置之製作方法的剖面圖;以及第4圖顯示根據本發明第三實施例之有機電致發光顯示裝置的剖面圖。 1 is a view showing a conventional organic electroluminescence display device; FIGS. 2A to 2H are cross-sectional views showing a method of fabricating an organic electroluminescence display device according to a first embodiment of the present invention; FIGS. 3A to 3E are diagrams showing A cross-sectional view showing a method of fabricating an organic electroluminescence display device according to a second embodiment of the present invention; and a fourth view showing a cross-sectional view of an organic electroluminescence display device according to a third embodiment of the present invention.

200‧‧‧第一基板 200‧‧‧First substrate

202‧‧‧薄膜電晶體 202‧‧‧film transistor

208‧‧‧第一電極 208‧‧‧first electrode

214‧‧‧有機電致發光層 214‧‧‧Organic electroluminescent layer

216‧‧‧第二電極 216‧‧‧second electrode

218‧‧‧第一保護層 218‧‧‧ first protective layer

220‧‧‧第二保護層 220‧‧‧Second protective layer

222‧‧‧第三保護層 222‧‧‧ third protective layer

224‧‧‧緩衝層 224‧‧‧buffer layer

226‧‧‧封膠 226‧‧‧Packing

228‧‧‧第二基板 228‧‧‧second substrate

Claims (17)

一種有機電致發光顯示裝置的製作方法,包括:提供具有至少一薄膜電晶體的一第一基板;形成一發光單元於該第一基板上,且電性連接該薄膜電晶體;形成一第一保護層於該發光單元上;形成一第二保護層於該第一保護層的上方,其中該第一保護層具有一位於該發光單元上方的凹槽,且該第二保護層設置於該凹槽中,該第二保護層的上表面與該第一保護層的上表面共平面;以及形成一第三保護層於該第二保護層上,且接觸該第一保護層,其中該第二保護層與該第三保護層接觸的頂部表面積係大於或等於該第二保護層與該第一保護層接觸的底部表面積。 A method for fabricating an organic electroluminescent display device, comprising: providing a first substrate having at least one thin film transistor; forming an illumination unit on the first substrate, and electrically connecting the thin film transistor; forming a first a protective layer is disposed on the light emitting unit; a second protective layer is formed on the first protective layer, wherein the first protective layer has a recess above the light emitting unit, and the second protective layer is disposed on the concave layer The upper surface of the second protective layer is coplanar with the upper surface of the first protective layer; and a third protective layer is formed on the second protective layer and contacts the first protective layer, wherein the second The top surface area of the protective layer in contact with the third protective layer is greater than or equal to the bottom surface area of the second protective layer in contact with the first protective layer. 如申請專利範圍第1項所述之有機電致發光顯示裝置的製作方法,更包括形成具有一畫素區域的一畫素定義層於該第一基板上,且該畫素區域容置一有機電致發光層。 The method for fabricating an organic electroluminescence display device according to claim 1, further comprising forming a pixel defining layer having a pixel region on the first substrate, and the pixel region is accommodated Electroluminescent layer. 如申請專利範圍第1項所述之有機電致發光顯示裝置的製作方法,其中形成該第二保護層係由噴墨印刷或網版印刷的方式完成。 The method for fabricating an organic electroluminescence display device according to claim 1, wherein the forming the second protective layer is performed by inkjet printing or screen printing. 如申請專利範圍第3項所述之有機電致發光顯示裝置的製作方法,更包括在形成該第二保護層之後,進行一固化步驟。 The method for fabricating an organic electroluminescence display device according to claim 3, further comprising performing a curing step after forming the second protective layer. 如申請專利範圍第4項所述之有機電致發光顯示裝置的製作方法,其中在該固化步驟之前,該第二保護層的黏度範圍介於1厘泊至1000厘泊之間。 The method for fabricating an organic electroluminescence display device according to claim 4, wherein the viscosity of the second protective layer ranges from 1 centipoise to 1000 centipoise before the curing step. 如申請專利範圍第2項所述之有機電致發光顯示裝置的製作方法,更包括對應地形成一彩色濾光層於該畫素區域下方的該第一基板上,且封合一第二基板於該第一基板之表面形成有該發光單元的上方。 The method for fabricating an organic electroluminescence display device according to claim 2, further comprising: correspondingly forming a color filter layer on the first substrate below the pixel region, and sealing a second substrate An upper surface of the light emitting unit is formed on a surface of the first substrate. 如申請專利範圍第2項所述之有機電致發光顯示裝置的製作方法,更包括形成一反射層於該畫素區域下方的該第一基板上,且封合具有一彩色濾光層之一第二基板於該第一基板上,其中該彩色濾光層對應於該反射層。 The method for fabricating an organic electroluminescence display device according to claim 2, further comprising forming a reflective layer on the first substrate below the pixel region, and sealing one of the color filter layers The second substrate is on the first substrate, wherein the color filter layer corresponds to the reflective layer. 一種有機電致發光顯示裝置,包含:一具有至少一薄膜電晶體的第一基板;一發光單元,形成於該第一基板上;一第一保護層,形成於該發光單元的上方;一第二保護層,形成於該第一保護層上,其中該第一保護層具有一位於該發光單元上方的凹槽,且該第二保護層設置於該凹槽中,該第二保護層的上表面與該第一保護層的上表面共平面;以及一第三保護層,形成於該第二保護層上,且接觸該第一保護層,其中該第二保護層與該第三保護層接觸的頂部表面積係大於或等於該第二保護層與該第一保護層接觸的底部表面積。 An organic electroluminescence display device comprising: a first substrate having at least one thin film transistor; a light emitting unit formed on the first substrate; a first protective layer formed on the light emitting unit; a second protective layer is formed on the first protective layer, wherein the first protective layer has a recess above the light emitting unit, and the second protective layer is disposed in the recess, the second protective layer The surface is coplanar with the upper surface of the first protective layer; and a third protective layer is formed on the second protective layer and contacts the first protective layer, wherein the second protective layer is in contact with the third protective layer The top surface area is greater than or equal to the bottom surface area of the second protective layer in contact with the first protective layer. 如申請專利範圍第8項所述之有機電致發光顯示裝置,其中該第一保護層及該第三保護層包含氧化矽、氧化鋁、二氧化鈦、氧化銦、氧化錫、氧化銦錫、氮化鋁、氮化矽、碳化矽或氮氧化矽。 The organic electroluminescent display device of claim 8, wherein the first protective layer and the third protective layer comprise cerium oxide, aluminum oxide, titanium dioxide, indium oxide, tin oxide, indium tin oxide, and nitriding. Aluminum, tantalum nitride, niobium carbide or niobium oxynitride. 如申請專利範圍第8項所述之有機電致發光顯示裝置,其中該第二保護層包含有機材料。 The organic electroluminescent display device of claim 8, wherein the second protective layer comprises an organic material. 如申請專利範圍第8項所述之有機電致發光顯示裝置,其中該第二保護層包含環氧樹脂或含丙烯酸高分子材料。 The organic electroluminescent display device of claim 8, wherein the second protective layer comprises an epoxy resin or an acrylic polymer-containing material. 如申請專利範圍第8項所述之有機電致發光顯示裝置,其中該第二保護層包含彩色光阻。 The organic electroluminescent display device of claim 8, wherein the second protective layer comprises a color photoresist. 如申請專利範圍第8項所述之有機電致發光顯示裝置,其中該第二保護層與該第三保護層接觸之頂部邊緣間的距離係大於或等於該第二保護層與該第一保護層接觸之底部邊緣間的距離。 The organic electroluminescent display device of claim 8, wherein a distance between the top edge of the second protective layer and the third protective layer is greater than or equal to the second protective layer and the first protection The distance between the bottom edges of the layer contacts. 如申請專利範圍第8項所述之有機電致發光顯示裝置,更包括一具有一畫素區域的畫素定義層,形成於該第一基板上,且該畫素區域容置一有機電致發光層。 The organic electroluminescent display device of claim 8, further comprising a pixel defining layer having a pixel region formed on the first substrate, wherein the pixel region houses an organic electro-optical Light-emitting layer. 如申請專利範圍第14項所述之有機電致發光顯示裝置,其中該第二保護層的底部寬度係大於或等於該有機電致發光層的底部寬度。 The organic electroluminescent display device of claim 14, wherein the second protective layer has a bottom width greater than or equal to a bottom width of the organic electroluminescent layer. 如申請專利範圍第14項所述之有機電致發光顯示裝置,更包括:一彩色濾光層,形成於該畫素區域底下的該第一基 板上;以及一第二基板,封合於該第一基板之形成有該發光單元的表面上方。 The organic electroluminescent display device of claim 14, further comprising: a color filter layer, the first base formed under the pixel region And a second substrate sealed over the surface of the first substrate on which the light emitting unit is formed. 如申請專利範圍第14項所述之有機電致發光顯示裝置,更包括:一第二基板,對應地設置於該第一基板之形成有該發光單元的表面上;一彩色濾光層,形成於該第二基板上,且對應於該畫素區域;以及一反射層,設置於該畫素區域底下的該第一基板上。 The organic electroluminescent display device of claim 14, further comprising: a second substrate correspondingly disposed on a surface of the first substrate on which the light emitting unit is formed; a color filter layer formed And corresponding to the pixel region on the second substrate; and a reflective layer disposed on the first substrate under the pixel region.
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