TWI380009B - Optical inspection apparatus and method - Google Patents

Description

1380009 IX. Description of the Invention: [Technical Field] The present invention relates to an optical detecting apparatus and method, and more particularly to an optical detecting apparatus and method for color unevenness detection of color unevenness. [Prior Art] The phenomenon that the color filters are uneven in color is in the same light source and the same background color

10 15

20 The picture is caused by different color differences, and the causes are very wide. The most important reason is that the color filter is poorly coated and the light refraction angle is different. Therefore, different angles of view respond differently to color. . At present, the industry's detection of color; f is still a method of taking people's health sampling test's existence has the following shortcomings: 1. Quality control is not easy: due to its use of people 1 sampling method can not be detected one by one, and must be in different angles of wealth (four) degrees Under the face, it is judged by the visual sense of the person that not only the different people touch the result, but also the Saki method is easy to see the big I missed the inspection. 2. The secret t-method is used for the analysis of the process: the previous effective record of the enchantment method = the sign of the temple and the (4) '瑕 _ characteristics and the relationship between the process and the effective collection of the I method' is not helpful for the process improvement. : Due to uneven coating, it is necessary to measure the light for different wavelengths. 3. At present, the detection rate of the inspection machine is higher than the special angle to detect, and different colors will have different reactions. Therefore, 'requires-set of good substrate color unevenness, substrate color unevenness, fiber tearing and benefits to improve 5 < S ) 1380009 # l · * 5

The lack of skills, the job is the reason, the applicant is carefully tested and researched, and a spirit of perseverance, finally conceived the case "optical testing equipment and methods", the following is a brief description of the case. SUMMARY OF THE INVENTION An object of the present invention is to provide an optical detecting apparatus which can improve the accuracy and benefit of substrate defect detection by optical detection of multiple viewing angles and projected images of light of different wavelengths, and further improve process yield and reduce production cost. According to the concept of the present invention, an optical detecting apparatus includes a light source, a reflective element, and an image capturing element; wherein the light source projects a light to a test object; the reflective element has at least two reflective surfaces For reflecting the light passing through the object to be tested; and an image capturing component for receiving the reflected light to form a projected image. Preferably, the optical detecting device of the present invention, wherein the reflecting member is a multi-faceted file. Preferably, the optical detecting apparatus provided by the present invention, wherein the reflective element is rotatable to reflect light of different incident angles to the image extracting element, the incident angle ranges from 〇 to 180 degrees, but not Includes twist and 18 degrees. Preferably, the optical detecting device provided by the present invention, wherein the light passes through the object to be tested in the form of transmission, refraction, reflection, or a combination thereof. Preferably, the optical detecting device provided by the present invention further includes an optical filter component, a carrier component, a mask component, and an analysis unit, wherein the optical filter component is used to obtain a human light beam of a specific wavelength shed; The carrying component is configured to carry the standby component; the fresh component is configured to receive a projected image of a 20 1380009 • L· specific angle and filter out the projected image of other angles; the analyzing unit is configured to analyze the image The image captures the projected image captured by the component to obtain the fatigue information including the object to be tested. Preferably, the optical detecting apparatus provided by the present invention, wherein the specific angle 5 is 90 degrees. Preferably, the optical detecting device provided by the present invention, wherein the light source is a multi-angle incident light source for generating the light incident on the object to be tested at multiple angles. Preferably, the optical detecting device provided by the present invention, wherein the object to be tested can be a color filter, a thin film solar panel, a TFT-LCD, an STN-LCD, a 10 LTPS-LCD, an OLED, a PLED, a PDP, or a SED , Flexible Display and E-paper; and the wavelength of the light is between 300 and 13 nanometers. Preferably, the optical detecting device provided by the present invention, wherein when the object to be tested is a blue filter, the wavelength of the light is 670 to 693 nm; and the object to be tested is a red filter. When the film is taken, the wavelength of the light is 460~493 奈 v 15 meters, and when the object to be tested is a green filter, the wavelength of the light is 580~600 nm. The image capturing component further includes an analysis. Unit for analyzing the color unevenness information of the color filter. According to the concept of the present invention, another optical detecting device is proposed for detecting color unevenness information of a light-passing sheet, comprising a light source and an image capturing component, wherein the light source projects a light to the filter; The image capturing component receives the light passing through the filter and generates an image according to a wavelength segment of the light. Where: when the filter is a blue filter, the wavelength segment is a wavelength 670~693 nm; when the filter is a red filter, the wavelength segment is a wavelength of 460 to 493 nm; when the filter is a green filter, the wavelength region 7 is a wavelength of 580 ~ 600 nm. Preferably, the optical detecting apparatus provided by the present invention, wherein the light passes through the filter for transmission, refraction, reflection, or a combination thereof. Preferably, the optical detecting device provided by the present invention, wherein the light source is an incident light source for generating an incident light of the object to be tested at a plurality of angles, the optical detecting device further comprising an optical filter component and a reflection An element, a carrier element, an analysis unit, a display unit and a storage unit, wherein the optical filter element is configured to obtain a specific wavelength section of the light; the reflective element has at least two reflective surfaces for reflecting through the filter The light beam of the light sheet; the carrier element can carry the filter; the mask element can obtain a portion of the light and the image capturing element at a specific angle, and the other angles are excluded; the analysis unit analyzes The image capture component _take the image to obtain the information of the color unevenness including the color of the filter, and the + material is also used to increase the accuracy of the substrate color unevenness detection and Benefits; the age of the unit can be taken from the image taken by the component 'missing unit can bribe the county and the results of the analysis. Preferably, the optical detecting apparatus of the present invention, wherein the reflecting element is a multi-faceted cymbal and rotating the reflecting element to reflect the light of different incident angles to the image taking element. Preferably, the optical detecting apparatus of the present invention, wherein the specific angle is 90 degrees. Preferably, the optical detecting device provided by the present invention has a towel: when the filter is - blue; * when the light is transmitted, the image is transmitted through the blue filter to generate 'when When the light sheet is a red light sheet, the image is generated by the light being exhausted by the red light; when the light sheet is a green filter, the image is 8 1380009 • t ,

10 15 20 The image is produced by reflecting the green #光片. According to the concept of the present invention, an optical detecting method is proposed, which comprises the following steps: (4) projecting a light to a test object; (b) reflecting the parent of the (4) object with a multi-reflecting surface element, and obtaining - Cast (four) image; to analyze the projected image. Preferably, in the wire inspection method provided by the present invention, the towel step comprises: reflecting the secret by the "first" reflection surface of the reflective surface element to obtain [the first angle passes through the object to be tested - the first a portion of the second projected image formed by the light; the first-rotation angle rotates the multi-reflecting surface element, and the light is reflected by the first reflecting surface to obtain the light passing through the first portion at H degree Shape-second projection miscellaneous; shifting-object-fixing distance; rotating the multi-reflecting surface element at a second rotation angle greater than the first-rotation angle, reflecting the light with the second reflecting surface of the neo-surface element And obtaining a third projected image formed by the light passing through the second portion of the object to be tested at the first angle; and combining the first projected image and the third projected image. Preferably, the optical detection method provided by the present invention, wherein the light is in the form of the transmission, the reflection, the reflection, or the combination thereof. Preferably, the optical detection method provided by the present invention, wherein the object to be tested is a filter, and the wavelength of the light is between 460 and 693 nm, wherein: when the filter month is a blue In the case of a filter, the light is taken at a wavelength of 67 〇 to 693 nm, and the projected image is generated by transmitting the light to the blue filter; when the filter is a red filter, the light is The wavelength is 460~493 nm, and the projected image is generated by transmitting the light to the red filter; when the filter is a green filter, the wavelength of the light is 58 〇~6〇 () Nai 9 1380009 • · .. 5 10 15

20 m' and the projected image is produced by the light reflecting the green calender. Preferably, the optical detection method provided by the present invention, wherein the step (c) comprises: determining whether the object to be tested has a madness; determining a process stage in which the fatigue occurs; determining geometric characteristics and probability of occurrence of the flaw ; and store the above judgment results. According to the concept of the present invention, another optical detecting method is proposed, which comprises the following steps: (A) projecting-light to-lighting sheet; (8) obtaining the specified band of the silk according to the type of the filter, When the light sheet is a blue color filter, the specified wavelength band is a wavelength of 670 to 693 nm; when the light passing sheet is a two red filter, the light beam is 'the specified wavelength band is a wavelength of 46 G to 493 nm; and when When the filter is a green calender, the specified wavelength band is a wavelength of 58 〇 to _ nanometer; (C) a projection image formed by the specified wavelength band of the light passing through the filter and the light sheet; and D) Analyze the projected image. Preferably, the optical detection method provided by the present invention transmits the light through the Cheng Guang film in the manner of transmitting, filtering, reflecting, or the like. Preferably, the wire inspection method provided by the present invention, wherein the step (C) reflects the light passing through the Weiguang sheet; and rotates the basis of the acquisition of (4) Xiaodu Jingwei Wei# The inventive concept proposes another sub-lighting step: a learning detection method comprising: projecting a light to (A) to a test object; (B) reflecting the light through the reflective element through the ten object __^= ^ 10 < S ) (C) after rotating the reflective element at a first rotation angle, reflecting the light to obtain a second projected image formed by the light passing through the first portion at a second angle; (D) Moving the object to be tested by a fixed distance; and (E) rotating the reflecting element at a second rotation angle, reflecting the light to obtain the light passing through the second portion of the object to be tested at the first angle One of the third projected images. Preferably, the optical detection method provided by the present invention further includes: (F) combining the first projected image and the third projected image. Preferably, the optical detection method provided by the present invention, wherein the light passes through the filter in a manner of transmitting, refracting, reflecting, or a combination thereof, and the second rotation angle is greater than the first rotation. angle. The optical detection apparatus and method of the present invention will be further understood by the following embodiments and illustrations: [Embodiment] The technical means of this month will be described in detail below, and the purpose of the present invention is believed. =_ point, when you can get an in-depth and specific understanding, but the following examples, drawing to provide reference and say, and _ to limit the invention first, please refer to the _ map, which is the silk detection of (4) The first = Γ source, 19: a reflective element 18, a carrier element and a: 16, a light-emitting element 13, a receiving sensing element 17 and a shirt-like capturing element 12. For the purpose of optical detection, the object to be tested (4) is placed on the carrier element 15, and the first light source 191 projects a light un to the object to be tested U and penetrates the object to be tested 14, which penetrates the light of the object to be tested. The 〇2 is reflected by the reflective element 18, and the reflected light 103 passes through a masking element 16 and a light absorbing element 13 and is received by the array receiving sensing element 17 and/or the image capturing element 12 and generates an image. The image of the detector 14 or other material or surface features is obtained by analyzing the image. The mask element 16 is configured to screen the incident light 104 at a specific angle to the array receiving sensing element 17 and/or the image capturing element 12, and generally adopts a vertical angle to screen out incident light of other angles; The filter element 13 can obtain incident light of different specific wavelength ranges for different analysis purposes. Wherein, in order to achieve the purpose of precision detection, the light source 191 adopts a multi-angle incident light source to generate the light of the multi-angle incident temple object, and the reflective element 18 has a plurality of reflecting surfaces, such as a rotatable multi-faceted or multi-faceted surface. The concave mirror, in this combination, can achieve the function of multi-angle light incident on the object to be tested and sampled. In this example, several 18-piece prisms are reflected, but one skilled in the art would need to use a four-sided or eight-faced raft. Referring to Figure 2, there is shown a schematic diagram of multi-angle optical incidence and sampling in a first embodiment of the present invention. In Fig. 2, the reflective element 18 is a six-sided 稜鏡, consisting of a concave mirror, receiving the incident light generated by the multi-angle man-beam, and the object 14 is forwarded on the carrier. The reflective element also continues to move as it moves. The field to be tested 14 advances on the carrying device 15 - when the distance is fixed, it will trigger, and the τ 件 piece 18 鄕 six points - the circumferential angle is rotated every time the reflecting element μ is rotated by a specific small angle (the small angle is less than six points - At the circumferential angle, a 5-like signal is sent to the _tree 2, and the sage tree i2 is taken to cover the 7G piece 16 and the strip image of the specific light person (four degrees) is used. ^ The image capturing component 12 can respectively capture images formed by the object 14 (45 degrees, 9 degrees, 135 degrees below) corresponding to the incident angle of light of 45 degrees, 90 degrees, and 135 degrees. The second images (D), (8), and (7) are images obtained by entering the workpiece 14 corresponding to the incident angles of light of 45 degrees, 9 degrees, and m degrees, respectively, because the light is passed through the mask element. The image is a strip image, and the strip image of each strip in the figure is the result of the mother's one-time capture. When the rotating element 18 is at a viewing angle of 45 degrees, the image capturing element 2 first takes a pen-like image a1, and then the rotating element π continues to rotate, and in the (four) scale, the image-aged element 15 image M Then, when the rotating member 18 is rotated to the viewing angle, the member 12 is operated - the pen-like image is moved forward on the carrier member on the side of the rotating member π, and the rotating member 18 is rotated six times. After the circumferential angle is back to the sampling angle of the viewing angle, the image captures 120 and can correspond to the 20th portion of the object 14 to be tested. The moving picture depends on the element two-shaped 'corresponding to the strip 14 of the object to be tested 14 π turn the forest 18 and rotate the six-point again - the angle of the circle is 45 degrees, and the angle is 135 degrees. Another image of the part a3, b3, e3. Thereafter, through a image of Cao έ θ 4» r*·.- heavy, and private order, a series of strip 13 images of the same viewing angle can be reconstructed to obtain a complete view image of the object 14 to be tested, such as The two figures (G), (H), and (1) are transmission images of the object to be viewed at 45 degrees, 90 degrees, and 135 degrees. In the second image (G), the image is the transmitted image of the whole object 14 when the object 14 is incident at the incident angle of the light of the shirt, wherein the discontinuous area appears in the image. Block, that is, it may be that the material or surface feature of the object to be tested is to be detected, or a non-uniform flaw is detected, and the object to be tested may be continuously moved forward on the carrying member, and may be borrowed A projected image of each light incident angle (i.e., viewing angle) is quickly and stably obtained by rotating the reflecting element 18 having a plurality of reflecting surfaces. In practice, the person who enters the object to be tested 14 by light (four degrees) can generally take between about 10 degrees and 170 degrees, and theoretically, the angle of incidence between the degree of twist and 18 degrees can be achieved. Preferably, the image capturing component 12 can include an array receiving frame, a shadow display unit, an image analyzing unit, and a storage unit. The array receiving sensor 17 can be used in combination with the need for - and/or The image receiving unit can analyze the image sensed by the array receiving sensor 17 to obtain various surfaces or materials of the workpiece. The display unit can display the image received by the array receiving device 17, and is convenient for detecting the person's review or correcting the 'storage unit, and the image can be received by the storage unit, and the analysis result is as follows. Statistics, and can further establish image and thief database: The statistical information can be applied to the feedback and improvement of the process, and improve the yield of the process. It is used to analyze and record the received images, and it is convenient for manual visual inspection of images. In addition, the light taken by the image capturing component 12 1380009 is not only transmitted by the object 14 but also reflected light. For example, in FIG. 1, a second light source 192 is disposed on the same side of the object to be imaged as the image capturing element 12, so that the light projected by the second light source 92 can pass through the object to be tested. After reflection, it is received by the image capturing component 12. The first light source 191 and the second light source 192 can be independently configured for different detection purposes, or can be configured at the same time. Similarly, depending on the purpose of the test or the type of the object to be tested, the light source may be placed on any side of the object to be tested, and the image picking element 12 receives the deflected light or reflected light of the object to be tested. The light sources in the various locations described above can be independently configured or configured at the same time. Similarly, the image-like component 12 and the mask component 16 can also be configured in multiple pieces for different detection purposes. The above-mentioned test object 14 may be a color filter, a light sheet, a thin film solar panel, a TFT-LCD, an STN-LCD, an LTPS-LCD, an OLED, a PLED, a PDP, an SED, a Flexible Display, and an E-paper, and the optical The detection of the target of the test can detect various kinds of ship images of the above various objects to be tested, such as φ Bureau. ^The structure of the surface is uneven and the structure of the line is uneven. However, those skilled in the art can easily push this invention concept into other optical detection fields, which is not the above. Listed by the enumerator. In addition, the above-mentioned carrier element 15 can be a mobile platform and/or a supporting flat platform, and the carrier element can be a vertical and horizontal moving platform, a belt platform, a roller platform, an air floating platform. The transparent glass stage, the transport device for the upper and lower surfaces is 2, or a combination thereof, but is not limited by the above. Please refer to FIG. 3, which is a second embodiment of the optical detecting device of the present invention. FIG. 3 is an optical detecting and injuring 3 includes a first light source <S) 15 1380009

• * i I 391, a reflective element 38, a carrier element 35, a receive train receiving element... and an image capture element 32. For the purpose of optical detection, a filter 34 is placed as a test object on the carrier member 35, and the first light source 391 projects a light to the light guide 34 and penetrates the light guide 34. The light of the light sheet is reflected by the reflective element 38 and received by the array receiving sensing element 37 and/or the image capturing element 32, and an image is generated, and then the image is analyzed to obtain the related material of the filter 10 15 or Surface features, such as the color unevenness (MURA) phenomenon of color crossings. Wherein, the first light source 391 is projected to include a light wave having a wavelength-to-693 nm-to-wavelength section, and the (4) component P may be a dimensional or two-dimensional or more comprising a photosensitive element. The array receives the sensor and receives various wavelengths of visible light and/or invisible light, and can also completely receive the image of the filter 34 under the incident light of various wavelengths, and can also configure multiple arrays to move the sensor. For example, the blue (four) light film lake-dimensional array receives the sensor steal, while the green and red filters use the two-column receive sensor. For the purpose of the undesired purpose, the transmitted light of ^34 taken by the image picking component % may also be reflected light. For example, the light source projected by the second light source 392 can be received by the second element 32 by arranging a second light source 392 on the same side of the filter and light sheet as the image. According to different configurations at the same time. ^The original 391 and the second light source 392 can be configured independently, or differently, for the color unevenness detection of the - county film, - < color unevenness under the wavelength light source, the different 20 22 right filter When the light sheet 34 is a blue filter, the wavelength of 670~693 is used to illuminate the light, and the detection effect is best. If the light is 460 to 493 nm, the light is emitted. Inversely, the detection effect is the best; if it is a green light film, then (8) the person of the nanometer emits light by means of reflected light, and the f is "4", which is the first optical inspection device of the present invention. Third Embodiment H FIG. 4 In FIG. 4, the optical detecting apparatus 4 includes a first light source, an m-shell element (3), a reflective element 48, a carrier element 45, a column receiving sensor 47, and an image capturing element. 42. Wherein, the light projected by the first=491 is a full-band light, and the first photo-detecting element 3 can filter the light wave of the wavelength of the wire 9 to the outside of the Liunai, so that the light to be measured is illuminated. The wavelength of the incident light of the slice 44 is from 46 〇 to the optical wave section between the squall and the rice. By adjusting the angle of the reflective element 48, the fine-field of the above-mentioned dimension is required to be n 47 and/or the image element 42 can receive the light. Light to produce - miscellaneous. Money (4) is divided into _ images to take the relevant materials or surface features of (4), such as the color unevenness (MURA) of the color filter. According to the needs of different detection purposes, the light of the image capturing component 42 is not the passer-by of the butterfly 44, but also the thief. For example, in FIG. 4, 'the second light source 492 and the second light chopping element are disposed on the same side of the filter as the image capturing element 42 to make the second light source 492 and the second light The specific band of light projected by the filter element 432 can be reflected by the filter 44 and received by the image capturing element 42. According to the different test, the first light source 491 and the second light source 492 can be independently configured or configured at the same time. Please refer to FIG. 5, which is a schematic diagram of a fourth embodiment of the optical detecting device of the present invention. In FIG. 5, an optical detecting device 5 includes a first light source 591, an optical filter component 53, and a reflective component 58. A carrier component 55, an array receiving sensing element 57 and an image capturing component 52. Wherein, the light projected by the first light source 591 is a light wave of 400 nm or more, which is directly irradiated on the filter 54 and penetrates through the angle of a reflective element 58, and then the optical chopper component 53 filters out light waves having wavelengths other than 460 to 693 nm. The arrayed sensor element 57 and/or image capturing element 52 receives the filtered light to produce an image. For the purpose of different detection purposes, the light captured by the image capturing component 52 is not limited to the transmitted light of the filter 54, but may also be reflected light. For example, in FIG. 5, 'a second light source 592 is disposed on the same side of the filter as the image capturing element 52', and the light projected by the second light source 392 can pass through the filter. After reflection, it is received by the image capturing component 52. The first light source 591 and the second light source 592 can be independently configured for different detection purposes, or can be configured at the same time. The fifth embodiment of the optical detecting apparatus and method of the present invention can be used in conjunction with the configuration of the wire inspection device shown in FIG. 1 to indicate the symbol of the bribe component, and the sampling steps of the detection are detailed as follows: The light is projected at multiple angles to the object to be tested 14, for example, a light sheet or a glass solution, and the light passes through the object to be tested through transmission; Step 2: Adjusting the reflection element 18 to reflect the light by a The screening element of the mask element 16 can obtain a light penetration element 12 that penetrates the first region of the object to be tested 14 by a first penetration angle (hereinafter referred to as a first angle of view). a strip image; Step 3: Rotating the reflective element 18 - the first angle of rotation is also screened by the mask of the mask element 16, at which point the image capturing element 12 can take the light at a second angle of penetration ( The second view is hereinafter referred to as the first image of the object to be tested 14 and the second strip image; step 4: the object to be tested moves forward by a fixed distance; 10 - step 5: rotate the reflection Tree 18 - second rotation degree by a mask το 16 Blocking the screening, at this time, the image manipulation component 12 can obtain the third strip image of the second region of the object to be tested 14 through the first angle of view; The reflective element 18 - the first rotation angle, the shadow 15 14 "" can obtain the light to H (four) through the second region of the object 14 to be formed - the fourth image; 20 - the strip image and the third strip image are both the image of the object to be tested 14 and the projection image of the object to be tested is only associated with the object on the object to be tested, thus combining the first strip image with the third strip image. It can be a complete image at 1st-view angle. Similarly, combined with the first image.

Therefore, the difficulty of the three m卩 can be divided into _ tearing in H 嶋, the 峨 in the above process, for different detection purposes, the light can also pass a 19 c S ) ΐ 3 « υυυ ν The object is measured by the image capturing component 12, and the component 18 can be a multi-reflecting surface or a single-reflecting surface element. The first rotation is performed at different reflection angles or different refraction angles. When the angle ^^ reflecting surface element 'for example is six-sided 稜鏡, it is the one-sixth circumferential angle of the /, face ,, that is, 60 f8 = _: turn angle bribe f Xiaoxia second _ minus. When the reflective element has two kinds of early and reverse t-plane elements, such as a mirror, the second rotation angle is 10 15 20 == is 360 degrees of rotation, and the second is reverse direction _ is equal to the first rotation The angle of the corner. "月> Test Figure 6' is the optical detection device and method of the present invention. The actual rotation method is to filter the optical substrate as the object to be tested to check that the substrate is placed in a continuous movement. On the carrying platform, the soil enters step 61), that is, when the substrate enters the detection area, an image sampling operation is started (step 62), and the steps of the image sampling operation are as described in the above six and the example, and then obtained according to the (4) Like doing - ^

F63), whether there is a color unevenness (four) shape H = (4) on the substrate, when there is a color unevenness on the touch substrate, _ break the process stage where the color unevenness occurs (step (6), geometry The characteristics, the type of job, and then the essay, the judgment _ and the result are stored in the database (step (6), the history scale _ color unevenness __ and the occurrence of the machine, the optical detection device provided by the present invention The method is particularly suitable for the uneven color of the substrate, and the prior art has the following advantages: 20 (S ) 1380009 • φ · 1. The carrying device comprises a mobile platform and a supporting platform, and can be transported in a non-stop manner, thereby avoiding the cause The detection reduces the production speed, and the detection device can be directly erected on the existing wheeling equipment by using the special device, and the whole substrate can be detected comprehensively, and the technology of the motion month b can also be used to improve the accuracy and effectiveness of the substrate detection. Xing. 5 2· With the adjustment of the angle of the reflective element, the projected image can be obtained from different viewing angles, especially highlighting the situation of unevenness of the substrate and color, and the geometric information of the fatigue can be quantified as a determination through the image of the scene. Indicator The image processing component can quickly perform the identification operation. ' 3. The process data database can be built into the process data database, which has a high reference value for the collection and process improvement of the system. The invention discloses a light detecting device and method with excellent precision, reliability and stability, and is also suitable for detecting defects of a substrate, and can perform analysis according to the result of the detection, and then feedback the processing device in time, thereby Ensure that the quality control of the product is not overlooked, no matter the streamlined production process may reduce 15 _ spare investment = # and production line _ consumption, or _ practice _ measurement and points _ effect to make product quality stability and yield Improvements, the actual economic benefits such as process quality improvement and cost reduction, have confirmed that the present invention is significantly improved in progress and industrial utilization. Although the present invention has been disclosed above in several preferred embodiments, it is not By using 20 $ to limit the date of the present invention, any skilled person will be able to make some changes and refinements without departing from the spirit and scope of the present invention, and thus the present invention The scope of protection is subject to the definition of the patent application scope. <S) 21 1380009 BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a configuration of a first embodiment of the present invention; A schematic diagram of the configuration of the second embodiment of the present invention; a schematic diagram of the configuration of the third embodiment of the present invention; a schematic configuration of the fourth embodiment of the present invention; and a flowchart of the sixth embodiment of the present invention. Bu 3, 4, 5: optical detecting device 12, 32, 42, 52: image capturing element U, 53: optical filter element 431: first optical filter element 432: second optical data element

First picture second picture third figure fourth figure fifth figure sixth figure 14, 34, 44, 54: object to be tested 15, 35, 45, 55: carrier elements 17, 37, 47, 57: array receiving induction Element 191, 391, 491, 591: first light source 192, 392, 492, 592 · second light source 101, 102, 103, 104: light a b a2, a3, bl, b2, b3, d, c2, c3 : strip image a8, b8, c8: projected image of the object to be tested a9, b9, c9: discontinuous block

22 1380009 • φ » 61 : Basic loading 62 : Image sampling operation 63 : Image recognition operation 64 : Judging whether there is a 瑕疵 65 : Analyzing the characteristics of the 66 66 . Depositing in the poor library 67 : Statistics 瑕疵 type and probability

twenty three

Claims (1)

1380009 X. Patent application scope: 1. An optical detecting device comprising: a light source for projecting a light to a test object; a reflective element having at least two reflective surfaces for reflecting 5 passes The light of the object to be tested; and an image capturing component for receiving a projected image formed by the reflected light. 2. The optical inspection apparatus of claim 1, wherein the reflective element is a multi-faceted crucible. 10 3. The optical detecting device of claim 1, wherein the reflective element is rotatable to reflect light of different incident angles to the image capturing element, and the incident angle ranges from 0 to 180 degrees. But does not include the twist and 18 degrees. 4. The optical detecting device of claim 1, wherein the light passes through the object to be measured by transmission, refraction, reflection, or a combination thereof. [15] The optical detecting device of claim 1, further comprising: an optical wave wave component for obtaining incident light of a specific wavelength range; a carrier member for carrying the object to be tested; a mask component a projection image for receiving a specific angle with the image capturing component to filter out other angles of the projected image; and a second analysis unit for analyzing the projected image captured by the image capturing component Obtain the information including the object to be tested. 6. For example, the optical inspection device of claim 5, wherein the 90 degree. 7. The optical detecting device of claim 1, wherein the light source is a multi-angle incident light source for generating the light incident on the object to be tested at multiple angles. 8. The optical detecting device of claim 1, wherein the object to be tested is a color filter, a thin film solar panel, a TFT-LCD, an STN-LCD, an LTPS-LCD, a 5 OLED, a PLED, a PDP, and a SED. , Flexible Display and E-paper; and the wavelength of the light range is between 300 and 1300 nm. 9. The optical detecting device of claim 8 wherein: when the object to be tested is a blue filter, the light is taken at a wavelength of 670 to 693 nm; the object to be tested is a red color. When the filter is used, the wavelength of the light is 460 to 493 nm; when the 10 object to be tested is a green filter, the wavelength of the light is 580 to 600 nm, and the image capturing component further includes a An analysis unit for analyzing color unevenness information of the color filter. 10. An optical detecting device for detecting color unevenness information of a filter, comprising: a light source that projects a light onto the filter; and > an image capturing component, Receiving the light passing through the filter and generating an image according to a wavelength segment of the light, wherein: when the filter is a blue filter, the wavelength segment is a wavelength of 670~693 When the filter is a red filter, the wavelength segment is a wavelength of 460 to 493 nm; when the filter is a green 2 color filter, the wavelength segment is a wavelength of 580 to 600. Nano. 11. The optical inspection apparatus of claim 1, wherein the light passes through the calender sheet for transmission, refraction, reflection, or a combination thereof. 12. The optical inspection device of claim 1, wherein the light source is a plurality of &lt;S) 25 of the light, the optical inspection An angle incident light source for generating a multi-angle incident object to be tested further comprises: - a light-emitting element obtaining a wavelength band of the light; a reflective element having at least two reflective surfaces for reflecting, Passing the light of the light-passing sheet; a load-bearing member for carrying the filter; - a cover for the 7-L member, and rotating the optical axis with the optical pickup portion of the county--the angle portion Filtering, in addition to other angles; an analyzing unit for analyzing the image captured by the image capturing component to obtain information including color unevenness of the filter; a display unit for Displaying the image; and a storage unit for storing the image and the analysis result. 13. The optical inspection apparatus of claim 12, wherein the reflective element is a multi-faceted 稜鏡 and the reflective element is rotated to reflect the light at different angles of incidence to the image-receiving element. 14. The optical inspection apparatus of claim 12, wherein the specific angle is 90 degrees. 15. The optical detecting device of claim 1, wherein when the filter is a blue light beam, the image is generated by transmitting the light through the blue filter; When the light sheet is a red color filter, the image is generated by the light being reflected by the red color filter; when the light filter is a green color filter, the image is filtered by the green light through the green filter. Produced after the light sheet is reflected. 16. An optical detection method comprising the following steps: 26 1380009 (A) projecting a light to an object to be tested; (8) reflecting the projected image of the processed object with the -napping element; and (C) analyzing the projected image. 17. The optical detection method of claim 16, wherein the step (8) comprises: displacing the light with the H-plane of the multi-reflecting surface element to obtain a portion-passing portion of the object to be tested at a first angle The light formed by the 10 to 15 Rotating the multi-reflecting surface element with the first rotation angle, reflecting the light with the first reflecting surface, and obtaining a second projected image of the wire passing through the first portion of the first portion; moving the object to be tested by a fixed distance; Rotating the multi-reflecting surface element with the second rotation angle greater than the first rotation angle, and reflecting the stage with the second reflecting surface of the multi-reflecting surface element to obtain (4) the first angle passing through the object to be tested - the second A portion of the system forms a third projected image; and 20 combines the first projected image with the third projected image. The optical detecting method of claim 16, wherein the light passes through the object to be tested in the form of, the, the refraction, the reflection, or the like. 19. The fresh detection method according to Item 18 of the patent application, wherein the cap is a first piece, and the wavelength of the light is in the range of 460 to 693 nm, and the filter is blue in the child. When the color filter is used, the wavelength of the light is (4) ~ Liu 2 27 1380009 • 4 f * * m, and the projected image is generated by transmitting the light to the blue filter; when the light film is a red When the filter is used, the light is taken at a wavelength of 46 〇 to 493 nm and the projected image is generated by the pro-transmission of the red; when the guillotine is a green enamel sheet, the wavelength of the ray is 58〇~(d) nanometer' and the projected 5 image is generated by the light reflecting the green fluorescent sheet. 20. The optical detection method of claim 16, wherein the step (c) comprises: determining whether the object to be tested has a fatigue; determining a process stage characteristic of the flaw; determining a geometric characteristic of the flaw A probability feature occurs; and 10 stores the characteristics of the defect. 21. An optical detection method comprising the steps of: (A) projecting a light to a filter; (B) Obtaining the specified band of the light according to the type of the filter, wherein: (4) ~ Liu Guang M - when the blue film is viewed, the finger segment is the wavelength of the specified band as the wavelength when the filter is one When the red filter is 460~493 nm; and 'the specified band is formed by one of the wavelength bands, when the filter is a green filter, 580~600 nm; (C) Draw light The pointing image of the film county line; and (D) analyzing the projected image. The method of detecting, wherein the light passes through the filter in the manner of the light, the light transmission, the refraction, the reflection, or a combination thereof. For example, in the optical detection method of claim 21, wherein the step (c) comprises: reflecting the light passing through the filter by the reflective element; and 5 rotating the reflective element to obtain a different angle through the wire. The projected image formed by the light. 24. An optical detection method comprising the steps of: Φ (A) projecting a light to a test object; (B) reflecting the light with a reflection to obtain a first angle through the first object to be tested a first projected image formed by the light of the first portion; (C) after the reflective element is rotated by the -first rotating ship, the light is reflected to obtain the money passing through the first portion at a second angle Forming a second projection image-image; ~ (D) moving the object to be tested by a fixed distance; and 15 (E) rotating the reflection element at a second rotation angle, reflecting the light to obtain Φ - a third projected image formed by the light passing through the second portion of one of the articles. 25. The optical detection method of claim 24, further comprising: (F) combining the first projected image with the third projected image. The optical detection method of claim 24, wherein the light passes through the object to be tested in such a manner that one or a combination of the transmission, the refraction, and the reflection. 27. The optical detection method of claim 24, wherein the second rotation # stomach is greater than the first rotation angle. The optical detection method of claim 24, wherein the second rotation angle is equal to the first rotation angle but opposite in direction.