TWI370250B - Probe assembly and inspection apparatus - Google Patents

Probe assembly and inspection apparatus

Info

Publication number: TWI370250B
Authority: TW; Taiwan
Prior art keywords: inspection apparatus; probe assembly; probe; assembly; inspection
Prior art date: 2007-11-06

Application number

TW097132189A

Other languages

Chinese (zh)

Other versions

TW200925615A (en

Inventor

Tomoaki Kuga

Syuji Naraoka

Takao Yasuta

Original Assignee

Nihon Micronics Kk

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-11-06

Filing date

2008-08-22

Publication date

2012-08-11

2008-08-22 Application filed by Nihon Micronics Kk filed Critical Nihon Micronics Kk

2009-06-16 Publication of TW200925615A publication Critical patent/TW200925615A/en

2012-08-11 Application granted granted Critical

2012-08-11 Publication of TWI370250B publication Critical patent/TWI370250B/en

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Computer Hardware Design (AREA)
Theoretical Computer Science (AREA)
Measuring Leads Or Probes (AREA)
Liquid Crystal (AREA)

TW097132189A 2007-11-06 2008-08-22 Probe assembly and inspection apparatus TWI370250B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2007288389A JP2009115585A (en)	2007-11-06	2007-11-06	Probe assembly and inspection device

Publications (2)

Publication Number	Publication Date
TW200925615A TW200925615A (en)	2009-06-16
TWI370250B true TWI370250B (en)	2012-08-11

Family

ID=40645857

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW097132189A TWI370250B (en)	2007-11-06	2008-08-22	Probe assembly and inspection apparatus

Country Status (4)

Country	Link
JP (1)	JP2009115585A (en)
KR (1)	KR20090046679A (en)
CN (1)	CN101430344B (en)
TW (1)	TWI370250B (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP5491790B2 (en) *	2009-07-27	2014-05-14	株式会社日本マイクロニクス	Probe device
JP5491789B2 (en) *	2009-07-27	2014-05-14	株式会社日本マイクロニクス	Probe device
JP5406790B2 (en) *	2009-08-04	2014-02-05	株式会社日本マイクロニクス	Probe unit and test apparatus using the same
KR101168953B1 (en) *	2009-08-04	2012-07-30	가부시키가이샤 니혼 마이크로닉스	Probe unit and testing apparatus using the same
JP5690105B2 (en) *	2009-11-26	2015-03-25	株式会社日本マイクロニクス	Probe device
CN102081110B (en) *	2009-11-26	2014-03-26	日本麦可罗尼克斯股份有限公司	Probe device
JP2012058223A (en) *	2010-09-10	2012-03-22	Isao Kimoto	Probe assembly
CN102486481B (en) *	2010-12-01	2014-08-06	励威电子股份有限公司	High-frequency vertical elastic probe structure
CN102565470B (en) *	2010-12-03	2014-06-04	日本麦可罗尼克斯股份有限公司	Probe assembly
CN102062961A (en) *	2011-01-20	2011-05-18	圣仁电子科技（沈阳）有限公司	Probe device for detecting plane display panel
CN115436675A (en)	2021-06-04	2022-12-06	迪科特测试科技(苏州)有限公司	Testing device and probe assembly thereof
TWI771085B (en) *	2021-06-29	2022-07-11	美科樂電子股份有限公司	Probe base structure
TWI829074B (en) *	2021-06-29	2024-01-11	美科樂電子股份有限公司	Probe holder structure

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3762444B2 (en) *	1993-08-24	2006-04-05	信昭鈴木	Circuit board inspection probe and its mounting structure
JP3866815B2 (en) *	1996-03-27	2007-01-10	セイコーエプソン株式会社	LIQUID CRYSTAL PANEL SUBSTRATE, ITS MANUFACTURING METHOD, LIQUID CRYSTAL DEVICE, AND ELECTRONIC DEVICE
JP3958875B2 (en) *	1998-07-24	2007-08-15	株式会社日本マイクロニクス	Prober and probe needle contact method
JP2002365308A (en) *	2001-06-08	2002-12-18	Japan Electronic Materials Corp	Vertical blade type probe, vertical blade type probe unit and vertical blade type probe card using the same
CN1244818C (en) *	2003-03-04	2006-03-08	友达光电股份有限公司	test device
KR100766296B1 (en) *	2006-02-23	2007-10-11	주식회사 파이컴	Probe blocks and probe assemblies having them
CN100428003C (en) *	2006-10-25	2008-10-22	友达光电股份有限公司	Liquid crystal display panel and probes for testing it

2007
- 2007-11-06 JP JP2007288389A patent/JP2009115585A/en active Pending
2008
- 2008-08-22 TW TW097132189A patent/TWI370250B/en not_active IP Right Cessation
- 2008-08-27 KR KR1020080083973A patent/KR20090046679A/en not_active Ceased
- 2008-11-04 CN CN200810175226XA patent/CN101430344B/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
CN101430344A (en)	2009-05-13
JP2009115585A (en)	2009-05-28
TW200925615A (en)	2009-06-16
CN101430344B (en)	2011-08-31
KR20090046679A (en)	2009-05-11

Publication	Publication Date	Title
TWI370250B (en)	2012-08-11	Probe assembly and inspection apparatus
TWI368035B (en)	2012-07-11	Probe device and inspection apparatus
GB2494723B (en)	2013-05-08	Visual inspection device
GB2476199B (en)	2011-07-27	Method and apparatus for non-destructive testing
GB2462193B (en)	2012-08-29	Inspection apparatus and method
GB0804499D0 (en)	2008-04-16	Measurement apparatus and method
TWI368040B (en)	2012-07-11	Test device and test method
EP2023130A4 (en)	2011-06-29	End section inspecting apparatus
GB0719460D0 (en)	2007-11-14	Measurement apparatus and method
PL2100072T3 (en)	2019-07-31	Linear structure inspection apparatus and method
TWI318303B (en)	2009-12-11	Movable probe unit and inspecting apparatus
GB0714974D0 (en)	2007-09-12	Measurement apparatus
GB0807955D0 (en)	2008-06-11	Ultrasound inspection method and apparatus
EP2022735A4 (en)	2011-11-09	Transfer apparatus and transfer object inspecting apparatus
GB0708271D0 (en)	2007-06-06	Distance measurement apparatus and related methods
GB0719645D0 (en)	2007-11-14	Measuring apparatus
GB0718094D0 (en)	2007-10-24	Probe microscopy and probe position monitoring apparatus
GB0722311D0 (en)	2007-12-27	Test results reading method and apparatus
GB0813826D0 (en)	2008-09-03	Apparatus and measuring instrument
TWI370246B (en)	2012-08-11	Inspection apparatus
GB0812759D0 (en)	2008-08-20	Inspection probe
GB0605031D0 (en)	2006-04-19	NMR inspection apparatus
GB0600897D0 (en)	2006-02-22	Measuring apparatus
TWI372256B (en)	2012-09-11	Test apparature and test method
GB0724824D0 (en)	2008-01-30	Test apparatus

Legal Events

Date	Code	Title	Description
2024-05-11	MM4A	Annulment or lapse of patent due to non-payment of fees