TWI360152B - Apparatus and process for sensing target gas speci - Google Patents

Description

1360152 • IX. INSTRUCTION DESCRIPTION: V TECHNICAL FIELD OF THE INVENTION The present invention relates generally to apparatus and methods for sensing a target gas species having a monitoring function for gas compounds and ion species in semiconductor processing operations. [Prior Art]

In the fabrication of semiconductor devices, the deposition of germanium (Si) and germanium dioxide (Si 02) and subsequent etching are important operational steps that currently involve 8 to 10 steps or a rough estimate of 25% of all processes. Each deposition tool and etch tool must be subjected to a periodic cleaning procedure, sometimes as often as every operation, to ensure uniformity and uniform film properties. Recently, in the etching operation, the etching end point is reached after a predetermined amount of time. Excessive money (〇veretch), in which the process gas continues to flow into the reaction chamber after the cleaning of the surname is completed, which is common and leads to a longer process cycle, reduced tool life cycle and unnecessary consumption of global warming gas to the atmosphere. Medium (A nders ο η, B ·; B eh nk e, J .; Berman, M .; Kobeissi, H.; Huling, B.; Langan, J.; Lynn, S - Y., Semiconductor International, October ( 1 993 )). A similar issue arises in the lithography of nitrifying materials when tantalum nitride is used in semiconductor device structures. The etching process can be monitored using a variety of different analytical techniques, such as FTIR, optical emission spectroscopy, and ion mass spectrometry. However, such techniques tend to be expensive and often require skilled operators due to their complexity. 5 13.60152

Therefore, it provides a reliable, low-cost gas sensing capability that will improve the yield and chemical efficiency of V for etching and depositing materials containing tantalum (including tantalum, tantalum nitride and hafnium oxide). It will be a significant advancement by reducing and optimizing the number of cleaning and etching cycles, and thereby reducing chemical use, lengthening equipment operating life, and reducing equipment downtime.

"APPARATUS AND PROCESS FOR SENSING FLUORO SPECIES IN SEMICONDUCTOR PROCESSING SYSTEMS", US Patent Application No. 1 0/2 763, No. 3, filed on Oct. 17, 2002, discloses a solid-state fluorine type sensing device and method, Use a fluorine-reactive wire around the metal packaging column or the Vespel® polyamine block on the KF flange. The fluorine species detection using such a wire sensor is based on monitoring the change in electrical resistance in the wire caused by the reaction with the fluorine-containing compound. In order to confirm the acceptable sensitivity and signal-to-noise of such wire sensors, the size and position of the wire are controlled and optimized via metal packaging columns or Vespel® polyamine blocks. To provide absolute resistance for endpoint detection. There is an ongoing need to discover and develop improved wire sensors that further enhance sensitivity, signal-to-noise ratio, and mechanical reliability of such gas sensors, and further reduce them by using new configurations and structures. Reaction time and its manufacturing cost. SUMMARY OF THE INVENTION 6 1360152 汆 丨 作 圧 L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L L The presence of a gas species, such as an ambient environment, a gas effluent from a semiconductor process, and the like. In one aspect, the invention is directed to a gas sensor assembly comprising a gas sensing filament (comprising nickel or a nickel alloy).

In another aspect, the invention relates to a gas sensor assembly comprising a gas sensing wire (including a coating structure encapsulating a core structure), wherein the coating structure comprises nickel or a nickel alloy Wherein such a core structure is characterized by a resistivity higher than that of the coating structure and a heat capacity lower than a heat capacity of the coating structure.

Preferably, such a core structure is characterized by a resistivity of at least 50 times greater than the resistivity of the coating structure and a heat capacity less than 3/4 of the heat capacity of the coating structure. More preferably, such a core structure is characterized in that its electrical resistivity is at least 1000 times higher than that of the coating structure, and its heat capacity is less than 1 / 2 of the heat capacity of the coating structure. Most preferably, such a core structure is characterized by a resistivity of at least ηιηΩ.cm and a heat capacity of less than 2.5 J/K.cm3. In a particularly preferred embodiment of the invention, the core structure comprises tantalum carbide. In another preferred embodiment of the invention, the core structure further comprises a composite structure formed by coating a carbon core fiber with tantalum carbide. Still another aspect of the present invention relates to a gas sensor assembly comprising a gas 7 13.60152 97· 1. Wei 4 You ΓΓ-years f&

Somatosensory wire (including nickel or nickel alloy), wherein the gas sensing wire is manufactured by electrochemical thinning technique and is characterized by an average diameter of no more than 50 microns, preferably no more than 25 microns, more preferably no more than 10 microns, and most preferably in the range of from about 0.1 microns to about 5 microns. A corresponding aspect of the present invention relates to a method for manufacturing a gas sensor assembly (including a nickel-containing gas sensing wire characterized by an average diameter of not more than 50 μm) comprising the steps of: 1) providing a gas sensor assembly comprising a nickel-containing gas sensing wire having an average diameter of not more than 50 microns; and (2) electrochemically thinning the nickel-containing gas sensing wire for a sufficient period of time, In order to reduce the average diameter of such nickel-containing gas sensing wires to 50 microns or less.

Another aspect of the invention pertains to a gas sensor assembly comprising a gas sensing filament (including nickel-copper alloy). Preferably, the nickel-copper alloy contains from about 0% to about 90% nickel and from about 10% to about 90% copper. More preferably, the nickel-copper alloy further comprises from about 10% to about 90% by weight of aluminum. Such nickel-copper alloys may also contain other fluorine-tolerant metal components including, but not limited to, titanium, vanadium, chromium, manganese, lanthanum, molybdenum, niobium, palladium, silver, iridium, and platinum. Still another aspect of the invention relates to a gas sensor assembly comprising a nickel-containing gas sensing wire having a porous surface having from about 20% to about 80% total The void fraction, and preferably 60% of the total void fraction. Preferably 8 1360152 97 1.14^ Year of the month ': ''wide no such ground, such a porous surface of this gas sensing wire is in the _____ in > open-hole structure. Another aspect of the present invention relates to the gas sensor assembly described above, further comprising: a member coupled to the gas sensing wire for detecting at least one of the gas sensing wires contacting a target gas species A change in properties and responsively produces an output signal representative of the presence of the target gas species. Another aspect of the invention relates to a gas sensor assembly comprising the gas sensing wire described above and a support structure, wherein the gas sensing wire is mounted on the support structure in a freestanding manner .

Still another aspect of the present invention relates to the gas sensor assembly described above being disposed in a sensing relationship to a process chamber (easily present with one or more standard fluorine species), wherein the gas sensing wire is mounted to a fluorine resistant The supporting structure is coupled to a member for detecting a change in at least one property of the gas sensing wire in contact with a target fluorine species, and responsively generating a component representing an output signal of the presence of the target fluorine species. Another aspect of the invention relates to a gas sensor assembly described above that is constructed and configured to monitor an effluent from a semiconductor manufacturing plant or a fluid derived from an effluent, wherein an effluent or stream derived therefrom The system is susceptible to containing a fluorine species, and wherein the gas sensor assembly further comprises a change for detecting at least one property of the gas sensing filament in contact with the fluorine species, and responsively producing an indication of such fluorine The component of the output signal of the existence of the species. Still another aspect of the present invention relates to a fluid for monitoring one of the places 1 1360152

a method of presenting a target gas species, the method comprising: exposing a fluid to the gas sensor assembly as described above; monitoring at least one property of the gas sensing wire of the gas sensor assembly; and when The gas sensing wire exhibits a change in at least one property thereof that responsively produces an output signal indicative of the presence of the target gas species in the fluid site or a change in the concentration of the target gas species in the fluid site.

Yet another aspect of the invention relates to an extended gas sensor component formed from one or more gas sensing wires, the elongated gas sensor component comprising a second electrical connection end and a longitudinal axis, wherein The longitudinal axis of the sensor element is substantially perpendicular to a line defined by its two electrical connections.

Such extended gas sensor elements can comprise any number of gas sensing wires and have any suitable shape or configuration as long as the longitudinal axis thereof is substantially perpendicular to one of the two electrical connections. In a preferred embodiment of the invention, the elongated gas sensor element is formed by two gas sensing wires attached together at a first end thereof and having a wishbone shape. Preferably, such an extended gas sensor component comprises a gas-sensitive coating encapsulating core structure, wherein the core structure has a resistivity higher than that of the gas-sensitive coating, and a heat capacity is lower than the gas-sensitive coating The heat capacity of the layer. The nickel-containing coating is particularly sensitive to the type of fluorine gas, and thus in a particularly preferred embodiment of the invention, the extended gas sensor element comprises a nickel-containing coating

FO 13.60152 S7.1· 14 1 Next year 曰 ' ' ' ' _ 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层 层And a lower heat capacity. Another aspect of the present invention relates to a gas sensor assembly comprising at least one of the above elongated gas sensor elements mounted on a support structure, wherein the support structure includes a surface for mounting an extended gas sensor The second electrical connection of the component. Another aspect of the invention relates to a method for monitoring a fluid site

A method of presenting a target gas species, the method comprising: exposing a fluid of the fluid site to the gas sensor assembly; monitoring at least one property of the gas sensor component of the gas sensor assembly; and

When the extended gas sensor element exhibits a change in at least one property thereof, responsively produces an output signal indicating the presence of the target gas species in the fluid location, or a change in concentration of the target gas species in the fluid location . A further aspect of the invention relates to a method for manufacturing an elongated gas sensor element having a wishbone shape, comprising the steps of: (a) aligning a pair of gas sensing wires side by side; and (b) the pair a first end of the gas sensing wire is coupled, but the opposite second ends of the pair of gas sensing wires are separated from each other, wherein the separate second ends of the pair of gas sensing wires form the wishbone shaped gas sensor element The second electrical connection 11 13.60152 end. yTTiriT 曰 Ε Ε · · · · 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者 或者The first ends of the wires are joined, but the opposite ends of the pair of wires are separated from one another such that a wishbone shaped precursor structure is formed; and (c) a gas sensitive coating is formed prior to the shape of the wishbone Structurally.

A further aspect of the present invention relates to a gas sensor assembly that is configured in a sensing relationship to a process chamber (easily present with one or more standard fluorine species), wherein the gas sensor assembly comprises a nickel-containing component a gas sensor component mounted on a support structure and coupled to detect a change in at least one property of the gas sensor component in contact with a target fluorine gas species, and responsively generating the representative A member of the output signal of the presence of the target fluorine gas species, wherein the nickel-containing gas sensor element has a longitudinal axis that is oriented perpendicular or substantially perpendicular to the mounting surface of the support structure. The term "fluorine type" as used herein is intended to broadly encompass all fluorine-containing materials, including, without limitation, gaseous fluorine compounds, fluorine itself in atomic and diatomic (F2) form, fluoride ion and fluoride ion species. . The fluorine species may, for example, comprise species such as NF3, SiF4, C2F6, HF, F2, COF2, C1F3, IF3, etc., and active fluorine species thereof (collection designation such as F') comprising ionized fragments, plasma forms, and the like. Other aspects, features, and specific examples of the present invention are disclosed and appended hereinafter. 1 1360152 Ά < ~~ ' -------------- JL 1. 14 /: Year: τ · ' ^ * The scope of application for patents will be more completely obvious ---~~ - [Implementation]

U.S. Patent Application No. 1 0/2 7 3,0 3.6, issued October 17, 2002, "APPARATUS AND PROCESS FOR SENSING FLUORO SPECIES IN SEMICONDUCTOR PROCESSING SYSTEMS j and was awarded the US Patent on July 24, 2001. 6,265,222 "MICRO-MACHINED THIN FILM HYDROGEN GAS. SENSOR, AND METHOD FO MAKING AND USING

THE SAME is hereby incorporated by reference in its entirety for all purposes. The invention will be described more fully hereinafter with reference to the application of semiconductor process control, and it is understood that the utility of the invention is not limited thereby, but extends to a wide variety of other uses and applications, including without limitation to life safety. System, room or ambient monitoring operations and other industrial deployments, as well as consumer market gas sensing applications. As is well known, fluorine species react with most metals to form compounds with high and sometimes mixed oxidation states (Inorganic Solid Fluoride, Chemistry and Physics, American Academic Press, 1985, EdP. Hagenmuller). Many transition metals and precious metals (such as, but not limited to, nickel, copper, aluminum, chin, hunger, collateral, fierce, ni, key, nail, ki, silver, silver, and rhyme) are in direct contact with such fluorine species. Various non-volatile fluorine compounds are formed in the ground. The present invention therefore uses a fluorine-reactive wire. By monitoring the change in the properties of such a wire caused by its reaction with a fluorine species, it is possible to measure the presence and/or concentration of one or more target fluorine species in a particular gas 13 13.60152 ρπ.14 Clean the effluent stream from the process. Specifically, the increase in the resistance of the fluorine-reactive wire was observed, and when it was placed in a gas environment susceptible to fluorine species, it was found to be a good indicator of the presence and concentration of such fluorine species in the environment. Because the wire has a higher thermal conductivity than the gaseous environment, a significant portion of the heat generated by the exothermic reaction between the wire and the fluorine species is directed to the wire, causing an increase in temperature in the wire, which in turn increases The resistance of a wire. In particular, the invention relates to the use of nickel-containing filaments comprising pure nickel or a nickel alloy for use in the detection of target fluorine species in a gas sensor assembly.

A preferred embodiment of the present invention uses a gas sensing wire comprising a fluorine-reactive coating structure comprising nickel or a nickel alloy, and the coating layer comprises a high resistivity, low thermal mass core The structure is characterized in that the resistivity is higher than the resistivity of the coating structure, and a heat capacity (for example, the product of the specific heat Cp and the density D) is lower than the heat capacity of the coating structure. Preferably, such a core structure is characterized in that the resistivity is at least 50 times greater than the resistivity of the coating structure, and a heat capacity is less than 3/4 of the coating structure. More preferably, the core structure is characterized by a resistivity of at least 1 〇 〇 〇 greater than the resistivity of the coating structure and a thermal capacity of less than 1 /2 coating structure. Most preferably, such a core structure is characterized by a resistivity of at least 1 〇 m Ω . c m and a heat capacity of less than 2.5 J/K·cm 3 . 14 1360152 Months __ Cheyue A combination of materials is available to form this coating structure. This is an example of a material suitable for forming a coating structure and a core structure, and is not intended to limit the broad scope of the invention, including: (i) pure nickel used as a coating structure and a nickel alloy (such as Monel) , a nickel-copper alloy) is used as the core structure; (2) pure nickel or nickel alloy is used as the coating structure and tantalum carbide is used as the core structure; (3) pure nickel or nickel alloy is used as the coating structure and carbon as the core Structure, etc.

Carbide is particularly useful for forming the core structure of the present invention because the high electrical resistivity (usually greater than 10 ιηΩ·cm) and low heat capacity (usually less than 2.5 J/K·cm3) further enhance the signal of the nickel-containing wire sensor. Strength and responsiveness without causing significant heat loss. Furthermore, the attack of the cerium carbide corrosion-resistant fluorine plasma, although it is not necessary to encapsulate the core structure, when the wire is used in a corrosive gas environment to detect the fluorine species, it is advantageous to improve the mechanical strength and Reliability.

Fig. 1 exemplarily shows a cross-sectional view of a gas sensing wire 1 according to an embodiment of the present invention, the gas sensing wire 1 comprising a core structure 6, which is made of cold tantalum carbide and is made of nickel-copper alloy (Mongo) made of coating 2 encapsulation. Composite materials comprising a plurality of layers of high resistivity, low thermal mass materials can also be used to form the core structure of the wire sensor of the present invention. Different combinations and configurations of suitable core materials can be used to further improve the operation of the silk sensor. In one example of the present invention, a thin layer of nickel is formed as a gas sensing layer, and a cerium carbide fiber can be used. Figure 2 shows a partial cross-sectional view of the niobium carbide fiber 10 . This carbonization 15

13.60152 The crucible has a total diameter of from about 7 8 microns to about 140 microns, which comprises carbon-12 surrounded by a tantalum carbide sheath 16 and a carbon-rich surface 18. The tantalum carbide fiber has a heat capacity (Cp multiplied by D) which is about half the heat capacity of nickel and is a fluorine species. In order to quantitatively measure the signal intensity and the responsiveness of the gas detector assembly containing the nickel-containing wire as described above, the fluorine-containing gas from the semiconductor clean room is first contacted with the nickel-containing gas sensor assembly to Produce the sensor signal output. This effluent gas is then passed through a residual gas (RGA) unit to produce a set of control outputs. The combination of the pattern rotation produced by the sensor assembly of the present invention and the output produced by the RGA unit as a function of time shows the overall relative signal strength and responsiveness of the gas sensor of the present invention. The upper portion of Figure 3 shows the relationship of the signal output versus time produced by a gas-sensing assembly containing a nickel-coated SiC-sensitive fluorine filament, and the control output produced by the RGA unit in the lower portion of Figure 3 versus time. On the other hand, Figure 4 shows a comparison of the signal output versus time from a gas sensor using a nickel wire and the control versus time produced by the RGA unit. Although the gas sensation of the nickel-coated SiC wire shows better sensitivity and shorter response time than the use of the nickel wire, both gas sensor assemblies exhibit high sensitivity and high responsiveness. To further enhance the performance of the nickel-containing wire sensor of the present invention, a high As/Ac ratio is desired in accordance with equation (19) provided above. The integrated sense of the core SCS is controlled by a gas detector. The detector is shown by the assembly output detector. The above 16 13.60152 ΨΓΤΓΤΓ~7^ Μ Μ 'High As/Ac ratio can be borrowed from the average outer diameter below 5 00 micron filaments are effectively achieved, preferably less than 150 microns or less than 50 microns, and most preferably in the range of from about 0.1 microns to about 30 microns, and an average length of greater than 1 centimeter, preferably more than 5 centimeters, and The best is more than 10 cm as a balance between performance and ease of manufacture. However, filaments having a diameter of about or less than 50 microns are extremely fragile and difficult to handle, making the manufacture of a gas sensor assembly having such filaments almost impossible. The present invention provides a solution to this problem by first fabricating a gas sensor assembly using a nickel-containing gas sensing wire having an average diameter greater than 50 microns' and then Electrochemical thinning of such gas sensing filaments reduces their average diameter to increase the As/Ac ratio. In this case, the thinning process is performed on a gas sensing wire that has been incorporated into the gas sensor assembly, and after thinning, there is no need to further process the gas sensing wire, thereby significantly reducing the The risk of damage to ultra-thin wires.

Figure 5 shows a portion of the thinned nickel wire 2 2 having an original average diameter of about 1 0 0 - 1 10 μm. After a portion of such a nickel wire 2 2 is electrochemically thinned, its average diameter is effectively reduced to about 3 5 - 45 μm. A high As/Ac ratio can also be achieved by forming a nickel-containing wire having a porous surface, which has the function of increasing the surface area As of the wire sensor without including the cross-sectional area Ac thereof. Figure 6 illustrates a nickel-containing wire 25 comprising a relatively tight core 26 and a porous surface 28. The porous surface containing nickel wire can be used in two-stage electricity 17 1360152

Year C/T — provided by the unplated process, in which the plating of nickel or nickel alloy on a basis such as a core-heart structure at the initial seeding stage is carried out at a relatively low rate, so that Improving the bond between the nickel or the alloy plating layer and the underlying substrate, and in the subsequent growth phase, the plating is performed at a significantly higher rate to form a roughness having micropores or nanopores Plating surface. Figure 7 shows an S Ε Μ lithography of a nickel coating 34 formed on a non-porous, tight substrate 32 nanopore.

Alternatively, the porous nickel coating can be formed from a suitable surfactant using a liquid crystal template. This technique is particularly useful for forming open cell structures that maximize the fluorine accessible area of the porous nickel coating and thus further improve the sensitivity of the wire sensor. Figure 8 shows an SEM lithography of a porous nickel coating 44 characterized by an open cell structure and having a thickness of about 4.93 microns formed on a compact tantalum carbide substrate 42. The porous nickel coating may be characterized, for example, by a total porosity of 60% when measured by X-ray fluorescence analysis. φ The properties of the nickel-containing gas sensing filament of the present invention can be further enhanced by the use of various nickel-copper alloys, such as Mons alloys, which are characterized by an electrical resistance even higher than that of pure nickel. Preferably, such a nickel-copper alloy contains from about 10% to about 90% by weight nickel and from about 10% to about 90% by weight copper. The nickel-copper alloy may further comprise other fluorine-resistant metals such as aluminum, titanium, vanadium, chromium, manganese, niobium, turn, niobium, tantalum, silver, silver and rhyme. Any of the various specific examples of the invention described above can be used individually or in combination to provide a material and structural feature that is suitable for use in a variety of 18 1360152

The group of gas sensor wires of the same system and application is not combined with the same. It will be appreciated that the selection of the particular material and composition of the fluorine-emitting sensing element may be based on the characteristics of the turbulence present for the type of monitoring, and in particular, depending on the type of body being monitored or otherwise present in the gas being monitored. The gas sensing wire of the present invention can be easily mounted in any form to form a gas sensor assembly, which can also include components for detecting changes in the contact of the gas sensing wire with the gas species, and responsiveness. Indicates the component of this change output signal generation. In particular, the gas sensing wire can be mounted in a variety of vertical forms to the fluorine-resistant support structure, as described in U.S. Patent Application Serial No. 10/273,036, issued to the entire disclosure of The method discloses that the entire content thereof is hereby incorporated by reference. The freestanding gas sensing wire can be part of the device package in any suitable form, and an additional protective or insulating layer can be applied to the device package to enhance the corrosion of the fluorine-containing compound of the overall device package.

The ability of the seed crystal to integrate the freestanding gas sensing wire into a standard microelectronic device package such as a wafer carrier package enables the gas sensor device of the present invention to be constructed as a single unit device structure, or as a plurality of The array of components, for example, with different metal structures, different geometries or redundant structures operating at different temperatures to enhance the gas detection capability of the total sensing device. In a preferred embodiment, the gas sensing wire of the present invention is supported on a fluorine-resistant convex material such as a KF flange formed of Vespel® polyamine, aluminum or nickel. In various embodiments of the invention, the Vesp el® polyamidolide is a relatively small polyamine material, but other polyamines or polymers are known (e.g., 19 13.60152).

The construction material of the polyhard) can be optionally used. Figures 9A and 9B illustrate a gas sensor array 70 comprising a Vespel® polyamido flange 74 supporting a Vespel® polyamine block 76 and two sets of nickel-crushed electro-acupuncture needles 78 thereon for suspension Two nickel-coated niobium carbide gas sensing wires 7 2 of the same or different in structure

The free-standing structure of the nickel-coated niobium carbide gas sensing wire allows it to act as both a fluorine sensing element and a heating source (for example, tending to resistive heating or other heating modes), and to maximize the sensing area as a high surface area of the wire. The result of the volume feature. The integrated design of the gas sensing wire and associated package eliminates the problem of chemical attack by a strong fluorinated gas species in the sensing environment, which is the basis for achieving the standard 矽 Micro Electro Mechanical Systems (MEM S) structure. The present invention thus provides, in one aspect, a novel group of solid state gas sensors that can be coupled to a process chamber in a sensing relationship, such as a semiconductor process chamber, and by being such a wire sensor A variety of different sensitivities and responsiveness are achieved by appropriate selection of materials and structures. The present invention provides, in another aspect, a novel filament-based gas sensor element having an elongated shape and having a two-electrical connection end and a longitudinal axis. The two electrical terminals of the gas sensor element define a line, the longitudinal axis of the gas sensor element being substantially perpendicular to the line. For a gas sensor with a given composition of filaments, the appearance of its longitudinal dimension (L) and its lateral dimension (D) has a significant effect on its signal strength and response time. In general, a larger L/D ratio has a higher signal strength and a shorter response time. Since the vertical axis of the novel gas sensor element of the present invention is substantially vertical 20 13.60152 to the longitudinal end L/D is extended 110 sense

The vertical connection of the separate lengthwise connection of 97. 1 year is defined by the transverse line defined by the two electrical connections. The dimension of the gas sensing direction (for example, the dimension along its longitudinal axis) is not laterally interposed therebetween. The distance is limited and can therefore be increased by a ratio, which is followed by improved signal strength and reduced response time. For purposes of illustration, FIG. 10 shows a preferred long gas sensor element 110 in accordance with the present invention having a wishbone-shape and by attaching filaments 1 1 1 and 1 1 The upper ends of 2 are together, but they are formed from such a wire. The separate lower ends of the wires 111 and 112 thus form ends 110A and 110B, whereby a current can be supplied to the gas sensor element for temperature sensing at elevated temperatures. The gas sensor 5 axis 110C (shown in vertical dashed line) is lined perpendicular to the line defined by the ends 110A and 110B (shown in horizontal dashed lines). 14The coloring month EiV 7 has no "ΐ component~ electrical Even to maximize the specific device components, the two gas ends are electrically connected to each other by the extension: piece 1 1 0

The size of such a good letter is increased by the scale sensing the form, the extended gas sensor element 1 1 〇 has a gas sensor element 1 1 that is not defined by the distance between the two electrical connections. The longitudinal dimension of the crucible can be significantly increased in intensity and reduced in response time required for gas sensing, and its lateral dimension (eg, along the boundary of the two electrical connections or between the two electrical connections) the distance between). 11 shows another extender element 120 in accordance with another embodiment of the present invention. The extended gas sensor element 120 has a longitudinal shape. As a result, it is not necessary to change the line gas one key 21 13.60152 97 1. 14 ψ· ^ ! Year Month 5: ' ti 孑 丨 key keyhole shape (keyhole-shape) and by bending and forming a single gas Formed by sensing the wire. The two ends of the bent/formed gas sensing wire form two electrical connecting ends 120A and 120B of the gas sensor element 120, and a current can pass through the electrical connecting ends 120A and 120B at an elevated temperature. The extended gas sensor element 120 is for gas sensing. The longitudinal axis 120C of the gas sensor element 120 (shown in vertical dashed lines) is lined perpendicular to the line defined by the two electrical connections 12A and 120B (shown in horizontal dashed lines).

Figure 12 shows another elongated gas sensor element 130 having an open hairpin shape and formed by bending a single gas sensing wire. The two ends of the curved gas sensing wire form two electrical connection ends 130A and 130B of the gas sensor element 130, and a current can pass through the extended connection via the electrical connection ends 130A and 130B at an elevated temperature. Gas sensor element 130 is for gas sensing. The vertical axis 1 3 0 C of the gas sensor element 1 30 (shown in vertical dashed lines) is lined perpendicular to the line defined by the two electrical connections 130A and 130B (shown in horizontal dashed lines).

Figure 13 shows another elongated gas sensor element 140 having a meander shape and by attaching four gas sensing wires 1 4 1 , 1 4 2, 1 4 3 and 1 4 4 in the form of serrations. Formed at the end. One end of the wire 1 4 1 and one end of the wire 14 4 form two electrical connecting ends 140Α and 140Β of the gas sensor element 140, and a current can pass through the electrical connecting end 140Α and 140Β at a temperature rise The extended gas sensor element 140 is for gas sensing. The longitudinal axis 140C of the gas sensor element 140 (shown in vertical dashed lines) is oriented perpendicular to the line defined by the two electrical terminals 140Α and 140Β (shown by a horizontal dotted line 22 1360152 97. 1. 14 months 5 :' "L side especially shown." '--

It is noted that many other shapes and configurations of the extended gas sensor element are possible and can be used in the practice of the present invention, but for illustrative purposes only some illustrative specific examples are shown herein. 1 〇 to 13. Those of ordinary skill in the art will be able to readily modify the shape and configuration of the extended gas sensor elements as shown in Figures 10 through 13, and any such modifications, based on the disclosure provided herein and without undue experimentation. Within the broad scope of the invention. To achieve high gas sensitivity and minimize response delay, the extended gas sensor elements of the present invention preferably have an appearance greater than 3, and more preferably greater than 10' and preferably greater than 50. An extended gas sensor component as described above can be mounted on a support structure to form a gas sensor assembly that can be placed on a fluid channel for detecting the target The existence of gas species. The gas sensor assembly can also include means for detecting changes in the gas sensor element as it contacts the target gas species, and means for indicating an output of the response to produce an output signal. In a preferred embodiment, the gas sensing wire of the present invention is supported on a fluorine-resistant flange material such as a KF flange formed of Vespel® polyamine, aluminum or nickel. In various embodiments of the invention, Vespel® polyamidones are preferred for the construction of polyamidoamine materials, although it is to be understood that other materials of construction of polyamines or polymers (e.g., polysulfones) are optionally employed. 23 1360152 π i. η 年月Λ .__ This support structure provides physical support and is connected to the gas sensor element via a two-electric connection, and the support or installation of the support structure must therefore accommodate at least the gas sensor The second electrical connection of the component. Minimizing the surface area or footprint of the support structure, the gas detector elements of the present invention are configured and constructed such that their longitudinal axes are substantially perpendicular to the support or mounting surface of the structure. In this way the footprint of the support structure can be reduced without affecting or including the L/D ratio of the gas sensor element.

Figure 14 shows a gas sensor assembly 150 that includes a support structure 152 having a flat or mounting surface 154. Mounting surface 154 package Pressing point 1 5 3 for mounting the shape of the wishbone gas sensor element 1 5 1 Electrical connection end 1 5 1 A and 1 5 1 B. In this manner, the gas sensor element is mounted to the support structure 152 in a "vertical" manner, i.e., has its 151C orientation perpendicular to or substantially perpendicular to the mounting of the support structure 152 φ φ because of the gas sensor element The longitudinal axis is substantially perpendicular to the mounting surface of the support, and the longitudinal dimension of the gas sensor element can be significantly increased to improve signal strength and reduce response time without increasing the area of the surface. Accordingly, the gas sensor assembly of the present invention advantageously provides gas sensing capabilities and reduced footprint. In addition, the vertical mounting of the gas sensor elements provides the flexibility to thermally expand and contract such gas sensor elements along their longitudinal axes. Therefore, the present invention achieves significant advances in the field of gas sensing by providing an extended gas sensor element as described above, which can be repaired vertically! 7 辋 endless electrical surface for the somatosensory support area surface support The two 15 1 longitudinal axis surface reinforced surface reinforcement table is reinforced by the Titian 24 1360152 37. 1. 14 , f year and month mounted on a support structure. For the detection of fluorine gas species, the present invention preferably uses a fluorine-reactive metal wire, such as the nickel-containing wire as described above, to form such an elongated gas sensor element. By monitoring the change in the properties of the wire caused by its reaction with the fluorine species, the detector can determine whether a particular gaseous environment, such as the outflow gas stream exiting the semiconductor chamber cleaning process, has one or more of the desired fluorine species. The presence/or concentration.

Specifically, a pair of nickel-coated sic carbon fibers can be aligned side by side and then attached at one end thereof, but leaving the opposite ends of such nickel-coated SiC carbon fibers unattached and separated from each other to form one having two The electrical sensor end is a gas sensor element of one of the above-described wishbone shapes. Alternatively, such a wishbone-shaped gas sensor element can be formed by aligning a pair of uncoated SiC carbon fibers and attaching them at one end thereof to form a wishbone shape precursor structure, which can then be coated A layer of gas sensing material, such as a recording or town alloy. For quantitatively measuring the signal intensity and responsiveness of the gas sensor element of the present invention, the exhaust gas containing fluorine species from the semiconductor clean room is simultaneously in contact with a first gas sensor assembly and a second gas sensor assembly. The first gas sensor assembly includes a vertically mounted, bone-shaped gas sensor component (WISHBONE), the second gas sensor assembly including a horizontally mounted straight nickel coated SiC carbon fiber, two All generate a set of sensor signal outputs. The signal output produced by the vertically mounted wishbone-shaped gas sensor elements of the present invention and the signal output produced by the horizontally mounted straight nickel coated SiC carbon fibers are then superimposed as a function of time to reveal their relative signal strengths. 1360152 97. I. 14 ^ year 曰 f · degree and responsiveness. ~ - Figure 15 shows the signal output versus time (indicated by the solid line) produced by a gas sensor assembly comprising a vertically mounted, gas-shaped gas sensor element, the bone shaped gas sensor The component is formed by coating two SiC carbon fibers with nickel. The relationship of the signal output versus time produced by a gas sensor assembly comprising a horizontally mounted straight nickel coated SiC carbon fiber is indicated by a dashed line. Significantly, the wishbone-shaped gas sensor element provides a faster response and a stronger signal than the straight nickel coated SiC carbon fiber sensor. The fluorosensor assembly of the present invention may comprise a single gas sensing wire or a single elongated gas sensing element, or a plurality of such gas sensing wires and/or gas sensing elements, in any of a number of suitable forms described above, wherein The multifilament and/or sensor elements provide excess or support sensing capabilities, or wherein different types of multifilament and/or sensor elements are configured to monitor different types of gas species or gas volumes in the gas stream .

Furthermore, the wires and/or sensor elements in the array can operate in different modes or in a correlated mode, including but not limited to constant current (CC) mode and set voltage (CR) mode, for computational manipulation such as Subtracting the generation of individual signals to produce a net indication signal or otherwise adding a method to produce a composite indication signal or in any other suitable manner, wherein the multiplicity of wires and/or sensor elements is effectively Used to monitor the flow of different target gas species in the gas stream or the volume of the gas being measured to generate relevant signals for monitoring or control purposes. Examples of multiple tamper sensing wires and/or sensor elements provided 26 1360152 1· Π~^ ηζ I Year δ'Λ j

In addition, the different species of Si of the multiple gas sensing wires and/or sensor elements can be 'constructed or configured for sensing different gas species in the fluid environment being monitored, and/or the same at different temperatures The gas type, and the different geometries and configurations of the wire and/or sensor elements can be used for excess and/or to ensure accuracy and the like.

Regarding the use of gas sensing wires and/or gas sensing element arrays, advanced data processing techniques can be used to boost the output of the sensor system. Examples of such techniques include, but are not limited to, the use of compensation signals, the use of time varying signals, heater currents, lock amplification techniques, signal averaging, signal time derivation, and impedance spectroscopy techniques. In addition, advanced techniques in the category of chemometrics can also be applied. These techniques include least squares fit, inverse least squares, principal component regression, and partial least squares data analysis.

The gas sensing wire or/and the gas sensing element of the present invention may thus be coupled to a converter, computing module or other signal processing unit in a suitable manner to provide one or more of the fluid environments being monitored. An indication of the presence or amount of change in the target gas species. It is to be understood that a micro-hotplate structure that can be adapted to the application of the present invention can be used in the gas sensor assembly of the present invention, as more fully disclosed to Frank DiMeo, Jr. and Gautam Bahndari on July 24, 2001. U.S. Patent No. 6,265,222, the disclosure of which is incorporated herein by reference. While the invention has been described with respect to the specific embodiments and the various embodiments of the invention, it should be understood that

The invention, and based on the disclosure herein, other variations, modifications, and others are readily available to those skilled in the art. Therefore, the present invention is intended to be broadly constructed in accordance with the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view schematically illustrating a gas sensing wire including a weathering coating structure encapsulating a carbonized carbide core structure according to an embodiment of the present invention;

2 shows a partial cross-sectional view of a composite core structure according to an embodiment of the present invention; FIG. 3 shows an output signal versus time relationship generated by a gas sensor assembly using nickel coated silicon carbide wire and a residual gas analyzer (RGA) unit produces an output signal versus time relationship; Figure 4 shows the output signal versus time relationship generated by a gas sensor assembly using a nickel wire and the output signal pair generated by a residual gas analyzer (RGA) unit. Figure 7 shows a perspective view of a nickel wire comprising a neck that has been electrochemically thinned according to one embodiment of the invention; Figure 6 is an illustration of a porous nickel coating according to one embodiment of the invention. A cross-sectional view of a gas sensing wire; Figure 7 is a SE Μ lithography of a gas sensing wire comprising a porous nickel coating formed on a compact substrate in accordance with one embodiment of the present invention:

Figure 8 is a view showing an embodiment of the present invention comprising a porous nickel coating characterized by an open pore structure of a gas sensing filament, S Ε Μ lithography I, Figs. 9 and 9 are shown to contain two nickel coatings. Carbonized crepe gas sensing 28 1360152

The body sensing wire assembly is suspended by pressing the electro-acupuncture to the KF flange; Figure 10 shows a gas sensor element formed from two gas-shaped wishbone shapes in accordance with one embodiment of the present invention; Figures 11 through 13 An extended gas sensor element of various shapes and configurations is shown; Figure 14 shows a cross-sectional shape gas sensor element mounted vertically on a support structure in accordance with one embodiment of the present invention;

Figure 15 Comparison of the signal response versus time relationship generated by a vertically mounted wishbone shape gas sensing element (WISHBONE) versus the time response of a horizontally mounted straight nickel coated SiC carbon fiber (XENA) versus time for the same test conditions. 》 【Main component symbol description】 1 Gas sensor wire 2 Coating 6 Core structure 10 Tantalum fiber 12 Broken core 16 Cold-carburized sheath 1 8 Carbon surface 22 Nickel wire 25 Nickel wire 26 Tight core 28 Porous Surface 3 2 compact substrate 29 1360152

34 Nickel coating 42 Compact tantalum carbide substrate 44 Multi-strand nickel coating 70 Gas sensor array 72 end · Hydrazine gas sensing wire 74 Polyimide flange 76 Polyurethane block 78 Electro-acupuncture 110 Extended Gas sensor element 1 1 0A Electrical connection point 1 1 0B Electrical connection point 1 1 0C Vertical axis 111 Gas sensing wire 112 Gas BA body sensing wire 120 Extended gas sensor element 1 20 A Electrical connection Point 1 20B Electrical connection point 1 20C Vertical axis 130 Extended gas sensor element 1 3 0A Electrical connection point 1 30B Electrical connection point 1 3 0C Vertical axis 140 Extended gas sensor element 1 40A Electrical connection point

%1· U启不年月ΕΓ.·' 7"诏无I 30 1360152 1 40B Electrical connection point 9ryT3-#zi 年月曰.·'..补无1 40C Vertical axis 14 1 Gas sensing wire 142 Gas sensing wire 143 Gas sensing wire 144 Gas sensing wire 150 Gas sensor assembly 15 1 Bone shape gas sensor element 1 5 1 A Electrical connection point 1 5 1 B Electrical connection point 1 5 1 C longitudinal axis 152 15 3 support structure crimp point 154 mounting surface

31

Claims (1)

1360152 X. The patent scope is 1 °, the bamboo patent case (beer repair) 1. A gas sensor assembly, the gas sensor assembly includes a gas sensing wire (gas - sensing fi 1 ament) The gas sensing wire has at least one outer surface substantially composed of nickel or a nickel alloy, and is adapted to detect at least one property of the gas sensing wire contacting a target gas speices over time A change, and responsively generating an output signal representative of a change in the concentration of the target gas species over time. 2. The gas sensor assembly of claim 1, wherein the target gas species comprises a fluoro species selected from the group consisting of NF3 'SiF4' C2F6, HF, F2, C0F2, C1F3, A group of IF3 and the above-mentioned activated species. 3. The gas sensor assembly of claim 1, wherein the gas sensing filament is characterized by an average diameter of less than about 50,000 microns. 4. The gas sensor assembly of claim 1, wherein the gas sensing filament is characterized by an average diameter of less than about 150 microns. 5. The gas sensor assembly of claim 1, wherein the gas sensing filament is characterized by an average diameter of less than about 50 microns. 6. The gas sensor assembly of claim 1, wherein the gas sensing wire is characterized by an average diameter of from about 1 micron to about 30 micron 32 1360152 rv. Congratulations: within a range of cVt The gas sensor assembly of claim 1, wherein the gas sensing wire is characterized by a length greater than about 1 cm. 8. The gas sensor assembly of claim 1, wherein the gas sensing wire is characterized by a length greater than about 5 centimeters. 9. The gas sensor assembly of claim 1, wherein the gas sensing wire comprises a coating structure encapsulating a core structure, wherein the coating structure comprises nickel or a nickel alloy, and wherein the core The resistivity of the structure is higher than the resistivity of the coating structure and the thermal capacity of the core structure is lower than the heat capacity of the coating structure. The gas sensor assembly of claim 9, wherein the core structure has a resistivity at least about 50 times higher than that of the coating structure, and Wherein the core structure has a heat capacity that is less than 3/4 of the heat capacity of the coating structure. 1 1. The gas sensor assembly of claim 9, wherein the core structure has a resistivity at least about 1 time higher than a resistivity of the coating structure, wherein the core structure has a heat capacity less than The coating structure has a heat capacity of 1/2. 1 2. A gas sensor assembly as claimed in claim 9 wherein the core 33 The core structure 1360152 has a resistivity of at least about 10 m Ω . C m , and wherein the heat capacity is less than 2.5 J/K·cm 3 . The gas sensor assembly of claim 9, wherein the core structure comprises a nickel-copper alloy, and wherein the coating structure consists essentially of nickel. 1 4. The gas sensor assembly of claim 9, wherein the core structure comprises carbon carbide. The gas sensor assembly of claim 9, wherein the core structure comprises a composite fiber having a plurality of layers of different materials. The gas sensor assembly of claim 9, wherein the core structure comprises a composite fiber having one carbon core fiber coated with a tantalum carbide layer. The gas sensor assembly of claim 1, wherein the gas sensing wire is electrochemically thinned after the gas sensor assembly is manufactured, and the gas sensing wire is characterized in that The average diameter is no more than 50 microns. 18. The gas sensor assembly of claim 17, wherein the gas sensing wire is characterized by an average diameter of no greater than 25 microns. 34 1360152 _年丨十 L: /相丨;... 1 9. As for the gas sensor of claim 17th, the f gas sensing wire is characterized by an average diameter of not more than 1 〇 micron 2 0. The gas sensor assembly of claim 17, wherein the gas sensing wire is characterized by an average diameter in the range of from about 1 micron to about 5 microns. The gas sensor assembly of claim 1, wherein the gas Φ body sensing wire comprises a nickel-copper alloy containing a total weight of the alloy of from about 10% to about 90. % nickel with from about 10% to about 90% copper. 2. The gas sensor assembly of claim 2, wherein the nickel-copper alloy further comprises from about 1% to about 90% of the total weight of the alloy. 23. The gas sensor assembly of claim 22, wherein the copper alloy further comprises one or more selected from the group consisting of Qin, Syria, Luo, Yin, Silver, and A metal of the group consisting of ruthenium, palladium, silver, iridium and platinum. 2. The gas sensor assembly of claim 1, wherein the gas sensing wire comprises a porous coating of nickel or a nickel alloy. 2 5. A gas sensor assembly as claimed in claim 24, wherein the porous coating is characterized by a plurality of open pore structures. 35 1360152 2 6. For example, the gas sensor of the first application scope of the patent scope 1 ^.. !p within the year / picking 丨 吏 吏 吏 吏 吏 吏 吏 吏 吏 吏 吏 悬挂 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体 气体The gas sensor assembly of clause 26, wherein the support structure comprises a material that is resistant to the target gas species. 28. The gas sensor assembly of claim 26, wherein the target gas species comprises a species selected from the group consisting of NF3, SiF4, C2F6, HF, F2, COF2, C1F3, IF3, and the like a population consisting of active species, and wherein the support structure comprises a material selected from the group consisting of polyimine, aluminum or nickel. 29. A method for monitoring the presence of a target gas species in a fluid locus, the method comprising: exposing a fluid at the fluid site to a gas of claim 1 a sensor assembly; monitoring at least one property of the gas sensing wire of the gas sensor assembly; and responsively generating an output signal when the gas sensing wire exhibits a change in at least one property thereof, To indicate the concentration change of the target gas species in the fluid site. 30. The method of claim 29, wherein at least one property of the gas sensing wire monitored by t is the electrical resistivity of the gas sensing wire. 36 1360152 3 1 . A gas sensor assembly comprising a gas sensing wire, the gas sensing wire comprising a coating structure encapsulating a core structure, wherein the coating structure Including a gas sensitive material that exhibits a detectable change in one of the presence or concentration of a gas species that is in contact with one of the targets, and wherein the core structure is characterized by a higher resistivity of the core structure than the The resistivity of the coating structure and the thermal capacity of the core structure is lower than the heat capacity of the coating structure. 3 2. A gas sensor assembly, the gas sensor assembly comprising a gas sensing wire comprising a coating structure and a core structure, wherein the coating structure comprises nickel or nickel An alloy, wherein the core structure comprises niobium carbide, wherein a resistance of one of the gas sensing filaments changes with time in response to a change in concentration of a target gas species, and the target gas species is located to expose the gas Sensing wire in one of the environments. A gas sensor assembly comprising a gas sensing wire, the gas sensing wire comprising a coating structure and a core structure, wherein the coating structure comprises nickel or nickel An alloy, wherein the core structure comprises a carbon center and a tantalum carbide sheath, wherein a resistance of the gas sensing wire changes with time in response to a change in the concentration of a target gas species, and the target The gas type is located in an environment exposing the gas sensing wire to 0 37 1360152%\ 翻jj3. A gas sensor assembly, the gas sensor assembly includes a thinned gas sensing a wire, the gas sensing wire comprising nickel or nickel wire, wherein the wire is characterized by an average diameter of no more than 50 micrometers, wherein a resistance of the gas sensing wire is dependent on a change in concentration of a standard gas species over time The time is changed, and the target gas type is located in an environment in which the gas sensing wire is exposed. 35. A method for forming a total Φ of a gas sensor of claim 34, comprising the steps of: (a) providing a gas sensor assembly precursor, the gas sensor total The precursor comprises a gas sensing wire comprising nickel or nickel wire, wherein the wire has an average diameter greater than 50 microns; (b) electrochemically thinning the gas sensing wire for a sufficient period of time to reduce the The gas sensing wire has an average diameter of no more than 50 microns. 3 6 - A method for forming a gas sensor assembly, comprising the steps of: (a) providing a gas sensor assembly precursor, the gas sensor assembly precursor comprising a gas sensing a wire, the gas sensing wire comprising nickel or nickel wire, wherein the gas sensing wire is designed to exhibit a resistance that changes with time in response to a change in the concentration of a target gas species, and the target gas species Is located in an environment in which the gas sensing wire is exposed; (b) electrochemically thinning the gas sensing wire for a sufficient period of time to reduce the average diameter of the gas sensing wire. 38 1360152 3 7. A gas sensor assembly comprising a gas sensing wire, the gas sensing wire comprising a nickel-copper alloy, wherein the nickel-copper alloy comprises between about 10% and 90% Nickel and about 10% to 90% of copper, wherein one of the resistances of the gas sensing wire changes with time in response to a change in the concentration of a standard gas species, and the target gas species is located to expose the gas Sensing wire in one of the environments. 3 8. A gas sensor assembly, the gas sensor assembly comprising a gas sensing wire, the gas sensing wire comprising a nickel-copper aluminum alloy, wherein a concentration of a target gas species is determined over time In one variation, one of the gas sensing wires changes in electrical resistance over time, and the target gas species is in an environment that exposes the gas sensing wire. 39. The gas sensor assembly of claim 38, wherein the nickel-copper aluminum alloy comprises from about 10% to about 90% nickel, from about 10% to about 90% of the total weight of the alloy. The copper is from about 10% to about 90% aluminum. 4 0. A gas sensor assembly, the gas sensor assembly comprising a nickel-containing gas sensing wire having a porous surface, wherein a concentration corresponding to a target gas species A change in time, one of the resistances of the gas sensing wire changes over time, and the target gas species is located in an environment in which the gas sensing wire is exposed. 39 1360152 Multi/Flip 4 1 · As for the gas sensor 1 of the patent application category 40, the porous surface is characterized by a plurality of open pore structures. 42. A gas sensor assembly, the gas sensor assembly including a support structure for suspending a free-standing gas sensing wire, wherein the support structure comprises a selected one from the group a fluorine-tolerant material of a group consisting of amines, aluminum, and nickel, wherein a resistance of a gas sensing wire changes with time in response to a change in the concentration of a target gas species, # and The target gas species are located in an environment in which the gas sensing wire is exposed. 4 a gas sensor assembly disposed in a process chamber in a sensing relationship, the process chamber being susceptible to one or more standard fluorine species, wherein the gas sensor assembly comprises a nickel or nickel An alloy gas sensing wire mounted on a support structure comprising one of polyimide, aluminum and nickel that is resistant to fluorine and adapted to detect the gas sensing wire contacting the target A change in at least one property of the fluorine species, and responsively producing an output signal representative of the presence of the target fluorine species. 44. An extended gas sensor component formed from one or more gas sensing wires, the elongated gas sensor component comprising two electrical connecting ends and having a longitudinal a shaft, wherein the longitudinal axis of the sensor element is substantially perpendicular to a line defined by two electrical connections of the sensor element, wherein the gas is responsive to a change in concentration of a target gas species over time One of the resistances of the sensing wire changes with time, and the gas type of the standard 40 1360152 is located in an environment in which the gas sensing wire is exposed - ti -: , 4 5 as an extension of the patent application range 4 4 A gas sensor element, wherein the one or more gas sensing wires are characterized by an average diameter of less than about 500 microns. 4. The extended gas sensor element of claim 4, wherein the one or more gas sensing filaments are characterized by an average diameter of less than about Φ 150 microns. The extended gas sensor element of claim 4, wherein the one or more gas sensing wires are characterized by an average diameter of less than about 50 microns. 4. The extended gas sensor element of claim 4, wherein the one or more gas sensing wires are characterized by an average diameter in the range of from about 0.1 μm to about 30 μm. . 49. The extended gas sensor element of claim 44, wherein the length along its longitudinal axis is greater than about 1 centimeter. 50. An extended gas sensor element according to claim 4, characterized in that the length along its longitudinal axis is greater than about 10 cm. 41 1360152 5 1 its special 52 its special 53 the extension of the core 54 of which 50 times the amount An extended gas sensor element as claimed in claim 44, wherein the length along its longitudinal axis is greater than about 20 cm. An extended gas sensor element as claimed in claim 4, in the shape of a wishbone. An extended gas sensor element according to claim 44, wherein the long gas sensor element comprises a nickel-coated one of the core structures, wherein the core structure has a higher electrical resistivity than the nickel-containing coating The resistivity and the heat capacity of the core structure are lower than the heat capacity of the recorded coating. An extended gas sensor element according to claim 5, wherein the core structure has a resistivity at least higher than a resistivity of the nickel-containing coating, and wherein the core structure has a heat capacity smaller than the recorded coating The heat capacity is 3/4 ° 55, where 1000 capacity 56 is constructed. • The extended gas sensor element of claim 5, the core structure has a resistivity at least higher than the resistivity of the nickel-containing coating. About twice, and wherein the core structure has a heat capacity less than 1/2 of the heat of the nickel-containing coating. The extended gas sensor element of claim 5, wherein the core structure has a resistivity of at least about 10 m Ω . c m and the core junction heat capacity is less than 2.5 J/K.cm 3 . 42 1360152 f叩年%>Amendment-/微习' II _1_一·,. 57. The extended gas sensor element of claim 53 wherein the core structure comprises a nickel-copper alloy, and wherein The nickel-containing coating consists essentially of a town. 5 8. The extended gas sensor element of claim 5, wherein the core structure comprises niobium carbide. 5. The extended gas sensor element of claim 5, wherein the core structure comprises a composite fiber having one of a plurality of different materials. The extended gas sensor element of claim 5, wherein the core structure comprises a composite fiber having one carbon core fiber coated with a tantalum carbide layer. 6 1. The extended gas sensor element of claim 4, wherein the extended gas sensor element comprises a nickel-copper alloy. 62. The extended gas sensor component of claim 44, wherein the extended gas sensor component comprises a nickel-copper aluminum alloy. 6 3. The extended gas sensor element of claim 26, wherein the extended gas sensor element further comprises one or more selected from the group consisting of titanium, vanadium, chromium, manganese, lanthanum, molybdenum, niobium, and palladium. Metal of the group consisting of silver, strontium and platinum. 43 1360152 , αν Supplement 64. The extended gas sensor element of claim 44, the extended gas sensor element comprises a porous coating of nickel or nickel alloy 65. As claimed in claim 64 An extended gas sensor element, wherein the porous coating is characterized by a plurality of open cell-like structures. 6 6 . A gas sensor assembly comprising an extended gas sensor element of claim 44 mounted on a # support structure, wherein the support structure comprises a surface The surface is used to mount the two electrical connection ends of the extended gas sensor element. 6 7. The gas sensor assembly of claim 66, the gas sensor assembly further comprising a member for detecting that the extended gas sensor element contacts a target gas type a change in at least one property of the time, and responsively producing an output letter representative of the existence of the target gas species 6 8. The gas sensor assembly of claim 67, wherein the target gas species comprises a fluorine species selected from the group consisting of NF3' SiF4, C2F6 'HF 'F2, COF2, C1F3, IF3 and A group consisting of the above-mentioned active species. 69. The gas sensor assembly of claim 68, wherein the 44 1360152 support structure comprises a material that is resistant to the target gas species. 70. The gas sensor assembly of claim 68 Wherein the support structure comprises polyimide or aluminum. The gas sensor assembly of claim 66, wherein the one or more gas sensing wires of the elongated gas sensor element comprise nickel or a nickel alloy. The gas sensor assembly of claim 71, wherein one or more gas sensing wires of the extended gas sensor element are electrochemically thinned after the assembly is manufactured The average diameter is not more than 50 microns. 7. The gas sensor assembly of claim 71, wherein the one or more gas sensing wires of the extended gas sensor element are characterized by an average diameter of no greater than 25 microns 7 4 . The gas sensor assembly of claim 71, wherein the one or more gas sensing wires of the extended gas sensor element are characterized by an average diameter of no greater than 10 microns. 75. The gas sensor assembly of claim 71, wherein the one or more gas sensing wires of the extended gas sensor element are characterized by an average diameter of 45 1360152 at about ο. 1 micron to 76. A method for monitoring the presence of a target gas species in a fluid site, the method comprising: exposing a fluid at the fluid site to a gas sensor of claim 66 Monitoring at least one property of the extended gas sensor component of the gas sensor assembly; and When the extended gas sensor element exhibits a change in at least one of its properties, an output signal is responsively generated to indicate the presence of the target gas species in the fluid location, or the target gas species in the fluid location The concentration changes. 77. The method of claim 76, wherein the at least one property of the extended gas sensor component monitored is the electrical resistivity of the extended gas sensor component. 78. A method for making an extended gas sensor component of claim 52, comprising the steps of: (a) aligning a pair of gas sensing wires side by side; and (b) connecting the pair of gas senses Measuring the first end of the wire and separating the opposite ends of the pair of gas sensing wires from each other, wherein the separated second ends of the pair of gas sensing wires form a second electrical property of the elongated gas sensor element Connection end. 46 The method of claim 78, wherein each of the gas sensing wires is formed by coating a wire with a gas sensitive material. 80. A method for making an extended gas sensor component of claim 52, comprising the steps of: (a) aligning a pair of wires side by side; and (b) connecting the first end of the pair of wires And separating the opposite ends of the pair of wires from each other to form a wishbone shape precursor structure; (c) forming a gas-sensitive coating on the precursor structure prior to the shape of the wishbone. 8 1 . A gas sensor assembly disposed in a process chamber in a sensing relationship, the process chamber being susceptible to one or more standard fluorine gas species, wherein the gas sensor assembly comprises a nickel-containing alloy a gas sensor component mounted on a surface of a support structure and coupled to a component for detecting at least the gas sensor component contacting the target fluorine gas species One of the properties varies and responsively produces an output signal representative of the presence of the target fluorine gas species, wherein the nickel-containing gas sensor element has a longitudinal axis that is oriented perpendicular or substantially perpendicular to The mounting surface of the support structure. 47 13.60152 'VII. Designated representative map: (1) The representative representative of the case is: (1). (2) Brief description of the symbol of the representative figure: 1 gas sensor wire 2 coating 6 core structure 8. If there is a chemical formula in this case, please reveal the chemical formula that best shows the characteristics of the invention: