TWI355686B - Plating apparatus for metallization on semiconduct - Google Patents

Description

丄1 IX, invention description: [Technical field to which the invention pertains] The present invention generally relates to a plating apparatus, more specifically to an electrochemical reactor, from a π 丨%% using θ ^ ', and on a substrate Forming a metal layer on a wafer to fabricate a very large scale integrated (ULSI) circuit interconnect junction φ [Prior Art] In the process of forming an interconnect structure in a I, on a thin resistive substrate J layer) Electrochemical deposition of a metal layer, usually a copper layer, is accomplished by a plating apparatus. The electroplating apparatus includes the following elements: a positive source, a conductive wafer holding device, and an electrolyte unit which contains a mixed solution of an acid, a metal salt and other additives. a, the first electric mine is in the private, the current density in the entire seed layer range • Yes ° due to the "edge effect" (four), so that the current around the substrate: a higher degree. This current density non-uniformity results in a relatively high plating rate at the edges of the wafer and a lower plating rate at the center of the wafer. The unevenness of the electro-coating due to the difference in plating rate between the edge and the center of the wafer makes the subsequent planarization step in the process flow of the device. - A system with independent power control can be applied to an electroplating apparatus to overcome the above-described disadvantages of uneven plating rates, and a system of the above is described in U.S. Patent No. 6,391,1,66. - When plating with an inert anode or multiple inert anodes, it will be at 5

In the process of electroplating, the company is prepared, A pure.. package. The bubble may also be supplemented by the electrolyte, or the electroplated wire, #〆工游jd 螂 and 补,,·口糸 by 2丨.....by ordering intervention or daily maintenance Introduced in the article. When the bubble forms a hole with the crystal m... ^, the hole is formed in the film, so that when the surface is in contact, it will be in the electric key, when the electrolyte is lowered in the case of taking a serious situation. The electric field will change when the bubble is generated. , and the electroplating equipment Jin Φ Α Α 曰 "王 „. + 4r electrolyte flow rate will be severely reduced due to the flow path is blocked. 攸丨 based and based on buoyancy and self-deprecation of the modern electroplating device / Defoaming devices are often used. When small gas (four) Γ疋 these devices usually do not work for small bubbles... when they are on a surface, they are difficult to be buoyant, under the tensile force generated by the typical flow rate in the appendix device. Manpower removal. The soil in the traditional technology # ★ The private flat surface of the 曰 曰 曰 曰 曰 曰 includes a porous layer, the porous layer has a variable fluid field and electric field, step by step 轧 轧 而不 而不 而不 „ Introducing a membrane surface area that enables small bubbles to become atmospheric ο: and increase de-bubbles. The large-scale size gradually becomes smaller, and it is necessary to add in the plating solution to achieve non-porous filling. These organic components decompose in the event of a bond. The decomposed product accumulates in the plating bath and reduces the filling of the I. If these products are incorporated as an impurity into the plating film, they become the nucleation core of the hole VIII, causing the reliability of the device to fail. • Killing the power of advanced electric clock technology in order to increase the discharge of plating solution and the freshness of the chemical reagents usually require higher costs. . The exchange rate of the fresh active organic component and the decomposed by-product in the electroplated red in the electrolyte near the surface area of the crystal 6 1355686 (the rate is quality control) ) will be uneven. However, this problem cannot be solved simply by increasing the discharge rate of the plating solution and the rate of replenishment. [Summary of the Invention]

An embodiment of the invention is a plating apparatus comprising an anode chamber containing at least two anodes, a cathode chamber containing at least two fluid regions, at least two anode circulation systems, at least two cathode circulation systems, a buffer zone, a ( A bubble trap, a power supply subsystem, an electrolyte fluid field control subsystem capable of effectively removing plating by-products, an electrolyte distribution subsystem, and a wafer holding device by forcing the bubbles to coalesce. The bubble trap device includes at least one porous membrane having a surface formed with a channel to collect bubbles and forcing the bubbles therein to gather and the cross-section of the pleated channel is V-shaped or inverted W, and the bubble is converged and then bubbled The channel or groove moves up and the axis + π, sanding and discharging. Moreover, the pleated channel increases the surface area of the bubble collector, so the flow area of the electrolyte is increased by θ, so that the electrolyte can still flow through the implementation of the invention when the small bubbles block the pores of the collection. The example also provides an electrolyte between the membranes in the warm-up zone & $ # "耵 buffer & field, which allows microbubbles through the bottom membrane - to dissolve between the arrival top ==. The time body field to the electroplated material table:: The method of effectively supplying organic additives to the surface of the electrolyte flow substrate near the surface of the wafer and effectively removing by-products from the surface of the electric ore base 7 1355686. The fluid velocity and the initial-cutoff β± error of the medium fluid region are achieved by the inter-suppression I44. The electrolyte fluid field control subsystem independently controls the fluid velocity and the start-stop time in each of the #5 control regions. The right choice of ^ an inter-fluid organic additive for the ancient 4 supply improves the filling of the vias, trenches and double large effective substrates on the substrate, while the effective removal of plating by-products is reduced, ', Q # gold 。 实施 实施 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The upper chamber 12 includes a plurality of cathode regions 120 having independent dangerous electrolyte inlets m. The anode regions 11 and the cathode: regions 120 are each separated by a plurality of longitudinally disposed partition walls 1 。 2. The lower 胪 11 and the upper portion The chambers 1 2 are interconnected by a laterally disposed bubble collector i 〇 5. In each of the anode regions of the lower chamber 11, a ring-shaped anode 1〇 is supported by a cavity base 107 and is independently controlled. The channel ΐ7 is connected. The cavity I 107 has a plurality of keyed struts for fixing the anode, the struts are coated with a non-conductive material. The bottom of the device is detachable to facilitate the replacement of the anode. The hard frame above the anode丨丨6 provides mechanical support for the bubble collector and the superstructure of the device. Each annular anode is monolithic or consists of a plurality of connected pieces. The f source of the plating apparatus includes a plurality of t source channels m. (4) a real For example, the lower chamber includes at least two anode regions 11〇. The partition wall 1〇2 surrounds each 8 丄 JJJ〇j50 ring > % pole 101 and separates electricity

The material is selected from the group consisting of non-conducting: liquid-dissolving fluid fields. Wall Example, separator II: chemical rot (iv) plastic. According to - there are several small holes which are located at the position of the soil bubble collector 105, as soon as the sin is used as a passage for the milk foam. According to another embodiment, the partition wall 102 has a top surface and a wide aperture to completely isolate the electrolyte in the adjacent anode region. ^ The electric current or the electric cover is applied by the electric power channel 丨7 independently by a snow-electric anode. Thunder - The original parent independent channel applies voltage and waveform to each of the 11⁄4 poles according to the preset time. The power supply can be a DC or de-pulse power supply. The β # anode body distribution subsystem is provided by a separate anolyte inlet 103 and an independent anolyte connected to the electrolyte flow control device in each anode region. 119 composition. The anode fluid distribution subsystem is used to supply electrolyte to each of the drain regions and to discharge old electrolytes, decomposition products and particles from one of the four drain regions. The separate anolyte circulation system in each anode region minimizes mixing between the anode electrolyte streams in different anode regions. The bubble collector 1 〇 5 is formed by attaching one or more permeable membranes to a rigid open or meshed frame, wherein the frame is tapered or inverted cone shaped. A groove 11 5 located at the periphery of the bubble collector frame collects air bubbles and guides them to a gas outlet. The groove 丨丨 5 may be inclined to form an angle with respect to the horizontal plane. A gas outlet port 1 is connected to the groove to discharge the collected gas. One or more attached permeable membranes 302 (see Figure 3a) can be designed for different functions up to 1355686. The underlying film is named as a barrier layer for the blister, blocking bubbles having a diameter greater than a few microns to tens of microns. The average side film Η % prevents decomposition products generated in the lower chamber from entering the upper electric _ ^ ^ ± electrolyte, which also provides a mechanical branch for the upper film. According to an embodiment, the membrane of the bubble collector is made of a porous oxygen-containing plastic selected from the group consisting of poly(ethylene) (m), ethylene (PVDF), polytetraethylene (pTFE), all gas alkoxy Resin (PFA), the average diameter of the pores on the membrane 胄^ to 5 0 # m. In another embodiment, the land film is used as a barrier to microbubbles having a diameter of less than 2 // m. This membrane allows the passage of specific T-shaped ions, but prevents the passage of macromolecules. According to an embodiment, the upper layer film is made of a fluorine-containing plastic having a specific functional group in the group, and the pores of the upper sound amine-enhanced film have an average diameter of 2 nra to 150 n id 〇 the permeable film a pleated pleat-like channel on the surface to enhance bubble collection

The effect of 'and increase the π, the heart area of the permeable membrane. The pleated channel has a V-shaped or inverted V-shaped cross section. This configuration is called forcing the bubble first to force the bubble to accumulate in the channel before directing the residual gas to discharge upward along the channel. According to an embodiment, the channel-like passages may be arranged radially, in a spiral arrangement or in an annular arrangement, and the angle between two adjacent side walls of the pleated channel is 10. To 120°. The maximum acupoint of each pleated channel is between 2mm and 30mm. The sum of the volume forces (ignoring gravity) added to a bubble in a static electrolyte solution is given by equation (1) and is closely related to the radius of the bubble: p ~~ ~ ngpr1 - βπηντ 3 (1) where F is the resultant force of the volume force, the radius of the bubble, ν is the velocity of the bubble 1355686. 々 is the drilling coefficient of the electrolyte solution. " Bubbles with small radii are difficult to make in the electrolyte solution. - The volumetric force they receive is small. In order to remove them, because of the removal, the gate η' effectively removes the bubbles from the electrolyte solution. The weight channel The moving path merges at the bottom of the channel ", large. When the size of the bubble becomes larger, it is larger: the space where it is gathered and the channel is moved upwards and the side-by-side/volume force will push them along. • Because of the further 'reduced pleats between the two adjacent side walls The angle of the contact reduces the resistance to the buoyancy effect caused by the contact of the bubble with the side wall, making it easier for the bubble to move to the bottom of the grooved channel. On the other hand, in the case where the surface of the film is increased by the surface area of the film, the total electrolyte flow area of the surface is 増, and the surface partially blocks the hole, it is considered that the film is allowed to maintain a sufficient flow of the electrolyte. The large surface area also increases the effect of specific ion transitions. Electrolysis In Figures 1 & 1 and 1 b, according to the embodiment, the upper chamber 1 2 includes a number of ? 120' has a circular cross section (except for the middle one, except for the cathode area, which has a circular cross section). The parent cathode region of the upper upper crucible chamber 12 has at least one independent supply, the inlet m, connected to the flow control of the electrolyte. Excess electrolyte overflows from the periphery of the upper chamber and flows out. The line of electrolyte inlet (1) passes through the bubble collector frame and the wall 1〇2 to each of the individual cathode areas 12〇. The electrocracking flow control device of the region can be set with different flow rates and switching times to enable the flow lines of the transfer field to be controlled or controlled locally at a particular process step. Local fluid field control is required to control the freshness of the electrolyte mixture, the surname, the sin near the surface of the plated surface, and especially the concentration of the right 妩> There is awkwardness; The concentration of organic additives - the concentration of organic additives and the defects on the coating 'picking speed of the sheep, the F Θ 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士 士The cucurbits of the cucurbits and silver are reacted to prevent them from binding to the film of the genus that is being produced. By removing by-products from the growth of Menghe, f #槿1 ψ Μ near the surface of the reaction, the vias and the structures in the 桧 structure: colonization right & π _ now "" can be minimized And make the final

Strong and sinful. The electrolyte flow control garment can be adjusted to obtain a uniform fluid field throughout the dry circumference of the shovel-coated substrate to ensure that the center of the sin-electric clock substrate is equal to the area of the edge portion and the edge portion. Fresh organic additives and the parental rate of 庑W and 夂 钊 products. Exchange of fresh organic additives and reaction by-products in the same area of the entire plating substrate

The rate ensures the uniformity of the composition of the final coating obtained by the snow, in other words, the final resistivity uniformity and resistance to the device fabricated at different locations on the substrate. Migration performance uniformity.

Knowing that 'by controlling the fluid field locally' can achieve the following effects: controlling the uniformity of the thickness of the plating film on the entire substrate; controlling the uniformity of the composition of the plating film on the entire substrate; controlling the entire substrate The uniformity of the resistivity of the plated film; controlling the uniformity of the electromigration resistance of the plated film on the entire substrate.

The upper end of the upper chamber 12 also has a fluid dispersing device 11 2 disposed adjacent the substrate such that a microscopic uniform fluid field is created at the top of each cathode region. According to an embodiment, the fluid dispersing device 11 2 is made of one of the following materials: a porous ceramic, a chemical resistant material resistant to chemical corrosion 12 1355686. A substrate holding device 121 located above the upper chamber 12 holds the substrate 122 and conducts current thereto. For a detailed description of the substrate holding device, reference is made to US 6, 248' 222, US 6, 726, 823, and US 6, 749, 728, each of which is incorporated herein by reference. The electrolyte solution from the anolyte tank 240 is supplied to each of the anode regions at a set of flow rates. The electrolyte solution passes through pump 233, filter 232, and flow control device 204 before reaching each anode region. The electrolyte in each anode region is returned to the anolyte tank 24 by an outlet 219 located at the bottom of the lower chamber. The returned electrolyte solution is controlled by flow control device 238. The gas collected in the lower chamber is discharged from the gas outlet 206 to the anolyte tank 24, and then sent from the anode electrolysis: tank 240 to the exhaust unit 241. A pressure leak valve m is located between the damper 232 and the anolyte tank 24A. The electrolyte solution in the catholyte tank 25 is supplied to each of the cathode regions at a set of flow rates. The 'electrolyte solution passes through pump 236, filter 235, and flow control device 208 before reaching the cathode region. The electrolyte per each cathode region is returned to the cathode electrolyte bath 250 via an outlet 218 located on the sidewall of the upper chamber. - Pressure leak ^ 237 is located between filter 235 and cathode electrolyte bath 250. The force leakage valve is called open when the flow control device 2 0 4 and 2 0 8 are closed. Figures 3a, 3b and 3c show a first embodiment of a bubble trap, wherein Figure 3a is a perspective view of the bubble collector's cross-section, and Figure 3 is shown. It is the detailed structure of the bubble collector and the partition wall. 13 As shown in Figures 3a and 3b, a plurality of radial pleated channels 3〇1 are located on a conical or inverted conical frame 300. As previously described, the warp pleated channel 301 has a V-shaped cross section. The electrolyte solution enters the upper chamber through a plurality of openings 3〇5 in the truss 30. After the coalescence, the bubbles move upward along the radial pleated channels, passing through the small holes 3〇8 of .307^, as shown in Fig. 3c. According to the shell example using the inverted cone, the upwardly moving bubble is gradually collected by the groove 315 around the bubble collector. Concave #315 is connected to the gas exiting the gas for collection, 3G6. In the latter figures, the illustrated embodiment ignores the grooves and the body outlet to simplify the description. According to an embodiment using a tapered frame, the air bag is collected at the tip of the cone/gas, and the collecting point of the gas is located, and the pipe of the gas outlet is located slightly below the highest point of the tip, and the gas outlet directs the gas to the anolyte. In the slot. Figures 4a, 4b and 4c show a second embodiment of a bubble trap, wherein Figure 4a is a perspective view of the bubble collector, Figure 4b is a partial cross section thereof, and Figure 4c is the bubble collector connected to the partition wall Part of the detailed structure. As shown in Figures 4a and 4b, a spiral-shaped pleated channel 4 is located on a tapered or inverted-conical frame 4, and the spiral pleated channels shown in Figures 4a and 4b are continuous and Cover the entire surface of the frame. The spiral folded channel 401. may have the same cross-sectional shape as the radial pleated channel described above. A plurality of openings 4〇5 are used for the passage of the electrolyte solution. The pooled bubbles move up the spiral pleated channels through apertures 408 in the barrier wall 407, as shown in Figure 4c. The moving gas 14 1355686 is collected and exported in a similar manner to the first embodiment. Figures 5a, 5b and 5c show a third embodiment of a bubble trap, wherein Figure 5a is a perspective view of the bubble collector, the figure "is part of its cross section and the ® 5c is a bubble trap connected to the wall 15 Partial detailed structure. As shown in Figures 5a and 5b, several annular pleated channels 5〇1 are located on a tapered or inverted cone (four) (four) 5〇〇, ring-shaped as shown in 5a#5b

: The channels are set at different vertical positions. According to an embodiment, adjacent sidewalls of each of the annular channels have the same angle. According to a further embodiment, the different annular pleated channels have different angles of loss between the side walls. For each annular pleated channel, it has the same cross-sectional shape as the radial pleated channel described above. Several openings 5〇5 are used to pass the electrolyte solution. The pooled bubbles in the lower passage are moved to the upper passage via the path 509 connecting the adjacent passages and the small holes 5〇8 in the partition 507, as shown in Fig. 5c. The gas moving upward is collected and derived in a manner similar to the first embodiment. Figures 6a, 6b, 6c and 6d show a fourth embodiment of a bubble trap, a perspective view of Figure 6a疋5H bubble collector, Figure 6b is a partial cross-section of 3 6 c and 6 d疋-bubble The collector is connected to the isolation wall in two ways to discharge the collected bubbles out of the detailed structure of the channel. This fourth embodiment is similar to the third embodiment except that the annular pleated channel 6〇1 is disposed at the same vertical position on a plane frame 6〇〇. 15 1355686. According to an embodiment, each anode region is an opening through which gas is not passed through the partition wall of the 'W': where the full separation - & is intersected with the electrolyte in the adjacent anode region . Each “wide anode electrolysis” includes a separate gas outlet to discharge the collected gas: the pole, the A2丨丄 clothing. In a 'β >, the pooled bubbles are collected in the horizontally pleated & s^ 隹 隹 伯 状 channel, and then connected by the highest part of each individual area with a v-shaped cross The path 6 〇 9 is delivered. The collected gas is discharged through the outlet duct 606 of the path = 609 and returned to the anode electrolyte tank via the partition wall 6 〇 7 as shown in Fig. 6c. In another embodiment, the pooled bubbles collected in the pleated channels are pressed by the hydraulic pressure formed by the flow of electrolyte into the gas outlet conduit 610 located very close to the highest portion having the v-shaped cross-sectional passage, and Return to the anolyte tank as shown in Figure 6d. In another embodiment, the passage between the two barrier walls has only a half V-shaped cross section. A wall cuts the channel at the lowest portion of the channel having a v-shaped cross section, and the latter wall intercepts the channel at the highest portion of the channel having a V-shaped cross section. In this particular arrangement, the surface between the two adjacent barriers no longer requires a pleated channel, and the bubble collector is suitable for situations where it is not necessary to completely remove all of the microbubbles. In Figures 6a and 6b, where 605 is the opening of the frame 600. Figure 7 shows the ratio of the total area of the membrane with the radially pleated channels to the total area of the membrane without the pleated channels. The variables used in the calculation are given in Table 1 /. The total area of the crucible having the radial pleated passage based on the first embodiment can be calculated via the formula (2). This ratio increases as the number of channels increases and the maximum height of the channel increases. The higher the ratio, the larger the area in which the electrolyte is circulated with 16 1355686. As shown, in the case of 200 radial pleated channels having a maximum height of 10 mm, the total area of the membrane is three times the total area of the membrane without pleated channels. Table 1 Radius of tapered base R Cone height Η Length of tapered busbar L Maximum height of pleated channel h Number of erected channels η

Φ-·\ (i?cos(-)-· R π .π. +--(i?cos(—)— v η n hAL1 -R1 sin2(-) + H2){s Η hAL2 -/?2 Sin2 (-)

H

(2) where ^ Jx2-^2sin^) r-TJi-~r-

fRc〇s^~ -~~h~~-)2^H2+j- + R2sm\^)(l-—)+L s =------:-- 2 Figure 8 shows bubble collection A cross section of a fifth embodiment of the device has a radially pleated channel and a buffer between the membranes. 17 1355686 As shown in Figure 8, the bubble collector has at least two permeable ridges 802, 803 with a buffer zone 804 located between the permeable membranes - the occupant 800 is used to support these permeable membranes . A plurality of openings as electrolyte inlets are provided in the same manner as in the first embodiment, and the pooled bubbles are moved upward and discharged in a manner similar to the first embodiment. In Fig. 8, 807 is a partition wall, 8 〇 6 is a gas outlet, and 815 is a groove. According to the embodiment shown in Fig. 8, there is a gap between the lower permeable membrane 8〇2 and the upper permeable membrane 803 to form a buffer region. The flow rate of the electrolyte in the buffer zone 804 is sufficiently slow that a 舄 most of the microbubbles passing through the underlying membrane provide sufficient time to dissolve in the domain due to its instability in the Ma·F a 。. Need to explain the difference, especially from the & + 疋 in this Shen Qing, "micro-bubble, refers to the teaching of the pore size smaller than the lower layer. Broadcasting;: [3 · from, 丄, 虱 / packet buffer The electrolyte in the area is independently controlled by an additional electrolyte circulation system. ^ U ^ is lower than the upper chamber. The pressure difference of U is read and saved. _ _ Internal turbulence to prevent micro-bubbles The film is temporarily attached to hinder the passage of ions through the upper film. The buffer region can be used in the embodiment of the bubble. The solid pattern is applied to any of the above-mentioned bubble collectors. A screenshot lb of the electroplating apparatus according to the embodiment of the present invention shows an exploded view of the electroplating apparatus of Fig. 1 and the substrate, wherein the substrate and its holding means are not shown;

C is a top view of the same self-electroplating apparatus 'where the fluid fraction 18 1355636 bulk apparatus, substrate and its holding means are not shown; Figure 2 shows a schematic diagram of the electrolysis cycle in the electroplating apparatus; Figure 3 a shows the first A perspective view of the bubble collector of the embodiment; Fig. 3b shows a cross section of the bubble collector shown in Fig. 3a; Fig. 3c shows a detailed view of a portion of the bubble collector connected to the partition wall; Fig. 4a shows a perspective view of the bubble collector of the second embodiment; FIG. 4b shows a partial cross section of the bubble collector shown in FIG. 4a; FIG. 4c shows a detailed view of a portion of the bubble collector connected to the partition wall; Figure 5a shows a perspective view of the bubble collector of the third embodiment; Figure 5b shows a partial cross section of the bubble collector shown in Figure 5a; Figure 5c shows the portion of the bubble collector connected to the wall Detailed view of Fig. 6a shows a perspective view of the bubble collector of the fourth embodiment; Fig. 6b shows a partial cross section of the bubble collector shown in Fig. 6a; Fig. 6c shows the bubble collection according to an embodiment And the wall Figure 6d shows a detailed view of the portion of the bubble collector connected to the partition wall according to another embodiment; Figure 7 shows the area ratio as a radial row with different maximum channel heights A function of the number of pleated channels of the cloth; Figure 8 shows a cross section of a bubble collector according to a fifth embodiment. 19 135*5686 Main component symbol description 1 1. Lower chamber 101. Anode 103. Anode electrolyte inlet 106. Gas outlet 1 10. Anode region 112. Fluid dispersion device 1 16. Frame 1 1 8 . Outlet 120. Cathode region 122 Substrate 206. Gas outlet 218. Outlet 232. Filter 236. Pump 235. Filter 238. Flow control device 241. Exhaust device 300. Frame 302. Permeable membrane 306. Gas outlet 308. Small hole 400. Frame 405. Opening 1 2. Upper chamber 102. Wall 105. Bubble collector 107. Cavity base 111. Catholyte inlet 1 15. Groove 1 1 7. Power channel 1 19. Anode outlet 121. Substrate holding device 204. Flow control device 208. Flow control device 219 • Outlet 233. Pump 234. Pressure leak valve 237. Pressure leak valve 240. Anolyte tank 250. Catholyte tank 3 0 1. Pleated channel 3 05. Opening 307. Isolation wall 315. Groove 401. Pleated channel 407. Isolation wall 20 1355686 408·λΙ, sub L 500. Frame 501. Pleated channel 505. Opening 507. Isolation wall 508. Small hole 509 Path 600. Frame 601. Pleated channel 605. Opening 606. Pipe 607. Wall 609. Path 610. Outlet pipe 802. Layer 803. The upper layer may be permeable membrane 804. The permeable membrane gas outlet buffer area 806. 807. 815. groove wall 21

Claims (1)

1355686 p· 一·August 16th, 100th correction replacement page, to § § month / έ曰 revision this ten, the scope of application patent: Α · A plating apparatus, including: ^ lower cavity, including several by several walls a divided anode region, wherein the parent anode region forms an anolyte circulation system; the upper chamber includes a plurality of cathode regions separated by the plurality of barrier walls, wherein the catholyte circulation system in each cathode region is independently controlled a gas/package collector disposed between the lower chamber and the upper chamber, wherein the gas/package collects the collected bubbles, forces the bubbles to coalesce, and directs the pooled bubbles out of the device; the bubble collector includes : one or more frames supporting one or more permeable membranes; a path for the aggregated bubbles to move up to a gas outlet; wherein the permeable membrane closest to the lower chamber has a V shape or a pleated channel of inverted V-shaped cross-section in which bubbles are collected and forced to coalesce; The permeable membrane closest to the upper chamber collects microbubbles passing through the permeable membrane closest to the lower chamber; a fluid dispersing device disposed at the top of the upper chamber; the substrate holding device 'located at the fluid dispersion Above the device, for holding the substrate and conducting current to the substrate; a power source having a plurality of independently controlled channels; an electrolyte flow control device for controlling an electrolyte of each region in the chamber; A plurality of fluid distribution subsystems for dispensing electrolyte into the chamber. 22 1355686 Aug. 16th, 100th, pp., the entire disclosure of which is incorporated herein by reference. 1 fluoroethylene (PVF) 'polyvinylidene fluoride (pvdf), polytetrafluoroethylene (PTFE), perfluorinated epoxy resin (PFA), with holes (4) between 2 (four) and 50 μηη 'the closest to the lower cavity The permeable membrane separates the decomposition products produced in the lower chamber from the electrolyte above it. 3. The device of claim 2, wherein the permeable membrane closest to the upper chamber is made of one of the following materials: polyvinyl fluoride (PVF), polyvinylidene fluoride ( PvDF), polytetrafluoroethylene (PTFE), perfluoroalkoxy resin (PFA) having a pore diameter of between 2 nm and 15 〇 nm, the permeable membrane closest to the upper chamber filtering the specificity in the electrolyte ion. 4. The device of claim 1, wherein an angle between two adjacent side walls of the pleated channel is [〇. Between 120°. 5. The device of claim 1, wherein reducing an angle between two adjacent side walls of the pleated channel reduces buoyancy effects caused by contact of the bubble with the sidewall The resistance causes the bubbles to move into the pleated channels and gather there. The apparatus of claim 1, wherein the increase in the number of pleated channels having a given maximum height increases the bubble collection. The effective surface area of the device. 7. The pleated channel as described in claim 1 is arranged radially in a device, characterized by a tapered or inverted tapered frame 8. The device of claim 1 , characterized in that the slightly shaped channel is arranged in a spiral on a conical or inverted conical frame. 9. The device of claim 1, wherein the channel is arranged in a ring shape. - a conical or inverted conical frame, said pleated arrangement, according to the object of claim 1, wherein the weight passages are arranged annularly on the same vertical position on the plane frame 〇11. The alpha device of claim 1, wherein the pleated channel is annularly arranged in a flat and 1^' ten-sided pivot on different vertical positions A 24 1355686 100 years 8 </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; Independently controlled channels. 13. The device of claim 1, wherein the bubble collector comprises one or more permeable membranes; a gap is formed between the turns to form a buffer region; The electrolyte in the area is independently controlled. B. The device of claim η, characterized in that in each of the cathode regions, at least one independently controlled electrolyte inlet is provided to control its local fluid field. The device of claim 2, wherein the partial steroids in the plurality of cathode regions are used to control reactants and by-products in the vicinity of the reaction surface of the substrate. And exchange. The device of claim 14, wherein the local portholes in the plurality of cathode regions are used to control the compositional uniformity of the plating film over the entire substrate.装置. The device of claim 14, wherein the device is characterized by a correction in the plurality of cathode regions at 25 13 55^6. The helium fluid field is used to control the filling performance throughout the substrate. The apparatus of claim 14, wherein the plurality of cathode regions are used to control the uniformity of resistivity of the plating film in the entire substrate. 19. The device of claim 14, wherein the device is characterized by a portion J within the plurality of cathode regions. The body % is used to control the uniformity of electromigration resistance of the electroplated film in the alternative garden. Soil 20. A plating apparatus comprising: ... 70 ' king, a separation domain, wherein each anode region comprises an independent anode 2? - Am a- a / . . The lower chamber 'includes a plurality of partitions Completely eight r - at least one independent gas outlet in the anode region of the king's knife; one, the % ring system and the upper chamber "including a plurality of isolated wall domains, which make the cathode in each cathode region Electrolyte circulation body: cathode area system; system is independently controlled bubble collector, collectors disposed in lower chamber and upper chamber include: (5) 'the bubble one or more frames supporting one or more permeable membranes 26 13556.86 Correction of the replacement page of August 16, 100, the permeable membrane having a pleated channel having a v-shaped or inverted V-shaped cross-section in which bubbles are collected and forced to coalesce, The gas permeable membrane is horizontally disposed; the permeable enthalpy is ten-angled in each of the anode regions, and is 10 from the horizontal plane. To 60. Angle; a body dispersing device disposed at the top of the upper chamber; a substrate holding device located above the fluid dispersing device for holding the substrate and conducting current to the substrate; having multiple independent controls Power supply for the channel; electrolyte/guar control device for controlling the electrolyte in various regions of the chamber; and several fluid distribution subsystems for dispensing electrolyte into the chamber. 21. The device of claim 20, wherein the permeable membrane closest to the lower chamber is made of one of the following materials: polyvinyl fluoride (PVF), polyvinylidene fluoride (PVDF), polytetrafluoroethylene (PTFE), perfluoroalkyl fluorene-based resin (PFA) with a pore size of between 50 μm. The permeable membrane closest to the lower chamber will be in the lower chamber. The resulting decomposition product is separated from the electrolyte above it. 22. The device of claim 20, wherein the permeable membrane closest to the upper chamber is made of one of the following materials: 27 1355 686 Aug. 16, 2014 Correction page. Fluoroethylene (PVF), polyvinylidene fluoride (PVDF), polytetrafluoroethylene (PTFE), perfluoroalkoxy resin (PFA), having a pore diameter of between 2 nm and 150 nm 'this closest to the upper part The permeable membrane of the chamber filters specific ions in the electrolyte. 23. Apparatus according to claim 2, wherein the gas in each anode zone is first collected at the highest ® position of the bubble collector and thereafter separately derived. The device of claim 2, wherein the bubble collector comprises one or more permeable membranes; a gap is provided between the ridges to form a buffer region; The electrolyte in the area is independently controlled. The device of claim 2, wherein in each of the anode regions, an anode is completely broken and the partition wall is completely separated, and the anode is connected to the power supply system. Independently controlled channel. The device of claim 20, characterized in that in each of the cathode regions, at least one liquid inlet is provided to control the localized fluid field of the independently controlled electrolysis 28 1355686 Correction August 16, 100 The apparatus of claim 26, wherein the plurality of cathode regions are used to control the transport of reactants and by-products near the reaction surface of the substrate. exchange. 28. The device of claim 26, wherein the localized fluid field within the plurality of cathode regions is used to control composition uniformity of the plating film throughout the substrate. 29. The apparatus of claim 26, wherein the g-cells in the cathode region are used to control the filling properties over the entire substrate. 30. The device of claim 26, wherein the plurality of cathode regions are used to control the uniformity of resistivity of the plated crucible in the entire substrate. . 3 1 · As claimed in the patent application, the device described in item 26 of the plurality of cathode regions is characterized in that the local fluid field is used to control the entire substrate 29 13556.86. : Correction of the replacement on August 16, 100 The electromigration resistance uniformity of the plated film within the page range. 30