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TWI347629B - Apparatus for treating substrates and method of treating substrates - Google Patents

Apparatus for treating substrates and method of treating substrates

Info

Publication number
TWI347629B
TWI347629B TW093120984A TW93120984A TWI347629B TW I347629 B TWI347629 B TW I347629B TW 093120984 A TW093120984 A TW 093120984A TW 93120984 A TW93120984 A TW 93120984A TW I347629 B TWI347629 B TW I347629B
Authority
TW
Taiwan
Prior art keywords
treating substrates
substrates
treating
Prior art date
Application number
TW093120984A
Other languages
Chinese (zh)
Other versions
TW200507038A (en
Inventor
Akinori Iso
Yukinobu Nishibe
Takahiko Wakatsuki
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of TW200507038A publication Critical patent/TW200507038A/en
Application granted granted Critical
Publication of TWI347629B publication Critical patent/TWI347629B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/54—Arrangements for reducing warping-twist

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Weting (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW093120984A 2003-07-18 2004-07-14 Apparatus for treating substrates and method of treating substrates TWI347629B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003199087 2003-07-18
JP2004191134A JP4421956B2 (en) 2003-07-18 2004-06-29 Substrate processing apparatus and processing method

Publications (2)

Publication Number Publication Date
TW200507038A TW200507038A (en) 2005-02-16
TWI347629B true TWI347629B (en) 2011-08-21

Family

ID=34379735

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093120984A TWI347629B (en) 2003-07-18 2004-07-14 Apparatus for treating substrates and method of treating substrates

Country Status (4)

Country Link
JP (1) JP4421956B2 (en)
KR (1) KR101055247B1 (en)
CN (1) CN100419501C (en)
TW (1) TWI347629B (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4627681B2 (en) * 2005-04-20 2011-02-09 芝浦メカトロニクス株式会社 Substrate processing apparatus and processing method
TWI319213B (en) * 2005-11-28 2010-01-01 Hitachi High Tech Corp A substrate processing device, a substrate processing method and a production method for a substrate
JP4557872B2 (en) * 2005-11-28 2010-10-06 株式会社日立ハイテクノロジーズ Substrate processing apparatus, substrate processing method, and substrate manufacturing method
JP4685618B2 (en) * 2005-12-13 2011-05-18 芝浦メカトロニクス株式会社 Substrate processing equipment
KR100835745B1 (en) * 2006-12-29 2008-06-09 최찬규 Top down glass thinning method
JP2008277556A (en) * 2007-04-27 2008-11-13 Shibaura Mechatronics Corp Substrate processing equipment
JP4575932B2 (en) * 2007-05-29 2010-11-04 化研テック株式会社 Pallet cleaning device and pallet cleaning method
KR100865475B1 (en) * 2007-08-30 2008-10-27 세메스 주식회사 Nozzle assembly, processing liquid supply apparatus having the same, and processing liquid supply method using the same
JP5362623B2 (en) * 2010-03-03 2013-12-11 大日本スクリーン製造株式会社 Substrate processing equipment
DE102010013909A1 (en) * 2010-04-01 2011-10-06 Lp Vermarktungs Gmbh & Co. Kg Apparatus and method for spraying a surface of a substrate
CN102094199A (en) * 2010-11-23 2011-06-15 黄佳佳 Etching equipment of electronic soft label
US8458842B2 (en) * 2011-05-10 2013-06-11 Nanya Technology Corp. Post-CMP wafer cleaning apparatus
KR101342616B1 (en) * 2013-04-26 2013-12-20 창성 주식회사 Vertical substrate detachment system
KR102223764B1 (en) * 2013-12-27 2021-03-05 세메스 주식회사 Apparatus and Method for treating substrate
CN105158829B (en) * 2015-07-30 2019-06-04 京东方科技集团股份有限公司 Substrate, color filter module, method for forming substrate module, and display device
JP6667241B2 (en) * 2015-09-28 2020-03-18 株式会社Ｓｃｒｅｅｎホールディングス Processing liquid supply device, substrate processing system and processing liquid supply method
CN106992136B (en) * 2017-04-20 2020-04-07 武汉华星光电技术有限公司 Wet etching equipment and wet etching method
KR102433317B1 (en) * 2017-10-11 2022-08-17 삼성디스플레이 주식회사 Apparatus for wet etchng
CN111006262A (en) * 2019-12-31 2020-04-14 美埃（中国）环境净化有限公司 Washing type oil fume removal purification device and washing control method thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10118583A (en) 1996-10-24 1998-05-12 Nippon Electric Glass Co Ltd Cleaning device for planar matter
JP3550277B2 (en) * 1997-07-24 2004-08-04 大日本スクリーン製造株式会社 Substrate processing equipment
KR100343044B1 (en) * 1997-08-28 2002-10-25 다이닛뽕스크린 세이조오 가부시키가이샤 Substrate Processing Equipment and Processing Method
JP3556110B2 (en) * 1998-12-22 2004-08-18 大日本スクリーン製造株式会社 Substrate processing equipment
JP2001343632A (en) * 2000-06-02 2001-12-14 Sharp Corp Manufacturing method of liquid crystal display element
JP3622842B2 (en) * 2000-12-11 2005-02-23 住友精密工業株式会社 Transport type substrate processing equipment
CN100358115C (en) * 2000-12-12 2007-12-26 住友精密工业株式会社 Oscillating shower transfer type substrate treatment device
JP4180250B2 (en) * 2001-05-30 2008-11-12 東京エレクトロン株式会社 Substrate processing apparatus and substrate processing method

Also Published As

Publication number Publication date
CN1576961A (en) 2005-02-09
KR20050009695A (en) 2005-01-25
JP4421956B2 (en) 2010-02-24
JP2005052825A (en) 2005-03-03
TW200507038A (en) 2005-02-16
CN100419501C (en) 2008-09-17
KR101055247B1 (en) 2011-08-08

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees